WO2020129546A1 - Glass plate warpage measurement device and glass plate manufacturing method - Google Patents

Glass plate warpage measurement device and glass plate manufacturing method Download PDF

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Publication number
WO2020129546A1
WO2020129546A1 PCT/JP2019/046088 JP2019046088W WO2020129546A1 WO 2020129546 A1 WO2020129546 A1 WO 2020129546A1 JP 2019046088 W JP2019046088 W JP 2019046088W WO 2020129546 A1 WO2020129546 A1 WO 2020129546A1
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WO
WIPO (PCT)
Prior art keywords
glass plate
support member
measuring
intermediate support
deflection
Prior art date
Application number
PCT/JP2019/046088
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French (fr)
Japanese (ja)
Inventor
井上 肇
西川 佳範
Original Assignee
日本電気硝子株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 日本電気硝子株式会社 filed Critical 日本電気硝子株式会社
Priority to KR1020217012786A priority Critical patent/KR20210098959A/en
Priority to CN201980080260.5A priority patent/CN113167574B/en
Publication of WO2020129546A1 publication Critical patent/WO2020129546A1/en

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/0002Arrangements for supporting, fixing or guiding the measuring instrument or the object to be measured

Definitions

  • the present invention relates to a glass plate deflection measuring device, and more particularly, to a device that includes two support members that support a glass plate from below and measures the glass plate deflection that occurs between the two support members.
  • the present invention also relates to a method for manufacturing a glass plate using the above measuring device.
  • a glass plate used for a substrate of a thin display device such as a liquid crystal display or an organic EL display or a sensor, or a substrate of a thin film compound solar cell is required to be free from fine defects and scratches.
  • the bending that occurs in the glass plate becomes larger. Therefore, there is a possibility that the glass plate may come into contact with the transportation facility during transportation and may be damaged. Therefore, it is important to measure the bending of the glass plate.
  • the flat glass plate is warped in a convex or concave shape by an external force such as its own weight or a force accompanying holding. Then, the upper ends of the two support members are brought into contact with each other, and the deflection measurement is started.
  • a warp due to an external force causes a deviation or deviation in the support mode of the glass plate (for example, the contact position with the support member or the attitude of the glass plate), and as a result, the measurement at the time of measuring the bending of the glass plate The error may increase. This measurement error is likely to occur due to individual differences among workers because it requires proficiency in the work of placing the glass plate held by a hand or the like on the two support members.
  • the present invention suppresses the occurrence of deviation or deviation in the support mode of the glass plate in the process of placing the glass plate on the support member, and reduces the measurement error when measuring the bending of the glass plate.
  • the task is to do.
  • the present invention which was devised to solve the above-mentioned problems, comprises two main supporting members that support a glass plate from below, and is configured to measure the bending of the glass plate that occurs between the two main supporting members. It is characterized in that an intermediate support member is provided between the two main support members so as to support the glass plate from below and retract it from the glass plate.
  • the intermediate supporting member in the process of placing the glass plate on the two main supporting members, not only these main supporting members support the glass plate from below, but also the intermediate supporting member also supports the glass plate from below. Can be supported. Therefore, when the glass plate is brought into contact with (placed on) the upper ends of the two support members, the warp due to the external force can be reduced or eliminated by the intermediate support member. Then, after the glass plate is supported by the two main supporting members and the intermediate supporting member, if the intermediate supporting member is retracted from the glass plate, the bending of the glass plate caused between the two main supporting members can be measured. it can.
  • an intermediate support elevating means for moving the intermediate support member up and down is provided, and the intermediate support member supports the glass plate from below when the intermediate support member is in an upper position, and the intermediate support member is The intermediate support member may be retracted from the glass plate when the intermediate support member is located below the upper position.
  • the intermediate support member moves up and down by the operation of the intermediate support elevating means, and the intermediate support member takes a state of supporting the glass plate from below and a state of retracting from the glass plate.
  • the structure for allowing the intermediate support member to assume two states is simplified, and the work for switching between the two states is automated, thus improving work efficiency and measurement accuracy.
  • the upper end of the intermediate support member and the upper ends of the two main support members may be held at the same height when the intermediate support member is at the upper end position.
  • the glass plate is kept horizontal without warpage due to external force. Can be kept in a good state. This prevents a situation in which the glass plate slides over the two main supporting members in the initial stage, so that the deviation of the supporting position of the glass plate and the misalignment of the posture are more difficult to occur. Moreover, it is possible to easily recognize how much the glass plate bends from the horizontal state, and it is possible to quickly and accurately know the amount of bending of the glass plate.
  • an image pickup means for picking up an end surface of the glass plate to be measured, an image pickup lifting means for moving the image pickup means up and down, a height measuring means for measuring the height of the image pickup means, Display means for displaying the image captured by the image capturing means.
  • the above-mentioned “end surface to be measured of the glass plate” means an end surface that is curved when the flat glass plate is bent (hereinafter, the same).
  • the imaging means can be moved according to the moved distance. Moreover, since the image taken by the image pickup means is displayed on the display means and the height of the image pickup means can be measured by the height measuring means, the amount of bending of the glass plate can be recognized through the display means and the height measuring means. .. This eliminates the need to use a laser rangefinder or the like, and eliminates the need for careful and troublesome handling. Moreover, the laser range finder and the like are installed in the lower region and the upper region of the glass plate placed on the two main supporting members.
  • the image pickup means, the image pickup elevating means, and the display means can be arranged in the region excluding the lower region and the upper region of the glass plate. Therefore, problems such as interference with the intermediate support member and the glass plate do not occur, and the degree of freedom in layout of these means increases.
  • the stopper for positioning the glass plate in a direction orthogonal to the end surface of the glass plate to be measured, and the stopper for moving the intermediate support member downward from the upper moving end position You may make it provide the stopper drive means to withdraw from a glass plate.
  • the presence of the stopper allows the glass plate to be easily and accurately placed in a flat posture. Thereby, the measurement error at the time of measuring the bending of the glass plate can be further reduced. Moreover, when the intermediate support member moves downward from the upper end position, the stopper retracts from the glass plate accordingly, so that the glass plate slides between the glass plate and the stopper in the process of bending. Etc. does not occur. This avoids the problems such as scratches on the glass plate and the problems that the proper and free bending of the glass plate is obstructed.
  • a scale for positioning the glass plate in a direction parallel to the end surface of the glass plate to be measured may be provided.
  • a main support drive means for moving at least one of the two main support members so that the two main support members approach and separate from each other may be provided.
  • the main supporting drive means may be configured to move the two main supporting members symmetrically on both sides of the central position between them.
  • the center position of the glass plate can be kept constant in the direction parallel to the end surface of the glass plate to be measured. Therefore, it becomes possible to perform the main work of the glass plate mounting work and the bending measurement work under the same conditions regardless of the size of the glass plate.
  • the present invention devised to solve the above problems is a method of manufacturing a glass plate including a preparing step of preparing a glass plate, and a measuring step of measuring the bending of the glass plate, in the measuring step, Deflection is measured using the above-described glass plate deflection measuring device, and the measuring step includes a step of supporting the glass sheet with the two main supporting members and the intermediate supporting member, and retracting the intermediate supporting member. And supporting the glass plate with the two main supporting members.
  • the warp due to the external force can be reduced or eliminated by the intermediate supporting member, and the measurement error during the glass plate bending measurement can be reduced. it can. Therefore, the quality of the manufactured glass plate can be improved.
  • FIG. 3 is a vertical cross-sectional front view taken along line XX of FIG. 2, showing a state where a glass plate is not bent.
  • FIG. 3 is a vertical sectional front view taken along line XX of FIG. 2, showing a state where a glass plate is bent.
  • It is a principal part expanded side view which shows the effect
  • FIG. 1 is a perspective view showing an overall configuration of a glass plate deflection measuring apparatus 1 according to the present embodiment
  • FIG. 2 is a plan view showing a state where a glass sheet G is placed on the deflection measuring apparatus 1. is there.
  • FIG. 3 is a sectional view taken along line XX of FIG.
  • the deflection measuring device 1 includes two main support members 2 that support the glass plate G from below, and measures the deflection of the glass plate G that occurs between the two main support members 2. Composed.
  • the main support member 2 is a flat plate member that is long in the AA direction (hereinafter referred to as the vertical direction) and is held in an upright state.
  • the position in AA direction and the height position of the main support member 2 are always kept constant.
  • the position of the main support member 2 in the BB direction (hereinafter referred to as the horizontal direction) orthogonal to the vertical direction is changed by the main support drive means 3 when the size of the glass plate G is changed. To be done.
  • the main supporting drive means 3 has a drive mechanism 4 for moving the two main supporting members 2 along a straight line, and a guide mechanism 5 for guiding the movement of the two main supporting members 2.
  • the drive mechanism 4 has a single drive shaft 7 extending in the horizontal direction at the center in the vertical direction on the surface plate 6.
  • the drive shaft 7 is rotatably held by a bearing block 8 fixed to the upper surface 6 a of the surface plate 6.
  • the bearing blocks 8 are arranged at a plurality of lateral positions (three positions in the illustrated example).
  • the upper surface 6a of the surface plate 6 forms a horizontal plane. Further, the drive shaft 7 rotates in accordance with the rotation operation of the handle 9 attached to one end portion in the axial direction.
  • the drive shaft 7 has screw portions 7a at two axial positions, one screw portion 7a is formed with a right-hand thread and the other screw portion 7a is formed with a left-hand thread. Then, the nut 10 fixed to one main support member 2 is screwed into one screw portion 7a, and the nut 10 fixed to the other main support member 2 is screwed into the other screw portion 7a. With such a configuration, the feed directions of the two main support members 2 when the handle 9 is rotated in one direction are opposite to each other. Therefore, the two main support members 2 move symmetrically on both sides of the central position between them.
  • the guide mechanism 5 has two rails 11 spaced apart from each other in the longitudinal direction of the drive shaft 7. These rails 11 are fixed on the surface plate 6 so as to be parallel to the drive shaft 7. Further, L-shaped brackets 12 fixed to the two main support members 2 are slidably fitted to these rails 11, respectively. Therefore, when the two main support members 2 move in a straight line by the rotation of the drive shaft 7, the L-shaped bracket 12 also moves integrally on the rail 11.
  • the deflection measuring device 1 includes an intermediate supporting member 13 arranged between the two main supporting members 2.
  • the intermediate support member 13 is a plate member having an L-shaped cross section that is long in the vertical direction, and has an upright portion 13b upright from a bottom portion 13a.
  • the intermediate support member 13 takes a state of supporting the glass plate G from below and a state of being retracted from the glass plate G.
  • the glass plate G is supported from below by the rising portion 13b of the intermediate support member 13.
  • the upright portions 13b are arranged in a central position between the two main support members 2.
  • the intermediate support member 13 moves up and down by the operation of the intermediate support elevating means 14 installed on the surface plate 6.
  • the intermediate support elevating means 14 is composed of a fluid pressure cylinder, particularly an air cylinder.
  • the air cylinder 14 is mounted over the upper surface 6 a of the surface plate 6 and the bottom portion 13 a of the intermediate support member 13. Therefore, the intermediate support member 13 moves up and down as the piston rod of the air cylinder 14 projects and retracts.
  • the deflection measuring device 1 includes a stopper 15 that positions the glass plate G in the vertical direction.
  • the stoppers 15 are assembled to the two main support members 2, respectively.
  • the stopper 15 has a cylindrical shape, and one end face Ga of the glass plate G in the vertical direction can be brought into contact with the peripheral surface of the stopper 15.
  • a box-shaped body 16 is fixed to the inner surface of the main support member 2, and a stopper 15 is held on the box-shaped body 16 so as to be vertically movable.
  • the stopper 15 moves in the vertical direction by the operation of the stopper driving means 17 installed on the main support member 2.
  • the stopper driving means 17 is composed of a fluid pressure cylinder, particularly an air cylinder.
  • the air cylinder 17 is attached to the box-shaped body 16. Therefore, the stopper 15 moves in the vertical direction as the air cylinder 17 projects and retracts.
  • the portion of the stopper 15 that contacts the glass plate G is formed of a wear-resistant organic resin such as a polyimide resin, a phenol resin, a fluororesin, or a polyamideimide resin.
  • the deflection measuring device 1 includes a scale 18 that positions the glass plate G in the lateral direction.
  • the scale 18 is fixed to the upper end portion of the outer surface of the main support member 2 on one side (the right side in each drawing) and extends outward in the lateral direction.
  • a plurality of straight lines 19 for enforcing a plurality of sizes of the glass plate G are engraved.
  • the upper surface of the scale 18 is close to the lower surface of the glass plate G.
  • the glass plate G is Positioned laterally (see Figure 2). Note that this positioning is performed by the operator's visual observation in this embodiment.
  • the deflection measuring device 1 includes an image pickup means 20 for picking up an image of an end face (end face to be measured) Ga on one side in the vertical direction of the glass plate G set on the main support member 2.
  • the image pickup means 20 is composed of cameras, especially a CCD camera.
  • the CCD camera 20 moves up and down by the operation of the image pickup elevating means 21.
  • the CCD camera 20 is mounted on a slider 22 of a digital height gauge 21 installed on the floor or the like. Therefore, in the present embodiment, the imaging elevating means 21 is composed of a digital height gauge.
  • the slider 22 and the CCD camera 20 move up and down as the handle 23 is rotated. The rotation operation of the handle 23 is performed by an operator in this embodiment.
  • the height of the CCD camera 20 is measured by a digital height gauge 21. Therefore, in this embodiment, the digital height gauge 21 also functions as height measuring means for measuring the height of the image pickup means 20. Further, the image captured by the CCD camera 20 is displayed on the display means 24 such as a TV monitor.
  • the intermediate support member 13 moves upward just before and immediately after the glass plate G is placed on the two main support members 2, as shown in FIG. It is at the end position. Therefore, the glass plate G at the time when the mounting work is started is supported from below by not only the main support member 2 but also the intermediate support member 13.
  • the height position of the upper ends of the intermediate support members 13 at this point is the same as the height position of the upper ends of the two main support members 2. Therefore, the glass plate G at this time is supported from below by the main support member 2 and the intermediate support member 13 so as to be in a horizontal state.
  • the glass plate G is placed on each of the support members 2 and 13.
  • the CCD camera 20 images the lowermost edge S of the end surface Ga to be measured, and the imaged image is displayed on the display means 24.
  • FIG. 6A an image of the end surface Ga of the glass plate G and a reference line 25 inserted in the center of the screen are displayed on the screen of the display means 24.
  • the height position of the slider 22 of the height gauge 21 by operating the handle 23, the lowermost edge S of the end face Ga and the reference line 25 are aligned as shown in FIG. 6B.
  • the height position of the slider 22 at this time is set to the first zero point position.
  • the slider 22 is moved downward by operating the handle 23.
  • the CCD camera 20 also moves down.
  • the height position of the slider 22 of the height gauge 21 is adjusted again by operating the handle 23.
  • the lowermost edge S of the end surface Ga of the glass plate G and the reference line 25 are matched.
  • the glass plate G is inverted and placed on each of the support members 2 and 13.
  • the intermediate support member 13 is moved downward in the same manner as described above, and the height position of the slider 22 of the height gauge 21 is adjusted.
  • the lowermost edge S of the end surface Ga of the glass plate G and the reference line 25 are matched.
  • the bending difference of the glass G is obtained from the difference between the bending amount of the front surface and the bending amount of the back surface.
  • the measurement of only the difference in bending of the glass plate G is performed as follows, for example. First, the height position of the slider 22 at the time when the image shown in FIG. 6C is obtained is set as the second zero point position. Then, the intermediate support member 13 and the slider 22 are respectively moved upward and returned to their original positions. Next, the glass plate G is inverted and placed on each of the support members 2 and 13. After that, the intermediate support member 13 is moved down and the slider 22 and the CCD camera 20 are moved down in the same manner as above. Further, the intermediate support member 13 is retracted from the glass plate G.
  • the height position of the slider 22 is adjusted so that the lowermost edge of the end face Ga of the inverted glass plate G and the reference line 25 are aligned again as shown in FIG. 6C.
  • the difference in bending of the glass plate G can be measured.
  • the following work is performed. Be seen.
  • the handle 9 shown in FIG. 1 is rotated in one direction to move the two main support members 2 in directions away from each other. Further, when the size of the glass plate G becomes small, the handle 9 is rotated in the other direction to move the two main support members 2 in the directions approaching each other.
  • the movement stop positions of the two main support members 2 in this case are determined according to a preset rotation angle of the handle 9 or a preset lateral position of the main support member 2.
  • the imaging means 20 and the imaging elevating means 21 are arranged at the central position between the two main support members 2. To be done. Therefore, it is not necessary to change the installation positions of the imaging unit 20 and the imaging lifting unit 21 (the installation positions of the CCD camera 20 and the height gauge 21 in this embodiment). It is not necessary to change the installation position of the display means 24.
  • the standing portions 13b of the intermediate supporting member 13 are arranged at the central positions between the two main supporting members 2 as in the present embodiment, the installation position of the standing portions 13b of the intermediate supporting member 13 need not be changed. I'm done. Further, with respect to the scale 18 shown in FIGS.
  • the horizontal positioning of the glass plate G is performed by matching the newly selected straight line 19 with the end surface Gb on one side in the horizontal direction of the size-changed glass plate G.
  • the size of the glass plate G to be subjected to the flexure measurement by the flexure measuring device 1 is, for example, a lateral dimension of 200 to 600 mm and a longitudinal dimension of 300 to 700 mm.
  • the side along the horizontal direction of the glass plate G is the long side and the side along the vertical direction is the short side, but conversely, the side along the horizontal direction of the glass plate G is the short side.
  • the sides along the vertical direction may be long sides.
  • the plate thickness of these glass plates G is 0.2 to 3.0 mm. Note that these glass plates G are cut into a plurality of sizes according to the physical properties of the glass such as Young's modulus and plate thickness. For example, as the plate thickness of the glass plate G becomes smaller, the size thereof is cut smaller.
  • the main supporting members 2 support the glass plate G from below.
  • the intermediate support member 13 also supports the glass plate G from below.
  • the glass plate G is in a horizontal state due to the presence of the intermediate support member 13 in the initial stage of the process of placing the glass plate G on the two main support members 2. Held in. Therefore, in the initial stage, the glass plate G is prevented from slipping on the two main support members 2 and the like, so that the measurement error in measuring the deflection of the glass plate G can be further reduced.
  • the intermediate support member 13 only moves up and down, and the intermediate support member 13 supports the glass plate G from below and retracts it from the glass plate G. And take. This simplifies the structure of the intermediate support elevating means 14 for causing the intermediate support member 13 to assume two states. Further, the work for switching between these two states is automated by the intermediate supporting elevating means 14 and the work efficiency is improved.
  • the stopper 15 is retracted from the glass plate G in the process of the flexure of the glass plate G, so that the space between the glass plate G and the stopper 15 is increased. No sliding will occur. Therefore, the problem that the glass plate G is scratched is avoided, and the problem that proper and free bending of the glass plate G is obstructed is also avoided.
  • the deflection measuring apparatus 1 the amount of deflection and the difference in deflection are measured using the image pickup means 20, the height gauge 21 (image pickup lifting means and height measuring means), and the display means 24. Therefore, it is not necessary to use a laser range finder that requires careful handling.
  • the laser range finder or the like is installed in the lower region or the upper region of the glass plate G placed on the two main support members 2. When a laser rangefinder or the like is installed in the lower region of the glass plate G, problems such as interference with the intermediate support member 13 may occur.
  • the laser range finder or the like is arranged in the upper region of the glass plate G
  • the image pickup unit 20, the image pickup lift unit 21, and the display unit 24 are arranged in a region excluding the lower region and the upper region of the glass plate G (the region behind the glass plate G). .. Therefore, problems such as interference with the intermediate support member 13 and the glass plate G do not occur, and the degree of freedom in layout of these means 20, 22, 24 increases.
  • the main supporting drive means 3 when changing the size of the glass sheet G, the main supporting drive means 3 separates the two main supporting members 2 from each other at the center position between them. It is configured to move symmetrically on both sides. Therefore, even if the size of the glass plate G is changed, the central position of the glass plate G is kept constant in the direction parallel to the end surface Ga of the glass plate G to be measured. Accordingly, most of the work of placing the glass plate G and the work of measuring the deflection can be performed under the same conditions regardless of the size of the glass plate G.
  • the intermediate support member 13 is moved up and down along the vertical line, but instead of this, the intermediate support member 13 may be moved up and down along the inclined direction. In this case, it is preferable to move the intermediate support member 13 downward at high speed.
  • a fluid pressure cylinder such as an air cylinder is used as the intermediate support elevating means 14 for moving the intermediate support member 13 up and down, but other means such as a ball screw mechanism is used instead. You may.
  • the stopper driving means 17 for moving the stopper 15 in the protruding and retracting directions may be replaced with a fluid pressure cylinder such as an air cylinder, and other means such as a ball screw mechanism may be used.
  • the CCD camera is used as the image pickup unit 20, but other cameras or image sensors may be used instead.
  • the height gauge 21 is used as the imaging elevating means 21 for moving the imaging means 20 up and down, but instead of this, other means such as a fluid pressure cylinder such as an air cylinder or a ball screw mechanism. May be used.
  • a scale or the like may be used as the height measuring means of the image pickup means.
  • the deflection may be measured by displaying a scale line provided at a predetermined interval with respect to the reference line 25 on the display means 24. From the viewpoint of reducing the error and performing the measurement efficiently, it is preferable to use the height gauge 21 as the imaging elevating means and the measuring means.
  • various components are installed on the surface plate 6, but these components may be installed on other bases.
  • the two main support members 2 are configured to be moved in the lateral direction, but one main support member 2 is fixedly installed, and only the other main support member 2 is moved in the lateral direction. It may be configured as follows.
  • the main support member 2 is moved by operating the handle 9, but the main support member 2 may be moved by an electric signal or the like.
  • the main support member 2 is a flat plate-shaped member and the intermediate support member 13 is a member having an L-shaped cross section, but the shape of these support members 2 and 13 is not particularly limited.
  • one intermediate support member 13 is arranged between the two main support members 2, but two or more intermediate support members 13 may be arranged. Further, in the above embodiment, the intermediate support member 13 is arranged at the center position between the two main support members 2, but it may be arranged at a position other than the center position. From the viewpoint of eliminating warpage due to an external force, it is preferable that the adjacent support members (main support member 2 and intermediate support member 13) are arranged so that the intervals between them are equal. It is preferable to arrange them.
  • one main support member 2 is composed of one member, but one main support member 2 may be composed of a plurality of members.
  • one main support member 2 may be vertically expandable and contractable.
  • the intermediate support member 13 may be extendable/contractible in the vertical direction.
  • the work of setting the first zero point position is performed with the glass plate G having the end surface to be measured placed on each of the support members 2 and 13.
  • the glass plate G when the glass plate G is thin, some bending occurs even when the glass plate G is placed on each of the support members 2 and 13, so that it takes time to set the first zero point position. .. Therefore, instead of the glass plate G having the end surface to be measured, a glass plate thicker than the glass plate G having the end surface to be measured, a straight edge (straight ruler), or the like is placed on each of the support members 2 and 13. In this state, the work of setting the first zero point position may be performed.
  • the glass plate G having the end surface to be measured is placed on each of the support members 2 and 13 to measure the amount of bending and the bending difference. Good. Thereby, even if the glass plate G is thin, the measurement work can be efficiently performed.
  • the manufacturing method of the present embodiment includes a preparation step of preparing a glass plate and a measurement step of measuring the bending of the glass plate.
  • the preparation step is, for example, a forming step of forming a glass ribbon from the molten glass by an overflow method or a float method, a cutting step of cutting out a glass plate from the glass ribbon, and a processing step of processing the end face of the cut out glass plate with a grindstone
  • the method includes a step of cleaning the glass plate whose end face is processed, and a sampling step of sampling a part of the glass plate.
  • the glass plate that has been subjected to the cutting step may be collected, or the glass plate that has been subjected to the cleaning step may be collected.
  • the cutting step may include a first cutting step of cutting a glass plate from the glass ribbon, and a second cutting step of cutting one or more glass plates from the glass plate that has gone through the first cutting step, in this case, In the collecting step, the glass plate that has undergone the first cutting step may be collected.
  • the measuring step the bending is measured using the above-described glass plate bending measuring device 1.
  • the measurement step includes, for example, a sample preparation step of cutting out a glass plate of a sample of a predetermined size from the collected glass plate, a support step of supporting the glass plate of the sample with two main support members 2 and an intermediate support member 13, And a retracting step of retracting the intermediate supporting member 13 and supporting the sample glass plate only by the two main supporting members 2.
  • the measurement step may be performed by the procedure described in the above-mentioned deflection measurement.
  • the manufacturing method according to the present embodiment since the above-described glass plate bending measuring device 1 is used, it is possible to reduce the measurement error when measuring the bending of the sampled glass plate. Therefore, the quality of the manufactured glass plate can be improved.

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  • Length Measuring Devices By Optical Means (AREA)

Abstract

This invention comprises two main support members 2 for supporting a glass plate G from below and measures the warpage of the glass plate G between the two main support members 2. An intermediate support member 13 is disposed between the two main support members 2 and switches between supporting the glass plate G from below and being removed from the glass plate G.

Description

ガラス板の撓み測定装置及びガラス板の製造方法Glass plate deflection measuring device and glass plate manufacturing method
 本発明は、ガラス板の撓み測定装置に係り、詳しくは、ガラス板を下方から支持する二つの支持部材を備え、該二つの支持部材間に生じるガラス板の撓みを測定する装置に関する。また、本発明は、上記測定装置を用いるガラス板の製造方法に関する。 The present invention relates to a glass plate deflection measuring device, and more particularly, to a device that includes two support members that support a glass plate from below and measures the glass plate deflection that occurs between the two support members. The present invention also relates to a method for manufacturing a glass plate using the above measuring device.
 周知のように、液晶ディスプレイ、有機ELディスプレイ等の薄型表示機器やセンサの基板、あるいは薄膜化合物太陽電池の基板等に使用されるガラス板は、微細な欠陥や傷等が存在しないことが要求される。 As is well known, a glass plate used for a substrate of a thin display device such as a liquid crystal display or an organic EL display or a sensor, or a substrate of a thin film compound solar cell is required to be free from fine defects and scratches. It
 しかし、ガラス板の大板化や薄肉化が推進されている現状においては、ガラス板に生じる撓みが大きくなる。そのため、搬送中にガラス板が搬送設備と接触して傷が付く等の問題を招くおそれがある。そこで、ガラス板に生じる撓みを測定することが重要視されている。 However, under the present circumstances where the glass plate is being made larger and thinner, the bending that occurs in the glass plate becomes larger. Therefore, there is a possibility that the glass plate may come into contact with the transportation facility during transportation and may be damaged. Therefore, it is important to measure the bending of the glass plate.
 ガラス板の撓みの測定手法の一例として、ガラス板を下方から支持する二つの支持部材を備え、この二つの支持部材間に生じるガラス板の撓みを測定することが行われている(例えば、特許文献1参照)。 As an example of a method for measuring the bending of a glass plate, two supporting members that support the glass plate from below are provided, and the bending of the glass plate that occurs between the two supporting members is measured (for example, a patent document). Reference 1).
特開2009‐117301号公報JP, 2009-117301, A
 しかしながら、上記のように二つの支持部材によりガラス板を下方から支持してガラス板の撓みを測定する手法によれば、測定の前段階においてガラス板を二つの支持部材上に載置する過程で、以下に示すような問題が生じる。 However, as described above, according to the method of supporting the glass plate from below by the two supporting members and measuring the bending of the glass plate, in the process of placing the glass plate on the two supporting members in the pre-measurement step. However, the following problems occur.
 すなわち、手等で保持されたガラス板を二つの支持部材上に載置して測定する際には、平面状のガラス板が自重や保持に伴う力といった外力により凸状又は凹状に反った状態で二つの支持部材の上端に接触し、撓み測定が開始される。この場合、外力による反りが原因となってガラス板の支持態様(例えば支持部材との接触位置やガラス板の姿勢等)にずれや狂い等が生じ、その結果、ガラス板の撓み測定時における測定誤差が大きくなるおそれがある。この測定誤差は、手等で保持されたガラス板を二つの支持部材上に載置する作業に習熟が必要であることから、作業者の個人差によって生じやすい。 That is, when the glass plate held by a hand or the like is placed on the two supporting members for measurement, the flat glass plate is warped in a convex or concave shape by an external force such as its own weight or a force accompanying holding. Then, the upper ends of the two support members are brought into contact with each other, and the deflection measurement is started. In this case, a warp due to an external force causes a deviation or deviation in the support mode of the glass plate (for example, the contact position with the support member or the attitude of the glass plate), and as a result, the measurement at the time of measuring the bending of the glass plate The error may increase. This measurement error is likely to occur due to individual differences among workers because it requires proficiency in the work of placing the glass plate held by a hand or the like on the two support members.
 以上の観点から、本発明は、ガラス板を支持部材上に載置する過程でガラス板の支持態様にずれや狂い等が生じることを抑止して、ガラス板の撓み測定時における測定誤差を小さくすることを課題とする。 From the above point of view, the present invention suppresses the occurrence of deviation or deviation in the support mode of the glass plate in the process of placing the glass plate on the support member, and reduces the measurement error when measuring the bending of the glass plate. The task is to do.
 上記課題を解決するために創案された本発明は、ガラス板を下方から支持する二つの主支持部材を備え、該二つの主支持部材間に生じる前記ガラス板の撓みを測定するように構成し、前記二つの主支持部材間に、前記ガラス板を下方から支持する状態と前記ガラス板から退避した状態とを取る中間支持部材を配置したことに特徴づけられる。 The present invention, which was devised to solve the above-mentioned problems, comprises two main supporting members that support a glass plate from below, and is configured to measure the bending of the glass plate that occurs between the two main supporting members. It is characterized in that an intermediate support member is provided between the two main support members so as to support the glass plate from below and retract it from the glass plate.
 このような構成によれば、ガラス板を二つの主支持部材上に載置する過程では、これらの主支持部材がガラス板を下方から支持するだけでなく、中間支持部材もガラス板を下方から支持することができる。したがって、ガラス板を二つの支持部材の上端に接触(載置)させる際には、外力による反りを中間支持部材によって小さくし或いは無くすことができる。そして、ガラス板を二つの主支持部材と中間支持部材とによって支持させた後、中間支持部材をガラス板から退避させれば、二つの主支持部材間に生じるガラス板の撓みを測定することができる。これにより、ガラス板を二つの主支持部材上に載置する過程で、ガラス板の支持態様にずれや狂い等が生じ難くなり、ガラス板の撓み測定時における測定誤差を小さくすることができる。また、手等で保持されたガラス板を二つの主支持部材及び中間支持部材に載置する作業は、習熟していない作業者でも容易に行うことができ、個人差による測定誤差も小さくすることができる。 According to such a configuration, in the process of placing the glass plate on the two main supporting members, not only these main supporting members support the glass plate from below, but also the intermediate supporting member also supports the glass plate from below. Can be supported. Therefore, when the glass plate is brought into contact with (placed on) the upper ends of the two support members, the warp due to the external force can be reduced or eliminated by the intermediate support member. Then, after the glass plate is supported by the two main supporting members and the intermediate supporting member, if the intermediate supporting member is retracted from the glass plate, the bending of the glass plate caused between the two main supporting members can be measured. it can. As a result, in the process of placing the glass plate on the two main supporting members, it becomes difficult for the glass plate to be supported or displaced in deviation, and the measurement error during the bending measurement of the glass plate can be reduced. Also, the work of placing the glass plate held by hand on the two main support members and the intermediate support member can be easily performed by an unskilled worker, and the measurement error due to individual differences should be small. You can
 以上の構成において、前記中間支持部材を上下動させる中間支持用昇降手段を備え、該中間支持部材が上方位置にある時に該中間支持部材が前記ガラス板を下方から支持し、該中間支持部材が前記上方位置よりも下方位置にある時に該中間支持部材が前記ガラス板から退避するように構成してもよい。 In the above-mentioned structure, an intermediate support elevating means for moving the intermediate support member up and down is provided, and the intermediate support member supports the glass plate from below when the intermediate support member is in an upper position, and the intermediate support member is The intermediate support member may be retracted from the glass plate when the intermediate support member is located below the upper position.
 このようにすれば、中間支持用昇降手段の動作により中間支持部材が上下動するだけで、中間支持部材は、ガラス板を下方から支持する状態と、ガラス板から退避した状態とを取る。これにより、中間支持部材に二つの状態を取らせるための構成が簡素になると共に、二つの状態を切り換えるための作業が自動化されて作業効率及び測定精度が向上する。 In this way, the intermediate support member moves up and down by the operation of the intermediate support elevating means, and the intermediate support member takes a state of supporting the glass plate from below and a state of retracting from the glass plate. As a result, the structure for allowing the intermediate support member to assume two states is simplified, and the work for switching between the two states is automated, thus improving work efficiency and measurement accuracy.
 以上の構成において、前記中間支持部材が上動端位置にある時に、該中間支持部材の上端と前記二つの主支持部材の上端とが同一高さに保持されるようにしてもよい。 In the above configuration, the upper end of the intermediate support member and the upper ends of the two main support members may be held at the same height when the intermediate support member is at the upper end position.
 このようにすれば、ガラス板を二つの主支持部材上に載置する過程の初期段階で、中間支持部材を上動端位置に上昇させておくことで、ガラス板を外力による反りの無い水平な状態に保持することができる。これにより、当該初期段階で、ガラス板が二つの主支持部材上を滑る等の事態が阻止され、ガラス板の支持位置のずれや姿勢の狂いがより一層生じ難くなる。しかも、ガラス板が水平な状態からどれだけ撓むかを容易に認識することができ、ガラス板の撓み量を迅速且つ正確に知得することができる。 In this way, by raising the intermediate support member to the upper end position in the initial stage of the process of placing the glass plate on the two main support members, the glass plate is kept horizontal without warpage due to external force. Can be kept in a good state. This prevents a situation in which the glass plate slides over the two main supporting members in the initial stage, so that the deviation of the supporting position of the glass plate and the misalignment of the posture are more difficult to occur. Moreover, it is possible to easily recognize how much the glass plate bends from the horizontal state, and it is possible to quickly and accurately know the amount of bending of the glass plate.
 以上の構成において、前記ガラス板の測定対象となる端面を撮像する撮像手段と、該撮像手段を上下動させる撮像用昇降手段と、前記撮像手段の高さを測定する高さ測定手段と、前記撮像手段が撮像した画像を表示する表示手段とを備えるようにしてもよい。ここで、上記の「ガラス板の測定対象となる端面」とは、平板状のガラス板が撓んだ場合に湾曲した形態になる端面のことを意味している(以下、同様)。 In the above configuration, an image pickup means for picking up an end surface of the glass plate to be measured, an image pickup lifting means for moving the image pickup means up and down, a height measuring means for measuring the height of the image pickup means, Display means for displaying the image captured by the image capturing means may be provided. Here, the above-mentioned “end surface to be measured of the glass plate” means an end surface that is curved when the flat glass plate is bent (hereinafter, the same).
 このようにすれば、中間支持部材の下動に伴ってガラス板の測定すべき端面が移動した場合には、その移動した距離に応じて撮像手段を移動させることができる。しかも、撮像手段が撮像した画像が表示手段に表示されると共に高さ測定手段によって撮像手段の高さを測定できるため、表示手段と高さ測定手段を通じてガラス板の撓み量を認識することができる。これにより、レーザー距離計等を使用する必要性がなくなり、注意を要する面倒且つ煩雑な取り扱いが不要になる。しかも、レーザー距離計等は、二つの主支持部材上に載置された状態にあるガラス板の下方領域や上方領域に設置されるものである。ここで、レーザー距離計等を当該ガラス板の下方領域に設置した場合には、中間支持部材との干渉等の問題が生じ得る。また、レーザー距離計等を、当該ガラス板の上方領域に配置した場合には、二つの主支持部材上にガラス板を移動させる際に、ガラス板との干渉等の問題が生じ得る。しかし、本発明に係る上記の構成によれば、撮像手段、撮像用昇降手段、及び表示手段を、ガラス板の下方領域及び上方領域を除外した領域に配置することができる。そのため、中間支持部材及びガラス板との干渉等の問題が生じなくなり、これらの手段のレイアウトの自由度が大きくなる。 With this configuration, when the end surface of the glass plate to be measured moves due to the downward movement of the intermediate support member, the imaging means can be moved according to the moved distance. Moreover, since the image taken by the image pickup means is displayed on the display means and the height of the image pickup means can be measured by the height measuring means, the amount of bending of the glass plate can be recognized through the display means and the height measuring means. .. This eliminates the need to use a laser rangefinder or the like, and eliminates the need for careful and troublesome handling. Moreover, the laser range finder and the like are installed in the lower region and the upper region of the glass plate placed on the two main supporting members. Here, when a laser range finder or the like is installed in the lower region of the glass plate, problems such as interference with the intermediate support member may occur. Further, when the laser rangefinder or the like is arranged in the upper region of the glass plate, a problem such as interference with the glass plate may occur when the glass plate is moved onto the two main supporting members. However, according to the above configuration of the present invention, the image pickup means, the image pickup elevating means, and the display means can be arranged in the region excluding the lower region and the upper region of the glass plate. Therefore, problems such as interference with the intermediate support member and the glass plate do not occur, and the degree of freedom in layout of these means increases.
 以上の構成において、前記ガラス板の測定対象となる端面と直交する方向に対して前記ガラス板を位置決めするストッパと、前記中間支持部材の上動端位置からの下動に伴って前記ストッパを前記ガラス板から退避させるストッパ駆動手段とを備えるようにしてもよい。 In the above configuration, the stopper for positioning the glass plate in a direction orthogonal to the end surface of the glass plate to be measured, and the stopper for moving the intermediate support member downward from the upper moving end position You may make it provide the stopper drive means to withdraw from a glass plate.
 このようにすれば、ガラス板を二つの支持部材上に載置する過程では、ストッパの存在によって、ガラス板を平置き姿勢で容易に且つ正確に載置することができる。これにより、ガラス板の撓み測定時における測定誤差をより一層小さくすることができる。しかも、中間支持部材が上動端位置から下動する際には、これに伴ってストッパがガラス板から退避するため、ガラス板が撓んでいく過程で、ガラス板とストッパとの間に摺動等が生じない。これにより、ガラス板に傷が付く等の問題や、ガラス板の適正且つ自由な撓みが阻害される等の問題が回避される。 By doing this, in the process of placing the glass plate on the two support members, the presence of the stopper allows the glass plate to be easily and accurately placed in a flat posture. Thereby, the measurement error at the time of measuring the bending of the glass plate can be further reduced. Moreover, when the intermediate support member moves downward from the upper end position, the stopper retracts from the glass plate accordingly, so that the glass plate slides between the glass plate and the stopper in the process of bending. Etc. does not occur. This avoids the problems such as scratches on the glass plate and the problems that the proper and free bending of the glass plate is obstructed.
 この場合、前記ガラス板の測定対象となる端面と平行な方向に対して前記ガラス板を位置決めするスケールを備えるようにしてもよい。 In this case, a scale for positioning the glass plate in a direction parallel to the end surface of the glass plate to be measured may be provided.
 このようにすれば、ガラス板を二つの支持部材上に載置する過程で、ガラス板が一の方向に対してストッパにより位置決めされるだけでなく、該一の方向と直交する方向に対してもスケールを用いて位置決めが行われる。これにより、ガラス板の撓み測定時における測定誤差をより一層確実に小さくすることができる。 With this configuration, in the process of placing the glass plate on the two support members, not only the glass plate is positioned by the stopper in one direction, but also in the direction orthogonal to the one direction. Is also positioned using the scale. This makes it possible to more reliably reduce the measurement error when measuring the deflection of the glass plate.
 以上の構成において、前記二つの主支持部材が接近及び離反するように該二つの主支持部材の少なくとも一方を移動させる主支持用駆動手段を備えるようにしてもよい。 In the above configuration, a main support drive means for moving at least one of the two main support members so that the two main support members approach and separate from each other may be provided.
 このようにすれば、種々のサイズのガラス板について、サイズの大小に関わらず、適切に撓み測定を行うことが可能となる。 By doing this, it is possible to appropriately measure the deflection of glass plates of various sizes, regardless of their size.
 この場合、前記主支持用駆動手段は、前記二つの主支持部材をそれらの相互間中央位置を境にしてその両側で対称に移動させるように構成してもよい。 In this case, the main supporting drive means may be configured to move the two main supporting members symmetrically on both sides of the central position between them.
 このようにすれば、ガラス板のサイズが変更されても、ガラス板の測定対象となる端面と平行な方向に対しては、ガラス板の中央位置を一定に維持しておくことができる。そのため、ガラス板の載置作業や撓み測定作業のうちの主要な作業を、ガラス板のサイズの大小に関わらず同一条件で行うことが可能となる。 By doing this, even if the size of the glass plate is changed, the center position of the glass plate can be kept constant in the direction parallel to the end surface of the glass plate to be measured. Therefore, it becomes possible to perform the main work of the glass plate mounting work and the bending measurement work under the same conditions regardless of the size of the glass plate.
 上記課題を解決するために創案された本発明は、ガラス板を準備する準備工程と、前記ガラス板の撓みを測定する測定工程とを備えるガラス板の製造方法であって、前記測定工程で、上述のガラス板の撓み測定装置を用いて撓みを測定し、前記測定工程は、前記二つの主支持部材と、前記中間支持部材とで前記ガラス板を支持する工程と、前記中間支持部材を退避させ、前記二つの主支持部材で前記ガラス板を支持する工程とを備えることに特徴づけられる。 The present invention devised to solve the above problems is a method of manufacturing a glass plate including a preparing step of preparing a glass plate, and a measuring step of measuring the bending of the glass plate, in the measuring step, Deflection is measured using the above-described glass plate deflection measuring device, and the measuring step includes a step of supporting the glass sheet with the two main supporting members and the intermediate supporting member, and retracting the intermediate supporting member. And supporting the glass plate with the two main supporting members.
 このような構成によれば、上述のガラス板の撓み測定装置と同様に、外力による反りを中間支持部材によって小さくし或いは無くすことができ、ガラス板の撓み測定時における測定誤差を小さくすることができる。このため、製造されるガラス板の品質を向上させることができる。 According to such a configuration, similarly to the above-described glass plate bending measuring device, the warp due to the external force can be reduced or eliminated by the intermediate supporting member, and the measurement error during the glass plate bending measurement can be reduced. it can. Therefore, the quality of the manufactured glass plate can be improved.
 本発明によれば、ガラス板を二つの主支持部材上に載置する過程でガラス板の支持態様にずれや狂い等が生じ難くなり、ガラス板の撓み測定時における測定誤差を小さくすることができる。 ADVANTAGE OF THE INVENTION According to this invention, in the process of mounting a glass plate on two main support members, it becomes difficult to generate|occur|produce a shift|offset|difference, a deviation, etc. in the support mode of a glass plate, and can reduce the measurement error at the time of bending measurement of a glass plate. it can.
本発明の実施形態に係るガラス板の撓み測定装置の全体構成を示す斜視図である。It is a perspective view showing the whole composition of the bending measuring device of the glass board concerning the embodiment of the present invention. 本発明の実施形態に係るガラス板の撓み測定装置の全体構成を示す平面図である。It is a top view which shows the whole structure of the bending measuring apparatus of the glass plate which concerns on embodiment of this invention. 図2のX-X線にしたがって切断した縦断正面図であって、ガラス板に撓みが生じていない状態を示す図である。FIG. 3 is a vertical cross-sectional front view taken along line XX of FIG. 2, showing a state where a glass plate is not bent. 図2のX-X線にしたがって切断した縦断正面図であって、ガラス板に撓みが生じている状態を示す図である。FIG. 3 is a vertical sectional front view taken along line XX of FIG. 2, showing a state where a glass plate is bent. 本発明の実施形態に係るガラス板の撓み測定装置の作用を示す要部拡大側面図である。It is a principal part expanded side view which shows the effect|action of the deflection measuring apparatus of the glass plate which concerns on embodiment of this invention. 本発明の実施形態に係るガラス板の撓み測定装置の構成要素である表示手段の画面を示す概略正面図である。It is a schematic front view which shows the screen of the display means which is a component of the bending|flexion measuring apparatus of the glass plate which concerns on embodiment of this invention. 本発明の実施形態に係るガラス板の撓み測定装置の構成要素である表示手段の画面を示す概略正面図である。It is a schematic front view which shows the screen of the display means which is a component of the bending|flexion measuring apparatus of the glass plate which concerns on embodiment of this invention. 本発明の実施形態に係るガラス板の撓み測定装置の構成要素である表示手段の画面を示す概略正面図である。It is a schematic front view which shows the screen of the display means which is a component of the bending|flexion measuring apparatus of the glass plate which concerns on embodiment of this invention.
 以下、本発明の実施形態に係るガラス板の撓み測定装置について添付図面を参照しつつ説明する。 A glass plate deflection measuring device according to an embodiment of the present invention will be described below with reference to the accompanying drawings.
(装置構成)
 図1は、本実施形態に係るガラス板の撓み測定装置1の全体構成を示す斜視図であり、図2は、当該撓み測定装置1にガラス板Gが載置された状態を示す平面図である。また、図3は、図2のX-X線断面図である。これら各図に示すように、撓み測定装置1は、ガラス板Gを下方から支持する二つの主支持部材2を備え、二つの主支持部材2間に生じるガラス板Gの撓みを測定するように構成される。主支持部材2は、A-A方向(以下、縦方向という)に長尺な平板状の部材であり、起立した状態に保持されている。主支持部材2のA-A方向の位置及び高さ位置は、常時一定に維持される。これに対して、主支持部材2の縦方向と直交するB-B方向(以下、横方向という)の位置は、ガラス板Gのサイズが変更される場合に、主支持用駆動手段3によって変更される。
(Device configuration)
FIG. 1 is a perspective view showing an overall configuration of a glass plate deflection measuring apparatus 1 according to the present embodiment, and FIG. 2 is a plan view showing a state where a glass sheet G is placed on the deflection measuring apparatus 1. is there. FIG. 3 is a sectional view taken along line XX of FIG. As shown in these drawings, the deflection measuring device 1 includes two main support members 2 that support the glass plate G from below, and measures the deflection of the glass plate G that occurs between the two main support members 2. Composed. The main support member 2 is a flat plate member that is long in the AA direction (hereinafter referred to as the vertical direction) and is held in an upright state. The position in AA direction and the height position of the main support member 2 are always kept constant. On the other hand, the position of the main support member 2 in the BB direction (hereinafter referred to as the horizontal direction) orthogonal to the vertical direction is changed by the main support drive means 3 when the size of the glass plate G is changed. To be done.
 主支持用駆動手段3は、二つの主支持部材2を一直線上に沿って移動させる駆動機構4と、この二つの主支持部材2の移動を案内するガイド機構5とを有する。駆動機構4は、定盤6上における縦方向の中央部を横方向に延びる一本の駆動軸7を有する。駆動軸7は、定盤6の上面6aに固設された軸受ブロック8によって回転可能に保持されている。軸受ブロック8は、横方向の複数箇所(図例では三箇所)に配設されている。なお、定盤6の上面6aは水平面をなす。また、駆動軸7は、軸方向の一端部に装着されたハンドル9の回転操作に伴って回転する。さらに、駆動軸7は、軸方向の二箇所にねじ部7aを有し、一方のねじ部7aに右ねじが形成され且つ他方のねじ部7aに左ねじが形成されている。そして、一方の主支持部材2に固定されたナット10が一方のねじ部7aに螺合し、他方の主支持部材2に固定されたナット10が他方のねじ部7aに螺合している。このような構成であれば、ハンドル9を一方向に回転させた場合における二つの主支持部材2の送り方向が互いに逆になる。したがって、二つの主支持部材2は、相互間の中央位置を境にしてその両側で対称に移動する。 The main supporting drive means 3 has a drive mechanism 4 for moving the two main supporting members 2 along a straight line, and a guide mechanism 5 for guiding the movement of the two main supporting members 2. The drive mechanism 4 has a single drive shaft 7 extending in the horizontal direction at the center in the vertical direction on the surface plate 6. The drive shaft 7 is rotatably held by a bearing block 8 fixed to the upper surface 6 a of the surface plate 6. The bearing blocks 8 are arranged at a plurality of lateral positions (three positions in the illustrated example). The upper surface 6a of the surface plate 6 forms a horizontal plane. Further, the drive shaft 7 rotates in accordance with the rotation operation of the handle 9 attached to one end portion in the axial direction. Further, the drive shaft 7 has screw portions 7a at two axial positions, one screw portion 7a is formed with a right-hand thread and the other screw portion 7a is formed with a left-hand thread. Then, the nut 10 fixed to one main support member 2 is screwed into one screw portion 7a, and the nut 10 fixed to the other main support member 2 is screwed into the other screw portion 7a. With such a configuration, the feed directions of the two main support members 2 when the handle 9 is rotated in one direction are opposite to each other. Therefore, the two main support members 2 move symmetrically on both sides of the central position between them.
 ガイド機構5は、駆動軸7の縦方向両側に離間して配置された二本のレール11を有する。これらのレール11は、駆動軸7と平行になるように定盤6上に固設されている。また、これらのレール11には、二つの主支持部材2にそれぞれ固設されたL字形ブラケット12が摺動可能に嵌合している。したがって、二つの主支持部材2が駆動軸7の回転により一直線上に移動する際には、L字形ブラケット12も一体となってレール11上を移動する。 The guide mechanism 5 has two rails 11 spaced apart from each other in the longitudinal direction of the drive shaft 7. These rails 11 are fixed on the surface plate 6 so as to be parallel to the drive shaft 7. Further, L-shaped brackets 12 fixed to the two main support members 2 are slidably fitted to these rails 11, respectively. Therefore, when the two main support members 2 move in a straight line by the rotation of the drive shaft 7, the L-shaped bracket 12 also moves integrally on the rail 11.
 さらに、撓み測定装置1は、二つの主支持部材2間に配置された中間支持部材13を備える。中間支持部材13は、縦方向に長尺な断面L字形の板材であり、底部13aから起立する起立部13bを有している。ガラス板Gが二つの主支持部材2によって下方から支持されている場合、中間支持部材13は、ガラス板Gを下方から支持する状態と、ガラス板Gから退避した状態とを取る。詳しくは、ガラス板Gは、中間支持部材13の起立部13bによって下方から支持される。この起立部13bは、二つの主支持部材2の相互間の中央位置に配列される。 Further, the deflection measuring device 1 includes an intermediate supporting member 13 arranged between the two main supporting members 2. The intermediate support member 13 is a plate member having an L-shaped cross section that is long in the vertical direction, and has an upright portion 13b upright from a bottom portion 13a. When the glass plate G is supported from below by the two main support members 2, the intermediate support member 13 takes a state of supporting the glass plate G from below and a state of being retracted from the glass plate G. Specifically, the glass plate G is supported from below by the rising portion 13b of the intermediate support member 13. The upright portions 13b are arranged in a central position between the two main support members 2.
 中間支持部材13の縦方向位置及び横方向位置は、常時一定に維持される。これに対して、中間支持部材13の高さ位置は可変とされている。詳しくは、中間支持部材13は、定盤6上に設置された中間支持用昇降手段14の動作によって上下動する。本実施形態では、中間支持用昇降手段14は、流体圧シリンダ、特に、エアシリンダで構成される。このエアシリンダ14は、定盤6の上面6aと中間支持部材13の底部13aとに跨って組み付けられている。したがって、中間支持部材13は、エアシリンダ14のピストンロッドの突出動及び後退動に伴って上下動する。 The vertical position and the horizontal position of the intermediate support member 13 are always kept constant. On the other hand, the height position of the intermediate support member 13 is variable. More specifically, the intermediate support member 13 moves up and down by the operation of the intermediate support elevating means 14 installed on the surface plate 6. In the present embodiment, the intermediate support elevating means 14 is composed of a fluid pressure cylinder, particularly an air cylinder. The air cylinder 14 is mounted over the upper surface 6 a of the surface plate 6 and the bottom portion 13 a of the intermediate support member 13. Therefore, the intermediate support member 13 moves up and down as the piston rod of the air cylinder 14 projects and retracts.
 なお、主支持部材2の上端におけるガラス板Gが接触する部位、及び、中間支持部材13(起立部13b)の上端におけるガラス板Gが接触する部位は、何れも、ガラスとの摩擦が小さい特性を有する材質、例えば、ポリイミド樹脂、アルミニウム合金(例えばAl-Mg系合金のA5052P)、フッ素樹脂などで形成される。 It should be noted that both the portion of the upper end of the main support member 2 that comes into contact with the glass plate G and the portion of the upper end of the intermediate support member 13 (the upright portion 13b) that comes into contact with the glass plate G both have low friction with glass. Is formed of, for example, a polyimide resin, an aluminum alloy (for example, A5052P of Al—Mg alloy), a fluororesin, or the like.
 撓み測定装置1は、ガラス板Gを縦方向に対して位置決めするストッパ15を備える。本実施形態では、ストッパ15は、二つの主支持部材2にそれぞれ組み付けられている。詳しくは、ストッパ15は、円柱状をなし、その周面にガラス板Gの縦方向の一方の端面Gaが当接可能とされる。さらに、主支持部材2の内側面には箱状体16が固定され、この箱状体16にストッパ15が縦方向に移動可能に保持されている。ストッパ15は、主支持部材2に設置されたストッパ駆動手段17の動作によって縦方向に移動する。本実施形態では、ストッパ駆動手段17は、流体圧シリンダ、特に、エアシリンダで構成される。このエアシリンダ17は、箱状体16に組み付けられている。したがって、ストッパ15は、エアシリンダ17の突出動及び後退動に伴って縦方向に移動する。なお、ストッパ15のガラス板Gが当接する部位は、耐摩耗性のある有機樹脂、例えば、ポリイミド樹脂、フェノール樹脂、フッ素樹脂、ポリアミドイミド樹脂などで形成される。 The deflection measuring device 1 includes a stopper 15 that positions the glass plate G in the vertical direction. In this embodiment, the stoppers 15 are assembled to the two main support members 2, respectively. Specifically, the stopper 15 has a cylindrical shape, and one end face Ga of the glass plate G in the vertical direction can be brought into contact with the peripheral surface of the stopper 15. Further, a box-shaped body 16 is fixed to the inner surface of the main support member 2, and a stopper 15 is held on the box-shaped body 16 so as to be vertically movable. The stopper 15 moves in the vertical direction by the operation of the stopper driving means 17 installed on the main support member 2. In this embodiment, the stopper driving means 17 is composed of a fluid pressure cylinder, particularly an air cylinder. The air cylinder 17 is attached to the box-shaped body 16. Therefore, the stopper 15 moves in the vertical direction as the air cylinder 17 projects and retracts. The portion of the stopper 15 that contacts the glass plate G is formed of a wear-resistant organic resin such as a polyimide resin, a phenol resin, a fluororesin, or a polyamideimide resin.
 さらに、撓み測定装置1は、ガラス板Gを横方向に対して位置決めするスケール18を備えている。本実施形態では、スケール18は、一方側(同各図の右側)の主支持部材2の外側面の上端部に固設され、横方向の外側に向かって延びている。このスケール18の上面には、ガラス板Gの複数のサイズに応じるための複数の直線19が刻まれている。スケール18の上面は、ガラス板Gの下面に近接している。そして、ガラス板Gの横方向の一方側(同各図の右側)の端面Gbを、ガラス板Gのサイズに応じて決まる何れかの直線19に平面視で合致させることによって、ガラス板Gが横方向に位置決めされる(図2参照)。なお、この位置決めは、本実施形態では、作業者の目視によって行われる。 Further, the deflection measuring device 1 includes a scale 18 that positions the glass plate G in the lateral direction. In the present embodiment, the scale 18 is fixed to the upper end portion of the outer surface of the main support member 2 on one side (the right side in each drawing) and extends outward in the lateral direction. On the upper surface of the scale 18, a plurality of straight lines 19 for enforcing a plurality of sizes of the glass plate G are engraved. The upper surface of the scale 18 is close to the lower surface of the glass plate G. Then, by making the end face Gb on the one side (the right side of each drawing) of the glass plate G in the lateral direction match any straight line 19 determined according to the size of the glass plate G in plan view, the glass plate G is Positioned laterally (see Figure 2). Note that this positioning is performed by the operator's visual observation in this embodiment.
 また、撓み測定装置1は、主支持部材2上にセットされた状態にあるガラス板Gの縦方向の一方側の端面(測定対象となる端面)Gaを撮像する撮像手段20を備える。本実施形態では、撮像手段20は、カメラ類、特に、CCDカメラで構成される。CCDカメラ20は、撮像用昇降手段21の動作によって上下動する。具体的には、CCDカメラ20は、床面上等に設置されたデジタル式ハイトゲージ21のスライダ22に装着されている。したがって、本実施形態では、撮像用昇降手段21がデジタル式ハイトゲージで構成される。スライダ22及びCCDカメラ20は、ハンドル23の回転操作に伴って上下動する。このハンドル23の回転操作は、本実施形態では、作業者によって行われる。CCDカメラ20の高さは、デジタル式ハイトゲージ21によって測定される。したがって、本実施形態では、デジタル式ハイトゲージ21が撮像手段20の高さを測定する高さ測定手段としても機能する。さらに、CCDカメラ20によって撮像された画像は、TVモニタ等の表示手段24に表示される。 Further, the deflection measuring device 1 includes an image pickup means 20 for picking up an image of an end face (end face to be measured) Ga on one side in the vertical direction of the glass plate G set on the main support member 2. In the present embodiment, the image pickup means 20 is composed of cameras, especially a CCD camera. The CCD camera 20 moves up and down by the operation of the image pickup elevating means 21. Specifically, the CCD camera 20 is mounted on a slider 22 of a digital height gauge 21 installed on the floor or the like. Therefore, in the present embodiment, the imaging elevating means 21 is composed of a digital height gauge. The slider 22 and the CCD camera 20 move up and down as the handle 23 is rotated. The rotation operation of the handle 23 is performed by an operator in this embodiment. The height of the CCD camera 20 is measured by a digital height gauge 21. Therefore, in this embodiment, the digital height gauge 21 also functions as height measuring means for measuring the height of the image pickup means 20. Further, the image captured by the CCD camera 20 is displayed on the display means 24 such as a TV monitor.
(撓み測定)
 以上の構成を備えた撓み測定装置1によれば、ガラス板Gが二つの主支持部材2上に載置される直前及び直後においては、図3に示すように、中間支持部材13が上動端位置にある。したがって、載置作業を開始した時点でのガラス板Gは、主支持部材2だけでなく中間支持部材13によっても下方から支持されている。この時点での中間支持部材13の上端の高さ位置は、二つの主支持部材2の上端の高さ位置と同一である。したがって、この時点でのガラス板Gは、主支持部材2と中間支持部材13とによって、水平な状態になるように下方から支持されている。この状態で、ガラス板Gの縦方向の一方側の端面Gaをストッパ15に当接させ、横方向の一方側の端面Gaをスケール18の一つの直線19に合致させる。これにより、ガラス板Gの縦方向及び横方向の位置決めが完了する。この後、中間支持用昇降手段であるエアシリンダ14によって中間支持部材13を下動させることにより、ガラス板Gは自重により撓んでいく。そして、中間支持部材13が下動端に達した時点で、図4に示すように、中間支持部材13はガラス板Gから退避した状態(離反した状態)になる。厳密には、中間支持部材13が下動を開始した後、下動端に達する前に、中間支持部材13がガラス板Gから退避した状態になる。
(Deflection measurement)
According to the deflection measuring device 1 having the above-described configuration, the intermediate support member 13 moves upward just before and immediately after the glass plate G is placed on the two main support members 2, as shown in FIG. It is at the end position. Therefore, the glass plate G at the time when the mounting work is started is supported from below by not only the main support member 2 but also the intermediate support member 13. The height position of the upper ends of the intermediate support members 13 at this point is the same as the height position of the upper ends of the two main support members 2. Therefore, the glass plate G at this time is supported from below by the main support member 2 and the intermediate support member 13 so as to be in a horizontal state. In this state, one end face Ga of the glass plate G on the one side in the vertical direction is brought into contact with the stopper 15, and the end face Ga on the one side of the horizontal direction is matched with one straight line 19 of the scale 18. This completes the positioning of the glass plate G in the vertical and horizontal directions. After that, the glass plate G is bent by its own weight by moving the intermediate support member 13 downward by the air cylinder 14 which is the intermediate support elevating means. Then, when the intermediate support member 13 reaches the lower end, as shown in FIG. 4, the intermediate support member 13 is retracted from the glass plate G (separated state). Strictly speaking, the intermediate support member 13 is in a state of being retracted from the glass plate G after the intermediate support member 13 starts moving downward and before reaching the lower end.
 この場合、図5に鎖線で示すように、中間支持用昇降手段であるエアシリンダ14が中間支持部材13を下動させ始めた時点で、これに同期してストッパ駆動手段であるエアシリンダ17がストッパ15を後退動させ始める。したがって、ガラス板Gが撓み始めると同時に、ストッパ15がガラス板Gから退避する。そのため、ガラス板Gが撓んでいく過程では、ストッパ15とガラス板Gとは干渉しない。 In this case, as shown by the chain line in FIG. 5, when the air cylinder 14 which is the intermediate support elevating means starts to move the intermediate support member 13 downward, the air cylinder 17 which is the stopper drive means is synchronized with this. The stopper 15 starts to move backward. Therefore, at the same time when the glass plate G begins to bend, the stopper 15 retracts from the glass plate G. Therefore, in the process of bending the glass plate G, the stopper 15 and the glass plate G do not interfere with each other.
 撓み量測定では、ガラス板Gを各支持部材2、13上に載置する。CCDカメラ20が、測定対象となる端面Gaの最下縁Sを撮像し、この撮像された画像は、表示手段24に表示される。図6(a)に示すように、表示手段24の画面には、ガラス板Gの端面Gaの画像と、画面中央に入れられた基準線25とが映し出される。この時、ハンドル23の操作によってハイトゲージ21のスライダ22の高さ位置を調整することによって、図6(b)に示すように、端面Gaの最下縁Sと基準線25とを合致させる。この時点でのスライダ22の高さ位置を、第一の零点位置に設定する。 In the flexure amount measurement, the glass plate G is placed on each of the support members 2 and 13. The CCD camera 20 images the lowermost edge S of the end surface Ga to be measured, and the imaged image is displayed on the display means 24. As shown in FIG. 6A, an image of the end surface Ga of the glass plate G and a reference line 25 inserted in the center of the screen are displayed on the screen of the display means 24. At this time, by adjusting the height position of the slider 22 of the height gauge 21 by operating the handle 23, the lowermost edge S of the end face Ga and the reference line 25 are aligned as shown in FIG. 6B. The height position of the slider 22 at this time is set to the first zero point position.
 この後、中間支持部材13が下動して図4に示すようにガラス板Gから退避した場合には、ハンドル23の操作によってスライダ22を下動させる。これに追随してCCDカメラ20も下動する。そして、再びハンドル23の操作によってハイトゲージ21のスライダ22の高さ位置を調整する。この調整によって、図6(c)に示すように、ガラス板Gの端面Gaの最下縁Sと基準線25とを合致させる。この時点でのスライダ22の高さ位置を上記第一の零点位置との関係で読み取ることによって、ガラス板Gの表面の撓み量が測定される。 After that, when the intermediate support member 13 moves downward and retracts from the glass plate G as shown in FIG. 4, the slider 22 is moved downward by operating the handle 23. Following this, the CCD camera 20 also moves down. Then, the height position of the slider 22 of the height gauge 21 is adjusted again by operating the handle 23. By this adjustment, as shown in FIG. 6C, the lowermost edge S of the end surface Ga of the glass plate G and the reference line 25 are matched. By reading the height position of the slider 22 at this time in relation to the first zero point position, the amount of bending of the surface of the glass plate G is measured.
 次に、ガラス板Gを反転させて各支持部材2、13上に載置する。その後、上記と同様にして中間支持部材13を下動させ、ハイトゲージ21のスライダ22の高さ位置調整する。この調整によって、再び図6(c)に示すように、ガラス板Gの端面Gaの最下縁Sと基準線25とを合致させる。この時点でのスライダ22の高さ位置を上記第一の零点位置との関係で読み取ることによってガラス板Gの裏面の撓み量が測定される。ガラスGの撓み差は、表面の撓み量と裏面の撓み量の差から求められる。 Next, the glass plate G is inverted and placed on each of the support members 2 and 13. After that, the intermediate support member 13 is moved downward in the same manner as described above, and the height position of the slider 22 of the height gauge 21 is adjusted. By this adjustment, as shown in FIG. 6C again, the lowermost edge S of the end surface Ga of the glass plate G and the reference line 25 are matched. By reading the height position of the slider 22 at this point in relation to the first zero point position, the amount of bending of the back surface of the glass plate G can be measured. The bending difference of the glass G is obtained from the difference between the bending amount of the front surface and the bending amount of the back surface.
 さらに、ガラス板Gの撓み差のみの測定は、例えば次のようにして行う。先ず、図6(c)に示す画像が得られた時点でのスライダ22の高さ位置を、第二の零点位置としておく。そして、中間支持部材13及びスライダ22をそれぞれ上動させて元の位置に復帰させる。次に、ガラス板Gを反転させて各支持部材2、13上に載置する。その後、上記と同様にして中間支持部材13を下動させ、且つスライダ22及びCCDカメラ20を下動させる。さらに、中間支持部材13をガラス板Gから退避させる。この状態で、スライダ22の高さ位置を調節して、再び図6(c)に示すように、反転したガラス板Gの端面Gaの最下縁と基準線25とを合致させる。この時点でのスライダ22の高さ位置を上記第二の零点位置との関係で読み取ることによって、ガラス板Gの撓み差が測定される。 Further, the measurement of only the difference in bending of the glass plate G is performed as follows, for example. First, the height position of the slider 22 at the time when the image shown in FIG. 6C is obtained is set as the second zero point position. Then, the intermediate support member 13 and the slider 22 are respectively moved upward and returned to their original positions. Next, the glass plate G is inverted and placed on each of the support members 2 and 13. After that, the intermediate support member 13 is moved down and the slider 22 and the CCD camera 20 are moved down in the same manner as above. Further, the intermediate support member 13 is retracted from the glass plate G. In this state, the height position of the slider 22 is adjusted so that the lowermost edge of the end face Ga of the inverted glass plate G and the reference line 25 are aligned again as shown in FIG. 6C. By reading the height position of the slider 22 at this point in relation to the second zero point position, the difference in bending of the glass plate G can be measured.
 以上のような撓み測定(撓み量及び撓み差の測定)を、同一サイズの複数枚のガラス板Gについて行った後、ガラス板Gのサイズを変更する場合には、以下のような作業が行われる。ガラス板Gのサイズが大きくなる場合には、図1に示すハンドル9を一方向に回転させて、二つの主支持部材2を相互に離反する方向に移動させる。また、ガラス板Gのサイズが小さくなる場合には、当該ハンドル9を他の方向に回転させて、二つの主支持部材2を相互に接近する方向に移動させる。この場合における二つの主支持部材2の移動停止位置は、予め設定されているハンドル9の回転角度、或いは予め設定されている主支持部材2の横方向位置などに応じて決まる。このようにして、二つの主支持部材2が横方向の新たな位置に設置された場合でも、撮像手段20や撮像用昇降手段21は、二つの主支持部材2の相互間の中央位置に配列される。そのため、撮像手段20や撮像用昇降手段21の設置位置(本実施形態ではCCDカメラ20及びハイトゲージ21の設置位置)は変更しなくても済む。なお、表示手段24の設置位置も変更する必要がない。本実施形態のように、中間支持部材13の起立部13bを二つの主支持部材2の相互間の中央位置に配列する場合は、中間支持部材13の起立部13bの設置位置も変更しなくて済む。また、図1及び図2に示すスケール18については、変更後のガラス板Gのサイズに対応した異なる直線19を選択するだけで済む。したがって、ガラス板Gの横方向の位置決めは、新たに選択された直線19に、サイズが変更されたガラス板Gの横方向の一方側の端面Gbを合致させることで行われる。 When the above-described bending measurement (measurement of bending amount and bending difference) is performed on a plurality of glass plates G of the same size, and the size of the glass plates G is changed, the following work is performed. Be seen. When the size of the glass plate G becomes large, the handle 9 shown in FIG. 1 is rotated in one direction to move the two main support members 2 in directions away from each other. Further, when the size of the glass plate G becomes small, the handle 9 is rotated in the other direction to move the two main support members 2 in the directions approaching each other. The movement stop positions of the two main support members 2 in this case are determined according to a preset rotation angle of the handle 9 or a preset lateral position of the main support member 2. In this way, even when the two main support members 2 are installed at new positions in the lateral direction, the imaging means 20 and the imaging elevating means 21 are arranged at the central position between the two main support members 2. To be done. Therefore, it is not necessary to change the installation positions of the imaging unit 20 and the imaging lifting unit 21 (the installation positions of the CCD camera 20 and the height gauge 21 in this embodiment). It is not necessary to change the installation position of the display means 24. When the standing portions 13b of the intermediate supporting member 13 are arranged at the central positions between the two main supporting members 2 as in the present embodiment, the installation position of the standing portions 13b of the intermediate supporting member 13 need not be changed. I'm done. Further, with respect to the scale 18 shown in FIGS. 1 and 2, it suffices to select a different straight line 19 corresponding to the changed size of the glass plate G. Therefore, the horizontal positioning of the glass plate G is performed by matching the newly selected straight line 19 with the end surface Gb on one side in the horizontal direction of the size-changed glass plate G.
 ここで、撓み測定装置1による撓み測定の対象となるガラス板Gのサイズは、例えば横方向寸法が200~600mm、縦方向寸法が300~700mmである。上記範囲内に、複数のサイズが存在している。なお、図例では、ガラス板Gの横方向に沿う辺を長辺とし、縦方向に沿う辺を短辺としたが、これとは逆に、ガラス板Gの横方向に沿う辺を短辺とし、縦方向に沿う辺を長辺としてもよい。これらのガラス板Gの板厚は、0.2~3.0mmである。なお、これらのガラス板Gは、ヤング率や板厚等のガラス物性に応じて複数のサイズに切断される。例えば、ガラス板Gの板厚が小さくなるに連れてサイズも小さく切断される。 Here, the size of the glass plate G to be subjected to the flexure measurement by the flexure measuring device 1 is, for example, a lateral dimension of 200 to 600 mm and a longitudinal dimension of 300 to 700 mm. There are a plurality of sizes within the above range. In the illustrated example, the side along the horizontal direction of the glass plate G is the long side and the side along the vertical direction is the short side, but conversely, the side along the horizontal direction of the glass plate G is the short side. And the sides along the vertical direction may be long sides. The plate thickness of these glass plates G is 0.2 to 3.0 mm. Note that these glass plates G are cut into a plurality of sizes according to the physical properties of the glass such as Young's modulus and plate thickness. For example, as the plate thickness of the glass plate G becomes smaller, the size thereof is cut smaller.
(効果)
 以上のように、本実施形態に係る撓み測定装置1によれば、ガラス板Gを二つの主支持部材2上に載置する過程で、これらの主支持部材2がガラス板Gを下方から支持するだけでなく、中間支持部材13もガラス板Gを下方から支持する。これにより、ガラス板Gを二つの主支持部材2の上端に接触させる際には、中間支持部材13の存在によってガラス板Gに外力による反りが生じ難くなる。したがって、ガラス板Gを載置する過程におけるガラス板Gの支持態様にずれや狂い等が生じ難くなり、ガラス板Gの撓み測定時における測定誤差を小さくすることができる。
(effect)
As described above, according to the deflection measuring apparatus 1 according to the present embodiment, in the process of placing the glass plate G on the two main supporting members 2, the main supporting members 2 support the glass plate G from below. In addition, the intermediate support member 13 also supports the glass plate G from below. Thereby, when the glass plate G is brought into contact with the upper ends of the two main support members 2, the presence of the intermediate support member 13 makes it difficult for the glass plate G to warp due to an external force. Therefore, the support mode of the glass plate G in the process of placing the glass plate G is less likely to be displaced or misaligned, and the measurement error in measuring the bending of the glass plate G can be reduced.
 また、本実施形態に係る撓み測定装置1によれば、ガラス板Gを二つの主支持部材2上に載置する過程の初期段階で、中間支持部材13の存在によってガラス板Gが水平な状態に保持される。したがって、当該初期段階で、ガラス板Gが二つの主支持部材2上を滑る等の事態が阻止され、ガラス板Gの撓み測定時における測定誤差をより一層小さくすることができる。 Further, according to the bending measuring apparatus 1 according to the present embodiment, the glass plate G is in a horizontal state due to the presence of the intermediate support member 13 in the initial stage of the process of placing the glass plate G on the two main support members 2. Held in. Therefore, in the initial stage, the glass plate G is prevented from slipping on the two main support members 2 and the like, so that the measurement error in measuring the deflection of the glass plate G can be further reduced.
 さらに、本実施形態に係る撓み測定装置1によれば、中間支持部材13が上下動するだけで、中間支持部材13は、ガラス板Gを下方から支持する状態と、ガラス板Gから退避した状態とを取る。これにより、中間支持部材13に二つの状態を取らせるための中間支持用昇降手段14の構成が簡素になる。また、この二つの状態を切り換えるための作業が中間支持用昇降手段14により自動化されて作業効率が向上する。 Further, according to the deflection measuring device 1 according to the present embodiment, the intermediate support member 13 only moves up and down, and the intermediate support member 13 supports the glass plate G from below and retracts it from the glass plate G. And take. This simplifies the structure of the intermediate support elevating means 14 for causing the intermediate support member 13 to assume two states. Further, the work for switching between these two states is automated by the intermediate supporting elevating means 14 and the work efficiency is improved.
 しかも、本実施形態に係る撓み測定装置1によれば、ガラス板Gの撓みが進行する過程で、ストッパ15がガラス板Gから退避した状態になるため、ガラス板Gとストッパ15との間に摺動等が生じなくなる。そのため、ガラス板Gに傷が付く等の問題が回避されると共に、ガラス板Gの適正且つ自由な撓みが阻害される等の問題も回避される。 Moreover, according to the flexure measuring device 1 of the present embodiment, the stopper 15 is retracted from the glass plate G in the process of the flexure of the glass plate G, so that the space between the glass plate G and the stopper 15 is increased. No sliding will occur. Therefore, the problem that the glass plate G is scratched is avoided, and the problem that proper and free bending of the glass plate G is obstructed is also avoided.
 さらに、本実施形態に係る撓み測定装置1によれば、撓み量や撓み差の測定が、撮像手段20とハイトゲージ21(撮像用昇降手段及び高さ測定手段)と表示手段24とを用いて行われるため、取り扱いに注意を要するレーザー距離計等を使用しなくても済む。この場合、レーザー距離計等は、二つの主支持部材2上に載置された状態にあるガラス板Gの下方領域や上方領域に設置されるものである。レーザー距離計等を当該ガラス板Gの下方領域に設置した場合には、中間支持部材13との干渉等の問題が生じ得る。また、レーザー距離計等を、当該ガラス板Gの上方領域に配置した場合には、二つの主支持部材2上にガラス板Gを移動させる際に、ガラス板Gとの干渉等の問題が生じ得る。しかし、本実施形態では、撮像手段20、撮像用昇降手段21、及び表示手段24が、ガラス板Gの下方領域及び上方領域を除外した領域(ガラス板Gの後方の領域)に配置されている。そのため、中間支持部材13やガラス板Gとの干渉等の問題が生じず、これらの手段20、22、24のレイアウトの自由度が大きくなる。 Further, according to the deflection measuring apparatus 1 according to the present embodiment, the amount of deflection and the difference in deflection are measured using the image pickup means 20, the height gauge 21 (image pickup lifting means and height measuring means), and the display means 24. Therefore, it is not necessary to use a laser range finder that requires careful handling. In this case, the laser range finder or the like is installed in the lower region or the upper region of the glass plate G placed on the two main support members 2. When a laser rangefinder or the like is installed in the lower region of the glass plate G, problems such as interference with the intermediate support member 13 may occur. Further, when the laser range finder or the like is arranged in the upper region of the glass plate G, when the glass plate G is moved onto the two main support members 2, a problem such as interference with the glass plate G occurs. obtain. However, in the present embodiment, the image pickup unit 20, the image pickup lift unit 21, and the display unit 24 are arranged in a region excluding the lower region and the upper region of the glass plate G (the region behind the glass plate G). .. Therefore, problems such as interference with the intermediate support member 13 and the glass plate G do not occur, and the degree of freedom in layout of these means 20, 22, 24 increases.
 また、本実施形態に係る撓み測定装置1によれば、ガラス板Gのサイズを変更する場合に、主支持用駆動手段3が二つの主支持部材2をそれらの相互間中央位置を境にしてその両側で対称に移動させる構成である。そのため、ガラス板Gのサイズが変更されても、ガラス板Gの測定対象となる端面Gaと平行な方向に対しては、ガラス板Gの中央位置が一定に維持される。これにより、ガラス板Gの載置作業や撓み測定作業のうちの大半の作業が、ガラス板Gのサイズの大小に関わらず同一条件で行うことができる。 Further, according to the deflection measuring device 1 according to the present embodiment, when changing the size of the glass sheet G, the main supporting drive means 3 separates the two main supporting members 2 from each other at the center position between them. It is configured to move symmetrically on both sides. Therefore, even if the size of the glass plate G is changed, the central position of the glass plate G is kept constant in the direction parallel to the end surface Ga of the glass plate G to be measured. Accordingly, most of the work of placing the glass plate G and the work of measuring the deflection can be performed under the same conditions regardless of the size of the glass plate G.
(変形例)
 なお、以上の実施形態では、中間支持部材13を鉛直線に沿って上下動させるようしたが、これに代えて、中間支持部材13を傾斜した方向に沿って上下動させるようにしてもよい。このようにする場合には、中間支持部材13を高速で下動させることが好ましい。
(Modification)
In the above embodiment, the intermediate support member 13 is moved up and down along the vertical line, but instead of this, the intermediate support member 13 may be moved up and down along the inclined direction. In this case, it is preferable to move the intermediate support member 13 downward at high speed.
 また、以上の実施形態では、中間支持部材13を上下動させる中間支持用昇降手段14としてエアシリンダ等の流体圧シリンダを使用したが、これに代えて、ボールねじ機構等の他の手段を使用してもよい。なお、ストッパ15を突出動及び後退動させるストッパ駆動手段17も、エアシリンダ等の流体圧シリンダに代えて、ボールねじ機構等の他の手段を使用してもよい。 Further, in the above embodiment, a fluid pressure cylinder such as an air cylinder is used as the intermediate support elevating means 14 for moving the intermediate support member 13 up and down, but other means such as a ball screw mechanism is used instead. You may. The stopper driving means 17 for moving the stopper 15 in the protruding and retracting directions may be replaced with a fluid pressure cylinder such as an air cylinder, and other means such as a ball screw mechanism may be used.
 さらに、以上の実施形態では、撮像手段20としてCCDカメラを使用したが、これに代えて、他のカメラ類やイメージセンサ等を使用してもよい。 Further, in the above embodiment, the CCD camera is used as the image pickup unit 20, but other cameras or image sensors may be used instead.
 また、以上の実施形態では、撮像手段20を上下動させる撮像用昇降手段21として、ハイトゲージ21を使用したが、これに代えて、エアシリンダ等の流体圧シリンダやボールねじ機構等の他の手段を使用してもよい。このようにする場合には、撮像手段の高さ測定手段として、スケール等を使用してもよい。あるいは、基準線25に対して所定の間隔で設けられた目盛り線を表示手段24に映し出すことによって、撓みを測定してもよい。誤差を低減すると共に効率よく測定を行う観点では、撮像用昇降手段及び測定手段としてハイトゲージ21を用いることが好ましい。 Further, in the above embodiment, the height gauge 21 is used as the imaging elevating means 21 for moving the imaging means 20 up and down, but instead of this, other means such as a fluid pressure cylinder such as an air cylinder or a ball screw mechanism. May be used. In this case, a scale or the like may be used as the height measuring means of the image pickup means. Alternatively, the deflection may be measured by displaying a scale line provided at a predetermined interval with respect to the reference line 25 on the display means 24. From the viewpoint of reducing the error and performing the measurement efficiently, it is preferable to use the height gauge 21 as the imaging elevating means and the measuring means.
 さらに、以上の実施形態では、定盤6上に各種の構成要素を設置したが、他の基台上にそれらの構成要素を設置するようにしてもよい。 Furthermore, in the above embodiment, various components are installed on the surface plate 6, but these components may be installed on other bases.
 また、以上の実施形態では、二つの主支持部材2を横方向に移動させるように構成したが、一方の主支持部材2を固定設置し、他方の主支持部材2のみを横方向に移動させるように構成してもよい。 Further, in the above embodiment, the two main support members 2 are configured to be moved in the lateral direction, but one main support member 2 is fixedly installed, and only the other main support member 2 is moved in the lateral direction. It may be configured as follows.
 さらに、以上の実施形態では、主支持部材2をハンドル9の操作によって移動させるようにしたが、電気信号等によって主支持部材2を移動させるようにしてもよい。 Further, in the above embodiment, the main support member 2 is moved by operating the handle 9, but the main support member 2 may be moved by an electric signal or the like.
 また、以上の実施形態では、主支持部材2を平板状の部材とし、中間支持部材13を断面がL字形をなす部材としたが、これらの支持部材2、13の形状は特に限定されない。 In the above embodiment, the main support member 2 is a flat plate-shaped member and the intermediate support member 13 is a member having an L-shaped cross section, but the shape of these support members 2 and 13 is not particularly limited.
 さらに、以上の実施形態では、二つの主支持部材2間に、一つの中間支持部材13を配置したが、二つ以上の中間支持部材13を配置するようにしてもよい。また、以上の実施形態では、中間支持部材13を二つの主支持部材2の相互間の中央位置に配列したが、中央位置以外に配列してもよい。外力による反りを無くす観点では、隣り合う支持部材(主支持部材2及び中間支持部材13)の間隔が等しくなるように配列することが好ましく、一つの中間支持部材13を配列する場合は、中央位置に配列することが好ましい。 Further, in the above embodiment, one intermediate support member 13 is arranged between the two main support members 2, but two or more intermediate support members 13 may be arranged. Further, in the above embodiment, the intermediate support member 13 is arranged at the center position between the two main support members 2, but it may be arranged at a position other than the center position. From the viewpoint of eliminating warpage due to an external force, it is preferable that the adjacent support members (main support member 2 and intermediate support member 13) are arranged so that the intervals between them are equal. It is preferable to arrange them.
 また、以上の実施形態では、一つの主支持部材2を一つの部材で構成したが、一つの主支持部材2を複数の部材で構成してもよい。また、一つの主支持部材2を複数の部材で構成する場合には、一つの主支持部材2を縦方向に伸縮可能としてもよい。同様にして、中間支持部材13も、縦方向に伸縮可能としてもよい。 In addition, in the above embodiment, one main support member 2 is composed of one member, but one main support member 2 may be composed of a plurality of members. When one main support member 2 is composed of a plurality of members, one main support member 2 may be vertically expandable and contractable. Similarly, the intermediate support member 13 may be extendable/contractible in the vertical direction.
 以上の実施形態では、測定対象となる端面を有するガラス板Gを各支持部材2、13上に載置した状態で、第一の零点位置を設定する作業を実施する。この態様では、ガラス板Gが薄いと、ガラス板Gを各支持部材2、13上に載置した状態でも若干の撓みが発生することから、第一の零点位置を設定する作業に時間を要する。このため、測定対象となる端面を有するガラス板Gでなく、測定対象となる端面を有するガラス板Gよりも厚いガラス板やストレートエッジ(直定規)等を各支持部材2、13上に載置した状態で、第一の零点位置を設定する作業を実施してもよい。この場合は、第一の零点位置を設定する作業の完了後に、測定対象となる端面を有するガラス板Gを各支持部材2、13上に載置して撓み量や撓み差の測定を行えばよい。これにより、ガラス板Gが薄い場合でも、効率よく測定作業を実施できる。 In the above embodiment, the work of setting the first zero point position is performed with the glass plate G having the end surface to be measured placed on each of the support members 2 and 13. In this mode, when the glass plate G is thin, some bending occurs even when the glass plate G is placed on each of the support members 2 and 13, so that it takes time to set the first zero point position. .. Therefore, instead of the glass plate G having the end surface to be measured, a glass plate thicker than the glass plate G having the end surface to be measured, a straight edge (straight ruler), or the like is placed on each of the support members 2 and 13. In this state, the work of setting the first zero point position may be performed. In this case, after the work of setting the first zero point position is completed, the glass plate G having the end surface to be measured is placed on each of the support members 2 and 13 to measure the amount of bending and the bending difference. Good. Thereby, even if the glass plate G is thin, the measurement work can be efficiently performed.
(製造方法)
 続いて、本発明の実施形態に係るガラス板の製造方法について説明する。本実施形態の製造方法は、ガラス板を準備する準備工程と、ガラス板の撓みを測定する測定工程とを備える。準備工程は、例えば、溶融ガラスからオバーフロー法やフロート法によりガラスリボンを成形する成形工程と、ガラスリボンからガラス板を切り出す切断工程と、切り出されたガラス板の端面を砥石で加工する加工工程と、端面が加工されたガラス板を洗浄する工程と、ガラス板の一部を採取する採取工程とを備える。採取工程では、例えば、切断工程を経たガラス板を採取してもよく、洗浄工程を経たガラス板を採取してもよい。切断工程は、ガラスリボンからガラス板を切り出す第一切断工程と、第一切断工程を経たガラス板から一枚又は複数枚のガラス板を切り出す第二切断工程とを備えてもよく、この場合、採取工程では、第一切断工程を経たガラス板を採取してもよい。
(Production method)
Then, the manufacturing method of the glass plate which concerns on embodiment of this invention is demonstrated. The manufacturing method of the present embodiment includes a preparation step of preparing a glass plate and a measurement step of measuring the bending of the glass plate. The preparation step is, for example, a forming step of forming a glass ribbon from the molten glass by an overflow method or a float method, a cutting step of cutting out a glass plate from the glass ribbon, and a processing step of processing the end face of the cut out glass plate with a grindstone The method includes a step of cleaning the glass plate whose end face is processed, and a sampling step of sampling a part of the glass plate. In the collecting step, for example, the glass plate that has been subjected to the cutting step may be collected, or the glass plate that has been subjected to the cleaning step may be collected. The cutting step may include a first cutting step of cutting a glass plate from the glass ribbon, and a second cutting step of cutting one or more glass plates from the glass plate that has gone through the first cutting step, in this case, In the collecting step, the glass plate that has undergone the first cutting step may be collected.
 測定工程では、上述のガラス板の撓み測定装置1を用いて撓みを測定する。測定工程は、例えば、採取したガラス板から所定サイズのサンプルのガラス板を切り出すサンプル作製工程と、二つの主支持部材2と、中間支持部材13とでサンプルのガラス板を支持する支持工程と、中間支持部材13を退避させ、二つの主支持部材2のみでサンプルのガラス板を支持する退避工程とを備える。測定工程は、上述の撓み測定に記載の手順で行えばよい。 In the measuring step, the bending is measured using the above-described glass plate bending measuring device 1. The measurement step includes, for example, a sample preparation step of cutting out a glass plate of a sample of a predetermined size from the collected glass plate, a support step of supporting the glass plate of the sample with two main support members 2 and an intermediate support member 13, And a retracting step of retracting the intermediate supporting member 13 and supporting the sample glass plate only by the two main supporting members 2. The measurement step may be performed by the procedure described in the above-mentioned deflection measurement.
 以上のように、本実施形態に係る製造方法によれば、上述のガラス板の撓み測定装置1を用いるので、採取されたガラス板の撓み測定時における測定誤差を小さくすることができる。このため、製造されるガラス板の品質を向上させることができる。 As described above, according to the manufacturing method according to the present embodiment, since the above-described glass plate bending measuring device 1 is used, it is possible to reduce the measurement error when measuring the bending of the sampled glass plate. Therefore, the quality of the manufactured glass plate can be improved.
1     撓み測定装置
2     主支持部材
3     主支持用駆動手段
13   中間支持部材
14   中間支持用昇降手段
15   ストッパ
17   ストッパ駆動手段
18   スケール
20   撮像手段
21   ハイトゲージ(撮像用昇降手段及び高さ測定手段)
24   表示手段
G     ガラス板
Ga   ガラス板の測定対象となる端面
1 Deflection Measuring Device 2 Main Support Member 3 Main Support Driving Means 13 Intermediate Support Member 14 Intermediate Support Lifting Means 15 Stopper 17 Stopper Driving Means 18 Scale 20 Imaging Means 21 Height Gauge (Imaging Lifting Means and Height Measuring Means)
24 Display means G Glass plate Ga End surface to be measured of glass plate

Claims (9)

  1.  ガラス板を下方から支持する二つの主支持部材を備え、該二つの主支持部材間に生じる前記ガラス板の撓みを測定するように構成し、
     前記二つの主支持部材間に、前記ガラス板を下方から支持する状態と前記ガラス板から退避した状態とを取る中間支持部材を配置したことを特徴とするガラス板の撓み測定装置。
    Two main supporting members for supporting the glass plate from below are provided, and configured to measure the bending of the glass plate that occurs between the two main supporting members,
    An apparatus for measuring the deflection of a glass plate, characterized in that an intermediate support member is disposed between the two main support members to support the glass plate from below and to retract the glass plate from the glass plate.
  2.  前記中間支持部材を上下動させる中間支持用昇降手段を備え、該中間支持部材が上方位置にある時に該中間支持部材が前記ガラス板を下方から支持し、該中間支持部材が前記上方位置よりも下方位置にある時に該中間支持部材が前記ガラス板から退避するように構成した請求項1に記載のガラス板の撓み測定装置。 An intermediate support elevating means for moving the intermediate support member up and down is provided, the intermediate support member supports the glass plate from below when the intermediate support member is in an upper position, and the intermediate support member is located above the upper position. The apparatus for measuring deflection of a glass plate according to claim 1, wherein the intermediate support member is configured to retract from the glass plate when in the lower position.
  3.  前記中間支持部材が上動端位置にある時に、該中間支持部材の上端と前記二つの主支持部材の上端とが同一高さに保持される請求項2に記載のガラス板の撓み測定装置。 The apparatus for measuring deflection of a glass plate according to claim 2, wherein the upper end of the intermediate support member and the upper ends of the two main support members are held at the same height when the intermediate support member is at the upper end position.
  4.  前記ガラス板の測定対象となる端面を撮像する撮像手段と、該撮像手段を上下動させる撮像用昇降手段と、前記撮像手段の高さを測定する高さ測定手段と、前記撮像手段が撮像した画像を表示する表示手段とを備えている請求項2または3に記載のガラス板の撓み測定装置。 Imaging means for imaging the end face of the glass plate to be measured, imaging lifting means for moving the imaging means up and down, height measuring means for measuring the height of the imaging means, and the imaging means for imaging. The glass plate deflection measuring device according to claim 2, further comprising a display unit for displaying an image.
  5.  前記ガラス板の測定対象となる端面と直交する方向に対して前記ガラス板を位置決めするストッパと、前記中間支持部材の上動端位置からの下動に伴って前記ストッパを前記ガラス板から退避させるストッパ駆動手段とを備えている請求項2~4の何れかに記載のガラス板の撓み測定装置。 A stopper for positioning the glass plate in a direction orthogonal to the end surface of the glass plate to be measured, and withdrawing the stopper from the glass plate in accordance with the downward movement from the upper moving end position of the intermediate support member. The glass plate deflection measuring device according to any one of claims 2 to 4, further comprising a stopper driving means.
  6.  前記ガラス板の測定対象となる端面と平行な方向に対して前記ガラス板を位置決めするスケールを備えている請求項5に記載のガラス板の撓み測定装置。 The apparatus for measuring deflection of a glass plate according to claim 5, further comprising a scale for positioning the glass plate in a direction parallel to an end surface of the glass plate to be measured.
  7.  前記二つの主支持部材が接近及び離反するように該二つの主支持部材の少なくとも一方を移動させる主支持用駆動手段を備えている請求項1~6の何れかに記載のガラス板の撓み測定装置。 The deflection measurement of the glass plate according to any one of claims 1 to 6, further comprising drive means for main support that moves at least one of the two main support members so that the two main support members approach and separate from each other. apparatus.
  8.  前記主支持用駆動手段は、前記二つの主支持部材をそれらの相互間中央位置を境にしてその両側で対称に移動させるように構成されている請求項7に記載のガラス板の撓み測定装置。 8. The apparatus for measuring the deflection of a glass plate according to claim 7, wherein the main support drive means is configured to move the two main support members symmetrically on both sides of the center position between them. ..
  9.  ガラス板を準備する準備工程と、前記ガラス板の撓みを測定する測定工程とを備えるガラス板の製造方法であって、
     前記測定工程で、請求項1~8に記載のガラス板の撓み測定装置を用いて撓みを測定し、
     前記測定工程は、前記二つの主支持部材と、前記中間支持部材とで前記ガラス板を支持する工程と、前記中間支持部材を退避させ、前記二つの主支持部材で前記ガラス板を支持する工程とを備えることを特徴とするガラス板の製造方法。
    A method for manufacturing a glass plate, comprising a preparatory step of preparing a glass plate, and a measuring step of measuring the bending of the glass plate,
    In the measuring step, the bending is measured using the glass plate bending measuring device according to claim 1,
    The measuring step includes a step of supporting the glass plate with the two main supporting members and the intermediate supporting member, a step of retracting the intermediate supporting member, and supporting the glass plate with the two main supporting members. And a method for manufacturing a glass plate.
PCT/JP2019/046088 2018-12-21 2019-11-26 Glass plate warpage measurement device and glass plate manufacturing method WO2020129546A1 (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023132150A1 (en) * 2022-01-05 2023-07-13 日本電気硝子株式会社 Glass plate measurement method, glass plate manufacturing method, and glass plate measuring device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2024014340A1 (en) * 2022-07-13 2024-01-18 日本電気硝子株式会社 Mother glass sheet and method for manufacturing mother glass sheet

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11201748A (en) * 1998-01-13 1999-07-30 Toshiba Ceramics Co Ltd Plate flatness measuring instrument
JP2009117301A (en) * 2007-11-09 2009-05-28 Nippon Electric Glass Co Ltd Glass substrate and method of inspecting warpage in glass substrate

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4469659B2 (en) * 2004-06-11 2010-05-26 株式会社ミツトヨ Mounting table device, image measuring device
JP4887630B2 (en) * 2005-02-24 2012-02-29 日本電気硝子株式会社 Glass substrate positioning device and end surface grinding device
JP2006329895A (en) * 2005-05-30 2006-12-07 Dainippon Screen Mfg Co Ltd Substrate measuring apparatus
JP4214265B2 (en) * 2007-05-23 2009-01-28 レーザーテック株式会社 Optical measuring device and substrate holding device
JP2015101020A (en) * 2013-11-26 2015-06-04 日本電気硝子株式会社 Method and device for stacking glass plate
CN205262454U (en) * 2015-12-30 2016-05-25 芜湖东旭光电装备技术有限公司 Be used for a dull and stereotyped amount of deflection measuring placer and dull and stereotyped amount of deflection measurement system
CN108779983A (en) * 2016-02-29 2018-11-09 Agc株式会社 Shape measuring apparatus
CN108709816B (en) * 2018-03-29 2021-04-06 北京工业大学 Ultra-thin glass flexibility test device and method

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11201748A (en) * 1998-01-13 1999-07-30 Toshiba Ceramics Co Ltd Plate flatness measuring instrument
JP2009117301A (en) * 2007-11-09 2009-05-28 Nippon Electric Glass Co Ltd Glass substrate and method of inspecting warpage in glass substrate

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023132150A1 (en) * 2022-01-05 2023-07-13 日本電気硝子株式会社 Glass plate measurement method, glass plate manufacturing method, and glass plate measuring device

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