WO2020117381A1

WO2020117381A1 - Inkjet printer with table positioner

Info

Publication number: WO2020117381A1
Application number: PCT/US2019/056881
Authority: WO
Inventors: Cormac Wicklow; Digby Pun
Original assignee: Kateeva, Inc.
Priority date: 2018-12-05
Filing date: 2019-10-18
Publication date: 2020-06-11

Abstract

A mechanism is described that features a body with three link points, each with a rigid adjustable length link member coupling the link point to a ground using biaxial rotary couplings giving rotation orientation to position the body in three dimensions relative to the three grounds. An inkjet printer is also described using the mechanism with a substrate support.

Description

INKJET PRINTER WITH TABLE POSITIONER

FIELD

[0001 ] Embodiments of the present invention generally relate to inkjet printers. Specifically, methods and apparatus for alignment of components is described.

BACKGROUND

[0002] Inkjet printing is common, both in office and home printers and in industrial scale printers used for fabricating displays, printing large scale written materials, adding material to manufactured articles such as PCB’s, and constructing biological articles such as tissues. Most commercial and industrial inkjet printers, and some consumer printers, use piezoelectric dispensers to apply print material to a substrate.

[0003] In many applications, extreme precision is needed in depositing materials on a substrate. When a substrate is disposed on a movable support for deposition, inaccuracy in placement of fhe support can compound inaccuracy in deposition of materials on the substrate. Methods and apparatus are needed for precision alignment of a substrate support for deposition processes.

SUMMARY

[0004] Embodiments described herein provide a mechanism, comprising a body having first link point, a second link point spaced apart from the first link point, and a third link point non-eol!inear with the first and second link points; a first rigid adjustable length link member having a first end and a second end opposite the first end, the first end coupled to the first link point by a first biaxial rotary coupling and the second end attached to a first ground having a first rotation orientation by a second biaxial rotary coupling; a second rigid adjustable length link member having a first end and a second end opposite the first end, the first end coupled to the second link point by a third biaxial rotary coupling and the second end attached to a second ground having a second rotation orientation perpendicular to the first orientation by a fourth biaxial rotary coupling; and a third rigid adjustable length link member having a first end and a second end opposite the first end, the first end coupled to the third link point by a fifth biaxial rotary coupling and the second end attached to a third ground having the second rotation orientation by a sixth biaxial rotary coupling, the body being positionabie in three dimensions relative to the first, second, and third grounds.

[0005] Other embodiments described herein provide a support, comprising a platform having a first link point, a second link point spaced apart from the first link point, and a third link point non-collinear with the first and second link points; a first rigid adjustable length positioner having a first end and a second end opposite the first end, the first end coupled to the first link point by a first biaxial rotary coupling and the second end attached to a first ground having a first rotation orientation by a second biaxial rotary coupling; a second rigid adjustable length positioner having a first end and a second end opposite the first end, the first end coupled to the second link point by a third biaxial rotary coupling and the second end attached to a second ground having a second rotation orientation perpendicular to the first orientation by a fourth biaxial rotary coupling; and a third rigid adjustable length positioner having a first end and a second end opposite the first end, the first end coupled to the third link point by a fifth biaxial rotary coupling and the second end attached to a third ground having the second rotation orientation by a sixth biaxial rotary coupling, the platform being positionabie in three dimensions relative to the first, second, and third grounds.

[0006] Other embodiments described herein provide a support table, comprising a platform having a footing structure, the footing structure having a first link point, a second link point spaced apart from the first link point, and a third link point non- collinear with the first and second link points; a first rigid adjustable length positioner having a first end and a second end opposite the first end, the first end coupled to the first link point by a first biaxial rotary coupling and the second end attached to a first ground by a second biaxial rotary coupling, the first link point and the first ground having a first rotation orientation; a second rigid adjustable length positioner having a first end and a second end opposite the first end, the first end coupled to the second link point by a third biaxial rotary coupling and the second end attached to a second ground by a fourth biaxial rotary coupling, the second link point and the second ground having a second rotation orientation perpendicular to the first rotation orientation; and a third rigid adjustable length positioner having a first end and a second end opposite the first end, the first end coupled to the third link point by a fifth biaxial rotary coupling and the second end attached to a third ground by a sixth biaxial rotary coupling, the third link point and the third ground having the second rotation orientation.

BRIEF DESCRIPTION OF THE DRAWINGS

[0007] So that the manner in which the above recited features of the present disclosure can be understood in detail, a more particular description of the disclosure, briefly summarized above, may be had by reference to embodiments, some of which are illustrated in the appended drawings. It is to be noted, however, that the appended drawings illustrate only exemplary embodiments and are therefore not to be considered limiting of its scope, may admit to other equally effective embodiments.

[0008] Fig. 1 A is a top isometric view of a portion of an inkjet printer 100 according to one embodiment.

[0009] Fig. 1 B is a close view of a substrate support assembly of the inkjet printer of Fig. 1 A.

[00010] Fig. 2 is a detailed view of an adjustable length link member assembly for use with the substrate support of Fig 1 B.

[0001 1 ] Fig. 3 is a detailed view of an adjustable length link member assembly deployed with the substrate support of Figs. 1 A and 1 B.

[00012] Figs 4A-4D are activity views of the substrate support of Figs. 1 A and 1 B in various stages of alignment using a positioning mechanism according to one embodiment.

[00013] To facilitate understanding, identical reference numerals have been used, where possible, to designate identical elements that are common to the figures it is contemplated that elements and features of one embodiment may be beneficially incorporated in other embodiments without further recitation.

DETAILED DESCRIPTION

[00014] An inkjet printer is described herein with support alignment features. Fig. 1 A is a top isometric view of a portion of an inkjet printer 100 according to one embodiment. The printer 100 of Fig. 1 A features a base 102, which is a structurally strong and stable material such as granite, a print assembly 104 disposed on the base 102, and a substrate support assembly 1 12 disposed on the base 102. The substrate support assembly 1 12 here includes a first substrate support 1 16, a second substrate support 1 18, and a third substrate support 120. The three substrate supports 1 16, 1 18, and 120 are here oriented in a substrate transportation direction to allow movement of a substrate along the three substrate supports 1 16, 1 18, and 120 during processing.

[00015] The print assembly 104 includes a dispenser support 108 coupled to a pair of stands 106. The stands 106 are disposed on the base 102 on either side of the substrate support assembly 1 12, specifically on either side of the second substrate support 1 18 in this case. The dispenser support 108 is oriented transverse to the substrate transportation direction. A dispenser 1 10 is movably coupled to the dispenser support 108, and moves along the dispenser support 108 to position the dispenser 1 10 at target locations with respect to a substrate disposed on the second substrate support 1 18. The dispenser 1 10 can move substantially from one stand 106 to the opposite stand 106 to access substantially all of the transverse dimension of the substrate disposed on the second substrate support 1 18. The stands 106 and the dispenser support 108 are made of structurally strong, stable material and may be integral with the base 102.

[00016] The first substrate support 1 16 is a body supported on the foundation by one or more legs 122. Here’s the legs 122 extend along a dimension of the first substrate support 1 16 and are located on opposite sides of the first substrate support 1 16. The legs 1 16 are attached to a surface of the first substrate support 1 16 opposite from a substrate facing surface of the first substrate support 1 16. The legs 1 16 contact a surface of the base 102, and so are disposed between the base 102 and the first substrate support 1 16.

[00017] A positioning mechanism 124 is coupled to the first substrate support 1 16 and to the base 102. The positioning mechanism 124 includes a first rigid adjustable length link member 126, a second rigid adjustable length link member 128, and a third rigid adjustable length link member 130. The first rigid adjustable length link member 126 is coupled to a first link point 132 and a first ground 134. The second rigid adjustable length link member 128 is coupled to a second link point 136 and a second ground 138. The third rigid adjustable length link member 130 is coupled to a third link point 140 and a third ground 142. The first, second, and third link members 126, 128, and 130, along with the substrate support 1 16, form a four-bar mechanism operable to position the substrate support 1 16 in a plane while accommodating positioning in a direction perpendicular to the plane. The first, second, and third link members 126, 128, and 130, along with the substrate support 1 16 thus constitute a planar manipulator that also supports out-of-plane positioning.

[00018] Fig. 1 B is a closer view of the substrate support assembly 1 12 of Fig. 1 A. The first rigid adjustable length link member 126 has a first end 126A and a second end 126B. The first end 126A Is coupled to the first ground 134. The second end 126B is coupled to the first link point 132. The second adjustable length link member 128 has a first end 128A and a second end 128B. The first end 128A is coupled to the second ground 138 and the second end 128B is coupled to the second link point 136 The third adjustable length link member 130 has a first end 130A and a second end 130B. The first end is coupled to the third ground 142 and the second end 130B is coupled to the third link point 140.

[00019] The first, second, and third link points 132, 136, and 140 are located on the substrate support 1 16 along intersecting axes. In this case, the substrate support 1 16 is rectangular with a first edge 144 and a second edge 146 perpendicular to the first edge 144. A third edge 148 of the substrate support 1 16 is opposite from, and parallel to, the first edge 144. A fourth edge 150 of the substrate support 1 16 is opposite from, and parallel to, the second edge 146. Here, the first link point 132 is along the first edge 144, the second link point 136 is near the intersection of the first and second edges 144 and 146, and the third link point 140 is near the intersection of the second and third edges 146 and 148. The substrate support 1 16 could have any shape, however.

[00020] The first and second link points 132 and 136 define a first axis 152. The second and third link points 136 and 140 define a second axis 154 The first axis 152 and the second axis 154 form an angle Q between about 45^s and about 135^s. In the embodiment illustrated in Figs. 1 A and 1 B, the angle Q is approximately 90^s, but the angle may be different depending on the locations of the link points 132, 138, and 140 on the substrate support 1 16. For example, moving the second link point 136 toward the third link point 140 along the second edge 146 will increase the angle Q. Moving the second link point 136 away from the second edge 146 to an interior location of the substrate support 1 16 will also increase the angle Q. Conversely, moving the third link point 140 along the third edge 148 will decrease the angle Q.

[00021 ] Here, the link points 132, 136, and 140 are all located on a vertical surface or vertically oriented member of the substrate support 1 16. The substrate support 1 16 is supported on the foundation by a first foot 156, a second foot 158, and a third foot 180. The substrate support 1 16 is also supported by a fourth foot, which is not visible in Fig. 1 B. The first foot 156 is attached to a lower surface of the substrate support 1 16 along the first edge 144 thereof. The second foot 158 is attached to the lower surface of the substrate support 1 16 at the intersection of the first and second edges, 144 and 148, thereof. The third foot 180 is attached to the lower surface of the substrate support 1 16 at the intersection of the second and third edges, 146, and 148, thereof. The first link point 132 is on the first foot 156. The second link point 136 is on the second foot 158. The third link point 140 is on the third foot 160. The three feet 156, 158, and 160, are here blocks attached to the lower surface of the substrate support 1 16, but the three feet can have any convenient shape. The three feet can be beams extending along the lower surface of the substrate support 1 16, and the beams can be angled, for example with an angle of 9Q^Q at the intersections of the edges. The three feet can also be cylindrical or any other convenient shape.

[00022] The adjustable length link members 126, 128, and 130 are attached to the grounds and link points by biaxial rotary couplings. Fig. 2 is a detailed view of an adjustable length link member assembly 201 for use with the substrate support 1 16 of Figs. 1 A and 1 B. The adjustable length link member assembly 201 comprises an adjustable length link member 200 coupled to a first biaxial rotary coupling 202 and a second biaxial rotary coupling 204. Each biaxial rotary coupling 202 and 204 has a housing 206, a first rotor 208, and a second rotor 210. The second rotor 210 is disposed through a cylindrical opening 212 bored through the first rotor 208 such that the second rotor 210 can rotate within the first rotor 208. The first rotor 208 is disposed in a cylindrical opening 214 bored through the housing 206. The first rotor 208 can thus rotate within the housing 206. The first rotor 208, in each case, rotates about a first axis of rotation, and the second rotor 210 rotates about a second axis of rotation, where the second axis of rotation is orthogonal to the first axis of rotation. Thus, each rotary coupling 202 and 204 is a biaxial rotary coupling.

[00023] The adjustable length link member 200, which may be any of the adjustable length link members 126, 128, and 130 of Figs. 1 A and 1 B, is attached to the second rotor 210 of each biaxial rotary coupling 202 and 204. The adjustable length link member 200 thus has freedom to rotate about two axes. That means that the biaxial rotary couplings 202 and 204 can change relative position along two perpendicular axes while remaining attached to the adjustable length link member 200. in Fig. 2, the adjustable length link member 200 is oriented along the x-axis for explanation purposes. Here, the adjustable length link member 200 can rotate about the z-axis by rotation of the first rotor 208 of each biaxial rotary coupling 202 and 204. Thus, the two biaxial rotary couplings 202 and 204 can change relative position in the x-y plane while the adjustable length link member 200 remains attached to both. The adjustable length link member 200 can also rotate about the y-axis by rotation of the second rotor 210 of each biaxial rotary coupling 202 and 204. Thus, the two biaxial rotary couplings 202 and 204 can change relative position in the x-z plane while the adjustable length link member 200 remains attached to both. A passage 216 formed in the housing 206 permits the adjustable length link member 200 to pass into the interior of the housing 206. A passage 218 through the first rotor 208 allows the adjustable length link member 200 to pass through the first rotor 208 to engage with the second rotor 210. Thus, the rotational freedom of the adjustable length link member 200 is limited in each axis by the size of the passages 216 and 218. This means, if the biaxial rotary coupling 202 is held stationary, the biaxial rotary coupling 204 can move anywhere within a circular region defined in the y-z plane by the size of the passages 216 and 218, describing a cone-shaped movement volume for the adjustable length link member 200.

[00024] The rotation orientation of an adjustable length link member and its two biaxial rotary couplings is defined by an axis of the cone-shaped movement volume of the structure specified by the biaxial rotary coupling attached to the ground. For the adjustable length link member 126, the cone-shaped movement volume of the structure has an axis oriented along the second axis 154, which is defined by the orientation of the biaxial rotary coupling attached to the ground 134. Thus, the adjustable length link member 126 is attached to the ground 134 by a biaxial rotary coupling having a first rotation orientation and the second adjustable length link member 128 is attached to the ground 138 by a third biaxial rotary coupling having a second rotation orientation that intersects the first rotation orientation. In this case, the two rotation orientations are perpendicular, with the first rotation orientation directed along the second axis 154 and the second rotation orientation directed along the first axis 152. The third adjustable length link member 130 is, in this case attached to the ground 140 by a biaxial rotary coupling having the second rotation orientation. It should be noted that the second adjustable length link member 128 could be attached to the ground 136 by a biaxial rotary coupling having the first rotation orientation. The rotation orientation of the biaxial rotary couplings at the second and third grounds 136 and 140 could be non -parallel, and could be non-perpendicular with respect to the rotation orientation of the biaxial rotary coupling at the first ground 134.

[00025] The adjustable length link member 200 has adjustable length by virtue of an internally threaded drive 220 that engages with two threaded rods 222 and 224 at either end of the threaded drive 220. The two rods 222 and 224 have opposite thread direction such that rotating the drive 220 extends or retracts the two threaded rods 222 and 224. The threaded rods 222 and 224 are also threaded into the biaxial rotary couplings 202 and 204. Thus, rotating the drive 220 increases or decreases distance between the two biaxial rotary couplings 202 and 204

[00026] The structure of Fig. 2 is used to attach the substrate support 1 16 to the base 102 in Fig 1 A. Each of the three adjustable length link members 128, 128, and 130 is attached to the respective link points and grounds by two biaxial rotary couplings, as shown in Fig. 2. In this way, the substrate support 1 16 can be moved in a planar fashion and in a direction perpendicular to the plane by operation of the cone-shaped movement volume of each adjustable length link member 126, 128, and 130. The adjustable length link members allow positioning and alignment of the substrate support 1 16 in a plane set by a vertical support (not shown) that positions the substrate support 1 18 in a direction perpendicular to the plane. [00027] Fig. 3 is a detaiied view of an adjustable length link member assembly 301 deployed with the substrate support of Figs. 1 A and 1 B. An adjustable length link member 300 is attached to a first biaxial rotary coupling 302, which is in turn attached to a ground 304 upon the base 102. The adjustable length link member 300 is also attached to a second biaxial rotary coupling 306, which in turn is attached to a link point 308 of the substrate support 1 16. In the embodiment of Fig. 3, the first and second biaxial rotary couplings 302 and 306 are at different elevations, so the rotation of the second rotor 210 compensates for the misalignment in elevation. As the distance between the substrate support 1 16 and the base 102 changes, the rotors 210 rotate, and the adjustable length link member 300 changes angle with respect to a lower surface of the substrate support 1 16 and the base 102. In this case, the dimension of the passage 218 through the first rotor 208 defines the maximum distance change between the substrate support 1 16 and the base 102 that the structure of Fig. 3 can allow in other cases, the passage 218 through the first rotor 208 may allow more freedom of movement than the passage 216 through the housings 206. Rotation of the first rotors 208 allows for planar positioning and alignment of the substrate support 1 16 at any elevation of the link point 308 reachable by rotation of the second rotors 210.

[00028] Figs. 4A-4D are activity views of the substrate support 1 16 in various stages of alignment using the positioning mechanism 124. In Fig. 4A, the substrate support 1 16 is misaligned on the base 102. The substrate support 1 16 needs to be rotated to align with the base 102, and needs to be shifted to a desired location with the third edge 148 aligned with the edge 406 of the base 102 and the fourth edge 150 aligned with a target edge location 402. Using the positioning assembly, the third adjustable length link member 130 is shortened in the“A” direction to align the substrate support 1 16. The second adjustable length link member 128 does not change length in this operation, but swings in the“B” direction, away from the third adjustable length link member 130, as the substrate support 1 16 rotates. Likewise, the first adjustable length link member 126 rotates slightly in the “C” direction toward the second adjustable length link member 128.

[00029] In the example of Figs. 4A-4D, optional rotational actuators 404 are coupled to the threaded drives of each adjustable length link member 126, 128, and 130 to provide actuated adjustment of the substrate support 1 16 position. Also, optionally, a first alignment sensor 408 is deployed along the edge 406 of the base 102 and a second alignment sensor 410 is deployed along the target edge location 402. The first and second alignment sensors 408 and 410, which may be laser alignment sensors, can be operatively coupled to the rotational actuators 404, for example using a controller, to detect misalignment of the substrate support 1 16 and signal the rotational actuators 404 to adjust and correct the alignment. In some cases, the threaded drives of the adjustable length link members 126, 128, and 130 can be operated manually instead of, or in addition to, automatically.

[00030] Fig. 4B shows the substrate support 1 16 after the alignment operation depicted in Fig. 4A. It is desired in Fig. 4B to shift the substrate support 1 16 to align the third edge 148 toward the edge of the base 102, as indicated by the dotted arrows. In this case, the first adjustable length link member 126 is extended in the “D” direction. The second and third adjustable length link members 128 and 130 do not change in length during this operation. For that reason, changing the length of the first adjustable length link member 126 does not rotate the substrate support 1 16. The second and third adjustable length link members 128 and 130 swing in the Έ” and“F” directions, and the substrate support 1 16 shifts toward the edge of the foundation where alignment is desired in this operation, the substrate support 1 16 and the second and third adjustable length link members 128 and 130 operate as a“rocker” type four-bar mechanism.

[00031 ] Fig. 4C shows the substrate support 1 16 with the third edge 148 aligned with the edge of the base 102. in Fig. 4C, it is desired to shift the substrate support 1 16 to align the fourth edge 150 with the target edge location 402, while maintaining alignment of the third edge 148 with the edge of the base 102 and maintaining rotational alignment of the substrate support 1 16. For this operation, an iterative approach is followed. The second and third adjustable length link members 128 and 130 are lengthened in the“G” and Ή” directions by the same amount, by rotating the drives of each link member the same amount, for example a quarter-turn at a time. During this operation, the first adjustable length link member 126 will swing in the“I” direction away from the second and third link members 128 and 130, and the third edge 148 of the substrate support 1 16 will become misaligned with the edge of the base 102. The first adjustable length link member 126 is adjusted in length in the“J” direction, either lengthening or shortening. The second and third link members 128 and 130 swing accordingly to realign the third edge 148 with the edge of the base 102. To the extent the fourth edge 150 is still misaligned with respect to the target edge location 402, the process of Fig. 4G is repeated until both edges are aligned. Fig. 4D shows the substrate support 1 16 in its fully aligned position.

[00032] In all the positioning activities described above, the biaxial rotary couplings allow for movement of the substrate support 1 16 in the direction perpendicular to the surface of the substrate support 1 16. Because the couplings can rotate around the x and y axes (/.e. horizontal axes), as well as the z axis (i.e vertical axis), the couplings can support the lateral positioning movement of the substrate support 1 16 at various different z positions.

[00033] The biaxial rotary couplings described above can be used to maintain alignment of the substrate support 1 16 periodically. For example, as conditions change, and through use of the printing system 100, the substrate support 1 16 may become slightly misaligned. Misalignment of even a few microns can cause printing faults. Alignment of the substrate support 1 16 can be checked periodically using any convenient method, such as laser interferometry or other extreme precision measurement technique. Slight misalignments of even 1 pm can be corrected by slight turns of the appropriate link members 126, 128, and 130, to bring the substrate support back into alignment.

[00034]

[00035] It should be noted that, whereas Figs. 4A-4D depict alignment operations occurring sequentially, such operations can also be undertaken concurrently. For example, rather than aligning the substrate support 1 16 stepwise, as depicted in Figs. 4A-4D, the three adjustable length link members 126, 128, and 130 may be automatically adjusted continuously and concurrently by operation of the rotational actuators 404, while the first and second alignment sensors 408 and 410 signal alignment of the substrate support 1 16, until alignment of the substrate support 1 16 along both edges is within a tolerance. [00036] While the foregoing is directed to embodiments of the present invention, other and further embodiments of the present disclosure may be devised without departing from the basic scope thereof, and the scope thereof is determined by the ciaims that follow.

Claims

What is claimed is:

1 . A mechanism, comprising: a body having a first link point, a second link point spaced apart from the first link point and a third link point non-collinear with the first and second link points; a first rigid adjustable length link member having a first end and a second end opposite the first end, the first end coupled to the first link point by a first biaxial rotary coupling and the second end coupled to a first ground by a second biaxial rotary coupling having a first rotation orientation; a second rigid adjustable length link member having a first end and a second end opposite the first end, the first end coupled to the second link point by a third biaxial rotary coupling and the second end coupled to a second ground by a fourth biaxial rotary coupling having a second rotation orientation perpendicular to the first rotation orientation; and a third rigid adjustable length link member having a first end and a second end opposite the first end, the first end coupled to the third link point by a fifth biaxial rotary coupling and the second end attached to a third ground by a sixth biaxial rotary coupling having the second rotation orientation, the body being positionable in three dimensions relative to the first, second, and third grounds

2. The mechanism of claim 1 , wherein the body is a platform

3. The mechanism of claim 2, wherein the first iink point and the second iink point define a first axis, the second link point and the third link point define a second axis, and the first axis forms an angle of 45^e to 135^e with the second axis.

4. The mechanism of claim 3, wherein the first rotation orientation is directed along the second axis and the second rotation orientation is directed along the first axis.

5. The mechanism of claim 4, wherein the first link point is oriented along a first planar surface of the platform, the second iink point is oriented along a second planar surface of the platform, and the third link point is oriented along a third planar surface of the platform.

6. The mechanism of claim 5, wherein the first, second, and third grounds are attached to a fourth planar surface parallel to the first planar surface.

7. The mechanism of claim 6, wherein each of the first, second, and third adjustable length link members includes an internally threaded drive engaged with two threaded rods.

8. The mechanism of claim 7, further comprising a rotational actuator coupled to each internally threaded drive.

9. A support, comprising: a platform having a first link point, a second link point spaced apart from the first link point, and a third link point non-coilinear with the first and second link points; a first rigid adjustable length positioner having a first end and a second end opposite the first end, the first end coupled to the first link point by a first biaxial rotary coupling and the second end attached to a first ground by a second biaxial rotary coupling having a first rotation orientation; a second rigid adjustable length positioner having a first end and a second end opposite the first end, the first end coupled to the second link point by a third biaxial rotary coupling and the second end attached to a second ground by a fourth biaxial rotary coupling having a second rotation orientation different from the first rotation orientation; and a third rigid adjustable length positioner having a first end and a second end opposite the first end, the first end coupled to the third link point by a fifth biaxial rotary coupling and the second end attached to a third ground by a sixth biaxial rotary coupling having the second rotation orientation, the platform being positionable in three dimensions relative to the first, second, and third grounds.

10. The support of claim 9, wherein the second rotation orientation is perpendicular to the first rotation orientation.

1 1 . The support of claim 9, wherein the first link point and the second link point define a first axis, the second link point and the third link point define a second axis, and the first axis forms an angle of 45^® to 135^® with the second axis.

12. The support of claim 1 1 , wherein the first rotation orientation is directed along the second axis and the second rotation orientation is directed along the first axis.

13. The support of claim 12, wherein the first link point is oriented along a first planar surface of the platform, the second link point is oriented along a second planar surface of the platform, the third link point is oriented along a third planar surface of the platform.

14. The support of claim 13, wherein each of the first, second, and third adjustable length link members includes an internally threaded drive engaged with two threaded rods.

15. The support of claim 13, wherein the first, second, and third planar surfaces are ail parallel.

18. The support of claim 13, wherein at least one of the first, second, and third planar surfaces is not parallel to the others.

17. The support of claim 14, further comprising a rotational actuator coupled to each internally threaded drive.

18. A support table, comprising : a platform having a footing structure, the footing structure having a first link point, a second link point spaced apart from the first link point, and a third link point non-co!linear with the first and second link points; a first rigid adjustable length positioner having a first end and a second end opposite the first end, the first end coupled to the first link point by a first biaxial rotary coupling and the second end attached to a first ground by a second biaxial rotary coupling, the first biaxial rotary coupling having a first rotation orientation along an axis between the second link point and the third link point; a second rigid adjustable length positioner having a first end and a second end opposite the first end, the first end coupled to the second link point by a third biaxial rotary coupling and the second end attached to a second ground by a fourth biaxial rotary coupling having a second rotation orientation along an axis between the first link point and the second link point; and a third rigid adjustable length positioner having a first end and a second end opposite the first end, the first end coupled to the third link point by a fifth biaxial rotary coupling and the second end attached to a third ground by a sixth biaxial rotary coupling having the second rotation orientation.

19. The support table of claim 18, wherein the first link point is oriented along a first planar surface of the platform, the second link point is oriented along a second planar surface of the platform, the third link point is oriented along a third planar surface of the platform.

20. The support table of claim 18, wherein each of the first, second, and third rigid adjustable length positioners comprises an internally threaded drive engaged with two threaded rods, and each internally threaded drive is coupled to a rotational actuator, and further comprising at least one alignment sensor operatively coupled to the rotational actuators.