JP4962880B2 - Articulated robot and manufacturing method of production equipment - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To transfer a robot without disassembling the robot and easily install the robot, and to provide a method for manufacturing a production facility. <P>SOLUTION: This articulated robot includes a pedestal, a column stood on the pedestal and including at least an upper side block and a lower side block, a moving mechanism provided in the column to move along the column, a support member connected to the moving mechanism, and an arm supported by the support member and including a plurality of joints. The articulated robot includes a movable member for connecting the upper side block and the lower side block so that the upper side block may be oscillatable up to a laid state and a fixing member for fixing the upper side block in the laid state of the upper side block. <P>COPYRIGHT: (C)2011,JPO&amp;INPIT

Description

  The present invention relates to an articulated robot for moving a thin plate-like workpiece such as a liquid crystal glass substrate or a semiconductor wafer into and out of a stocker and a method for manufacturing a production facility.

As a conventional articulated robot, an articulated robot that reduces the turning radius of the articulated robot when the pedestal is rotated by offsetting the rotation center of the shoulder joint and the rotation center of the pedestal has been proposed (for example, Patent Document 1).
As shown in FIG. 5, the conventional articulated robot 1 includes two sets of arms 2 that are rotatably connected by joint portions 3, 4, and 5 to transmit a rotational force from a rotational drive source and perform a desired operation. Therefore, the rotation center axis of the joint portion 3 at the base end provided on the two sets of arms 2 is arranged vertically (or axially).
The articulated robot 1 is provided with two sets of arms 2, one arm drive type device 2 is used for supplying and the other is used for taking out, and the supply operation of the workpiece 9 and the extraction operation of another workpiece 9 are performed simultaneously. It is possible.
Further, the conventional articulated robot 1 is configured such that the hand portion 8 that holds the workpiece 9 by the arm 2 can linearly move in the direction of taking out and supplying the workpiece 9 indicated by an arrow X in the figure.
Further, the conventional articulated robot 1 includes a moving member 11 (hereinafter, referred to as a vertical movement mechanism 11) that moves the support member 10 provided with the arm 2 up and down, and can adjust the vertical position of the arm 2. It is said. The pedestal 13 of the vertical movement mechanism 11 is provided so as to be rotatable so that the articulated robot 1 can be turned to change its direction.
Further, in the articulated robot 1 of the present embodiment, the base 13 is mounted on the base 14 in the direction indicated by the arrow Y in the drawing, that is, in the direction orthogonal to the moving direction of the hand portion 8 and the vertical moving direction of the support member 10. The position of the vertical movement mechanism 11 can be adjusted.
Further, the two sets of arms 2 provided in the conventional articulated robot 1 have, for example, a plurality of joint portions, that is, the articulated robot 1 is configured as a horizontal articulated robot. The arm 2 in this embodiment includes a first arm 6 (hereinafter referred to as the upper arm 6), a second arm 7 (hereinafter referred to as the forearm 7) connected to the upper arm 6, and a work 9 connected to the forearm 7. And a hand portion 8 for holding the.
The base end of the upper arm 6 is connected to the support member 10 via a drive shaft, and constitutes a rotatable joint 3 (hereinafter referred to as a shoulder joint 3). This shoulder joint 3 becomes the joint 3 at the base end of the arm 2. Further, the distal end of the upper arm 6 and the proximal end of the forearm 7 are connected via a drive shaft to constitute a rotatable joint 4 (hereinafter referred to as an elbow joint 4). Further, the tip of the forearm 7 and the hand portion 8 are connected via a drive shaft to constitute a rotatable joint portion 5 (hereinafter referred to as a hand joint portion 5). It arrange | positions so that it may face in the up-down direction so that the rotation center axis | shaft of the shoulder joint part 3 may be coaxial.
The arm 2 rotates the shoulder joint 3, the elbow joint 4, and the hand joint 5 by a rotation drive source (not shown), and moves the hand 8 in the workpiece take-out / supply direction. At this time, in the arm 2, due to the mechanism, the hand portion 8 faces in one direction, the extended position where the upper arm 6 and the forearm 7 are fully extended, and the contracted position where the upper arm 6 and the forearm 7 are folded. The telescopic movement is performed so as to move in a straight line.
Here, the conventional articulated robot 1 is designed so that the center of the work 9 held by the hand portion 8 coincides with the rotation center of the pedestal 13 at the retracted position of the arm 2 shown in FIG. ing. Further, when the pedestal 13 is rotated by offsetting the rotation center of the shoulder joint portion 4 and the rotation center of the pedestal 13 in a direction orthogonal to the moving direction of the hand portion 8, it is necessary around the multi-joint robot 1. The turning radius of the articulated robot 1 can be reduced by preventing the elbow joint 4 and the hand 8 from projecting from the minimum region circle 15.
JP-A-2001-274218 (pages 4 to 5, FIGS. 1 and 2)

Articulated robots for loading and unloading thin plate-like workpieces such as glass substrates for liquid crystals and semiconductor wafers into the stocker are becoming larger. This is because it is desired that many thin plate-like workpieces such as glass substrates for liquid crystals and semiconductor wafers are arranged and processed by the stocker. The background is that the number of liquid crystal substrates and semiconductor wafers produced is increasing year by year.
However, there is a limit to the storage size of transportation equipment that can be transported by a large-sized robot such as a conventional articulated robot, and a robot once assembled at a robot manufacturing factory is disassembled and delivered. Therefore, it is necessary to reassemble at a factory that uses a robot, which causes a problem that a large crane or production equipment is required as assembly equipment in the factory. Further, in order to reassemble the robot, it is necessary to dispatch an assembly person who can assemble the robot, and there is a problem that the work man-hour and the work time increase. This means that in a factory that produces glass substrates and semiconductor wafers for liquid crystals, the start-up period of the factory will be long, and it is virtually impossible to produce glass substrates and semiconductor wafers for liquid crystals. As a result, there has been a problem that productivity is reduced.
The present invention has been made in view of such problems, and an object of the present invention is to provide a manufacturing method of a production facility that can be transferred without disassembling a robot and can be easily installed.

In order to solve the above problems, the present invention is configured as follows.
An articulated robot according to the present invention includes a pedestal, a column standing on the pedestal and having at least an upper block and a lower block, a moving mechanism provided on the column and moving along the column, and connected to the moving mechanism. An articulated robot having a support member and an arm having a plurality of joints supported by the support member, wherein the upper block and the lower block are coupled so that the upper block can swing to a sideways state. It has a movable member and a fixing member that fixes the second block in a state where the second block is laid down.
Moreover, it is preferable that a movable member is attached to the side part of an upper block and a lower block, respectively, and is formed by the movable angle which connects an upper block and a lower block so that rocking | fluctuation is possible.
In addition, the fixing member is preferably formed by a fixed angle that is connected to each of the upper block and the lower block in a state of being laid down and fixes the upper block and the lower block to each other. The fixed angle is preferably fixed to the upper block and the lower block so as to cover the connecting surfaces of the upper block and the lower block, respectively.
Moreover, it is preferable to have a supporting jig attached to the upper block, a pulley and a wire, and a rotating jig in which the wire is connected to the supporting jig, and a wire operating device for operating the wire.
The production equipment manufacturing method according to the present invention includes a pedestal, a column standing on the pedestal and having at least an upper block and a lower block, a moving mechanism provided on the column and moving along the column, and connected to the moving mechanism. A production facility including an articulated robot having a support member and an arm having a plurality of joints supported by the support member, wherein the upper block and the lower block can be swung by a movable member ligated, rocking the step of transferring the multi-joint robot to the installation location in the state of fixed by fixing members to the upper block as sideways state, the steps of removing the fixing member from the upper block and the lower block, the upper block from sideways state Causing the upper block and the lower block to be coupled, and moving the movable member to the upper block and the upper block. It is characterized by having a step of removing from the lower block.

According to the articulated robot according to the present invention, the process of assembling a raised column can be shortened, so that productivity is improved. In addition, it is possible to measure the vibration mode of the column or to measure whether it is standing upright by attaching a jig to the mounting hole, and it is easy to carry out the test before shipping without preparing special equipment. By being able to do so, the test time can be shortened. Thus, the time to total shipment can be shortened, and productivity is improved.
In addition, according to the manufacturing method of the production equipment according to the present invention, since the upper block is set up vertically from the state where the upper block is laid down, the robot can be easily installed, and the articulated robot can be installed. The production facility does not require large facilities such as a large crane as assembly equipment, and the articulated robot is not reassembled. Therefore, installation work can be performed without dispatching special workers. Since the multi-joint robot can be easily installed in this way, the factory startup period can be shortened in a factory that produces glass substrates and semiconductor wafers for liquid crystals. It is possible to improve the productivity of substrates, semiconductor wafers, and the like.

The perspective view of the articulated robot which shows the Example of this invention Top view of an articulated robot showing an embodiment of the present invention Side view of an articulated robot with the upper column block lying down Side view of an articulated robot with a transfer jig Perspective view of a conventional articulated robot

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

FIG. 1 is a perspective view of an articulated robot according to the present invention. FIG. 2 is a top view of the articulated robot of the present invention. FIG. 3 is a front view of the articulated robot of the present invention.
The articulated robot 1 of the present invention has a structure in which columns 12 divided into a plurality of blocks are connected to cope with an increase in the height of a stocker (not shown). In this way, the articulated robot 1 having a height corresponding to a high layer is formed by sequentially connecting the column blocks 16. In this embodiment, four column blocks 16 are connected. Both end surfaces of each column block 16 have a fitting structure so that the column blocks 16 are connected to each other, and further have positioning holes (not shown) for accurately arranging a guide mechanism including a linear guide, It is assembled by adjusting using a positioning jig.
Further, the articulated robot 1 of the present invention includes two sets of arms 2 that are rotatably connected by the joint portions 3, 4, and 5 and transmit a rotational force from a rotational drive source to perform a desired operation. Further, the hand portion 8 that holds the workpiece 9 by the arm 2 is configured to be linearly movable in the direction of taking out and supplying the workpiece 9 indicated by an arrow X in the drawing. Further, as shown in FIG. 2, the relationship between the rotation center axes of the proximal joint portions 3 provided in the two sets of arms 2 is the movement direction of the hand portion 8 with respect to the proximal joint portion 3 of the upper arm 21. The joint portion 3 at the base end of the lower arm 22 is arranged so as to be displaced.
Moreover, the vertical movement member 11 which moves the support member 10 with which the arm 2 is provided up and down is provided, and the vertical position of the arm 2 can be adjusted. The pedestal 13 of the vertical movement mechanism 11 is provided so as to be rotatable so that the articulated robot 1 can be turned to change its direction. Here, the vertical movement mechanism 11 is arranged in the same direction as the movement direction of the hand unit 8, and the support member 10 protrudes from the vertical drive mechanism 11 in a direction orthogonal to the movement direction of the hand unit 8, It is connected to the joint portion 3 at the end. Further, the support member 10 connected to the lower arm 22 is offset in the moving direction of the hand portion 8 as shown in FIG. 2 so as not to interfere with the pedestal 13 when the arm 2 is moved downward by the vertical movement mechanism 11. Form a shape.
The part where the present invention is different from Patent Document 1 is a part in which a column is formed by connecting a plurality of column blocks.

Next, the operation will be described. The two sets of arms 2 provided in the articulated robot 1 of the present invention have, for example, a plurality of joints, that is, the articulated robot 1 is configured as a horizontal articulated robot. The arm 2 in the present embodiment has a structure similar to that of the conventional arm 2.
The base end of the upper arm 6 is connected to the support member 10 via a drive shaft, and constitutes a rotatable shoulder joint 3. This shoulder joint 3 becomes the joint 3 at the base end of the arm 2. Further, the distal end of the upper arm 6 and the proximal end of the forearm 7 are connected via a drive shaft to constitute a rotatable elbow joint 4. Moreover, the front-end | tip of the forearm 7 and the hand part 8 are connected via the drive shaft, and the rotatable hand joint part 5 is comprised.
The arm 2 rotates the shoulder joint 3, the elbow joint 4, and the hand joint 5 by a rotation drive source (not shown), and moves the hand 8 in the workpiece take-out / supply direction. At this time, in the arm 2, due to the mechanism, the hand portion 8 faces in one direction, the extended position where the upper arm 6 and the forearm 7 are fully extended, and the contracted position where the upper arm 6 and the forearm 7 are folded. The telescopic movement is performed so as to move in a straight line.

Next, a method for transferring the articulated robot 1 will be described. Since the articulated robot 1 of the present invention becomes so high that it reaches the ceiling of the factory, the articulated robot 1 is transported in a state where the column is tilted. In the present embodiment, the lowermost column block 16 and the column block 16 connected thereto are transported in a structure in which the column 12 is tilted as shown in FIG. At this time, two angles of the movable angle 17 and the fixed angle 18 are used to connect the column blocks 16 together. The movable angle 17 is fastened with a screw to a surface in a direction in which the column 12 is tilted. Further, the fixed angle 18 is formed so as to cover the inside of the column block 16 so as not to be exposed to the outside air, and is attached by being fastened with screws or the like. As described above, the column block 16 is provided with the mounting holes 25. Here, although it used for attachment of a movable angle, a fixed angle, etc., you may use for the attachment hole of the sensor for measuring the positioning accuracy and vibration of the articulated robot 1 as another use.
Further, the two arms 2 are lowered and moved to the lowest position of the column 12, and the hand portion 8 is moved and arranged so as to be in a contracted position where the upper arm 6 and the forearm 7 are folded.
By doing so, the articulated robot 1 is formed and transported so that the height thereof is lowered.

Next, the transfer state formation method and installation method of the articulated robot 1 will be described.
A method for forming the transfer state of the articulated robot will be described below with reference to FIG.
First, the hand portions 8 of the two arms 2 move so as to be in a contracted position where the upper arm 6 and the forearm 7 are folded.
Next, the two arms 2 are moved so as to be at the lowest position of the column 12.
Next, the movable angle 17 is fastened with screws to the surface in the direction in which the column 12 falls.
Next, the rotary jig 19 is attached to the lowermost column block 16.
Next, the column block support jig 20 provided with the pulley is attached to the column block to be brought down.
Next, the wire operating device 23 is arranged, and the wire 24 is circulated through the pulleys of the rotary jig 19 and the column block support jig 20.
Next, the screw etc. which connected the column block 16 are removed.
Next, the wire operating device 23 is operated, and the wire 22 is gradually sent out to a position where the upper column block 16 is horizontal with respect to the installation surface 26.
Next, as shown in FIG. 3, when the upper column block 16 is horizontal with respect to the installation surface 26, the fixed angle 18 is screwed with a screw or the like so that the inside of the column block 16 is not exposed to the outside air. Conclude.
Transfer preparation is completed by forming the robot operation and the column structure in the above order.
Moreover, when installing, a column block can be raised vertically by performing according to the reverse procedure of the above-mentioned transfer state formation method.

DESCRIPTION OF SYMBOLS 1 Articulated robot 2 Arm 21 Upper arm 22 Lower arm 3 Shoulder joint part 4 Elbow joint part 5 Hand joint part 6 Upper arm 7 Forearm 8 Hand part 9 Work 10 Support member 11 Vertical movement mechanism 12 Column 13 Base 14 Base 16 Column block 17 Movable angle 18 Fixed angle 19 Rotating jig 20 Column block support jig 23 Wire operating device 24 Wire 25 Mounting hole 26 Installation surface

Claims (6)

A pedestal, a column standing on the pedestal and having at least an upper block and a lower block, a moving mechanism provided on the column and moving along the column, a support member coupled to the moving mechanism, An articulated robot having an arm supported by a support member and having a plurality of joints,
A movable member that connects the upper block and the lower block so that the upper block can swing to a sideways state;
An articulated robot, comprising: a fixing member that fixes the upper block in a state where the upper block is in the sideways state. The movable member is attached to each of side portions of the upper block and the lower block, and is formed by a movable angle that connects the upper block and the lower block so as to be swingable. The articulated robot according to claim 1. The fixing member is
2. The apparatus according to claim 1, wherein the upper block and the lower block are connected to each of the upper block and the lower block in the state of being laid down, and the upper block and the lower block are fixed to each other. 2. The articulated robot according to 2. The fixed angle is
The articulated robot according to claim 1 or 2, wherein the articulated robot is fixed to the upper block and the lower block so as to cover the connecting surfaces of the upper block and the lower block, respectively. A support jig attached to the upper block;
A rotating jig having a pulley and a wire, wherein the wire is connected to the support jig;
The articulated robot according to claim 1, further comprising: a wire operation device that operates the wire. A pedestal, a column standing on the pedestal and having at least an upper block and a lower block, a moving mechanism provided on the column and moving along the column, a support member coupled to the moving mechanism, A method of forming a production facility including an articulated robot having an arm supported by a support member and having a plurality of joints,
A step of said upper block and said lower block swingably connected by the movable member, transferring the multi-joint robot in the state of fixed by fixing members to the upper block as sideways state to the installation location,
Removing the fixing member from the upper block and the lower block;
Causing the upper block to swing from the sideways state;
Connecting the upper block and the lower block;
Removing the movable member from the upper block and the lower block. A method for manufacturing production equipment, comprising:

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