WO2020110459A1

WO2020110459A1 - Pressure measurement mechanism and breaking device provided with said pressure measurement mechanism

Info

Publication number: WO2020110459A1
Application number: PCT/JP2019/039087
Authority: WO
Inventors: 奥田　修; 雄一金平
Original assignee: 三星ダイヤモンド工業株式会社
Priority date: 2018-11-27
Filing date: 2019-10-03
Publication date: 2020-06-04
Also published as: TW202023780A

Abstract

Provided are a pressure measurement mechanism and a breaking device that can perform load measurement on a substrate with high accuracy and prevent damage on a load cell even if an abnormal load is applied to a blade in pressure measurement during breaking of the substrate. The present invention provides a pressure measurement mechanism (12) of a breaking device (1) comprising a blade unit (2) that breaks a substrate (19) with a blade (3) and a driving unit (4) that lowers the blade unit (2). The pressure measurement mechanism (12) has an upper sliding member (14) that moves vertically, a lower sliding member (15) that is arranged under the upper sliding member (14) and moves the blade unit (2) vertically, a measurement unit (13) that is pressed by the lower sliding member (15) and measures a reactive force acting on the blade (3), and a retaining member (16) that retains the measurement unit (13) and is coupled to the upper sliding member (14). A previously-compressed spring (17) is held between the upper sliding member (14) and the lower sliding member (15).

Description

Pressure measuring mechanism and break device equipped with the pressure measuring mechanism

The present invention relates to a technique for measuring a break load of a board based on a reaction force that acts when a blade provided in a blade portion is pressed against the board when breaking the board along a scribe line.

BACKGROUND ART Conventionally, for example, a substrate such as a brittle material substrate is divided into a scribing step of forming a scribe line (vertical crack) on the substrate and a breaking step of dividing the substrate along the scribe line. Among them, a breaking device is used in the breaking process.
The breaking device arranges the substrate with the surface on which the scribe line is formed as the lower surface, arranges the blade (blade) so as to match the scribe line of the substrate, and from the position directly above the scribe line to the upper surface of the substrate. The blade is pressed against the back surface of the scribe line to divide the substrate in a vertical cross section along the scribe line. As a technique related to the break device, for example, there is one disclosed in Patent Document 1.

JP, 2014-139025, A

By the way, when breaking the substrate along the scribe line, in order to confirm that the substrate is divided with an appropriate load, the reaction force that acts when the blade provided in the blade portion is pressed against the substrate. Based on, the load applied to the substrate is measured.
An example of a device for measuring the load (break load) applied to the substrate is a pressure measuring mechanism 112 provided in the conventional break device 101 as shown in FIG.

As shown in FIG. 5, specifically, the pressure measuring mechanism 112 includes a drive unit 104 including a motor 105, a moving unit (ball screw) 106, and a guide unit (LM guide) 109, and a vertical direction by the drive unit 104. It has an upper slide member 114 that moves to a lower position, and a lower slide member 115 that is connected to the upper slide member 114, holds the measuring unit 113 (load cell), and has the blade unit 102 attached thereto. The load cell 113 is in a state where the measurement point is in contact with the upper slide member 114. A compression adjustment unit 118 that adjusts the state of the load cell 113 is provided on the upper slide member 114.

The conventional pressure measuring mechanism 112 is a method of directly measuring the load, and when the blade 103 of the blade portion 102 is pressed against the substrate 119, the reaction force acting at that time is directly applied to the load cell 113 at the time of breaking. It is supposed to be done.
That is, regarding the arrangement of the pressure measuring mechanism 112, the member that moves in the vertical direction by the driving unit 104 is divided into the upper slide member 114 and the lower slide member 115 including the blade unit 102, and the load cell 113 is moved upward. The member 114 is arranged so as to make zero clearance contact.

Further, as the measurement direction of the pressure measurement mechanism 112, the pressure measurement mechanism 112 is attached in a direction in which a load is applied to the load cell 113 when the substrate 119 is broken. That is, the load cell 113 is arranged so as to be pressed against the upper slide member 114 when the substrate 119 is broken.
As the initial setting of the pressure measuring mechanism 112, the compression adjusting unit 118 is adjusted so that the relationship between the load cell 113 and the upper slide member 114 is adjusted to zero. Alternatively, the load cell 113 is slightly pre-pressurized.

However, when the substrate 103 is broken, when the blade 103 of the blade unit 102 is pressed against the substrate 119, an abnormal load is applied to the blade 103 (for example, foreign matter is caught between the blade 103 and the substrate 119). When the load cell 113 installed in the lower slide member 115 is strongly pressed against the upper slide member 114, the reaction force acting at that time becomes strong, when it is stopped by being stopped and a high load is applied for some reason. Therefore, since a high load is directly applied to the load cell 113, there is a risk of collapse.

Further, as a problem of the pressure measuring mechanism 112, since the clearance between the upper slide member 114 and the load cell 113 is intended to be zero, a considerable number of steps are required to adjust the clearance, and a precision mechanism for realizing the clearance is required. Is concerned.
Furthermore, even if the pre-pressurization is applied to the load cell 113, the following problems will be raised. The load cell 113 is, so to speak, like a spring having a large spring constant.

With respect to the load cell 113, it is necessary to make the pressure adjustment highly accurate and to have a mechanism capable of withstanding even when an abnormal load is applied.
When the pre-pressurization of the load cell 113 is weak, there is no load on the load cell 113, and the upper slide member 114 is slightly contacted, resulting in an unstable state. Further, when the load is applied again from the unstable state, the load cell 113 may vibrate.

On the other hand, if the pre-pressurization of the load cell 113 is increased, it can be expected to eliminate the vibration of the load cell 113. However, the measurement range of the load cell 113 becomes narrow.
Therefore, in view of the above problems, the present invention is capable of highly accurately measuring the pressure (load) applied to the substrate based on the reaction force acting on the blade in the pressure measurement at the time of breaking the substrate, and the blade. Even if an abnormal load such as a high load is applied to the blade when the blade of the part is pressed against the substrate, the load cell can be directly loaded with a high load by providing a configuration that allows the reaction force that acts on the blade to escape at that time. It is an object of the present invention to provide a pressure measuring mechanism capable of preventing the load cell from being damaged and preventing the load cell from being damaged, and a break device including the pressure measuring mechanism.

In order to achieve the above object, the following technical means are taken in the present invention.
The pressure measuring mechanism according to the present invention, a blade portion that breaks the substrate by pressing the blade provided at the tip along the scribe line, and the blade portion is lowered to the substrate. In a pressure measuring mechanism provided in a break device having a pressing drive unit, the pressure measuring mechanism is arranged below the upper slide member and an upper slide member that moves in the vertical direction by the driving unit, A lower slide member that moves the blade portion in the vertical direction, and a lower slide member that is provided below the lower slide member and is pressed by the lower slide member from above, and the blade of the blade portion with respect to the blade. The measuring unit that measures a reaction force acting from the substrate, and the holding unit that holds the measuring unit from the lower side at the lower portion and has the upper portion connected to the upper slide member, A spring is sandwiched between the slide member and the lower slide member so as to be in a pre-compressed state.

Preferably, the measuring unit is in a state where a load is applied in advance by the spring in a compressed state, and the lower slide is caused by a reaction force of the blade of the blade unit that acts when the spring is pressed against the substrate. The load of the measuring unit is reduced by moving the member upward, and the amount of decrease in the load of the measuring unit may be measured as the break load of the substrate.

Preferably, the compression state of the spring is changeable by a compression adjustment unit, and the compression adjustment unit is provided above the spring and between the upper slide member and the holding member. I hope you are there.
Preferably, the pressing direction of the drive unit, the measurement point of the measuring unit, the vertical axis of the spring, the arrangement of the compression adjusting unit, and the pressing direction of the blade unit are on the same straight line in the vertical direction. It is good to be located in.

A break device equipped with a pressure measuring mechanism according to the present invention is a blade part that breaks a substrate by pressing a blade provided at the tip along a scribe line, and the blade part is lowered to move the blade part. In a break device including a drive unit that presses a blade against the substrate, and a pressure measurement mechanism that measures a reaction force that acts on the blade of the blade unit from the substrate, the pressure measurement mechanism is configured by the drive unit. An upper slide member that moves in the vertical direction, a lower slide member that is disposed below the upper slide member, that moves the blade portion in the vertical direction, and a lower slide member that is disposed below the lower slide member and that slides the lower slide from above. A measuring unit that is in a state of being pressed by a member; and a holding member that holds the measuring unit from the lower side at the lower part and has an upper part connected to the upper slide member. A spring is sandwiched between the upper slide member and the lower slide member so as to be in a pre-compressed state.

According to the pressure measuring mechanism of the break device of the present invention, in the pressure measurement at the time of breaking the substrate, the load applied to the substrate based on the reaction force acting on the blade can be measured with high accuracy, and the blade part When the blade is pressed against the substrate, even if an abnormal load such as a high load is applied to the blade, the load cell is directly loaded with a high load by providing a configuration that allows the reaction force that acts on the blade to escape at that time. It is possible to prevent the load cell from being damaged.

It is the figure which showed typically the structure of the pressure measurement mechanism of this invention. It is a perspective view of the break device provided with the pressure measurement mechanism of the present invention. It is a front view of the pressure measuring mechanism of this invention. It is a side view of the pressure measuring mechanism of the present invention. It is a top view of a pressure measuring mechanism of the present invention. It is an AA cross-sectional view (side cross-sectional view) of the pressure measuring mechanism of the present invention. It is a BB sectional view (front sectional view) of the pressure measuring mechanism of the present invention. It is the figure which showed typically the structure of the conventional pressure measurement mechanism.

Hereinafter, an embodiment of a pressure measuring mechanism 12 according to the present invention and a breaking device 1 including the pressure measuring mechanism 12 will be described with reference to the drawings.
It should be noted that the embodiment described below is an example in which the present invention is embodied, and the configuration of the present invention is not limited to the specific example.
Also, in the drawings, some of the components are omitted for clarity.

The directions of the x-axis, the y-axis, the z-axis, etc. in the break device 1 and the pressure measuring mechanism 12 are as shown in FIGS. In addition, the x-axis direction may be referred to as “front-back direction”, the y-axis may be referred to as “left-right direction (width direction)”, and the z-axis may be referred to as “up-down direction (vertical direction)”.
Further, the plus direction of the x-axis may be referred to as “forward direction”, and the minus direction of the x-axis may be referred to as “rear direction”. The positive direction of the y-axis may be called "right direction", and the negative direction of the y-axis may be called "left direction". The plus direction of the z axis may be referred to as “upward direction”, and the minus direction of the z axis may be referred to as “downward direction”.

In the following description, the direction shown in the drawings will be the direction when describing the pressure measuring mechanism 12 of the breaking device 1 of the present invention.
FIG. 1 is a diagram schematically showing a configuration of a pressure measuring mechanism 12 provided in the break device 1, and is an example showing a basic technical idea.
The breaking device 1 includes a blade portion 2 that breaks the substrate 19 by pressing a blade 3 (blade) provided at the tip along a scribe line, and lowers the blade portion 2 to cut the blade 3 of the blade portion 2. And a pressure measuring mechanism 12 for measuring a break load when the substrate 3 is divided by pressing the blade 3.

The drive unit 4 is provided on the upper part of the apparatus, and has a motor 5 for generating a driving force, a moving unit 6 for vertically moving the blade unit 2 and the like, and a guiding unit 9 for vertically guiding the blade unit 2 and the like. And have.
In the present embodiment, a ball screw 6 is adopted as the moving means 6, and is composed of a long screw shaft 7 and a nut 8 slidably attached to the screw shaft 7. Further, as the guide means 9, an LM guide 9 including a long rail member 10 and a slider 11 that moves along the rail member 10 is adopted.

The configuration of the pressure measuring mechanism 12 according to the present invention will be described in detail with reference to FIG.
As shown in FIG. 1, the horizontal direction of the paper is the x-axis direction, and the vertical direction of the paper is the z-axis direction. It should be noted that the shapes of the respective constituent members shown in FIG. 1 are merely schematic examples, and are not limited to these shapes.
The pressure measuring mechanism 12 is a load (break load) applied to the substrate 19 at the time of breaking based on a reaction force that acts when the blade 3 provided in the blade portion 2 is pressed against the substrate 19 (brittle material substrate or the like). Is to measure.

As shown in FIGS. 4A and 4B, the pressure measuring mechanism 12 of the present invention is arranged below the upper slide member 14 and the upper slide member 14 that moves in the vertical direction by the drive unit 4, and moves the blade unit 2 in the vertical direction. And the lower slide member 15 to be moved to the lower slide member 15, and the lower slide member 15 is disposed below the lower slide member 15 and is pressed by the lower slide member 15 from above, and acts on the blade 3 of the blade portion 2 from the substrate 19. It has a measuring unit 13 that measures the reaction force, and a holding member 16 that holds the measuring unit 13 from the lower side at the lower portion and that has the upper portion connected to the upper slide member 14.

A spring 17 (details described later) is sandwiched between the upper slide member 14 and the lower slide member 15 so as to be in a pre-compressed state. The measuring unit 13 is in a state (preliminary pressurization) to which a load is applied in advance by the compressed spring 17. In the present embodiment, a load cell is used as the measuring unit 13.
In the pressure measuring mechanism 12 of the present invention, the reaction force of the blade 3 of the blade portion 2 that acts when pressed against the substrate 19 causes the lower slide member 15 to move upward, so that the load of the measuring portion 13 decreases. With the configuration, the amount of decrease of the load of the measuring unit 13 is measured as the break load of the substrate 19.

The compression state of the spring 17 can be changed by the spring pressure adjusting unit 18. The spring pressure adjusting portion 18 is provided above the spring 17 and between the upper slide member 14 and the holding member 16.
Preferably, as shown in FIG. 3A to FIG. 3C, FIG. 4A, FIG. 4B, etc., preferably, the pressing direction of the drive unit 4, the measurement point 13a of the measurement unit 13, the vertical axis of the spring 17, and the spring pressure. The arrangement of the adjusting unit 18 and the pressing direction of the blade unit 2 may be arranged on the same straight line in the vertical direction.

As shown in FIG. 1, the upper slide member 14 of the present embodiment includes a plate member 14a elongated in the up-down direction (z-axis direction) and a lower part of the plate member 14a in the forward direction (plus direction of the x-axis). And an upper plate piece 14b provided so as to project. That is, the upper slide member 14 is a member formed in a T-shape protruding in the front direction. The upper slide member 14 may be L-shaped.

As for the shape of the upper slide member 14, at least a member 14b that sandwiches a spring 17 (details will be described later) in the downward direction (negative direction of the z-axis) is provided, and is movable in the vertical direction (z-axis direction). It is good to have a simple structure.
The nut 8 of the ball screw 6 is attached to the front surface (the surface in the positive direction of the x axis) of the plate member 14a. On the other hand, the slider 11 (upper side) of the LM guide 9 is attached to the rear surface (the surface in the negative direction of the x-axis) of the plate member 14a and is movable in the vertical direction (z-axis direction). .. That is, the upper slide member 14 is connected to the drive unit 4.

The upper plate piece 14b is a member that holds the spring 17 in a compressed state. The lower surface of the upper plate piece 14b (the surface in the negative direction of the z-axis) is in contact with the spring 17. On the other hand, a spring pressure adjusting portion 18 (details will be described later) is attached to the upper surface (the surface in the positive direction of the z axis) of the upper plate piece 14b. The upper slide member 14 is connected to a holding member 16 (details will be described later) via a spring pressure adjusting portion 18.

A lower slide member 15 is provided below the upper slide member 14.
The lower slide member 15 of the present embodiment is provided with a plate member 15a elongated in the up-down direction (z-axis direction) and a lower part protruding from the upper part of the plate member 15a in the forward direction (plus direction of the x-axis). And a plate piece 15b. That is, the lower slide member 15 is a member formed in an L-shape protruding in the front direction.

Regarding the shape of the lower slide member 15, at least a member 15b that sandwiches the spring 17 in the upward direction (the positive direction of the z axis) may be included. Further, the lower slide member 15 is preferably provided independently of the upper slide member 14 and movable in the vertical direction (z-axis direction). The lower slide member 15 and the upper slide member 14 are movable in the vertical direction by each slider 11.

A slider 11 (lower side) of the LM guide 9 (guide means) is attached to a rear surface (a surface in the negative direction of the x-axis) of the plate member 15a, and the plate member 15a can move in the vertical direction (z-axis direction). ing. A blade portion 2 having a blade 3 (blade) at its tip is attached to the lower portion of the plate member 15a.
The lower plate piece 15b is provided below the upper plate piece 14b formed on the upper slide member 14. The lower plate piece 15b is a member that sandwiches the spring 17 in a compressed state and presses the load cell 13 (measurement unit 13) downward by the repulsive force of the spring 17. The upper surface (the surface in the positive direction of the z axis) of the lower plate piece 15b is in contact with the compressed spring 17. On the other hand, the lower surface (the surface in the negative direction of the z axis) of the lower plate piece 15b is in contact with the measurement point 13a of the load cell 13.

The lower plate piece 15b of the lower slide member 15 and the upper plate piece 14b of the upper slide member 14 are provided at a predetermined interval in the vertical direction (z-axis direction).
By the way, in the present embodiment, the load cell 13 is held by the holding member 16.
The holding member 16 of the present embodiment includes a plate member 16a elongated in the up-down direction (z-axis direction) and an upper plate provided so as to project from the upper part of the plate member 16a in the rearward direction (negative direction of the x-axis). It has a piece 16b and a lower plate piece 16c that is provided so as to project from the lower portion of the plate member 16a in the rearward direction (the negative direction of the x axis). That is, the holding member 16 is a member formed in a U-shape in which the plate member 16a is provided with two upper plate pieces 16b and lower plate pieces 16c protruding rearward.

The plate member 16a has a length in the up-down direction (z-axis direction) longer than the height of the space (interval) formed by the lower plate piece 15b of the lower slide member 15 and the upper plate piece 14b of the upper slide member 14. Has become.
The upper plate piece 16b is arranged above the upper plate piece 14b formed on the upper slide member 14. A spring pressure adjusting portion 18 is attached to the lower surface (the surface in the negative direction of the z axis) of the upper plate piece 16b. That is, the holding member 16 is connected to the upper slide member 14 via the spring pressure adjusting portion 18.

On the other hand, the lower plate piece 16c is arranged below the lower plate piece 15b formed on the lower slide member 15. The load cell 13 is attached to the lower plate piece 16c. The measurement point 13a of the load cell 13 faces upward (plus direction of the z-axis). That is, the load cell 13 is arranged so as to be sandwiched between the lower plate piece 16c of the holding member 16 and the lower plate piece 15b formed on the lower slide member 15.

That is, the holding member 16 is a member that surrounds the lower plate piece 15b of the lower slide member 15 and the upper plate piece 14b of the upper slide member 14 from above and below, holds the load cell 13 from below, and holds the load cell 13 at the same time. The measurement point 13a is brought into contact with the lower slide member 15.
A spring 17 for applying a biasing force is incorporated in the space between the upper slide member 14 and the lower slide member 15. That is, the spring 17 is provided in a state of being sandwiched between the upper plate piece 14b of the upper slide member 14 and the lower plate piece 15b of the lower slide member 15.

The spring 17 in the compressed state is incorporated while leaving a reserve force for contraction. It is necessary to leave a residual force for contracting the spring 17 in order to prevent damage to the load cell 13 during abnormal operation. The compressed spring 17 can be regarded as a rigid body.
Since the spring 17 is in contact with both the upper slide member 14 and the lower slide member 15, when the upper slide member 14 moves in the vertical direction (z-axis direction), the lower slide member 15 also moves at the same time. There is. In particular, when each

slide member

14, 15 moves downward (minus direction of the z-axis), the spring 17 connects the upper slide member 14 and the lower slide member 15.

The spring 17 is pre-compressed by being sandwiched between the upper plate piece 14b and the lower plate piece 15b. The spring 17 is in a state of pressing down the lower slide member 15 by the repulsive force and applying preliminary pressure to the load cell 13.
The spring 17 has a predetermined configuration (outer diameter, wire diameter, number of windings, length, etc.). The number of springs 17 is one in FIG. 1, but two or more springs 17 may be provided. The spring 17 is compressed at a predetermined pressure. That is, it is preferable that the spring 17 has a configuration within a measurable range of the load cell 13 and a range in which the target break load of the substrate 19 can be measured.

A compression adjusting unit 18 is provided between the upper slide member 14 and the holding member 16. In the present embodiment, the compression adjustment unit 18 includes a spring pressure adjustment unit 18 that changes the compression state of the spring 17.
The spring pressure adjusting unit 18 may be, for example, a screw 18 or the like whose distance can be adjusted by rotating it. As the screw 18, a fine screw is preferable. Fine screws are preferable because they can be manufactured at low cost, have high rigidity, and can withstand the vibration applied to the device during actual operation.

Specifically, the screw 18 is incorporated into the space formed between the upper plate piece 14b of the upper slide member 14 and the upper plate piece 16b of the holding member 16. The screw 18 connects the upper slide member 14 and the holding member 16.
If the space becomes narrower in the vertical direction when the screw 18 is rotated in the tightening direction, for example, the upper slide member 14 moves in the upward direction (the positive direction of the z axis), so that the compression of the spring 17 is weakened. On the other hand, when the screw 18 is rotated in the loosening direction, the space is expanded in the vertical direction and the upper slide member 14 is pushed downward (minus direction of the z-axis), so that the compression of the spring 17 becomes stronger.

That is, the spring pressure adjusting unit 18 changes the compression state (compression strength) of the spring 17 by changing the size of the vertical space formed between the upper slide member 14 and the holding member 16. It has become a thing.
In summary, the pressure measuring mechanism 12 of the present invention employs a method in which the load is subtracted, the load cell 13 is compressed in advance, and the amount of the decreased load is measured as the break load of the substrate 19. ..

Regarding the arrangement of the pressure measuring mechanism 12, the member that moves in the vertical direction by the drive unit 4 is divided into an upper slide member 14, a lower slide member 15 including the blade unit 2, and a holding member 16 that holds the load cell 13. Then, the spring 17 having the maximum measured load of the load cell 13 is compressed and sandwiched between the upper slide member 14 and the lower slide member 15. A preload is applied to the load cell 13 by the repulsive force of the spring 17.

The pressure measuring mechanism 12 is attached so that the load on the load cell 13 decreases when the substrate 19 is broken. As an initial setting of the pressure measuring mechanism 12, preliminary pressurization is applied up to the maximum measurement load of the load cell 13.
The pressure measuring mechanism 12 has, as a main configuration in the pressing direction (on the z-axis), a drive unit 4 (motor 5, ball screw 6), a holding member 16, a spring pressure adjusting unit 18, an upper slide member 14, in order from the top. The spring 17, the lower slide member 15, the measuring unit 13 (load cell), and the holding member 16 are provided.

The upper slide member 14, the lower slide member 15, and the holding member 16 are provided in an independent state, respectively, and are movable in the vertical direction. However, the upper slide member 14 connected to the drive unit 4 and the holding member 16 connected to the upper slide member 14 via the spring pressure adjusting unit 18 are one unit.
Regarding the lower slide member 15, the spring 17 is placed on the upper surface (the surface in the positive direction of the z-axis) of the lower plate piece 15b. On the other hand, the lower surface of the lower plate piece 15b (the surface in the negative direction of the z-axis) is in contact with the measurement point 13a of the load cell 13. That is, the lower slide member 15 is connected to the upper slide member 14 via the spring 17 and is in contact with the load cell 13.

Further, when an abnormal load is applied, the spring 17 is regarded as a rigid body until the setting of the pre-pressurization, and when the load is further applied, the spring 17 is further compressed, so that the pre-pressurization decreases, The load cell 13 is protected.
By the way, the load cell 13 is continuously loaded. However, since the difference between pre-pressurization and processing (value with reduced load) is used as the measured value (break load), there is no particular problem. That is, "zero point adjustment" is performed every time measurement is performed.

Since the pressure measuring mechanism 12 of the present invention performs the "zero point adjustment" every time, it is not necessary to provide the mechanism for prepressurizing the load cell 13 with a precision mechanism.
Since the load cell 13 is pre-pressurized by the spring 17 and the load cell 13 is constantly in contact with the lower slide member 15 including the blade portion 2, even if the spring 17 expands and contracts due to a change in load, it does not vibrate. Absent. The pressure measuring mechanism 12 of the present invention can measure the break load of the substrate 19 in the entire measurable range of the load cell 13. Further, even if an abnormal load is applied, the load cell 13 will not be damaged.

The operations of the break device 1 and the pressure measuring mechanism 12 when the blade 3 of the blade portion 2 is pressed against the substrate 19 to divide the substrate 19 are as follows.
When the nut 8 of the ball screw 6 moves on the screw shaft 7 in the downward direction (minus direction of the z-axis) by the driving force output from the motor 5 of the drive unit 4, the nut 8 descends to cause the upper slide member 14 to move. Goes down. By the lowering of the upper slide member 14, the slider 11 (upper side) of the LM guide 9 lowers along the rail. The holding member 16 connected to the upper slide member 14 via the spring pressure adjusting portion 18 also descends. The load cell 13 held by the holding member 16 also descends.

Here, when moving in the downward direction, the upper slide member 14 and the lower slide member 15 are made into one unit by the spring 17 regarded as a rigid body. That is, the upper slide member 14 and the lower slide member 15 descend simultaneously. The spring 17 is compressed and incorporated with a residual force of contraction.
The lower slide member 15 is lowered by the spring 17 pushed by the upper slide member 14. By the lowering of the lower slide member 15, the slider 11 (lower side) of the LM guide 9 lowers along the rail. The blade portion 2 provided at the tip of the lower slide member 15 also descends.

At this time, the lower slide member 15 and the load cell 13 are in contact with each other at the measurement point 13a. The load cell 13 comes into contact with the lower slide member 15 and descends while maintaining a state in which a load is applied in advance by the spring 17 in a compressed state (preliminary pressurization).
When the blade 3 of the blade portion 2 comes into contact with the substrate 19 and presses the substrate 19, a reaction force is generated with respect to the blade 3 of the blade portion 2. The lower slide member 15 moves in the upward direction (the positive direction of the z axis) by the reaction force that acts when the blade 3 is pressed against the substrate 19. When the lower slide member 15 rises, the spring 17 contracts.

On the other hand, at this time, the load cell 13 held by the holding member 16 is almost stopped. That is, the lower slide member 15 performs different operations (movement that rises with respect to the stop) with respect to the holding member 16 and the upper slide member 14.
When the lower slide member 15 rises, the spring 17 contracts, so that the lower slide member 15 is less pressed against the measurement point 13a of the load cell 13 that is in contact, and the load is released. That is, since the contact pressure by the lower slide member 15 is reduced, the load (preliminary pressurization) on the load cell 13 is reduced.

The load cell 13 detects a negative load here. The detected reduction amount of the load of the load cell 13 is measured as the break load of the substrate 19.
The present invention is configured such that the spring 17 contracts by the reaction force of the blade 3 of the blade portion 2 that acts when pressed against the substrate 19 and the lower slide member 15 rises, so that the preload on the load cell 13 decreases. Therefore, even if an abnormal reaction force is applied to the blade 3 due to a high load or the like for some reason, the load cell 13 is prevented from receiving an abnormal reaction force. Therefore, damage to the load cell 13 due to an abnormal load can be prevented.

Now, an outline of the pressure measuring mechanism 12 of the present invention will be described with reference to FIGS. 2 to 4A and 4B.
FIG. 2 is a perspective view of the breaking device 1 including the pressure measuring mechanism 12 of the present invention. 3A to 3C are a front view, a side view, and a plan view of the pressure measuring mechanism 12 of the present invention. 4A and 4B are an AA sectional view (side sectional view) and a BB sectional view (front sectional view) of the pressure measuring mechanism 12 of the present invention. 2 to 4A and 4B are examples according to an actual device.

As shown in FIG. 2 to FIG. 4A and FIG. 4B, the motor 5 of the drive unit 4 is provided at the uppermost part of the breaking device 1, and its rotation shaft 5a faces downward (minus direction of z-axis). There is. The rotating shaft 5 a of the motor 5 is connected to the screw shaft 7 of the ball screw 6 via the coupling 20. The screw shaft 7 is provided with its axis oriented in the z-axis direction. The nut 8 of the ball screw 6 is attached to the upper slide member 14.

The upper slide member 14 is provided above the pressure measuring mechanism 12. The upper slide member 14 is attached to the slider 11 (upper side) in which the plate member 14a moves along the rail.
In the embodiment shown in FIGS. 2 to 4A and 4B, the upper plate piece 14b includes a block body provided in the upper portion. The upper plate piece 14b is formed so as to project in the front direction (plus direction of the x-axis), and the nut 8 of the ball screw 6 is attached to the upper plate piece 14b. When the nut 8 moves on the screw shaft 7, the upper slide member 14 moves in the vertical direction (z-axis direction), and the slider 11 (upper side) also moves along the rail. A spring pressure adjusting portion 18 (screw) is provided in contact with the upper surface of the upper plate piece 14b. In this embodiment, two springs 17 are arranged side by side in the left-right direction (y-axis direction) below the upper plate piece 14b.

The lower slide member 15 is provided below the upper slide member 14. The lower slide member 15 is attached to the slider 11 (lower side) in which the plate member 15a moves along the rail. A blade portion 2 having a blade 3 at its tip is attached to the lower portion of the plate member 15a. The lower plate piece 15b is formed so as to project in the front direction (the positive direction of the x axis). Two springs 17 are provided side by side in the left-right direction (y-axis direction) on the upper side of the lower plate piece 15b. That is, the spring 17 is sandwiched between the upper slide member 14 and the lower slide member 15 and is assembled in a compressed state.

The holding member 16 is provided on the front side (the positive direction of the x-axis) of the upper slide member 14 and the lower slide member 15. The holding member 16 is a quadrangular frame body in a front view. The holding member 16 has a long rod member 16a and connecting

members

16b and 16c that connect the rod member 16a.
In addition, in the embodiment shown in FIGS. 2 to 4A and 4B, the rod member 16a corresponds to the plate member 16a in FIG. Further, the connecting member 16b corresponds to the upper plate piece 16b in FIG. Further, the connecting member 16c corresponds to the lower plate piece 16c in FIG.

Two rod members 16a are arranged with their axes oriented in the up-down direction (z-axis direction) and at predetermined intervals in the left-right direction (y-axis direction). The connecting

members

16b and 16c are provided so as to bridge the ends of the two rod members 16a in the left-right direction, and connect the two rod members 16a. The upper connecting member 16b connects the upper ends of the two rod members 16a in the left-right direction. The lower connecting member 16c connects the lower end portions of the two rod members 16a in the left-right direction. Thereby, the holding member 16 becomes a quadrangular frame body in a front view.

By the way, a screw hole is formed in the upper connecting member 16b, and the spring pressure adjusting portion 18 (screw) is inserted into the screw hole. Regarding the spring pressure adjusting portion 18, for example, when the screw 18 is rotated in the tightening direction, the space between the holding member 16 and the upper slide member 14 is expanded in the vertical direction and the spring 17 is pressed, so that the compression of the spring 17 is prevented. Get stronger. On the other hand, when the screw 18 is rotated in the loosening direction, the space between the holding member 16 and the upper slide member 14 is narrowed in the vertical direction and the pressing force is reduced, so that the compression of the spring 17 is weakened.

The rod member 16a is inserted into a through hole provided in the upper plate piece 14b of the upper slide member 14. Further, the rod member 16 a is provided so as to pass through the inside of the spring 17. The rod member 16a is inserted into a through hole provided in the lower plate piece 15b of the lower slide member 15. The rod member 16a is provided slidably in the vertical direction (z-axis direction) with respect to the lower slide member 15.

The load cell 13 (measurement unit) is placed on the lower connecting member 16c. The measurement point 13a of the load cell 13 faces upward (plus direction of the z-axis). The measurement point 13a of the load cell 13 is in contact with the lower plate piece 15b of the lower slide member 15. Preliminary pressurization is applied to the load cell 13 by being pressed against the lower slide member 15 by the repulsive force of the spring 17.

The pressing direction of the drive unit 4, the measurement point 13a of the load cell 13, the vertical axis of the spring 17, the arrangement of the spring pressure adjusting unit 18, and the pressing direction of the blade unit 2 are in the vertical direction (z-axis direction). They are arranged on the same straight line.
Here, the concept of the pressure measuring mechanism 12 of the breaking device 1 of the present invention will be described.

The load cell 13 is confined between the lower slide member 15 provided with the blade portion 2 and the holding member 16 so that the clearance becomes zero. The load applied to the blade 3 by the break is directly detected by the load cell 13. However, the deformation of the load cell 13 due to the load is regarded as a negligible amount.
The load cell 13 does not have a perfect rigid body because the strain gauge is distorted to measure the pressure, and is, so to speak, like a spring having a very large spring constant.

Now, in adjusting the clearance of the load cell 13 to zero, the procedure is as follows.
For example, in the specification of the load cell 13, when the change amount is about 0.06 mm at a load of 1000 N, the spring constant is 16 KN/mm.
In order to accurately create a space provided with the load cell 13 so that the clearance is zero, it is necessary to manufacture the clearance adjusting mechanism with precision and accuracy. The compression adjusting unit 118 of the conventional pressure measuring mechanism 112 is finely adjusted with four screws. Conventionally, precision lead screws are required.

Therefore, by applying pre-pressurization to the load cell 13, it is possible to eliminate the gap.
The measured value can be acquired as the difference between the pre-pressurization of the load cell 13 and the pressure output during the break. However, the pre-pressurization to the load cell 13 is sufficiently performed.
Since the blade portion 2 needs to have a considerable rigidity to hold the blade 3, it has a sufficient weight (about 20 kg).

At the time of a break, a force is applied in a direction opposite to the pre-pressurization due to the acceleration when the break device 1 is moved in the vertical direction, so that the pressure between the load cell 13 and the lower slide member 15 including the blade portion 2 is completely removed. This prevents the occurrence of shock and vibration when the blade 3 is again applied to the substrate 19 from the unstable state which disappears. Vibration can be prevented by increasing pre-pressurization, but the break load measurement range is narrowed.

If the pre-pressurization to the load cell 13 is sufficiently performed, even if the blade portion 2 having a sufficient weight is moved in the vertical direction, it does not vibrate. In addition, it is preferable that the maximum measurement load is always applied to the load cell 13 so that the force generated at the time of break is in the direction of reducing the load on the load cell 13.
In the present embodiment, the load cell 13 (manufactured by TEAC Corporation, model number: TU-PGRH-G) is used as the measuring unit 13.

As a method of using the load cell 13, a pressure is applied in advance, and the pressure when the load decreases from that state is measured. As a reference, for example, 3000N is applied as pre-pressurization to the load cell 13 and set in the break device 1, and the break load on the substrate 19 is measured based on the pressure reduced from the pre-pressurization of the load cell 13 during operation.
Further, as a pre-pressurization of the load cell 13, for example, a pressure of 3000 N is applied in advance so that the load on the load cell 13 at the time of break is reduced. The difference between the output value in the neutral state and the output value when the break actually occurs is measured as the load (break load) due to the break.

In adjusting the inclination of the lower portion 16d of the holding member that holds the blade portion 2, the attachment portion of the blade 3 in the blade portion 2 is in a seesaw shape with the center as the rotation reference 23. One side is pushed by the spring 21, and the other side is adjusted in height by the blade portion balance adjusting mechanism 22 (adjusting screw or eccentric pin). The pressure of the spring 21 is about 10N to 20N.
As shown in FIGS. 2 to 4A and 4B, in the pressure measurement mechanism 12, an upper slide member 14 connected to the drive unit 4, a lower slide member 15 including the blade unit 2, and a holding member that holds the load cell 13. 16, and a 3000N spring 17 is sandwiched between the upper slide member 14 and the lower slide member 15 to apply pre-pressurization to the load cell 13. A load is applied to the load cell 13 in advance, and the amount of decrease in the load is measured as a break load.

Here, as an example, when two springs 17 having a spring constant=60 N/mm are installed, it is necessary to compress the springs 17 by about 25 mm in order to obtain the maximum value of 3000 N in the measurement range. In this case, the spring pressure adjusting portion 18 can be sufficiently attached and adjusted by using a general fine screw without using a precision lead screw.
A feature of the present invention is that the load is constantly applied to the load cell 13. The load exceeding the spring pressure is not applied to the load cell 13. That is, the load cell 13 can be protected during abnormal operation. By providing the spring pressure adjusting unit 18 (screw), the load cell 13 and its measurement range can be changed. In that case, a change in the screw 18 is handled by offset input.

Regarding the detection accuracy of the pressure measurement mechanism 12, if the expected accuracy of the load cell 13 alone is ±3N, for example, guide sliding resistance and noise such as vibration will be added to the device. The measurement resolution and the absolute accuracy of the displayed pressure are considered to be about ±10 N absolute accuracy.
The blade portion 2 (blade 3), the load cell 13, the spring 17 for giving a preliminary pressure, the ball screw 6 and the like are all arranged in a straight line in the vertical direction so that a moment is generated in each structure. Since the noise such as the sliding resistance and vibration of the LM guide 9 is minimized, that is, the noise at the time of pressure measurement can be suppressed as much as possible, the pressure of the blade portion 2 can be accurately measured.

The xy position, height, stroke, etc. of the blade portion 2 are predetermined. The LM guide 9, the motor 5 and the like are also predetermined. When the weight of the device decreases, it is necessary to adjust the gain of the z-axis motor accordingly.
The configuration of the LM guide 9 is divided into a drive unit 4 and a blade unit 2, and a load cell 13 is provided between them. The size of the LM guide 9 and the number of sliders 11 are predetermined. The blade portion 2 has a predetermined rigidity.

As described above, the inclination adjusting mechanism of the lower portion 16d of the holding member is adjusted by the rotation reference 23 and the blade portion balance adjusting mechanism 22 (eccentric pin). In this embodiment, the adjustment amount is ±0.3 mm.
As described above, according to the pressure measuring mechanism 12 of the breaking apparatus 1 of the present invention, in the pressure measurement when the substrate 19 is broken, the load applied to the substrate 19 is naturally measured with high accuracy based on the reaction force acting on the blade 3. In addition, when the blade 3 of the blade portion 2 is pressed against the substrate 19, even when an abnormal load such as a high load is applied to the blade 3, the reaction force acting on the blade 3 at that time is applied. By providing the escape structure, it is possible to prevent a high load from being directly applied to the load cell 13 and prevent damage to the load cell 13. Moreover, it can be confirmed that the substrate 19 is divided by an appropriate load.

Summarizing the above, the pressure measuring mechanism of the present invention is a blade portion that breaks the substrate by pressing the blade provided at the tip along the scribe line, and lowers the blade portion to cut the blade portion of the blade substrate. Is a pressure measuring mechanism provided in a break device having a driving unit to be pressed against, and the pressure measuring mechanism is arranged below the upper sliding member and an upper slide member that moves in the vertical direction by the driving unit. A lower slide member that moves the blade portion in the up-down direction, and a counter member that is disposed below the lower slide member and is pressed by the lower slide member from above, and that acts on the blade of the blade portion from the substrate. Between the upper slide member and the lower slide member, the measuring unit that measures the force and the holding member that holds the measuring unit from the lower side at the lower part and that is connected to the upper slide member at the upper part are provided. The spring is sandwiched so that it is in a pre-compressed state.

Further, the breaking device of the present invention, the blade portion that breaks the substrate by pressing the blade provided at the tip along the scribe line, and lowers the blade portion to press the blade of the blade portion against the substrate. A drive unit and a pressure measuring mechanism for measuring a reaction force acting on the blade of the blade from the substrate, wherein the pressure measuring mechanism includes an upper slide member that moves in the vertical direction by the drive unit. A lower slide member arranged below the upper slide member for moving the blade portion in the vertical direction, and a measuring unit arranged below the lower slide member and being pressed by the lower slide member from above. And a holding member that holds the measuring unit from the lower side at the lower portion and has an upper portion connected to the upper slide member, and a spring is pre-compressed between the upper slide member and the lower slide member. It has a configuration in which it is sandwiched so as to be in a closed state.

It should be considered that the embodiments disclosed this time are exemplifications in all points and not restrictive.
In particular, in the embodiments disclosed this time, matters not specified, such as operating conditions and operating conditions, dimensions and weights of components, do not depart from the scope normally practiced by those skilled in the art, and do not fall under ordinary ordinary circumstances. If you are a trader, you have adopted the items that you can easily assume.

1 Breaking device 2 Blade part 3 Blade (blade)
4 Drive unit 5 Motor 5a Rotating shaft 6 Moving means (ball screw)
7 Screw shaft 8 Nut 9 Guide means (LM guide)
10 rail member 11 slider 12 pressure measuring mechanism 13 measuring unit (load cell)
13a Measuring point 14 Upper slide member 14a Plate member 14b Upper plate piece 15 Lower slide member 15a Plate member 15b Lower plate piece 16 Holding member 16a Plate member (rod member)
16b Upper plate piece (upper connecting member)
16c Lower plate piece (lower connecting member)
16d Lower part of holding member 17 Spring 18 Compression adjusting part (spring pressure adjusting part, screw)
19 substrate 20 coupling 21 spring 22 blade part balance adjusting mechanism 23 rotation reference 101 breaking device 102 blade part 103 blade (blade)
104 drive unit 105 motor 106 moving means (ball screw)
109 Guide means (LM guide)
112 Pressure Measuring Mechanism 113 Measuring Unit (Load Cell)
114 upper slide member 115 lower slide member 118 compression adjustment unit 119 substrate

Claims

A break having a blade part that breaks the substrate by pressing the blade provided at the tip along a scribe line, and a drive part that lowers the blade part and presses the blade of the blade part against the substrate. In the pressure measuring mechanism equipped in the device,
The pressure measuring mechanism,
An upper slide member that moves up and down by the drive unit,
A lower slide member that is disposed below the upper slide member and moves the blade portion in the vertical direction,
A measuring unit that is disposed below the lower slide member and is in a state of being pressed by the lower slide member from above, and that measures a reaction force that acts on the blade of the blade portion from the substrate.
While holding the measuring unit from the lower side in the lower portion, and a holding member having an upper portion connected to the upper slide member,
A pressure measuring mechanism, wherein a spring is sandwiched between the upper slide member and the lower slide member so as to be in a pre-compressed state.
The measuring unit is in a state in which a load is applied in advance by the spring in a compressed state,
By the reaction force of the blade of the blade portion that acts when pressed against the substrate, by moving the lower slide member upward, the load of the measuring unit is configured to decrease,
The pressure measuring mechanism according to claim 1, wherein a decrease amount of the load of the measuring unit is measured as a break load of the substrate.
The compression state of the spring can be changed by the compression adjustment unit,
The pressure measuring mechanism according to claim 2, wherein the compression adjusting portion is provided above the spring and between the upper slide member and the holding member.
The pressing direction of the drive unit, the measurement point of the measuring unit, the vertical axis of the spring, the arrangement of the compression adjusting unit, and the pressing direction of the blade unit are arranged on the same straight line in the vertical direction. The pressure measuring mechanism according to claim 3, wherein
A blade portion that breaks the substrate by pressing the blade provided at the tip along the scribe line, a driving unit that lowers the blade portion and presses the blade of the blade portion against the substrate, and the blade portion A pressure measuring mechanism for measuring a reaction force acting on the blade from the substrate,
The pressure measuring mechanism,
An upper slide member that moves up and down by the drive unit,
A lower slide member that is disposed below the upper slide member and moves the blade portion in the vertical direction,
A measuring unit arranged below the lower slide member and being pressed by the lower slide member from above,
While holding the measuring unit from the lower side in the lower portion, and a holding member having an upper portion connected to the upper slide member,
A breaker including a pressure measuring mechanism, wherein a spring is sandwiched between the upper slide member and the lower slide member so as to be in a pre-compressed state.