JP6240864B2 - Press machine - Google Patents

Description

  In the present invention, a work is disposed between the first processing tool and the second processing tool in the first pressurizing unit and the second pressurizing unit that move relative to each other in the pressurizing direction, and the workpiece is precisely aligned and pressed. The present invention relates to a press working apparatus.

  The method of precisely aligning and pressing a plate-like workpiece with a pair of processing tools is a very general processing method, and is widely used for various product processing. In this processing method, a mold that consists of a pair of males and females is used, and a process for generating various shapes is performed by pressing a material to be processed between them. Technological development related to the processing apparatus and mold for that purpose has been widely performed, and many inventions have been proposed.

There is a big expansion in products targeted by press working technology, but among them, there is a high need for processing fine products. In particular, research on manufacturing MEMS (Micro Electro-Mechanical Systems) products such as inkjet printer heads by press working is in progress. In addition, automobile parts, home appliances, etc. are also increasing in size and weight as micro parts and precision parts expand.
In these parts, when the processing dimension is small, the size is usually less than 1 mm, and products with a size of less than 0.1 mm are also becoming common. Further, the plate material to be used is usually 0.1 mm or less, and the use of a thin film of 0.01 mm is increasing.

In press working with a metal mold, high-precision machining of both male and female dies is important, but in addition, it is necessary to improve accuracy when combining male and female dies. In particular, the relationship between the clearance of the mold and the plate thickness is important. In the processed portion, the accuracy below the plate thickness and the accuracy usually required to be less than 10% of the plate thickness are obtained. Taking a thin plate material having a thickness of 0.01 mm as an example, 10% is 0.001 mm, that is, a dimensional accuracy of less than 1 μm is required.
However, with regard to the processing of molds currently used, the accuracy can be guaranteed for 1 micrometer, but below that, the accuracy is still insufficient and the reproducibility is low.

  In order to realize advanced press processing, it is essential to improve the processing accuracy of the male and female dies, and to improve the relative positional accuracy of the combination, but with existing technology, adjustment adjustment by skilled workers is normal, and reproducibility is normal. It cannot be said that sufficient accuracy is obtained. Furthermore, since the mold is basically disassembled and reassembled, adjustment beyond the accuracy tolerance of each part is impossible.

For example, Patent Documents 1 and 2 listed below are known as apparatuses for precisely aligning and pressing a plate-shaped workpiece with a pair of processing tools.
Patent Document 1 proposes a press apparatus that presses a film-like press object with upper and lower molds.
In this press device, the upper and lower molds are supported by the moving device, and the alignment mark between the press target and the upper and lower molds is aligned by observing the alignment mark of the press target with an imaging device. Is done. Then, the lower surface of the object to be pressed is vacuum-sucked and fixed by suction holding devices provided on the upstream side and the downstream side, and pressing is performed by upper and lower molds.

  However, in a press working apparatus like patent document 1, it is the objective to adjust a process target position precisely, and it moves a pair of metal mold | die with a pair. For this reason, it is not possible to correct a processing error or a processing defect when a positional deviation occurs between the upper and lower molds. In order to precisely match the position between the upper and lower molds, it is necessary to configure each part of the upper and lower mold lifting and lowering mechanisms supported by the moving device with high accuracy. The apparatus of Patent Document 1 does not include a mechanism for individually adjusting the male and female molds, and the tolerance limit cannot be exceeded.

Patent Document 2 proposes a micro-hole press for forming a large number of micro-holes by aligning a thin plate with a predetermined precision with a single pin die and a single punch.
Here, the thin plate work is arranged so as to cover the large window of the work stand, and the thin plate work is fixed by fitting the mounting jig into the hole, so that the die hole and the front end surface of the punch are concentric. As described above, the position is adjusted by the fine movement device, and a number of minute holes are machined while moving the work stand in the two horizontal axes.

In this patent document 2, in order to pierce a large number of holes using a pair of die punches, a mechanism for moving the die punches and a mechanism for adjusting the punch position while checking the die hole image are provided.
However, since this mechanism cannot be punched unless a punch and a die are aligned when a large number of holes are formed, only the position adjustment is performed, and the relative position adjustment accuracy is as large as ± 0.003 mm.
Further, in Patent Document 2, since the mounting jig is fitted and fixed in the hole of the thin plate workpiece, the thin plate workpiece is likely to be distorted.

JP 2004-268175 A JP 2002-254121 A

  Accordingly, the present invention has as its first object to provide a press working device having a simple configuration capable of performing nano-order processing without precisely configuring a large number of locations in the press working device. It is a second object to provide a durable press working apparatus that can easily perform the above.

The present inventors diligently studied to improve the quality of products with the aim of improving the processing accuracy of precision press-worked parts and realizing fine products.
Improvement of precision of precision parts requires improvement of precision of molds. Regarding the machining accuracy and assembly accuracy of each part, it is required to improve the accuracy at the time of each processing, but in this case, it is necessary to considerably improve the accuracy of all the parts, and there is no solution at present. Therefore, the accuracy within the tolerance was obtained until the assembly, and the accuracy of the combination position accuracy that lacks the accuracy was improved.
As a result, the processing accuracy of the pressed product can be improved, a fine product can be realized, and the quality of the product can be further improved, leading to the present invention.

The first press working apparatus of the present invention that achieves the first object includes a first pressurizing section and a second pressurizing section that move relative to each other in the pressurizing direction, and a first pressurizing unit mounted on each pressurizing section. A press working apparatus that includes a tool and a second processing tool, and processes the workpiece between the first processing tool and the second processing tool, wherein each pressurizing unit holds each other so as to sandwich the workpiece during processing. A support portion having an opening portion disposed opposite to each other is provided, and at least one of the pressurizing portions has a position adjusting portion capable of adjusting a position of 1 μm or less in a direction crossing the pressurizing direction, and the position adjusting portions are different from each other. A first adjustment member and a second adjustment member, each of which includes a precision drive mechanism capable of adjusting the position in the direction, the first adjustment member supported by the second adjustment member, and the processing tool supported by the first adjustment member. It is disposed in the opening of the position adjustable ones in the range of the gap between the working tool and the opening A.

The second press working apparatus of the present invention that achieves the second object described above is the press working apparatus as described above, wherein at least one pressurizing part is fixed to the base part and the base part, and the other pressurizing part is applied during processing. a hollow supporting member for supporting a load from pressure section are disposed in the hollow portion of the support portion in which are provided and a position adjusting section which is mounted to the base.

  In these press working apparatuses, the support part includes a stripper mounted on the base of one pressurizing part so as to be movable in the pressurizing direction, and the processing tool is disposed in a through hole provided in the pressurizing direction of the stripper. It is good to have. In that case, you may have the process end support part which supports the process end side of a processing tool so that advancement / retraction is possible in the other pressurization part side in a through-hole.

These press working apparatuses include a drive unit that operates the position adjustment unit, a control unit that controls the drive unit, and a detection unit that detects displacement of the processing tool, and the control unit includes a preset drive unit. It can be set as the structure which performs feedback control using the input value to and the detection value of a detection part.
In this case, the detection unit may include a sensor that detects the displacement of at least one of the first processing tool and the second processing tool, and the control unit may perform feedback control using the displacement.

  In these press working apparatuses, a through hole is provided in the pressurizing direction in at least one of the first pressurizing unit and the second pressurizing unit, and the processing tool is disposed in the pressurizing direction in the through hole. It is preferable that the position is adjusted and supported. At least one of the first processing tool and the second processing tool is provided with a detection unit that detects pressure in the pressurizing direction, and the relative relationship between the first processing tool and the second processing tool based on the detection value of the detection unit. The positional deviation can also be determined.

These press working apparatuses include a housing container that houses the first and second pressurizing units and the first and second working tools, and a temperature adjusting device that keeps the inside of the housing container within a predetermined temperature range. Good.
Further, in these press working apparatuses, a work supply unit that sequentially feeds the wound belt-like work between the first pressurizing unit and the second pressurizing unit, a work recovery unit that sequentially winds up the processed work, , And the first and second pressurizing units and the first and second processing tools are arranged in a storage container maintained in a predetermined temperature range, and the work supply unit and the work collection unit are arranged outside. Is preferred.

  According to the first press working apparatus of the present invention, at least one of the first pressurizing unit and the second pressurizing unit that relatively move in the pressurizing direction has the position adjusting unit, and the processing tool is provided in the position adjusting unit. Since it is supported, even if the first pressurizing unit and the second pressurizing unit are configured with an error, the relative position between the first processing tool and the second processing tool is precisely determined by the position adjusting unit. Can be adjusted. Therefore, it is not necessary to precisely configure many parts of the press working apparatus, and the configuration can be simplified.

  Moreover, the processing tool provided with the support part mutually arranged so that each pressurization part may pinch | interpose a workpiece | work and supported by the position adjustment part in which the position adjustment of 1 micrometer or less is possible in the direction crossing a pressurization direction, Since it is arrange | positioned at the opening part of a support part, the workpiece | work clamped by the support part can be processed with the processing tool by which the position adjustment was carried out by nano order. Therefore, it is possible to process with nano-order position accuracy without deformation or distortion of the workpiece. As a result, it is possible to provide a press working device having a simple configuration capable of performing nano-order processing.

  According to the second press working apparatus according to the present invention, at least one of the first pressurizing unit and the second pressurizing unit that move relative to each other in the pressurizing direction includes the position adjusting unit, and the position adjusting unit is added with the position adjusting unit. Since the tool is supported, when adjusting the relative position between the processing tools, it is not necessary to adjust the position of the pressurizing unit by displacing the entire pressurizing unit, and only the processing tool is displaced by the position adjusting unit. Therefore, precise position adjustment can be easily performed.

In addition, a position adjusting unit for supporting the processing tool so that the position of the processing tool can be adjusted is disposed in the hollow part of the supporting part that supports the other load during processing, and the position adjusting unit is mounted on the base. When a workpiece is processed with the second processing tool, only a load for processing the workpiece can be applied to the position adjustment unit, and another load can be applied to the support unit. Therefore, even if the processing tool is supported by the position adjustment unit, it is possible to prevent an excessive load from being applied to the position adjustment unit, and it is possible to prevent deterioration and damage of the position adjustment unit capable of precise adjustment.
Therefore, precise position adjustment can be easily performed, and a durable press working apparatus can be provided.

1 is a schematic side view of a press working apparatus according to a first embodiment of the present invention. It is sectional drawing of the pressurization part and processing tool of the press work apparatus which concerns on 1st Embodiment of this invention. It is a disassembled perspective view of the pressurization part and processing tool of the press work apparatus which concerns on 1st Embodiment of this invention. It is sectional drawing which expands and shows the processing tool of the press work apparatus which concerns on 1st Embodiment of this invention. It is a block diagram which shows the control system of the position adjustment part of the press work apparatus which concerns on 1st Embodiment of this invention. (A)-(d) is a figure explaining operation | movement of the press work apparatus which concerns on 1st Embodiment of this invention. (A) And (b) is a partial expanded sectional view explaining the detection part of the press work apparatus which concerns on 2nd Embodiment. It is a block diagram which shows the control system in the position adjustment part of the press work apparatus which concerns on 2nd Embodiment of this invention. It is a partial expanded sectional view which shows the position adjustment part of the press work apparatus which concerns on 3rd Embodiment of this invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
[First Embodiment]
In this embodiment, a description will be given using an example of a press working apparatus that performs fine hole drilling on a strip-shaped workpiece W using a punch and a die.
[overall structure]
As shown in FIG. 1, the press working apparatus 10 sequentially applies a workpiece supply unit 11 that supplies a wound strip-shaped workpiece W, a processing unit 12 that processes the supplied workpiece W, and a workpiece W after processing. A work collection unit 13 for winding.

[Work supply section and work collection section]
The workpiece supply unit 11 and the workpiece collection unit 13 are configured to wind the strip-shaped workpiece W around a reel, but detailed illustration is omitted. Here, the strip-shaped workpiece W is intermittently pulled out and wound up by a predetermined length.
In addition, one or both of the workpiece supply unit 11 and the workpiece collection unit 13 can apply a predetermined tension to the workpiece W arranged in the processing unit 12.

[process section]
The processing unit 12 includes a first pressurizing unit 14 and a second pressurizing unit 15 that move relative to each other in the pressurizing direction, and a first processing tool 16 and a second processing tool 17 that are attached to the pressurizing units 14 and 15. Are disposed in the container 18. The first and second pressurization units 14 and 15 are provided with first and second support units 21 and 22 arranged to face each other so as to sandwich the workpiece W during processing. The workpiece W can be processed with the second processing tool 17.

[First pressurizing part]
As shown in FIGS. 2 and 3, the first pressurizing unit 14 includes a die set 24 as a first base fixed to a gantry (not shown), and a second pressurizing unit fixed to the die set 24 during processing. 15, a hollow first support portion 21 that supports the load from 15, and a position adjustment portion 26 that is disposed in the hollow portion 25 of the first support portion 21 and is attached to the die set 24.

  The first support portion 21 is arranged in a substantially cylindrical shape and has a first backing plate 27 composed of a vertical wall that forms a hollow portion 25 inside, and a die plate composed of a lateral wall fixed to the upper end portion of the first backing plate 27. 28.

The die plate 28 is provided with a flat first work contact surface 28a that contacts the work W on the upper surface, and the die of the first processing tool 16 is provided at an intermediate portion in the first work contact surface 28a. In order to arrange 32, a die through hole 28b penetrating in the pressurizing direction is provided. Further, in order to accurately guide a guide rod 37 of a stripper plate 36 to be described later, a linear guide 29 such as a linear ball guide is provided penetrating in the pressurizing direction.
The die plate 28 is formed thick and the periphery thereof is firmly fixed to the first backing plate 27, so that displacement and deformation do not occur during processing.

[Position adjustment section]
As shown in FIGS. 2 and 3, the position adjusting unit 26 of the first pressure unit 14 is disposed in the hollow part 25 of the first support unit 21, and is separated from the first support unit 21 in the die set 24. It is installed in a state. The position adjustment unit 26 includes a first adjustment member 26a and a second adjustment member 26b that can be adjusted in different directions. The second adjusting member 26b is mounted on the die set 24, the first adjusting member 26a is supported on the second adjusting member 26b, and the first processing tool 16 is supported on the first adjusting member 26a.

  The first processing tool 16 is movable in a direction intersecting the pressurizing direction, for example, an XY direction parallel to the first workpiece contact surface 28a of the die plate 28, by stacking a plurality of adjusting members 26a and 26b. . If necessary, for example, another adjusting member may be stacked to be movable in the rotation direction.

  The position adjusting unit 26 uses a unit that can adjust the position to 1 μm or less in the direction intersecting the pressing direction. Although not particularly limited, the first adjustment member 26a and the second adjustment member 26b each include an expansion / contraction drive unit including a precision drive mechanism such as a piezoelectric element.

[First processing tool]
As shown in FIGS. 2 and 3, the first processing tool 16 includes a die support jig 31 that is fixed and supported by the first adjustment member 26 a of the position adjustment unit 26, and a pressure direction on the die support jig 31. A die 32 that is accommodated in a die through hole 28b provided through the die and displaceable in the pressurizing direction, and a height that is accommodated in the die through hole 28b and disposed between the die 32 and the position adjusting unit 26. And an adjustment material 33.

  A die recessed portion 28c is provided on the hollow portion 25 side of the die plate 28 of the first pressurizing portion 14, and the upper side of the die support jig 31 is provided in the die recessed portion 28c with a gap for position adjustment around it. Are arranged.

Further, the processing end side of the die 32 disposed on the workpiece W is disposed inside the die through hole 28b opened on the first workpiece contact surface 28a of the die plate 28 with a position adjusting gap. .
Further, by precisely adjusting the height of the height adjusting member 33, the processing end serving as the workpiece side end portion of the die 32 is disposed in the vicinity of the first workpiece contact surface 28a, preferably at a substantially equivalent height position. Has been.

  The first processing tool 16 is supported by the position adjusting unit 26 so that the position of the first processing tool 16 is adjusted at least within the range of the maximum tolerance of the first pressing unit 14 and the second pressing unit 15 in the direction intersecting the pressing direction. It is possible. Here, the position of the first processing tool 16 may be adjustable over the entire range of the gap between the first processing tool 16 and the opening 28d of the die through hole 28b.

[Second pressurizing part]
As shown in FIGS. 2 and 3, the second pressurizing unit 15 is connected to the pressurizing drive unit 23 made of a servo motor or the like fixed to a gantry (not shown) and the pressurizing drive unit 23 in a free shank structure. A second backing plate 35 serving as a second base portion and a second support portion 22 connected to the second backing plate 35 and sandwiching the workpiece W with the first support portion 21 are provided.

  The second support portion 22 includes a punch plate 38 fixed to the second backing plate 35 and a stripper plate 36 connected to the punch plate 38 so as to be relatively displaceable.

  In the punch plate 38, the second processing tool 17 is disposed near the center, and a linear guide 42 such as a linear ball guide for pressurizing a guide rod 37 of a stripper plate 36 to be described later pressurizes around the second processing tool 17. A connecting portion 43 is provided to penetrate the direction and further to connect the stripper plate 36.

In the connecting portion 43, the stripper plate 36 is connected by arranging the collar 44 longer than the thickness of the punch plate 38 and fastening the punch plate 38 and the stripper plate 36 with a fastener. As a result, the difference between the thickness of the punch plate 38 and the length of the collar 44 and the stripper plate 36 can be moved in the pressurizing direction. This distance is set longer than the thickness of the workpiece W.
Further, the stripper plate 36 is pressed to the side away from the punch plate 38 by the urging force of the compression spring provided around the collar 44.

  The stripper plate 36 has a flat second workpiece contact surface 36a that contacts the workpiece W on the lower surface, and a punch through hole 36b, which will be described later, is provided in the middle portion of the second workpiece contact surface 36a. A guide rod arrangement part 36c for precisely arranging the guide rod 37 in the pressurizing direction is provided therearound.

[Second processing tool]
As shown in FIG. 4, the second processing tool 17 includes a punch support jig 41 locked to the punch plate 38 and a punch 39 supported by the punch support jig 41. The punch support jig 41 is provided with a punch support hole penetrating in the pressurizing direction so that the diameter of the workpiece W is reduced, and a punch 39 formed by reducing the diameter of the processing end side is formed in the punch support hole. It is accommodated and supported so as to be displaceable in the pressurizing direction.

  The punch plate 38 is provided with a punch recess 38 a and a punch through hole 38 b penetrating in the pressurizing direction, and a punch support jig 41 is engaged with the punch through hole 38 b of the punch plate 38. A pressing portion 46 and a load sensor 47 are disposed in the punch recess 38a, and these are disposed between the second backing plate 35 and the punch 39, so that the pressing force from the second backing plate 35 is applied to the punch. 39 is loaded.

  In the stripper plate 36, a punch through hole 36b penetrates in the pressurizing direction and is provided coaxially with the punch through hole 38b. A processing end support portion 45 is fixed to the punch through hole 36b of the stripper plate 36 so as to support the processing end side of the punch 39 so as to advance and retreat along the pressurizing direction. The processing end support portion 45 is fixed to the end of the punch through hole 36b on the first pressurizing portion 14 side, and the end surface is substantially the same height as the second workpiece contact surface 36a of the stripper plate 36. . The machining end support portion 45 is formed in a tapered hole shape so that the diameter is reduced toward the workpiece side, and the finely formed machining end side of the punch 39 is accommodated.

  The processing end of the punch 39 protrudes from the processing end support portion 45 and is inserted into the die 32 when the stripper plate 36 abuts against the workpiece W and is relatively displaced against the pressing force of the compression spring 54 toward the punch plate 38 side. . On the other hand, when the punch plate 38 and the stripper plate 36 are relatively displaced so as to be separated from each other, the position of the punch 39 is adjusted so that the processed end of the punch 39 is accommodated in the tapered hole of the processed end support portion 45.

[Position control system]
The press working apparatus 10 is constructed with a position control system for aligning the relative positions of the die 32 of the first working part 12 and the punch of the second working part 12 with an accuracy of 1 μm or less. In this position control system, as shown in FIG. 2, the adjustment drive unit 51 that operates the first position adjustment unit 26, the control unit 52 that controls the adjustment drive unit 51, and the displacement of the first processing tool 16 are detected. And position detection units such as a position sensor 53 and a load sensor 47.

[Container]
The storage container 18 is a cover for storing the first and second pressurizing units 14 and 15 and the first and second processing tools 16 and 17, and is provided with a temperature adjusting device (not shown). The temperature is maintained within a predetermined temperature range. In this embodiment, the pressurizing drive unit 23 of the second pressurizing unit 15 is disposed outside the storage container 18, and the work supply unit 11 and the work collection unit 13 are also disposed outside the storage container 18, and the volume is increased. We keep it as small as possible.

[Operation]
Next, operation | movement of this press work apparatus 10 is demonstrated.
First, as shown in FIGS. 2 and 3, the first processing tool 16 is attached to the first pressurizing unit 14 and the position adjusting unit 26 according to the workpiece W and the press working mode, and the second pressurizing unit 15 is attached to the first pressurizing unit 15. The second processing tool 17 is attached. At this time, the first processing tool 16 and the second processing tool 17 are in relative positions within a tolerance range.

  Specifically, first, the die 32 is attached to the die set 24 via the position adjustment unit 26, the die support jig 31, and the height adjustment material 33. Therefore, the processing end of the die 32 is arranged in a state in which the manufacturing tolerance and the assembly tolerance of each member are integrated.

  On the other hand, the punch 39 has a first backing plate 27, a die plate 28, a linear guide 29, a guide rod 37, a linear guide 42, a punch plate 38 and a second backing plate 35, and a punch support jig 41 with respect to the die set 24. It is attached through. Therefore, the processing end of the punch 39 is arranged in a state in which the manufacturing tolerance for each member and the assembly tolerance of each member are integrated.

  Further, the processing end support portion 45 that supports the processing end of the punch 39 is attached to the die set 24 via the first backing plate 27, the die plate 28, the linear guide 29, the guide rod 37, and the stripper plate 36. . Therefore, the opening of the processing end support portion 45 is arranged in a state in which the manufacturing tolerance for each member and the assembly tolerance of each member are integrated.

  In the press processing apparatus 10, the processing end of the die 32 in the first processing tool 16, the processing end of the punch 39 in the second processing tool 17, and the opening of the processing end support portion 45 in the second support portion 22. , Precisely align with nano-order.

  Here, there is an adjustable gap between the die support jig 31 of the first processing tool 16 and the die recess 28c of the die plate 28, and an adjustable gap between the die 32 and the die through hole 28b. The entire first processing tool 16 is supported by the position adjustment unit 26. Therefore, the processing end of the die 32 can be precisely adjusted in the lateral direction with respect to the die set 24, that is, in the X-axis and Y-axis directions.

  On the other hand, the second pressure unit 15 and the second processing tool 17 can be displaced in the vertical direction, that is, the Z-axis direction by the pressure driving unit 23. Here, the second pressurizing unit 15 and the second processing tool 17 are stably arranged by combining the linear guides 29 and 42, the guide rod 37, the collar 44, and the like with respect to the first pressurizing unit 14, and further, Since the processing end support 45 is fixedly provided on the stripper plate 36 having the two-work contact surface 36a, it can be displaced in the vertical direction while preventing the horizontal displacement.

  Accordingly, the position of the processing end of the die 32 is adjusted by the position adjusting unit 26, so that the processing end of the die 32 in the first processing tool 16, the processing end of the punch 39 in the second processing tool 17, and the second support portion. 22 and the opening of the processing end support portion 45 can be precisely aligned in the nano order.

In the apparatus of this embodiment, such precise alignment can be performed by a position control system as shown in FIG.
For example, after determining the displacement of the relative position, as shown in FIG. 5, a control position command is input to the adjustment drive unit 51 based on a table preset in the storage unit of the control unit 52, and the adjustment drive unit 51 A drive voltage is applied to the first adjustment member 26a and the second adjustment member 26b.

When the precision driving mechanism such as a piezo element is expanded and contracted by the driving voltage, the first adjusting member 26a and the second adjusting member 26b are displaced, and the first processing tool 16 is displaced. This displacement is detected by the position sensor 53 and transmitted to the control unit 52.
In the control unit 52, the position of the first processing tool 16 mounted on the first adjustment member 26a is set to the second processing tool 17 by performing feedback control with the control position command and the displacement meter instruction value of the first processing tool 16. And accurately align with nano order.

Thereafter, between the first pressurizing unit 14 and the second pressurizing unit 15, the strip-shaped work W is intermittently sequentially fed from the work supply unit 11 to perform press processing at each position.
In this press working, as shown in FIG. 6A, the first pressurizing unit 14 and the second pressurizing unit 15 are separated from each other and the mold is opened, and the work is applied to the first work contact surface 28 a of the die plate 28. W is placed. As shown in FIG. 6B, when the second pressurizing unit 15 is lowered, the second work contact surface 36a of the stripper plate 36 pressed by the compression spring 54 comes into contact with the work W and the work W W is pinched.

When the second pressure unit 15 is further lowered, the punch plate 38 and the second backing plate 35 are lowered as shown in FIG. 6C, and the punch 39 is applied by the pressing unit 46 via the load sensor 47. The punch support jig 41 and the punch 39 are lowered by the pressure.
At this time, the processing end of the punch 39 protrudes from the second workpiece contact surface 36 a through the tapered hole of the processing end support portion 45. Since the die 32 and the punch 39 are precisely aligned on the nano order, the punch 39 is inserted into the center of the die 32, and precise hole machining is performed.

Thereafter, when the second pressurizing unit 15 is raised, as shown in FIG. 6 (d), the punch 39 is lifted and peeled off from the work W in a state where the stripper plate supports the work W by the applied pressure. (2) By raising the pressurizing unit 15, the stripper plate 36 is raised and the mold is opened.
And the area | region after the process of the workpiece | work W is wound up to the workpiece | work collection | recovery part 13, the next area | region is arrange | positioned between the 1st pressurization part 14 and the 2nd pressurization part 15, and press work is performed again.

[Function and effect]
According to the press working apparatus 10 as described above, the position adjusting unit 26 is provided in the first pressing unit 14 that relatively moves in the pressing direction, and the first processing tool 16 is supported by the position adjusting unit 26. Therefore, even if the first pressurizing unit 14 and the second pressurizing unit 15 are configured with an error, the relative position between the first processing tool 16 and the second processing tool 17 is precisely adjusted by the position adjusting unit 26. Can be adjusted. Therefore, it is not necessary to precisely configure many parts of the press working apparatus 10, and the configuration can be simplified.

In addition, the first and second support portions 21 and 22 are arranged so as to oppose each other so that the pressing portions 14 and 15 sandwich the workpiece W, and the position can be adjusted to 1 μm or less in the direction intersecting the pressing direction. Since the die 32 of the first processing tool 16 supported by the position adjustment unit 26 is disposed in the opening 28d of the die through hole 28b in the first support unit 21, the first support unit 21 and the second support unit The workpiece W sandwiched by 22 can be processed by the first processing tool 16 whose position is adjusted in the nano order.
Therefore, there is no deformation or distortion of the workpiece W, and it is possible to perform processing with nano-order position accuracy such that the position is adjusted and processed with a displacement amount of 1 μm or less.

Furthermore, if the relative position between the die 32 of the first processing tool 16 and the punch 39 of the second processing tool 17 can be adjusted to 1 μm or less, the clearance between the die 32 and the punch 39 can be set to 1 μm or less. Become.
In this embodiment, it is not essential that the clearance between the die 32 and the punch 39 is 1 μm or less. However, when the clearance is set to 1 μm or less, the shape of the processing end of the die 32 and the processing of the punch 39 are performed. Since the end shape can be accurately approximated, the workpiece W can be processed into a more precise shape.

That is, even if the first pressurizing unit 14 and the second pressurizing unit 15 are precisely manufactured and assembled, it is impossible to align the relative positions with an accuracy of 1 μm or less. Therefore, when the first processing tool 16 and the second processing tool 17 are mounted with the accuracy of the first pressure unit 14 and the second pressure unit 15, the die 32 and the punch 39 collide with each other during processing. In order to prevent this, the clearance must be set larger than 1 μm. In that case, the difference between the shape of the processed end of the die 32 and the shape of the processed end of the punch 39 is large, and the accuracy of the processed shape is lowered.
However, since the position of the first processing tool 16 can be adjusted by a displacement amount of 1 μm or less by the position adjusting unit 26, a positional deviation larger than 1 μm is generated between the first pressurizing unit 14 and the second pressurizing unit 15. Even in this case, the misalignment can be corrected so that the die 32 and the punch 39 do not collide with each other during processing. Therefore, the work W can be processed into a more precise shape by setting the clearance between the die 32 and the punch 39 to 1 μm or less.

  According to the press working apparatus 10, one of the first pressurizing unit 14 and the second pressurizing unit 15 that move relative to each other in the pressurizing direction includes the position adjusting unit 26, and the first adjusting unit 26 is added to the position adjusting unit 26. Since the tool 16 is supported, when adjusting the relative position between the first and second processing tools 16 and 17, it is not necessary to adjust the position by displacing the entire pressure units 14 and 15. Only the first processing tool 16 may be displaced by the portion 26. Therefore, precise position adjustment can be easily performed.

  Further, a position adjusting unit 26 that supports the first processing tool 16 so that the position of the first processing tool 16 can be adjusted is disposed in the hollow portion 25 of the first supporting unit 21 that supports the other load during processing, and the position adjusting unit 26 is attached to the die set 24. Since it is mounted, when processing the workpiece W between the first processing tool 16 and the second processing tool 17, only the load for processing the workpiece W is applied to the position adjusting unit 26, and other loads are applied. The first support portion 21 can be loaded.

  For example, an impact caused by contact when the workpiece W is clamped, a load for clamping the workpiece W and supporting it at a predetermined position, a load for pressing the workpiece W during processing to prevent deformation, By receiving an impact for stopping the relative movement of the first and second processing tools 16, 17 by the first support portion 21, the first processing tool 16 can be prevented from being loaded. For this reason, even if the first processing tool 16 is supported by the position adjustment unit 26, it is possible to prevent an excessive load from being applied to the position adjustment unit 26, and it is possible to prevent deterioration of the position adjustment unit 26 that can be precisely adjusted. Damage can be prevented.

  According to the press processing apparatus 10, the position adjusting unit 26 can adjust the position of the first processing tool 16 in the range of the gap between the die 32 of the first processing tool 16 and the opening of the through hole 28 b. By reducing the gap, the adjustment range of the position adjustment unit 26 can be reduced.

  In the press working apparatus 10, the position adjustment unit 26 includes a first adjustment member 26a and a second adjustment member 26b each including a precision drive mechanism such as a piezo element that can be adjusted in different directions, and the first adjustment member 26a. Is supported by the second adjustment member 26b, and the first processing tool 16 is supported by the first adjustment member 26b. Therefore, by adjusting the electrical energy supplied to each adjustment member 26a, 26b, the position of the first processing tool 16 can be precisely adjusted in a plurality of directions with nano-order accuracy with a simple configuration.

  In the press working apparatus 10, the second support portion 22 includes a stripper plate 36 that is mounted on the second backing plate 36 of the second pressurizing portion 15 so as to be movable in the pressurizing direction, and is applied to the stripper plate 36 in the pressurizing direction. The punch 39 of the second processing tool 17 is disposed in the punch through hole 38b provided in the punching hole 38b. Therefore, the stripper plate 36 is moved up and down in time with the raising and lowering of the second backing plate 36. For example, the workpiece W is moved by the stripper plate 36 before the punch 39 of the second processing tool 17 descends and comes into contact with the workpiece W. If it is operated so as to be sandwiched, the workpiece W can be stably held without deformation. Further, if the stripper plate 36 is moved away from the workpiece W after the punch 39 of the second machining tool 17 is lifted and separated from the workpiece W, the punch 39 of the second machining tool 17 is surely secured from the workpiece W. Can be detached.

  In this press working apparatus 10, since the processing end support portion 45 that supports the processing end side of the punch 39 of the second processing tool 17 so as to advance and retreat is provided on the first pressurizing portion 14 side in the punch through hole 38b, The fine processing end side of the processing tool 17 can be guided, and deformation and damage during processing can be prevented.

  In this press working apparatus 10, since the nano-order displacement amount of the first processing tool 15 is adjusted by feedback control, the movement amount can be easily adjusted with high accuracy.

  In the press working apparatus 10, through holes 28b and 38b in the pressing direction are provided in the support portions 21 and 22, and the die 32 and the punch 39 of the processing tools 16 and 17 are supported in the pressing direction in the through holes 28b and 38b. Thus, the relative position can be adjusted to a minute amount. Therefore, the load for holding the workpiece W by the support parts 21 and 22 and the load for processing the workpiece W by the processing tools 16 and 17 can be appropriately adjusted.

In this press working apparatus 10, since the first and second pressurizing units 14 and 15 and the first and second processing tools 16 and 17 are arranged in the storage container 18 maintained in a predetermined temperature range, the temperature change of each part In addition to preventing the occurrence of misregistration, it is possible to prevent changes in frictional resistance and the like in the operating part of the apparatus, to ensure stable operation of the apparatus, and to improve machining accuracy.
And since the 1st and 2nd pressurization parts 14 and 15 and the 1st and 2nd processing tools 16 and 17 were stored in storage container 18 in the state where work supply part 11 and work collection part 13 were arranged outside, The volume of the storage container 18 can be reduced, and as a result, temperature adjustment is remarkably easy.

In this press working apparatus 10, since the first support portion 21 is fixed at a plurality of locations surrounding the through hole 28b, it is easy to ensure the strength of the first support portion 21, and a load is applied to the first support portion 21 during processing. Even if it is done, it is hard to be deformed or fall down.
In the press working apparatus 10, the work supply unit 11 that sequentially feeds the wound band-shaped work W between the first pressurizing unit 14 and the second pressurizing unit 15, and the work W after processing is sequentially wound up. Since the workpiece recovery unit 13 is provided, nano-order processing can be sequentially performed at different positions in the longitudinal direction of the workpiece W. At that time, since the workpiece W has a belt-like shape, alignment can be performed using a portion disposed outside the first pressurizing unit 14 and the second pressurizing unit 15, and nano-order processing is possible. The position can be specified.

[Second Embodiment]
7 and 8 are drawings of the press working apparatus according to the second embodiment.
In the first embodiment, the position sensor 53 is used when performing precise alignment with the first processing tool 16 and the second processing tool 17, but in the second embodiment, as shown in FIG. The second embodiment is the same as the first embodiment except that precise alignment is performed using a load sensor 47 as a pressure detection unit disposed in the punch recess 38a of the punch plate 38.

When the first pressurizing unit 14 and the second pressurizing unit 15 are brought close to each other, as shown in FIG. 7A, if the die 32 is not precisely aligned with the punch 39, the load The pressure in the pressurizing direction applied to the sensor 47 is large. However, as shown in FIG. 7B, when the die 32 is precisely aligned with the punch 39, the pressure applied to the load sensor 47 is reduced.
Therefore, in this embodiment, the displacement of the relative position between the punch 39 and the die 32 is determined based on the detected pressure value detected by the load sensor 47.

  In order to control the position using the pressure detected by the load sensor 47, as shown in FIG. 8, after determining the initial relative position shift, as shown in FIG. A control load command is input to the adjustment drive unit 51 based on a preset table, and a drive voltage is applied from the adjustment drive unit 51 to the first adjustment member 26a and the second adjustment member 26b.

When the precision driving mechanism such as a piezo element is expanded and contracted by the driving voltage, the first adjusting member 26a and the second adjusting member 26b are displaced, and the first processing tool 16 is displaced. When the punch 39 is pressurized by the second pressure unit 15 in this state, the pressure is detected by the load sensor 47, and the measured load value is transmitted to the control unit 52.
The control unit 52 performs feedback control with the control load command and the load measurement value, and accurately aligns the position of the first processing tool 16 mounted on the first adjustment member 26a with the second processing tool 17 in the nano order.

  In such a press working apparatus 10, the same effect as that of the first embodiment can be obtained, and a load in the pressing direction is detected in at least one of the first working tool 16 and the second working tool 17. Since the displacement of the relative position between the first processing tool 16 and the second processing tool 17 is determined based on the detection value of the load sensor 47, there is no need to directly measure the positional deviation with the length. Therefore, it is possible to determine the nano-order displacement very easily.

[Third Embodiment]
FIG. 9 shows a position adjusting unit of the press working apparatus according to the third embodiment.
In the press processing apparatus 10, the position adjusting unit 26 is provided on the stripper plate 36, and the punch position of the second processing tool 17 is precisely adjusted in nano order. Here, the stripper plate 36 is provided with a bush through hole 55 having a diameter larger than that of the punch through hole 38 b, and the stripper guide bush 56 is accommodated in the bush through hole 55. A gap is provided between the inner diameter of the bush through hole 55 and the outer diameter of the stripper guide bush 56. The stripper guide bush 56 is provided with a punch through-hole 38b, and the punch 39, the punch support jig 41, and the processing end support 45 are arranged as in the first embodiment.

Further, the stripper plate 36 is provided with a groove portion 57 that communicates with the bush through hole 55 and extends in a plurality of directions, preferably in a direction orthogonal to each other, with a predetermined length.
A rod-shaped first adjustment member 26 a and a second adjustment member 26 b (not shown) constituting the position adjustment unit 26 are disposed in each groove portion 57. The first adjustment member 26 a and the second adjustment member 26 b are formed by a precision drive mechanism such as a piezo element, and are provided in contact with the stripper guide bush 56 accommodated in the bush through hole 55.

When the first adjustment member 26a and the second adjustment member 26b expand and contract, the stripper guide bush 56 is displaced in a direction crossing the pressurizing direction. Thereby, the punch support jig 41 and the punch 39 arranged in the punch through hole 38b of the stripper guide bush 56 can be displaced in a direction intersecting the pressing direction.
Others are the same as in the first embodiment.
Even with the press working apparatus 10 having such a configuration, it is possible to obtain the same functions and effects as those of the first embodiment.

The press working apparatus of the present invention is not limited to the above-described embodiments, and can be appropriately changed within the scope of the present invention.
For example, this embodiment is an example of a press working apparatus that performs micro-drilling that can be expected to be most effective among micro-drilling, bending, and drawing, which are expected to be used in the present invention. In this device, punches and dies are placed so as to sandwich the strip-shaped workpiece W, and fine punching is performed by loading with a forging machine. However, the basic form is the same for bending and drawing. Can be realized.

  In the first and second embodiments, the position adjusting unit 26 is provided in the first pressurizing unit 14, and in the third embodiment, the position adjusting unit 26 is provided in the stripper plate 36. The place where 26 is arranged is not particularly limited. For example, the second pressure unit 15 may be provided with the position adjustment unit 26 as in the first embodiment. Furthermore, it is also possible to provide the position adjusting unit 26 at a plurality of portions of both the first pressurizing unit 14 and the second pressurizing unit 15.

  When the position adjusting unit 26 as in the first embodiment is provided in the second pressurizing unit 15, a position adjustable gap is provided between the punch through hole 38 b or the punch recess 38 a of the punch plate 38 and the punch support jig 41. In addition, it is preferable to provide a position-adjustable gap between the punch through hole 36 b of the stripper plate 36 and the processed end of the punch 39. Further, it is preferable to provide a processing end support portion 45 in the die through hole 28b of the die plate 28 to support the processing end of the die 32.

Furthermore, the precision driving mechanism is not limited to a piezo element, and may be a driving mechanism equipped with other circuits such as magnetostriction, piezoelectricity, and electrostatics.
In the above description, the workpiece supply unit 11 and the workpiece recovery unit 13 are disposed using a strip-shaped long material as the workpiece W. However, the workpiece supply unit 11 and the workpiece recovery unit may be any device provided with the processing unit 12. 13 etc. need not be arranged.

W Work 10 Press working device 11 Work supply unit 12 Processing unit 13 Work collecting unit 14 First pressurizing unit 15 Second pressurizing unit 16 First processing tool 17 Second processing tool 18 Storage container 21 First support unit 22 Second Support portion 23 Pressure drive portion 24 Die set 25 Hollow portion 26 Position adjustment portion 26a First adjustment member 26b Second adjustment member 27 First backing plate 28 Die plate 28a First work contact surface 28b Die through hole 28c Die recess 28d Opening 29 Linear guide 31 Die support jig 32 Die 33 Height adjustment material 35 Second backing plate 36 Stripper plate 36a Second workpiece contact surface 36b Punch through hole 36c Guide rod placement portion 37 Guide rod 38 Punch plate 38a Punch recess 38b Punch through hole 39 Punch 41 Punch support jig 42 Linear guide 43 Connecting portion 44 Collar 45 Processing end support portion 46 Pressing portion 47 Load sensor 51 Adjustment driving portion 52 Control portion 53 Position sensor 54 Compression spring 55 Bushing through hole 56 Stripper guide bushing 57 Groove portion

Claims (10)

A first pressure and the second pressure to move relative to the pressing direction, and the first processing tool and the second processing tool, wherein mounted on each pressure portion, and includes, as the first processing tool wherein A press working device for working a workpiece with a second working tool,
Each of the pressurizing parts includes a support part that is arranged to face each other so as to sandwich the workpiece during processing, and has an opening.
At least one of the pressurizing units has a position adjusting unit capable of adjusting a position of 1 μm or less in a direction crossing the pressurizing direction ,
The position adjustment unit includes a first adjustment member and a second adjustment member that are precision drive mechanisms that can be adjusted in different directions.
The first adjustment member is supported by the second adjustment member, and the processing tool is supported by the first adjustment member and disposed at the opening of the support portion, and a gap between the processing tool and the opening. position adjustable der range of Ru, the press working apparatus. One of the pressing even without least the placement a base, a hollow of the supporting portion for supporting a load from the other of the pressing is fixed at the time of processing the base portion, the hollow portion of the support portion The press working apparatus according to claim 1 , further comprising: the position adjusting unit mounted on the base. The support portion includes a stripper mounted on a base portion of one of the pressure portions so as to be movable in the pressure direction, and the processing tool is disposed in a through hole provided in the pressure direction of the stripper. The press working apparatus according to claim 1 or 2 . The press working apparatus according to claim 3 , further comprising a working end support portion that supports the working end side of the processing tool so as to advance and retreat on the other pressing portion side of the through hole. A drive unit that operates the position adjustment unit, a control unit that controls the drive unit, and a detection unit that detects displacement of the processing tool,
5. The press working apparatus according to claim 1 , wherein the control unit performs feedback control using a preset input value to the driving unit and a detection value of the detection unit.   The said detection part is provided with the sensor which detects the displacement of at least one of the said 1st processing tool and the said 2nd processing tool, The said control part performs feedback control using the said displacement. Press processing equipment. At least one support part of the first pressurizing part and the second pressurizing part is provided with a through hole in the pressurizing direction, and the processing tool is positioned in the pressurizing direction in the through hole. The press working apparatus according to any one of claims 1 to 6 , wherein the press working apparatus is adjusted and supported. At least one of the first processing tool and the second processing tool includes a detection unit that detects a pressure in the pressurizing direction, and the first processing tool and the second processing unit are based on a detection value of the detection unit. The press working apparatus according to any one of claims 1 to 7 , wherein a deviation of a relative position with respect to the processing tool is determined.   A storage container for storing the first and second pressurizing units and the first and second processing tools;
  A press working apparatus according to any one of claims 1 to 8, further comprising a temperature adjusting device that keeps the inside of the storage container within a predetermined temperature range. A workpiece supply unit that sequentially feeds the wound belt-shaped workpiece between the first pressurizing unit and the second pressurizing unit, and a work recovery unit that sequentially winds up the processed workpiece,
Wherein the first and second pressure and the first and second processing tool placed in a container which is maintained at a predetermined temperature range, and placing the workpiece supply unit and the workpiece collection unit to the outside, claim The press working apparatus according to any one of 1 to 8 .

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