TW202023780A - Pressure measurement mechanism and breaking device provided with said pressure measurement mechanism - Google Patents

Abstract

Provided are a pressure measurement mechanism and a breaking device that can perform load measurement on a substrate with high accuracy and prevent damage on a load cell even if an abnormal load is applied to a blade in pressure measurement during breaking of the substrate. The present invention provides a pressure measurement mechanism (12) of a breaking device (1) comprising a blade unit (2) that breaks a substrate (19) with a blade (3) and a driving unit (4) that lowers the blade unit (2). The pressure measurement mechanism (12) has an upper sliding member (14) that moves vertically, a lower sliding member (15) that is arranged under the upper sliding member (14) and moves the blade unit (2) vertically, a measurement unit (13) that is pressed by the lower sliding member (15) and measures a reactive force acting on the blade (3), and a retaining member (16) that retains the measurement unit (13) and is coupled to the upper sliding member (14). A previously-compressed spring (17) is held between the upper sliding member (14) and the lower sliding member (15).

Description

Pressure measuring mechanism and breaking device provided with the pressure measuring mechanism

The present invention relates to a technique for measuring the breaking load of the substrate based on the reaction force that acts when the blade equipped on the blade portion is pressed against the substrate when the substrate is broken along the scribe line.

In the past, for the breaking of substrates such as brittle material substrates, there have been the following steps: a scribing step of forming a scribe line (vertical crack) on the substrate; and a breaking step of breaking the substrate along the scribing line. Among them, a breaking device is used in the breaking step. The breaking device is to arrange the substrate with the surface where the scribe line is formed as the lower surface, and arrange the blade (blade) in a manner consistent with the scribe line of the substrate, and press the blade against the upper surface of the substrate from directly above the scribe line and Press the back of the scribe line to split the substrate along the vertical section of the scribe line. As a technique related to the breaking device, for example, there is disclosed in Patent Document 1. [Prior Technical Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open No. 2014-139025

[The problem to be solved by the invention]

However, when the substrate is broken along the scribe line, in order to confirm that the substrate is broken with an appropriate load, the load applied to the substrate is measured based on the reaction force that acts when the blade equipped with the blade is pressed against the substrate. As a device for measuring the load (fracture load) applied to the substrate, for example, a pressure measurement mechanism 112 equipped with the previous rupture device 101 shown in FIG. 5 is cited.

As shown in FIG. 5, specifically, the pressure measuring mechanism 112 has: a driving part 104, which includes a motor 105, a moving mechanism (ball screw) 106, and a guide mechanism (LM guide) 109; an upper sliding member 114, which uses The driving part 104 moves in the vertical direction; and the lower sliding member 115, which is connected to the upper sliding member 114, holds the measuring part 113 (load cell), and is equipped with the blade part 102. The load cell 113 is in a state where the measuring point is in contact with the upper sliding member 114. In addition, a compression adjusting portion 118 that adjusts the state of the load cell 113 is provided on the upper sliding member 114.

The previous pressure measuring mechanism 112 is a method of directly measuring the load. If the blade 103 of the blade portion 102 is pressed against the base plate 119, the reaction force acting at this time directly imparts the load at the time of fracture to the load cell 113. That is, for the arrangement of the pressure measuring mechanism 112, the member moving in the vertical direction by the driving part 104 is divided into an upper sliding member 114 and a lower sliding member 115 provided with the blade part 102, and the load cell 113 is aligned with the sliding member 114. Equipped with zero-gap contact.

In addition, as the measurement direction of the pressure measurement mechanism 112, when the substrate 119 is broken, it is installed in the direction where the load is applied to the load cell 113. That is, when the substrate 119 is fractured, the load cell 113 is arranged to press the upper sliding member 114. As the initial setting of the pressure measuring mechanism 112, the compression adjustment part 118 is adjusted so that the relationship between the load cell 113 and the upper sliding member 114 becomes zero gap. Alternatively, some preliminary pressure may be applied to the load cell 113.

However, when the substrate 119 is fractured, when the blade 103 of the blade portion 102 is pressed against the substrate 119, if an abnormal load is applied to the blade 103 (for example, the blade 103 and the substrate 119 bite into the foreign matter and stop, or due to some When high load is applied due to these reasons, the reaction force becomes stronger at this time, and the load element 113 equipped on the lower sliding member 115 is strongly pressed against the upper sliding member 114, so a high load is directly applied to the load element 113. The fear of crushing.

In addition, as a problem of the pressure measuring mechanism 112, since the upper sliding member 114 and the load cell 113 aim at zero clearance, the adjustment of the clearance requires a considerable number of steps, and there is a concern that a precision mechanism for achieving zero clearance is required. . Furthermore, even if the pre-pressurization is applied to the load cell 113, the following problems can be mentioned. The load element 113 is a so-called spring with a larger spring constant.

For the load cell 113, the pressure adjustment needs to be set to high accuracy, and there must be a mechanism that can withstand the abnormal load. If the pre-pressurization of the load cell 113 is weak, there is no load on the load cell 113, and it becomes an unstable state with only a slight contact with the upper sliding member 114. In addition, when a load is received again from this unstable state, the load cell 113 may vibrate.

On the other hand, if the pre-pressurization of the load cell 113 is increased, the vibration of the load cell 113 can be expected to be eliminated, but the measurement range of the load cell 113 will be narrowed. Therefore, in view of the above-mentioned problems, the present invention aims to provide a pressure measuring mechanism and a breaking device provided with the pressure measuring mechanism. The pressure measuring mechanism has the following structure: the pressure measurement when the substrate is broken can be based on the action on the blade It measures the pressure (load) applied to the substrate with high precision, and when the blade of the blade is pressed against the substrate, even if an abnormal load such as a high load is applied to the blade, the reaction force acting on the blade at this time is released Therefore, it can prevent the load cell from directly applying high load and prevent the load cell from being damaged. [Technical means to solve the problem]

In order to achieve the above objective, the following technical solutions are adopted in the present invention. The pressure measuring mechanism of the present invention is equipped in a breaking device, and the breaking device has: a blade portion that presses a blade equipped at the front end along a scribe line to break the substrate; and a drive portion that lowers the blade portion , Pressing the blade of the blade part against the substrate; the pressure measuring mechanism is characterized by having: an upper sliding member which is moved in the vertical direction by the driving part; a lower sliding member, which is provided below the upper sliding member, Move the blade part in the up-and-down direction; a measuring part, which is provided below the lower sliding member and is placed in a state of being pushed by the lower sliding member from above, to measure the reaction from the substrate on the blade of the blade Force; and a holding member, the lower part of which holds the measuring part from the lower side, and the upper part is connected to the upper sliding member; the spring is placed in a pre-compressed state, sandwiching the upper sliding member and the lower part Between sliding members.

Preferably, the measuring part is set in a state of being preloaded by the spring in a compressed state, and is configured such that the lower sliding member is moved upward by the reaction force of the blade of the blade part acting when pressed against the substrate. Move to reduce the load of the measuring part, and measure the reduction of the load of the measuring part as the breaking load of the substrate.

Preferably, the compression state of the spring can be changed by a compression adjustment part, and the compression adjustment part is provided above the spring and between the upper sliding member and the holding member. Preferably, the downward pressing direction of the driving part, the measuring point of the measuring part, the vertical axis of the spring, the arrangement of the compression adjusting part, and the downward pressing direction of the blade part are arranged on the same straight line in the vertical direction .

The rupture device provided with the pressure measuring mechanism of the present invention includes: a rupture portion that presses a blade provided at the front end along a scribe line to rupture the substrate; a driving portion that lowers the blade portion and presses the blade portion of the blade portion On the substrate; and a pressure measuring mechanism that measures the reaction force from the substrate on the blade of the blade portion; characterized in that the pressure measuring mechanism has: an upper sliding member that is moved in the up and down direction by the drive portion; The lower sliding member is arranged below the upper sliding member to move the blade section in the vertical direction; the measuring part is arranged below the lower sliding member and is set to be pushed from above by the lower sliding member And a holding member, the lower part of which holds the measuring part from the lower side, and the upper part is connected to the upper sliding member, and the spring is set in a pre-compressed state, sandwiching the upper sliding member and the lower part Between sliding members. [Effects of Invention]

The pressure measuring mechanism of the breaking device according to the present invention has the following structure: in the pressure measurement when the substrate is broken, the load applied to the substrate can be measured with high accuracy based on the reaction force acting on the blade, and the blade of the blade When pressing on the substrate, even if an abnormal load such as a high load is applied to the blade, the reaction force acting on the blade at this time is released. Therefore, it can prevent high loads from being directly applied to the load cell and prevent damage to the load cell.

Hereinafter, embodiments of the pressure measuring mechanism 12 of the present invention and the rupture device 1 provided with the pressure measuring mechanism 12 will be described with reference to the drawings. In addition, the embodiment described below is an example of embodying the present invention, and the structure of the present invention is not limited by this specific example. In addition, for the drawings, for ease of observation, some of the components are omitted and drawn.

Moreover, the directions of the x-axis, y-axis, z-axis, etc. of the rupture device 1 and the pressure measuring mechanism 12 are shown in FIGS. 1 to 5 and the like. In addition, the x-axis direction may also be referred to as the “front-rear direction”, the y-axis may be referred to as the “left-right direction (width)”, and the z-axis may be referred to as the “up-down direction (vertical direction)”. In addition, the positive direction of the x-axis is sometimes referred to as the "front direction", and the negative direction of the x-axis is sometimes referred to as the "back direction". Sometimes the positive direction of the y-axis is called the "right direction", and the negative direction of the y-axis is called the "left direction". Sometimes the positive direction of the z-axis is called the "upward direction", and the negative direction of the z-axis is called the "downward direction".

In the following description, the directions shown in the drawings are used as directions for explaining the pressure measuring mechanism 12 of the rupture device 1 of the present invention. Fig. 1 is a diagram schematically showing the structure of the pressure measuring mechanism 12 included in the rupture device 1, and shows an example of basic technical ideas. The breaking device 1 has: a breaking part 2 which presses a cutting edge 3 (blade) equipped at the front end along a scribe line to break the substrate 19; a driving part 4 which lowers the blade part 2 to lower the cutting edge of the blade part 2 3 is pressed on the substrate 19; and a pressure measuring mechanism 12, which measures the breaking load when the blade 3 is pressed to break the substrate 19.

The driving part 4 has a motor 5 which is arranged on the upper part of the device to generate driving force; a moving mechanism 6 which moves the blade part 2 in the vertical direction; and a guide mechanism 9 which guides the blade part 2 and the like in the vertical direction. In this embodiment, a ball screw 6 is used as the moving mechanism 6 and is composed of a long screw shaft 7 and a nut 8 slidably mounted on the screw shaft 7. In addition, as the guide mechanism 9, an LM guide 9 composed of a long rail member 10 and a slider 11 that moves along the rail member 10 is used.

The structure of the pressure measuring mechanism 12 of the present invention will be described in detail with reference to FIG. 1. As shown in FIG. 1, the left-right direction on the paper is the x-axis direction, and the vertical direction on the paper is the z-axis. In addition, the shape of each structural member shown in FIG. 1 is an example of a schematic display, and it is not limited to these shapes. The pressure measuring mechanism 12 measures the load (fracture load) applied to the substrate 19 at the time of fracture based on the reaction force that acts when the blade 3 provided on the blade portion 2 is pressed against the substrate 19 (brittle material substrate, etc.).

As shown in FIG. 4, the pressure measuring mechanism 12 of the present invention has: an upper sliding member 14 which is moved in the up-and-down direction by the driving part 4; a lower sliding member 15 which is arranged below the upper sliding member 14 so that the blade part 2 Move in the up and down direction; the measuring part 13, which is equipped under the lower sliding member 15 and set to be pushed from above by the lower sliding member 15, to measure the reaction force from the base plate 19 on the blade 3 of the blade part 2; And the holding member 16, the lower part holds the measuring part 13 from the lower side, and the upper part is connected to the upper sliding member 14.

The spring 17 (details described below) is sandwiched between the upper sliding member 14 and the lower sliding member 15 in such a way that it is in a pre-compressed state. The measuring unit 13 is set in a state where a preload is applied by the spring 17 in a compressed state (preliminary pressure). In addition, in this embodiment, a load cell is used for the measurement part 13. The pressure measurement mechanism 12 of the present invention is configured as follows: the lower sliding member 15 moves upward by the reaction force of the blade 3 of the blade portion 2 acting when pressed against the substrate 19, so that the load of the measurement portion 13 is reduced and the measurement The load reduction of the portion 13 is measured as the breaking load of the substrate 19.

The compression state of the spring 17 can be changed by the spring pressure adjustment part 18. The spring pressure adjusting portion 18 is disposed above the spring 17 and is between the upper sliding member 14 and the holding member 16. Preferably, as shown in Figures 3 and 4, the downward pressure direction of the driving part 4, the measuring point 13a of the measuring part 13, the up and down axis of the spring 17, the arrangement of the spring pressure adjusting part 18, and the blade part 2. The direction of the downward pressure should just be arranged on the same straight line in the vertical direction.

As shown in FIG. 1, the upper sliding member 14 of this embodiment has: an elongated plate member 14a in the vertical direction (z-axis direction); and an upper plate piece 14b, which extends from the lower portion of the plate member 14a in the forward direction (x-axis The positive direction) highlight the setting. That is, the upper sliding member 14 is formed as a T-shaped member protruding in the front direction. In addition, the upper sliding member 14 may be L-shaped.

For the shape of the upper sliding member 14, it is preferable to have at least a downward direction (the negative direction of the z-axis) to sandwich the spring 17 (detailed below) member 14b, and can move in the up and down direction (z-axis direction) . Regarding the plate member 14a, the nut 8 of the ball screw 6 is mounted on the front surface (the surface in the positive direction of the x-axis). On the other hand, the slider 11 (upper side) of the LM guide 9 is mounted on the rear surface of the plate member 14a (the surface in the negative direction of the x-axis), and is movable in the vertical direction (z-axis direction). That is, the upper sliding member 14 is connected to the driving part 4.

The upper plate 14b is a member that sandwiches the spring 17 in a compressed state. The lower surface (the surface in the negative direction of the z-axis) of the upper plate 14b is in contact with the spring 17. On the other hand, on the upper surface of the upper plate 14b (the surface in the positive direction of the z-axis), a spring pressure adjusting portion 18 is installed (details are described below). The upper sliding member 14 is connected to the holding member 16 via a spring pressure adjusting portion 18 (details will be described later).

Below the upper sliding member 14, a lower sliding member 15 is provided. The lower sliding member 15 of this embodiment has: an elongated plate member 15a in the vertical direction (z-axis direction); and a lower plate piece 15b that protrudes in the forward direction (the positive direction of the x-axis) from the upper portion of the plate member 15a . That is, the lower sliding member 15 is formed as an L-shaped member protruding forward.

Regarding the shape of the lower sliding member 15, it is preferable to have at least a member 15b in which the spring 17 is sandwiched in the upward direction (the positive direction of the z-axis). In addition, the lower sliding member 15 is preferably equipped in a state independent of the upper sliding member 14 and configured to be movable in the vertical direction (z-axis direction). The lower sliding member 15 and the upper sliding member 14 can be moved in the up-and-down direction by each slider 11.

Regarding the plate member 15a, the slider 11 (lower side) of the LM guide 9 (guide mechanism) is mounted on the rear surface (the surface in the negative direction of the x-axis), and is movable in the vertical direction (z-axis direction). On the lower part of the plate member 15a, a blade portion 2 having a blade 3 (blade) at the front end is attached. The lower plate 15b is provided below the plate 14b formed on the upper sliding member 14. The lower plate 15b is a member that sandwiches the spring 17 in a compressed state, and presses the load cell 13 (measurement portion 13) downward by the repulsive force of the spring 17. The upper surface of the lower plate 15b (the surface in the positive direction of the z-axis) is in contact with the spring 17 in the compressed state. On the other hand, the lower surface (the surface in the negative direction of the z-axis) of the lower plate 15b is in contact with the measuring point 13a of the load cell 13.

The lower plate 15b of the lower sliding member 15 and the upper plate 14b of the upper sliding member 14 are equipped with a predetermined interval in the vertical direction (z-axis direction). However, in this embodiment, the load cell 13 is held by the holding member 16. The holding member 16 of this embodiment has: an elongated plate member 16a in the vertical direction (z-axis direction); an upper plate piece 16b protruding from the upper portion of the plate member 16a in the rear direction (the negative direction of the x-axis); and a lower portion The plate 16c protrudes from the lower part of the plate member 16a in the rear direction (the negative direction of the x-axis). That is, the holding member 16 is formed as a U-shaped member provided with two upper plate pieces 16b and lower plate pieces 16c protruding in the rear direction on the plate member 16a.

Regarding the plate member 16a, the length in the vertical direction (z-axis direction) is longer than the height of the space (interval) formed by the lower plate 15b of the lower sliding member 15 and the upper plate 14b of the upper sliding member 14. The upper plate 16b is provided above the plate 14b formed on the upper sliding member 14. A spring adjusting portion 18 is installed on the lower surface (the surface in the negative direction of the z-axis) of the upper plate 16b. That is, the holding member 16 is connected to the upper sliding member 14 via the spring pressure adjusting portion 18.

On the other hand, the lower plate 16c is provided under the plate 15b formed under the lower sliding member 15. The load cell 13 is attached to this lower plate 16c. The load cell 13 is the one whose measuring point 13a faces upward (the positive direction of the z-axis). That is, the load cell 13 is provided so as to be sandwiched between the lower plate 16c of the holding member 16 and the lower plate 15b formed on the lower sliding member 15.

That is, the holding member 16 is a member that surrounds the lower plate 15b of the lower sliding member 15 and the upper plate 14b of the upper sliding member 14 from above and below, and is set to hold the load cell 13 from below and make the measurement point of the load cell 13 13a is in contact with the lower sliding member 15. Moreover, a spring 17 for imparting elastic thrust is incorporated in the space between the upper sliding member 14 and the lower sliding member 15. That is, the spring 17 is provided in a state of being sandwiched by the upper plate 14b of the upper sliding member 14 and the lower plate 15b of the lower sliding member 15.

The spring 17 in the compressed state retains the remaining contraction force and is assembled. In order to prevent the load cell 13 from being damaged during abnormal operation, the contraction force of the spring 17 must be retained. In addition, the spring 17 in the compressed state can be regarded as a rigid body. Since the spring 17 is in contact with both the upper sliding member 14 and the lower sliding member 15, if the upper sliding member 14 moves in the vertical direction (z-axis direction), the lower sliding member 15 also moves at the same time. In particular, when the sliding members 14 and 15 move in the downward direction (the negative direction of the z-axis), the spring 17 connects the upper sliding member 14 and the lower sliding member 15.

The spring 17 is sandwiched by the upper plate 14b and the lower plate 15b, and is in a pre-compressed state. The spring 17 presses the lower sliding member 15 downward by the repulsive force, and enters a state in which a preliminary pressure is applied to the load cell 13. In addition, the configuration (outer diameter, wire diameter, number of turns, length, etc.) of the spring 17 is specific. In addition, the number of springs 17 is only one in FIG. 1, but two or more may be provided. In addition, the compression of the spring 17 is compressed with a specific pressure. That is, it is preferable that the spring 17 is within the measurable range of the load cell 13 and has a structure in which the fracture load of the target substrate 19 can be measured.

In addition, a compression adjustment part 18 is provided between the upper sliding member 14 and the holding member 16. In this embodiment, a spring pressure adjusting portion 18 that changes the compression state of the spring 17 is provided as the compression adjusting portion 18. The spring pressure adjustment part 18 includes, for example, a screw 18 whose interval can be adjusted by rotating it. As the screw 18, a fine pitch screw is preferable. The fine pitch screw is preferable because it can be manufactured at a low price and has high rigidity, and can withstand the vibration imparted to the device in actual operation.

In detail, the screw 18 is assembled into the space formed between the upper plate 14b of the upper sliding member 14 and the upper plate 16b of the holding member 16. The screw 18 connects the upper sliding member 14 and the holding member 16. If the screw 18 is rotated in the tightening direction to narrow the space in the vertical direction, the upper sliding member 14 moves in the upward direction (the positive direction of the z-axis), so the compression of the spring 17 becomes weak. On the other hand, if the screw 18 is rotated in the loosening direction, the space expands in the vertical direction, and the upper sliding member 14 is pushed in the downward direction (the negative direction of the z-axis), so the compression of the spring 17 becomes stronger.

That is, the spring adjusting portion 18 changes the compression state (the strength of compression) of the spring 17 by changing the size of the space formed between the upper sliding member 14 and the holding member 16 in the up and down direction. In summary, the pressure measuring mechanism 12 of the present invention adopts the method of reducing the load, pre-compressing the load cell 13 and measuring the reduction of the load as the breaking load of the substrate 19.

Regarding the arrangement of the pressure measuring mechanism 12, the member moving in the up and down direction by the drive part 4 is divided into an upper sliding member 14, a lower sliding member 15 with the blade part 2, and a holding member 16 holding the load element 13, and the upper sliding member Between 14 and the lower sliding member 15, the spring 17 measuring the maximum load of the load cell 13 is compressed and clamped in advance. The preload is applied to the load cell 13 by the repulsive force of the spring 17.

In addition, as the measuring direction of the pressure measuring mechanism 12, when the substrate 19 is broken, the pressure measuring mechanism 12 is installed in a direction that reduces the load on the load cell 13. As the initial setting of the pressure measuring mechanism 12, a preliminary pressurization is given up to the maximum measured load of the load cell 13. As the main component of the pressure measuring mechanism 12 in the downward pressure direction (on the z-axis), from the top, in order are the driving part 4 (motor 5, ball screw 6), holding member 16, spring pressure adjusting part 18, and upper sliding member 14. , The spring 17, the lower sliding member 15, the measuring part 13 (load element), and the holding member 16.

The upper sliding member 14, the lower sliding member 15, and the holding member 16 are equipped in an independent state, and can move in the vertical direction. Only the upper sliding member 14 connected to the driving portion 4 and the holding member 16 connected to the upper sliding member 14 via the spring pressure adjusting portion 18 are a unit. Regarding the lower sliding member 15, the upper surface (the surface in the positive direction of the z-axis) of the lower plate 15b is in a state where the spring 17 is placed. On the other hand, the lower surface of the lower plate 15b (the surface in the negative direction of the z-axis) is in contact with the measuring point 13a of the load cell 13. That is, the lower sliding member 15 is connected to the upper sliding member 14 via the spring 17 and is in contact with the load cell 13.

In addition, when an abnormal load is applied, the spring 17 is regarded as a rigid body before the pre-pressurization is set, and if a load above it is applied, it will compress further, so the pre-pressurization is reduced to protect the load cell 13. However, the load cell 13 is constantly and continuously applied with a load. However, since the difference (the value of the load reduction) between the pre-pressing and the processing time is set as the measured value (the breaking load), there is no particular problem. In other words, "zero point adjustment" is performed every measurement.

Since the pressure measuring mechanism 12 of the present invention performs "zero point adjustment" every time, the mechanism for pre-pressurizing the load cell 13 does not need to be a precision mechanism. The load cell 13 is preliminarily pressurized by the spring 17, and the load cell 13 is always in contact with the lower sliding member 15 provided with the blade portion 2. Therefore, even if the spring 17 expands and contracts due to the change in the load, it does not vibrate. The pressure measuring mechanism 12 of the present invention can measure the breaking load of the substrate 19 in the entire range of the measurable range of the load cell 13. In addition, even if an abnormal load is applied, the load cell 13 is not damaged.

The operation of the breaking device 1 and the pressure measuring mechanism 12 when the blade 3 of the blade portion 2 is pressed against the substrate 19 to break the substrate 19 is as follows. If the driving force output by the motor 5 of the driving part 4 causes the nut 8 of the ball screw 6 to move in the downward direction (the negative direction of the z-axis) on the screw shaft 7, the nut 8 descends, thereby the upper sliding member 14 decline. As the upper sliding member 14 descends, the slider 11 (upper side) of the LM guide 9 descends along the rail. The holding member 16 connected to the upper sliding member 14 via the spring pressure adjusting portion 18 also descends. The load cell 13 held by the holding member 16 also drops.

Here, when moving in the downward direction, the upper sliding member 14 and the lower sliding member 15 become one unit by the spring 17 regarded as a rigid body. That is, the upper sliding member 14 and the lower sliding member 15 descend simultaneously. The spring 17 is compressed and assembled with a margin for contraction. The lower sliding member 15 is lowered by the spring 17 urged by the upper sliding member 14. As the lower sliding member 15 descends, the slider 11 (lower side) of the LM guide 9 descends along the rail. The blade portion 2 provided at the front end of the lower sliding member 15 also descends.

At this time, the lower sliding member 15 and the load cell 13 are in contact with each other at the measurement point 13a. The load cell 13 is in contact with the lower sliding member 15 and is lowered while maintaining the pre-loaded state (preliminary pressure) by the spring 17 in the compressed state. If the blade 3 of the blade portion 2 is in contact with the substrate 19 and the substrate 19 is pressed, a reaction force is generated on the blade 3 of the blade portion 2. The lower sliding member 15 moves in the upward direction (the positive direction of the z-axis) due to the reaction force that acts when the blade 3 is pressed against the substrate 19. When the lower sliding member 15 rises, the spring 17 contracts.

On the other hand, at this time, the load cell 13 held by the holding member 16 is almost stopped. That is, the lower sliding member 15 performs different actions (movements of ascending with respect to the stop) of the holding member 16 and the upper sliding member 14. When the lower sliding member 15 rises, the spring 17 contracts, and the pressure of the lower sliding member 15 is weakened to the measuring point 13a of the load cell 13 in the contact state, and the load is dissipated. That is, since the contact pressure imparted by the lower sliding member 15 is reduced, the load (preliminary pressure) applied to the load cell 13 is reduced.

The load cell 13 detects a negative load here. The load reduction of the detected load cell 13 is measured as the breaking load of the substrate 19. The present invention is configured as follows: the spring 17 is contracted by the reaction force of the blade 3 of the blade portion 2 acting when the substrate 19 is pressed, and the lower sliding member 15 rises, whereby the preliminary load on the load element 13 is reduced. If an abnormal reaction force caused by high load is applied to the blade 3 for some reasons, the abnormal reaction force will not be applied to the load cell 13, so the damage to the load cell 13 caused by the abnormal load can be prevented.

Next, referring to FIGS. 2 to 4, the outline of the pressure measuring mechanism 12 of the present invention will be described. Fig. 2 is a perspective view of the rupture device 1 provided with the pressure measuring mechanism 12 of the present invention. Figure 3 is a front view, a top view, and a side view of the pressure measurement mechanism of the present invention. 4 is a cross-sectional view A-A (side cross-sectional view) and a cross-sectional view B-B (front cross-sectional view) of the pressure measuring mechanism 12 of the present invention. In addition, Figures 2 to 4 are examples of actual devices.

As shown in Figs. 2 to 4, the motor 5 of the drive unit 4 is installed at the uppermost part of the rupture device 1, and its rotating shaft 5a faces downward (the negative direction of the z-axis). The rotating shaft 5 a of the motor 5 is connected to the screw shaft 7 of the ball screw 6 via a coupling 20. The screw shaft 7 is equipped with its shaft center facing the z-axis direction. The nut 8 of the ball screw 6 is mounted on the upper sliding member 14.

The upper sliding member 14 is equipped on the upper part of the pressure measuring mechanism 12. The upper sliding member 14 is attached to the sliding member 11 (upper side) for the plate member 14a to move along the rail. In the embodiments shown in Figs. 2 to 4, the upper plate 14b includes a block provided on the upper part. The upper plate 14b is formed to protrude in the forward direction (the positive direction of the x-axis), and the nut 8 of the ball screw 6 is installed. If the nut 8 moves on the screw shaft 7, the upper sliding member 14 moves in the vertical direction (z-axis direction), and the slider 11 (upper side) also moves along the rail. The spring pressure adjusting part 18 (screw) is provided in contact with the upper surface of the upper plate 14b. In the present embodiment, the springs 17 are arranged two in the left-right direction (y-axis direction) and are provided under the upper plate 14b.

The lower sliding member 15 is equipped below the upper sliding member 14. The lower sliding member 15 is attached to the sliding member 11 (lower side) for the plate member 15a to move along the rail. At the lower part of the plate member 15a, a blade part 2 having a blade 3 at the front end is attached. The lower plate 15b is formed to protrude in the forward direction (the positive direction of the x-axis). Two springs 17 are arranged side by side in the left-right direction (y-axis direction) and are provided on the upper side of the lower plate 15b. That is, the spring 17 is sandwiched between the upper sliding member 14 and the lower sliding member 15 and assembled in a compressed state.

The holding member 16 is provided on the front side of the upper sliding member 14 and the lower sliding member 15 (the positive direction of the x-axis). The holding member 16 is a frame having a square shape in front view. The holding member 16 has an elongated rod member 16a, and connecting members 16b and 16c that connect the rod member 16a. In addition, in the embodiment shown in FIGS. 2 to 4, the rod member 16a corresponds to the plate member 16a in FIG. In addition, the connecting member 16b corresponds to the upper plate piece 16b in FIG. 1. In addition, the connecting member 16c corresponds to the lower plate piece 16c in FIG. 1.

The rod member 16a is equipped with two rod members 16a with a shaft center oriented in the up-down direction (z-axis direction) and at a predetermined interval in the left-right direction (y-axis direction). The connecting members 16b and 16c are equipped so that the ends of the two rod members 16a are framed in the left-right direction, and the two rod members 16a are connected. The upper connecting member 16b connects the upper ends of the two rod members 16a in the left-right direction. The lower connecting member 16c connects the lower ends of the two rod members 16a in the left-right direction. Thereby, the holding member 16 becomes a rectangular frame in front view.

A screw hole is formed in the upper connecting member 16b, and the spring pressure adjusting portion 18 (screw) is inserted into the screw hole. Regarding the spring pressure adjusting portion 18, for example, when the screw 18 is rotated in the tightening direction, the space between the holding member 16 and the upper sliding member 14 expands in the vertical direction, and the spring 17 is pressed, so the compression of the spring 17 increases. On the other hand, if the screw 18 is rotated in the loosening direction, the space between the holding member 16 and the upper sliding member 14 is narrowed in the vertical direction and the pressure is reduced, so the compression of the spring 17 is weakened.

The rod member 16 a is inserted into the through hole of the upper plate 14 b provided on the upper sliding member 14. In addition, the rod member 16a is equipped by passing through the spring 17. In addition, the rod member 16a is inserted into the through hole of the plate 15b provided under the lower sliding member 15. The lever member 16a is equipped so as to be slidable in the vertical direction (z-axis direction) with respect to the lower sliding member 15.

The load cell 13 (measurement part) is placed on the lower connecting member 16c. The measuring point 13a of the load cell 13 faces the upward direction (the positive direction of the z-axis). The measuring point 13a of the load cell 13 is in contact with the plate 15b under the lower sliding member 15. The load cell 13 is pressed against the lower sliding member 15 by the repulsive force of the spring 17, thereby applying preliminary pressure to the load cell 13.

The downward pressure direction of the drive unit 4, the measuring point 13a of the load cell 13, the up-down axis center of the spring 17, the arrangement of the spring pressure adjusting portion 18, and the downward pressure direction of the blade portion 2 are arranged in the up-down direction (z-axis direction) On the same straight line. Here, the knowledge of the pressure measuring mechanism 12 of the rupture device 1 of the present invention will be described.

With the gap=0, the load cell 13 is locked between the lower sliding member 15 and the holding member 16 provided with the blade portion 2. The load cell 13 directly detects the load applied to the blade 3 by breaking. However, the deformation caused by the load of the load element 13 is regarded as a negligible amount. The load cell 13 is bent with a strain gauge to measure the pressure, so it is not a completely rigid body, but a so-called spring with a very large spring constant.

And, when the gap of the load cell 13 is adjusted to zero, it is as follows. For example, in the specification of load cell 13, when the load is 1000 N and the change is about 0.06 mm, the spring constant is 16 KN/m. In order to accurately form the space with the load cell 13 in such a way that the gap is zero, the gap adjustment mechanism must be precisely and accurately manufactured. In addition, the compression adjustment part 118 of the previous pressure measuring mechanism 112 is finely adjusted with four screws. Previously, precision lead screws were required.

Therefore, by applying preliminary pressure to the load cell 13, the gap is eliminated. The measured value can be obtained from the difference between the pre-pressurization of the load cell 13 and the output pressure at the time of fracture. However, it is necessary to fully pre-press the load cell 13 in advance. The fractured part 2 needs to be quite rigid in order to maintain the blade 3, and therefore has a considerable weight (about 20 kg).

At the time of rupture, by accelerating the rupture device 1 when moving in the up and down direction, a force is applied in the opposite direction of the pre-pressurization to prevent the pressure between the self-loading element 13 and the lower sliding member 15 with the blade portion 2 from being completely When the disappeared unstable state touches the blade 3 and the substrate 19 again, an impact or vibration occurs. If the pre-pressurization is increased, vibration can be prevented, but the measuring range of the breaking load becomes narrower.

As long as the pre-pressurization of the load cell 13 can be sufficiently performed, even if the blade portion 2 with sufficient weight is moved in the vertical direction, it will not vibrate. In addition, it is preferable to always apply the maximum measured load to the load cell 13 and to set the force generated at the time of fracture in the direction in which the load to the load cell 13 is reduced. In addition, in this embodiment, the load cell 13 (manufactured by TEAC Co., Ltd., model number: TU-PGRH-G) is used as the measurement unit 13.

As a method of using the load cell 13, set the preload state in advance, and measure the pressure when the load decreases from this state. In addition, for reference, for example, 3000 N is applied to the load cell 13 as a preliminary pressure and set in the breaking device 1, and the breaking load to the substrate 19 is measured based on the pressure reduced by the preliminary pressure of the load cell 13 during operation. In addition, it has a configuration in which a pressure of, for example, 3000 N is applied in advance as a preliminary pressurization of the load cell 13 to reduce the load on the load cell 13 when it is broken. Measure the difference between the output value in the neutral state and the actual output value at the time of breaking, as the load at the time of breaking (breaking load).

Regarding the adjustment of the inclination of the lower portion 16d of the holding member holding the blade portion 2, the installation portion of the blade 3 of the blade portion 2 is set in a seesaw shape with the center as the rotation reference 23. One side is pressed by the spring 21, and the height of the opposite side is adjusted by the blade balance adjustment mechanism 22 (adjusting screw or eccentric pin). In addition, the pressure of the spring 21 is set to about 10 N to 20 N. As shown in Figures 2 to 4, the pressure measuring mechanism 12 is pre-divided into a sliding member 14 connected to the upper part of the drive part 4, a lower part sliding member 15 provided with the blade part 2, and a holding member 16 holding the load cell 13. The spring 17 is sandwiched between the upper sliding member 14 and the lower sliding member 15 to apply preliminary pressure to the load cell 13. A load is given to the load cell 13 in advance, and the amount of load reduction is measured as the breaking load.

Here, as an example, if two springs 17 with spring constant=60 N/mm are provided, in order to obtain the maximum measurement range of 3000 N, the spring 17 needs to be compressed by about 25 mm. In this case, it is not necessary to use a precision lead screw in the spring adjustment portion 18, and it is possible to fully install and adjust it with a general fine thread screw. As a feature of the present invention, the load cell 13 is constantly applied with a load. No load above the spring pressure is applied to the load cell 13. That is, the load cell 13 can be protected during abnormal operation. By providing the spring pressure adjusting part 18 (screw), the load cell 13 and its measuring range can be changed, but in this case, the change of the screw 18 is offset and input.

Regarding the detection accuracy of the pressure detection mechanism 12, for example, when the expected accuracy of the load cell 13 alone is set to ±3 N, noise effects such as guide sliding resistance and vibration are added to the device. In addition, the absolute accuracy of measurement resolution and displayed pressure can be considered as an absolute accuracy of about ±10 N. By setting the blade portion 2 (blade 3), load element 13, spring 17, ball screw 6, etc. to be arranged in the vertical direction in a straight line, it is possible to eliminate the generation of torque to each structure. The sliding resistance or vibration noise of the LM guide 9 is kept to a minimum, that is, the noise during pressure measurement is suppressed as much as possible, so the pressure of the blade portion 2 can be accurately measured.

The xy position, height, stroke, etc. of the blade portion 2 are set to specific ones. The LM guide 9, the motor 5, etc. are also designated as specific ones. In addition, when the weight of the device is reduced, the gain of the z-axis motor needs to be adjusted accordingly. The LM divides the structure of the guide 9 into a driving part 4 and a blade part 2, and a load cell 13 is provided therebetween. In addition, the size of the LM guide 9 and the number of sliders 11 are set to specific ones. Let the rigidity of the blade part 2 be a specific one.

Regarding the inclination adjustment mechanism of the lower portion 16d of the holding member, as described above, it is adjusted by the rotation reference 23 and the blade portion balance adjustment mechanism 22 (eccentric pin). In addition, in this embodiment, the adjustment amount = ±0.3 mm. As described above, the pressure measuring mechanism 12 of the rupture device 1 according to the present invention has the following structure: in the pressure measurement when the substrate 19 is ruptured, in addition to the high-precision measurement of the pressure applied to the substrate 19 based on the reaction force acting on the blade 3 In addition to the load, when the blade 3 of the blade portion 2 is pressed against the base plate 19, even if an abnormal load such as a high load is applied to the blade 3, the reaction force acting on the blade 3 at this time is released. Therefore, high load can be prevented from being directly applied to the load Element 13, to prevent damage to the load element 13. In addition, it can be confirmed that the substrate 19 is broken with an appropriate load.

We should understand that all aspects of the implementation form disclosed this time are examples and not restrictive. In particular, in the embodiment disclosed this time, the unspecified matters such as operating conditions, operating conditions, size and weight of the structure, etc., are not those that do not deviate from the scope of the usual implementation by those skilled in the relevant field, but rather the usual ones. Those skilled in the relevant art can easily imagine things.

1: Fracture device 2: Blade part 3: Blade (blade) 4: Drive section 5: Motor 5a: Rotation axis 6: Moving mechanism (ball screw) 7: Screw shaft 8: Nut 9: Guiding mechanism (LM guide) 10: Track member 11: Slide 12: Pressure measuring mechanism 13: Measurement department (load element) 13a: measuring point 14: Upper sliding member 14a: Plate member 14b: Upper plate 15: Lower sliding member 15a: Plate member 15b: Lower plate 16: holding member 16a: Plate member (rod member) 16b: Upper plate (upper connecting member) 16c: Lower plate (lower connecting member) 16d: The lower part of the holding member 17: Spring 18: Compression adjustment part (spring pressure adjustment part, screw) 19: substrate 20: Coupling 21: Spring 22: Blade balance adjustment mechanism 23: Rotation datum 101: Fracture Device 102: Blade section 103: blade (blade) 104: Drive 105: Motor 106: Moving mechanism (ball screw) 109: Guide mechanism (LM guide) 112: Pressure measuring mechanism 113: Measurement Department (Load Cell) 114: Upper sliding member 115: Lower sliding member 118: Compression Adjustment Department 119: Substrate x: direction y: direction z: direction

Fig. 1 is a diagram schematically showing the structure of the pressure measuring mechanism of the present invention. Fig. 2 is a perspective view of a breaking device equipped with the pressure measuring mechanism of the present invention. Figure 3 is a front view, a top view, and a side view of the pressure measurement mechanism of the present invention. Fig. 4 is a cross-sectional view A-A (side cross-sectional view) and a cross-sectional view B-B (front cross-sectional view) of the pressure measuring mechanism of the present invention. Figure 5 is a diagram schematically showing the structure of the previous pressure measuring mechanism.

1: Fracture device

2: Blade part

3: Blade (blade)

4: Drive section

5: Motor

6: Moving mechanism (ball screw)

7: Screw shaft

8: Nut

9: Guiding mechanism (LM guide)

10: Track member

11: Slide

12: Pressure measuring mechanism

13: Measurement department (load element)

13a: measuring point

14: Upper sliding member

14a: Plate member

14b: Upper plate

15: Lower sliding member

15a: Plate member

15b: Lower plate

16: holding member

16a: Plate member (rod member)

16b: Upper plate (upper connecting member)

16c: Lower plate (lower connecting member)

17: Spring

18: Compression adjustment part (spring pressure adjustment part, screw)

19: substrate

x: direction

z: direction

Claims (5)

A pressure measuring mechanism, which is equipped in a rupture device, the rupture device has: a blade portion that presses a blade equipped at the front end along a scribe line to break a substrate; and a drive portion that lowers the blade portion , Press the blade of the blade part against the above-mentioned substrate; The above-mentioned pressure measuring mechanism is characterized by: The upper sliding member is moved in the up and down direction by the above-mentioned driving part; A lower sliding member, which is provided below the upper sliding member, so that the blade portion moves in the up and down direction; A measuring part, which is provided below the lower sliding member and is placed in a state of being pushed by the lower sliding member from above, and measures the reaction force from the substrate to the blade of the blade part; and A holding member whose lower part holds the above-mentioned measuring part from the lower side, and the upper part is connected to the above-mentioned upper sliding member, and The spring is sandwiched between the upper sliding member and the lower sliding member in a pre-compressed state. Such as the pressure measurement agency of claim 1, where The measuring part is set in a preloaded state by the spring in the compressed state, and The structure is configured to move the lower sliding member upward by the reaction force of the blade of the blade portion acting when pressing on the substrate, thereby reducing the load of the measuring portion, The reduction in the load of the measuring part is measured as the breaking load of the substrate. Such as the pressure measurement agency of claim 2, where The above-mentioned spring can change the compression state by the compression adjustment part, The compression adjusting part is provided above the spring and between the upper sliding member and the holding member. Such as the pressure measurement agency of claim 3, where The downward pressing direction of the driving part, the measuring point of the measuring part, the vertical axis of the spring, the arrangement of the compression adjusting part, and the downward pressing direction of the blade part are arranged on the same straight line in the vertical direction. A rupture device comprising: a rupture part that presses a blade provided at the front end along a scribe line to rupture a substrate; a driving part that lowers the blade part and presses the blade of the blade part against the substrate; and A pressure measuring mechanism that measures the reaction force from the substrate to the blade of the blade portion; characterized in that, The above-mentioned pressure measuring mechanism has: The upper sliding member is moved in the up and down direction by the above-mentioned driving part; A lower sliding member, which is provided below the upper sliding member, so that the blade portion moves in the up and down direction; The measuring part is provided below the lower sliding member and is set to be pressed from above by the lower sliding member; and A holding member whose lower part holds the above-mentioned measuring part from the lower side, and the upper part is connected to the above-mentioned upper sliding member, and The spring is sandwiched between the upper sliding member and the lower sliding member in a pre-compressed state.

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