WO2020107512A1 - 一种烘烤箱和显示面板的制造设备 - Google Patents

一种烘烤箱和显示面板的制造设备 Download PDF

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Publication number
WO2020107512A1
WO2020107512A1 PCT/CN2018/119552 CN2018119552W WO2020107512A1 WO 2020107512 A1 WO2020107512 A1 WO 2020107512A1 CN 2018119552 W CN2018119552 W CN 2018119552W WO 2020107512 A1 WO2020107512 A1 WO 2020107512A1
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Prior art keywords
channel
air
air inlet
filter
filter element
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Ceased
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PCT/CN2018/119552
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English (en)
French (fr)
Inventor
张雷
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HKC Co Ltd
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HKC Co Ltd
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Priority to US16/349,970 priority Critical patent/US20200284511A1/en
Publication of WO2020107512A1 publication Critical patent/WO2020107512A1/zh
Anticipated expiration legal-status Critical
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B21/00—Arrangements for supplying or controlling air or other gases for drying solid materials or objects
    • F26B21/20—Circulating air or gases in closed cycles, e.g. wholly within the drying enclosure
    • F26B21/25—Circulating air or gases in closed cycles, e.g. wholly within the drying enclosure partly outside the drying enclosure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B21/00—Arrangements for supplying or controlling air or other gases for drying solid materials or objects
    • F26B21/20—Circulating air or gases in closed cycles, e.g. wholly within the drying enclosure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41F—PRINTING MACHINES OR PRESSES
    • B41F23/00—Devices for treating the surfaces of sheets, webs, or other articles in connection with printing
    • B41F23/04—Devices for treating the surfaces of sheets, webs, or other articles in connection with printing by heat drying, by cooling, by applying powders
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B21/00—Arrangements for supplying or controlling air or other gases for drying solid materials or objects
    • F26B21/003—Air or gas filters
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B25/00—Details of general application not covered by group F26B21/00 or F26B23/00
    • F26B25/005—Treatment of dryer exhaust gases
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B25/00—Details of general application not covered by group F26B21/00 or F26B23/00
    • F26B25/06—Chambers, containers, or receptacles
    • F26B25/08—Parts thereof
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B3/00—Drying solid materials or objects by processes involving the application of heat
    • F26B3/02—Drying solid materials or objects by processes involving the application of heat by convection, i.e. heat being conveyed from a heat source to the materials or objects to be dried by a gas or vapour, e.g. air
    • F26B3/04—Drying solid materials or objects by processes involving the application of heat by convection, i.e. heat being conveyed from a heat source to the materials or objects to be dried by a gas or vapour, e.g. air the gas or vapour circulating over or surrounding the materials or objects to be dried
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B9/00—Machines or apparatus for drying solid materials or objects at rest or with only local agitation; Domestic airing cupboards
    • F26B9/06—Machines or apparatus for drying solid materials or objects at rest or with only local agitation; Domestic airing cupboards in stationary drums or chambers
    • F26B9/066—Machines or apparatus for drying solid materials or objects at rest or with only local agitation; Domestic airing cupboards in stationary drums or chambers the products to be dried being disposed on one or more containers, which may have at least partly gas-previous walls, e.g. trays or shelves in a stack
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B9/00—Machines or apparatus for drying solid materials or objects at rest or with only local agitation; Domestic airing cupboards
    • F26B9/06—Machines or apparatus for drying solid materials or objects at rest or with only local agitation; Domestic airing cupboards in stationary drums or chambers
    • F26B9/08—Machines or apparatus for drying solid materials or objects at rest or with only local agitation; Domestic airing cupboards in stationary drums or chambers including agitating devices, e.g. pneumatic recirculation arrangements

Definitions

  • the present application relates to the field of display technology, and in particular, to a baking box and display panel manufacturing equipment.
  • Flat panel displays include thin film transistor liquid crystal displays (Thin Film Transistor-Liquid Crystal (TFT-LCD) and organic light-emitting diode (Organic Light-Emitting Diode, OLED) displays, etc.
  • TFT-LCD Thi Film Transistor-Liquid Crystal
  • OLED Organic Light-Emitting Diode
  • the thin film transistor liquid crystal display controls the rotation direction of the liquid crystal molecules to refract the light of the backlight module to generate a picture, which has many advantages such as thin body, power saving, no radiation and so on.
  • the organic light emitting diode display is made of organic electroluminescent diodes, and has many advantages such as self-luminescence, short response time, high definition and contrast, flexible display and large-area full-color display.
  • an oven In each substrate manufacturing process of flat panel displays, an oven (OVEN) is generally required to be heated after development, and organic sublimation will accumulate in the oven, and the sublimation will fall onto the substrate and cause damage (defect). Most areas are large and cannot be repaired.
  • the purpose of this application is to provide a manufacturing apparatus for a baking box and a display panel to solve the problem of reducing accumulated sublimates.
  • the baking box includes: an accommodating device located inside the baking box, configured to place a color film substrate; an air suction device configured to transport gas into the baking box; and an air suction device configured to send hot air into the accommodating device
  • the air inlet channel set to return the hot air sent from the accommodating device to the air return channel of the air inlet channel; the first filtering device located in the air return channel;
  • the air suction device includes an air inlet, the air inlet is located at the junction of the air inlet channel and the return air channel, and the air inlet channel includes a heating device and a An air device and a second filter device, the heating device is adjacent to the air inlet, the air supply device is adjacent to the heating device, and the second filter device is disposed at an air inlet position of the accommodating device .
  • the accommodating device includes a first supporting frame and a partition, the first supporting frames are stacked, and an accommodating space for placing the color filter substrate is formed between the adjacent two layers of the first supporting frames;
  • the partition board is disposed on the first support frame.
  • the material of the separator is metal.
  • the baking box includes a door panel, an exhaust channel and an exhaust hole, the exhaust channel is located outside the return air channel, the door panel is located outside the inner exhaust channel, and the exhaust hole is provided On the side wall of the air extraction channel, it is arranged to discharge the gas of the return air channel out of the baking box.
  • the shape of the vent hole is circular.
  • the first filter device includes a filter element and a second support frame, the number of the second support frame is two, the second support frame is arranged in parallel, and the filter element is arranged in two of the second Between the support frames, the filter element is made of polypropylene material.
  • the filter core includes at least two layers of filter screens, and the filter screens are stacked.
  • the application also discloses a baking box.
  • the baking box includes: the baking box includes: an accommodating device located inside the baking box, configured to place a color film substrate; an air suction device configured to deliver gas into the baking box; and a hot air
  • the door plate outside the return air channel; the exhaust hole provided on the side wall of the exhaust air channel is arranged to discharge the gas of the return air channel out of the baking box;
  • the accommodating device includes a first support frame and a partition plate, the first support frames are stacked, and an accommodating space for placing the color filter substrate is formed between the adjacent two layers of the first support frames; the partition plate Disposed on the first support frame; the first filtering device includes a filter element and a second support frame, the number of the second support frame is two, the second support frame is arranged in parallel, and the filter element is arranged on Between the two second support frames, the filter element is made of polypropylene material; the filter element includes at least two layers of filter screens, and the filter screens are stacked.
  • the present application also discloses a display panel manufacturing equipment, which includes a baking box.
  • the baking box includes: an accommodating device located inside the baking box, configured to place a color film substrate; and configured to deliver gas to the baking An air suction device in the box; an air inlet channel configured to send hot air into the accommodating device; an air inlet channel configured to send hot air sent out from the accommodating device back to the air inlet channel; The first filtering device in the air channel.
  • the air suction device includes an air inlet, the air inlet is located at the junction of the air inlet channel and the return air channel, and the air inlet channel includes a heating device and a An air device and a second filter device, the heating device is adjacent to the air inlet, the air supply device is adjacent to the heating device, and the second filter device is disposed at an air inlet position of the accommodating device .
  • the accommodating device includes a first supporting frame and a partition, the first supporting frames are stacked, and an accommodating space for placing the color filter substrate is formed between the adjacent two layers of the first supporting frames;
  • the partition board is disposed on the first support frame.
  • the material of the separator is metal.
  • the baking box includes a door panel, an exhaust channel and an exhaust hole, the exhaust channel is located outside the return air channel, the door panel is located outside the inner exhaust channel, and the exhaust hole is provided On the side wall of the air extraction channel, it is arranged to discharge the gas of the return air channel out of the baking box.
  • the shape of the vent hole is circular.
  • the first filter device includes a filter element and a second support frame, the number of the second support frame is two, the second support frame is arranged in parallel, and the filter element is arranged in two of the second Between the support frames, the filter element is made of polypropylene material.
  • the filter core includes at least two layers of filter screens, and the filter screens are stacked.
  • the first filter device includes a filter element and a second support frame, the number of the second support frame is two, the second support frame is arranged in parallel, and the filter element is arranged in two of the second Between the support frames, the filter element is made of polysulfone ultrafiltration membrane material.
  • the substrate of the present application will generate and accumulate sublimate after baking under high temperature gas, and the sublimate will follow the circulating gas to the return air channel.
  • the first filtering device absorbs the sublimate, prevents the sublimate from entering the air inlet channel along with the circulating gas again, avoids the circulation of the sublimate, and protects the substrate. Due to the color resistance on the color filter substrate, more sublimation will be generated during the baking process.
  • FIG. 1 is a schematic diagram of a yellow light manufacturing process of a color film substrate
  • FIG. 2 is a schematic diagram of a baking oven according to one embodiment of the present application.
  • FIG. 3 is a schematic diagram of a baking box with an exhaust hole, a partition and a filtering device according to one embodiment of the present application;
  • FIG. 4 is a schematic diagram of a vent hole according to one embodiment of the present application.
  • FIG. 5 is a schematic diagram of the inside and outside of a side wall of an exhaust channel according to one embodiment of the present application.
  • FIG. 6 is a schematic diagram of a door panel opening according to one embodiment of the present application.
  • FIG. 7 is a schematic diagram of a door panel closing according to one embodiment of the present application.
  • FIG. 8 is a schematic diagram of a filtering device according to one embodiment of the present application.
  • FIG. 9 is a schematic diagram of a display panel manufacturing device according to one embodiment of the present application.
  • connection should be understood in a broad sense, for example, it can be fixed connection or detachable Connected, or connected integrally; either mechanically or electrically; directly connected, or indirectly connected through an intermediary, or internally connected between two components.
  • installation should be understood in a broad sense, for example, it can be fixed connection or detachable Connected, or connected integrally; either mechanically or electrically; directly connected, or indirectly connected through an intermediary, or internally connected between two components.
  • each color filter substrate needs to be heated in a baking box 200 to achieve the drying and curing of the photoresist on the color filter substrate, but because the photoresist itself contains solvents, etc.
  • organic sublimates will accumulate in the oven 200 for a long time. When the sublimates condense to a certain extent, the sublimates will fall on the color filter substrate and cause damage, and most of the areas are large and cannot be repaired .
  • an embodiment of the present application discloses a baking box 200.
  • the baking box 200 includes: an accommodating device 210 inside the baking box 200, which is arranged to place the color filter substrate; an air suction device 280 which is arranged to send gas into the baking box 200; and an air suction device 280 which is arranged to send hot air into the container 210
  • the substrate of the present application will generate and accumulate sublimate after the high-temperature gas is baked, and the sublimate will come to the return air channel along with the circulating gas.
  • the first filtering device in the air channel absorbs the sublimate, prevents the sublimate from entering the air channel along with the circulating gas again, avoids the circulation of the sublimate, and protects the substrate. Due to the color resistance on the color filter substrate, more sublimation will be generated during the baking process, so it is especially suitable for the color filter substrate manufacturing process.
  • the air suction device 280 includes an air inlet, the air inlet is located at the junction of the air inlet channel 220 and the return air channel 230, and the air inlet channel 220 includes a heating device 222 and an air supply device 223 in sequence along the gas flow direction With the second filter device 221, the heating device 222 is adjacent to the air inlet, the air supply device 223 is adjacent to the heating device 222, and the second filter device 221 is disposed at the air intake position of the accommodating device 210.
  • the air suction device 280 sends the gas from the air inlet into the air inlet channel 220, the heating device 222 heats the gas, and the air supply device 223 powers the heated gas to send the heated gas to the second filter device 221.
  • the gas entering from the air inlet is air, so it contains some impurities.
  • the second filtering device 221 can filter the impurities entering the gas from the air inlet, so that the impurities will not affect the color filter substrate in the containing device 210 .
  • the accommodating device 210 includes a first support frame 212 and a partition plate 211, the first support frames 212 are stacked, and an accommodating space for placing color filter substrates is formed between two adjacent first support frames 212;
  • the board 211 is provided on the first support frame 212.
  • the containing device 210 is tall, and the circulating gas does not pass horizontally when passing through the containing device 210, but has a certain angle, so that The circulating air flow is unstable, so that the generated sublimation remains in the containing device 210 and cannot be filtered out.
  • the partition 211 is provided on the first support frame 212, which indirectly reduces the height of each layer of the containing device 210, and does not affect storage.
  • the number of color filter substrates makes the circulating gas pass relatively parallel, so that the flow of the circulating gas is more stable, which is convenient for removing sublimates.
  • the partition 211 can also prevent the debris from falling, protecting the lower part of the partition 211 Color film substrate to reduce the impact of fragmentation.
  • the material of the partition 211 is metal.
  • the metal has good thermal conductivity, and maintains a temperature equivalent to the ambient temperature, which can make the temperature of the containing device 210 more uniform, make the color film substrate fully baked, and the strength and thermal stability of the metal are better.
  • the color filter substrate is broken, the strength of the separator 211 is ensured, and the separator 211 can also maintain good stability at a temperature of 100°C.
  • the number of partitions 211 is greater than one.
  • the containment device 210 can be divided into more areas, and the height of each area will be lower than before, so that the circulating gas passes through the containment device 210 as horizontally as possible, so that the flow of the circulating gas is more stable , To facilitate the discharge of sublimates, when the color film substrate is broken, protect more color film substrates, and reduce the impact of fragmentation.
  • the baking box 200 includes a door panel 250, an exhaust channel 260, and an exhaust hole 270.
  • the exhaust channel 260 is located outside the return air channel 230
  • the door panel 250 is located outside the inner exhaust channel
  • the exhaust hole 270 is provided in the exhaust
  • the side wall 261 of the channel is arranged to discharge the gas of the return air channel 230 out of the baking box 200.
  • the door panel 250 is set to seal the baking box 200 after picking up and placing the color filter substrate, and a vent hole 270 is provided on the side wall of the exhaust channel 260, and when the door panel 250 is closed, part of the sublimation is taken away by negative pressure. Reducing the content of residual sublimate in the baking box 200 and reducing the burden on the filtering device.
  • the shape of the vent hole 270 is circular.
  • the first filter device 240 includes a filter element 241 and a second support frame 242, the number of the second support frame 242 is two, the second support frame 242 is arranged in parallel, and the filter element 241 is arranged on the two second support frames Between 242, the filter element 241 is made of polypropylene material.
  • two second support frames 242 fix the filter element 241 in the return air channel 230 to prevent the filter element 241 from shaking.
  • the filter element 241 is made of polypropylene material, and the sublimation substance generated after baking is organic, and the polypropylene is easy to absorb
  • polypropylene has good corrosion resistance and heat resistance, the melting point is as high as 167 °C, and the internal temperature of the baking box 200 is below 100 °C, so the polypropylene itself maintains good physical properties during the baking process and will not affect its Filter effect.
  • the filter element 241 includes at least two layers of filter screens 243, and the filter screens 243 are stacked.
  • the filter element 241 is composed of a filter screen 243.
  • the filter screen 243 is provided in multiple layers, which increases the distance of the sublimate through the filter screen 243 and improves the filter effect of the filter element 241.
  • the first filter device 240 includes a filter element 241 and a second support frame 242, the number of the second support frame 242 is two, the second support frame 242 is arranged in parallel, and the filter element 241 is arranged on the two second support frames Between 242, the filter element 241 is made of polysulfone ultrafiltration membrane material.
  • the filter element 241 is made of polysulfone ultrafiltration membrane material, which is formed by condensation of organic substances Engineering plastic film, which can separate particles, fly ash and aerosol in the liquid phase or gas phase. Since the photoresist itself contains a solvent, the solvent will sublime to form organic impurities after the color film substrate is baked, and the organic matter is easy to adsorb organic matter The adsorption effect of the polysulfone ultrafiltration membrane will be greatly improved.
  • the polysulfone ultrafiltration membrane has a relatively high glass transition temperature (Tg) of 190°C. It maintains good physical properties during baking and does not affect its filtration effect.
  • a baking box 200 is disclosed.
  • the baking box 200 includes: an accommodating device 210 inside the baking box 200, which is arranged to place the color filter substrate; an air suction device 280 which is arranged to send gas into the baking box 200; The air inlet channel 220; the return air channel 230 configured to send the hot air sent from the containing device 210 back to the air inlet channel 220; the first filter device 240 located in the air return channel 230;
  • the accommodating device 210 includes a first support frame 212 and a partition plate 211, the first support frames 212 are stacked, and a storage space for placing color filter substrates is formed between the two adjacent first support frames 212; the partition plate 211 is provided at the first The supporting frame 212; the material of the partition 211 is metal; the baking box 200 includes a door panel 250, an exhaust channel 260 and an exhaust hole 270, the exhaust channel 260 is located outside the return air channel 230, and the door panel 250 is located outside the inner exhaust channel
  • the exhaust hole 270 is provided on the side wall 261 of the exhaust channel, and is arranged to discharge the gas of the return air channel 230 out of the baking oven 200; the shape of the exhaust hole 270 is circular;
  • the first filtering device 240 includes a filter element 241 and a second Two support frames 242, the number of the second support frames 242 is two, the second support frames 242 are arranged in parallel, the filter element 241 is arranged between the two second support frames 242, the filter element 241 is
  • the photoresist on the color filter substrate will generate and accumulate sublimates after baking under high temperature gas.
  • the sublimates follow the circulating gas to the return air channel 230.
  • the filter device in the return air channel 230 absorbs the sublimate and prevents the sublimate
  • the circulating gas enters the air inlet channel 220 again to avoid the circulation of sublimates and protect the color filter substrate. Since the color filter substrates are stacked on the first support frame 212, the containing device 210 is tall, and the circulating gas does not pass horizontally when passing through the containing device 210, but has a certain angle, so that the circulating air flow does not Stable, so that the generated sublimation remains in the holding device 210 and cannot be filtered out.
  • the partition 211 is provided on the first support frame 212, which indirectly reduces the height of each layer of the holding device 210, and does not affect the storage of the color filter substrate.
  • the quantity makes the circulating gas pass relatively parallel, so that the flow of the circulating gas is more stable, which is convenient for removing sublimates.
  • the partition 211 can also prevent the debris from falling, protecting the color filter substrate under the partition 211. Reduce the impact of fragmentation.
  • the metal has good thermal conductivity, and maintains a temperature equivalent to the ambient temperature, which can make the temperature of the containing device 210 more uniform, make the color film substrate fully baked, and the metal strength and thermal stability are also better. To ensure the strength of the separator 211, the separator 211 can also maintain good stability at a temperature of 100°C.
  • the door panel 250 is set to take the color filter substrate and seal the baking box 200, and a vent hole 270 is provided on the side wall of the exhaust channel 260.
  • a vent hole 270 is provided on the side wall of the exhaust channel 260.
  • the content of residual sublimate in 200 reduces the burden on the filtering device.
  • Sublimation may remain in the exhaust hole 270 for a long time. If it is not cleaned, it will affect the filtration efficiency. Therefore, it should be cleaned regularly. Just use a clean cloth and alcohol to clean it. It is convenient and simple.
  • the air hole 270 has no edges and corners, which is convenient for wiping with a dust-free cloth.
  • the filter element 241 is made of polypropylene material.
  • the sublimation substance produced after baking is organic, and polypropylene is easy to absorb, and polypropylene Has good corrosion resistance and heat resistance, the melting point is as high as 167 °C, and the internal temperature of the baking oven 200 is below 100 °C, so the polypropylene maintains good physical properties during the baking process and will not affect its filtration effect.
  • the filter element 241 is composed of a filter mesh 243. In order to enhance the filtering effect of the filter element 241, the filter mesh 243 is arranged in multiple layers, which increases the distance of the sublimate through the filter mesh 243 and improves the filtering effect of the filter element 241.
  • a display panel manufacturing apparatus 100 including the baking box 200 of the above embodiment.
  • TFT-LCD Thin Film Transistor-Liquid Crystal
  • OLED Organic Light-Emitting Diode

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  • General Engineering & Computer Science (AREA)
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Abstract

一种烘烤箱和显示面板的制造设备。烘烤箱（200）包括：容纳装置（210）；设置为输送气体到烘烤箱内的吸风装置（280）；设置为将热风送入容纳装置的进风通道（220）；设置为将容纳装置内送出的热风送回进风通道的回风通道（230）；位于回风通道内的第一过滤装置（240）。显示面板的制造设备，包括上述的烘烤箱。本烘烤箱和显示面板的制造设备可以减少积累升华物。

Description

一种烘烤箱和显示面板的制造设备
本申请要求于2018年11月26日提交中国专利局，申请号为CN201821960016.7，发明名称为“一种烘烤箱和显示面板的制造设备”的中国专利申请的优先权，其全部内容通过引用结合在本申请中。
技术领域
本申请涉及显示技术领域，尤其涉及一种烘烤箱和显示面板的制造设备。
背景技术
这里的陈述仅提供与本申请有关的背景信息，而不必然地构成现有技术。
随着科技的发展和进步，平板显示器由于具备机身薄、省电和辐射低等热点而成为显示器的主流产品，得到了广泛应用。平板显示器包括薄膜晶体管液晶显示器(Thin Film Transistor-Liquid Crystal Display，TFT-LCD)和有机发光二极管(Organic Light-Emitting Diode，OLED)显示器等。其中，薄膜晶体管液晶显示器通过控制液晶分子的旋转方向，以将背光模组的光线折射出来产生画面，具有机身薄、省电、无辐射等众多优点。有机发光二极管显示器是利用有机电致发光二极管制成，具有自发光、响应时间短、清晰度与对比度高、可实现柔性显示与大面积全色显示等诸多优点。
在平板显示器的各基板制程中，一般在显影后均需进行烘烤箱(OVEN)加热，烘烤箱内会积累有机升华物，升华物会掉到基板上带来损坏(defect)，而且大多数面积较大，无法修补。
申请内容
本申请的目的在于提供一种烘烤箱和显示面板的制造设备，以解决减少积累升华物。
为实现上述目的，本申请提供了一种烘烤箱。所述烘烤箱包括：位于烘烤箱内部的容纳装置，设置为放置彩膜基板；设置为输送气体到所述烘烤箱内的吸风装置；设置为将热风送入所述容纳装置的进风通道；设置为将所述容纳装置内送出的热风送回所述进风通道的回风通道；位于所述回风通道内的第一过滤装置；
可选的，所述吸风装置包括进气口，所述进气口位于所述进风通道和所述回风通道 的交界处，所述进风通道沿气体流动方向依次包括加热装置、送风装置和第二过滤装置，所述加热装置与所述进气口相邻，所述送风装置与所述加热装置相邻，所述第二过滤装置设置在所述容纳装置的进风位置。
可选的，所述容纳装置包括第一支撑架和隔板，所述第一支撑架层叠设置，相邻两层的所述第一支撑架之间形成放置所述彩膜基板的容纳空间；所述隔板设置在所述第一支撑架上。
可选的，所述隔板的材料为金属。
可选的，所述烘烤箱包括门板、抽风通道和排气孔，所述抽风通道位于所述回风通道的外侧，所述门板位于所述内抽风道的外侧，所述排气孔设置在所述抽风通道的侧壁上，设置为将回风通道的气体排出烘烤箱外。
可选的，所述排气孔的形状为圆形。
可选的，所述第一过滤装置包括滤芯和第二支撑架，所述第二支撑架的数量为两个，所述第二支撑架平行设置，所述滤芯设置在两个所述第二支撑架之间，所述滤芯采用聚丙烯材料制成。
可选的，所述滤芯包括至少两层滤网，所述滤网层叠设置。
本申请还公开了一种烘烤箱。所述烘烤箱包括：所述烘烤箱包括：位于烘烤箱内部的容纳装置，设置为放置彩膜基板；设置为输送气体到所述烘烤箱内的吸风装置；设置为将热风送入所述容纳装置的进风通道；设置为将所述容纳装置内送出的热风送回所述进风通道的回风通道；位于所述回风通道内的第一过滤装置；位于所述回风通道外侧的门板；设置在所述抽风通道侧壁上的排气孔，设置为将回风通道的气体排出烘烤箱外；
所述容纳装置包括第一支撑架和隔板，所述第一支撑架层叠设置，相邻两层的所述第一支撑架之间形成放置所述彩膜基板的容纳空间；所述隔板设置在所述第一支撑架上； 所述第一过滤装置包括滤芯和第二支撑架，所述第二支撑架的数量为两个，所述第二支撑架平行设置，所述滤芯设置在两个所述第二支撑架之间，所述滤芯采用聚丙烯材料制成；所述滤芯包括至少两层滤网，所述滤网层叠设置。
本申请还公开了一种显示面板的制造设备，包括烘烤箱，所述烘烤箱包括：位于烘烤箱内部的容纳装置，设置为放置彩膜基板；设置为输送气体到所述烘烤箱内的吸风装置；设置为将热风送入所述容纳装置的进风通道；设置为将所述容纳装置内送出的热风送回所述进风通道的回风通道；以及位于所述回风通道内的第一过滤装置。
可选的，所述吸风装置包括进气口，所述进气口位于所述进风通道和所述回风通道的交界处，所述进风通道沿气体流动方向依次包括加热装置、送风装置和第二过滤装置，所述加热装置与所述进气口相邻，所述送风装置与所述加热装置相邻，所述第二过滤装置设置在所述容纳装置的进风位置。
可选的，所述容纳装置包括第一支撑架和隔板，所述第一支撑架层叠设置，相邻两层的所述第一支撑架之间形成放置所述彩膜基板的容纳空间；所述隔板设置在所述第一支撑架上。
可选的，所述隔板的材料为金属。
可选的，所述烘烤箱包括门板、抽风通道和排气孔，所述抽风通道位于所述回风通道的外侧，所述门板位于所述内抽风道的外侧，所述排气孔设置在所述抽风通道的侧壁上，设置为将回风通道的气体排出烘烤箱外。
可选的，所述排气孔的形状为圆形。
可选的，所述第一过滤装置包括滤芯和第二支撑架，所述第二支撑架的数量为两个，所述第二支撑架平行设置，所述滤芯设置在两个所述第二支撑架之间，所述滤芯采用聚丙烯材料制成。
可选的，所述滤芯包括至少两层滤网，所述滤网层叠设置。
可选的，所述第一过滤装置包括滤芯和第二支撑架，所述第二支撑架的数量为两个，所述第二支撑架平行设置，所述滤芯设置在两个所述第二支撑架之间，所述滤芯采用聚砜超滤膜材料制成。
相对于在回风通道内没有过滤装置的方案来说，本申请基板在经过高温气体烘烤后会产生并积累升华物，升华物顺着循环的气体来到回风通道，回风通道里的第一过滤装置吸收升华物，阻止升华物顺着循环的气体再次进入进风通道，避免升华物循环，保护基板。由于彩膜基板上有色阻，在烘烤过程中会产生更多的升华物，彩膜基板。
附图说明
所包括的附图用来提供对本申请实施例的进一步的理解，其构成了说明书的一部分，例示本申请的实施方式，并与文字描述一起来阐释本申请的原理。显而易见地，下面描述中的附图仅仅是本申请的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动性的前提下，还可以根据这些附图获得其他的附图。在附图中：
图1是一种彩膜基板黄光制程的示意图；
图2是本申请的其中一个实施例的一种烘烤箱的示意图；
图3是本申请的其中一个实施例的一种加有排气孔、隔板和过滤装置的烘烤箱示意图；
图4是本申请的其中一个实施例的一种排气孔的示意图；
图5是本申请的其中一个实施例的一种抽风通道侧壁的内外部示意图；
图6是本申请的其中一个实施例的一种门板开启的示意图；
图7是本申请的其中一个实施例的一种门板关闭的示意图；
图8是本申请的其中一个实施例的一种过滤装置的示意图；
图9是本申请的其中一个实施例的一种显示面板的制造设备的示意图。
具体实施方式
这里所公开的具体结构和功能细节仅仅是代表性的，并且是描述本申请的示例性实施例的目的。但是本申请可以通过许多替换形式来具体实现，并且不应当被解释成仅仅受限于这里所阐述的实施例。
在本申请的描述中，需要理解的是，术语“中心”、“横向”、“上”、“下”、“左”、“右”、“竖直”、“水平”、“顶”、“底”、“内”、“外”等指示的方位或位置关系为基于附图所示的方位或位置关系，仅是为了便于描述本申请和简化描述，而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作，因此不能理解为对本申请的限制。此外，术语“第一”、“第二”仅描述目的，而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量。由此，限定有“第一”、“第二”的特征可以明示或者隐含地包括一个或者更多个该特征。在本申请的描述中，除非另有说明，“多个”的含义是两个或两个以上。另外，术语“包括”及其任何变形，意图在于覆盖不排他的包含。
在本申请的描述中，需要说明的是，除非另有明确的规定和限定，术语“安装”、“相连”、“连接”应做广义理解，例如，可以是固定连接，也可以是可拆卸连接，或一体地连接；可以是机械连接，也可以是电连接；可以是直接相连，也可以通过中间媒介间接相连，可以是两个元件内部的连通。对于本领域的普通技术人员而言，可以具体情况理解上述术语在本申请中的具体含义。
这里所使用的术语仅仅是为了描述具体实施例而不意图限制示例性实施例。除非上下文明确地另有所指，否则这里所使用的单数形式“一个”、“一项”还意图包括复数。还应当理解的是，这里所使用的术语“包括”和/或“包含”规定所陈述的特征、整数、步骤、操作、单元和/或组件的存在，而不排除存在或添加一个或更多其他特征、整数、步骤、操作、单元、组件和/或其组合。
以彩膜基板黄光制程为例，其包括八个步骤，分别为玻璃基板清洗、光阻涂布、彩膜预烤、曝光、显影、红外线烘烤、自动光学检测和彩膜烘烤，参考图1的最后一步骤，每个彩膜基板均需进行烘烤箱200加热，以达到对彩膜基板上的光阻进行烘干、固化作用，但是因为光阻本身含有溶剂等，在经过烘烤时，长时间烘烤箱200内会积累有机升华物，当升华物凝结到一定程度时，升华物会掉到彩膜基板上带来损坏(defect)，而且大多数面积较大，无法修补。
下面参考附图和可选的实施例对本申请作可选的说明。
如图2至图8所示，本申请实施例公布了一种烘烤箱200。烘烤箱200包括：位于烘烤箱200内部的容纳装置210，设置为放置彩膜基板；设置为输送气体到烘烤箱200内的吸风装置280；设置为将热风送入容纳装置210的进风通道220；设置为将容纳装置210内送出的热风送回进风通道220的回风通道230；位于回风通道230内的第一过滤装置240；
本方案中，相对于在回风通道内没有过滤装置的方案来说，本申请基板在经过高温气体烘烤后会产生并积累升华物，升华物顺着循环的气体来到回风通道，回风通道里的第一过滤装置吸收升华物，阻止升华物顺着循环的气体再次进入进风通道，避免升华物循环，保护基板。由于彩膜基板上有色阻，在烘烤过程中会产生更多的升华物，因此尤其适用于彩膜基板制程。
在一实施例中，吸风装置280包括进气口，进气口位于进风通道220和回风通道230的交界处，进风通道220沿气体流动方向依次包括加热装置222、送风装置223和第二过滤装置221，加热装置222与进气口相邻，送风装置223与加热装置222相邻，第二过滤装置221设置在容纳装置210的进风位置。
本方案中，吸风装置280将气体从进风口送入进风通道220内，加热装置222将气体加热，送风装置223给予被加热气体动力，将被加热的气体送入到第二过滤装置221，一般情况下从进气口进入的气体为空气，所以含有一些杂质，第二过滤装置221可以过滤从进气口进入气体的杂质，使杂质不会影响到容纳装置210里的彩膜基板。
在一实施例中，容纳装置210包括第一支撑架212和隔板211，第一支撑架212层叠设置，相邻两层的第一支撑架212之间形成放置彩膜基板的容纳空间；隔板211设置在第一支撑架212上。
本方案中，由于彩膜基板是层叠放置在第一支撑架212上的，容纳装置210较高，循环的气体在通过容纳装置210时不会水平的通过，而是有一定的角度，从而使循环的气流不稳定，使产生的升华物一直残留在容纳装置210而无法过滤出去，隔板211设置在第一支撑架212上，间接的降低了每层容纳装置210的高度，还不影响存放彩膜基板的数量，使循环气体相对平行的通过，从而使循环气体的气流更稳定，便于排除升华物，在彩膜基板破片时，隔板211还能阻挡碎片下落，保护隔板211下部的彩膜基板，减少破片带来的影响。
在一实施例中，隔板211的材料为金属。
本方案中，金属的导热性质好，保持与所处环境温度相当的温度，能使容纳装置210的温度更加均匀，使彩膜基板充分烘烤，金属的强度和热稳定性也比较好，在彩膜基板破片时保证隔板211的强度，在100℃的温度下隔板211也能保持良好的稳定性。
在一实施例中，隔板211的数量大于一。
本方案中，容纳装置210可以被分成更多的区域，每个区域的高度相比之前都会降低一些，使循环的气体在通过容纳装置210时尽可能的水平通过，使循环气体的气流更加稳定，便于排出升华物，在彩膜基板破片时，保护更多的彩膜基板，降低破片的影响。
在一实施例中，烘烤箱200包括门板250、抽风通道260和排气孔270，抽风通道260位于回风通道230的外侧，门板250位于内抽风道的外侧，排气孔270设置在抽风通道的侧壁261上，设置为将回风通道230的气体排出烘烤箱200外。
本方案中，门板250设置为取放彩膜基板后将烘烤箱200密封，在抽风通道260的侧壁上设置排气孔270，在门板250关闭时利用负压将部分升华物带走，减少烘烤箱200内残留升华物的含量，减轻过滤装置的负担。
在一实施例中，排气孔270的形状为圆形。
本方案中，由于长期的使用排气孔270内可能会残留升华物，不清理的话会影响过滤效率，所以要定期清理，在清理时只需要用无尘布加酒精即可，方便简单，而圆形的排气孔270无棱角便于无尘布的擦拭。
在一实施例中，第一过滤装置240包括滤芯241和第二支撑架242，第二支撑架242的数量为两个，第二支撑架242平行设置，滤芯241设置在两个第二支撑架242之间，滤芯241采用聚丙烯材料制成。
本方案中，两个第二支撑架242将滤芯241固定在回风通道230内，防止滤芯241晃动，滤芯241采用聚丙烯材料制成，烘烤后产生的升华物为有机物，聚丙烯易吸收，而且聚丙烯的耐腐蚀和耐热性较好，熔点高达167℃，而烘烤箱200内部温度在100℃以下，所以在烘烤过程中聚丙烯自身保持良好的物理性质，不会影响其过滤效果。
在一实施例中，滤芯241包括至少两层滤网243，滤网243层叠设置。
本方案中，滤芯241是由滤网243组成的，为了加强滤芯241的过滤效果，滤网243为多层层叠设置，增加了升华物经过滤网243的距离，提高了滤芯241的过滤效果。
在一实施例中，第一过滤装置240包括滤芯241和第二支撑架242，第二支撑架242的数量为两个，第二支撑架242平行设置，滤芯241设置在两个第二支撑架242之间，滤芯241采用聚砜超滤膜材料制成。
本方案中，两个第二支撑架242将滤芯241固定在回风通道230内，防止滤芯241晃动，滤芯241采用聚砜超滤膜材料制成，聚砜超滤膜是由有机物缩合而成的工程塑料膜，它可以在液相或气相中分离微粒、飘尘、气溶胶，由于光阻本身含有溶剂，在彩膜基板经过烘烤后溶剂会升华形成有机物杂质，而有机物易吸附有机物，所以聚砜超滤膜的吸附效果会大大提高，由于烘烤的温度是100℃，烘烤后溶剂升华形成有机物杂质的温度也接近100℃，所以过滤装置240的化学稳定性和耐热稳定性都得良好，而聚砜超滤膜的玻璃化温度(Tg)比较高为190℃，在烘烤的过程中保持良好的物理性质，不会影响其过滤效果。
作为本申请的另一实施例，参考图3至图8所示，公开了一种烘烤箱200。烘烤箱200包括：位于烘烤箱200内部的容纳装置210，设置为放置彩膜基板；设置为输送气体到烘烤箱200内的吸风装置280；设置为将热风送入容纳装置210的进风通道220；设置为将容纳装置210内送出的热风送回进风通道220的回风通道230；位于回风通道230内的第一过滤装置240；
容纳装置210包括第一支撑架212和隔板211，第一支撑架212层叠设置，相邻两层的第一支撑架212之间形成放置彩膜基板的容纳空间；隔板211设置在第一支撑架212上；隔板211的材料为金属；烘烤箱200包括门板250、抽风通道260和排气孔270， 抽风通道260位于回风通道230的外侧，门板250位于内抽风道的外侧，排气孔270设置在抽风通道的侧壁261上，设置为将回风通道230的气体排出烘烤箱200外；排气孔270的形状为圆形；第一过滤装置240包括滤芯241和第二支撑架242，第二支撑架242的数量为两个，第二支撑架242平行设置，滤芯241设置在两个第二支撑架242之间，滤芯241采用聚丙烯材料制成；滤芯241包括至少两层滤网243，滤网243层叠设置。
彩膜基板上的光阻在经过高温气体烘烤后会产生并积累升华物，升华物顺着循环的气体来到回风通道230，回风通道230里的过滤装置吸收升华物，阻止升华物顺着循环的气体再次进入进风通道220，避免升华物循环，保护彩膜基板。由于彩膜基板是层叠放置在第一支撑架212上的，容纳装置210较高，循环的气体在通过容纳装置210时不会水平的通过，而是有一定的角度，从而使循环的气流不稳定，使产生的升华物一直残留在容纳装置210而无法过滤出去，隔板211设置在第一支撑架212上，间接的降低了每层容纳装置210的高度，还不影响存放彩膜基板的数量，使循环气体相对平行的通过，从而使循环气体的气流更稳定，便于排除升华物，在彩膜基板破片时，隔板211还能阻挡碎片下落，保护隔板211下部的彩膜基板，减少破片带来的影响。金属的导热性质好，保持与所处环境温度相当的温度，能使容纳装置210的温度更加均匀，使彩膜基板充分烘烤，金属的强度和热稳定性也比较好，在彩膜基板破片时保证隔板211的强度，在100℃的温度下隔板211也能保持良好的稳定性。
门板250设置为取放彩膜基板后将烘烤箱200密封，在抽风通道260的侧壁上设置排气孔270，在门板250关闭时利用负压将部分升华物带走，减少烘烤箱200内残留升华物的含量，减轻过滤装置的负担。由于长期的使用排气孔270内可能会残留升华物，不清理的话会影响过滤效率，所以要定期清理，在清理时只需要用无尘布加酒精即可，方便简单，而圆形的排气孔270无棱角便于无尘布的擦拭。
两个第二支撑架242将滤芯241固定在回风通道230内，防止滤芯241晃动，滤芯 241采用聚丙烯材料制成，烘烤后产生的升华物为有机物，聚丙烯易吸收，而且聚丙烯的耐腐蚀和耐热性较好，熔点高达167℃，而烘烤箱200内部温度在100℃以下，所以在烘烤过程中聚丙烯保持良好的物理性质，不会影响其过滤效果。滤芯241是由滤网243组成的，为了加强滤芯241的过滤效果，滤网243为多层层叠设置，增加了升华物经过滤网243的距离，提高了滤芯241的过滤效果。
作为本申请的另一实施例，参考图9所示，公开了一种显示面板的制造设备100，包括上述实施例的烘烤箱200。
本申请的技术方案可以广泛应用于薄膜晶体管液晶显示器(Thin Film Transistor-Liquid Crystal Display，TFT-LCD)和有机发光二极管(Organic Light-Emitting Diode，OLED)显示器等平板显示器。
以上内容是结合具体的可选实施方式对本申请所作的可选的详细说明，不能认定本申请的具体实施只局限于这些说明。对于本申请所属技术领域的普通技术人员来说，在不脱离本申请构思的前提下，还可以做出若干简单推演或替换，都应当视为属于本申请的保护范围。

Claims (18)

  1. 一种烘烤箱，包括：
    容纳装置，位于烘烤箱的内部，设置为放置彩膜基板；
    吸风装置，设置为输送气体到所述烘烤箱内；
    进风通道，设置为将热风送入所述容纳装置；
    回风通道，设置为将所述容纳装置内送出的热风送回所述进风通道；以及
    第一过滤装置，位于所述回风通道内。
  2. 如权利要求1所述的一种烘烤箱，其中，所述吸风装置包括进气口，所述进气口位于所述进风通道和所述回风通道的交界处，所述进风通道沿气体流动方向依次包括加热装置、送风装置和第二过滤装置，所述加热装置与所述进气口相邻，所述送风装置与所述加热装置相邻，所述第二过滤装置设置在所述容纳装置的进风位置。
  3. 如权利要求1所述的一种烘烤箱，其中，所述容纳装置包括第一支撑架和隔板，所述第一支撑架层叠设置，相邻两层的所述第一支撑架之间形成放置所述彩膜基板的容纳空间；所述隔板设置在所述第一支撑架上。
  4. 如权利要求3所述的一种烘烤箱，其中，所述隔板的材料为金属。
  5. 如权利要求1所述的一种烘烤箱，其中，所述烘烤箱包括门板、抽风通道和排气孔，所述抽风通道位于所述回风通道的外侧，所述门板位于所述内抽风道的外侧，所述排气孔设置在所述抽风通道的侧壁上，设置为将回风通道的气体排出烘烤箱外。
  6. 如权利要求5所述的一种烘烤箱，其中，所述排气孔的形状为圆形。
  7. 如权利要求1所述的一种烘烤箱，其中，所述第一过滤装置包括滤芯和第二支撑架，所述第二支撑架的数量为两个，所述第二支撑架平行设置，所述滤芯设置在两个所述第二支撑架之间，所述滤芯采用聚丙烯材料制成。
  8. 如权利要求7所述的一种烘烤箱，其中，所述滤芯包括至少两层滤网，所述滤网层叠设置。
  9. 一种烘烤箱，包括：
    容纳装置，位于烘烤箱的内部，设置为放置彩膜基板；
    吸风装置，设置为输送气体到所述烘烤箱内；
    进风通道，设置为将热风送入所述容纳装置；
    回风通道，设置为将所述容纳装置内送出的热风送回所述进风通道；
    第一过滤装置，位于所述回风通道内；
    抽风通道，位于所述回风通道的外侧；
    门板，位于所述抽风通道的外侧；以及
    排气孔，设置在所述抽风通道的侧壁上，设置为将回风通道的气体排出烘烤箱外；
    所述容纳装置包括第一支撑架和隔板，所述第一支撑架层叠设置，相邻两层的所述第一支撑架之间形成放置所述彩膜基板的容纳空间；所述隔板设置在所述第一支撑架上；所述过滤装置包括滤芯和第二支撑架，所述第二支撑架的数量为两个，所述第二支撑架平行设置，所述滤芯设置在两个所述第二支撑架之间，所述滤芯采用聚丙烯材料制成；所述滤芯包括至少两层滤网，所述滤网层叠设置。
  10. 一种显示面板的制造设备，包括烘烤箱，所述烘烤箱包括：
    容纳装置，位于烘烤箱的内部，设置为放置彩膜基板；
    吸风装置，设置为输送气体到所述烘烤箱内；
    进风通道，设置为将热风送入所述容纳装置；
    回风通道，设置为将所述容纳装置内送出的热风送回所述进风通道；以及
    第一过滤装置，位于所述回风通道内。
  11. 如权利要求10所述的一种显示面板的制造设备，其中，所述吸风装置包括进气口，所述进气口位于所述进风通道和所述回风通道的交界处，所述进风通道沿气体流动方向依次包括加热装置、送风装置和第二过滤装置，所述加热装置与所述进气口相邻，所述送风装置与所述加热装置相邻，所述第二过滤装置设置在所述容纳装置的进风位置。
  12. 如权利要求10所述的一种显示面板的制造设备，其中，所述容纳装置包括第一支撑架和隔板，所述第一支撑架层叠设置，相邻两层的所述第一支撑架之间形成放置所述彩膜基板的容纳空间；所述隔板设置在所述第一支撑架上。
  13. 如权利要求12所述的一种显示面板的制造设备，其中，所述隔板的材料为金属。
  14. 如权利要求10所述的一种显示面板的制造设备，其中，所述烘烤箱包括门板、抽风通道和排气孔，所述抽风通道位于所述回风通道的外侧，所述门板位于所述内抽风道的外侧，所述排气孔设置在所述抽风通道的侧壁上，设置为将回风通道的气体排出烘烤箱外。
  15. 如权利要求14所述的一种显示面板的制造设备，其中，所述排气孔的形状为圆形。
  16. 如权利要求10所述的一种显示面板的制造设备，其中，所述第一过滤装置包括滤芯和第二支撑架，所述第二支撑架的数量为两个，所述第二支撑架平行设置，所述滤芯设置 在两个所述第二支撑架之间，所述滤芯采用聚丙烯材料制成。
  17. 如权利要求16所述的一种显示面板的制造设备，其中，所述滤芯包括至少两层滤网，所述滤网层叠设置。
  18. 如权利要求10所述的一种显示面板的制造设备，其中，所述第一过滤装置包括滤芯和第二支撑架，所述第二支撑架的数量为两个，所述第二支撑架平行设置，所述滤芯设置在两个所述第二支撑架之间，所述滤芯采用聚砜超滤膜材料制成。
PCT/CN2018/119552 2018-11-26 2018-12-06 一种烘烤箱和显示面板的制造设备 Ceased WO2020107512A1 (zh)

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