WO2020103221A1 - 基于波前技术的非球面透镜偏心检测装置及其检测方法 - Google Patents

基于波前技术的非球面透镜偏心检测装置及其检测方法

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Publication number
WO2020103221A1
WO2020103221A1 PCT/CN2018/120449 CN2018120449W WO2020103221A1 WO 2020103221 A1 WO2020103221 A1 WO 2020103221A1 CN 2018120449 W CN2018120449 W CN 2018120449W WO 2020103221 A1 WO2020103221 A1 WO 2020103221A1
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WIPO (PCT)
Prior art keywords
lens
image
beam splitter
tested
imaging
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PCT/CN2018/120449
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English (en)
French (fr)
Inventor
史国华
何益
高峰
邢利娜
张欣
孔文
Original Assignee
中国科学院苏州生物医学工程技术研究所
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Application filed by 中国科学院苏州生物医学工程技术研究所 filed Critical 中国科学院苏州生物医学工程技术研究所
Priority to EP18919386.5A priority Critical patent/EP3677893B1/en
Priority to US16/616,158 priority patent/US11506567B2/en
Priority to KR1020197034821A priority patent/KR102292329B1/ko
Priority to JP2019565415A priority patent/JP7105254B2/ja
Publication of WO2020103221A1 publication Critical patent/WO2020103221A1/zh

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0221—Testing optical properties by determining the optical axis or position of lenses
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
    • G01M11/0257—Testing optical properties by measuring geometrical properties or aberrations by analyzing the image formed by the object to be tested
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N2021/1765—Method using an image detector and processing of image signal

Definitions

  • the invention relates to the technical field of optical detection, in particular to an aspheric lens decenter detection device and a detection method based on wavefront technology.
  • aspheric lenses can alleviate the difficulties of optical system design, simplify structure, expand field of view, and increase numerical aperture. They have been widely used in space remote sensing optical lenses, lithographic lenses, optical testing instruments, and imaging optical systems. in.
  • Inevitable errors such as alignment errors or uneven shrinkage of material cooling during the manufacturing process of aspheric lenses will cause tilt and eccentricity errors of the two curved optical axes of the lens.
  • the tilt errors will cause the lens to introduce distortion and Coma and eccentricity errors will introduce additional spherical aberration. Both of these errors will reduce the optical quality of the aspheric lens and will also reduce the mechanical properties of the lens.
  • the optical imaging method mainly uses a focusing telescope structure to generate a spherical wave matching the lens surface, and the point reflected from the lens surface or the crosshair image with the rotation of the rotation axis draws a circle on the imaging camera to determine the lens surface optical axis and
  • the deviation of the rotation axis, the measurement accuracy of this method strictly depends on the accuracy of the rotation axis, and also depends on the dimensional accuracy of the point light source or the crosshairs.
  • the measurement accuracy is not high, usually in a few arc seconds.
  • the technical problem to be solved by the present invention is to provide an aspheric lens eccentricity detection device and a detection method based on the wavefront technology in view of the above-mentioned shortcomings in the prior art.
  • the accuracy of eccentricity measurement does not depend on any other moving and rotating mechanism.
  • the method of wavefront measurement and pupil imaging can realize fast and accurate eccentricity detection of aspheric lens in a non-contact manner.
  • an aspheric lens eccentricity detection device based on wavefront technology, including an upper fiber light source, an upper collimating objective lens, an upper light source beam splitter, an upper beam-reduced front lens, an upper part Rear beam reduction lens, upper imaging detector, upper imaging beam splitter, upper wavefront sensor, measured lens clamping mechanism, lower light source beam splitter, lower beam reduction front lens, lower beam reduction rear lens, lower imaging beam splitter, lower part Wavefront sensor, lower imaging detector, lower collimating objective, and lower fiber optic light source;
  • the light emitted by the upper optical fiber light source is collimated by the upper collimating objective lens, and then transmitted through the upper light source beam splitter to illuminate the upper surface of the tested lens on the tested lens clamping mechanism;
  • the reflected light on the upper surface of the tested lens is reflected by the upper light source beam splitter, and then sequentially matched by the upper front beam reduction lens and the upper rear beam reduction lens to reach the upper imaging beam splitter, and the light passes through the upper part
  • the imaging beam splitter is divided into two parts, one part is reflected by the upper imaging beam splitter and enters the upper imaging detector, and the other part transmits the upper imaging beam splitter and enters the upper wavefront sensor; the upper imaging detection
  • the image collected by the reflected light on the upper surface of the tested lens is acquired by processing the variable curvature ring image in the image to obtain the center position of the optical axis of the upper surface of the tested lens; the upper wavefront sensor is collected on the tested lens
  • the distortion information of the reflected light on the surface can be obtained
  • the light emitted by the lower optical fiber light source is collimated by the lower collimating objective lens, and then transmitted through the lower light source beam splitter to illuminate the lower surface of the tested lens on the tested lens clamping mechanism;
  • the reflected light on the lower surface of the tested lens is reflected by the lower light source beam splitter, then passes through the lower front beam-reducing lens and the lower rear beam-reducing lens for aperture matching, and then reaches the lower imaging beam splitter.
  • the imaging beam splitter is divided into two parts, one part is reflected by the lower imaging beam splitter to enter the lower imaging detector, and the other part transmits the lower imaging beam splitter to enter the lower wavefront sensor; the lower imaging detection
  • the image collected by the reflected light of the lower surface of the tested lens is acquired by processing the variable curvature ring image in the image to obtain the center position of the optical axis of the lower surface of the tested lens; the lower wavefront sensor is collected under the tested lens
  • the distortion information of the reflected light on the surface can be obtained by processing the distortion information to obtain the tilt information of the lower surface of the tested lens.
  • the light emitted by the lower optical fiber light source is collimated by the lower collimating objective lens to form a parallel light beam, and the parallel light beam is transmitted through the lower light source beam splitter to irradiate the measured object on the measured lens clamping mechanism
  • the lens After passing through the tested lens, it is reflected by the upper light source beam splitter, and then the reflected light passes through the upper beam-reducing front lens and the upper beam-reducing rear lens in order to match the aperture before reaching the upper imaging beam splitter; Part of the light is reflected by the upper imaging beam splitter and reaches the upper imaging detector to form a transmission image of the tested lens, and the outer edge image of the tested lens in the image is processed to obtain the outer diameter center of the upper surface of the tested lens position.
  • the light emitted by the upper optical fiber light source is collimated by the upper collimating objective lens to form a parallel light beam, and the parallel light beam is transmitted through the upper light source beam splitter to irradiate the measured object on the measured lens clamping mechanism
  • the lens After passing through the tested lens, it is reflected by the lower light source beam splitter, and then the reflected light passes through the lower beam-reducing front lens and the lower beam-reducing rear lens in order to match the aperture before reaching the lower imaging beam splitter; Part of the light is reflected by the lower imaging beam splitter and reaches the lower imaging detector to form a transmission image of the tested lens, and the outer edge image of the tested lens in the image is processed to obtain the outer diameter center of the lower surface of the tested lens position.
  • the positions of the upper imaging detector and the upper wavefront sensor on the optical path are conjugated with the upper surface of the tested lens;
  • the positions of the lower imaging detector and the lower wavefront sensor on the optical path are conjugated with the lower surface of the tested lens.
  • the wavefront sensor is a Hartmann wavefront sensor or a shear interference wavefront sensor or a quadrangular pyramid wavefront sensor.
  • the obtained optical axis center position information of the upper surface of the tested lens, the tilt information of the upper surface, the outer diameter center position information of the upper surface, the optical axis center position information of the lower surface, and the outer diameter center of the lower surface are comprehensively processed, and finally the data of the translational eccentricity of the upper and lower surfaces of the tested lens, the tilted eccentricity of the upper and lower surfaces, the eccentricity of the outer diameter of the upper surface, and the eccentricity of the outer diameter of the lower surface can be obtained.
  • the measurement of the eccentricity error information of the tested lens is completed.
  • a detection method of an aspheric lens eccentricity detection device based on wavefront technology as described above includes the following steps:
  • Step S1 Turn on the upper optical fiber light source, the upper imaging detector and the upper wavefront sensor at the same time, adjust the clamping mechanism of the tested lens according to the image on the upper imaging detector, and adjust the position of the tested lens to the imaging center of the upper imaging detector region;
  • Step S2 collect the image of the upper wavefront sensor, and process the wavefront image to obtain the tilt amount of the upper surface of the tested lens (p x , p y );
  • Step S3 Acquire the pupil image J p on the upper imaging detector, and process the pupil image to obtain the optical axis center position (O x , O y ) of the upper surface of the tested lens;
  • Step S4 Turn off the upper fiber light source, turn on the lower fiber light source, collect the pupil image I p on the upper imaging detector, calculate and process the pupil image I p according to the method of step S3, and obtain the outer diameter center of the upper surface of the tested lens Position (d x , d y );
  • Step S5 Turn on the lower imaging detector and the lower wavefront sensor, collect the image of the lower wavefront sensor, calculate and process according to the method of step S2 according to the component parameters of the lower wavefront sensor, and obtain the inclination of the lower surface of the tested lens (p x ', p y ');
  • Step S6 Acquire the pupil image J p ′ on the lower imaging detector, and calculate and process the pupil image J p ′ according to the method of step S3 to obtain the optical axis center position (O x ′, O y) of the lower surface of the tested lens ');
  • Step S7 lower fiber optic source turned off, the upper open fiber light source, the pupil image is acquired on the lower portion of the imaging detector I 'p, pupil image I' p A process according to calculation processing in step S3, the outer diameter of the test lens surface Center position (d x ', d y ');
  • Step S8 Subtract the inclination amounts of the upper and lower surfaces of the tested lens obtained in steps S2 and S5 to obtain the inclination eccentricity of the upper and lower surfaces of the tested lens as
  • Step S9 According to the center position of the optical axis of the upper surface (O x , O y ) and the center position of the outer diameter of the upper surface (d x , d y ) obtained in step S3 and step S4, the outer diameter eccentricity of the upper surface of the tested lens is obtained as :
  • the parameter K is the magnification of the beam reduction and expansion optical system composed of the upper front beam reduction lens and the upper rear beam reduction lens
  • the parameter p is the pixel size of the upper imaging detector.
  • Step S10 According to the central position of the lower surface optical axis (O x ', O y ') and the central position of the lower surface outer diameter (d x ', d y ') obtained in step S6 and step S7, the The eccentricity of the outer diameter is:
  • the parameter k ' is the magnification of the beam reduction and expansion optical system composed of the lower front beam-reducing lens and the lower rear beam-reduction lens
  • the parameter p' is the pixel size of the lower imaging detector.
  • the step S2 specifically includes:
  • Step S21 Acquire the wavefront image of the upper wavefront sensor
  • Step S23 Calculate the average slope of effective sub-holes
  • Step S24 Calculate the tilt of the upper surface of the tested lens:
  • the parameter K is the magnification of the beam reduction optical system composed of the upper front beam reduction lens and the upper rear beam reduction lens
  • the parameter p is the detection camera pixel size of the upper wavefront sensor
  • the parameter q is the sub-aperture of the upper wavefront sensor size.
  • the step S3 specifically includes:
  • Step S31 Acquire the pupil image J p on the upper imaging detector
  • Step S32 binarize the pupil image J p to obtain a binarized image J p2 ; wherein, the binarized threshold is set by manually specifying a threshold or using an automatic threshold calculation method;
  • Step S33 Perform edge extraction on the binarized image J p2 to obtain the image J p3 ;
  • Step S34 Perform circular Hough transform on the image J p3 to obtain a circle, and extract the center of the circle as (O x , O y ).
  • the center of the circle is the center position of the optical axis of the upper surface of the tested lens.
  • a Sobel operator a Laplacian operator or a Canny operator is used to perform edge extraction on the binarized image J p2 .
  • the aspheric lens eccentricity detection device based on the wavefront technology of the present invention is non-contact detection, there is no risk of damaging the lens, there are no moving parts in the device, and the system reliability and stability are high;
  • the present invention can detect a variety of eccentric errors within the effective aperture of the aspheric lens at one time, avoiding errors caused by splicing detection, and also greatly reducing the detection time, which can be used for online detection on the pipeline;
  • the present invention uses wavefront measurement technology to realize the detection of the eccentricity error of the aspheric lens up and down, and the measurement accuracy can reach sub-nanometer level;
  • the aspheric lens eccentricity detection device system based on the wavefront technology of the present invention has a simple and compact structure, low complexity, convenient calculation and analysis, is convenient for multiple use occasions, and is convenient for large-scale popularization and application.
  • FIG. 1 is a schematic structural diagram of an aspheric lens eccentricity detection device based on wavefront technology of the present invention
  • FIG. 2 is an upper surface oblique wavefront image acquired by an upper wavefront sensor in an embodiment of the invention
  • 3 is an image of the tilt amount of the upper surface obtained by the processing of the upper wavefront sensor in an embodiment of the present invention
  • 6 is an upper surface transmission pupil image acquired by an upper imaging detector in an embodiment of the invention.
  • 10 is a lower surface reflection pupil image acquired by a lower wavefront sensor in an embodiment of the present invention.
  • 11 is an image of the center position of the lower surface optical axis in an embodiment of the present invention.
  • 13 is an image of the center position of the outer diameter of the lower surface in an embodiment of the present invention.
  • Upper fiber optic light source 1 upper collimating objective 2, upper light source beam splitter 3, upper beam-reduced front lens 4, upper beam-reduced rear lens 5, upper imaging detector 6, upper imaging beam splitter 7, upper wavefront sensor 8, are Measuring lens holding mechanism 9, lower light source beam splitter 10, lower beam-reduced front lens 11, lower beam-reduced rear lens 12, lower imaging beam splitter 13, lower wavefront sensor 14, lower imaging detector 15, lower collimating objective 16 , ⁇ Financial fiber light source 17.
  • an aspheric lens eccentricity detection device based on wavefront technology in this embodiment includes an upper fiber light source 1, an upper collimating objective lens 2, an upper light source beam splitter 3, an upper beam-reduced front lens 4, an upper contraction Beam rear lens 5, upper imaging detector 6, upper imaging beam splitter 7, upper wavefront sensor 8, measured lens clamping mechanism 9, lower light source beam splitter 10, lower beam reduction front lens 11, lower beam reduction rear lens 12 ,
  • the wavefront sensor is a Hartmann wavefront sensor or a shear interference wavefront sensor or a quadrangular pyramid wavefront sensor.
  • the Hartmann wavefront sensor is selected in this embodiment.
  • the light emitted by the upper fiber light source 1 is collimated by the upper collimating objective lens 2 to form a parallel beam.
  • the parallel beam passes through the upper light source beam splitter 3 and reaches the lens holding mechanism 9 under test, and the lens holding mechanism 9 under test is clamped
  • the upper surface of the lens under test reflects the incident parallel light, and the reflected light is reflected by the upper light source beam splitter 3, passes through the upper beam-reducing front lens 4 and the upper beam-reducing rear lens 5 for aperture matching, and then reaches the upper imaging beam splitter 7.
  • the light After passing through the upper imaging beam splitter 7, the light is divided into two parts, one part of which is reflected by the upper imaging beam splitter 7 and enters the upper imaging detector 6, and the other part transmits the upper imaging beam splitter 7 and enters the upper wavefront sensor 8.
  • the positions of the upper imaging detector 6 and the upper wavefront sensor 8 on the optical path are conjugated with the upper surface of the tested lens.
  • the upper imaging detector 6 collects the image formed by the reflected light on the upper surface of the tested lens, and obtains the center position of the optical axis of the upper surface of the tested lens by processing the image of the variable curvature ring in the image, and the upper wavefront sensor 8 collects The distortion information of the reflected light on the upper surface of the test lens is processed, and the tilt information of the upper surface of the test lens is obtained by processing the distortion information.
  • the light emitted by the lower fiber light source 17 is collimated by the lower collimating objective lens 16 to form a parallel beam.
  • the parallel beam passes through the lower light source beam splitter 10 and reaches the lens holding mechanism 9 under test, and passes through the lens holding mechanism 9 under test.
  • the tested lens clamped on the top is reflected by the upper light source beam splitter 3, and the reflected light is reflected by the upper light source beam splitter 3, then the aperture matching of the upper beam reducing front lens 4 and the upper beam reducing rear lens 5 reaches the upper imaging beam splitter 7 .
  • Part of the light reflected by the upper imaging beam splitter 7 is detected by the upper imaging detector 6 to form a transmission image of the tested lens, and the outer edge center position of the upper surface of the tested lens is obtained by processing the outer edge image of the tested lens in the image.
  • the light emitted by the lower fiber light source 17 is collimated by the lower collimating objective lens 16 to form a parallel beam.
  • the parallel beam passes through the lower light source beam splitter 10 and reaches the lens clamping mechanism 9 under test, and the lens clamping mechanism 9 under test is clamped
  • the lower surface of the lens under test reflects the incident parallel light.
  • the reflected light is reflected by the lower light source beam splitter 10 and then matched by the lower beam reduction front lens 11 and the lower beam reduction rear lens 12 to arrive at the lower imaging beam splitter 13.
  • the light After passing through the lower imaging beam splitter 13, the light is divided into two parts, one part is reflected by the lower imaging beam splitter 13 and enters the lower imaging detector 15, and the other part transmits the lower imaging beam splitter 13 and enters the lower wavefront sensor 14.
  • the positions of the lower imaging probe 15 and the lower wavefront sensor 14 on the optical path are conjugated with the lower surface of the tested lens.
  • the lower imaging detector 15 collects the image formed by the reflected light of the lower surface of the tested lens, and the center position of the optical axis of the lower surface of the tested lens is obtained by processing the image of the variable curvature ring in the image.
  • the lower wavefront sensor 14 collects Distortion information of the reflected light of the lower surface of the test lens, and processing the distortion information to obtain tilt information of the lower surface of the test lens.
  • the light emitted by the upper optical fiber light source 1 is collimated by the upper collimating objective lens 2 to form a parallel beam.
  • the parallel light beam passes through the upper light source beam splitter 3 to reach the lens holding mechanism 9 under test and penetrates through the lens holding mechanism under test
  • the tested lens clamped on 9 is reflected by the lower light source beam splitter 10, and the reflected light is reflected by the lower light source beam splitter 10, then the aperture matching of the lower beam reduction front lens 11 and the lower beam reduction rear lens 12 reaches the lower imaging beam splitter 13.
  • Part of the light reflected by the lower imaging beam splitter 13 is detected by the lower imaging detector 15 to form a transmission image of the tested lens, and the outer edge center position of the lower surface of the tested lens is obtained by processing the outer edge image of the tested lens in the image.
  • This embodiment also provides a detection method of an aspheric lens eccentricity detection device based on wavefront technology, which includes the following steps:
  • Step S1 Turn on the upper fiber light source 1, the upper imaging detector 6 and the upper wavefront sensor 8 at the same time, adjust the tested lens clamping mechanism 9 according to the image on the upper imaging detector 6, and adjust the position of the tested lens to the upper imaging The imaging center area of the detector 6;
  • Step S2 Collect the image of the upper wavefront sensor 8 and process the wavefront image to obtain the tilt amount (p x , p y ) of the upper surface of the tested lens;
  • Step S3 J p collection pupil image on the imaging detector upper portion 6, the image processing to obtain the pupil center position on the optical axis of the test lens surfaces (O x, O y);
  • Step S4 Turn off the upper optical fiber light source 1, turn on the lower optical fiber light source 17, collect the pupil image I p on the upper imaging detector 6, calculate and process the pupil image I p according to the method of step S3, and obtain the upper surface of the tested lens The center position of the outer diameter (d x , d y );
  • Step S5 Turn on the lower imaging probe 15 and the lower wavefront sensor 14, collect the image of the lower wavefront sensor 14, and calculate and process according to the component parameters of the lower wavefront sensor according to the method of step S2 to obtain the inclination of the lower surface of the tested lens (p x ', p y ');
  • Step S6 Collect the pupil image J p ′ on the lower imaging detector 15, and calculate and process the pupil image J p ′ according to the method of step S3 to obtain the center position of the optical axis (O x ′, O y ');
  • Step S7 Close lower fiber optic light source 17, an open upper portion of the fiber optic light source, collecting the lower portion of the pupil image on the imaging detector of 15 I 'p, pupil image I' p A process according to calculation processing in step S3, to give the lower surface of the test lens The center position of the outer diameter (d x ', d y ');
  • Step S8 Subtract the inclination amounts of the upper and lower surfaces of the tested lens obtained in steps S2 and S5 to obtain the surface tilt eccentricity of the tested lens as
  • Step S9 According to the center position of the optical axis of the upper surface (O x , O y ) and the center position of the outer diameter of the upper surface (d x , d y ) obtained in step S3 and step S4, the outer diameter eccentricity of the upper surface of the tested lens is obtained as :
  • the parameter K is the magnification of the beam reduction and expansion optical system composed of the upper front beam reduction lens 4 and the upper rear beam reduction lens 5, and the parameter p is the pixel size of the upper imaging detector 6.
  • Step S10 According to the central position of the lower surface optical axis (O x ', O y ') and the central position of the lower surface outer diameter (d x ', d y ') obtained in step S6 and step S7, the The eccentricity of the outer diameter is:
  • the parameter k ' is the magnification of the beam reduction optical system composed of the lower front beam-reducing lens 11 and the lower rear beam-reduction lens 12, and the parameter p' is the pixel size of the lower imaging detector 15.
  • step S2 specifically includes:
  • Step S21 Acquire the wavefront image of the upper wavefront sensor 8;
  • Step S23 Calculate the average slope of effective sub-holes
  • Step S24 Calculate the tilt of the upper surface of the tested lens:
  • the parameter K is the magnification of the beam reduction optical system composed of the upper front beam reduction lens 4 and the upper rear beam reduction lens 5
  • the parameter p is the detection camera pixel size of the upper wavefront sensor 8
  • the parameter q is the upper wavefront sensor 8 sub-aperture size.
  • step S3 specifically includes:
  • Step S31 The image capture pupil J p 6 on the upper portion of the imaging detector
  • Step S32 binarize the pupil image J p to obtain a binarized image J p2 ; wherein, the binarized threshold is set by manually specifying a threshold or using an automatic threshold calculation method;
  • Step S33 performing edge extraction on the binarized image J p2 to obtain the image J p3 , which can use Sobel operator, Laplacian operator, Canny operator and other methods;
  • Step S34 Perform circular Hough transform on the image J p3 to obtain a circle, and extract the center of the circle as (O x , O y ).
  • the center of the circle is the center position of the optical axis of the upper surface of the tested lens.
  • the detection result is: the upper surface oblique wavefront image acquired by the upper wavefront sensor 8 in step S2 is shown in FIG. 2; referring to FIG. 3, the upper wavefront sensor 8 processes The tilt of the upper surface is (0.0019mm, 0.0065mm), the overall tilt is 0.0068mm;
  • the measurement result of the upper surface optical axis center position the coordinates of the optical axis center position are (4.8767mm, 2.6132mm), The radius is 0.9012mm;
  • the upper surface transmission pupil image I p acquired by the upper imaging detector 6 in step S4 is the upper surface transmission pupil image I p acquired by the upper imaging detector 6 in step S4; referring to FIG. 7, the measurement result of the upper surface outer diameter center position: the outer diameter center position coordinates are (4.8748 mm, 2.6197 mm) , The radius is 2.4651mm;
  • step S9 the eccentricity of the outer diameter of the upper surface is (-0.755 degrees, -2.016 degrees);
  • the processed lower surface wavefront tilt amount is (0.0101 mm, 0.0053 mm), and the total lower surface tilt amount is 0.0114 mm;
  • S6 is a step in the lower portion of the wavefront sensor 14 acquires the lower surface reflected image of the pupil J p '; 11, the optical axis center position coordinate of the lower surface (4.5304mm, 3.3342mm), a radius of 1.5171mm;
  • the eccentricity of the outer diameter of the lower surface in step S10 is (1.73 degrees, -3.924 degrees);
  • step S8 the inclined eccentricity of the upper and lower surface surfaces is (0.0082mm, 0.0118mm), and the overall eccentricity is 0.144mm; the translational eccentricity of the upper and lower surface surfaces is (-0.3444mm, 0.7145mm).

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Abstract

本发明公开了一种基于波前技术的非球面透镜偏心检测装置及其检测方法，该装置包括上部光纤光源、上部准直物镜、上部光源分光镜、上部缩束前透镜、上部缩束后透镜、上部成像探测器、上部成像分光镜、上部波前传感器、被测镜片夹持机构、下部光源分光镜、下部缩束前透镜、下部缩束后透镜、下部成像分光镜、下部波前传感器、下部成像探测器、下部准直物镜以及下部光纤光源。本发明为非接触式检测，不存在破坏镜片的风险，装置中无任何运动部件，系统可靠性、稳定性高；本发明可以一次性检测出非球面透镜有效口径内的多种偏心误差，避免了拼接检测带来的误差，同时也极大地缩减了检测时间，可用于流水线上的在线检测。

Description

基于波前技术的非球面透镜偏心检测装置及其检测方法 技术领域
本发明涉及光学检测技术领域，特别涉及一种基于波前技术的非球面透镜偏心检测装置及其检测方法。
背景技术
非球面透镜以其优良的光学特性可以减轻光学系统设计困难、简化结构、扩大视场、提高数值孔径等优势，目前已经广泛应用于空间遥感光学镜片、光刻镜片、光学检测仪器、摄像光学系统中。非球面透镜在制造过程中由对正误差或材料冷却不均匀收缩等不可避免的误差，都会使透镜的两个曲面光轴产生倾斜和偏心误差，其中倾斜误差会导致透镜给光学系统引入畸变和慧差，偏心误差会引入额外的球差，这两种误差均会降低非球面透镜的光学像质，还会降低透镜的机械性质。
对于非球面透镜的偏心检测，以panasonic公司的UA3P接触式检测为主流产品，其检测原理是通过单点探针对非球面透镜表面进行逐点扫描，可以获取每个面的所有面型数据，该方法精度很高，但是耗时很长导致效率很低，同时对测量过程中透镜固定精度要求很高，存在破坏镜面的危险。
为了提升效率，多种非接触式的偏心检测方法也得到了推广应用，其中光学成像和表面干涉的检测方法也得以。光学成像方法主要使用调焦望远镜结构，产生与透镜表面匹配的球面波，从透镜表面反射的点或者十字叉丝像随着旋转轴的旋转在成像相机上画出的圆来判断透镜表面光轴与旋转轴的偏离，该方法测量精度严格依赖旋转轴的精度，还依赖于点光源或十字叉丝的尺寸精度，测量精度并不高通常在几角秒。表面干涉方法(比如中国专利CN101226344B，CN102944194B)利用透镜表面的干涉条纹来测量表面倾斜，其定心测量精度高于光学成像方法，受限于干涉测量横向、纵向分辨率不高，往往需要分区域扫描干涉，并通过拼接的方式得到非球面整个面形和偏心误差，测量精度依赖于载物台的位置控制精度和拼接算法精度，并且随着非球面口径的增大，效率呈指数级下降，精度也下降严重。此外，干涉测量方法对于大偏离度和大偏离度斜率的非球面检测较为困难，干涉测量方法比较复杂，对操作人员要求较高，实用性较低。
由此可见，无论是接触式还是非接触式的非球面偏心检测装置和方法，在测量精度、测量效率方面不能同时兼得。
发明内容
本发明所要解决的技术问题在于针对上述现有技术中的不足，提供一种基于波前技术的非球面透镜偏心检测装置及其检测方法。其偏心测量精度不依赖于任何其他移动、旋转机构，通过波前测量和光瞳成像的方法可以以非接触的方式，实现快速、准确的非球面透镜偏心检测。
为解决上述技术问题，本发明采用的技术方案是：一种基于波前技术的非球面透镜偏心检测装置，包括上部光纤光源、上部准直物镜、上部光源分光镜、上部缩束前透镜、上部缩束后透镜、上部成像探测器、上部成像分光镜、上部波前传感器、被测镜片夹持机构、下部光源分光镜、下部缩束前透镜、下部缩束后透镜、下部成像分光镜、下部波前传感器、下部成像探测器、下部准直物镜以及下部光纤光源；
其中，所述上部光纤光源发出的光经所述上部准直物镜准直，再透射所述上部光源分光镜后照射到所述被测镜片夹持机构上的被测镜片的上表面；所述被测镜片上表面的反射光经所述上部光源分光镜反射，再依次经所述上部缩束前透镜和上部缩束后透镜进行口径匹配后到达所述上部成像分光镜，光经过所述上部成像分光镜后被分为两部分，一部分经所述上部成像分光镜反射进入所述上部成像探测器，另一部分透射所述上部成像分光镜后进入所述上部波前传感器；所述上部成像探测器采集到被测镜片上表面的反射光形成的图像，通过对该图像中变曲率环图像的处理获得被测镜片上表面的光轴中心位置；所述上部波前传感器采集到被测镜片上表面的反射光的畸变信息，通过对该畸变信息进行处理获得被测镜片上表面的倾斜信息；
其中，所述下部光纤光源发出的光经所述下部准直物镜准直，再透射所述下部光源分光镜后照射到所述被测镜片夹持机构上的被测镜片的下表面；所述被测镜片下表面的反射光经所述下部光源分光镜反射，再依次经所述下部缩束前透镜和下部缩束后透镜进行口径匹配后到达所述下部成像分光镜，光经过所述下部成像分光镜后被分为两部分，一部分经所述下部成像分光镜反射进入所述下部成像探测器，另一部分透射所述下部成像分光镜后进入所述下部波前传感器；所述下部成像探测器采集到被测镜片下表面的反射光形成的图像，通过对该图像中变曲率环图像的处理获得被测镜片下表面的光轴中心位置；所述下部波前传感器采 集到被测镜片下表面的反射光的畸变信息，通过对该畸变信息进行处理获得被测镜片下表面的倾斜信息。
优选的是，所述下部光纤光源发出的光经所述下部准直物镜准直后形成平行光束，平行光束透射所述下部光源分光镜后照射到所述被测镜片夹持机构上的被测镜片上，穿过所述被测镜片后被所述上部光源分光镜反射，反射光再依次经所述上部缩束前透镜和上部缩束后透镜进行口径匹配后到达所述上部成像分光镜；部分光经所述上部成像分光镜反射后到达所述上部成像探测器，形成被测镜片透射像，对该图像中被测镜片外边缘图像进行处理以获得该被测镜片上表面的外径中心位置。
优选的是，所述上部光纤光源发出的光经所述上部准直物镜准直后形成平行光束，平行光束透射所述上部光源分光镜后照射到所述被测镜片夹持机构上的被测镜片上，穿过所述被测镜片后被所述下部光源分光镜反射，反射光再依次经所述下部缩束前透镜和下部缩束后透镜进行口径匹配后到达所述下部成像分光镜；部分光经所述下部成像分光镜反射后到达所述下部成像探测器，形成被测镜片透射像，对该图像中被测镜片外边缘图像进行处理以获得该被测镜片下表面的外径中心位置。
优选的是，所述上部成像探测器和上部波前传感器在光路上的位置均与被测镜片的上表面共轭；
所述下部成像探测器和下部波前传感器在光路上的位置均与被测镜片的下表面共轭。
优选的是，所述波前传感器为哈特曼波前传感器或剪切干涉波前传感器或四棱锥波前传感器。
优选的是，通过将获得的被测镜片上表面的光轴中心位置信息、上表面的倾斜信息、上表面的外径中心位置信息、下表面的光轴中心位置信息、下表面的外径中心位置信息以及下表面的倾斜信息进行综合处理，最终可获得被测镜片的上下表面的面别平移偏心、上下表面的面别倾斜偏心、上表面的外径偏心、下表面的外径偏心数据，从而完成对被测镜片偏心误差信息的测量。
一种如上所述的基于波前技术的非球面透镜偏心检测装置的检测方法，其包括以下步骤：
步骤S1：同时开启上部光纤光源、上部成像探测器和上部波前传感器，根据上部成像探测器上的图像调节被测镜片夹持机构，将被测镜片的位置调节到上部成像探测器的成像中心区域；
步骤S2：采集上部波前传感器的图像，对波前图像处理得到被测镜片上表面倾斜量(p x,p y)；
步骤S3：采集上部成像探测器上的光瞳图像J p，对光瞳图像处理得到被测镜片上表面的光轴中心位置(O x，O y)；
步骤S4：关闭上部光纤光源，开启下部光纤光源，采集上部成像探测器上的光瞳图像I p，对光瞳图像I p按照步骤S3的方法计算处理，得到被测镜片上表面的外径中心位置(d x,d y)；
步骤S5：开启下部成像探测器和下部波前传感器，采集下部波前传感器的图像，根据下部波前传感器的部件参数，按照步骤S2的方法计算处理，得到被测镜片下表面倾斜量(p x',p y')；
步骤S6：采集下部成像探测器上的光瞳图像J p’，对光瞳图像J p’按照步骤S3的方法计算处理，得到被测镜片下表面的光轴中心位置(O x’，O y’)；
步骤S7：关闭下部光纤光源，开启上部光纤光源，采集下部成像探测器上的光瞳图像I’ p，光瞳图像I’ p按照步骤S3的方法计算处理，得到被测镜片下表面的外径中心位置(d x',d y')；
步骤S8：将步骤S2和步骤S5得到的被测镜片的上下表面倾斜量相减，得到被测镜片上下表面的面别倾斜偏心为
Figure PCTCN2018120449-appb-000001
将步骤S3和步骤S6得到的上表面光轴中心位置与下表面光轴中心位置相减，得到被测镜片上下表面的面别平移偏心为O＝(O x’，O y’)-(O x，O y)。
步骤S9：根据步骤S3和步骤S4得到的上表面光轴中心位置(O x，O y)、以及上表面外径中心位置(d x,d y)，得到被测镜片上表面的外径偏心为：
Figure PCTCN2018120449-appb-000002
其中，参数K为上部缩束前透镜和上部缩束后透镜组成的缩扩束光学系统的放大倍率，参数p为上部成像探测器的像素大小。
步骤S10：根据步骤S6和步骤S7得到的下表面光轴中心位置(O x’，O y’)、以及下表面外径中心位置(d x',d y')，得到被测镜片下表面的外径偏心为：
Figure PCTCN2018120449-appb-000003
其中，参数k’为下部缩束前透镜和下部缩束后透镜组成的缩扩束光学系统的放大倍率，参数p’为下部成像探测器的像素大小。
优选的是，所述步骤S2具体包括：
步骤S21：采集上部波前传感器的波前图像；
步骤S22：检测波前图像中最外环有效子孔径，去掉其中的最外一圈和最内一圈的子孔径后，剩下的子孔径记为有效子孔径；令有效子孔径个数为L，计算每个有效子孔径的斜率，记为(g xi,g yi)，其中i＝1,2,...,L；
步骤S23：计算有效子孔的平均斜率
Figure PCTCN2018120449-appb-000004
步骤S24：计算被测镜片上表面倾斜量：
Figure PCTCN2018120449-appb-000005
其中，参数K为上部缩束前透镜和上部缩束后透镜组成的缩扩束光学系统的放大倍率，参数p为上部波前传感器的探测相机像素大小，参数q为上部波前传感器的子孔径大小。
优选的是，所述步骤S3具体包括：
步骤S31：采集上部成像探测器上的光瞳图像J p；
步骤S32：对光瞳图像J p进行二值化，得到二值化图像J p2；其中，通过手动指定阈值或采用自动阈值计算方法设置二值化阈值；
步骤S33：对二值化图像J p2进行边缘提取，得到图像J p3；
步骤S34：对图像J p3进行圆霍夫变换，得到圆，并提取圆心记为(O x，O y)，该圆心即为被测镜片上表面的光轴中心位置。
优选的是，所述步骤S33中采用Sobel算子或Laplacian算子或Canny算子对二值化图像J p2进行边缘提取。
本发明的有益效果是：
(1)本发明的基于波前技术的非球面透镜偏心检测装置为非接触式检测，不存在破坏镜片的风险，装置中无任何运动部件，系统可靠性、稳定性高；
(2)本发明可以一次性检测出非球面透镜有效口径内的多种偏心误差，避免了拼接检测带来的误差，同时也极大地缩减了检测时间，可用于流水线上的在线检测；
(3)本发明采用波前测量技术实现对非球面透镜上下表明偏心误差的检测，测量精度可达亚纳米级；
(4)本发明的基于波前技术的非球面透镜偏心检测装置系统结构简便紧凑，复杂度低，计算分析方便，便于多种使用场合，便于大规模推广应用。
附图说明
图1为本发明的基于波前技术的非球面透镜偏心检测装置的结构示意图；
图2为本发明的一种实施例中的上部波前传感器获取的上表面倾斜波前图像；
图3为本发明的一种实施例中的上部波前传感器处理得到的上表面倾斜量图像；
图4为本发明的一种实施例中的上部成像探测器获取的上表面反射光瞳图像；
图5为本发明的一种实施例中的上表面光轴中心位置测量结果图像；
图6为本发明的一种实施例中的上部成像探测器获取的上表面透射光瞳图像；
图7为本发明的一种实施例中的上表面外径中心位置测量结果图像；
图8为本发明的一种实施例中的下部波前传感器获取的下表面倾斜波前图像；
图9为本发明的一种实施例中的下表面波前倾斜量图像；
图10为本发明的一种实施例中的下部波前传感器获取的下表面反射光瞳图像；
图11为本发明的一种实施例中的下表面光轴中心位置图像；
图12为本发明的一种实施例中的下部成像探测器采集的下表面透射光瞳图像；
图13为本发明的一种实施例中的下表面外径中心位置图像。
附图标记说明：
上部光纤光源1，上部准直物镜2，上部光源分光镜3，上部缩束前透镜4，上部缩束后透镜5，上部成像探测器6，上部成像分光镜7，上部波前传感器8，被测镜片夹持机构9，下部光源分光镜10，下部缩束前透镜11，下部缩束后透镜12，下部成像分光镜13，下部波前传感器14，下部成像探测器15，下部准直物镜16，下部光纤光源17。
具体实施方式
下面结合实施例对本发明做进一步的详细说明，以令本领域技术人员参照说明书文字能够据以实施。
应当理解，本文所使用的诸如“具有”、“包含”以及“包括”术语并不排除一个或多个其它 元件或其组合的存在或添加。
如图1所示，本实施例的一种基于波前技术的非球面透镜偏心检测装置包括上部光纤光源1、上部准直物镜2、上部光源分光镜3、上部缩束前透镜4、上部缩束后透镜5、上部成像探测器6、上部成像分光镜7、上部波前传感器8、被测镜片夹持机构9、下部光源分光镜10、下部缩束前透镜11、下部缩束后透镜12、下部成像分光镜13、下部波前传感器14、下部成像探测器15、下部准直物镜16，以及下部光纤光源17。
其中，所述波前传感器为哈特曼波前传感器或剪切干涉波前传感器或四棱锥波前传感器，优选地，本实施例中选取哈特曼波前传感器。
其中，上部光纤光源1发出的光经过上部准直物镜2准直后形成平行光束，平行光束透过上部光源分光镜3后到达被测镜片夹持机构9，被测镜片夹持机构9上夹持的被测镜片上表面对入射的平行光进行反射，反射光经过上部光源分光镜3反射后经上部缩束前透镜4和上部缩束后透镜5进行口径匹配后到达上部成像分光镜7。光经过上部成像分光镜7后被分为两部分，其中一部分经上部成像分光镜7反射进入所述上部成像探测器6，另一部分透射上部成像分光镜7后进入所述上部波前传感器8。其中，上部成像探测器6和上部波前传感器8在光路上的位置均与被测镜片的上表面共轭。上部成像探测器6采集到被测镜片上表面的反射光形成的图像，通过对该图像中变曲率环图像的处理获得被测镜片上表面的光轴中心位置，上部波前传感器8采集到被测镜片上表面的反射光的畸变信息，通过对该畸变信息进行处理获得被测镜片上表面的倾斜信息。
其中，下部光纤光源17发出的光经过下部准直物镜16准直后形成平行光束，平行光束透过下部光源分光镜10后到达被测镜片夹持机构9，透过被测镜片夹持机构9上夹持的被测镜片后被上部光源分光镜3反射，反射光经过上部光源分光镜3反射后经上部缩束前透镜4和上部缩束后透镜5进行口径匹配后到达上部成像分光镜7。经过上部成像分光镜7反射的部分光被上部成像探测器6探测，形成被测镜片透射像，对该图像中被测镜片外边缘图像进行处理获得该被测镜片上表面的外径中心位置。
其中，下部光纤光源17发出的光经过下部准直物镜16准直后形成平行光束，平行光束透过下部光源分光镜10后到达被测镜片夹持机构9，被测镜片夹持机构9上夹持的被测镜片下表面对入射的平行光进行反射，反射光经过下部光源分光镜10反射后经下部缩束前透镜11和下部缩束后透镜12进行口径匹配后到达下部成像分光镜13。光经过下部成像分光镜13后被分为两部分，一部分经下部成像分光镜13反射进入所述下部成像探测器15，另 一部分透射下部成像分光镜13后进入所述下部波前传感器14。其中，下部成像探测器15和下部波前传感器14在光路上的位置均与被测镜片的下表面共轭。下部成像探测器15采集到被测镜片下表面的反射光形成的图像，通过对该图像中变曲率环图像的处理获得被测镜片下表面的光轴中心位置，下部波前传感器14采集到被测镜片下表面的反射光的畸变信息，通过对该畸变信息进行处理获得被测镜片下表面的倾斜信息。
其中，上部光纤光源1发出的光经过上部准直物镜2准直后形成平行光束，平行光束透过上部光源分光镜3后到达被测镜片夹持机构9，穿透过被测镜片夹持机构9上夹持的被测镜片后被下部光源分光镜10反射，反射光经过下部光源分光镜10反射后经下部缩束前透镜11和下部缩束后透镜12进行口径匹配后到达下部成像分光镜13。经过下部成像分光镜13反射的部分光被下部成像探测器15探测，形成被测镜片透射像，对该图像中被测镜片外边缘图像进行处理获得该被测镜片下表面的外径中心位置。
综合以上获得的被测镜片上表面的光轴中心位置信息、上表面的倾斜信息、上表面的外径中心位置信息、下表面的光轴中心位置信息、下表面的倾斜信息以及下表面的外径中心位置信息，最终通过综合处理可获得被测镜片的上下表面的面别平移偏心、上下表面的面别倾斜偏心、上表面的外径偏心、下表面的外径偏心数据，从而完成对被测镜片偏心误差信息的测量。
本实施例还提供一种基于波前技术的非球面透镜偏心检测装置的检测方法，其包括以下步骤：
步骤S1：同时开启上部光纤光源1、上部成像探测器6和上部波前传感器8，根据上部成像探测器6上的图像调节被测镜片夹持机构9，将被测镜片的位置调节到上部成像探测器6的成像中心区域；
步骤S2：采集上部波前传感器8的图像，对波前图像处理得到被测镜片上表面倾斜量(p x,p y)；
步骤S3：采集上部成像探测器6上的光瞳图像J p，对光瞳图像处理得到被测镜片上表面的光轴中心位置(O x，O y)；
步骤S4：关闭上部光纤光源1，开启下部光纤光源17，采集上部成像探测器6上的光瞳图像I p，对光瞳图像I p按照步骤S3的方法计算处理，得到被测镜片上表面的外径中心位置(d x,d y)；
步骤S5：开启下部成像探测器15和下部波前传感器14，采集下部波前传感器14的图像，根据下部波前传感器的部件参数，按照步骤S2的方法计算处理，得到被测镜片下表面倾斜量(p x',p y')；
步骤S6：采集下部成像探测器15上的光瞳图像J p’，对光瞳图像J p’按照步骤S3的方法计算处理，得到被测镜片下表面的光轴中心位置(O x’，O y’)；
步骤S7：关闭下部光纤光源17，开启上部光纤光源1，采集下部成像探测器15上的光瞳图像I’ p，光瞳图像I’ p按照步骤S3的方法计算处理，得到被测镜片下表面的外径中心位置(d x',d y')；
步骤S8：将步骤S2和步骤S5得到的被测镜片的上、下表面倾斜量相减，得到被测镜片的面别倾斜偏心为
Figure PCTCN2018120449-appb-000006
将步骤S3和步骤S6得到的上表面光轴中心位置与下表面光轴中心位置相减，得到被测镜片的面别平移偏心为O＝(O x’，O y’)-(O x，O y)。
步骤S9：根据步骤S3和步骤S4得到的上表面光轴中心位置(O x，O y)、以及上表面外径中心位置(d x,d y)，得到被测镜片上表面的外径偏心为：
Figure PCTCN2018120449-appb-000007
其中，参数K为上部缩束前透镜4和上部缩束后透镜5组成的缩扩束光学系统的放大倍率，参数p为上部成像探测器6的像素大小。
步骤S10：根据步骤S6和步骤S7得到的下表面光轴中心位置(O x’，O y’)、以及下表面外径中心位置(d x',d y')，得到被测镜片下表面的外径偏心为：
Figure PCTCN2018120449-appb-000008
其中，参数k’为下部缩束前透镜11和下部缩束后透镜12组成的缩扩束光学系统的放大倍率，参数p’为下部成像探测器15的像素大小。
其中，步骤S2具体还包括：
步骤S21：采集上部波前传感器8的波前图像；
步骤S22：检测波前图像中最外环有效子孔径，去掉其中的最外一圈和最内一圈的子孔径后，剩下的子孔径记为有效子孔径；令有效子孔径个数为L，计算每个有效子孔径的斜率， 记为(g xi,g yi)，其中i＝1,2,...,L；
步骤S23：计算有效子孔的平均斜率
Figure PCTCN2018120449-appb-000009
步骤S24：计算被测镜片上表面倾斜量：
Figure PCTCN2018120449-appb-000010
其中，参数K为上部缩束前透镜4和上部缩束后透镜5组成的缩扩束光学系统的放大倍率，参数p为上部波前传感器8的探测相机像素大小，参数q为上部波前传感器8的子孔径大小。
其中，步骤S3具体还包括：
步骤S31：采集上部成像探测器6上的光瞳图像J p；
步骤S32：对光瞳图像J p进行二值化，得到二值化图像J p2；其中，通过手动指定阈值或采用自动阈值计算方法设置二值化阈值；
步骤S33：对二值化图像J p2进行边缘提取，得到图像J p3，可采用Sobel算子，Laplacian算子，Canny算子等方法；
步骤S34：对图像J p3进行圆霍夫变换，得到圆，并提取圆心记为(O x，O y)，该圆心即为被测镜片上表面的光轴中心位置。
更进一步的，在一种实施例中，检测的结果为：步骤S2中上部波前传感器8获取的上表面倾斜波前图像如图2所示；参照图3，上部波前传感器8处理得到的上表面倾斜量为(0.0019mm，0.0065mm)，总体倾斜量为0.0068mm；
参照图4，为步骤S3中上部成像探测器6获取的上表面反射光瞳图像J p；参照图5，上表面光轴中心位置测量结果：光轴中心位置坐标为(4.8767mm,2.6132mm)，半径为0.9012mm；
参照图6，为步骤S4中上部成像探测器6获取的上表面透射光瞳图像I p；参照图7，上表面外径中心位置测量结果：外径中心位置坐标为(4.8748mm,2.6197mm)，半径为2.4651mm；
步骤S9中，上表面外径偏心量为(-0.755度，-2.016度)；
参照图8，为步骤S5中下部波前传感器14获取的下表面倾斜波前图像；参照图9，处理得到下表面波前倾斜量为(0.0101mm,0.0053mm)，下表面总体倾斜量为0.0114mm；
参照图10，为步骤S6中下部波前传感器14获取的下表面反射光瞳图像J p’；参照图11， 下表面光轴中心位置坐标为(4.5304mm,3.3342mm)，半径为1.5171mm；
参照图12，为步骤S7中下部成像探测器15采集的下表面透射光瞳图像I’ p；参照图13，下表面外径中心位置为(4.5203mm,3.3395mm)，半径为2.4675mm；
步骤S10中下表面外径偏心量为(1.73度，-3.924度)；
步骤S8中，上下表面面别倾斜偏心为(0.0082mm,0.0118mm)，总体偏心为0.144mm；上下表面面别平移偏心为(-0.3444mm,0.7145mm)。
尽管本发明的实施方案已公开如上，但其并不仅仅限于说明书和实施方式中所列运用，它完全可以被适用于各种适合本发明的领域，对于熟悉本领域的人员而言，可容易地实现另外的修改，因此在不背离权利要求及等同范围所限定的一般概念下，本发明并不限于特定的细节。

Claims (10)

  1. 一种基于波前技术的非球面透镜偏心检测装置，其特征在于，包括上部光纤光源、上部准直物镜、上部光源分光镜、上部缩束前透镜、上部缩束后透镜、上部成像探测器、上部成像分光镜、上部波前传感器、被测镜片夹持机构、下部光源分光镜、下部缩束前透镜、下部缩束后透镜、下部成像分光镜、下部波前传感器、下部成像探测器、下部准直物镜以及下部光纤光源；
    其中，所述上部光纤光源发出的光经所述上部准直物镜准直，再透射所述上部光源分光镜后照射到所述被测镜片夹持机构上的被测镜片的上表面；所述被测镜片上表面的反射光经所述上部光源分光镜反射，再依次经所述上部缩束前透镜和上部缩束后透镜进行口径匹配后到达所述上部成像分光镜，光经过所述上部成像分光镜后被分为两部分，一部分经所述上部成像分光镜反射进入所述上部成像探测器，另一部分透射所述上部成像分光镜后进入所述上部波前传感器；所述上部成像探测器采集到被测镜片上表面的反射光形成的图像，通过对该图像中变曲率环图像的处理获得被测镜片上表面的光轴中心位置；所述上部波前传感器采集到被测镜片上表面的反射光的畸变信息，通过对该畸变信息进行处理获得被测镜片上表面的倾斜信息；
    其中，所述下部光纤光源发出的光经所述下部准直物镜准直，再透射所述下部光源分光镜后照射到所述被测镜片夹持机构上的被测镜片的下表面；所述被测镜片下表面的反射光经所述下部光源分光镜反射，再依次经所述下部缩束前透镜和下部缩束后透镜进行口径匹配后到达所述下部成像分光镜，光经过所述下部成像分光镜后被分为两部分，一部分经所述下部成像分光镜反射进入所述下部成像探测器，另一部分透射所述下部成像分光镜后进入所述下部波前传感器；所述下部成像探测器采集到被测镜片下表面的反射光形成的图像，通过对该图像中变曲率环图像的处理获得被测镜片下表面的光轴中心位置；所述下部波前传感器采集到被测镜片下表面的反射光的畸变信息，通过对该畸变信息进行处理获得被测镜片下表面的倾斜信息。
  2. 根据权利要求1所述的基于波前技术的非球面透镜偏心检测装置，其特征在于，所述下部光纤光源发出的光经所述下部准直物镜准直后形成平行 光束，平行光束透射所述下部光源分光镜后照射到所述被测镜片夹持机构上的被测镜片上，穿过所述被测镜片后被所述上部光源分光镜反射，反射光再依次经所述上部缩束前透镜和上部缩束后透镜进行口径匹配后到达所述上部成像分光镜；部分光经所述上部成像分光镜反射后到达所述上部成像探测器，形成被测镜片透射像，对该图像中被测镜片外边缘图像进行处理以获得该被测镜片上表面的外径中心位置。
  3. 根据权利要求2所述的基于波前技术的非球面透镜偏心检测装置，其特征在于，所述上部光纤光源发出的光经所述上部准直物镜准直后形成平行光束，平行光束透射所述上部光源分光镜后照射到所述被测镜片夹持机构上的被测镜片上，穿过所述被测镜片后被所述下部光源分光镜反射，反射光再依次经所述下部缩束前透镜和下部缩束后透镜进行口径匹配后到达所述下部成像分光镜；部分光经所述下部成像分光镜反射后到达所述下部成像探测器，形成被测镜片透射像，对该图像中被测镜片外边缘图像进行处理以获得该被测镜片下表面的外径中心位置。
  4. 根据权利要求3所述的基于波前技术的非球面透镜偏心检测装置，其特征在于，所述上部成像探测器和上部波前传感器在光路上的位置均与被测镜片的上表面共轭；
    所述下部成像探测器和下部波前传感器在光路上的位置均与被测镜片的下表面共轭。
  5. 根据权利要求4所述的基于波前技术的非球面透镜偏心检测装置，其特征在于，所述波前传感器为哈特曼波前传感器或剪切干涉波前传感器或四棱锥波前传感器。
  6. 根据权利要求3-5中任意一项所述的基于波前技术的非球面透镜偏心检测装置，其特征在于，通过将获得的被测镜片上表面的光轴中心位置信息、上表面的倾斜信息、上表面的外径中心位置信息、下表面的光轴中心位置信息、下表面的外径中心位置信息以及下表面的倾斜信息进行综合处理，最终可获得被测镜片的上下表面的面别平移偏心、上下表面的面别倾斜偏心、上表面的外径偏心、下表面的外径偏心数据，从而完成对被测镜片偏心误差信息的测量。
  7. 一种如权利要求1-6中任意一项所述的基于波前技术的非球面透镜偏心检测装置的检测方法，其特征在于，其包括以下步骤：
    步骤S1：同时开启上部光纤光源、上部成像探测器和上部波前传感器，根据上部成像探测器上的图像调节被测镜片夹持机构，将被测镜片的位置调节到上部成像探测器的成像中心区域；
    步骤S2：采集上部波前传感器的图像，对波前图像处理得到被测镜片上表面倾斜量(p x,p y)；
    步骤S3：采集上部成像探测器上的光瞳图像J p，对光瞳图像处理得到被测镜片上表面的光轴中心位置(O x，O y)；
    步骤S4：关闭上部光纤光源，开启下部光纤光源，采集上部成像探测器上的光瞳图像I p，对光瞳图像I p按照步骤S3的方法计算处理，得到被测镜片上表面的外径中心位置(d x,d y)；
    步骤S5：开启下部成像探测器和下部波前传感器，采集下部波前传感器的图像，根据下部波前传感器的部件参数，按照步骤S2的方法计算处理，得到被测镜片下表面倾斜量(p x',p y')；
    步骤S6：采集下部成像探测器上的光瞳图像J p’，对光瞳图像J p’按照步骤S3的方法计算处理，得到被测镜片下表面的光轴中心位置(O x’，O y’)；
    步骤S7：关闭下部光纤光源，开启上部光纤光源，采集下部成像探测器上的光瞳图像I’ p，光瞳图像I’ p按照步骤S3的方法计算处理，得到被测镜片下表面的外径中心位置(d x',d y')；
    步骤S8：将步骤S2和步骤S5得到的被测镜片的上下表面倾斜量相减，得到被测镜片上下表面的面别倾斜偏心为
    Figure PCTCN2018120449-appb-100001
    将步骤S3和步骤S6得到的上表面光轴中心位置与下表面光轴中心位置相减，得到被测镜片上下表面的面别平移偏心为O＝(O x’，O y’)-(O x，O y)。
    步骤S9：根据步骤S3和步骤S4得到的上表面光轴中心位置(O x，O y)、以及上表面外径中心位置(d x,d y)，得到被测镜片上表面的外径偏心为：
    Figure PCTCN2018120449-appb-100002
    其中，参数K为上部缩束前透镜和上部缩束后透镜组成的缩扩束光学系统的放大倍率，参数p为上部成像探测器的像素大小。
    步骤S10：根据步骤S6和步骤S7得到的下表面光轴中心位置(O x’，O y’)、以及下表面外径中心位置(d x',d y')，得到被测镜片下表面的外径偏心为：
    Figure PCTCN2018120449-appb-100003
    其中，参数k’为下部缩束前透镜和下部缩束后透镜组成的缩扩束光学系统的放大倍率，参数p’为下部成像探测器的像素大小。
  8. 根据权利要求7所述的基于波前技术的非球面透镜偏心检测方法，其特征在于，所述步骤S2具体包括：
    步骤S21：采集上部波前传感器的波前图像；
    步骤S22：检测波前图像中最外环有效子孔径，去掉其中的最外一圈和最内一圈的子孔径后，剩下的子孔径记为有效子孔径；令有效子孔径个数为L，计算每个有效子孔径的斜率，记为(g xi,g yi)，其中i＝1,2,...,L；
    步骤S23：计算有效子孔的平均斜率
    Figure PCTCN2018120449-appb-100004
    步骤S24：计算被测镜片上表面倾斜量：
    Figure PCTCN2018120449-appb-100005
    其中，参数K为上部缩束前透镜和上部缩束后透镜组成的缩扩束光学系统的放大倍率，参数p为上部波前传感器的探测相机像素大小，参数q为上部波前传感器的子孔径大小。
  9. 根据权利要求8所述的基于波前技术的非球面透镜偏心检测方法，其特征在于，所述步骤S3具体包括：
    步骤S31：采集上部成像探测器上的光瞳图像J p；
    步骤S32：对光瞳图像J p进行二值化，得到二值化图像J p2；其中，通过手动指定阈值或采用自动阈值计算方法设置二值化阈值；
    步骤S33：对二值化图像J p2进行边缘提取，得到图像J p3；
    步骤S34：对图像J p3进行圆霍夫变换，得到圆，并提取圆心记为(O x，O y)，该圆心即为被测镜片上表面的光轴中心位置。
  10. 根据权利要求9所述的基于波前技术的非球面透镜偏心检测方法，其特征在于，所述步骤S33中采用Sobel算子或Laplacian算子或Canny算子对二值化图像J p2进行边缘提取。
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114459395A (zh) * 2022-03-28 2022-05-10 深圳众庭联合科技有限公司 一种平面平晶检定装置及检定方法

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109990986B (zh) * 2019-05-09 2020-11-24 长春理工大学 一种用于单轴光学系统光轴的标定方法及装置
CN110736610B (zh) * 2019-10-22 2021-08-20 歌尔光学科技有限公司 测量光学中心偏移的方法、装置、存储介质及深度相机
CN110793754A (zh) * 2019-11-01 2020-02-14 中国科学院光电技术研究所 一种基于相移调制的拼接式望远镜系统偏心误差探测方法
CN111044260B (zh) * 2019-12-27 2021-05-18 中国科学院长春光学精密机械与物理研究所 显微物镜畸变测试装置及测试方法
CN112797961B (zh) * 2020-12-30 2022-03-04 中国工程物理研究院激光聚变研究中心 光学准直系统
CN114778079B (zh) * 2022-03-31 2024-01-23 宜宾市极米光电有限公司 一种偏心仪及偏心检测方法
CN115638741A (zh) * 2022-10-11 2023-01-24 淮安艾利光电仪器有限公司 一种非球面镜片面型检测系统

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101210857A (zh) * 2006-12-25 2008-07-02 鸿富锦精密工业（深圳）有限公司 镜片偏心检测系统及方法
CN101226344A (zh) 2008-01-31 2008-07-23 上海微电子装备有限公司 测量光学系统参数的测量装置及其测量方法
CN101281025A (zh) * 2007-04-04 2008-10-08 奥林巴斯株式会社 偏心检查装置及偏心调节装置
CN102200432A (zh) * 2010-03-23 2011-09-28 富士胶片株式会社 非球面物体测量方法和设备
CN102944194A (zh) 2012-11-21 2013-02-27 中国科学院光电技术研究所 一种高精度高次非球面透镜偏心测定系统及方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW283201B (zh) * 1993-08-13 1996-08-11 Ricoh Kk
JP2000193441A (ja) * 1998-12-25 2000-07-14 Canon Inc 偏心測定方法及び偏心測定装置
JP2005201703A (ja) 2004-01-14 2005-07-28 Konica Minolta Opto Inc 干渉測定方法及び干渉測定システム
JP2008096233A (ja) 2006-10-11 2008-04-24 Pentax Corp 光学部材検査装置
JP4880513B2 (ja) 2007-03-29 2012-02-22 富士フイルム株式会社 非球面レンズの面ずれ測定方法および装置
JP2014115077A (ja) 2011-03-31 2014-06-26 Fujifilm Corp レンズの面ズレ・面倒れを測定するレンズ測定方法及び装置
JP5988643B2 (ja) 2012-03-26 2016-09-07 キヤノン株式会社 計測装置、計測方法及び光学部品の製造方法
US9097612B2 (en) 2012-11-30 2015-08-04 Qed Technologies International, Inc. Integrated wavefront sensor and profilometer
CN207540510U (zh) * 2017-12-13 2018-06-26 广东技术师范学院 一种用于检测透镜中心偏离的装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101210857A (zh) * 2006-12-25 2008-07-02 鸿富锦精密工业（深圳）有限公司 镜片偏心检测系统及方法
CN101281025A (zh) * 2007-04-04 2008-10-08 奥林巴斯株式会社 偏心检查装置及偏心调节装置
CN101226344A (zh) 2008-01-31 2008-07-23 上海微电子装备有限公司 测量光学系统参数的测量装置及其测量方法
CN102200432A (zh) * 2010-03-23 2011-09-28 富士胶片株式会社 非球面物体测量方法和设备
CN102944194A (zh) 2012-11-21 2013-02-27 中国科学院光电技术研究所 一种高精度高次非球面透镜偏心测定系统及方法

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP3677893A4

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114459395A (zh) * 2022-03-28 2022-05-10 深圳众庭联合科技有限公司 一种平面平晶检定装置及检定方法
CN114459395B (zh) * 2022-03-28 2023-09-22 深圳众庭联合科技有限公司 一种平面平晶检定装置及检定方法

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