WO2020100347A1 - Dispositif de chauffage et plaque de chauffage - Google Patents

Dispositif de chauffage et plaque de chauffage Download PDF

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Publication number
WO2020100347A1
WO2020100347A1 PCT/JP2019/028381 JP2019028381W WO2020100347A1 WO 2020100347 A1 WO2020100347 A1 WO 2020100347A1 JP 2019028381 W JP2019028381 W JP 2019028381W WO 2020100347 A1 WO2020100347 A1 WO 2020100347A1
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WO
WIPO (PCT)
Prior art keywords
heating
plate
plates
heated
heating device
Prior art date
Application number
PCT/JP2019/028381
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English (en)
Japanese (ja)
Inventor
利彰 神吉
敬二 上川
Original Assignee
株式会社九州日昌
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 株式会社九州日昌 filed Critical 株式会社九州日昌
Priority to JP2020556592A priority Critical patent/JP7372684B2/ja
Publication of WO2020100347A1 publication Critical patent/WO2020100347A1/fr
Priority to JP2023174199A priority patent/JP2023175950A/ja

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D11/00—Arrangement of elements for electric heating in or on furnaces
    • F27D11/02—Ohmic resistance heating
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1339—Gaskets; Spacers; Sealing of cells
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/20—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater

Definitions

  • the present invention relates to a heating device used for heat treatment of various plate members or sheet members such as glass substrates, semiconductor lead frames, other metal plates and synthetic resin plates.
  • a large number of shelf heaters composed of double-sided heating type far-infrared panel heaters that radiate far-infrared rays from both sides by heating a heat dissipation plate
  • a heating furnace in which a plurality of stages are vertically arranged in a furnace body at regular intervals and each space portion formed between these shelf-like heaters is used as a drying chamber (see Patent Document 1).
  • the heat generated from a large number of shelf-shaped heaters arranged in the vertical direction tends to rise in the heating furnace and collect in the region near the top wall in the furnace, so the temperature in the upper region of the furnace is The temperature becomes higher than the temperature in the lower region of the furnace, and it is extremely difficult to eliminate such a temperature difference between the upper region of the furnace and the lower region of the furnace.
  • Patent Document 2 discloses a plurality of heating walls that are arranged to face each other at a distance in a space surrounded by a heat insulating material, a heating means provided in the heating wall, and a distance between the heating walls.
  • a plurality of heat transfer wall bodies that are spaced apart from each other, a plurality of heat radiating members that are arranged in a shelf shape between the heat transfer wall bodies, and a heat radiating member that is provided between heat radiating members that are vertically adjacent to each other.
  • Disclosed is a heating device having a heating space for a heating object. Since the heating device disclosed in Patent Document 2 heats by the heating wall provided in the vertical direction, the size of the object to be heated that can be accommodated in the heating space is limited. Since the technique disclosed in Patent Document 2 does not assume that a plate-shaped or sheet-shaped object to be heated having a large area is uniformly heated, the temperature is uniformly heated in the plane of the object to be heated having a large area. Is difficult to do.
  • the problem to be solved by the present invention is to provide a heating device capable of uniformly heating a large area plate-shaped or sheet-shaped object to be heated at low cost.
  • the heating device of the present invention a plurality of heating plates arranged at intervals in the vertical direction, A heating space defined by the heating surfaces of the heating plate facing each other in the up-down direction, for containing an object to be heated,
  • Each of the heating plates is A rectangular metal plate, A plurality of heating element elements built in the metal plate and having heating wires wired therein;
  • the plurality of heat generating elements are arranged in a first direction of the metal plate, and extend in a second direction orthogonal to the first direction, In the first direction, the plurality of heating element elements have a changed width or a changed arrangement interval, In the second direction, the wiring density of the heating line is changed in each of the plurality of heating elements.
  • the heating space is defined between the opposing heating plates, and the configuration of the heating element incorporated in the heating plate is optimized, so that a large-area plate-shaped or sheet-shaped object to be heated can be made uniform. Can be heated.
  • FIG. 4 is a side view showing, in an enlarged manner, a portion surrounded by an ellipse indicated by an arrow B in FIG. 3, showing a state where an object to be heated is set in a heating space of the heating device shown in FIG. 1.
  • FIG. 4B is a side view corresponding to FIG. 4A, showing a state where the object to be heated is set in the heating space of the heating device shown in FIG. 1.
  • FIG. 4B is a side view corresponding to FIG.
  • FIG. 4A showing how the object to be heated is taken out from the heating space of the heating device shown in FIG. 1.
  • the front view of the heating plate shown in FIG. The top view which shows notionally the wiring of the heating wire element installed in the inside of the heating plate shown in FIG.
  • is a schematic view of a rod-shaped heater installed inside the heating plate shown in FIG. 8.
  • FIG. 3 is an exploded perspective view showing an object to be heated, a guide member for guiding the object to be heated into a heating space, and a heating plate.
  • FIG. 6 is a perspective view showing a state in which pins are erected on the heating element so that the object to be heated does not directly contact the heating surface of the heating plate in the heating space.
  • FIG. 4 is an exploded perspective view conceptually showing that the object to be heated is fixed to the frame body and guided to the heating space along the guide member when the object to be heated is in the form of a sheet. Pins are erected on the heating plate corresponding to the position of the jig so that the frame does not come into direct contact with the heating plate in the heating space when the sheet-shaped object to be heated is fixed to the frame.
  • FIG. The front view which shows a mode that the heating device shown in FIG.
  • FIG. 1 equips the back of the said heating space with the back plate which has a some gas supply hole for supplying gas in a heating space.
  • the side view which shows a mode that an inert gas is supplied in a heating space.
  • FIG. 6 is a sectional view taken along line CC in FIG. The enlarged view which expands and shows the part enclosed with the circle shown by the arrow D in FIG.
  • the heating device 1 has a plurality of rectangular heating plates 10 arranged at equal intervals in the vertical direction, and has a plate shape defined by the opposing heating plates 10, 10. Alternatively, it has a heating space 30 for accommodating the sheet-shaped object to be heated 20. In addition, it has a temperature control device 40 for controlling the temperature of each heating plate 10.
  • the heating plates 10 are arranged at equal intervals in the vertical direction, the present invention is not limited to this and the heating plates 10 may not be provided at equal intervals.
  • FIG. 1 shows the front surface of the heating device 1.
  • the plurality of heating plates 10 have their left and right end portions on the front surface side supported by a pair of left and right support plates 50L and 50R, and also have their left and right end portions on the back surface side. Similarly, it is supported by a pair of left and right support plates 50L and 50R.
  • Each of the pair of support plates 50L and 50R on the front side and the back side is disposed so as to face each other, and a plurality of grooves 51 having a rectangular cross section are vertically spaced at equal intervals (the height of the heating space 30 is higher than the heating space 30). It is formed in the horizontal direction (see FIGS. 1 and 2).
  • the left and right end portions of the heating plate 10 on the front surface side and the rear surface side are respectively inserted into the plurality of grooves 51, and the respective heating plates 10 are positioned in the vertical direction.
  • the object to be heated housed in the heating space 30 is heated by the upper and lower heating plates 10.
  • the front side and the back side of the heating space 30 are opened, and both side surfaces of the heating space 30 are also opened between the support plates 50L and 50L and between the support plates 50R and 50R. That is, the heating space 30 is open on all four sides.
  • guide members 60L and 60R having L-shaped cross sections for guiding the object 20 to be heated into the heating space 30 are not shown slightly above the groove 51. It is fixed using screws or the like (see FIGS. 1 to 3 and FIG. 11).
  • the guide members 60L and 60R are horizontally arranged in the front-rear direction L (see FIG. 3) of the heating device 1.
  • Guide members 61L and 61R for smoothly guiding the object 20 to be heated into the heating space 30 are attached to the front side of the guide members 60L and 60R (the front side of the heating device 1, the left side in FIG. 3).
  • a top plate 71 and a bottom plate 72 are connected to the upper and lower ends of the pair of support plates 50L and 50R on the front side and the back side of the heating device 1, respectively.
  • Shorter leg members 73L and 73R are attached to the lower surface of the bottom plate 72, and the lower end portions of these leg members 73L and 73R are fixed to the middle plate 74.
  • Longer leg members 75L and 75R are attached to the lower surface of the intermediate plate 74, and the lower ends of these leg members 75L and 75R are fixed to a base 76.
  • the pair of left and right support plates 50L and 50R on the front side of the heating device 1 and the pair of left and right support plates 50L and 50R on the back side thereof are made of stainless steel, and include a top plate 71, a bottom plate 72, leg members 73L and 73R, and an intermediate plate. 74, the leg members 75L and 75R, and the base 76 are preferably formed of stainless steel of the same material as that of the pair of left and right support plates 50L and 50R, but not limited to this, and aluminum or aluminum alloy (or radiant heat). It may be formed of aluminum or an aluminum alloy) which has been subjected to a dull surface treatment to suppress divergence.
  • the plate-shaped object to be heated 20 is horizontally inserted into the heating space 30 from the guiding members 61L and 61R sides.
  • the object to be heated 20 is heated while being sandwiched between the upper and lower heating plates 10.
  • the article-to-be-heated 20 is horizontally carried out from the opening on the back side opposite to the guiding members 61L and 61R.
  • the heating plate 10 of the present embodiment incorporates three heating element elements 11A, 11B and 11C.
  • the direction in which the heating element elements 11A, 11B, 11C are arranged is referred to as an arrangement direction L (first direction), and the extending direction of the heating element elements 11A, 11B, 11C is extended direction W (second direction).
  • Each of the heating element 11A, 11B, 11C is a so-called surface in which the heating wires 13A, 13B, 13C are folded back in a zigzag shape on the electrically insulating sheet-like material 12A, 12B, 12C such as substantially rectangular mica. Heater.
  • the heating elements 11A, 11B, 11C have wiring densities of the heating lines 13A, 13B, 13C in the end regions W1, W1 on both sides of the central region W2 in the extending direction W of the sheet-like materials 12A, 12B. Is high. Regarding the width of the heating element 11A, 11B, 11C in the arrangement direction L, the heating element 11B in the central region L2 is relatively wide, and the widths of the heating elements 11A, 11C in the end regions L1 on both sides are relatively large. Is becoming narrower.
  • the heating elements 11A and 11C have the same configuration, and the distributions of width and wiring density are also the same.
  • the heating plate 10 has a configuration in which heating element elements 11A, 11B, 11C are sandwiched from both sides thereof by metal plates 15A, 15B of stainless alloy or the like.
  • the metal plates 15A and 15B have their peripheral edges joined to each other by welding or the like.
  • the metal plates 15A and 15B forming both sides of the heating plate 10 have the same temperature distribution.
  • the heating plate 10 has a plurality of heating element elements built therein, and the heating wires of the heating element elements are arranged from one end to the other end in the extending direction W. Then, by changing the width of the heating element in the arrangement direction L and changing the wiring density in the extending direction W, the in-plane distribution of the heat generation amount of the heating plate 10 is received from the environment in which the heating plate 10 is installed. It is capable of responding to disturbances. By optimizing the in-plane distribution of the heat generation amount of the heating plate 10 according to the environmental disturbance, and by combining it with the above-mentioned temperature control device 40, it is possible to realize high in-plane uniformity of the temperature of the heating plate 10.
  • the configuration of the heating element of the heating plate 10 is an example, and it goes without saying that various modifications can be made according to environmental disturbance.
  • Each of the heating plates 10 is provided with temperature sensors 14A and 14B including thermocouples and the like.
  • the temperature sensor 14A is provided at the center Ct of the heating element 11B in the array direction L, and the temperature sensor 14B is provided at substantially the center of the heating element 11A in the one end region L1.
  • the number of temperature sensors is not limited to this, but it is necessary to provide at least one temperature sensor on one heating plate 10.
  • No temperature sensor is provided in the heating element 11C.
  • the heating element 11C is formed symmetrically with the heating element 11A, and has the same size and structure as the heating element 11A.
  • the temperature distribution on the heating element 11C can be estimated from the detected temperature of the heating element 11A. That is, the number of temperature sensors can be reduced by making the arrangement and configuration of the plurality of heating element elements symmetrical with respect to the respective center lines in the arrangement direction L and the extending direction W.
  • a power supply cable 16 for supplying a current to the heating wires 13A, 13B, 13C is led to the outside, and the temperature sensors 14A, 14B are controlled by the temperature.
  • the cable 17 for connecting to the adjusting device 40 is also led out from one end surface of the heating plate 10 in the extending direction W. This is a great advantage because the power cables 16 and the cables 17 do not interfere with the heating plates 10 when the heating plates 10 are stacked.
  • the temperature control device 40 shown in FIG. 1 is electrically connected to the heating lines 13A, 13B, 13C of each heating plate 10, and independently controls the electric power supplied to each heating line 13A, 13B, 13C. It is possible.
  • the temperature adjusting device 40 includes a plurality of heating element elements of the plurality of heating plates 10 so that the temperatures detected by the temperature sensors 14A and 14B provided on the plurality of heating plates 10 follow the target temperature.
  • the heat generation amounts of 11A, 11B, and 11C are independently controlled.
  • the temperature control device 40 relatively reduces the heat generation amount of each of the heating element elements 11A, 11B, 11C of the heating plate 10 arranged above, and the heating element elements 11A, 11B of the heating plate 10 arranged below, The heat generation amount of each of 11C is relatively increased, and the power supply is controlled so that all the temperatures of the plurality of heating plates 10 are made uniform. As a result, the large-area plate-shaped or sheet-shaped object to be heated 20 can be uniformly heated in all the heating spaces 30 of the heating device 1.
  • the heating element 11A, 11B, 11C built in the heating plate 10 may be, for example, a planar heater or a strip heater described below.
  • the planar heater include the following two types depending on the material and shape of the heating wire (heating wire).
  • a wire-shaped heating wire is wound around an insulator or is wired on an insulator plane. It was done. In the case of the type in which the wire is wound around the insulator, the dense and fine winding can be performed by changing the winding pitch.
  • the intimate surface can be secured by the layout of the wire.
  • Strip type also called tape type
  • Material Ni-Cr system (Nichrome wire), Fe-Cr-Al system (iron black wire), stainless steel wire, etc.
  • a belt-shaped heat generating wire is wound around the insulator or is laid flat in a sheet shape by etching. It is a thing.
  • intimate winding is possible by changing the winding pitch.
  • a rough surface can be realized by the pattern layout.
  • the heating elements 11A, 11B, 11C are divided into three regions, that is, the central region W2 where the wiring density of the heating wires 13A, 13B, 13C is sparse and the end regions W1 and W1 on both sides where the wiring density is dense. Although it is formed, needless to say, it may be formed in more regions. Further, the number of heating elements forming the heating plate 10 is not limited to three, and four or more heating elements may be formed side by side. Further, regarding the wiring density of the heating lines 13A, 13B, 13C, the end regions W1 on both sides are made denser stepwise as compared with the central region W2 in the width direction. Of course, it is okay to make it gradually close.
  • the planar heater is interposed between the two metal plates, but the rod heater may be incorporated in one metal plate.
  • a plurality of holes 102 are arranged in the arrangement direction L on one substantially rectangular metal plate 101, and these holes extend in the extending direction W orthogonal to the arrangement direction L. Extends to.
  • a rod-shaped heater 103 is inserted into each of the holes 102.
  • the arrangement interval of the rod-shaped heaters 103 in the arrangement direction L is changed so as to be gradually narrowed from the center Ct to both ends E thereof.
  • the rod-shaped heaters 103 are arranged symmetrically with respect to the center Ct.
  • the plurality of holes 102 are preferably through holes, but needless to say, may not be through holes and may be appropriately determined in consideration of the performance of the rod-shaped heater 103 and the like.
  • the wiring density of the heating wire 103A of the rod-shaped heater 103 in the end regions W1 and W1 on both sides of the central region W2 is higher than that in the central region W2. ..
  • a plurality of rod-shaped heaters 103 as heating elements incorporated in the heating plate 100 are provided, and each rod-shaped heater 103 is arranged from one end to the other end in the extending direction W of the heating plate 100.
  • the in-plane distribution of the heat generation amount of the heating plate 100 is changed from the environment in which the heating plate 100 is installed by changing the arrangement interval of the heating element in the arrangement direction L and changing the wiring density in the extending direction W. It is capable of responding to external disturbances.
  • the heating plate 100 is provided with temperature sensors 104A and 104B at the center Ct in the arrangement direction L and at one end.
  • the temperature sensors 104A and 104B may be embedded in the heating plate 100 or may be fixed to the surface of the heating plate 100.
  • the end regions W1 on both sides are made denser stepwise as compared with the central region W2, but gradually from the center in the width direction to both ends. Of course, it may be dense.
  • the rod-shaped heater 103 An example of the rod-shaped heater structure is as follows. 1) Bobbin winding type A wire-shaped heating wire is wound around the outer periphery of a magnesium oxide bobbin. According to this, by winding it around the bobbin, it is possible to handle a thin heating wire, so that the capacity range can be set large, and the heating wire can be stably fixed, so that the entire heater can be drawn and high temperature specifications are possible. .. 2) Air core type A wire-shaped heating wire is molded into a coil without a bobbin. According to this, since it is coil-shaped, the mechanical strength of the heating wire whose shape is stable after molding is required, so that the range of heating capacity is small. In both cases, powdery magnesium oxide is interposed between the heating element and the outer peripheral cylindrical metal for insulation.
  • the object to be heated 20 may be a sheet-shaped object or a plate-shaped object.
  • the object to be heated 20 is inserted into the heating space 30 by a crane, a robot arm or the like (not shown).
  • the left and right guiding members 61L and 61R guide the object to be heated 20 into the heating space 30 so as not to damage it.
  • the article to be heated 20 will be described.
  • Hard type also called board type
  • This type of object to be heated (work) can be directly put in a furnace and heated.
  • the holding method in the furnace is such that the holding component hits a portion that may come into contact with the object to be heated (work). If it is a substrate, it indicates that the discarded substrate portion is held.
  • the holding component is a guide for guiding or a pin installed on the upper surface of the heating plate 10 described later. This type of work can be directly held by the guide members 60L and 60R described above.
  • Soft type also called sheet type It is a sheet with a soft waist. Targets are films, foils, and rubber sheets. Due to the handling, this type of object to be heated (workpiece) cannot be placed directly in the furnace, so it is placed in a jig and heated.
  • the holding method in the furnace indicates holding the jig.
  • the holding parts are the same as in 1) above.
  • FIG. 12 shows that when the object 20 to be heated is a sheet, the object 20 to be heated is inserted into the heating space 30 so as not to come into direct contact with the heating plates 10 and 100.
  • a plurality of pins 81 are erected at equal intervals in a row in the longitudinal direction.
  • FIG. 13 shows that when the object to be heated 20 is a flexible sheet, the peripheral edge of the object to be heated 20 is fixed to a jig 82 having a rectangular frame shape to cure the object to be heated 20.
  • the tool 82 can be placed in the heating space 30 while being attached to the tool 82.
  • FIG. 14 is a side view of the heating element 20 so that the object 20 to be heated fixed to the jig 82 as shown in FIG.
  • a plurality of pins 81 are erected upright in a row with the longitudinal direction thereof facing the same.
  • the heating space 30 for containing the object to be heated 20 is uniformly heated from above and below by the respective heating plates 10, and the inside of each heating space 30 is evenly heated. ..
  • the heating device 1 of the present embodiment may further include gas supply means 90 for supplying an inert gas or a specific gas into the plurality of heating spaces 30 (see FIG. 17).
  • the gas supply means 90 is provided with an ejection nozzle device 92 having a plurality of ejection ports 91 in a horizontal row at the opening on the back side of each heating space 30.
  • Each of the ejection nozzle devices 92 has a box shape extending in the width direction W, and a plurality of ejection ports 91 are formed at equal intervals on the surface on the heating space 30 side.
  • Gas is supplied from a gas supply source (not shown) from the back surface of each of the ejection nozzle devices 92 via a supply pipe 93.
  • the gas When the gas is supplied, the gas is evenly dispersed right and left in the ejection nozzle device 92, and the gas is evenly ejected from the ejection ports 91. Since the supplied gas can replace the air in the heating space 30 with an inert gas or a specific gas, it is possible to prevent the object to be heated 20 from being oxidized by the introduction of the inert gas or to introduce the specified gas into the heated space 30.
  • the reaction can be used to perform surface treatment on the article to be heated 20.
  • a plurality of heating plates 10 or 100 installed in a shelf shape are supported by support plates, and between the support plates, that is, the front, back, left and right of the device are opened.
  • the guide member 60 for holding the object to be heated 20 is given as an example, but the present invention is not limited to this.
  • a holding member that holds the object to be heated 20 from above and below may be supported by the support plate 50L.
  • 50R, holding grooves can be formed directly in the support plates 50L, 50R to hold the object 20 to be heated by the support plates 50L, 50R.
  • the heating device according to the present invention can be widely used in the industrial field for heat-treating various plate members such as glass substrates, semiconductor lead frames, other metal plates and synthetic resin plates, and sheet members.
  • Heating Device 10 Heating Plate 11A, 11B, 11C Heating Element 12A, 12B, 12C Sheet-like Material 13A, 13B, 13C Heating Wire 14A, 14B Temperature Sensor 15A, 15B Metal Plate 16 Power Cable 17 Cable 20 Heated Object 30 Heating space 40 Temperature control device 50L, 50R Support plate 51 Groove 60L, 60R Guide member 61L, 61R Induction member 71 Top plate 72 Bottom plate 73L, 73R Leg member 74 Middle plate 75L, 75R Leg member 76 Base 81 pin 82 Jig 83L , 83R Side support plate 90 Gas supply means 91 Jet outlet 92 Jet nozzle device 93 Supply pipe 100 Heating plate 101 Metal plate 102 Hole 103 Rod heater 103A Exothermic line 104A, 104B Temperature sensor W Extending direction L Arranging direction

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Mathematical Physics (AREA)
  • General Engineering & Computer Science (AREA)
  • Resistance Heating (AREA)
  • Control Of Resistance Heating (AREA)
  • Surface Heating Bodies (AREA)
  • Heating, Cooling, Or Curing Plastics Or The Like In General (AREA)
  • Liquid Crystal (AREA)
  • Furnace Details (AREA)

Abstract

La présente invention concerne un dispositif de chauffage qui permet d'obtenir une uniformité de température élevée dans un plan d'un objet en forme de plaque ou de feuille de grande surface à chauffer. Ce dispositif de chauffage comprend une pluralité de plaques de chauffage disposées verticalement à intervalles, et un espace de chauffage délimité par des surfaces chauffantes de plaques de chauffage se faisant face verticalement. Chacune des plaques de chauffage a une plaque métallique rectangulaire, et une pluralité d'éléments chauffants (11A-11C) qui sont intégrés dans la plaque métallique et sur lesquels des fils chauffants (13A-13C) sont acheminés. Les éléments chauffants (11A-11C) sont agencés dans une direction d'agencement L de la plaque métallique, et s'étendent chacun dans une direction d'extension W orthogonale à la direction d'agencement L. La pluralité d'éléments chauffants (11A-11C) varient en largeur dans la direction d'agencement L, et dans la direction d'extension W, les densités d'acheminement respectives des fils chauffants (13A-13C) de la pluralité d'éléments chauffants (11A-11C) varient.
PCT/JP2019/028381 2018-11-16 2019-07-19 Dispositif de chauffage et plaque de chauffage WO2020100347A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2020556592A JP7372684B2 (ja) 2018-11-16 2019-07-19 加熱装置および加熱プレート
JP2023174199A JP2023175950A (ja) 2018-11-16 2023-10-06 加熱装置および加熱プレート

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JP2018-215360 2018-11-16
JP2018215360 2018-11-16

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WO2020100347A1 true WO2020100347A1 (fr) 2020-05-22

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JP2002158081A (ja) * 2000-11-17 2002-05-31 Sakaguchi Dennetsu Kk ヒーターユニット
JP2003307738A (ja) * 2002-04-15 2003-10-31 Canon Inc 液晶素子の製造方法及び製造装置
JP2005352306A (ja) * 2004-06-11 2005-12-22 Kyushu Nissho:Kk 加熱装置
JP2010249923A (ja) * 2009-04-13 2010-11-04 Hitachi Displays Ltd 液晶表示装置および液晶表示装置のマザー基板の製造方法
JP2015016264A (ja) * 2013-07-12 2015-01-29 住友電気工業株式会社 加熱調理プレート
WO2018097323A1 (fr) * 2016-11-28 2018-05-31 リンテック オブ アメリカ インコーポレーテッド Feuille conductrice pour moulage tridimensionnel

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