WO2020077902A1 - 基板输送装置 - Google Patents

基板输送装置 Download PDF

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Publication number
WO2020077902A1
WO2020077902A1 PCT/CN2019/071723 CN2019071723W WO2020077902A1 WO 2020077902 A1 WO2020077902 A1 WO 2020077902A1 CN 2019071723 W CN2019071723 W CN 2019071723W WO 2020077902 A1 WO2020077902 A1 WO 2020077902A1
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WIPO (PCT)
Prior art keywords
carrier
substrate
conveying device
bearing seat
base
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/CN2019/071723
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English (en)
French (fr)
Inventor
胡亮亮
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shenzhen China Star Optoelectronics Semiconductor Display Technology Co Ltd
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Shenzhen China Star Optoelectronics Semiconductor Display Technology Co Ltd
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Publication of WO2020077902A1 publication Critical patent/WO2020077902A1/zh
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass

Definitions

  • the invention relates to the field of substrate transportation, and in particular to a substrate transportation device.
  • the preparation of electronic products such as liquid crystal display panels, semiconductor devices, or solar cells all require multiple processes on various substrates, such as etching, sputtering, and cleaning processes. These processes may be performed by a single process machine. carried out. Since multiple processes must be performed, the substrate must be picked and placed, and then transferred from one process machine to the next process machine.
  • the substrate carrier (Carrier) on the process machine is prone to wear or deform its own mechanism due to long-term use, so that its position on the process machine deviates from the originally set position. When picking and placing substrates, especially glass substrates, fragments may be caused due to the deviation of the substrate carrier. This problem not only affects production capacity, but also increases manufacturing costs.
  • the substrate carrier (Carrier) on the process machine is prone to wear or deform its own mechanism due to long-term use, so that its position on the process machine deviates from the originally set position.
  • substrates especially glass substrates
  • fragments may be caused due to the deviation of the substrate carrier. This problem not only affects production capacity, but also increases manufacturing costs.
  • An object of the present invention is to provide a substrate conveying device, which can improve the accuracy of substrate pick-and-place and reduce the chance of substrate fragmentation.
  • the present invention provides a substrate conveying device, characterized in that it includes: a base; a bearing seat, which is movably arranged on the base for carrying a substrate, the bearing seat has a first A side edge and a second side edge opposite to the first side edge; a transmission mechanism, abutting the bearing seat, for driving the bearing seat into and out of the base; and a positioning mechanism, including: at least one A blocking element is arranged on the base and is close to the first side of the bearing base; and at least one lifting element is arranged on the base and is close to the second side of the bearing base for moving the The bearing seat even abuts the blocking element, and is used to move the bearing seat downward to abut the transmission mechanism.
  • the transmission mechanism includes a plurality of spaced rollers, and the plurality of rollers abut against the second side of the carrier.
  • the lifting element includes a pneumatic cylinder.
  • the carrier is a metal frame.
  • the substrate is a glass substrate.
  • the positioning mechanism includes two blocking elements, and the two blocking elements are respectively disposed at two corners of the base near the first side of the carrier.
  • the lifting element abuts the second side of the carrier.
  • the positioning mechanism includes two lifting elements, and the two lifting elements respectively abut two opposite ends of the second side of the carrier.
  • the present invention provides a substrate conveying device, characterized in that it includes: a base; a bearing seat, which is movably arranged on the base for carrying a substrate, and the bearing seat has a first A side edge and a second side edge opposite to the first side edge; a transmission mechanism, abutting the bearing seat, for driving the bearing seat into and out of the base; and a positioning mechanism, including: at least one A blocking element, which is arranged on the base and close to the first side of the carrier; and at least one lifting element, which is arranged on the base and close to the second side of the carrier, for moving the The bearing seat even abuts the blocking element, and is used to move the bearing seat to abut the transmission mechanism.
  • the at least one lifting element is used to move the bearing seat upwards so as to abut the blocking element.
  • the at least one lifting element is used to move the bearing base downwards so as to abut the transmission mechanism.
  • the transmission mechanism includes a plurality of spaced rollers, and the plurality of rollers abut against the second side of the carrier.
  • the lifting element includes a pneumatic cylinder.
  • the carrier is a metal frame.
  • the substrate is a glass substrate.
  • the positioning mechanism includes two blocking elements, and the two blocking elements are respectively disposed at two corners of the base near the first side of the carrier.
  • the lifting element abuts the second side of the carrier.
  • the positioning mechanism includes two lifting elements, and the two lifting elements respectively abut two opposite ends of the second side of the carrier.
  • the substrate conveying device provided by the present invention mainly restores the bearing seat to the originally set position through the setting of the positioning mechanism, so that the accuracy of substrate placement and placement can be improved, and the chance of substrate fragmentation is reduced, which not only can increase the production capacity, but also Can reduce production costs.
  • Figure 1 is a schematic structural view of a substrate transport device provided by an embodiment of the present invention.
  • Figure 2 is a schematic structural view of the substrate transport device of Figure 1 in a first use state
  • Figure 3 is a schematic structural view of the substrate transport device of Figure 1 in a second use state
  • FIG. 4 is a schematic structural view of the substrate transport device of FIG. 1 in a third use state.
  • FIG. 1 shows a schematic structural diagram of a substrate conveying device provided by an embodiment of the present invention.
  • the substrate conveying device 1 includes: a base 10, a bearing base 12, a transmission mechanism 14, and a positioning mechanism 16.
  • the carrier 12 is movably disposed on the base 10 for supporting the substrate 20 (as shown in FIGS. 3 and 4).
  • the carrier 12 is schematically indicated by a dotted frame to represent its occupied area.
  • the carrier 12 has a first side 121 and a second side 122 opposite to the first side 121.
  • the carrier 12 is a metal frame.
  • the transmission mechanism 14 abuts on the carrier 12 for driving the carrier 12 into and out of the base 10.
  • the transmission mechanism 14 includes a plurality of rollers 140 arranged at intervals, and the plurality of rollers 140 abut on the second side 122 of the carrier 12.
  • the positioning mechanism 16 includes: at least one blocking element 160 and at least one lifting element 162.
  • the blocking element 160 is disposed on the base 10 and close to the first side 121 of the carrier 12.
  • the positioning mechanism 16 includes two blocking elements 160 respectively disposed at two corners 100 of the base 10 near the first side 121 of the carrier 12, and both blocking elements 160 are located on the positioning line A-A.
  • the positioning line A-A also indicates the originally set position of the carrier 12.
  • FIG. 1 shows that the current position of the carrier 12 has deviated from the positioning line A-A, which means that the position of the carrier 12 needs to be corrected to the alignment line A-A.
  • the lifting element 162 is disposed on the base 10 and is close to the second side 122 of the bearing base 12 for moving the bearing base 12 upward to abut against the blocking element 160 and for moving the bearing base 12 downward to abut the transmission mechanism 14.
  • the lifting element 162 includes a pneumatic cylinder (Cylinder), and the lifting element 162 abuts against the second side 122 of the carrier 12.
  • the positioning mechanism 16 includes two lifting elements 162. The two lifting elements 162 respectively abut two opposite ends of the second side 122 of the carrier 12.
  • the application of the present invention is not limited to the above example, and the lifting element 162 may not abut the second side 122 of the carrier 12.
  • FIG. 2 is a schematic structural view of the substrate transport device of FIG. 1 in a first use state.
  • the lifting element 162 is driven to move the carrier 12 upwards so as to abut against the blocking element 160, so that the carrier 12 is aligned with the positioning line A-A, representing that the carrier 12 returns to the previously set position.
  • the carrier 12 and the transmission mechanism 14 are in a separated state.
  • FIG. 3 is a schematic structural view of the substrate transport device of FIG. 1 in a second use state.
  • the substrate 20 since the carrier 12 is already located at the originally set position on the base 10, when the robot arm (not shown) picks and places the substrate 20 on the carrier 12, the substrate 20 can be avoided Fragments are formed due to interference with the carrier 12.
  • the substrate 20 may be a glass substrate.
  • FIG. 4 is a schematic structural view of the substrate transport device of FIG. 1 in a third use state.
  • the substrate 20 is now placed on the carrier 12 intact. Since the substrate 20 is about to be transported to the next process machine, the lifting element 162 is driven to move the carrier 12 downward so that Borne contact with the transmission mechanism 14. At the same time, it can be observed that the carrier 12 has been separated from the blocking element 160.
  • the substrate conveying device provided by the present invention mainly restores the bearing seat to the originally set position through the setting of the positioning mechanism, which can improve the accuracy of substrate pick-and-place and reduce the chance of substrate chipping. Can increase production capacity, and can reduce production costs.
  • the substrate conveying device provided by the present invention mainly restores the bearing seat to the originally set position through the setting of the positioning mechanism, so that the accuracy of substrate placement and placement can be improved, and the chance of substrate fragmentation is reduced, which not only can increase the production capacity, but also Can reduce production costs.

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

一种基板输送装置，包括底座（10）、承载座（12）、传动机构（14）及定位机构（16），承载座（12）可移动地设置于底座（10）上，用于承载基板（20），承载座（12）具有第一侧边（121）及与第一侧边（121）相对的第二侧边（122），传动机构（14）抵接于承载座（12），用于传动承载座（12）进出底座（10），定位机构（16）包括至少一阻挡元件（160）和至少一升降元件（162），阻挡元件（160）设置于底座（10）上且靠近承载座（12）的第一侧边（121），升降元件（162）设置于底座（10）上且靠近承载座（12）的第二侧边（122），用于移动承载座（12）以至抵靠于阻挡元件（160），以及用于移动承载座（12）以至抵接于传动机构（14）。

Description

基板输送装置 技术领域
本发明涉及基板输送领域，尤其涉及一种基板输送装置。
 背景技术
目前液晶显示面板、半导体元件或太阳能电池等电子产品的制备皆需要对各种基板执行多重制程，例如：蚀刻、溅镀(Sputtering)以及清洁等制程，这些制程可能分别由单一的制程机台来执行。由于必须进行多重制程，基板便必须被取放，然后从一制程机台被输送至下一制程机台。制程机台上的基板承载座(Carrier)因长时间的使用容易造成自身机构磨损或是变形，如此使得它在制程机台上的位置偏离原本被设定的位置。当取放基板时，尤其是玻璃基板，便可能因基板承载座的位置偏离而造成破片，此问题不仅影响产能，也使制造成本增加。
因此，有必要提供一种基板输送装置，以解决上述基板破片之问题。
 技术问题
制程机台上的基板承载座(Carrier)因长时间的使用容易造成自身机构磨损或是变形，如此使得它在制程机台上的位置偏离原本被设定的位置。当取放基板时，尤其是玻璃基板，便可能因基板承载座的位置偏离而造成破片，此问题不仅影响产能，也使制造成本增加。
 技术解决方案
本发明的目的在于提供一种基板输送装置，可以提升基板取放的精准度，且降低基板破片的机会。
为实现上述目的，本发明提供一种基板输送装置，其特征在于，包括:一底座；一承载座，可移动地设置于所述底座上，用于承载一基板，所述承载座具有第一侧边及与所述第一侧边相对的第二侧边；一传动机构，抵接于所述承载座，用于传动所述承载座进出所述底座；以及一定位机构，包括：至少一阻挡元件，设置于所述底座上且靠近所述承载座的第一侧边；以及至少一升降元件，设置于所述底座上且靠近所述承载座的第二侧边，用于向上移动所述承载座以至抵靠于所述阻挡元件，以及用于向下移动所述承载座以至抵接于所述传动机构。
在一些实施方式中，所述传动机构包括多个间隔设置的滚轮,所述多个滚轮抵接于所述承载座的第二侧边。
在一些实施方式中，所述升降元件包括气压缸。
在一些实施方式中，所述承载座为金属框体。
在一些实施方式中，所述基板为玻璃基板。
在一些实施方式中，所述定位机构包括二所述阻挡元件，所述二阻挡元件分别设置于所述底座靠近所述承载座的第一侧边的二角落。
在一些实施方式中，所述升降元件抵靠于所述承载座的第二侧边。
在一些实施方式中，所述定位机构包括二所述升降元件，所述二升降元件分别抵靠于所述承载座的第二侧边的二相对端。
为实现上述目的，本发明提供一种基板输送装置，其特征在于，包括:一底座；一承载座，可移动地设置于所述底座上，用于承载一基板，所述承载座具有第一侧边及与所述第一侧边相对的第二侧边；一传动机构，抵接于所述承载座，用于传动所述承载座进出所述底座；以及一定位机构，包括：至少一阻挡元件，设置于所述底座上且靠近所述承载座的第一侧边；以及至少一升降元件，设置于所述底座上且靠近所述承载座的第二侧边，用于移动所述承载座以至抵靠于所述阻挡元件，以及用于移动所述承载座以至抵接于所述传动机构。
在一些实施方式中，所述至少一升降元件用于向上移动所述承载座以至抵靠于所述阻挡元件。
在一些实施方式中，所述至少一升降元件用于向下移动所述承载座以至抵接于所述传动机构。
在一些实施方式中，所述传动机构包括多个间隔设置的滚轮,所述多个滚轮抵接于所述承载座的第二侧边。
在一些实施方式中，所述升降元件包括气压缸。
在一些实施方式中，所述承载座为金属框体。
在一些实施方式中，所述基板为玻璃基板。
在一些实施方式中，所述定位机构包括二所述阻挡元件，所述二阻挡元件分别设置于所述底座靠近所述承载座的第一侧边的二角落。
在一些实施方式中，所述升降元件抵靠于所述承载座的第二侧边。
在一些实施方式中，所述定位机构包括二所述升降元件，所述二升降元件分别抵靠于所述承载座的第二侧边的二相对端。
 有益效果
本发明提供的一种基板输送装置, 主要通过定位机构的设置来让承载座回复至原先设定的位置，如此可以提升基板取放的精准度，降低基板破片的机会，不但可以提升产能，而且能够降低制作成本。
 附图说明
为让本发明的特征以及技术内容能更明显易懂，请参阅以下有关本发明的详细说明与附图，然而附图仅提供参考用，并非用来对本发明加以限制。
图1为本发明实施例提供的一种基板输送装置的结构示意图;
图2为图1的基板输送装置于第一使用状态的结构示意图;
图3为图1的基板输送装置于第二使用状态的结构示意图;
图4为图1的基板输送装置于第三使用状态的结构示意图。
 本发明的实施方式
为了使本发明的目的、技术手段及其效果更加清楚明确，以下将结合附图对本发明作进一步地阐述。应当理解，此处所描述的实施例仅仅是本发明一部分实施例，而不是全部的实施例，并不用于限定本发明。
请参考图1，其示出本发明实施例提供的一种基板输送装置的结构示意图，基板输送装置1包括: 底座10、承载座12、传动机构14及定位机构16。其中，承载座12可移动地设置于底座10上，用于承载基板20(如图3、图4所示)。为了容易理解及说明，将承载座12以虚线框示意性地表示其所占区域。如图1所示，承载座12具有第一侧边121及与所述第一侧边121相对的第二侧边122。在一些实施方式中，承载座12为金属框体。
如图1所示，传动机构14抵接于承载座12，用于传动承载座12进出底座10。在本发明实施方式中，传动机构14包括多个间隔设置的滚轮140,多个滚轮140抵接于承载座12的第二侧边122。
继续参考图1，定位机构16包括：至少一阻挡元件160及至少一升降元件162。阻挡元件160设置于底座10上且靠近承载座12的第一侧边121。在本发明实施方式中，定位机构16包括二个阻挡元件160，分别设置于底座10靠近承载座12的第一侧边121的二角落100，且二阻挡元件160皆位于定位线A-A上。定位线A-A同时表示承载座12的原先设定的位置，图1显示目前承载座12的位置已偏离定位线A-A，亦即代表承载座12的位置需被校正至对齐定位线A-A。升降元件162设置于底座10上且靠近承载座12的第二侧边122，用于向上移动承载座12以至抵靠于阻挡元件160，以及用于向下移动承载座12以至抵接于传动机构14。在一些实施方式中，升降元件162包括气压缸(Cylinder)，且升降元件162抵靠于承载座12的第二侧边122。在本发明实施方式中，定位机构16包括二升降元件162，二升降元件162分别抵靠于承载座12的第二侧边122的二相对端。但本发明的应用不限于上述的举例，升降元件162亦可不抵靠于承载座12的第二侧边122。
图2为图1的基板输送装置于第一使用状态的结构示意图。结合图1来参考图2，升降元件162被驱动而向上移动承载座12以至抵靠于阻挡元件160，如此使得承载座12对齐定位线A-A，代表承载座12回复至原先设定的位置。同时，可观察到承载座12和传动机构14呈分离状态。
图3为图1的基板输送装置于第二使用状态的结构示意图。结合图2来参考图3，由于此时承载座12已位于底座10上原先被设定的位置，因此当机器手臂(未图示)取放基板20于承载座12上时，可避免基板20因与承载座12产生干涉而形成破片。在一些实施方式中，基板20可以为玻璃基板。
图4为图1的基板输送装置于第三使用状态的结构示意图。结合图3来参考图4，此时基板20已完整无损地放置于承载座12上，由于基板20即将被输送至下一制程机台，因此升降元件162被驱动而向下移动承载座12以至抵接于传动机构14。同时，可观察到承载座12已经与阻挡元件160分离。
综上所述，本发明提供的一种基板输送装置, 主要通过定位机构的设置来让承载座回复至原先设定的位置，如此可以提升基板取放的精准度，降低基板破片的机会，不但可以提升产能，而且能够降低制作成本。
应当理解的是，本发明的应用不限于上述的举例，对本领域普通技术人员来说，可以根据上述说明加以改进或变换，所有这些改进和变换都应属于本发明所附权利要求的保护范围。
 工业实用性
本发明提供的一种基板输送装置, 主要通过定位机构的设置来让承载座回复至原先设定的位置，如此可以提升基板取放的精准度，降低基板破片的机会，不但可以提升产能，而且能够降低制作成本。

Claims (18)

  1. 一种基板输送装置,包括:
    一底座；
    一承载座，可移动地设置于所述底座上，用于承载一基板，所述承载座具有第一侧边及与所述第一侧边相对的第二侧边；
    一传动机构，抵接于所述承载座，用于传动所述承载座进出所述底座；以及
    一定位机构，包括：
    至少一阻挡组件，设置于所述底座上且靠近所述承载座的第一侧边；以及
    至少一升降组件，设置于所述底座上且靠近所述承载座的第二侧边，用于向上移动所述承载座以至抵靠于所述阻挡组件，以及用于向下移动所述承载座以至抵接于所述传动机构。
  2. 如权利要求1所述的基板输送装置，其中所述传动机构包括多个间隔设置的滚轮,所述多个滚轮抵接于所述承载座的第二侧边。
  3. 如权利要求1所述的基板输送装置，其中所述升降组件包括气压缸。
  4. 如权利要求1所述的基板输送装置，其中所述承载座为金属框体。
  5. 如权利要求1所述的基板输送装置，其中所述基板为玻璃基板。
  6. 如权利要求1所述的基板输送装置，其中所述定位机构包括二所述阻挡组件，所述二阻挡组件分别设置于所述底座靠近所述承载座的第一侧边的二角落。
  7. 如权利要求1所述的基板输送装置，其中所述升降组件抵靠于所述承载座的第二侧边。
  8. 如权利要求7所述的基板输送装置，其中所述定位机构包括二所述升降组件，所述二升降组件分别抵靠于所述承载座的第二侧边的二相对端。
  9. 一种基板输送装置,包括:
    一底座；
    一承载座，可移动地设置于所述底座上，用于承载一基板，所述承载座具有第一侧边及与所述第一侧边相对的第二侧边；
    一传动机构，抵接于所述承载座，用于传动所述承载座进出所述底座；以及
    一定位机构，包括：
    至少一阻挡元件，设置于所述底座上且靠近所述承载座的第一侧边；以及
    至少一升降元件，设置于所述底座上且靠近所述承载座的第二侧边，用于移动所述承载座以至抵靠于所述阻挡元件，以及用于移动所述承载座以至抵接于所述传动机构。
  10. 如权利要求9所述的基板输送装置，其中所述至少一升降元件用于向上移动所述承载座以至抵靠于所述阻挡元件。
  11. 如权利要求9所述的基板输送装置，其中所述至少一升降元件用于向下移动所述承载座以至抵接于所述传动机构。
  12. 如权利要求9所述的基板输送装置，其中所述传动机构包括多个间隔设置的滚轮,所述多个滚轮抵接于所述承载座的第二侧边。
  13. 如权利要求9所述的基板输送装置，其中所述升降元件包括气压缸。
  14. 如权利要求9所述的基板输送装置，其中所述承载座为金属框体。
  15. 如权利要求9所述的基板输送装置，其中所述基板为玻璃基板。
  16. 如权利要求9所述的基板输送装置，其中所述定位机构包括二所述阻挡元件，所述二阻挡元件分别设置于所述底座靠近所述承载座的第一侧边的二角落。
  17. 如权利要求9所述的基板输送装置，其中所述升降元件抵靠于所述承载座的第二侧边。
  18. 如权利要求17所述的基板输送装置，其中所述定位机构包括二所述升降元件，所述二升降元件分别抵靠于所述承载座的第二侧边的二相对端。
PCT/CN2019/071723 2018-10-18 2019-01-15 基板输送装置 Ceased WO2020077902A1 (zh)

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CN1922087A (zh) * 2004-03-01 2007-02-28 平田机工株式会社 基板输出输入装置以及基板输出输入方法
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DE102008015982B3 (de) * 2008-03-27 2009-07-30 Grenzebach Maschinenbau Gmbh Verfahren und Vorrichtung zur Fixierung und den Weitertransport stoßempfindlicher Platten in Sputter-Beschichtungsanlagen, Computerprogramm zur Durchführung des Verfahrens und maschinenlesbarer Träger hierzu
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CN1922087A (zh) * 2004-03-01 2007-02-28 平田机工株式会社 基板输出输入装置以及基板输出输入方法
CN101558001A (zh) * 2007-02-20 2009-10-14 株式会社Ihi 基板输送机
KR20140116292A (ko) * 2013-03-21 2014-10-02 서울과학기술대학교 산학협력단 양방향 로봇이송장치
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