WO2020051979A1 - 一种监控装置、静电卡盘和监控方法 - Google Patents

一种监控装置、静电卡盘和监控方法 Download PDF

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Publication number
WO2020051979A1
WO2020051979A1 PCT/CN2018/111199 CN2018111199W WO2020051979A1 WO 2020051979 A1 WO2020051979 A1 WO 2020051979A1 CN 2018111199 W CN2018111199 W CN 2018111199W WO 2020051979 A1 WO2020051979 A1 WO 2020051979A1
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monitoring
side plate
monitoring device
signal
box
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English (en)
French (fr)
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黄北洲
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HKC Co Ltd
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HKC Co Ltd
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Priority to US16/313,135 priority Critical patent/US11269001B2/en
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/12—Testing dielectric strength or breakdown voltage ; Testing or monitoring effectiveness or level of insulation, e.g. of a cable or of an apparatus, for example using partial discharge measurements; Electrostatic testing
    • G01R31/1218—Testing dielectric strength or breakdown voltage ; Testing or monitoring effectiveness or level of insulation, e.g. of a cable or of an apparatus, for example using partial discharge measurements; Electrostatic testing using optical methods; using charged particle, e.g. electron, beams or X-rays

Definitions

  • the present application relates to the field of display technology, and more particularly, to a monitoring device, an electrostatic chuck, and a monitoring method.
  • the displays using active switch control include liquid crystal displays, OLED displays, and the like.
  • the liquid crystal display has many advantages such as a thin body, power saving, and no radiation, and has been widely used.
  • Most of the liquid crystal displays known to the inventors are backlight type liquid crystal displays, which include a liquid crystal panel and a backlight module.
  • the working principle of a liquid crystal panel is to place liquid crystal molecules in two parallel glass substrates, and apply a driving voltage to the two glass substrates to control the rotation direction of the liquid crystal molecules so as to refract the light of the backlight module to generate a picture.
  • OLED displays also known as organic electroluminescence displays, have many advantages such as self-illumination, short response time, high definition and contrast, flexible display and large-area full-color display. . Its superior performance and huge market potential have attracted many manufacturers and research institutions around the world to invest in the production and research and development of OLED display panels.
  • the technical problem to be solved in the present application is to provide a monitoring device, an electrostatic chuck and a monitoring method.
  • this application provides a monitoring device, including:
  • a box with a view window on the box, the monitoring device includes:
  • a monitoring circuit configured to monitor the arc discharge in the box in real time
  • the signal processing circuit is configured to process a signal transmitted by the monitoring circuit and determine whether an abnormal arc discharge occurs.
  • the monitoring device includes an infrared camera and a monitoring probe; the monitoring probe is disposed at the view window, the monitoring probe is electrically connected to the infrared camera, and the infrared camera and The signal processing circuit is electrically connected.
  • the box body is rectangular, there are two monitoring probes, and the monitoring probes are disposed at the diagonal of the box body.
  • the box body is rectangular, and there are four monitoring probes, which are respectively arranged at four corner positions of the box body.
  • the monitoring circuit includes a visible light camera, the visible light camera is disposed at the view window, and the visible light camera is electrically connected to the signal processing circuit.
  • the box body includes four side plates, the four side plates include a first side plate, a second side plate, a third side plate, and a fourth side plate, and the four side plates are connected end to end.
  • Three view windows are evenly distributed on the first side plate, and three view windows are evenly distributed on the third side plate.
  • the fourth side plate has a rectangular groove, and the groove runs through the fourth side plate.
  • the second side plate is opposite to the fourth side plate and is provided with two view windows.
  • the monitoring probe is located on an opposite side plate.
  • the application also discloses a monitoring method including the monitoring device, including:
  • the signal processing circuit is used to process the monitoring signal and compare with the alarm value to determine whether an abnormal arc discharge has occurred.
  • the alarm value is a temperature value
  • the monitoring signal is a temperature signal
  • an alarm is issued when the temperature signal reaches the temperature value
  • the monitoring circuit includes an infrared camera and a monitoring probe; the step of using the monitoring circuit to collect a monitoring signal in the box further includes: after the infrared camera captures the signal of the monitoring probe, generates a thermal image. Like the picture.
  • the step of using the signal processing circuit to process the monitoring signal and comparing it with the alarm value to determine whether an abnormal arc discharge occurs further includes:
  • the inventor's research found that the example machine has no monitoring device. After the product alerts, the naked eye observes the inside of the box through the viewing angle window. Due to the narrow field of view, low viewing angle, and low illumination, it is easy to cause misjudgment and affect subsequent shipments.
  • the monitoring device is added to replace the naked eye observation and real-time monitoring, which is not easy to cause misjudgment.
  • FIG. 1 is a schematic diagram of a monitoring device according to an embodiment of the present application.
  • FIG. 2 is an enlarged schematic view of a view window of a monitoring device box according to an embodiment of the present application
  • FIG. 3 is a schematic diagram of a monitoring device according to another embodiment of the present application.
  • FIG. 4 is a schematic diagram of a monitoring method of a monitoring device according to another embodiment of the present application.
  • FIG. 5 is a schematic diagram of a monitoring method of a monitoring device according to another embodiment of the present application.
  • a monitoring device including:
  • the box body 19 is provided with a view window, and the monitoring device includes:
  • a monitoring circuit configured to monitor the arc discharge in the box body 19 in real time
  • the signal processing circuit is configured to process a signal transmitted by the monitoring circuit to determine whether an abnormal arc discharge occurs;
  • the monitoring device includes an infrared camera and a monitoring probe 14.
  • the box 19 has a rectangular shape, there are two monitoring probes 14, and the monitoring probes 14 are located at the diagonal of the box.
  • the box body 19 includes four side plates.
  • the four side plates include a first side plate 1, a second side plate 2, a third side plate 3, and a fourth side plate 13.
  • the four side plates are connected end to end, and the first side plate 1 There are three view windows evenly distributed.
  • the second side plate 2 is opposite to the fourth side plate 13 and is provided with two view windows.
  • the fourth side plate 13 has a rectangular groove, and the groove runs through the fourth side plate 13 and the third There are three view windows evenly distributed on the side plate 3, and the view windows are the first to eight view windows in the counterclockwise direction, and the monitoring probe 14 is located in the third view window 6 and the eighth view window 11.
  • Conventional dry engraving machine has no monitoring device. After the product alarms, the inside of the box 19 is observed by the naked eye through the viewing angle window. Due to the narrow field of view, low viewing angle and low illumination, it is easy to cause misjudgment and affect subsequent shipments.
  • the monitoring device is added to replace the naked eye observation and real-time monitoring, which is not easy to cause misjudgment.
  • a monitoring device includes:
  • the box body 19 is provided with a view window, and the monitoring device includes:
  • a monitoring circuit configured to monitor the arc discharge in the box in real time
  • the signal processing circuit is configured to process a signal transmitted by the monitoring circuit to determine whether an abnormal arc discharge occurs.
  • the traditional machine does not have a monitoring device. After the product alarms, the inside of the box 19 is observed by the naked eye through the viewing angle window. Due to the narrow field of view, low viewing angle and low illumination, it is easy to cause misjudgment and affect subsequent shipments.
  • the monitoring device is added to replace the naked eye observation and real-time monitoring, which is not easy to cause misjudgment.
  • the monitoring device includes an infrared camera and a monitoring probe 14; the monitoring probe 14 is disposed at a view window, and the monitoring probe 14 is electrically connected to the infrared camera 20; the infrared camera and the signal processing circuit 15 are electrically connected Connected, and the processing result is fed back to the computer 16 for display.
  • ESC arc discharge may be caused due to quality problems or the introduction of foreign objects, resulting in abnormal product quality.
  • a high temperature of thousands of degrees Celsius will be generated.
  • Adding an infrared camera and a monitoring probe 14 can monitor the temperature inside the box in real time.
  • the box body is rectangular, there are two monitoring probes 14, and the monitoring probes 14 are disposed at the diagonal of the box body.
  • the infrared camera has a monitoring probe to monitor the temperature in the box body 19, and at least two monitoring probes 14 are required to monitor the box body according to the coverage area.
  • the two monitoring probes 14 are arranged diagonally, and the viewing angle of the monitoring probes 14 can cover the entire box body 19. From a cost perspective, the two monitoring probes 14 are more cost effective.
  • the box body is rectangular, and there are four monitoring probes, which are respectively corresponding to the four corner positions of the box body.
  • the monitoring circuit includes a visible light camera, the visible light camera is disposed at the view window, and the visible light camera is electrically connected to the signal processing circuit.
  • the four side plates include a first side plate 1, a second side plate 2, a third side plate 3, and a fourth side plate 13.
  • the four side plates are connected end to end, and the first side plate 1 includes three sides.
  • the two view windows are evenly distributed.
  • the second side plate 2 is opposite to the fourth side plate 13 and has two view windows.
  • the fourth side plate 13 has a rectangular groove, and the groove runs through the fourth side plate 13 and the third side plate. 3
  • Eight viewing windows, located on the first, second and third side panels, make it easy to observe and monitor from all angles.
  • the monitoring probe 14 is located in the third view window 6 and the eighth view window 11.
  • the monitoring probe is located in the third view window 6 and the eighth view window 11. These two view windows are arranged diagonally, which can completely cover the entire box.
  • a monitoring method including the above monitoring device including:
  • S43 Use the signal processing circuit to process the monitoring signal and compare with the alarm value to determine whether an abnormal arc discharge has occurred.
  • the monitoring device sets the alarm value, and uses the monitoring circuit to collect the monitoring signal in the box.
  • the signal processing circuit processes the monitoring signal, compares the collected monitoring signal with the alarm value, and determines whether an abnormal arc discharge occurs according to the comparison result.
  • the alarm value is a temperature value and the monitoring signal is a temperature signal.
  • the temperature signal reaches the temperature value, an alarm is issued.
  • the monitoring circuit includes an infrared camera and a monitoring probe 14; the step of using the monitoring circuit to collect the monitoring signal in the box further includes: after the infrared camera captures the signal from the monitoring probe 14 to generate a thermal image Illustration.
  • the infrared camera After the infrared camera captures the signal, it generates a thermal image, which can visually observe the position of the arc discharge and visually.
  • a signal processing circuit is used to process the monitoring signal, and compared with the alarm value to determine whether an abnormal arc discharge occurs.
  • the steps further include:
  • a monitoring method including the above monitoring device including:
  • S53 Use the signal processing circuit to process the temperature signal and compare it with the alarm value to determine whether an abnormal arc discharge has occurred;
  • the monitoring device sets an alarm value and uses a thermal imaging camera to collect the temperature signal inside the box.
  • the signal processing circuit processes the temperature signal, compares the collected temperature signal with the alarm value, and determines whether an abnormal arc discharge occurs according to the comparison result. After an abnormality has occurred, it has been judged that an arc discharge is generated and an alarm is issued while the machine is down. Find and record the arc discharge point based on the thermal image.
  • the panel of the present application may be a TN panel (full name is Twisted Nematic, that is, a twisted nematic panel), an IPS panel (In-PaneSwitcing, plane conversion), a VA panel (Multi-domain Vertica Aignment, multi-quadrant vertical alignment technology), of course , Or other types of panels, applicable.
  • TN panel full name is Twisted Nematic, that is, a twisted nematic panel
  • IPS panel In-PaneSwitcing, plane conversion
  • VA panel Multi-domain Vertica Aignment, multi-quadrant vertical alignment technology

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Radiation Pyrometers (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)

Abstract

一种监控装置、静电卡盘和监控方法，监控装置包括盒体（19）、监控电路和信号处理电路（15），盒体（19）上设有视图窗口；信号处理电路（15）配置为处理监控电路传输的信号。

Description

一种监控装置、静电卡盘和监控方法
本申请要求于2018年9月11日提交中国专利局、申请号为CN 201811055007.8、发明名称为“一种监控装置和监控方法”的中国专利申请的优先权，其全部内容通过引用结合在本申请中。
技术领域
本申请涉及显示技术领域，更具体的说，涉及一种监控装置、静电卡盘和监控方法。
背景技术
这里的陈述仅提供与本申请有关的背景信息，而不必然地构成现有技术。
采用主动开关控制的显示器包括液晶显示器、OLED显示器等。液晶显示器具有机身薄、省电、无辐射等众多优点，得到了广泛的应用。发明人知晓的液晶显示器大部分为背光型液晶显示器，其包括液晶面板及背光模组(Backlight Module)。液晶面板的工作原理是在两片平行的玻璃基板当中放置液晶分子，并在两片玻璃基板上施加驱动电压来控制液晶分子的旋转方向，以将背光模组的光线折射出来产生画面。有机发光二极管(Organic Light-Emitting Diode，OLED)显示器，也称为有机电致发光显示器，具有自发光、响应时间短、清晰度与对比度高、可实现柔性显示与大面积全色显示等诸多优点。其优越性能和巨大的市场潜力，吸引了全世界众多厂家和科研机构投入到OLED显示面板的生产和研发中。
干刻机台生产过程中，由于品质问题或异物带入引发监控装置的静电卡盘(ESC)电弧放电造成ESC损坏、玻璃局部烧伤、玻璃背刮等品质异常。目前警报后，肉眼透过视图窗口观察盒体内状况。
但肉眼观察视野范围窄、视角低、照度低容易造成误判，后续跑货会造成产品异常。
技术解决方案
有鉴于现有技术的上述缺陷，本申请所要解决的技术问题是提供一种监控装置、静电卡盘和监控方法。
为实现上述目的，本申请提供了一种监控装置，包括：
盒体，盒体上设有视图窗口，所述监控装置包括：
监控电路，配置为实时监控盒体内的电弧放电；
信号处理电路，配置为处理监控电路传输的信号，判断是否产生电弧放电异常。
可选的，所述监控装置包括红外热像仪和监控探头；所述监控探头设置在所述视图窗口处，所述监控探头与所述红外热像仪电连接；所述红外热像仪与所述信号处理电路电连接。
可选的，所述盒体呈矩形，所述监控探头有两个，所述监控探头位于盒体对角设置。
可选的，所述盒体呈矩形，所述监控探头有四个，分别对应所述盒体的四个角位置设置。
可选的，所述监控电路包括可见光摄像头，所述可见光摄像头设 置在所述视图窗口处，所述可见光摄像头与所述信号处理电路电连接。
可选的，所述盒体包括四个侧板，所述四个侧板包括第一侧板、第二侧板、第三侧板和第四侧板，所述四个侧板首尾相连，所述第一侧板存在三个视图窗口均匀分布，所述第三侧板存在三个视图窗口均匀分布，所述第四侧板有矩形的凹槽，凹槽贯彻第四侧板，所述第二侧板与所述第四侧板相对，设有两个视图窗口。
可选的，所述监控探头位于相对的侧板上。
这两个视图窗口呈对角设置，可以完整的覆盖整个盒体。
本申请还公开了一种包括上述监控装置的监控方法，包括：
设定警报值；
利用监控电路采集盒体内的监控信号；
利用信号处理电路处理监控信号，跟警报值比较判断是否产生电弧放电异常。
可选的，所述警报值为温度值，所述监控信号为温度信号，当温度信号达到温度值后发出警报。
可选的，所述监控电路包括红外热像仪和监控探头；所述利用监控电路采集盒体内的监控信号的步骤后面还包括：所述红外热像仪捕捉到监控探头的信号后，生成热像图。
可选的，所述利用信号处理电路处理监控信号，跟警报值比较判断是否产生电弧放电异常步骤后面还包括：
宕机，确定异常位置。
发明人研究发现，示例的机台没有监控装置，产品警报后，肉眼通过视角窗口观察盒体内情况，由于视野范围窄、视角低、照度低容易造成误判，影响后续跑货。增监控装置，取代肉眼观察，实时监控，不易发生误判。
附图说明
所包括的附图用来提供对本申请实施例的进一步的理解，其构成了说明书的一部分，用于例示本申请的实施方式，并与文字描述一起来阐释本申请的原理。显而易见地，下面描述中的附图仅仅是本申请的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动性的前提下，还可以根据这些附图获得其他的附图。在附图中：
图1是本申请实施例一种监控装置示意图；
图2是本申请实施例一种监控装置盒体视图窗口的放大示意图；
图3是本申请另一实施例一种监控装置示意图；
图4本申请另一实施例一种监控装置的监控方法的示意图。
图5是本申请另一实施例一种监控装置的监控方法的示意图。
这里所公开的具体结构和功能细节仅仅是代表性的，并且是用于描述本申请的示例性实施例的目的。但是本申请可以通过许多替换形式来具体实现，并且不应当被解释成仅仅受限于这里所阐述的实施例。
在本申请的描述中，需要理解的是，术语“中心”、“横向”、“上”、“下”、“左”、“右”、“竖直”、“水平”、“顶”、“底”、“内”、“外”等指示的方位或位置关系为基于附图所示的方位或位置关系，仅是为了便于 描述本申请和简化描述，而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作，因此不能理解为对本申请的限制。此外，术语“第一”、“第二”仅用于描述目的，而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量。由此，限定有“第一”、“第二”的特征可以明示或者隐含地包括一个或者更多个该特征。在本申请的描述中，除非另有说明，“多个”的含义是两个或两个以上。另外，术语“包括”及其任何变形，意图在于覆盖不排他的包含。
在本申请的描述中，需要说明的是，除非另有明确的规定和限定，术语“安装”、“相连”、“连接”应做广义理解，例如，可以是固定连接，也可以是可拆卸连接，或一体地连接；可以是机械连接，也可以是电连接；可以是直接相连，也可以通过中间媒介间接相连，可以是两个元件内部的连通。对于本领域的普通技术人员而言，可以具体情况理解上述术语在本申请中的具体含义。
这里所使用的术语仅仅是为了描述具体实施例而不意图限制示例性实施例。除非上下文明确地另有所指，否则这里所使用的单数形式“一个”、“一项”还意图包括复数。还应当理解的是，这里所使用的术语“包括”和/或“包含”规定所陈述的特征、整数、步骤、操作、单元和/或组件的存在，而不排除存在或添加一个或更多其他特征、整数、步骤、操作、单元、组件和/或其组合。
下面结合附图和较佳的实施例对本申请作进一步说明。
如图1-3所示，本申请实施例公布了一种监控装置，包括：
盒体19，盒体19上设有视图窗口，监控装置包括：
监控电路，配置为实时监控盒体19内的电弧放电；
信号处理电路，配置为处理监控电路传输的信号，判断是否产生电弧放电异常；
监控装置包括红外热像仪和监控探头14，盒体19呈矩形，监控探头14有两个，监控探头14位于盒体对角设置。
盒体19包括四个侧板，四个侧板包括第一侧板1、第二侧板2、第三侧板3和第四侧板13，四个侧板首尾相连，第一侧板1存在三个视图窗口均匀分布，第二侧板2与第四侧板13相对，设有两个视图窗口，第四侧板13有矩形的凹槽，凹槽贯彻第四侧板13，第三侧板3存在三个视图窗口均匀分布，视图窗口逆时针方向依次为第一至八视图窗口，监控探头14位于第三视图窗口6和第八视图窗口11。
传统的干刻机台没有监控装置，产品警报后，肉眼通过视角窗口观察盒体19内情况，由于视野范围窄、视角低、照度低容易造成误判，影响后续跑货。增监控装置，取代肉眼观察，实时监控，不易发生误判。
作为本申请的另一实施例，参考图1至3所示，一种监控装置，包括：
盒体19，盒体19上设有视图窗口，监控装置包括：
监控电路，配置为实时监控盒体内的电弧放电；
信号处理电路，配置为处理监控电路传输的信号，判断是否产生 电弧放电异常。
传统的机台没有监控装置，产品警报后，肉眼通过视角窗口观察盒体19内情况，由于视野范围窄、视角低、照度低容易造成误判，影响后续跑货。增监控装置，取代肉眼观察，实时监控，不易发生误判。
本实施例可选的，监控装置包括红外热像仪和监控探头14；监控探头14设置在视图窗口处，监控探头14与红外热像仪20电连接；红外热像仪与信号处理电路15电连接，处理结果反馈到计算机16中显示。
机台生产过程中，由于品质问题或异物带入会引发ESC电弧放电从而导致产品品质异常。产品发生电弧放电时，会产生上千摄氏度的高温，增加红外热像仪和监控探头14可以实时监控盒体内温度。
本实施例可选的，盒体呈矩形，监控探头14有两个，监控探头14位于盒体对角设置。
红外热像仪存在监控探头监控盒体19内温度，根据覆盖范围，至少需要两个监控探头14来监控盒体。两个监控探头14对角设置，监控探头14视角可以覆盖整个盒体19。从成本考虑，两个监控探头14更加节约成本。
本实施例可选的，所述盒体呈矩形，所述监控探头有四个，分别对应所述盒体的四个角位置设置。
本实施例可选的，所述监控电路包括可见光摄像头，所述可见光摄像头设置在所述视图窗口处，所述可见光摄像头与所述信号处理电路电连接。
本实施例可选的，四个侧板包括第一侧板1、第二侧板2、第三侧板3和第四侧板13，四个侧板首尾相连，第一侧板1存在三个视图窗口均匀分布，第二侧板2与第四侧板13相对，设有两个视图窗口，第四侧板13有矩形的凹槽，凹槽贯彻第四侧板13，第三侧板3存在三个视图窗口均匀分布，视图窗口逆时针方向依次为第一至八视图窗口，监控探头位于第三视图窗口6和第八视图窗口11。
盒体19周围的视图窗口，观察盒体19内部机台生产过程。八个视图窗口，分别位于第一、第二、第三侧板，方便从各个角度观察监控。
本实施例可选的，监控探头14位于第三视图窗口6和第八视图窗口11。
监控探头位于第三视图窗口6和第八视图窗口11，这两个视图窗口呈对角设置，可以完整的覆盖整个盒体。
作为本申请的另一实施例，参考图3和图4所示，公开了一种包含以上监控装置的监控方法，包括：
S41:设定警报值；
S42:利用监控电路采集盒体内的监控信号；
S43:利用信号处理电路处理监控信号，跟警报值比较判断是否产生电弧放电异常。
监控装置设定警报值，利用监控电路采集盒体内的监控信号，同时信号处理电路处理监控信号，把采集到的监控信号和警报值进行比较，根据比较结果判断是否发生电弧放电异常。
本实施例可选的，警报值为温度值，监控信号为温度信号，当温度信号达到温度值后发出警报。
机台生产中发生电弧放电时，产生高温，当温度达到或超过警报值时发出警报，实时监控。
本实施例可选的，监控电路包括红外热像仪和监控探头14；利用监控电路采集盒体内的监控信号的步骤后面还包括：红外热像仪捕捉到监控探头14的信号后，生成热像图。
红外热像仪捕捉到信号后，生成热像图，可以直观形象的观察到电弧放电位置，直观形象。
本实施例可选的，利用信号处理电路处理监控信号，跟警报值比较判断是否产生电弧放电异常步骤后面还包括：
宕机，确定异常位置。
发生异常后，已经判断产生电弧放电发出警报的同时宕机，根据并热像图找到并记录电弧放电点位。
作为本申请的另一实施例，参考图3和图5所示，公开了一种包含以上监控装置的监控方法，包括：
S51:设定警报值；
S52:利用红外热像仪采集盒体内的温度信号；
S53:利用信号处理电路处理温度信号，跟警报值比较判断是否产生电弧放电异常；
S54:生成热像图；
S55:当温度信号达到温度值后发出警报，并宕机，确定异常位置。
监控装置设定警报值，利用红外热像仪采集盒体内采集盒体内的温度信号。同时信号处理电路处理温度信号，把采集到的温度信号和警报值进行比较，根据比较结果判断是否发生电弧放电异常。发生异常后，已经判断产生电弧放电发出警报的同时宕机，根据并热像图找到并记录电弧放电点位。
本申请的面板可以是TN面板(全称为Twisted Nematic，即扭曲向列型面板)、IPS面板(In-PaneSwitcing，平面转换)、VA面板(Multi-domain Vertica Aignment，多象限垂直配向技术)，当然，也可以是其他类型的面板，适用即可。
以上内容是结合具体的优选实施方式对本申请所作的进一步详细说明，不能认定本申请的具体实施只局限于这些说明。对于本申请技术领域的普通技术人员来说，在不脱离本申请构思的前提下，还可以做出若干简单推演或替换，都应当视为属于本申请的保护范围。

Claims (17)

  1. 一种监控装置，包括：
    盒体，盒体上设有视图窗口，所述监控装置包括：
    监控电路，配置为实时监控盒体内的电弧放电；
    信号处理电路，配置为处理监控电路传输的信号，判断是否产生电弧放电异常。
  2. 如权利要求1所述的一种监控装置，其中，所述监控电路包括红外热像仪和监控探头；所述监控探头设置在所述视图窗口处，所述监控探头与所述红外热像仪电连接；所述红外热像仪与所述信号处理电路电连接。
  3. 如权利要求2所述的一种监控装置，其中，所述盒体呈矩形，所述监控探头有两个，所述监控探头位于盒体对角设置。
  4. 如权利要求2所述的一种监控装置，其中，所述盒体呈矩形，所述监控探头有四个，分别对应所述盒体的四个角位置设置。
  5. 如权利要求1所述的一种监控装置，其中，所述盒体包括四个侧板，所述四个侧板包括第一侧板、第二侧板、第三侧板和第四侧板，所述四个侧板首尾相连，所述第一侧板存在三个视图窗口均匀分布，所述第三侧板在三个视图窗口均匀分布，所述第四侧板有矩形的凹槽，凹槽贯彻第四侧板，所述第二侧板与所述第四侧板相对，设有两个视图窗口。
  6. 如权利要求5所述的一种监控装置，其中，所述监控探头位于相对的侧板上。
  7. 一种如权利要求1所述的监控装置的监控方法，包括：
    设定警报值；
    利用监控电路采集盒体内的监控信号；
    利用信号处理电路处理监控信号，跟警报值比较判断是否产生电弧放电异常。
  8. 如权利要求7所述的一种监控装置的监控方法，其中，所述警报值为温度值，所述监控信号为温度信号，当温度信号达到温度值后发出警报。
  9. 如权利要求8所述的一种监控装置的监控方法，其中，所述监控电路包括红外热像仪和监控探头；所述利用监控电路采集盒体内的监控信号的步骤后面还包括：所述红外热像仪捕捉到监控探头的信号后，生成热像图。
  10. 如权利要求9所述的一种监控装置的监控方法，其中，述利用信号处理电路处理监控信号，跟警报值比较判断是否产生电弧放电异常步骤后面还包括：
    宕机，确定异常位置。
  11. 一种监控装置的静电卡盘，包括：
    盒体，用于放置显示面板；
    视图窗口，设置在盒体侧壁；
    监控电路，配置为实时监控盒体内的电弧放电，并将信号传输至所述监控装置的信号处理电路；
    所述信号处理电路配置为处理监控电路传输的信号，判断是否产生电弧放电异常。
  12. 如权利要求11所述的一种监控装置的静电卡盘，其中，所述监控电路包括红外热像仪和监控探头；所述监控探头设置在所述视图窗口处，所述监控探头与所述红外热像仪电连接；所述红外热像仪与所述信号处理电路电连接。
  13. 如权利要求12所述的一种监控装置的静电卡盘，其中，所述盒体呈矩形，所述监控探头有两个，所述监控探头位于盒体对角设置。
  14. 如权利要求12所述的一种监控装置，其中，所述盒体呈矩形，所述监控探头有四个，分别对应所述盒体的四个角位置设置。
  15. 如权利要求12所述的一种监控装置，其中，所述监控电路包括可见光摄像头，所述可见光摄像头设置在所述视图窗口处，所述可见光摄像头与所述信号处理电路电连接。
  16. 如权利要求11所述的一种监控装置的静电卡盘，其中，所述盒体包括四个侧板，所述四个侧板包括第一侧板、第二侧板、第三侧板和第四侧板，所述四个侧板首尾相连，所述第一侧板存在三个视图窗口均匀分布，所述第三侧板在三个视图窗口均匀分布，所述第四侧板有矩形的凹槽，凹槽贯彻第四侧板，所述第二侧板与所述第四侧板相对，设有两个视图窗口。
  17. 如权利要求16所述的一种监控装置的静电卡盘，其中，所述监控探头位于相对的侧板上。
PCT/CN2018/111199 2018-09-11 2018-10-22 一种监控装置、静电卡盘和监控方法 Ceased WO2020051979A1 (zh)

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