WO2020042594A1 - 气体流量监测系统及监测和主备用切换方法 - Google Patents

气体流量监测系统及监测和主备用切换方法 Download PDF

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WO2020042594A1
WO2020042594A1 PCT/CN2019/078369 CN2019078369W WO2020042594A1 WO 2020042594 A1 WO2020042594 A1 WO 2020042594A1 CN 2019078369 W CN2019078369 W CN 2019078369W WO 2020042594 A1 WO2020042594 A1 WO 2020042594A1
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main
pipeline
valve
backup
standby
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PCT/CN2019/078369
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English (en)
French (fr)
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冯文杰
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武汉华星光电技术有限公司
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Publication of WO2020042594A1 publication Critical patent/WO2020042594A1/zh

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    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow

Definitions

  • the invention relates to the technical field of fluid control, in particular to a gas flow monitoring system, a monitoring method using the gas flow monitoring system, and a main-standby switching method using the gas flow monitoring system.
  • MFC or Mass Flow Controller is a device for controlling gas flow, which is widely used in Dry Etch (dry etching) and CVD (chemical vapor deposition).
  • the basic structure of MFC and pipeline connection is shown in Figure 1.
  • the gas flow system shown in FIG. 1 includes a process chamber 110, and the process chamber 110 passes an FRC (Frame Rate Control (Frame Ratio Control)
  • the flow ratio controller 120 is respectively connected to three pipelines (including the first main pipeline 131, the second main pipeline 132 and the third main pipeline 133).
  • One gas (such as the first gas, the second gas, and the third gas) can be circulated, and a mass flow controller (ie, an MFC device) 140 is installed on each pipeline.
  • pneumatic switch valves 150 are installed at both ends of each mass flow controller (ie, the first main mass flow controller 141, the second main mass flow controller 142, and the third main mass flow controller 143).
  • the first main mass flow controller 141 has a first main pneumatic on-off valve 151 and a fourth main pneumatic on-off valve 154 at both ends
  • the second main mass flow controller 142 has a second at both ends.
  • a main pneumatic on-off valve 152 and a fifth main pneumatic on-off valve 155, a third main pneumatic on-off valve 153 and a sixth main pneumatic on-off valve 156 are installed at both ends of the third main mass flow controller 143, respectively.
  • a pressure gauge 160, a main pressure regulating valve 170, and a main line switching valve 180 are also installed on each line.
  • a first pressure gauge 161, a first main pressure regulating valve 171, and a first main line switching valve 181 are installed on the first main pipeline 131.
  • a second pressure gauge 162, a second main pressure regulating valve 172, and a second main line switching valve 182 are mounted on the second main pipeline 132.
  • a third pressure gauge 163, a third main pressure regulating valve 173, and a third main line switching valve 183 are installed on the third main pipeline 133.
  • the flow control of the MFC device 140 will shift, and the accuracy of the MFC device 140 needs to be confirmed and calibrated.
  • the purpose of the present invention is to provide a gas flow monitoring system.
  • the valve of the backup pipeline is normally kept closed, and the accuracy of the default MFC equipment is accurate.
  • This equipment can be used as a reference when testing equipment, or when there is an abnormality in the normal pipeline, it can be opened in time to reduce the abnormal downtime of the entire gas flow system.
  • the invention provides a gas flow monitoring system.
  • the monitoring system includes at least one main pipeline and a backup pipeline, and one end of the main pipeline and the backup pipeline is respectively connected to an external gas supply. System, the other ends of the main pipeline and the backup pipeline are respectively connected to the process chamber; a main mass flow controller, at least one main pneumatic on-off valve and main pipeline are installed on the main pipeline; On-off valve, a standby mass flow controller and at least one standby pneumatic on-off valve are installed on the standby pipeline, and a standby on-off valve is installed between the standby pipeline and each of the main pipelines.
  • a main pressure regulating valve and a standby pressure regulating valve are also installed on the main pipeline and the standby pipeline respectively; the main pressure regulating valve and the standby pressure regulating valve The valves are both used to regulate the pressure of the gas flowing through the main mass flow controller and the backup mass flow controller.
  • a main line switching valve and a standby line switching valve are further installed on the main line and the standby line, respectively, the main line switching valve and the The backup pipeline switching valves are respectively used to allow the gas output from the gas supply system to flow into the main pipeline and the backup pipeline.
  • a main line switching valve and a standby line switching valve are further installed on the main line and the standby line, respectively, the main line switching valve and the The backup pipeline switching valves are respectively used to prohibit the gas output from the gas supply system from flowing into the main pipeline and the backup pipeline.
  • a pressure gauge is further installed on the main pipeline, and the pressure gauge is used to measure the pressure of the gas flowing out of the gas supply system and flowing into the main pipeline.
  • a flow proportion controller is installed between the main pipeline and the process cavity, and the flow proportion control
  • the controller is also connected to the standby pipeline; the flow ratio controller is used to control the ratio of the gas flow rate that flows into the process cavity for each of the main pipeline or the standby pipeline.
  • the present invention also provides a monitoring method using the above-mentioned gas flow monitoring system, the monitoring method includes the following steps: (a) setting a standby pipeline switch valve installed on the standby pipeline to a closed state so that the standby quality The flow controller is in a standby state; (b) The flow control accuracy test is performed on the main mass flow controller to be detected in the main pipeline to obtain the average flow value of the main pipeline to be detected; (c) will be connected A main on-off valve on the corresponding main pipeline of the main mass flow controller to be detected is closed; (d) the main pipeline connected to the main mass flow controller to be detected is to be connected A corresponding standby on-off valve is opened; (e) a standby pipeline on-off valve and a standby pneumatic on-off valve are opened; (f) a flow control accuracy test is performed on a standby mass flow controller to obtain the average of the standby pipeline Flow rate; (g) comparing the average flow rate of the main pipeline to be tested with the average flow rate of the backup pipeline,
  • step (g) the threshold is 5%.
  • the method further includes: (h) closing the standby on-off valve and the standby pneumatic on-off valve; (i) closing the standby on-off valve in step (e); The main pneumatic on-off valve opens; (j) The main on-off valve that was closed in step (c) is opened.
  • the present invention also provides a main-standby switching method using the above-mentioned gas flow monitoring system.
  • the main-standby switching method includes the following steps: (1) closing the main on-off valve on the abnormal main pipeline; (2) Open a corresponding backup on-off valve connected to the abnormal main pipeline; (3) Disassemble the signal line of the main pneumatic on-off valve connected to the abnormal main pipeline; (4) Disassemble The lower signal line is installed on a standby pneumatic on-off valve to receive the main standby switching control command from an external device.
  • the advantage of the present invention is that the gas flow monitoring system adds a spare pipeline to the original gas flow system, and the valve of the spare pipeline is normally closed.
  • the accuracy of the default MFC equipment is accurate.
  • This standby pipeline can be used as a reference for reference, thereby reducing the detection error rate and effectively controlling the accuracy of the MFC equipment.
  • the backup pipeline can be opened in time to reduce the abnormal downtime of the entire gas flow system.
  • FIG. 1 is a schematic structural diagram of a gas flow system in the prior art.
  • FIG. 2 is a schematic structural diagram of a gas flow monitoring system in an embodiment of the present invention.
  • FIG. 3 is a flowchart of steps in a monitoring method using the gas flow monitoring system according to an embodiment of the present invention.
  • FIG. 4 is a flowchart of steps in a method for switching between a master and a backup using the gas flow monitoring system according to an embodiment of the present invention.
  • An embodiment of the present invention provides a gas flow monitoring system. Each will be described in detail below.
  • a gas flow monitoring system includes at least one main pipeline 130 and a backup pipeline 230.
  • the number of the main pipelines 130 is three, which are respectively the first main pipeline 131, the second main pipeline 132, and the third main pipeline 133.
  • the gas supply system 190 can provide different types of gases, such as corrosive gases such as SO3, CL2, HCL, and HF, and is not limited thereto.
  • the process cavity 110 is a process cavity commonly used in the art, and is used to provide a required mixed gas for a dry etching process or a chemical vapor deposition process.
  • a main mass flow controller 140, at least one main pneumatic on-off valve 150 and a main on-off valve 290 are installed on the main pipeline 130, and a backup mass flow controller 240 is installed on the backup pipeline 230.
  • a backup mass flow controller 240 is installed on the backup pipeline 230.
  • at least one backup pneumatic on-off valve 250, a backup on-off valve 260 is installed between the backup pipeline 230 and each of the main pipelines 130.
  • the number of the main pneumatic on-off valve 150 and the backup pneumatic on-off valve 250 on each pipeline are two, and are respectively provided on the main mass flow controller 140 and the backup mass flow control.
  • the two ends of the device 240 are used to more effectively prevent external air from entering the process cavity 110 and prevent gas leakage in the process cavity 110.
  • a main mass flow controller 140 is installed on each main pipeline 130, that is, a first main mass flow controller 141 is installed on the first main pipeline 131, and a second main flow A second main mass flow controller 142 is installed on the pipeline 132, and a third main mass flow controller 143 is installed on the third main pipeline 133.
  • a first main pneumatic on-off valve 151 and a fourth main pneumatic on-off valve 154 are installed at both ends of the first main mass flow controller 141, and a second main mass flow controller 142 is installed at both ends
  • the main pneumatic on-off valve 152 and the fifth main pneumatic on-off valve 155 are provided with a third main pneumatic on-off valve 153 and a fifth main pneumatic on-off valve 155 at both ends of the third main mass flow controller 143.
  • a first backup pneumatic switch valve 251 and a second backup pneumatic switch valve 252 are installed at both ends of the backup mass flow controller 240.
  • a first main on-off valve 291 is installed on the first main line 131
  • a second main on-off valve 292 is installed on the second main line 132
  • a third is installed on the third main line 133.
  • a backup on-off valve 260 is installed between the backup pipeline 230 and each of the main pipelines, that is, a first backup on-off valve 261 is installed between the backup pipeline 230 and the first main pipeline 131.
  • a second backup on-off valve 262 is installed between the backup pipeline 230 and the second main pipeline 132, and a third backup on-off valve 263 is installed between the backup pipeline 230 and the third main pipeline 133.
  • a main pressure regulating valve 170 and a backup pressure regulating valve 270 are also installed on the main pipeline 130 and the backup pipeline 230, respectively.
  • the main pressure regulating valve 170 and the backup pressure regulating valve 270 are both used to adjust the pressure of gas flowing through the main mass flow controller 140 and the backup mass flow controller 240.
  • a main pipeline switch valve 180 and a backup pipeline switch valve 280 are also installed, respectively, and the main pipeline switch valve 180 and the backup pipeline are respectively installed.
  • the on-off valve 280 is used to allow / disable the gas output from the gas supply system 190 to flow into the main pipeline 130 and the backup pipeline 230, respectively.
  • first main pressure regulating valve 171 and the first main line switching valve 181 are mounted on the first main line 131.
  • a second main pressure regulating valve 172 and a second main line switching valve 182 are mounted on the second main line 132.
  • a third main pressure regulating valve 173 and a third main line switching valve 183 are installed on the third main line 133.
  • a pressure gauge 160 is also installed on the main pipeline 130, that is, a first pressure gauge 161 is installed on the first main pipeline 131, and a second pressure is installed on the second main pipeline 132.
  • the meter 162 and the third main pipeline 133 are provided with a third pressure gauge 163.
  • the pressure gauge 160 is used to measure the pressure of the gas flowing out of the gas supply system 190 and flowing into the main pipeline 130.
  • a flow proportion controller 120 is installed between the main pipeline 130 and the process cavity 110, and the flow proportion controller 120 is also connected to The backup pipeline 230. That is, the first main pipeline 131, the second main pipeline 132, the third main pipeline 133, and the backup pipeline 230 are all connected to the same flow proportion controller 120 to Process chamber 110.
  • the flow ratio controller 120 is configured to control a ratio of a gas flow rate of each of the main pipeline 130 or the backup pipeline 230 flowing into the process chamber 110.
  • the first main mass flow controller 141 of the first main pipeline 131 is taken as an example. Of course, in other embodiments, it may be the second or third main mass flow controller. (142, 143), and even the fourth and fifth main mass flow controllers are not limited to this.
  • the standby pipeline switching valve 280 of the standby pipeline 230 is closed, so that the accuracy of the standby mass flow controller 240 on the standby pipeline 230 is accurate by default.
  • the first main on-off valve 291 mounted on the first main line 131 is manually closed. That is, the main switching valve on the corresponding main pipeline connected to the main mass flow controller to be detected is closed.
  • the first backup on-off valve 261 connected between the first main pipeline 131 and the backup pipeline 230 is manually opened.
  • the backup line switch valve 280 and the two backup pneumatic switch valves 250 are opened.
  • the opening of the backup pneumatic on-off valve 250 is to remove the signal wires connected to the first main pneumatic on-off valve 151 and the fourth main pneumatic on-off valve 154, and install the first backup pneumatic on-off valve 251 and the second
  • the standby pneumatic on-off valve 252 is configured so that the first standby pneumatic on-off valve 251 and the second standby pneumatic on-off valve 252 can receive control commands from an external device (not shown).
  • the standby mass flow controller 240 can perform flow control accuracy detection. That is, the amount of the gas to be passed in is calculated according to the pressure change in the cavity, and then divided by the time of the aeration to obtain the average flow rate of the standby pipeline 230 controlled by the standby mass flow controller 240.
  • the average flow rate of the first main pipeline 131 to be tested is compared with the average flow rate of the standby pipeline 230.
  • a threshold value it is determined that the mass flow controller to be detected is in an abnormal state.
  • the threshold is 5%.
  • the relevant staff can replace the abnormal primary primary mass flow controller 141.
  • the detection may also be performed on other active mass flow controllers.
  • the gas flow monitoring system of the present invention adds a backup pipeline to the original gas flow system, and usually the on-off valve of the backup pipeline is normally closed, and the accuracy of the default MFC equipment is accurate.
  • This standby pipeline can be used as a reference for reference, thereby reducing the detection error rate and effectively ensuring the accuracy of the MFC equipment.
  • the present invention further provides a monitoring method using a gas flow monitoring system.
  • the monitoring method includes the following steps:
  • Step S310 The standby pipeline switch valve installed on the standby pipeline is set to a closed state, so that the standby mass flow controller is in a standby state.
  • the accuracy of the standby mass flow controller 240 on the standby pipeline is accurate.
  • Step S320 Perform flow control precision detection on the main mass flow controller to be detected in the main pipeline to obtain the average flow value of the main pipeline to be detected.
  • the average flow rate of the first main line 131 controlled by the main mass flow controller (for example, the first main mass flow controller 141).
  • Step S330 Close the main switching valve on the corresponding main pipeline connected to the main mass flow controller to be detected.
  • Step S340 Open the corresponding standby on-off valve connected to the corresponding main pipeline connected to the main mass flow controller to be detected.
  • the first backup on-off valve 261 connected between the backup pipeline 230 and the corresponding main pipeline 131 where the first primary mass flow controller 141 to be detected is located is opened.
  • Step S350 Open the standby pipeline switching valve and the standby pneumatic switching valve.
  • the standby pipeline switching valve 280 and the two standby pneumatic switching valves 250 are opened.
  • the opening of the backup pneumatic on-off valve 250 is to remove the signal wires connected to the first main pneumatic on-off valve 151 and the fourth main pneumatic on-off valve 154, and install the first backup pneumatic on-off valve 251 and the second
  • the standby pneumatic on-off valve 252 is configured so that the first standby pneumatic on-off valve 251 and the second standby pneumatic on-off valve 252 can receive a control command from an external device.
  • Step S360 Perform a flow control accuracy test on the standby mass flow controller to obtain the average flow value of the standby pipeline.
  • Step S370 Compare the average flow rate of the main pipeline to be detected with the average flow rate of the backup pipeline. When the difference between the two exceeds a threshold, it is determined that the mass flow controller to be detected is abnormal. status.
  • the average flow rate of the first main pipeline 131 to be tested is compared with the average flow rate of the backup pipeline 230.
  • a threshold value the first quality to be detected is determined.
  • the flow controller 141 is in an abnormal state.
  • the threshold is 5%.
  • the first main mass flow controller 141 is considered abnormal. Therefore, the relevant staff can replace the abnormal primary primary mass flow controller 141. It should be noted that if the threshold is set too high, it is easy to cause problems that are not found in time when the accuracy of the mass flow controller is poor. If the threshold is set too low, it may cause the problem of high false alarm rate, and the related staff will perform unnecessary replacement of MFC equipment. Therefore, it is better to set the threshold to 5%.
  • step S370 the method further includes: step S380, closing the standby on-off valve and the standby pneumatic on-off valve.
  • step S390 the main pneumatic on-off valve which has been closed in step 350 is opened.
  • step S3110 the main on-off valve which has been closed in step S330 is opened.
  • a main-standby switching method of a gas flow monitoring system includes the following steps:
  • Step S410 Close the main on-off valve on the abnormal main pipeline.
  • the first main pipeline is abnormal as an example.
  • other main pipelines may also be used.
  • the manner in which the main pipeline 130 or the first main mass flow controller 141 on the main pipeline 130 is detected to be abnormal may adopt the monitoring method described in the foregoing embodiment, or a method commonly used in the art. The detection method is not repeated here.
  • the first main switching valve 291 on the abnormal first main pipeline 131 may be closed.
  • Step S420 the corresponding standby on-off valve connected to the abnormal main pipeline is opened.
  • the corresponding standby on-off valve is opened, and the standby on-off valve is disposed between the standby pipeline and the corresponding main pipeline.
  • Step S430 Disconnect the signal line of the main pneumatic on-off valve connected to the abnormal main pipeline.
  • the signal lines on the first main pneumatic switch valve 151 and the fourth main pneumatic switch valve 154 provided at both ends of the first main mass flow controller 141 are removed.
  • Step S440 Install the disassembled signal line on the standby pneumatic on-off valve to receive the main standby switching control command from an external device.
  • the two signal lines removed in step S430 are mounted on the first standby pneumatic on-off valve 251 and the second standby pneumatic on-off valve 252.
  • the first standby pneumatic on-off valve 251 and the second standby pneumatic on-off valve 252 can receive the main standby switching control command of the external device, so that when the switching control instruction is received, the first standby pneumatic on-off valve 251 and the second standby pneumatic switching valve are opened.
  • the on-off valve 252 is switched from using the first main pipeline to using the backup pipeline to ensure the normal operation of the entire gas flow monitoring system, which also reduces the abnormal downtime of the equipment.
  • a spare pipeline is added to the original gas flow system, and the pipeline valve is normally closed.
  • the default accuracy of the MFC equipment is accurate.
  • the spare pipeline can be used as a standard
  • the standby pipeline can be opened in time, thereby reducing the abnormal downtime of the entire gas flow system.

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Abstract

一种气体流量监测系统及采用其的监测方法和主备用切换方法。气体流量监测系统在原有气体流量系统中增加一备用管路（230），平时该备用管路（230）的阀门（280）保持常闭状态以默认备用MFC（240）的精度准确，当进行MFC设备（140）检测时，该备用管路（230）作为参考标准，当主管路（130）存在异常时，可及时开启备用管路（230）以减少整个气体流量监测系统异常宕机时间。

Description

气体流量监测系统及监测和主备用切换方法 技术领域
本发明涉及流体控制技术领域，尤其涉及一种气体流量监测系统、采用该气体流量监测系统的监测方法以及采用该气体流量监测系统的主备用切换方法。
 背景技术
MFC即Mass Flow Controller（质量流量控制器）是用于控制气体流量的装置，其广泛用于Dry Etch（干法刻蚀）和CVD（chemical vapor deposition，化学气相沉积）设备上。MFC和管路连接基本结构如图1所示。图1所示的气体流量系统包括一制程腔体110，该制程腔体110通过一个FRC（Frame Rate Control，帧比率控制）流量比例控制器120分别连接至三个管路（包括第一主用管路131、第二主用管路132和第三主用管路133），每一管路内可以流通一种气体（例如第一气体、第二气体和第三气体），而且在每一个管路上安装有质量流量控制器（即MFC设备）140。另外，在每一个质量流量控制器（即第一主用质量流量控制器141、第二主用质量流量控制器142和第三主用质量流量控制器143）的两端分别安装气动开关阀150，例如第一主用质量流量控制器141的两端分别安装第一主用气动开关阀151和第四主用气动开关阀154，第二主用质量流量控制器142的两端分别安装第二主用气动开关阀152和第五主用气动开关阀155，第三主用质量流量控制器143的两端分别安装第三主用气动开关阀153和第六主用气动开关阀156。另外，在每一管路上还分别安装压力计160、主用调压阀170和主用管路开关阀180。其中，第一主用管路131上安装第一压力计161、第一主用调压阀171和第一主用管路开关阀181。第二主用管路132上安装第二压力计162、第二主用调压阀172和第二主用管路开关阀182。第三主用管路133上安装第三压力计163、第三主用调压阀173和第三主用管路开关阀183。
随着使用时间增加，MFC设备140的流量控制会出现偏移，需要对MFC设备140的精度进行确认和校准。
目前工厂设备上常用的MFC 检测方法是根据理想气体方程理论：PV=nRT。当制程腔的体积V和温度T已知，往腔体通入固定流量的气体，根据腔体压力的变化，可以计算出通入气体的量，再除以通气时间，以计算出平均流量。接着，将该平均流量与MFC设定的流量进行比较，计算出MFC偏差率。
 技术问题
然而，这种方法实际测量出来的结果误差比较大。对于流量精度要求很高的气体，此方法并不可靠。当然，MFC设备生产厂商可以准确地确认精度，但是必须将MFC设备拆下来，这仅仅适合在实验室内使用特殊方法进行。且，这种方法对已安装在工厂设备上的MFC完全不可行。故，需要提供一种气体流量监测系统。
 技术解决方案
本发明的目的在于，提供一种气体流量监测系统，其通过在原有气体流量系统中增加一备用管路，平时备用管路的阀门保持常闭状态，以默认MFC设备的精度准确，当进行MFC设备检测时，该备用管路可作为标准进行参考，或当正常管路存在异常时，可以及时开启备用管路，以减少整个气体流量系统异常宕机时间。
本发明提供了一种气体流量监测系统，所述监测系统包括：至少一主用管路和一备用管路，所述主用管路和所述备用管路的一端分别连接至一外部气体供应系统，所述主用管路和所述备用管路的另一端分别连接至制程腔体；在所述主用管路上安装一主用质量流量控制器、至少一主用气动开关阀和主用开关阀，在所述备用管路上安装一备用质量流量控制器和至少一备用气动开关阀，在所述备用管路和每一所述主用管路之间安装一备用开关阀。
在本发明的一实施例中，在所述主用管路上和所述备用管路上还分别安装有主用调压阀和备用调压阀；所述主用调压阀和所述备用调压阀均用于调节流经所述主用质量流量控制器和所述备用质量流量控制器的气体的压力。
在本发明的一实施例中，在所述主用管路上和所述备用管路上还分别安装有主用管路开关阀和备用管路开关阀，所述主用管路开关阀和所述备用管路开关阀分别用于允许从所述气体供应系统所输出的气体流入主用管路和备用管路。
在本发明的一实施例中，在所述主用管路上和所述备用管路上还分别安装有主用管路开关阀和备用管路开关阀，所述主用管路开关阀和所述备用管路开关阀分别用于禁止从所述气体供应系统所输出的气体流入主用管路和备用管路。
在本发明的一实施例中，在所述主用管路上还安装有压力计，所述压力计用于测量从所述气体供应系统所流出并流入至所述主用管路的气体的压力。
在本发明的一实施例中，当所述主用管路的数量为至少两个时，在所述主用管路与所述制程腔体之间安装流量比例控制器，所述流量比例控制器也连接至所述备用管路；所述流量比例控制器用于控制每一所述主用管路或所述备用管路流入至所述制程腔体的气体流量的比例。
另外，本发明还提供一种采用上述气体流量监测系统的监测方法，所述监测方法包括以下步骤：（a）将安装在备用管路上的备用管路开关阀设置为关闭状态，以使备用质量流量控制器处于备用状态；（b）对主用管路中的需检测的主用质量流量控制器进行流量控制精度检测，以获取需检测的主用管路平均流量值；（c）将连接至所述需检测的主用质量流量控制器的相应主用管路上的一主用开关阀关闭；（d）将与连接至所述需检测的主用质量流量控制器的相应主用管路相连的一相应的备用开关阀开启；（e）将一备用管路开关阀和一备用气动开关阀开启；（f）对一备用质量流量控制器进行流量控制精度检测，以获取备用管路平均流量值；（g）将所述需检测的主用管路平均流量与所述备用管路平均流量值进行比较，当两者的差值超过一阈值时，则判断出需检测的质量流量控制器为异常状态。
在本发明的一实施例中，在步骤（g）中，所述阈值为5%。
在本发明的一实施例中，在步骤(g)之后，进一步包括：（h）将所述备用开关阀和所述备用气动开关阀关闭；（i）将在步骤（e）中已关闭的主用气动开关阀开启；（j）将在步骤（c）中已关闭的主用开关阀开启。
另外，本发明还提供一种采用上述气体流量监测系统的主备用切换方法，所述主备用切换方法包括以下步骤：（1）将异常的主用管路上的主用开关阀关闭；（2）将与所述异常的主用管路相连的一相应的备用开关阀开启；（3）将连接至所述异常的主用管路上的主用气动开关阀的信号线拆卸；（4）将拆卸下的信号线安装在一备用气动开关阀上，以接收一外部设备的主备用切换控制指令。
 有益效果
本发明的优点在于，所述气体流量监测系统通过在原有气体流量系统中增加一备用管路，平时备用管路的阀门保持常闭状态，以默认MFC设备的精度准确，当进行MFC设备检测时，该备用管路可作为标准进行参考，从而可以减小检测误差率，有效地控制MFC设备的精准度。当正常管路存在异常时，可以及时开启备用管路，以减少整个气体流量系统异常宕机时间。
 附图说明
为了更清楚地说明本发明实施例中的技术方案，下面将对实施例描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本发明的一些实施例，对于本领域技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他的附图。
图1是现有技术中的一种气体流量系统的结构示意图。
图2是本发明一实施例中的气体流量监测系统的结构示意图。
图3是本发明一实施例中的一种采用所述气体流量监测系统的监测方法的步骤流程图。
图4是本发明一实施例中的一种采用所述气体流量监测系统的主备用切换方法的步骤流程图。
 本发明的实施方式
下面将结合本发明实施例中的附图，对本发明实施例中的技术方案进行清楚、完整地描述。显然，所描述的实施例仅仅是本发明一部分实施例，而不是全部的实施例。基于本发明中的实施例，本领域技术人员在没有作出创造性劳动前提下所获得的所有其他实施例，都属于本发明保护的范围。
本发明的说明书和权利要求书以及上述附图中的术语“第一”、“第二”、“第三”等（如果存在）是用于区别类似的对象，而不必用于描述特定的顺序或先后次序。应当理解，这样描述的对象在适当情况下可以互换。此外，术语“包括”和“具有”以及他们的任何变形，意图在于覆盖不排他的包含。
在本专利文档中，下文论述的附图以及用来描述本发明公开的原理的各实施例仅用于说明，而不应解释为限制本发明公开的范围。所属领域的技术人员将理解，本发明的原理可在任何适当布置的系统中实施。将详细说明示例性实施方式，在附图中示出了这些实施方式的实例。此外，将参考附图详细描述根据示例性实施例的终端。附图中的相同附图标号指代相同的元件。
本发明说明书中使用的术语仅用来描述特定实施方式，而并不意图显示本发明的概念。除非上下文中有明确不同的意义，否则，以单数形式使用的表达涵盖复数形式的表达。在本发明说明书中，应理解，诸如“包括”、“具有”以及“含有”等术语意图说明存在本发明说明书中揭示的特征、数字、步骤、动作或其组合的可能性，而并不意图排除可存在或可添加一个或多个其他特征、数字、步骤、动作或其组合的可能性。附图中的相同参考标号指代相同部分。
本发明实施例提供一种气体流量监测系统。以下将分别进行详细说明。
参见图2所示，在本发明的一实施例中，提供一种气体流量监测系统。所述监测系统包括：至少一主用管路130和一备用管路230。在本实施例中，所述主用管路130的数量为三个，分别为第一主用管路131、第二主用管路132和第三主用管路133。
所述主用管路130和备用管路230的一端分别连接至一外部气体供应系统190，所述主用管路130和备用管路230的另一端分别连接至一制程腔体110。所述气体供应系统190可以提供不同种类型的气体，如SO3、CL2、HCL、HF等腐蚀性气体，且不限于此。所述制程腔体110为本领域常用的制程腔体，其用于为干法刻蚀工艺或化学气相沉积工艺提供所需的混合气体。
在所述主用管路130上安装一主用质量流量控制器140、至少一主用气动开关阀150和主用开关阀290，在所述备用管路230上安装一备用质量流量控制器240和至少一备用气动开关阀250，在所述备用管路230和每一所述主用管路130之间安装一备用开关阀260。在本实施例中，每一管路上的所述主用气动开关阀150和所述备用气动开关阀250的数量均为两个，且分别设置在主用质量流量控制器140和备用质量流量控制器240的两端，用于更有效地防止外部空气进入制程腔体110，以及防止制程腔体110内的气体泄漏。
在本实施例中，每一主用管路130上安装一主用质量流量控制器140，即在第一主用管路131上安装第一主用质量流量控制器141，在第二主用管路132上安装第二主用质量流量控制器142，在第三主用管路133上安装第三主用质量流量控制器143。在第一主用质量流量控制器141的两端安装有第一主用气动开关阀151和第四主用气动开关阀154，在第二主用质量流量控制器142的两端安装有第二主用气动开关阀152和第五主用气动开关阀155，在第三主用质量流量控制器143的两端安装有第三主用气动开关阀153和第五主用气动开关阀155。在备用质量流量控制器240的两端安装有第一备用气动开关阀251和第二备用气动开关阀252。另外，在第一主用管路131上安装第一主用开关阀291，在第二主用管路132上安装第二主用开关阀292，在第三主用管路133上安装第三主用开关阀293。
在所述备用管路230和每一所述主用管路之间安装一备用开关阀260，即在备用管路230和第一主用管路131之间安装第一备用开关阀261，在备用管路230和第二主用管路132之间安装第二备用开关阀262，在备用管路230和第三主用管路133之间安装第三备用开关阀263。
在本实施例中，在所述主用管路130上和所述备用管路230上还分别安装有主用调压阀170和备用调压阀270。所述主用调压阀170和所述备用调压阀270均用于调节流经所述主用质量流量控制器140和所述备用质量流量控制器240的气体的压力。
在所述主用管路130上和所述备用管路230上还分别安装有主用管路开关阀180和备用管路开关阀280，所述主用管路开关阀180和所述备用管路开关阀280分别用于允许/禁止从所述气体供应系统190所输出的气体流入主用管路130和备用管路230。
也就是说，在第一主用管路131上安装有第一主用调压阀171和第一主用管路开关阀181。在第二主用管路132上安装有第二主用调压阀172和第二主用管路开关阀182。在第三主用管路133上安装有第三主用调压阀173和第三主用管路开关阀183。
在本实施例中，在所述主用管路130上还安装有压力计160，即第一主用管路131安装有第一压力计161，第二主用管路132安装有第二压力计162，第三主用管路133安装有第三压力计163。所述压力计160用于测量从所述气体供应系统190所流出并流入至所述主用管路130的气体的压力。
当所述主用管路130的数量为至少两个时，在所述主用管路130与所述制程腔体110之间安装流量比例控制器120，所述流量比例控制器120也连接至所述备用管路230。也就是说，所述第一主用管路131、所述第二主用管路132、所述第三主用管路133以及所述备用管路230均通过同一流量比例控制器120连接至制程腔体110。所述流量比例控制器120用于控制每一所述主用管路130或所述备用管路230流入至所述制程腔体110的气体流量的比例。
以下将进一步描述气体流量监测系统的工作原理。
在本实施例中，是以第一主用管路131的第一主用质量流量控制器141为例，当然，在其他部分实施例中，可以是第二或第三主用质量流量控制器（142，143），甚至第四、第五主用质量流量控制器，不限于此。
首先，先将备用管路230的备用管路开关阀280关闭，这样，默认该备用管路230上的备用质量流量控制器240的精度准确。
接着，对第一主用管路131的第一主用质量流量控制器141进行检测。所采用的检测方式为本领域常规的检测方法，即根据理想气体方程理论：PV=nRT,根据腔体压力的变化，可以计算出通入气体的量，再除以通气时间，以获得第一主用质量流量控制器141所控制的第一主用管路131的平均流量。
然后，手动关闭安装在第一主用管路131上的第一主用开关阀291。亦即，将连接至所述需检测的主用质量流量控制器的相应主用管路上的主用开关阀关闭。
接着，再手动打开连接在第一主用管路131和备用管路230之间的第一备用开关阀261。
接着，将备用管路开关阀280和两个备用气动开关阀250开启。其中，备用气动开关阀250的开启是将连接在第一主用气动开关阀151和第四主用气动开关阀154上的信号线拆卸下，并且安装在第一备用气动开关阀251和第二备用气动开关阀252上，以使得第一备用气动开关阀251和第二备用气动开关阀252可以接收一外部设备（图中未示)的控制指令。
当备用管路开关阀280和备用气动开关阀250开启之后，可以对备用质量流量控制器240进行流量控制精度检测。即根据腔体压力的变化计算出通入气体的量，再除以通气时间的方法，以获得备用质量流量控制器240所控制的备用管路230的平均流量。
最后，将需检测的第一主用管路131平均流量与备用管路230平均流量值进行比较，当两者的差值超过一阈值时，则判断出需检测的质量流量控制器为异常状态。在本实施例中，所述阈值为5%。当两者的差值超过5%时，则认为第一主用质量流量控制器141为异常。于是，相关工作人员可对异常的第一主用质量流量控制器141进行更换。
当然，在其他部分实施例中，也可以对其他主用质量流量控制器进行检测。
因此，本发明所述气体流量监测系统通过在原有气体流量系统中增加一备用管路，平时该备用管路的开关阀保持常闭状态，以默认MFC设备的精度准确，当进行MFC设备检测时，该备用管路可作为标准进行参考，从而可以减小检测误差率，有效地保证MFC设备的精准度。
参见图3所示，在本发明的一实施例中，本发明还提供一种采用气体流量监测系统的监测方法，所述监测方法包括以下步骤：
步骤S310：将安装在备用管路上的备用管路开关阀设置为关闭状态，以使备用质量流量控制器处于备用状态。
这样，默认该备用管路上的备用质量流量控制器240的精度准确为高。
步骤S320：对主用管路中的需检测的主用质量流量控制器进行流量控制精度检测，以获取需检测的主用管路平均流量值。
流量控制精度检测方式为本领域常规的检测方法，即根据理想气体方程理论：PV=nRT,根据腔体压力的变化，可以计算出通入气体的量，再除以通气时间，以获得需检测的主用质量流量控制器（例如第一主用质量流量控制器141）所控制的第一主用管路131的平均流量。
步骤S330：将连接至所述需检测的主用质量流量控制器的相应主用管路上的主用开关阀关闭。
步骤S340：将与连接至所述需检测的主用质量流量控制器的相应主用管路相连的相应备用开关阀开启。
在本实施例中，将连接在备用管路230和需检测的第一主用质量流量控制器141所在的相应主用管路131之间的第一备用开关阀261开启。
步骤S350：将备用管路开关阀和备用气动开关阀开启。
在本实施例中，将备用管路开关阀280和两个备用气动开关阀250开启。其中，备用气动开关阀250的开启是将连接在第一主用气动开关阀151和第四主用气动开关阀154上的信号线拆卸下，并且安装在第一备用气动开关阀251和第二备用气动开关阀252上，以使得第一备用气动开关阀251和第二备用气动开关阀252可以接收一外部设备的控制指令。
步骤S360：对备用质量流量控制器进行流量控制精度检测，以获取备用管路平均流量值。
根据腔体压力的变化计算出通入气体的量，再除以通气时间的方法，以获得备用质量流量控制器240所控制的备用管路230的平均流量。
步骤S370：将所述需检测的主用管路平均流量与所述备用管路平均流量值进行比较，当两者的差值超过一阈值时，则判断出需检测的质量流量控制器为异常状态。
在本实施例中，将需检测的第一主用管路131平均流量与备用管路230平均流量值进行比较，当两者的差值超过一阈值时，则判断出需检测的第一质量流量控制器141为异常状态。其中，所述阈值为5%。当两者的差值超过5%时，则认为第一主用质量流量控制器141为异常。于是，相关工作人员可对异常的第一主用质量流量控制器141进行更换。需注意的是，如果所述阈值设得过高，则容易造成质量流量控制器的精度较差时仍未被及时发现问题。如果阈值设得过低，则可能造成误报率高的问题，且相关工作人员会进行不必要的更换MFC设备操作。因此，将所述阈值设置为5%为较佳。
在步骤S370之后，进一步包括：步骤S380，将备用开关阀和备用气动开关阀关闭。步骤S390，将在步骤350中已关闭的主用气动开关阀开启。步骤S3110，将在步骤S330中已关闭的主用开关阀开启。通过上述步骤的实施，可以恢复至检测主用质量流量控制器精度的之前状态。
参见图4，在本发明的另一实施例中，提供一种气体流量监测系统的主备用切换方法，所述主备用切换方法包括以下步骤：
步骤S410：将异常的主用管路上的主用开关阀关闭。
在本实施例中，是以第一主用管路是异常为例。当然在其他部分实施例中，也可以是其他主用管路。需说明的是，检测出主用管路130或主用管路130上的第一主用质量流量控制器141为异常的方式可以采用上述实施例所述的监测方法，或者本领域中常用的检测方法，在此不再赘述。
当发现第一主用管路131是异常时，可以将在异常的第一主用管路131上的第一主用开关阀291关闭。
步骤S420：将与所述异常的主用管路相连的相应备用开关阀开启。
接着，将相应的备用开关阀开启，该备用开关阀设置在备用管路和相应的主用管路之间。
步骤S430：将连接至所述异常的主用管路上的主用气动开关阀的信号线拆卸。
例如，在本步骤中，将设置在第一主用质量流量控制器141两端的第一主用气动开关阀151和第四主用气动开关阀154上的信号线拆卸下来。
步骤S440：将拆卸下的信号线安装在备用气动开关阀上，以接收一外部设备的主备用切换控制指令。
将步骤S430中所拆卸下来的两条信号线安装在第一备用气动开关阀251和第二备用气动开关阀252上。这样，第一备用气动开关阀251和第二备用气动开关阀252可以接收外部设备的主备用切换控制指令，从而当接收到切换控制指令时，开启第一备用气动开关阀251和第二备用气动开关阀252，即从使用第一主用管路切换至使用备用管路，以保证整个气体流量监测系统的正常工作，这样也减少设备异常宕机的时间。
所述气体流量监测系统通过在原有气体流量系统中增加一备用管路，平时管路阀门保持常闭状态，以默认MFC设备的精度准确，当进行MFC设备检测时，该备用管路可作为标准进行参考，当正常管路存在异常时，可以及时开启备用管路，从而减少整个气体流量系统异常宕机时间。
以上所述仅是本发明的优选实施方式，应当指出，对于本技术领域的普通技术人员，在不脱离本发明原理的前提下，还可以做出若干改进和润饰，这些改进和润饰也应视为本发明的保护范围。
 工业实用性
本申请的主题可以在工业中制造和使用，具备工业实用性。

Claims (10)

  1. 一种气体流量监测系统，其包括：至少一主用管路和一备用管路，所述主用管路和所述备用管路的一端分别连接至一外部气体供应系统，所述主用管路和所述备用管路的另一端分别连接至制程腔体；在所述主用管路上安装一主用质量流量控制器、至少一主用气动开关阀和一主用开关阀，在所述备用管路上安装一备用质量流量控制器和至少一备用气动开关阀，在所述备用管路和每一所述主用管路之间安装一备用开关阀。
  2. 根据权利要求1所述的气体流量监测系统，其中在所述主用管路上和所述备用管路上还分别安装有一主用调压阀和一备用调压阀；所述主用调压阀和所述备用调压阀均用于调节流经所述主用质量流量控制器和所述备用质量流量控制器的气体的压力。
  3. 根据权利要求1所述的气体流量监测系统，其中在所述主用管路上和所述备用管路上还分别安装有一主用管路开关阀和一备用管路开关阀，所述主用管路开关阀和所述备用管路开关阀分别用于允许从所述气体供应系统所输出的气体流入所述主用管路和所述备用管路。
  4. 根据权利要求1所述的气体流量监测系统，其中在所述主用管路上和所述备用管路上还分别安装有一主用管路开关阀和一备用管路开关阀，所述主用管路开关阀和所述备用管路开关阀分别用于禁止从所述气体供应系统所输出的气体流入所述主用管路和所述备用管路。
  5. 根据权利要求1所述的气体流量监测系统，其中在所述主用管路上还安装有一压力计，所述压力计用于测量从所述气体供应系统所流出并流入至所述主用管路的气体的压力。
  6. 根据权利要求1所述的气体流量监测系统，其中当所述主用管路的数量为至少两个时，在所述主用管路与所述制程腔体之间安装一流量比例控制器，所述流量比例控制器也连接至所述备用管路；所述流量比例控制器用于控制每一所述主用管路或所述备用管路流入至所述制程腔体的气体流量的比例。
  7. 一种采用权利要求1所述的气体流量监测系统的监测方法，其中所述监测方法包括以下步骤：
    （a）将安装在备用管路上的一备用管路开关阀设置为关闭状态，以使一备用质量流量控制器处于备用状态；
    （b）对一主用管路中的需检测的一主用质量流量控制器进行流量控制精度检测，以获取需检测的主用管路平均流量值；
    （c）将连接至所述需检测的主用质量流量控制器的相应主用管路上的一主用开关阀关闭；
    （d）将与连接至所述需检测的主用质量流量控制器的相应主用管路相连的一相应的备用开关阀开启；
    （e）将一备用管路开关阀和一备用气动开关阀开启；
    （f）对一备用质量流量控制器进行流量控制精度检测，以获取备用管路平均流量值；
    （g）将所述需检测的主用管路平均流量与所述备用管路平均流量值进行比较，当两者的差值超过一阈值时，则判断出需检测的质量流量控制器为异常状态。
  8. 根据权利要求7所述的监测方法，其中在步骤（g）中，所述阈值为5%。
  9. 根据权利要求7所述的监测方法，其中在步骤(g)之后，进一步包括：
    （h）将所述备用开关阀和所述备用气动开关阀关闭；
    （i）将在步骤（e）中已关闭的主用气动开关阀开启；
    （j）将在步骤（c）中已关闭的主用开关阀开启。
  10. 一种采用权利要求1所述的气体流量监测系统的主备用切换方法，其中所述主备用切换方法包括以下步骤：
    （1）将异常的主用管路上的一主用开关阀关闭；
    （2）将与所述异常的主用管路相连的一相应的备用开关阀开启；
    （3）将连接至所述异常的主用管路上的主用气动开关阀的信号线拆卸；
    （4）将拆卸下的信号线安装在一备用气动开关阀上，以接收一外部设备的主备用切换控制指令。
PCT/CN2019/078369 2018-08-28 2019-03-15 气体流量监测系统及监测和主备用切换方法 WO2020042594A1 (zh)

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