WO2020020130A1 - Dispositif électroluminescent, système de détection optique, dispositif de détection optique et procédé de détection optique - Google Patents

Dispositif électroluminescent, système de détection optique, dispositif de détection optique et procédé de détection optique Download PDF

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Publication number
WO2020020130A1
WO2020020130A1 PCT/CN2019/097224 CN2019097224W WO2020020130A1 WO 2020020130 A1 WO2020020130 A1 WO 2020020130A1 CN 2019097224 W CN2019097224 W CN 2019097224W WO 2020020130 A1 WO2020020130 A1 WO 2020020130A1
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WIPO (PCT)
Prior art keywords
light
detection
measured
light source
diaphragm
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Application number
PCT/CN2019/097224
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English (en)
Chinese (zh)
Inventor
陈鲁
杨乐
马砚忠
张朝前
Original Assignee
深圳中科飞测科技有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Priority claimed from CN201810846138.1A external-priority patent/CN108917625A/zh
Priority claimed from CN201811022876.0A external-priority patent/CN109084678B/zh
Application filed by 深圳中科飞测科技有限公司 filed Critical 深圳中科飞测科技有限公司
Priority to KR1020217006012A priority Critical patent/KR102541847B1/ko
Priority to SG11202100892PA priority patent/SG11202100892PA/en
Priority to US17/263,560 priority patent/US11796311B2/en
Publication of WO2020020130A1 publication Critical patent/WO2020020130A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/22—Measuring arrangements characterised by the use of optical techniques for measuring depth
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/03—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring coordinates of points
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0608—Height gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/04—Measuring microscopes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
    • G01B2210/56—Measuring geometric parameters of semiconductor structures, e.g. profile, critical dimensions or trench depth

Definitions

  • the invention relates to the technical field of optical detection, and more particularly, to a light emitting device, an optical detection system, an optical detection device, and an optical detection method.
  • the optical detection method is one of the main methods for detecting semiconductor chips. It irradiates the light from the light source to the surface of the object to be measured, and then obtains information such as the three-dimensional topography of the chip surface and the thickness of the film layer according to the reflected light from the object to be measured.
  • the high-aspect-ratio structure on the chip is detected by an optical detection method, as shown in FIG. 1, since the ratio of the depth D and the width L of the high-aspect-ratio structure is large, most of the light emitted from the light source is incident at a large angle.
  • the light ⁇ 1 will be blocked by the surrounding structure, and only a small portion of the incident light with a small angle ⁇ 2 can be incident on the bottom of the high aspect ratio structure, resulting in the effective reflected light signal formed by the incident light at a small angle being overwhelmed by the noise signal formed by the incident light at a large angle Therefore, the high aspect ratio structure on the chip cannot be effectively measured.
  • the present invention provides a light emitting device, an optical detection system, and an optical detection method, so as to solve the problem that the existing optical detection method cannot detect the high aspect ratio structure on the chip.
  • the present invention provides the following technical solutions:
  • a light-emitting device comprising a light source and an aperture limiting unit located on a light-emitting path of the light source;
  • the light source is used for emitting light
  • the aperture limiting unit includes a first diaphragm component, and the first diaphragm component is used for entering and exiting the exiting light path of the light source, and when entering the exiting light path of the light source, The aperture is restricted to block part of the light with a larger angle with the normal direction of the object to be measured.
  • the aperture limiting unit includes a control component
  • the control component is configured to control the first diaphragm component to enter the exit light path of the light source when the current detection area of the object to be tested has a high aspect ratio structure, and in the current detection area of the object to be measured When the structure does not have a high aspect ratio, the exiting light path of the first diaphragm assembly from the light source is controlled.
  • an objective lens is further included, the objective lens is configured to receive light emitted from the first diaphragm assembly or the light source, and project the light onto a surface of the object to be measured;
  • the first diaphragm component includes a first diaphragm, and when the first diaphragm component is located on an exit light path of the light source, the first diaphragm component is located at an entrance pupil of the objective lens;
  • the first diaphragm component includes a first diaphragm and a matching lens, and when the first diaphragm component is located on an exit light path of the light source, the matching lens is used to make the first diaphragm pass through The image formed by the matching lens is located at the entrance pupil of the objective lens.
  • control component includes a controller and a first mobile device
  • the controller is configured to determine whether the current detection area has a high aspect ratio structure according to the structure data of the object to be measured that is stored in advance, and if so, send a first control instruction to the first mobile device to control the first movement
  • the device drives the first diaphragm assembly to enter the light path of the light source; if not, sends a second control instruction to the first mobile device to control the first movement device to drive the first diaphragm assembly to leave An outgoing light path of the light source.
  • An optical detection system includes:
  • the light-emitting device according to any one of the preceding items, wherein light emitted from the light-emitting device is reflected by the object to be measured;
  • the receiving device is configured to receive light reflected by the object to be measured, and obtain structure information of the object to be measured according to the received light.
  • the light emitting device includes an objective lens
  • the optical detection system further includes a first lens group, a beam splitter, and a second lens group;
  • the first lens group is used to expand and shape the light emitted by the light source
  • the beam splitter is configured to reflect the outgoing light of the first lens group or the outgoing light of the aperture limiting unit;
  • the objective lens is configured to focus the light emitted from the first lens group or the light emitted from the first diaphragm assembly onto the object to be measured, and collect reflected light from the object to be measured;
  • the beam splitter is further configured to transmit outgoing light of the objective lens to the second lens group;
  • the second lens group is used for condensing the light emitted from the objective lens to the receiving device.
  • the objective lens is an interference objective lens
  • the receiving device is a photodetector
  • the optical detection system further includes a second moving device
  • the interference objective lens is further configured to cause the reflected light to interfere with a reference light after collecting the reflected light of the object to be measured, and output the interference light to the beam splitter;
  • the second moving device is used for driving the interference objective lens or the object to be measured to move in a direction perpendicular to the object to be measured;
  • the photodetector is configured to reconstruct a three-dimensional contour of a surface of the object to be measured according to the received interference light.
  • the objective lens is an imaging objective lens
  • the receiving device is a spectrometer
  • the light entrance of the spectrometer has a second diaphragm
  • the second diaphragm is used to limit the aperture of the exit light entering the spectrometer
  • the spectrometer is configured to obtain film thickness information of the object to be measured according to the emitted light.
  • the first diaphragm component in the aperture limiting unit enters the exiting light path of the light source, and limits the aperture of the light emitted by the light source, so as to block a part of the light having a larger angle with the normal direction of the object to be measured .
  • the aperture limiting unit includes a control component, and the method further includes:
  • control component controls the first aperture component to enter the exit light path of the light source
  • control component controls the first aperture component to exit the light path of the light source.
  • the step of controlling the first diaphragm component to enter an exit light path of the light source includes: The diaphragm is located at the pupil of the objective lens;
  • the step of controlling the first diaphragm assembly to enter the exit light path of the light source includes: making the first diaphragm The image formed by the matching lens is located at the entrance pupil of the objective lens.
  • control component includes a controller and a first mobile device, and further includes:
  • the technical solution provided by the present invention has the following advantages:
  • the optical detection system and the optical detection method provided by the present invention when the current detection area of the object to be measured has a high aspect ratio structure, the first diaphragm component in the aperture limiting unit enters the exiting light path of the light source to the light source.
  • the aperture of the emitted light is restricted to block part of the light that has a large angle with the normal direction of the object to be measured, so that the light is incident on the object to be measured along the normal direction of the object to be measured or a direction at a small angle to the normal direction.
  • the current detection area of the object can effectively detect the high aspect ratio structure of the current detection area.
  • An optical detection device includes a light source module, a projection unit, and a receiving unit, and the light source module includes a light source and an aperture limiting component;
  • the light source is used for emitting detection light
  • the aperture limiting component is used to enter and exit the light path of the light source, and when entering the light path of the light source, limit the diameter of the detection light emitted by the light source to block the normal to the object to be measured Part of the light with a larger angle;
  • the projection unit includes at least one projection device, the projection device is configured to project the detection light emitted by the light source module to the surface of the object to be detected, collect the reflected light of the object to be detected, and emit a detection signal light ;
  • the receiving unit is configured to receive the detection signal light, and obtain image information and structure information of the area to be measured of the object to be measured according to the detection signal light.
  • it further includes a first mobile device
  • the first moving device is configured to control an exiting light path of the aperture limiting component in and out of the light source.
  • the projection device is an objective lens
  • the aperture limiting component includes a first diaphragm, and when the aperture limiting component is located on an exit light path of the light source, the first diaphragm is located at an entrance pupil of the objective lens;
  • the aperture limiting component includes a first diaphragm and a matching lens.
  • the matching lens is configured to make the first diaphragm pass through the matching lens.
  • the image is located at the entrance pupil of the objective lens.
  • it further includes a controller
  • the controller is configured to determine, according to the image information, whether a specific detection structure is present in a measurement area of the measurement object, and if yes, send a first control instruction to the first mobile device to control the first mobile device Driving the aperture limiting component into the exiting light path of the light source.
  • the specific detection structure includes a high aspect ratio structure.
  • the projection unit includes a switching device and at least two projection devices;
  • the switching device is configured to switch a projection device on an exiting light path of the light source module, wherein detection signal light emitted by different projection devices is different.
  • the at least two projection devices include a first projection device and a second projection device;
  • the first projection device is configured to project part of the detection light emitted from the light source module to the surface of the object to be tested, generate part of the detection light as reference light, and collect reflected light of the detection light passing through the object to be measured Causing the reflected light to interfere with the reference light and output the interference light to the receiving unit, where the interference light is detection signal light emitted by the first projection device;
  • the second projection device is configured to project the detection light emitted from the light source module to the surface of the object to be measured, collect the reflected light of the object to be measured, and emit the reflected light to the receiving unit.
  • the reflected light is detection signal light emitted from the second projection device.
  • the structure information includes three-dimensional coordinate information of the object to be measured, and the receiving unit includes a first receiving device;
  • the first receiving device is configured to generate three-dimensional coordinate information of the object to be detected according to the detection signal light emitted from the first projection device, and generate the three-dimensional coordinate information of the object to be detected according to the detection signal light emitted from the second projection device. Image information.
  • the structure information further includes thickness information of a film layer in the area to be measured, and the receiving unit further includes a second receiving device;
  • the second receiving device obtains the thickness information of the film layer in the region to be measured of the object to be measured according to the detection signal light emitted by the second projection device.
  • the first projection device is an interference objective lens
  • the second projection device is an imaging objective lens
  • the first receiving device includes an image sensor
  • the projection unit includes a projection device, and the projection device is configured to emit the reflected light to the receiving unit after collecting the reflected light of the object to be measured, and the reflected light is the Detection signal light emitted by the projection device;
  • the structure information includes thickness information of a film layer in a test area of the test object
  • the receiving unit includes a first receiving device and a second receiving device
  • the first receiving device is configured to obtain image information of the object to be measured according to the detection signal light
  • the second receiving device is configured to obtain thickness information of a film layer of the object to be measured according to the detection signal light.
  • the projection device is an imaging objective lens; the first receiving device is an image sensor; and the second receiving device is a spectrometer.
  • An optical detection method includes:
  • the detection processing steps include:
  • the specific detection step includes: emitting a first detection light to the area to be measured, and measuring the aperture of the first detection light. Limiting is performed to block a part of the light having a larger angle with the normal direction of the object to be measured; after limiting the first detection light, structure information of the specific detection structure is obtained.
  • the test object includes a plurality of test regions
  • the steps of the optical detection method further include the steps of repeatedly acquiring the image information and determining whether the area to be tested has a specific detection structure;
  • the step of the specific detection further includes: acquiring position information of a specific structure according to the image information;
  • the optical detection method includes the steps of repeatedly acquiring image information of a measurement area of the measurement object to the detection process;
  • test area After acquiring the image information of the previous test area and before acquiring the image information of the next test area, determine whether the test area has a specific detection structure according to the image information of the previous test area; When the area to be tested has a specific detection structure, specific detection is performed on the previous area to be tested.
  • the detection light includes the first detection light or the second detection light
  • the step of obtaining image information of a test area of the test object includes:
  • the light source emits second detection light
  • the projection device projects the second detection light onto a surface of the object to be measured, and collects reflected light of the detection light through the object to be detected and emits detection signal light;
  • the receiving unit receives the detection signal light, and obtains image information of the area to be measured of the object to be measured according to the detection signal light;
  • the specific detection step further includes:
  • the step of obtaining structure information of the specific detection structure includes:
  • the receiving unit obtains structure information of a specific detection structure according to the detection signal light.
  • the step of limiting the aperture of the first detection light includes:
  • the aperture limiting component enters the exiting light path of the light source to limit the aperture of the first detection light.
  • the projection unit includes a first projection device, a second projection device, and a switching device;
  • the step of acquiring the image information includes: causing the second projection device to enter an exit light path of the light source;
  • the specific detecting step further includes: passing the first projection device into the light path of the light source, and moving the second projection device out of the light source through the switching device.
  • the projection unit when the receiving unit includes a first receiving device and a second receiving device, the projection unit includes a second projection device, and when the structural information includes thickness information,
  • the receiving device receives the detection signal light, and obtains image information of the area to be measured of the object to be measured according to the detection signal light;
  • the optical detection device and the optical detection method provided by the present invention can obtain the structural information and image information of the object to be measured, so that it can be determined according to the image information whether the area to be measured has a specific detection structure and its position, and
  • the aperture of the detection light emitted by the light source can also be restricted by the aperture limiting component to block part of the light with a larger angle with the normal direction of the object to be tested, so that the light follows the The normal direction or a direction at a small angle to the normal direction is incident on the measurement area of the object to be tested, and the specific detection structure of the area to be measured is effectively detected.
  • FIG. 1 is a schematic diagram of an optical path for detecting a high aspect ratio structure in the prior art
  • FIG. 2 is a schematic structural diagram of a light emitting device according to an embodiment of the present invention.
  • FIG. 3 is a schematic diagram of an optical path for detecting a high aspect ratio structure in an embodiment of the present invention
  • FIG. 4 is a schematic structural diagram of an optical detection system according to an embodiment of the present invention.
  • FIG. 5 is a schematic structural diagram of another optical detection system according to an embodiment of the present invention.
  • FIG. 6 is a schematic structural diagram of still another optical detection system according to an embodiment of the present invention.
  • FIG. 7 is a flowchart of an optical detection method according to an embodiment of the present invention.
  • FIG. 8 is a schematic structural diagram of an optical detection device according to an embodiment of the present invention.
  • FIG. 9 is a schematic structural diagram of another optical detection device according to an embodiment of the present invention.
  • FIG. 10 is a schematic structural diagram of a first projection device according to an embodiment of the present invention.
  • FIG. 11 is a schematic structural diagram of another optical detection device according to an embodiment of the present invention.
  • FIG. 12 is a schematic structural diagram of another optical detection device according to an embodiment of the present invention.
  • FIG. 13 is a flowchart of another optical detection method according to an embodiment of the present invention.
  • the existing optical detection methods cannot effectively detect the high aspect ratio structures on the chip.
  • SEM scanning electron microscope
  • this method requires a high-aspect-ratio structure to be dissected to image, which is a destructive Detection method, therefore, it cannot detect a large number of chip samples.
  • the present invention provides a light emitting device to overcome the above-mentioned problems in the prior art, including a light source and an aperture limiting unit located on a light path from which the light source exits;
  • the light source is used for emitting light
  • the aperture limiting unit includes a first diaphragm component, and the first diaphragm component is used for entering and exiting the exiting light path of the light source, and when entering the exiting light path of the light source, The aperture is restricted to block part of the light with a larger angle with the normal direction of the object to be measured.
  • the present invention also provides an optical detection system, including:
  • the receiving device is configured to receive light reflected by the object to be measured, and obtain structure information of the object to be measured according to the received light.
  • the invention also provides an optical detection method, including:
  • the first diaphragm component in the aperture limiting unit enters the exiting light path of the light source, and limits the aperture of the light emitted by the light source, so as to block a part of the light having a larger angle with the normal direction of the object to be measured .
  • the first diaphragm component in the aperture limiting unit enters the light path of the light source and emits light to the light source.
  • the aperture is restricted to block part of the light with a larger angle with the normal direction of the object to be tested, so that the light is incident on the current of the object to be measured along the normal direction of the object or a direction at a small angle to the normal direction.
  • Detection area which can effectively detect the high aspect ratio structure of the current detection area.
  • An embodiment of the present invention provides a light-emitting device.
  • the light-emitting device can be applied to an optical detection system that detects the three-dimensional topography of the surface of a chip, or an optical detection system that detects information such as the film thickness of a chip.
  • the present invention is not only Limited to this.
  • the light emitting device includes a light source 01, a first lens group 02 and an aperture limiting unit 03 located on a light path of the light source 01.
  • the light source 01 is configured to emit light.
  • the light source 01 is a white light source that emits broad-spectrum light.
  • the first lens group 02 is used for beam expanding and shaping of the light emitted from the light source 01.
  • the present invention is not limited to this. In other embodiments, the first lens group 02 may not be used for beam expanding and shaping.
  • the aperture limiting unit 03 is used to limit the aperture of the light emitted from the light source 01 when the current detection area of the object to be tested 05 has a high aspect ratio structure, so as to block a larger angle with the normal direction Y1 of the object to be tested 05. Part of the light, so that the light enters the height, depth, and width of the current detection area of the test object 05 along the normal direction Y1 of the test object 5 shown in FIG. 3 or a direction Y2 at a small angle to the normal direction Y1 of the test object 05. Than the bottom of the structure, which can effectively detect high aspect ratio structures.
  • the aperture limiting unit 03 in this embodiment includes a first diaphragm component and a control component.
  • the control component is configured to control the first diaphragm component to move downward into the exit light path of the light source 01 when the current detection area of the object to be detected 05 has a high aspect ratio structure, and to perform current detection on the object to be detected 05 When the area does not have a high aspect ratio structure, the first diaphragm component is controlled to move upward to leave the light path of the light source 01. When the first diaphragm component is located on the exit light path of the light source, the first diaphragm component is used to limit the aperture of the light emitted by the light source. It should be noted that, when the first diaphragm component leaves the light exit path of the light source 01, the control element does not have any effect on the light on the light exit path of the light source 01.
  • the light-emitting device in this embodiment further includes an objective lens 04.
  • the objective lens 04 is configured to receive light emitted from the first diaphragm assembly or the light source 01 and project the light onto the surface of the object 05 to be measured.
  • the first diaphragm assembly limits the numerical aperture of the objective lens 04 by limiting the aperture of the light emitted from the light source 01.
  • the first diaphragm assembly in this embodiment includes a first diaphragm 030.
  • the first diaphragm 030 is located on the objective lens 04.
  • the central axis of the through hole coincides or approximately coincides with the optical axis of the objective lens 04.
  • the present invention is not limited to this.
  • the first diaphragm 030 may not be located at the entrance pupil of the objective lens 04.
  • a matching lens is required to make the image of the first diaphragm 030 through the matching lens 031. It is located at the entrance pupil of the objective lens 04.
  • the first diaphragm component in the embodiment of the present invention may include a first diaphragm 030, a matching lens 031 located on the side of the first diaphragm 030 facing the objective lens 04, and a control component; when the first diaphragm component is located on the light source When the output light path is 01, the matching lens 031 is used to make the image of the first diaphragm 030 passing through the matching lens 031 to be located at the entrance pupil of the objective lens 04.
  • the optical detection system provided by the embodiment of the present invention not only can effectively detect a high aspect ratio structure, but also does not affect the detection result and detection speed of an area without a high aspect ratio structure, and has the advantages of simple structure and the like. It should be noted that the optical detection system provided by the embodiment of the present invention can effectively detect a high aspect ratio structure having a depth-to-width ratio greater than 20.
  • the first diaphragm is a diaphragm with a through hole in the center.
  • the diameter of the through hole is in the range of 1 mm to 10 mm.
  • the shape and size of the diaphragm and the shape and size of the through hole can be according to actual needs. When setting, the present invention is not limited to this.
  • control component in this embodiment includes a controller and a first mobile device.
  • the first mobile device is a high-precision unidirectional electric mobile platform.
  • the controller is configured to determine whether the current detection area has a high aspect ratio structure based on the pre-stored structure data of the object to be tested 05, and if so, send a first control instruction to the first mobile device to control the first mobile device to drive the first light
  • the diaphragm assembly enters the exit light path of the light source 01. If not, a second control instruction is sent to the first mobile device to control the first movement device to drive the first diaphragm assembly away from the exit light path of the light source 01.
  • An embodiment of the present invention further provides an optical detection system.
  • the optical detection system includes the light-emitting device and the receiving device 08 as described above.
  • the light emitted by the light-emitting device is reflected by the object to be measured 05.
  • the receiving device 08 is configured to receive light reflected by the object to be tested 05 and obtain structural information of the object to be tested 05 according to the received light.
  • the optical detection system in this embodiment further includes a beam splitter 06 and a second lens group 07; the beam splitter 06 is configured to reflect the outgoing light of the first lens group 02 or the outgoing light of the aperture limiting unit 03; the objective lens 04 It is used to focus the output light of the first lens group 02 or the output light of the aperture limiting unit 03 onto the test object 05 and collect the reflected light of the test object 05; the beam splitter 06 is also used to focus the output light of the objective lens 04
  • the second lens group 07 is transmitted to the second lens group 07; the second lens group 07 is used to focus the output light of the objective lens 04 to the receiving device 08; the receiving device 8 is used to obtain the structural information of the object 5 to be tested according to the received output light.
  • the first diaphragm 030 is located at the entrance pupil of the objective lens 04, and in the optical detection system shown in FIG. 5, the first diaphragm 030 is not located at the entrance of the objective lens 04 At the pupil.
  • the light source 01 emits light
  • the first lens group 02 shapes the output light of the light source 01, and the shaped output light is incident on the beam splitter 06, and the beam splitter 06
  • the light emitted from the first lens group 02 is reflected to the first aperture 030.
  • the first aperture 030 limits the aperture of the light emitted from the light source 01, that is, restricts the aperture of the light entering the objective lens 04, and the objective lens 04 restricts the aperture
  • the output light of the unit 03 is focused on the test object 05, and the output light is incident in the normal direction Y1 of the test object 05 shown in FIG.
  • the objective lens 04 collects the reflected light of the test object 05 and transmits the reflected light to the beam splitter 06, the beam splitter 06 transmits the output light of the objective lens 04 to the second lens group 07; the second lens group 07 focuses the output light of the objective lens 04 to the receiving device 08; the receiving device 08 obtains the object to be measured according to the received output light Structure information for 05.
  • the detection process of the optical detection system shown in FIG. 4 is different from that of the optical detection system shown in FIG. 4 in that the output light of the first lens group 02 passes through the first diaphragm 030 and the matching lens first.
  • the matching lens 031 images the light transmitted through the first aperture 030 at the entrance pupil of the objective lens 04, that is, the light emitted by the matching lens 031 passes through the beam splitter 06 After reflection, it is imaged at the entrance pupil of the objective lens 04.
  • the objective lens 04 focuses the light emitted from the aperture limiting unit 03 onto the object to be measured 05, and makes the emitted light along the normal direction of the object to be measured 05 shown in FIG. 3 Y1 or a direction Y2 that is at a small angle to the normal direction Y1 of the object to be tested 05 is incident on the bottom of the aspect ratio structure of the current detection area of the object to detect the aspect ratio structure effectively.
  • the optical detection system is an optical detection system for detecting a three-dimensional topography of a chip surface by using a white light interference method.
  • the objective lens 04 in the optical detection system is an interference objective lens
  • the receiving device 08 is a photodetector.
  • the optical detection system further includes a second moving device 09.
  • the second moving device 09 is preferably The high-precision motorized moving platform, the first lens group 02 and the second lens group 07 include at least one lens.
  • the interference objective lens 04 collects the reflected light of the test object 05, causes the reflected light to interfere with the reference light, and outputs the interference light to the beam splitter 06; the second moving device 09 is used to bring the animal lens 04 or the test object 05 along the vertical Move in the direction of the test object 05; the photodetector is used to reconstruct the three-dimensional contour of the surface of the test object 05 according to the received interference light.
  • the second mobile device 09 will bring the animal lens 04 or the object to be tested 05 up and down in a direction perpendicular to the object to be measured 05; the interference pattern obtained by the photodetector will also follow the detection process.
  • the change in the height of the display shows an oscillating fluctuation, and the peak value of the interference fringe brightness is the relative height value of the detection position, so that the height distribution of the required detection area can be obtained by comparing the relative height values of different positions.
  • the position of the entrance pupil also changes when the objective lens 04 moves up and down in a direction perpendicular to the object 05, the scope of the objective lens 04 is relatively small ( ⁇ 5mm), so it has little effect on the entrance pupil. Therefore, the positions of the first diaphragm and the matching lens will not change during the detection.
  • the second mobile device 09 may be an electric mobile platform located at the bottom of the test object 05.
  • the electric mobile platform can not only drive the test object 05 up and down, but also drive the test object 05 in a direction parallel to the test object 05.
  • the movement is, for example, left-right movement, so that the incident light is irradiated on different areas of the object to be detected 05 to obtain three-dimensional topographic information of the surface of the area of the object to be measured 05.
  • the optical detection system is an optical detection system that detects the thickness of the film layer of the chip by using a reflection spectrum method.
  • the receiving device 08 is a spectrometer.
  • the light entrance of the spectrometer has a second diaphragm 010.
  • the second diaphragm 010 is used to limit the diameter of the light entering the spectrometer.
  • the spectrometer is used to obtain the light from the light. Film thickness information of the object to be tested 05.
  • the optical detection system further includes an electric moving platform 09 located at the bottom of the object to be tested 05.
  • the electric moving platform 09 can drive the object to be tested 05 in a direction parallel to the object to be tested 05, so that incident light is illuminated. In different regions of the object to be tested 05, the film thickness information of the different regions of the object to be tested 05 is obtained.
  • the aperture limitation unit restricts the aperture of the light entering the objective lens to limit the numerical aperture of the objective lens, so that The output light of the objective lens is incident on the current detection area of the object in a direction perpendicular to the object to be measured or a direction at a small angle to the vertical direction of the object to be measured, so that the height and depth of the current detection area can be measured.
  • Aspect ratio structure for effective detection when the current detection area of the object to be measured has a high aspect ratio structure, the aperture limitation unit restricts the aperture of the light entering the objective lens to limit the numerical aperture of the objective lens, so that The output light of the objective lens is incident on the current detection area of the object in a direction perpendicular to the object to be measured or a direction at a small angle to the vertical direction of the object to be measured, so that the height and depth of the current detection area can be measured.
  • An embodiment of the present invention also provides an optical detection method, which is applied to the optical detection system provided in any one of the above embodiments, as shown in FIG. 7, including:
  • the aperture limiting unit restricts the aperture of the light emitted by the light source to block the part that has a larger angle with the normal direction of the DUT Light.
  • the aperture limiting unit includes a first diaphragm component and a control component.
  • the optical detection method provided by the present invention further includes:
  • control component controls the exit light path of the first diaphragm component into the light source
  • control component controls the exit light path of the first diaphragm component from the light source.
  • the light-emitting device includes an objective lens
  • the step of controlling the first diaphragm component to enter the exit light path of the light source includes: positioning the first diaphragm at the pupil of the objective lens
  • the step of controlling the exit light path of the first diaphragm assembly into the light source includes: positioning the image of the first diaphragm through the matching lens at the entrance pupil of the objective lens. .
  • control component includes a controller and a first mobile device.
  • optical detection method provided by the present invention further includes:
  • the controller judges whether the current detection area has a high aspect ratio structure according to the structure data of the object to be measured in advance;
  • the optical detection system in the present invention further includes a first lens group, a beam splitter, a second lens group, and a receiving device. Based on this, after the light source emits light, the method further includes: the first lens group performs beam expansion and shaping on the light emitted by the light source.
  • optical detection method in this embodiment further includes:
  • the beam splitter reflects the exit light of the first lens group or the exit light of the aperture limiting unit
  • the objective lens focuses the light emitted from the aperture limiting unit onto the object to be measured, and collects the reflected light from the object to be measured;
  • the beam splitter transmits the output light of the objective lens to the second lens group
  • the second lens group condenses the light emitted from the objective lens to the receiving device
  • the receiving device obtains the structure information of the object to be tested according to the received outgoing light.
  • the light source 01 emits light
  • the first lens group 02 shapes the output light of the light source 01, and the shaped output light is incident on the beam splitter 06, and the beam splitter 06
  • the light emitted from the first lens group 02 is reflected to the first aperture 030.
  • the first aperture 030 restricts the aperture of the light entering the objective lens 04.
  • the objective lens 04 focuses the light emitted from the aperture limiting unit 03 onto the object to be measured 05. , And make the emitted light incident on the height, depth, and width of the current detection area of the test object 05 along the normal direction Y1 of the test object 05 shown in FIG.
  • the objective lens 04 collects the reflected light of the object to be measured 05 and transmits the reflected light to the beam splitter 06.
  • the beam splitter 06 transmits the light emitted from the objective lens 04.
  • the second lens group 07 is transmitted to the second lens group 07; the second lens group 07 focuses the output light of the objective lens 04 to the receiving device 08; and the receiving device 08 obtains structural information of the object to be tested 05 according to the received output light.
  • the detection process of the optical detection system shown in FIG. 4 is different from that of the optical detection system shown in FIG. 4 in that the output light of the first lens group 02 passes through the first diaphragm 030 and the matching lens first. 031, after the aperture of the first aperture 030 restricts the aperture of the light, the matching lens 031 images the light passing through the first aperture 030 at the entrance pupil of the objective lens 04, that is, the output light of the matching lens is reflected by the beam splitter 06 Is imaged at the entrance pupil of the objective lens 04.
  • the objective lens 04 focuses the light emitted from the aperture limiting unit 03 onto the object to be measured 05, and makes the emitted light along the normal direction Y1 of the object to be measured 05 shown in FIG. 3
  • a direction Y2 at a small angle to the normal direction Y1 of the object to be tested 05 is incident on the bottom of the aspect ratio structure of the current detection area of the object to be detected to effectively detect the aspect ratio structure.
  • the optical detection system is an optical detection system for detecting a three-dimensional topography of a chip surface by using a white light interference method.
  • the objective lens 04 in the optical detection system is an interference objective lens
  • the receiving device 08 is a photodetector.
  • the optical detection system further includes a second moving device 09.
  • the second moving device 09 is preferably The high-precision motorized moving platform, the first lens group 02 and the second lens group 07 include at least one lens.
  • the interference objective lens 04 collects the reflected light of the test object 05, causes the reflected light to interfere with the reference light, and outputs the interference light to the beam splitter 06; the second moving device 09 is used to bring the animal lens 04 or the test object 05 along the vertical Move in the direction of the test object 05; the photodetector is used to reconstruct the three-dimensional contour of the surface of the test object 05 according to the received interference light.
  • the second mobile device 09 will bring the animal lens 04 or the object to be tested 05 up and down in a direction perpendicular to the object to be measured 05; the interference pattern obtained by the photodetector will also follow the detection process.
  • the change in the height of the display shows an oscillating fluctuation, and the peak value of the interference fringe brightness is the relative height value of the detection position, so that the height distribution of the required detection area can be obtained by comparing the relative height values of different positions.
  • the second mobile device 09 may be an electric mobile platform located at the bottom of the test object 05.
  • the electric mobile platform can not only drive the test object 05 up and down, but also drive the test object 05 in a direction parallel to the test object 05.
  • the movement is, for example, left-right movement, so that the incident light is irradiated on different areas of the object to be detected 05 to obtain three-dimensional topographic information of the surface of the area of the object to be measured 05.
  • the optical detection system is an optical detection system that detects the thickness of the film layer of the chip by using a reflection spectrum method.
  • the receiving device 08 is a spectrometer.
  • the light entrance of the spectrometer has a second diaphragm 010.
  • the second diaphragm 010 is used to limit the diameter of the light entering the spectrometer.
  • the spectrometer is used to obtain the light from the light. Film thickness information of the object to be tested 05.
  • the optical detection system further includes an electric moving platform 09 located at the bottom of the object to be tested 05.
  • the electric moving platform 09 can drive the object to be tested 05 in a direction parallel to the object to be tested 05, so that incident light is illuminated. In different regions of the object to be tested 05, the film thickness information of the different regions of the object to be tested 05 is obtained.
  • the aperture limiting unit limits the aperture of the light emitted by the light source to block the angle between the normal direction of the object and the object.
  • the large part of the light causes the light to enter the current detection area of the object to be measured along the normal direction of the object to be measured or a direction at a small angle to the normal direction, so that the high aspect ratio structure of the current detection area can be effectively detected.
  • An embodiment of the present invention provides an optical detection device.
  • the optical detection device can be applied to detect image information and structure information of a chip.
  • the structure information includes three-dimensional coordinate information and film thickness information.
  • the optical detection device includes a light source module 1, a projection unit 2, and a receiving unit 3.
  • the light source module 1 includes a light source 10 and an aperture limiting component 11.
  • the light source 10 is used to emit detection light
  • the projection unit 2 includes at least one projection device, and the projection device is used to project the detection light emitted from the light source module 1 onto the surface of the object 4 to collect the reflection of the object 4 The light and emits the detection signal light
  • the receiving unit 3 is configured to receive the detection signal light, and obtain image information and structure information of the object 4 to be tested according to the detection signal light.
  • the aperture limiting component 11 is used to enter and exit the light path of the light source 10, and when entering the light path of the light source 10, limits the diameter of the detection light emitted by the light source 10 to block the direction normal to the object 4 to be measured Part of the light with a larger angle makes the light incident on the current direction of the test object 4 in the direction Y1 of the test object 4 shown in FIG. 3 or a direction Y2 at a small angle with the normal direction Y1 of the test object 4
  • the specific detection structure of the detection area such as the bottom of the high aspect ratio structure, can effectively detect the specific detection structure, such as the high aspect ratio structure.
  • a first lens group 12 may be further provided between the light source 10 and the aperture limiting component 11.
  • the first lens group 12 is configured to expand and shape the detection light emitted by the light source 10.
  • the bottom of the object 4 to be tested also has a bearing platform 6, which is an electric mobile platform, which can drive the object 4 to be moved along the X axis, Y axis, and Z axis.
  • the optical detection device in this embodiment further includes a first moving device, and the first moving device is configured to control an exit optical path of the aperture limiting component 11 into and out of the light source 10.
  • the optical detection device in this embodiment further includes a controller.
  • the controller is configured to determine whether the area to be measured has a specific detection structure, such as a high aspect ratio structure, based on the image information of the object 4 to be obtained in advance obtained by the receiving unit 3. , Sending a first control instruction to the first mobile device to control the first mobile device to drive the aperture limiting component into the exiting light path of the light source 10.
  • the controller may also determine whether the area under test 4 has a specific detection structure such as a high aspect ratio structure based on the pre-stored structure data of the object under test 4. .
  • the specific detection structure in the embodiment of the present invention includes a high aspect ratio structure, but it is not limited thereto.
  • the projection device in the projection unit 2 is an objective lens;
  • the aperture limiting component 11 includes a first diaphragm, and when the aperture limiting component 11 is located on the exit light path of the light source 10, the first diaphragm is located at the entrance pupil of the objective lens;
  • the aperture limiting component 11 includes a first diaphragm and a matching lens.
  • the matching lens is used to make the image formed by the first diaphragm through the matching lens be located at the entrance pupil of the objective lens. Office.
  • the aperture limiting component 11 in this embodiment includes a first diaphragm.
  • the first diaphragm is located at the entrance pupil of the objective lens, and the center of the through hole
  • the axis coincides with or nearly coincides with the optical axis of the objective lens.
  • the present invention is not limited to this.
  • the first diaphragm may not be located at the entrance pupil of the objective lens.
  • a matching lens is required so that the image formed by the first diaphragm through the matching lens is located at the entrance of the objective lens.
  • the aperture limiting component 11 in the embodiment of the present invention may include a first diaphragm, a matching lens and a control component located on the side of the first diaphragm facing the objective lens; when the aperture limiting component 11 is located on the exit light path of the light source,
  • the matching lens is used for the image formed by the first diaphragm through the matching lens to be located at the entrance pupil of the objective lens.
  • the first diaphragm is a diaphragm with a through hole in the center.
  • the diameter of the through hole is in the range of 1 mm to 10 mm.
  • the shape and size of the diaphragm and the shape and size of the through hole can be according to actual needs. When setting, the present invention is not limited to this.
  • the aperture limiting component 11 is first moved out of the light path of the light source 10, and then the test object 4 is driven to move through the supporting platform 6 to find the test area of the test object 4, and then
  • the light source 10 emits detection light
  • the projection device in the projection unit 2 projects the detection light emitted from the light source 10 to the area to be measured 4, collects the reflected light of the object 4 and emits the detection signal light, and the receiving unit 3 according to the detection Signal light to obtain image information of the object 4 to be measured, the image information including lateral size information of key parts such as the photoresist and the metal layer on the object 4 in the region to be measured;
  • the controller of the aperture limiting component 11 judges whether the measured area of the object 4 has a specific detection structure such as a high aspect ratio structure based on the image information, and when the measured area has a specific detection structure such as a high aspect ratio structure, The aperture limiting component 11 is controlled to enter the exit light path of the light source 10, and the aperture of the detection light emitted by the light source 10 is limited. When the area to be measured does not have a specific detection structure such as a high aspect ratio structure, the aperture limiting component 11 is controlled not to enter the light source 10 Out of the light path.
  • the projection device in the projection unit 2 projects the detection light emitted from the light source 10 or the control aperture limiting component 11 onto the surface of the object 4 to be collected, collects the reflected light of the object 4 and emits the detection signal light, and the receiving unit 3 according to the detection
  • the signal light obtains structural information of the object 4 to be measured, and the structural information includes three-dimensional coordinate information and film thickness information.
  • the number of the detection areas is plural, and adjacent detection areas are in contact or non-contact with each other.
  • the optical detection device provided by the embodiment of the present invention can not only obtain the structural information of the object 4 to be measured through the light source 10, the projection unit 2 and the receiving unit 3, but also can obtain the structural information of the object 4 through the light source 10, the aperture limiting component 11, the projection unit 2 and the receiving device.
  • Unit 3 performs effective detection of specific detection structures such as high aspect ratio structures in the area to be measured, and does not affect the detection results and detection speed of areas without specific detection structures such as high aspect ratio structures, and has the advantages of simple structure, etc. .
  • the optical detection device provided by the embodiment of the present invention can effectively detect a high aspect ratio structure having a depth and width ratio greater than 20.
  • the projection unit 2 includes at least two projection devices and a switching device 20; the switching device 20 is used to switch the projection device on the light path of the light source module 1, that is, switch the corresponding projection device to On the output light path of the light source module 1, the detection signal light emitted from different projection devices is different.
  • the switching device 20 is an objective lens converter.
  • At least two projection devices include a first projection device 21 and a second projection device 22.
  • the first projection device 21 is configured to project a part of the detection light emitted from the light source module 1 onto the surface of the object 4 to be detected, and generate a reference light for the part of the detection light.
  • the reference light interferes and emits the interference light to the receiving unit 3.
  • the interference light is the detection signal light emitted by the first projection device 21, and the reference light is a part of the detection light incident on the first projection device 21; the second projection device 22 It is used to project the detection light emitted from the light source module 1 to the surface of the object 4 to be collected, collect the reflected light of the object 4 to be measured, and output the reflected light to the receiving unit 3, and the reflected light is a detection signal emitted from the second projection device 22.
  • the structural information includes three-dimensional coordinate information of the object to be tested, and the receiving unit 3 includes at least a first receiving device 31; the first receiving device 31 generates three-dimensional coordinate information of the object to be tested according to the detection signal light emitted from the first projection device 21, Image information of the object to be measured is generated based on the detection signal light emitted from the second projection device 22.
  • the second projection device 22 is an imaging objective lens; the first projection device 21 is an interference objective lens.
  • the first receiving device 31 is an image sensor, such as a CCD image sensor or a CMOS image sensor.
  • the interference objective lens includes a condensing lens 211, a support plate 212, a reference plate 213, a compensation plate 214, and a first beam splitter plate 215, which are sequentially arranged on the optical path.
  • the condensing lens 211 is used for detecting light. Converge to the support plate 212; the probe light passes through the support plate 212 and the compensation plate 214 and reaches the first beam splitter plate 215. The light reflected by the first beam splitter plate 215 is the reference light and the light transmitted by the first beam splitter plate 215.
  • the reference light passes through the compensation plate 214 and is reflected by the reference plate 213 and the first beam splitter plate 215 in order, and forms interference light with the reflected light reflected from the object 4 to be measured.
  • the compensation plate 214 is used for phase compensation of the reference light and the detection light, so that the reference light and the detection light satisfy the interference condition.
  • the interference objective lens generally includes a condensing lens and an interference head disposed between the condensing lens and the object 4 to be measured.
  • the structure of the interference head is similar to that of the support plate 212, the compensation plate 214, and the first
  • the structure of the beam splitter plate 215 is similar or the same.
  • the specific structure and implementation manner of the first projection device 21 are not limited in this application, and it depends on the actual situation.
  • the optical detection device shown in FIG. 9 first moves the aperture limiting component 11 out of the light path of the light source 10, the switching device 20 switches the second projection device 22 into the light path of the light source 10, and then drives the object to be measured through the supporting platform 6 4 moves to find the test area of the test object 4, and then makes the light source 10 emit the detection light, and the second projection device 22 projects the detection light emitted by the light source 10 to the test area of the test object 4, and collects the test object 4
  • the reflected light emits the reflected light
  • the first receiving device 31 obtains image information of the object 4 to be tested according to the reflected light, and the image information includes position and lateral size information of the structure to be measured on the object 4 in the region to be measured;
  • the structure to be tested includes one or more of a photoresist, a metal layer, and a through silicon via.
  • the controller of the aperture limiting component 11 judges whether the measured area of the object 4 has a specific detection structure such as a high aspect ratio structure based on the image information, and when the measured area has a specific detection structure such as a high aspect ratio structure, The aperture limiting component 11 is controlled to enter the exit light path of the light source 10 to limit the diameter of the detection light emitted by the light source 10; after limiting the diameter of the detection light emitted by the light source 10, structure information of the specific detection structure is acquired.
  • the aperture limiting component 11 is controlled not to enter the light path of the light source 10.
  • the switching device 20 switches the first projection device 21 into the output light path of the light source 10.
  • the first projection device 21 projects the detection light emitted from the light source 10 or the aperture limiting component 11 onto the surface of the object 4 to collect the object to be measured.
  • the reflected light of 4 causes the reflected light to interfere with the reference light and emits the interference light to the first receiving device 31.
  • the first receiving device 31 obtains the three-dimensional coordinate information of the object 4 to be tested according to the interference light.
  • the distance between the object to be measured 4 and the first projection device 21 needs to be continuously changed during the detection process, so as to obtain interference with a continuously changing pattern according to the obtained interference information. stripe.
  • the interference pattern obtained by the first receiving device 31 will also show an oscillating fluctuation with the change in distance during the detection process.
  • the peak value of the interference fringe brightness is the relative height value of the detection position, so that the required value can be obtained by comparing the relative height values of different positions.
  • the height distribution of the detection area is the relative height value of the detection position, so that the required value can be obtained by comparing the relative height values of different positions.
  • the structural information further includes the thickness information of the film layer in the area to be measured
  • the receiving unit 3 further includes a second receiving device 32.
  • the second receiving device 32 obtains the thickness information of the surface film layer of the test object 4 according to the detection signal light emitted from the second projection device 22.
  • the second receiving device 32 is a spectrometer, and the light entrance of the spectrometer has a second diaphragm 33, and the second diaphragm 33 is used to limit the aperture of the outgoing light entering the spectrometer.
  • the aperture limiting component 11 determines whether the area to be measured 4 of the object 4 has a specific detection structure, such as a high aspect ratio structure, based on the image information.
  • the projection device 22 projects the detection light emitted from the light source 10 or the aperture limiting component onto the surface of the object 4 to be collected, and collects the reflected light of the object 4 to be emitted to the second receiving device 32.
  • the second receiving device 32 Reflected light to obtain thickness information of the film layer of the object 4 to be measured;
  • the switching device 20 moves the first projection device 21 into the output light path of the light source 10, and the first projection device 21 projects the detection light emitted from the light source 10 or the aperture limiting component 11 onto the surface of the object 4 to collect the object 4
  • the reflected light causes the reflected light to interfere with the reference light and emits the interference light to the first receiving device 31.
  • the first receiving device 31 obtains the three-dimensional coordinate information of the object 4 to be tested according to the interference light.
  • image information obtained through the second projection device 22 and the first receiving device 31 that is, image information of the object to be measured obtained through the imaging lens and the image sensor.
  • the projection unit 2 includes a projection device 23. After collecting the reflected light of the object 4 to be measured, the projection device 23 emits the reflected light to the receiving unit 3 and reflects The light is detection signal light emitted from the projection device 23.
  • the structure information includes thickness information of a film layer in a test area of the test object
  • the receiving unit 3 includes a first receiving device 31 and a second receiving device 32; the first receiving device 31 obtains image information of the object 4 to be detected according to the detection signal light; the second receiving device 32 obtains a film of the object 4 to be detected according to the detection signal light Layer thickness information.
  • the projection device 23 is an imaging objective lens.
  • the first receiving device 31 is an image sensor, such as a CCD image sensor or a CMOS image sensor.
  • the second receiving device 32 is a spectrometer.
  • the aperture limiting component 11 is first moved out of the light path of the light source 10, and the test object 4 is driven to move through the supporting platform 6 to find the test area of the test object 4, and then the light source 10 emits the detection light.
  • the projection device 23 projects the detection light emitted from the light source 10 to the measurement area of the measurement object 4, collects the reflected light of the measurement object 4 and emits the reflection light, and the second receiving device 32 obtains the measurement object based on the reflection light.
  • image information includes the position and lateral size information of the structure to be tested on the object 4 in the area to be tested; the structure to be tested includes one or more of a photoresist, a metal layer, and a TSV By;
  • the aperture limiting component 11 judges whether the measured area of the object 4 has a specific detection structure such as a high aspect ratio structure based on the image information, and controls the aperture limit when the measured area has a specific detection structure such as a high aspect ratio structure.
  • the component 11 enters the exit light path of the light source 10 to limit the aperture of the detection light emitted by the light source 10.
  • the aperture limiting component 11 is controlled not to enter the light exit from the light source 10. road.
  • the projection device 23 projects the detection light emitted from the light source 10 or the aperture limiting component 11 onto the surface of the object 4 to be collected, and collects the reflected light of the object 4 to be emitted to the second receiving device 32 for the second receiving
  • the device 32 obtains the film thickness information of the test object 4 according to the reflected light; and repeats the above steps until the thickness information of the film layers of all the test objects 4 is obtained.
  • the optical detection device further includes a second light splitting device 7, and the second light splitting device 7 transmits part of the detection signal light to the first receiving device. 31. Reflect part of the detection signal light to the second receiving device 32.
  • both the first and second light splitting devices 13 and 7 are half mirrors.
  • the switching device 20 can switch the first projection device 21 and the second projection device 22 to achieve the object to be measured.
  • the three-dimensional topography of 4 and the thickness of the film are detected.
  • there is no need to transfer the test object 4 between the detection devices which not only avoids possible pollution during the process of transferring the test object 4, but also reduces the test object.
  • the optical detection device provided by the embodiment of the present invention can not only obtain the structural information and image information of the object to be measured, but also can determine whether the area to be tested has a specific detection structure and its position based on the image information, and The structure is inspected by a specific detection structure, and the aperture of the detection light emitted by the light source can be restricted by the aperture limiting component, so as to block a part of the light with a larger angle with the normal direction of the object to be measured, so that the light follows the method of the object to be measured. A line direction or a direction at a small angle to the normal direction is incident on the test area of the test object, and the specific detection structure of the test area is effectively detected.
  • An embodiment of the present invention further provides an optical detection method, as shown in FIG. 13, including:
  • S801 Acquire image information of a test area of a test object
  • S802 Determine whether a specific detection structure exists in the area to be tested according to the image information
  • S803 Perform detection processing on the object to be tested; the detection processing steps include: when the object to be tested has a specific detection structure, perform specific detection on the area to be tested, and the specific detection step includes: emitting a first detection light to the area to be tested, and The aperture of a detection light is restricted to block a part of the light with a larger angle with the normal direction of the object to be measured; after the first detection light is restricted, structural information of a specific detection structure is obtained.
  • the specific detection structure includes a high aspect ratio structure, and optionally, the aspect ratio of the high aspect ratio structure is greater than 20.
  • the object to be measured includes multiple regions to be measured
  • the steps of the optical detection method further include the steps of repeatedly acquiring the image information and determining whether the area to be tested has a specific detection structure;
  • the step of the specific detection further includes: acquiring position information of a specific structure according to the image information;
  • the optical detection method includes the steps of repeatedly acquiring image information of a measurement area of the measurement object to the detection process;
  • test area After acquiring the image information of the previous test area and before acquiring the image information of the next test area, determine whether the test area has a specific detection structure according to the image information of the previous test area; When the area to be tested has a specific detection structure, specific detection is performed on the previous area to be tested.
  • the image information of the test area of the test object can be obtained first, and then whether the test area has a specific detection structure can be determined, and when a specific detection structure is determined, it can be obtained For the position information, these two steps are repeated until the position information of the specific detection structure of all the regions to be tested is obtained, and then the structure information of the specific detection structure is obtained according to the position information.
  • image information of an area to be tested may be obtained, and after obtaining image information of the area to be tested, it is determined whether the area under test has a specific detection based on the image information of the area to be tested. Structure, and when the area to be tested has a specific detection structure, specific detection is performed on the area to be tested. Then, acquire the image information of the next area to be measured, and repeat the subsequent steps.
  • the optical detection method provided by the embodiment of the present invention may be applied to the optical detection device provided by any of the foregoing embodiments, and the detection light includes the first detection light or the second detection light, and then the object to be measured is obtained.
  • the steps of image information of the test area include:
  • the light source emits second detection light
  • the projection device projects the second detection light onto a surface of the object to be measured, and collects reflected light of the detection light through the object to be detected and emits detection signal light;
  • the receiving unit receives the detection signal light, and obtains image information of the area to be measured of the object to be measured according to the detection signal light;
  • the specific detection step further includes:
  • the step of obtaining structure information of the specific detection structure includes:
  • the receiving unit obtains structure information of a specific detection structure according to the detection signal light.
  • the present invention is not limited to this.
  • the image information of the object to be measured may also be obtained through other devices or equipment.
  • the controller of the aperture limitation component may be used to determine the object to be measured based on the image information. Whether the object to be tested has a specific detection structure, or whether the object to be tested has a specific detection structure is manually determined based on image information.
  • limiting the aperture of the first detection light includes:
  • the aperture limiting component enters the exit light path of the light source to limit the aperture of the first detection light.
  • the projection unit includes a first projection device, a second projection device, and a switching device.
  • the step of acquiring the image information includes: causing the second projection The device enters the exiting light path of the light source;
  • the specific detecting step further includes: passing the first projection device into the light path of the light source, and moving the second projection device out of the light source through the switching device.
  • the projection unit includes a second projection device
  • the structural information includes film thickness information
  • the receiving device receives the detection signal light, and obtains image information of the area to be measured of the object to be measured according to the detection signal light;
  • the projection device projects the second detection light emitted from the light source 10 to the measurement area of the measurement object 4, collects the reflected light of the measurement object 4 and emits the detection signal light, and the receiving unit 3 obtains the measurement object 4 according to the detection signal light.
  • the image information includes position and lateral dimension information of the structure to be tested on the object to be tested 4 in the area to be tested; the structure to be tested includes one or more of a photoresist, a metal layer, and a through silicon via. ;
  • the controller of the aperture limiting component 11 judges whether the measured area of the object 4 has a specific detection structure such as a high aspect ratio structure based on the image information, and when the measured area has a specific detection structure such as a high aspect ratio structure, The aperture limiting component 11 is controlled to enter the exit light path of the light source 10 to limit the diameter of the first detection light emitted by the light source 10, and after the first detection light is restricted, the specific detection structure such as a high-aspect-ratio structure is acquired. Structural information.
  • the aperture limiting component 11 is controlled not to enter the light path of the light source 10.
  • the projection device in the projection unit 2 projects the detection light emitted from the light source 10 or the control aperture limiting component 11 onto the surface of the object 4 to be collected, collects the reflected light of the object 4 and emits the detection signal light, and the receiving unit 3 according to the detection
  • the signal light obtains structure information of the object 4 to be measured, and the structure information includes three-dimensional coordinate information, thickness information, and the like.
  • the switching device 20 switches the second projection device 22 into the light path of the light source 10, and then move the DUT 4 through the bearing platform 6 to find the DUT 4
  • the area under test and then the light source 10 emits the second detection light
  • the second projection device 22 projects the second detection light from the light source 10 to the area under test 4 to collect the reflected light of the object 4 and emit the light.
  • the first receiving device 31 obtains image information of the object 4 to be tested according to the reflected light, and the image information includes position and lateral dimension information of the structure to be measured on the object 4 in the area to be measured; Including: one or more of photoresist, metal layer and TSV;
  • the controller of the aperture limiting component 11 judges whether the measured area of the object 4 has a specific detection structure such as a high aspect ratio structure based on the image information, and when the measured area has a specific detection structure such as a high aspect ratio structure, The aperture limiting component 11 is controlled to enter the exit light path of the light source 10 to limit the diameter of the first detection light emitted by the light source 10, and after the first detection light is restricted, the specific detection structure such as a high-aspect-ratio structure is acquired. Structural information.
  • the aperture limiting component 11 is controlled not to enter the exit light path of the light source 10.
  • the switching device 20 switches the first projection device 21 into the output light path of the light source 10.
  • the first projection device 21 projects the detection light emitted from the light source 10 or the aperture limiting component 11 onto the surface of the object 4 to collect the object to be measured.
  • the reflected light of 4 causes the reflected light to interfere with the reference light and emits the interference light to the first receiving device 31.
  • the first receiving device 31 obtains the three-dimensional coordinate information of the object 4 to be tested according to the interference light.
  • the aperture limiting component 11 determines whether the area to be measured 4 of the object 4 has a specific detection structure such as height, width, and depth based on the image information.
  • the second projection device 22 projects the detection light emitted from the light source 10 onto the surface of the object 4 to be collected, and Sending the reflected light to the second receiving device 32, and the second receiving device 32 obtains the thickness information of the film layer of the object 4 according to the reflected light;
  • the switching device 20 moves the first projection device 21 into the output light path of the light source 10, and the first projection device 21 projects the detection light emitted from the light source 10 or the aperture limiting component 11 onto the surface of the object 4 to collect the object 4
  • the reflected light causes the reflected light to interfere with the reference light and emits the interference light to the first receiving device 31.
  • the first receiving device 31 obtains the three-dimensional coordinate information of the object 4 to be tested according to the interference light. The above steps are repeated until the thickness information and three-dimensional coordinate information of the film layer in all regions of the object 4 are obtained.
  • the aperture limiting component 11 is first moved out of the light path of the light source 10, and the test object 4 is moved by the carrier 6 to find the test area of the test object 4.
  • the light source 10 is made to emit the second detection light
  • the projection device 23 projects the second detection light emitted from the light source 10 to the measurement area of the object 4 to be collected, collects the reflected light of the object 4 and emits the reflected light
  • the second receiving device 32 According to the reflected light, image information of the object to be measured 4 is obtained, and the image information includes position and lateral dimension information of the structure to be measured on the object 4 in the area to be measured;
  • the structure to be tested includes: photoresist, metal One or more of a layer and a TSV;
  • the aperture limiting component 11 judges whether the measured area of the object 4 has a specific detection structure such as a high aspect ratio structure based on the image information, and controls the aperture limit when the measured area has a specific detection structure such as a high aspect ratio structure.
  • the component 11 enters the exit light path of the light source 10, limits the diameter of the first detection light emitted by the light source 10, and obtains structural information of the specific detection structure such as a high aspect ratio structure after the first detection light is restricted.
  • the aperture limiting component 11 is controlled not to enter the exit light path of the light source 10.
  • the projection device 23 projects the detection light emitted from the light source 10 or the aperture limiting component 11 onto the surface of the object 4 to be collected, and collects the reflected light of the object 4 to be emitted to the second receiving device 32 for the second receiving
  • the device 32 obtains the film thickness information of the object 4 according to the reflected light; and repeats the above steps until the film thickness information of all regions of the object 4 is obtained.
  • the optical detection method provided by the embodiment of the present invention can not only obtain the structural information and image information of the object to be measured, but also can determine whether the area to be tested has a specific detection structure and its position based on the image information, and The structure is inspected by a specific detection structure, and the aperture of the detection light emitted by the light source can be restricted by the aperture limiting component, so as to block a part of the light with a larger angle with the normal direction of the object to be measured, so that the light follows the method of the object to be measured. A line direction or a direction at a small angle to the normal direction is incident on the test area of the test object, and the specific detection structure of the test area is effectively detected.

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Abstract

La présente invention concerne un dispositif électroluminescent, un système de détection optique, un dispositif de détection optique et un procédé de détection optique, le dispositif électroluminescent comprenant : une source de lumière (01), et une unité de limitation d'ouverture (03) située sur un trajet de lumière émergente de la source de lumière (01); la source de lumière (01) est utilisée pour émettre une lumière; et l'unité de limitation d'ouverture (03) est utilisée pour limiter l'ouverture de la lumière émise par la source de lumière (01) quand une zone en cours de détection d'un objet à tester (05) présente une structure à rapport d'aspect élevé afin de bloquer une partie de la lumière ayant un grand angle inclus avec la direction normale de l'objet à tester (05), de façon que la lumière soit incidente sur la zone en cours de détection de l'objet à tester (05) le long de la direction normale de l'objet à tester (05) ou le long d'une direction qui forme un petit angle avec la direction normale de l'objet à tester (05). Ainsi, la structure à rapport d'aspect élevé de la zone en cours de détection peut être efficacement détectée.
PCT/CN2019/097224 2018-07-27 2019-07-23 Dispositif électroluminescent, système de détection optique, dispositif de détection optique et procédé de détection optique WO2020020130A1 (fr)

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KR1020217006012A KR102541847B1 (ko) 2018-07-27 2019-07-23 발광 장치, 광학 검출 시스템, 광학 검출 장치 및 광학 검출 방법
SG11202100892PA SG11202100892PA (en) 2018-07-27 2019-07-23 Light emitting device, optical detection system, optical detection device and optical detection method
US17/263,560 US11796311B2 (en) 2018-07-27 2019-07-23 Light emitting device, optical detection system, optical detection device and optical detection method

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CN201811022876.0A CN109084678B (zh) 2018-09-03 2018-09-03 一种光学检测装置和光学检测方法
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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100019157A1 (en) * 2008-07-25 2010-01-28 Roche Molecular Systems, Inc. Excitation and Imaging Optics for Fluorescence Detection
JP2013195263A (ja) * 2012-03-21 2013-09-30 Denso Corp 幅寸法の測定装置
CN103759675A (zh) * 2013-12-23 2014-04-30 中国兵器工业第五二研究所 一种用于光学元件非球面微结构的同步检测方法
CN106959293A (zh) * 2015-11-13 2017-07-18 康耐视公司 通过视觉系统检测反光面上缺陷的系统及方法
CN108917625A (zh) * 2018-07-27 2018-11-30 深圳中科飞测科技有限公司 一种发光装置、光学检测系统和光学检测方法
CN109084678A (zh) * 2018-09-03 2018-12-25 深圳中科飞测科技有限公司 一种光学检测装置和光学检测方法

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3517903B2 (ja) 1993-06-21 2004-04-12 株式会社ニコン 干渉計
US6582619B1 (en) 1999-09-30 2003-06-24 Lam Research Corporation Methods and apparatuses for trench depth detection and control
US6750968B2 (en) 2000-10-03 2004-06-15 Accent Optical Technologies, Inc. Differential numerical aperture methods and device
US7869057B2 (en) * 2002-09-09 2011-01-11 Zygo Corporation Multiple-angle multiple-wavelength interferometer using high-NA imaging and spectral analysis
IL188029A0 (en) 2007-12-10 2008-11-03 Nova Measuring Instr Ltd Optical method and system
KR100947464B1 (ko) * 2008-02-13 2010-03-17 에스엔유 프리시젼 주식회사 두께 측정장치
KR101010189B1 (ko) 2008-06-30 2011-01-21 에스엔유 프리시젼 주식회사 두께 또는 표면형상 측정방법
CN101520304A (zh) 2009-03-30 2009-09-02 哈尔滨工业大学 移相干涉二次共焦软针孔探测装置与方法
CN102082108B (zh) 2010-10-26 2012-08-15 华中科技大学 一种微纳深沟槽结构侧壁形貌快速测量方法及装置
TWI503520B (zh) 2011-01-19 2015-10-11 Nova Measuring Instr Ltd 光學系統及在三維構造中之量測方法
US9305341B2 (en) * 2011-01-21 2016-04-05 Christopher L. Claypool System and method for measurement of through silicon structures
KR101186464B1 (ko) * 2011-04-13 2012-09-27 에스엔유 프리시젼 주식회사 Ｔｓｖ 측정용 간섭계 및 이를 이용한 측정방법
KR101245097B1 (ko) 2011-07-25 2013-03-25 에스엔유 프리시젼 주식회사 박막 두께 측정장치
KR101245098B1 (ko) 2011-07-25 2013-03-25 에스엔유 프리시젼 주식회사 박막 두께 측정장치
CN102589414B (zh) 2012-02-21 2014-08-06 中国科学院西安光学精密机械研究所 可实时测量的同步相移斐索干涉装置
CN104103058B (zh) 2013-04-01 2018-08-14 鸿富锦精密工业（深圳）有限公司 图像匹配系统及方法
CN103438805A (zh) 2013-08-19 2013-12-11 长春理工大学 折射放大光学位移传感器
TWI485361B (zh) 2013-09-11 2015-05-21 Univ Nat Taiwan 三維形貌輪廓量測裝置及其方法
CN105277131B (zh) 2014-05-26 2020-11-20 上海微电子装备（集团）股份有限公司 三维孔结构的测量装置与测量方法
JP6389081B2 (ja) 2014-08-07 2018-09-12 Ntn株式会社 形状測定装置、塗布装置および形状測定方法
CN106154764B (zh) * 2015-04-23 2018-03-30 中芯国际集成电路制造(上海)有限公司 套刻测量装置
TWI600876B (zh) * 2015-11-23 2017-10-01 財團法人工業技術研究院 量測系統
CN106441143B (zh) 2016-10-12 2019-03-08 哈尔滨工业大学 一种采用光学显微方式测量沟槽样品深度的方法
CN106840027B (zh) 2017-01-20 2019-10-18 南京理工大学 光学自由曲面的像散补偿型干涉检测装置与检测方法
CN107036539B (zh) 2017-06-14 2018-07-13 深圳中科飞测科技有限公司 膜厚测量系统及方法

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100019157A1 (en) * 2008-07-25 2010-01-28 Roche Molecular Systems, Inc. Excitation and Imaging Optics for Fluorescence Detection
JP2013195263A (ja) * 2012-03-21 2013-09-30 Denso Corp 幅寸法の測定装置
CN103759675A (zh) * 2013-12-23 2014-04-30 中国兵器工业第五二研究所 一种用于光学元件非球面微结构的同步检测方法
CN106959293A (zh) * 2015-11-13 2017-07-18 康耐视公司 通过视觉系统检测反光面上缺陷的系统及方法
CN108917625A (zh) * 2018-07-27 2018-11-30 深圳中科飞测科技有限公司 一种发光装置、光学检测系统和光学检测方法
CN109084678A (zh) * 2018-09-03 2018-12-25 深圳中科飞测科技有限公司 一种光学检测装置和光学检测方法

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