WO2020015347A1

WO2020015347A1 - Tma gas supply system for tubular pecvd furnace

Info

Publication number: WO2020015347A1
Application number: PCT/CN2019/072726
Authority: WO
Inventors: 李致文; 肖四哲; 张勇; 伍波
Original assignee: 深圳市捷佳伟创新能源装备股份有限公司
Priority date: 2018-07-17
Filing date: 2019-01-22
Publication date: 2020-01-23
Also published as: CN208762574U

Abstract

Provided is a TMA gas supply system for a tubular PECVD furnace, the system comprising a nitrogen gas source, a gas delivery pipeline, a TMA bottle, a liquid delivery pipeline, a fluid flowmeter (LFM01), an evaporator (CEM), and a process gas output pipeline, which are connected in sequence, wherein a gas mixing pipeline and a first mass flowmeter (FMC01) are connected in series between the nitrogen gas source and the evaporator; a gas delivery valve is connected in series in the gas delivery pipeline, a liquid delivery valve is connected in series in the liquid delivery pipeline, and a gas mixing valve (PV02) is connected in series in the gas mixing pipeline; a controller controls the opening and closing of the gas delivery valve, the liquid delivery valve and the gas mixing valve; and the opening degree of two flowmeters is controlled according to the flow measured by the two flowmeters. The present application endows a traditional PECVD apparatus with a process of manufacturing aluminum oxide, solves the problem of laminated deposition of ALOX with SiNX in one step, and has an excellent passivation effect when the thickness is less than 12 nm. The operation is simple, and the laminated deposition is completed in one step, thus only requiring the changing of the relevant formulation parameters. Two TMA source bottles are used for supplying gas for the system, such that the gas supply for the system will not be affected when an empty source bottle is replaced.

Description

TMA gas supply system for tubular PECVD furnace

Technical field

The utility model relates to solar cell production equipment, in particular to a TMA gas supply system for a tubular PECVD furnace.

Background technique

With the development of the photovoltaic industry, the production process of tubular PECVD furnaces, which are mainly used to produce solar cells in the industry, has also been continuously improved and developed. PERC battery production technology is the main development direction at present. PERC passivation emitter and backside battery technology is based on the conventional battery to make a layer of alumina + silicon nitride on the backside, and then laser mold, the single crystal current efficiency can reach 21% or more.

Defects and shortcomings of the prior art: 1. Existing tubular PECVD equipment can only be used to deposit silicon nitride films on battery cells, and additional equipment (ALD or plate-type PECVD) is required to be used as the aluminum oxide film. 2. It is difficult to improve the photoelectric conversion efficiency of the cells produced by the existing PECVD equipment under the existing technical conditions.

Therefore, there is an urgent need in the industry to design a gas supply system that can convert TMA (trimethylaluminum) liquid into a gas state on the basis of traditional PECVD equipment in order to meet the requirements of the process for the TMA source. Bottle supply liquid, you can continue to supply liquid when changing the TMA source bottle.

Utility model content

In order to solve the above-mentioned shortcomings in the prior art, the present invention proposes a TMA gas supply system for a tubular PECVD furnace that can continuously supply liquid.

In order to solve the above technical problems, the technical solution proposed by the present utility model is to design a TMA gas supply system for a tubular PECVD furnace, which includes a nitrogen source, an air supply pipeline, a TMA bottle, a liquid supply pipeline, and a liquid flow meter LFM01 connected in this order. , Evaporator CEM, process gas output pipeline, the nitrogen source and the evaporator CEM are also connected in series with the gas mixing pipeline and the first mass flowmeter FMC01, the gas supply pipeline in series with the air valve, liquid delivery pipeline The medium string shuttle liquid valve and the gas mixing valve PV02 are connected in series. The liquid flow meter LFM01 and the first mass flow meter are connected to a controller. The controller controls the opening and closing of the gas supply valve, the liquid supply valve and the gas mixing valve. The opening of the liquid flow meter LFM01 and the first mass flow meter FMC01 is controlled according to the flow rates measured by the two flow meters.

The air supply line includes first and second air supply lines, the TMA bottle includes first and second TMA bottles, and the liquid supply line includes first and second liquid supply lines; wherein the first air supply tube Circuit, the first TMA bottle and the first liquid feeding pipeline are connected in series in sequence and connected to the liquid flow meter LFM01. The first gas feeding pipeline is connected with the first gas feeding valve PV10 in series, and the first liquid feeding pipeline is connected with the first liquid feeding pipeline in series. Liquid valve PV11; the second gas supply line, the second TMA bottle, and the second liquid supply line are connected in series to the liquid flow meter LFM01, and the second gas supply line is connected to the second gas supply valve PV08 and the second liquid supply A second liquid feeding valve PV09 is connected in series in the pipeline; the controller controls the opening and closing of the first liquid feeding valve PV10, the first liquid feeding valve PV11, the second liquid feeding valve PV08, and the second liquid feeding valve PV09.

The first TMA bottle has an air inlet and a liquid outlet. The air inlet is provided with a twelfth manual valve MV12, the liquid outlet is provided with a thirteenth manual valve MV13, and the twelfth manual valve MV12 to The eighteenth control valve PV18 is connected between the first air supply valve PV10, and the nineteenth control valve PV19 and the twenty-fifth control valve PV25 are connected in sequence between the thirteenth manual valve MV13 and the first liquid supply valve PV11. The line between the valve PV10 to the eighteenth control valve PV18 and the line between the twenty-fifth control valve PV25 to the nineteenth control valve PV19 are connected to the fifteenth control valve PV15; The second TMA bottle has an air inlet and a liquid outlet. The air inlet is provided with a tenth manual valve MV10. The liquid outlet is provided with an eleventh manual valve MV11. The tenth manual valve MV10 to the second air supply valve PV08. The sixteenth control valve PV16 is connected between the eleventh manual valve MV11 and the second liquid feeding valve PV09. The seventeenth control valve PV17, the twenty-fourth control valve PV24, and the second air supply valve PV08 to the tenth are connected in this order. The line between the six control valves PV16, the line between the twenty-fourth control valve PV24 to the seventeenth control valve PV17, and the connection between these two lines Fourteenth control valve PV14; the nitrogen source is connected to the second mass flow meter FMC02, and the outlet of the second mass flow meter FMC02 is connected to the first liquid feeding valve PV11 to the twenty-fifth control valve PV25 through the sixth control valve PV06. Between the second mass flowmeter FMC02 and the outlet of the second mass flowmeter FMC02 through the 22nd control valve PV22 to the 19th control valve PV25; the second mass flowmeter FMC02 The outflow port is connected to the pipeline between the second liquid feeding valve PV09 to the twenty-fourth control valve PV24 through the seventh control valve PV07, and the outflow port of the second mass flow meter FMC02 is connected to the twentieth through the twenty-third control valve PV23. The pipeline from the four control valves PV24 to the seventeenth control valve PV17; the pipeline between the first air supply valve PV10 to the eighteenth control valve PV18 is coupled to the vacuum generating device through the thirteenth control valve PV13, and the second air supply valve PV08 The pipeline from the sixteenth control valve PV16 is coupled to the vacuum generating device through the twelfth control valve PV12; the controller receives the measurement measured by the second mass flow meter FMC02, and the controller controls the first Opening and closing of six to nineteenth control valves, And controlling opening and closing of the twenty-second to twenty-fifth of the control valve PV25.

The twelfth control valve PV12 and the thirteenth control valve PV13 are both connected to a vacuum generating device through a twentieth control valve PV20.

An outflow port of the first mass flow meter FMC01 is connected to the evaporator CEM, and is also connected to the process gas output pipeline through a first control valve PV01.

The process gas output line is connected to a vacuum generating device through a fifth control valve PV05, and the exhaust port of the evaporator CEM is connected to a vacuum generating device through a fourth control valve PV04.

The output port of the nitrogen source is connected in series with a pressure reducing valve PR002 and a purifier P01.

The process gas output pipeline is provided with five gas output ports.

An electronic scale is installed at the bottom of the first TMA bottle and the second TMA bottle. The electronic scale sends the weight value to the controller, and the controller calculates the amount of TMA in the first TMA bottle and the second TMA bottle. And control one of the TMA bottles to supply liquid.

Compared with the prior art, the utility model enables the traditional PECVD equipment to be equipped with an alumina process, which solves the lamination deposition of ALOX plus SiNX in one-stop, and has excellent passivation effect when the thickness is less than 12nm; the operation is simple, The stacked deposition is completed in one step, and only the relevant formula parameters need to be changed; the dual TMA source bottle is used to supply the system gas, so that the system gas supply is not affected when the empty source bottle is replaced.

BRIEF DESCRIPTION OF THE DRAWINGS

The following describes the utility model in detail with reference to the embodiments and the drawings, in which:

Figure 1 is a schematic diagram of a single TMA source bottle liquid supply;

Figure 2 is a schematic diagram of the liquid supply of a dual TMA source bottle;

FIG. 3 is a schematic diagram of a gas path of a preferred embodiment.

detailed description

In order to make the purpose, technical solution and advantages of the present utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

In order to solve the above technical problems, the technical solution proposed by the present utility model is to design a TMA gas supply system for a tubular PECVD furnace. Referring to FIG. 1, it includes a nitrogen source, a gas supply pipeline, a TMA bottle, a liquid supply pipeline, A liquid flow meter LFM01, an evaporator CEM, and a process gas output line, a gas mixing line and a first mass flow meter FMC01 are connected in series between the nitrogen source and the evaporator CEM, and a gas valve is connected in series in the air supply line, The liquid feeding line is connected with a liquid feeding valve in series, and the gas mixing line is connected with a gas mixing valve PV02 in series. The liquid flow meter LFM01 is connected to a controller of the first mass flow meter, and the controller controls the gas feeding valve, the liquid feeding valve and the gas mixing valve The opening degree of the liquid flow meter LFM01 and the first mass flow meter FMC01 are controlled according to the flow rates measured by the two flow meters.

The general working process is: a high-purity nitrogen source applies air pressure to the TMA in the source bottle through the air supply line, pressurizes it to about 4 bar, and the TMA liquid flows into the liquid supply line under the pressure, and is calculated by the liquid flow meter LFM01 The flow rate is then evaporated into gas in the evaporator CEM at high temperature, and mixed with the nitrogen gas sent from the other channel through the gas mixing pipe and the first mass flow meter FMC01, and then sent to the PECVD reactor through the process gas output pipe. In the control process, the controller controls the opening and closing of the air supply valve, the liquid supply valve and the gas mixing valve, and controls the liquid flow meter LFM01 and the first mass flow meter according to the flow values fed back from the liquid flow meter LFM01 and the first mass flow meter FMC01. The opening degree of FMC01 is used to control the mixing ratio of TMA and nitrogen. The controller may be a PLC program controller.

TMA is provided by the TMA source bottle. When the TMA in the bottle is exhausted, the reaction will be interrupted and production will be affected. Therefore, in the preferred embodiment, two systems are provided as backups for supplying gas to each other. Refer to the schematic diagram of the dual TMA source bottle liquid supply shown in FIG. 2. The air supply line includes first and second air supply lines, the TMA bottle includes first and second TMA bottles, and the liquid supply line includes first and second liquid supply lines; wherein the first air supply tube Circuit, the first TMA bottle and the first liquid feeding pipeline are connected in series in sequence and connected to the liquid flow meter LFM01. The first gas feeding pipeline is connected with the first gas feeding valve PV10 in series, and the first liquid feeding pipeline is connected with the first liquid feeding pipeline in series. Liquid valve PV11; the second gas supply line, the second TMA bottle, and the second liquid supply line are connected in series to the liquid flow meter LFM01, and the second gas supply line is connected to the second gas supply valve PV08 and the second liquid supply A second liquid feeding valve PV09 is connected in series in the pipeline; the controller controls the opening and closing of the first liquid feeding valve PV10, the first liquid feeding valve PV11, the second liquid feeding valve PV08, and the second liquid feeding valve PV09. The two sets of gas supply systems are standby for each other. When one bottle of TMA runs out, the other bottle can continue to supply gas, and production will not be affected.

TMA has a certain viscosity, and it will react violently or explode when it comes into contact with air or water, so the pipeline needs to be cleaned when replacing the gas cylinder. Referring to FIG. 3, a schematic diagram of a gas circuit of a preferred embodiment: the first TMA bottle has an air inlet and a liquid outlet, a twelfth manual valve MV12 is provided on the air inlet, and a liquid outlet is provided on the liquid outlet The thirteenth manual valve MV13, the twelfth manual valve MV12 to the first air supply valve PV10 are connected to the eighteenth control valve PV18, and the thirteenth manual valve MV13 to the first liquid supply valve PV11 are connected in order to the nineteenth The control line PV19, the twenty-fifth control valve PV25, the line between the first air supply valve PV10 to the eighteenth control valve PV18, and the line between the twenty-fifth control valve PV25 to the nineteenth control valve PV19. A fifteenth control valve PV15 is connected between the two pipes; the second TMA bottle has an air inlet and a liquid outlet, a tenth manual valve MV10 is provided on the air inlet, and an eleventh is provided on the liquid outlet. The sixteenth control valve PV16 is connected between the manual valve MV11, the tenth manual valve MV10 and the second air supply valve PV08, and the seventeenth control valve PV17, The line between the twenty-fourth control valve PV24, the second air supply valve PV08 to the sixteenth control valve PV16, and the twenty-fourth control valve PV24 to the seventeenth The pipeline of the control valve PV17 and the fourteenth control valve PV14 are connected between the two pipelines; the nitrogen source is connected to the second mass flow meter FMC02, and the outlet of the second mass flow meter FMC02 is connected through the sixth control valve PV06 The pipeline between the first liquid feeding valve PV11 to the twenty-fifth control valve PV25, and the outlet of the second mass flow meter FMC02 is connected to the twenty-fifth control valve PV25 to the nineteenth control through the twenty-second control valve PV22. The pipeline between valve PV19; the outlet of the second mass flow meter FMC02 is connected to the pipeline between the second liquid feeding valve PV09 to the twenty-fourth control valve PV24 through the seventh control valve PV07, and the second mass flow meter FMC02 The outflow port is connected to the pipeline from the twenty-fourth control valve PV24 to the seventeenth control valve PV17 through the twenty-third control valve PV23; the pipeline between the first air supply valve PV10 to the eighteenth control valve PV18 is through the tenth The three control valves PV13 are coupled to the vacuum generating device, and the pipeline between the second air supply valve PV08 to the sixteenth control valve PV16 is coupled to the vacuum generating device through the twelfth control valve PV12; the controller receives the second mass Metered by flowmeter FMC02, the controller Opening and closing system of the sixth to nineteenth control valve, and controlling opening and closing of the twenty-second to twenty-fifth of the control valve PV25. It should be noted that, in the preferred embodiment, the control valve is a pneumatic control valve.

An outflow port of the first mass flow meter FMC01 is connected to the evaporator CEM, and is also connected to the process gas output pipeline through a first control valve PV01. When the gas supply system is activated for the first time, the process gas output line can be purged with nitrogen for cleaning.

The process gas output line is connected to a vacuum generating device through a fifth control valve PV05, and the exhaust port of the evaporator CEM is connected to a vacuum generating device through a fourth control valve PV04. When the gas supply system is activated for the first time, the process gas output line evaporator CEM can be cleaned by vacuuming.

The output port of the nitrogen source is connected in series with a pressure reducing valve PR002 and a purifier P01. The pressure reducing valve PR002 can reduce the pressure of nitrogen and stabilize the pressure. Purifier P01 can purify nitrogen components.

The process gas output pipeline is provided with 5 gas output ports, which can be connected to multiple interfaces of the PECVD furnace.

The working principle of the preferred embodiment of the present invention is described in detail below with reference to FIG. 3.

Gas supply for the first TMA bottle: The nitrogen is depressurized through the pressure reducing valve PR002, and then the nitrogen component is purified by the purifier P01. PV10 is turned on, PV18 is turned on, MV12 and MV13 have been manually opened, and nitrogen pushes the liquid in the first TMA bottle through PV19, PV25, PV11, after passing through the liquid flow meter LFM01 (LFM01 can feedback, can control the TMA liquid flow rate), and then evaporated into gas in the evaporator CEM; meanwhile, the other nitrogen gas passes through PV02 and the first mass flow meter FMC01 (FMC01 can feedback (Can control the flow of nitrogen) into the evaporator CEM and mix with TMA gas, and then convey it to the PECVD reactor through the process gas output line (1-PV21 to 5-PV21) for the process.

Gas supply in the second TMA bottle: The nitrogen is depressurized through the pressure reducing valve PR002, and then the nitrogen component is purified by the purifier P01. PV08 is turned on, PV16 is turned on, MV10 and MV11 have been manually opened. PV24, PV09, pass through the liquid flow meter LFM01, and then evaporate to gas in the evaporator CEM; meanwhile, another nitrogen gas is sequentially passed through PV02, the first mass flow meter FMC01 to the evaporator CEM and mixed with TMA gas, and is output through the process gas Pipes (1-PV21 to 5-PV21) are sent to the PECVD reactor for processing.

An electronic scale is installed at the bottom of the TMA bottle. The electronic scale feedbacks the weight of the TMA to the controller. When the TMA is about to run out, the controller closes the corresponding set of gas supply lines through the control valve, activates another set of gas supply lines, and then replaces them. An empty TMA bottle, thereby achieving continuous gas supply without affecting production.

Before replacing the gas bottle, you need to press the TMA liquid in the liquid supply line back to the TMA bottle, purge the liquid supply line and the gas supply line with nitrogen, evacuate the liquid supply line and the gas supply line, and then replace the TMA bottle. Then, the liquid feeding pipeline and the gas feeding pipeline are purged with nitrogen, and then the liquid feeding pipeline and the gas feeding pipeline are evacuated, and finally the liquid is supplied by a TMA bottle.

Replace the first TMA bottle: the first step, back pressure of TMA liquid. The nitrogen flow is calculated by the second mass flow meter FMC02, and then the TMA liquid in the liquid delivery pipeline is returned to the TMA bottle through PV06, PV25, PV19, and MV13. The tube connected to MV13 extends into the bottom of the TMA bottle, and the tube connected to MV12 extends. In the upper part of the TMA bottle, the nitrogen in the upper part of the TMA bottle is discharged through the MV12, PV18, PV13, and PV20 due to the return of the TMA liquid; the controller receives the flow value from the second mass flow meter FMC02, and presets the flow threshold value. When the accumulated flow value reaches the flow threshold, the TMA liquid is fully returned to the TMA bottle, and the liquid back pressure is stopped at this time. The second step is to fill the pipeline with nitrogen. The operator manually closes the twelfth manual valve MV12 and the thirteenth manual valve MV13, the controller closes PV25 and opens PV15, and nitrogen is flushed into the pipeline through the second mass flow meter FMC02, PV22, PV19, PV18, and PV15. And hold for 5 minutes. The third step is to evacuate the pipe. The controller closes PV06, PV22, PV25, and the vacuum generating device evacuates the pipeline through PV20, PV13, PV18, PV15, and PV19. In the fourth step, the pipeline of the second step is repeatedly filled with nitrogen and the pipeline of the third step is evacuated. The fifth step is to replace the first TMA bottle. In the sixth step, the pipeline of the second step is repeatedly filled with nitrogen and the pipeline of the third step is evacuated. In the seventh step, the operator manually opens the twelfth manual valve MV12 and the thirteenth manual valve MV13, and the first TMA bottle can be refilled.

Replace the second TMA bottle: the first step, back pressure of TMA liquid. The nitrogen flow is calculated by the second mass flow meter FMC02, and then the TMA liquid in the liquid delivery line is returned to the TMA bottle through PV07, PV24, PV17, and MV11. The tube connected by MV11 extends into the bottom of the TMA bottle, and the tube connected by MV10 extends. In the upper part of the TMA bottle, the nitrogen in the upper part of the TMA bottle is discharged through the MV10, PV16, PV12, PV20 due to the return of the TMA liquid; the controller receives the flow value from the second mass flow meter FMC02, and presets the flow threshold value. When the accumulated flow value reaches the flow threshold, the TMA liquid is fully returned to the TMA bottle, and the liquid back pressure is stopped at this time. The second step is to fill the pipeline with nitrogen. The operator manually closes the tenth manual valve MV10 and the eleventh manual valve MV11. The controller closes PV24 and opens PV14. Nitrogen is flushed into the pipeline through the second mass flow meter FMC02, PV23, PV17, PV14, and PV16 to ensure that Press for 5 minutes. The third step is to evacuate the pipe. The controller closes PV07, PV23, PV24, and the vacuum generating device evacuates the pipeline through PV20, PV12, PV16, PV14, and PV17. In the fourth step, the pipeline of the second step is repeatedly filled with nitrogen and the pipeline of the third step is evacuated. The fifth step is to replace the second TMA bottle. In the sixth step, the pipeline of the second step is repeatedly filled with nitrogen and the pipeline of the third step is evacuated. In the seventh step, the operator manually opens the tenth manual valve MV10 and the eleventh manual valve MV11, and the second TMA bottle can be refilled.

The above embodiments are merely examples and are not intended to limit the present invention. Any modification, equivalent replacement, and improvement made within the spirit and principles of the present invention shall be included in the protection scope of the present invention. .

Claims

A TMA gas supply system for a tubular PECVD furnace, which is characterized in that it includes a nitrogen source, an air supply pipeline, a TMA bottle, a liquid supply pipeline, a liquid flow meter (LFM01), an evaporator (CEM), and a process gas output connected in sequence. A pipeline is connected in series between the nitrogen source and the evaporator, and a first mass flow meter (FMC01) is connected in series. A gas mixing valve (PV02) is connected in series in the gas pipeline. The liquid flow meter and the first mass flow meter are connected to a controller. The controller controls the opening and closing of the gas feeding valve, the liquid feeding valve, and the gas mixing valve. The flow measurement controls the opening of the liquid flow meter and the first mass flow meter.
The TMA gas supply system for a tubular PECVD furnace according to claim 1, wherein the gas supply pipeline includes first and second gas supply pipelines, and the TMA bottle includes first and second TMA bottles, and The liquid feeding pipeline includes first and second liquid feeding pipelines;

The first air supply line, the first TMA bottle, and the first liquid supply line are connected in series to the liquid flow meter (LFM01). The first air supply line is connected to the first air supply valve (PV10) and the first liquid supply. The first liquid feeding valve (PV11) is connected in series in the pipeline;

The second air supply line, the second TMA bottle, and the second liquid supply line are connected in series to the liquid flow meter (LFM01), and the second air supply line is connected to the second air supply valve (PV08) and the second liquid supply The second liquid feeding valve (PV09) is connected in series in the pipeline;

The controller controls the opening and closing of the first air-supply valve, the first liquid-supply valve, the second air-supply valve, and the second liquid-supply valve.
The TMA gas supply system for a tubular PECVD furnace according to claim 2, wherein the first TMA bottle has an air inlet and a liquid outlet, and a twelfth manual valve (MV12) is provided on the air inlet. 13 、 The thirteenth manual valve (MV13) is set on the liquid outlet. The eighteenth control valve (PV18) and the thirteenth manual valve are connected between the twelfth manual valve (MV12) and the first air supply valve (PV10). (MV13) to the first liquid delivery valve (PV11) are connected in order from the 19th control valve (PV19), the 25th control valve (PV25), the first air supply valve (PV10) to the 18th control valve (PV18) ), And the 25th control valve (PV25) to the 19th control valve (PV19), the 15th control valve (PV15) is connected between these two lines;

The second TMA bottle has an air inlet and a liquid outlet. The air inlet is provided with a tenth manual valve (MV10), the liquid outlet is provided with an eleventh manual valve (MV11), and the tenth manual valve (MV10). ) To the second air supply valve (PV08) is connected to the sixteenth control valve (PV16), and the eleventh manual valve (MV11) to the second liquid supply valve (PV09) is connected in order to the seventeenth control valve (PV17) The line between the twenty-fourth control valve (PV24), the second air supply valve (PV08) to the sixteenth control valve (PV16), and the twenty-fourth control valve (PV24) to the seventeenth control valve (PV24) PV17) pipeline, and the fourteenth control valve (PV14) is connected between these two pipelines;

The nitrogen source is connected to the second mass flow meter (FMC02), and the outflow port of the second mass flow meter (FMC02) is connected to the first liquid feeding valve (PV11) to the twenty-fifth control valve (PV11) through a sixth control valve (PV06). PV25), the outlet of the second mass flow meter (FMC02) is connected between the twenty-fifth control valve (PV25) to the nineteenth control valve (PV19) through the twenty-second control valve (PV22) The pipeline of the second mass flow meter (FMC02) is connected to the pipeline between the second liquid delivery valve (PV09) and the twenty-fourth control valve (PV24) through the seventh control valve (PV07), and the second The outlet of the mass flow meter (FMC02) is connected to the pipeline from the twenty-fourth control valve (PV24) to the seventeenth control valve (PV17) through the twenty-third control valve (PV23);

The pipeline between the first air supply valve (PV10) to the eighteenth control valve (PV18) is coupled to the vacuum generating device through the thirteenth control valve (PV13), and the second air supply valve (PV08) to the sixteenth control valve (PV08) The pipeline between PV16) is coupled to the vacuum generating device through the twelfth control valve (PV12);

The controller receives the measurement measured by the second mass flow meter (FMC02), the controller controls opening and closing of the sixth to nineteenth control valves, and controls the twenty-second to twentieth Opening and closing of five control valves (PV25).
The TMA gas supply system for a tubular PECVD furnace according to claim 3, wherein the twelfth control valve (PV12) and the thirteenth control valve (PV13) are connected through a twentieth control valve (PV20) Vacuum generating device.
The TMA gas supply system for a tube-type PECVD furnace according to claim 4, characterized in that the outflow port of the first mass flow meter (FMC01) is connected to the evaporator (CEM), and also through a first control valve (PV01) ) Connect the process gas output pipeline.
The TMA gas supply system for a tubular PECVD furnace according to claim 5, wherein the process gas output pipe is connected to a vacuum generating device through a fifth control valve (PV05), and the exhaust gas of the evaporator (CEM) The port is connected to a vacuum generating device through a fourth control valve (PV04).
The tube-type PECVDPR002 furnace TMA gas supply system according to claim 6, characterized in that: the output port of the nitrogen source is connected in series with a pressure reducing valve (PR002) and a purifier (P01).
The tube-type PECVDPR002 furnace TMA gas supply system according to claim 7, wherein the process gas output pipeline is provided with five gas output ports.
The TMA gas supply system for a tubular PECVDPR002 furnace according to any one of claims 2 to 8, characterized in that an electronic scale is installed at the bottom of the first TMA bottle and the second TMA bottle, and the electronic scale will weigh the weight The value is sent to the controller, and the controller controls one of the TMA bottles to supply liquid according to the amount of TMA liquid in the first TMA bottle and the second TMA bottle.