CN110081310A - Online solar control film coating system silane busbar connector and its air supplying operation method - Google Patents
Online solar control film coating system silane busbar connector and its air supplying operation method Download PDFInfo
- Publication number
- CN110081310A CN110081310A CN201910409762.XA CN201910409762A CN110081310A CN 110081310 A CN110081310 A CN 110081310A CN 201910409762 A CN201910409762 A CN 201910409762A CN 110081310 A CN110081310 A CN 110081310A
- Authority
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- China
- Prior art keywords
- silane
- air supply
- supply channel
- pressure
- gas air
- Prior art date
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- Granted
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- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 title claims abstract description 327
- 229910000077 silane Inorganic materials 0.000 title claims abstract description 327
- 238000000034 method Methods 0.000 title claims abstract description 31
- 239000007888 film coating Substances 0.000 title claims abstract description 30
- 238000009501 film coating Methods 0.000 title claims abstract description 30
- 239000007789 gas Substances 0.000 claims abstract description 260
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 227
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 111
- 238000009826 distribution Methods 0.000 claims abstract description 65
- 239000003638 chemical reducing agent Substances 0.000 claims description 30
- 238000010926 purge Methods 0.000 claims description 30
- 230000008569 process Effects 0.000 claims description 12
- 229910052710 silicon Inorganic materials 0.000 claims description 8
- 239000010703 silicon Substances 0.000 claims description 8
- 150000001335 aliphatic alkanes Chemical class 0.000 claims description 6
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 5
- 239000003599 detergent Substances 0.000 claims description 4
- 239000000203 mixture Substances 0.000 claims description 2
- 238000007664 blowing Methods 0.000 claims 1
- 150000004756 silanes Chemical class 0.000 claims 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract description 10
- 239000000428 dust Substances 0.000 abstract description 10
- 239000001301 oxygen Substances 0.000 abstract description 10
- 229910052760 oxygen Inorganic materials 0.000 abstract description 10
- 238000012423 maintenance Methods 0.000 abstract description 6
- 238000004140 cleaning Methods 0.000 description 18
- 238000004519 manufacturing process Methods 0.000 description 16
- 239000011521 glass Substances 0.000 description 13
- 230000006837 decompression Effects 0.000 description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 230000000903 blocking effect Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 239000005329 float glass Substances 0.000 description 5
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- 239000012495 reaction gas Substances 0.000 description 3
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 2
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 2
- 239000005977 Ethylene Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000010924 continuous production Methods 0.000 description 2
- 229910001882 dioxygen Inorganic materials 0.000 description 2
- 238000004880 explosion Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 238000011017 operating method Methods 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- -1 silicon Alkane Chemical class 0.000 description 2
- 241000196324 Embryophyta Species 0.000 description 1
- 241000009298 Trigla lyra Species 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010790 dilution Methods 0.000 description 1
- 239000012895 dilution Substances 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- XLYOFNOQVPJJNP-ZSJDYOACSA-N heavy water Substances [2H]O[2H] XLYOFNOQVPJJNP-ZSJDYOACSA-N 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000000197 pyrolysis Methods 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000005496 tempering Methods 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
- B08B9/02—Cleaning pipes or tubes or systems of pipes or tubes
- B08B9/027—Cleaning the internal surfaces; Removal of blockages
- B08B9/032—Cleaning the internal surfaces; Removal of blockages by the mechanical action of a moving fluid, e.g. by flushing
- B08B9/0321—Cleaning the internal surfaces; Removal of blockages by the mechanical action of a moving fluid, e.g. by flushing using pressurised, pulsating or purging fluid
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
- B08B9/02—Cleaning pipes or tubes or systems of pipes or tubes
- B08B9/027—Cleaning the internal surfaces; Removal of blockages
- B08B9/032—Cleaning the internal surfaces; Removal of blockages by the mechanical action of a moving fluid, e.g. by flushing
- B08B9/035—Cleaning the internal surfaces; Removal of blockages by the mechanical action of a moving fluid, e.g. by flushing by suction
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
- C03C17/23—Oxides
- C03C17/245—Oxides by deposition from the vapour phase
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17D—PIPE-LINE SYSTEMS; PIPE-LINES
- F17D1/00—Pipe-line systems
- F17D1/02—Pipe-line systems for gases or vapours
- F17D1/04—Pipe-line systems for gases or vapours for distribution of gas
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17D—PIPE-LINE SYSTEMS; PIPE-LINES
- F17D3/00—Arrangements for supervising or controlling working operations
- F17D3/01—Arrangements for supervising or controlling working operations for controlling, signalling, or supervising the conveyance of a product
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17D—PIPE-LINE SYSTEMS; PIPE-LINES
- F17D5/00—Protection or supervision of installations
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/21—Oxides
- C03C2217/213—SiO2
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
The present invention provides a kind of online solar control film coating system silane busbar connector and its air supplying operation method, the silane busbar connector includes the silane gas air supply channel as pressure duct, distribution frame connecting line as low pressure line, for being connected to the relief line of pressure duct and low pressure line, vacuum evacuation device and vacuum diverter switch group, wherein, silane gas air supply channel and relief line are connected to vacuum evacuation device respectively, vacuum diverter switch is respectively equipped on each connecting line as vacuum diverter switch group, for switching silane gas air supply channel, the on-off of relief line and vacuum evacuation device.The present invention uses the assembled scheme of two silane gas air supply channels and vacuum diverter switch group, realizes and stablizes continual gas supply；And drained in the pipeline for making silane busbar connector using drainage vacuum device cooperation high pressure nitrogen and generate negative pressure, pipeline is sufficiently cleaned using high pressure nitrogen, reduces pipeline oxygen content, the generation of silane dust is reduced, to reduce instrument maintenance cost.
Description
Technical field
The invention belongs to coating film on glass technical field, it is related on floatation glass production line online solar control film plating membrane system
System, and in particular to a kind of online solar control film coating system silane busbar connector and its air supplying operation method.
Background technique
Country's float glass production capacity is seriously superfluous at present, and float glass producer takes measures to reduce one after another and thus bring
Loss.In the case where not influencing float glass and normally producing, increase a set of on-line coating equipment production plating in the production line
Film glass can greatly improve the technology content of glass product, promote the profit margin of product, while can avoid tight with production capacity
Competition between the superfluous float glass sheet of weight.And solar control film coating system therein is due to investing small, cost recovery
Fastly, production is flexible, so the favor by many float glass factories.
Online solar control film coating technique be in the molten tin bath of floatation glass production line, under suitable temperature, atmosphere,
A kind of reaction gas of specific proportion is equably sprayed on clean glass surface, is allowed to that pyrolysis occurs:
Silane decomposes to deposit one layer of nano-level thin-membrane on the glass surface, and entire process flow is very simple, does not break
Bad original molten tin bath atmosphere, does not influence the normal production of production line.There are other plated film works with the coated glass that technique produces
The incomparable advantage of skill: yield is big, at low cost, and specification is complete；With high-transmittance or high reflectance；It can be carried out tempering, heat
Curved processing；High temeperature chemistry film forming, film layer is secured, has very strong wearability and chemical stability.
When high-volume continuous production solar control film coated glass, keep plated film gas raw material stablizes supply right and wrong
An often important ring.Solar control film coating film production line uses silane gas as primary raw material, the design of silane gas busbar connector,
It is most important to the stable supply for guaranteeing reaction gas.Usually 16-25 bottles of silane are brought together in actual production, are made into one
A pallet, when production, once open all cylinder valves, and silane is after the pressure reducer pressure stabilizing on busbar connector, then is delivered to distribution
Frame is uniformly sent into reactor afterwards with gas mixings such as nitrogen, ethylene and is reacted.Wherein, start gas supply, terminate gas supply and centre
Gas cylinder switching is to cause to supply three unstable main time sections, and shortening these three periods as far as possible is improve yield rate one
A key.
A problem is further encountered in existing plated film production, is exactly difficult with nitrogen detergent line the air in pipeline
It completely removes, the oxygen in air and silane are easy to happen following decomposition reaction:
SiH4+2O2=SiO2↓+2H2O 3)
Therefore, when each plated film terminates detergent line, it can always find that many silane decompose the powder (SiO generated2) stifled
Flow controller, instrument etc. are clogged, before plated film production next time, needs complete liquidation completely could normal use.So as far as possible
The oxygen gas component contained by channel interior is reduced, is to avoid silane oxidation, to generate the key of dust and blocking pipeline.
Summary of the invention
To solve the above-mentioned problems, the present invention provides a kind of online solar control film coating system silane busbar connector, should
When busbar connector is able to solve high-volume continuous production solar control film glass, caused by the gas cylinder switching on silane busbar connector
Reaction gas supplies the insufficient problem of the air cleaning in unstable problem and pipeline.
The above problem of the invention is solved by following technical scheme:
A kind of online solar control film coating system silane busbar connector is logical including the silane gas gas supply as pressure duct
Road, as the distribution frame connecting line (03) of low pressure line, the relief line (06) for being connected to pressure duct and low pressure line,
Vacuum evacuation device (05) and vacuum diverter switch group (04), wherein silane gas air supply channel and relief line (06) respectively with
Vacuum evacuation device (05) is connected to, and vacuum diverter switch composition vacuum diverter switch group (04) is respectively equipped on each connecting line, is used
In the on-off of switching silane gas air supply channel, relief line (06) and vacuum evacuation device (05).
Above-mentioned online solar control film coating system in silane busbar connector, the relief line (06) include two-way each other
The relief passage of backup is respectively serially connected with the first relief passage of the first pressure reducer (10) and is serially connected with the second pressure reducer (21)
The second relief passage, the high-voltage end of two-way relief passage is connected, low-pressure end is connected, and high-voltage end and silane gas gas supply are logical
Road connection, low-pressure end are connect with distribution frame connecting line (03)；Two relief passages allow hand over use.
Above-mentioned online solar control film coating system with there are two in silane busbar connector, the silane gas air supply channel is set,
Respectively the first silane gas air supply channel (01) and the second silane gas air supply channel (02), the first silane gas air supply channel
(01) identical and arranged symmetrically with the second silane gas air supply channel (02) structure.
For above-mentioned online solar control film coating system in silane busbar connector, the silane gas air supply channel includes silane collection
Gas frame, centralized arrangement has multiple silane cylinders on silane beehive, and the outlet of multiple silane cylinder is and in silane beehive
Gas collection pipe be connected, the entrance of gas collection pipe connection nitrogen accesses pipeline, which accesses piping connection elevated pressure nitrogen gas source,
Nitrogen access pipeline also concatenates nitrogen purge valve and check valve；The outlet of gas collection pipe passes through silane gas supply air line, relief pipe
Road (06) connects distribution frame connecting line (03), and silane gas supply air line is equipped with steam supply valve, pressure vacuum meter and check valve.
Above-mentioned online solar control film coating system is in silane busbar connector, on the distribution frame connecting line (03) successively
It is serially connected with valve 23 (23), third pressure vacuum meter (24), steam supply valve (25) and the distribution bridge joint for connecting distribution frame
Mouth (26).
For above-mentioned online solar control film coating system in silane busbar connector, the vacuum evacuation device (05) includes a drainage
Vacuum device (32), drainage vacuum device (32) is internal to be equipped with conical cavity (321), and the big end of conical cavity (321) is opened
Big end straight tube (323) are equipped at mouthful, the small end opening of conical cavity (321) is equipped with small end straight tube (324), conical cavity
(321) internal to set a drainage tube (322), which is located at the nozzle in conical cavity (321) towards small end straight tube (324),
Drainage tube (322) stretches out one end connection access high pressure, high purity nitrogen of conical cavity (321)；Drain the big of vacuum device (32)
Straight tube (323) are separately connected the first silane gas air supply channel (01), the second silane gas air supply channel (02) is connected with distribution frame at end
Pipeline (03).
Above-mentioned online solar control film coating system is in silane busbar connector, and the vacuum evacuation device (05) is respectively by the
One vacuum connector pipe (053), the second vacuum connector pipe (054) and third vacuum connector pipe (055) connect the first silane
Gas air supply channel (01), the second silane gas air supply channel (02) and distribution frame connecting line (03), the vacuum diverter switch group
(04) include the valve 28 (28) being serially connected on the first vacuum connector pipe (053), be serially connected in the second vacuum connector pipe
(054) valve 30 (30) on and the valve 27 (27) and valve being serially connected on third vacuum connector pipe (055)
29 (29).
Above-mentioned online solar control film coating system is in silane busbar connector, the small end of drainage vacuum device (32)
Straight tube (324) connect exhaust output tube road (052), be sequentially connected in series on exhaust output tube road (052) valve 33 (33) and
Water seal exports (34).
Above-mentioned online solar control film coating system is in silane busbar connector, the supply air line of the silane gas air supply channel
In be equipped with filter.
The present invention also provides a kind of gas supply using any of the above-described online solar control film coating system silane busbar connector
Operating method, comprising the following steps:
Step 1 cleans silane busbar connector by the way of " high pressure nitrogen is purged+vacuumized " before silane busbar connector supplies
Pipeline；
Step 2, after silane gas air supply channel gas supply starts, the first pressure in the first silane gas air supply channel (01)
When the pressure value of vacuum meter (6) display is 1MPa, switches to the second silane gas air supply channel (02) and start to supply, second pressure is true
After empty table (17) is stablized, the first silane gas air supply channel (01) is cut off, and replaces the first clean silane gas air supply channel
(01) the first silane beehive (4)；When the pressure value of second pressure vacuum meter (17) display is 1MPa, by the second silane gas
Air supply channel (02) switches to the first silane gas air supply channel (01) and continuously supplies, and it is logical to replace clean the second silane gas gas supply
The second silane beehive (15) in road (02)；
Step 3, silane busbar connector stops gas supply, using high pressure nitrogen detergent line silane busbar connector pipeline and and distribution
The distribution frame of frame connecting line (03) connection, the residual silane gas of silane busbar connector, distribution frame is emptied.
It is described clear by the way of " high pressure nitrogen is purged+vacuumized " in the step 1 in above-mentioned air supplying operation method
Wash silane busbar connector pipeline, comprising the following steps:
A) high pressure nitrogen is passed through silane gas air supply channel, relief line (06) and distribution frame connecting line (03) first,
And flow to distribution frame；
B) vacuum evacuation device (05) is connected to entire silane busbar connector pipeline and vacuumized；
C) step a) and step b) are repeated repeatedly, until the air in emptying busbar connector pipeline；
D) vacuum evacuation device (05) and silane busbar connector pipeline are disconnected, is provided using silane gas air supply channel to distribution frame
Silane gas.
In above-mentioned air supplying operation method, in step 2, replacement silane beehive includes " vacuumizing+high pressure nitrogen purging " mistake
Journey, specifically:
The silane cylinder valve in silane beehive is closed, vacuum evacuation device (05) is connected to silane gas air supply channel, and right
Silane gas air supply channel vacuumizes, and is then passed through high pressure nitrogen for the silane in silane gas air supply channel to silane gas air supply channel
The process of " vacuumizing+high pressure nitrogen purging " is repeated several times in gas emptying；Vacuum evacuation device (05) and silane gas air supply channel is disconnected
It opens；
After replacing silane beehive, " high pressure nitrogen is purged+vacuumized " process is repeated.
By adopting the above technical scheme, the present invention has following technical effect that
1) vacuum evacuation device is arranged in silane busbar connector of the present invention, and drainage vacuum device cooperation high pressure nitrogen drainage makes silane
Negative pressure is generated in the pipeline of busbar connector, pipeline is sufficiently cleaned using the high pure nitrogen of certain pressure, reduces pipeline oxygen content, is reduced
The generation of silane dust, to reduce instrument maintenance cost；
2) silane busbar connector pipeline is cleaned by way of multiple " high pressure nitrogen is purged+vacuumized ", solves existing pipe
Insufficient problem is cleaned on road, so that busbar connector pipeline-cleaning is cleaner, and before silane gas supply, is carried out to the pipeline after cleaning
It vacuumizes, prevents high pressure nitrogen in pipeline from reducing the concentration of silane gas and influence the film quality of solar control film；
3) assembled scheme for using two silane gas air supply channels and vacuum diverter switch group, prevents silane by check valve
Gas backflow implements the operation of " first open and close afterwards ", peace that silane gas is seamless in the gas cylinder switching of two silane gas air supply channels
Full switching, realizes and stablizes continual gas supply；
4) when replacing the silane beehive of silane gas air supply channel, using " vacuumizing+high pressure nitrogen purging " mode, row
Silane gas remaining in silane cylinder and pipeline in empty silane beehive avoids silane gas leakage so that explosion danger occurs.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the embodiment one of silane busbar connector of the present invention；
Fig. 2 is the schematic diagram of internal structure for draining vacuum evacuation device；
Fig. 3 is the partial structural diagram of the embodiment two of silane busbar connector of the present invention.
Appended drawing reference indicates in figure are as follows:
01- the first silane gas air supply channel, the first nitrogen of 011- access pipeline, the first supply air line of 012-；
02- the second silane gas air supply channel, the second nitrogen of 021- access pipeline, the second supply air line of 022-；
03- distribution frame connecting line；04- vacuum diverter switch group；
05- vacuum evacuation device, 051- third nitrogen access pipeline, 052- exhaust output tube road, the first bonding in vacuum of 053-
Pipeline, the second vacuum connector pipe of 054-, 055- third vacuum connector pipe；
06- relief line；
The first nitrogen interface of 1-, 2- the first nitrogen purge valve, the first check valve of 3-, 4- the first silane beehive, 5- first
Steam supply valve, 6- first pressure vacuum meter, 7- valve seven, 8- second one-way valve, 9- valve nine, the first pressure reducer of 10-, 11- valve
11；
The second nitrogen interface of 12-, 13- the second nitrogen purge valve, 14- third check valve, 15- the second silane beehive, 16-
Second steam supply valve, 17- second pressure vacuum meter, 18- valve 18, the 4th check valve of 19-, 20- valve 20,21- second subtract
Depressor, 22- valve 22；
23- valve 23,24- third pressure vacuum meter, 25- low pressure steam supply valve, 26- distribution bridge joint mouth；
27- valve 27,28- valve 28,29- valve 29,30- valve 30；
32- drains vacuum device, 321- conical cavity, 322- drainage tube, 323- big end straight tube, 324- small end straight tube；
35- third nitrogen interface, 31- drain valve, 33- valve 33,34- water seal outlet；
100- first filter, the second filter of 200-.
Specific embodiment
Solar control film plated film produces and uses silane gas as primary raw material, needs constantly to replace silicon in use process
Alkane gas cylinder, because replacement silane cylinder caused by silane gas interrupt or it is unstable, can to coating quality generate seriously affect, because
This needs to carry out silane gas seamless safety switching preferably to improve yield rate, realizes and stablizes uninterruptedly for silane gas.
Silane is easily oxidized and generates dust, easy blocking pipeline, therefore pipeline is passed through before silane gas, it is necessary to thorough cleaning pipe
Road.
Based on considerations above, the present invention provides a kind of online solar control film coating system silane busbar connector and its gas supply
Operating method, which uses the assembled scheme of two silane gas air supply channels and vacuum diverter switch group, by list
It prevents silane gas from flowing backwards to valve, implements the operation of " first open and close afterwards " in the gas cylinder switching of two silane gas air supply channels, it is real
Show and has stablized continual gas supply；And make the pipe of silane busbar connector using drainage vacuum device cooperation high pressure, high purity nitrogen drainage
Negative pressure is generated in road, and pipeline is sufficiently cleaned using the high pure nitrogen of certain pressure, reduces pipeline oxygen content, reduces silane dust
It generates, to reduce instrument maintenance cost.
Obviously, the use of bus structures of the present invention is not limited to the silane busbar connector of solar control film coating system, only
Non-creative change is carried out to structure of the invention, be equally applicable to other and need uninterrupted gas supply and/or gas itself easily
Other gas busbar connectors reacted with the oxygen in air.
Below in conjunction with the drawings and specific embodiments, to the online solar control film coating system silane busbar connector of the present invention and
Its air supplying operation method is described in detail.
Embodiment one
Fig. 1 is the structural schematic diagram of the embodiment one of silane busbar connector of the present invention.As shown in Figure 1, the silane busbar connector packet
Include the silane gas air supply channel as pressure duct, the distribution frame connecting line 03 as low pressure line, connection low pressure line with
Relief line 06, vacuum evacuation device 05 and the vacuum diverter switch group 04 of pressure duct, silane gas air supply channel and relief line
06 is connected to vacuum evacuation device 05 respectively, and vacuum diverter switch is respectively equipped on each connecting line as vacuum diverter switch group
04, for switching the on-off of silane gas air supply channel Yu vacuum evacuation device 05, to realize in pipeline for gaseity and vacuumizing shape
The conversion of state, in which:
Silane gas air supply channel includes silane beehive, and centralized arrangement has multiple silane cylinders on silane beehive, this is more
The outlet of a silane cylinder is connected with the gas collection pipe in silane beehive, and the entrance of gas collection pipe is connected to nitrogen access tube
Road, the nitrogen access piping connection elevated pressure nitrogen gas source, and nitrogen access pipeline also concatenates nitrogen purge valve and check valve；Gas collection pipe
Outlet distribution frame connecting line 03 is connected by silane gas supply air line, relief line 06, silane gas supply air line is equipped with
Steam supply valve, pressure vacuum meter and check valve.
Referring to Fig. 1, in the embodiment, silane gas air supply channel is equipped with two-way, respectively the first silane gas air supply channel 01
With the second silane gas air supply channel 02, the first silane gas air supply channel 01 and the second silane gas 02 structure of air supply channel are identical and right
Claim setting.
Specifically, silane gas air supply channel is equipped with two-way, 01 He of respectively the first silane gas air supply channel in the embodiment
Second silane gas air supply channel 02.Wherein, the first silane gas air supply channel 01 includes the first silane beehive 4, the first silane collection
Centralized arrangement has multiple silane cylinders on gas frame 4, and the outlet of multiple silane cylinder is connected with the first gas collection pipe, and first
The entrance of gas collection pipe is connected to the first nitrogen and accesses pipeline 011, nitrogen access tube road be sequentially connected in series the first nitrogen interface 1,
First nitrogen purge valve 2 and the first check valve 3, the first nitrogen interface 1 connect High Purity Nitrogen gas source (for example, it may be high pressure, high purity
Nitrogen busbar connector generally requires pressure to be greater than 8MPa), the first 2, check valve permission nitrogen enters the first silane gas air supply channel
In 01, silane gas cannot access in pipeline 011 in the first nitrogen to flow backwards；The outlet of first gas collection pipe passes through the first supply air line
012, relief line 06 connects distribution frame connecting line 03, and the first steam supply valve 5, the have been sequentially connected in series on the first supply air line 012
One pressure vacuum meter 6, valve 77 and second one-way valve 8, first pressure vacuum meter 6 is for monitoring in the first supply air line 011
The pressure of silane gas.First supply air line 012 is connect with relief line 06, and the silane gas in the first supply air line 012 is high pressure
Silane gas, through in relief line 06 the first pressure reducer 10 or the second pressure reducer 21 be kept to low pressure silane gas, into distribution frame
In connecting line 03, the pipeline before the first pressure reducer 10 or the second pressure reducer 21 is for pressure duct, the first pressure reducer 10
Or the second pipeline after pressure reducer 21 is low pressure line.Preferably, the gas pressure controlled in pressure duct is less than 15MPa,
Gas pressure control in low pressure line after the decompression of the first pressure reducer 10 is being less than 2.5MPa.
Second silane gas air supply channel 02 includes the second silane beehive 15, equally concentrates cloth on the second silane beehive 15
Multiple silane cylinders are equipped with, the outlet of multiple silane cylinder is connected with the second gas collection pipe, and the second gas collection pipe enters
Mouth the second nitrogen of connection accesses pipeline 021, which is sequentially connected in series the second nitrogen interface 12, the cleaning of the second nitrogen
Valve 13 and third check valve 14, the second nitrogen interface 12 connect High Purity Nitrogen gas source (for example, it may be high pressure, high purity nitrogen converges
Row generally requires pressure to be greater than 8MPa), 14 permission nitrogen of third check valve enter in the second silane gas air supply channel 02, silicon
Alkane gas cannot access in pipeline 021 in the second nitrogen to flow backwards；The outlet of first gas collection pipe passes through the second supply air line 022, subtracts
Pressure pipe road 06 connects distribution frame connecting line 03, has been sequentially connected in series the second steam supply valve 16, second pressure on the second supply air line 022
Vacuum meter 17, valve 18 and the 4th check valve 19.Because of the second silane gas air supply channel 02 and the first silane gas air supply channel
01 is symmetrical arranged, and two-way silane gas air supply channel structure and parameter setting having the same, other same structural parameters please join
According to the description of the first silane gas air supply channel 01, which is not described herein again.
Relief line 06 includes the mutually redundant relief passage of two-way, is respectively sequentially connected in series valve 99, the first pressure reducer
10, the first relief passage of valve 11 and valve 20, the second pressure reducer 21 and valve 22 are sequentially connected in series
Second relief passage, high-voltage end and the low-pressure end of two-way relief passage are separately connected, wherein high-voltage end respectively with the first silane gas
Air supply channel 01, the second silane gas air supply channel 02 are connected, and low-pressure end is connected with distribution frame connecting line 03.First decompression
Channel and the second relief passage are mutually backups, so that the pressure reducer of any pipeline breaks down or calibrated, do not influence entire
The normal operation of silane busbar connector.
General pressure reducer through a long time uses, easy to damage to need repairing, replace or calibrated, and is serially connected in first and subtracts
The effect of the valve 99 and valve 11 of the two sides of depressor 10 is in order to avoid removing pressure reducer and causing silane busbar connector can not
It continues working, when the first pressure reducer 10 is needed replacing, repairs or calibrated, valve 11 and valve 99 can be closed, prevent silicon
Alkane gas leaks from the first pressure reducer 10, while guaranteeing that another way silane gas air supply channel operates normally.
Distribution frame connecting line 03 by relief line (06) respectively with the first silane gas air supply channel 01, the second silane gas
Air supply channel 02 is connected, and valve 23 has been sequentially connected in series on distribution frame connecting line 03, third pressure vacuum meter 24, has been supplied
Air valve 25 and distribution bridge joint mouth 26, distribution bridge joint mouth 26 are connected to distribution frame, and silane gas enters distribution by distribution bridge joint mouth 26
Frame is simultaneously sent into reactor with gases such as nitrogen, ethylene after evenly mixing, carries out plated film to glass surface；Distribution frame connecting line 03
For the low pressure line after decompression, third pressure vacuum meter 24 is for monitoring pressure reducer (the first pressure reducer 10 or the second pressure reducer 21)
Gas pressure after decompression can adjust low pressure line by adjusting pressure reducer if the pressure is unsatisfactory for pre-provisioning request
Gas pressure.
Vacuum evacuation device 05 is clear for vacuumizing and cooperating high pure nitrogen to carry out pipeline to the supply air line of silane busbar connector
It washes, reduces oxygen content in pipeline.As shown in Fig. 2, vacuum evacuation device 05 includes a drainage vacuum device 32, evacuator is drained
Conical cavity 321 is equipped with inside structure 32, the big end opening of conical cavity 321 is equipped with big end straight tube 323, conical cavity 321
Small end opening is equipped with small end straight tube 324, and a drainage tube 322 is set inside conical cavity 321, which is bent pipe, position
In the nozzle in conical cavity 321 towards small end straight tube 324.The big end straight tube 323 of vacuum device 32 is drained respectively by the
One vacuum connector pipe 053, the second vacuum connector pipe 054 and the first silane gas air supply channel 01, the second silane gas gas supply are logical
Road 02 is connected, and valve 28 is concatenated on the first vacuum connector pipe 053, concatenates valve on the second vacuum connector pipe 054
Men Sanshi 30, for controlling the connection and disconnection of air supply channel Yu vacuum evacuation device 05.Drain the drainage tube of vacuum device 32
The 322 one end connection third nitrogen for stretching out conical cavity 321 access pipeline 051, are sequentially connected in series on third nitrogen access pipeline 051
There are drain valve 31 and third nitrogen interface 35, third nitrogen interface 35 accesses high pressure, high purity nitrogen, for cooperating drainage to vacuumize
Mechanism 32 generates negative pressure to air supply channel, so that nitrogen cleans steam line.Drain the small end of vacuum device 32
Straight tube 324 connects exhaust output tube road 052, and valve 33 and water seal outlet have been sequentially connected in series on exhaust output tube road 052
34, exhaust gas is absorbed by water seal outlet 34 through water, dilution is discharged, and be can access subsequent emission-control equipment and is carried out exhaust-gas treatment.
In order to clean without dead angle to entire air supply channel, it usually needs entire supply air line is vacuumized, by
The presence of pressure reducer in the first silane gas air supply channel 01 and the second silane gas air supply channel 02, so that vacuum evacuation device 05
The pressure duct part in the first silane gas air supply channel 01 and the second silane gas air supply channel 02 is only connected, it can not be to packet
The low pressure line partial vacuum of distribution frame connecting line 03 is included, therefore, the invention also includes third vacuum connector pipe 055,
Third vacuum connector pipe 055 and the first silane gas air supply channel 01, the second silane gas air supply channel 02, distribution frame connecting line
03 is connected, and valve 27 and valve 29 is concatenated on third vacuum connector pipe 055, for normally supplying in silane gas
When gas, vacuum evacuation device 05 is disconnected, so that silane gas enters back into distribution frame connecting line 03 after pressure reducer depressurizes；Drainage is taken out true
The big end straight tube 323 of empty mechanism 32 is true by the first vacuum connector pipe 053, the second vacuum connector pipe 054 and third respectively
Empty connecting line 055 connects the first silane gas air supply channel 01, the second silane gas air supply channel 02 and distribution frame connecting line 03
(low-pressure gas pipeline), for disconnecting third vacuum connector pipe 055, preventing silane gas from pumping when silane gas normally supplies
It escapes, and vacuumizes in air supply channel, wash phase at vacuum plant 05, open valve 29, valve 27, even
(valve 27 connect high-pressure gas pipeline and low-pressure gas pipeline part to logical air supply channel, normally with vacuum evacuation device 05
It must shut off when gas supply).
In summary, vacuum diverter switch group 04 of the present invention includes the valve being serially connected on the first vacuum connector pipe 053
28, the valve 30 that is serially connected on the second vacuum connector pipe 054 and it is serially connected in third vacuum connector pipe 055
On valve 27 and valve 29, the on-off by controlling each vacuum diverter switch switches pressure duct
(two silane gas air supply channels), low pressure line (pipeline after the pressure reducer including distribution frame connecting line 03) with vacuumize
The on-off of device 05.
Relative to existing busbar connector pipeline cleaning method, the present invention is by setting vacuum evacuation device 05, by bus bar
Road vacuumizes to form negative pressure line, then repeatedly purges busbar connector pipeline through high pressure, high purity nitrogen, can will be in busbar connector pipeline
Air thoroughly cleans up, so that pipeline-cleaning effect is significantly improved, such as three times after cleaning, oxygen content in busbar connector pipeline
Up to 1/ (5 × 10 of oxygen content in pipeline after existing method cleaning5)。
Vacuum evacuation device 05 vacuumizes busbar connector pipeline using drainage technology (for example, about -2000Pa, after vacuumizing
Gas pressure depends on the pressure of the structural parameters and the high pressure, high purity nitrogen for drainage of vacuum evacuation device 05 itself in pipeline
Determine), principle is by spraying into high pressure, high purity nitrogen, high speed nitrogen into the conical cavity 321 of drainage vacuum device 32
Gas takes away the air in conical cavity 321, the gas stream so that the pressure reduction in conical cavity 321, in busbar connector pipeline
Enter conical cavity 321, according to Bernoulli effect, the fluid of steady flow in pipeline, the big local pressure of flow velocity is small, and flow velocity is small
Local pressure is big, and using conical cavity 321, high speed nitrogen is passed through in cavity, by diameter reduce conical cavity 321 when, together
Sample volume, the nitrogen flow rate of pressure are high, then the negative pressure of its generation is big, so that the air in busbar connector pipeline enters taper sky
In chamber 321, the negative pressure being equal in conical cavity 321 until generating negative pressure value in entire busbar connector pipeline reaches a balance.This
Invention drainage vacuum device 32 uses conical cavity structure, is conducive to increase the negative pressure that drainage generates.
Evacuated device 05 vacuumizes busbar connector pipeline, helps to empty the air in pipeline, realizes that pipeline is thorough
Bottom cleaning, prevents silane gas from generating dust, blocking pipeline by the dioxygen oxidation in air, to increase maintenance cost, reduces silicon
The service life of alkane busbar connector.
Embodiment two
The silane busbar connector of the embodiment is to improve on the basis of example 1, the gas supply of silane gas air supply channel
Pipeline is equipped with filter.Specifically, referring to Fig. 3, in the first silane gas air supply channel 01 and the second silane gas air supply channel 02
Pipeline in concatenate first filter 100 and the second filter 200 respectively, be mainly used for filter silane gas be oxidized and generate
Dust, the device for preventing blocking to be serially connected in pipeline, the especially flowmeter in pressure reducer and subsequent pipeline (such as distribution frame)
Metering device.Preferably, first filter 100 is serially connected on the pipeline between the first silane beehive 4 and the first pressure reducer 10, the
On pipeline before the second silane beehive 15 of concatenation of tow filtrator 200 and the second pressure reducer 21.In embodiment shown in Fig. 3,
First filter 100 is serially connected between valve 55 and first pressure vacuum meter 6, and the second filter 200 is serially connected in valve 16
Between second pressure vacuum meter 17.
In one embodiment, first filter 100 and the second filter 200 are the pneumatic filter of pressure-resistant corrosion-resistant,
Filtering accuracy is not more than 5um, can effectively remove the solid particle and dust in gas, gas can pass through the filter.By
Filter is added in pipeline, prevents device in pipeline from blocking, reduces the maintenance cost of silane busbar connector, and extending it makes
Use the service life.
Embodiment three
The silane busbar connector of embodiment three is improvement on the basis of embodiment one or embodiment two, i.e., by bus bar
Road replaces with solenoid valve (for example, the first nitrogen on the first nitrogen access pipeline 011 for the valve of control piper on-off
Purge valve 2, the first steam supply valve 5 and valve 77 on the first supply air line 012, valve 99, valve ten on relief line 06
One 11 and valve 20 and valve 22, valve 23 and low pressure steam supply valve 25 on distribution frame connecting line 03
And vacuum diverter switch in vacuum diverter switch group 04 etc.), pressure vacuum meter replaces with pressure transmitter, using PLC or
Controller controls silane busbar connector whole service process, wherein each solenoid valve, pressure transmitter are electrically connected to PLC or control
Device.The embodiment can be realized automatic operation, to reduce human cost, mitigates the workload of operator, improves work
Efficiency.
Method
Silane busbar connector of the present invention needs to carry out cleaning operation when silane gas supplies, by the oxygen in silane busbar connector
Emptying prevents silane gas from oxidation occurs and generates dust.The cleaning operation of silane busbar connector mainly start silane gas gas supply before,
These three periods carry out when the switching of two silane gas air supply channels and after silane gas supplies, individually below to air supplying operation
Method and supply before cleaning operation, air supply channel switching when cleaning operation and gas supply after cleaning operation the step of carry out
Description.
Based on above-mentioned silane busbar connector, the present invention provides a kind of silane busbar connector air supplying operation method, comprising the following steps:
Step 1, silane busbar connector gas supply before (before i.e. online solar control film coating system plated film starts), using " high pressure
Nitrogen is purged+is vacuumized " mode cleans silane busbar connector pipeline, i.e., high pressure nitrogen (generally higher than 8MPa) a) is passed through silicon first
Alkane gas air supply channel, relief line 06 and distribution frame connecting line 03, and flow to distribution frame；B) vacuum evacuation device 05 is connected to whole
A silane busbar connector pipeline simultaneously vacuumizes；C) step a) and step b) are repeated repeatedly, until in emptying silane busbar connector pipeline
Air；D) vacuum evacuation device 05 and silane busbar connector pipeline are disconnected, provides silane to distribution frame using silane gas air supply channel
Gas.
Specific step is as follows (default starts all valves before supplying, silane cylinder valve is turned off):
A) the first silane gas air supply channel 01 and distribution frame connecting line 03 are cleaned: it is logical to be first turned on the first silane gas gas supply
The first steam supply valve 5, valve 77, valve 20, valve 22, valve 23 and low pressure gas supply are opened in road 01
Valve 25 (relief line 06 preferred intersect cleaning), then opens the first nitrogen purge valve 2, and high pressure nitrogen is from the first nitrogen interface 1
Into the second decompression successively through the first check valve 3, the first silane beehive 4, the first supply air line 012, relief line 06 is logical
Road, distribution frame connecting line 03 flow into distribution frame, until flowing into the molten tin bath of floatation glass production line；It persistently cleans 5 minutes, closes
First nitrogen purge valve 2, the first steam supply valve 5, valve 77, valve 20, valve 22；
B) the second silane gas air supply channel 02 and distribution frame connecting line 03 are cleaned: opening the second steam supply valve 16, valve ten
8 18, valve 99, valve 11, then open the second nitrogen purge valve 13, high pressure nitrogen from the second nitrogen interface 12 into
Enter, successively the 2nd 1 decompression through third check valve 14, the second silane beehive 15, the second supply air line 022, relief line 06
Channel, distribution frame connecting line 03 flow into distribution frame, until flowing into the molten tin bath of floatation glass production line；It persistently cleans 5 minutes, closes
Close the second nitrogen purge valve 13 and low pressure steam supply valve 25；
C) it " vacuumize+high pressure nitrogen purging " process of silane busbar connector pipeline: opens except the first nitrogen purge valve 2, the
Other valves of two nitrogen purge valves 13 and low pressure steam supply valve 25, by vacuum evacuation device 05 and the first silane gas air supply channel 01,
Second silane gas air supply channel 02, distribution frame connecting line 03 are connected to relief line 06, and high pressure nitrogen is accessed from third nitrogen
Mouth 35 enters, and sprays into drainage vacuum device 32 through drain valve 31, vacuum evacuation device 05 takes out entire silane busbar connector pipeline
Vacuum, until pressure value that first pressure vacuum meter 6 and second pressure vacuum meter 17 are shown stablizes (such as close to-
2000Pa)；Drain valve 31 is closed, the first nitrogen purge valve 2 and the second nitrogen purge valve 13 are opened, high pressure nitrogen purges silane and converges
Row pipeline is flowed, exhaust gas is from 34 discharge of the water seal of vacuum evacuation device 05 outlet, until first pressure vacuum meter 6 and second pressure vacuum
Table 17 shows numerical stability (typically larger than 8MPa), closes the first nitrogen purge valve 2 and the second nitrogen purge valve 13, repeats
" vacuumizing+high pressure nitrogen purging " multiple (generally three times)；Finally entire silane busbar connector pipeline is vacuumized again, by silicon
High pressure nitrogen discharge in alkane busbar connector；
D) vacuum evacuation device 05 and silane busbar connector pipeline are disconnected, i.e., closing valve 27, valve 28,
Valve 29 and valve 30.
Step 2, after silane gas air supply channel gas supply starts, when the first pressure in the first silane gas air supply channel 01 is true
When the pressure value that empty table 6 is shown is 1MPa, the second silane gas air supply channel 02 is first opened by opening valve 18 and starts to supply
Gas after second pressure vacuum meter 17 is stablized, cuts off the first silane gas air supply channel 01 by closing valve 77, replacement is clean
The first silane gas air supply channel 01 the first silane beehive 4；The pressure value shown to second pressure vacuum meter 17 is 1MPa
When, the second silane gas air supply channel 02 is switched into the first silane gas air supply channel 01 continuously gas supply, and replace clean second
Second beehive 15 of silane gas air supply channel 02.
Wherein, replacement silane beehive includes " vacuumizing+high pressure nitrogen purging " process, specifically: close silane gas collection
Vacuum evacuation device 05 is connected to by the silane cylinder valve in frame with the silane gas air supply channel, and is taken out to the silane gas air supply channel true
Then sky is passed through high pressure nitrogen to silane gas air supply channel and empties the silane gas in silane gas air supply channel, is repeated several times and " takes out
The process of vacuum+high pressure nitrogen purging "；Vacuum evacuation device 05 and silane gas air supply channel are disconnected；After replacing silane beehive,
" high pressure nitrogen is purged+vacuumized " process of repetition.
Step 3, silane busbar connector stop gas supply, using high pressure nitrogen clean busbar connector pipeline and with distribution frame connecting tube
The distribution frame that road 03 connects empties the residual silane gas of silane busbar connector, distribution frame.
The present invention online solar control film coating system silane busbar connector and its air supplying operation method have following technology
Effect:
1) vacuum evacuation device 05 is arranged in silane busbar connector of the present invention, and drainage vacuum device 32 cooperates high pressure, high purity nitrogen to draw
Stream makes to generate negative pressure in the pipeline of silane busbar connector, sufficiently cleans pipeline using the high pure nitrogen of certain pressure, reduces pipeline and contains
Oxygen amount reduces the generation of silane dust, to reduce instrument maintenance cost；
2) silane busbar connector pipeline is cleaned by way of repeatedly " vacuumizing+high pressure nitrogen purging ", solves existing pipe
Insufficient problem is cleaned on road, so that busbar connector pipeline-cleaning is cleaner, and before silane gas supply, is carried out to the pipeline after cleaning
It vacuumizes, prevents high pressure nitrogen in pipeline from reducing the concentration of silane gas and influence the quality of sunlight plated film；
3) assembled scheme for using two silane gas air supply channels and vacuum diverter switch group 04, prevents silicon by check valve
Alkane gas backflow implements the operation of " first open and close afterwards " in the gas cylinder switching of two silane gas air supply channels, and silane gas is seamless
Handoff-security realizes and stablizes continual gas supply；
4) when replacing the silane beehive of silane gas air supply channel, using " vacuumizing+high pressure nitrogen purging " mode, row
Silane gas remaining in silane cylinder and pipeline in empty silane beehive avoids silane gas leakage so that explosion danger occurs.
It will be appreciated by those skilled in the art that these embodiments are merely to illustrate the present invention without limiting model of the invention
It encloses, the various equivalent variations and modification made to the present invention are each fallen in present invention range as defined in the appended claims.
Claims (10)
1. a kind of online solar control film coating system silane busbar connector, which is characterized in that including the silicon as pressure duct
Alkane gas air supply channel, as the distribution frame connecting line (03) of low pressure line, for being connected to subtracting for pressure duct and low pressure line
Pressure pipe road (06), vacuum evacuation device (05) and vacuum diverter switch group (04), wherein silane gas air supply channel and relief line
(06) it is connected to respectively with vacuum evacuation device (05), vacuum diverter switch composition vacuum diverter switch is respectively equipped on each connecting line
Group (04), for switching the on-off of silane gas air supply channel, relief line (06) and vacuum evacuation device (05).
2. online solar control film coating system silane busbar connector according to claim 1, which is characterized in that described to subtract
Pressure pipe road (06) includes the mutually redundant relief passage of two-way, is respectively serially connected with the first relief passage of the first pressure reducer (10)
With the second relief passage for being serially connected with the second pressure reducer (21), the high-voltage end of two-way relief passage is connected, low-pressure end is connected,
Its high-voltage end is connect with silane gas air supply channel, and low-pressure end is connect with distribution frame connecting line (03)；Two relief passages can
Switching uses.
3. online solar control film coating system silane busbar connector according to claim 1 or 2, which is characterized in that institute
It states there are two silane gas air supply channel sets, respectively the first silane gas air supply channel (01) and the second silane gas air supply channel
(02), the first silane gas air supply channel (01) and the second silane gas air supply channel (02) structure are identical and arranged symmetrically.
4. online solar control film coating system silane busbar connector according to any one of claims 1 to 3, feature exist
In the silane gas air supply channel includes silane beehive, and centralized arrangement has multiple silane cylinders on silane beehive, multiple
The outlet of silane cylinder is connected with the gas collection pipe in silane beehive, and the entrance of gas collection pipe is connected to nitrogen access tube
Road, the nitrogen access piping connection elevated pressure nitrogen gas source, and nitrogen access pipeline also concatenates nitrogen purge valve and check valve；Gas collection pipe
Outlet by silane gas supply air line, relief line (06) connection distribution frame connecting line (03), on silane gas supply air line
Equipped with steam supply valve, pressure vacuum meter and check valve.
5. online solar control film coating system silane busbar connector according to any one of claims 1 to 4, feature exist
In being sequentially connected in series valve 23 (23), third pressure vacuum meter (24), steam supply valve on the distribution frame connecting line (03)
(25) and the distribution bridge joint mouth (26) for connecting distribution frame.
6. online solar control film coating system silane busbar connector according to any one of claims 1 to 5, feature exist
In the vacuum evacuation device (05) includes drainage vacuum device (32), is equipped with taper inside drainage vacuum device (32)
The big end opening of cavity (321), conical cavity (321) is equipped with big end straight tube (323), the small end opening of conical cavity (321)
Place is equipped with small end straight tube (324), sets a drainage tube (322) inside conical cavity (321), which is located at conical cavity
(321) for the nozzle in towards small end straight tube (324), drainage tube (322) stretches out one end connection access high pressure of conical cavity (321)
High pure nitrogen；The big end straight tube (323) of drainage vacuum device (32) is separately connected the first silane gas air supply channel (01), second
Silane gas air supply channel (02) and distribution frame connecting line (03).
7. online solar control film coating system silane busbar connector according to any one of claims 1 to 6, feature exist
In equipped with filter in the supply air line of the silane gas air supply channel.
8. a kind of air supplying operation method using the described in any item silane busbar connectors of claim 1 to 7, comprising the following steps:
Step 1 cleans silane bus bar by the way of " high pressure nitrogen is purged+vacuumized " before silane busbar connector supplies
Road；
Step 2, after silane gas air supply channel gas supply starts, the first pressure vacuum in the first silane gas air supply channel (01)
When the pressure value of table (6) display is 1MPa, switches to the second silane gas air supply channel (02) and start to supply, second pressure vacuum meter
(17) after stablizing, the first silane gas air supply channel (01) is cut off, and replaces the first clean silane gas air supply channel (01)
First silane beehive (4)；When the pressure value of second pressure vacuum meter (17) display is 1MPa, the second silane gas is supplied logical
Road (02) switches to the first silane gas air supply channel (01) and continuously supplies, and replaces the second clean silane gas air supply channel (02)
The second silane beehive (15)；
Step 3, silane busbar connector stop gas supply, connect using high pressure nitrogen detergent line silane busbar connector pipeline and with distribution frame
The distribution frame for taking over road (03) connection empties the residual silane gas of silane busbar connector, distribution frame.
9. air supplying operation method according to claim 8, which is characterized in that described to use " elevated pressure nitrogen in the step 1
Air-blowing is swept+is vacuumized " mode clean silane busbar connector pipeline, comprising the following steps:
A) high pressure nitrogen is passed through silane gas air supply channel, relief line (06) and distribution frame connecting line (03), cocurrent first
To distribution frame；
B) vacuum evacuation device (05) is connected to entire silane busbar connector pipeline and vacuumized；
C) step a) and step b) are repeated repeatedly, until the air in emptying busbar connector pipeline；
D) vacuum evacuation device (05) and silane busbar connector pipeline are disconnected, provides silane to distribution frame using silane gas air supply channel
Gas.
10. air supplying operation method according to claim 8 or claim 9, which is characterized in that in step 2, replacement silane gas gas supply
Silane beehive in channel includes " vacuumizing+high pressure nitrogen purging " process, specifically:
The silane cylinder valve in silane beehive is closed, vacuum evacuation device (05) is connected to the silane gas air supply channel, and to this
Silane gas air supply channel vacuumizes, and is then passed through high pressure nitrogen for the silane in silane gas air supply channel to silane gas air supply channel
The process of " vacuumizing+high pressure nitrogen purging " is repeated several times in gas emptying；Vacuum evacuation device (05) and silane gas air supply channel is disconnected
It opens；
After replacing silane beehive, " high pressure nitrogen is purged+vacuumized " process is repeated.
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| CN111649235A (en) * | 2020-07-13 | 2020-09-11 | 阁壹系统集成设备(滁州)有限公司 | Special gas cabinet system and vacuumizing method thereof |
| CN112128626A (en) * | 2020-10-29 | 2020-12-25 | 河南豫氢装备有限公司 | High-pressure hydrogen storage and supply detection system |
| CN112756342A (en) * | 2021-01-11 | 2021-05-07 | 广东龙丰精密铜管有限公司 | Method for removing oil on inner wall of large-coil-weight internal thread copper pipe |
| WO2022220676A1 (en) * | 2021-04-16 | 2022-10-20 | Valvetight Holding Bv | A method of preparing a system for a maintenance operation |
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