TW384367B - Method and apparatus for automatically detecting gas leak, and recording medium for leak detection - Google Patents

Abstract

A method of the present invention automatically detects gas leak from a valve on a gas-containing vessel, or the like, based on detected absolute pressure and pressure fluctuation. The method can detect both fine leak and gross leak. The method comprises a method for automatically detecting gas leak from a target object provided on gas piping comprising the steps of: issuing command for forming an airtight room communicating with said target object; issuing command for pressurizing said airtight room until a predetermined pressure; detecting absolute pressure and pressure fluctuation of said airtight room, measured with a gauge; and discriminating whether gas leaks from said target object or not based on the detected absolute pressure and pressure fluctuation.

Description

V. Description of the invention (1) The present invention is based on Japanese Patent Application No. Hei 9 270648 'No. 17 September 1997, all of which is incorporated herein by reference. BACKGROUND OF THE INVENTION a) Scope of the Invention The present invention relates to a method and device for automatically detecting a gas leak from a valve or a connector on a gas container or the like, and storing the gas leak for automatic gas leak detection. Program recording media. b) Description of related technology For example, ‘a method disclosed in published Japanese patent application No. Hei 3_89100’ is used to automatically detect gas leaks from a cabinet containing a gas. According to this conventional method, the detection of gas vessel leakage is based on measuring the pressure change of helium gas filled in an airtight chamber, which is connected to a valve on a container containing gas. Β SUMMARY OF THE INVENTION Device, which can automatically record media and store the force connected to the target for gas piping according to the present invention; measure the absolute pressure and pressure of the airtight according to this method; From the point of view of automatic gas, the absolute force of the airtight chamber of the target object changes, because the air leakage rate is an improved amount of leakage and big skull leakage detection, which provides a gas leakage, chamber; the gas pressure and pressure Distinguish the absolute gas leak in the target chamber, the leak detection method or volume leak, and a written procedure. The method is used for automatic detection. The steps include: forming a chamber to pressurize to a predetermined pressure change; and based on whether the detected object has gas, the pressure and pressure change can be detected.

V. Description of the invention (2) According to another aspect of the present invention, it provides a method for detecting an air leak known on a gas vessel. The steps include: forming an airtight chamber connected to the valve; and evacuating The airtight chamber; measuring the absolute pressure and pressure variation of the airtight chamber 'while keeping the airtight chamber closed after the discharge action stops; and identifying whether the valve has a gaseous leak based on the detected absolute pressure and pressure variation. The absolute pressure and pressure fluctuations in the exhausted airtight chamber were measured according to this method of measuring the pressure of Zhao Yanle. Leaks in the valve can then be detected based on the measured extreme force and pressure variation '. When the gas vessel in the valve of the gas container leaks at a high leakage rate 'because the absolute pressure in the airtight chamber increases rapidly', a large number of leaks can be detected based on the measured absolute pressure ^ when used in the valve of the gas hip container When medium gas leaks at a low leak rate, because the pressure in the airtight chamber increases slowly and gradually, a small amount of leak can be detected based on the measured pressure variation. Therefore, the detection of leaks there will not fail due to the leak rate. According to a further aspect of the present invention, it provides a method for detecting a gas leak in a joint, and the joint is detachably connected to a gas line by a valve on a gas vessel container. The method includes the following steps: via the gas line Forming an airtight chamber connected to the joint and the valve; emptying the airtight chamber; introducing the gas vessel into the airtight chamber after the discharge function stops; measuring the absolute pressure and pressure variation of the airtight chamber filled with the gas, while maintaining the The airtight chamber is sealed; and based on the measured absolute pressure and pressure fluctuations, it is discriminated whether there is an air leak in the joint. According to this gas leak detection method, measure the gas tightness of a filling gas

C: \ ProgramFiles \ Patent \ 54933.ptd No. 6 I V. Explanation of the invention (3) Absolute pressure and pressure fluctuations to (3), and based on the change in force, determine whether the joint has absolute pressure and pressure body that is not displaced by the gas clock. The joint is-relatively large steam leakage fans: in the second case 'when the absolute pressure of the gas will decrease rapidly, and when the absolute cold leak' the force of the airtight chamber. Therefore, when the gas eventually leaks with a relatively large force equal to atmospheric pressure, it can be leaked from the joint gas at a relatively small rate based on the absolute pressure of the measurement = leakage rate (large leakage). Conversely, if the pressure changes, it is detected. Therefore, at this time, it can be based on that the measurement will not fail due to the leakage rate. Gas leaks can be detected and a brief description of the drawings. Piping of a gas plant. Figure 1 is a diagram of a study carried out by the present invention. Fig. 2 is a square circle showing the control part of the rolling mill equipment in Fig. 1; Figure 3 shows the flow of the gas supply source gas. Figure 4 is a flowchart showing the previous steps of the base leak detection process. FIG. 5 is a flowchart showing other steps of the base leak detection. Circle 6 is a flow chart showing the previous steps of a process that does not detect a joint gas leak. Fig. 7 is a flowchart showing the other steps of the process of detecting a joint gas leak. "Fig. 8 is a piping diagram of another gas device which can use the present invention. Detailed description of the preferred embodiment

C: \ Program Files \ Patent \ 54933.ptd page 7

According to the traditional method described by the inventor of the present invention, the "leakage study" found that the leakage varies according to the amount of force. When the car is relatively large, it cannot detect the flooding of the gas. : Used in the research carried out by the inventors. Argon, or used in half;: Two bodies such as monosilane, nitrogen-diluted phosphorus ^ Conductive device manufacturing equipment and the like. Example = Lu Jin 10⑽ filled nail blanket The force of the hospital is about 50Kgf / cm2 9100%. The pressure of filling nitrogen to dilute argon phosphide is about 150Kgf / cm ^ The gas vessel equipment 10 has a box-shaped main hip. The main body has a joint CN 丨 to CNS. The joint ( ^ To seperately connect gas lines G to & the gas line h is connected to the main cabinet of a valve on the vessel 12 containing the source gas vessel) ^. 肖 气 || Exhaust Vessel Disposal (Processing) Equipment (not shown) ^ The gas line g3 is connected to a valve (the main valve of the container) on the gas container 18, which is usually used for sharing with other facilities. The container 18 is used for the blow-off phase Gas, or low pressure gas for low pressure gas leak detection (The pressure of the supplied gas radon is 6 Kgf / cm2.) The gas radon pipeline & is connected to a valve (the main valve of the vessel) on the gas vessel container 20, which is also commonly used for sharing with other facilities. Contains high-pressure nitrogen for high-pressure gas It leak test (grinding force of the supply vessel is 100Kg f / cm2). The gas .. line G5 is connected to the manufacturing equipment (not shown) ^ The gas skull container 12 is located at The gas equipment 10. The gas equipment 10 includes the valves V2 to \ 5, a pressure reducing valve γ8, a pressure gauge ρ to Pa, a piping 14, a discharge (vacuum) pump 16 and so on. The valve% To \ connect to the joint CN via the piping 14. The piping 14 has a pressure gauge p2.

C: \ Program Files \ Patent \ 54933. Ptd page 8 V. Description of the invention (5) The valve Vz and the discharge pump 16 are located on the pipeline between the valve% and the connection c%. The pressure gauge P1 is located on the pipeline between the valves y2 and 乂 3. The valve V4 is located on a branch line (joining line) connecting the joint CNa and CN <. The pressure gauge P3 is located on the branch line. The valve V5 is connected to the connection CN5 in a line via the pressure reducing valve v8. Every table to? 3 Measure the gage pressure relative to atmospheric pressure (= 0 Kgf / cm2). It can measure the gauge pressure even when the pressure is large and the air pressure is low. In this case, the meter shows a negative measured pressure. The pressure gauge is the pressure of the line command discharged from the discharge pump 16. The pressure in the pressure line 14. This pressure gauge P3 measures the nitrogen pressure supplied from the gas container 18 or 20. Because it applies to the pressure gauge Pj to? The maximum pressure of 3 is about 150 Kgf / cm2 supplied by the source gas container 12 or high-pressure N2 container 20, so the dust force chart Pi to? 3 can be selected from a pressure gauge that can withstand a pressure of about 200 Kgf / cm2. For example, this pressure gauge 6 to dagger pressure converter uses a semiconductor tensiometer in vacuum configuration and has a measurement range from vacuum to 200Kgf / cm2 (such as the ZT15 series produced by Nagano Keiki, Japan). In this type of pressure gauge, the measurement accuracy in the general form is ± 1%, and the measurement accuracy in the high-precision form is ± 0.5%. ... The gas device includes a control unit 22 having a touch panel (input panel) 24, a display unit 26, and the like. The control unit 22 is used to control the valves Vr to V5, the connectors CN! To O \, the discharge pump 16 and the like. The control unit 22 will be described below with reference to FIG. 2. The source gas contained in the container 12 passes through the valve 71, the connector CI ^, the

C: \ Program Files \ Patent \ 54933. Ptd Page 9

The line 14, the valve V5, the reduction percentage, and the joint CNs are supplied to the manufacturing equipment. When the gas is supplied to the manufacturing equipment, the number of gas vessels retained in the container 12 is reduced. When the amount of gas remaining is equal to or less than a predetermined amount, '= the valve V1 on the container 12 is closed, and the supply of the gas clock is stopped. Then, the gas line Gi connected to the valve Vi on the container 12 is no longer connected to the connector C &. The container 12 is replaced with a new container which is completely filled with the source gas. The new container 12 also has its valve%, and the gas line is connected thereto. The joint CNi is connected to the gas line dagger by the new container 12. The valve V is then opened to supply the gas again. Before the container replacement operation, the following seven steps will be performed automatically to measure the leakage of the base of the valve V! On the container 12. 1: Close the valve V! To 5. If the valves Vi and \ to 1 function effectively, an airtight chamber is formed in the line 14. 2: Open valve V2 and start the discharge pump i 6. 3: By monitoring the pressure gauge P1, confirm the operation of the discharge pump i6. If a malfunction in the vent is detected, an alarm is issued to inform the malfunction. 4. Open the Va to the line 14 after exhausting. If there is a gas leak in the base of the valve Vi, the pipeline 14 will not be exhausted to a predetermined level because the gas leak in the base seat causes the gas radon to be continuously supplied into the pipeline 14. 5: By monitoring the pressure gauge & to confirm the achievable vacuum pressure. If the final vacuum pressure is not normal, a warning bell will be issued to inform that the exhaust is insufficient 0: Close the valves Vz to v3, and turn off the exhaust pump i 6. : Measure the pressure gauge P1 within a predetermined time to measure the pressure

C: \ Program Files \ Patent \ 54933.ptd Buy 10 V. Description of the invention (7) Pressure change in pipeline 14. If the gas leak at the base of the valve V1 ', the pressure in the pipeline 14 will gradually increase β. Based on the change in the measured pressure, it is determined whether the valve has a base leak. If Zhenzhen detects a leak in the base, an alarm bell is issued to inform the base of the leak. The detection method of the base leakage will have the following problems. If the steam leakage rate is relatively large, the base leakage will not be detected in the fifth step of the Russian testing process, and the base leakage will be detected. For example, the base of the valve Vi may be damaged due to foreign matter, and the leakage rate is about 1 L / min. The reasons for the appeal analysis of the present invention are as follows: (1) The discharge pump [6] can discharge gas vessels in the airtight chamber at a rate. The rate is greater than the leakage rate of the valve and the upper base leaking. (2) Because the range of the pressure gauge Pζ is from vacuum to 2000 Kgf / cm2, a pressure less than OKgf / cm2 is judged as normal pressure in the fifth step. (3) Because the accuracy of the measured pressure is approximately ± 1%, an error of 2 Kgf / cm2 is allowed. Under the above conditions, the fifth step of the detection process said that no leakage of the seat on the valve V! Was detected. Moreover, the seventh step of the detection process may not detect the increase in pressure, and the stern tube is monitored with a pressure gauge Pz. In this example, the pressure of the residual source gas vessel in the container 12 is about 6 Kgf / cm2, and the leakage rate of the base on the valve Vi is 1 L / min. When the seventh step of the detection procedure started, the force in the pipeline 14 had increased to about 6 Kgf / cffl2, which was almost equal to the pressure in the container 12. That is, because the pressure fluctuation has converged, although the pressure rise is monitored within a predetermined time, the pressure fluctuation cannot be detected in the seventh step of the detection procedure. Therefore, such traditional detection methods may not be able to detect the seat on the valve Vi

V. Description of the invention (8) Discharge. If the base leak is missed 'and the connection CN is released in order to replace the container 12, a large amount of source gas will be vented by the valve V1 on the removed container 12. In the gas equipment shown in Fig. 1, the following 13 steps will be performed automatically to detect the leakage of gas 于 at the joint CN, when the new container 12 is replaced (the gas 连接 connected to the valve V! Line G is then connected to the connector CNJ. This detection procedure is performed before the valve V! Is opened. 1: Close the valve \ iV5. 2: Open the valve V2 and start the discharge pump 1 6. 3: By monitoring the Pressure gauge P! 'Confirm the operation of the discharge pump 16> If a failure of the vent is detected, a warning will be issued to inform the failure. 4: Open the V3 to discharge the gas vessel of the pipeline 14. If the An airtight chamber is formed in line 丨 4, and the line 14 can be effectively vented. 5: By monitoring the pressure gauge P2, confirm the final vacuum pressure of the line 14. If the measured final vacuum pressure is abnormal, an alarm bell will be issued 6: Open the valve V7a and introduce high pressure nitrogen into the pipeline connected to v4. 7: Monitor the pressure gauge P3 to confirm the pressure of the supply of high pressure nitrogen. If the pressure measured by the high pressure nitrogen is not Normal, a warning will be issued to inform the high-pressure filling 8: Close valves V2 to V3, and turn off the discharge pump 16. 9: Open valve V4 to introduce high-pressure nitrogen into the line 14. 10: Close the valve V7. 11: Close the valve 以便 4 to facilitate An airtight chamber is formed in the line 14.

C: \ Prograni Files \ Patent \ 54933, ptd page 12 5. Description of the invention (9) 12: After a predetermined waiting time, until the pressure fluctuations converge. This change in force is caused by adiabatic compression, which occurs when high pressure nitrogen is introduced into the airtight chamber. It takes several minutes for this pressure fluctuation to converge. If there is a gas leak at the joint Ch, the pressure in the line 14 will gradually decrease. 13: By monitoring the pressure gauge p2, the pressure change is measured over a predetermined period of time. In order to determine whether the joint CNi has a gas leak based on the measured pressure change. If a discouraged leak is determined, an alarm will sound to inform the discouraged leak. As mentioned above, “This type of method for detecting gas leaks in joints has the following problems.” If the leak rate is relatively large, the joints will not be detected in the fifth step of the test procedure. Gas ship leaking. For example, when the 'sealing' element of the joint CN, fails to function effectively, or when the sealing position of the joint C & (1) The exhaust rate of the exhaust pump 16 is greater than the leak rate of the gas leak from the joint C & "(2) The same reason as in the base leak detection, the pressure less than OKgf / cm2 will be in the fifth step Determined as normal pressure. (3) Same reason as in the base leak detection, the measurement pressure allows an error of ± 2Kgf / cm2. Under the above conditions, no gas leakage in the connector CN, was detected during the fifth step of the test. Also, despite taking a pressure gauge? 2 monitoring, but the thirteenth step of the detection process does not detect pressure changes. In this case, the leakage rate of the gas It leaked from the joint CNi is about 1 L / min. When the thirteenth step of the detection process starts, the pressure in the pipeline 14 is about

C: \ Program Files \ Patent \ 54933.ptd page 13 5. Description of the invention (10) OKgf / cm2, equal to atmospheric pressure. That is, because the pressure change has converged, although the pressure rise is monitored for a predetermined time, the pressure change will not be detected in the thirteenth step of the detection process. As a result, such traditional detection methods may not be able to detect gas leaks from this joint. If the leak of the vessel is missed and the valve is opened, a large amount of source gas will not leak from the connector. FIG. 2 shows a control part of the gas equipment 10 shown in FIG. 1. The control system functions as the gas leak detection device β according to an embodiment of the present invention. The control section shown in FIG. 2 has a control unit 22. The control unit 22 includes a microelectronics, and a control device according to a program. For valve opening / closing operation, connection / disconnection of connectors, exhaust, pressure measurement, etc.-Operation detection circuit 32, gauge interface 34, CPU (central processing unit) 36, program / data record billion body 38 , The working memory 40, the display control circuit 42, the control interface 44, the external memory 38A, etc. are all connected to each other via the bus 30. The operation detection circuit 32 detects a signal input from the contact panel 24. The operator can turn in the required commands and information by touching the contact panel. The scale interface 34 reads measurement data, such as the force data obtained from the scale 46. The scale 46 includes a pressure gauge? 1 to? 3. The CPU 36 performs different operations, such as performing a hip hip leak detection based on a program stored in the memory 38. The operations performed by the CPU 36 will be described below with reference to Figs. 3 to 7. For example, the memory 38 is a ROM (read-only memory), which is used to store data, in addition to the programs mentioned above, such as cross-references.

The external memory 3 9 A is arbitrarily associated with the

Gas, pressure measurement, etc. Display unit 26 »The display unit • Connector (connected / disconnected) operation, row This display unit 26 also displays the current status of the processing program. According to the instruction of the CPU 36, the controller interface 44 sends a control signal to the discharge pump 16 and the valve / connector control unit 48. For example, the valve / connector control unit 48 controls the valves Vi to 乂 of the valve 48A with the air pump. 8 and connectors CN! To 〇 \ of connector 48B. Fig. 3 is a flowchart showing a procedure of a gas container exchange operation for supplying a source gas. This operation is performed by the CPU 36 stored in the control program in ROM38 (Figure 2). Base leaks can be detected in step 50. In this step, the valve V on the container 12 can detect a small amount of leakage and a large amount of leakage. The interpretation method will be described below with reference to FIGS. 4 and 5. If the base leak is not detected in step 50, the next step is step 52. In step 52, a new container 12 is replaced. More precisely, the gas line G connected to the valve% on the container 12:

IHHBI HHH C: \ Program F i1es \ Patent \ 54933. Ptd page 15 5. Description of the invention (12) Isolate ’and then replace a new container 12. The joint is then tightly fitted and connected to the gas vessel line G, 0 which is connected to the valve V on the new container 12. Gas leakage from the joint can be detected in step 54. In this step, it is possible to detect a small amount of leakage and a large amount of leakage of the connection CNi connected to the gas line G1 ', and the gas bell line core is connected to the valve V! On the new container 12. The operation of this kind of measurement will be described below with reference to FIGS. 6 and 7. If the gas leak of this connector is not detected in step 5 4, the next step is step 5 6. In step 56, the valves vs, Ve, etc. can be adjusted to supply the source gas in the container 12 to a gas consumption facility in the manufacturing equipment at a predetermined pressure. Circles 4 and 5 show the flow of the base leak detection process. In step 60, a control signal is sent to close the valve Vi to ', so as to establish an airtight chamber in the gas passage from the gas cross line & to the line 14. In step 62, signals are sent to open the valve Vz and start the discharge pump 6 to start exhausting. Then the next step is step 64. In step 64, the pressure measured by the pressure gauge is obtained, and it is determined whether the measured pressure is equal to or less than 0 Kgf / cm2. If the measured pressure is equal to or less than 0 Kgf / cm2, the discharge pump is determined. 'Pu 16 works fine', and next step 66. If the measured pressure P1 is greater than OKgf / cm2, go to the next step 68 and notify the operator that a vent failure has occurred. Such notification can be performed by displaying and / or alerting on the display unit 26. Any subsequent notification operations will use this method. After the step event is completed 'the program terminates.

V. Description of the invention (13) When the measured pressure P! Is negative or zero, it is judged that the operation of the vent is normal, and to the next step ^, the step amount should be issued in step 66 and used to Open the valve to the signal in 14% of the airtight chamber. Then the next step is a step? 〇. In step 70, the outlet line will obtain the pressure measured by the pressure gauge & and determine whether the pressure P2 is equal to or less than 0 Kgf / Cffl. If the measurement: the pressure P2 is equal to or less than OKgf / cm ', then the final vacuum is determined The pressure is normal. If the measured pressure P2 is greater than 0KSf / cm2, it is determined that the final vacuum pressure is abnormal, and the next step 74 is to declare that the final vacuum pressure is abnormal. The program terminates after the event of step 74 is completed. In step 72, a signal for closing the valves ^ and is issued to maintain the airtightness of the airtight chamber, and then the discharge pump 16 is turned off. The gas vessel in the airtight chamber in the line 14 is discharged. Then the next step is step 76. In step 76, within a predetermined period of time, changes in the absolute dust force and the force of the airtight chamber measured with a pressure gauge are detected. Determine whether the absolute pressure Pζ of the tester is ^ or less than OKgf / cm2, and the measured pressure change Δρ2 is less than 2Kgf / cm2. Pz S0Kgj / cm2 is a condition given for mass leak detection, and ΔPZ < 2Kgf / cm2 is a condition given for trace leak detection. When both conditions are satisfied, it can be judged that no trace amount or a large amount of leakage has occurred, and it proceeds to the next step 7 8. If the conditions are not met, then go to the next step 80 'to declare a base leak. After the event of step 80 is completed, the program terminates. In step 78 'a signal is sent to close the valve%, and the container 18

C: \ Program Files \ Patent \ 54933.ptd page if 5. V. Description of the invention (14) t introduce low-pressure nitrogen gas into the pipeline Ga and the pipeline from the connector CN3 to. After the event of step 78 is completed, the next step is step 82. In step 82, the pressure measured by the pressure gauge is obtained, and it is determined whether the measured pressure Pa is equal to or greater than 6 Kgf / cm2. If the measured pressure Pa is equal to or greater than 6 Kgf / cm2, it is judged that the pressure of the supplied air pressure is normal 'and the next step is 84. If the measured pressure p3 is less than 6 Kgf / cm2, it is judged that the pressure of the supplied gas cross is abnormal, and the next step is called 86 to declare that the measured pressure is abnormal. After the event of step 86 is completed, the program terminates. In step 84, a signal is sent to open the valve v4 for introducing low-pressure nitrogen gas into the line 14. With the introduced low-pressure nitrogen gas, the radon gas in the line 14 is purged. Then, the next step is step 88. In step 88, a C & t signal is released to replace the container. When the connector C & is released, low pressure nitrogen will be ejected from there. This prevents the inside of the pipeline 14 from being polluted by atmospheric oxygen and moisture. After the event of step 88 is completed ', the next step is step 52, which is shown in Fig. 3 for the container replacement operation. According to the above-mentioned automatic pedestal leakage test, it is possible to measure the pedestal leakage with an intermediate leakage rate equal to or greater than 1 × 1 0_2 L / min. At the same time, the airtight chamber in line 14 and line G! cm3 volume, and in step 76, detect the absolute pressure of the airtight chamber and the pressure change for 6 minutes. Even when the pressure of the residual source gas in the container 12 is about 6 Kgf / cm2, and the leakage rate of the base leak in the valve V is about! At L / min, the event of step 76 starts at this time, and the absolute pressure in line 14

C: \ Program Files \ Patent \ 54933.ptd Page 18 V. Invention Description (15) It should have reached 6 Kg f / cm2. Therefore, the conditions for a large number of leak detections (the absolute pressure P2 S0Kgf / cm2) are not satisfied. Therefore, it is possible to detect the leakage of the base and specify its declaration procedure. "Figures 6 and 7 show a flowchart of a procedure for detecting the gas leakage of the connector. In step 100, a signal is sent to close the valve to 乂 5, so that the gas passage in the gas line ^ and the line 14 is sealed. In step 102, a signal is sent to open the valve V2 and start the discharge pump 16 to discharge the air entrapment in the sealed chamber. Then the next step is called step 104. In step 104, will the pressure gauge be detected? 2 The measured pressure, and determine whether the measured pressure P2 is equal to or less than 0 Kgf / cm2. If the measured pressure P2 is equal to or less than OKgf / cm2, it is determined that the discharge pump U is operating normally ', and the process proceeds to the next step 106. If the measured pressure P2 is greater than OKgf / cm2, it is determined that the exhaust function is abnormal ', and the process proceeds to the next step 108. In step 108, a notice is issued that an abnormality of the air vent is detected. After the event of step 108 is completed, the procedure is terminated. In step 106, a signal for opening the valve V3 is issued to exhaust the gas in the airtight chamber in the pipeline 14. Then, the next step is step 110. In step 110, will the pressure gauge be detected? 2 The measured pressure, and it is determined whether the measured pressure Pa is equal to or less than 0 Kgf / cm2. If the measured pressure P2 is equal to or less than OKgf / cm2, the final vacuum pressure is determined to be normal, and proceed to the next step 112 »If the measured pressure P2 is greater than OKgf / cm2, the detected pressure is determined to be abnormal, and To the next naked

C: \ Program Files \ Patent \ 54933. Ptd Buy 19 5. Description of Invention (16) 114. In step 114, a notification is issued that the final pressure is abnormal. After the event of step 114 is completed, the program terminates. In step 112, a signal for opening the valve v? Is sent to introduce high-pressure nitrogen gas from the container 20 into the line 04 and the line from the connector cn4 to the valve v4. After the incident of step suspect 112 is completed, the next step is called step hemp 116 °. At step 116, it will detect the pressure measured by the pressure gauge and determine whether the repeated force Pa of the measurement is equal to or greater than 1 QKgf / cm2. If the measured pressure 6 is equal to or greater than 10 Kgf / cm2, it is judged that the pressure of the supplied high-pressure nitrogen gas is normal, and it proceeds to the next step 120. If the measured pressure h is less than 10Kgf / cm2, it is judged that the supplied pressure is abnormal 'and the process proceeds to the next step 118. In step 118, a notification is issued that the measured pressure is abnormal. At step 120, a signal is issued to close the valves ^ and% and to turn off the discharge pump 16. Then ‘the next step is step a ?. In step 122, a signal for opening the valve is issued so as to introduce high-pressure nitrogen into the airtight chamber. Then, the next step is step 124. In step 124, a signal is sent to close the valve to stop the supply of high-pressure nitrogen. In step 126, a signal is sent to close the valve I to maintain the airtightness. Then, the next step is step 128. In step 128, measure the time f to wait for the pressure change caused by adiabatic compression to converge. It takes several minutes for the pressure change to converge. After the event of step 128 is completed, the next step is step 130 «In step 130, a pressure gauge &

C: \ Program F i1es \ Patent \ 54933. Ptd page 20 5. Description of the invention (17) Measure the absolute pressure and pressure variation of the airtight chamber. And determine if the absolute pressure of the speculation is greater than 100Kgf / cm2, and the pressure variation ΔP2 of the debt measurement is less than 2Kgf / cm2 »P2 > lOKGf / cm2 is a condition given for a large number of leak detection, and 2Kg f / cm2 is the condition given for the detection of trace leakage. 0 If the above conditions can be met, it can be judged that no trace and a large amount of leakage have occurred, and the next step is 13 2 ^ If any of the conditions fail If it is satisfied, it is determined that the joint is abnormal, and the process proceeds to the next step 134. In step 134, a notification of a gas leak from the connector is issued. After the event of step 134 is completed, the program terminates. In step 132, a signal for opening the valve V2 and activating the discharge pump 16 to start exhausting is issued. Then, the next step is step 136. In step scale 1 3 6, the pressure measured by the pressure gauge Pi is detected, and it is determined whether the measured pressure is equal to or less than OKgf / cm2. If the measured pressure is equal to or less than OKgf / cm2, it is judged that the discharge pump 16 is operating normally 'and the next step is 140. If the measured pressure is greater than 0 Kgf / cm 2, it is judged that the vent is not operating normally, and it proceeds to the next step 138. In step 138, a notification was issued that the vents were not operating properly. After the event of step 138 is completed, the program terminates. In step 140, a signal is sent to open the valve V3 so as to exhaust the gas in the airtight chamber in the line 14 ". The nitrogen contained in the line η is also discharged. In step 142, a signal is sent to close the valve V3 to maintain the tightness of the airtight chamber. Then, the next step is step 44. At step 144

5. In the description of the invention (18), a signal for opening the valve Vi is sent to introduce the source gas hip from the container 12 into the airtight chamber. The next step is step 56, which is shown in circle 3 to supply the source gas hip. process. According to the method for automatically detecting the gas leakage of the joint according to the foregoing, the gas leakage of the joint C & can be detected, and the leakage rate is equal to or greater than 1 X10_3 L / miri, provided in the pipeline 14 and the pipeline G In the airtight chamber, which has a volume of 30 cm3, the absolute force and pressure of the squid chamber are measured in step 130 for 60 minutes. For example, the pressure of the supplied high-pressure nitrogen gas in this case is 150 Kgi / cm2, and the leak rate of the steam leak from the CNit gas vessel at the joint is 1X10'3 L / min '. When the event of step 128 starts, the The absolute pressure measured in the pipe rim 14 was 1 50 Kgf / cm2, which was reduced to about 1.5 Kgf / cm2 or less in about 1.5 minutes after the start of the step 128 event. If this absolute pressure is reduced ', then the conditions for measuring this large amount of leakage (absolute pressure Pz greater than 100 Kgf / cm2) will not be satisfied. Therefore, it is possible to detect the gas leak of the joint, and the operator can know through the notice. When there is a slight leakage, even when the absolute pressure exceeds 100 Kgf / cm2 at the beginning of step 130 and the conditions for detecting a large amount of leakage are satisfied, the pressure in the pipeline 14 will gradually decrease due to the gas leakage. As a result, the conditions for measuring no leaks (pressure variation ΔP2 < 2κgf / cm2) used in Russia will sooner or later not be satisfied. So 'can detect the gas leak of this joint and announce it. In the base leak detection method shown in circles 4 and 5 described above, the final vacuum pressure confirmation is performed by step scale 70, and it can also be performed again in step line 72.

C: \ Program F i1es \ Patent \ 54933. Ptd page 22 5. Description of the invention (19). The absolute pressure can be continuously monitored via steps 70, 72, and 76, while the pressure change is monitored simultaneously in step 76. In the method for automatically detecting the leak of the joint gas vessel shown in Figs. 6 and 7 described above, when the valve V4 is opened, the absolute pressure of the pipeline 14 t is monitored by the P2, and the monitoring process continues to the step 130 ^ In step 130, the pressure change can be monitored simultaneously. According to such a structured method, the absolute pressure is measured in seven steps. Because this absolute pressure is continuously monitored, the failure rate of detection is reduced. The discourager device in which the present invention can be used is not limited to the discourager device shown in the figure. For example, the gas device shown in Fig. 8 can also use the present invention. The gas apparatus shown in Fig. 8 will now be explained. In Fig. 8, similar or identical reference numerals used in Fig. 1 are also used in circle 8 to indicate corresponding or identical components. The gas equipment shown in Fig. 8 has the following components which are not included in the gas equipment of the enclosure 1. (A) A valve v9 located between the joint CNa and the valve V4, and a valve V1Q located between the joint CN4 and the valve V4. (B) Line 28, which is a branch of the pipeline between the valve V2 and ， 3, is connected to a pipeline via a valve V, and this pipeline is connected to the outlet of the valve Vs. A pressure gauge P4 and a valve νιζ are provided on one of the pipelines. The other components are the same as those of the gas equipment shown in FIG. 1. The present invention is described in the preferred embodiment, but is not limited thereto. It is obvious to those skilled in the art that different substitutes, changes, corrections, etc. are possible.

Claims (1)

Movement:-gauge measurement, the absolute pressure and pressure change of the airtight chamber are measured based on the measured absolute pressure and pressure change to determine whether there is a gas leak in the target. A 2+ method for automatically detecting a gas leak according to item i of the scope of the patent application, wherein the target is a valve on a gas container and the command for pressurizing includes discharging a gas vessel from the airtight chamber, and The airtight chamber is then pressurized again. / 3. A method for automatically detecting a gas leak according to item 2 of the scope of patent application, wherein the determining step includes a step of determining whether the pressure of the airtight chamber is reduced. ?. According to the method of automatic detection of gas leakage in the scope of the first patent application, the target system in J-joint can be detachably connected to a valve gas line on a gas container, and the order for adding « Including the introduction of tall ships into the airtight chamber. I Λ: The method of automatic detection of gas leakage in item 4 of the patent scope, wherein the pressure of the high-pressure gas is equal to or greater than 100 Kgf / cffl2, and the determination step includes determining whether the pressure is equal to or greater than 100. Kgf / cm2 step hemp. Method for detecting gas leakage, and has a pressure gauge for 6. automatic according to item 1 of the scope of patent application where the gas piping is connected to the airtight chamber Q \ 54 \ 54933.ptc Page 1 1999.10.26.024 No. 87m: U! S patent application scope Analyze gauge pressure on atmospheric pressure 7. Method of automatic detection of gas leakage according to item 1 of patent application scope, where this step It is controlled by a CPU. 8. A method for automatically detecting a gas leak according to item 1 of the scope of the patent application, wherein the target is a valve on a gas container or a gas line with a connector separable from a valve on a gas container Connected, the method has a front stage and a back stage, and each of the front and back stages includes these steps β 9. A method for automatically detecting a gas leak according to item 8 of the scope of the patent application, in which detection is required during the front stage The target is a valve on a gas container, and the order to pressurize at the previous stage includes exhausting the gas from the airtight chamber. 10. According to the method of automatic detection of gas leakage according to item 9 of the scope of patent application, the determination step in the preceding stage includes the step of determining whether the reduction is ^ ^ No. β 11 g Gas detection; the target system that needs to be detected in the later stage-the joint, the gas pipeline of the valve on the container is connected, * the order for dusting in the later stage includes the introduction of the high observation vessel into the气 Kgf / cm2, and the steps include # 定 此 屋 力; I: No equal O: \ 54 \ 54933.pte Page 2 1999.10. 26. 025 Case No. 87115345 Amendment 6. The scope of patent application or steps greater than 100 Kgf / cm2. 13. —A kind of automatic debt measurement gas vessel leaking eve. W ^, ^ ω, again, the method is, the leak comes from a valve on a gas container, this method includes the following steps: issuing an order to form and the The valve is connected to issue a command to exhaust the airlock of the airtight chamber; with the airtight top of the ink strip 丨 the summer, A changes, while the exhaust effect stops; the volume guarantee and f-force seal; and select ' Due to the tightness, based on the detected absolute pressure and pressure fluctuations, there is a gas leakage. Another question is whether or not 1. 4. A method for automatically detecting a gas leak, the leak is' the connector can be detachably connected to a gas container on a gas container, this method includes the following steps: A command is issued between the pounds to form an air-tight chamber connected to the joint and connected via the air-zhao; 4 A command is issued to exhaust the air vessel of the air-tight chamber; a command is issued to stop the air chamber after the exhaust effect stops ; Introduce the airtightness by measuring the pressure, pressure and pressure fluctuations on a pressure gauge on the airtight chamber containing the gas, while maintaining the airtightness of the airtight chamber; There must be a gas leak. / Item 1 5 — A device for automatically detecting a gas leak from a target on a pipe, this device includes: _ Case No. 87115345 The patent application group of Shen Zhen amends the device used to form an airtight chamber connected to the target; the device used to pressurize the airtight chamber to a predetermined pressure; the device is used to test the absolute of the airtight chamber Pressure and pressure fluctuation device; a device used to determine whether the target has a discouraged gas leak based on the absolute pressure and pressure fluctuation measured by the debt. 16. A kind of recording medium that can be read by electricity, store a program and make the computer execute the following steps: issue a command to form an airtight chamber connected to the object; issue a command to form the airtight chamber Gabor to a predetermined pressure; measure with a scale to detect the absolute pressure and pressure change of the airtight chamber; and determine whether the target has a gas leak based on the detected absolute pressure and pressure change. 1999.10.26.027