WO2019227326A1 - 一种电磁波准直结构 - Google Patents

一种电磁波准直结构 Download PDF

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Publication number
WO2019227326A1
WO2019227326A1 PCT/CN2018/088971 CN2018088971W WO2019227326A1 WO 2019227326 A1 WO2019227326 A1 WO 2019227326A1 CN 2018088971 W CN2018088971 W CN 2018088971W WO 2019227326 A1 WO2019227326 A1 WO 2019227326A1
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electromagnetic wave
approximately
hole
visible light
wavelength
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PCT/CN2018/088971
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English (en)
French (fr)
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龚国华
何江
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深圳通感微电子有限公司
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Priority to PCT/CN2018/088971 priority Critical patent/WO2019227326A1/zh
Publication of WO2019227326A1 publication Critical patent/WO2019227326A1/zh

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/30—Collimators
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses

Definitions

  • the invention relates to the field of electromagnetic wave transmission, and more particularly, to an electromagnetic wave collimation structure.
  • electromagnetic wave technology With the development of electromagnetic wave technology, it is a long-term subject to study the transmission path of visible light through electromagnetic wave theory in order to obtain the best transmission effect of visible light. At present, the most commonly used method is to use light transmission to converge light. Subject. Various collimated structures made using light propagation theory require complex structural design and precise processing techniques, which are complicated and costly.
  • the technical problem to be solved by the present invention is to provide an electromagnetic wave collimation structure for the defects of complicated and high cost of the existing collimation structure in the prior art.
  • the technical solution adopted by the present invention to solve its technical problems is to construct an electromagnetic wave collimation structure for electromagnetic wave transmission in the visible light frequency range, including:
  • a structural body comprising an incident surface facing the electromagnetic wave irradiation direction and an exit surface opposite to the incident surface, and the incident surface and the exit surface are both metal surfaces for preventing the electromagnetic wave from propagating ;
  • a through hole penetrating the structural body, the through hole radius is less than or equal to a half wavelength of the electromagnetic wave, and the depth of the through hole is less than or equal to the electromagnetic wave wavelength;
  • the structural period P of the groove is 0.5 to 2 wavelengths of the electromagnetic wave, and the depth of the groove is less than or equal to a half wavelength of the electromagnetic wave.
  • the concentric annular groove is provided on an exit surface of the structural body.
  • the concentric annular groove is further provided on an incident surface of the structural body.
  • the plurality of concentric annular grooves includes four of the concentric annular grooves.
  • the width of the groove is approximately half of the structural period P.
  • the structural body includes a metal thin film for blocking the propagation of the electromagnetic wave.
  • the metal thin film includes one or more of Au, Ag, Al, and Cr.
  • the structural body is a sub-wavelength level structure.
  • the visible light includes one or more of red light, blue light, and green light.
  • the via hole radius is approximately 150 nm
  • the structure period P is approximately 600 nm
  • the L is approximately 400 nm
  • the via hole radius is approximately 150 nm
  • the structure period P is approximately 400 nm
  • the L is approximately 300 nm
  • the via hole radius is approximately 120 nm
  • the structure period P is approximately 900 nm
  • the L is approximately 1200 nm.
  • the implementation of the electromagnetic wave collimation structure of the present invention has the following beneficial effects: the electromagnetic wave transmission rate is improved through a simple structural design, the process is simple, and the cost is low.
  • FIG. 1 is a schematic structural diagram of an electromagnetic wave collimation structure according to the present invention.
  • FIG. 2 is a cross-sectional view of an electromagnetic wave collimation structure according to the present invention.
  • FIG. 3 is a simulation effect diagram of emitted light according to an embodiment of an electromagnetic wave collimation structure according to the present invention.
  • FIG. 4 is a schematic diagram of far-field light intensity in polar coordinates in the embodiment of FIG. 3;
  • FIG. 5 is a schematic diagram of the relative intensity of light intensity in the embodiment of FIG. 3;
  • FIG. 6 is a schematic diagram of the light intensity angle distribution of the embodiment of FIG. 3.
  • the electromagnetic wave collimation structure is used for electromagnetic wave transmission in the visible light frequency band range.
  • the electromagnetic wave collimation structure includes a structure body 100,
  • the structural body 100 includes an incident surface 110 facing the electromagnetic wave irradiation direction and an exit surface 120 opposite to the incident surface 110.
  • Both the incident surface 110 and the exit surface 120 are metal surfaces for preventing electromagnetic waves from propagating; a through hole penetrating the structural body 100 130, the radius of the through hole 130 is less than or equal to half the wavelength of the electromagnetic wave, and the depth of the through hole 130 is less than or equal to the wavelength of the electromagnetic wave; on the structural body 100, the through hole 130 is the center of the hole, and the starting point L from the center of the through hole 130 is periodic.
  • a plurality of concentric annular grooves 111 are provided, where L is less than or equal to 10 electromagnetic wave wavelengths, the structural period P of the grooves 111 is 0.5 to 2 electromagnetic wave wavelengths, and the depth of the groove 111 is less than or equal to half a wavelength of the electromagnetic waves.
  • the collimated structure can break through the electromagnetic wave diffraction limit.
  • the electromagnetic wave reaches the incident surface 110 of the structural body 100 and passes through the through-hole 130 on the structural body 100 and is also referred to as the central hole and passes through the structural body 100
  • the electromagnetic wave passes through the through-hole 130 Due to the diffraction effect, it will diverge around.
  • the outgoing electromagnetic wave can be effectively coupled within the range of the through hole 130. Thereby, a collimation effect on the electromagnetic wave is achieved.
  • the electromagnetic wave transmittance can be increased by 100 to 1000 times that of the single through hole 130 design.
  • the propagation direction of the electromagnetic wave in the through hole 130 is ensured, the radius of the through hole 130 is less than or equal to a half wavelength of the electromagnetic wave, and the depth of the through hole 130 is less than or equal to the wavelength of the electromagnetic wave.
  • the distance L between the innermost annular groove 111 and the center of the through hole 130 is less than or equal to 10 electromagnetic wave wavelengths.
  • the structural period P of 111 is 0.5 to 2 electromagnetic wave wavelengths, and the depth of the concentric annular groove 111 is less than or equal to a half wavelength of the electromagnetic wave. It can be understood that when the visible light is mixed light (for example, when it is white light), a certain visible light with the smallest wavelength can be selected for design, or the entire central wavelength range of visible light can be designed to satisfy other visible light that can be coupled in the communication as much as possible. Condition of hole 130.
  • the structure size of the structure body 100 can be controlled from several micrometers to several tens of micrometers, which is easy to realize arraying. And it is a flat structure, which does not involve the curved surface or curved surface used by conventional lenses, and it is easy to achieve mass production with the help of semiconductor processes such as nano-imprint technology.
  • the concentric annular groove 111 is provided on the exit surface 120 of the structural body 100. Specifically, since the electromagnetic wave passing through the through hole 130 is diffused to the surroundings due to the diffraction effect, which affects the collimation effect, the concentric annular groove 111 is provided through the exit surface 120 so that the electromagnetic wave passing through the through hole 130 can be converged and pass along the vertical pass. The transmission of the direction of the hole 130 continues to ensure the alignment of the electromagnetic wave transmission path and achieve the collimation effect.
  • the concentric annular groove 111 is further disposed on the incident surface 110 of the structural body 100. Specifically, based on the above, at the same time, a concentric annular groove 111 is provided on the incident surface 110 of the structural body 100.
  • the annular groove 111 structure transmits electromagnetic waves to the incident surface 110 of the structural body 100, that is, electromagnetic waves around the through hole 130 Coupling into the through-hole 130 improves the transmission rate of the electromagnetic wave of the incident surface 110 through the through-hole 130.
  • the plurality of concentric annular grooves 111 includes four concentric annular grooves 111.
  • the collimation in the visible light range can be achieved.
  • the corresponding divergence angle is within 10 °, which has better collimation effect.
  • the highest transmittance collimation effect is the best.
  • the visible light transmittance and the collimation effect are impaired.
  • the number of concentric annular grooves 111 is continuously increased on the basis of 4, the increase in visible light transmittance and collimation effect is not obvious.
  • the four concentric annular grooves 111 referred to here are concentric annular grooves 111 on the same surface of the structure body 100.
  • the number of the concentric annular grooves 111 has other special requirements.
  • the width of the groove 111 is approximately half of the structural period P.
  • the width of the groove 111 of the concentric annular groove 111 can be adjusted to adjust the degree of diffraction of the electromagnetic wave.
  • the best diffraction of visible light can be achieved by controlling the width of the groove 111 to be approximately half of the structural period P, which is equivalent to the width of the groove 111 and the distance between the groove 111 being approximately equal. Rough equality here can be understood as a certain deviation, not absolute equality.
  • the structural body 100 includes a metal thin film for blocking electromagnetic wave propagation.
  • the structural body 100 is made of a metal thin film that obstructs the propagation of electromagnetic waves, so that the exit surface 120 and the incident surface 110 are two surfaces of the metal thin film.
  • the metal thin film may be one or more of Au, Ag, Al, and Cr. Different metals have different diffractivity to visible light.
  • the metal surface of the structure body 100 can be adjusted to better adjust the transmittance and convergence of different visible light. force. Of course, other metals can also be used.
  • the metal thin film it is easy to ensure that the structure body 100 is a sub-wavelength level micro / nano structure, and it is easier to fabricate the sub-wavelength level structure body 100.
  • the size of the entire structural body 100 can be as small as the wavelength of visible light, so that the reflectance, transmittance, polarization characteristics, and spectral characteristics of the entire structural body 100 are displayed. It has completely different characteristics from conventional diffractive optical elements, and therefore has greater application potential. Further understanding, when it is a sub-wavelength structure, through the coordinated effect of the peripheral concentric rings on the phase of the electromagnetic wave, the diffraction limit can be broken, the outgoing beam is small and the divergence angle is small, which facilitates long-distance transmission, and it is not necessary to refocus at the electromagnetic wave receiving end.
  • traditional lenses focus on the electromagnetic waves and converge at one point, and the transmission distance starts to diverge beyond the focal distance, and multiple lenses are often required to ensure that the electromagnetic waves are not diverted when used over long distances.
  • the visible light includes one or more of red light, blue light, and green light.
  • visible light is a part of the electromagnetic spectrum that human eyes can perceive; the wavelength of electromagnetic waves that human eyes can perceive is between 400 and 760 nm, but some people can perceive electromagnetic waves with a wavelength between about 380 and 780 nm.
  • Common visible light colors include red, orange, yellow, green, cyan, blue, purple, etc.
  • the collimating structure can select one or more visible lights of different colors as the visible light used for collimation. For example, one or more of the commonly used red light, blue light, and green light are selected.
  • the radius of the through hole 130 is approximately 150 nm
  • the structure period P is approximately 600 nm
  • the L is approximately 400 nm.
  • the radius of the through hole 130 is approximately 150 nm and the structure period P is approximately 400 nm
  • L is approximately 300 nm
  • the visible light is blue
  • the radius of the through hole 130 is approximately 120 nm
  • the structure period P is approximately 900 nm
  • the L is approximately 1200 nm.
  • the approximate structure means that the structure size is within a controllable deviation range, not an absolute value.
  • red light according to the central wavelength of red light 680nm, green light according to the central wavelength of green light 530nm, blue light according to the central wavelength of blue light 460nm to design the size of the collimation structure, when the through hole 130 and the annular groove
  • red light according to the central wavelength of red light 680nm
  • green light according to the central wavelength of green light 530nm
  • blue light according to the central wavelength of blue light 460nm
  • the concentric annular groove 111 is provided on two surfaces of the structural body 100, that is, the exit surface and the incident surface, and each surface is concentric.
  • the number of the annular grooves 111 is set to 4, and the through holes 130 are designed according to the above dimensions.
  • the modified structure can have the best collimation effect on the electromagnetic wave with a center wavelength of 532nm, and the divergence angle of the outgoing beam is less than 20 °.
  • the collimation structure can well converge the green light to achieve the collimation effect.
  • FIG. 3 is a simulation view of the emitted light
  • FIG. 4 is a far-field light intensity diagram in polar coordinates
  • FIG. 5 is a relative intensity of light intensity collected in different angle directions
  • FIG. 6 is a light intensity angle corresponding to a wavelength of 532 nm Distribution.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
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Abstract

一种电磁波准直结构，用于可见光频段范围的电磁波传输，包括：结构本体（100），结构本体（100）包含正对电磁波照射方向的入射面（110）以及与入射面（110）相对的出射面（120），入射面（110）和出射面（120）均为用于阻止电磁波传播的金属面；穿透结构本体（100）的通孔（130），通孔（130）半径小于或等于电磁波的半波长，通孔（130）深度小于或等于电磁波波长；在结构本体（100）上以通孔（130）为圆心、且距离通孔（130）中心L处为起点、周期性设置的多个同心环状凹槽（111），电磁波准直结构工艺简单，成本低。

Description

一种电磁波准直结构 技术领域
本发明涉及电磁波传输领域，更具体地说，涉及一种电磁波准直结构。
 背景技术
随着电磁波技术发展，通过电磁波理论研究可见光的传输路径以达到获取可见光的最佳传输效果是一个长远的课题，而当前最常用的是利用光的传输对光的汇聚，也是光学准直结构研究的课题。各种利用光传播理论制作的准直结构均需要复杂的结构设计和精密的处理工艺，工艺复杂且成本高。
 技术问题
本发明要解决的技术问题在于，针对现有技术的上述现有准直结构工艺复杂、成本高的缺陷，提供一种电磁波准直结构。
 技术解决方案
本发明解决其技术问题所采用的技术方案是：构造一种电磁波准直结构，用于可见光频段范围的电磁波传输，包括：
结构本体，所述结构本体包含正对所述电磁波照射方向的入射面以及与所述入射面相对的出射面，所述入射面和所述出射面均为用于阻止所述电磁波传播的金属面；
穿透所述结构本体的通孔，所述通孔半径小于或等于所述电磁波的半波长，所述通孔深度小于或等于所述电磁波波长；
在所述结构本体上以所述通孔为圆心、且距离所述通孔中心L处为起点、周期性设置的多个同心环状凹槽，其中L小于或等于10个所述电磁波波长，所述凹槽的结构周期P为0.5至2个所述电磁波波长，所述凹槽深度小于或等于所述电磁波的半波长。
优选地，所述同心环状凹槽设置在所述结构本体的出射面。
优选地，所述同心环状凹槽还设置在所述结构本体的入射面。
优选地，所述多个同心环状凹槽包含4个所述同心环状凹槽。
优选地，所述凹槽的宽度大致为所述结构周期P的一半。
优选地，所述结构本体包括用于阻碍所述电磁波传播的金属薄膜。
优选地，所述金属薄膜包括Au、Ag、Al和Cr中的一种或多种。
优选地，所述结构本体为亚波长级结构。
优选地，所述可见光包括红光、蓝光和绿光中的一种或多种。
优选地，当所述可见光为红光时，所述通孔半径近似为150nm，所述结构周期P近似为600nm，所述L近似为400nm；
当所述可见光为绿光时，所述通孔半径近似为150nm，所述结构周期P近似为400nm，所述L近似为300nm；
当所述可见光为蓝光时，所述通孔半径近似为120nm，所述结构周期P近似为900nm，所述L近似为1200nm。
 有益效果
实施本发明的一种电磁波准直结构，具有以下有益效果：通过简单的结构设计提高电磁波透过率，工艺简单，成本低。
 附图说明
下面将结合附图及实施例对本发明作进一步说明，附图中：
图1是本发明一种电磁波准直结构的结构示意图；
图2是本发明一种电磁波准直结构的截面图；
图3是本发明一种电磁波准直结构一实施例的出射光模拟效果图；
图4是图3实施例的极坐标下远场光强示意图；
图5是图3实施例的光强相对强度示意图；
图6是图3实施例的光强角度分布示意图。
 本发明的实施方式
为了对本发明的技术特征、目的和效果有更加清楚的理解，现对照附图详细说明本发明的具体实施方式。
如图1和图2所示，在本发明的一种电磁波准直结构的实施例中，该电磁波准直结构用于可见光频段范围的电磁波传输，该电磁波准直结构包括：结构本体100，该结构本体100包含正对电磁波照射方向的入射面110以及与入射面110相对的出射面120，入射面110和出射面120均为用于阻止电磁波传播的金属面；穿透结构本体100的通孔130，该通孔130半径小于或等于电磁波的半波长，通孔130深度小于或等于电磁波波长；在结构本体100上以通孔130为圆心、且距离通孔130中心L处为起点、周期性设置的多个同心环状凹槽111，其中L小于或等于10个电磁波波长，凹槽111的结构周期P为0.5至2个电磁波波长，凹槽111深度小于或等于电磁波的半波长。具体的，基于纳米级金属表面等离子激元原理，本准直结构可以突破电磁波衍射极限。当电磁波到照射到结构本体100的入射面110，经过结构本体100上的通孔130也称为中心孔穿过结构本体100时，在没有同心环凹槽111结构时，通过通孔130的电磁波由于衍射效应会向四周发散。这个时候通过在结构本体100的出射面120添加同心环状凹槽111结构可以有效将出射电磁波耦合在通孔130范围内。从而实现对该电磁波的准直作用。通过同心环状凹槽111结构，电磁波透过率可以提高为单独通孔130设计的100~1000倍。在这里，根据电磁波的传输理论，保证电磁波在通孔130中的传播方向，通孔130半径小于或等于电磁波的半波长，通孔130深度小于或等于电磁波波长。而为了保证同心环状凹槽111结构能够将电磁波耦合在通孔130范围内，最内圈的环状凹槽111距离通孔130中心距离L小于或等于10个电磁波波长，同心环状凹槽111的结构周期P为0.5至2个电磁波波长，同心环状凹槽111深度小于或等于电磁波的半波长。可以理解的是，当可见光为混合光（例如为白光的时候），可以将选择其中波长最小的某一可见光进行设计，也可以整个可见光的中心波长范围进行设计，尽量满足其他可见光可耦合在通孔130的条件。本结构本体100结构尺寸能够控制在几微米到几十微米，易于实现阵列化。且为平面结构，不涉及常规透镜使用的曲面或者曲面，借助于半导体工艺如纳米压印技术很容易实现批量生产。
进一步的，同心环状凹槽111设置在结构本体100的出射面120。具体的，由于通过通孔130的电磁波由于衍射效应会向四周发散，影响准直效果，这里通过出射面120设置同心环状凹槽111，可以使经过通孔130的电磁波汇聚，沿着垂直通孔130的方向继续传输，以保证电磁波传输路径的准直，达到准直效果。
有些实施例中，同心环状凹槽111还设置在结构本体100的入射面110。具体的，在上面的基础上，同时在结构本体100的入射面110设置同心环状凹槽111，该环状凹槽111结构透射到结构本体100入射面110的电磁波即通孔130周边的电磁波耦合进入通孔130，提高了入射面110的电磁波穿透通孔130的通过率。
进一步的，多个同心环状凹槽111包含4个同心环状凹槽111。具体的，根据通过调整该结构尺寸参数可以实现可见光范围内调控准直。对应发散角在10°以内，具有较佳的准直效果。并且发现对应环的数量为4个时透过率最高准直效果最好，当少于4个或者同心环状凹槽111数量减少时，可见光的透过率和准直效果均受损。而在4个的基础上继续增加同心环状凹槽111数量时，其可见光的通过率和准直效果增加并不明显，所以根据利用简单工艺达到最佳效果，将同心环状凹槽111的数量控制在4个为最佳。这里所说的4个同心环状凹槽111是指结构本体100的同一面的同心环状凹槽111。当然也不排除在某些特殊电磁波的情况下，其同心环状凹槽111的数量有其他特殊要求。
进一步的，凹槽111的宽度大致为结构周期P的一半。具体的，这里可以通过调整同心环状凹槽111的凹槽111宽度，调整对电磁波的衍射程度。在可见光范围内，通过将凹槽111的宽度控制大致为结构周期P的一半，即相当于凹槽111的宽度与凹槽111之间的间距大致相等，可以达到对可见光的最佳衍射。这里的大致相等可以理解为可以存在一定的偏差，而不是绝对相等。
进一步的，结构本体100包括用于阻碍电磁波传播的金属薄膜。具体的，结构本体100利用阻碍电磁波传播的金属薄膜制成，这样其出射面120和入射面110为金属薄膜的两个表面。这里金属薄膜可以为Au、Ag、Al和Cr中的一种或多种，不同金属对可见光的衍射性不同，可以调节结构本体100的金属表面，更好的调节对不同可见光的通过率和汇聚力。当然也可以采用其他的金属。通过金属薄膜设计，可以很容易的保证结构本体100为亚波长级微纳结构，更容易制作出亚波长级的结构本体100尺寸。当结构本体100为亚波长结构时，整个结构本体100的尺寸可以小到与可见光的波长为同一个量级，这样整个结构本体100的反射率、透射率、偏振特性和光谱特性等都显示出与常规衍射光学元件截然不同的特征，因而具有更大的应用潜力。进一步了解，当为亚波长结构，通过周边同心环对电磁波相位的协调作用，可以突破衍射极限，出射光束细小且散角小，利于远距离传输，且在电磁波接收端不需要进行再次聚焦。而传统透镜对电磁波进行聚焦后汇聚于一点，传输距离超过焦距又开始发散，在长距离使用时往往需要多个透镜来保证电磁波不被发散。
进一步的，可见光包括红光、蓝光和绿光中的一种或多种。具体的，可见光是电磁波谱中人眼可以感知的部分；一般人的眼睛可以感知的电磁波的波长在400～760nm之间，但还有一些人能够感知到波长大约在380～780nm之间的电磁波。常见的可见光的颜色包括红、橙、黄、绿、青、蓝、紫等，在这里准直结构可以选择一种或者多种不同颜色的可见光作为用于准直作用的可见光。例如选择常用的红光、蓝光和绿光中的一种或多种。
在这里，当可见光为红光时，通孔130半径近似为150nm，结构周期P近似为600nm， L近似为400nm；当可见光为绿光时，通孔130半径近似为150nm，结构周期P近似为400nm， L近似为300nm；当可见光为蓝光时，通孔130半径近似为120nm，结构周期P近似为900nm，所述L近似为1200nm。可以理解，这里近似的结构是指结构尺寸在可以控制的偏差范围内，而不是一个绝对值，通过实验研究，当可见光分别采用红光、绿光或者蓝光的时候，可以按照其中心波长为基准进行设计，例如红光按照红光中心波长680nm、绿光光按照绿光光中心波长530nm，蓝光按照蓝光的中心波长460nm进行准直结构的各个尺寸进行设计，当通孔130和环状凹槽111的结构满足上面描述的尺寸要求时，其对应的可见光的汇聚理和穿透力最强，所能达到的准直效果最优。当采用红光、绿光和蓝光的混合光时，可以基于上面的结构尺寸做简单优化即可获得较高准直度的准直结构。
如图3所示的，在依据上面当可见光为绿光时的电磁波准直结构，同心环状凹槽111设置在结构本体100的两个面即出射面和入射面，且每个面的同心环状凹槽111数量设置为4个，按照上面尺寸设计通孔130，同心环状凹槽111的结构周期P及同心环状凹槽111与通孔130的距离L，同心环状凹槽111的宽度大致为结构周期P的一半，对应结构参数为r=150nm，P=400nm，L=300nm，金属薄膜材料为Ag。改结构能对中心波长为532nm的电磁波具有最佳的准直效果，出射光束发散角小于20°。根据其绿光传输路径的效果仿真图，可以看出该准直结构能对绿光很好的汇聚以达到准直效果。具体的，图3为出射光模拟效果图，图4为极坐标下远场光强图，图5为沿不同角度方向收集的光强相对强度，图6为波长为532nm所对应的光强角度分布图。
可以理解的，以上实施例仅表达了本发明的优选实施方式，其描述较为具体和详细，但并不能因此而理解为对本发明专利范围的限制；应当指出的是，对于本领域的普通技术人员来说，在不脱离本发明构思的前提下，可以对上述技术特点进行自由组合，还可以做出若干变形和改进，这些都属于本发明的保护范围；因此，凡跟本发明权利要求范围所做的等同变换与修饰，均应属于本发明权利要求的涵盖范围。

Claims (10)

  1. 一种电磁波准直结构，用于可见光频段范围的电磁波传输，其特征在于，包括：
    结构本体，所述结构本体包含正对所述电磁波照射方向的入射面以及与所述入射面相对的出射面，所述入射面和所述出射面均为用于阻止所述电磁波传播的金属面；
    穿透所述结构本体的通孔，所述通孔半径小于或等于所述电磁波的半波长，所述通孔深度小于或等于所述电磁波波长；
    在所述结构本体上以所述通孔为圆心、且距离所述通孔中心L处为起点、周期性设置的多个同心环状凹槽，其中L小于或等于10个所述电磁波波长，所述凹槽的结构周期P为0.5至2个所述电磁波波长，所述凹槽深度小于或等于所述电磁波的半波长。
  2. 根据权利要求1所述的电磁波准直结构，其特征在于，所述同心环状凹槽设置在所述结构本体的出射面。
  3. 根据权利要求2所述的电磁波准直结构，其特征在于，所述同心环状凹槽还设置在所述结构本体的入射面。
  4. 根据权利要求3所述的电磁波准直结构，其特征在于，所述多个同心环状凹槽包含4个所述同心环状凹槽。
  5. 根据权利要求4所述的电磁波准直结构，其特征在于，所述凹槽的宽度大致为所述结构周期P的一半。
  6. 根据权利要求1所述的电磁波准直结构，其特征在于，所述结构本体包括用于阻碍所述电磁波传播的金属薄膜。
  7. 根据权利要求6所述的电磁波准直结构，其特征在于，所述金属薄膜包括Au、Ag、Al和Cr中的一种或多种。
  8. 根据权利要求1所述的电磁波准直结构，其特征在于，所述结构本体为亚波长级结构。
  9. 根据权利要求1所述的电磁波准直结构，其特征在于，所述可见光包括红光、蓝光和绿光中的一种或多种。
  10. 根据权利要求9所述的电磁波准直结构，其特征在于，当所述可见光为红光时，所述通孔半径近似为150nm，所述结构周期P近似为600nm，所述L近似为400nm；
    当所述可见光为绿光时，所述通孔半径近似为150nm，所述结构周期P近似为400nm，所述L近似为300nm；
    当所述可见光为蓝光时，所述通孔半径近似为120nm，所述结构周期P近似为900nm，所述L近似为1200nm。
PCT/CN2018/088971 2018-05-30 2018-05-30 一种电磁波准直结构 WO2019227326A1 (zh)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1341026A2 (en) * 2002-02-28 2003-09-03 Canon Kabushiki Kaisha Beam splitting element and optical apparatus using it
CN102193180A (zh) * 2011-05-17 2011-09-21 中国科学院物理研究所 利用表面电磁波的散射的电磁波会聚装置
CN106324735A (zh) * 2016-10-26 2017-01-11 深圳大学 一种电磁波准直元件及组件
CN108459364A (zh) * 2018-05-30 2018-08-28 深圳通感微电子有限公司 一种电磁波准直结构
CN208224517U (zh) * 2018-05-30 2018-12-11 深圳通感微电子有限公司 一种电磁波准直结构

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1341026A2 (en) * 2002-02-28 2003-09-03 Canon Kabushiki Kaisha Beam splitting element and optical apparatus using it
CN102193180A (zh) * 2011-05-17 2011-09-21 中国科学院物理研究所 利用表面电磁波的散射的电磁波会聚装置
CN106324735A (zh) * 2016-10-26 2017-01-11 深圳大学 一种电磁波准直元件及组件
CN108459364A (zh) * 2018-05-30 2018-08-28 深圳通感微电子有限公司 一种电磁波准直结构
CN208224517U (zh) * 2018-05-30 2018-12-11 深圳通感微电子有限公司 一种电磁波准直结构

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