WO2019223685A1 - Cible, ainsi qu'un procédé de fabrication et un appareil associés - Google Patents

Cible, ainsi qu'un procédé de fabrication et un appareil associés Download PDF

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Publication number
WO2019223685A1
WO2019223685A1 PCT/CN2019/087798 CN2019087798W WO2019223685A1 WO 2019223685 A1 WO2019223685 A1 WO 2019223685A1 CN 2019087798 W CN2019087798 W CN 2019087798W WO 2019223685 A1 WO2019223685 A1 WO 2019223685A1
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WIPO (PCT)
Prior art keywords
target
thickness
preset
speed
target material
Prior art date
Application number
PCT/CN2019/087798
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English (en)
Chinese (zh)
Inventor
王云能
万捷
徐国军
黄喜南
张蛟
雷贵先
吴福忠
翁辉
Original Assignee
米亚索乐装备集成（福建）有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Priority claimed from CN201810489753.1A external-priority patent/CN108425096A/zh
Priority claimed from CN201820762425.XU external-priority patent/CN208562506U/zh
Priority claimed from CN201810549854.3A external-priority patent/CN108411261A/zh
Application filed by 米亚索乐装备集成（福建）有限公司 filed Critical 米亚索乐装备集成（福建）有限公司
Publication of WO2019223685A1 publication Critical patent/WO2019223685A1/fr

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering

Definitions

  • the present disclosure relates to the field of targets, and in particular, to a target, a method and a device for preparing a target.
  • the target is the sputtering source of the magnetron sputtering coating system. Under appropriate process conditions, the target material is sputtered on the substrate to form various functional films. In simple terms, the target is the target material bombarded by high-speed charged particles.
  • the principle of magnetron sputtering is as follows: under the effect of an electric field, electrons collide with argon atoms during the process of flying to the substrate, causing their ionization to produce Ar positive ions and new electrons; new electrons fly to the substrate, Ar positive ? Under the action of an electric field, ions are accelerated to the target material as the cathode, and the surface of the target material is bombarded with high energy, so that the surface material of the target material is sputtered. In the sputtered particles, neutral target atoms or molecules are deposited on the substrate to form a thin film, and the target atoms are gradually bombarded and deposited on the substrate.
  • the shapes of targets mainly include planar targets and rotating targets.
  • Rotating targets are generally made into a cylindrical shape with a stationary magnet inside, and the rotating target rotates at a slow speed.
  • the cylindrical outer peripheral surface of the rotating target is the surface to be sputtered.
  • a target including:
  • the target body includes: a middle section and end portions located at both ends of the middle section; wherein the thickness of the end portion is the thickness of the first target material, and the thickness of the middle section is the thickness of the second target material.
  • the thickness of the first target is greater than the thickness of the second target.
  • a target preparation method including:
  • the target material is sprayed on two preset end regions on the substrate to be processed to obtain two end portions of the target body; the target material is sprayed on the preset middle segment region on the substrate to be processed to obtain the target material.
  • the intermediate segment and the two ends form a target body of the target material
  • the thickness of the end portion is the thickness of the first target material
  • the thickness of the intermediate segment is the thickness of the second target material.
  • the thickness of the first target is greater than the thickness of the second target.
  • Fig. 1 (a) is a schematic structural diagram of a target material according to some exemplary embodiments.
  • Fig. 1 (b) is a schematic structural diagram of still another target material according to some exemplary embodiments.
  • Fig. 1 (c) is a schematic structural diagram of another target material according to some exemplary embodiments.
  • Fig. 2 is a schematic structural diagram of still another target material according to some exemplary embodiments.
  • FIG. 3 is another schematic structural diagram of the target shown in FIG. 2.
  • Fig. 4 is a schematic cross-sectional structure diagram of a target material according to some exemplary embodiments.
  • Fig. 5 is a schematic cross-sectional structure diagram of another target material according to some exemplary embodiments.
  • Fig. 6 is a flow chart showing a method for preparing a target material according to some exemplary embodiments.
  • Fig. 7 is a flow chart showing still another method for preparing a target material according to some exemplary embodiments.
  • Fig. 8 is a flow chart showing still another method for preparing a target material according to some exemplary embodiments.
  • Fig. 9 is a flow chart showing still another method for preparing a target material according to some exemplary embodiments.
  • Fig. 10 is a flow chart showing still another method for preparing a target material according to some exemplary embodiments.
  • Fig. 11 is a flow chart showing still another method for preparing a target material according to some exemplary embodiments.
  • Fig. 12 is a flow chart showing another method for preparing a target material according to some exemplary embodiments.
  • Fig. 13 is a flow chart showing another method for preparing a target material according to some exemplary embodiments.
  • FIG. 14 is a front view of a target material after spraying the target material layer according to some exemplary embodiments
  • FIG. 15 shows a left side view of a target after spraying a target material layer in a preset middle section region and a preset end region.
  • FIG. 16 is a front view of the target shown in FIG. 14 after machining.
  • FIG. 1 is a schematic structural diagram of a target material according to some exemplary embodiments.
  • the target 10 includes a backing tube 101 and a target body 102 formed on an outer surface of the backing tube 101.
  • the shape of the backing tube 101 may be cylindrical.
  • the target body 102 includes two end portions 1021 and a middle section 1022.
  • the middle section 1022 is located between the two end portions 1021.
  • the middle section 1022 and the two end portions 1021 are connected to each other.
  • a target body 102 is configured.
  • the thickness of the first target material at the end portion 1021 is greater than the thickness of the second target material at the middle portion 1022.
  • the backing tube 101 is a backing for the target body 102 to help the target body 102 be formed, and the target body 102 is attached to the backing tube 101.
  • the backing tube 101 may be a stainless steel material.
  • the target body 102 is used for sputter coating in a physical coating.
  • the target body 102 may include a metal target body and a ceramic target body.
  • the material composition of the metal target may be copper indium gallium, silver indium gallium, gold indium gallium, copper tin gallium, silver tin gallium, gold tin gallium, copper silver indium gallium, copper gold indium gallium, or the like.
  • the material composition of the target body 102 is copper indium gallium.
  • the copper indium gallium target can be used to prepare an absorption layer for a copper indium gallium solar cell.
  • Target body refers to the material on the backing tube used for sputtering film formation.
  • the first target thickness of the end portion 1021 refers to the thickness of the target material layer on both ends of the backing pipe, and the second target thickness of the middle section 1022 refers to the thickness of the target material layer on the middle portion of the backing pipe.
  • the diameter of the backing pipe is 5.202 inches
  • the bilateral thickness of the end of the target body is 0.672 inches
  • the bilateral thickness of the middle section of the target body is 0.52 inches, that is, two ends of the backing pipe are formed.
  • a 0.52-inch target material layer is formed in the middle section of the backing tube.
  • the target material in the technical solution of the present disclosure may be as long as the thickness of the end portion is greater than the thickness of the middle section, and is not limited to the shape in FIG. 1 (a).
  • the targets provided by the embodiments of the present disclosure may also have the shapes shown in FIGS. 1 (b), 1 (c), and 2.
  • the thickness of the end of the target body provided by the present disclosure is greater than the thickness of the middle section, the consumption time of the end of the target can be prolonged, the residue of the middle section can be avoided or reduced, and the use rate of the target can be improved.
  • the thickness of the end of the target that is, the thickness of the first target
  • the gradient of the target thickness can be an inclined straight line as shown in Figure 1 (b), or it can be convex as shown in Figure 1 (c).
  • the curve may also be a concave curve (not shown in the drawings).
  • the thickness of the middle section of the target body that is, the thickness of the second target
  • the thickness of the end portion of the target body is substantially larger than the thickness of the middle section, and the consumption time of the end portion and the middle section when the target is used for sputter coating is substantially the same.
  • the thickness of the target body tends to decrease substantially along the ends of the target toward the center. In some embodiments, the thickness of each part of the target body is optimized so that each part can be consumed at the same time when the target is used for sputter coating.
  • the target in the related art is cylindrical, and the thickness of each target body is the same.
  • the inventors have found that when a cylindrical target is used in magnetron sputtering, the end region has a higher probability of ion bombardment due to the higher electromagnetic field strength in the end region, so the end target body is consumed faster. As a result, the two ends of the target body are exhausted and can no longer be used, and the target material in the middle section of the used target leaves more target material, which results in a lower effective utilization of the target material and increases production costs virtually.
  • the bone-shaped target with thick ends and thin middle ends provided in the embodiments of the present disclosure is similar to a target in which the thickness of each part of the target body is the same, which increases the thickness of the end of the target body and can extend the target. It takes a long time in the sputtering process to prevent the two ends of the target body from being consumed first and to improve the utilization rate of the target.
  • the target provided in the present disclosure has a thickness of the target material rows of the two ends 1021 of the target.
  • the thicknesses of the target material rows of the two end portions 1021 may be different.
  • the thickness of the target material layer at the first end is the thickness of the first target
  • the thickness of the target material layer at the second end is the thickness of the third target
  • the thickness of the target material layer at the middle section 1022 is the second target. Thickness, the thickness of the first target material and the thickness of the third target material are not equal, but the thickness of the first target material and the third target material are both greater than the thickness of the second target material in the middle section 1022.
  • the thickness of each part of the target body corresponds to the electromagnetic field strength of each part of the target material during sputtering.
  • the thickness of each part of the target body is directly proportional to the degree of consumption of each part of the target after sputtering.
  • the target body 102 includes two ends 1021, a middle section 1022, and a transition section 1023 located between the end 1021 and the middle section 1022.
  • the end portion 1021 has a first target thickness
  • the middle section 1022 has a second target thickness
  • the first target thickness is greater than the second target thickness.
  • the thickness of the target material of the transition section 1023 gradually decreases from the thickness of the first target material to the thickness of the second target material along the direction of the center axis of the target material; the materials of the transition section 1023, the middle section 1022, and the end portion 1011 are all the same.
  • the transition section 1023 may be machined on the basis of the end portion 1021.
  • the target length at the end is 12.7 mm
  • the target length at the transition section is 28.7 mm
  • the target length at the middle section is 975.3 mm.
  • the angle formed by the transition section 1023 and the center axis of the backing pipe ranges from 3 ° to 30 °.
  • the included angle is any one of the following values: 3 °, 5 °, 10 °, 13 °, 15 °, 18 °, 20 °, 22 °, 25 °, 28 °, 30 °.
  • the included angle ranges from 5 to 15 °.
  • the included angle is any one of the following values: 5 °, 8 °, 10 °, 12 °, 14 °, 15 °.
  • a cylindrical middle section of a first diameter and two cylindrical ends of a second diameter are formed first, and the second diameter is larger than the first diameter, or, A target body that is thick at both ends and thin in the middle is formed. Then, through machining, the thickness of a segment of target body is adapted to the target consumption speed of the segment of target body during sputtering coating. When sputtering coating, the faster the target is consumed, the larger the designed thickness of the target body.
  • the target 10 further includes:
  • the material viscosity of the bonding layer 103 is greater than the material viscosity of the target body 102.
  • the adhesive layer 103 is generally uniformly sprayed, and there is no difference in thickness.
  • the adhesive layer 103 is used to bond the backing tube 101 and the target body 102 to further prevent the target body 102 from falling off.
  • the material of the adhesive layer 103 may be a material with a higher indium content, and the powder with a higher indium content has a higher viscosity. In this way, the adhesive layer 103 is formed with a higher viscosity, which is good for backing pipes. The effect of bonding.
  • the bonding layer 103 is a material with a lower copper content and a higher indium content.
  • the material of the target body 102 is copper indium gallium
  • the bonding layer 103 is a material with a lower copper content and a higher indium content.
  • the adhesive layer 103 is close to the material of the target body 102, which is convenient to prepare, and when it is used for sputter coating, even if the transient sputtering occurs in some places and the adhesive layer is consumed, the composition of the formed film will not be large. influences.
  • the target body 102 includes a target body layer 1022 and a starting layer formed between the target body layer 1022 and the bonding layer 103. 1021.
  • the material of the starting layer 1021 is the same as that of the target body layer 1022, but the manufacturing processes of the starting layer 1021 and the target body layer 1022 are different.
  • the starting layer 1021 needs to be sprayed, and there is no difference in thickness.
  • the material composition of the bonding layer 102 and the starting layer 1021 is the same, but the component distribution ratios are different.
  • the materials of the adhesive layer 102 and the starting layer 1021 include copper indium gallium, but because indium has a certain adhesiveness, the indium content of the adhesive layer 103 is high.
  • a starting layer 1021 is formed.
  • This layer can have excellent bonding effect with the bonding layer 103, and at the same time, its composition is the same as that of the target main body layer, and it has a good transition effect. .
  • the target is formed by spraying, and the initial spraying pressure is higher to prepare a starting layer 1021. Then, the spraying pressure is reduced, and the spraying is continued to form the target body layer 1022. In this way, the target body 102 can be bonded to the backing tube 102.
  • the materials of the starting layer 1021 and the target body layer 1022 are completely the same, both are copper indium gallium, and the distribution ratios of the groups are also completely the same, except that the preparation processes are different.
  • the materials of the bonding layer 102, the starting layer 1021, and the target body layer 1022 are all copper indium gallium.
  • the distribution ratios of each group of the starting layer 1021 and the target body layer 1022 are also completely the same, except that the preparation processes are different.
  • the distribution ratio of each group of the bonding layer 103 is different from the starting layer 1021 and the target body layer 1022.
  • the indium content of the bonding layer 103 is higher than that of the starting layer 1021 and the target body layer 1022.
  • the present disclosure does not limit the formation of the target, as long as the thickness of the target body of the target used for sputtering generally has a thick structure at both ends and a thin center.
  • a target tube that is thick at both ends and thin in the middle can be formed first, and then the target tube is threaded on the backing tube and bonded to the backing tube.
  • the target tube can be formed by a sintering method, for example.
  • the above-mentioned target with thick ends and thin middle ends can also be made by spraying.
  • Fig. 6 is a flow chart showing a method for preparing a target material according to an exemplary embodiment. As shown in FIG. 6, the target preparation method can be used in a target preparation device, and includes the following steps 201-202:
  • step 201 the target material is sprayed on two preset end positions on the backing pipe to obtain two ends of the target body.
  • the thickness of the end portion is a thickness of the first target material obtained by spraying the target material at a preset end position.
  • step 202 a first target material is sprayed on a preset intermediate section position on the backing pipe to obtain the intermediate section of the target body.
  • the thickness of the middle section is a second target thickness obtained by spraying the target material on the preset middle section.
  • the thickness of the first target is greater than the thickness of the second target.
  • the backing tube may also be another substrate to be processed that serves a similar purpose.
  • the backing pipe may also be replaced with a target material that has been used for sputtering coating, and a target body that has been used for sputtering filming has been partially or completely consumed.
  • the spraying speed of the preset end region is slow, and the target material layer formed is relatively thick.
  • the spray gun is used for spraying
  • the first speed and the second speed are both the moving speed of the spray gun
  • the first speed of the spray gun moving in the preset end region is less than that in the preset middle section region.
  • Second speed The spraying speed of the spray target material layer is preset.
  • the spraying speed represents the spraying amount of the spray gun per second.
  • the formed target has a first target thickness of 0.52 inches and a second target thickness of 0.672 inches.
  • spraying can be performed by using one or more spray guns; for example, two end portions and a middle section can be sprayed by three spray guns, respectively. Because the thickness of the middle section and the end is different, the spraying speed and moving speed of the spray gun can be different.
  • the specific moving speed and spraying speed are set according to the actual situation and thickness. For example, in some embodiments, the moving speed of the spray gun may be maintained constant, but the spraying amount of the spraying gun per unit time in the preset middle section of the backing pipe is smaller than the spraying rate of the spraying gun per unit time in the preset end of the backing pipe. Output.
  • the target preparation method provided in this embodiment is used to form a bone-like shape with thick ends and thin middle ends, which increases the thickness of the ends of the target body and extends the consumption of the target during use compared to related technologies. Time, so as to prevent the two ends of the target body from being consumed first and improve the utilization rate of the target.
  • step 201 that is, spraying the target material on two preset end positions on the backing pipe to obtain two ends of the target body, may include: in step 2011 , Spraying the target material on the two preset end positions on the backing pipe at the second speed to obtain the two end portions of the target body.
  • step 202 that is, spraying the target material on a preset intermediate section position on the backing pipe to obtain the intermediate section of the target body, may include: in step 2021, presetting the middle section on the backing pipe at a first speed. The target material is sprayed on the segment position to obtain the middle segment of the target body.
  • the second speed is smaller than the first speed.
  • the target preparation is generally completed by a spray gun, the spray gun moves from one end of the backing pipe along the backing pipe to the other end of the backing pipe, wherein the spray gun moves at a preset end position
  • the speed is slower than the movement speed of the preset mid-position position, so the slower the gun moves, the more spray is sprayed on the corresponding part, and vice versa.
  • the positions of the ends of the target body i.e. Set the end position
  • the position of the middle section of the target body that is, the preset middle section position
  • step 202 that is, spraying the target material at a preset intermediate section position on the backing pipe at a first speed to obtain the intermediate section of the target body, the method further includes :
  • step 203 the connecting portions of the two preset ends and the preset middle section are respectively machined, so that the straight portions of the two ends and the middle section form a transition section with a preset angle, respectively.
  • a transition section having a target inclination angle with respect to the central axis of the backing pipe is formed between the two ends and the middle section, respectively.
  • the target inclination angle can be the transition section, the end section and the middle section can be prepared at one time, the first section of the transition section is in contact with the section of the end and is equal, the second section of the transition section is in contact with the section of the middle section As large as it is, the thickness of the transition section gradually decreases from the first section to the second section.
  • the target preparation method before spraying the substrate to be processed, the target preparation method further includes:
  • step 200a a bonding material is sprayed on the backing pipe to obtain a bonding layer.
  • the target preparation method further includes:
  • step 200b the target material is sprayed on the adhesive layer to obtain a starting layer.
  • the starting layer can not only have excellent bonding effect with the bonding layer, but also has a good transition effect because its composition is the same as that of the target body.
  • Spray pressure range is 0.5-3.5bar
  • the powder before spraying is heated so that the temperature of the powder reaches 200-400 ° C, that is, the temperature of the powder before spraying is controlled at 200-400 ° C;
  • the number of sprayed layers is 20-150 layers
  • the first speed range is 5-20mm / s;
  • the spray process requirements for the end and middle sections include:
  • the pressure range is 1.5-3bar;
  • the number of sprayed layers is 80-130 layers
  • the first speed range is 7-15mm / s
  • the range of the second speed is 5-9 mm / s.
  • the spray process requirements for the adhesive layer include:
  • Spray pressure range is 5-20bar
  • the spray process requirements for the adhesive layer include:
  • Spray pressure range is 8-20bar
  • the temperature of the powder before spraying is in the range of 95-120 ° C;
  • the gun's moving speed range is 7-15mm / s.
  • the spray process requirements for the starting layer include:
  • Spraying pressure range is 3-8bar
  • the temperature of the powder before spraying is in the range of 40-90 ° C;
  • the number of sprayed layers ranges from 1-20 layers
  • the gun's moving speed range is 5-20mm / s.
  • the spray process requirements for the starting layer include:
  • Spray pressure range is 4-7bar
  • the temperature of the powder before spraying is in the range of 55-70 ° C;
  • the gun's moving speed range is 7-15mm / s.
  • Fig. 11 is a flow chart showing a method for preparing a target material according to an exemplary embodiment. As shown in FIG. 11, the target preparation method is used in a target preparation device, and includes the following steps 301-305,
  • step 301 an adhesive layer is sprayed on the backing tube.
  • the material viscosity of the bonding layer is greater than the material viscosity of the target material.
  • step 302 the target material is sprayed on the bonding layer to obtain a starting layer.
  • step 303 on the starting layer, the target material is sprayed on the two preset end positions on the backing tube at the second speed, and the target material is sprayed on the preset middle position at the first speed.
  • the second speed is smaller than the first speed.
  • step 304 the connecting portions of the two preset ends and the preset middle section are respectively machined so that the two ends and the middle section form a transition section with a preset angle, respectively.
  • the spraying speed of the spray gun is unchanged, the slower the spray gun moves, the more material is sprayed onto the target material in this part. In this way, the amount of spraying on the two ends is increased, which delays the two ends of the target body.
  • the consumption time can prevent the two ends of the target body from being consumed first, and improve the utilization rate of the target.
  • a target preparation device may be implemented as part or all of an electronic device through software, hardware, or a combination of both.
  • the target preparation device includes: a first spraying module for spraying target material on two preset end positions on a backing pipe to obtain two ends of the target body; presetting on the backing pipe Spraying the target material at the middle section position to obtain the middle section of the target body; the target thickness at the end is the first target thickness, and the target thickness at the middle section is the second target thickness.
  • the thickness of the first target is greater than the thickness of the second target.
  • the first spraying module sprays the target material at two preset end positions on the backing pipe at a second speed to obtain two ends of the target body; the backing is applied at the first speed.
  • the target material is sprayed on the tube at a preset intermediate section position to obtain the intermediate section of the target body, wherein the second speed is less than the first speed.
  • the ends and the middle section of the target are respectively formed by different spraying modules.
  • the apparatus further includes: a machining module for machining the connecting portions of the two preset ends and the preset intermediate section, respectively, so that the two preset ends are respectively And the preset middle section forms a preset angle transition section.
  • the device further includes a third spraying module for spraying an adhesive layer on the backing pipe; wherein the material viscosity of the adhesive layer is greater than the material viscosity of the target body.
  • the device further includes: a fourth spraying module, configured to spray the target material on the adhesive layer to obtain a starting layer.
  • the first to fourth spraying modules can be, for example, different spray guns.
  • both the fourth spraying module and the first spraying module are used to spray the target material, which may be the same spray gun; the third spraying module is used to spray the adhesive layer on the backing pipe may be another spray gun .
  • the target material layer of the target to be scrapped can be directly peeled off, and the backing tube (English full name: Back Tube, English abbreviation: 101) is sprayed with the target material layer again.
  • the target material layer in the middle section still has more residues. If the processing is performed by directly peeling the target material layer, the raw materials of the target material layer will be greatly wasted.
  • the embodiment of the present disclosure also provides a target processing method.
  • the method may include the following steps:
  • S101 Provide a substrate to be processed.
  • the substrate to be processed may be a target material layer with a certain thickness remaining after magnetron sputtering, that is, the target processing method provided in the embodiment of the present disclosure may be used for refurbishing the used substrate.
  • Scrap target may be a target material layer with a certain thickness remaining after magnetron sputtering.
  • the substrate to be processed may also be a backing tube that has not been sprayed with a target material layer, that is, the target processing method provided in the embodiment of the present disclosure may also be used to manufacture a new bone-shaped target.
  • the target processing method provided in the embodiments of the present disclosure can also process a cylindrical target with a uniform thickness of the target material layer into a bone-shaped target with a thin middle end and a thick end.
  • S102 Set a preset middle section region and a preset end region on the surface of the substrate to be processed.
  • the middle section of the surface of the substrate to be processed that is, a thin rod-shaped area corresponding to the middle section of the bone-shaped target after processing Set as the preset middle section area.
  • the target material is processed into the shape shown in FIG. 2, among the processed targets, the radial thickness of the target material layer formed in the preset middle segment area is the smallest, and the target material formed in the preset middle segment area is the smallest.
  • the radial thickness of each layer is the same.
  • the two ends of the surface of the substrate to be processed that is, the regions corresponding to the protruding two ends of the bone-shaped target after processing are set as the preset end regions, that is, in the processed target, the preset ends
  • the radial thickness of the target material layer formed by the regional target is greater than the radial thickness of the target material layer formed by the preset middle section region.
  • the region to be processed on the surface of the substrate to be processed except for the preset middle section region may be set as the preset end region.
  • the preset end region of the substrate to be processed may include a first preset end region and a second preset end region located at both ends of the preset middle segment region.
  • the first preset end region and the second preset end region are symmetrical and processed in the same manner, and are hereinafter collectively referred to as preset end regions.
  • the radial thickness of the target material layer formed in the end region is preset as the first target thickness
  • the radial thickness of the target material layer formed in the middle section region is preset as the second target thickness
  • S103 Select a plurality of first position points along the central axis direction of the surface of the substrate to be processed on the surface of the preset intermediate segment area, and select a plurality of second position points along the central axis direction on the surface of the preset end region.
  • the substrate to be processed can be fixed on the chuck of the lathe.
  • a plurality of first position points are selected along the central axis direction of the surface of the substrate in the preset intermediate section area.
  • the plurality of first position points may be distributed in the same plane passing through the central axis of the substrate to be processed.
  • the projection distances of adjacent first position points on the central axis of the substrate to be processed may be the same or different, that is, each first position point may be uniformly distributed along the central axis of the substrate to be processed, or may not be Uniform distribution, which is not specifically limited in the embodiment of the present invention.
  • a certain number of second position points can be selected on the surface of the preset end region.
  • a plurality of second position points may be selected on the surface of the preset end region along the central axis direction of the substrate to be processed.
  • the distance between adjacent second position points in the direction of the central axis may be the same or different, that is, the projection of each second position point on the central axis may be distributed uniformly or non-uniformly. Embodiments of the present invention This is not specifically limited.
  • S104 Measure the radial thicknesses of the plurality of first position points and the plurality of second position points, and obtain the target thicknesses of the plurality of first position points and the plurality of second position points.
  • the radial thickness of each first location point and the radial thickness of each second location point may be measured using a lathe tool. Specifically, the position of the lathe tool can be adjusted. When the lathe tool just touches a certain first position point in the preset middle section area of the substrate to be processed, the contact point of the lathe tool and the substrate to be processed can be adjusted. The distance between the central axes is determined as the radial thickness of the first location point. Similarly, the radial thickness of each second position point in the preset end region can be determined in the same manner.
  • the target radial thickness of each first location point in the preset intermediate segment area can also be set, that is, the thickness that each first location point in the preset intermediate segment area needs to reach after processing is determined.
  • the target thickness of each second position point in the preset end region may be set, that is, the thickness that each second position point in the preset end region needs to reach after processing is determined.
  • the substrate to be processed is a backing tube, and accordingly, the radial thickness of each first position and each second position Is the radial thickness of the backing tube corresponding to each first position point and each second position point.
  • S105 Determine a first speed at which the spray gun moves in a preset middle section area according to multiple radial thicknesses and target thicknesses.
  • each first position point in the preset middle segment area when the radial thickness actually measured at each first position point is the same, it can be determined that before processing, each first position point is in the center axis direction of the substrate to be processed
  • the upper surface has been distributed in a straight line, so when each first position is processed into a preset intermediate segment area, the spray gun can move at the same speed in a direction parallel to the central axis of the substrate to be processed, thereby ensuring the preset intermediate segment.
  • the thickness of the target material layer at each first location point in the region is the same.
  • the target thickness of each first position can be set to be the same.
  • a preset speed corresponding to the thickness difference between the target thickness and the radial thickness can be set. Determined as the first speed at which the spray gun moves in the preset middle section area. Since the processing method of the preset middle section area is simpler than the irregular area, the moving speed of the spray gun in the preset middle section area can be based on the thickness difference between the target thickness and the radial thickness of each first position point. Set in advance, where different thickness differences can be set to different preset speeds. For example, in a certain section of the preset middle section, the thickness difference is relatively large, and the speed at which the spray gun moves in this section can be set smaller. The speed at which the spray gun moves in a certain area is generally inversely proportional to the thickness difference between the target thickness and the radial thickness at the selected location point in the area.
  • the radial thickness of each first position point described in the embodiment of the present disclosure is the same, which means that the radial thickness difference between each first position point Within the allowable measurement error range, that is, when the radial thickness difference of each first position point does not exceed a preset thickness difference value, it can be considered that the radial thickness of each first position point is the same.
  • the radial thickness of each first position point is consistent with the starting point of the target thickness measurement, and it is convenient to calculate the first position point to be formed based on the radial thickness and target thickness of each first position point.
  • the thickness of the target material layer determines the first speed at which the spray gun moves in the preset middle section area.
  • the radial thickness of each second location point is also consistent with the starting point of the target thickness measurement.
  • the target thickness is the thickness of the target body. According to the thickness of the target body at the first or second location point, and the diameter of the backing tube, it can also be calculated that the first or second location point is required.
  • the thickness of the target material layer determines the speed at which the spray gun moves in a preset middle section region or a preset end region.
  • S106 Determine a second speed at which the spray gun moves in the preset end region according to the radial thickness and the target thickness of each second position point, and the first speed.
  • the thickness difference between the target thickness and the radial thickness of the second position point that is, during this processing, it is necessary to spray on the second position point Thickness of the target material layer.
  • the sputtering speed at both ends of the target is greater than the intermediate position. Therefore, the thickness of the target material layer in the preset end region of the processed target needs to be greater than the preset intermediate section. Area of target material layer thickness. As the moving speed of the spray gun is slower, the thickness of the sprayed target material layer is thicker.
  • the second speed at which the spray gun moves in the preset end region needs to be less than that of the spray gun moving in the preset middle region.
  • First speed Because the thickness of the target material layer to be sprayed is inversely proportional to the moving speed of the spray gun, the ratio of the thickness of the target material layer in the preset end region to the thickness of the target material layer in the middle region is equal to the first speed and The ratio of the first speed, so that the spraying equipment can determine the second speed at which the spray gun moves in the preset end region according to the thickness difference between the target thickness and the radial thickness at each second position point and the first speed.
  • S107 Control the spray gun to move at the first speed and spray the target material layer in the preset middle section area, and control the spray gun to move at the second speed and spray the target material layer in the preset end area to obtain the bone-shaped target.
  • the robot of the spraying equipment holds the spray gun.
  • the spraying equipment can control the moving speed of the robot to control the moving speed of the spray gun.
  • the spraying equipment can control the robot to move along a straight line parallel to the central axis of the substrate to be processed at the first speed, so that the spray gun will also follow the robot in the spraying process according to Move at the first speed.
  • the radial thickness of each first position point in the preset intermediate segment area can reach the corresponding target thickness.
  • the spraying equipment can control the robot to move at a second speed along the straight line formed by the projection of each second position on the second plane, so that the spray gun is in the spraying process. It will also move with the manipulator at the second speed. After the preset end region is sprayed, the radial thickness of each second position point in the preset end region can reach the corresponding target thickness.
  • both the preset middle section region and the preset end region may be processed into a cylindrical shape or a substantially cylindrical shape to obtain a bone-shaped target.
  • the moving speed of the spray gun in different regions can be determined according to the actual shape and target shape of the preset intermediate section region and the preset end region on the surface of the substrate to be processed, so that the spray gun can be controlled in different regions to Moving at different speeds, it is possible to spray different thicknesses of target material layers in different areas to achieve the manufacture and refurbishment of bone-shaped target materials with a thickness of the target material layers at both ends greater than the middle position. Because the original target material can be retained during processing Layer, and the bone-shaped target material can fully consume the target material layer in the middle position, so the waste of the raw material of the target material layer can be avoided.
  • the method may specifically include the following steps:
  • This step is similar to the implementation process of the above step S101, and will not be described in detail here.
  • the substrate to be processed may be a used scrap target whose original shape is a bone shape, and the length of the portion of the target to be scrapped where the target material layer is retained is 1058.1 mm (mm).
  • a target material to be discarded whose original shape is a bone shape with a certain thickness of the target material layer remaining after magnetron sputtering can be used as the substrate to be processed.
  • a lathe can be used to remove the remaining target material layer of the first thickness on the surface of the substrate to be processed, thereby removing oil stains, water stains, pits, and surface oxidation on the surface of the target to be scrapped. Layers and so on.
  • the first thickness can be determined according to the actual situation. In practical applications, the preset thickness may be greater than or equal to about 0.1 mm and less than or equal to about 0.5 mm, that is, the remaining target material layer may be removed from about 0.1 mm to about 0.5 mm.
  • the preset thickness may be greater than or equal to 0.1 mm and less than or equal to 0.5 mm.
  • a lathe can be used to remove 0.3 mm of the remaining target material layer on the surface of the target to be scrapped.
  • S203 Set a preset middle segment region and a preset end region on the surface of the substrate to be processed.
  • This step is similar to the implementation process of the above S102, and will not be described in detail here.
  • the coordinate of the starting point of the target material layer to be retained on the substrate to be processed (for example, corresponding to the O point in FIG. 14) in the central axis Z direction is set to 0 mm.
  • the area corresponding to the segment from mm to 1058.1 is set as the second preset end area, that is, along the central axis of the substrate to be processed, starting from the starting point of the target material layer distribution area in the design drawing, and sequentially set as the first The preset end region, the preset middle segment region, and the second preset end region.
  • S204 Select a plurality of first position points along a central axis direction of the surface of the substrate to be processed on the surface of the preset middle segment region, and select a plurality of second position points along the central axis direction on the surface of the preset end region.
  • the number of first position points in the preset middle segment area can be reduced or increased according to demand.
  • the more position points in the preset middle segment area the more moving speed data generated by the spray equipment, and the more precise the control of the target size.
  • the workload of measuring the radial thickness can be reduced. Therefore, in practical applications, a reasonable number of first position points can be set to balance control accuracy and measurement workload.
  • the second position points A, B, and C can be selected on the surface of the first preset end region along the central axis Z direction of the substrate to be processed, where each second position in the first preset end region
  • the value of the point in the direction of the central axis Z (the distance from the projection point of each second position point on the central axis Z to the origin O) is shown in Table 1 below.
  • the first position points D, E, F, G, H, I, J can be selected on the surface of the preset intermediate segment area along the central axis Z direction of the substrate to be processed, where each of the first The value of a position point in the Z direction of the central axis is shown in Table 2 below.
  • the second position points K, L, and M can be selected on the surface of the second preset end region along the center axis Z direction of the substrate to be processed, where each second position point in the second preset end region is The values in the Z direction of the central axis are shown in Table 3 below.
  • S205 Measure the radial thicknesses of the plurality of first position points and the plurality of second position points, and set a target thickness of the plurality of first position points and the plurality of second position points.
  • the radial thickness of each first position point and the radial thickness of each second position point can be measured using a lathe tool. Specifically, the position of the lathe tool can be adjusted. When the lathe tool just touches a certain first position point in the preset middle section area of the substrate to be processed, the contact point of the lathe tool and the substrate to be processed can be adjusted. The distance between the central axes is determined as the radial thickness of the first location point. Similarly, the radial thickness of each second position point in the preset end region can be determined in the same manner.
  • the target thickness of each first position point in the preset intermediate segment area can also be set, that is, the thickness that each first position point in the preset intermediate segment area needs to reach after processing is determined.
  • the target thickness of each second position point in the preset end region may be set, that is, the thickness that each second position point in the preset end region needs to reach after processing is determined.
  • a lathe tool may be used to measure the radial thickness of a plurality of first position points and a plurality of second position points.
  • Target thicknesses of multiple first position points and multiple second position points can be set, see Table 1, Table 2 and Table 3.
  • S206 Determine a first speed at which the spray gun moves in a preset intermediate segment area according to the radial thickness and the target thickness of the plurality of first position points.
  • the specific implementation of this step may include the following steps: when the radial thicknesses of the plurality of first position points are the same, determining a first thickness difference between the target thickness and the radial thickness of any first position point; A preset speed corresponding to a thickness difference is determined as a first speed at which the spray gun moves in a preset intermediate region.
  • each first position point in the preset middle segment area when the radial thickness actually measured at each first position point is the same, it can be determined that before processing, each first position point has been linearly distributed along the central axis direction, Therefore, when each first position point is processed into a preset intermediate segment area with a target thickness, the spray gun can move at the same speed, thereby ensuring that the thickness of the target material layer at each first position point in the preset intermediate segment area is the same.
  • the target thickness of each first position can be set to be the same.
  • a preset speed corresponding to the thickness difference between the target thickness and the radial thickness can be set. Determined as the first speed at which the spray gun moves in the preset middle section area. Since the processing method of the preset middle section area is relatively simple compared to the irregular area, the moving speed of the spray gun in the preset middle section area can be set in advance according to the thickness difference, that is, different thickness differences can correspond to different Preset speed.
  • the radial thickness of some special position points in the preset middle segment area and other general position points may be different due to processing problems, that is, the diameters of the respective first position points.
  • the thicknesses are not completely the same.
  • most of the first position points with the same radial thickness may be set as the general position points, and the first position points with different radial thicknesses from the general position points may be set as the special position points.
  • the gun can move at a faster speed at this position point, so that the radial thickness of the special position point and the general position point after processing are consistent, but for the radial thickness
  • the moving speed of the spray gun at this position point can be slightly slower, so that the radial thickness of the special position point and the general position point after processing are consistent.
  • the radial thicknesses of multiple first position points D, E, F, G, H, I, J in the preset middle segment area are all 5.566 inches. Therefore, multiple first position points D, E, F, The radial thicknesses of G, H, I, and J are all the same.
  • the first thickness difference between the target thickness of 5.722 inches and the radial thickness of 5.566 inches at any first location point can be determined to be 0.156 inches.
  • a preset speed of 10 mm / s (mm per second) corresponding to a value of 0.156 inches is determined as the first speed at which the spray gun moves in the preset middle section area.
  • S207 Determine a second speed at which the spray gun moves in the preset end region according to the radial thickness and the target thickness of the plurality of second position points, and the first speed.
  • the specific implementation of this step may include the following steps: when the radial thicknesses of the plurality of second position points are the same, determining a second thickness difference between the target thickness and the radial thickness of any second position point; The product of a speed and a first thickness difference is divided by a second thickness difference to obtain a second speed at which the spray gun moves in a preset end region.
  • the radial thickness of some special position points in the preset end region and other general position points may be different due to processing problems, that is, the diameters of the respective second position points.
  • the thicknesses are not completely the same.
  • most of the second position points with the same radial thickness can be set as general position points, and the second position points with different radial thicknesses from the general position points can be set as special position points.
  • the thickness difference c between the target thickness and the radial thickness at the general location point You can first determine the thickness difference d between the target thickness and the radial thickness at the general location point, and then determine the thickness difference d between the target thickness and the radial thickness at the special location point, and then you can multiply the product of the preset speed and the thickness difference c Divide by the thickness difference d to get the moving speed of the spray gun at a particular position.
  • the speed of spray gun corresponding to the location point of different radial thickness can be determined separately, so that for the same area slightly
  • the positions of the depressions or protrusions can also be precisely processed, so that the thickness of the entire area is uniform after processing.
  • the radial thicknesses of the plurality of second position points A, B, C, K, L, and M in the preset end region are all 5.64 inches. Therefore, the plurality of second position points A, B, C, K, The radial thicknesses of L and M are the same.
  • the second thickness difference between the target thickness of 5.874 inches and the radial thickness of 5.64 inches at any second location point can be determined to be 0.234 inches.
  • a product of a thickness difference of 0.156 inches is divided by a second thickness difference of 0.234 inches to obtain a second speed at which the spray gun moves in the first preset end region and the second preset end region are 6.66 mm / s.
  • a line obtained by sequentially connecting the plurality of first position points and the plurality of second position points along the central axis direction of the substrate to be processed is determined as a spraying path.
  • the spraying device may determine a line obtained by sequentially connecting a plurality of first position points and a plurality of second position points along the central axis direction of the substrate to be processed, that is, a spraying path, that is, a robot hand may be used. , Control the spray gun of the spraying equipment to spray the target material layer along the spraying path.
  • the substrate to be processed is rotated along the central axis, and the spray gun is sprayed on the side of the substrate to be processed in a reciprocating motion along the central axis to spray the target material layer on the entire surface of the substrate to be processed.
  • the distance between the spray gun of the spraying equipment and the surface of the substrate to be processed is approximately the same, which is convenient Realize automatic control and improve spraying efficiency of target material layer.
  • each position point A, B, C, D, in the first preset end region, the preset middle segment region, and the second preset end region may be sequentially connected in the direction of the central axis Z of the substrate to be processed.
  • S209 Control the spray gun to spray the target material layer in the preset middle section area at the first speed, and control the spray gun to spray the target material layer in the preset end area at the second speed to obtain the bone-shaped target.
  • the spray gun when the spray gun reaches the first preset end region along the spray path, the spray gun is controlled to spray the target material layer on the first preset end region at the second speed of 6.66 mm / s; when the spray gun reaches the preset middle along the spray path In the segment area, the spray gun is controlled to spray the target material layer in the preset middle segment area at the first speed of 10 mm / s; when the spray gun reaches the second preset end area along the spray path, the spray gun is controlled to follow the second speed of 6.66 mm / s A target material layer is sprayed on the second preset end region. This is repeated to form a target with a thin middle end and a thick end.
  • S210 Process the step region between the preset middle segment region and the preset end region into a transition region with a preset angle.
  • FIG. 14 shows a front view of a target after spraying a target material layer on a preset middle section region and a preset end region.
  • Fig. 15 shows a left view of the target after spraying the target material layer in the preset middle section region and the preset end region.
  • 101 denotes a backing pipe and 102 denotes a target material layer.
  • the preset end region includes a first preset end region G1 and a second preset end region G2.
  • a step region with a sudden change in thickness or a transition region with a change in thickness will be formed between the preset middle section region and the preset end region.
  • a step region T1 of abrupt thickness is formed between the first preset end region G1 and the preset middle segment region Z1, and between the preset middle segment region Z1 and the second preset end region G2
  • a stepped region T2 having a sudden thickness is formed.
  • the step area between the preset middle section area and the preset end area can be processed into a transition area with a preset angle by a lathe.
  • the transition region can be in the shape of a conical circular truncated cone after processing, and the preset angle is the angle formed by the side generatrix of the circular truncated cone of the transition region and the central axis of the substrate to be processed.
  • the step region T1 between the first preset end region G1 and the preset middle segment region Z1 may be processed into a transition region D1 with a preset angle, and the preset middle may be processed.
  • the step region T2 between the segment region Z1 and the second preset end region G2 is processed into a transition region D2 with a preset angle to obtain a bone-shaped target as shown in FIG. 16.
  • the preset angle is greater than or equal to 6 degrees and less than or equal to 60 degrees. In a preferred implementation manner, the preset angle is greater than or equal to 10 degrees and less than or equal to 30 degrees, so that a naturally gradual transition area can be formed between the preset middle segment area and the preset end area.
  • spraying equipment can be installed with auxiliary manufacturing software, such as Mastercam, etc., so that the spraying equipment can obtain the radial thickness and target thickness of each input point through the auxiliary manufacturing software, and The moving speed and spraying path of the spray gun in the preset middle section area and the preset end area are determined respectively.
  • the spraying equipment can generate a file (File Transfer Protocol) that can be read by a robot according to the moving speed and the spraying path. When the robot reads the FTP file, it can control the spray gun to spray at different moving speeds in different areas.
  • FTP File
  • the spraying equipment can be refurbished according to its actual shape, so that there is no need to peel off all remaining target material layers, and waste of raw materials can be avoided.
  • the spraying equipment is processed according to the actual shape of the substrate to be processed, which can realize the renovation of special shaped targets. It is not only suitable for the renovation of special rotating targets such as bone shapes, but also suitable for flat targets and general isometric shapes. Refurbishment of targets.
  • multiple surfaces of the preset intermediate segment region may be selected along the central axis direction of the substrate to be processed.
  • select a plurality of second position points along the central axis direction on the surface of the preset end region and then determine the radial thickness and target thickness of the plurality of first position points and the plurality of second position points.
  • the first speed of the spray gun to move in the preset middle section area is determined, and then the radial thickness and the target thickness of the plurality of second position points, and the second speed may be determined.
  • the moving speed of the spray gun in different regions can be determined according to the actual shape and target shape of the preset intermediate section region and the preset end region on the surface of the substrate to be processed, so that the spray gun can be controlled in different regions to Moving at different speeds, it is possible to spray coatings of different thicknesses in different areas to achieve the manufacture and refurbishment of bone-shaped targets with coating thickness at both ends greater than the middle position, because the original coating can be retained during processing, and the bone-shaped target The material can fully consume the coating in the middle position, so the waste of coating raw materials can be avoided.
  • An embodiment of the present disclosure also provides a computer program that, when executed on a computer, controls the spraying device to execute the above target material preparation method.
  • An embodiment of the present disclosure further provides a non-transitory storage medium storing the above-mentioned computer program.
  • the spraying device is controlled to execute the above-mentioned target preparation method.
  • the embodiments of the present disclosure may be provided as a method, an apparatus, or a computer program product. Therefore, the embodiments of the present disclosure may take the form of an entirely hardware embodiment, an entirely software embodiment, or an embodiment combining software and hardware aspects. Moreover, the embodiments of the present disclosure may take the form of a computer program product implemented on one or more computer-usable storage media (including but not limited to disk storage, CD-ROM, optical storage, etc.) containing computer-usable program code.
  • computer-usable storage media including but not limited to disk storage, CD-ROM, optical storage, etc.
  • Embodiments of the present disclosure are described with reference to flowcharts and / or block diagrams of methods, terminal devices (systems), and computer program products according to embodiments of the present disclosure. It should be understood that each process and / or block in the flowcharts and / or block diagrams, and combinations of processes and / or blocks in the flowcharts and / or block diagrams can be implemented by computer program instructions.
  • These computer program instructions may be provided to a processor of a general purpose computer, special purpose computer, embedded processor, or other programmable data processing terminal device to produce a machine, such that the instructions executed by the processor of the computer or other programmable data processing terminal device Means are generated for implementing the functions specified in one or more flowcharts and / or one or more blocks of the block diagrams.
  • These computer program instructions may also be stored in a computer-readable memory capable of directing a computer or other programmable data processing terminal device to work in a specific manner, such that the instructions stored in the computer-readable memory produce a manufactured article including the instruction device,
  • the instruction means implements the functions specified in one or more flowcharts and / or one or more blocks of the block diagram.
  • These computer program instructions can also be loaded on a computer or other programmable data processing terminal device, so that a series of operation steps can be performed on the computer or other programmable terminal device to produce a computer-implemented process, so that the computer or other programmable terminal device can
  • the instructions executed on the steps provide steps for implementing the functions specified in one or more of the flowcharts and / or one or more of the block diagrams.

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

La présente invention concerne une cible (10) comprenant : un tube de doublure arrière (101) et un corps de cible (102) formé sur la surface extérieure du tube de doublure arrière (101), le corps de cible (102) comprenant une section centrale (1022) et des parties d'extrémité (1021) aux deux extrémités de la section centrale (1022), l'épaisseur des parties d'extrémité (1021) constituant une première épaisseur de cible, l'épaisseur de la section centrale (1022) constituant une seconde épaisseur de cible, et la première épaisseur de cible étant supérieure à la seconde épaisseur de cible. L'invention concerne également un procédé de fabrication d'une cible (10).
PCT/CN2019/087798 2018-05-21 2019-05-21 Cible, ainsi qu'un procédé de fabrication et un appareil associés WO2019223685A1 (fr)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
CN201810489753.1A CN108425096A (zh) 2018-05-21 2018-05-21 一种靶材、靶材制备方法及装置
CN201810489753.1 2018-05-21
CN201820762425.X 2018-05-21
CN201820762425.XU CN208562506U (zh) 2018-05-21 2018-05-21 一种靶材
CN201810549854.3 2018-05-31
CN201810549854.3A CN108411261A (zh) 2018-05-31 2018-05-31 一种靶材加工方法和一种骨形靶材

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JP2012132065A (ja) * 2010-12-21 2012-07-12 Tosoh Corp 円筒形スパッタリングターゲットおよびその製造方法
CN102791904A (zh) * 2011-01-26 2012-11-21 吉坤日矿日石金属株式会社 溅射靶
CN105378141A (zh) * 2013-07-05 2016-03-02 旭硝子工业陶瓷株式会社 溅射靶材及其制造方法
CN105463390A (zh) * 2014-09-12 2016-04-06 安泰科技股份有限公司 旋转靶材及其制造方法
CN108411261A (zh) * 2018-05-31 2018-08-17 米亚索乐装备集成（福建）有限公司 一种靶材加工方法和一种骨形靶材
CN108425096A (zh) * 2018-05-21 2018-08-21 米亚索乐装备集成（福建）有限公司 一种靶材、靶材制备方法及装置
CN208562506U (zh) * 2018-05-21 2019-03-01 米亚索乐装备集成（福建）有限公司 一种靶材

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Publication number Priority date Publication date Assignee Title
JP2012132065A (ja) * 2010-12-21 2012-07-12 Tosoh Corp 円筒形スパッタリングターゲットおよびその製造方法
CN102791904A (zh) * 2011-01-26 2012-11-21 吉坤日矿日石金属株式会社 溅射靶
CN105378141A (zh) * 2013-07-05 2016-03-02 旭硝子工业陶瓷株式会社 溅射靶材及其制造方法
CN105463390A (zh) * 2014-09-12 2016-04-06 安泰科技股份有限公司 旋转靶材及其制造方法
CN108425096A (zh) * 2018-05-21 2018-08-21 米亚索乐装备集成（福建）有限公司 一种靶材、靶材制备方法及装置
CN208562506U (zh) * 2018-05-21 2019-03-01 米亚索乐装备集成（福建）有限公司 一种靶材
CN108411261A (zh) * 2018-05-31 2018-08-17 米亚索乐装备集成（福建）有限公司 一种靶材加工方法和一种骨形靶材

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