WO2019216287A1 - Dispositif d'exposition et procédé d'exposition - Google Patents

Dispositif d'exposition et procédé d'exposition Download PDF

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Publication number
WO2019216287A1
WO2019216287A1 PCT/JP2019/018070 JP2019018070W WO2019216287A1 WO 2019216287 A1 WO2019216287 A1 WO 2019216287A1 JP 2019018070 W JP2019018070 W JP 2019018070W WO 2019216287 A1 WO2019216287 A1 WO 2019216287A1
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Prior art keywords
exposure
photomask
scanning direction
regions
overlap
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PCT/JP2019/018070
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English (en)
Japanese (ja)
Inventor
敏成 新井
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株式会社ブイ・テクノロジー
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Publication of WO2019216287A1 publication Critical patent/WO2019216287A1/fr

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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor

Definitions

  • the present invention relates to an exposure apparatus and an exposure method.
  • the exposure apparatus is used in a wide range of technical fields such as a photo-alignment process for performing an alignment process on an alignment film of a liquid crystal panel, and exposure of a photoresist used in a photolithography process.
  • flat panel displays FPD: Flat Panel Display
  • organic EL Electro-Luminescence
  • an exposure apparatus that performs divided exposure using a set of a plurality of small photomasks has been developed. In this exposure apparatus, it is possible to perform exposure at important points throughout the entire surface of the substrate using a plurality of photomasks while scanning the substrate to be exposed at a constant speed in a constant direction.
  • the gradation in which the opening area of the exposure pattern gradually changes toward the front end in the width direction is changed.
  • a multi-domain method in which the orientation and tilt direction of liquid crystal molecules are divided into two or more regions in a pixel in order to improve viewing angle characteristics.
  • each of the substrate on which the pixel electrode is formed backlight side substrate
  • the substrate on which the common electrode and the color filter are formed display side substrate
  • An exposure line is formed in a stripe shape.
  • the stripe-shaped exposure lines adjacent to each other are set so that the incident angles of polarized light as exposure light are different from each other.
  • a first exposure for exposing, for example, odd-numbered exposure lines and an exposure for even-numbered exposure lines are performed on a substrate to be exposed such as a backlight-side substrate or a display-side substrate.
  • the above-described divided exposure is performed with a set of a plurality of photomasks while the substrate to be exposed is scanned in a certain direction. Specifically, it is set so that polarized light having the same incident angle is incident on a set of a plurality of photomasks.
  • slit-shaped openings for forming the odd-numbered exposure lines are intermittently formed in the width direction.
  • Each photomask corresponds to an exposure region formed by being divided in the width direction of the substrate to be exposed (a direction perpendicular to the scanning direction).
  • the plurality of photomasks are arranged so as to be shifted in the scanning direction so as not to overlap each other.
  • the exposure areas of the photomasks adjacent to each other are set so that the end portions in the width direction overlap each other.
  • a gradation is formed so that the opening area of the exposure pattern gradually decreases toward the tip in the width direction.
  • the second exposure when the substrate to be exposed is further scanned in a certain direction, exposure with a different incident angle from the polarized light in the first exposure is performed depending on a set of a plurality of photomasks used for the second exposure. Perform on even-numbered exposure lines. Also in this second exposure, the gradation is set so that the gradation overlaps between the photomask photomask end portions where the exposure regions are adjacent to each other.
  • the number of exposure units used for divided exposure tends to increase.
  • the number of exposure regions (joint regions) where gradations of the above-described photomasks overlap increases. Therefore, when a multi-domain liquid crystal panel is manufactured, when performing the second exposure after the first exposure, the joint area in the first exposure and the joint area in the second exposure are In some cases, they overlap in the scanning direction.
  • the joint regions of the exposure regions having different orientation conditions overlap with each other in this way, the influence of the positional deviation between the photomask and the substrate to be exposed appears as unevenness of the joint regions, but becomes more remarkable when the two joint regions overlap.
  • the present invention has been made in view of the above-described problems, and an exposure apparatus and an exposure method that suppress unevenness in a joint region where exposure regions of adjacent photomasks overlap in the substrate surface of the substrate to be exposed.
  • the purpose is to provide.
  • an aspect of the present invention uses a first photomask group for an alignment film provided on an exposure substrate that is scanned in a scanning direction relatively. Then, after performing a first exposure for forming a stripe-shaped first exposure line along the scanning direction, the first exposure is performed on the alignment film using a second photomask group. Under different alignment conditions, second exposure is performed to form stripe-shaped second exposure lines adjacent to each of the first exposure lines, and a plurality of domain regions having different alignment directions of liquid crystal molecules are formed in the pixel region.
  • the first photomask group includes a plurality of first photomasks, and is set so that adjacent exposure regions of the first photomasks overlap each other, and the exposure is performed.
  • the first photomask portions corresponding to the first region that overlap each other have a first gradation portion that enables complementary exposure to each other
  • the second photomask group includes a plurality of second photomasks.
  • the exposure regions adjacent to each other of the second photomasks are set so as to overlap each other, and complementary exposure can be performed on both portions of the second photomask corresponding to the second regions where the exposure regions overlap.
  • the first gradation area and the second area are in positions that do not overlap in the scanning direction.
  • the first photomask group includes the first photomask arranged on the upstream side in the scanning direction and the first photomask arranged on the downstream side, and the second photomask.
  • the mask group is disposed downstream of the first photomask group in the scanning direction, and the second photomask disposed on the upstream side in the scanning direction and the second photomask disposed on the downstream side.
  • the first photomask group and the second photomask group are sequentially exposed from the first photomask arranged on the upstream side in the scanning direction with respect to the substrate to be exposed. Preferably it is done.
  • the first photomask has a plurality of first light transmission portions arranged intermittently along a direction perpendicular to the scanning direction
  • the first light transmission portion includes:
  • the second photomask has a plurality of second light transmission portions that are parallel to each other and extend along the scanning direction, and are intermittently arranged along a direction perpendicular to the scanning direction.
  • the second light transmission parts are parallel to each other and extend along the scanning direction, respectively, and the first photomask has a plurality of one or both end sides in a direction perpendicular to the scanning direction.
  • the first light transmitting portion forms the first gradation portion
  • the second photomask has a plurality of the second light transmitting portions on one or both end sides in a direction perpendicular to the scanning direction.
  • Part forms the second gradation part Door is preferable.
  • the said 1st gradation part is the said scanning of the said 1st light transmission part toward the front-end
  • the length of the direction changes so as to be gradually shortened, and the second gradation portion is moved toward the tip direction of one or both ends of the direction perpendicular to the scanning direction of the second photomask. It is preferable that the length of the second light transmission portion in the scanning direction changes so as to gradually become shorter.
  • a first photomask group is used to scan the first exposure line in a stripe shape with respect to the alignment film provided on the exposure substrate that is relatively scanned in the scanning direction. After performing the first exposure formed along the direction, the alignment film is different from the first exposure by using a second photomask group so as to be adjacent to the first exposure line.
  • second exposure is performed to form stripe-shaped second exposure lines adjacent to each of the first exposure lines, and each pixel region of red (R), green (G), and blue (B)
  • a first red light transmitting portion, a first green light transmitting portion, and a first blue light transmitting portion corresponding to each element, and the adjacent exposure regions of the first photomasks are set to overlap each other, Complementary to the first red light transmitting portion, the first green light transmitting portion, and the first blue light transmitting portion in both portions of the first photomask corresponding to the first region where the exposure regions overlap.
  • the second photomask includes a second red light transmitting portion, a second green light transmitting portion, and a second blue light transmitting portion corresponding to each RGB pixel, and the second photomasks are adjacent to each other.
  • Overlapping exposure areas The second red light transmissive portion, the second green light transmissive portion, and the second blue light transmissive portion in both of the second photomask portions corresponding to the second region where the exposure regions overlap with each other are set. It has a second red gradation portion, a second green gradation portion, and a second blue gradation portion that enable complementary exposure to each other.
  • a first photomask group is used to scan the first exposure line in a stripe shape with respect to the alignment film provided on the exposure substrate that is relatively scanned in the scanning direction. After performing the first exposure formed along the direction, each of the first exposure lines is formed on the alignment film using a second photomask group under an alignment condition different from that of the first exposure.
  • An exposure apparatus that performs a second exposure to form a stripe-shaped second exposure line adjacent to a plurality of domain regions having different orientation directions of liquid crystal molecules in the pixel region, A first photomask group is disposed upstream of the second photomask group in the scanning direction, and the first exposure is performed before the second exposure with respect to the substrate to be exposed. And starting the second exposure with the first exposure And wherein the ending later than the exposure.
  • Another aspect of the present invention is to form a plurality of domain regions having different alignment directions of liquid crystal molecules in a pixel region with respect to an alignment film provided on an exposure substrate that is relatively scanned in a scanning direction.
  • a first photomask group is used to form a striped first exposure line along the scanning direction
  • a second photomask group is used to form the first exposure line.
  • the first photomask group includes a plurality of first photomasks, and is set such that adjacent exposure regions of the first photomasks overlap each other, and both of the first regions corresponding to the first regions where the exposure regions overlap.
  • the first photomask portion includes a first gradation portion that enables complementary exposure to each other, and the second photomask group includes a plurality of second photomasks, and the second photomasks are adjacent to each other.
  • a second gradation portion that is set so that the matching exposure areas overlap, and the portions of both of the second photomasks corresponding to the second area where the exposure areas overlap overlap each other, and the first gradation portion
  • One region and the second region are set to positions that do not overlap in the scanning direction.
  • the first photomask group includes the first photomask arranged on the upstream side in the scanning direction and the first photomask arranged on the downstream side, and the second photomask.
  • the mask group is disposed downstream of the first photomask group in the scanning direction, and the second photomask disposed on the upstream side in the scanning direction and the second photomask disposed on the downstream side.
  • the first photomask group and the second photomask group are sequentially exposed from the first photomask arranged on the upstream side in the scanning direction with respect to the substrate to be exposed. Is preferred.
  • an exposure apparatus and an exposure method that suppress the occurrence of unevenness in the joint region where the exposure regions of adjacent photomasks overlap in the substrate surface of the substrate to be exposed are realized.
  • FIG. 1 is a perspective view showing the main part of the exposure apparatus according to the first embodiment of the present invention.
  • FIG. 2 is a plan view of the exposure apparatus according to the first embodiment of the present invention.
  • FIG. 3 is a plan view of the exposure apparatus according to the first embodiment of the present invention.
  • FIG. 4 is a plan view showing the arrangement positions of the first photomask group and the second photomask group in the exposure apparatus according to the first embodiment of the present invention.
  • FIG. 5 is an explanatory plan view showing exposure lines of the color filter substrate passing through the first photomask group and the second photomask group according to the first embodiment of the present invention.
  • FIG. 6 is an explanatory diagram showing exposure lines on the color filter substrate and the TFT substrate and a domain region of the pixel region on the liquid crystal panel.
  • FIG. 7 is an explanatory view showing the exposure order of the exposure apparatus according to the first embodiment of the present invention.
  • FIG. 8 is an explanatory view showing the order of exposure in the first modification of the exposure apparatus according to the first embodiment of the present invention.
  • FIG. 9 is an explanatory plan view showing a comparative example for the exposure apparatus according to the first embodiment of the present invention.
  • FIG. 10 is an explanatory plan view showing an outline of a photomass in the exposure apparatus according to the second embodiment of the present invention.
  • the present invention can be applied to an exposure apparatus and an exposure method that perform light irradiation such as exposure processing of an alignment film of a liquid crystal panel.
  • the present invention is an exposure apparatus for performing photo-alignment processing on a substrate to be exposed such as a TFT substrate (backlight side substrate) or a color filter substrate (display side substrate) on which a color filter array or counter electrode is formed
  • a substrate to be exposed such as a TFT substrate (backlight side substrate) or a color filter substrate (display side substrate) on which a color filter array or counter electrode is formed
  • the exposure apparatus and the exposure method according to the present embodiment are applied to a multi-domain liquid crystal panel in which liquid crystal domains are formed in a plurality of, for example, four divided areas of one pixel area in the liquid crystal panel.
  • an exposure technique applied to a multi-domain liquid crystal panel formed by dividing the vertical dimension of one pixel region into two, dividing the horizontal dimension of one pixel region into two, and dividing the alignment region of the alignment film into four.
  • the alignment process is performed so that one pixel is divided into four.
  • the present invention can also be applied to a case where a single pixel region is divided into a plurality of divisions other than four.
  • the exposure apparatus 1 includes an apparatus main body 2, a substrate transport unit 3, a group of first exposure units 40L, 40R, and 40C, and a group of second exposure units 50L, 50R, and 50C.
  • the color filter substrate 9 is used as the substrate to be exposed.
  • An alignment film 20 is applied to the surface of the color filter substrate 9.
  • the group of the first exposure units 40L, 40R, and 40C and the group of the second exposure units 50L, 50R, and 50C perform the photo-alignment process on the alignment film 20 in a shared manner.
  • the first exposure units 40 ⁇ / b> L and 40 ⁇ / b> R are disposed on both sides of the substrate transport unit 3 in the width direction W
  • the first exposure unit 40 ⁇ / b> C is disposed in the center of the substrate transport unit 3 in the width direction W. ing.
  • the second exposure units 50L and 50R are disposed on both sides of the substrate transport unit 3 in the width direction W, and the second exposure unit 50C is disposed in the center of the substrate transport unit 3 in the width direction W.
  • the first exposure units 40L, 40R, and 40C and the second exposure units 50L, 50R, and 50C each include an imaging unit 5 and a photomask driving unit 6 as shown in FIG. Each imaging unit 5 and photomask driving unit 6 are connected to a control unit 7, respectively.
  • the apparatus main body 2 includes a plate-like substrate stage 8 on a base (not shown). As shown in FIGS. 1 to 3, the substrate stage 8 can be moved in the scanning direction S by placing a color filter substrate 9 as a display side substrate of a liquid crystal panel and a TFT substrate (not shown) as a backlight side substrate. It has a width dimension and a length dimension. As shown in FIG. 1, an alignment mark 29 is provided at the edge of the color filter substrate 9 and is used for positioning on the substrate stage 8.
  • FIG. 1 shows the relationship between the apparatus main body 2 and the first exposure unit 40L disposed thereon.
  • the other first exposure units 40R, 40C and second exposure units 50L, 50R, 50C have the same relationship with the apparatus main body 2.
  • the substrate stage 8 is selectively formed with an opening 8A so as not to block the illumination light from the position detection illumination 21 that irradiates the imaging light transmission unit 18 formed on the first photomask 41L described later.
  • the substrate stage 8 is composed of a plate-like porous body, and compressed air is ejected from the upper surface to float the color filter substrate 9 so that the color filter substrate 9 can smoothly run on the substrate stage 8. It is possible.
  • the substrate transport unit 3 includes a pair of parallel linearly extending along the scanning direction S on both sides in the width direction W (direction perpendicular to the scanning direction S) of the substrate stage 8.
  • Guides 10 and 11 are provided.
  • a linear block portion 12 that is driven to move in the scanning direction S along the linear guide 10 is provided.
  • the linear block portion 12 connects and fixes the edge portion in the width direction of the color filter substrate 9.
  • the linear block unit 12 can be moved back and forth along the scanning direction S by a linear drive unit (not shown).
  • the first exposure unit 40L irradiates the exposure light source 13, the mirror 15 that reflects the exposure light 14 emitted from the exposure light source 13 toward the lower substrate stage 8, and the exposure light 14.
  • First photomask 41L The beam of the exposure light 14 irradiated toward the first photomask 41L is set to have an irradiation area that can irradiate the entire area of the exposure light transmitting portion 42 described later of the first photomask 41L. Yes.
  • the first photomask 41L is driven by a photomask drive unit 6 provided on the apparatus main body 2 side.
  • the first photomask 41L is provided so as to be movable in the width direction W perpendicular to the scan direction S, and movement adjustment in the width direction W is possible.
  • FIG. 1 shows only the first exposure unit 40L, the other first exposure units 40R and 40C and the second exposure units 50L, 50R, and 50C have the same configuration, and sequentially the first photomask 41R, 41C and second photomasks 51L, 51R, 51C.
  • a light shielding film 19 is formed on the surface of a transparent glass substrate.
  • An exposure light transmitting portion 42 is formed in the light shielding film 19. That is, in the region where the light transmission portion for exposure 42 is formed, the light shielding film 19 is not formed and light can be transmitted.
  • the exposure light transmitting portion 42 is configured by an assembly of a plurality of slits S42A and S42B extending along the scanning direction S.
  • the slits S42A and S42B are formed to be parallel to each other at a predetermined pitch along a width direction W that is perpendicular to the scanning direction S.
  • the pitch P between the exposure lines LA or the exposure lines LB having the same alignment condition of the color filter substrate 9 shown in FIG.
  • the width dimension of the slits S42A and S42B is set to be the same as the width dimension of the exposure line LA or the exposure line LB.
  • the three first photomasks 41L, 41R, and 41C constitute the first photomask group 40 that performs the first exposure. That is, the first exposure units 40L, 40R, and 40C including the first photomasks 41L, 41R, and 41C perform the first exposure.
  • the alignment film 20 is obliquely irradiated with polarized light at a predetermined incident angle.
  • the first photomask group 40 is arranged at a position where the color filter substrate 9 is first exposed, and the second photomask group 50 is located at a position downstream of the first photomask group 40 in the scanning direction S. Be placed.
  • the polarized light is obliquely irradiated at an incident angle different from that of the first exposure in the first photomask group 40.
  • the first photomask group 40 and the second photomask group 50 perform exposure on the exposure lines adjacent to each other with respect to the color filter substrate 9.
  • the exposure line LA formed on the color filter substrate is formed by, for example, the first exposure
  • the exposure line LB is formed by the second exposure.
  • the exposure lines LA and LB having different alignment conditions are formed adjacent to each other on the surface of the alignment film 20 in the color filter substrate 9.
  • the exposure light transmission part 42 of the first photomask 41L has a normal exposure part 42A composed of an assembly of slits S42A having a normal slit length, and a right end of the exposure light transmission part 42 in the drawing. And a gradation portion 42B that is an aggregate of slits S42B that gradually decrease in slit length.
  • the exposure light transmissive part 43 of the first photomask 41R has a normal exposure part 43A composed of an assembly of slits S43A having a normal slit length, and a left end of the exposure light transmissive part 43 in the drawing. And a gradation portion 43B that is an aggregate of slits S43B that gradually decrease toward the slit.
  • the first photomask 41C is disposed at a position where the central portion in the width direction of the color filter substrate 9 is exposed.
  • the exposure light transmission part 44 of the first photomask 41C is provided at both ends of the normal exposure part 44A, which is an assembly of slits S44A having a normal slit length, and the width direction of the exposure light transmission part 44.
  • a gradation portion 44B that is an aggregate of slits S44B that gradually decrease in length toward the respective end portions.
  • the gradation portion 44B on the left side of the first photomask 41C in the drawing is set to overlap the gradation portion 42B of the first photomask 41L in the scanning direction.
  • the gradation portion 44B on the right side of the first photomask 41C in the drawing is set so as to overlap the gradation portion 43B of the first photomask 41R in the scanning direction.
  • the second photomask 51L and the second photomask 51R are arranged at the same position in the running direction and at positions where both side portions of the color filter substrate 9 are exposed apart in the width direction.
  • the exposure light transmission part 52 of the second photomask 51L has a normal exposure part 52A that is an assembly of slits S52A having a normal slit length, and a right end of the exposure light transmission part 52 in the drawing. And a gradation portion 52B that is an aggregate of slits S52B that gradually decreases toward the slit.
  • the exposure light transmitting portion 53 of the second photomask 51R is directed to the normal exposure portion 53A that is an assembly of slits S53A having a normal slit length and the left end portion of the exposure light transmitting portion 53 in the drawing. And a gradation portion 53B that is an aggregate of slits S53B that gradually reduce the slit length.
  • the second photomask 51C is disposed at a position where the central portion in the width direction of the color filter substrate 9 is exposed.
  • the light transmission portions 54 for exposure of the second photomask 51C are provided at the normal exposure portion 54A, which is an aggregate of slits S54A having a normal slit length, and at both ends in the width direction of the light transmission portion 54 for exposure.
  • a gradation portion 54B that is an aggregate of slits S54B that gradually decrease in slit length toward the respective end portions.
  • the gradation portion 54B on the left side of the second photomask 51C in the drawing is set to overlap the gradation portion 52B of the second photomask 51L in the scanning direction.
  • the gradation part 54B on the right side of the second photomask 51C in the drawing is set so as to overlap with the gradation part 53B of the second photomask 51R in the scanning direction.
  • an area where the gradation portion 44B on the left side of the first photomask 41C in the drawing and the gradation portion 42B of the first photomask 41L overlap (the first gradation portion)
  • the region (second gradation portion) where the gradation portion 54B on the left side of the second photomask 51C in the drawing and the gradation portion 52B of the second photomask 51L overlap does not overlap in the scanning direction S.
  • the first gradation portion is included in a first region where the exposure regions of the first photomask 41L and the first photomask 41C overlap
  • the second gradation portion includes the second photomask 51L and the second photomask 51C. Are included in the second region where the exposure regions overlap.
  • the region (second gradation portion) where the gradation portion 54B on the right side of the mask 51C in the drawing and the gradation portion 53B of the second photomask 51R overlap is set so as not to overlap in the scanning direction S. ing.
  • the first gradation portion is included in a first region where the exposure regions of the first photomask 41R and the first photomask 41C overlap, and the second gradation portion is exposed to the second photomask 51R and the second photomask 51C. It is included in the second region where the regions overlap.
  • the area where the gradation parts 42B and 44B overlap (first gradation part) and the area where the gradation parts 52B and 54B overlap (second gradation part) do not overlap in the scanning direction S, and the gradation parts 43B and 44B.
  • the substrate of the color filter substrate 9 is set. It is possible to suppress the occurrence of unevenness in the joint region where the exposure regions of adjacent photomasks overlap in the plane.
  • the gradation portions 42B and 44B that overlap each other are set so that the sum of the slit lengths of the slits S42B and S44B that overlap each other in the scanning direction S is constant.
  • This relationship is the same in the other gradation portions 43B and 44B, the gradation portions 52B and 54B, and the gradation portions 53B and 54B that overlap each other.
  • it can suppress that a nonuniformity arises in the joint area
  • an exposure condition such as an exposure output between the first exposure unit 40L and the first exposure unit 40C having the first photomasks 41L and 41C corresponding to adjacent exposure regions.
  • an exposure condition such as an exposure output between the first exposure unit 40L and the first exposure unit 40C having the first photomasks 41L and 41C corresponding to adjacent exposure regions.
  • exposure is performed in the order shown in FIG. That is, after the exposure with the first photomask group 40 for providing the same alignment conditions, the exposure with the second photomask group 50 for applying alignment conditions different from those of the first photomask group 40 is performed. That is, for the color filter substrate 9, the first exposure is started before the second exposure, and the second exposure is ended after the first exposure, so that the exposure areas are joined. It is possible to suppress unevenness in the region.
  • FIG. 8 shows a modification in which the first photomask group 40 and the second photomask group 50 are exchanged in the exposure apparatus 1 according to the present embodiment.
  • the exposure order is second photomasks 51L and 51R, second photomask 51C, first photomasks 41L and 41R, and first photomask 41C.
  • FIG. 9 shows a comparative example for the exposure apparatus 1 according to the present embodiment.
  • the gradation portions 42B and 44B that overlap each other and the gradation portions 52B and 54B overlap in the scanning direction S.
  • the gradation portions 43B and 44B that overlap each other and the gradation portions 53B and 54B overlap in the scanning direction S.
  • unevenness may occur in the joint region.
  • a plurality of alignment directions of liquid crystal molecules are different in the pixel region with respect to the alignment film 20 provided on the color filter substrate 9 scanned in the scanning direction S. It is an exposure method for forming a domain region.
  • the first photomask group 40 is used to form a stripe-shaped first exposure line LA along the scanning direction S, and the second photomask group. 50, stripe-shaped second exposure lines LB adjacent to each of the first exposure lines LA are formed under the alignment conditions different from those of the first exposure so as to be adjacent to the first exposure line LA. Second exposure is performed (see FIG. 6).
  • the first photomask group 40 includes a plurality of first photomasks 41L, 41R, and 41C, and is set such that adjacent exposure regions of the first photomasks overlap each other, and corresponds to the first region where the exposure regions overlap.
  • the first gradation portions that enable complementary exposure to each other are provided on both first photomask portions.
  • the second photomask group 50 includes a plurality of second photomasks 51L, 51R, and 51C, and is set so that adjacent exposure regions of the second photomasks overlap each other, and corresponds to the second region where the exposure regions overlap.
  • the second photomask portion has a second gradation portion that enables complementary exposure to each other.
  • the first area and the second area are set at positions that do not overlap in the scanning direction S.
  • the first photomask group 40 includes first photomasks 41L and 41R arranged on the upstream side in the scanning direction S, and a first photomask 41C arranged on the downstream side.
  • the second photomask group 50 is disposed downstream of the first photomask group 40 in the scanning direction S, and downstream of the second photomasks 51L and 51R disposed upstream of the scanning direction S.
  • the first photomask group 40 and the second photomask group 50 are arranged on the upstream side in the scanning direction S with respect to the color filter substrate 9.
  • the exposure method according to the present embodiment it is possible to suppress the occurrence of unevenness in the joint region where the exposure regions of adjacent photomasks overlap in the substrate surface of the color filter substrate 9.
  • FIG. 10 shows a pattern of a light transmission portion corresponding to a joint region between photomasks used in the exposure apparatus according to the second embodiment of the present invention. Since the other configuration of the exposure apparatus to which this exposure method is applied is the same as that of the exposure apparatus according to the first embodiment, the same reference numerals are given and detailed description thereof is omitted.
  • the first photomask group 40 is used for the alignment film 20 provided on the color filter substrate 9 which is scanned in the scanning direction relatively.
  • the first exposure is performed on the alignment film 20 using the second photomask group 50.
  • a second exposure is performed to form a striped second exposure line LB adjacent to each of the first exposure lines LA under an alignment condition different from that of the first exposure so as to be adjacent to the line LA.
  • Exposure is performed to form a plurality of domain regions having different alignment directions of liquid crystal molecules in the pixel regions of R), green (G), and blue (B).
  • the first photomask group 40 includes a plurality of first photomasks 41L, 41R, and 41C.
  • one first photomask 41R is a first photomask corresponding to each RGB pixel as shown in FIG.
  • the gradation part 60A of the red light transmission part, the gradation part 61A of the first green light transmission part, and the gradation part 62A of the first blue light transmission part are provided.
  • the exposure regions adjacent to each other, for example, the first photomasks 41R and 41C are set so that the exposure regions adjacent to each other overlap.
  • the light transmission part 62B is set (upper part of FIG. 10).
  • the first red light transmitting portion 60B, the first green light transmitting portion 61B, and the first blue light transmitting portion 62B are the gradation portion 60A of the first red light transmitting portion of the first photomask 41R, the first Complementary exposure is possible for the gradation portion 61A of the green light transmission portion and the gradation portion 62A of the first blue light transmission portion.
  • an overlap of gradation parts can be set in a gradation part of about 15 mm in each of the RGB regions, and may be about 20 mm.
  • the joint area is reduced, but the influence of the joint can be reduced to 1/3.
  • the present invention is applied to the exposure apparatus 1 that performs the photo-alignment process on the color filter substrate 9, but the photo-alignment process may be performed on the alignment film on the TFT substrate side.
  • the length of the second region in the direction perpendicular to the scanning direction may be set longer than the length of the first region in the direction perpendicular to the scanning direction.
  • the color filter substrate 9 is moved in the scanning direction S.
  • the color filter substrate 9 is fixed to the substrate stage 8, and the first exposure units 40L, 40R, 40C and the second exposure units 50L, 50R,
  • the configuration may be such that 50C travels in the scanning direction S.
  • the first photomask group 40 includes three first photomasks 41L, 41R, and 41C
  • the second photomask group 50 also includes three second photomasks 51L, 51R, and 51C.
  • any configuration including a plurality of photomasks can be appropriately changed.
  • the stripe-shaped exposure lines LA and LB adjacent to each other are set so that the incident angles of the polarized light as the exposure light are different from each other.
  • the alignment direction can be changed by changing the polarization direction of the exposure light. It is good also as a structure which controls.

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Liquid Crystal (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Mathematical Physics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

La présente invention est caractérisée en ce que : un premier groupe de photomasques est pourvu d'une pluralité de premiers photomasques, est placé de telle sorte que des régions d'exposition adjacentes des premiers photomasques se chevauchent mutuellement, et possède des premières parties de gradation dans lesquelles l'exposition de parties de deux des premiers photomasques correspondant à une première région où les régions d'exposition se chevauchent mutuellement peut être effectuée de manière mutuellement complémentaire ; et un second groupe de photomasques est pourvu d'une pluralité de seconds photomasques, est placé de telle sorte que des régions d'exposition adjacentes des seconds photomasques se chevauchent mutuellement, et comporte des secondes parties de gradation dans lesquelles l'exposition de parties de deux des seconds photomasques correspondant à une seconde région où les régions d'exposition se chevauchent mutuellement peut être effectuée de manière mutuellement complémentaire, la première région et la seconde région étant positionnées de façon à ne pas se chevaucher mutuellement dans la direction du balayage.
PCT/JP2019/018070 2018-05-11 2019-04-26 Dispositif d'exposition et procédé d'exposition WO2019216287A1 (fr)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010117734A (ja) * 2006-01-26 2010-05-27 Sharp Corp 液晶表示装置の製造方法及び液晶表示装置
WO2011089772A1 (fr) * 2010-01-25 2011-07-28 シャープ株式会社 Appareil d'exposition, dispositif d'affichage à cristaux liquides et procédé de fabrication d'un dispositif d'affichage à cristaux liquides
WO2012105393A1 (fr) * 2011-02-03 2012-08-09 シャープ株式会社 Dispositif d'exposition, dispositif d'affichage à cristaux liquides ainsi que leur procédé de fabrication
JP2013068764A (ja) * 2011-09-22 2013-04-18 V Technology Co Ltd 露光装置
JP2014016380A (ja) * 2012-07-05 2014-01-30 V Technology Co Ltd 光配向露光装置及び光配向露光方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010117734A (ja) * 2006-01-26 2010-05-27 Sharp Corp 液晶表示装置の製造方法及び液晶表示装置
WO2011089772A1 (fr) * 2010-01-25 2011-07-28 シャープ株式会社 Appareil d'exposition, dispositif d'affichage à cristaux liquides et procédé de fabrication d'un dispositif d'affichage à cristaux liquides
WO2012105393A1 (fr) * 2011-02-03 2012-08-09 シャープ株式会社 Dispositif d'exposition, dispositif d'affichage à cristaux liquides ainsi que leur procédé de fabrication
JP2013068764A (ja) * 2011-09-22 2013-04-18 V Technology Co Ltd 露光装置
JP2014016380A (ja) * 2012-07-05 2014-01-30 V Technology Co Ltd 光配向露光装置及び光配向露光方法

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