WO2019208568A1 - Dispositif de chauffage de type à rayonnement lumineux et lampe à filament - Google Patents

Dispositif de chauffage de type à rayonnement lumineux et lampe à filament Download PDF

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Publication number
WO2019208568A1
WO2019208568A1 PCT/JP2019/017240 JP2019017240W WO2019208568A1 WO 2019208568 A1 WO2019208568 A1 WO 2019208568A1 JP 2019017240 W JP2019017240 W JP 2019017240W WO 2019208568 A1 WO2019208568 A1 WO 2019208568A1
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Prior art keywords
filament
light emitting
light
lamp
long
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PCT/JP2019/017240
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English (en)
Japanese (ja)
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正晃 西川
忠和 河村
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ウシオ電機株式会社
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Priority to JP2020515485A priority Critical patent/JP7004065B2/ja
Publication of WO2019208568A1 publication Critical patent/WO2019208568A1/fr

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01K—ELECTRIC INCANDESCENT LAMPS
    • H01K1/00—Details
    • H01K1/02—Incandescent bodies
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/26—Bombardment with radiation
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/40—Heating elements having the shape of rods or tubes
    • H05B3/42—Heating elements having the shape of rods or tubes non-flexible
    • H05B3/44—Heating elements having the shape of rods or tubes non-flexible heating conductor arranged within rods or tubes of insulating material
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/68—Heating arrangements specially adapted for cooking plates or analogous hot-plates
    • H05B3/76—Plates with spirally-wound heating tubes

Definitions

  • the present invention relates to a light irradiation type heating apparatus and a filament lamp using a filament lamp, and more particularly to a light irradiation type heating apparatus in which a plurality of filament lamps are arranged in parallel on a workpiece (semiconductor wafer).
  • a light irradiation type heating apparatus using a filament lamp is required to heat the surface of a workpiece such as a semiconductor substrate uniformly in a short time.
  • a light irradiation type heating apparatus using a filament lamp in which a coiled filament is arranged inside an arc tube conventionally, a plurality of rod-shaped filament lamps are arranged in parallel and in close proximity to a workpiece. Is used.
  • the filament lamps corresponding to the center region and the peripheral region of the workpiece are each provided with a light emission length.
  • a planar light source is configured to correspond to the shape of a workpiece using a plurality of different filament lamps.
  • the filament emission lengths are different. Since there is a difference in power density per unit (P [W / mm]), it is necessary to adjust lighting conditions so that the power density P of each filament is constant.
  • Patent Document 1 describes that the color temperature of the filaments constituting the light emitting portion of the lamp is controlled equally by paying attention to the color temperature of each filament lamp. Specifically, the effective surface area per unit length of the light emitting portion arranged corresponding to the zone of the outer peripheral edge of the workpiece is made larger than the effective surface area of the light emitting portion arranged corresponding to the central zone. Thus, it is described that even when the power density of the light emitting unit arranged in the outer peripheral zone is increased, the color temperature is adjusted to the same color temperature as that of the light emitting unit arranged in the central zone. .
  • Patent Document 1 the power density is not controlled to be constant, and the temperature increase rate (rise rate) of each light emitting unit is not considered, and the temperature increase rate is different. There is a problem that the body cannot be heat-treated with a uniform temperature rise.
  • the problem to be solved by the present invention is to provide a light irradiation type heating apparatus capable of heating a workpiece more uniformly in a light irradiation type heating apparatus in which a plurality of filament lamps are arranged in parallel.
  • the light irradiation type heating device is such that, in each filament lamp, the power density per unit length of the light emitting unit, the color temperature of the light emitting unit, and the heating rate are substantially the same.
  • the light emitting sections provided in the filament lamps having relatively different lengths of the light emitting sections are aligned with the number of filament strands constituting the light emitting section, or the filament strand diameter, or One or more of the total cross-sectional area of the filament wire constituting the filament, the coil inner diameter when the filament is wound in a coil shape, or the coil pitch when the filament is wound in a coil shape It is characterized by different design elements.
  • the plurality of filament lamps are characterized in that a light emitting part of a filament lamp located in a central area of the workpiece is relatively longer than a light emitting part of a filament lamp located in a peripheral area.
  • the light emitting unit includes a power density (P [W / mm]) of the light emitting unit, an outer surface area (S [mm 2 ]) of the light emitting unit per unit length, and a coil inner diameter (D [ mm]) to control the ratio X (P / DS) to make the color temperatures substantially the same. Further, by adjusting the mass per unit length of the light emitting part of the short filament of the light emitting part and the light emitting part of the long filament lamp of the light emitting part, the heating rate is made substantially the same. And
  • the total cross-sectional area in the former is smaller than the total cross-sectional area in the latter
  • the power density is characterized by being substantially the same.
  • the number of filament strands in the long light emitting long lamp is larger than the number of strands in the short light emitting long lamp.
  • a filament lamp applicable to a filament lamp having a long light emitting part (long light emitting long lamp)
  • a filament lamp having a length of the light emitting part of 70% or more with respect to the total length of the arc tube of the filament lamp is The number of filaments constituting the light-emitting portion is at least 3 or more.
  • a filament lamp applicable to a filament lamp having a short light emitting part (short light emitting long lamp)
  • a filament lamp in which the length of the light emitting part is 50% or less with respect to the total length of the arc tube of the filament lamp is The number of filaments constituting the light-emitting portion is at most 2 or less.
  • the filament lamp has a lighting voltage value of 300 V or less.
  • the “power density”, “color temperature”, and “temperature increase rate” of the filaments constituting the light emitting portions of the filament lamps having different emission lengths are set to substantially the same value. This makes it possible to heat the workpiece more uniformly. Since a plurality of filament lamps can be lit at substantially the same voltage value, the number of parts of the device control panel may be increased and the circuit may be complicated as in the case where the voltage value is variable for each lamp. In addition, since the voltage can be unified near the supply voltage, there is an effect that it is not necessary to secure a capacity higher than the rated power due to the influence of the apparent power.
  • substantially the same voltage value indicates that the difference between the rated voltages is at least within a range of ⁇ 10%.
  • each light emitting unit provided in each filament lamp has the number of filaments constituting the light emitting unit, or the filament, respectively.
  • the wire diameter, or the total cross-sectional area of the filament wire constituting the filament, or the coil inner diameter when the filament is wound in a coil shape, or the coil pitch when the filament is wound in a coil shape By changing any one or a plurality of design elements, the power density, the color temperature, and the temperature increase rate of the light emitting part are made substantially the same.
  • FIG. 2D It is a top view of the light irradiation type heating apparatus of this invention. It is a typical side view which shows one Embodiment of the light emission part of the filament lamp of this invention. It is typical drawing when the light emission part of the filament lamp of FIG. 2A is seen toward the winding axis direction of a filament. It is typical side surface sectional drawing of the light emission part of the filament lamp of FIG. 2A. It is a typical side view which shows one Embodiment of the light emission part of the filament lamp of this invention. It is typical drawing when the light emission part of the filament lamp of FIG. 2D is seen toward the winding axis direction of a filament. It is typical sectional drawing of the light emission part of the filament lamp of FIG. 2D. FIG.
  • 2G is a diagram showing a process of arranging the strands in a close-packed manner in the case of the light emitting unit 5 of the filament lamp 2 of FIG. 2D. It is an example of a structure of the light emission part of the filament lamp of this invention. It is an example of a structure of the light emission part of the filament lamp of this invention. It is explanatory drawing which shows the concept of this invention. It is an example of the filament lamp of this invention. It is a graph showing the temperature (color temperature) of a filament, and the spectrum of emitted light.
  • FIG. 1 is an overall top view of a light irradiation type heating apparatus 1 according to the present invention, in which a plurality of rod-shaped filament lamps 2 and 2 are arranged in parallel so as to face a workpiece W such as a semiconductor wafer.
  • Each filament lamp 2 is a filament lamp having a light emitting portion 5 composed of a filament 4 inside an arc tube 3 made of a light transmissive material such as quartz glass.
  • the arc tube 3 is filled with a halogen gas such as bromine and performs a so-called halogen cycle.
  • the lamp 2 corresponding to the central region of the workpiece W and the lamp 2 corresponding to the peripheral region in the juxtaposed direction of the filament lamps are configured by the filament 4.
  • the light emission length of the light emitting section 5 is different, and the light emitting section 5 in the lamp 2 corresponding to the central area is longer than the light emitting section 5 in the lamp 2 corresponding to the peripheral area.
  • each filament lamp is lit at substantially the same voltage value
  • Each light emitting section provided is the number of filament strands constituting the light emitting section, the filament strand diameter, the total cross-sectional area of the filament strand constituting the filament, or the filament in a coil shape.
  • One or more design elements of the coil inner diameter for winding or the coil pitch for winding the filament in a coil shape are different, and the power per unit length of the light emitting unit
  • the densities (W / mm) are substantially the same, the color temperatures (K) of the light emitting parts are substantially the same, and the temperature increase rates (v) of the light emitting parts are substantially the same. It is those that are aligned to.
  • the “temperature increase rate” in the present invention is an index indicating the rising speed of the temperature of the filament, the light emitted from the filament is detected by a sensor, and the target light amount value (for example, the light amount when the light emitting unit is lighted stably) It can be estimated from the time to reach 90%). Moreover, the difference of the temperature increase rate of each light emission part can be estimated from each relative value.
  • equalizing the power density of the light emitting units substantially the same means that the difference in the rated power density is arranged within a range of ⁇ 10% with respect to the average value of the power densities of all the light emitting units. This is in consideration of the nominal power tolerance of the apparatus, and is a numerical value in view of the allowable range in the present invention from the degree of influence of the amount of heat on the workpiece (workpiece).
  • to make the color temperatures of the light emitting portions substantially the same means that the numerical difference is aligned within a range of ⁇ 10% with respect to the average value of the color temperatures of all the light emitting portions. This takes into account the difference in light absorptance due to the variation in color temperature.
  • the transmittance of the workpiece varies greatly depending on the difference in color temperature. (Absorptivity decreases), which greatly affects the heating degree due to the difference in color temperature.
  • the temperature rising rates are aligned means that the difference in numerical values is aligned within a range of ⁇ 10% with respect to the average value of all the temperature increasing rates. This is determined from the degree of influence of the temperature distribution of the object to be processed due to the difference in the temperature rise rate.
  • FIG. 2A is a schematic side view showing an embodiment of the light emitting unit 5 of the filament lamp 2.
  • FIG. 2B is a schematic drawing when the light emitting portion 5 of the filament lamp 2 of FIG. 2A is viewed in the winding axis direction of the filament.
  • FIG. 2C is a schematic side cross-sectional view of the light emitting unit 5 of the filament lamp 2 of FIG. 2A.
  • FIG. 2D is a schematic side view showing an embodiment of the light emitting unit 5 of the filament lamp 2.
  • FIG. 2E is a schematic drawing when the light emitting portion 5 of the filament lamp 2 of FIG. 2D is viewed in the winding axis direction of the filament.
  • FIG. 2F is a schematic side sectional view of the light emitting unit 5 of the filament lamp 2 of FIG. 2D.
  • the power density (P [W / mm]) is determined by the power value (W) per unit length of the light emitting unit. More specifically, the power density (P) is determined by the lighting voltage value (V), the length of the light emitting part (Q [mm]), and the resistance value (R) of the filament constituting the light emitting part.
  • V lighting voltage value
  • Q [mm] the length of the light emitting part
  • R resistance value
  • the resistance value (R) of the filament is the electrical resistivity ( ⁇ [ ⁇ ⁇ mm]) of the filament, the filament wire length (L [mm]), and the cross-sectional area of the wire (A [mm 2 ]). The following equation holds.
  • the power density of each light emitting part can be adjusted to an arbitrary value by controlling the design value (material, strand length, cross-sectional area, etc.) of the filament. Further, the total cross-sectional area of the filament primes constituting the filament is a value obtained by adding all the cross-sectional areas of the corresponding strands when the filament is composed of a plurality of strands.
  • the color temperature (T [K]) of the light emitting part is determined by the balance between the energy supplied to the filament constituting the light emitting part and the loss energy radiated from the light emitting part. For example, in a light emitting part in which a filament is wound in a coil shape, if the filament diameter ( ⁇ [mm]) or the coil outer diameter of the filament is increased, the outer surface area (S [mm 2 ]) of the light emitting part increases. The amount of heat released from the part can be increased. Thereby, the color temperature of the light emission part at the time of lighting heating falls.
  • the heat retention characteristics in the light emitting portion change depending on the coil inner diameter (D [mm]) of the filament, which affects the color temperature of the light emitting portion.
  • the color temperature (T [K]) of the light emitting part is determined by the power density (P [W / mm]) in the filament constituting the light emitting part and the outer surface area (S [mm2]) per unit length of the light emitting part.
  • the ratio X (P / DS) of the coil inner diameter (D [mm]) of the light emitting part and found that there is a correlation between the power density and outer surface area of the light emitting part, and the ratio X (P / P) of the coil inner diameter.
  • the outer surface area per unit length of the light emitting part means that when the filament wire constituting the light emitting part is formed in a coil shape, as shown in FIG. 2B and FIG. This refers to the total area of the surface of the filament wire, that is, the outer surface (N), and the same applies to the case where the light emitting portion is composed of a plurality of filament strands. Further, as shown in FIGS.
  • each of the filaments is composed of a plurality of filament wires, and when viewed from a direction perpendicular to the winding axis direction of the filament from the outside to the inside,
  • each wire cross section is arranged in the most dense manner, and each wire cross section is placed in the most dense arrangement
  • the surface of the filament wire facing the outside is defined as the outer surface (N) with the line connecting the centers of the wire cross-sections as the boundary, and the total area can be calculated as the outer surface area.
  • 2G is a diagram showing a process of arranging the strands in a close-packed manner in the case of the light emitting unit 5 of the filament lamp 2 of FIG. 2D.
  • the boundary is a portion where the strands cross each other on the side where the strands face each other, and in the case of the light emitting unit 5 configured as shown in FIG. 2D, the region of the thick line portion shown in FIG. Becomes the outer surface (N).
  • Temperature increase rate of light emitting part (v) The temperature increase rate (v) of the light emitting part is determined by the power density (P [W / mm]) and the heat capacity per unit length of the light emitting part (C [J / K]).
  • the heat capacity (C) is determined by the mass per unit length (g / mm) of the light emitting part and the specific heat (c) specific to the material of the filament. From these points, the temperature increase rate can be adjusted substantially the same by controlling the mass (g / mm) per unit length of the light emitting unit and bringing the mass of each light emitting unit closer.
  • the temperature increase rate (v) of the light emitting unit can be adjusted by changing the design of the filament constituting the light emitting unit, the number of strands, the strand diameter, the coil inner diameter, the coil pitch, and the like.
  • the power density (W), the color temperature (K), and the temperature increase rate (v) of each light emitting unit are substantially reduced. It becomes possible to arrange in the same range.
  • the power density (P) of each light-emitting unit 5 can be controlled by the lighting voltage value (V) and the resistance value (R) of the filament 4 constituting the light-emitting unit 5.
  • the resistance value of each filament 4 is varied. Specifically, it can be realized by arbitrarily adjusting the material, the strand length, the cross-sectional area and the like of the filament 4.
  • the color temperature (T [K]) of each light emitting unit 5 has a correlation with the ratio X (P / DS) as described above.
  • the color temperature can be made substantially the same by making the ratio of 1 / DS closer. .
  • the heating rate (v) of each light emitting unit 5 has a correlation with the mass [g / mm] per unit length of the light emitting unit 5, and increases by bringing the mass of each light emitting unit 5 closer.
  • the temperature rate (v) can be controlled substantially the same.
  • the number of strands is changed for each lamp while changing the strand diameter of the filament 4 constituting the light emitting section 5. It may be possible to change it.
  • FIG. 3A and 3B show a configuration example of the light emitting unit 5 of the filament lamp 2 according to the present invention, and explain the form of the filament 4 of the filament 4 per unit length of the light emitting unit 5.
  • FIG. 3B shows a form in which three filament wires 41, 42, 43 are bundled in a bowl shape.
  • the coil inner diameter of the light emitting part in this configuration may be handled as the inner diameter of the inner coils 41 and 43 of the unionly bundled wires.
  • the power density is made uniform, and a constant supply voltage, for example, 200 V is applied to each of the long light emission length (part) lamp and the short light emission length (part) lamp, and the unit length of the light emission part.
  • a design is made to make the power density per unit (W / mm) substantially constant. Specifically, the combination which makes the resistance value constant is obtained by adjusting the cross-sectional area and length of a filament strand.
  • a small-diameter strand C composed of three strands is selected.
  • the medium-diameter strand B composed of two strands having a smaller total cross-sectional area than the large-diameter strand A having a larger cross-sectional area has a resistance value smaller than that of the large-diameter strand A by reducing the total cross-sectional area.
  • the thing of the resistance value equivalent to the large diameter strand A is obtained by using two.
  • the smaller diameter wire C composed of three smaller diameter wires can be made to have the same resistance value by making the total cross-sectional area smaller than that of the medium diameter wire B and using three wires. In this way, a combination of strands having the same resistance value is obtained as the first group, and a combination of strands having the same power density is obtained.
  • the large-diameter strand D, medium-diameter strand E, and small-diameter strand F are smaller than the first-group large-diameter strand A, medium-diameter strand B, and small-diameter strand C, respectively.
  • the resistance value is the same in the second group and is equivalent to the first group.
  • the third group large-diameter strand G, medium-diameter strand H, small-diameter strand I, and fourth group large-diameter strand J, medium-diameter strand K, small-diameter strand L are set to the same resistance value, and to the same power density as the wires of the first group and the second group of the long light emitting long lamps.
  • the first group in the long light emitting long lamp, the second group, and the third group in the short light emitting long lamp, and the strands in the fourth group are obtained with resistance values having the same power density.
  • a combination of strands with the same power density can be obtained.
  • the color temperatures are adjusted.
  • the color temperature is determined based on the power density (P [W / mm]) in the filament constituting the light emitting portion and the outer surface area (S [mm] per unit length of the light emitting portion. 2 ]) and the ratio X (P / DS) based on the coil inner diameter (D [mm]) of the light emitting part.
  • the power density P is made constant in the first step
  • the color temperature is made uniform by adjusting the ratio X (1 / DS) calculated in each light emitting unit and bringing them closer to each other.
  • the outer diameter of the light emitting part is related to the outer surface area of the light emitting part and influences the heat radiation from the surface, and the coil pitch and the inner diameter of the coil influence the heat fluctuation in the coil, and the coil surface temperature. That is, it is related to the color temperature.
  • the group 2 is selected from the groups 1 and 2 of the long light emitting long lamps, and the group 3 is selected from the groups 3 and 4 of the short light emitting long lamps.
  • the temperature rising rates are adjusted.
  • the temperature increase rate is made uniform by adjusting the mass per unit length of the filament.
  • the group 2 small-diameter strand F in the long light emitting long lamp and the group 3 medium-diameter strand H in the short light emitting long lamp are selected.
  • the long light emitting long lamp and the short light emitting long lamp using the small-diameter strand F and the medium-diameter strand H selected as described above a lamp with uniform power density, color temperature, and heating rate can be obtained.
  • FIG. 5 shows a specific example of the filament lamp of the present invention, which shows the design elements of the filament, and the power density, color temperature, and temperature rise rate of each.
  • the power density is measured by measuring the length of the light emitting part (Q [mm]), the filament wire length (L [mm]) and the filament cross-sectional area (A [mm2]). From the electrical resistivity ( ⁇ [ ⁇ ⁇ mm]) of the material of the wire used for the calculation, it is calculated based on the above formulas 1 and 2.
  • the resistance value (R) of the filament may be obtained by measuring the value of the current flowing with respect to the voltage applied between both electrodes of the filament lamp.
  • the color temperature in the present invention is measured by using a color thermometer for the filament lamp in the lit state.
  • the temperature rise rate in the present invention is such that the light amount rise time (msec) of the light emitting unit is 90% of the target light amount value (the light amount when the light emitting unit is lighted stably). It is calculated from the time to reach (value based on%).
  • the heating rate of each of the lamps 1 to 5 is calculated from the relative ratio of the light amount rise time. The relative ratio when the light quantity rise time of 5 is 1.00 is described.
  • the ratio X which is a new design index in the present invention, is the power density per unit length (P [W / mm]) flowing through the filament constituting the light emitting portion and the outer surface area per unit length of the light emitting portion ( S [mm 2 ]) and the coil inner diameter (D [mm]) of the light emitting section, and the ratio X of each lamp 1 to 5 is shown in FIG.
  • the power density, the color temperature, and the heating rate are substantially the same by appropriately changing the design values of the light emitting parts of the lamps having different light emission lengths, and further the design values of the filaments constituting the light emitting parts. It becomes possible to align.
  • a filament lamp (short light emission long lamp) 1 to 2 having a relatively small length of the light emitting portion and a filament lamp (long light emission long lamp) 3 to 4 having a relatively large length of the light emitting portion are provided.
  • the total cross-sectional area (filament cross-sectional area ⁇ number of strands) of the filament strands constituting the light-emitting portion is designed to be smaller as the light emission length becomes shorter. This is a treatment necessary for aligning the power density [W / mm] of the light emitting unit per unit length. Also, as the difference in light emission length increases, it becomes difficult to make the power density substantially the same unless the difference in total cross-sectional area is designed to be large.
  • design elements such as a coil inner diameter (D), an outer surface area (S), and a mass of the light emitting unit of the light emitting unit.
  • D coil inner diameter
  • S outer surface area
  • mass of the light emitting unit of the light emitting unit As described above, it is difficult to make the color temperature and the heating rate uniform by such a change in design elements. Therefore, in the present invention, when such a difference in light emission length is large, the number of filament strands is changed. More specifically, the number of filament strands is designed to decrease as the light emission length becomes shorter. With such a correspondence, even when the difference in light emission length is large, not only the power density but also the color temperature and the temperature increase rate can be easily made uniform.
  • the ratio X (P / DS) and the mass design values shown in FIG. 5 do not need to be strictly matched, and the power density, the color temperature, the temperature rise of each light emitting unit can be achieved by making the design values close to each other. It is possible to control the speed so as to be within the substantially same range. As shown in FIG. 5, it can be understood that there are actually acceptable ranges for the design values of the ratio X and the mass.
  • each light emitting unit provided in each filament lamp has a unit length per unit length. Since the power density, the color temperature, and the temperature increase rate are substantially the same, it is possible to heat the workpiece more uniformly. Since a plurality of filament lamps can be lit at substantially the same voltage value, the number of parts of the device control panel may be increased and the circuit may be complicated as in the case where the voltage value is variable for each lamp. In addition, since the voltage can be unified near the supply voltage, there is an effect that it is not necessary to secure a capacity higher than the rated power due to the influence of the apparent power.
  • the filament lamp applied to the light irradiation type heating apparatus is designed so that the number of filament strands is reduced as the light emitting portion becomes shorter.
  • the filament lamp in which the length of the light emitting part is configured to be 70% or more with respect to the total length of the arc tube of the filament lamp It is desirable that the number of filaments constituting the light emitting unit is at least 3 or more.
  • the number of strands is less than 3, when the power density per unit length of each light emitting unit, the color temperature of the light emitting unit, and the temperature increase rate are made substantially the same for the long light emitting long lamp and the short light emitting long lamp This is because the design range of the filament is extremely restricted.
  • a filament lamp having a light emitting portion configured to have a length of 50% or less with respect to the total length of the light emitting tube of the filament lamp, It is desirable that the number of filaments constituting the light emitting portion is at most two. When the number of strands exceeds two, when the power density per unit length of each light emitting unit, the color temperature of the light emitting unit, and the temperature increase rate are made substantially the same in the long light emitting long lamp and the short light emitting long lamp This is because the design difficulty in manufacturing on the side of the long light emitting long lamp is increased and it is difficult to realize it.
  • the light irradiation apparatus which concerns on this invention lights each filament lamp mounted in the said apparatus with the substantially same voltage value.
  • the lighting voltage value of each filament lamp can be adopted under various lighting conditions. In particular, when the lighting voltage value is low, the effectiveness is high, and the lighting voltage value of each lamp is 300 V or less. Higher effects of the invention can be expected. This is because, when controlling to a predetermined current value at a high voltage, a strand constituting the filament must be selected to have a small strand diameter, and the design range of the filament is greatly restricted.
  • the outer surface area of the light emitting portion per unit length when the number of filament strands is increased is less likely to increase, and as a result, the color temperature of the light emitting portion is reduced. This is because the restriction when aligning becomes large.
  • the lighting voltage value of each filament lamp is 300 V or less, even if the size of each light emitting part is extremely different between the long light emitting long lamp and the short light emitting long lamp, the unit per unit length of each light emitting part The power density, the color temperature of the light emitting unit, and the heating rate can be made substantially the same.
  • FIG. 5 also shows an embodiment regarding the number of filament lamps 2 in the light irradiation type heating device 1.
  • the embodiment shown in FIG. 5 is a configuration in which 25 filament lamps 2 having a length of the arc tube 3 of 540 mm are arranged, and the ratio of the emission length (Q [mm]) of the filament lamp 2 to the arc tube 3
  • the number of the filament lamps is 4 for 37.0%, 2 for the filament lamp 2 for 46.3%, 2 for the filament lamp 2 for 55.6%, and 2 for the filament lamp 2 for 64.8%.
  • the configuration of the light irradiation heating device 1 described above is merely an example, and the present invention is not limited to each illustrated configuration.

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  • Control Of Resistance Heating (AREA)

Abstract

L'invention concerne un dispositif de chauffage de type à rayonnement lumineux dans lequel une pluralité de lampes à filament sont disposées parallèlement à une pièce à travailler, et avec lesquelles la pièce à travailler peut être chauffée de manière plus uniforme. Le dispositif de chauffage de type à rayonnement lumineux est caractérisé en ce que des unités électroluminescentes disposées sur les lampes à filament, chaque unité électroluminescente ayant une longueur différente, sont configurées de telle sorte qu'un ou plusieurs des éléments de conception suivants est différent dans chaque unité électroluminescente de sorte que la densité de puissance par unité de longueur de l'unité électroluminescente et la température de couleur et le taux d'élévation de température de l'unité électroluminescente sont sensiblement identiques dans chaque lampe à filament : le nombre de fils d'élément de filament constituant l'unité électroluminescente ; le diamètre de fil d'élément de filament ; la zone de section transversale totale des fils d'élément de filament constituant le filament ; le diamètre interne de la bobine lorsque le filament est enroulé sous la forme d'une bobine ; et le pas de bobine lorsque le filament est enroulé sous la forme d'une bobine.
PCT/JP2019/017240 2018-04-23 2019-04-23 Dispositif de chauffage de type à rayonnement lumineux et lampe à filament WO2019208568A1 (fr)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20210225671A1 (en) * 2020-01-21 2021-07-22 Asm Ip Holding B.V. Semiconductor processing chamber with filament lamps having nonuniform heat output
US20210398830A1 (en) * 2020-06-22 2021-12-23 Tokyo Electron Limited Heating device, substrate processing system, and heating method

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002258646A (ja) * 2001-03-02 2002-09-11 Ushio Inc 加熱ローラ用ヒータランプ装置
JP2008210623A (ja) * 2007-02-26 2008-09-11 Ushio Inc フィラメントランプおよび光照射式加熱処理装置
JP2009117237A (ja) * 2007-11-08 2009-05-28 Ushio Inc フィラメントランプおよび光照射式加熱処理装置
JP2009200401A (ja) * 2008-02-25 2009-09-03 Ushio Inc 光照射式加熱方法及び光照射式加熱装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002258646A (ja) * 2001-03-02 2002-09-11 Ushio Inc 加熱ローラ用ヒータランプ装置
JP2008210623A (ja) * 2007-02-26 2008-09-11 Ushio Inc フィラメントランプおよび光照射式加熱処理装置
JP2009117237A (ja) * 2007-11-08 2009-05-28 Ushio Inc フィラメントランプおよび光照射式加熱処理装置
JP2009200401A (ja) * 2008-02-25 2009-09-03 Ushio Inc 光照射式加熱方法及び光照射式加熱装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20210225671A1 (en) * 2020-01-21 2021-07-22 Asm Ip Holding B.V. Semiconductor processing chamber with filament lamps having nonuniform heat output
US11842908B2 (en) * 2020-01-21 2023-12-12 Asm Ip Holding B.V. Semiconductor processing chamber with filament lamps having nonuniform heat output
US20210398830A1 (en) * 2020-06-22 2021-12-23 Tokyo Electron Limited Heating device, substrate processing system, and heating method

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