WO2019203050A1

WO2019203050A1 - Wiring correction device and wiring correction method

Info

Publication number: WO2019203050A1
Application number: PCT/JP2019/015346
Authority: WO
Inventors: 大輔田ノ岡
Original assignee: 株式会社ブイ・テクノロジー
Priority date: 2018-04-16
Filing date: 2019-04-08
Publication date: 2019-10-24
Also published as: JP2019186464A; TW201944868A

Abstract

Provided is a wiring correction device comprising: an ink supply unit that applies metallic nanoparticle ink including metallic nanoparticles to a region containing a defect location; an ink heating unit that selectively fires by irradiating the metallic nanoparticle ink applied to the surface of a substrate with a laser beam; and a dry ice spray unit that converts liquefied carbon dioxide into dry ice particles by means of the Joule-Thompson effect. Also provided is a wiring correction method comprising: spraying the metallic nanoparticle ink after being irradiated with the laser beam with dry ice particles to remove the metallic nanoparticle ink in the region not irradiated with the laser beam.

Description

Wiring correction device and wiring correction method

The present invention relates to a wiring correction device and a wiring correction method.

An FPD (Flat Panel Display) includes a substrate on which a fine wiring pattern is formed. In the FPD manufacturing process, when the wiring pattern has a defect, a repair process is performed.
As a method for performing such a repair process, for example, a method of forming a conductive path disclosed in Patent Document 1 is known. The method for forming the conductive path includes a step of depositing a material layer made of a metal nanoparticle ink containing metal particles having a diameter of 5 to 100 nanometers on a substrate, and selectively forming a wiring formation scheduled region in the material layer. Irradiating a laser beam to sinter the metal nanoparticles, and ablation step of irradiating and removing an unsintered material layer other than the wiring formation scheduled region with an ablation laser beam.

Special table 2016-534552 gazette

However, in the ablation process described above, since ablation is performed with a laser beam having a small beam diameter, there is a problem that it takes a long time to remove the entire material layer in unnecessary regions. In addition, the laser beam for ablation is required to have a large power output density in order to melt and scatter the material layer. Therefore, in the above-described ablation process, it is necessary to accurately determine the irradiation condition of the laser beam so that the underlying substrate is not damaged.
In addition, in order not to damage the substrate, it is preferable to use a pulse laser having a narrow pulse width. However, the laser light source of such a pulse laser has a problem that the cost of the entire apparatus is increased because it is very expensive.

Metal nanoparticle ink develops conductivity when heated. For this reason, in the ablation process described above, the metal nanoparticle ink melted and scattered by the laser beam for ablation may have conductivity by sintering, and there is a concern about the influence on other wiring patterns.

The present invention has been made in view of the above-described problems, and is a wiring correction device that can suppress damage to a substrate, can perform wiring correction quickly, and can also prevent other wiring patterns from being affected. It is another object of the present invention to provide a wiring correction method.

In order to solve the above-described problems and achieve the object, an aspect of the present invention is a wiring correction device that corrects a defective portion of a wiring pattern formed on a surface of a substrate, and includes a region including the defective portion. An ink supply unit for applying metal nanoparticle ink; an ink heating unit for selectively irradiating a laser beam to the metal nanoparticle ink applied to the surface of the substrate; and a surface of the substrate A dry ice spraying unit that sprays dry ice particles toward the surface and removes the metal nanoparticle ink in a region not irradiated with the laser beam.

As the above aspect, the metal nanoparticle ink is preferably a liquid containing metal nanoparticles made of gold, silver, copper, or aluminum.

As the above aspect, it is preferable that the ink supply unit supplies the metal nanoparticle ink using any one of an inkjet method, a dispenser, and an electrostatic discharge method.

As the above aspect, it is preferable that a suction unit that sucks the metal nanoparticle ink separated from the substrate by a jet of dry ice particles ejected from the dry ice ejection unit is provided.

Another aspect of the present invention is a wiring correction method, wherein a step of applying a metal nanoparticle ink to a region including a defect portion of a wiring pattern formed on a surface of a substrate is applied to the surface of the substrate. A step of selectively firing the metal nanoparticle ink by irradiating a laser beam and fixing the metal nanoparticle ink to a substrate; and a dry ice particle for the metal nanoparticle ink after being irradiated with the laser beam. And ejecting and removing the metal nanoparticle ink in a region not irradiated with the laser beam.

According to the present invention, it is possible to suppress the substrate from being damaged in the correction of the wiring, to quickly correct the wiring, and to suppress the influence on other wiring patterns.

FIG. 1 is a schematic configuration diagram of a wiring correction device according to an embodiment of the present invention. FIG. 2 is a plan view showing a main part of the substrate showing a defective portion where the wiring correction is performed using the wiring correction device according to the embodiment of the present invention. FIG. 3A is a schematic diagram of a substrate showing a state in which metal nanoparticle ink is applied to a region including a defect portion of a wiring pattern formed on the surface of the substrate using the wiring correction device according to the embodiment of the present invention. FIG. 3-2 is a cross-sectional view taken along the line AB of FIG. 3-1. FIG. 4-1 shows a state in which the metal nanoparticle ink applied to the surface of the substrate is selectively baked by irradiating a laser beam using the wiring correction device according to the embodiment of the present invention. It is a principal part top view of the board | substrate shown. FIG. 4-2 is a cross-sectional view taken along the line CD of FIG. 4-1. FIG. 5 shows that the dry ice particles are ejected toward the metal nanoparticle ink after being irradiated with the laser beam by using the wiring correction device according to the embodiment of the present invention, and the laser beam is not irradiated. It is a principal part top view of the board | substrate which shows the state which removed the metal nanoparticle ink of the area | region. FIG. 6A is a sectional view taken along line EF in FIG. FIG. 6B is a cross-sectional view taken along the line GH in FIG. FIG. 7 is a plan view of a principal part of the substrate showing a state where a defect portion on the surface of the substrate is corrected using the wiring correction device according to the embodiment of the present invention. FIG. 8 is a flowchart showing a wiring correction method according to the embodiment of the present invention.

Hereinafter, details of the wiring correction device and the wiring correction method according to the embodiment of the present invention will be described with reference to the drawings. However, it should be noted that the drawings are schematic, and the dimensions, ratios and shapes of the members are different from actual ones. In addition, the drawings include portions having different dimensional relationships, ratios, and shapes.

[Wiring correction device]
FIG. 1 shows a wiring correction device 1 according to an embodiment of the present invention. The wiring correction device 1 includes an ink supply unit 2, an ink heating unit 3, and a dry ice ejection unit 4. The wiring correction device 1 is mounted on a gantry stage (not shown) as a positioning mechanism. The gantry stage is movable relative to the table 6 on which the correction substrate 5 is arranged. The correction substrate 5 is an object for correcting the wiring by using the wiring correction device 1, and for example, a TFT substrate constituting a display device such as a liquid crystal display device can be applied.

(Ink supply unit)
The ink supply unit 2 includes an ink storage chamber 21 that stores the metal nanoparticle ink, and an ink discharge unit 22 that discharges the metal nanoparticle ink stored in the ink storage chamber 21. The ink supply unit 2 is set so as to be movable with respect to the surface of the correction substrate 5 by driving a gantry stage (not shown). The tip of the ink ejection part 22 is set so that, for example, a metal nanoparticle ink application region having a width of about several tens of μm can be formed. The size of the opening at the tip of the ink discharge portion 22 and the size of the metal nanoparticle ink application region can be appropriately changed according to the line width dimension of the wiring pattern of the substrate to be corrected. As shown in FIG. 2 and FIG. 3A, the ink supply unit 2 has metal nanoparticles in a region including a defect portion (cut region) 7A of the wiring pattern (metal wiring) 7 on the surface of the correction substrate 5. It is set so that the metal nanoparticle ink 8 containing may be applied.

As the metal nanoparticle ink 8, it is preferable to use a liquid material containing metal nanoparticles made of gold, silver, copper, or aluminum having high conductivity. As the metal nanoparticles, those whose surface is covered with, for example, an organic molecular film may be used. Since the metal nanoparticles covered with the organic molecular film are stably dispersed in the solvent, there is no electrical conductivity in an unsintered state. In the present embodiment, as the metal nanoparticle ink 8, a liquid (paste-like) liquid in which such metal nanoparticles are dispersed in a solvent can be used. In addition, as a metal nanoparticle, it is not limited to said metal. In the present embodiment, an inkjet method is used as a method for applying the metal nanoparticle ink 8.

(Ink heating section)
The ink heating unit 3 includes an ink heating laser 31, a beam splitter 32, an objective lens 33, an observation illumination light source 34, a beam splitter 35, an observation two-dimensional sensor 36, and an imaging lens 37. I have.

The ink heating laser 31 oscillates the laser beam LB toward the surface of the correction substrate 5. As shown in FIG. 1, the laser beam LB passes through the beam splitter 32, is adjusted to a predetermined beam diameter by the objective lens 33, and is incident on the surface of the correction substrate 5. In the present embodiment, the laser beam LB selectively heats the metal nanoparticle ink 8 disposed on the surface of the correction substrate 5.

The observation illumination light source 34 is set so as to emit the observation illumination light M and enter the surface of the correction substrate 5 through the

beam splitters

35 and 32 and the objective lens 33. The observation illumination light M incident on the surface of the correction substrate 5 is reflected by the surface of the correction substrate 5, passes through the objective lens 33, the

beam splitters

32 and 35, and the imaging lens 37 to the observation two-dimensional sensor 36. It is set to enter. The observation two-dimensional sensor 36 images the state of the surface of the correction substrate 5 to enable detection of the missing portion 7A of the wiring pattern 7, detection of the arrangement position of the metal nanoparticle ink 8, and the like.

(Dry ice spraying part)
The dry ice injection unit 4 includes a unit 41 for generating dry ice particles, a dry ice injection nozzle 42 connected to the unit 41, and a suction unit 43. The dry ice spray nozzle 42 may be supplied with clean dry air (CDA) as an auxiliary gas. As shown in FIG. 1, the tip of the dry ice spray nozzle 42 protrudes toward the correction substrate 5 arranged on the table 6. Further, a suction port 43 </ b> A of the suction unit 43 is disposed in the vicinity of the tip of the dry ice spray nozzle 42.

The dry ice jet nozzle 42 is formed on the surface of the correction substrate 5 on which the metal nanoparticle ink 8 is present after the heat treatment to the metal nanoparticle ink 8 disposed in the defect portion 7A of the wiring pattern 7 on the correction substrate 5. The dry ice particles generated by the unit 41 are sprayed toward The Mohs hardness of the dry ice is 2, the Mohs hardness of the glass of the substrate material is 5, and the wiring materials of silver, aluminum, and copper are 2.7, 2.9, and 3.0, respectively. For this reason, in this embodiment, only the unsintered metal nanoparticle ink 8 can be removed without damaging the correction substrate 5.

The observation two-dimensional sensor 36 can identify the position where the dry ice particles collide by observing the surface position and surface state of the correction substrate 5 on which the dry ice particles ejected from the dry ice ejection nozzle 42 collide. To.

The particle size of the dry ice particles can be in the range of 0.1 to 1000 μm. The pressure at which the dry ice particles collide with the surface of the correction substrate 5 can be adjusted to 0.01 to 1 MPa.

The suction unit 43 is set to suck the unfired metal nanoparticle ink 8 peeled off from the correction substrate 5 due to collision with dry ice particles through the suction port 43A immediately after peeling.

[Wiring correction method]
Next, the wiring correction method will be described with reference to FIGS. First, a gantry stage (not shown) is driven to move the wiring correction device 1 relative to the correction substrate 5, and a defective portion (cut area) of the wiring pattern (metal wiring) 7 as shown in FIG. 7A is detected in advance. The wiring correction method according to the present embodiment can be represented by the flowchart shown in FIG.

First, the metal nanoparticle ink 8 is supplied to the defective portion 7A of the wiring pattern 7 as shown in FIG. 2 (step S1). In this step, a gantry stage (not shown) is driven so that the tip of the ink discharge unit 22 of the ink supply unit 2 is brought close to the missing portion 7A. Then, a predetermined amount of the metal nanoparticle ink 8 is ejected from the ink supply unit 2. At this time, as shown in FIG. 3A and FIG. 3B, the metal nanoparticle ink 8 may be applied to an extent that includes the defective portion 7A, and application accuracy is not required.

Next, as shown in FIGS. 4-1 and 4-2, the applied metal nanoparticle ink 8 is selectively irradiated with the laser beam LB to burn the region straddling the defect 7A (step S2).

As a result, the fired region (conductive region) 8A irradiated with the laser beam LB is sintered and solidified. A region 8B where the laser beam LB has not been irradiated is in a state of an unfired liquid metal nanoparticle ink 8. In this step, the laser beam LB may be irradiated while moving the objective lens 33 in the scanning direction S as shown in FIG. Note that the region irradiated with the laser beam LB may be scanned so as to overlap at least the defective portion 7A.
As shown in FIG. 4A, in the present embodiment, the line width of the fired region 8A is set larger than the line width of the wiring pattern 7.

Next, as shown in FIG. 5, in order to leave only the firing region 8A obtained through the heating process with the laser beam LB, the firing region 8A after the laser beam irradiation and the laser beam LB are irradiated. A jet 44 of dry ice particles is applied toward the metal nanoparticle ink 8 that is not in a liquid state (step S3). Also in this step, the gantry stage (not shown) is driven to move the dry ice spray nozzle 42.

6-1 is a cross-sectional view taken along the line EF in FIG. 5, and FIG. 6-2 is a cross-sectional view taken along the line GH in FIG. As shown in FIGS. 6A and 6B, in this embodiment, the liquefied carbon dioxide gas is changed into dry ice particles by the Joule Thomson effect in the unit 41, and the laser beam LB is generated by the jet 44 of the dry ice particles. The unfired metal nanoparticle ink 8 in the region 8B not irradiated with is blown off and removed. As a result, as shown in FIG. 7, the missing portion 7A of the wiring pattern 7 can be reliably corrected.

At this time, the suction unit 43 shown in FIG. 1 operates simultaneously with the dry ice jet unit 4 and captures the unfired metal nanoparticle ink 8 blown off. In the present embodiment, since the suction port 43A of the suction part 43 is disposed in the vicinity of the tip of the dry ice jet nozzle 42, the unfired metal nanoparticle ink 8 in the region 8B peeled off from the correction substrate 5 is used. Can be reliably captured and recovered.

In addition, since the metal nanoparticle ink 8 other than the fired region 8A is not fired, the metal nanoparticle ink 8 is not sintered and does not exhibit electrical conductivity, and can prevent the adjacent wiring pattern 7 from being affected.

According to the wiring correction device 1 and the wiring correction method according to the present embodiment, the laser beam LB is used for firing the metal nanoparticle ink 8, and the metal nanoparticle ink 8 is scattered by the laser beam LB. is not. Therefore, in this embodiment, since it is not necessary to increase the power output density of the laser beam LB, it is possible to suppress damage to the correction substrate 5 and to suppress the influence on other wiring patterns.

According to the wiring correction device 1 and the wiring correction method according to the present embodiment, the metal nanoparticle ink 8 in the unfired region can be removed in a lump by the dry ice spray unit 4, so that the wiring correction can be performed quickly. For this reason, according to the wiring correction device 1 and the wiring correction method according to the present embodiment, for example, the production efficiency of an FPD including a TFT substrate can be improved.

[Other embodiments]
As mentioned above, although embodiment of this invention was described, it should not be understood that the description and drawing which make a part of disclosure of this embodiment limit this invention. From this disclosure, various alternative embodiments, examples and operational techniques will be apparent to those skilled in the art.

In the above-described embodiment, the step of applying the metal nanoparticle ink 8 to each defect portion 7A on the surface of the correction substrate 5, the step of selectively firing by irradiating the laser beam LB, the dry ice particles The step of removing the metal nanoparticle ink 8 in the region 8B where the laser beam LB was not irradiated by the jet 44 was performed. In the present invention, after the metal nanoparticle ink 8 is collectively applied to the plurality of defect portions 7A on the entire surface of the correction substrate 5, the plurality of defect portions 7A are collectively irradiated with the laser beam LB, and then Of course, the metal nanoparticle ink 8 in the region not irradiated with the laser beam LB in the dry ice particle jet 44 may be removed in a lump.

In the above embodiment, as a means for supplying the metal nanoparticle ink 8, in addition to the inkjet method, a method of applying with a dispenser or an electrostatic discharge method can be used.

In the above embodiment, a liquid material is used as the metal nanoparticle ink 8, but after applying to the surface of the correction substrate 5, a step of reducing the fluidity by drying may be added.

LB Laser beam 1 Wiring correction device 2 Ink supply unit 3 Ink heating unit 4 Dry ice jet unit 5 Correction substrate (substrate)
7 Wiring pattern 7A Defect location 8 Metal nanoparticle ink 8A Firing area 8B area (unfired area)
43 Suction part 44 Jet

Claims

A wiring correction device for correcting a defective portion of a wiring pattern formed on a surface of a substrate,
An ink supply unit that applies metal nanoparticle ink to a region including the defect portion; and
An ink heating unit that selectively irradiates a laser beam to the metal nanoparticle ink applied to the surface of the substrate to perform baking; and
A dry ice spraying unit that sprays dry ice particles toward the surface of the substrate and removes the metal nanoparticle ink in a region not irradiated with the laser beam;
A wiring correction device.
The wiring correction device according to claim 1, wherein the metal nanoparticle ink is a liquid containing metal nanoparticles made of gold, silver, copper, or aluminum.
The wiring correction device according to claim 1 or 2, wherein the ink supply unit supplies the metal nanoparticle ink using any one of an inkjet method, a dispenser, and an electrostatic discharge method.
4. The apparatus according to claim 1, further comprising: a suction unit that sucks the unfired metal nanoparticle ink peeled from the substrate by a jet of the dry ice particles ejected from the dry ice ejection unit. Wiring correction device described in 1.
Applying a metal nanoparticle ink containing metal nanoparticles to a region including a defect portion of a wiring pattern formed on the surface of the substrate;
A step of selectively firing the metal nanoparticle ink applied to the surface of the substrate by irradiating a laser beam;
Spraying dry ice particles toward the metal nanoparticle ink after being irradiated with the laser beam, and removing the metal nanoparticle ink in a region not irradiated with the laser beam;
A wiring correction method comprising:
The wiring correction method according to claim 5, wherein the metal nanoparticle ink is a liquid containing metal nanoparticles made of gold, silver, copper, or aluminum.