WO2019187875A1 - Method and device for producing sheet glass - Google Patents

Method and device for producing sheet glass Download PDF

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Publication number
WO2019187875A1
WO2019187875A1 PCT/JP2019/007067 JP2019007067W WO2019187875A1 WO 2019187875 A1 WO2019187875 A1 WO 2019187875A1 JP 2019007067 W JP2019007067 W JP 2019007067W WO 2019187875 A1 WO2019187875 A1 WO 2019187875A1
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WO
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Prior art keywords
polishing
end surface
plate glass
grinding
pressing force
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PCT/JP2019/007067
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French (fr)
Japanese (ja)
Inventor
愛信 星野
隼人 奥
佑 太和田
久博 竹内
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日本電気硝子株式会社
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Application filed by 日本電気硝子株式会社 filed Critical 日本電気硝子株式会社
Priority to CN201990000459.8U priority Critical patent/CN212794271U/en
Publication of WO2019187875A1 publication Critical patent/WO2019187875A1/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
    • B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
    • B24B7/24—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding or polishing glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • B24B9/08—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass
    • B24B9/10—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of plate glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/20—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
    • B24D3/28—Resins or natural or synthetic macromolecular compounds

Definitions

  • the present invention relates to a plate glass manufacturing method including an end surface grinding step of grinding an end surface of a plate glass and an end surface polishing step of polishing the end surface of the plate glass after grinding, and a plate glass manufacturing apparatus capable of performing both steps. .
  • the following aspects can be exemplified. That is, for the execution of the end surface grinding step, a grinding wheel in which a groove capable of grinding the end surface of the plate glass is formed on the outer peripheral portion is used. And it grinds, pressing a grinding wheel against the end surface of plate glass, and it processes so that the shape of an end surface may follow the shape of a groove
  • the present invention which was devised to solve the above problems, is a method for producing a plate glass including an end surface grinding step for grinding the end surface of the plate glass, and an end surface polishing step for polishing the end surface of the plate glass after grinding,
  • the first polishing step in which the end surface polishing step is performed while pressing the first polishing grindstone against the end surface of the plate glass with the first pressing force, and the second pressing force is applied to the end surface of the plate glass after being polished by the first polishing grindstone.
  • a first polishing step is performed in which the first polishing grindstone is pressed against the end surface of the ground glass sheet with a first pressing force. Furthermore, the 2nd grinding
  • the Rockwell hardness HRM of the binder for fixing the abrasive grains of the second polishing grindstone is not more than the Rockwell hardness HRM of the binder for fixing the abrasive grains of the first polishing grindstone.
  • a phenol resin, a polyurethane resin or a polyimide resin as a binder for the first polishing wheel, and a polyurethane resin or an epoxy resin as a binder for the second polishing wheel.
  • the Rockwell hardness HRM of the binder of the second polishing wheel can be made equal to or lower than the Rockwell hardness HRM of the binder of the first polishing wheel, which is more advantageous in enhancing the above-described actions and effects. Become.
  • a plate glass manufacturing apparatus comprising a grinding wheel for grinding an end surface of a plate glass and a polishing wheel for polishing an end surface of the plate glass after grinding, As a grinding wheel, a first polishing wheel that is polished while being pressed against the end surface of the sheet glass with a first pressing force, and a second pressing force against the end surface of the sheet glass after being polished by the first polishing wheel. And a second polishing wheel that polishes in a state where the second pressing force is smaller than the first pressing force.
  • cracks remaining on the end face can be suppressed as much as possible, and the quality of the end face can be improved.
  • a plate glass manufacturing apparatus 1 (hereinafter simply referred to as a manufacturing apparatus 1) according to the present embodiment is used to execute the plate glass manufacturing method according to the present embodiment.
  • the manufacturing apparatus 1 includes a grinding wheel 2 for grinding the end surface Ga of the plate glass G, a first polishing wheel 3 for polishing the end surface Ga of the plate glass G after grinding, and a second polishing wheel 4 for polishing later. ing.
  • a manufacturing apparatus 1 that performs grinding and polishing on both end faces Ga and Ga extending in the X direction in a rectangular plate glass G in a flat position is described as an example.
  • the glass sheet G is formed by a known forming method such as a float method, an overflow down draw method, or a slot down draw method, and is cut into a predetermined size.
  • the thickness of the plate glass G is preferably 0.1 mm to 1.4 mm, more preferably 0.2 mm to 0.7 mm, and most preferably 0.2 mm to 0.5 mm.
  • the plate glass G is preferably a glass substrate used for flat panel displays, touch panels, solar cells, organic EL lighting, and the like. Examples of the flat panel display using a glass substrate include a liquid crystal display and an organic EL display.
  • the grinding wheel 2, the first polishing wheel 3, and the second polishing wheel 4 are arranged so as to be paired with the plate glass G interposed therebetween.
  • Each pair of the grinding wheel 2, the first polishing wheel 3, and the second polishing wheel 4 is synchronized with the plate glass G fixed on a surface plate (not shown) provided in the manufacturing apparatus 1 in the X direction. Machining is performed while moving in the T direction parallel to.
  • Grooves (not shown) for processing the end face Ga are formed in a plurality of upper and lower stages on the outer peripheral portions (rotating peripheral portions) of the grindstones 2, 3 and 4.
  • the end face Ga is processed by pressing one of the plurality of grooves on the end face Ga.
  • the rotational directions of these grindstones 2, 3, and 4 may be clockwise (in plan view) as viewed from the Z direction, or may be counterclockwise.
  • the grinding wheel 2 is a grindstone for forming a cross-sectional shape of the end face Ga (a cross-sectional shape orthogonal to the X direction), and the end face Ga is processed under a state where the position in the Y direction is fixed.
  • the first polishing grindstone 3 and the second polishing grindstone 4 are grindstones for finishing the ground end face Ga, and are pressed against the end face Ga with a constant pressing force.
  • the end face Ga is processed under. Note that the grinding wheel 2 may grind the end face Ga while being pressed against the end face Ga with a constant pressing force.
  • the second pressing force F2 is greater. It is getting smaller.
  • the “pressing force” referred to here is a force acting in parallel with the Y direction and having a unit represented by [N].
  • the second pressing force F2 is preferably 0.8 times or less, more preferably 0.6 times or less of the first pressing force F1.
  • the second pressing force F2 is preferably 0.1 times or more of the first pressing force F1, and more preferably 0.2 times or more. preferable.
  • the first pressing force F1 is preferably 30N to 100N, and more preferably 40N to 80N.
  • the second pressing force F2 is preferably 3N to 80N, more preferably 5N to 40N, and most preferably 10N to 30N.
  • the grinding wheel 2 is preferably a metal bond wheel that employs a metal bonding material (metal bond) as a bonding material for abrasive grains.
  • the metal employed as the binder is preferably one selected from iron, copper, cobalt, nickel, tungsten, or the like, or a mixture of two or more selected, and particularly one containing iron.
  • the abrasive grains bonded to the grinding wheel 2 are preferably diamond abrasive grains, and the grain size is preferably # 300 to 600.
  • the first polishing grindstone 3 and the second polishing grindstone 4 are preferably resin bond grindstones in which a resin binder (resin bond) is adopted as a binder for abrasive grains.
  • a resin binder resin bond
  • a phenol resin, an epoxy resin, a polyimide resin, a polyurethane resin, or the like can be employed as a resin binder.
  • the abrasive grains bonded to the first polishing grindstone 3 and the second polishing grindstone 4 diamond particles, aluminum oxide particles, silicon carbide particles, cubic boron nitride particles, metal oxide particles, metal carbide particles, metal nitride particles Etc. can be used.
  • the grain size of the abrasive grains is preferably from # 100 to 3000, and more preferably from # 200 to 1000.
  • the lock well hardness HRM of the binder of the second polishing grindstone 4 is equal to or lower than the rockwell hardness HRM of the binder of the first polishing grindstone 3. It has become.
  • a phenol resin, a polyurethane resin, or a polyimide resin is used as a binder of the first polishing grindstone 3.
  • Either a polyurethane resin or an epoxy resin may be employed as the binder.
  • the Rockwell hardness HRM of the binder of the first grinding wheel 3 is preferably 50 to 130. Further, the Rockwell hardness HRM of the binder of the second polishing grindstone 4 is preferably 50 to 110.
  • the Rockwell hardness HRM of the binder means the Rockwell hardness HRM of the binder alone containing no filler or the like.
  • the plate glass G is carried to a position where the surface plate is installed by a conveying means (not shown) such as a belt conveyor, and then the plate glass G is fixed on the surface plate.
  • the plate glass G is glass that has already undergone a cutting process, and both end faces Ga, Ga are cut surfaces formed by the cutting process.
  • an end face grinding process for grinding the end face Ga of the plate glass G and an end face polishing process for polishing the end face Ga of the plate glass G after grinding are performed.
  • the end face Ga of the plate glass G which is a cut surface is ground by the grinding wheel 2. Thereby, the cross-sectional shape of the end face Ga is formed.
  • the first polishing step of polishing while pressing the first polishing grindstone 3 against the end surface Ga of the ground glass G with the first pressing force F1, and the plate glass G after polishing by the first polishing grindstone 3 A second polishing step is performed in which the second polishing grindstone 4 is pressed against the end face Ga with the second pressing force F2. Thereby, the finishing process for reducing the surface roughness of the end face Ga is performed.
  • the end surface grinding step and the end surface polishing step are completed.
  • the quality of the end face Ga after the end face polishing step can be evaluated by, for example, the magnitude of the surface roughness Ra.
  • the plate glass G is again removed from the position where the surface plate is installed by the conveying means. Unload and send to downstream process.
  • the downstream process for example, the end face Gb orthogonal to the end face Ga is ground and polished in the same manner as the end face grinding process and the end face polishing process described above. Thereafter, the glass sheet G is subjected to a cleaning process.
  • the plate glass manufacturing method and the manufacturing apparatus 1 described above it is possible to suppress cracks generated in the end face Ga in the second polishing step by an amount corresponding to the second pressing force F2 being smaller than the first pressing force F1. It becomes. Thereby, the crack which remain
  • the plate glass manufacturing method and manufacturing apparatus are not limited to the modes and configurations described in the above embodiments.
  • a new polishing grindstone may be introduced.
  • the end surface Ga may be polished after the end surface Ga is ground by the grinding wheel 2 and before the end surface Ga is polished by the first polishing wheel 3.
  • the third pressing force for pressing the third polishing grindstone against the end face Ga may be smaller or larger than the first pressing force F1. This is because cracks generated in the end face Ga by polishing with the third polishing grindstone can be almost removed in the first and second polishing steps, and the influence on the quality of the end face Ga is small.
  • each pair of the grinding wheel 2, the first polishing wheel 3, and the second polishing wheel 4 processes both end faces Ga and Ga in a synchronized state, but this is not restrictive.
  • the grinding wheel 2, the first polishing wheel 3, and the second polishing wheel 4 may process only one end face Ga without forming a pair. In this case, a plurality of grinding wheels 2 may be used. Further, each pair of the grinding wheel 2, the first polishing wheel 3, and the second polishing wheel 4 may process the other end surface Ga after processing the one end surface Ga without synchronizing. Good.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)

Abstract

This sheet glass production method comprises an end-face grinding step for grinding an end face (Ga) of the sheet glass (G) and an end-face polishing step for polishing the end face (Ga) of the sheet glass (G) that has been ground, wherein the end-face polishing step include a first polishing step for performing polishing while pressing a first polishing grindstone (3) against the end-face (Ga) of the sheet glass (G) with a first pressing force (F1), and a second polishing step for performing polishing while pressing, with a second pressing force (F2), a second polishing grindstone (4) against the end-face (Ga) of the sheet glass (G) having undergone the polishing using the first polishing grindstone (3), and wherein the second pressing force (F2) is configured to be smaller than the first pressing force (F1).

Description

板ガラスの製造方法および製造装置Sheet glass manufacturing method and manufacturing apparatus
　本発明は、板ガラスの端面を研削する端面研削工程と、研削後の板ガラスの端面を研磨する端面研磨工程とを含んだ板ガラスの製造方法、及び、両工程の実行が可能な板ガラスの製造装置に関する。 The present invention relates to a plate glass manufacturing method including an end surface grinding step of grinding an end surface of a plate glass and an end surface polishing step of polishing the end surface of the plate glass after grinding, and a plate glass manufacturing apparatus capable of performing both steps. .
　周知のように、スクライブホイールを使用する切断工程を経た板ガラスの端面（切断面）にはクラックが残存しているため、後工程において端面を起点に板ガラスが割れたり、端面からガラス粉が発生したりする原因となる。このような不具合を回避するべく、板ガラスの製造工程では、板ガラスの端面を研削する端面研削工程と、研削後の板ガラスの端面を研磨する端面研磨工程とを実行することが通例となっている（特許文献１を参照）。 As is well known, cracks remain on the end surface (cut surface) of the plate glass that has undergone the cutting process using the scribe wheel, so that the plate glass breaks from the end surface in the subsequent process, or glass powder is generated from the end surface. Cause it. In order to avoid such problems, it is customary to execute an end surface grinding step for grinding the end surface of the plate glass and an end surface polishing step for polishing the end surface of the plate glass after grinding in the plate glass manufacturing process ( (See Patent Document 1).
　上記の両工程を実行する態様の一例としては、下記のような態様を挙げることができる。すなわち、端面研削工程の実行には、板ガラスの端面を研削可能な溝が外周部に形成された研削砥石を用いる。そして、研削砥石を板ガラスの端面に押し当てながら研削を行うことで、端面の形状を溝の形状に倣うように加工する。これにより、端面が研削されると共に端面の稜線に面取りが施され、ラウンド状または平面状の面取り面が形成される。また、端面研磨工程の実行には、板ガラスの端面を研磨可能な溝が外周部に形成された複数の研磨砥石を用いる。そして、複数の研磨砥石を順次に研削後の板ガラスの端面に押し当てながら研磨を行うことで、面取り面を含む端面の仕上げ加工を行う。 As an example of an aspect in which both the above steps are executed, the following aspects can be exemplified. That is, for the execution of the end surface grinding step, a grinding wheel in which a groove capable of grinding the end surface of the plate glass is formed on the outer peripheral portion is used. And it grinds, pressing a grinding wheel against the end surface of plate glass, and it processes so that the shape of an end surface may follow the shape of a groove | channel. As a result, the end surface is ground and the ridgeline of the end surface is chamfered to form a round or flat chamfered surface. Moreover, the execution of the end face polishing step uses a plurality of polishing grindstones in which grooves capable of polishing the end face of the plate glass are formed on the outer peripheral portion. Then, polishing is performed while sequentially pressing a plurality of polishing grindstones against the end surface of the ground glass sheet, thereby finishing the end surface including the chamfered surface.
特表２０１４－５１８１６９号公報Special table 2014-518169 gazette
　ところで、上記の態様の下、端面研削工程および端面研磨工程を実行した場合には、研削後の板ガラスの端面に研磨砥石が押し当てられる度にクラックが発生してしまい、結果として端面研磨工程後の端面の品位が低下してしまう場合があった。端面の品位が低下すると、端面からガラス粉が発生しやすくなり、板ガラスを電子デバイスのガラス基板として用いた場合に配線不良を引き起こすおそれがある。このような事情に鑑みなされた本発明は、端面に残存するクラックを可及的に抑制することで、端面の品位を向上させることを技術的な課題とする。 By the way, when the end surface grinding step and the end surface polishing step are performed under the above-described aspect, a crack occurs every time the polishing grindstone is pressed against the end surface of the ground glass sheet, and as a result, after the end surface polishing step. In some cases, the quality of the end face of the steel deteriorates. When the quality of the end face is lowered, glass powder is likely to be generated from the end face, and there is a risk of causing a wiring failure when the plate glass is used as a glass substrate of an electronic device. This invention made | formed in view of such a situation makes it a technical subject to improve the quality of an end surface by suppressing the crack which remains in an end surface as much as possible.
　上記の課題を解決するために創案された本発明は、板ガラスの端面を研削する端面研削工程と、研削後の板ガラスの端面を研磨する端面研磨工程とを含んだ板ガラスの製造方法であって、端面研磨工程が、板ガラスの端面に対して第一押圧力で第一研磨砥石を押し当てながら研磨する第一研磨工程と、第一研磨砥石による研磨後の板ガラスの端面に対して第二押圧力で第二研磨砥石を押し当てながら研磨する第二研磨工程とを含み、第二押圧力を第一押圧力よりも小さくすることに特徴付けられる。 The present invention, which was devised to solve the above problems, is a method for producing a plate glass including an end surface grinding step for grinding the end surface of the plate glass, and an end surface polishing step for polishing the end surface of the plate glass after grinding, The first polishing step in which the end surface polishing step is performed while pressing the first polishing grindstone against the end surface of the plate glass with the first pressing force, and the second pressing force is applied to the end surface of the plate glass after being polished by the first polishing grindstone. And a second polishing step of polishing while pressing the second polishing grindstone, wherein the second pressing force is smaller than the first pressing force.
　本方法における端面研磨工程では、研削後の板ガラスの端面に対して第一押圧力で第一研磨砥石を押し当てながら研磨する第一研磨工程を実行する。さらに、第一押圧力よりも小さい第二押圧力の下、第一研磨砥石による研磨後の端面に対して第二研磨砥石を押し当てながら研磨する第二研磨工程を実行する。この端面研磨工程によれば、第二押圧力を第一押圧力よりも小さくした分だけ、第二研磨工程にて端面に発生するクラックを抑制することが可能となる。これにより、得られる板ガラスの端面に残存するクラックを可及的に抑制でき、端面の品位を向上させることが可能となる。 In the end surface polishing step in the present method, a first polishing step is performed in which the first polishing grindstone is pressed against the end surface of the ground glass sheet with a first pressing force. Furthermore, the 2nd grinding | polishing process which grind | polishes under the 2nd pressing force smaller than a 1st pressing force, pressing a 2nd polishing grindstone with respect to the end surface after grinding | polishing with a 1st polishing grindstone is performed. According to this end surface polishing step, it is possible to suppress cracks generated on the end surface in the second polishing step by an amount corresponding to the second pressing force being made smaller than the first pressing force. Thereby, the crack which remains on the end surface of the obtained plate glass can be suppressed as much as possible, and the quality of the end surface can be improved.
　上記の方法では、第二研磨砥石の砥粒を固定する結合剤のロックウエル硬さＨＲＭを、第一研磨砥石の砥粒を固定する結合剤のロックウエル硬さＨＲＭ以下とすることが好ましい。 In the above method, it is preferable that the Rockwell hardness HRM of the binder for fixing the abrasive grains of the second polishing grindstone is not more than the Rockwell hardness HRM of the binder for fixing the abrasive grains of the first polishing grindstone.
　このようにすれば、第二研磨工程で端面に発生するクラックをさらに抑制でき、板ガラスの端面の品位を向上させる上で更に有利となる。 In this way, cracks generated on the end face in the second polishing step can be further suppressed, which is further advantageous in improving the quality of the end face of the plate glass.
　上記の方法では、第一研磨砥石の結合剤としてフェノール樹脂、ポリウレタン樹脂またはポリイミド樹脂を用いると共に、第二研磨砥石の結合剤としてポリウレタン樹脂またはエポキシ樹脂を用いることが好ましい。 In the above method, it is preferable to use a phenol resin, a polyurethane resin or a polyimide resin as a binder for the first polishing wheel, and a polyurethane resin or an epoxy resin as a binder for the second polishing wheel.
　このようにすれば、第二研磨砥石の結合剤のロックウエル硬さＨＲＭを、第一研磨砥石の結合剤のロックウエル硬さＨＲＭ以下にできるので、既述の作用・効果を高める上で一層有利となる。 By doing so, the Rockwell hardness HRM of the binder of the second polishing wheel can be made equal to or lower than the Rockwell hardness HRM of the binder of the first polishing wheel, which is more advantageous in enhancing the above-described actions and effects. Become.
　また、上記の課題を解決するために創案された本発明は、板ガラスの端面を研削する研削砥石と、研削後の板ガラスの端面を研磨する研磨砥石とを備えた板ガラスの製造装置であって、研磨砥石として、板ガラスの端面に対して第一押圧力で押し当てられた状態で研磨する第一研磨砥石と、第一研磨砥石による研磨後の板ガラスの端面に対して第二押圧力で押し当てられた状態で研磨する第二研磨砥石とを有し、第二押圧力が第一押圧力よりも小さいことに特徴付けられる。 Further, the present invention created to solve the above problems is a plate glass manufacturing apparatus comprising a grinding wheel for grinding an end surface of a plate glass and a polishing wheel for polishing an end surface of the plate glass after grinding, As a grinding wheel, a first polishing wheel that is polished while being pressed against the end surface of the sheet glass with a first pressing force, and a second pressing force against the end surface of the sheet glass after being polished by the first polishing wheel. And a second polishing wheel that polishes in a state where the second pressing force is smaller than the first pressing force.
　本装置によれば、上記の板ガラスの製造方法に係る説明で既述の作用・効果と同一の作用・効果を得ることが可能である。 According to the present apparatus, it is possible to obtain the same operation / effect as the above-described operation / effect in the description relating to the above-described method for producing a glass sheet.
　本発明によれば、端面に残存するクラックを可及的に抑制でき、端面の品位を向上させることが可能となる。 According to the present invention, cracks remaining on the end face can be suppressed as much as possible, and the quality of the end face can be improved.
本発明の実施形態に係る板ガラスの製造方法および製造装置を示す平面図である。It is a top view which shows the manufacturing method and manufacturing apparatus of the plate glass which concern on embodiment of this invention.
　以下、本発明の実施形態に係る板ガラスの製造方法および製造装置について、添付の図面を参照しながら説明する。 Hereinafter, a plate glass manufacturing method and a manufacturing apparatus according to an embodiment of the present invention will be described with reference to the accompanying drawings.
　図１に示すように、本実施形態に係る板ガラスの製造方法の実行には、本実施形態に係る板ガラスの製造装置１（以下、単に製造装置１と表記）を用いる。製造装置１は、板ガラスＧの端面Ｇａを研削する研削砥石２と、研削後の板ガラスＧの端面Ｇａを先に研磨する第一研磨砥石３と、後から研磨する第二研磨砥石４とを備えている。ここで、本実施形態においては、平置き姿勢の矩形の板ガラスＧにおけるＸ方向に延びた両端面Ｇａ，Ｇａに対して研削加工および研磨加工を行う製造装置１を例に挙げる。 As shown in FIG. 1, a plate glass manufacturing apparatus 1 (hereinafter simply referred to as a manufacturing apparatus 1) according to the present embodiment is used to execute the plate glass manufacturing method according to the present embodiment. The manufacturing apparatus 1 includes a grinding wheel 2 for grinding the end surface Ga of the plate glass G, a first polishing wheel 3 for polishing the end surface Ga of the plate glass G after grinding, and a second polishing wheel 4 for polishing later. ing. Here, in the present embodiment, a manufacturing apparatus 1 that performs grinding and polishing on both end faces Ga and Ga extending in the X direction in a rectangular plate glass G in a flat position is described as an example.
　板ガラスＧは、フロート法、オーバーフローダウンドロー法、スロットダウンドロー法等の公知の成形方法で成形され、所定の大きさに切断されている。板ガラスＧの厚さは、０．１ｍｍ～１．４ｍｍであることが好ましく、０．２ｍｍ～０．７ｍｍであることがより好ましく、０．２ｍｍ～０．５ｍｍであることが最も好ましい。板ガラスＧは、フラットパネルディスプレイやタッチパネル、太陽電池、有機ＥＬ照明等に用いられるガラス基板であることが好ましい。ガラス基板が用いられるフラットパネルディスプレイには、例えば液晶ディスプレイや有機ＥＬディスプレイ等がある。 The glass sheet G is formed by a known forming method such as a float method, an overflow down draw method, or a slot down draw method, and is cut into a predetermined size. The thickness of the plate glass G is preferably 0.1 mm to 1.4 mm, more preferably 0.2 mm to 0.7 mm, and most preferably 0.2 mm to 0.5 mm. The plate glass G is preferably a glass substrate used for flat panel displays, touch panels, solar cells, organic EL lighting, and the like. Examples of the flat panel display using a glass substrate include a liquid crystal display and an organic EL display.
　板ガラスＧの両端面Ｇａ，Ｇａを加工するため、研削砥石２、第一研磨砥石３、及び、第二研磨砥石４のそれぞれは、板ガラスＧを挟んで対となるように配置されている。研削砥石２、第一研磨砥石３、及び、第二研磨砥石４の各対は、製造装置１に備わった図示省略の定盤の上に固定された板ガラスＧに対し、同期した状態でＸ方向に平行なＴ方向に移動しつつ加工を行う。これらの砥石２，３，４の外周部（回転周部）には、端面Ｇａを加工するための溝（図示省略）が上下複数段に亘って形成されている。この複数段の溝の一つを端面Ｇａに押し当てることで端面Ｇａが加工される。また、これらの砥石２，３，４の回転方向は、Ｚ方向から視て（平面視で）時計回りの場合もあるし、反時計回りの場合もある。 In order to process both end faces Ga, Ga of the plate glass G, the grinding wheel 2, the first polishing wheel 3, and the second polishing wheel 4 are arranged so as to be paired with the plate glass G interposed therebetween. Each pair of the grinding wheel 2, the first polishing wheel 3, and the second polishing wheel 4 is synchronized with the plate glass G fixed on a surface plate (not shown) provided in the manufacturing apparatus 1 in the X direction. Machining is performed while moving in the T direction parallel to. Grooves (not shown) for processing the end face Ga are formed in a plurality of upper and lower stages on the outer peripheral portions (rotating peripheral portions) of the grindstones 2, 3 and 4. The end face Ga is processed by pressing one of the plurality of grooves on the end face Ga. Further, the rotational directions of these grindstones 2, 3, and 4 may be clockwise (in plan view) as viewed from the Z direction, or may be counterclockwise.
　研削砥石２は、端面Ｇａの断面形状（Ｘ方向に直交する断面の形状）を形作るための砥石であり、Ｙ方向における位置が固定された状態の下で端面Ｇａを加工していく。これに対し、第一研磨砥石３および第二研磨砥石４は、研削後の端面Ｇａに対して仕上げ加工を行うための砥石であり、端面Ｇａに対して一定の押圧力で押し当てられた状態の下で端面Ｇａを加工していく。なお、研削砥石２は、端面Ｇａに対して一定の押圧力で押し当てられた状態で端面Ｇａを研削加工してもよい。 The grinding wheel 2 is a grindstone for forming a cross-sectional shape of the end face Ga (a cross-sectional shape orthogonal to the X direction), and the end face Ga is processed under a state where the position in the Y direction is fixed. On the other hand, the first polishing grindstone 3 and the second polishing grindstone 4 are grindstones for finishing the ground end face Ga, and are pressed against the end face Ga with a constant pressing force. The end face Ga is processed under. Note that the grinding wheel 2 may grind the end face Ga while being pressed against the end face Ga with a constant pressing force.
　ここで、第一研磨砥石３を端面Ｇａに押し当てる第一押圧力Ｆ１と、第二研磨砥石４を端面Ｇａに押し当てる第二押圧力Ｆ２とを比較すると、第二押圧力Ｆ２の方が小さくなっている。ここで言う「押圧力」とは、Ｙ方向と平行に作用し、単位が［Ｎ］で表される力である。端面Ｇａに発生するクラックをさらに抑制する観点から、第二押圧力Ｆ２は、第一押圧力Ｆ１の０．８倍以下であることが好ましく、０．６倍以下であることがより好ましい。また、第二研磨砥石４による研磨量を確保する観点から、第二押圧力Ｆ２は、第一押圧力Ｆ１の０．１倍以上であることが好ましく、０．２倍以上であることがより好ましい。 Here, when comparing the first pressing force F1 that presses the first polishing grindstone 3 against the end surface Ga and the second pressing force F2 that presses the second polishing grindstone 4 against the end surface Ga, the second pressing force F2 is greater. It is getting smaller. The “pressing force” referred to here is a force acting in parallel with the Y direction and having a unit represented by [N]. From the viewpoint of further suppressing cracks generated in the end face Ga, the second pressing force F2 is preferably 0.8 times or less, more preferably 0.6 times or less of the first pressing force F1. Further, from the viewpoint of securing the polishing amount by the second polishing grindstone 4, the second pressing force F2 is preferably 0.1 times or more of the first pressing force F1, and more preferably 0.2 times or more. preferable.
　第一押圧力Ｆ１は、３０Ｎ～１００Ｎであることが好ましく、４０Ｎ～８０Ｎであることがより好ましい。第二押圧力Ｆ２は、３Ｎ～８０Ｎであることが好ましく、５Ｎ～４０Ｎであることがより好ましく、１０Ｎ～３０Ｎであることが最も好ましい。 The first pressing force F1 is preferably 30N to 100N, and more preferably 40N to 80N. The second pressing force F2 is preferably 3N to 80N, more preferably 5N to 40N, and most preferably 10N to 30N.
　研削砥石２は、砥粒の結合材として金属結合材（メタルボンド）が採用されたメタルボンド砥石であることが好ましい。結合材として採用される金属は、鉄、銅、コバルト、ニッケル、タングステン等から一種を選択したものまたは二種以上を選択して混合したものが好ましく、特に鉄を含むものが好ましい。研削砥石２に結合される砥粒は、ダイヤモンド砥粒であることが好ましく、粒度は＃３００～６００であることが好ましい。 The grinding wheel 2 is preferably a metal bond wheel that employs a metal bonding material (metal bond) as a bonding material for abrasive grains. The metal employed as the binder is preferably one selected from iron, copper, cobalt, nickel, tungsten, or the like, or a mixture of two or more selected, and particularly one containing iron. The abrasive grains bonded to the grinding wheel 2 are preferably diamond abrasive grains, and the grain size is preferably # 300 to 600.
　第一研磨砥石３および第二研磨砥石４は、砥粒の結合材として樹脂結合材（レジンボンド）が採用されたレジンボンド砥石であることが好ましい。樹脂結合材としては、熱硬化性樹脂を採用することが好ましい。具体例としては、フェノール樹脂、エポキシ樹脂、ポリイミド樹脂、ポリウレタン樹脂等を樹脂結合剤として採用することができる。第一研磨砥石３および第二研磨砥石４に結合される砥粒としては、ダイヤモンド粒子、酸化アルミニウム粒子、炭化珪素粒子、立方晶窒化硼素粒子、金属酸化物粒子、金属炭化物粒子、金属窒化物粒子等が使用できる。砥粒の粒度は、＃１００～３０００であることが好ましく、＃２００～１０００であることがより好ましい。 The first polishing grindstone 3 and the second polishing grindstone 4 are preferably resin bond grindstones in which a resin binder (resin bond) is adopted as a binder for abrasive grains. As the resin binder, it is preferable to employ a thermosetting resin. As a specific example, a phenol resin, an epoxy resin, a polyimide resin, a polyurethane resin, or the like can be employed as a resin binder. As the abrasive grains bonded to the first polishing grindstone 3 and the second polishing grindstone 4, diamond particles, aluminum oxide particles, silicon carbide particles, cubic boron nitride particles, metal oxide particles, metal carbide particles, metal nitride particles Etc. can be used. The grain size of the abrasive grains is preferably from # 100 to 3000, and more preferably from # 200 to 1000.
　ここで、第二研磨工程にて端面Ｇａに発生するクラックをさらに抑制するため、第二研磨砥石４の結合剤のロックウエル硬さＨＲＭは、第一研磨砥石３の結合剤のロックウエル硬さＨＲＭ以下になっている。このロックウエル硬さＨＲＭの関係性を満足させようとする場合、一例として、第一研磨砥石３の結合剤として、フェノール樹脂、ポリウレタン樹脂、ポリイミド樹脂のいずれかを採用し、第二研磨砥石４の結合剤としてポリウレタン樹脂、エポキシ樹脂のいずれかを採用すればよい。 Here, in order to further suppress cracks generated in the end face Ga in the second polishing step, the lock well hardness HRM of the binder of the second polishing grindstone 4 is equal to or lower than the rockwell hardness HRM of the binder of the first polishing grindstone 3. It has become. In order to satisfy the relationship of the Rockwell hardness HRM, as an example, a phenol resin, a polyurethane resin, or a polyimide resin is used as a binder of the first polishing grindstone 3. Either a polyurethane resin or an epoxy resin may be employed as the binder.
　第一研磨砥石３の結合剤のロックウエル硬さＨＲＭは５０～１３０であることが好ましい。また、第二研磨砥石４の結合剤のロックウエル硬さＨＲＭは、５０～１１０であることが好ましい。ここで、結合剤のロックウエル硬さＨＲＭは、フィラー等を含まない結合剤単体でのロックウエル硬さＨＲＭを意味する。 The Rockwell hardness HRM of the binder of the first grinding wheel 3 is preferably 50 to 130. Further, the Rockwell hardness HRM of the binder of the second polishing grindstone 4 is preferably 50 to 110. Here, the Rockwell hardness HRM of the binder means the Rockwell hardness HRM of the binder alone containing no filler or the like.
　以下、上記の製造装置１を用いた板ガラスの製造方法について説明する。 Hereinafter, the manufacturing method of the plate glass using said manufacturing apparatus 1 is demonstrated.
　この板ガラスの製造方法では、まず、図示省略の搬送手段（例えば、ベルトコンベア等）により板ガラスＧを定盤が設置された位置まで搬入した後、定盤上に板ガラスＧを固定する。この板ガラスＧは、既に切断工程を経たガラスであり、両端面Ｇａ，Ｇａの各々が切断工程により形成された切断面となっている。 In this plate glass manufacturing method, first, the plate glass G is carried to a position where the surface plate is installed by a conveying means (not shown) such as a belt conveyor, and then the plate glass G is fixed on the surface plate. The plate glass G is glass that has already undergone a cutting process, and both end faces Ga, Ga are cut surfaces formed by the cutting process.
　次に、板ガラスＧの端面Ｇａを研削する端面研削工程と、研削後の板ガラスＧの端面Ｇａを研磨する端面研磨工程とを実行する。 Next, an end face grinding process for grinding the end face Ga of the plate glass G and an end face polishing process for polishing the end face Ga of the plate glass G after grinding are performed.
　端面研削工程では、切断面である板ガラスＧの端面Ｇａを研削砥石２により研削していく。これにより、端面Ｇａの断面形状が形作られていく。端面研磨工程では、研削後の板ガラスＧの端面Ｇａに対して第一押圧力Ｆ１で第一研磨砥石３を押し当てながら研磨する第一研磨工程と、第一研磨砥石３による研磨後の板ガラスＧの端面Ｇａに対して第二押圧力Ｆ２で第二研磨砥石４を押し当てながら研磨する第二研磨工程とを実行する。これにより、端面Ｇａの表面粗さを小さくするための仕上げ加工がなされていく。研削砥石２、第一研磨砥石３、及び、第二研磨砥石４による端面Ｇａの全長の加工が終了すると、端面研削工程および端面研磨工程が完了する。なお、端面研磨工程後における端面Ｇａの品位は、例えば、表面粗さＲａの大小により評価できる。 In the end face grinding process, the end face Ga of the plate glass G which is a cut surface is ground by the grinding wheel 2. Thereby, the cross-sectional shape of the end face Ga is formed. In the end surface polishing step, the first polishing step of polishing while pressing the first polishing grindstone 3 against the end surface Ga of the ground glass G with the first pressing force F1, and the plate glass G after polishing by the first polishing grindstone 3 A second polishing step is performed in which the second polishing grindstone 4 is pressed against the end face Ga with the second pressing force F2. Thereby, the finishing process for reducing the surface roughness of the end face Ga is performed. When the processing of the entire length of the end surface Ga by the grinding wheel 2, the first polishing wheel 3, and the second polishing wheel 4 is completed, the end surface grinding step and the end surface polishing step are completed. The quality of the end face Ga after the end face polishing step can be evaluated by, for example, the magnitude of the surface roughness Ra.
　端面研削工程および端面研磨工程が完了すると、端面Ｇａの研削加工および研磨加工を終えた定盤上の板ガラスＧの固定を解除した後、再び搬送手段により定盤が設置された位置から板ガラスＧを搬出して下流工程に送る。下流工程では、例えば、端面Ｇａと直交する端面Ｇｂに、上述の端面研削工程および端面研磨工程と同様の態様により、研削加工および研磨加工が施される。その後、板ガラスＧに洗浄処理が施される。 When the end face grinding process and the end face polishing process are completed, after fixing the plate glass G on the surface plate that has finished the grinding and polishing of the end surface Ga, the plate glass G is again removed from the position where the surface plate is installed by the conveying means. Unload and send to downstream process. In the downstream process, for example, the end face Gb orthogonal to the end face Ga is ground and polished in the same manner as the end face grinding process and the end face polishing process described above. Thereafter, the glass sheet G is subjected to a cleaning process.
　以下、上記の板ガラスの製造方法および製造装置１による主たる作用・効果について説明する。 Hereinafter, the main actions and effects of the plate glass manufacturing method and the manufacturing apparatus 1 will be described.
　上記の板ガラスの製造方法および製造装置１によれば、第二押圧力Ｆ２を第一押圧力Ｆ１よりも小さくした分だけ、第二研磨工程にて端面Ｇａに発生するクラックを抑制することが可能となる。これにより、得られる板ガラスＧの端面Ｇａに残存するクラックを可及的に抑制でき、端面Ｇａの品位を向上させることが可能となる。 According to the plate glass manufacturing method and the manufacturing apparatus 1 described above, it is possible to suppress cracks generated in the end face Ga in the second polishing step by an amount corresponding to the second pressing force F2 being smaller than the first pressing force F1. It becomes. Thereby, the crack which remain | survives in the end surface Ga of the plate glass G obtained can be suppressed as much as possible, and it becomes possible to improve the quality of the end surface Ga.
　ここで、本発明に係る板ガラスの製造方法および製造装置は、上記の実施形態で説明した態様や構成に限定されるものではない。例えば、第一研磨砥石３および第二研磨砥石４に加え、新たな研磨砥石を導入してもよい。この新たな研磨砥石（第三研磨砥石）により、研削砥石２による端面Ｇａの研削後で、且つ、第一研磨砥石３による端面Ｇａの研磨前に、端面Ｇａの研磨を行うようにしてもよい。この場合、第三研磨砥石を端面Ｇａに押し当てる第三押圧力は、第一押圧力Ｆ１よりも小さくてもよく、大きくてもよい。これは、第三研磨砥石による研磨加工で端面Ｇａに発生するクラックは、第一及び第二研磨工程でほぼ除去可能であり、端面Ｇａの品位に与える影響が小さいからである。 Here, the plate glass manufacturing method and manufacturing apparatus according to the present invention are not limited to the modes and configurations described in the above embodiments. For example, in addition to the first polishing grindstone 3 and the second polishing grindstone 4, a new polishing grindstone may be introduced. With this new polishing wheel (third polishing wheel), the end surface Ga may be polished after the end surface Ga is ground by the grinding wheel 2 and before the end surface Ga is polished by the first polishing wheel 3. . In this case, the third pressing force for pressing the third polishing grindstone against the end face Ga may be smaller or larger than the first pressing force F1. This is because cracks generated in the end face Ga by polishing with the third polishing grindstone can be almost removed in the first and second polishing steps, and the influence on the quality of the end face Ga is small.
　また、上記の実施形態においては、研削砥石２を一対のみ用いているが、この限りではない。二対以上の研削砥石２を用いて研削工程を実行するようにしてもよい。 In the above embodiment, only one pair of grinding wheels 2 is used, but this is not restrictive. The grinding process may be executed using two or more pairs of grinding wheels 2.
　また、上記の実施形態において、研削砥石２、第一研磨砥石３、及び、第二研磨砥石４の各対は、同期した状態で両端面Ｇａ，Ｇａの加工を行うが、この限りではない。研削砥石２、第一研磨砥石３、及び、第二研磨砥石４は、対をなすことなく、一方の端面Ｇａのみの加工を行ってもよい。この場合、研削砥石２は、複数用いてもよい。また、研削砥石２、第一研磨砥石３、及び、第二研磨砥石４の各対は、同期することなく、一方の端面Ｇａの加工を行った後で他方の端面Ｇａの加工を行ってもよい。 Further, in the above-described embodiment, each pair of the grinding wheel 2, the first polishing wheel 3, and the second polishing wheel 4 processes both end faces Ga and Ga in a synchronized state, but this is not restrictive. The grinding wheel 2, the first polishing wheel 3, and the second polishing wheel 4 may process only one end face Ga without forming a pair. In this case, a plurality of grinding wheels 2 may be used. Further, each pair of the grinding wheel 2, the first polishing wheel 3, and the second polishing wheel 4 may process the other end surface Ga after processing the one end surface Ga without synchronizing. Good.
　１　　　　　板ガラスの製造装置
　２　　　　　研削砥石
　３　　　　　第一研磨砥石
　４　　　　　第二研磨砥石
　Ｆ１　　　　第一押圧力
　Ｆ２　　　　第二押圧力
　Ｇ　　　　　板ガラス
　Ｇａ　　　　板ガラスの端面 DESCRIPTION OF SYMBOLS 1 Sheet glass manufacturing apparatus 2 Grinding wheel 3 First polishing wheel 4 Second polishing wheel F1 First pressing force F2 Second pressing force G Sheet glass Ga End face of sheet glass

Claims (4)

  1. 　板ガラスの端面を研削する端面研削工程と、研削後の前記板ガラスの端面を研磨する端面研磨工程とを含んだ板ガラスの製造方法であって、
    　前記端面研磨工程が、前記板ガラスの端面に対して第一押圧力で第一研磨砥石を押し当てながら研磨する第一研磨工程と、前記第一研磨砥石による研磨後の前記板ガラスの端面に対して第二押圧力で第二研磨砥石を押し当てながら研磨する第二研磨工程とを含み、
    　前記第二押圧力を前記第一押圧力よりも小さくすることを特徴とする板ガラスの製造方法。     An end surface grinding step for grinding the end surface of the plate glass, and an end surface polishing step for polishing the end surface of the plate glass after grinding, comprising:
    The first polishing step in which the end surface polishing step is performed while pressing the first polishing grindstone against the end surface of the plate glass with a first pressing force, and the end surface of the plate glass after being polished by the first polishing grindstone A second polishing step of polishing while pressing the second polishing grindstone with a second pressing force,
    The manufacturing method of the plate glass characterized by making said 2nd pressing force smaller than said 1st pressing force.
  2. 　前記第二研磨砥石の砥粒を固定する結合剤のロックウエル硬さＨＲＭを、前記第一研磨砥石の砥粒を固定する結合剤のロックウエル硬さＨＲＭ以下とすることを特徴とする請求項１に記載の板ガラスの製造方法。 The lock well hardness HRM of the binder that fixes the abrasive grains of the second polishing grindstone is set to be equal to or less than the rock well hardness HRM of the binder that fixes the abrasive grains of the first polishing grindstone. The manufacturing method of the plate glass of description.
  3. 　前記第一研磨砥石の結合剤としてフェノール樹脂、ポリウレタン樹脂またはポリイミド樹脂を用いると共に、前記第二研磨砥石の結合剤としてポリウレタン樹脂またはエポキシ樹脂を用いることを特徴とする請求項２に記載の板ガラスの製造方法。 3. The plate glass according to claim 2, wherein a phenol resin, a polyurethane resin, or a polyimide resin is used as a binder of the first polishing grindstone, and a polyurethane resin or an epoxy resin is used as a binder of the second polishing grindstone. Production method.
  4. 　板ガラスの端面を研削する研削砥石と、研削後の前記板ガラスの端面を研磨する研磨砥石とを備えた板ガラスの製造装置であって、
    　前記研磨砥石として、前記板ガラスの端面に対して第一押圧力で押し当てられた状態で研磨する第一研磨砥石と、前記第一研磨砥石による研磨後の前記板ガラスの端面に対して第二押圧力で押し当てられた状態で研磨する第二研磨砥石とを有し、
    　前記第二押圧力が前記第一押圧力よりも小さいことを特徴とする板ガラスの製造装置。     An apparatus for producing plate glass comprising a grinding wheel for grinding an end surface of a plate glass, and a polishing wheel for polishing an end surface of the plate glass after grinding,
    As the polishing grindstone, a first polishing grindstone to be polished while being pressed against the end surface of the plate glass with a first pressing force, and a second pressing against the end surface of the plate glass after being polished by the first polishing grindstone. Having a second grinding wheel for polishing in a state of being pressed by pressure,
    The plate glass manufacturing apparatus, wherein the second pressing force is smaller than the first pressing force.
PCT/JP2019/007067 2018-03-26 2019-02-25 Method and device for producing sheet glass WO2019187875A1 (en)

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JP2014518169A (en) * 2011-06-28 2014-07-28 コーニング インコーポレイテッド Glass edge finishing method
WO2016098824A1 (en) * 2014-12-19 2016-06-23 旭硝子株式会社 Glass plate chamfering device, glass plate chamfering method, and glass plate production method
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JP2018122369A (en) * 2017-01-30 2018-08-09 日本電気硝子株式会社 Method for manufacturing plate glass, and apparatus for manufacturing plate glass

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WO2014038320A1 (en) * 2012-09-07 2014-03-13 旭硝子株式会社 Method for polishing glass substrate
WO2016098824A1 (en) * 2014-12-19 2016-06-23 旭硝子株式会社 Glass plate chamfering device, glass plate chamfering method, and glass plate production method
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JP2018122369A (en) * 2017-01-30 2018-08-09 日本電気硝子株式会社 Method for manufacturing plate glass, and apparatus for manufacturing plate glass

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