WO2019185006A1

WO2019185006A1 - Inspection system and inspection method

Info

Publication number: WO2019185006A1
Application number: PCT/CN2019/080335
Authority: WO
Inventors: 陆海亮; 杨业超; 孙书诚; 邓兵; 张鹏黎; 徐文; 王帆
Original assignee: 上海微电子装备（集团）股份有限公司
Priority date: 2018-03-30
Filing date: 2019-03-29
Publication date: 2019-10-03
Also published as: TWI680292B; CN110320209A; TW201942566A; CN110320209B

Abstract

Provided are an inspection system and an inspection method. The system comprises: a movement unit, an inspection unit and a check unit, wherein the movement unit is used for bearing an object to be inspected, and is controlled to send a trigger signal to the inspection unit and the check unit after driving the object to be inspected to any one of a plurality of predetermined positions; the inspection unit is used for inspecting the object to be inspected at the predetermined positions according to the trigger signal; and the check unit is used for determining, according to the trigger signal and information of the predetermined positions, whether there is a missing predetermined position which has not been inspected by the inspection unit in the plurality of predetermined positions, and obtaining the missing predetermined position. In the inspection system and inspection method provided in the present invention, a check unit can inspect a missing predetermined position which has not been inspected by an inspection unit, so that even if some predetermined positions needing to be operated are missing, there is no need to scan again to acquire the missing predetermined positions, thereby avoiding the inspection of an entire object to be inspected due to some missing predetermined positions, and improving the efficiency of the inspection system.

Description

Detection system and detection method

Technical field

The present invention relates to the field of detection technologies, and in particular, to a detection system and a detection method.

Background technique

Automatic Optical Inspection (AOI) technology enables fast, high-precision, non-destructive inspection of wafers, chips, or other objects to be tested. This technology is widely used in PCBs, IC wafers, LEDs, and solar panels. field. The automatic optical detection technology generally uses a high-precision optical imaging system to image the object to be measured, and the motion station carries the object to be tested for high-speed scanning to achieve high-speed measurement; the system compares the scanned image with the ideal reference image, or through feature extraction, etc. The surface defects of the object to be tested are identified.

During the scanning process, the motion station and the image acquisition device have no information interaction and are in open loop control. When an abnormality occurs during the scanning process, the scanning point signal is lost, and the position information of the lost point cannot be located until the number of lost points is lost. Point information. As the scanning rate of the device increases, the probability of such problems increases. Once such problems occur, the entire wafer needs to be rescanned, which seriously affects the productivity and user experience of the entire machine.

Summary of the invention

The object of the present invention is to provide a detection system and a detection method, which can record the position of the trigger signal loss, and enable the image acquisition device to directly capture an image of the information loss position in the predetermined position, thereby improving the efficiency of the device.

In order to achieve the above object, the present invention provides a detection system including: a motion unit, a detection unit, and a verification unit;

The motion unit is configured to carry an object to be detected, and is controlled to drive the object to be detected to any one of a plurality of predetermined positions, and then send a trigger signal to the detecting unit and the check unit;

The detecting unit is configured to detect the object to be detected at the predetermined position according to the trigger signal;

The checking unit is configured to determine, according to the trigger signal and the predetermined position information, whether the predetermined position of the plurality of predetermined positions that is not detected by the detecting unit is missing, and when there is a missing predetermined position, the missing is obtained. Information about the location.

Optionally, in the detecting system, the checking unit is further configured to send the obtained information about the missing predetermined location to the motion unit, where the motion unit is further configured to drive the to-be-detected The object is to a predetermined position that is not detected by the detecting unit, and sends a trigger signal to the detecting unit.

Optionally, in the detecting system, the detecting system further includes a control unit, and the control unit is configured to send the predetermined location information to the motion unit and the check unit.

Optionally, in the detecting system, the checking unit is further configured to send the obtained information about the missing predetermined location to the control unit, where the control unit is further configured to Transmitting the information of the missing predetermined position, the motion unit is further configured to drive the object to be detected to a predetermined position that is not detected by the detecting unit, and send a trigger signal to the detecting unit.

Optionally, in the detecting system, the predetermined location information includes information of the plurality of predetermined locations arranged in an array.

Optionally, in the detecting system, the check unit includes a first check unit and a second check unit, where the first check unit is configured to use the trigger signal and the detecting unit The detection direction and the predetermined location information are encoded and sent to the second check unit, where the second check unit is configured to decode the information sent by the first check unit and decode the decoded trigger signal The subsequent predetermined position information is compared to determine whether there is a missing trigger signal, thereby determining whether there is a missing predetermined position in the plurality of predetermined positions that is not detected by the detecting unit, and when there is a missing predetermined position, Missing information about the intended location.

Optionally, in the detecting system, the coding direction includes forward coding and reverse coding.

Optionally, in the detecting system, the second check unit determines whether the plurality of predetermined positions are not detected by the detecting unit by recording a time interval of the adjacent trigger signals. The missing predetermined location and when there is a missing predetermined location, information about the missing predetermined location is obtained.

Optionally, in the detecting system, the first check unit adopts orthogonal coding.

Optionally, in the detecting system, the detecting unit comprises an image collecting device, and the detecting operation comprises image capturing.

Correspondingly, there is also provided a detection method performed by the detection system according to any of the above, the detection method comprising:

The motion unit and the verification unit acquire predetermined location information;

The moving unit is controlled to drive the object to be detected to any one of a plurality of predetermined positions according to the predetermined position information, and then send a trigger signal to the detecting unit and the checking unit;

The detecting unit detects the object to be detected at the predetermined position according to the trigger signal;

The check unit determines, according to the trigger signal and the predetermined position information, whether there is a missing predetermined position that is not detected by the detecting unit and a missing position when there is a missing predetermined position. Information about the location.

Optionally, in the detecting method, the method further includes:

Before the motion unit and the verification unit acquire the predetermined location information, the control unit transmits the predetermined location information to the motion unit and the verification unit;

After the verification unit obtains the information of the missing predetermined location, the obtained information of the missing predetermined location is sent to the motion unit or the control unit.

Optionally, in the detecting method, the method further includes:

After acquiring the predetermined position information and starting the motion, the motion unit sends a start signal to the check unit and the detecting unit;

After the motion unit completes the motion, the termination signal is sent to the verification unit and the detection unit, and after receiving the termination signal, the verification ticket determines the multiple according to the trigger signal and the predetermined location information. Whether there is a predetermined position in the predetermined position that is not detected by the detecting unit and information on the missing predetermined position when there is a missing predetermined position.

Optionally, in the detecting method, the checking unit determines, according to the trigger signal and the predetermined position information, whether there is a missing predetermined position that is not detected by the detecting unit among the plurality of predetermined positions. And obtaining, when there is a missing predetermined location, the information of the missing predetermined location includes: the verification unit determining the plurality of time intervals according to the predetermined location information comparing time intervals between two adjacent trigger signals Whether there is a predetermined position in the predetermined position that is not detected by the detecting unit and information on the missing predetermined position when there is a missing predetermined position.

Optionally, in the detecting method, the method for the motion unit to send a trigger signal to the check unit includes: the motion unit sends the trigger signal to the first check unit, where A check unit sends the trigger signal to the second check unit by orthogonally encoding.

Optionally, in the detecting method, the second check unit performs orthogonal decoding on the encoded information, and after decoding, the second check unit records two trigger signals adjacent in time. time interval.

Optionally, in the detecting method, the determining unit determines whether there is a missing predetermined position in the plurality of predetermined positions that is not detected by the detecting unit, and the second checking unit determines Whether the number of the decoded trigger signals is equal to the number of predetermined positions in the predetermined position information, and if not equal, determining that the plurality of predetermined positions have missing predetermined positions detected by the undetected unit; if they are equal, determining Among the plurality of predetermined positions, there is no missing predetermined position that is not detected by the detecting unit.

Optionally, in the detecting method, the method further includes:

The second verification unit sends the information of the missing predetermined location to the control unit;

The control unit transmits information of the missing predetermined location to the motion unit;

Moving the motion unit to a missing predetermined location;

The detecting unit acquires an image at the missing predetermined position.

Optionally, in the detecting method, the method further includes:

The second verification unit transmits information of the missing predetermined location to the motion unit;

Moving the motion unit to a missing predetermined location;

The detecting unit acquires an image at the missing predetermined position.

In the detection system and the detection method provided by the present invention, the verification unit can detect a missing predetermined position that is not detected by the detection unit, whereby in the case where the detection unit loses some predetermined position to be operated, There is also no need to re-scan to obtain the missing predetermined position, and the detection of the entire object to be detected due to the loss of a part of the predetermined position is avoided, thereby improving the efficiency of the detection system.

DRAWINGS

1 is a schematic structural view of a detection system according to an embodiment of the present invention;

2 is another schematic structural diagram of a detection system according to an embodiment of the present invention;

3 is a schematic diagram of information of a predetermined position of a detection system according to an embodiment of the present invention;

4 is a signal diagram of detecting a system trigger signal and a time interval of a trigger signal according to an embodiment of the present invention;

5 is a signal diagram of detecting a time interval of another trigger signal and a trigger signal of the system according to an embodiment of the present invention;

6 is a flowchart of a method for detecting an embodiment of the present invention;

7 is a schematic diagram of a trigger signal after decoding by a second check unit according to an embodiment of the present invention;

In the figure: 110-control unit, 120-motion unit, 130-detection unit, 131-image acquisition device, 132-image processing device, 140-check unit, 141-first check unit, 142-second check Unit, 1-trigger signal in the first check unit, 2-trigger signal in the second check unit, 3-time interval signal, t1-first time interval, t2-second time interval, t3- Three time intervals, t4 - fourth time interval, t5 - fifth time interval, t6 - sixth time interval, t7 - seventh time interval, t8 - eighth time interval.

detailed description

Specific embodiments of the present invention will be described in more detail below with reference to the drawings. Advantages and features of the present invention will be apparent from the description and appended claims. It should be noted that the drawings are in a very simplified form and all use non-precise proportions, and are only for convenience and clarity to assist the purpose of the embodiments of the present invention.

1 and 2, the present invention provides a detection system including a motion unit 120, a detection unit 130, and a verification unit 140;

The motion unit 120 is configured to carry an object to be detected, and is controlled to drive the object to be detected to any one of a plurality of predetermined positions, and then send a trigger signal to the detecting unit 130 and the check unit 140;

The detecting unit 130 is configured to detect the object to be detected at the predetermined position according to the trigger signal;

The checking unit 140 is configured to determine, according to the trigger signal and the predetermined position information, whether the predetermined position of the plurality of predetermined positions that is not detected by the detecting unit 130 and the predetermined position that is missing are obtained. Missing information about the intended location.

The object to be detected may be a PCB, an IC wafer, an LED, a solar panel, or the like, or may be a module or a block on a substrate such as a PCB, an IC wafer, an LED, or a solar panel.

The predetermined location includes location information of the object to be detected that needs to be detected and/or location, order, and the like in the detection process, and the missing predetermined location indicates one or more objects to be detected in the detection process. The location that needs to be detected but missed the detection.

With continued reference to FIG. 1, in a preferred implementation, the verification unit 140 transmits the obtained information of the missing predetermined position that is not detected by the detecting unit 130 to the motion unit 120, the motion unit. 120 drives the object to be detected to the missing predetermined position, and sends a trigger signal to the detecting unit 130. Each time the motion unit 120 moves to a predetermined one of the plurality of predetermined positions, a trigger signal is sent to the detecting unit 130 and the checking unit 140. If a trigger signal is lost, the checking unit 140 will find the lost predetermined position. The information is sent to the motion unit 120. The motion unit 120 can directly move to the lost predetermined position, and then the detecting unit 130 can directly detect the object to be detected at this position, and the detecting unit 130 does not need to re-detect the image of the entire product, thereby improving the efficiency of the entire detection system.

Preferably, the detection system further includes a control unit 110, and the control unit 110 is configured to send predetermined location information to the motion unit 120 and the verification unit 140. The predetermined position information transmitted by the control unit 110 includes information of a position to which the motion unit 120 may move, and the motion unit 120 moves in accordance with the predetermined position information.

With continued reference to FIG. 2, in another preferred implementation, the verification unit 140 sends the obtained information of the missing predetermined location that is not detected by the detecting unit 130 to the control unit 110, and the control The unit 110 transmits information of the missing predetermined position to the moving unit 120, and the moving unit 120 drives the object to be detected to the missing predetermined position, and sends a trigger signal to the detecting unit 130. Each time the motion unit 120 moves to a predetermined position of the plurality of predetermined positions, a trigger signal is sent to the detecting unit 130 and the checking unit 140. If a trigger signal is lost, the checking unit 140 will find the missing predetermined position. The information is sent to the control unit 110. The control unit 110 can selectively transmit the missing predetermined position information to the motion unit 120 at any stage of the entire detection process, and the motion unit 120 can directly move to the missing predetermined position, and then the detecting unit 130 can directly detect the position. Under the object to be detected, the detecting unit 130 does not need to re-detect the image of the entire product, thereby improving the efficiency of the entire detection system. Preferably, when the object to be detected is a module or a block on a substrate such as a PCB, an IC wafer, an LED, or a solar panel, the control unit 110 may select all modules on a substrate such as a PCB, an IC wafer, an LED, and a solar panel. After the block detection process ends, the information of the missing predetermined location is sent to the motion unit 120, and the motion unit 120 can directly move to the missing predetermined location, and then the detecting unit 130 can directly detect the object to be detected at the location. Improve the efficiency of the entire inspection system.

Preferably, the predetermined location information includes information of the plurality of predetermined locations arranged in an array. For example, FIG. 3 is a schematic diagram of predetermined position information transmitted by the control unit 110 of the present embodiment, and A1, A2, A3, A4, A5, A6, A7, A8, and A9 are predetermined positions therein, and a plurality of predetermined positions (ie, A1) To A9) Store and send in the form of an array.

Preferably, the check unit 140 includes a first check unit 141 and a second check unit 142, and the first check unit 141 is configured to: trigger signals (received from the motion unit 120), a detecting unit The detection direction of the 130 and the predetermined location information are encoded and sent to the second verification unit 142, and the second verification unit 142 is configured to decode the received coding information and decode the decoded trigger signal with the decoded predetermined position. The information is compared to determine whether there is a missing trigger signal to determine whether there is a missing predetermined position in the plurality of predetermined positions that is not detected by the detecting unit 130. Both the first verification unit 141 and the second verification unit 142 select a synchronization controller. As shown in FIG. 4 and the signal diagram of FIG. 5, the first check unit 141 sends the trigger signal 1 to the second check unit 142, and generates the trigger signal 2 of the second check unit 142 to obtain the trigger time signal 3.

Preferably, the coding direction includes forward coding and reverse coding. The detecting unit 130 may detect the image to be detected on the moving unit 120 from the forward direction, or may detect the image to be detected on the moving unit 120 from the reverse direction. Therefore, the encoded content can be in two forms, which can be forward detection information, using forward coding, as shown in FIG. 4; or reverse detection information, using reverse coding, as shown in FIG. 5.

Preferably, the second check unit 142 determines whether there is a missing predetermined position that is not detected by the detecting unit 130 among the plurality of predetermined positions by recording a time interval of the adjacent trigger signals. For example, t1 represents the time interval between the first trigger signal and the second trigger signal, which may be referred to herein as a first time interval, and t2 represents a time interval between the second trigger signal and the third trigger signal, It may also be referred to herein as a second time interval, and t3, t4, t5, t6, t7, and t8 represent the third and fourth, fourth, and fifth, fifth, sixth, and sixth, respectively. Time intervals between the seventh and seventh, seventh and eighth and eighth and ninth trigger signals, namely the third, fourth, fifth, sixth, seventh and eighth times respectively interval. If the previous step judges that a trigger signal is lost, for example, the time interval t2 exceeds the set time, it is determined that the lost trigger signal is the second trigger signal.

Preferably, the first check unit 141 adopts orthogonal coding. In this embodiment, the coding mode of the first check unit 141 selects an orthogonal coding mode, that is, the signal 1 and the signal 2 are orthogonal coded signals with a phase difference of 90°, and the orthogonal coding is a typical coding mode. The anti-interference and accuracy are very high. The decoding mode of the second check unit 142 selects the orthogonal decoding mode. In other embodiments of the present invention, other types of coding modes, that is, signal 1 and signal 2, or coded signals having phase differences of other angles may also be employed.

Preferably, the detecting unit 130 includes an image capturing device 131, and the detecting operation includes image capturing. The detecting unit 130 further includes an image processing device 132 for collecting an image of the object to be detected, and the image processing device 132 processes and determines the image.

As shown in FIG. 6 , correspondingly, the embodiment of the present application further provides a detection method performed by using the detection system described in any of the above, the detection method includes:

S11: the motion unit 120 and the verification unit 140 acquire predetermined location information, where the predetermined location information may be transmitted to the motion unit 120 and the verification unit 140 by the control unit 110, so that the motion unit 120 and the verification unit 140 acquire the predetermined location information. ;

S12: The motion unit 120 starts motion after receiving the predetermined location information, and sends a start signal to the verification unit 140 and the detection unit 130, where the motion unit 120 drives the location according to the predetermined location information. Sending a trigger signal to the detecting unit 130 and the checking unit 140 after the object to be detected reaches any one of a plurality of predetermined positions;

S13: The detecting unit 130 detects the object to be detected at a predetermined position according to the trigger signal;

S14: The verification unit 140 records the trigger signal;

S15: The motion unit 120 completes the motion and sends a termination signal to the verification unit 140 and the detection unit 130;

S16: The check unit 140 obtains, according to the trigger signal and the predetermined position information, whether there is a missing predetermined position that is not detected by the detecting unit 130 according to the trigger signal and the predetermined position information;

S17: if there is a missing predetermined location, comparing the time interval between the temporally adjacent trigger signals according to the predetermined location information to obtain the information of the missing predetermined location, and feeding back information of the missing predetermined location The control unit 110 or the motion unit 120 is given.

Preferably, the method for the motion unit 120 to send a trigger signal to the check unit 140 includes: the motion unit 120 sends the trigger signal to the first check unit 141, where the first check unit 141 The trigger signal is orthogonally encoded and then sent to the second check unit 142. For example, FIG. 7 is an array form diagram of a trigger signal, and B1, B2, B3, B4, B5, B6, B7, B8, and B9 are trigger signals, and the number of trigger signals is 9.

Preferably, the second check unit 142 performs orthogonal decoding on the encoded information. After decoding, the second check unit 142 records the time interval of two adjacent trigger signals. As shown in FIG. 4 and FIG. 5, t1 represents a time interval between the first trigger signal and the second trigger signal, which may be referred to herein as a first time interval, and t2 represents a second trigger signal and a third trigger. The time interval between signals may also be referred to herein as a second time interval, and t3, t4, t5, t6, t7, and t8 sequentially represent the third and fourth, fourth, fifth, and fifth. And the time intervals between the sixth, sixth and seventh, seventh and eighth and eighth and ninth trigger signals, namely third, fourth, fifth and sixth respectively , seventh and eighth time intervals.

Preferably, the determining unit 140 determines whether there is a missing predetermined position detected by the undetected unit 130 among the plurality of predetermined positions, and the second checking unit 142 determines whether the number of the triggered trigger signals is Determining the number of predetermined positions in the predetermined position information, if not equal, determining that the plurality of predetermined positions have missing predetermined positions detected by the undetected unit 130; if they are equal, determining that none of the plurality of predetermined positions are present The missing predetermined position that is not detected by the detecting unit 130. If the number of decoded trigger signals is 8, it is determined that there is a missing trigger signal. For example, if the trigger signal B3 is lost, the third signal in the recorded trigger signal array diagram is the trigger signal B4. However, the time interval between the trigger signal B4 and the previous trigger signal is greater than the time interval between the correct third trigger signal (the third trigger signal that is lost) and the previous trigger signal (in the present application, here) A preset time, that is, greater than the preset time), can be judged that the third trigger signal has been lost.

In an implementation manner of the present invention, preferably, the second check unit 142 sends the information of the missing predetermined location to the control unit 110, and the control unit 110 sends the information of the missing predetermined location to the The motion unit 120 moves to a missing predetermined position, and the detecting unit 130 captures an image here. B3 of FIG. 7 corresponds to A3 of FIG. 3, and sends a predetermined position A3 to the control unit 110. The control unit 110 directly transmits the motion to the motion unit 120. The motion unit 120 directly moves to the position of A3, and the detection unit 130 directly detects the graphic here. After the loss of a trigger signal is avoided, the motion unit 120 needs to start moving from A1, so that the detecting unit 130 re-detects the pattern of the entire product, thereby improving the efficiency of the entire detection system.

In another implementation manner of the present invention, preferably, the second verification unit 142 sends information of the missing predetermined location to the motion unit 120, and the motion unit 120 moves to a missing predetermined location, The detecting unit 130 collects an image here. That is, another method is to directly feed A3 to the motion unit 120, the motion unit 120 moves to the missing predetermined position, and the detection unit 130 acquires the image here. It is also possible to prevent the detecting unit 130 from re-detecting the pattern of the entire product, thereby improving the efficiency of the entire detecting system.

In summary, in the detection system and the detection method provided by the embodiment of the present invention, the verification unit 140 can detect the missing predetermined position that is not detected by the detection unit 130, thereby causing some operations to be lost in the detection unit. In the case of the predetermined position, there is no need to re-scan to obtain the missing predetermined position, and the entire object to be detected is detected because the partial predetermined position is lost, thereby improving the efficiency of the detection system.

The above is only a preferred embodiment of the present invention and does not impose any limitation on the present invention. Any changes in the technical solutions and technical contents disclosed in the present invention may be made by those skilled in the art without departing from the technical scope of the present invention. The content is still within the scope of protection of the present invention.

Claims

A detection system, comprising: a motion unit, a detection unit, and a verification unit; wherein

The motion unit is configured to carry an object to be detected, and is controlled to drive the object to be detected to any one of a plurality of predetermined positions, and then send a trigger signal to the detecting unit and the check unit;

The detecting unit is configured to detect the object to be detected at the predetermined position according to the trigger signal;

The checking unit is configured to determine, according to the trigger signal and the predetermined position information, whether the predetermined position of the plurality of predetermined positions that is not detected by the detecting unit is missing, and when there is a missing predetermined position, the missing is obtained. Information about the location.
The detecting system according to claim 1, wherein the checking unit is further configured to send the obtained information of the missing predetermined position to the moving unit, wherein the moving unit is further configured to drive the The object to be detected is to a predetermined position that is not detected by the detecting unit, and a trigger signal is sent to the detecting unit.
The detection system of claim 1 wherein said detection system further comprises a control unit for transmitting said predetermined location information to said motion unit and said verification unit.
The detecting system according to claim 3, wherein the checking unit is further configured to send the obtained information of the missing predetermined position to the control unit, wherein the control unit is further configured to The motion unit transmits the information of the missing predetermined location, and the motion unit is further configured to drive the object to be detected to a missing predetermined location that is not detected by the detecting unit, and send a trigger signal to the detecting unit.
The detecting system according to claim 3, wherein said predetermined position information comprises information of said plurality of predetermined positions arranged in an array.
The detection system according to claim 5, wherein the verification unit comprises a first verification unit and a second verification unit, the first verification unit is configured to use the trigger signal, the detection The detection direction of the unit and the predetermined location information are encoded and sent to the second check unit, where the second check unit is configured to decode the information sent by the first check unit and decode the decoded trigger signal Comparing with the decoded predetermined position information to determine whether there is a missing trigger signal, thereby determining whether there is a missing predetermined position in the plurality of predetermined positions that is not detected by the detecting unit and when there is a missing predetermined position , get the information of the missing predetermined location.
The detection system of claim 6 wherein said encoding direction comprises forward encoding and inverse encoding.
The detecting system according to claim 7, wherein said second checking unit determines whether said plurality of predetermined positions are not detected by said time interval of recording adjacent trigger signals The missing predetermined position is detected and, when there is a missing predetermined position, information of the missing predetermined position is obtained.
The detection system of claim 8 wherein said first check unit employs orthogonal coding.
The detection system according to any one of claims 1 to 9, wherein the detection unit comprises an image acquisition device, and the detection operation comprises image acquisition.
A detection method using the detection system according to any one of claims 1 to 10, wherein the detection method comprises:

The motion unit and the verification unit acquire predetermined location information;

The moving unit is controlled to drive the object to be detected to any one of a plurality of predetermined positions according to the predetermined position information, and then send a trigger signal to the detecting unit and the checking unit;

The detecting unit detects the object to be detected at the predetermined position according to the trigger signal;

The check unit determines, according to the trigger signal and the predetermined position information, whether there is a missing predetermined position that is not detected by the detecting unit and a missing position when there is a missing predetermined position. Information about the location.
The detecting method according to claim 11, wherein the detecting method further comprises:

Before the motion unit and the verification unit acquire the predetermined location information, the control unit transmits the predetermined location information to the motion unit and the verification unit;

After the verification unit obtains the information of the missing predetermined location, the obtained information of the missing predetermined location is transmitted to the motion unit or the control unit.
The detecting method according to claim 11, wherein the detecting method further comprises:

After acquiring the predetermined position information and starting the motion, the motion unit sends a start signal to the check unit and the detecting unit;

After the motion unit completes the motion, the termination signal is sent to the verification unit and the detection unit, and after receiving the termination signal, the verification ticket determines the multiple according to the trigger signal and the predetermined location information. Whether there is a predetermined position in the predetermined position that is not detected by the detecting unit and information on the missing predetermined position when there is a missing predetermined position.
The detecting method according to claim 13, wherein the checking unit determines, according to the trigger signal and the predetermined position information, whether there is a missing one of the plurality of predetermined positions that is not detected by the detecting unit. The predetermined position and the missing predetermined position information include: the verification unit determines the time interval between the two adjacent trigger signals according to the predetermined position information to determine the Whether there is a predetermined position in the plurality of predetermined positions that is not detected by the detecting unit and when there is a missing predetermined position, information on the missing predetermined position is obtained.
The detecting method according to claim 11, wherein the method for the motion unit to send a trigger signal to the check unit comprises: the motion unit transmitting the trigger signal to the first check unit, The first check unit sends the trigger signal to the second check unit by orthogonally encoding.
The detecting method according to claim 15, wherein the second check unit performs orthogonal decoding on the encoded information, and after decoding, the second check unit records two triggers adjacent in time. The time interval of the signal.
The detecting method according to claim 16, wherein the checking unit determines whether there is a missing predetermined position in the plurality of predetermined positions that is not detected by the detecting unit, comprising: the second check The unit determines whether the number of the decoded trigger signals is equal to the number of predetermined positions in the predetermined position information, and if not, determines that the plurality of predetermined positions have missing predetermined positions detected by the undetected unit; if they are equal, Then, it is judged that there is no missing predetermined position that is not detected by the detecting unit among the plurality of predetermined positions.
The detecting method according to claim 17, wherein the detecting method further comprises:

The second verification unit sends the information of the missing predetermined location to the control unit;

The control unit transmits information of the missing predetermined location to the motion unit;

Moving the motion unit to a missing predetermined location;

The detecting unit acquires an image at the missing predetermined position.
The detecting method according to claim 17, wherein the detecting method further comprises:

The second verification unit transmits information of the missing predetermined location to the motion unit;

Moving the motion unit to a missing predetermined location;

The detecting unit acquires an image at the missing predetermined position.