CN110320209A - Detection system and detection method - Google Patents
Detection system and detection method Download PDFInfo
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- CN110320209A CN110320209A CN201810276781.5A CN201810276781A CN110320209A CN 110320209 A CN110320209 A CN 110320209A CN 201810276781 A CN201810276781 A CN 201810276781A CN 110320209 A CN110320209 A CN 110320209A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
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Abstract
The present invention provides a kind of detection system and detection methods, comprising: moving cell, detection unit and verification unit；Wherein, the moving cell is to carry object to be detected, and drives and issue trigger signal to the detection unit and the verification unit after the object to predetermined position to be detected；The detection unit is to execute detection operation to the object to be detected in predetermined position according to the trigger signal；The verification unit is to obtain the predetermined position of the detection unit missing according to the information of the trigger signal and the predetermined position.In detection system provided by the invention and detection method, the verification unit can detect the predetermined position of the detection unit missing, thus in the case where detection unit loses some predetermined positions for needing to operate, also it need not rescan to obtain the predetermined position of missing, it avoids and detects entire object to be detected because of the loss of the information in predetermined position, improve the efficiency of detection system.
Description
Technical field
The present invention relates to detection technique field more particularly to a kind of detection systems and detection method.
Background technique
Automatic optics inspection (Automatic Optical Inspection:AOI) technology, it can be achieved that wafer, chip or
Quick, the high-precision non-destructive testing of other objects to be measured, the technology are widely used in PCB, IC wafer, LED and solar energy
The multiple fields such as panel.Automatic optics inspection technology generally uses high-precision optical imaging system that object to be measured is imaged,
Sports platform carries object to be measured and carries out high-velocity scanning to realize that high speed measures；System by the image of scanning and desired reference image into
Row compares, or by modes such as feature extractions, identifies the surface defect of object to be measured.
Sports platform and image capture device do not have information exchange in scanning process, opened loop control are in, when in scanning process
After appearance exception leads to scanning element dropout, the location information for losing point can not be positioned, until scanning can just be known after the completion
It loses point quantity and loses point information.With the promotion of equipment sweep speed, the probability that problems occur is consequently increased, and one
There are problems and just needs to rescan whole silicon wafer in denier, has seriously affected the yield and user's body of entire machine
It tests.
Summary of the invention
The purpose of the present invention is to provide a kind of detection system and detection methods, can recorde trigger signal and lose position,
Image capture device is set directly to acquire the image of the position of predetermined position information loss, to improve the efficiency of equipment.
In order to achieve the above object, the present invention provides a kind of detection systems, comprising: moving cell, detection unit and school
Verification certificate member；Wherein,
The moving cell drives Xiang Suoshu after the object to predetermined position to be detected to carry object to be detected
Detection unit and the verification unit issue trigger signal；
The detection unit is to execute detection behaviour to the object to be detected in predetermined position according to the trigger signal
Make；
The verification unit is to obtain the detection unit according to the information of the trigger signal and the predetermined position
The predetermined position of missing.
Optionally, in the detection system, the verification unit lacks the obtained detection unit predetermined
The information of position is sent to the moving cell, and the moving cell drives the object to be detected to the detection unit to lack
Predetermined position, and to the detection unit issue trigger signal.
Optionally, in the detection system, the detection system further includes control unit, described control unit to
The information in predetermined position is sent to the moving cell and the verification unit.
Optionally, in the detection system, the verification unit lacks the obtained detection unit predetermined
The information of position is sent to described control unit, and described control unit sends what the detection unit lacked to the moving cell
The information in predetermined position, the predetermined position that the moving cell drives the object to be detected to lack to the detection unit, and
Trigger signal is issued to the detection unit.
Optionally, in the detection system, the information in the predetermined position include it is multiple be arranged in array it is described
Predetermined position.
Optionally, in the detection system, the verification unit includes the first verification unit and the second verification unit,
First verification unit is to carry out coding hair for the information of the detection direction of trigger signal, detection unit and predetermined position
Second verification unit is given, second verification unit is decoded and incited somebody to action to the information for sending first verification unit
Decoded trigger signal and the information comparison in decoded predetermined position judge whether there is the trigger signal of missing to judge
Whether the detection unit has the predetermined position of missing.
Optionally, in the detection system, the coding direction includes positive coding and phase-reversal coding.
Optionally, in the detection system, second verification unit by record adjacent trigger signal when
Between the mode that is spaced judge the predetermined position of the detection unit missing.
Optionally, in the detection system, first verification unit uses orthogonal coding.
Optionally, in the detection system, the detection unit includes image capture device, the detection operation packet
Include Image Acquisition.
Correspondingly, a kind of detection method carried out using detection system described in any of the above embodiments, the inspection are additionally provided
Survey method includes:
Control unit sends the information in predetermined position to moving cell and verification unit；
The moving cell receives setting in motion after the information in the predetermined position and sends initial signal to the school
Verification certificate member and the detection unit, the moving cell drive the object to be detected to pre- according to the information in the predetermined position
Positioning postpones to the detection unit and the verification unit and issues trigger signal；
The detection unit executes detection operation to the object to be detected in predetermined position according to the trigger signal；
The verification unit records the trigger signal；
The moving cell completes movement and concurrently makes arrangements for his funeral stop signal to the verification unit and the detection unit；
The verification unit obtains after receiving termination signal according to the information of the trigger signal and the predetermined position
Whether the detection unit has the predetermined position of missing；
If the detection unit has the predetermined position of missing, the information according to the predetermined position compares time upper phase
The time interval of the adjacent trigger signal obtains the predetermined position of the detection unit missing, and by the predetermined position of missing
Information feeds back to described control unit or the moving cell.
Optionally, in the detection method, the moving cell sends trigger signal to the side of the verification unit
Method includes: that the moving cell sends the trigger signal to first verification unit, and first verification unit will be described
Trigger signal is sent to second verification unit after passing through orthogonal coding.
Optionally, in the detection method, second verification unit carries out quadrature decoder to the information after coding,
After decoding, the time interval of the second verification unit record trigger signal and adjacent trigger signal.
Optionally, in the detection method, the verification unit judges whether detection unit has missing predetermined position
Method include: second verification unit judge decoded trigger signal number whether the number with the information in predetermined position
It is equal, if unequal, judge that detection unit has the predetermined position of missing；If equal, judge that the detection unit does not have
The predetermined position of missing.
Optionally, in the detection method, second verification unit sends the information in the predetermined position of missing
To described control unit, described control unit sends the information in the predetermined position of missing to the moving cell, and the movement is single
Member moves to the predetermined position of missing, the image of the detection unit acquisition herein.
Optionally, in the detection method, second verification unit sends the information in the predetermined position of missing
To the moving cell, the moving cell moves to the predetermined position of missing, the image of the detection unit acquisition herein.
In detection system provided by the invention and detection method, the verification unit can detect that the detection unit lacks
The predetermined position of mistake need not also be rescaned thus in the case where detection unit loses some predetermined positions for needing to operate
To obtain the predetermined position of missing, avoids and detect entire object to be detected because of the loss of the information in predetermined position, improve
The efficiency of detection system.
Detailed description of the invention
Fig. 1 is a structural schematic diagram of detection system of the embodiment of the present invention；
Fig. 2 is another structural schematic diagram of detection system of the embodiment of the present invention；
Fig. 3 is the schematic diagram of the information in the predetermined position of detection system of the embodiment of the present invention；
Fig. 4 is the signal graph for the time interval that detection system of the embodiment of the present invention unifies trigger signal and trigger signal；
Fig. 5 is the signal graph of the time interval of another trigger signal of detection system of the embodiment of the present invention and trigger signal；
Fig. 6 is the flow chart of detection method of the embodiment of the present invention；
Fig. 7 is the schematic diagram of the decoded trigger signal of the second verification unit of the embodiment of the present invention；
In figure: 110- control unit, 120- moving cell, 130- detection unit, 131- image capture device, 132- image
Processing equipment, 140- verification unit, the first verification unit of 141-, the second verification unit of 142-, the touching in the first verification unit of 1-
When signalling, the trigger signal in the second verification unit of 2-, the signal of 3- time interval, t1- first time interval, t2- the second
Between interval, t3- third time interval, the 4th time interval of t4-, the 5th time interval of t5-, the 6th time interval of t6-, t7-
Seven time intervals, the 8th time interval of t8-.
Specific embodiment
A specific embodiment of the invention is described in more detail below in conjunction with schematic diagram.According to following description and
Claims, advantages and features of the invention will become apparent from.It should be noted that attached drawing is all made of very simplified form and
Using non-accurate ratio, only for the purpose of facilitating and clarifying the purpose of the embodiments of the invention.
Referring to Figures 1 and 2, the present invention provides a kind of detection systems, including moving cell 120, detection unit 130 and school
Verification certificate member 140；Wherein,
The moving cell 120 drives the object to be detected backward to predetermined position to carry object to be detected
The detection unit 130 and the verification unit 140 issue trigger signal；
The detection unit 130 is to execute detection to the object to be detected in predetermined position according to the trigger signal
Operation；
The verification unit 140 is single to obtain the detection according to the information of the trigger signal and the predetermined position
The predetermined position of 130 missing of member.
The object to be detected can be PCB, IC wafer, LED and solar panel etc., be also possible to PCB, IC crystalline substance
Module, block in the substrates such as circle, LED and solar panel.
The predetermined position includes the detected position and/or the institute in testing process of the needs of the object to be detected
Locate the location informations such as position, sequence, the predetermined position of missing indicates to omit the one of the object to be detected of detection in testing process
A or multiple positions for needing to be detected.
With continued reference to FIG. 1, in a kind of preferred implementation, the detection list that the verification unit 140 will obtain
The information in the predetermined position of 130 missing of member is sent to the moving cell 120, and the moving cell 120 drives described to be detected
The predetermined position that object is lacked to the detection unit 130, and trigger signal is issued to the detection unit 130.Moving cell
120, which often move to a predetermined position, will issue trigger signal to detection unit 130 and verification unit 140, if there is losing
The information for searching out the predetermined position of loss is sent to moving cell 120 by one trigger signal, verification unit 140.Movement is single
Member 120 can with the predetermined position of first motion to the loss, then detection unit 130 can directly detect under this position to
Test object, detection unit 130 do not have to the image for detecting entire product again, improve the efficiency of entire detection system.
Preferably, the detection system further includes control unit 110, and described control unit 110 is to single to the movement
Member 120 and the verification unit 140 send the information in predetermined position.The information in the predetermined position that described control unit 110 is sent
Comprising the position that moving cell 120 may move to, moving cell 120 according to this predetermined position information movement.
With continued reference to FIG. 2, in another preferred implementation, the detection that the verification unit 140 will obtain
The information in the predetermined position that unit 130 lacks is sent to described control unit 110, and described control unit 110 is single to the movement
Member 120 sends the information in the predetermined position that the detection unit 130 lacks, and the moving cell 120 drives described to be detected right
Trigger signal is issued as the predetermined position lacked to the detection unit 130, and to the detection unit 130.Moving cell 120
Trigger signal will be issued to detection unit 130 and verification unit 140, if there is losing one by often moving to a predetermined position
The information for searching out the predetermined position of loss is sent to detection unit 110 by trigger signal, verification unit 140.Control unit 110
The information in the predetermined position of loss is sent to moving cell 120 in entire testing process any stage by the property of can choose, fortune
Moving cell 120 can be with the predetermined position of first motion to the loss, and then detection unit 130 can directly detect under this position
Object to be detected, detection unit 130 do not have to detect the image of entire product again, improves the efficiency of entire detection system.
Preferably, when object to be detected is module in the substrates such as PCB, IC wafer, LED and solar panel, block, control is single
Member 110 can choose in all modules of the substrates such as PCB, IC wafer, LED and solar panel, block testing process knot
The information in the predetermined position of loss is sent to moving cell 120 by Shu Hou, and moving cell 120 can be with first motion to the loss
Predetermined position, then detection unit 130 can directly detect the object to be detected under this position, improve entire detection system
The efficiency of system.
Preferably, the information in the predetermined position includes multiple predetermined positions being arranged in array.For example, Fig. 3 is
The schematic diagram of the information in the predetermined position that the control unit 110 of the present embodiment is sent, A1, A2, A3, A4, A5, A6, A7, A8 and A9
It is predetermined position therein, (i.e. A1 to A9) is stored and sent in an array manner in multiple predetermined positions.
Preferably, the verification unit 140 includes the first verification unit 141 and the second verification unit 142, first school
Verification certificate member 141 is to by (received from the moving cell 120) trigger signal, the detection direction of detection unit 130 and pre-
It positions the information set and carries out coding and is sent to second verification unit 142, second verification unit 142 is to will be received
The information comparison in decoded trigger signal and decoded predetermined position is simultaneously judged whether there is missing by encoded information decoding
Trigger signal is to judge whether the detection unit 130 has the predetermined position of missing.First verification unit 141 and described
Second verification unit 142 all selects isochronous controller.Such as the signal graph of Fig. 4 and such as Fig. 5, the first verification unit 141 believes triggering
Number 1 is sent to the second verification unit 142, triggers the signal 2 of the second verification unit 142, obtains triggered time signal 3.
Preferably, the coding direction includes positive coding and phase-reversal coding.The detection unit 130 can be opened from forward direction
The image to be detected to begin on detection moving cell 120, can also detect the mapping to be checked on moving cell 120 since reversely
Picture.Therefore, the content of coding can be positive detection information there are two types of form, using the mode of forward direction coding, such as scheme
4,；It is also possible to inverse detection information, uses the mode of phase-reversal coding, such as Fig. 5.
Preferably, second verification unit 142 is sentenced by way of recording the time interval of adjacent trigger signal
The predetermined position that the detection unit 130 of breaking lacks.For example, t1 is indicated between first trigger signal and second trigger signal
Time interval, be properly termed as first time interval herein, t2 is indicated between second trigger signal and third trigger signal
Time interval, be referred to as the second time interval herein, t3, t4, t5, t6, t7 and t8 successively indicate third and the 4th
A, the 4th and the 5th, the 5th and the 6th, the 6th and the 7th, the 7th and the 8th and the 8th and
Time interval between nine trigger signals, the i.e. respectively time interval of third, the four, the five, the six, the 7th and the 8th.Such as
The judgement of fruit previous step is lost a trigger signal, such as time interval t2 is more than the time of setting, then judges the triggering lost
Signal is second trigger signal.
Preferably, first verification unit 141 uses orthogonal coding.In the present embodiment, first verification unit 141
Coding mode select the mode of orthogonal coding, i.e. signal 1 and signal 2 is 90 ° of phase difference of orthogonal intersection code signal, orthogonal coding
It is a kind of typical coding mode, anti-interference and accuracy are all very high.And the decoding process of second verification unit 142
Then select the mode of quadrature decoder.In other embodiments of the invention, can also be believed using other kinds of coding mode
Number 1 and signal 2 be also possible to the encoded signal that phase difference is other angles.
Preferably, the detection unit 130 includes image capture device 131, and the detection operation includes Image Acquisition.Inspection
Surveying unit 130 further includes image processing equipment 132, and image capture device 131 is used to acquire the image of object to be detected, the figure
As processing equipment 132 is handled and judged to image.
If Fig. 6 correspondingly additionally provides a kind of detection method carried out using detection system described in any of the above embodiments,
The detection method includes:
S11: control unit 110 sends the information in predetermined position to moving cell 120 and verification unit 140；
S12: the moving cell 120 receive after the information in the predetermined position setting in motion and send initial signal to
The verification unit 140 and the detection unit 130, the moving cell 120 drive institute according to the information in the predetermined position
It states and issues trigger signal to the detection unit 130 and the verification unit 140 after object to predetermined position to be detected；
S13: the detection unit 130 executes detection to the object to be detected in predetermined position according to the trigger signal
Operation；
S14: the verification unit 140 records the trigger signal；
S15: the moving cell 120 completes movement and concurrently makes arrangements for his funeral stop signal to the verification unit 140 and the detection
Unit 130；
S16: the verification unit 140 receives after termination signal according to the trigger signal and the letter in the predetermined position
Breath obtains the predetermined position whether detection unit 130 has missing；
S17: if the detection unit 130 has the predetermined position of missing, the information according to the predetermined position compares
Time interval on time between the adjacent trigger signal obtains the predetermined position that the detection unit 130 lacks, and will
The information in the predetermined position of missing feeds back to described control unit 110 or the moving cell 120.
Preferably, it includes: the fortune that the moving cell 120, which sends trigger signal to the method for the verification unit 140,
Moving cell 120 sends the trigger signal to first verification unit 141, and first verification unit 141 is by the triggering
Signal is sent to second verification unit 142 after passing through orthogonal coding.Such as Fig. 7, it is the array format figure of trigger signal,
B1, B2, B3, B4, B5, B6, B7, B8 and B9 are trigger signals, and trigger signal number is 9.
Preferably, the information after 142 pairs of second verification unit codings carries out quadrature decoder, after decoding, described second
The time interval of verification unit 142 record trigger signal and adjacent trigger signal.As shown in Figure 4 and Figure 5, t1 indicates first touching
The time interval signaled between second trigger signal, is properly termed as first time interval herein, and t2 indicates second touching
The time interval signaled between third trigger signal, is referred to as the second time interval herein, t3, t4, t5, t6,
T7 and t8 successively indicates third and the 4th, the 4th and the 5th, the 5th and the 6th, the 6th and the 7th, the
Time interval between seven and the 8th and the 8th and the 9th trigger signal, i.e., respectively third, the four, the 5th,
Six, the 7th and the 8th time interval.
Preferably, it includes: institute that the verification unit 140, which judges whether detection unit 130 has the method in missing predetermined position,
It states the second verification unit 142 and judges whether decoded trigger signal number is equal with the number of the information in predetermined position, if
It is unequal, judge that detection unit 130 has the predetermined position of missing；If equal, judge that the detection unit 130 does not lack
Predetermined position.If decoded trigger signal number is 8, judgement has loss trigger signal, for example, if trigger signal
B3 loses, then in the trigger signal array of figure recorded, third signal is trigger signal B4.However trigger signal B4 with it is previous
Time interval between trigger signal be greater than correct third trigger signal (the third trigger signal being lost) with it is previous
Time interval (in this application, having done a preset time here, that is, be greater than this preset time) between a trigger signal,
So as to judge that third trigger signal has been lost.
In an implementation of the invention, it is preferred that second verification unit 142 is by the predetermined position of missing
Information is sent to described control unit 110, and the information that described control unit 110 sends the predetermined position of missing is single to the movement
Member 120, the moving cell 120 move to the predetermined position of missing, the image of the acquisition of detection unit 130 herein.Fig. 7's
Predetermined position A3 is sent to control unit 110 by the A3 of B3 corresponding diagram 3, and control unit 110 is directly sent to moving cell again
120,120 first motion of moving cell to the position of A3, detection unit 130 directly detects figure herein, has avoided one
After trigger signal is lost, moving cell 120 is needed from A1 setting in motion, and detection unit 130 detects the figure of entire product again,
Improve the efficiency of entire detection system.
In another implementation of the invention, it is preferred that second verification unit 142 is by the predetermined position of missing
Information be sent to the moving cell 120, the moving cell 120 moves to the predetermined position of missing, the detection unit
The image of 130 acquisitions herein.That is, another method is A3 to be fed directly to moving cell 120, moving cell 120 moves to
The predetermined position of missing, the image of the acquisition of detection unit 130 herein.Also it is avoided that detection unit 130 detects entire product again
Figure, improve the efficiency of entire detection system.
To sum up, in detection system provided in an embodiment of the present invention and detection method, the verification unit 140 can be detected
The predetermined position that the detection unit 130 lacks, thus the case where detection unit loses some predetermined positions for needing to operate
Under, it need not also rescan to obtain the predetermined position of missing, avoid and detected whole because of the loss of the information in predetermined position
A object to be detected, improves the efficiency of detection system.
The above is only a preferred embodiment of the present invention, does not play the role of any restrictions to the present invention.Belonging to any
Those skilled in the art, in the range of not departing from technical solution of the present invention, to the invention discloses technical solution and
Technology contents make the variation such as any type of equivalent replacement or modification, belong to the content without departing from technical solution of the present invention, still
Within belonging to the scope of protection of the present invention.
Claims (16)
1. a kind of detection system, which is characterized in that the detection system includes: moving cell, detection unit and verification unit；Its
In,
The moving cell drives after the object to predetermined position to be detected to carry object to be detected to the detection
Unit and the verification unit issue trigger signal；
The detection unit is to execute detection operation to the object to be detected in predetermined position according to the trigger signal；
The verification unit is lacked to obtain the detection unit according to the information of the trigger signal and the predetermined position
Predetermined position.
2. detection system as described in claim 1, which is characterized in that the verification unit lacks the obtained detection unit
The information in the predetermined position of mistake is sent to the moving cell, and the moving cell drives the object to be detected to the detection
The predetermined position of unit missing, and trigger signal is issued to the detection unit.
3. detection system as described in claim 1, which is characterized in that the detection system further includes control unit, the control
Information of the unit processed to send predetermined position to the moving cell and the verification unit.
4. detection system as claimed in claim 3, which is characterized in that the verification unit lacks the obtained detection unit
The information in the predetermined position of mistake is sent to described control unit, and described control unit sends the detection list to the moving cell
The information in the predetermined position of member missing, it is predetermined that the moving cell drives the object to be detected to the detection unit to lack
Position, and trigger signal is issued to the detection unit.
5. detection system as claimed in claim 3, which is characterized in that the information in the predetermined position includes multiple in array row
The predetermined position of cloth.
6. detection system as claimed in claim 5, which is characterized in that the verification unit includes the first verification unit and second
Verification unit, first verification unit is to by the information of the detection direction of trigger signal, detection unit and predetermined position
It carries out coding and is sent to second verification unit, second verification unit is to the letter that sends first verification unit
Breath decoding simultaneously believes the triggering that the information comparison of decoded trigger signal and decoded predetermined position judges whether there is missing
Number to judging whether the detection unit has the predetermined position of missing.
7. detection system as claimed in claim 6, which is characterized in that the coding direction includes positive coding and reversely compiles
Code.
8. detection system as claimed in claim 7, which is characterized in that second verification unit is by recording adjacent triggering
The mode of the time interval of signal judges the predetermined position of detection unit missing.
9. detection system as claimed in claim 8, which is characterized in that first verification unit uses orthogonal coding.
10. such as detection system according to any one of claims 1 to 9, which is characterized in that the detection unit includes that image is adopted
Collect equipment, the detection operation includes Image Acquisition.
11. a kind of using the detection method carried out such as detection system according to any one of claims 1 to 10, feature exists
In the detection method includes:
Control unit sends the information in predetermined position to moving cell and verification unit；
The moving cell receives after the information in the predetermined position setting in motion and to send initial signal single to the verification
The first and described detection unit, the moving cell drive the object to be detected to pre-determined bit according to the information in the predetermined position
It postpones to the detection unit and the verification unit and issues trigger signal；
The detection unit executes detection operation to the object to be detected in predetermined position according to the trigger signal；
The verification unit records the trigger signal；
The moving cell completes movement and concurrently makes arrangements for his funeral stop signal to the verification unit and the detection unit；
The verification unit receive after termination signal obtained according to the information of the trigger signal and the predetermined position it is described
Whether detection unit has the predetermined position of missing；
If the detection unit has the predetermined position of missing, it is upper adjacent that the information according to the predetermined position compares the time
The time interval of the trigger signal obtains the predetermined position of detection unit missing, and by the information in the predetermined position of missing
Feed back to described control unit or the moving cell.
12. detection method as claimed in claim 11, which is characterized in that the moving cell sends trigger signal to the school
The method of verification certificate member includes: that the moving cell sends the trigger signal to first verification unit, first verification
Unit is by the trigger signal by being sent to second verification unit after orthogonal coding.
13. detection method as claimed in claim 12, which is characterized in that second verification unit to the information after coding into
Row quadrature decoder, after decoding, the time interval of the second verification unit record trigger signal and adjacent trigger signal.
14. detection method as claimed in claim 13, which is characterized in that it is scarce that the verification unit judges whether detection unit has
Lose predetermined position method include: second verification unit judge decoded trigger signal number whether with predetermined position
The number of information is equal, if unequal, judges that detection unit has the predetermined position of missing；If equal, the inspection is judged
Survey the predetermined position that unit does not lack.
15. detection method as claimed in claim 11, which is characterized in that second verification unit is by the predetermined position of missing
Information be sent to described control unit, described control unit sends the information in the predetermined position of missing to the moving cell,
The moving cell moves to the predetermined position of missing, the image of the detection unit acquisition herein.
16. detection method as claimed in claim 11, which is characterized in that second verification unit is by the predetermined position of missing
Information be sent to the moving cell, the moving cell moves to the predetermined position of missing, and the detection unit acquires this
The image at place.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810276781.5A CN110320209B (en) | 2018-03-30 | 2018-03-30 | Detection system and detection method |
| PCT/CN2019/080335 WO2019185006A1 (en) | 2018-03-30 | 2019-03-29 | Inspection system and inspection method |
| TW108111423A TWI680292B (en) | 2018-03-30 | 2019-03-29 | Detection system and detection method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810276781.5A CN110320209B (en) | 2018-03-30 | 2018-03-30 | Detection system and detection method |
Publications (2)
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US4354865A (en) * | 1981-05-01 | 1982-10-19 | Brockway Glass Company, Inc. | Automatic glass ware forming machine with automatic down and/or stuck bottle rejection |
| JP3454753B2 (en) * | 1999-06-02 | 2003-10-06 | 株式会社キリンテクノシステム | Automatic inspection device by image processing |
| EP1197454B1 (en) * | 2000-08-07 | 2006-05-10 | Fuji Photo Film B.V. | Position indication of quality problem areas at a continuous web |
| JP2010014436A (en) * | 2008-07-01 | 2010-01-21 | Micronics Japan Co Ltd | Defect inspection method and defect inspection device |
| CN102004104A (en) * | 2009-08-28 | 2011-04-06 | 中芯国际集成电路制造(上海)有限公司 | Wafer sampling and detecting system and detecting method thereof |
| CN101701919B (en) * | 2009-11-20 | 2011-05-11 | 长安大学 | Pavement crack detection system based on image and detection method thereof |
| JP5504234B2 (en) * | 2011-09-28 | 2014-05-28 | 日本山村硝子株式会社 | Box filling inspection method and box filling inspection apparatus |
| JP6088855B2 (en) * | 2013-02-28 | 2017-03-01 | モレックス エルエルシー | Appearance inspection apparatus and appearance inspection method |
| JP2015203658A (en) * | 2014-04-16 | 2015-11-16 | 株式会社日立ハイテクノロジーズ | Inspection device |
| CN104458642A (en) * | 2014-12-03 | 2015-03-25 | 天津大学 | Rapid terahertz continuous wave scanning imaging system and method |
| KR20160107532A (en) * | 2015-03-04 | 2016-09-19 | 동우 화인켐 주식회사 | System and method for inspecting optical film, apparatus and method for managing quality of optical film |
| CN107230648A (en) * | 2016-03-25 | 2017-10-03 | 上海微电子装备（集团）股份有限公司 | A kind of substrate defects detection means and detection method |
| CN107449778B (en) * | 2016-05-31 | 2018-11-23 | 上海微电子装备（集团）股份有限公司 | A kind of automatic optical detection device and method |
| KR20180010492A (en) * | 2016-07-21 | 2018-01-31 | (주)제이티 | Vision inspection module and device handler having the same |
| CN106733723A (en) * | 2017-03-21 | 2017-05-31 | 湖南师范大学 | Defect detecting device |
-
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| Publication number | Publication date |
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| CN110320209B (en) | 2021-01-29 |
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