WO2019176507A1

WO2019176507A1 - Flat motor

Info

Publication number: WO2019176507A1
Application number: PCT/JP2019/006836
Authority: WO
Inventors: 沙季青木; 稔博秋山; 西森　泰輔; 若林　俊一
Original assignee: パナソニックＩｐマネジメント株式会社
Priority date: 2018-03-13
Filing date: 2019-02-22
Publication date: 2019-09-19
Also published as: JPWO2019176507A1

Abstract

A flat motor (10) is provided with: a movable element (20) comprising a permanent magnet (21); a stator (30) comprising a main surface facing the movable element (20) and a plurality of pattern coils (33) disposed along the main surface; and a control circuit which moves the movable element (20) along the main surface by controlling the current supplied to the plurality of pattern coils (33). When changing the advancing direction of the movable element (20) from a first advancing direction to a second advancing direction intersecting the first advancing direction, the control circuit supplies currents to first pattern coil (33a) among the plurality of pattern coils (33) positioned forward of the first advancing direction of the movable element (20), thereby generating a repulsive force between the first pattern coils (33a) and the permanent magnet (21).

Description

Planar motor

The present invention relates to a planar motor that moves a mover two-dimensionally along a plane.

A planar motor that moves a mover two-dimensionally along a plane is known. As such a planar motor, Patent Document 1 discloses a linear electromagnetic microactuator that two-dimensionally transports a micromachine component of about several millimeters.

Japanese Patent Laid-Open No. 11-299215

In a planar motor, when the mover is moved along a predetermined movement route, the mover may deviate from the movement route. In particular, when the moving direction of the mover changes, the mover may deviate from the moving route due to inertial force.

The present invention provides a planar motor capable of suppressing the mover from moving off the moving route.

A planar motor according to an aspect of the present invention includes a mover having a magnet, a main surface facing the mover, a stator having a plurality of coils arranged along the main surface, and the plurality of A control circuit that moves the mover along the main surface by controlling a current supplied to the coil, and the control circuit changes the moving direction of the mover from the first moving direction to the first moving direction. When changing to the second traveling direction that intersects the traveling direction, at least one of the first control and the second control is performed, and the first control is the first traveling direction of the mover among the plurality of coils. The repulsive force is generated between the first coil and the magnet by supplying a current to the first coil located in front of the first coil, and the second control is the movable element among the plurality of coils. Behind the first direction of travel By supplying a current to the second coil is located, is controlled to generate a suction force between the second coil and the magnet.

The planar motor of the present invention can be prevented from deviating from the mover moving route.

FIG. 1 is a diagram illustrating a schematic configuration of a planar motor according to an embodiment. FIG. 2 is a diagram illustrating a cross-sectional structure of the planar motor according to the embodiment. FIG. 3 is a plan view showing the surface of the circuit board. FIG. 4 is a plan view showing the back surface of the circuit board. FIG. 5 is a first plan view for explaining an operation example 1 of the planar motor according to the embodiment. FIG. 6 is a second plan view for explaining an operation example 1 of the planar motor according to the embodiment. FIG. 7 is a plan view for explaining an operation example 2 of the planar motor according to the embodiment. FIG. 8 is a plan view for explaining an operation example 3 of the planar motor according to the embodiment. FIG. 9 is a first plan view for explaining an operation example 4 of the planar motor according to the embodiment. FIG. 10 is a second plan view for explaining an operation example 4 of the planar motor according to the embodiment. FIG. 11 is a plan view of a planar motor according to a modification of the embodiment. FIG. 12 is a diagram illustrating a cross-sectional structure of a planar motor according to a modification of the embodiment.

Hereinafter, embodiments will be described with reference to the drawings. It should be noted that each of the embodiments described below shows a comprehensive or specific example. The numerical values, shapes, materials, constituent elements, arrangement positions and connecting forms of the constituent elements, and the like shown in the following embodiments are merely examples, and are not intended to limit the present invention. In addition, among the constituent elements in the following embodiments, constituent elements that are not described in the independent claims indicating the highest concept are described as optional constituent elements.

Each figure is a schematic diagram and is not necessarily shown strictly. Moreover, in each figure, the same code | symbol is attached | subjected to the substantially same structure, and the overlapping description may be abbreviate | omitted or simplified.

In the drawings used for explanation in the following embodiments, coordinate axes may be shown. The Z-axis direction in the coordinate axes is, for example, the vertical direction, the Z-axis + side is expressed as an upper side (upper), and the Z-axis-side is expressed as a lower side (lower). In other words, the Z-axis direction is a direction perpendicular to the main surface of the stator. The X-axis direction and the Y-axis direction are directions orthogonal to each other on a plane (horizontal plane) perpendicular to the Z-axis direction. The XY plane is a plane parallel to the main surface of the stator. For example, in the following embodiments, “plan view” means viewing from the Z-axis direction. In the drawings, the N pole of the magnet is described as “N”, and the S pole of the magnet is described as “S”.

(Embodiment)
[Constitution]
Hereinafter, the structure of the planar motor according to the embodiment will be described with reference to the drawings. FIG. 1 is a diagram illustrating a schematic configuration of a planar motor according to an embodiment.

As shown in FIG. 1, the planar motor 10 according to the embodiment includes a mover 20, a stator 30, and a control circuit 40. The planar motor 10 is a linear motor (electromagnetic actuator) that moves the mover 20 two-dimensionally along the main surface 31 a of the stator 30. The flat motor 10 is used, for example, for transporting luggage in a distribution warehouse.

First, the mover 20 will be described. The mover 20 is a moving object in the planar motor 10. The mover 20 has a permanent magnet 21. In FIG. 1, the mover 20 is schematically illustrated, but the mover 20 is specifically a structure to which a permanent magnet 21 is attached. The permanent magnet 21 is, for example, a ferrite magnet, but may be an alnico magnet or a neodymium magnet, and the magnetic material forming the permanent magnet 21 is not particularly limited.

In the example of FIG. 1, the permanent magnet 21 is arranged so that the arrangement direction of the S pole and the N pole intersects the main surface 31a and the S pole is located closer to the main surface 31a than the N pole. However, the permanent magnet 21 may be arranged such that the N pole is located closer to the main surface 31a than the S pole. The mover 20 includes, for example, a plurality of permanent magnets 21 as long as it has at least one permanent magnet 21, and the number of permanent magnets 21 included in the mover 20 is not particularly limited.

The mover 20 may have an electromagnet instead of the permanent magnet 21. In this case, the electromagnet is driven by, for example, a dry battery or a storage battery. The electromagnet may be supplied with power from the pattern coil 33 that does not contribute to the movement of the mover 20. Thus, the needle | mover 20 should just have the permanent magnet 21 or the electromagnet. That is, the needle | mover 20 should just have a magnet.

Next, the stator 30 will be described. The stator 30 is a structure for moving the mover 20 and is fixed to a building or the like. FIG. 2 is a diagram showing a cross-sectional structure of the planar motor 10. As shown in FIG. 2, the stator 30 includes a cover member 31 and a circuit board 32. In FIG. 1, the illustration of the cover member 31 is omitted to clearly show the arrangement of the plurality of pattern coils 33.

The cover member 31 is a plate-like or sheet-like member that covers the circuit board 32. The cover member 31 has a rectangular shape in plan view, but may be other shapes such as a circle. The upper surface of the cover member 31 is a main surface 31a of the stator 30. The main surface 31 a faces the mover 20. The main surface 31a is formed of a material with low magnetic permeability in order to prevent the mover 20 (permanent magnet 21) from being attracted to the stator 30. Specifically, the cover member 31 is formed of a non-metallic material (a material having an insulating property) such as a resin material.

The circuit board 32 is a thin-film (sheet-like) board on which a plurality of thin-film pattern coils 33 are formed on the surface. The planar view shape of the circuit board 32 is rectangular, but may be other shapes such as a circle. The base material of the circuit board 32 is formed of, for example, a resin material such as glass epoxy. The thickness of the circuit board 32 is, for example, about 170 μm to 200 μm.

A plurality of pattern coils 33 are formed on the surface of the circuit board 32. FIG. 3 is a plan view showing the surface of the circuit board 32.

1 and 3, a plurality of pattern coils 33 are arranged on the surface of the circuit board 32 in a matrix. Each of the plurality of pattern coils 33 is a rectangular winding wire whose winding axis is perpendicular to the main surface 31a, but may be other winding shapes such as a circular winding shape. The winding directions of the plurality of pattern coils 33 are the same, but may be different.

One end portion (one end portion located on the inner peripheral side) located near the winding center of the pattern coil 33 is electrically connected to the wiring 36 formed on the back surface of the circuit board 32 by the conductive via structure 35. Is done. FIG. 4 is a plan view showing the back surface of the circuit board 32. The other end located on the outer peripheral side of the pattern coil 33 is electrically connected to the control circuit 40.

The pattern coil 33, the conductive via structure 35, and the wiring 36 are formed of a metal material such as copper, for example. The pattern coil 33 and the wiring 36 are patterned by, for example, etching.

Next, the control circuit 40 will be described. The control circuit 40 is a circuit that controls driving of the plurality of pattern coils 33. Specifically, the control circuit 40 controls the current supplied to the plurality of pattern coils 33 to move the mover 20 along the main surface 31a. As schematically illustrated in FIG. 3, the control circuit 40 includes a control unit 41.

For example, the control unit 41 (a) does not supply power to each of the plurality of pattern coils 33, (b) supplies a direct-current voltage having a first polarity (for example, positive polarity), and (c). Any one of supplying a DC voltage of the second polarity (for example, negative polarity) opposite to the first polarity is performed. The pattern coil 33 to which the first polarity DC voltage is supplied functions as an S-pole electromagnet on the main surface 31a side, for example, and the pattern coil 33 to which the second polarity DC voltage is supplied on the main surface 31a side, for example. Functions as an N-pole electromagnet.

As described above, the control circuit 40 (more specifically, the control unit 41) can supply a DC voltage to each of the plurality of pattern coils 33 and switch the polarity of the DC voltage. In other words, the control circuit 40 can supply a current to each of the plurality of pattern coils 33 and switch the polarity of the current.

Specifically, the control unit 41 is realized by at least one of a processor, a microcomputer, and a circuit. Part or all of the control circuit 40 may be included in the circuit board 32.

[Operation Example 1]
Next, the operation of the planar motor 10 will be described. 5 and 6 are plan views for explaining an operation example 1 of the planar motor 10. As described above, the permanent magnet 21 of the mover 20 is arranged such that the arrangement direction of the S pole and the N pole intersects the main surface 31a, and the S pole is located closer to the main surface 31a than the N pole. 5 and 6, the mover 20 schematically shows only the south pole of the permanent magnet 21.

As shown in FIG. 5, when moving the mover 20 along the first traveling direction, the control circuit 40 forwards the movable element 20 in the first traveling direction (hereinafter simply referred to as “forward”) among the plurality of pattern coils 33. Current is supplied to a plurality of first pattern coils 33a located in the For example, the control circuit 40 supplies a second polarity current to the plurality of first pattern coils 33a. Then, the plurality of first pattern coils 33 a function as electromagnets having the N pole on the side of the mover 20, and an attractive force is generated between the plurality of first pattern coils 33 a and the permanent magnets 21. That is, the control circuit 40 generates an attractive force between the plurality of first pattern coils 33 a and the permanent magnet 21 by supplying current to the plurality of first pattern coils 33 a. As a result, a forward thrust is applied to the mover 20. The control circuit 40 may supply current to at least one first pattern coil 33a.

In addition, the control circuit 40 is parallel to the power supply to the plurality of first pattern coils 33a, and the rear of the mover 20 in the first traveling direction among the plurality of pattern coils 33 (hereinafter also simply referred to as rear). A current is supplied to the plurality of second pattern coils 33b located at the positions. For example, the control circuit 40 supplies a first polarity current to the plurality of second pattern coils 33b. Then, the plurality of second pattern coils 33 b function as electromagnets having the S-pole on the movable element 20 side, and a repulsive force is generated between the plurality of second pattern coils 33 b and the permanent magnets 21. That is, the control circuit 40 generates a repulsive force between the plurality of second pattern coils 33 b and the permanent magnet 21 by supplying current to the plurality of second pattern coils 33 b. As a result, a forward thrust is applied to the mover 20. The control circuit 40 may supply current to at least one second pattern coil 33b.

As described above, the planar motor 10 moves the mover 20 along the first traveling direction using both the first pattern coil 33a and the second pattern coil 33b. The planar motor 10 may move the mover 20 along the first traveling direction by using at least one of the first pattern coil 33a and the second pattern coil 33b.

Next, the operation when the moving direction of the mover 20 is changed from the first moving direction to the second moving direction intersecting the first moving direction will be described with reference to FIG. An inertial force acts on the mover 20 moving along the first traveling direction. For this reason, there is a possibility that the mover 20 may jump out to the position P despite the desire to change the traveling direction to the second traveling direction. The case where the advancing direction changes from the first advancing direction to the second advancing direction is, for example, a case where the mover 20 is driven in a curve.

Therefore, the control circuit 40 supplies current to the plurality of first pattern coils 33a positioned in front of the mover 20 in the first traveling direction among the plurality of pattern coils 33, thereby the plurality of first pattern coils 33a and A repulsive force is generated between the permanent magnets 21. The first pattern coil 33a is an example of a first coil.

Thereby, the control circuit 40 can form an invisible wall due to the repulsive force of the plurality of first pattern coils 33a, and the mover 20 is prevented from jumping to the position P. That is, the planar motor 10 can suppress the mover 20 from deviating from the movement route. In the case where an invisible wall is formed by the repulsive force, the control circuit 40 may supply current to at least one first pattern coil 33a.

In addition, when the control circuit 40 moves the mover 20 along the second traveling direction, the control circuit 40 supplies a current to at least one pattern coil 33c located in front of the mover 20 in the second traveling direction. Supply. As a result, an attractive force is generated between at least one pattern coil 33 c and the permanent magnet 21. The control circuit 40 supplies current to at least one pattern coil 33d located behind the mover 20 in the second traveling direction among the plurality of pattern coils 33 in parallel with power supply to the at least one pattern coil 33c. To do. As a result, a repulsive force is generated between the at least one pattern coil 33 d and the permanent magnet 21. Thus, the mover 20 moves along the second traveling direction using the attractive force generated between the pattern coil 33 c and the permanent magnet 21 and the repulsive force generated between the pattern coil 33 d and the permanent magnet 21. However, it is only necessary to move using at least one of a suction force and a repulsive force.

[Operation example 2]
The control circuit 40 may brake the mover 20 in order to prevent the mover 20 from jumping to the position P. FIG. 7 is a plan view for explaining an operation example 2 of such a planar motor 10.

As shown in FIG. 7, the control circuit 40 supplies the current to the plurality of second pattern coils 33 b located behind the mover 20 in the first traveling direction among the plurality of pattern coils 33. An attractive force is generated between the second pattern coil 33 b and the permanent magnet 21. The second pattern coil 33b is an example of a second coil.

Thereby, the control circuit 40 can brake the mover 20 by the attractive force of the plurality of second pattern coils 33b, and the mover 20 is prevented from jumping to the position P. That is, the planar motor 10 can suppress the mover 20 from deviating from the movement route. In addition, when applying a brake to the needle | mover 20, the control circuit 40 should just supply an electric current to the at least 1 2nd pattern coil 33b.

[Operation Example 3]
Operation example 1 and operation example 2 may be combined. FIG. 8 is a plan view for explaining an operation example 3 of such a planar motor 10.

As shown in FIG. 8, the control circuit 40 supplies a plurality of first pattern coils 33 a located in front of the mover 20 in the first traveling direction among the plurality of pattern coils 33, thereby A repulsive force is generated between the first pattern coil 33 a and the permanent magnet 21. In parallel with this, the control circuit 40 supplies current to the plurality of second pattern coils 33b located behind the mover 20 in the first advancing direction among the plurality of pattern coils 33. An attractive force is generated between the second pattern coil 33 b and the permanent magnet 21. It is an example of a 2nd coil.

Thereby, the control circuit 40 forms an invisible wall by the repulsive force of the plurality of first pattern coils 33a, and brakes the mover 20 by the suction force of the plurality of second pattern coils 33b. it can. Therefore, the mover 20 is prevented from jumping to the position P. That is, the planar motor 10 can suppress the mover 20 from deviating from the movement route. In the operation example 3, the control circuit 40 may supply current to at least one first pattern coil 33a and supply current to at least one second pattern coil 33b.

[Operation Example 4]
When the movement route of the mover 20 is determined in advance, the control circuit 40 repels force between the plurality of pattern coils 33 along the movement route of the mover 20 and the permanent magnet 21. It is also possible to supply a current that causes FIG. 9 is a plan view for explaining an operation example 4 of such a planar motor 10.

As shown in FIG. 9, in the operation example 4, the plurality of pattern coils 33 include a first coil group 33f and a second coil group 33g.

The first coil group 33f includes a plurality of third pattern coils 33e. The first coil group 33 f is located on each of both sides of the movement route of the plurality of pattern coils 33. The side here means a direction intersecting with the extending direction of the moving route (in other words, the traveling direction of the mover 20). That is, the plurality of third pattern coils 33 e are arranged side by side along the movement route of the mover 20 among the plurality of pattern coils 33. In addition, it is not essential that the first coil group 33f is located on each of both sides of the moving route, and it is only necessary that the first coil group 33f be located on at least one side of the moving route.

The control circuit 40 supplies the first coil group 33f with a current that generates a repulsive force with the permanent magnet 21. This repulsive force acts on the mover 20 in a direction intersecting the traveling direction of the mover 20, and can prevent the mover 20 from deviating from the movement route. The first coil group 33f functions as a guide coil for guiding the mover 20 along the movement route.

The second coil group 33g includes a plurality of pattern coils 33 for moving the mover 20 along the movement route. The method of driving the second coil group 33g by the control circuit 40 is the same as in the first to third operation examples.

The control circuit 40 supplies, for example, a current that causes a repulsive force between the first coil group 33f and the permanent magnet 21 in advance before the mover 20 starts moving, and in this state, Start moving. That is, the control circuit 40 starts moving the mover 20 along the movement route in a state where a current that generates a repulsive force between the permanent magnet 21 and all of the plurality of third pattern coils 33e is supplied. Thereby, the planar motor 10 can suppress that the needle | mover 20 remove | deviates from a movement route by simple control.

The control circuit 40 may sequentially supply current to some of the third pattern coils 33e as the mover 20 moves. FIG. 10 is a plan view for explaining an operation example of such a planar motor 10.

For example, when the mover 20 is located at the position P1 in the movement route, the control circuit 40 is selective to the third pattern coil (1) located on the side of the mover 20 in the first coil group 33f. To supply current.

When the position of the mover 20 changes from the position P1 to the position P2, the control circuit 40 selectively supplies current to the third pattern coil (2) located on the side of the mover 20 in the first coil group 33f. To do. Similarly, the control circuit 40 selectively supplies current to the third pattern coil (3) when the mover 20 is located at the position P3, and when the mover 20 is located at the position P4, A current is selectively supplied to the third pattern coil (4).

As described above, the control circuit 40 includes a part of the third pattern coils located on the side of the mover 20 among the plurality of third pattern coils 33e as the mover 20 moves along the movement route. A current that selectively generates a repulsive force with the permanent magnet 21 is supplied to 33e. Thereby, the planar motor 10 can suppress the mover 20 from moving out of the moving route with lower power consumption than when supplying current to all of the plurality of third pattern coils 33e.

The control circuit 40 starts moving the mover 20 along the movement route in a state where a current that generates a repulsive force between the permanent magnet 21 and all of the plurality of third pattern coils 33e is supplied. Thereafter, in accordance with the movement of the mover 20, the supply of current may be turned off in order from the third pattern coil 33e located in the region through which the mover 20 has passed. That is, the control circuit 40 may sequentially turn off the supply of current to the third pattern coil 33e that does not need to generate a repulsive force with the permanent magnet 21. Thereby, the planar motor 10 can suppress the mover 20 from deviating from the movement route with lower power consumption than when the current is continuously supplied to all of the plurality of third pattern coils 33e.

[Modification]
Although the permanent magnet 21 included in the mover 20 has a flat cylindrical shape, the shape and size of the permanent magnet 21 and the mounting posture of the mover 20 on the main body are not particularly limited. For example, the permanent magnet 21 may be annular. FIG. 11 is a plan view of a planar motor according to such a modification, and FIG. 12 is a diagram illustrating a cross-sectional structure of the planar motor according to the modification.

11 and 12, the planar motor 10a according to the modification includes a mover 20a, a stator 30, and a control circuit 40 (not shown in FIGS. 11 and 12).

The permanent magnet 21a of the mover 20a has an annular shape. The permanent magnet 21a has an N pole on the inside and an S pole on the outside. That is, the permanent magnet 21a has a structure in which the S pole and the N pole are arranged along the radial direction between the inner side surface and the outer side surface. The permanent magnet 21a is attached to the main body of the mover 20 so that the S pole and the N pole are along the main surface 31a.

Such a planar motor 10a can also perform the operations shown in the above operation examples 1 to 4. As shown in FIG. 12, the permanent magnet 21 a has a total of four magnetic poles, that is, two S poles and two N poles, opposed to the main surface 31 a of the stator 30 in a cross-sectional view. Then, the stator 30 can move the mover 20 by generating an attractive force and a repulsive force between each of the four magnetic poles. That is, the planar motor 10a can improve the thrust to the mover 20.

[Effects]
As described above, the flat motor 10 is fixed to the movable element 20 having the permanent magnet 21, the main surface 31a facing the movable element 20, and the plurality of pattern coils 33 arranged along the main surface 31a. A child 30 and a control circuit 40 that moves the mover 20 along the main surface 31a by controlling the current supplied to the plurality of pattern coils 33 are provided. The control circuit 40 performs at least one of the first control and the second control when changing the traveling direction of the mover 20 from the first traveling direction to the second traveling direction intersecting the first traveling direction. The first control supplies current between the first pattern coil 33a and the permanent magnet 21 by supplying current to the first pattern coil 33a that is located in front of the mover 20 in the first traveling direction among the plurality of pattern coils 33. This is a control that generates a repulsive force. In the second control, a current is supplied to the second pattern coil 33b located behind the movable element 20 in the first traveling direction among the plurality of pattern coils 33, so that the second control coil 33b and the permanent magnet 21 are interposed. This is a control that generates a suction force. The permanent magnet 21 is an example of a magnet, and the pattern coil 33 is an example of a coil. The first pattern coil 33a is an example of a first coil, and the second pattern coil 33b is an example of a second coil.

Such a planar motor 10 can suppress the mover 20 from jumping forward in the first traveling direction. That is, the planar motor 10 can suppress the mover 20 from deviating from the movement route.

Further, for example, the control circuit 40 includes a plurality of third pattern coils 33e arranged along the movement route of the mover 20 among the plurality of pattern coils 33, and a plurality of third patterns positioned on the side of the movement route. A current that generates a repulsive force with the permanent magnet 21 is supplied to the coil 33e.

Such a planar motor 10 can suppress the mover 20 from moving off the moving route.

Further, for example, the control circuit 40 includes a part of the third pattern located on the side of the mover 20 among the plurality of third pattern coils 33e as the mover 20 moves along the movement route. A current that selectively generates a repulsive force between the coil 33e and the permanent magnet 21 is supplied to the coil 33e.

Such a planar motor 10 suppresses the mover 20 from moving off the moving route with lower power consumption than when the planar motor 10 supplies current to all of the plurality of third pattern coils 33e. it can.

Also, for example, the control circuit 40 starts moving the mover 20 along the movement route in a state where a current that generates a repulsive force between the plurality of third pattern coils 33e and the permanent magnet 21 is supplied.

Such a planar motor 10 can suppress the mover 20 from moving out of the moving route by simple control.

For example, the arrangement direction of the S pole and the N pole of the permanent magnet 21 intersects the main surface 31a.

Such a planar motor 10 can suppress the mover 20 having the permanent magnet 21 in which the arrangement direction of the S pole and the N pole intersects the main surface 31a from being removed from the moving route.

For example, in the planar motor 10a, the mover 20a has a permanent magnet 21a, and the arrangement direction of the S pole and the N pole of the permanent magnet 21a is along the main surface 30a.

Such a planar motor 10a can suppress the mover 20a having the permanent magnet 21a in which the arrangement direction of the S-pole and the N-pole is along the main surface 31a from deviating from the moving route.

Also, for example, the stator 30 includes a circuit board 32, and each of the plurality of pattern coils 33 is a pattern coil that is patterned on the circuit board 32. The circuit board 32 is an example of a board.

In such a planar motor 10, the stator 30 can be easily reduced in size and thickness.

Further, for example, the plurality of pattern coils 33 are arranged in a matrix along the main surface 31a.

Such a planar motor 10 can move the mover 20 by a plurality of pattern coils 33 arranged in a matrix.

(Other embodiments)
The planar motor according to the embodiment has been described above, but the present invention is not limited to the above embodiment.

For example, in the above embodiment, the stator has a thin film pattern coil, but the coil provided in the stator is not limited to the pattern coil. The stator may include a plurality of winding coils instead of the pattern coil. Moreover, in the said embodiment, although the some pattern coil was arrange | positioned at matrix form, you may arrange | position by layouts other than a matrix form. For example, when the pattern coil has a winding shape along a hexagon, the plurality of pattern coils may be arranged in a honeycomb shape.

Also, the laminated structure shown in the schematic cross-sectional view of the stator of the above embodiment is an example. The planar motor may include a stator having another laminated structure that can realize the characteristic function of the present invention. The planar motor may include, for example, a stator in which another layer is provided between layers of the stacked structure of the above embodiment as long as the same function as the stacked structure described in the above embodiment can be realized. .

In the above embodiment, the main material constituting each layer of the laminated structure of the stator is illustrated, but each layer of the laminated structure of the stator has the same function as the laminated structure of the above embodiment. Other materials may be included to the extent that can be realized. For example, a magnetic layer may be provided between the cover member and the circuit board. The magnetic layer is formed of a material such as iron oxide, chromium oxide, cobalt, or ferrite, for example. According to such a magnetic layer, the amount of magnetic flux contributing to the movement of the mover can be improved. That is, the magnetic flux generated by the pattern coil can be used efficiently.

In the above embodiment, the components such as the control unit may be configured by dedicated hardware or may be realized by executing a software program suitable for each component. Each component may be realized by a program execution unit such as a CPU or a processor reading and executing a software program recorded on a recording medium such as a hard disk or a semiconductor memory.

In addition, it is realized by variously conceiving various modifications conceived by those skilled in the art for each embodiment, or by arbitrarily combining the components and functions in each embodiment without departing from the spirit of the present invention. This form is also included in the present invention. For example, the present invention may be realized as a method for controlling a planar motor.

10, 10a

planar motor

20,

20a mover

21, 21a permanent magnet (magnet)
30 Stator 31a Main surface 32 Circuit board (board)
33 Pattern coil (coil)
33a First pattern coil (first coil)
33b Second pattern coil (second coil)
33e Third pattern coil (third coil)
40 Control circuit

Claims

A mover having a magnet;
A main surface facing the mover, and a stator having a plurality of coils arranged along the main surface;
A control circuit that moves the mover along the main surface by controlling the current supplied to the plurality of coils;
The control circuit performs at least one of the first control and the second control when changing the traveling direction of the mover from the first traveling direction to the second traveling direction intersecting the first traveling direction,
The first control supplies a repulsive force between the first coil and the magnet by supplying a current to a first coil located in front of the first moving direction of the mover among the plurality of coils. Control
In the second control, an attractive force is applied between the second coil and the magnet by supplying a current to a second coil located behind the mover in the first traveling direction among the plurality of coils. Planar motor that is the control to be generated.
The control circuit includes a plurality of third coils arranged along a movement route of the mover among the plurality of coils, and a plurality of third coils located on the side of the movement route are connected to the magnet. The planar motor according to claim 1, wherein a current that generates a repulsive force between the planar motors is supplied.
The control circuit selectively selects a part of the third coils located on the side of the mover among the plurality of third coils as the mover moves along the movement route. The planar motor according to claim 2, wherein a current that generates a repulsive force is supplied to the magnet.
The control circuit starts moving the mover along the movement route in a state where a current that generates a repulsive force between the plurality of third coils and the magnet is supplied to the plurality of third coils. Planar motor.
The mover has a permanent magnet as the magnet,
The flat motor according to any one of claims 1 to 4, wherein an arrangement direction of the S pole and the N pole of the permanent magnet intersects the main surface.
The mover has a permanent magnet as the magnet,
The planar motor according to claim 1, wherein an arrangement direction of the S pole and the N pole of the permanent magnet is along the main surface.
The stator includes a substrate,
The planar motor according to any one of claims 1 to 6, wherein each of the plurality of coils is a pattern coil formed in a pattern on the substrate.
The flat motor according to any one of claims 1 to 7, wherein the plurality of coils are arranged in a matrix along the main surface.