WO2019058735A1

WO2019058735A1 - Planar motor

Info

Publication number: WO2019058735A1
Application number: PCT/JP2018/027226
Authority: WO
Inventors: 沙季青木; 稔博秋山; 西森　泰輔
Original assignee: パナソニックＩｐマネジメント株式会社
Priority date: 2017-09-19
Filing date: 2018-07-20
Publication date: 2019-03-28
Also published as: JPWO2019058735A1

Abstract

This planar motor is provided with: a mover having a permanent magnet; a stator substrate (32) having a first main surface (32a) facing the mover, and a plurality of thin film pattern coils (33) that are disposed on the first main surface (32a); and a control circuit that controls the driving of the plurality of pattern coils (33). Each of the plurality of pattern coils (33) is wound in a hexagon shape, and the first primary surface (32a) is filled with the plurality of pattern coils (33) in a planar manner.

Description

Flat motor

The present invention relates to a planar motor that moves a mover two-dimensionally along a plane.

A planar motor is known which moves a mover two-dimensionally along a plane. As such a planar motor, Patent Document 1 discloses a motor device that enables reduction in cost due to downsizing and efficiency of assembly work, and is excellent in controllability.

JP 2001-037201 A

In a planar motor in which the mover is moved on the stator, the mover can not be moved with high accuracy if there is a deviation in magnetic flux density in the stator.

The present invention provides a planar motor in which the uniformity of the magnetic flux density distribution in the stator is improved.

A planar motor according to one aspect of the present invention includes a mover having a magnet, a first main surface facing the mover, and a plurality of thin film pattern coils disposed on the first main surface. And a control circuit for controlling driving of the plurality of pattern coils, each of the plurality of pattern coils has a winding shape along a triangle or a hexagon, and the first main surface The plurality of pattern coils are flat-filled.

According to the present invention, a planar motor is realized in which the uniformity of the magnetic flux density distribution in the stator is improved.

FIG. 1 is a plan view showing a schematic configuration of a planar motor according to the embodiment. FIG. 2 is a schematic cross-sectional view of the planar motor according to the embodiment. FIG. 3 is a schematic cross-sectional view showing an example of arrangement of the S pole and the N pole of the permanent magnet of the mover along the main surface of the stator. FIG. 4 is a plan view showing an example of the arrangement of permanent magnets when the mover has two permanent magnets. FIG. 5 is a plan view showing a first main surface of the stator substrate. FIG. 6 is a plan view showing the second main surface of the stator substrate. FIG. 7 is a diagram showing an example in which the mover is moved by suction. FIG. 8 is a view showing an example in which the mover is moved by the repulsive force. FIG. 9 is a diagram showing an example in which the mover is moved by suction and repulsion. FIG. 10 is a first view showing details of the shape of the pattern coil. FIG. 11 is a second view showing the details of the shape of the pattern coil. FIG. 12 is a view showing the shape of the pattern coil according to the first modification. FIG. 13 is a view showing the shape of the pattern coil according to the second modification. FIG. 14 is a view showing the shape of the pattern coil according to the third modification. FIG. 15 is a diagram showing simulation results of the magnetic flux density distribution in the stator substrate according to the comparative example. FIG. 16 is a diagram showing simulation results of the magnetic flux density distribution in the stator substrate according to the embodiment. FIG. 17 is a diagram showing simulation results of the magnetic flux density distribution in the stator substrate according to the first modification. FIG. 18 is a diagram showing simulation results of the magnetic flux density distribution in the stator substrate according to the second modification. FIG. 19 is a diagram showing simulation results of the magnetic flux density distribution in the stator substrate according to the third modification. FIG. 20 is a diagram showing a simulation result of the maximum value of in-plane magnetic flux density. FIG. 21 is a diagram showing simulation results of the average value of in-plane magnetic flux density.

Embodiments will be described below with reference to the drawings. The embodiments described below are all inclusive or specific examples. The numerical values, shapes, materials, components, arrangement positions and connection forms of the components, and the like described in the following embodiments are merely examples, and are not intended to limit the present invention. Moreover, among the components in the following embodiments, components not described in the independent claims are described as optional components.

Each figure is a schematic view, and is not necessarily illustrated strictly. Further, in the drawings, substantially the same configurations are denoted by the same reference numerals, and overlapping descriptions may be omitted or simplified.

Further, in the drawings used for the description in the following embodiments, coordinate axes may be shown. The Z-axis direction in the coordinate axes is, for example, the vertical direction, the Z-axis + side is expressed as upper side (upper), and the Z-axis-side is expressed as lower side (lower). The Z-axis direction is, in other words, a direction perpendicular to the main surface of the stator. The X-axis direction and the Y-axis direction are directions orthogonal to each other on a plane (horizontal plane) perpendicular to the Z-axis direction. The XY plane is a plane parallel to the main surface of the stator. For example, in the following embodiment, “plan view” means viewing from the Z-axis direction. Further, in the drawings, the north pole of the magnet is described as "N", and the south pole of the magnet is described as "S".

Embodiment
[Constitution]
Hereinafter, the configuration of the planar motor according to the embodiment will be described using the drawings. FIG. 1 is a plan view showing a schematic configuration of a planar motor according to the embodiment. FIG. 2 is a schematic cross-sectional view of the planar motor according to the embodiment.

As shown in FIGS. 1 and 2, the planar motor 10 according to the embodiment includes a mover 20, a stator 30, and a control circuit 40. The planar motor 10 is a linear motor (electromagnetic actuator) that moves the mover 20 two-dimensionally along the main surface 31 a of the stator 30.

First, the mover 20 will be described. The mover 20 is a moving object in the planar motor 10. The mover 20 has a permanent magnet 21. The permanent magnet 21 is, for example, a ferrite magnet, but may be an alnico magnet, a neodymium magnet, or the like, and the magnetic material forming the permanent magnet 21 is not particularly limited.

In the example of FIG. 2, the permanent magnet 21 is arranged such that the arrangement direction of the S pole and the N pole intersects the main surface 31 a and the N pole is positioned closer to the main surface 31 a than the S pole. However, the permanent magnet 21 may be arranged such that the south pole is closer to the main surface 31 a than the north pole. The permanent magnet 21 may be disposed so that the arrangement direction of the S pole and the N pole of the permanent magnet 21 intersects the major surface 31 a.

Further, the permanent magnet 21 may be arranged such that the arrangement direction of the S pole and the N pole of the permanent magnet 21 is along the main surface 31 a. FIG. 3 is a schematic cross-sectional view showing an arrangement example in which the arrangement direction of the S pole and the N pole of the permanent magnet 21 of the mover 20 is along the main surface 31 a.

The mover 20 only needs to have at least one permanent magnet 21, and the number of permanent magnets 21 included in the mover 20 is not particularly limited. For example, in the case where the mover 20 has two permanent magnets 21, each of the two permanent magnets 21 is arranged such that the arrangement direction of the S pole and the N pole is along the main surface 31a, as shown in FIG. Be placed. FIG. 4 is a plan view showing an example of the arrangement of permanent magnets when the mover 20 has two permanent magnets 21.

The mover 20 may have an electromagnet in place of the permanent magnet 21. In this case, the electromagnet is driven by, for example, a dry cell or a storage battery. The electromagnet may be supplied with power from the pattern coil 33 that does not contribute to the movement of the mover 20. Thus, the mover 20 may have the permanent magnet 21 or the electromagnet. That is, the mover 20 only needs to have a magnet.

Next, the stator 30 will be described. The stator 30 is a structure for moving the mover 20, and is fixed to a building or the like. The stator 30 has a cover member 31 and a stator substrate 32.

The cover member 31 is a plate-like or sheet-like member covering the stator substrate 32. The plan view shape of the cover member 31 is a rectangle, but may be another shape such as a circle. The upper surface of the cover member 31 is the main surface 31 a of the stator 30. The main surface 31 a faces the mover 20. The main surface 31 a is formed of a material having a low magnetic permeability in order to suppress adsorption of the mover 20 (permanent magnet 21) to the stator 30. Specifically, the cover member 31 is formed of a nonmetal material such as a resin material. That is, the cover member 31 is formed of an insulating material. In addition, if the cover member 31 is formed of a material with small surface friction, the thrust of the mover can be increased.

The stator substrate 32 is a thin film (sheet) substrate on which a plurality of thin film pattern coils 33 are formed. The planar view shape of the stator substrate 32 is rectangular, but may be another shape such as circular. The base material of the stator substrate 32 is, for example, a resin material such as glass epoxy. The stator substrate 32 may be a composite substrate, a polyimide substrate, a ceramic substrate or the like. The thickness of the stator substrate 32 is, for example, about 170 μm to 200 μm.

The stator substrate 32 has a first main surface 32 a facing the mover 20 and a second main surface 32 b opposite to the first main surface 32 a. A plurality of pattern coils 33 are disposed on the first main surface 32 a of the stator substrate 32. FIG. 5 is a plan view showing the first main surface 32 a of the stator substrate 32. 5 is a schematic view, and the number of the plurality of pattern coils 33 shown in FIG. 5 is an example.

As shown in FIG. 5, a plurality of pattern coils 33 are spread over the first main surface 32 a of the stator substrate 32. Each of the plurality of pattern coils 33 has a winding shape along a hexagon (more specifically, a regular hexagon or a substantially regular hexagon), and a winding axis is along a direction perpendicular to the first major surface 32 a. The winding shape is, in other words, a spiral shape. The plurality of pattern coils 33 have substantially the same shape and size. The wire width of the wire forming the pattern coil 33 and the distance between the wires in the pattern coil 33 are, for example, 200 μm.

In the first major surface 32a, the plurality of pattern coils 33 are flat-filled. Here, the planar filling means that the plurality of pattern coils 33 are spread almost without a gap. When a plurality of pattern coils 33 are flat-filled, the distance between adjacent pattern coils 33 (for example, the distance P1 in FIG. 5) is equal to the distance between wires in pattern coil 33, for example. It may be within 10 times the interval.

In the first main surface 32 a, a plurality of pattern coils 33 are planarly filled in a honeycomb shape. In other words, assuming that the plurality of regular hexagonal regions are flat-filled on the first major surface 32a, the pattern coil 33 is disposed in each of the plurality of regular hexagonal regions and wound along the regular hexagonal region. It has a shape.

Thus, if the plurality of pattern coils 33 are flat-filled on the first main surface 32a, the region of weak magnetic force on the first main surface 32a is reduced, and the uniformity of the magnetic flux density distribution on the first main surface 32a is reduced. Can be improved. Since the load on the control circuit 40 is reduced if the uniformity of the magnetic flux density distribution is enhanced, the control circuit 40 can drive the pattern coil 33 stably. That is, the planar motor 10 can move the mover 20 stably.

The plurality of pattern coils 33 are electrically connected to the control circuit 40. In the planar motor 10, a wire for electrically connecting the plurality of pattern coils 33 and the control circuit 40 is disposed on the second main surface 32b. FIG. 6 is a plan view showing the second main surface 32 b of the stator substrate 32. 6, unlike FIG. 2 and FIG. 3, the control circuit 40 is arrange | positioned at the side of the stator board | substrate 32. As shown in FIG.

As shown in FIG. 6, the stator substrate 32 has a first wire 36a and a second wire 36b disposed on the second major surface 32b. The first wiring 36 a and the second wiring 36 b are disposed on the second major surface 32 b for each of the plurality of pattern coils 33.

The first wiring 36 a electrically connects one end of the pattern coil 33 located on the outer peripheral side to the control circuit 40. The first wiring 36 a is, for example, drawn out to the end of the stator substrate 32. More specifically, one end of the pattern coil 33 is electrically connected to the first wiring 36a by the first conductive via structure 35a. That is, the stator substrate 32 has a first conductive via structure 35 a that electrically connects one end of the pattern coil 33 to the first wiring 36 a.

The second wiring 36 b electrically connects the other end located on the inner peripheral side of the pattern coil 33 and the control circuit 40. The second wiring 36 b is, for example, drawn out to the end of the stator substrate 32. More specifically, the other end of the pattern coil 33 is electrically connected to the second wiring 36 b by the second conductive via structure 35 b. That is, the stator substrate 32 has a second conductive via structure 35 b electrically connecting the other end of the pattern coil 33 and the second wiring 36 b.

Thus, if the first wiring 36a and the second wiring 36b for electrically connecting the pattern coil 33 and the control circuit 40 are arranged on the second main surface 32b, a plurality of pattern coils are formed on the first main surface 32a. It is not necessary to arrange the first wiring 36 a and the second wiring 36 b between 33. For this reason, intervals of the plurality of pattern coils 33 can be narrowed and concentrated on the first main surface 32a. As a result, the uniformity of the magnetic flux density distribution in the first major surface 32a can be improved. The first wiring 36a and the second wiring 36b may be disposed on the first major surface 32a.

The pattern coil 33, the first conductive via structure 35a, the second conductive via structure 35b, the first wiring 36a, and the second wiring 36b described above are formed of, for example, a metal material such as copper. The pattern coil 33, the first wiring 36a, and the second wiring 36b are formed by, for example, etching, but may be drawn directly by silver ink or the like.

Next, the control circuit 40 will be described. The control circuit 40 is a circuit that controls the driving of the plurality of pattern coils 33. As schematically shown in FIG. 6, the control circuit 40 has a control unit 41. Although the control circuit 40 (the control unit 41) is illustrated to control the drive of one pattern coil 33 in FIG. 6, the control circuit 40 (the control unit 41) actually controls the drive of the plurality of pattern coils 33.

The control unit 41 may, for example, (a) supply no power, (b) supply a DC voltage of a first polarity (for example, positive polarity) to each of the plurality of pattern coils 33; And (d) supplying a DC voltage of a second polarity (eg, negative polarity) opposite to the first polarity. The pattern coil 33 to which the DC voltage of the first polarity is supplied functions as an electromagnet of the S pole on the main surface 31a side, for example, and the pattern coil 33 to which the DC voltage of the second polarity is supplied is, for example, the main surface The 31a side functions as an N pole electromagnet.

As described above, the control circuit 40 (the control unit 41) can supply a DC voltage to each of the plurality of pattern coils 33, and can switch the polarity of the DC voltage. It is not essential to switch the polarity of the DC voltage, as long as the control circuit 40 can turn on and off at least the supply of the DC voltage.

Specifically, the control unit 41 is realized by at least one or more of a processor, a microcomputer, and a circuit. In FIG. 2, the control circuit 40 is disposed below the stator substrate 32, but may be disposed laterally of the stator substrate 32.

[Operation]
Next, the operation of the planar motor 10 will be described. In the planar motor 10, the control circuit 40 moves the mover 20 by, for example, a suction force generated between the permanent magnet 21 and the pattern coil 33. FIG. 7 is a view showing an example in which the mover 20 is moved by suction.

As shown in FIG. 7, when moving the mover 20 having the permanent magnet 21 whose N pole faces the main surface 31 a in the X-axis + direction, the control circuit 40 controls the mover 20 of the plurality of pattern coils 33. The direct current voltage of the first polarity is supplied to the pattern coil 33 located on the X axis + direction side of As a result, the pattern coil 33 to which the DC voltage of the first polarity is supplied functions as an S-pole electromagnet on the main surface 31 a side, and a suction force is generated between the pattern coil 33 and the permanent magnet 21. The mover 20 moves in the X axis + direction by such a suction force.

In order to move one mover 20, a DC voltage of the first polarity may be supplied to at least one pattern coil 33. However, in FIG. A direct current voltage of the first polarity is simultaneously supplied to two or more pattern coils 33 located. Thereby, a relatively large thrust can be applied to the mover 20.

In addition, the control circuit 40 may move the mover 20 by the repulsive force generated between the permanent magnet 21 and the pattern coil 33. FIG. 8 is a view showing an example in which the mover 20 is moved by the repulsive force.

As shown in FIG. 8, when moving the mover 20 having the permanent magnet 21 whose N pole faces the main surface 31 a in the X-axis + direction, the control circuit 40 controls the mover 20 among the plurality of pattern coils 33. The direct current voltage of the second polarity is supplied to the pattern coil 33 located on the X axis −direction side of As a result, the pattern coil 33 to which the direct current voltage of the second polarity is supplied functions as an electromagnet of N pole on the main surface 31 a side, and a repulsive force is generated between the pattern coil 33 and the permanent magnet 21. The mover 20 moves in the X axis + direction by such a repulsive force.

In order to move one mover 20, a DC voltage of the second polarity may be supplied to at least one pattern coil 33. However, in FIG. A direct current voltage of the second polarity is simultaneously supplied to two or more pattern coils 33 located. Thereby, a relatively large thrust can be applied to the mover 20. Note that the size of one permanent magnet 21 in plan view is, for example, larger than the size of one pattern coil 33.

In addition, the control circuit 40 may move the mover 20 by the attractive force generated between the permanent magnet 21 and the pattern coil 33 and the repulsive force generated between the permanent magnet 21 and the pattern coil 33. FIG. 9 is a diagram showing an example in which the mover 20 is moved by suction and repulsion.

As shown in FIG. 9, when moving the mover 20 having the permanent magnet 21 whose N pole faces the main surface 31 a in the X-axis + direction, the control circuit 40 controls the mover 20 among the plurality of pattern coils 33. The direct current voltage of the first polarity is supplied to the pattern coil 33 located on the X axis + direction side of As a result, the pattern coil 33 to which the DC voltage of the first polarity is supplied functions as an S-pole electromagnet on the main surface 31 a side, and a suction force is generated between the pattern coil 33 and the permanent magnet 21.

Further, the control circuit 40 supplies a DC voltage of the second polarity to the pattern coil 33 located on the X axis negative direction side of the mover 20 among the plurality of pattern coils 33. As a result, the pattern coil 33 to which the direct current voltage of the second polarity is supplied functions as an electromagnet of N pole on the main surface 31 a side, and a repulsive force is generated between the pattern coil 33 and the permanent magnet 21. Thereby, the control circuit 40 can move the mover 20 in the X-axis + direction by simultaneously using the suction force and the repulsive force.

In order to move one mover 20, a DC voltage of the first polarity is supplied to at least one pattern coil 33, and a DC voltage of the second polarity is supplied to at least one pattern coil 33. It should be done. However, in FIG. 9, DC voltages of the first polarity are simultaneously supplied to two or more pattern coils 33 located on the X axis + direction side of mover 20, and on the X axis −direction side of mover 20. A direct current voltage of the second polarity is simultaneously supplied to two or more pattern coils 33 located. Thereby, a relatively large thrust can be applied to the mover 20.

As described above, the planar motor 10 moves the mover 20 using the plurality of pattern coils 33 of the stator 30. In the flat motor 10, the size and thickness of the stator 30 can be reduced more easily than a flat motor using winding coils.

[Details of pattern coil shape]
Each of the plurality of pattern coils 33 has, for example, a winding shape along a hexagon as shown in FIG. FIG. 10 is a first view showing details of the shape of the pattern coil 33. As shown in FIG. In this case, in the pattern coil 33, the angles formed by the two wires forming the corner are all 120 °. In this case, a circle is inscribed in the innermost wiring pattern, and a circle is circumscribed in the outermost wiring pattern.

Further, each of the plurality of pattern coils 33 may have a winding shape in which the corner portion is positioned on the Archimedean spiral. FIG. 11 is a second view showing details of the shape of the pattern coil 33. As shown in FIG. In this case, the corner of the pattern coil 33 is positioned on a spiral represented by r (θ) = r0 + pθ (r0, p is a constant) when the center of the pattern coil 33 is at the center of polar coordinates.

If the shape shown in FIG. 11 is adopted for the pattern coil 33, the uniformity of the magnetic flux density distribution is slightly improved as compared with the case where the shape shown in FIG. 10 is adopted.

[Modification 1]
The shape of the pattern coil 33 that can be flat-filled on the first major surface 32 a is not limited to the winding shape along the hexagon. For example, the pattern coil 33 may have a winding shape along a triangle. FIG. 12 is a view showing the shape of the pattern coil according to the first modification. In the following description, descriptions will be made focusing on the shape and arrangement of the pattern coil 133. The configuration other than the shape and arrangement of the pattern coil 133 is the same as that of the above embodiment, and therefore the description thereof is omitted.

A plurality of pattern coils 133 are spread over the first main surface 132a of the stator substrate 132 shown in FIG. Each of the plurality of pattern coils 133 has a winding shape along a triangle, and a winding axis is along a direction perpendicular to the first major surface 132a. More specifically, each of the plurality of pattern coils 133 has a winding shape along an equilateral triangle or a substantially equilateral triangle. The plurality of pattern coils 133 have the same shape and size. The wiring width of the wiring forming the pattern coil 133 and the average of the distance between the wirings in the pattern coil 133 are, for example, 200 μm. In addition, the space | interval of wiring may change somewhat with places.

In the first main surface 132a, the plurality of pattern coils 133 are flat-filled. For example, six pattern coils 133 are spread in a hexagonal area A1 on the first major surface 132a. More specifically, when the regular hexagonal area A1 on the first major surface 132a is divided into six areas by diagonal lines, winding shapes along the areas are provided in each of the six regular triangular areas obtained by the division. The pattern coil 133 is disposed. When a plurality of pattern coils 133 are flat-filled, the distance between adjacent pattern coils 133 is, for example, equal to the distance between wires in pattern coil 133, but it is within 10 times the distance between wires. Good.

Thus, if the plurality of pattern coils 133 are flat-filled on the first main surface 132a, the region of weak magnetic force on the first main surface 132a is reduced, and the uniformity of the magnetic flux density distribution on the first main surface 132a is reduced. Can be improved. Since the load on the control circuit 40 is reduced if the uniformity of the magnetic flux density distribution is enhanced, the control circuit 40 can drive the pattern coil 33 stably. That is, the planar motor 10 can move the mover 20 stably. Further, when the six pattern coils 133 have a size corresponding to one pattern coil 33, the stator substrate 132 has higher resolution than the stator substrate 32. Therefore, the stator 30 having the stator substrate 132 can move the mover 20 with high accuracy.

[Modification 2]
The pattern coil 33 may have a winding shape along a square. FIG. 13 is a diagram showing the shape of the pattern coil according to the second modification. In the following description, the description will be made focusing on the shape and arrangement of the pattern coil 233. The configuration other than the shape and arrangement of the pattern coil 233 is the same as that of the above-described embodiment, and hence the description thereof is omitted.

A plurality of pattern coils 233 are spread over the first main surface 232a of the stator substrate 232 shown in FIG. Each of the plurality of pattern coils 233 has a winding shape along a square, and a winding axis is along a direction perpendicular to the first major surface 232a. More specifically, each of the plurality of pattern coils 233 has a winding shape along a square or a substantially square, but may have a winding shape along a rectangle. The plurality of pattern coils 233 have the same shape and size. The wiring width of the wiring forming the pattern coil 233 and the distance between the wirings in the pattern coil 233 are, for example, 200 μm. In addition, the space | interval of wiring may change somewhat with places.

In the first major surface 232a, the plurality of pattern coils 233 are flat-filled. For example, the plurality of pattern coils 233 are arranged in a matrix. In the case where a plurality of pattern coils 233 are flat-filled, the distance between adjacent pattern coils 233 is equal to, for example, the distance between wires in pattern coil 233, but within 10 times the distance between wires. Good.

Thus, if the plurality of pattern coils 233 are flat-filled on the first main surface 232a, the region of weak magnetic force on the first main surface 232a is reduced, and the uniformity of the magnetic flux density distribution on the first main surface 232a is reduced. Can be improved. Therefore, the stator 30 having the stator substrate 232 can move the mover 20 stably.

[Modification 3]
The pattern coil 33 may have a circular winding shape. FIG. 14 is a view showing the shape of the pattern coil according to the third modification. In the following description, the description will be made focusing on the shape of the pattern coil 333. The configuration other than the shape and arrangement of the pattern coil 333 is the same as that of the above-described embodiment, and therefore the description thereof is omitted.

A plurality of pattern coils 333 are spread over the first main surface 332 a of the stator substrate 332 shown in FIG. 14. Each of the plurality of pattern coils 333 has a circular winding shape, and a winding axis is along a direction perpendicular to the first major surface 332 a. Each of the plurality of pattern coils 333 is, for example, an Archimedean spiral determined based on the above-mentioned equation of r (θ) = r0 + pθ (r0, p is a constant). The plurality of pattern coils 333 have the same shape and size. The wire width of the wire forming the pattern coil 333 and the distance between the wires in the pattern coil 333 are, for example, 200 μm. In addition, the space | interval of wiring may change somewhat with places.

The plurality of pattern coils 333 includes a plurality of first pattern coils 333a aligned in the Y-axis direction and a plurality of second pattern coils 333b aligned in the Y-axis direction. The plurality of first pattern coils 333a are arranged in the Y-axis direction at a predetermined pitch P2. The plurality of second pattern coils 333b are arranged in the Y-axis direction at a predetermined pitch P2. The plurality of first pattern coils 333a and the plurality of second pattern coils 333b are adjacent in the X-axis direction orthogonal to the Y-axis direction. The Y-axis direction is an example of a first direction, and the X-axis direction is an example of a second direction.

In the Y-axis direction, the center position of the plurality of first pattern coils 333a is offset from the center position of the plurality of second pattern coils 333b. Specifically, in the Y-axis direction, the center position of the plurality of first pattern coils 333a and the center position of the plurality of second pattern coils 333b are offset by a half of the predetermined pitch P2. Thus, the plurality of pattern coils 333 can be arranged more densely than the configuration in which the plurality of pattern coils 333 are arranged in a matrix. If the plurality of pattern coils 333 are densely arranged, it is possible to reduce the region where the magnetic force is weak in the first main surface 332a and to improve the uniformity of the magnetic flux density distribution in the first main surface 332a. Therefore, the stator 30 having the stator substrate 332 can move the mover 20 stably.

[simulation result]
The simulation result of the magnetic flux density in each stator board | substrate used for the planar motor 10 demonstrated above is demonstrated, referring a comparative example. First, simulation results of the magnetic flux density distribution will be described. FIG. 15 is a diagram showing simulation results of magnetic flux density distribution in a stator substrate according to a comparative example in which a plurality of pattern coils 333 are arranged in a matrix.

As shown in FIG. 15, in the stator substrate according to the comparative example, a region with a low magnetic flux density indicated by an arrow is generated, and the uniformity of the magnetic flux density distribution is low. 16 to 19 are diagrams showing simulation results of the magnetic flux density distribution in the stator substrate 32, the stator substrate 132, the stator substrate 232, and the stator substrate 332. FIG. As shown in FIGS. 16 to 19, in each of the stator substrate 32, the stator substrate 132, the stator substrate 232, and the stator substrate 332, a region having a low magnetic flux density is not generated, and the magnetic flux The uniformity of the density distribution is improved.

The simulation result of the stator substrate 132 shown in FIG. 17 is the case where the six pattern coils 133 have a size corresponding to one pattern coil 33, so the magnetic flux density is generally low. However, there are few regions where the magnetic flux density is greatly reduced locally, and it can be said that the uniformity of the magnetic flux density distribution is improved. Further, regarding the resolution, it can be said that the stator substrate 132 is the highest.

Next, simulation results of the average value and the maximum value of the in-plane magnetic flux density will be described. FIG. 20 is a diagram showing a simulation result of the maximum value of in-plane magnetic flux density. FIG. 21 is a diagram showing simulation results of the average value of in-plane magnetic flux density. In FIGS. 20 and 21, "square" means stator substrate 232, "hexagon" means stator substrate 32, "circle" means stator substrate 332, and "triangle" The stator substrate 132 is meant.

As shown in FIG. 20, in the stator substrate 32, the stator substrate 232, and the stator substrate 332, the maximum value of the in-plane magnetic flux density is equivalent to that of the comparative example. On the other hand, as shown in FIG. 21, in the stator substrate 32, the stator substrate 232, and the stator substrate 332, the average value of the in-plane magnetic flux density is improved as compared with the comparative example. The average value of the in-plane magnetic flux density of the stator substrate 32 is the highest, next the average value of the in-plane magnetic flux density of the stator substrate 332 is high, and then the average of the in-plane magnetic flux density of the stator substrate 232 is high . Although the maximum value and the average value of the stator substrate 132 are lower than those of the other stator substrates, this is due to the influence of the size of the pattern coil 133 described above.

As described above, when any of the stator substrate 32, the stator substrate 232, and the stator substrate 332 is adopted for the planar motor 10, the average value of the in-plane magnetic flux density is higher than that of the stator substrate according to the comparative example. Can be improved. In particular, according to the arrangement in which the center positions of the plurality of pattern coils are shifted like the stator substrate 32 and the stator substrate 332, the average value of the in-plane magnetic flux density can be improved.

[Effects, etc.]
As described above, the planar motor 10 includes the mover 20 having the permanent magnet 21, the first main surface facing the mover 20, and a plurality of thin film pattern coils disposed on the first main surface. And a control circuit 40 for controlling driving of the plurality of pattern coils. Each of the plurality of pattern coils has a winding shape along a triangle or a hexagon, and the plurality of pattern coils are planarly filled on the first main surface. The permanent magnet 21 is an example of a magnet.

Thereby, the area | region where weak magnetic force is in a 1st main surface can be reduced, and the uniformity of the magnetic flux density distribution in a 1st main surface can be improved.

For example, the planar motor 10 includes a stator substrate 32. In the stator substrate 32, each of the plurality of pattern coils 33 has a winding shape along a hexagon. In the first main surface 32 a, a plurality of pattern coils 33 are planarly filled in a honeycomb shape.

Thus, if a plurality of pattern coils 33 having a winding shape along a hexagonal shape are flat-filled, the region of weak magnetic force is reduced in the first main surface 32a, and the magnetic flux density distribution in the first main surface 32a is uniform. It is possible to improve the quality.

For example, the planar motor 10 includes a stator substrate 132. In the stator substrate 132, each of the plurality of pattern coils 133 has a winding shape along a triangle. Six pattern coils 133 are flat-filled in the hexagonal area A1 of the first major surface 132a.

Thus, if the plurality of pattern coils 133 having a winding shape along the triangle are flat-filled, the region of weak magnetic force is reduced in the first main surface 132a, and the magnetic flux density distribution in the first main surface 132a is uniform. It is possible to improve the quality.

For example, the planar motor 10 includes a stator substrate 332. In the stator substrate 332, each of the plurality of pattern coils 333 has a circular winding shape. The plurality of pattern coils 333 includes a plurality of first pattern coils 333a aligned in the Y-axis direction and a plurality of second pattern coils 333b aligned in the Y-axis direction. The plurality of first pattern coils 333a and the plurality of second pattern coils 333b are adjacent in the X-axis direction intersecting the Y-axis direction, and in the first direction, the central positions of the plurality of first pattern coils 333a and the plurality of second patterns It deviates from the center position of the pattern coil 333 b. The Y-axis direction is an example of a first direction, and the X-axis direction is an example of a second direction intersecting the first direction.

Thus, the plurality of pattern coils 333 having a circular winding shape can be densely packed rather than the matrix arrangement. Therefore, it is possible to reduce the area where the magnetic force is weak in the first main surface 332a and to improve the uniformity of the magnetic flux density distribution in the first main surface 332a.

The plurality of first pattern coils 333a are arranged in the Y-axis direction at a predetermined pitch P2, and the plurality of second pattern coils 333b are arranged in the Y-axis direction at a predetermined pitch P2. In the Y-axis direction, the center positions of the plurality of first pattern coils and the center positions of the plurality of second pattern coils are deviated by a half of the predetermined pitch P2.

Thereby, a plurality of pattern coils 333 having a circular winding shape can be further densely packed. Therefore, it is possible to reduce the area where the magnetic force is weak in the first main surface 332a and to improve the uniformity of the magnetic flux density distribution in the first main surface 332a.

For example, the stator substrate 32 may be a first wire 36 a electrically connecting one end of each of the plurality of pattern coils 33 to the control circuit 40, and the other end of each of the plurality of pattern coils 33. And a second main surface 32b opposite to the first main surface 32a, in which a second wiring 36b electrically connecting the second control circuit 40 and the control circuit 40 is disposed. The stator substrate 32 also has a first conductive via structure 35 a electrically connecting one end of each of the plurality of pattern coils 33 to the first wiring 36 a, and the other of each of the plurality of pattern coils 33. And a second conductive via structure 35b electrically connecting the end and the second wire 36b. A similar configuration may be adopted for the stator substrate 132, the stator substrate 232, and the stator substrate 332.

This eliminates the need to arrange the first wiring 36 a and the second wiring 36 b between the plurality of pattern coils 33 on the first main surface 32 a. For this reason, intervals of the plurality of pattern coils 33 can be narrowed and concentrated on the first main surface 32a. As a result, the uniformity of the magnetic flux density distribution in the first major surface 32a can be improved.

(Other embodiments)
As mentioned above, although the planar motor which concerns on embodiment was demonstrated, this invention is not limited to the said embodiment.

For example, the stator substrate may be a multilayer substrate, and the pattern coil may be disposed across multiple layers in the stator substrate. Thereby, the magnetic force can be improved by increasing the number of turns of the pattern coil.

In the above embodiment, all the pattern coils of the stator substrate have the same shape and size, but the stator substrate has pattern coils of two or more types of shapes and sizes. It is also good. For example, even if the first main surface of the stator substrate is planarly filled with two types of pattern coils, a pattern coil having a winding shape along an octagon and a pattern coil having a winding shape along a square. Good.

Further, the laminated structure shown in the schematic cross-sectional view of the stator of the above-described embodiment is an example. The planar motor may include a stator having another laminated structure that can realize the characteristic functions of the present invention. The planar motor may include, for example, a stator in which another layer is provided between the layers of the laminated structure of the above-described embodiment, as long as the same function as the laminated structure described in the above-described embodiment can be realized. .

Further, in the above embodiment, the main material constituting each layer of the laminated structure of the stator is exemplified, but the same function as the laminated structure of the above embodiment is provided for each layer of the laminated structure of the stator. Other materials may be included as long as

Further, in the above embodiment, the components such as the control unit may be realized by dedicated hardware or by executing a software program suitable for each component. Each component may be realized by a program execution unit such as a CPU or a processor reading and executing a software program recorded in a recording medium such as a hard disk or a semiconductor memory.

In addition, the embodiments can be realized by various combinations that each person skilled in the art can think of for each embodiment, or by combining components and functions in each embodiment without departing from the scope of the present invention. The embodiments of the present invention are included in the present invention.

10 planar motor 20 mover 21 permanent magnet (magnet)
32, 132, 232, 332

Stator substrate

32a, 132a, 232a, 332a first main surface 32b second

main surface

33, 133, 233, 333 pattern coil 35a first conductive via structure 35b second conductive via structure 36a first Wiring 36b Second wiring 40 Control circuit 333a First pattern coil 333b Second pattern coil A1 area

Claims

A mover having a magnet,
A stator substrate having a first main surface facing the mover side, and a plurality of thin film pattern coils disposed on the first main surface;
A control circuit for controlling driving of the plurality of pattern coils;
Each of the plurality of pattern coils has a winding shape along a triangle or a hexagon,
A planar motor in which the plurality of pattern coils are flat-filled on the first main surface.
Each of the plurality of pattern coils has a winding shape along a hexagon,
The planar motor according to claim 1, wherein the plurality of pattern coils are planarly filled in a honeycomb shape on the first main surface.
Each of the plurality of pattern coils has a winding shape along a triangle,
The flat motor according to claim 1, wherein six pattern coils are flat-filled in a hexagonal area of the first main surface.
A mover having a magnet,
A stator substrate having a first main surface facing the mover side, and a plurality of thin film pattern coils disposed on the first main surface;
A control circuit for controlling driving of the plurality of pattern coils;
Each of the plurality of pattern coils has a circular winding shape,
The plurality of pattern coils include a plurality of first pattern coils aligned in a first direction, and a plurality of second pattern coils aligned in the first direction,
The plurality of first pattern coils and the plurality of second pattern coils are adjacent to each other in a second direction intersecting the first direction,
In the first direction, a center position of the plurality of first pattern coils and a center position of the plurality of second pattern coils are deviated from each other.
The plurality of first pattern coils are arranged in the first direction at a predetermined pitch,
The plurality of second pattern coils are arranged in the first direction at the predetermined pitch,
The flat motor according to claim 4, wherein in the first direction, the center position of the plurality of first pattern coils and the center position of the plurality of second pattern coils are shifted by 1/2 of the predetermined pitch. .
The stator substrate is
A first wire electrically connecting one end of each of the plurality of pattern coils to the control circuit, and electrically connecting the other end of each of the plurality of pattern coils to the control circuit A second main surface opposite to the first main surface on which a second wiring to be connected is disposed;
A first conductive via structure electrically connecting the one end of each of the plurality of pattern coils and the first wiring;
The planar motor according to any one of claims 1 to 5, further comprising a second conductive via structure electrically connecting the other end of each of the plurality of pattern coils and the second wiring.