WO2019239797A1

WO2019239797A1 - Planar motor and control method

Info

Publication number: WO2019239797A1
Application number: PCT/JP2019/019840
Authority: WO
Inventors: 若林　俊一
Original assignee: パナソニックＩｐマネジメント株式会社
Priority date: 2018-06-13
Filing date: 2019-05-20
Publication date: 2019-12-19

Abstract

This planar motor comprises a driving circuit (60). Each of a plurality of switching circuits (61) of the driving circuit (60) includes: a first circuit for causing a first-polarity current to flow in a coil (33); and a second circuit for causing a second-polarity current, which is the reverse of the first polarity, to flow in the coil (33). The driving circuit (60) includes first switching elements (63A-63C) and power feeding lines (62A-62C) that are electrically connected to the switching circuits (61), from among the plurality of switching circuits (61), which belong to the same row.

Description

Planar motor and control method

The present invention relates to a planar motor that moves a mover two-dimensionally along a plane and a method for controlling the planar motor.

A planar motor that moves a mover two-dimensionally along a plane is known. As such a planar motor, Patent Document 1 discloses a linear electromagnetic microactuator having a drive circuit that can stably drive each movable element while suppressing wasteful power consumption and interference of an undue electromagnetic force. It is disclosed.

JP 2000-125536 A

In a planar motor, in order to drive a plurality of coils provided on a stator, if two control lines are individually connected to each of the plurality of coils, the number of the plurality of coils × two control lines are required. The wiring pattern becomes complicated.

The present invention provides a planar motor capable of simplifying a wiring pattern and a control method.

A planar motor according to an aspect of the present invention includes a mover having a magnet, a main surface facing the mover, and a stator having a plurality of coils arranged in a matrix along the main surface, A drive circuit, and each of the plurality of coils is configured to flow a first polarity current through the coil and a second polarity current opposite to the first polarity through the coil. And the drive circuit includes a power source and a plurality of the switching circuits, and is electrically connected to the switching circuits belonging to the same column among the plurality of switching circuits. And a plurality of sets of switching elements for turning on and off the electrical connection between the wiring and the power supply, and the first circuit belonging to the same row is electrically connected to the first circuit. Multiple first wirings connected together A plurality of second wirings electrically connected to the second circuit belonging to the same row among the plurality of second circuits, and selected as the plurality of first wirings and the plurality of second wirings In addition, a control unit that performs control to apply a voltage is provided.

A control method according to an aspect of the present invention is a planar motor control method, wherein the planar motor includes a mover having a magnet, a main surface facing the mover, and a matrix along the main surface. A stator having a plurality of coils arranged in a shape, and a drive circuit, each of the plurality of coils, a first circuit for flowing a first polarity current to the coil, and the coil Electrically connected to a switching circuit including a second circuit for flowing a current of a second polarity opposite to the first polarity, the drive circuit includes a power source and a plurality of the switching circuits, and a plurality of the switching A plurality of sets of switching elements for turning on and off the electrical connection between the wirings and the power supply, the wirings electrically connected to the switching circuits belonging to the same column in the circuit; Belongs to the same row in the circuit A plurality of first wirings electrically connected to the first circuit, a plurality of second wirings electrically connected to the second circuit belonging to the same row among the plurality of second circuits, In the control method, a voltage is selectively applied to the plurality of first wirings and the plurality of second wirings.

According to the present invention, a planar motor capable of simplifying a wiring pattern and a control method are realized.

FIG. 1 is a plan view showing a schematic configuration of the planar motor system according to the embodiment. FIG. 2 is a cross-sectional view of the planar motor according to the embodiment. FIG. 3 is a diagram illustrating a specific configuration of the drive circuit according to the embodiment. FIG. 4 is a flowchart of the operation of the planar motor according to the embodiment.

Hereinafter, embodiments will be described with reference to the drawings. It should be noted that each of the embodiments described below shows a comprehensive or specific example. The numerical values, shapes, materials, constituent elements, arrangement positions and connecting forms of the constituent elements, steps, order of steps, and the like shown in the following embodiments are merely examples, and are not intended to limit the present invention. In addition, among the constituent elements in the following embodiments, constituent elements that are not described in the independent claims indicating the highest concept are described as optional constituent elements.

Each figure is a schematic diagram and is not necessarily shown strictly. Moreover, in each figure, the same code | symbol is attached | subjected to the substantially same structure, and the overlapping description may be abbreviate | omitted or simplified.

In the following embodiments, “plan view” means viewing from a direction perpendicular to the main surface of the stator. In the drawing, the N pole of the magnet is described as “N”, and the S pole of the magnet is described as “S”.

(Embodiment)
[overall structure]
Hereinafter, the structure of the planar motor according to the embodiment will be described with reference to the drawings. FIG. 1 is a plan view showing a schematic configuration of the planar motor according to the embodiment. FIG. 2 is a cross-sectional view of the planar motor according to the embodiment. In FIG. 1, a plan view of the mover 20 and the stator 30 is shown. In FIG. 1, the cover member 31 is not shown in order to show the arrangement of the plurality of coils 33. In FIG. 2, the detection unit 50 and the drive circuit 60 are not shown.

As shown in FIGS. 1 and 2, the planar motor 10 according to the embodiment includes a mover 20, a stator 30, a detection unit 50, and a drive circuit 60. The planar motor 10 is a linear motor (in other words, an electromagnetic actuator) that moves the mover 20 two-dimensionally along the main surface 31 a of the stator 30. The flat motor 10 is used, for example, for transporting luggage in a distribution warehouse. Hereinafter, each component of the planar motor 10 will be described in detail.

[Mover]
First, the mover 20 will be described. The mover 20 is a moving object in the planar motor 10. As shown in FIG. 2, the mover 20 includes a mover main body 21, a permanent magnet 22, and a ball caster 23.

The mover body 21 is a substantially rectangular plate-shaped member. The mover main body 21 is made of, for example, a resin material. The mover main body 21 may be formed of a metal material having a relatively low permeability such as aluminum.

The permanent magnet 22 is a magnet for the mover 20 to obtain thrust from the stator 30, and is attached to the mover main body 21. The permanent magnet 22 is, for example, a flat cylindrical neodymium magnet. The shape and material of the permanent magnet 22 are not particularly limited. The permanent magnet 22 may be, for example, a ferrite magnet or an alnico magnet. The mover 20 includes a plurality of permanent magnets 22, for example, but may include at least one permanent magnet 22. In FIG. 2, the permanent magnet 22 is embedded in the mover main body 21. However, the permanent magnet 22 may be attached to the upper surface of the mover main body 21 or attached to the lower surface of the mover main body 21. Also good.

In the example of FIG. 2, the permanent magnet 22 is arranged so that the arrangement direction of the S pole and the N pole intersects the main surface 31a, and the S pole is located closer to the main surface 31a than the N pole. However, the permanent magnet 22 may be arranged such that the N pole is located closer to the main surface 31a than the S pole. Moreover, the permanent magnet 22 may be arrange | positioned so that the arrangement direction of a south pole and a north pole may follow the main surface 31a.

The mover 20 may have an electromagnet instead of the permanent magnet 22. In this case, the electromagnet is driven by, for example, a dry battery or a storage battery. The electromagnet may be supplied with power from the coil 33 that does not contribute to the movement of the mover 20. Thus, the needle | mover 20 should just have the permanent magnet 22 or the electromagnet. That is, the needle | mover 20 should just have a magnet.

The ball caster 23 is a moving mechanism for moving the mover main body 21 along the main surface 31a of the stator 30. The ball caster 23 is attached to the lower surface of the mover main body 21 and abuts on the main surface 31 a of the stator 30. The mover 20 may include a moving mechanism other than the ball caster 23 such as a free caster or a wheel.

[stator]
Next, the stator 30 will be described. The stator 30 is a structure for moving the mover 20. In the embodiment, the stator 30 is a sheet-like member. As shown in FIG. 2, the stator 30 includes a cover member 31 and a circuit board 32.

The cover member 31 is a sheet-like protective member that suppresses wear and the like of the circuit board 32 and smoothes the surface of the stator 30. The cover member 31 covers the entire top surface of the circuit board 32. The cover member 31 has a rectangular shape in plan view, but may be other shapes such as a circle. The upper surface of the cover member 31 is a main surface 31a of the stator 30. The main surface 31 a faces the mover 20.

The cover member 31 is formed of an organic material such as melamine resin, urethane resin, or acrylic resin, for example. The cover member 31 may be formed of a silane compound or a metal oxide. Such an organic material, a silane compound, or a metal oxide is suitable for the cover member 31 in terms of wear resistance. If an organic material is employed for the cover member 31, the cover member 31 can be formed by a low-temperature manufacturing process. Further, if an organic material is employed for the cover member 31, it is easy to increase the area of the cover member 31.

The circuit board 32 is a thin film-like (in other words, sheet-like) board on which a plurality of coils 33 are formed on the upper surface. The planar view shape of the circuit board 32 is rectangular, but may be other shapes such as a circle. The base material of the circuit board 32 is formed of, for example, a resin material such as glass epoxy.

A plurality of coils 33 are formed on the upper surface of the circuit board 32. As shown in FIG. 1, the plurality of coils 33 are spread in a matrix in a plan view.

The plurality of coils 33 are coils for applying thrust to the mover 20. The plurality of coils 33 are magnetized when power is supplied by the drive circuit 60. Each of the plurality of coils 33 is a thin pattern coil that is patterned on the upper surface of the circuit board 32.

Each of the plurality of coils 33 is a rectangular winding wire whose winding axis extends in a direction perpendicular to the main surface 31a, but may be another winding shape such as a circular winding shape. Each of the plurality of coils 33 may have, for example, a triangular shape or a wound shape along a polygon such as a hexagon. The coil 33 is formed of a metal material such as copper, for example. The coil 33 is formed by etching, for example.

In the following embodiments, each of the plurality of coils 33 functions as an S-pole magnet when the first polarity current flows, and the second polarity current opposite to the first polarity flows. The upper part functions as an N-pole magnet.

[Detector]
The detection unit 50 detects the current position of the mover 20 and outputs position information as a detection result. The detection unit 50 is realized by, for example, a plurality of Hall elements arranged in a matrix corresponding to the arrangement of the plurality of coils 33 in a matrix. The detection unit 50 may be realized by a camera that images the mover 20 and the stator 30 from above.

[Drive circuit]
Next, the drive circuit 60 will be described. The drive circuit 60 moves the mover 20 along the main surface 31 a by controlling the drive of the plurality of coils 33. As shown in FIG. 2, for example, when the mover 20 is moved in the movement direction, the drive circuit 60 drives the coil 33 a located at the rear of the movement direction, and between the coil 33 a and the permanent magnet 22. Creates a repulsive force. Further, the drive circuit 60 may drive the coil 33b located in the front in the moving direction to generate an attractive force between the coil 33b and the permanent magnet 22.

The drive circuit 60 is disposed around the plurality of coils 33 on the circuit board 32, for example. The drive circuit 60 is disposed along, for example, three sides of a rectangular region where the plurality of coils 33 arranged in a matrix are formed. That is, the drive circuit 60 is disposed in a U-shaped region (in other words, a U-shape). The drive circuit 60 may be arranged so as to surround a rectangular region where the plurality of coils 33 arranged in a matrix are formed. That is, the drive circuit 60 may be disposed in a rectangular annular region.

Hereinafter, a specific configuration of the drive circuit 60 will be described. FIG. 3 is a diagram showing a specific configuration of the drive circuit 60. In the following description, the addresses of the coils 33 and the switching circuit 61 arranged in a matrix are indicated by alphabets. The address includes a row address and a column address, the row address is indicated by a lower case alphabet, and the column address is indicated by an upper case alphabet. For example, the address (aB) means that the row address is a and the column address is B.

The drive circuit 60 shown in FIG. 3 includes a plurality of switching circuits 61, power supply wirings 62A to 62C, a plurality of first switching elements 63A to 63C, a DC power source 64, an address selection circuit 65, and a first wiring 66a. To 66b, a first scan circuit 67, second wirings 68a to 68b, a second scan circuit 69, and a control unit. In FIG. 3, the detection unit 50 and the plurality of coils 33 are also illustrated. In addition, about the number of the coils 33, the switching circuit 61, the switching element, wiring, etc. in FIG. 3, it is an example.

One switching circuit 61 is provided for each of the plurality of coils 33. That is, each of the plurality of coils 33 is electrically connected to the switching circuit 61. The switching circuit 61 includes two second switching elements 161 for flowing a first polarity current through the coil 33 and two second switching elements for flowing a second polarity current opposite to the first polarity through the coil 33. Element 261 is included. Specifically, the switching circuit 61 includes two second switching elements 161 (hereinafter also referred to as a first circuit) and two second switching elements 261 (hereinafter also referred to as a second circuit). This is an H-bridge circuit configured. Such a circuit configuration is an example, and the switching circuit 61 may have other circuit configurations.

Each of the second switching element 161 and the second switching element 261 is, for example, an FET (Field Effect Transistor), but may be other switching elements (transistors). The 2nd switching element 161 and the 2nd switching element 261 are arrange | positioned in the circuit board 32 (not shown in FIG. 3), for example.

The circuit board 32 may have a COS (Chip On Sheet) structure in which integrated circuits corresponding to the second switching element 161 and the second switching element 261 are mounted. In this case, the integrated circuit is disposed, for example, on the lower surface of the circuit board 32 so as not to hinder the movement of the mover 20. The second switching element 161 and the second switching element 261 may be formed as a hybrid IC.

Also, each of the second switching element 161 and the second switching element 261 may be a thin film transistor (TFT: Thin Film Transistor).

The power supply wirings 62A to 62C are wirings that are arranged one by one for each column and extend in the column direction. Each of the power supply wirings 62A to 62C is electrically connected to a first circuit belonging to the same column among the plurality of first circuits. For example, the power supply wiring 61 </ b> A is electrically connected to a plurality of first circuits whose column addresses are A.

The plurality of first switching elements 63A to 63C turn on and off the electrical connection between the power supply wirings 62A to 62C and the DC power source 64. For example, the first switching element 63A turns on and off the electrical connection between the power supply wiring 62A and the DC power supply 64.

Each of the first switching elements 63A to 63C is, for example, an FET, but may be other switching elements (transistors). The first switching elements 63A to 63C may be arranged on the circuit board 32 or may be arranged outside the circuit board 32.

When the first switching elements 63A to 63C are arranged on the circuit board 32, the circuit board 32 has a COS (Chip On Sheet) structure in which an integrated circuit corresponding to the first switching elements 63A to 63C is mounted. May be. The first switching elements 63A to 63C may be formed as a hybrid IC.

Further, when the first switching elements 63A to 63C are disposed on the circuit board 32, each of the first switching elements 63A to 63C may be a thin film transistor.

The address selection circuit 65 turns on the first switching elements 63A to 63C corresponding to the column address notified from the control unit. The address selection circuit 65 is electrically connected to the control terminals (that is, gates) of the first switching elements 63A to 63C, and applies a voltage to the control terminals.

The first wirings 66a to 66b are wirings that are arranged one by one for each row and extend in the row direction. For example, the first wirings 66a to 66b are patterned on the circuit board 32 by a metal material such as copper.

Each of the first wirings 66a to 66b is electrically connected to a first circuit belonging to the same row among the plurality of first circuits. For example, the first wiring 66a is electrically connected to a plurality of first circuits (more specifically, gates of the plurality of second switching elements 161) whose row address is a.

The first scan circuit 67 selectively applies a voltage to the first wirings 66a to 66b. For example, the first scan circuit 67 applies a voltage to the first wiring corresponding to the row address notified from the control unit 70. As a result, the second switching element 161 connected to the first wiring to which the voltage is applied is turned on.

The second wirings 68a to 68b are wirings that are arranged one by one for each row and extend in the row direction. For example, the second wirings 68a to 68b are patterned on the circuit board 32 by a metal material such as copper.

Each of the second wirings 68a to 68b is electrically connected to a second circuit belonging to the same row among the plurality of second circuits. For example, the second wiring 68a is electrically connected to a plurality of second circuits (more specifically, gates of the plurality of second switching elements 261) whose row address is a.

The second scan circuit 69 selectively applies a voltage to the second wirings 68a to 68b. For example, the second scan circuit 69 applies a voltage to the second wiring corresponding to the row address notified from the control unit 70. As a result, the second switching element 261 connected to the second wiring to which the voltage is applied is turned on.

The control unit 70 is a control device that performs control to selectively drive the plurality of coils 33 by notifying the address selection circuit 65, the first scan circuit 67, and the second scan circuit 69 of the address. The control unit 70 is realized by, for example, a microcomputer, but may be realized by a processor or a circuit. The control unit 70 may be realized by a combination of two or more of a microcomputer, a processor, and a circuit.

The DC power supply 64 may include a current limiting circuit and the like, and may be configured to change the current value supplied to the coil 33 based on the control of the control unit 70. That is, the magnetic flux density generated by the coil 33 may be changeable. In this case, the current may be analog-controlled or PWM (Pulse Width Modulation) controlled.

[Operation of planar motor]
Next, the operation of the planar motor 10 will be described. The planar motor 10 employs a method of switching the magnetic poles (N pole and S pole) of the coil 33 by controlling the direction of the current flowing through one coil 33. Hereinafter, the operation of the planar motor 10 will be described with reference to FIG. 4 in addition to FIG. 3. FIG. 4 is a flowchart of the operation of the planar motor 10.

First, the control unit 70 performs control to selectively apply a voltage to the plurality of first wirings 66a to 66b and the plurality of second wirings 68a to 68b (S11). Specifically, the control unit 70 notifies the row address to one of the first scan circuit 67 and the second scan circuit 69, whereby the plurality of first wirings 66a to 66b and the plurality of second wirings 68a. A voltage is selectively applied to any one of ˜68b. As a result, the first circuit (second switching element 161) and the second circuit (second switching element 261) belonging to the row indicated by the row address are selectively turned on.

The control unit 70 periodically repeats the notification of the row address so that, for example, a voltage is applied to the plurality of first wirings 66a to 66b and the plurality of second wirings 68a to 68b once. Hereinafter, such control is described as scan control. The order in which the row address is notified is not particularly limited. For example, the control unit 70 alternately notifies the row address to the first scan circuit 67 and the second scan circuit 69 so that the voltage is alternately applied to the first wiring and the second wiring. The control unit 70 may notify the address so that the voltage is applied once to all the second wirings after the voltage is applied to all the first wirings once.

The control unit 70 performs the scan control, while the second switching element 161 or the second switching element 261 corresponding to the driving target coil 33 is turned on, and the first switching element corresponding to the driving target coil 33. Is turned on (S12). Specifically, the control unit 70 notifies the address selection circuit 65 of the column address of the drive target coil 33, thereby turning on the first switching element corresponding to the drive target coil 33 via the address selection circuit 65. To do. Such control is also described as address control.

For example, in the case where the coil 33 belonging to the address (aA) functions as an S pole magnet, the control unit 70 turns on the first switching element 63A during a period in which voltage is applied to the first wiring 66a. To do. Then, since the two second switching elements 161 connected to the coil 33 belonging to the address (aA) are in the ON state, a first polarity current flows through the coil 33, and the coil 33 Functions as a magnet.

Further, for example, when the coil 33 belonging to the address (b-C) is caused to function as an N-pole magnet, the control unit 70 performs the first switching element 63C during the period in which the voltage is applied to the second wiring 68b. Turn on. Then, since the two second switching elements 261 connected to the coil 33 belonging to the address (bC) are in the ON state, a second polarity current flows through the coil 33, and the coil 33 Functions as a magnet.

Thus, the drive circuit 60 can passively drive the plurality of coils 33.

It should be noted that which coil 33 is to be driven is determined by the current position of the mover 20 detected by the detection unit 50. As shown in FIG. 2, the drive circuit 60 generates a repulsive force between the coil 33 a and the permanent magnet 22, for example, with the coil 33 a located behind the current position of the mover 20 as a drive target. . Further, the drive circuit 60 may generate an attractive force between the coil 33b and the permanent magnet 22 with the coil 33b positioned in front of the position of the source of the mover as a driving target.

[Modification]
In the scan control described above, the first wirings 66a to 66b and the second wirings 68a to 68b are selected one by one in a predetermined order. However, selection of some wirings may be skipped under certain conditions, or the wirings may be selected randomly ignoring the order.

In the above embodiment, the first wirings 66a to 66b and the second wirings 68a to 68b are the targets of scan control, and the first switching elements 63A to 63C are the targets of address control. The switching elements 63A to 63C may be subject to scan control, and the first wirings 66a to 66b and the second wirings 68a to 68b may be subject to address control.

Further, in FIG. 3, the first scan circuit 67 is disposed on the left side of the plurality of coils 33, and the second scan circuit 69 is disposed on the right side of the plurality of coils 33. However, both the first scan circuit 67 and the second scan circuit 69 may be disposed on the left side of the plurality of coils 33, and both the first scan circuit 67 and the second scan circuit 69 are on the right side of the plurality of coils 33. May be arranged. In this case, for example, the drive circuit 60 is arranged along two sides of a rectangular region where the plurality of coils 33 arranged in a matrix are formed. That is, the drive circuit 60 is arranged in an L-shaped region.

In the above embodiment, the first wirings 66a to 66b and the second wirings 68a to 68b are arranged corresponding to the rows of the plurality of coils 33 arranged in a matrix, and the power supply wirings 62A to 62C are It has been described that the coils 33 are arranged corresponding to the rows of the coils 33. However, rows and columns are only distinguished for convenience. When the circuit board 32 is viewed from different directions, the first wirings 66a to 66b and the second wirings 68a to 68b are arranged corresponding to the rows of the plurality of coils 33, and the power supply wirings 62A to 62C are connected to the power supply wiring 62A. It can be considered that .about.62C are arranged corresponding to the rows of the plurality of coils 33. FIG.

[Effects]
As described above, the planar motor 10 includes the mover 20 having the permanent magnet 22, the main surface 31a facing the mover 20, and the plurality of coils 33 arranged in a matrix along the main surface 31a. The stator 30 has a drive circuit 60. The permanent magnet 22 is an example of a magnet. Each of the plurality of coils 33 includes a first circuit for flowing a first polarity current to the coil 33 and a second circuit for flowing a second polarity current opposite to the first polarity to the coil 33. It is electrically connected to the switching circuit 61 including it. The drive circuit 60 includes a DC power supply 64 and a plurality of switching circuits 61. The drive circuit 60 turns on and off the power supply wiring electrically connected to the switching circuits 61 belonging to the same column among the plurality of switching circuits 61 and the electrical connection between the power supply wiring and the DC power supply 64. A plurality of sets of one switching element are provided. The drive circuit 60 includes a plurality of first wirings electrically connected to the first circuits belonging to the same row among the plurality of first circuits. The drive circuit 60 includes a plurality of second wirings electrically connected to the second circuits belonging to the same row among the plurality of second circuits. The drive circuit 60 includes a control unit 70 that performs control to selectively apply voltages to the plurality of first wirings and the plurality of second wirings.

In such a planar motor 10, the first wiring is shared by the coil groups belonging to the same row, and the second wiring is shared by the coil groups belonging to the same column, so that the number of wirings for driving the coil 33 is increased. Can be reduced. Therefore, the wiring pattern can be simplified. In the planar motor 10, the direction of the current flowing through each of the plurality of coils 33 can be switched by the switching circuit 61. That is, each of the plurality of coils 33 can be selectively functioned as either a S-pole or N-pole magnet.

Also, for example, the switching circuit 61 is an H bridge circuit configured by two second switching elements 161 included in the first circuit and two second switching elements 261 included in the second circuit.

Such a planar motor 10 can switch the direction of the current flowing through each of the plurality of coils 33 by an H bridge circuit.

Further, for example, the stator 30 includes a circuit board 32 on which a plurality of coils 33 are formed, and the drive circuit 60 is disposed around the plurality of coils 33 on the circuit board 32.

Such a planar motor 10 can drive the plurality of coils 33 by the drive circuit 60 disposed around the plurality of coils 33.

Also, for example, the plurality of coils 33 are formed in a rectangular area on the circuit board 32, and the drive circuit 60 is disposed around the rectangular area along the three sides of the rectangular area.

Such a planar motor 10 can drive a plurality of coils 33 by a drive circuit 60 arranged along three sides of a rectangular region where the plurality of coils 33 are formed.

Further, for example, the planar motor 10 further includes a detection unit 50 that detects the current position of the mover 20. Based on the detected current position of the mover 20, the control unit 70 determines the coil 33 to be supplied with power from the DC power supply 64 next.

Such a planar motor 10 can determine the coil 33 to be driven based on the current position of the mover 20.

Further, the present invention may be realized as a method for controlling the planar motor 10. In such a control method, a voltage is selectively applied to the plurality of first wirings 66a to 66b and the plurality of second wirings 68a to 68b.

Thereby, the same effect as the planar motor 10 can be obtained.

(Other embodiments)
The planar motor according to the embodiment has been described above, but the present invention is not limited to the above embodiment.

For example, in the above-described embodiment, the planar motor is used for transporting luggage in a distribution warehouse, but may be used for purposes other than the transportation of luggage. Moreover, in the said embodiment, although the coil was a thin film pattern coil, a coil | winding coil may be sufficient as a coil.

In the above embodiment, a rectifying element such as a diode may be connected in series to each of the plurality of coils. Thereby, it is suppressed that the electric current of a reverse direction flows into a coil.

Also, the laminated structure shown in the schematic cross-sectional view of the stator of the above embodiment is an example. The planar motor may include a stator having another laminated structure that can realize the characteristic function of the present invention. The planar motor may include, for example, a stator in which another layer is provided between layers of the stacked structure of the above embodiment as long as the same function as the stacked structure described in the above embodiment can be realized. .

In the above embodiment, the main material constituting each layer of the laminated structure of the stator is illustrated, but each layer of the laminated structure of the stator has the same function as the laminated structure of the above embodiment. Other materials may be included to the extent that can be realized.

In the above embodiment, another processing unit may execute a process executed by a specific processing unit. Further, the order of the plurality of processes may be changed, and the plurality of processes may be executed in parallel.

Further, in the above embodiment, the components such as the control unit may be realized by executing a software program suitable for the components. Components such as the control unit may be realized by a program execution unit such as a CPU or a processor reading and executing a software program recorded on a recording medium such as a hard disk or a semiconductor memory.

Further, the components such as the control unit may be realized by hardware. For example, the component such as the control unit may be a circuit (or an integrated circuit). These circuits may constitute one circuit as a whole, or may be separate circuits. Each of these circuits may be a general-purpose circuit or a dedicated circuit.

The general or specific aspect of the present invention may be realized by a recording medium such as a system, apparatus, method, integrated circuit, computer program, or computer-readable CD-ROM. Further, the present invention may be realized by any combination of a system, an apparatus, a method, an integrated circuit, a computer program, and a recording medium. For example, the present invention may be realized as a planar motor control method (that is, a method of controlling a planar motor). The present invention may be realized as a program for causing a computer to execute such a control method. The present invention may be realized as a computer-readable non-transitory recording medium in which the program is recorded.

In addition, it is realized by variously conceiving various modifications conceived by those skilled in the art for each embodiment, or by arbitrarily combining the components and functions in each embodiment without departing from the spirit of the present invention. This form is also included in the present invention.

10 plane motor 20 mover 22 permanent magnet (magnet)
30 Stator

31a Main surface

33, 33a, 33b Coil 50 Detector 60 Drive circuit 61

Switching circuit

62A, 62B, 62C Power supply wiring (wiring)
63A, 63B, 63C First switching element 64 DC power supply (power supply)
65

Address selection circuit

66a, 66b 1st wiring 67

1st scan circuit

68a, 68b 2nd wiring 69 2nd scan circuit 70 Control part 161,261 2nd switching element

Claims

A mover having a magnet;
A main surface facing the mover; and a stator having a plurality of coils arranged in a matrix along the main surface;
Drive circuit,
Each of the plurality of coils includes a first circuit for flowing a first polarity current through the coil and a second circuit for flowing a second polarity current opposite to the first polarity through the coil. Electrically connected to the switching circuit,
The drive circuit is
A power source, and a plurality of the switching circuits,
A plurality of switching elements for turning on and off the electrical connection between the wiring and the power supply, and the wiring electrically connected to the switching circuit belonging to the same column among the plurality of switching circuits;
A plurality of first wirings electrically connected to the first circuit belonging to the same row among the plurality of first circuits,
A plurality of second wirings electrically connected to the second circuit belonging to the same row among the plurality of second circuits,
A planar motor comprising a control unit that performs control to selectively apply a voltage to the plurality of first wires and the plurality of second wires.
The planar motor according to claim 1, wherein the switching circuit is an H-bridge circuit configured by two switching elements included in the first circuit and two switching elements included in the second circuit.
The stator includes a substrate on which the plurality of coils are formed,
The planar motor according to claim 1, wherein the drive circuit is disposed around the plurality of coils on the substrate.
The plurality of coils are formed in a rectangular region on the substrate,
The planar motor according to claim 3, wherein the drive circuit is disposed along the three sides of the rectangular area around the rectangular area.
Furthermore, a detection unit for detecting the current position of the mover,
The plane according to any one of claims 1 to 4, wherein the control unit determines a coil to be supplied with power from the power source next based on the detected current position of the movable element. motor.
A method for controlling a planar motor,
The planar motor is
A mover having a magnet;
A main surface facing the mover; and a stator having a plurality of coils arranged in a matrix along the main surface;
Drive circuit,
Each of the plurality of coils includes a first circuit for flowing a first polarity current through the coil and a second circuit for flowing a second polarity current opposite to the first polarity through the coil. Electrically connected to the switching circuit,
The drive circuit is
A power source, and a plurality of the switching circuits,
A plurality of switching elements for turning on and off the electrical connection between the wiring and the power source, and the wiring electrically connected to the switching circuit belonging to the same column among the plurality of switching circuits;
A plurality of first wirings electrically connected to the first circuit belonging to the same row among the plurality of first circuits,
A plurality of second wirings electrically connected to the second circuit belonging to the same row among the plurality of second circuits,
The control method is a control method in which a voltage is selectively applied to the plurality of first wirings and the plurality of second wirings.