JP2020089109A - Magnetic carrier, and control method - Google Patents

Abstract

To provide a magnetic carrier capable of finely adjusting the position where a strong magnetic field is generated in a stator.SOLUTION: A magnetic carrier 10 includes: a stationary part 30 having a base plate 35 that includes a first layer 31 formed with multiple first eccentric coils 31a eccentric in the first direction, and a second layer 32 formed with multiple second eccentric coils 32a eccentric in the second direction different from the first direction; and a movable element 20 having permanent magnets 22, which is carried along the base plate 35 by means of a magnetic field generated when power is supplied to at least part of the multiple eccentric coils 31a and the multiple eccentric coils 32a.SELECTED DRAWING: Figure 1

Description

The present invention relates to a magnetic transfer device that two-dimensionally transfers a mover along a plane, and a control method thereof.

There is known a magnetic transfer device that two-dimensionally transfers a mover along a plane. As such a magnetic transfer device, Patent Document 1 discloses a linear motor device that drives a stage part that moves linearly or in a two-dimensional plane while holding an object such as a mask or a photosensitive substrate. .

JP, 2004-187401, A

The magnetic transfer device applies thrust to the mover by means of a plurality of coils provided on the stator.

The present invention provides a magnetic transfer device and the like capable of finely adjusting a position where a strong magnetic field is generated in a stator.

A magnetic transfer device according to an aspect of the present invention includes a first layer in which a plurality of first eccentric coils eccentric in a first direction are formed, and a plurality of second eccentric in a second direction different from the first direction. A stator having a substrate including a second layer laminated to the first layer, which is a second layer in which an eccentric coil is formed, the plurality of first eccentric coils, and the plurality of second eccentric coils A mover having a magnet, which is transported along the substrate by a magnetic field generated by supplying power to at least a part thereof.

A control method according to an aspect of the present invention is a control method for a magnetic transfer device, wherein the magnetic transfer device includes a first layer having a plurality of first eccentric coils eccentric in a first direction, and A second layer on which a plurality of second eccentric coils eccentric in a second direction opposite to the first direction are formed, the stator having a substrate including a second layer laminated on the first layer; Of the first eccentric coil, and a mover having a magnet, which is conveyed along the substrate by a magnetic field generated by supplying power to at least a part of the plurality of second eccentric coils, When the method conveys the mover in a third direction orthogonal to both the first direction and the second direction, a first eccentric coil and, in plan view, the first direction side of the first eccentric coil. Power to a set of eccentric coils including a second eccentric coil located next to the.

The magnetic transfer device of the present invention can finely adjust the position where a strong magnetic field is generated in the stator.

FIG. 1 is a diagram showing a schematic configuration of a magnetic carrier device according to an embodiment. FIG. 2 is a cross-sectional view of the magnetic carrier device according to the embodiment. FIG. 3 is a plan view for explaining the operation of the magnetic transport device according to the comparative example. FIG. 4 is a diagram for explaining the operation of the magnetic carrier device according to the embodiment. FIG. 5 is a plan view for explaining an operation according to a modified example of the magnetic carrier device according to the embodiment.

Hereinafter, embodiments will be described with reference to the drawings. It should be noted that each of the embodiments described below shows a comprehensive or specific example. Numerical values, shapes, materials, constituent elements, arrangement positions and connection forms of constituent elements, steps, order of steps, and the like shown in the following embodiments are examples, and are not intended to limit the present invention. Further, among the constituent elements in the following embodiments, constituent elements that are not described in the independent claims showing the highest concept are described as arbitrary constituent elements.

It should be noted that each drawing is a schematic diagram and is not necessarily strictly illustrated. Further, in each drawing, the same reference numerals are given to substantially the same configurations, and overlapping description may be omitted or simplified.

Further, in the following embodiments, “plan view” means viewing from a direction perpendicular to the main surface of the stator. In the drawings, the north pole of the magnet is described as "N" and the south pole of the magnet is described as "S".

(Embodiment)
[overall structure]
Hereinafter, the configuration of the magnetic transfer device according to the embodiment will be described with reference to the drawings. FIG. 1 is a diagram showing a schematic configuration of a magnetic carrier device according to an embodiment. FIG. 2 is a cross-sectional view of the magnetic carrier device according to the embodiment. In FIG. 1, a plan view of the mover 20 and the stator 30 is shown. In FIG. 1, the cover member 36 is not shown in order to show the arrangement of the plurality of coils.

As shown in FIGS. 1 and 2, the magnetic carrier device 10 according to the first embodiment includes a mover 20, a stator 30, a power supply circuit 40, and a controller 50. The magnetic transfer device 10 is a linear motor (in other words, an electromagnetic actuator, a planar motor) that two-dimensionally transfers the mover 20 along the main surface 36a of the stator 30. Hereinafter, each component of the magnetic transfer device 10 will be described in detail.

[Mover]
First, the mover 20 will be described. The mover 20 is an object to be transferred in the magnetic transfer device 10. As shown in FIG. 2, the mover 20 includes a mover body 21, a permanent magnet 22, and a ball caster 23.

The mover body 21 is a substantially rectangular plate-shaped member. The mover body 21 is made of, for example, a resin material.

The permanent magnet 22 is a permanent magnet for the mover 20 to obtain thrust from the stator 30, and is attached to the mover body 21. The permanent magnet 22 is, for example, a flat plate-shaped neodymium magnet. The shape and material of the permanent magnet 22 are not particularly limited. The permanent magnet 22 may be, for example, a ferrite magnet or an alnico magnet. The mover 20 includes, for example, a plurality of permanent magnets 22 (four permanent magnets 22 in the example of FIG. 1), but at least one permanent magnet 22 may be provided. In FIG. 2, the permanent magnet 22 is embedded in the mover body 21, but the permanent magnet 22 may be attached to the upper surface of the mover body 21 or to the lower surface of the mover body 21. Good.

In the example of FIG. 2, the permanent magnets 22 are arranged such that the arrangement direction of the S poles and the N poles intersects the main surface 36a, and the S poles are located closer to the main surface 36a than the N poles. However, the permanent magnet 22 may be arranged so that the N pole is located closer to the main surface 36a than the S pole. Further, the permanent magnet 22 may be arranged such that the direction in which the S poles and the N poles are arranged is along the main surface 36a.

The mover 20 may include an electromagnet that is driven by a battery or the like as a power source, instead of the permanent magnet 22. That is, the mover 20 only needs to include a magnet.

The ball caster 23 is a moving mechanism for carrying the mover body 21 along the main surface 36 a of the stator 30. The ball caster 23 is attached to the lower surface of the mover body 21 and contacts the main surface 36 a of the stator 30. The mover 20 may include a moving mechanism other than the ball caster 23, such as a universal caster or wheels.

[stator]
Next, the stator 30 will be described. The stator 30 is a structure for carrying the mover 20. In the embodiment, the stator 30 is a sheet-shaped member. As shown in FIG. 2, the stator 30 has a cover member 36 and a substrate 35.

The cover member 36 is a sheet-like protective member that suppresses abrasion of the substrate 35 and smoothes the surface of the stator 30. The cover member 36 covers the entire upper surface of the substrate 35. The shape of the cover member 36 in plan view is a rectangle, but may be other shapes such as a circle. The upper surface of the cover member 36 becomes the main surface 36 a of the stator 30. The main surface 36a faces the mover 20.

The cover member 36 is made of, for example, an organic material such as melamine resin, urethane resin, or acrylic resin. The cover member 36 may be formed of a silane compound or a metal oxide. Such an organic material, a silane compound, or a metal oxide is suitable for the cover member 36 in terms of abrasion resistance. If the cover member 36 is made of an organic material, the cover member 36 can be formed by a low-temperature manufacturing process. If an organic material is used for the cover member 36, it is easy to increase the area of the cover member 36.

The substrate 35 includes a plurality of layers, and a plurality of eccentric coils are formed in a matrix on each of the plurality of layers. The eccentric coil means a coil in which the strong magnetic field point of the coil (in other words, the position of the winding axis of the coil) is deviated from the center. Specifically, the substrate 35 has a structure in which a first layer 31, a second layer 32, a third layer 33, and a fourth layer 34 are laminated. The number of layers included in the substrate 35 is not limited to four, and may be three or less, or five or more. The order of stacking the first layer 31, the second layer 32, the third layer 33, and the fourth layer 34 is also not particularly limited.

A plurality of first eccentric coils 31a that are eccentric in the X-axis-direction are formed on the first layer 31. The X-axis-direction is an example of the first direction. A plurality of second eccentric coils 32a that are eccentric in the X-axis + direction are formed on the second layer 32. The X-axis + direction is an example of the second direction.

In the third layer 33, a plurality of third eccentric coils 33a that are eccentric in the Y-axis direction are formed. The Y-axis-direction is an example of the third direction. A plurality of fourth eccentric coils 34a that are eccentric in the Y-axis + direction are formed on the fourth layer 34. The Y-axis + direction is an example of the fourth direction.

Each of the first eccentric coil 31a, the second eccentric coil 32a, the third eccentric coil 33a, and the fourth eccentric coil 34a (hereinafter, also referred to as a plurality of eccentric coils without distinguishing them from each other) It is a coil for giving thrust. Each of the plurality of eccentric coils is magnetized by being supplied with power by the power supply circuit 40. Each of the plurality of eccentric coils is a pattern coil patterned in the substrate 35. Each of the plurality of eccentric coils is a circular winding wire whose winding axis extends along the direction perpendicular to the main surface 36a, but may be another winding wire such as a rectangular winding wire. Each of the plurality of eccentric coils may have a winding shape along a polygon such as a triangle or a hexagon, for example. The winding directions of the plurality of eccentric coils are the same, but may be different. The plurality of eccentric coils are formed of, for example, a metal material such as copper. The plurality of eccentric coils are formed by etching, for example.

[Power supply circuit]
Next, the power supply circuit 40 will be described. The power supply circuit 40 supplies power to the plurality of eccentric coils based on the control signal output from the control unit 50. In other words, the power supply circuit 40 supplies a current to the plurality of eccentric coils based on the control signal output from the control unit 50.

Although not shown, the power supply circuit 40 specifically includes a plurality of control circuits corresponding to the plurality of eccentric coils in a one-to-one correspondence. That is, the power supply circuit can supply power to each of the plurality of eccentric coils independently.

Each of the plurality of control circuits is, for example, a full bridge inverter circuit. The plurality of control circuits operate based on the control signal output from the control unit 50. Each of the plurality of control circuits supplies (a) no power to the eccentric coil corresponding to the control circuit, (b) supplies a DC voltage of a first polarity (for example, positive polarity), and (C) A direct current voltage having a second polarity (eg, negative polarity) opposite to the first polarity is supplied. The eccentric coil to which the DC voltage of the first polarity is supplied functions, for example, as an S-pole electromagnet on the main surface 36a side, and the eccentric coil to which the DC voltage of the second polarity is supplied has, for example, the main surface 36a side. It functions as an N-pole electromagnet.

In this way, the power supply circuit 40 can supply the DC voltage to each of the plurality of eccentric coils and switch the polarity of the DC voltage for each eccentric coil. It is not essential to switch the polarity of the DC voltage, and the power supply circuit 40 only needs to be able to turn on and off the supply of the DC voltage.

[Control part]
The control unit 50 controls the current supplied to the plurality of eccentric coils. The control unit 50 specifically controls the power supply circuit 40. The control unit 50 supplies a DC voltage to a part of the plurality of eccentric coils by controlling the power supply circuit 40, for example. As a result, a current for giving a thrust to the mover 20 flows through a part of the plurality of eccentric coils, whereby the mover 20 moves along the main surface 36a. This current is a direct current.

The control unit 50 is specifically realized by a microcomputer or the like, but may be realized by a dedicated circuit, a processor, or the like. Although not shown, the control unit 50 executes a control program stored in a storage unit (not shown) such as a semiconductor memory included in the control unit 50. The control unit 50 may be configured as a part of the power supply circuit 40.

[Operation of magnetic carrier]
As described above, the magnetic transfer device 10 includes the stator 30 including the substrate 35 in which a plurality of eccentric coils having different eccentric directions are stacked. The difference in the eccentric direction means that the position where the magnetic field becomes strong when electric power is supplied to the eccentric coil (hereinafter, also referred to as a strong magnetic field point) is different. Therefore, if the control unit 50 selectively supplies electric power to the plurality of stacked eccentric coils, the position where the magnetic field becomes strong can be finely adjusted. When there are four eccentric directions of the stacked eccentric coils like the substrate 35, the magnetic carrier device 10 can select the position where the magnetic field is strong from four positions.

Further, the magnetic transfer device 10 can also enhance the straightness of the mover 20 as in the following operation. The operation of the magnetic transfer device 10 will be described with reference to the operation of the magnetic transfer device according to the comparative example. First, the operation of the magnetic transport device according to the comparative example will be described. FIG. 3 is a plan view for explaining the operation of the magnetic transport device according to the comparative example.

The magnetic carrier device 110 according to the comparative example shown in FIG. 3 includes a mover 20 and a stator 130 including a substrate on which an uneccentric coil 131 is formed. The pitch of the permanent magnet 22 of the mover 20 in the X-axis direction and the pitch of the coil 131 in the X-axis direction are r, respectively, and the permanent magnet 22 moves from the center position of the coil 131 (that is, the strong magnetic field point P1). The distance to the center position is d.

When the mover 20 is conveyed in the Y axis − direction by the stator 130, the control unit of the magnetic conveyance device 110 supplies power to the coil 131 located on the Y axis − direction side of the mover 20, and An attractive force is generated between the coil 131 and the permanent magnet 22 of the mover 20.

At this time, if the attractive force (in other words, magnetic force) acting on one permanent magnet 22 by supplying power to one coil 131 is f1, the force Fmid acting on the mover 20 in the −Y-axis direction is 2 Since the attraction force of f1 acts on each of the two permanent magnets 22, Fmid=2·f1. The moment Mmid of the force on one side as an index of the rotation of the mover 20 is Mmid=r·f1/2.

Next, the operation of the magnetic transfer device 10 will be described. 4A and 4B are views for explaining the operation of the magnetic transfer device 10. FIG. 4A is a plan view and FIG. 4B is a cross-sectional view of the stator 30.

When the mover 20 is conveyed in the Y axis − direction by the stator 30, the control unit 50 of the magnetic conveyance device 10 supplies power to the eccentric coil located on the Y axis − direction side of the mover 20, An attractive force is generated between the eccentric coil and the permanent magnet 22 of the mover 20.

At this time, the control unit 50 generates the strong magnetic field point P2 in the vicinity of the perpendicular bisector L of the line segment that connects the center positions of the two permanent magnets 22 of the mover 20, so as to generate the strong magnetic field point P2. , And electric power is supplied to a set of eccentric coils including the second eccentric coil 32a located next to the first eccentric coil 31a on the X-axis-direction side in plan view. That is, the control unit 50 selectively supplies electric power to the first eccentric coil 31a formed in the first layer 31 among the four eccentric coils that are stacked, and the four eccentric coils stacked next to the first eccentric coil 31a. In contrast, the second eccentric coil 32a formed on the second layer 32 is selectively supplied with electric power.

The distance from each of the two permanent magnets 22 to the strong magnetic field point P2 is d/cos θ using the distance d. It should be noted that θ is an angle formed by the center position of the permanent magnet 22 and a straight line connecting the strong magnetic field point P2 and the Y axis. Suction force is 1, and therefore the square of the distance portion of, (in other words, force) suction force acting on one permanent magnet 22 becomes the above f1 multiplied by ^{cos 2 θ f1 · cos 2 θ} .

When this attractive force is decomposed into a component in the X-axis direction and a component in the Y-axis direction, the force Fmid acting on the mover 20 in the negative Y-axis direction is an attractive force of f1·cos ³ θ for each of the two permanent magnets 22. From the fact that Fmid=2·f1·cos ³ θ. The moment Mmid of the force on one side as an index of the rotation of the mover 20 is Mmid=r·f1·cos ³ θ/2.

Then, in the magnetic transfer device 10, a directional force Fdir=f1·cos ² θ·sin θ that causes the permanent magnet 22 to be directed to the perpendicular bisector L acts on each of the two permanent magnets 22. Such a directional force Fdir functions as a force that corrects the mover 20 when the mover 20 tries to shift in the X axis + direction or the X axis − direction. That is, the magnetic carrier device 10 can improve the straightness of the mover 20 as compared with the magnetic carrier device 110.

[Modification]
In the operation of the magnetic transfer device 10 described above, the mover 20 is moved by using the attraction force. However, instead of the attraction force, or by using the repulsive force in addition to the attraction force, the mover 20 is conveyed. You can also FIG. 5 is a plan view for explaining the operation according to the modified example of the magnetic transfer device 10.

When the mover 20 is conveyed in the Y axis − direction by the stator 30, the control unit 50 of the magnetic transfer device 10 supplies power to the eccentric coil located on the Y axis + direction side of the mover 20, A repulsive force is generated between the eccentric coil and the permanent magnet 22 of the mover 20.

At this time, the control unit 50 generates the strong magnetic field point P3 in the vicinity of the perpendicular bisector L of the line segment that connects the center positions of the two permanent magnets 22 of the mover 20, so as to generate the strong magnetic field point P3. , And electric power is supplied to a set of eccentric coils including the second eccentric coil 32a located next to the first eccentric coil 31a on the X-axis-direction side in plan view.

The distance from each of the two permanent magnets 22 to the strong magnetic field point P3 is d/cos θ using the distance d. It should be noted that θ is the angle formed by the center position of the permanent magnet 22 and the straight line connecting the strong magnetic field point P3 and the Y axis. Repulsion 1. Therefore the square of the distance portion of, (in other words, force) a repulsive force acting on one permanent magnet 22 becomes the above f1 multiplied by ^{cos 2 θ f1 · cos 2 θ} .

When this attractive force is decomposed into a component in the X-axis direction and a component in the Y-axis direction, the force Fmid acting on the mover 20 in the −Y-axis direction is a repulsive force of f1·cos ³ θ on each of the two permanent magnets 22. From the fact that Fmid=2·f1·cos ³ θ. The moment Mmid of the force on one side as an index of the rotation of the mover 20 is Mmid=r·f1·cos ³ θ/2.

Then, in the magnetic transport device 10, a direction force Fdir=f1·cos ² θ·sin θ that causes the permanent magnets 22 to move away from the perpendicular bisector L acts on each of the two permanent magnets 22. Such a directional force Fdir functions as a force that corrects the mover 20 when it is about to shift in the X-axis + direction or the X-axis-direction. That is, the magnetic transfer device 10 can improve the straightness of the mover 20 as compared with the magnetic transfer device 110.

[Effects, etc.]
As described above, the magnetic transfer device 10 includes the first layer 31 in which the plurality of first eccentric coils 31a that are eccentric in the first direction are formed, and the plurality of first layers that are eccentric in the second direction different from the first direction. A stator 30 having a substrate 35 that includes a second layer 32 that is a second layer 32 in which two eccentric coils 32a are formed, and is laminated on a first layer 31, a plurality of first eccentric coils 31a, and a plurality of first eccentric coils 31a. The mover 20 having the permanent magnet 22 is conveyed along the substrate 35 by the magnetic field generated by supplying power to at least a part of the second eccentric coil 32a. In the above embodiment, the first direction is the X-axis-direction and the second direction is the X-axis + direction. The permanent magnet 22 is an example of a magnet.

Such a magnetic transfer device 10 selects the first eccentric coil 31a and the second eccentric coil 32a when the first eccentric coil 31a and the second eccentric coil 32a are laminated at the same place on the substrate 35 in a plan view. The position where a strong magnetic field is generated in the stator 30 can be finely adjusted by driving the stator 30.

Further, for example, the first direction is a direction opposite to the second direction.

Such a magnetic transfer device 10 can finely adjust the position where a strong magnetic field is generated in the stator 30 by selectively driving the first eccentric coil 31a and the second eccentric coil 32a that are eccentric in the opposite directions. it can.

Further, for example, the magnetic transfer device 10 further includes a control unit 50 that controls the electric power supplied to the plurality of first eccentric coils 31a and the plurality of second eccentric coils 32a. When conveying the mover 20 in the third direction orthogonal to both the first direction and the second direction, the control unit 50 causes the first eccentric coil 31a and the first direction of the first eccentric coil 31a in plan view. Power is supplied to a set of eccentric coils including the second eccentric coil 32a located next to the side. In the above-mentioned embodiment, the third direction is the Y-axis-direction.

Such a magnetic transfer device 10 can improve the straightness of the mover 20.

Further, for example, the mover 20 has a plurality of permanent magnets 22 arranged along the first direction, and the intervals between the plurality of permanent magnets 22 are the same as the intervals between the pair of eccentric coils.

In such a magnetic transfer device 10, it becomes easy to enhance the straightness of the mover 20.

In the example of FIG. 4, the set of eccentric coils is located on the third direction side of the mover 20 in plan view.

Such a magnetic transfer device 10 can transfer the mover 20 in the third direction by the attraction force generated between the set of eccentric coils and the mover 20.

In the example of FIG. 5, the set of eccentric coils is located on the fourth direction side of the mover 20, which is opposite to the third direction, in a plan view. In the above embodiment, the fourth direction is the Y-axis + direction.

Such a magnetic transfer device 10 can transfer the mover 20 in the third direction by the repulsive force generated between the pair of eccentric coils and the mover 20.

The substrate 35 further includes a third layer 33 having a plurality of third eccentric coils 33a eccentric in a third direction orthogonal to both the first direction and the second direction, and a third layer 33 opposite to the third direction. And a fourth layer 34 having a plurality of fourth eccentric coils 34a that are eccentric in four directions.

In such a magnetic transfer device 10, when the first eccentric coil 31a, the second eccentric coil 32a, the third eccentric coil 33a, and the fourth eccentric coil 34a are laminated at the same place on the substrate 35 in a plan view. By selectively driving these, the position where a strong magnetic field is generated in the stator 30 can be adjusted more finely.

Further, when the mover 20 is conveyed in the third direction orthogonal to both the first direction and the second direction, the control method of the magnetic conveyance device 10 includes the first eccentric coil 31a and the first eccentricity in plan view. Electric power is supplied to the set of eccentric coils including the second eccentric coil 32a located next to the coil 31a in the first direction.

Such a control method selectively selects the first eccentric coil 31a and the second eccentric coil 32a when the first eccentric coil 31a and the second eccentric coil 32a are stacked at the same place in the plan view of the substrate 35. By driving, the position where a strong magnetic field is generated in the stator 30 can be finely adjusted.

(Other embodiments)
Although the magnetic carrier device according to the embodiment has been described above, the present invention is not limited to the above embodiment.

For example, in the above embodiment, the eccentric coil is a thin film pattern coil, but the coil may be a winding coil. Further, in the above-mentioned embodiment, the plurality of eccentric coils are arranged in a matrix, but they may be arranged in a layout other than the matrix. For example, when the coil has a winding shape along a hexagon, the plurality of pattern coils may be arranged in a honeycomb shape.

Further, in the above embodiment, four types of eccentric coils having different eccentric directions are formed on the substrate, but five or more types of eccentric coils having different eccentric directions may be formed on the substrate. For example, eight types of eccentric coils whose eccentric directions differ by 45 degrees may be formed on the substrate. In this case, the substrate includes eight layers corresponding to eight types of eccentric coils.

Further, the laminated structure shown in the schematic cross-sectional view of the stator of the above-mentioned embodiment is an example. The magnetic transfer device may include a stator having another laminated structure capable of realizing the characteristic function of the present invention. The magnetic transfer device may include, for example, a stator in which another layer is provided between layers of the laminated structure of the above-described embodiment as long as the same function as that of the laminated structure described in the above-described embodiment can be realized. Good.

Further, in the above-mentioned embodiment, the main materials constituting each layer of the laminated structure of the stator are exemplified, but each layer of the laminated structure of the stator has the same function as that of the laminated structure of the above-described embodiment. Other materials may be included as long as the above can be achieved.

Further, in the above-described embodiment, the processing executed by the specific processing unit may be executed by another processing unit. Further, the order of the plurality of processes may be changed, or the plurality of processes may be executed in parallel.

Further, in the above-described embodiment, the constituent elements such as the control unit may be realized by executing a software program suitable for the constituent elements. The components such as the control unit may be realized by a program execution unit such as a CPU or a processor reading and executing a software program recorded in a recording medium such as a hard disk or a semiconductor memory.

Further, the components such as the control unit may be realized by hardware. For example, the components such as the control unit may be circuits (or integrated circuits). These circuits may form one circuit as a whole or may be separate circuits. Further, each of these circuits may be a general-purpose circuit or a dedicated circuit.

Further, the general or specific aspects of the present invention may be realized by a recording medium such as a system, a device, a method, an integrated circuit, a computer program, or a computer-readable CD-ROM. Further, the system, the device, the method, the integrated circuit, the computer program, and the recording medium may be implemented in any combination. For example, the present invention may be realized as a control device including a control unit included in the magnetic carrier device, or may be realized as a control method for the magnetic carrier device of the above-described embodiment. The present invention may be implemented as a program that causes a computer to execute the control method. The present invention may be realized as a computer-readable non-transitory recording medium in which the program is recorded.

In addition, it is realized by making various modifications to those skilled in the art by those skilled in the art, or by arbitrarily combining the components and functions in each embodiment without departing from the spirit of the present invention. The present invention also includes such a form.

10, 110 Magnetic transport device 20 Mover 22 Permanent magnet 30, 130 Stator 31 1st layer 31a 1st eccentric coil 32 2nd layer 32a 2nd eccentric coil 33 3rd layer 33a 3rd eccentric coil 34 4th layer 34a 4th Four eccentric coil 35 Substrate 50 Controller

Claims (8)

A first layer formed with a plurality of first eccentric coils eccentric in the first direction, and a second layer formed with a plurality of second eccentric coils eccentric in a second direction different from the first direction, A stator having a substrate including a second layer laminated on the first layer;
A plurality of first eccentric coils, and a mover having a magnet, which is transported along the substrate by a magnetic field generated by supplying power to at least a part of the plurality of second eccentric coils. Transport device. The magnetic transfer device according to claim 1, wherein the first direction is a direction opposite to the second direction. Furthermore, the plurality of first eccentric coils, and a control unit for controlling the power supplied to the plurality of second eccentric coils,
When the control unit conveys the mover in a third direction orthogonal to both the first direction and the second direction, the first eccentric coil and the first eccentric coil in plan view are used. The magnetic carrier device according to claim 2, wherein electric power is supplied to a set of eccentric coils including a second eccentric coil located adjacent to the direction side. The mover has a plurality of the magnets arranged along the first direction,
The magnetic transfer device according to claim 3, wherein the interval between the plurality of magnets is the same as the interval between the pair of eccentric coils. The magnetic transfer device according to claim 3, wherein the set of eccentric coils is located on the third direction side of the mover in a plan view. The magnetic transfer device according to claim 3, wherein the set of eccentric coils is located on a fourth direction side of the mover opposite to the third direction in a plan view. The substrate further comprises
A third layer formed with a plurality of third eccentric coils eccentric in a third direction orthogonal to both the first direction and the second direction,
The magnetic carrier device according to any one of claims 2 to 6, further comprising: a fourth layer having a plurality of fourth eccentric coils that are eccentric in a fourth direction opposite to the third direction. A method of controlling a magnetic carrier device, comprising:
The magnetic carrier is
A first layer formed with a plurality of first eccentric coils eccentric in the first direction, and a second layer formed with a plurality of second eccentric coils eccentric in a second direction opposite to the first direction. A stator having a substrate including a second layer laminated on the first layer,
A plurality of first eccentric coils, and a mover having a magnet, which is transported along the substrate by a magnetic field generated by supplying power to at least a part of the plurality of second eccentric coils,
In the control method, when the mover is conveyed in a third direction orthogonal to both the first direction and the second direction, the first eccentric coil and the first eccentric coil in plan view are used. A control method for supplying electric power to a set of eccentric coils including a second eccentric coil located next to the direction side.

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