JP2019161834A - Plane motor - Google Patents

Abstract

To provide a plane motor with improved thrust to a movable element.SOLUTION: A plane motor 10 has a movable element 20 with an annular permanent magnet 21, and a stator 30 with a principal surface 31a opposed to the movable element 20a and a plurality of pattern coils 33 arranged along the principal surface 31. The permanent magnet 21 has a structure in which S pole and N pole are positioned in a radial direction between an inner face 21e and an outer face 21f.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a planar motor that moves a mover two-dimensionally along a plane.

  A planar motor that moves a mover two-dimensionally along a plane is known. As such a planar motor, Patent Document 1 discloses a linear electromagnetic microactuator that two-dimensionally transports a micromachine component of about several millimeters.

JP 11-299215 A

  In the planar motor, improvement of thrust to the mover becomes a problem.

  The present invention provides a planar motor with improved thrust on the mover.

  A planar motor according to an aspect of the present invention includes a mover having an annular permanent magnet, a main surface facing the mover, and a stator having a plurality of coils arranged along the main surface. The permanent magnet has a structure in which an S pole and an N pole are arranged in a radial direction between an inner surface and an outer surface.

  According to the present invention, a planar motor with improved thrust on the mover is realized.

FIG. 1 is a diagram illustrating a schematic configuration of a planar motor according to an embodiment. FIG. 2 is a diagram illustrating a cross-sectional structure of the planar motor according to the embodiment. FIG. 3 is a plan view showing the surface of the circuit board. FIG. 4 is a plan view showing the back surface of the circuit board. FIG. 5 is an external perspective view of a permanent magnet. FIG. 6 is a diagram illustrating a cross-sectional structure of a planar motor according to a comparative example. FIG. 7 is a first external perspective view of a permanent magnet having another structure. FIG. 8 is a second external perspective view of a permanent magnet having another structure. FIG. 9 is a third external perspective view of a permanent magnet having another structure. FIG. 10 is a first plan view of a permanent magnet composed of a plurality of permanent magnet pieces. FIG. 11 is a second plan view of a permanent magnet constituted by a plurality of permanent magnet pieces. FIG. 12 is a third plan view of a permanent magnet constituted by a plurality of permanent magnet pieces. FIG. 13 is a diagram illustrating a first example of the shape of the permanent magnet piece. FIG. 14 is a diagram illustrating a second example of the shape of the permanent magnet piece. FIG. 15 is a diagram illustrating a third example of the shape of the permanent magnet piece. FIG. 16 is a diagram showing a fourth example of the shape of the permanent magnet piece.

  Hereinafter, embodiments will be described with reference to the drawings. It should be noted that each of the embodiments described below shows a comprehensive or specific example. The numerical values, shapes, materials, constituent elements, arrangement positions and connecting forms of the constituent elements, and the like shown in the following embodiments are merely examples, and are not intended to limit the present invention. In addition, among the constituent elements in the following embodiments, constituent elements that are not described in the independent claims indicating the highest concept are described as optional constituent elements.

  Each figure is a schematic diagram and is not necessarily shown strictly. Moreover, in each figure, the same code | symbol is attached | subjected to the substantially same structure, and the overlapping description may be abbreviate | omitted or simplified.

  In the drawings used for explanation in the following embodiments, coordinate axes may be shown. The Z-axis direction in the coordinate axes is, for example, the vertical direction, the Z-axis + side is expressed as the upper side (upper), and the Z-axis-side is expressed as the lower side (lower). In other words, the Z-axis direction is a direction perpendicular to the main surface of the stator. The X-axis direction and the Y-axis direction are directions orthogonal to each other on a plane (horizontal plane) perpendicular to the Z-axis direction. The XY plane is a plane parallel to the main surface of the stator. For example, in the following embodiments, “plan view” means viewing from the Z-axis direction. In the drawings, the N pole of the magnet is described as “N”, and the S pole of the magnet is described as “S”.

(Embodiment)
[Constitution]
Hereinafter, the structure of the planar motor according to the embodiment will be described with reference to the drawings. FIG. 1 is a diagram illustrating a schematic configuration of a planar motor according to an embodiment.

  As shown in FIG. 1, the planar motor 10 according to the embodiment includes a mover 20, a stator 30, and a control circuit 40. The planar motor 10 is a linear motor (electromagnetic actuator) that moves the mover 20 two-dimensionally along the main surface 31 a of the stator 30. The flat motor 10 is used, for example, for transporting luggage in a distribution warehouse.

  First, the mover 20 will be described. The mover 20 is a moving object in the planar motor 10. The mover 20 has a permanent magnet 21. In FIG. 1, the mover 20 is schematically illustrated, but the mover 20 is specifically a structure to which a permanent magnet 21 is attached. The permanent magnet 21 is, for example, a ferrite magnet, but may be an alnico magnet or a neodymium magnet, and the magnetic material forming the permanent magnet 21 is not particularly limited.

  In the example of FIG. 1, the permanent magnet 21 is annular. The detailed structure of the permanent magnet 21 will be described later.

  The mover 20 includes, for example, a plurality of permanent magnets 21 as long as it has at least one permanent magnet 21, and the number of permanent magnets 21 included in the mover 20 is not particularly limited.

  Next, the stator 30 will be described. The stator 30 is a structure for moving the mover 20 and is fixed to a building or the like. FIG. 2 is a diagram showing a cross-sectional structure of the planar motor 10. As shown in FIG. 2, the stator 30 includes a cover member 31 and a circuit board 32. In FIG. 1, the illustration of the cover member 31 is omitted to clearly show the arrangement of the plurality of pattern coils 33.

  The cover member 31 is a plate-like or sheet-like member that covers the circuit board 32. The cover member 31 has a rectangular shape in plan view, but may be other shapes such as a circle. The upper surface of the cover member 31 is a main surface 31a of the stator 30. The main surface 31 a faces the mover 20. The main surface 31a is formed of a material with low magnetic permeability in order to prevent the mover 20 (permanent magnet 21) from being attracted to the stator 30. Specifically, the cover member 31 is formed of a non-metallic material (a material having an insulating property) such as a resin material.

  The circuit board 32 is a thin-film (sheet-like) board on which a plurality of thin-film pattern coils 33 are formed. The planar view shape of the circuit board 32 is rectangular, but may be other shapes such as a circle. The base material of the circuit board 32 is formed of, for example, a resin material such as glass epoxy. The thickness of the circuit board 32 is, for example, about 170 μm to 200 μm.

  A plurality of pattern coils 33 are formed on the surface of the circuit board 32. FIG. 3 is a plan view showing the surface of the circuit board 32.

  As shown in FIGS. 1 and 3, a plurality of pattern coils 33 are arranged in a matrix on the surface of the circuit board 32. Each of the plurality of pattern coils 33 is a rectangular winding wire whose winding axis is perpendicular to the main surface 31a, but may be other winding shapes such as a circular winding shape. The winding directions of the plurality of pattern coils 33 are the same, but may be different.

  One end portion (one end portion located on the inner peripheral side) located near the winding center of the pattern coil 33 is electrically connected to the wiring 36 formed on the back surface of the circuit board 32 by the conductive via structure 35. Is done. FIG. 4 is a plan view showing the back surface of the circuit board 32. The other end located on the outer peripheral side of the pattern coil 33 is electrically connected to the control circuit 40.

  The pattern coil 33, the conductive via structure 35, and the wiring 36 are formed of a metal material such as copper, for example. The pattern coil 33 and the wiring 36 are patterned by, for example, etching.

  Next, the control circuit 40 will be described. The control circuit 40 is a circuit that controls driving of the plurality of pattern coils 33. Specifically, the control circuit 40 controls the current supplied to the plurality of pattern coils 33 to move the mover 20 along the main surface 31a. As schematically illustrated in FIG. 3, the control circuit 40 includes a control unit 41.

  For example, the control unit 41 (a) does not supply power to each of the plurality of pattern coils 33, (b) supplies a direct-current voltage having a first polarity (for example, positive polarity), and (c). Any one of supplying a DC voltage of the second polarity (for example, negative polarity) opposite to the first polarity is performed. The pattern coil 33 to which the first polarity DC voltage is supplied functions as an S-pole electromagnet on the main surface 31a side, for example, and the pattern coil 33 to which the second polarity DC voltage is supplied on the main surface 31a side, for example. Functions as an N-pole electromagnet.

  As described above, the control circuit 40 (more specifically, the control unit 41) can supply a DC voltage to each of the plurality of pattern coils 33 and switch the polarity of the DC voltage. In other words, the control circuit 40 can supply a current to each of the plurality of pattern coils 33 and switch the polarity of the current. The control circuit 40 generates an attractive force or a repulsive force between the pattern coil 33 and the permanent magnet 21 by switching the polarities of the plurality of pattern coils 33. Thereby, the needle | mover 20 moves along the main surface 31a.

  Specifically, the control unit 41 is realized by at least one of a processor, a microcomputer, and a circuit. Part or all of the control circuit 40 may be included in the circuit board 32.

  The planar motor 10 as described above has advantages such as low noise, low vibration, difficulty in generating dust, and partition wall transmission because magnetic force is used to move the mover 20. Further, by using a plurality of pattern coils 33 in the planar motor 10, the stator 30 can be made thinner, lighter, and lower in cost.

[Permanent magnet structure]
Next, the structure of the permanent magnet 21 will be described. FIG. 5 is an external perspective view of the permanent magnet 21. As shown in FIG. 5, the permanent magnet 21 has an annular shape. The outer shape of the permanent magnet 21 is a flat columnar shape, and a cavity 21 c is provided at the center of the permanent magnet 21.

  The surface magnetic flux density of the permanent magnet 21 provided with the cavity 21c in the center is not different from the surface magnetic flux density of the permanent magnet not provided with the cavity. Therefore, according to such a cavity 21c, weight reduction of the permanent magnet 21 can be achieved while suppressing a decrease in the surface magnetic flux density. If the mover 20 is reduced in weight by reducing the weight of the permanent magnet 21, the thrust of the mover 20 is improved. Note that a magnetic material or the like may be embedded in the cavity 21c.

  In general, a permanent magnet without a cavity has a higher magnetic flux density in the peripheral part than in the central part. If the cavity 21c is provided in the center portion like the permanent magnet 21, points of high magnetic flux density can be formed both inside and outside. If it does so, attraction | suction force and repulsive force can be produced between the stators 30 in the point of high magnetic flux density of both inside and outside. Therefore, such a permanent magnet 21 can increase the thrust to the mover 20.

  Specifically, the permanent magnet 21 has a structure in which the south pole and the north pole are arranged in the radial direction between the inner side surface 21e and the outer side surface 21f. In other words, the inner surface 21e is an inner peripheral surface, and the outer surface 21f is an outer peripheral surface. In other words, the radial direction is a direction from the inner side surface 21e toward the outer side surface 21f, or a direction from the outer side surface 21f toward the inner side surface 21e.

  More specifically, the permanent magnet 21 has a first portion 21a in which the south pole is located on the inner side and the north pole is located on the outer side, the north pole is located on the inner side, and the south pole is located on the outer side. Second portion 21b. The first portion 21a is a portion corresponding to one semicircle obtained when the annular permanent magnet 21 is equally divided into two, and the second portion 21b is a portion corresponding to the other semicircle. .

  As shown in FIG. 2, the radial direction of the permanent magnet 21 attached to the main body of the mover 20 is along the main surface 31a. That is, the arrangement direction of the S pole and the N pole of the permanent magnet 21 is along the main surface 31a. The effect obtained by the planar motor 10 using such a permanent magnet 21 for the mover 20 will be described with reference to a planar motor according to a comparative example. FIG. 6 is a diagram illustrating a cross-sectional structure of a planar motor according to a comparative example.

  As shown in FIG. 6, the planar motor 10 d according to the comparative example includes a mover 20 d and a stator 30. The mover 20d has an annular permanent magnet 21d. The permanent magnet 21d is different from the permanent magnet 21 in the arrangement direction of the magnetic poles, and the arrangement direction of the S pole and the N pole of the permanent magnet 21d is orthogonal to the main surface 31a. In FIG. 6, the S pole separated into two in a cross-sectional view faces the main surface 31a. Then, the stator 30 moves the mover 20 by generating an attractive force (white arrow in FIG. 6) and a repulsive force (black arrow in FIG. 6) between each of the two south poles.

  On the other hand, as shown in FIG. 2, in the planar motor 10, two sets of S poles and N poles are provided across the cavity 21c in a cross-sectional view, and face the main surface 31a. Then, the stator 30 generates an attractive force (white arrow in FIG. 2) and a repulsive force (black arrow in FIG. 2) between each of the four magnetic poles in total, that is, two S poles and two N poles. The mover 20 can be moved. That is, the planar motor 10 can improve the thrust to the mover 20 compared to the planar motor 10d.

[Modification 1]
Thus, the structure of the permanent magnet that can improve the thrust to the mover 20 is not limited to the structure of the permanent magnet 21. 7 to 9 are external perspective views of permanent magnets having other structures.

  The permanent magnet 121 shown in FIG. 7 has an annular shape. The permanent magnet 121 includes an inner annular portion 121a and an outer annular portion 121b that is adjacent to the inner annular portion 121a and surrounds the inner annular portion 121a. In the permanent magnet 121, the inner annular portion 121a is the S pole, and the outer annular portion 121b is the N pole. The inner annular portion 121a may be an N pole, and the outer annular portion 121b may be an S pole. That is, in the permanent magnet 121, the inner annular portion 121a may be one of the S pole and the N pole, and the outer annular portion 121b may be the other of the S pole and the N pole.

  Similar to the permanent magnet 21, the permanent magnet 121 has a structure in which the S pole and the N pole are arranged in the radial direction between the inner side surface and the outer side surface. Therefore, if the permanent magnet 121 is attached to the main body of the mover 20, the thrust to the mover 20 is improved.

  Moreover, the permanent magnet attached to the main body of the needle | mover 20 should just be cyclic | annular, and is not limited to an annular | circular shape. For example, the permanent magnet 221 shown in FIG. 8 and the permanent magnet 321 shown in FIG. 9 may be attached to the main body of the mover 20. The arrangement of the magnetic poles of the permanent magnet 221 is the same as that of the permanent magnet 21, and the arrangement of the magnetic poles of the permanent magnet 321 is the same as that of the permanent magnet 121.

[Modification 2]
Moreover, the permanent magnet attached to the main body of the needle | mover 20 may be comprised by the some permanent magnet piece. FIG. 10 is a first plan view of a permanent magnet composed of a plurality of permanent magnet pieces.

  The permanent magnet 421 shown in FIG. 10 includes a plurality of permanent magnet pieces 421a arranged in an annular shape. Each of the plurality of permanent magnet pieces 421a has a structure in which an S pole and an N pole are arranged in the radial direction in an annular arrangement. In the permanent magnet 421, each of all the permanent magnet pieces 421a has an S pole located inside the annular arrangement and an N pole located outside the annular arrangement.

  The arrangement of the magnetic poles in the permanent magnet 421 is the same as that of the permanent magnet 121. In addition, the arrangement | positioning of the magnetic pole similar to the permanent magnet 21 is also realizable using a some permanent magnet piece. FIG. 11 is a second plan view of a permanent magnet constituted by a plurality of permanent magnet pieces.

  The permanent magnet 521 shown in FIG. 10 includes a plurality of permanent magnet pieces arranged in an annular shape. In the plurality of permanent magnet pieces, a first permanent magnet piece 521a in which the south pole is located on the inside and the north pole is located on the outside, the north pole is located on the inside, and the south pole is located on the outside. And a second permanent magnet piece 521b.

  The plurality of first permanent magnet pieces 521a are arranged in a semicircular shape, and the plurality of second permanent magnet pieces 521b are arranged in a semicircular shape. Thereby, the arrangement of the magnetic poles in the permanent magnet 521 is the same as that of the permanent magnet 21.

  Moreover, what is necessary is just to arrange | position a some permanent magnet piece to cyclic | annular form, and it is not essential to arrange | position circularly. FIG. 12 is a third plan view of a permanent magnet constituted by a plurality of permanent magnet pieces.

  For example, like the permanent magnet 621 shown in FIG. 12, the plurality of permanent magnet pieces 621a may be arranged in a rectangular ring shape. Although not illustrated, the plurality of permanent magnet pieces 621a may be arranged in a rectangular ring shape so that the arrangement of the magnetic poles is the same as that of the permanent magnet 221.

  In addition, the shape of a permanent magnet piece is not specifically limited. 13-16 is a figure which shows the shape of a permanent magnet piece. The permanent magnet piece 22 shown in FIG. 13 has a flat rectangular parallelepiped shape, and has a structure in which S poles and N poles arranged in the thickness direction are arranged. The permanent magnet piece 23 shown in FIG. 14 has a prismatic shape (that is, a rectangular parallelepiped shape), and has a structure in which an S pole and an N pole are arranged in the height direction of the prism. The permanent magnet piece 24 shown in FIG. 15 has a flat cylindrical shape, and has a structure in which S poles and N poles are arranged in the height direction of the cylinder. The permanent magnet piece 25 shown in FIG. 16 has a fan shape in plan view, and has a structure in which S poles and N poles are arranged in the radial direction of the fan shape. The permanent magnet attached to the main body of the mover 20 may be configured by arranging any such permanent magnet pieces in an annular shape.

[Effects]
As described above, the planar motor 10 includes the mover 20 having the annular permanent magnet 21, the main surface 31a facing the mover 20, and the plurality of pattern coils 33 disposed along the main surface 31a. And a stator 30 having the same. The permanent magnet 21 has a structure in which the S pole and the N pole are arranged along the radial direction between the inner side surface 21e and the outer side surface 21f.

  If such a permanent magnet 21 is attached to the main body of the mover 20 so that the radial direction of the permanent magnet 21 is along the main surface 31a, the four magnetic poles face the main surface 31a. For this reason, the planar motor 10 can move the mover 20 by generating an attractive force and a repulsive force between the stator 30 and each of the four magnetic poles, for example. Thereby, the planar motor 10 can improve the thrust to the mover 20.

  The permanent magnet 21 has a first portion 21a in which the south pole is located on the inner side and an north pole on the outer side, and a second portion 21b in which the north pole is located on the inner side and the south pole is located on the outer side. Including.

  Thus, according to the permanent magnet 21 having one of the S pole and the N pole on the inner side and the other of the S pole and the N pole on the outer side, the planar motor 10 can improve the thrust to the mover 20.

  The permanent magnet 121 includes an inner annular portion 121a and an outer annular portion 121b that is adjacent to the inner annular portion 121a and surrounds the inner annular portion 121a. The inner annular portion 121a is one of an S pole and an N pole, The outer annular portion 121b is the other of the S pole and the N pole.

  As described above, according to the permanent magnet 121 including the south pole and the north pole on the inner side and the outer side, the planar motor 10 can improve the thrust to the mover 20.

  Moreover, the permanent magnet 21 and the permanent magnet 121 are annular.

  According to such an annular permanent magnet 21 or permanent magnet 121, the planar motor 10 can improve the thrust to the mover 20.

  Further, the permanent magnet 221 and the permanent magnet 321 have a rectangular ring shape.

  With such a rectangular annular permanent magnet 221 or permanent magnet 321, the planar motor 10 can improve the thrust to the mover 20.

  The permanent magnet 421 includes a plurality of permanent magnet pieces 421a arranged in an annular shape, and each of the plurality of permanent magnet pieces 421a has a structure in which S poles and N poles are arranged in the radial direction.

  According to such a permanent magnet 421, the planar motor 10 can improve the thrust to the mover 20.

  Further, like the permanent magnet piece 22 or the permanent magnet piece 23, each of the plurality of permanent magnet pieces 421a has a rectangular parallelepiped shape, for example.

  Thus, according to the permanent magnet 421 constituted by the rectangular parallelepiped permanent magnet piece 22 or the permanent magnet piece 23, the planar motor 10 can improve the thrust force to the mover 20.

  Further, like the permanent magnet piece 24, each of the plurality of permanent magnet pieces 421a has, for example, a cylindrical shape.

  As described above, according to the permanent magnet 421 configured by the cylindrical permanent magnet piece 24, the planar motor 10 can improve the thrust to the mover 20.

  Further, like the permanent magnet piece 25, each of the plurality of permanent magnet pieces 421a has, for example, a fan shape in plan view.

  As described above, according to the permanent magnet 421 configured by the sector-shaped permanent magnet piece 25 in the plan view, the planar motor 10 can improve the thrust to the mover 20.

  The plurality of permanent magnet pieces included in the permanent magnet 521 includes a first permanent magnet piece 521a in which the south pole is located on the inner side and the north pole is located on the outer side, the north pole is located on the inner side, and And a second permanent magnet piece 521b having an S pole located outside.

  As described above, according to the permanent magnet 521 including the south pole and the north pole on the inner side and the outer side, the planar motor 10 can improve the thrust to the mover 20.

  The planar motor 10 further includes a control circuit 40 that moves the mover 20 along the main surface 31a by controlling the current supplied to the plurality of pattern coils 33.

  Such a control circuit 40 can improve the thrust of the mover 20 when the mover 20 is moved along the main surface 31a.

(Other embodiments)
The planar motor according to the embodiment has been described above, but the present invention is not limited to the above embodiment.

  For example, in the above embodiment, the stator has a thin film pattern coil, but the coil provided in the stator is not limited to the pattern coil. The stator may include a plurality of winding coils instead of the pattern coil. Moreover, in the said embodiment, although the some pattern coil was arrange | positioned at matrix form, you may arrange | position by layouts other than a matrix form. For example, when the pattern coil has a winding shape along a hexagon, the plurality of pattern coils may be arranged in a honeycomb shape.

  The laminated structure shown in the schematic cross-sectional view of the stator of the above embodiment is an example. The planar motor may include a stator having another laminated structure that can realize the characteristic function of the present invention. The planar motor may include, for example, a stator in which another layer is provided between layers of the stacked structure of the above embodiment as long as the same function as the stacked structure described in the above embodiment can be realized. .

  In the above embodiment, the main material constituting each layer of the laminated structure of the stator is illustrated, but each layer of the laminated structure of the stator has the same function as the laminated structure of the above embodiment. Other materials may be included to the extent that can be realized. For example, a magnetic layer may be provided between the cover member and the circuit board. The magnetic layer is formed of a material such as iron oxide, chromium oxide, cobalt, or ferrite, for example. According to such a magnetic layer, the amount of magnetic flux contributing to the movement of the mover can be improved. That is, the magnetic flux generated by the pattern coil can be used efficiently.

  In the above-described embodiment, the components such as the control unit may be configured by dedicated hardware or may be realized by executing a software program suitable for each component. Each component may be realized by a program execution unit such as a CPU or a processor reading and executing a software program recorded on a recording medium such as a hard disk or a semiconductor memory.

  In addition, it is realized by variously conceiving various modifications conceived by those skilled in the art for each embodiment, or by arbitrarily combining the components and functions in each embodiment without departing from the spirit of the present invention. This form is also included in the present invention.

10, 10d planar motor 20, 20d mover 21, 21d, 121, 221, 321, 421, 521, 621 permanent magnet 21a first part 21b second part 21e inner side 21f outer side 22, 23, 24, 25, 421a, 621a Permanent magnet piece 30 Stator 31a Main surface 33 Pattern coil 40 Control circuit 121a Inner annular portion 121b Outer annular portion 521a First permanent magnet piece 521b Second permanent magnet piece

Claims (11)

A mover having an annular permanent magnet;
A main surface facing the mover, and a stator having a plurality of coils arranged along the main surface;
The permanent magnet has a structure in which an S pole and an N pole are arranged in a radial direction between an inner surface and an outer surface. The permanent magnet includes a first portion in which an S pole is located on the inner side and an N pole on the outer side, and a second portion in which the N pole is located on the inner side and the S pole is located on the outer side. Item 2. The flat motor according to Item 1. The permanent magnet includes an inner annular portion, and an outer annular portion adjacent to the inner annular portion and surrounding the inner annular portion,
The inner annular portion is one of an S pole and an N pole,
The planar motor according to claim 1, wherein the outer annular portion is the other of the S pole and the N pole. The planar motor according to claim 1, wherein the permanent magnet has an annular shape. The planar motor according to claim 1, wherein the permanent magnet has a rectangular ring shape. The permanent magnet includes a plurality of permanent magnet pieces arranged in an annular shape,
The planar motor according to claim 1, wherein each of the plurality of permanent magnet pieces has a structure in which S poles and N poles are arranged in a radial direction. The planar motor according to claim 6, wherein each of the plurality of permanent magnet pieces has a rectangular parallelepiped shape. The planar motor according to claim 6, wherein each of the plurality of permanent magnet pieces has a cylindrical shape. The planar motor according to claim 6, wherein each of the plurality of permanent magnet pieces has a fan shape in plan view. The plurality of permanent magnet pieces have a first permanent magnet piece having an S pole on the inside and an N pole on the outside, an N pole on the inside, and an S pole on the outside. The flat motor according to any one of claims 6 to 9, wherein a second permanent magnet piece is included. The planar motor according to claim 1, further comprising a control circuit that moves the mover along the main surface by controlling current supplied to the plurality of coils.

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