WO2019096094A1 - 一种版库装置及掩模版存取方法 - Google Patents

一种版库装置及掩模版存取方法 Download PDF

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Publication number
WO2019096094A1
WO2019096094A1 PCT/CN2018/115057 CN2018115057W WO2019096094A1 WO 2019096094 A1 WO2019096094 A1 WO 2019096094A1 CN 2018115057 W CN2018115057 W CN 2018115057W WO 2019096094 A1 WO2019096094 A1 WO 2019096094A1
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WO
WIPO (PCT)
Prior art keywords
magazine
plate
module
unlocking
bottom plate
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Application number
PCT/CN2018/115057
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English (en)
French (fr)
Inventor
王刚
陈淮阳
Original Assignee
上海微电子装备（集团）股份有限公司
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Publication of WO2019096094A1 publication Critical patent/WO2019096094A1/zh

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/66—Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof

Definitions

  • the present invention relates to the field of lithographic apparatus, and in particular, to a library apparatus and a corresponding reticle access method.
  • a plate In the field of lithography semiconductor technology, a plate is usually used to store and protect the reticle.
  • the commonly used 6-inch reticle type has three types: NIKON, CANON, and SMIF.
  • the cover includes a cover and a base
  • the base includes a bottom plate and a shelf disposed on the bottom plate.
  • the cover is sealed and protected by locking the plate with the bottom plate for storing the reticle.
  • the magazine device for storing and unlocking the box generally has a vertical lifting module. After the box cover and the card base are unlocked, the cover case and the box are realized by the vertical lifting module. Separation of the base portion.
  • the existing magazine device is generally fixed by the cover case, and the base of the plate is moved from top to bottom to achieve separation between the two.
  • the transfer robot can realize the pick and place of the reticle on different layers of the shelf at the same pick and place position.
  • the vertical movement direction of the base of the magazine is required to be perpendicular to the upper surface of the reticle stored in the magazine.
  • the design accuracy of the library is high.
  • the lithography machine equipment requires the size of the magazine device to be smaller and smaller.
  • the production line is generally used for the pick-and-place magazine. The design needs to avoid the space when the crane picks up the box.
  • the vertical space of the library device is required to be small.
  • the present invention provides a magazine device for storing and unlocking a magazine, the magazine comprising a detachable casing and a base, the substrate comprising a bottom plate and a plate disposed on the bottom plate
  • the cover protects the plate by locking with the bottom plate, the plate is used for storing a reticle, and the plate device comprises a support base, a positioning support plate, an unlocking module and a lifting drive module
  • the positioning support plate is fixed on the support base for carrying the plate;
  • the unlocking module is slidably disposed on the support base, and is configured to be carried on the positioning support plate
  • the magazine is unlocked such that the casing is disconnected from the bottom plate, the casing being connected to the unlocking module after being unlocked;
  • the lifting drive module is disposed on the support base and biased at the positioning One side of the support plate is driven by the lifting drive module to vertically move the unlocking module relative to the positioning support plate to move the cover after the unlocking, so that the cover is separated from the base body and exposed
  • the lift drive module comprises a motor and a lead screw
  • the motor is fixed on the support base
  • the lead screw comprises a screw shaft and a screw nut
  • the screw shaft and the lead screw nut Engaging the screw shaft is connected to the unlocking module
  • the screw nut is rotatably connected to the support base
  • the motor drives the screw nut to rotate, thereby driving the screw shaft relative to the The positioning support plate is described for vertical lifting movement.
  • the lift drive module further includes a hollow rotating member, the lead screw nut is fixed in the rotating member, the rotating member is fixed on the support base by a bearing, and the motor passes through the timing belt The wheel and the timing belt form a transmission connection with the rotating member.
  • the top end of the motor and the lead screw nut is lower than the bearing surface of the positioning support plate.
  • the magazine device further includes a lifting guide module, the lifting guide module includes a fixing assembly and a sliding assembly, the fixing assembly is fixed on the supporting base, and the sliding assembly is slidably disposed at the The unlocking module is coupled to the sliding assembly.
  • the lifting guide module is a linear guide
  • the fixing component is a track
  • the sliding component is a slider
  • the lifting guide module is a double-layer step linear guide
  • the lifting guide module includes a first linear guide and a second linear guide
  • the track of the first linear guide is fixed by the first support plate.
  • the slider of the first linear guide is connected to the track of the second linear guide through a second support plate, and the slider of the second linear guide passes through the third support plate and the unlocking module Connected.
  • the library device further comprises an air bath system, wherein the air bath is introduced into the plate by the air bath system to purify particles of the reticle on the plate while avoiding external particles entering Within the library device.
  • the library device further includes a first particle pumping pipe disposed on the lifting and guiding module and a second particle pumping pipe disposed on the unlocking module, and the first particle is drawn through the first particle
  • the pipe is exhausted to discharge particles generated during the movement of the lifting guide module, and the particles generated by the unlocking module during the movement are exhausted through the second particle pumping pipe.
  • the library device further includes a magazine sealing cover, and the magazine sealing cover is fixedly connected to the unlocking module for sealing the internal environment of the magazine device.
  • the positioning support plate is provided with a positioning hole, and the bottom plate is fixed by the positioning hole, thereby positioning the plate.
  • the present invention also provides a reticle access method using the above-described library device for accessing a reticle from a magazine, including:
  • the method further includes the step of positioning the label box through the bottom plate.
  • the cover is removed or returned by the vertical lifting movement of the unlocking module relative to the base plate.
  • the reticle on the plate is removed or replaced by adjusting the vertical height of the transport robot relative to the base plate.
  • the present invention has the following advantages:
  • the magazine device of the present invention drives the unlocking module to be vertically lifted relative to the positioning support plate by the lifting drive module biased on one side of the positioning support plate to drive the unlocked version of the cover case to "the box base" Separating the open version of the box by means of a fixed and fixed box cover vertical lifting method, and combining the means for adjusting the vertical height of the transmission robot in the reticle access method of the present invention, can realize different layers on the version of the plate holder
  • the stencil pick-and-place does not require the "vertical movement direction of the lifting drive module and the upper surface of the reticle in the frame to be strictly vertical", which greatly reduces the accuracy requirements of the library structure;
  • the magazine device of the present invention reduces the vertical space occupied by the lifting drive module by means of "rotary movement of the screw nut, vertical movement of the screw shaft, and bearing arrangement under the screw shaft", and then combined with the partial
  • the structure disposed on one side of the positioning support plate and the screw nut and the motor are lower than the bearing surface of the positioning support plate and the double-stepped linear guide further reduce the vertical space of the magazine;
  • the magazine device of the invention reduces the particle pollution source inside the magazine through the offset lifting drive module and the pumping pipeline, and further combines the air bath system of the magazine to further ensure the cleanness of the internal environment and the reticle of the magazine;
  • the reticle access method of the present invention improves the pick-and-place flexibility of the reticle by adjusting the vertical height of the transport robot to adapt to the pick-and-place of different layer reticle on the shelf, and no longer strictly fixes a plate.
  • the position, while continuously accessing the air bath during the access of the reticle, can effectively reduce the contamination of the reticle by the external environment.
  • FIG. 1 is a schematic diagram of a library device according to Embodiment 1 of the present invention.
  • FIG. 2 is a cross-sectional view of a lifting drive module of a magazine device according to Embodiment 1 of the present invention
  • FIG. 3 is a schematic flow chart of a mask access method according to Embodiment 1 of the present invention.
  • FIG. 4 is a state diagram of a magazine device when the cartridge casing is in a high position according to Embodiment 1 of the present invention
  • FIG. 5 is a state diagram of a magazine device when the cartridge casing is in a low position according to Embodiment 1 of the present invention
  • FIG. 6 is a front elevational view of a lifting guide module of a magazine device according to a second embodiment of the present invention.
  • FIG. 7 is a side view showing a lifting guide module of a magazine device according to Embodiment 2 of the present invention.
  • FIG. 8 is a state diagram of a magazine device unlocking a box according to Embodiment 3 of the present invention.
  • FIG. 9 is a schematic diagram of a library device according to Embodiment 3 of the present invention.
  • FIG. 10 is a schematic diagram of a gas bath and a reticle of a magazine device according to a third embodiment of the present invention.
  • the lithography machine equipment requires that the size of the library equipment is getting smaller and smaller.
  • the production line is used to pick up and release the box.
  • it is necessary to avoid the space when the crane picks up the box. Requires that the vertical space of the library is small;
  • the transfer manipulator with the reticle has a vertical lifting function, and the reticle can be accessed at different heights, so that it can replace the lifting of the plate base (the plate bottom plate + the frame) in the conventional plate separation mode.
  • the present invention proposes a magazine device for processing a commonly used 6-slot box and a corresponding reticle access method.
  • the magazine device of the present invention is fixed by a plate base (plate bottom plate + frame), and the cover case is vertically moved to realize separation of the cover case and the plate base, and the transfer robot is combined.
  • the vertical movement realizes that the robotic version of the fork can access the reticle in different slots of the frame, which effectively reduces the accuracy requirements of the magazine.
  • the magazine device of the present invention is mainly composed of a support base 1, a positioning support plate 2, an unlocking module 3, and a lifting drive module 4.
  • the positioning support plate 2 is fixed on the support base 1 for placing a plate
  • the plate to be processed includes a detachable cover and a base
  • the base includes a bottom plate and is disposed on the bottom plate.
  • the unlocking module 3 is slidably disposed on the support 1 for positioning
  • the magazine carried on the support plate 2 is unlocked, so that the cover of the plate is disconnected from the bottom plate, and the cover of the plate is connected to the unlocking module 3 after being unlocked
  • the lifting drive module 4 is disposed on the support 1 Up and offset on one side of the positioning support plate 2, by driving the unlocking module 3 to vertically lift relative to the positioning support plate 2 to drive the locked box cover movement, thereby unlocking and separating the plate cover and the card base
  • the plate bottom plate placed on the positioning support plate 2 and the plate holder on the plate bottom plate are exposed.
  • the positioning support plate 2 is provided with a positioning hole (not shown).
  • the bottom plate of the printing box is fixed through the positioning hole, thereby positioning the printing box, so that the printing box is subsequently unlocked/
  • the reticle is locked or placed, its position is not offset by external interference, which improves the accuracy and efficiency of subsequent operations.
  • the magazine device of the present invention further includes a lifting guide module 5, as shown in FIG. 1, the lifting guide module 5 is fixed on the support base 1, and the unlocking module 3 is slidably connected to the support base through the lifting guide module 5. 1 and the unlocking module 3 is located above the positioning support plate 2.
  • the unlocking module 3 includes an unlocking component 31, an unlocking motor 32, and an unlocking module connecting component 33.
  • the unlocking motor 32 is fixed to the underside of the unlocking module connector 33, located on the lower side of the entire unlocking module 3.
  • the unlocking assembly 31 and the unlocking motor 32 are offset from the bearing surface of the positioning support plate 2, and when unlocked, the unlocking motor 32 is located on the outer side and the lower side of the bearing surface of the positioning support plate 2. Thereby, the influence of the particles generated by the friction when the unlocking module 3 is unlocked on the positioning support plate 2 and the internal environment of the entire magazine device can be effectively avoided.
  • the unlocking component 31 and the unlocking motor 32 are rotatably and slidably coupled to the unlocking module connecting member 33.
  • the specific structure and the connecting relationship of the unlocking component 31 and the unlocking motor 32 can be referred to the prior art, and details are not described herein.
  • the unlocking motor 32 drives the unlocking assembly 31 to unlock or lock the magazine bottom plate and the magazine cover.
  • the cover of the printing box is disconnected from the bottom plate of the printing box, and under the joint action of the unlocking module connecting member 33 and the unlocking assembly 31, the printing box
  • the cover is connected to the unlocking module 3, so that the unlocking module 3 and the plate cover thereon can be vertically moved up and down with respect to the bottom plate (or base) of the plate under the action of the lifting drive module 4. Separate the cover of the plate from the base of the plate.
  • the lifting drive module 4 includes a motor 41 and a lead screw 42.
  • the motor 41 is fixed on the support base 1; and the lead screw 42 includes a screw shaft 421 and a screw nut 422, and the screw shaft 421 And the screw nut 422 is engaged by the thread pair, and the top end of the screw shaft 421 is connected to the unlocking module connecting member 33 through the screw fixing member 342 and the adapter 341, so that the screw shaft 421 is connected to the entire unlocking module 3, the lead screw
  • the nut 422 is rotatably coupled to the support base 1.
  • the motor 41 drives the spindle nut 422 to rotate, thereby driving the screw shaft 421 to vertically move up and down relative to the positioning support plate 2.
  • the lift drive module 4 further includes a hollow rotating member 44.
  • the lead screw nut 422 is fixed in the rotating member 44 by bolts, and the rotating member 44 passes through the first bearing 451, the second bearing 452, and the locking member.
  • the nut 453 is fixed to the support base 1.
  • the inner ring of the first bearing 451 and the second bearing 452 respectively cooperate with the upper and lower sides of the rotating member 44 to realize the rotation of the rotating member 44, and the lock nut 453 is used to fasten the second bearing 452.
  • the motor 41 is in driving connection with the rotating member 44 via a timing pulley and a timing belt.
  • the first timing pulley 431 is fixed to the rotation shaft of the motor 41
  • the second timing pulley 433 is rotated by the timing belt 432 and the first timing pulley 431, and the second timing pulley 433 passes.
  • the top wire and the rotating member 44 are fixed.
  • the working principle of the lifting and lowering driving module 4 is as follows: the motor 41 rotates to drive the first timing pulley 431 to rotate, and the second timing pulley 433 is rotated by the transmission of the timing belt 432, thereby driving the rotating member 44 to rotate.
  • the rotating member 44 rotates to drive the screw nut 422 to rotate, and the screw nut 422 and the screw shaft 421 convert the rotation of the screw nut 422 into a linear movement of the screw shaft 421 by the thread pair, and the hollow portion A of the rotating member 44 is a wire.
  • the movement of the lever shaft 421 linearly moves, and the up and down movement of the screw shaft 421 drives the up and down movement of the unlocking module 3 and the cover case to unlock and separate the plate.
  • the present invention further provides a corresponding operation box and a method for accessing the reticle, as shown in FIG. 3, comprising the steps of:
  • the reticle on the shelf is accessed by a transfer robot
  • step S3 after the cover device of the present invention is used to vertically lift the cover of the plate, the vertical height of the transfer robot relative to the positioning support plate 2 is adjusted to take out the exposed frame on the positioning support plate 2.
  • the reticle of the different layers can also be used to transfer the reticle that has not been used back to the board by the transport robot.
  • step S4 is performed to return the cover of the plate and lock the plate.
  • the magazine device of the present invention further includes a magazine sealing cover 8 connected to the unlocking module 3.
  • the sealing cover 8 seals the internal environment of the entire printing device to prevent the external environment. Pollution of the internal environment of the library.
  • the magazine seal cover 8 is raised and raised with the unlocking module 3, exposing the positioning support plate 2 and the plate base (board bottom plate + shelf) thereon.
  • the transfer robot can access the inside of the magazine from the side of the cover seal 8 which is completely open to the inside of the transfer, and pick and place the reticle of different layers on the shelf.
  • the unlocking module 3 and the magazine sealing cover 8 are moved downward by the lifting driving module 4, as shown in FIG. 5, the state diagram of the magazine casing (not shown) is in a low position.
  • the bottom of the box cover overlaps with the bottom plate of the magazine. This position is the unlocking/locking position of the box, and it is also the position of the cart to pick up the box.
  • the opening library box of the invention is fixed in the manner that the base of the printing box is fixed and the cover of the printing box is vertically lifted, and the means for adjusting the vertical height of the transmission robot is combined with the reticle access method of the invention. Realize the pick and place of different layer masks on the plate holder.
  • the invention adopts no longer that the "lifting and driving module of the magazine device accurately adapts to the position of the transporting and releasing plate of the transporting robot" of the conventional magazine device, but “adapts to the lifting and driving module of the magazine device by adjusting the transmission robot",
  • the design accuracy requirement of the library structure is reduced, the design and production efficiency of the library device are improved, and the mass production of the library device is facilitated.
  • the present invention passes the “screw nut rotation, the screw shaft up and down movement,
  • the manner in which the bearing is arranged on the underside of the screw shaft reduces the vertical space dimension of the magazine (relative to the bearing surface of the positioning support plate 2).
  • the top ends of the motor 41 and the screw nut 422 are lower than the bearing surface of the positioning support plate 2.
  • portions of the entire elevation drive module 4 other than the screw shaft 421 are all located on the lower side of the bearing surface of the positioning support plate 2, and the entire elevation drive module 4 is biased on one side of the positioning support plate 2.
  • the vertical space occupied by the lifting and lowering drive module 4 is further reduced, which is beneficial to reduce the vertical space of the entire magazine.
  • the lifting guide module 5 of the present invention comprises a fixing assembly and a sliding assembly, the fixing assembly is fixed on the support base 1, the sliding assembly is slidably disposed on the fixing assembly, and the unlocking module 3 is connected to the sliding assembly. Thereby the unlocking module 3 is slidably coupled to the support base 1.
  • the lifting guide module 5 of the embodiment adopts a linear guide rail
  • the fixing component is a track
  • the sliding component is a slider
  • the elevation guide module 5 of the embodiment is a double-layer step linear guide
  • the elevation guide module 5 includes a first linear guide 51 and a second linear guide 52 .
  • the rail 511 of the first linear guide 51 is fixed to one side of the first support plate 61 by bolts, and the other surface of the first support plate 61 is fixed to the support base 1 by bolts, and the slider 512 of the first linear guide 51.
  • the rail 521 of the second linear guide 52 is fixed to the other side of the second support plate 62 by bolts, and the slider 522 of the second linear guide 52 passes through the bolt and the third support plate 63.
  • One side is fixed, and the top end of the third support plate 63 is connected to the unlocking module connecting member 33 by bolts.
  • double stepped guide rail of the embodiment may be replaced by other forms such as a cross roller guide.
  • the embodiment adopts the double-layer stepped linear guide rail lifting and lowering guide module design, which can effectively reduce the vertical space occupied by the magazine device when it is in the low position (that is, the magazine casing is in the low position as shown in FIG. 5), thereby Conducive to reducing the vertical space size of the entire library device.
  • the movement axis arrangement of the "screw nut rotation, the screw shaft up and down movement, the bearing arrangement on the lower side of the screw shaft” and “the entire lift drive module 4 except the screw shaft 421 are all located.
  • the double-layer stepped guide rail of the embodiment can further reduce the vertical space of the magazine device.
  • the inventors improved the structural design of the magazine device based on the first embodiment and the second embodiment to clean the environment inside the magazine device.
  • the structure of the magazine device in the first embodiment and the second embodiment is analyzed, and the rotary motion of the moving parts such as the motor, the timing belt, the timing pulley, the bearing and the rotating member in the lifting drive module 4, the screw shaft and the screw nut are found.
  • the position where the relative friction exists in the thread engagement or the like is disposed under the positioning support plate 2, and the entire lifting drive module 4 is offset on one side of the positioning support plate 2, so that the particles generated by the lifting drive module 4 in the motion friction do not fall off. It falls onto the positioning support plate 2 so as not to affect the environment inside the magazine.
  • the position of the magazine device itself to generate particles mainly comes from the unlocking module 3 and the lifting and guiding module 5.
  • the unlocking motor 32 and the connecting bearing in the unlocking module 3 are under the positioning support plate 2, and the unlocking motor 32 and its connecting bearing are offset on the positioning supporting plate 2.
  • the particles generated by the movement of the driving portion of the unlocking module 3 will fall outside the magazine device, and will not affect the environment inside the magazine, and will not affect the magazine on the positioning support plate 2.
  • the library device is at the outermost side of the entire lithography apparatus when in use, and the magazine device produces the discharged particles falling outside the machine without affecting the lithography apparatus.
  • the unlocking component 31 in the unlocking module 3 is always located above the positioning support plate 2 , and the particles generated when the unlocking component 31 is unlocked are easily dropped onto the positioning support plate 2 to contaminate the internal environment of the magazine device;
  • the second linear guide 52 in the lifting drive module 5 exceeds the bearing surface of the positioning support plate 2, that is, the second linear guide 52 is located in the magazine at this time. Inside the device, particles generated by the friction of the slider and the track on the second linear guide 52 may fall onto the positioning support plate 2, affecting the internal environment of the magazine device.
  • the magazine device in the embodiment is provided with a particle pumping pipe on the unlocking module 3 and the lifting and guiding module 5 respectively, and the air pumping and discharging the unlocking component 31 and the lifting and lowering through the particle pumping pipe.
  • the magazine apparatus in this embodiment further includes a first particle pumping duct 71 disposed on the second linear guide 52 and a second particle pumping duct 72 disposed on the unlocking assembly 31, through
  • the first particle pumping pipe 71 extracts the particles generated by the second linear guide 52 accurately, and the air discharged through the second particle pumping pipe 72 accurately discharges the particles generated by the unlocking unit 31.
  • the magazine device of the embodiment further includes a gas bath system, and an air bath is introduced into the positioning support plate 2 inside the plate device through the air bath system to remove the separation of the case cover from the plate bottom plate.
  • the reticle of the exposed plate holder is contaminated with particles while preventing the external particles of the plate device from entering the plate device.
  • the reticle access method in the first embodiment may also add a step.
  • a step may be added between S2 and S3: air bathing the shelf area storing the reticle until locking The box or replacement box. In this way, the contamination of the reticle from the cassette access process can be reduced.
  • the particles generated by the typesetting library device are accurately extracted by the particle pumping pipe, and a set of air bath system is added, and the opened plate device and the plate are subjected to air bath to realize the internal environment of the plate device relative to the external environment.
  • the local positive pressure, the internal environment of the library device and the reticle, in combination with the second embodiment of the first embodiment, "the majority of the structure of the unlocking module 3, the lifting drive module 4 and the lifting guide module 5 are disposed on the positioning support plate 2.
  • the structural design outside the bearing surface can effectively reduce the pollution inside the magazine device.
  • the separation box is opened by the fixed manner of the base of the printing box (the bottom plate + the mounting plate), and the vertical movement of the printing box cover is opened, and then combined.
  • the means for adjusting the vertical height of the transfer robot can realize the pick-and-place of different layer reticle on the plate holder; the "repository device" of the conventional magazine device is no longer adopted.
  • the lifting drive module accurately adapts to the position of the transfer robot's pick-and-place plate, but “adapts the transfer robot to adapt to the lifting drive module of the magazine device”, which greatly reduces the design accuracy requirements of the library structure and improves the design of the library device. With production efficiency, it is conducive to mass production of the library device.
  • the double-layer stepped guide rail of the second embodiment can further reduce the vertical space of the magazine device; in the second embodiment of the embodiment, the unlocking module and the lifting drive are The module and the majority of the structure of the lifting guide module are disposed outside the bearing surface of the positioning support plate, and combined with the particle pumping pipe and the air bath system of the third embodiment, the internal environment pollution of the magazine device can be effectively reduced. Also clean the reticle in the open box.

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Abstract

一种版库装置，用来存放和解锁版盒，包括支撑座(1)、定位支撑板(2)、解锁模块(3)以及升降驱动模块(4)；定位支撑板(2)固定在支撑座(1)上；解锁模块(3)可滑动地设置在支撑座(1)上；升降驱动模块(4)设置在支撑座(1)上且偏置在定位支撑板(2)的一侧，通过升降驱动模块(4)驱动解锁模块(3)相对于定位支撑板(2)进行垂向升降带动解锁后的版盒罩壳运动，暴露出底板及底板上的版架。版库装置可实现对版盒版架上不同层掩模版的取放，大大降低了版库结构的设计精度要求，提高了版库装置的设计与生产效率，有利于版库装置的大规模量产。

Description

一种版库装置及掩模版存取方法 技术领域
本发明涉及光刻设备技术领域，尤其是涉及一种版库装置及相应的掩模版存取方法。
背景技术
在光刻半导体技术领域中，通常使用版盒来存储与保护掩模版，目前常用的6寸掩模版版盒类型有NIKON版盒、CANON版盒和SMIF版盒三种。
不论何种类型的版盒均包括罩壳及基体，而基体又包括底板与设置在底板上的版架，罩壳通过与底板锁定对版架进行密封保护，版架用于存放掩模版。与之对应的，存放、解锁版盒的版库装置一般有一个垂向升降模组，在版盒罩壳与版盒基体解锁后，通过垂向升降模组实现版盒罩壳部分与版盒基体部分的分离。
而现有版库装置一般采用版盒罩壳固定不动，版盒基体由上往下运动的方式来实现二者的分离。通过版盒基体的上下运动，使得传输机械手可在同一取放版位置实现对版架不同层上的掩模版的取放。在设计中，为了防止传输机械手取放掩模版时机械手的版叉与版架的侧面发生干涉，要求版盒基体的垂向运动方向和版架中存放的掩模版的上表面垂直，这一要求对版库设计精度要求较高。同时，光刻机设备要求版库装置的尺寸越来越小，针对常用的6槽版盒，一般采用产线天车取放版盒，设计时需要避让天车取放版盒时的空间，要求版库装置的垂向空间较小。
因此，如何提供一种结构更合理、设计精度要求相对不高、垂向空间小的版库装置是目前亟需解决的技术问题。
发明内容
本发明的目的在于提供一种用来存放、解锁版盒的版库装置，以降低版库 装置的结构精度要求。
为了达到上述目的，本发明提供了一种版库装置，用来存放和解锁版盒，所述版盒包括可分离的罩壳及基体，所述基体包括底板与设置在所述底板上的版架，所述罩壳通过与所述底板锁定对所述版架进行密封保护，所述版架用于存放掩模版，所述版库装置包括支撑座、定位支撑板、解锁模块以及升降驱动模块；所述定位支撑板固定在所述支撑座上，用来承载所述版盒；所述解锁模块可滑动地设置在所述支撑座上，用来对所述定位支撑板上承载的所述版盒解锁，使得所述罩壳与所述底板断开连接，所述罩壳在解锁后与所述解锁模块相连；所述升降驱动模块设置在所述支撑座上且偏置在所述定位支撑板的一侧，通过所述升降驱动模块驱动所述解锁模块相对于所述定位支撑板进行垂向升降带动解锁后的所述罩壳运动，使得所述罩壳与所述基体分离，暴露出所述底板及所述底板上的所述版架。
可选的，所述升降驱动模块包括电机和丝杠，所述电机固定在所述支撑座上，所述丝杠包括丝杠轴和丝杠螺母，所述丝杠轴和所述丝杠螺母相啮合，所述丝杠轴与所述解锁模块相连，所述丝杠螺母与所述支撑座可旋转连接，所述电机带动所述丝杠螺母转动，进而驱动所述丝杠轴相对于所述定位支撑板进行垂向升降运动。
可选的，所述升降驱动模块还包括一中空的转动件，所述丝杠螺母固定在所述转动件中，所述转动件通过轴承固定在所述支撑座上，所述电机通过同步带轮和同步带与所述转动件构成传动连接。
可选的，所述电机和丝杠螺母的顶端低于所述定位支撑板的承载面。
可选的，所述版库装置还包括一升降导向模块，所述升降导向模块包括固定组件和滑动组件，所述固定组件固定在所述支撑座上，所述滑动组件可滑动地设置在所述固定组件上，所述解锁模块与所述滑动组件相连。
可选的，所述升降导向模块为直线导轨，所述固定组件为轨道，所述滑动组件为滑块。
可选的，所述升降导向模块为双层阶梯直线导轨，所述升降导向模块包括第一直线导轨和第二直线导轨，所述第一直线导轨的轨道通过第一支撑板固定在所述支撑座上，所述第一直线导轨的滑块通过第二支撑板与所述第二直线导轨的轨道相连，所述第二直线导轨的滑块通过第三支撑板与所述解锁模块相连。
可选的，所述版库装置还包括气浴系统，通过所述气浴系统向所述版架通入气浴，以吹扫所述版架上掩模版的颗粒污染，同时避免外部颗粒进入所述版库装置内。
可选的，所述版库装置还包括设置在所述升降导向模块上的第一颗粒抽排管道和设置在所述解锁模块上的第二颗粒抽排管道，通过所述第一颗粒抽排管道抽气排出所述升降导向模块在运动过程中产生的颗粒，通过所述第二颗粒抽排管道抽气排出所述解锁模块在运动过程中产生的颗粒。
可选的，所述版库装置还包括版库密封罩，所述版库密封罩与所述解锁模块固定连接，用来对所述版库装置的内部环境进行密封。
可选的，所述定位支撑板上设有定位孔，通过所述定位孔对所述底板进行固定，进而对所述版盒进行定位。
为了达到上述目的，本发明还提供了一种利用上述的版库装置的掩模版存取方法，用于从版盒中存取掩模版，包括：
解开锁定的版盒，使得版盒的罩壳与底板断开连接；
移走所述罩壳，暴露出版盒的底板及底板上的版架；
对所述版架上的掩模版进行取出或放回；
放回所述罩壳；以及
锁定所述版盒。
可选的，在解开锁定的版盒之前，还包括步骤：通过所述底板对所述版盒进行定位。
可选的，通过解锁模块相对于所述底板的垂向升降运动移走或放回所述罩壳。
可选的，通过调节传输机械手相对于所述底板的垂向高度对所述版架上的掩模版进行取出或放回。
与现有技术相比，本发明具有以下优点：
(1)、本发明的版库装置通过偏置在定位支撑板一侧的升降驱动模块驱动解锁模块相对于定位支撑板进行垂向升降带动解锁后的版盒罩壳运动，以“版盒基体固定不动、版盒罩壳垂向升降”的方式分离打开版盒，再结合本发明的掩模版存取方法中调节传输机械手垂向高度的手段，可实现对版盒版架上不同层掩模版的取放，不要求“升降驱动模块的垂向运动方向和版架中掩模版上表面严格垂直”，大大降低了版库结构的精度要求；
(2)、本发明的版库装置通过“丝杠螺母旋转运动、丝杠轴垂向直线运动、轴承布置在丝杠轴下方”的方式减少了升降驱动模块占用的垂向空间，再结合偏置在定位支撑板的一侧且丝杠螺母和电机低于定位支撑板的承载面的结构与双层阶梯的直线导轨，进一步减小了版库的垂向空间；
(3)、本发明的版库装置通过偏置的升降驱动模块和抽排管道减少版库内部的颗粒污染源，再结合版库的气浴系统进一步保证了版库内部环境和掩模版的洁净；
(4)、本发明的掩模版存取方法通过调节传输机械手的垂向高度以适应版架上不同层掩模版的取放，提高了掩模版的取放灵活性，不再严格固定一个取版位置，而在存取掩模版的过程中持续通入气浴，能有效降低外部环境对掩模版的污染。
附图说明
图1为本发明实施例一的版库装置示意图；
图2为本发明实施例一的版库装置的升降驱动模块剖视图；
图3为本发明实施例一的掩模版存取方法的流程示意图；
图4为本发明实施例一的版盒罩壳处于高位时的版库装置的状态图；
图5为本发明实施例一的版盒罩壳处于低位时的版库装置的状态图；
图6为本发明实施例二的版库装置的升降导向模块的正视图；
图7为本发明实施例二的版库装置的升降导向模块的侧视示意图；
图8为本发明实施例三的版库装置解锁版盒时的状态图；
图9为本发明实施例三的版库装置示意图；
图10为本发明实施例三的版库装置的气浴及取放掩模版示意图；
图中，1-支撑座，2-定位支撑板，3-解锁模块，31-解锁组件，32-解锁电机，33-解锁模块连接件，341-转接件，342-丝杠固定件，4-升降驱动模块，41-电机，42-丝杠，421-丝杠轴，422-丝杠螺母，431-第一同步带轮，432-同步带，433-第二同步带轮，44-转动件，451-第一轴承，452-第二轴承，453-锁紧螺母，5-升降导向模块，51-第一直线导轨，52-第二直线导轨，511-第一直线导轨的轨道，512-第一直线导轨的滑块，521-第二直线导轨的轨道，522-第二直线导轨的滑块，61-第一支撑板，62-第二支撑板，63-第三支撑板，71-第一颗粒抽排管道，72-第二颗粒抽排管道，8-版库密封罩。
具体实施方式
下面将结合示意图对本发明的具体实施方式进行更详细的描述。根据下列描述和权利要求书，本发明的优点和特征将更清楚。需说明的是，附图均采用非常简化的形式且均使用非精准的比例，仅用以方便、明晰地辅助说明本发明实施例的目的。
在研究现有的版库结构时，发明人发现如下几个问题：
(1)、传统版库的版盒分离方式要求版盒基体(版盒底板+版架)的垂向运动方向和版架中掩模版上表面垂直，这一要求对版库设计精度要求很高；
(2)、光刻机设备要求版库设备的尺寸越来越小，针对6槽版盒，一般采用产线天车取放版盒，设计时需要避让天车取放版盒时的空间，要求版库的垂向空间较小；
(3)、传统版库结构的内部洁净度没有保障，打开的版盒中的掩模版易被污染。
而取放掩模版的传输机械手本身带有垂向升降功能，可以在不同高度取放掩模版，因而其可以代替传统版盒分离方式中版盒基体(版盒底板+版架)的升降。基于此，本发明提出了一种处理常用的6槽版盒的版库装置以及对应的掩模版存取方法。
实施例一
如图1所示，本发明的版库装置通过版盒基体(版盒底板+版架)固定，版盒罩壳垂向运动的方式实现版盒罩壳与版盒基体的分离，结合传输机械手的垂向运动实现机械手版叉在版架不同槽位取放掩模版，有效地降低了版库的精度要求。
具体地，结合图1，本发明的版库装置主要由支撑座1、定位支撑板2、解锁模块3以及升降驱动模块4组成。
如图1所示，定位支撑板2固定在支撑座1上，用来放置版盒，待处理的版盒包括可分离的罩壳及基体，而所述基体包括底板与设置在所述底板上的版架，所述罩壳通过与所述底板锁定对所述版架进行密封保护，所述版架用于存放掩模版；解锁模块3可滑动地设置在支撑座1上，用来对定位支撑板2上承载的的版盒解锁，使得所述版盒的罩壳与底板断开连接，所述版盒的罩壳在解锁后与解锁模块3相连；升降驱动模块4设置在支撑座1上且偏置在定位支撑板2的一侧，通过驱动解锁模块3相对于定位支撑板2进行垂向升降带动解锁后的版盒罩壳运动，实现版盒罩壳与版盒基体的解锁分离，暴露出放置在定位支撑板2上的版盒底板及所述版盒底板上的版架。
可选的，如图1所示，定位支撑板2上设有定位孔(图中未标出)。当版盒通过天车放到定位支撑扳2上时，通过所述定位孔对所述版盒的底板进行固定，从而对所述版盒进行定位，使得后续在对所述版盒进行解锁/锁定或者取放掩模版时其位置不在外界干扰下发生偏移，提高后续操作的准确度和效率。
可选的，本发明的版库装置还包括一升降导向模块5，如图1所示，升降导向模块5固定在支撑座1上，解锁模块3通过升降导向模块5可滑动地连接在 支撑座1上，且解锁模块3位于定位支撑板2的上方。
可选的，解锁模块3包括解锁组件31、解锁电机32及解锁模块连接件33。如图2所示，并结合图1，解锁电机32固定在解锁模块连接件33的下侧，位于整个解锁模块3的下侧。且解锁组件31和解锁电机32偏置于定位支撑板2的承载面之外，在解锁时，解锁电机32位于定位支撑板2的承载面的外侧、下侧。从而，能有效避免解锁模块3解锁之时摩擦产生的颗粒对定位支撑板2乃至于整个版库装置内部环境的影响。
其中，解锁组件31和解锁电机32可旋转、滑动地连接在解锁模块连接件33上，而解锁组件31和解锁电机32的具体结构及连接关系可以参考现有技术，在此不做赘述。解锁电机32驱动解锁组件31实现版盒底板与版盒罩壳的解锁或者锁定。
当解锁组件31对所述版盒解锁之后，所述版盒的罩壳与所述版盒的底板断开连接，且在解锁模块连接件33与解锁组件31的共同作用下，所述版盒的罩壳与解锁模块3连在一起，从而可以在升降驱动模块4的作用下带动解锁模块3及其上的版盒罩壳相对于所述版盒的底板(或者基体)做垂向升降运动实现版盒罩壳与版盒基体的分离。
可选的，升降驱动模块4包括电机41和丝杠42，如图2所示，电机41固定在支撑座1上；而丝杠42包括丝杠轴421和丝杠螺母422，丝杠轴421和丝杠螺母422通过螺纹副相啮合，丝杠轴421的顶端通过丝杠固定件342和转接件341与解锁模块连接件33相连，从而丝杠轴421与整个解锁模块3相连，丝杠螺母422与支撑座1可旋转连接。电机41带动丝杠螺母422转动，进而驱动丝杠轴421相对于定位支撑板2进行垂向升降运动。
具体地，参见图2，升降驱动模块4还包括一中空的转动件44，丝杠螺母422通过螺栓固定在转动件44中，而转动件44通过第一轴承451、第二轴承452以及锁紧螺母453固定在支撑座1上。其中，第一轴承451、第二轴承452的内圈分别和转动件44的上下两侧配合，实现转动件44的转动，而锁紧螺母453 用来紧固第二轴承452。
可选的，电机41通过同步带轮和同步带与转动件44构成传动连接。如图2所示，第一同步带轮431固定在电机41的转动轴上，第二同步带轮433通过同步带432和第一同步带轮431实现转动传递，而第二同步带轮433通过顶丝和转动件44固定。
具体地，结合图2，升降驱动模块4的工作原理如下：电机41转动，带动第一同步带轮431转动，通过同步带432的传动带动第二同步带轮433转动，从而带动转动件44转动，转动件44转动带动丝杠螺母422转动，丝杠螺母422和丝杠轴421通过螺纹副将丝杠螺母422的转动转化为丝杠轴421的升降直线运动，转动件44的中空部分A为丝杠轴421升降直线运动的运动空间，丝杠轴421的上下升降运动带动解锁模块3和版盒罩壳的上下升降运动，实现版盒的解锁分离。
针对本发明的版库装置，本发明还提供了一种对应的操作版盒以及存取掩模版的方法，如图3所示，包括步骤：
S1、解开锁定的版盒，使得版盒的罩壳与底板断开连接；
S2、移走版盒的罩壳，暴露出版盒的底板及底板上的版架；
S3、通过传输机械手取放所述版架上的掩模版；
S4、放回版盒的罩壳并锁定版盒。
在步骤S3中，采用本发明的版库装置垂向上升移走版盒的罩壳之后，调节传输机械手相对于定位支撑板2的垂向高度，以取出定位支撑板2上暴露出的版架上不同层的掩模版，同时也可以通过传输机械手将用过不再用的掩模版放回到板架上。
在完成掩模版的取出或者放回后，执行步骤S4，放回版盒的罩壳并对版盒进行锁定。
可选的，如图2所示，本发明的版库装置还包括一与解锁模块3相连的版库密封罩8，版库密封罩8对整个版库装置的内部环境进行密封，防止外部环境 对版库内部环境的污染。在解锁时，版库密封罩8随着解锁模块3被上升抬高，暴露出定位支撑板2及其上的版盒基体(版盒底板+版架)。
如图4为版盒罩壳(图中未画出)处于高位时的状态图，解锁模块3和版库密封罩8处于最高位，此状态下，版盒罩壳处于顶端，版盒罩壳与版盒基体(版盒底板+版架)分离，传输机械手可以从版库密封罩8完全开放面向传输内部的一面进入版库内部，对版架上不同层的掩模版进行取放。
在对一个版盒内所需的掩模版进行存取操作之后，放回版盒的罩壳并锁定版盒，再通过天车对版库装置中的版盒进行取放，以实现不同版盒的更换，满足对不同型号掩模版的取用需求。
更换版盒时，解锁模块3和版库密封罩8通过升降驱动模块4向下运动，如图5所示为版盒罩壳(图中未画出)处于低位时的状态图，此时版盒罩壳底面和版盒底板重合，此位置为版盒解锁/锁定位置，也是天车取放版盒的位置。
本发明的版库装置通过版盒基体固定不动、版盒罩壳垂向升降的方式的打开分离版盒，再结合本发明的掩模版存取方法中调节传输机械手垂向高度的手段，可实现对版盒版架上不同层掩模版的取放。本发明采取的不再是传统版库装置的“版库装置的升降驱动模块精确适应传输机械手的取放版位置”，而是“通过调整传输机械手来适应版库装置的升降驱动模块”，大大降低了版库结构的设计精度要求，提高了版库装置的设计与生产效率，有利于版库装置的大规模量产。
相对于现有的“丝杠轴转动、丝杠螺母直线运动、轴承布置在丝杠轴两侧”这一常用的运动轴布置方式，本发明通过“丝杠螺母转动、丝杠轴上下运动、轴承布置在丝杠轴下侧”的方式缩小了版库的(相对于定位支撑板2的承载面的)垂向空间尺寸。
可选的，如图2所示，电机41和丝杠螺母422的顶端低于定位支撑板2的承载面。参见图2，整个升降驱动模块4中除了丝杠轴421以外的部分全都位于定位支撑板2的承载面下侧，且整个升降驱动模块4偏置在定位支撑板2的一 侧。进一步减小了升降驱动模块4所占用的垂向空间，有利于减小整个版库的垂向空间。
实施例二
针对本发明提出的第二个问题，如何进一步压缩减小版库装置的垂向空间。在实施例一的基础上，发明人提出了一种双层阶梯导轨的设计。
本发明的升降导向模块5包括固定组件和滑动组件，所述固定组件固定在支撑座1上，所述滑动组件可滑动地设置在所述固定组件上，解锁模块3与所述滑动组件相连，从而使得解锁模块3可滑动地连接在支撑座1上。
可选的，本实施例的升降导向模块5采用直线导轨，所述固定组件为轨道，所述滑动组件为滑块。
可选的，如图6所示，并结合图7，本实施例的升降导向模块5为双层阶梯直线导轨，升降导向模块5包括第一直线导轨51和第二直线导轨52。第一直线导轨51的轨道511通过螺栓固定在第一支撑板61的一面上，而第一支撑板61的另一面通过螺栓固定在支撑座1上，第一直线导轨51的滑块512通过螺栓与第二支撑板62的一面固定；第二直线导轨52的轨道521通过螺栓固定在第二支撑板62的另一面，第二直线导轨52的滑块522通过螺栓与第三支撑板63的一面固定，第三支撑板63的顶端通过螺栓与解锁模块连接件33相连。
此外，本实施例的双层阶梯导轨还可以采用交叉滚子导轨等其他形式代替。
本实施例通过这种双层呈阶梯式直线导轨的升降导向模块设计，能有效减少版库装置处于低位时(即如图5所示的版盒罩壳处于低位)占用的垂向空间，从而有利于缩减整个版库装置的垂向空间尺寸。
在实施例一的“丝杠螺母转动、丝杠轴上下运动、轴承布置在丝杠轴下侧”的运动轴布置方式及“整个升降驱动模块4中除了丝杠轴421以外的部分全都位于定位支撑板2的承载面下侧”的结构设计基础上，再结合本实施例的双层阶梯导轨能进一步缩减版库装置的垂向空间。
实施例三
针对本发明提出的第三个问题，发明人在实施例一和实施例二的基础上改进了版库装置的结构设计，以清洁版库装置内部的环境。
分析实施例一和实施例二中版库装置的结构，发现升降驱动模块4中的电机、同步带、同步带轮、轴承以及转动件等运动件的旋转运动，丝杠轴和丝杠螺母的螺纹啮合等存在相对摩擦的位置均设置在定位支撑板2的下面，且整个升降驱动模块4偏置在定位支撑板2的一侧，故升降驱动模块4在运动摩擦中产生的颗粒不会掉落到定位支撑板2上，从而不影响版库内部的环境。
所以版库装置自身产生颗粒的位置主要来自于解锁模块3以及升降导向模块5。如图7所示，版库装置对版盒解锁时，解锁模块3中的解锁电机32以及连接轴承等处于定位支撑板2的下面，且解锁电机32及其连接轴承偏置在定位支撑板2的承载面之外，解锁模块3的驱动部分运动产生的颗粒会掉落到版库装置之外，不影响版库内部的环境，更不影响定位支撑板2上的版盒。
此外，版库装置在使用时处于整个光刻机设备的最外侧，版库装置产生排出的颗粒掉落到机台外部，并不影响光刻机设备。
但是，如图7所示，解锁模块3中的解锁组件31始终位于定位支撑板2上方，解锁组件31解锁时产生的颗粒容易掉落到定位支撑板2上，污染版库装置的内部环境；参见图8，在版库装置(版盒罩壳)运动到高位时，升降驱动模块5中的第二直线导轨52超过定位支撑板2的承载面，即此时第二直线导轨52位于版库装置内部，第二直线导轨52上滑块和轨道摩擦产生的颗粒会落到定位支撑板2上，影响版库装置内部环境。
基于此，如图8所示，本实施例中的版库装置分别在解锁模块3及升降导向模块5上设有颗粒抽排管道，通过所述颗粒抽排管道抽气排出解锁组件31及升降导向模块5在运动过程中产生的颗粒。
具体地，参见图8，本实施例中的版库装置还包括设置在第二直线导轨52上的第一颗粒抽排管道71和设置在解锁组件31上的第二颗粒抽排管道72，通 过第一颗粒抽排管道71抽气精准地排出第二直线导轨52产生的颗粒，通过第二颗粒抽排管道72抽气精准地排出解锁组件31产生的颗粒。
不可避免地，第二直线导轨52与解锁组件31产生的颗粒仍会有一部分落在定位支撑板2上；同时，分离、打开版盒之后，版库密封罩8也被抬升打开，版库装置外部环境中的尘埃颗粒会飘落到版库装置内部，进而会污染版盒版架中的掩模版。
基于此，本实施例的版库装置还包括一套气浴系统，通过气浴系统向版库装置内部的定位支撑板2上通入气浴，以清除版盒罩壳与版盒底板分离之后暴露出来的版盒版架上掩模版的颗粒污染，同时防止版库装置外部颗粒进入版库装置内。
如图9(图中未画出气浴系统)所示，在版盒罩壳处于高位时，即所述版盒被打开之后，版库装置的顶面为版盒罩壳(图中未画出)加解锁模块3，版库装置的底面为定位支撑板2，与定位支撑板2相互垂直的3个面为版库密封罩8，剩余的1个垂直面正对传输内部并向传输内部开放，是传输机械手取放掩模版的空间。
基于此，可以利用这个空间，接入一套气浴系统，把剩余的1个垂直且对传输内部开放的面作为版库装置的气浴吹入口，气浴从此面吹入版库装置内部，实现版库装置内部相对于外部环境的局部正压，避免版库装置外部颗粒进入版库装置的内部，同时能吹扫掩模版上的颗粒污染，实现版库内部环境的洁净。
相应地，实施例一中的掩模版存取方法也可以加上一个步骤，参考图3，可以在S2、S3之间加上一个步骤：对存放掩模版的版架区域进行气浴，直到锁定版盒或者更换版盒。这样一来，能降低掩模版从版盒存取过程中的污染。
本实施例中通过颗粒抽排管道精准地抽排版库装置产生的颗粒，同时加入一套气浴系统，对打开后的版库装置和版盒进行气浴，实现版库装置内部相对于外部环境的局部正压，清洁版库装置内部环境和掩模版，再结合实施例一实施例二中“将解锁模块3、升降驱动模块4以及升降导向模块5的大部分结构设 置在定位支撑板2的承载面之外”的结构设计，能有效地降低版库装置内部的污染。
综上所述，在本发明实施例一提供的版库装置中，通过版盒基体(版盒底板+版架)固定不动、版盒罩壳垂向升降的方式打开分离版盒，再结合实施例一的掩模版存取方法中调节传输机械手垂向高度的手段，可实现对版盒版架上不同层掩模版的取放；采取的不再是传统版库装置的“版库装置的升降驱动模块精确适应传输机械手的取放版位置”，而是“通过调整传输机械手来适应版库装置的升降驱动模块”，大大降低了版库结构的设计精度要求，提高了版库装置的设计与生产效率，有利于版库装置的大规模量产。
此外，在实施例一的“丝杠螺母转动、丝杠轴上下运动、轴承布置在丝杠轴下侧”的运动轴布置方式及“整个升降驱动模块中除了丝杠轴以外的部分全都位于定位支撑板的承载面下侧”的结构设计基础上，再结合实施例二的双层阶梯导轨能进一步缩减版库装置的垂向空间；在实施例一实施例二的“将解锁模块、升降驱动模块以及升降导向模块的大部分结构设置在定位支撑板的承载面外部”的设计基础上，再结合实施例三的颗粒抽排管道和气浴系统，能有效地降低版库装置内部环境的污染，同时清洁打开版盒中的掩模版。
需要说明的是，在本文中，诸如“第一”、“第二”之类的关系术语仅仅用来将一个部件与另一个部件区分开来，而不一定要求或者暗示这些部件之间存在任何这种实际的关系或者顺序。
上述仅为本发明的优选实施例而已，并不对本发明起到任何限制作用。任何所属技术领域的技术人员，在不脱离本发明的技术方案的范围内，对本发明揭露的技术方案和技术内容做任何形式的等同替换或修改等变动，均属未脱离本发明的技术方案的内容，仍属于本发明的保护范围之内。

Claims (15)

  1. 一种版库装置，用来存放和解锁版盒，所述版盒包括可分离的罩壳及基体，所述基体包括底板与设置在所述底板上的版架，所述罩壳通过与所述底板锁定对所述版架进行密封保护，所述版架用于存放掩模版，其特征在于，所述版库装置包括支撑座、定位支撑板、解锁模块以及升降驱动模块；
    所述定位支撑板固定在所述支撑座上，用来承载所述版盒；
    所述解锁模块可滑动地设置在所述支撑座上，用来对所述定位支撑板上承载的所述版盒解锁，使得所述罩壳与所述底板断开连接，所述罩壳在解锁后与所述解锁模块相连；
    所述升降驱动模块设置在所述支撑座上且偏置在所述定位支撑板的一侧，通过所述升降驱动模块驱动所述解锁模块相对于所述定位支撑板进行垂向升降带动解锁后的所述罩壳运动，使得所述罩壳与所述基体分离，暴露出所述底板及所述底板上的所述版架。
  2. 如权利要求1所述的版库装置，其特征在于，所述升降驱动模块包括电机和丝杠，所述电机固定在所述支撑座上，所述丝杠包括丝杠轴和丝杠螺母，所述丝杠轴和所述丝杠螺母相啮合，所述丝杠轴与所述解锁模块相连，所述丝杠螺母与所述支撑座可旋转连接，所述电机带动所述丝杠螺母转动，进而驱动所述丝杠轴相对于所述定位支撑板进行垂向升降运动。
  3. 如权利要求2所述的版库装置，其特征在于，所述升降驱动模块还包括一中空的转动件，所述丝杠螺母固定在所述转动件中，所述转动件通过轴承固定在所述支撑座上，所述电机通过同步带轮和同步带与所述转动件构成传动连接。
  4. 如权利要求2所述的版库装置，其特征在于，所述电机和所述丝杠螺母的顶端低于所述定位支撑板的承载面。
  5. 如权利要求4所述的版库装置，其特征在于，还包括一升降导向模块，所述升降导向模块包括固定组件和滑动组件，所述固定组件固定在所述支撑座 上，所述滑动组件可滑动地设置在所述固定组件上，所述解锁模块与所述滑动组件相连。
  6. 如权利要求5所述的版库装置，其特征在于，所述升降导向模块为直线导轨，所述固定组件为轨道，所述滑动组件为滑块。
  7. 如权利要求6所述的版库装置，其特征在于，所述升降导向模块为双层阶梯直线导轨，所述升降导向模块包括第一直线导轨和第二直线导轨，所述第一直线导轨的轨道通过第一支撑板固定在所述支撑座上，所述第一直线导轨的滑块通过第二支撑板与所述第二直线导轨的轨道相连，所述第二直线导轨的滑块通过第三支撑板与所述解锁模块相连。
  8. 如权利要求7所述的版库装置，其特征在于，还包括气浴系统，通过所述气浴系统向所述版架通入气浴，以吹扫所述版架上掩模版的颗粒污染，同时避免外部颗粒进入所述版库装置内。
  9. 如权利要求8所述的版库装置，其特征在于，还包括设置在所述升降导向模块上的第一颗粒抽排管道和设置在所述解锁模块上的第二颗粒抽排管道，通过所述第一颗粒抽排管道抽气排出所述升降导向模块在运动过程中产生的颗粒，通过所述第二颗粒抽排管道抽气排出所述解锁模块在运动过程中产生的颗粒。
  10. 如权利要求9所述的版库装置，其特征在于，还包括版库密封罩，所述版库密封罩与所述解锁模块固定连接，用来对所述版库装置的内部环境进行密封。
  11. 如权利要求1-10中任意一项所述的版库装置，其特征在于，所述定位支撑板上设有定位孔，通过所述定位孔对所述底板进行固定，进而对所述版盒进行定位。
  12. 一种利用权利要求1-11中任意一项所述的版库装置的掩模版存取方法，用于从版盒中存取掩模版，其特征在于，包括：
    解开锁定的版盒，使得版盒的罩壳与底板断开连接；
    移走所述罩壳，暴露出版盒的底板及底板上的版架；
    对所述版架上的掩模版进行取出或放回；
    放回所述罩壳；以及
    锁定所述版盒。
  13. 如权利要求12所述的掩模版存取方法，其特征在于，在解开锁定的版盒之前，还包括步骤：通过所述底板对所述版盒进行定位。
  14. 如权利要求12或13所述的掩模版存取方法，其特征在于，通过解锁模块相对于所述底板的垂向升降运动移走或放回所述罩壳。
  15. 如权利要求12或13所述的掩模版存取方法，其特征在于，通过调节传输机械手相对于所述底板的垂向高度对所述版架上的掩模版进行取出或放回。
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CN112091986B (zh) * 2020-08-06 2024-05-31 陈凯 一种适用于架空轨道的传菜机器人
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CN114476669B (zh) * 2022-02-11 2023-10-03 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） 版库装置、版库系统及姿态调整方法
CN115057081A (zh) * 2022-06-23 2022-09-16 上海大族富创得科技有限公司 一种光罩存储盒开合器

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