WO2019080049A1 - Temperature sensor based on surface plasma resonance and production method thereof - Google Patents
Temperature sensor based on surface plasma resonance and production method thereofInfo
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- WO2019080049A1 WO2019080049A1 PCT/CN2017/107819 CN2017107819W WO2019080049A1 WO 2019080049 A1 WO2019080049 A1 WO 2019080049A1 CN 2017107819 W CN2017107819 W CN 2017107819W WO 2019080049 A1 WO2019080049 A1 WO 2019080049A1
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- Prior art keywords
- temperature sensor
- polishing
- gold film
- optical fiber
- sensing device
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K11/00—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
- G01K11/32—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using changes in transmittance, scattering or luminescence in optical fibres
Definitions
- the invention belongs to the technical field of sensors, and in particular relates to a temperature sensor based on surface plasmon resonance and a preparation method thereof.
- the existing Surface Plasmon Resonance (SPR) based temperature sensor requires a liquid material tube package to the surface of the temperature sensor to detect the ambient temperature by the thermo-optic effect of the liquid material, but since the liquid material has The fluidity is therefore difficult to package, resulting in a complicated preparation process, and because of its obvious thermal expansion effect and unstable structure, it is prone to explosion when the temperature is too high, which limits its application in biochemistry and other fields.
- SPR Surface Plasmon Resonance
- the existing SPR-based temperature sensor has the fluidity of the liquid material, so the packaging is difficult, resulting in a complicated preparation process, and the thermal expansion effect is obvious, the structure is unstable, and the explosion is prone to occur when the temperature is too high. Its technical problems in the application of biochemistry and other fields.
- the main object of the present invention is to provide a temperature sensor based on surface plasmon resonance, which aims to solve the existing SPR-based temperature sensor. Due to the fluidity of the liquid material, the packaging is difficult, resulting in a complicated preparation process. Its thermal expansion effect is obvious, its structure is unstable, and it is prone to explosion when the temperature is too high, which limits its technical problems in the application of biochemistry and other fields.
- a first aspect of the present invention provides a surface plasmon resonance based temperature sensor, the temperature sensor comprising: a light source emitter, a sensing device, and a spectrometer;
- An output end of the light source emitter is connected to an input end of the sensing device, and an output end of the sensing device is connected to an input end of the spectrometer;
- the sensing device comprises a side polished single mode fiber, a gold film and a temperature sensitive film;
- the gold film is deposited on the polishing surface of the side polished single mode fiber, and the temperature sensitive film is cured on the gold film.
- the material of the temperature sensitive film is a UV-curable adhesive.
- the ultraviolet gel has a refractive index of 1.36.
- the gold film has a thickness of 45 nm to 60 nm.
- polishing surface of the side-polishing single-mode fiber is 2 ⁇ m - 3 ⁇ m from the upper surface of the core of the side-polishing single-mode fiber.
- a second aspect of the present invention provides a method of fabricating a temperature sensor based on surface plasmon resonance, characterized in that the method is for preparing a temperature sensor according to the first aspect of the invention, the method include:
- the light source emitter emits a light source to the single-mode fiber to obtain a transmission spectrum
- the spectrometer performs a real-time monitoring on the transmission spectrum
- the single-mode fiber is polished by using a side polishing method to obtain a side-grinding single-mode fiber
- the UV curable adhesive was evenly applied to the gold film and cured using an ultraviolet lamp.
- the side-polishing method is used to perform a polishing process on the single-mode optical fiber to obtain a side-grinding single-mode optical fiber, including:
- the upper surface of the single mode fiber is subjected to rough grinding treatment using 2000 mesh sandpaper;
- the upper surface of the rough grinding treatment is finely ground using 5000 mesh sandpaper;
- the finely polished upper surface was subjected to a fine polishing treatment using 12,000 grit sandpaper to obtain the polishing surface.
- the upper surface after the rough grinding treatment is 73 ⁇ m from the lower surface of the single-mode optical fiber, and the upper surface after the fine grinding treatment is 70 ⁇ m from the lower surface of the single-mode optical fiber.
- the invention provides a temperature sensor based on surface plasmon resonance, the temperature sensor comprises: a light source emitter, a sensing device and a spectrometer, wherein an output end of the light source emitter is connected to an input end of the sensing device, and the output of the sensing device The end is connected to the input end of the spectrometer, and the sensing device comprises a side polished single mode fiber, a gold film and a temperature sensitive film. The gold film is deposited on the polishing surface of the side polished single mode fiber, and the temperature sensitive film is cured on the gold film. .
- the temperature sensitive film is solid, it does not have the same fluidity as the liquid material, reduces the process of liquid encapsulation, simplifies the preparation process, and is warmed by temperature.
- the sensitive film is solid and the thermal expansion effect is not obvious, which improves the stability of the device structure and no longer limits its application in biochemistry and other fields.
- FIG. 1 is a schematic structural view of a temperature sensor based on surface plasmon resonance according to a first embodiment of the present invention
- FIG. 2 is a schematic diagram showing a refinement structure of a temperature sensor based on surface plasmon resonance according to a first embodiment of the present invention
- FIG. 3 is a schematic flow chart of a method for preparing a temperature sensor based on surface plasmon resonance according to a second embodiment of the present invention.
- FIG. 1 A schematic diagram of a detailed structure of a surface plasmon resonance temperature sensor, the temperature sensor comprising: a light source emitter 10, a sensing device 20, and a spectrometer 30;
- An output end of the light source emitter 10 is connected to an input end of the sensing device 20, and an output end of the sensing device 20 is connected to an input end of the spectrometer 30;
- the sensing device 20 includes a side polished single mode fiber 201, a gold film 202 and a temperature sensitive film 203;
- the gold film 202 is deposited on the polishing surface of the side polished single mode fiber 201, and the temperature sensitive film 203 is cured on the gold film 202.
- the side-grinding single-mode optical fiber 201 is composed of a core 204 and a cladding 205.
- the material of the temperature sensitive film 203 is a UV-curable glue.
- the ultraviolet gel has a refractive index of 1.36.
- a surface plasmon resonance based temperature sensor based on a common single mode fiber has a linear response to the refractive index, and its response to the refractive index is exponentially changed.
- the external refractive index increases and increases, but the higher the refractive index of the outside, the more the loss peak becomes wider, that is, the quality factor decreases.
- the reason why the UV-curable adhesive with a refractive index of 1.36 is selected is because it cures.
- the refractive index after the refractive index is about 1.39. In this refractive index range, not only a high sensitivity characteristic of the temperature sensor but also a high quality factor is ensured.
- the gold film 202 has a thickness of 45 nm to 60 nm.
- the thickness of the gold film 202 when the thickness of the gold film 202 is less than 45 nm, the stability of the temperature sensor is poor, and the quality factor is low.
- the thickness of the gold film 202 is higher than 60 nm, the energy of the light wave energy reaching the upper surface of the metal is lower. It also affects the temperature sensor's detection of the external refractive index.
- polishing surface of the side-polishing single-mode optical fiber 201 is 2 ⁇ m - 3 ⁇ m from the upper surface of the core of the side-polishing single-mode optical fiber 201.
- the light energy penetration depth of the single mode fiber core is 2 ⁇ m - 3 ⁇ m, so as to ensure that the light energy reaches the gold surface without affecting the light energy in the core.
- the upper surface of the core of the side-polishing single-mode optical fiber 201 is 2 ⁇ m - 3 ⁇ m.
- a surface plasmon resonance based temperature sensor is provided.
- the temperature sensor includes a light source emitter 10, a sensing device 20, and a spectrometer 30.
- the output end of the light source emitter 10 and the sensing device 20 The input ends are connected, the output end of the sensing device 20 is connected to the input end of the spectrometer 30, and the sensing device 20 comprises a side-grinding single-mode optical fiber 201, a gold film 202 and a temperature-sensitive film 203, and the gold film 202 is deposited on the side.
- the temperature sensitive film 203 is cured on the gold film 202.
- the temperature sensitive film 203 Compared with the prior art, by curing the temperature sensitive film 203 on the gold film 202, since the temperature sensitive film 203 is solid, it does not have fluidity like a liquid material, which reduces the process of liquid packaging in the prior art. The preparation process is simplified, and since the temperature sensitive film 203 is solid, the thermal expansion effect is not obvious, the stability of the device structure is improved, and the application in the biochemical field is no longer limited.
- FIG. 3 is a schematic flowchart diagram of a method for preparing a temperature sensor based on surface plasmon resonance according to a second embodiment of the present invention, including:
- Step 301 After the light source emitter emits a light source to the single-mode optical fiber to obtain a transmission spectrum, and the spectrometer performs real-time monitoring on the transmission spectrum, the single-mode optical fiber is polished by using a side polishing method to obtain a side polishing single.
- the single-mode optical fiber is fixed on the fixture of the polishing machine, and the two ends of the single-mode optical fiber are respectively connected with the light source emitter 10 and the spectrometer 30, and the light source emitter is transmitted to the single-mode optical fiber emitting light source.
- the upper surface of the single-mode fiber was coarsely ground using 2000 mesh sandpaper, so that the upper surface after rough grinding was 73 ⁇ m away from the lower surface of the single-mode fiber, and then 5000 mesh was used.
- the upper surface of the rough grinding treatment is finely ground by the sandpaper, so that the upper surface after the fine grinding treatment is 70 ⁇ m away from the lower surface of the single-mode optical fiber, and the finely polished upper surface is subjected to fine polishing treatment using 12000 mesh sandpaper.
- the surface crack of the fiber polishing surface can be reduced and the smoothness can be increased.
- the transmission spectrum of the optical fiber is monitored in real time by using a broadband light source and a spectrometer, and a charge-coupled device (CCD) imaging system is used to monitor the single-mode optical fiber after each polishing process.
- CCD charge-coupled device
- Step 302 uniformly depositing a gold film 202 on the polishing surface of the side polished single mode fiber 201;
- the transmission spectrum at this time is recorded as a reference spectrum.
- Step 303 uniformly applying the ultraviolet curable adhesive to the gold film 202, and curing using an ultraviolet lamp.
- the ultraviolet curable adhesive is evenly applied onto the gold film 202, and after curing with an ultraviolet lamp, the current transmission spectrum is recorded by a spectrometer and compared with the reference spectrum, so that the temperature change can be determined.
- the side mode polishing method is used to perform a polishing process on the single mode fiber to obtain a side throw.
- the single-mode optical fiber 201 is ground, and the gold film 202 is uniformly deposited on the polishing surface of the side-polished single-mode optical fiber 201, and the ultraviolet-curable adhesive is uniformly applied to the gold film 202 and cured by using an ultraviolet lamp, compared with the prior art.
- the temperature sensitive film 203 By curing the temperature sensitive film 203 on the gold film 202, since the temperature sensitive film 203 is solid, it does not have fluidity like a liquid material, which reduces the process of liquid encapsulation in the prior art, simplifies the preparation process, and Since the temperature sensitive film 203 is solid, the thermal expansion effect is not obvious, and the stability of the device structure is improved, and its application in biochemistry and the like is no longer limited.
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Abstract
The invention discloses a temperature sensor based on surface plasma resonance and a production method thereof. The temperature sensor comprises: a light source transmitter (10), a sensing device (20) and a spectrograph (30). An output end of the light source transmitter (10) is connected with an input end of the sensing device (20). An output end of the sensing device (20) is connected with the input end of the spectrograph (30). The sensing device (20) comprises a side-polished single-mode optical fiber (201), a gold film (202) and a temperature-sensitive thin film (203). The gold film (202) is deposited on a polished side of the side-polished single-mode optical fiber (201), and the temperature-sensitive thin film (203) is solidified on the gold film (202). With the fact that the solid temperature-sensitive thin film (203) is solidified on the gold film (202), and because the solid temperature-sensitive thin film (203) does not have the flow ability as that of a liquid material, the liquid encapsulation procedure in the prior art is omitted, and the production process is simplified; in addition, due to the fact that the solid temperature-sensitive thin film (203) is solid and is not evident in thermal expansion effect, device structure stability is increased, and application of the temperature sensor in fields such as biochemistry is not limited. Also disclosed is a method for preparing the temperature sensor.
Description
本发明属于传感器技术领域，尤其涉及一种基于表面等离子体共振的温度传感器及其制备方法。The invention belongs to the technical field of sensors, and in particular relates to a temperature sensor based on surface plasmon resonance and a preparation method thereof.
现有的基于表面等离子体子共振（Surface Plasmon Resonance，SPR）的温度传感器，需将液体材料管式封装到温度传感器的表面，通过液体材料的热光效应来检测环境温度，但由于液体材料具有流动性，因此封装难度大，导致制备工艺复杂，而且因其热膨胀效应明显、结构不稳定，当温度过高时容易发生爆炸，限制了其在生化等领域的应用。The existing Surface Plasmon Resonance (SPR) based temperature sensor requires a liquid material tube package to the surface of the temperature sensor to detect the ambient temperature by the thermo-optic effect of the liquid material, but since the liquid material has The fluidity is therefore difficult to package, resulting in a complicated preparation process, and because of its obvious thermal expansion effect and unstable structure, it is prone to explosion when the temperature is too high, which limits its application in biochemistry and other fields.
因此，现有的基于SPR的温度传感器存在着由于液体材料具有流动性，因此封装难度大，导致制备工艺复杂，且因其热膨胀效应明显、结构不稳定，当温度过高时容易发生爆炸，限制了其在生化等领域的应用的技术问题。Therefore, the existing SPR-based temperature sensor has the fluidity of the liquid material, so the packaging is difficult, resulting in a complicated preparation process, and the thermal expansion effect is obvious, the structure is unstable, and the explosion is prone to occur when the temperature is too high. Its technical problems in the application of biochemistry and other fields.
本发明的主要目的在于提出一种基于表面等离子体共振的温度传感器，旨在解决现有的基于SPR的温度传感器存在着由于液体材料具有流动性，因此封装难度大，导致制备工艺复杂，且因其热膨胀效应明显、结构不稳定，当温度过高时容易发生爆炸，限制了其在生化等领域的应用的技术问题。The main object of the present invention is to provide a temperature sensor based on surface plasmon resonance, which aims to solve the existing SPR-based temperature sensor. Due to the fluidity of the liquid material, the packaging is difficult, resulting in a complicated preparation process. Its thermal expansion effect is obvious, its structure is unstable, and it is prone to explosion when the temperature is too high, which limits its technical problems in the application of biochemistry and other fields.
为实现上述目的，本发明第一方面提供一种基于表面等离子体共振的温度传感器，所述温度传感器包括：光源发射器、传感装置及光谱仪；To achieve the above object, a first aspect of the present invention provides a surface plasmon resonance based temperature sensor, the temperature sensor comprising: a light source emitter, a sensing device, and a spectrometer;
所述光源发射器的输出端与所述传感装置的输入端相连，所述传感装置的输出端与所述光谱仪的输入端相连；An output end of the light source emitter is connected to an input end of the sensing device, and an output end of the sensing device is connected to an input end of the spectrometer;
所述传感装置包括侧面抛磨单模光纤、金膜及温敏薄膜；The sensing device comprises a side polished single mode fiber, a gold film and a temperature sensitive film;
所述金膜沉积在所述侧面抛磨单模光纤的抛磨面上，所述温敏薄膜固化在所述金膜上。The gold film is deposited on the polishing surface of the side polished single mode fiber, and the temperature sensitive film is cured on the gold film.
进一步的，所述温敏薄膜的材料为紫外化固胶。Further, the material of the temperature sensitive film is a UV-curable adhesive.
进一步的，所述紫外化固胶的折射率为1.36。Further, the ultraviolet gel has a refractive index of 1.36.
进一步的，所述金膜的厚度为45nm-60nm。Further, the gold film has a thickness of 45 nm to 60 nm.
进一步的，所述侧面抛磨单模光纤的抛磨面距离所述侧面抛磨单模光纤的纤芯的上表面2μm-3μm。Further, the polishing surface of the side-polishing single-mode fiber is 2 μm - 3 μm from the upper surface of the core of the side-polishing single-mode fiber.
为实现上述目的，本发明第二方面提供一种基于表面等离子体共振的温度传感器的制备方法，其特征在于，所述方法用于制备如本发明第一方面所述的温度传感器，所述方法包括：In order to achieve the above object, a second aspect of the present invention provides a method of fabricating a temperature sensor based on surface plasmon resonance, characterized in that the method is for preparing a temperature sensor according to the first aspect of the invention, the method include:
在光源发射器向单模光纤发射光源得到传输光谱，光谱仪对所述传输光谱进行实时监测的条件下，使用侧面抛磨方式，对单模光纤进行抛磨处理，得到侧面抛磨单模光纤；The light source emitter emits a light source to the single-mode fiber to obtain a transmission spectrum, and the spectrometer performs a real-time monitoring on the transmission spectrum, and the single-mode fiber is polished by using a side polishing method to obtain a side-grinding single-mode fiber;
在所述侧面抛磨单模光纤的抛磨面上均匀沉积金膜；Depositing a gold film uniformly on the polishing surface of the side polished single mode fiber;
将紫外固化胶均匀涂抹到所述金膜上，并使用紫外灯进行固化。The UV curable adhesive was evenly applied to the gold film and cured using an ultraviolet lamp.
进一步的，所述使用侧面抛磨方式，对单模光纤进行抛磨处理，得到侧面抛磨单模光纤，包括：Further, the side-polishing method is used to perform a polishing process on the single-mode optical fiber to obtain a side-grinding single-mode optical fiber, including:
使用2000目砂纸对所述单模光纤的上表面进行粗磨处理；The upper surface of the single mode fiber is subjected to rough grinding treatment using 2000 mesh sandpaper;
使用5000目砂纸对粗磨处理后的上表面进行细磨处理；The upper surface of the rough grinding treatment is finely ground using 5000 mesh sandpaper;
使用12000目砂纸对细磨处理后的上表面进行精抛处理，得到所述抛磨面。The finely polished upper surface was subjected to a fine polishing treatment using 12,000 grit sandpaper to obtain the polishing surface.
进一步的，所述粗磨处理后的上表面距离所述单模光纤的下表面73μm，所述细磨处理后的上表面距离所述单模光纤的下表面70μm。Further, the upper surface after the rough grinding treatment is 73 μm from the lower surface of the single-mode optical fiber, and the upper surface after the fine grinding treatment is 70 μm from the lower surface of the single-mode optical fiber.
本发明提出的一种基于表面等离子体共振的温度传感器，该温度传感器包括：光源发射器、传感装置及光谱仪，光源发射器的输出端与传感装置的输入端相连，传感装置的输出端与光谱仪的输入端相连，传感装置包括侧面抛磨单模光纤、金膜及温敏薄膜，金膜沉积在侧面抛磨单模光纤的抛磨面上，温敏薄膜固化在金膜上。与现有技术相比，通过将温敏薄膜固化在金膜上，因温敏薄膜是固态的，不像液体材料一样具有流动性，减少了液体封装的工序，简化了制备工艺，且因温敏薄膜是固态的，热膨胀效应不明显，提高了器件结构的稳定性，不再限制其在生化等领域的应用。The invention provides a temperature sensor based on surface plasmon resonance, the temperature sensor comprises: a light source emitter, a sensing device and a spectrometer, wherein an output end of the light source emitter is connected to an input end of the sensing device, and the output of the sensing device The end is connected to the input end of the spectrometer, and the sensing device comprises a side polished single mode fiber, a gold film and a temperature sensitive film. The gold film is deposited on the polishing surface of the side polished single mode fiber, and the temperature sensitive film is cured on the gold film. . Compared with the prior art, by curing the temperature sensitive film on the gold film, since the temperature sensitive film is solid, it does not have the same fluidity as the liquid material, reduces the process of liquid encapsulation, simplifies the preparation process, and is warmed by temperature. The sensitive film is solid and the thermal expansion effect is not obvious, which improves the stability of the device structure and no longer limits its application in biochemistry and other fields.
图1是本发明第一实施例提供的一种基于表面等离子体共振的温度传感器的结构示意图；1 is a schematic structural view of a temperature sensor based on surface plasmon resonance according to a first embodiment of the present invention;
图2是本发明第一实施例提供的一种基于表面等离子体共振的温度传感器的细化结构示意图；2 is a schematic diagram showing a refinement structure of a temperature sensor based on surface plasmon resonance according to a first embodiment of the present invention;
图3是本发明第二实施例提供的一种基于表面等离子体共振的温度传感器的制备方法的流程示意图。3 is a schematic flow chart of a method for preparing a temperature sensor based on surface plasmon resonance according to a second embodiment of the present invention.
为使得本发明的发明目的、特征、优点能够更加的明显和易懂，下面将结合本发明实施例中的附图，对本发明实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例仅仅是本发明一部分实施例，而非全部实施例。基于本发明中的实施例，本领域技术人员在没有做出创造性劳动前提下所获得的所有其他实施例，都属于本发明保护的范围。The technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the drawings in the embodiments of the present invention. The embodiments are merely a part of the embodiments of the invention, and not all of the embodiments. All other embodiments obtained by a person skilled in the art based on the embodiments of the present invention without creative efforts are within the scope of the present invention.
为了说明本发明的技术方案，下面通过具体实施例来进行说明。In order to explain the technical solution of the present invention, the following description will be made by way of specific embodiments.
为了更好的理解本发明，请参阅图1所示的第一实施例提供的一种基于表面等离子体共振的温度传感器的结构示意图，及图2所示的第一实施例提供的一种基于表面等离子体共振的温度传感器的细化结构示意图，所述温度传感器包括：光源发射器10、传感装置20及光谱仪30；For a better understanding of the present invention, please refer to the structural example of a surface plasmon resonance based temperature sensor provided by the first embodiment shown in FIG. 1 , and the first embodiment provided in FIG. A schematic diagram of a detailed structure of a surface plasmon resonance temperature sensor, the temperature sensor comprising: a light source emitter 10, a sensing device 20, and a spectrometer 30;
所述光源发射器10的输出端与所述传感装置20的输入端相连，所述传感装置20的输出端与所述光谱仪30的输入端相连；An output end of the light source emitter 10 is connected to an input end of the sensing device 20, and an output end of the sensing device 20 is connected to an input end of the spectrometer 30;
所述传感装置20包括侧面抛磨单模光纤201、金膜202及温敏薄膜203；The sensing device 20 includes a side polished single mode fiber 201, a gold film 202 and a temperature sensitive film 203;
所述金膜202沉积在所述侧面抛磨单模光纤201的抛磨面上，所述温敏薄膜203固化在所述金膜202上。The gold film 202 is deposited on the polishing surface of the side polished single mode fiber 201, and the temperature sensitive film 203 is cured on the gold film 202.
在本发明实施例中，侧面抛磨单模光纤201由纤芯204及包层205组成。In the embodiment of the present invention, the side-grinding single-mode optical fiber 201 is composed of a core 204 and a cladding 205.
进一步的，所述温敏薄膜203的材料为紫外化固胶。Further, the material of the temperature sensitive film 203 is a UV-curable glue.
进一步的，所述紫外化固胶的折射率为1.36。Further, the ultraviolet gel has a refractive index of 1.36.
在本发明实施例中，以普通单模光纤为基底的基于表面等离子体共振的温度传感器，其对折射率的响应并非是线性的，其对折射率的响应是呈指数变化的，灵敏度随着外界折射率的增高而增高，但是外界的折射率越高，损耗峰也会变得越来越宽，也就是说品质因子降低，之所以选择折射率为1.36的紫外固化胶，是因为其固化后的折射率为1.39左右，在此折射率范围内，不仅可以保证温度传感器的一个高灵敏度特性，而且还有一个较高的品质因子。In the embodiment of the present invention, a surface plasmon resonance based temperature sensor based on a common single mode fiber has a linear response to the refractive index, and its response to the refractive index is exponentially changed. The external refractive index increases and increases, but the higher the refractive index of the outside, the more the loss peak becomes wider, that is, the quality factor decreases. The reason why the UV-curable adhesive with a refractive index of 1.36 is selected is because it cures. The refractive index after the refractive index is about 1.39. In this refractive index range, not only a high sensitivity characteristic of the temperature sensor but also a high quality factor is ensured.
进一步的，所述金膜202的厚度为45nm-60nm。Further, the gold film 202 has a thickness of 45 nm to 60 nm.
在本发明实施例中，当金膜202的厚度低于45nm时，温度传感器的稳定性差，品质因子低，当金膜202的厚度高于60nm时，光波能量到达金属上表面的能量较低，同样会影响温度传感器对外界折射率的探测。In the embodiment of the present invention, when the thickness of the gold film 202 is less than 45 nm, the stability of the temperature sensor is poor, and the quality factor is low. When the thickness of the gold film 202 is higher than 60 nm, the energy of the light wave energy reaching the upper surface of the metal is lower. It also affects the temperature sensor's detection of the external refractive index.
进一步的，所述侧面抛磨单模光纤201的抛磨面距离所述侧面抛磨单模光纤201的纤芯的上表面2μm-3μm。Further, the polishing surface of the side-polishing single-mode optical fiber 201 is 2 μm - 3 μm from the upper surface of the core of the side-polishing single-mode optical fiber 201.
在本发明实施例中，在400nm--1550nm这个波段，单模光纤纤芯的光能量的穿透深度为2μm-3μm，为保证光能量到达金表面而又不影响光能量在纤芯内的传输，必须保证侧面抛磨单模光纤201的纤芯的上表面为2μm-3μm。In the embodiment of the present invention, in the wavelength range of 400 nm to 1550 nm, the light energy penetration depth of the single mode fiber core is 2 μm - 3 μm, so as to ensure that the light energy reaches the gold surface without affecting the light energy in the core. For transmission, it is necessary to ensure that the upper surface of the core of the side-polishing single-mode optical fiber 201 is 2 μm - 3 μm.
在本发明实施例中，提供了一种基于表面等离子体共振的温度传感器，该温度传感器包括：光源发射器10、传感装置20及光谱仪30，光源发射器10的输出端与传感装置20的输入端相连，传感装置20的输出端与光谱仪30的输入端相连，传感装置20包括侧面抛磨单模光纤201、金膜202及温敏薄膜203，金膜202沉积在侧面抛磨单模光纤201的抛磨面上，温敏薄膜203固化在金膜202上。与现有技术相比，通过将温敏薄膜203固化在金膜202上，因温敏薄膜203是固态的，不像液体材料一样具有流动性，减少了现有技术中的液体封装的工序，简化了制备工艺，且因温敏薄膜203是固态的，热膨胀效应不明显，提高了器件结构的稳定性，不再限制其在生化等领域的应用。In the embodiment of the present invention, a surface plasmon resonance based temperature sensor is provided. The temperature sensor includes a light source emitter 10, a sensing device 20, and a spectrometer 30. The output end of the light source emitter 10 and the sensing device 20 The input ends are connected, the output end of the sensing device 20 is connected to the input end of the spectrometer 30, and the sensing device 20 comprises a side-grinding single-mode optical fiber 201, a gold film 202 and a temperature-sensitive film 203, and the gold film 202 is deposited on the side. On the polishing surface of the single mode fiber 201, the temperature sensitive film 203 is cured on the gold film 202. Compared with the prior art, by curing the temperature sensitive film 203 on the gold film 202, since the temperature sensitive film 203 is solid, it does not have fluidity like a liquid material, which reduces the process of liquid packaging in the prior art. The preparation process is simplified, and since the temperature sensitive film 203 is solid, the thermal expansion effect is not obvious, the stability of the device structure is improved, and the application in the biochemical field is no longer limited.
请参阅图3，图3为本发明第二实施例提供的一种基于表面等离子体共振的温度传感器的制备方法的流程示意图，包括：Please refer to FIG. 3. FIG. 3 is a schematic flowchart diagram of a method for preparing a temperature sensor based on surface plasmon resonance according to a second embodiment of the present invention, including:
步骤301、在光源发射器向单模光纤发射光源得到传输光谱，光谱仪对所述传输光谱进行实时监测的条件下，使用侧面抛磨方式，对单模光纤进行抛磨处理，得到侧面抛磨单模光纤201；Step 301: After the light source emitter emits a light source to the single-mode optical fiber to obtain a transmission spectrum, and the spectrometer performs real-time monitoring on the transmission spectrum, the single-mode optical fiber is polished by using a side polishing method to obtain a side polishing single. Mode fiber 201;
在本发明实施例中，将单模光纤固定在抛磨机的夹具上，单模光纤的两端分别与光源发射器10及光谱仪30相连接，在光源发射器向单模光纤发射光源得到传输光谱，光谱仪对传输光谱进行实时监测的条件下，使用2000目砂纸对单模光纤的上表面进行粗磨处理，使得粗磨处理后的上表面距离单模光纤的下表面73μm，然后使用5000目砂纸对粗磨处理后的上表面进行细磨处理，使得细磨处理后的上表面距离单模光纤的下表面70μm，在使用12000目砂纸对细磨处理后的上表面进行精抛处理，得到抛磨面，通过上述方式可以减少光纤抛磨面的表面裂痕，增加其平滑度。In the embodiment of the present invention, the single-mode optical fiber is fixed on the fixture of the polishing machine, and the two ends of the single-mode optical fiber are respectively connected with the light source emitter 10 and the spectrometer 30, and the light source emitter is transmitted to the single-mode optical fiber emitting light source. Spectral and spectrometer for real-time monitoring of the transmission spectrum, the upper surface of the single-mode fiber was coarsely ground using 2000 mesh sandpaper, so that the upper surface after rough grinding was 73 μm away from the lower surface of the single-mode fiber, and then 5000 mesh was used. The upper surface of the rough grinding treatment is finely ground by the sandpaper, so that the upper surface after the fine grinding treatment is 70 μm away from the lower surface of the single-mode optical fiber, and the finely polished upper surface is subjected to fine polishing treatment using 12000 mesh sandpaper. By polishing the surface, the surface crack of the fiber polishing surface can be reduced and the smoothness can be increased.
需要注意的是，在侧面抛磨过程中，采用宽带光源及光谱仪对光纤的传输光谱进行实时监测，采用电荷耦合元件（Charge-coupled Device，CCD）成像系统监测单模光纤每一次抛磨处理后的上表面距离单模光纤的下表面的距离，从而可以精确控制抛磨长度深度。It should be noted that in the side polishing process, the transmission spectrum of the optical fiber is monitored in real time by using a broadband light source and a spectrometer, and a charge-coupled device (CCD) imaging system is used to monitor the single-mode optical fiber after each polishing process. The distance from the upper surface to the lower surface of the single mode fiber allows precise control of the depth of the polishing length.
步骤302、在所述侧面抛磨单模光纤201的抛磨面上均匀沉积金膜202；Step 302, uniformly depositing a gold film 202 on the polishing surface of the side polished single mode fiber 201;
在本发明实施例中，在侧面抛磨单模光纤201的抛磨面上均匀沉积金膜202之后，记录此时的传输光谱为参考光谱。In the embodiment of the present invention, after the gold film 202 is uniformly deposited on the polishing surface of the side polished single mode fiber 201, the transmission spectrum at this time is recorded as a reference spectrum.
步骤303、将紫外固化胶均匀涂抹到所述金膜202上，并使用紫外灯进行固化。Step 303, uniformly applying the ultraviolet curable adhesive to the gold film 202, and curing using an ultraviolet lamp.
在本发明实施例中，将紫外固化胶均匀涂抹到金膜202上，并使用紫外灯进行固化之后，通过光谱仪记录当前的传输光谱，并与参考光谱做比较，从而可以确定温度的变化。In the embodiment of the present invention, the ultraviolet curable adhesive is evenly applied onto the gold film 202, and after curing with an ultraviolet lamp, the current transmission spectrum is recorded by a spectrometer and compared with the reference spectrum, so that the temperature change can be determined.
在本发明实施例中，在光源发射器向单模光纤发射光源得到传输光谱，光谱仪对传输光谱进行实时监测的条件下，使用侧面抛磨方式，对单模光纤进行抛磨处理，得到侧面抛磨单模光纤201，在侧面抛磨单模光纤201的抛磨面上均匀沉积金膜202，将紫外固化胶均匀涂抹到金膜202上，并使用紫外灯进行固化，与现有技术相比，通过将温敏薄膜203固化在金膜202上，因温敏薄膜203是固态的，不像液体材料一样具有流动性，减少了现有技术中的液体封装的工序，简化了制备工艺，且因温敏薄膜203是固态的，热膨胀效应不明显，提高了器件结构的稳定性，不再限制其在生化等领域的应用。In the embodiment of the present invention, when the light source emitter emits a light source to a single mode fiber to obtain a transmission spectrum, and the spectrometer monitors the transmission spectrum in real time, the side mode polishing method is used to perform a polishing process on the single mode fiber to obtain a side throw. The single-mode optical fiber 201 is ground, and the gold film 202 is uniformly deposited on the polishing surface of the side-polished single-mode optical fiber 201, and the ultraviolet-curable adhesive is uniformly applied to the gold film 202 and cured by using an ultraviolet lamp, compared with the prior art. By curing the temperature sensitive film 203 on the gold film 202, since the temperature sensitive film 203 is solid, it does not have fluidity like a liquid material, which reduces the process of liquid encapsulation in the prior art, simplifies the preparation process, and Since the temperature sensitive film 203 is solid, the thermal expansion effect is not obvious, and the stability of the device structure is improved, and its application in biochemistry and the like is no longer limited.
在本申请所提供的几个实施例中，应该理解到，所揭露的装置和方法，可以通过其它的方式实现。In the several embodiments provided by the present application, it should be understood that the disclosed apparatus and method may be implemented in other manners.
在上述实施例中，对各个实施例的描述都各有侧重，某个实施例中没有详述的部分，可以参见其它实施例的相关描述。In the above embodiments, the descriptions of the various embodiments are all focused, and the parts that are not detailed in a certain embodiment can be referred to the related descriptions of other embodiments.
以上为对本发明所提供的一种基于表面等离子体共振的温度传感器及其制备方法的描述，对于本领域的技术人员，依据本发明实施例的思想，在具体实施方式及应用范围上均会有改变之处，综上，本说明书内容不应理解为对本发明的限制。The above is a description of a surface plasmon resonance based temperature sensor and a preparation method thereof provided by the present invention. For those skilled in the art, according to the idea of the embodiment of the present invention, there will be a specific embodiment and application range. In view of the above, the contents of the present specification should not be construed as limiting the present invention.
Claims (8)
- 一种基于表面等离子体共振的温度传感器，其特征在于，所述温度传感器包括：光源发射器、传感装置及光谱仪；
所述光源发射器的输出端与所述传感装置的输入端相连，所述传感装置的输出端与所述光谱仪的输入端相连；
所述传感装置包括侧面抛磨单模光纤、金膜及温敏薄膜；
所述金膜沉积在所述侧面抛磨单模光纤的抛磨面上，所述温敏薄膜固化在所述金膜上。A temperature sensor based on surface plasmon resonance, characterized in that the temperature sensor comprises: a light source emitter, a sensing device and a spectrometer;
An output end of the light source emitter is connected to an input end of the sensing device, and an output end of the sensing device is connected to an input end of the spectrometer;
The sensing device comprises a side polished single mode fiber, a gold film and a temperature sensitive film;
The gold film is deposited on the polishing surface of the side polished single mode fiber, and the temperature sensitive film is cured on the gold film. - 根据权利要求1所述的温度传感器，其特征在于，所述温敏薄膜的材料为紫外化固胶。The temperature sensor according to claim 1, wherein the material of the temperature sensitive film is a UV-curable adhesive.
- 根据权利要求2所述的温度传感器，其特征在于，所述紫外化固胶的折射率为1.36。The temperature sensor according to claim 2, wherein the ultraviolet gel has a refractive index of 1.36.
- 根据权利要求1所述的温度传感器，其特征在于，所述金膜的厚度为45nm-60nm。The temperature sensor according to claim 1, wherein the gold film has a thickness of 45 nm to 60 nm.
- 根据权利要求1所述的温度传感器，其特征在于，所述侧面抛磨单模光纤的抛磨面距离所述侧面抛磨单模光纤的纤芯的上表面2μm-3μm。The temperature sensor according to claim 1, wherein a polishing surface of said side-polishing single-mode optical fiber is 2 μm - 3 μm from an upper surface of said core of said side-polishing single-mode optical fiber.
- 一种基于表面等离子体共振的温度传感器的制备方法，其特征在于，所述方法用于制备如权利要求1至5任意一项所述的温度传感器，所述方法包括：
在光源发射器向单模光纤发射光源得到传输光谱，光谱仪对所述传输光谱进行实时监测的条件下，使用侧面抛磨方式，对单模光纤进行抛磨处理，得到侧面抛磨单模光纤；
在所述侧面抛磨单模光纤的抛磨面上均匀沉积金膜；
将紫外固化胶均匀涂抹到所述金膜上，并使用紫外灯进行固化。A method for preparing a temperature sensor based on surface plasmon resonance, characterized in that the method is used for preparing the temperature sensor according to any one of claims 1 to 5, the method comprising:
The light source emitter emits a light source to the single-mode fiber to obtain a transmission spectrum, and the spectrometer performs a real-time monitoring on the transmission spectrum, and the single-mode fiber is polished by using a side polishing method to obtain a side-grinding single-mode fiber;
Depositing a gold film uniformly on the polishing surface of the side polished single mode fiber;
The UV curable adhesive was evenly applied to the gold film and cured using an ultraviolet lamp. - 根据权利要求6所述的温度传感器，其特征在于，所述使用侧面抛磨方式，对单模光纤进行抛磨处理，得到侧面抛磨单模光纤，包括：
使用2000目砂纸对所述单模光纤的上表面进行粗磨处理；
使用5000目砂纸对粗磨处理后的上表面进行细磨处理；
使用12000目砂纸对细磨处理后的上表面进行精抛处理，得到所述抛磨面。The temperature sensor according to claim 6, wherein the side-polishing method performs a polishing process on the single-mode optical fiber to obtain a side-grinding single-mode optical fiber, including:
The upper surface of the single mode fiber is subjected to rough grinding treatment using 2000 mesh sandpaper;
The upper surface of the rough grinding treatment is finely ground using 5000 mesh sandpaper;
The finely polished upper surface was subjected to a fine polishing treatment using 12,000 grit sandpaper to obtain the polishing surface. - 根据权利要求7所述的温度传感器，其特征在于，所述粗磨处理后的上表面距离所述单模光纤的下表面73μm，所述细磨处理后的上表面距离所述单模光纤的下表面70μm。The temperature sensor according to claim 7, wherein the roughened upper surface is 73 μm from the lower surface of the single-mode optical fiber, and the finely ground upper surface is separated from the single-mode optical fiber. The lower surface is 70 μm.
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