CN106949915A - A kind of temperature and humidity optical fiber Fabry Perot composite micro-nano sensor - Google Patents
A kind of temperature and humidity optical fiber Fabry Perot composite micro-nano sensor Download PDFInfo
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- CN106949915A CN106949915A CN201710128175.4A CN201710128175A CN106949915A CN 106949915 A CN106949915 A CN 106949915A CN 201710128175 A CN201710128175 A CN 201710128175A CN 106949915 A CN106949915 A CN 106949915A
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- temperature
- optical fiber
- sensor
- humidity
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- 239000013307 optical fiber Substances 0.000 title claims abstract description 46
- 239000002131 composite material Substances 0.000 title claims abstract description 14
- 229920000557 Nafion® Polymers 0.000 claims abstract description 25
- 239000000835 fiber Substances 0.000 claims description 32
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 19
- 239000010408 film Substances 0.000 claims description 15
- 239000000243 solution Substances 0.000 claims description 11
- 238000006073 displacement reaction Methods 0.000 claims description 9
- 230000003287 optical effect Effects 0.000 claims description 9
- 239000012528 membrane Substances 0.000 claims description 8
- 238000001228 spectrum Methods 0.000 claims description 8
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 7
- 230000015572 biosynthetic process Effects 0.000 claims description 5
- 238000003466 welding Methods 0.000 claims description 5
- 239000003292 glue Substances 0.000 claims description 4
- 239000000203 mixture Substances 0.000 claims description 4
- 150000001875 compounds Chemical class 0.000 claims description 3
- 238000001035 drying Methods 0.000 claims description 3
- 239000011259 mixed solution Substances 0.000 claims description 2
- 239000010409 thin film Substances 0.000 claims description 2
- 239000000463 material Substances 0.000 abstract description 3
- 229920000642 polymer Polymers 0.000 abstract description 3
- UQSQSQZYBQSBJZ-UHFFFAOYSA-N fluorosulfonic acid Chemical compound OS(F)(=O)=O UQSQSQZYBQSBJZ-UHFFFAOYSA-N 0.000 abstract description 2
- 238000002360 preparation method Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 2
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- 239000005864 Sulphur Substances 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000003708 ampul Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000006855 networking Effects 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000000985 reflectance spectrum Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/353—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre
- G01D5/35306—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement
- G01D5/35309—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement using multiple waves interferometer
- G01D5/35312—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement using multiple waves interferometer using a Fabry Perot
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Measuring Temperature Or Quantity Of Heat (AREA)
Abstract
The invention belongs to micro-nano sensor technical field, more particularly to a kind of temperature and humidity optical fiber Fabry Perot composite micro-nano sensor.A kind of temperature and humidity optical fiber Fabry Perot composite micro-nano sensor, is made up of the intelligent acess section being sequentially connected, external fixation device, internal optical fiber fixing device, interferometric cavity, temperature and moisture sensors section.The present invention proposes the sensor for being combined and being fabricated to optical fiber using perfluorosulfonic acid type polymer (Nafion) film, causes single temperature or humidity sensor while being achieved using this material and structure.
Description
Technical field
The invention belongs to micro-nano sensor technical field, more particularly to a kind of temperature and humidity optical fiber Fabry Perot is combined
Micro-nano sensor.
Background technology
The life monitored with us of temperature and humidity is closely related, and is widely applied to each neck of national economy
Domain, and the field of the temperature and moisture sensors of composite application is more extensive.In addition, the sensor of micro-nano type is due to it
The plurality of advantages itself having is for example：Miniaturization, easy of integration etc. are increasingly by the favor in industry.
Compared to other kinds of sensor, fibre optical sensor has that size is small, electromagnetism interference is strong, sensitivity is high, electricity
Good insulating, it is corrosion-resistant many advantages, such as, in actual application, also allow for multiplexing and networking, thus compound micro-nano light
Fine temperature and moisture sensors possess huge industrial competition and wide application prospect.The present invention, which is proposed, uses perfluor sulphur
The sensor that acid-based polymer (Nafion) film is combined and is fabricated to optical fiber, is caused single using this material and structure
Temperature or humidity sensor be achieved simultaneously.
The content of the invention
The invention aims to provide a kind of simple reusable temperature and humidity optical fiber Fabry Perot be combined it is micro-
Receive sensor.
The object of the present invention is achieved like this：
A kind of temperature and humidity optical fiber Fabry Perot composite micro-nano sensor, by the intelligent acess section, outer being sequentially connected
Portion's fixing device, internal optical fiber fixing device, interferometric cavity, temperature and moisture sensors section composition；Intelligent acess section (1) list
Broadband optical signal is continuously introduced into sensor and feeds back the signal after modulation by mode fiber；External fixation device (2) be used for protect and
Encapsulate the various pieces of sensor and provide outside support for the making of sensor；Internal optical fiber fixing device (3) will connect
The optical fiber entered is fixed on the center of quartz glass tube and prevents it to be subjected to displacement and misplace；Interferometric cavity (4) formation Fabry
The front half section of Perot interference chamber, is the major part to form interference spectrum；Temperature and moisture sensors (5) are constituted after interference cavity
Half section, in different temperature and humidity environment modulated optical signals.
The intelligent acess section is single-mode fiber, and the external fixation device is quartz glass tube, and the internal optical fiber is consolidated
Device is determined for uv-curable glue, and the interferometric cavity is fiber end face and the air chamber of the inner surface formation of Nafion films, institute
Temperature and moisture sensors are stated for Nafion films；Quartz glass tube, single-mode fiber, air chamber and Nafion membrane are coaxial.
The external fixation device quartz glass tube external diameter is 400 μm, and internal diameter is 200 μm；The interferometric cavity air chamber
A length of 25 μm~65 μm of chamber；The thickness of the temperature and moisture sensors Nafion membrane is 20 μm~50 μm.
The access section optical fiber is mutually welded using common single-mode fiber with single-mode fiber, and the single-mode optical fiber length of welding is
4cm~10cm, single-mode fiber core diameter is 10 μm, and external diameter is 125 μm, the Nafion films that temperature and moisture sensors are used
Dry and form with alcohol mixed solution for Nafion solution.
The beneficial effects of the present invention are：
The present invention proposes the biography for being combined and being fabricated to optical fiber using perfluorosulfonic acid type polymer (Nafion) film
Sensor, causes single temperature or humidity sensor while being achieved using this material and structure.
Brief description of the drawings
Fig. 1 is a kind of structural representation of temperature and humidity optical fiber Fabry Perot composite micro-nano sensor of the embodiment of the present invention
Figure.
Fig. 2 is a kind of spectrum of temperature and humidity optical fiber Fabry Perot composite micro-nano sensor of the embodiment of the present invention with temperature
The matched curve that the image and frequency displacement for spending frequency displacement are varied with temperature.
Fig. 3 is a kind of spectrum of temperature and humidity optical fiber Fabry Perot composite micro-nano sensor of the embodiment of the present invention with wet
The matched curve that the image and frequency displacement for spending frequency displacement change with humidity.
Embodiment
The present invention is described further below in conjunction with the accompanying drawings.
A kind of temperature and humidity optical fiber Fabry Perot composite micro-nano sensor is by the intelligent acess section, outside that is sequentially connected
Fixing device, internal optical fiber fixing device, interferometric cavity, temperature and moisture sensors section composition；Intelligent acess section 1 uses single-mode optics
It is fine that broadband optical signal is continuously introduced into sensor by the signal feedback after modulation；External fixation device 2 is used to protecting and encapsulating biography
The various pieces of sensor and provide outside support for the making of sensor；The main function of internal optical fiber fixing device 3 be by
The optical fiber of access is fixed on the center of quartz glass tube and prevents it to be subjected to displacement and misplace；Interferometric cavity 4 is used to form method
The front half section of FP interference cavity, is the major part to form interference spectrum；Temperature and moisture sensors 5 are used to constitute and interfered
Second half section of chamber and in different temperature and humidity environment modulated optical signals.
The intelligent acess section is single-mode fiber, and the external fixation device is quartz glass tube, and the internal optical fiber is consolidated
Device is determined for uv-curable glue, and the interferometric cavity is fiber end face and the air chamber of the inner surface formation of Nafion films, institute
Temperature and moisture sensors are stated for Nafion films；Quartz glass tube, single-mode fiber, air chamber and Nafion membrane are coaxial.
The external fixation device quartz glass tube external diameter is 400 μm, and internal diameter is 200 μm；The interference cavity air chamber is long
For 25 μm~65 μm；The thickness of the temperature and moisture sensors Nafion membrane is 20 μm~50 μm.
The access section optical fiber is mutually welded using common single-mode fiber with single-mode fiber, and the single-mode optical fiber length of welding is
4cm~10cm, single-mode fiber core diameter is 10 μm, and external diameter is 125 μm；Preparation temperature and humidity sensor Nafion films are used
Solution mixed by a certain percentage with alcohol for Nafion solution, prepare Nafion films before must be to quartz glass
Effective ethanol solution it is carried out it is ultrasonically treated, preparation process ensure in dustfree environment carry out.
Embodiment
A kind of temperature and humidity optical fiber Fabry Perot composite micro-nano sensor of the present invention is connect by the optical fiber being sequentially connected
Enter section, external fixation device, internal optical fiber fixing device, interferometric cavity, temperature and moisture sensors section composition；Intelligent acess section
Broadband optical signal is continuously introduced into sensor by 1 with single-mode fiber feeds back the signal after modulation；External fixation device 2 is used to protect
With encapsulation sensor various pieces and provide outside support for the making of sensor；Internal optical fiber fixing device 3 is main
Effect is that the optical fiber for saying access is fixed on the center of quartz glass tube and prevents it to be subjected to displacement and misplace；Interferometric cavity 4 is used
It is the major part to form interference spectrum in the front half section for forming Fabry Perot interference cavity；Temperature and moisture sensors 5 are used for
Constitute the second half section of interference cavity and in different temperature and humidity environment modulated optical signals；
Processing method：
By Nafion solution and ethanol according to volume ratio 1:15 ratio is mixed, then ultrasonically treated, makes its uniform
It is mixed to get film preparation solution.
The quartz glass tube for taking a segment length appropriate, its internal diameter is 200 μm, and external diameter is 400 μm, right in dustless environment
Carry out ultrasonically treated, it is ensured that inwall cleaning no-sundries.It is after drying, it is vertical fixed, the film for taking a drop appropriate with dropper
Prepare the upper surface that solution drops in quartz glass tube, due to capillarity, film preparation solution can quartz glass tube upper half
Part is stopped, after drying process, and film preparation solution can be gradually formed shown in thin film such as Fig. 1 (5), its thickness and
Volume ratio when solution is equipped with is relevant with the amount dropped in capillary.
It is that 4cm-8cm single-mode fiber and the single-mode fiber of standard carry out welding that two ends are cut into concordant and length, it is ensured that
Its splice loss, splice attenuation is less than 0.1dB, and the wherein core diameter of single-mode fiber is 10 μm, and external diameter is 125 μm.Will by micromanipulation platform
In one section of insertion quartz ampoule of the single-mode fiber being welded.
Fiber end face is adjusted relative to the position of Nafion membrane, obtains after optimal interference spectrum, uses uv-curable glue
Incoming fiber optic is fixed on to the center position of quartz glass tube.
The course of work
By the intelligent acess section of the micro-nano sensor shown in Fig. 1 with after single-mode fiber jumper welding, passing through fiber coupler
Or optical fiber circulator access spectrometer and wideband light source, the broadband light sent from wideband light source is by the single-mode fiber in sensor
Two reflectings surface (6,7) that end face and Nafion membrane outer surface are constituted reflect respectively, two beam reflected lights by optical fiber circulator or
Person's fiber coupler returns to spectrometer, and the two-beam of return is interfered, and obtains two-beam interference spectrum.As shown in Figure 2.
A kind of measuring principle of temperature and humidity optical fiber Fabry Perot composite micro-nano sensor of the present invention is：
When the temperature and humidity of environment changes, a kind of temperature and humidity optical fiber Fabry Perot of the invention is combined
The refractive index of the temperature and moisture sensors section of micro-nano sensor changes, so that the reflectance spectrum obtained occurs accordingly
Frequency displacement.
Specific embodiments described above, the specific preparation method to the present invention has carried out further detailed description,
Implementation process of the present invention is simple and convenient easily operated.
Claims (4)
1. a kind of temperature and humidity optical fiber Fabry Perot composite micro-nano sensor, by the intelligent acess section, outside being sequentially connected
Fixing device, internal optical fiber fixing device, interferometric cavity, temperature and moisture sensors section composition；It is characterized in that：Intelligent acess
Broadband optical signal is continuously introduced into sensor with single-mode fiber and feeds back the signal after modulation by section (1)；External fixation device (2) is used
In the various pieces for protecting and encapsulating sensor and provide outside support for the making of sensor；Internal optical fiber fixing device
(3) optical fiber of access is fixed on the center of quartz glass tube and prevents it to be subjected to displacement and misplace；Interferometric cavity (4) formation
The front half section of Fabry Perot interference cavity, is the major part to form interference spectrum；Temperature and moisture sensors (5) constitute interference
The second half section of chamber, in different temperature and humidity environment modulated optical signals.
2. the compound micro-nano sensor of a kind of temperature and humidity optical fiber Fabry Perot according to claim 1, its feature
It is：The intelligent acess section is single-mode fiber, and the external fixation device is quartz glass tube, and the internal optical fiber fixes dress
Uv-curable glue is set to, the interferometric cavity is fiber end face and the air chamber of the inner surface formation of Nafion films, the temperature
Degree and humidity sensor are Nafion films；Quartz glass tube, single-mode fiber, air chamber and Nafion membrane are coaxial.
3. the compound micro-nano sensor of a kind of temperature and humidity optical fiber Fabry Perot according to claim 2, its feature
It is：The external fixation device quartz glass tube external diameter is 400 μm, and internal diameter is 200 μm；The interferometric cavity air chamber chamber is long
For 25 μm~65 μm；The thickness of the temperature and moisture sensors Nafion membrane is 20 μm~50 μm.
4. according to a kind of any described temperature and humidity optical fiber Fabry Perot composite micro-nano sensors of claim 1-3, its
It is characterised by：The access section optical fiber is mutually welded using common single-mode fiber with single-mode fiber, the single-mode optical fiber length of welding
For 4cm~10cm, single-mode fiber core diameter is 10 μm, and external diameter is 125 μm, and the Nafion that temperature and moisture sensors are used is thin
Film is that Nafion solution is formed with the drying of alcohol mixed solution.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710128175.4A CN106949915B (en) | 2017-03-06 | 2017-03-06 | Optical fiber Fabry-Perot composite micro-nano sensor for temperature and humidity |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710128175.4A CN106949915B (en) | 2017-03-06 | 2017-03-06 | Optical fiber Fabry-Perot composite micro-nano sensor for temperature and humidity |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106949915A true CN106949915A (en) | 2017-07-14 |
| CN106949915B CN106949915B (en) | 2020-04-07 |
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Family Applications (1)
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|---|---|---|---|
| CN201710128175.4A Active CN106949915B (en) | 2017-03-06 | 2017-03-06 | Optical fiber Fabry-Perot composite micro-nano sensor for temperature and humidity |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109142277A (en) * | 2018-07-16 | 2019-01-04 | 哈尔滨工程大学 | A kind of light fibre humidity transducer and production method of combination spider egg-case silk |
| CN109431481A (en) * | 2018-12-25 | 2019-03-08 | 苏州博思光学有限公司 | Mini optical fibre pressure sensor and its manufacturing method, pressure capsule system |
| CN109682756A (en) * | 2019-01-28 | 2019-04-26 | 苏州德睿电力科技有限公司 | A kind of fiber F-P cavity humidity sensor |
| CN110231104A (en) * | 2019-06-03 | 2019-09-13 | 南昌大学 | It is a kind of based on the F-P High-termperature Optical Fiber Sensor and preparation method thereof being electroplated in situ |
| CN111121839A (en) * | 2020-01-11 | 2020-05-08 | 中北大学 | Multifunctional sensor based on micro-nano optical fiber Fabry-Perot dual-cavity structure |
| CN111141417A (en) * | 2020-02-20 | 2020-05-12 | 西安石油大学 | High-sensitivity optical fiber temperature sensor, manufacturing method thereof and temperature measuring device |
| CN112114280A (en) * | 2020-09-24 | 2020-12-22 | 中山大学 | Optical fiber magnetic field micro-nano sensor with temperature compensation function and manufacturing method |
| CN114152279A (en) * | 2021-11-08 | 2022-03-08 | 四川泛华航空仪表电器有限公司 | Detection method based on optical fiber low-light level liquid sensor detection system |
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| CN103557929A (en) * | 2013-11-14 | 2014-02-05 | 北京航空航天大学 | Optical fiber Fabry-Perot sound pressure sensor manufacturing method based on graphene membrane and measuring method and device thereof |
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Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109142277A (en) * | 2018-07-16 | 2019-01-04 | 哈尔滨工程大学 | A kind of light fibre humidity transducer and production method of combination spider egg-case silk |
| CN109431481A (en) * | 2018-12-25 | 2019-03-08 | 苏州博思光学有限公司 | Mini optical fibre pressure sensor and its manufacturing method, pressure capsule system |
| CN109431481B (en) * | 2018-12-25 | 2024-03-19 | 苏州博思光学有限公司 | Micro optical fiber pressure sensor, manufacturing method thereof and pressure sensing system |
| CN109682756A (en) * | 2019-01-28 | 2019-04-26 | 苏州德睿电力科技有限公司 | A kind of fiber F-P cavity humidity sensor |
| CN109682756B (en) * | 2019-01-28 | 2024-05-10 | 苏州德睿电力科技有限公司 | Optical fiber F-P cavity humidity sensor |
| CN110231104A (en) * | 2019-06-03 | 2019-09-13 | 南昌大学 | It is a kind of based on the F-P High-termperature Optical Fiber Sensor and preparation method thereof being electroplated in situ |
| CN111121839A (en) * | 2020-01-11 | 2020-05-08 | 中北大学 | Multifunctional sensor based on micro-nano optical fiber Fabry-Perot dual-cavity structure |
| CN111141417A (en) * | 2020-02-20 | 2020-05-12 | 西安石油大学 | High-sensitivity optical fiber temperature sensor, manufacturing method thereof and temperature measuring device |
| CN112114280A (en) * | 2020-09-24 | 2020-12-22 | 中山大学 | Optical fiber magnetic field micro-nano sensor with temperature compensation function and manufacturing method |
| CN112114280B (en) * | 2020-09-24 | 2022-01-04 | 中山大学 | Optical fiber magnetic field micro-nano sensor with temperature compensation function and manufacturing method |
| CN114152279A (en) * | 2021-11-08 | 2022-03-08 | 四川泛华航空仪表电器有限公司 | Detection method based on optical fiber low-light level liquid sensor detection system |
| CN114152279B (en) * | 2021-11-08 | 2024-05-10 | 四川泛华航空仪表电器有限公司 | Detection method based on optical fiber low-light liquid sensor detection system |
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| CN106949915B (en) | 2020-04-07 |
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