CN112114280B - Optical fiber magnetic field micro-nano sensor with temperature compensation function and manufacturing method - Google Patents
Optical fiber magnetic field micro-nano sensor with temperature compensation function and manufacturing method Download PDFInfo
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- CN112114280B CN112114280B CN202011017662.1A CN202011017662A CN112114280B CN 112114280 B CN112114280 B CN 112114280B CN 202011017662 A CN202011017662 A CN 202011017662A CN 112114280 B CN112114280 B CN 112114280B
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- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/032—Measuring direction or magnitude of magnetic fields or magnetic flux using magneto-optic devices, e.g. Faraday or Cotton-Mouton effect
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- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
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Abstract
The application discloses an optical fiber magnetic field micro-nano sensor with a temperature compensation function and a manufacturing method thereof, wherein the optical fiber magnetic field micro-nano sensor comprises an optical fiber access section, an interference module and an optical fiber lead-out section which are sequentially connected; the interference module is sequentially provided with an air cavity, a waveguide layer, a sensing phase and an air isolation layer from inside to outside, the sensing phase comprises a temperature sensing phase and a magnetic field sensing phase which are arranged on the same layer, the temperature sensing phase is used for sensing temperature change so as to generate corresponding optical refractive index change, and the magnetic field sensing phase is used for sensing magnetic field change so as to generate corresponding optical refractive index change; the optical fiber access section is connected with a broadband light source; the optical fiber leading-out section is connected with a spectrometer. By the technical scheme, the temperature and the magnetic field are measured simultaneously, the anti-electromagnetic interference, the sensitivity, the electrical insulation property and the corrosion resistance of the sensor are improved, the miniaturization of the sensor is facilitated, and the multiplexing and networking are facilitated.
Description
Technical Field
The application relates to the technical field of micro-nano sensors, in particular to an optical fiber magnetic field micro-nano sensor with a temperature compensation function and a manufacturing method thereof.
Background
The monitoring of temperature and magnetic field is closely related to our life, and at present, the magnetic field sensor with temperature compensation function is widely applied to various fields of national economy, and the field of application of the magnetic field sensor with temperature compensation function is wider. In addition, the micro-nano sensor has many advantages such as: miniaturization, easy integration and the like are increasingly favored by the industry.
However, as the demand of people for miniaturization is higher and higher, the current micro-nano sensor has larger volume and is inconvenient to operate due to material limitation; meanwhile, the micro-nano sensor has great defects in the aspects of anti-electromagnetic interference, sensitivity, electrical insulation, corrosion resistance, multiplexing and networking.
Disclosure of Invention
The application provides an optical fiber magnetic field micro-nano sensor with a temperature compensation function and a manufacturing method thereof, which are used for solving the technical problems of large volume, poor electromagnetic interference resistance, poor sensitivity, poor electrical insulation, poor corrosion resistance, poor multiplexing performance and poor networking performance of the existing micro-nano sensor.
In view of this, a first aspect of the present application provides an optical fiber magnetic field micro-nano sensor with a temperature compensation function, which includes an optical fiber access section, an interference module, and an optical fiber lead-out section that are connected in sequence;
the interference module is sequentially provided with an air cavity, a waveguide layer, a sensing phase and an air isolation layer from inside to outside, the sensing phase comprises a temperature sensing phase and a magnetic field sensing phase which are arranged on the same layer, the temperature sensing phase is used for sensing temperature change so as to generate corresponding light refractive index change, and the magnetic field sensing phase is used for sensing magnetic field change so as to generate corresponding light refractive index change;
the optical fiber access section is connected with a broadband light source;
the optical fiber leading-out section is connected with a spectrometer.
Preferably, still include first single mode fiber and second single mode fiber, the optic fibre access section with first single mode fiber butt fusion, the second single mode fiber with the second single mode fiber butt fusion.
Preferably, the core diameters of the first single mode fiber and the second single mode fiber are both 10 μm, and the outer diameters thereof are both 125 μm.
Preferably, the waveguide layer is a quartz capillary tube, and an inner core of the quartz capillary tube is the air cavity.
Preferably, the length of the quartz capillary tube is 3-5 cm, the inner diameter of the quartz capillary tube is 30-100 mu m, and the wall thickness is 30-50 mu m.
Preferably, the temperature sensing phase is a Nafion film and the magnetic field sensing phase is a magnetic gel film.
Preferably, the thickness of the Nafion film is 10-30 μm, and the thickness of the magnetic gel film is 10-30 μm.
Preferably, the air isolation layer is a gold film, and the thickness of the gold film is 10-100 nm.
On the other hand, the application also provides a manufacturing method of the optical fiber magnetic field micro-nano sensor with the temperature compensation function, which comprises the following steps:
s101: sequentially arranging a temperature sensing phase and a magnetic field sensing phase on the upper surface of a waveguide layer with an air cavity along the length direction;
s102: arranging an air isolation layer on the temperature sensing phase and the magnetic field sensing phase;
s103: and an optical fiber access section preset at one end of the waveguide layer is connected with a broadband light source, and an optical fiber lead-out section preset at the other end of the waveguide layer is connected with a spectrometer.
Preferably, the steps S101 to S103 specifically include:
s201, performing ultrasonic treatment on a quartz capillary tube and then drying the quartz capillary tube in a dust-free environment;
s202: respectively plating a Nafion film and a magnetic gel film on the outer surface of the quartz capillary along the length direction on a micro-operation platform, wherein the plating lengths of the Nafion film and the magnetic gel film are equal;
s203: plating a gold film on the upper surfaces of the Nafion film and the magnetic gel film;
s204: and respectively welding a first single-mode fiber and a second single-mode fiber at the preset fiber access section and the preset fiber lead-out section by a welding method, then connecting a broadband light source to the first single-mode fiber, and connecting a spectrometer to the second single-mode fiber.
According to the technical scheme, the embodiment of the application has the following advantages:
according to the optical fiber magnetic field micro-nano sensor with the temperature compensation function and the manufacturing method thereof, after an optical signal is emitted by a broadband light source, a part of the optical signal can directly flow to an optical fiber leading-out section through an air cavity, the other part of the optical signal is coupled to a temperature sensing phase and a magnetic field sensing phase through a waveguide layer, the optical signal is reflected back to the air cavity through an air isolation layer, the temperature sensing phase and the magnetic field sensing phase are respectively subjected to the change of the external temperature and the change of the magnetic field to generate refractive index change, so that the optical path of the optical signal coupled with the temperature sensing phase is changed, the optical signal is interfered with the optical signal directly flowing through the air cavity and is received by a spectrometer, and two different interference peaks and different spectral frequency shifts are generated due to the difference of the refractive index and the optical property of the temperature sensing phase and the magnetic field sensing phase, wherein, the external magnetic field change does not react to the interference peak generated by the temperature change, and the temperature change can be calculated according to the spectral frequency shift of the optical signal after the interference; the temperature change can change the refractive index of the magnetic field sensing phase, so that the interference peak generated by the magnetic field change is influenced, but after the measurement result of the temperature change is obtained through calculation, the interference peak generated by the magnetic field change can be subjected to temperature compensation, so that the sensitivity of the magnetic field measurement can be improved, the influence of the temperature on the magnetic field measurement can be reduced, and the magnetic field change can be measured. Meanwhile, an antiresonant reflection optical waveguide structure is formed by combining the air cavity, the waveguide layer and the sensing phase, the coupling strength between an optical signal and the sensing phase is improved, and further the sensitivity of the sensor is improved. In addition, the embodiment has simple structure, is convenient for the miniaturization of the sensor and is also beneficial to multiplexing and networking.
Drawings
Fig. 1 is a schematic structural diagram of an optical fiber magnetic field micro-nano sensor with a temperature compensation function according to an embodiment of the present application;
fig. 2 is a first flowchart of a method for manufacturing an optical fiber magnetic field micro-nano sensor with a temperature compensation function according to an embodiment of the present application;
fig. 3 is a second flowchart of a manufacturing method of an optical fiber magnetic field micro-nano sensor with a temperature compensation function according to an embodiment of the present application.
Detailed Description
In order to make the technical solutions of the present application better understood, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
For convenience of understanding, please refer to fig. 1, the optical fiber magnetic field micro-nano sensor with the temperature compensation function provided by the present application includes an optical fiber access section 1, an interference module 2 and an optical fiber lead-out section 3, which are connected in sequence;
the interference module 2 is sequentially provided with an air cavity 2a, a waveguide layer 2c, a sensing phase and an air isolation layer 2e from inside to outside, the sensing phase comprises a temperature sensing phase 2b and a magnetic field sensing phase 2d which are arranged on the same layer, the temperature sensing phase 2b is used for sensing temperature change to generate corresponding light refractive index change, and the magnetic field sensing phase 2d is used for sensing magnetic field change to generate corresponding light refractive index change;
note that the sensing phase covers the waveguide layer 2c, and the air barrier layer 2e covers the sensing phase.
The optical fiber access section 1 is connected with a broadband light source;
the optical fiber leading-out section 3 is connected with a spectrometer.
It should be noted that, in the working process of this embodiment, after the broadband light source emits the optical signal, the optical signal enters the interference module 2 through the optical fiber access section 1, after entering the interference module 2, a part of the optical signal will directly circulate to the optical fiber lead-out section 3 through the air cavity 2a, and another part of the optical signal is coupled to the temperature sensing phase 2b and the magnetic field sensing phase 2d through the waveguide layer 2c, and then the optical signal is reflected back to the air cavity 2a through the air isolation layer 2e, since the temperature sensing phase 2b and the magnetic field sensing phase 2d are respectively subjected to the change of the external temperature and the change of the magnetic field to generate the refractive index change, the optical path of the optical signal coupled thereto is changed, and then interferes with the optical signal directly circulating through the air cavity 2a to generate the interference optical signal, the interference optical signal flows through the optical fiber lead-out section 3 after being generated, and then the optical signal after being received by the spectrometer after interference, two different interference peaks and different spectral shifts are generated due to the differences in refractive index and optical properties of the temperature sensing phase 2b and the magnetic field sensing phase 2 d.
In a general example, in order to distinguish two interference peaks corresponding to a magnetic field and a temperature, respectively, temperature control can be manually applied to the sensor, for example, the sensor is held by hand, and the corresponding interference peak with a spectral frequency shift corresponds to a temperature change and the other spectral frequency shift corresponds to a magnetic field change.
In addition, the external magnetic field change does not react to the interference peak generated by the temperature change, and the temperature change can be calculated according to the spectral frequency shift of the optical signal after the interference; the temperature change will change the refractive index of the magnetic field sensing phase 2d, thereby affecting the interference peak generated by the magnetic field change, but after the measurement result of the temperature change is obtained by calculation, the interference peak generated by the magnetic field change can be subjected to temperature compensation, so that the sensitivity of the magnetic field measurement can be improved, the influence of the temperature on the magnetic field measurement can be reduced, and the magnetic field change can be measured.
It can be understood that the antiresonant reflecting optical waveguide structure is formed by the combination of the air cavity 2a, the waveguide layer 2c and the sensing phase, and the working principle is that the refractive index of the air cavity 2a is less than the refractive index of the waveguide layer 2c is less than the refractive index of the sensing phase, so that light is transmitted in the waveguide layer 2c between the waveguide layer 2c and the air isolation layer 2e and due to the multilayer high-reflectivity film formed by reflection and refraction, thereby reducing the leakage of light energy, and having the characteristics of single mode of the transmission mode and small loss of light energy.
Because of adopting the antiresonance reflection optical waveguide structure, the light energy leakage is reduced, and on the other hand, the measurement distribution of an evanescent field in a sample material to be measured is relatively increased, so that the sensitivity of the waveguide to the external environment is obviously improved, the coupling strength between an optical signal and a sensing phase is also improved, and further the sensitivity of the sensor is improved. In addition, the embodiment has simple structure, is convenient for the miniaturization of the sensor and is also beneficial to multiplexing and networking.
The above is an embodiment of the optical fiber magnetic field micro-nano sensor with the temperature compensation function provided by the application, and the following is another embodiment of the optical fiber magnetic field micro-nano sensor with the temperature compensation function provided by the application.
For convenience of understanding, please refer to fig. 1, the optical fiber magnetic field micro-nano sensor with a temperature compensation function provided by the present application includes an optical fiber access section 1, an interference module 2 and an optical fiber lead-out section 3, which are connected in sequence;
the interference module 2 is sequentially provided with an air cavity 2a, a waveguide layer 2c, a sensing phase and an air isolation layer 2e from inside to outside, the sensing phase comprises a temperature sensing phase 2b and a magnetic field sensing phase 2d which are arranged on the same layer, the temperature sensing phase 2b is used for sensing temperature change to generate corresponding light refractive index change, and the magnetic field sensing phase 2d is used for sensing magnetic field change to generate corresponding light refractive index change;
note that the sensing phase covers the waveguide layer 2c, and the air barrier layer 2e covers the sensing phase.
The optical fiber access section 1 is connected with a broadband light source;
the optical fiber leading-out section 3 is connected with a spectrometer.
Further, the sensor further comprises a first single-mode fiber and a second single-mode fiber, the fiber access section 1 is welded with the first single-mode fiber, and the second single-mode fiber is welded with the second single-mode fiber.
In this embodiment, the diameters of the fiber cores of the first single mode fiber and the second single mode fiber are both 10 μm, and the outer diameters thereof are both 125 μm, which facilitates the miniaturization design of the sensor.
Further, the waveguide layer 2c is a quartz capillary tube, and the inner core of the quartz capillary tube is an air cavity 2 a.
In this embodiment, the length of the quartz capillary is 3-5 cm, the inner diameter of the quartz capillary is 30-100 μm, and the wall thickness is 30-50 μm.
Further, the temperature sensing phase 2b is a Nafion film, and the magnetic field sensing phase 2d is a magnetic gel film.
In this embodiment, the thickness of the Nafion film is 10 to 30 μm, and the thickness of the magnetic gel film is 10 to 30 μm.
Further, the air barrier layer 2e is a gold film.
In this embodiment, the thickness of the gold film is 10 to 100 nm.
It should be noted that, in the working process of this embodiment, after the broadband light source emits the optical signal, the optical signal enters the interference module 2 through the optical fiber access section 1, after entering the interference module 2, a part of the optical signal will directly flow into the optical fiber lead-out section 3 through the air cavity 2a, and another part of the optical signal is coupled to the Nafion film and the magnetic gel film through the waveguide layer 2c, and then the optical signal is reflected back to the air cavity 2a through the gold film, because the Nafion film and the magnetic gel film are respectively subjected to the change of the external temperature and the magnetic field to generate the refractive index change, so as to change the optical path of the optical signal coupled therewith, and further interfere with the optical signal flowing directly through the air cavity 2a, and the optical signal after interference is received by the spectrometer, because the difference of the refractive index and the optical property of the Nafion film and the magnetic gel film generates two different interference peaks and different spectral frequency shifts, wherein, the external magnetic field change does not react to the interference peak generated by the temperature change, and the temperature change can be calculated according to the spectral frequency shift of the optical signal after the interference; the temperature change can change the refractive index of the magnetic gel film, so that the interference peak generated by the magnetic field change is influenced, but after the measurement result of the temperature change is obtained through calculation, the interference peak generated by the magnetic field change can be subjected to temperature compensation, so that the influence of the temperature on the magnetic field measurement is reduced, and the magnetic field change is further measured.
The above is another embodiment of the optical fiber magnetic field micro-nano sensor with the temperature compensation function provided by the present application, and the following is an embodiment of a manufacturing method of the optical fiber magnetic field micro-nano sensor with the temperature compensation function provided by the present application.
For convenience of understanding, referring to fig. 2, the present application provides a method for manufacturing an optical fiber magnetic field micro-nano sensor with a temperature compensation function according to the above embodiment, including the following steps:
s101: sequentially arranging a temperature sensing phase and a magnetic field sensing phase on the upper surface of a waveguide layer with an air cavity along the length direction;
s102: arranging an air isolation layer on the temperature sensing phase and the magnetic field sensing phase;
s103: and an optical fiber access section preset at one end of the waveguide layer is connected with the broadband light source, and an optical fiber lead-out section preset at the other end of the waveguide layer is connected with the spectrometer.
In an embodiment, referring to fig. 3, steps S101 to S103 specifically include:
s201, performing ultrasonic treatment on a quartz capillary tube and then drying the quartz capillary tube in a dust-free environment;
it will be appreciated that a quartz capillary tube is a waveguide layer with an air cavity.
S202: respectively plating a Nafion film and a magnetic gel film on the outer surface of the quartz capillary along the length direction on a micro-operation platform, wherein the plating lengths of the Nafion film and the magnetic gel film are equal;
s203: plating a gold film on the upper surfaces of the Nafion film and the magnetic gel film;
s204: the method comprises the steps of respectively welding a first single-mode fiber and a second single-mode fiber at a preset fiber access section and a preset fiber lead-out section through a welding method, then, connecting a broadband light source to the first single-mode fiber, and connecting a spectrometer to the second single-mode fiber.
Further, before step S201, the method includes:
mixing the Nafion solution and ethanol according to the volume ratio of 1:15, and then carrying out ultrasonic treatment to uniformly mix the Nafion solution and the ethanol to obtain the Nafion film solution.
In the several embodiments provided in the present application, it should be understood that the disclosed apparatus and method may be implemented in other ways. For example, the above-described apparatus embodiments are merely illustrative, and for example, the division of the units is only one logical division, and other divisions may be realized in practice, for example, a plurality of units or components may be combined or integrated into another system, or some features may be omitted, or not executed. In addition, the shown or discussed mutual coupling or direct coupling or communication connection may be an indirect coupling or communication connection through some interfaces, devices or units, and may be in an electrical, mechanical or other form.
The units described as separate parts may or may not be physically separate, and parts displayed as units may or may not be physical units, may be located in one place, or may be distributed on a plurality of network units. Some or all of the units can be selected according to actual needs to achieve the purpose of the solution of the embodiment.
In addition, functional units in the embodiments of the present application may be integrated into one processing unit, or each unit may exist alone physically, or two or more units are integrated into one unit. The integrated unit can be realized in a form of hardware, and can also be realized in a form of a software functional unit.
The integrated unit, if implemented in the form of a software functional unit and sold or used as a stand-alone product, may be stored in a computer readable storage medium. Based on such understanding, the technical solution of the present application may be substantially implemented or contributed to by the prior art, or all or part of the technical solution may be embodied in a software product, which is stored in a storage medium and includes instructions for executing all or part of the steps of the method described in the embodiments of the present application through a computer device (which may be a personal computer, a server, or a network device). And the aforementioned storage medium includes: a U disk, a removable hard disk, a Read-Only Memory (ROM), a Random Access Memory (RAM), a magnetic disk or an optical disk, and other various media capable of storing program codes.
The above embodiments are only used for illustrating the technical solutions of the present application, and not for limiting the same; although the present application has been described in detail with reference to the foregoing embodiments, it should be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions in the embodiments of the present application.
Claims (10)
1. An optical fiber magnetic field micro-nano sensor with a temperature compensation function is characterized by comprising an optical fiber access section, an interference module and an optical fiber lead-out section which are sequentially connected;
the interference module is sequentially provided with an air cavity, a waveguide layer, a sensing phase and an air isolation layer from inside to outside, and the combination of the air cavity, the waveguide layer and the sensing phase forms an antiresonant reflection optical waveguide structure; the sensing phases comprise a temperature sensing phase and a magnetic field sensing phase which are arranged in the same layer, the temperature sensing phase is used for sensing temperature change so as to generate corresponding light refractive index change, and the magnetic field sensing phase is used for sensing magnetic field change so as to generate corresponding light refractive index change; carrying out temperature compensation on an interference peak generated by the magnetic field change of the magnetic field sensing phase according to the measurement result of the temperature change of the temperature sensing phase;
the optical fiber access section is connected with a broadband light source;
the optical fiber leading-out section is connected with a spectrometer.
2. The fiber magnetic field micro-nano sensor with the temperature compensation function according to claim 1, further comprising a first single mode fiber and a second single mode fiber, wherein the fiber access section is welded with the first single mode fiber, and the second single mode fiber is welded with the second single mode fiber.
3. The fiber magnetic field micro-nano sensor with the temperature compensation function according to claim 2, wherein the fiber cores of the first single mode fiber and the second single mode fiber have a diameter of 10 μm, and the outer diameters of the fiber cores of the first single mode fiber and the second single mode fiber are 125 μm.
4. The optical fiber magnetic field micro-nano sensor with the temperature compensation function according to claim 1, wherein the waveguide layer is a quartz capillary tube, and an inner core of the quartz capillary tube is the air cavity.
5. The fiber magnetic field micro-nano sensor with the temperature compensation function according to claim 4, wherein the length of the quartz capillary tube is 3-5 cm, the inner diameter of the quartz capillary tube is 30-100 μm, and the wall thickness is 30-50 μm.
6. The optical fiber magnetic field micro-nano sensor with the temperature compensation function according to claim 1, wherein the temperature sensing phase is a Nafion film, and the magnetic field sensing phase is a magnetic gel film.
7. The optical fiber magnetic field micro-nano sensor with the temperature compensation function according to claim 6, wherein the thickness of the Nafion film is 10-30 μm, and the thickness of the magnetic gel film is 10-30 μm.
8. The optical fiber magnetic field micro-nano sensor with the temperature compensation function according to claim 1, wherein the air isolation layer is a gold film, and the thickness of the gold film is 10-100 nm.
9. The manufacturing method of the optical fiber magnetic field micro-nano sensor with the temperature compensation function according to claim 1, characterized by comprising the following steps:
s101: sequentially arranging a temperature sensing phase and a magnetic field sensing phase on the upper surface of a waveguide layer with an air cavity along the length direction;
s102: arranging an air isolation layer on the temperature sensing phase and the magnetic field sensing phase;
s103: and an optical fiber access section preset at one end of the waveguide layer is connected with a broadband light source, and an optical fiber lead-out section preset at the other end of the waveguide layer is connected with a spectrometer.
10. The method for manufacturing the optical fiber magnetic field micro-nano sensor with the temperature compensation function according to claim 9, wherein the steps S101 to S103 specifically include:
s201, performing ultrasonic treatment on a quartz capillary tube and then drying the quartz capillary tube in a dust-free environment;
s202: respectively plating a Nafion film and a magnetic gel film on the outer surface of the quartz capillary along the length direction on a micro-operation platform, wherein the plating lengths of the Nafion film and the magnetic gel film are equal;
s203: plating a gold film on the upper surfaces of the Nafion film and the magnetic gel film;
s204: and respectively welding a first single-mode fiber and a second single-mode fiber at the preset fiber access section and the preset fiber lead-out section by a welding method, then connecting a broadband light source to the first single-mode fiber, and connecting a spectrometer to the second single-mode fiber.
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