WO2019041991A1 - A sensing substrate and sensing panel, display panel and display device - Google Patents

A sensing substrate and sensing panel, display panel and display device Download PDF

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Publication number
WO2019041991A1
WO2019041991A1 PCT/CN2018/092817 CN2018092817W WO2019041991A1 WO 2019041991 A1 WO2019041991 A1 WO 2019041991A1 CN 2018092817 W CN2018092817 W CN 2018092817W WO 2019041991 A1 WO2019041991 A1 WO 2019041991A1
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WO
WIPO (PCT)
Prior art keywords
substrate
layer
light shielding
sensing
fingerprint recognition
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Application number
PCT/CN2018/092817
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French (fr)
Chinese (zh)
Inventor
刘英明
董学
王海生
吴俊纬
丁小梁
许睿
刘伟
Original Assignee
京东方科技集团股份有限公司
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Publication of WO2019041991A1 publication Critical patent/WO2019041991A1/en

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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362Active matrix addressed cells
    • G02F1/136209Light shielding layers, e.g. black matrix, incorporated in the active matrix substrate, e.g. structurally associated with the switching element
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/13338Input devices, e.g. touch panels
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06VIMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V40/00Recognition of biometric, human-related or animal-related patterns in image or video data
    • G06V40/10Human or animal bodies, e.g. vehicle occupants or pedestrians; Body parts, e.g. hands
    • G06V40/12Fingerprints or palmprints
    • G06V40/13Sensors therefor
    • G06V40/1318Sensors therefor using electro-optical elements or layers, e.g. electroluminescent sensing

Definitions

  • the present disclosure relates to the field of touch technologies, and in particular, to a sensing substrate and a sensing board, a display panel, and a display device.
  • TFT-LCD Thin Film Transistor Liquid Crystal Display
  • the sensing substrate and manufacturing process determine its product performance, yield and price.
  • Embodiments of the present disclosure provide a sensing substrate and a sensing panel, a display panel, and a display device.
  • Embodiments of the present disclosure provide a sensing substrate.
  • the sensing substrate includes: a substrate substrate; a thin film transistor and a photosensor layer on the substrate, the photosensor layer includes a light shielding portion, and an orthographic projection of the light shielding portion on the substrate substrate.
  • the orthographic projection of the active layer of the thin film transistor on the base substrate at least partially overlaps, and the light shielding portion is located on a side of the thin film transistor from which the active layer faces away from the gate of the thin film transistor.
  • the photosensor layer further includes a fingerprint recognition portion, an orthographic projection of the fingerprint recognition portion on the substrate substrate does not overlap with an orthographic projection of the active layer on the substrate substrate.
  • the fingerprint recognition portion is electrically connected to the first pole or the second pole of the thin film transistor.
  • the gate is located between the base substrate and the active layer, the fingerprint recognition portion is disposed in the same layer as the light shielding portion, and the fingerprint recognition portion and the light shielding portion are Intersected from each other.
  • the light shielding portion functions as a touch sensing portion.
  • the sensing substrate further includes a touch detection signal line disposed in the same layer as the gate, and the touch detection signal line is electrically connected to the corresponding light shielding portion.
  • the touch detection signal lines are in one-to-one correspondence with the light shielding portions, or each of the touch detection signal lines corresponds to the plurality of the light shielding portions.
  • the sensing substrate further includes at least one reference signal line disposed in the same layer as the gate.
  • the at least one reference signal line is electrically coupled to at least one of the light shielding portion and the fingerprint recognition portion to provide a corresponding bias voltage.
  • the bias voltage is provided to the light shielding portion and the fingerprint recognition portion through the same reference signal line.
  • the sensing substrate further includes: a gate insulating layer between the active layer and the gate; a first between the active layer and the photosensor layer An insulating layer; and a second insulating layer on a side of the photosensor layer facing away from the gate.
  • the sensing substrate further includes: a first conductive portion and a second conductive portion disposed in the same layer as the first or second pole of the thin film transistor;
  • the second insulating layer faces away from the third conductive portion and the fourth conductive portion disposed on the same side of the substrate substrate.
  • the at least one reference signal line is electrically connected to at least one of the light shielding portion and the fingerprint recognition portion through the first conductive portion and the third conductive portion.
  • the touch detection signal line is electrically connected to the light shielding portion through the second conduction portion and the fourth conduction portion.
  • the sensing substrate further includes a protective layer on a side of the photosensor layer facing away from the substrate substrate.
  • the gate is located on a side of the active layer away from the substrate substrate.
  • the sensing substrate further includes a protective layer on a side of the fingerprint identifying portion facing away from the substrate substrate.
  • the material of the photosensor layer comprises a PIN-type semiconductor material.
  • Embodiments of the present disclosure also provide a sensing board including the sensing substrate as described in the above embodiments.
  • Embodiments of the present disclosure also provide a display panel.
  • the display panel includes the sensing substrate as described in the above embodiments.
  • Embodiments of the present disclosure also provide a display device.
  • the display device includes a display panel as described above.
  • FIG. 1 is a schematic cross-sectional view of a sensing substrate in accordance with an embodiment of the present disclosure
  • FIG. 2 is a schematic cross-sectional view of a sensing substrate in accordance with an embodiment of the present disclosure
  • FIG. 3 is a schematic cross-sectional structural view of a sensing substrate in accordance with an embodiment of the present disclosure
  • FIG. 4 is a schematic cross-sectional structural view of a sensing substrate in accordance with an embodiment of the present disclosure
  • 5a and 5b are schematic diagrams of a planar structure of a sensing substrate according to an embodiment of the present disclosure
  • FIG. 6 is a flow chart of a method of sensing a substrate for fingerprinting using an embodiment in accordance with the present disclosure.
  • a light-shielding layer for preventing light from being irradiated to the channel region.
  • the pattern of the light shielding layer generally coincides with the pattern of the channel region.
  • a light shielding layer is usually formed using a metal material.
  • the metal light-shielding layer has a good light-shielding effect, the metal light-shielding layer has a relatively high light-reflecting property and reflects a large amount of external light. When the reflected external light is emitted from the light emitting side of the display device, the display effect of the display device is affected.
  • Embodiments of the present disclosure provide a sensing substrate and a sensing plate, a display panel, and a display device to at least partially overcome the problems in the related art.
  • FIG. 1 is a schematic cross-sectional view of a sensing substrate in accordance with an embodiment of the present disclosure.
  • an embodiment of the present disclosure provides a sensing substrate.
  • the sensing substrate includes: a substrate substrate 10; a thin film transistor 11 and a photosensor layer 12 on the substrate substrate 10.
  • a plurality of thin film transistors are arranged, for example, in an array.
  • the photosensor layer 12 includes a light blocking portion 121.
  • the orthographic projection of the light shielding portion 121 on the base substrate 10 at least partially overlaps with the orthographic projection of the active layer 111 of the thin film transistor 11 on the base substrate 10, and the light shielding portion 121 is located away from the active layer 111 of the thin film transistor 11
  • the light shielding portion in the photosensitive device layer is used to block the pattern of the active layer. Since the photosensitive device layer is exposed to light to generate a photocurrent, that is, the photosensitive device layer can convert the light energy into electrical energy, the photosensitive device layer has a certain light absorbing effect, and most of the light is absorbed by the photosensitive device layer, thereby reducing the light shielding portion. The reflection makes it not affect the display effect of the display device when applied to the display panel.
  • the orthographic projection of the light shielding portion 121 on the base substrate 10 completely overlaps with the orthographic projection of the active layer 111 on the base substrate 10, thereby being able to better block the light entering the active layer 111. Thereby, the active layer 111 is protected to improve the performance of the thin film transistor.
  • the photosensor layer 12 can also include a fingerprint recognition portion 122.
  • the orthographic projection of the fingerprint recognition portion 122 on the base substrate 10 does not overlap with the orthographic projection of the active layer 111 on the base substrate 10.
  • the fingerprint recognition unit 122 is electrically connected to one of the first pole and the second pole of the thin film transistor 11.
  • the gate 112 is between the substrate substrate 10 and the active layer 111. It should be noted that, according to an embodiment of the present disclosure, the gate electrode 112 may be located on a side of the active layer 111 away from the substrate substrate 10 (described later). That is, the thin film transistor 11 may be a bottom gate type thin film transistor or a top gate type thin film transistor. Here, the case where the thin film transistor 11 is a bottom gate type thin film transistor will be described in detail first.
  • the fingerprint recognition unit 122 is disposed in the same layer as the light shielding portion 121, and the fingerprint recognition portion 122 and the light shielding portion 121 are spaced apart from each other.
  • “same layer setting” refers to formation using the same film layer. That is, the fingerprint recognition unit 122 and the light shielding unit 121 are formed by one patterning process, that is, the light shielding unit 121 and the fingerprint recognition unit 122 are located in the same layer and have the same material. Thereby, the manufacturing process of the sensing substrate is simplified, and the cost is saved.
  • the fingerprint recognition unit 122 is also multiplexed as a touch electrode to implement touch detection. That is, the fingerprint recognition unit 122 can implement touch detection and fingerprint recognition by means of time-division driving.
  • the photosensitive device of photosensor layer 12 is typically comprised of a photosensitive semiconductor material. Since the photosensor layer 12 is exposed to light to generate a photocurrent, that is, the photosensor layer 12 can convert the light energy into electric energy, the photosensor layer 12 has a certain light absorbing effect. Thus, the photosensitive device layer 12 can be used as the light shielding portion by utilizing the light absorbing characteristics of the photosensor layer 12. In addition, it is also possible to determine the position of the valley and the ridge of the finger by using different light intensity of the valley and the ridge reflected by the finger to cause the photocurrent layer 12 to have different photocurrents, that is, to realize the function of fingerprint recognition by using the photosensor layer 12. .
  • the light shielding portion 121 and the fingerprint recognition portion 122 can be disposed to be in the same layer and have the same material.
  • the light shielding portion 121 and the fingerprint recognition portion 122 can be formed by one patterning process without separately forming the light shielding portion 121, thereby simplifying the manufacturing process.
  • the light shielding portion 121 and the fingerprint recognition portion 122 are insulated.
  • one of the first pole and the second pole of the thin film transistor 11 is a signal input terminal, and the other is a signal output terminal.
  • one of the first pole and the second pole of the thin film transistor 11 is a source, and the other is a drain, that is, when the first pole 113 is a source, the second pole 114 is a drain; or When one pole 113 is a drain, the second pole 114 is a source.
  • the fingerprint recognition unit 122 is electrically connected to one of the first pole and the second pole of the thin film transistor 11, and thus can read the current output from the other of the first pole and the second pole of the thin film transistor 11 To achieve fingerprint recognition detection.
  • the light shielding portion 121 can serve as a touch sensing portion.
  • the sensing substrate may further include a touch detection signal line 19 disposed in the same layer as the gate 112 of the thin film transistor 11.
  • the touch detection signal line 19 is electrically connected to the corresponding light blocking portion 121.
  • a plurality of touch detection signal lines may be correspondingly disposed.
  • the touch detection signal line 19 is disposed on the same layer as the gate 112.
  • the touch detection signal line 19 can be fabricated by using the same patterning process as the gate 112, thereby simplifying the manufacturing process, and on the other hand, reading each touch
  • the current of the detection signal line 19 is controlled to determine the touch position. If the current of the touch detection signal line 19 at a certain position changes, the position where the corresponding light shielding portion 121 is located is touched. Therefore, in the sensing substrate shown in FIG. 2, the fingerprint recognition function is implemented by the fingerprint recognition unit 122, and the touch detection function is realized by the light shielding unit 121.
  • the fingerprint recognition and the touch detection can be independent of each other without multiplexing the fingerprint recognition unit 122 into the touch electrodes, whereby the driving timing can be simplified.
  • the principle that the touch detection signal line 19 is electrically connected to the corresponding light shielding portion 121 to realize the touch display is specifically: when the position where the light shielding portion 121 is touched, the light intensity reflected by the finger changes the light shielding portion 121. The photocurrent, therefore, the touch change can be detected by the touch detection signal line 19 to determine the touch position.
  • the touch detection signal line 19 may be in one-to-one correspondence with the light shielding portion 121.
  • each of the touch detection signal lines 19 may correspond to the plurality of light shielding portions 121.
  • the finger and the touch screen have a certain contact area, and the contact area generally corresponds to a plurality of pixels. Therefore, when the detection accuracy is satisfied, a plurality of pixels within a certain range can be set to share the same touch detection signal. Line 19. Thereby, the number of the touch detection signal lines 19 can be reduced while satisfying the detection accuracy.
  • the light shielding portion 121 of each pixel in the range of 5 ⁇ 5 mm can be connected to the same touch detection signal line 19.
  • the touch detection signal line 19 may be disposed in one-to-one correspondence with the light shielding portion 121.
  • the sensing substrate may further include at least one reference signal line 13 disposed in the same layer as the gate 112 of the thin film transistor 11.
  • the at least one reference signal line 13 is electrically connected to at least one of the light shielding portion 121 and the fingerprint recognition portion 122 to provide a corresponding bias voltage.
  • a plurality of reference signal lines 13 may be disposed correspondingly according to the arrangement of the thin film transistors on the sensing substrate. Since the photosensitive device of the photosensor layer 12 is generally composed of a photosensitive semiconductor material, and the PN junction or PIN junction formed by the photosensitive semiconductor material has unidirectional conductivity as a photosensitive device, touch detection and/or use is performed using the light shielding portion 121. When the fingerprint recognition unit 122 performs fingerprint detection, the corresponding bias voltage can be supplied to the light shielding portion 121 and/or the fingerprint recognition portion 122 through at least one reference signal line 13.
  • the fingerprint recognition portion 122 in the process of detecting the fingerprint, it is necessary to apply a reverse voltage to the fingerprint recognition unit 122 so that the PN junction or the PIN junction in the fingerprint recognition unit 122 is in a reverse bias state. In the absence of illumination, the fingerprint recognition portion 122 has a small reverse current. When the fingerprint recognition portion 122 is irradiated with light, the PN junction or the PIN junction in the fingerprint recognition portion 122 generates electron-hole pairs, increasing the density of minority carriers. These carriers drift under the reverse voltage, causing the reverse current to increase greatly, forming a photocurrent, and the magnitude of the photocurrent is determined by the intensity of the light.
  • the fingerprint recognition unit 122 When P of the fingerprint recognition unit 122 is extremely low and N is extremely high, the fingerprint recognition unit 122 is in a reverse bias state. Since the fingerprint recognition portion 122 is electrically connected to one of the first pole and the second pole of the thin film transistor 11 and is electrically connected to the corresponding reference signal line 13, it is possible to pass the first pole and the first to the thin film transistor 11, respectively. One of the two poles and the reference signal line 13 apply different voltages, so that the fingerprint recognition unit 122 is in a reverse bias state. One end of the fingerprint recognition portion 122 connected to one of the first pole and the second pole of the thin film transistor 11 is an N pole, and one end connected to the reference signal line 13 is a P example, and -1 V can be applied to the reference signal line 13. The voltage is applied to a voltage of +3 V to one of the first pole and the second pole of the thin film transistor 11. This is only an example and does not limit the magnitude of the applied voltage.
  • the touch position can be determined only by detecting a change in the current at a certain position. Therefore, during the detection process, the light shielding portion 121 can be in a forward bias state. It can also be in a reverse biased state. Due to the reference signal line 13 electrically connected to the corresponding light shielding portion 121, a certain voltage can be applied to the light shielding portion 121 through the reference signal line 13 and the touch detection signal line 19, so that the light shielding portion 121 is in a forward bias state or a reverse bias state. Further, it is not necessary to apply a voltage to the light shielding portion 121.
  • the current of the light shielding portion 121 can be directly read by the touch detection signal line 19, thereby detecting the touch position.
  • This type of detection is relatively simple. However, applying a voltage to the light shielding portion 121 to cause the light shielding portion 121 to be in a forward bias state or a reverse bias state makes the detected current change more conspicuous, and it is easier to detect the touch position.
  • At least one reference signal line 13 in the same layer as the gate electrode 112 of the thin film transistor 11, at least one pattern of the reference signal line 13 and the gate electrode 112 can be formed by one patterning process during fabrication, thereby simplifying the manufacturing process.
  • a bias voltage may be supplied to the light shielding portion 121 and the fingerprint recognition portion 122 through the same reference signal line 13.
  • a certain voltage may be applied to the reference signal line 13 to maintain the position of the reference signal line 13 at a certain potential.
  • the fingerprint recognition unit 122 can be kept in the reverse bias state by a certain voltage applied to one of the first pole and the second pole of the thin film transistor, and a certain voltage is applied to the touch detection signal line 19 to make the light shielding portion.
  • 121 maintains a forward biased state or a reverse biased state.
  • a voltage of -2 V is applied to the reference signal line 13
  • a voltage of +1 V is applied to one of the first pole and the second pole of the thin film transistor 11, so that the fingerprint recognition portion 122 is in a reverse bias state.
  • a voltage of +2 V may be applied to the touch detection signal line 19 to cause the light shielding portion 121 to be in a reverse bias state, or a voltage of -5 V may be applied to the touch detection signal line 19 to cause the light shielding portion 121 to be in a forward bias state.
  • the sensing substrate may further include: a gate insulating layer 14 between the active layer 111 and the gate 112; and the active layer 111 and the photosensor layer 12 a first insulating layer 15; and a second insulating layer 16 on the side of the photosensor layer 12 facing away from the gate 112.
  • the above-described gate insulating layer 14 can function to isolate the active layer 111 and the gate electrode 112.
  • the first insulating layer 15 described above can function to isolate the active layer 111 and the light shielding portion 121.
  • the second insulating layer 16 described above can function as a flattening.
  • the sensing substrate of the embodiment may further include: a first conductive portion 131 and a second conductive portion 191 disposed in the same layer as one of the first and second poles of the thin film transistor 11; and the second insulation
  • the layer 16 faces away from the third conductive portion 132 and the fourth conductive portion 192 which are disposed in the same layer on the side of the base substrate 10.
  • the reference signal line 13 is electrically connected to the fingerprint recognition unit 122 through the first conduction portion 131 and the third conduction portion 132.
  • the touch detection signal line 19 is electrically connected to the light shielding portion 121 through the second conduction portion 191 and the fourth conduction portion 192.
  • the reference signal line 13 is electrically connected to the fingerprint recognition portion 122 and the light shielding portion 121 through the first conductive portion 131 and the third conductive portion 132.
  • the first conductive portion 131 and the second conductive portion 191 are disposed in the same layer as the source/drain electrodes 113 of the thin film transistor 11, so that the source/drain electrodes 113 of the thin film transistor 11 can be formed by one patterning process,
  • the second conductive portion 191 in order to electrically connect the second conductive portion 191 to the touch detection signal line 19, it is necessary to correspond to the touch detection signal line 19 in the gate insulating layer 14 before forming the pattern of the second conductive portion 191. Make a hole at the location.
  • the via hole may be formed simultaneously with the via hole at the corresponding position of the reference signal line 13 by the same etching process.
  • the third conductive portion 132 is disposed in the same layer as the fourth conductive portion 192, the third conductive portion 132 and the fourth conductive portion 192 can be formed by one patterning process. Since the fingerprint recognition unit 122 realizes fingerprint recognition by using different light intensities reflected by the valleys and ridges of the finger, the light shielding portion 121 also generates a photocurrent by the light reflected by the finger to detect the touch position, and therefore, in order to avoid the third guide The through portion 132 blocks the fingerprint recognition portion 122 and prevents the fourth conductive portion 192 from blocking the light shielding portion 121.
  • the third conductive portion 132 and the fourth conductive portion 192 are preferably made of a transparent conductive material, for example, indium tin oxide ( Indium tin oxide, ITO) and other materials.
  • the electrical connection between the fingerprint recognition portion 122 and the first reference signal line 13 is realized, and a third is formed.
  • a via hole is formed at a position corresponding to the first conductive portion 131 in the first insulating layer 15 and the second insulating layer 16.
  • the electrical connection between the light shielding portion 121 and the touch detection signal line 19 is further realized, before the pattern of the fourth conduction portion 192 is formed.
  • a via hole is formed at a position corresponding to the second conductive portion 191 in the first insulating layer 15 and the second insulating layer 16.
  • the vias at the locations of the first insulating layer 15 and the second insulating layer 16 corresponding to the first conductive portion 131 and the second conductive portion 191 may be simultaneously formed by the same etching process.
  • a third insulating layer 17 is further disposed on a side of the third conductive portion 132 and the fourth conductive portion 192 away from the base substrate 10.
  • the third insulating layer 17 can protect the third conductive portion 132 and the fourth conductive portion 192 and function as a flattening.
  • the sensing substrate may further include a photosensor.
  • the layer 12 faces away from the protective layer 18 on the side of the base substrate 10.
  • the pattern of the protective layer 18 can conform to the pattern of the photosensor layer 12.
  • the protective layer 18 may be made of a transparent conductive material, for example, indium tin oxide (Indium). Tin oxide, ITO) and other materials.
  • a transparent conductive material for example, indium tin oxide (Indium). Tin oxide, ITO) and other materials.
  • FIG. 1 is exemplified by taking the thin film transistor 11 on the sensing substrate as a bottom gate type.
  • the light shielding portion 121 is disposed such that the orthographic projection on the base substrate 10 overlaps with the orthographic projection of the active layer 111 on the base substrate 10, and the light shielding portion 121 is located at a side of the active layer 111 of the thin film transistor 11 facing away from the gate electrode 112. On the side, the channel region of the thin film transistor 11 can be effectively blocked to prevent external light from affecting the switching characteristics of the thin film transistor 11.
  • an embodiment of the present disclosure provides a sensing substrate including a top gate type thin film transistor 11.
  • the gate 112 of the top gate thin film transistor 11 is located on the side of the active layer 111 facing away from the base substrate 10, and the light blocking portion 121 is also disposed on the side of the active layer 111 facing away from the gate 112.
  • the light shielding portion 121 can block the light of the backlight and prevent the light of the backlight from being irradiated onto the active layer 111, thereby affecting the switching characteristics of the thin film transistor 11. It should be noted that other structures in the sensing substrate are similar to the sensing substrate using the bottom gate thin film transistor described above, and details are not described herein again.
  • the sensing substrate may further include a protective layer 18 on a side of the fingerprint identifying portion 122 facing away from the base substrate 10.
  • the material of the photosensor layer 12 can comprise a PIN-type semiconductor material.
  • the PIN-type semiconductor material can be made of amorphous silicon or polycrystalline silicon material.
  • the P and N poles of the photosensor layer 12 can be set according to actual needs.
  • one side of the photosensor layer 12 close to the base substrate 10 may be set to an N pole, and a side away from the base substrate 10 may be set as a P pole.
  • FIGS. 5a and 5b are schematic diagrams of a planar structure of a sensing substrate in accordance with an embodiment of the present disclosure. The principle of fingerprint recognition in the embodiments of the present disclosure will be described below with reference to FIGS. 5a and 5b.
  • the gate electrode 112 of the plurality of thin film transistors 11 is connected to the gate driving circuit 22 through the gate line 21.
  • the output terminal 114 of the plurality of thin film transistors 11 is connected to the data signal receiving circuit through the data line 23.
  • the gate driving circuit 22 controls the gate electrode 112 to open the thin film transistor 11 row by row; the data signal processing circuit 24 first inputs a certain voltage to the fingerprint recognition portion 122, so that the fingerprint recognition portion 122 is in a reverse bias state, and The magnitude of the current of each data line 23 is detected; and when there is a finger touch, since the light intensity reflected by the valley and the ridge of the finger is inconsistent, the magnitude of the current of the data line 23 at the corresponding position is inconsistent, and the data signal processing circuit 24 can be based on the data line 23 The magnitude of the current is used to identify the location of the valleys and ridges of the fingers, which in turn form a fingerprint image of the finger.
  • FIG. 5a Only four gate lines 21 and four data lines 23 are shown in Fig. 5a for illustration. It should be noted that the ellipsis in FIG. 5a indicates that the sensing substrate according to an embodiment of the present disclosure may further include more gate lines 21 and more data lines 23. The number of gate lines 21 and data lines 23 is not limited here.
  • V d in Fig. 5b indicates the voltage input to the reference signal line 13.
  • Embodiments of the present disclosure also provide a detection method for fingerprint recognition using the above sensing substrate. Since the principle of the detection method is as described above, it will not be described here.
  • the detecting method includes: in S301, inputting an on signal to a gate of a thin film transistor on a sensing substrate; and in S302, detecting a fingerprint identification signal at an output end of the thin film transistor to identify a signal according to the fingerprint Determine the fingerprint pattern.
  • the detecting method of performing fingerprint recognition using the sensing substrate since the light intensity reflected by the finger valley and the ridge is different, the photocurrent formed in the fingerprint recognizing portion at the corresponding position is different, and thus can pass Inputting an enable signal to the gate of the thin film transistor, for example, inputting an enable signal in a row-by-row or column-by-column manner, so that the input terminal and the output terminal of the thin film transistor are turned on row by row or column by column, thereby detecting the output of each thin film transistor.
  • the fingerprint identification signal of the end determines the fingerprint pattern.
  • the sensing substrate in the detecting method provided by the embodiment of the present disclosure refers to a sensing substrate in which the photosensitive device layer includes a light shielding portion and a fingerprint recognition portion.
  • the sensing substrate can also implement touch detection.
  • the touch detection method may include detecting a touch detection signal at an output end of the thin film crystal to determine a touch position according to the touch detection signal.
  • the fingerprint recognition unit is multiplexed into a touch electrode.
  • the touch detection and the fingerprint recognition can be respectively implemented by means of time-sharing driving.
  • the touch detection signal is detected at the output end of each thin film transistor, and the touch position is determined according to the touch detection signal.
  • the sensing substrate may include a touch detection signal line disposed in the same layer as the gate of the thin film transistor, and the touch detection signal line is electrically connected to the corresponding light shielding portion. Therefore, the touch detection method may include detecting the touch detection signal. The touch detection signal of the line determines the touch position according to the touch detection signal.
  • the touch detection position can be determined by reading the current of each touch detection signal line due to each touch detection signal line electrically connected to the corresponding light shielding portion. If the current of the touch detection signal line changes at a certain position, the position of the corresponding light shielding portion is touched. Therefore, the fingerprint recognition function can be implemented by the fingerprint recognition unit, and the touch detection function can be implemented by the light shielding portion.
  • the fingerprint recognition and the touch detection can be independent of each other, and the fingerprint recognition unit does not need to be multiplexed into the touch electrodes, thereby simplifying the driving timing.
  • the above-mentioned detection signal line is connected to the corresponding logic operation circuit to verify the fingerprint information or calculate the position of the touch based on the detected signal.
  • the so-called logic operation circuit can be designed as an integrated circuit (IC) that performs the above functions, or a general-purpose processor such as a central processing unit (CPU), a field programmable logic array (FPGA), an application specific integrated circuit (ASIC). Etc., it is also possible to share the controller with a device such as a display panel.
  • Embodiments of the present disclosure also provide a sensing board including the sensing substrate of the above embodiment.
  • the sensing board can be used, for example, as a fingerprint sensing component on a fingerprint lock, a touch sensing component on a digital tablet, a fingerprint on a time attendance machine, or a palm print sensing component.
  • Embodiments of the present disclosure also provide a display panel.
  • the display panel includes the sensing substrate of the above embodiment.
  • the type of the display panel is not particularly limited, and may be, for example, an LCD display panel, an OLED display panel, a QLED display panel, a Micro LED display panel, or the like.
  • the sensing substrate may share the substrate with the array substrate of the display panel to simplify the design, thereby sensing the thin film transistor and the photosensor layer on the substrate as a whole of the sensing device and the sub-pixels of the pixels on the display substrate ( For example, R, G, B sub-pixels together form a pixel unit structure.
  • Embodiments of the present disclosure also provide a display device.
  • the display device includes the above display panel.
  • the display device can be applied to any product or component having a display function, such as a mobile phone, a tablet computer, a television, a display, a notebook computer, a digital photo frame, a navigator, and the like.

Abstract

The present invention provides a sensing substrate, and a display panel and a display device thereof. The sensing substrate comprises a substrate. A thin-film transistor and a photosensitive device layer are provided on the substrate, wherein the photosensitive device layer comprises a light-shielding portion. An orthographic projection of the light-shielding portion onto the substrate overlaps with at least a portion of an orthographic projection of an active layer of the thin-film transistor onto the substrate, and the light-shielding portion is disposed on the active layer of the thin-film transistor away from one side of a gate of the thin-film transistor.

Description

感测基板及感测板、显示面板和显示装置Sensing substrate and sensing board, display panel and display device
相关申请的交叉引用Cross-reference to related applications
本申请要求于2017年9月4日递交的中国专利申请第201710786474.7号优先权,在此全文引用上述中国专利申请公开的内容以作为本申请的一部分。The present application claims priority to Chinese Patent Application No. 20171078647, filed on Sep. 4, s.
技术领域Technical field
本公开涉及触控技术领域,特别地,涉及一种感测基板及感测板、显示面板和显示装置。The present disclosure relates to the field of touch technologies, and in particular, to a sensing substrate and a sensing board, a display panel, and a display device.
背景技术Background technique
薄膜晶体管液晶显示器(Thin Film Transistor Liquid Crystal Display,简称TFT-LCD)具有体积小、功耗低、无辐射等特点,在当前的平板显示器市场占据了主导地位。对于TFT-LCD来说,感测基板以及制造工艺决定了其产品性能、成品率和价格。Thin Film Transistor Liquid Crystal Display (TFT-LCD) has the characteristics of small size, low power consumption, no radiation, and has a dominant position in the current flat panel display market. For TFT-LCDs, the sensing substrate and manufacturing process determine its product performance, yield and price.
发明内容Summary of the invention
本公开的实施例提供了一种感测基板及感测板、显示面板和显示装置。Embodiments of the present disclosure provide a sensing substrate and a sensing panel, a display panel, and a display device.
本公开的实施例提供了一种感测基板。所述感测基板包括:衬底基板;位于所述衬底基板上的薄膜晶体管和光敏器件层,所述光敏器件层包括遮光部,所述遮光部在所述衬底基板上的正投影与所述薄膜晶体管的有源层在所述衬底基板上的正投影至少部分重叠,并且所述遮光部位于所述薄膜晶体管的所述有源层背离所述薄膜晶体管的栅极的一侧。Embodiments of the present disclosure provide a sensing substrate. The sensing substrate includes: a substrate substrate; a thin film transistor and a photosensor layer on the substrate, the photosensor layer includes a light shielding portion, and an orthographic projection of the light shielding portion on the substrate substrate The orthographic projection of the active layer of the thin film transistor on the base substrate at least partially overlaps, and the light shielding portion is located on a side of the thin film transistor from which the active layer faces away from the gate of the thin film transistor.
在一些实施例中,所述光敏器件层还包括指纹识别部,所述指纹识别部在所述衬底基板上的正投影与所述有源层在所述衬底基板上的正投影不重叠,所述指纹识别部与所述薄膜晶体管的第一极或第二极电连接。In some embodiments, the photosensor layer further includes a fingerprint recognition portion, an orthographic projection of the fingerprint recognition portion on the substrate substrate does not overlap with an orthographic projection of the active layer on the substrate substrate The fingerprint recognition portion is electrically connected to the first pole or the second pole of the thin film transistor.
在一些实施例中,所述栅极位于所述衬底基板与所述有源层之间,所 述指纹识别部与所述遮光部同层设置,并且所述指纹识别部与所述遮光部彼此间隔。In some embodiments, the gate is located between the base substrate and the active layer, the fingerprint recognition portion is disposed in the same layer as the light shielding portion, and the fingerprint recognition portion and the light shielding portion are Intersected from each other.
在一些实施例中,所述遮光部作为触控感测部。所述感测基板还包括与所述栅极同层设置的触控检测信号线,所述触控检测信号线与对应的所述遮光部电连接。In some embodiments, the light shielding portion functions as a touch sensing portion. The sensing substrate further includes a touch detection signal line disposed in the same layer as the gate, and the touch detection signal line is electrically connected to the corresponding light shielding portion.
在一些实施例中,所述触控检测信号线与所述遮光部一一对应,或每条所述触控检测信号线与多个所述遮光部对应。In some embodiments, the touch detection signal lines are in one-to-one correspondence with the light shielding portions, or each of the touch detection signal lines corresponds to the plurality of the light shielding portions.
在一些实施例中,所述感测基板还包括与所述栅极同层设置的至少一个参考信号线。所述至少一个参考信号线与所述遮光部和所述指纹识别部中的至少一者电连接以提供相应的偏置电压。In some embodiments, the sensing substrate further includes at least one reference signal line disposed in the same layer as the gate. The at least one reference signal line is electrically coupled to at least one of the light shielding portion and the fingerprint recognition portion to provide a corresponding bias voltage.
在一些实施例中,通过同一个所述参考信号线为所述遮光部和所述指纹识别部提供所述偏置电压。In some embodiments, the bias voltage is provided to the light shielding portion and the fingerprint recognition portion through the same reference signal line.
在一些实施例中,所述感测基板还包括:位于所述有源层和所述栅极之间的栅极绝缘层;位于所述有源层与所述光敏器件层之间的第一绝缘层;以及位于所述光敏器件层背离所述栅极的一侧的第二绝缘层。In some embodiments, the sensing substrate further includes: a gate insulating layer between the active layer and the gate; a first between the active layer and the photosensor layer An insulating layer; and a second insulating layer on a side of the photosensor layer facing away from the gate.
在一些实施例中,所述感测基板还包括:与所述薄膜晶体管的所述第一极或第二极同层设置的第一导通部和第二导通部;以及位于所述第二绝缘层背离所述衬底基板一侧的同层设置的第三导通部和第四导通部。所述至少一个参考信号线通过所述第一导通部和所述第三导通部与所述遮光部和所述指纹识别部中的至少一者电连接。所述触控检测信号线通过所述第二导通部和所述第四导通部与所述遮光部电连接。In some embodiments, the sensing substrate further includes: a first conductive portion and a second conductive portion disposed in the same layer as the first or second pole of the thin film transistor; The second insulating layer faces away from the third conductive portion and the fourth conductive portion disposed on the same side of the substrate substrate. The at least one reference signal line is electrically connected to at least one of the light shielding portion and the fingerprint recognition portion through the first conductive portion and the third conductive portion. The touch detection signal line is electrically connected to the light shielding portion through the second conduction portion and the fourth conduction portion.
在一些实施例中,所述感测基板还包括位于所述光敏器件层背离所述衬底基板一侧的保护层。In some embodiments, the sensing substrate further includes a protective layer on a side of the photosensor layer facing away from the substrate substrate.
在一些实施例中,所述栅极位于所述有源层远离所述衬底基板的一侧。In some embodiments, the gate is located on a side of the active layer away from the substrate substrate.
在一些实施例中,所述感测基板还包括位于所述指纹识别部背离所述衬底基板一侧的保护层。In some embodiments, the sensing substrate further includes a protective layer on a side of the fingerprint identifying portion facing away from the substrate substrate.
在一些实施例中,所述光敏器件层的材料包括PIN型半导体材料。In some embodiments, the material of the photosensor layer comprises a PIN-type semiconductor material.
本公开的实施例还提供了一种感测板,包括如上实施例所述的感测基板。Embodiments of the present disclosure also provide a sensing board including the sensing substrate as described in the above embodiments.
本公开的实施例还提供了一种显示面板。所述显示面板包括如上实施例所述的感测基板。Embodiments of the present disclosure also provide a display panel. The display panel includes the sensing substrate as described in the above embodiments.
本公开的实施例还提供了一种显示装置。所述显示装置包括如上所述的显示面板。Embodiments of the present disclosure also provide a display device. The display device includes a display panel as described above.
适应性的进一步的方面和范围从本文中提供的描述变得明显。应当理解,本申请的各个方面可以单独或者与一个或多个其他方面组合实施。还应当理解,本文中的描述和特定实施例旨在仅说明的目的并不旨在限制本申请的范围。Further aspects and scope of the adaptation will become apparent from the description provided herein. It should be understood that various aspects of the present application can be implemented alone or in combination with one or more other aspects. It should be understood that the description and specific examples are not intended to limit the scope of the application.
附图说明DRAWINGS
本文中描述的附图用于仅对所选择的实施例的说明的目的,并不是所有可能的实施方式,并且不旨在限制本申请的范围,其中:The drawings described herein are for purposes of illustration only, and are not intended to
图1为根据本公开的实施例的感测基板的横截面结构示意图;1 is a schematic cross-sectional view of a sensing substrate in accordance with an embodiment of the present disclosure;
图2为根据本公开的实施例的感测基板的横截面结构示意图;2 is a schematic cross-sectional view of a sensing substrate in accordance with an embodiment of the present disclosure;
图3为根据本公开的实施例的感测基板的横截面结构示意图;3 is a schematic cross-sectional structural view of a sensing substrate in accordance with an embodiment of the present disclosure;
图4为根据本公开的实施例的感测基板的横截面结构示意图;4 is a schematic cross-sectional structural view of a sensing substrate in accordance with an embodiment of the present disclosure;
图5a和图5b为根据本公开的实施例的感测基板的平面结构示意图;以及5a and 5b are schematic diagrams of a planar structure of a sensing substrate according to an embodiment of the present disclosure;
图6为使用根据本公开的实施例感测基板进行指纹识别的方法流程图。6 is a flow chart of a method of sensing a substrate for fingerprinting using an embodiment in accordance with the present disclosure.
贯穿这些附图的各个视图,相应的参考编号指示相应的部件或特征。Throughout the various views of the drawings, corresponding reference numerals indicate corresponding parts or features.
具体实施方式Detailed ways
首先,需要说明的是,除非上下文中另外明确地指出,否则在本文和所附权利要求中所使用的词语的单数形式包括复数,反之亦然。因而,当 提及单数时,通常包括相应术语的复数。相似地,措辞“包含”和“包括”将解释为包含在内而不是独占性地。同样地,术语“包括”和“或”应当解释为包括在内的,除非本文中另有说明。在本文中使用术语“实例”之处,特别是当其位于一组术语之后时,所述“实例”仅仅是示例性的和阐述性的,且不应当被认为是独占性的或广泛性的。The singular forms of the terms used in the claims and the appended claims are inclusive, and vice versa, unless the context clearly indicates otherwise. Thus, when reference is made to the singular, the <RTIgt; Similarly, the words "comprising" and "comprising" are to be construed as inclusive rather than exclusive. Likewise, the terms "include" and "or" are intended to be construed as being Where the term "example" is used herein, particularly when it is placed after a group of terms, the "example" is merely exemplary and illustrative and should not be considered to be exclusive or broad. .
此外,还需要说明的是,当介绍本申请的元素及其实施例时,冠词“一”、“一个”、“该”和“所述”旨在表示存在一个或者多个要素;除非另有说明,“多个”的含义是两个或两个以上;用语“包含”、“包括”、“含有”和“具有”旨在包括性的并且表示可以存在除所列要素之外的另外的要素;术语“第一”、“第二”、“第三”等仅用于描述的目的,而不能理解为指示或暗示相对重要性及形成顺序。In addition, it should be noted that the articles "a", "an", "the", "the" It has been stated that the meaning of "a plurality" is two or more; the terms "comprising", "including", "including" and "having" are intended to be inclusive and mean that there may be additional The terms "first", "second", "third", etc. are used for the purpose of description only and are not to be construed as indicating or implying the relative importance and order of formation.
本公开中描绘的流程图仅仅是一个例子。在不脱离本公开精神的情况下,可以存在该流程图或其中描述的步骤的很多变型。例如,所述步骤可以以不同的顺序进行,或者可以添加、删除或者修改步骤。这些变型都被认为是所要求保护的方面的一部分。The flowchart depicted in this disclosure is merely an example. Many variations of the flowchart or the steps described therein may exist without departing from the spirit of the present disclosure. For example, the steps may be performed in a different order, or steps may be added, deleted, or modified. These variations are considered to be part of the claimed aspect.
为了避免外界光或背光源的光线照射到薄膜晶体管的沟道区而产生光生载流子,从而影响薄膜晶体管的性能,还设置有避免光线照射到沟道区的遮光层。该遮光层的图形一般与沟道区的图形一致。但是在相关技术中,通常采用金属材料制作遮光层。然而,金属遮光层虽然遮光效果较好,但是金属遮光层的反光性能也比较强,会反射大量的外界光。当被反射的外界光从显示装置的出光侧出射时,会影响显示装置的显示效果。In order to prevent the external light or the light of the backlight from being irradiated to the channel region of the thin film transistor to generate photo-generated carriers, thereby affecting the performance of the thin film transistor, a light-shielding layer for preventing light from being irradiated to the channel region is also provided. The pattern of the light shielding layer generally coincides with the pattern of the channel region. However, in the related art, a light shielding layer is usually formed using a metal material. However, although the metal light-shielding layer has a good light-shielding effect, the metal light-shielding layer has a relatively high light-reflecting property and reflects a large amount of external light. When the reflected external light is emitted from the light emitting side of the display device, the display effect of the display device is affected.
本公开的实施例提供了一种感测基板及感测板、显示面板和显示装置,以至少部分地克服相关技术中存在的问题。Embodiments of the present disclosure provide a sensing substrate and a sensing plate, a display panel, and a display device to at least partially overcome the problems in the related art.
下面结合附图,对本公开的实施例提供的感测基板及感测板、显示面板和显示装置的具体实施方式进行详细地说明。附图中各膜层的厚度和形状不反映真实比例,其目的只是为了示意性地说明本公开的内容。The specific embodiments of the sensing substrate and the sensing board, the display panel and the display device provided by the embodiments of the present disclosure will be described in detail below with reference to the accompanying drawings. The thickness and shape of each film layer in the drawings do not reflect true proportions, and are merely intended to schematically illustrate the disclosure.
图1为根据本公开的实施例的感测基板的横截面结构示意图。如图1 所示,本公开的实施例提供了一种感测基板。该感测基板包括:衬底基板10;位于衬底基板10上的薄膜晶体管11和光敏器件层12。作为示例,多个薄膜晶体管例如以阵列的方式排布。光敏器件层12包括遮光部121。该遮光部121在衬底基板10上的正投影与薄膜晶体管11的有源层111在衬底基板10上的正投影至少部分重叠,且遮光部121位于薄膜晶体管11的有源层111背离薄膜晶体管11的栅极112的一侧。1 is a schematic cross-sectional view of a sensing substrate in accordance with an embodiment of the present disclosure. As shown in FIG. 1, an embodiment of the present disclosure provides a sensing substrate. The sensing substrate includes: a substrate substrate 10; a thin film transistor 11 and a photosensor layer 12 on the substrate substrate 10. As an example, a plurality of thin film transistors are arranged, for example, in an array. The photosensor layer 12 includes a light blocking portion 121. The orthographic projection of the light shielding portion 121 on the base substrate 10 at least partially overlaps with the orthographic projection of the active layer 111 of the thin film transistor 11 on the base substrate 10, and the light shielding portion 121 is located away from the active layer 111 of the thin film transistor 11 One side of the gate 112 of the transistor 11.
在本公开的实施例中,采用光敏器件层中的遮光部遮挡有源层的图形。由于光敏器件层受到光线照射会产生光电流,即,光敏器件层可以将光能转换为电能,因此,光敏器件层具有一定的吸光作用,大部分光线被光敏器件层吸收,从而降低了遮光部的反光,使得其应用到显示面板时不会影响显示装置的显示效果。In an embodiment of the present disclosure, the light shielding portion in the photosensitive device layer is used to block the pattern of the active layer. Since the photosensitive device layer is exposed to light to generate a photocurrent, that is, the photosensitive device layer can convert the light energy into electrical energy, the photosensitive device layer has a certain light absorbing effect, and most of the light is absorbed by the photosensitive device layer, thereby reducing the light shielding portion. The reflection makes it not affect the display effect of the display device when applied to the display panel.
在一些实施例中,遮光部121在衬底基板10上的正投影与有源层111在衬底基板10上的正投影完全重叠,由此能够更好地遮挡进入到有源层111的光线,从而保护有源层111,提高薄膜晶体管的工作性能。In some embodiments, the orthographic projection of the light shielding portion 121 on the base substrate 10 completely overlaps with the orthographic projection of the active layer 111 on the base substrate 10, thereby being able to better block the light entering the active layer 111. Thereby, the active layer 111 is protected to improve the performance of the thin film transistor.
在一些实施例中,参照图1,光敏器件层12还可以包括指纹识别部122。指纹识别部122在衬底基板10上的正投影与有源层111在衬底基板10上的正投影不重叠。指纹识别部122与薄膜晶体管11的第一极和第二极中的一者电连接。In some embodiments, referring to FIG. 1, the photosensor layer 12 can also include a fingerprint recognition portion 122. The orthographic projection of the fingerprint recognition portion 122 on the base substrate 10 does not overlap with the orthographic projection of the active layer 111 on the base substrate 10. The fingerprint recognition unit 122 is electrically connected to one of the first pole and the second pole of the thin film transistor 11.
在一些实施例中,如图1所示,栅极112位于衬底基板10与有源层111之间。需要说明的是,根据本公开的实施例,栅极112可以位于有源层111远离衬底基板10的一侧(稍后描述)。也就是,薄膜晶体管11可以为底栅型薄膜晶体管或顶栅型薄膜晶体管。这里,先对薄膜晶体管11为底栅型薄膜晶体管的情况进行详细地描述。In some embodiments, as shown in FIG. 1, the gate 112 is between the substrate substrate 10 and the active layer 111. It should be noted that, according to an embodiment of the present disclosure, the gate electrode 112 may be located on a side of the active layer 111 away from the substrate substrate 10 (described later). That is, the thin film transistor 11 may be a bottom gate type thin film transistor or a top gate type thin film transistor. Here, the case where the thin film transistor 11 is a bottom gate type thin film transistor will be described in detail first.
在一些实施例中,指纹识别部122与遮光部121同层设置,并且指纹识别部122与遮光部121彼此间隔。这里,“同层设置”指的是使用同一膜层形成。也就是,指纹识别部122与遮光部121通过一次构图工艺制作,即,遮光部121与指纹识别部122位于同一层且具有相同的材质。由此, 简化了感测基板的制作工艺,节约了成本。In some embodiments, the fingerprint recognition unit 122 is disposed in the same layer as the light shielding portion 121, and the fingerprint recognition portion 122 and the light shielding portion 121 are spaced apart from each other. Here, "same layer setting" refers to formation using the same film layer. That is, the fingerprint recognition unit 122 and the light shielding unit 121 are formed by one patterning process, that is, the light shielding unit 121 and the fingerprint recognition unit 122 are located in the same layer and have the same material. Thereby, the manufacturing process of the sensing substrate is simplified, and the cost is saved.
在一些实施例中,指纹识别部122还复用为触控电极,以实现触控检测,即,指纹识别部122可以通过分时驱动的方式分别实现触控检测和指纹识别。In some embodiments, the fingerprint recognition unit 122 is also multiplexed as a touch electrode to implement touch detection. That is, the fingerprint recognition unit 122 can implement touch detection and fingerprint recognition by means of time-division driving.
在本公开的实施例中,光敏器件层12的光敏器件一般由光敏半导体材料构成。由于光敏器件层12受到光线照射会产生光电流,即光敏器件层12可以将光能转换为电能,因此,光敏器件层12具有一定的吸光作用。因而可以利用光敏器件层12的吸光特性将光敏器件层12用作遮光部。此外,也可以利用手指的谷和脊反射的光强不同而导致光敏器件层12的光电流大小不同,来判断手指的谷和脊的位置,即,利用光敏器件层12实现指纹识别的功能作用。因此,可以将遮光部121和指纹识别部122设置为位于同一层且具有相同的材质。这样,可以通过一次构图工艺形成遮光部121和指纹识别部122,而无需单独制作遮光部121,由此简化了制作工艺。In an embodiment of the present disclosure, the photosensitive device of photosensor layer 12 is typically comprised of a photosensitive semiconductor material. Since the photosensor layer 12 is exposed to light to generate a photocurrent, that is, the photosensor layer 12 can convert the light energy into electric energy, the photosensor layer 12 has a certain light absorbing effect. Thus, the photosensitive device layer 12 can be used as the light shielding portion by utilizing the light absorbing characteristics of the photosensor layer 12. In addition, it is also possible to determine the position of the valley and the ridge of the finger by using different light intensity of the valley and the ridge reflected by the finger to cause the photocurrent layer 12 to have different photocurrents, that is, to realize the function of fingerprint recognition by using the photosensor layer 12. . Therefore, the light shielding portion 121 and the fingerprint recognition portion 122 can be disposed to be in the same layer and have the same material. Thus, the light shielding portion 121 and the fingerprint recognition portion 122 can be formed by one patterning process without separately forming the light shielding portion 121, thereby simplifying the manufacturing process.
在一些实施例中,为了避免遮光部121的中的光电流对指纹识别的影响,遮光部121和指纹识别部122之间是绝缘的。In some embodiments, in order to avoid the influence of the photocurrent in the light shielding portion 121 on the fingerprint recognition, the light shielding portion 121 and the fingerprint recognition portion 122 are insulated.
应该说明的是,本公开的实施例中,薄膜晶体管11的第一极和第二极中的一者为信号输入端,另一者为信号输出端。这里,薄膜晶体管11的第一极和第二极中的一者为源极,另一者是漏极,即在第一极113为源极时,则第二极114为漏极;或第一极113为漏极时,则第二极114为源极。上述指纹识别部122与薄膜晶体管11的第一极和第二极中的一者电连接,因而可以通过读取薄膜晶体管11的第一极和第二极中的另一者输出的电流的方式,来实现指纹识别检测。It should be noted that, in the embodiment of the present disclosure, one of the first pole and the second pole of the thin film transistor 11 is a signal input terminal, and the other is a signal output terminal. Here, one of the first pole and the second pole of the thin film transistor 11 is a source, and the other is a drain, that is, when the first pole 113 is a source, the second pole 114 is a drain; or When one pole 113 is a drain, the second pole 114 is a source. The fingerprint recognition unit 122 is electrically connected to one of the first pole and the second pole of the thin film transistor 11, and thus can read the current output from the other of the first pole and the second pole of the thin film transistor 11 To achieve fingerprint recognition detection.
在一些实施例中,如图2所示,上述遮光部121可以作为触控感测部。上述感测基板还可以包括与薄膜晶体管11的栅极112同层设置的触控检测信号线19。该触控检测信号线19与对应的遮光部121电连接。In some embodiments, as shown in FIG. 2, the light shielding portion 121 can serve as a touch sensing portion. The sensing substrate may further include a touch detection signal line 19 disposed in the same layer as the gate 112 of the thin film transistor 11. The touch detection signal line 19 is electrically connected to the corresponding light blocking portion 121.
在一些实施例中,根据薄膜晶体管在感测基板上的排布,可相应设置多条触控检测信号线。通过与栅极112同层设置的触控检测信号线19,一 方面,触控检测信号线19可以与栅极112采用同一构图工艺制作,简化制造工艺,另一方面,可以通过读取各触控检测信号线19的电流判断触控位置。如果某个位置的触控检测信号线19的电流发生变化,则对应的遮光部121所在的位置被触控。因而,在图2所示的感测基板中,通过指纹识别部122实现指纹识别功能,通过遮光部121实现触控检测功能。这里,指纹识别和触控检测可以相互独立,而不需要将指纹识别部122复用为触控电极,由此,可以简化驱动时序。In some embodiments, according to the arrangement of the thin film transistors on the sensing substrate, a plurality of touch detection signal lines may be correspondingly disposed. The touch detection signal line 19 is disposed on the same layer as the gate 112. On the one hand, the touch detection signal line 19 can be fabricated by using the same patterning process as the gate 112, thereby simplifying the manufacturing process, and on the other hand, reading each touch The current of the detection signal line 19 is controlled to determine the touch position. If the current of the touch detection signal line 19 at a certain position changes, the position where the corresponding light shielding portion 121 is located is touched. Therefore, in the sensing substrate shown in FIG. 2, the fingerprint recognition function is implemented by the fingerprint recognition unit 122, and the touch detection function is realized by the light shielding unit 121. Here, the fingerprint recognition and the touch detection can be independent of each other without multiplexing the fingerprint recognition unit 122 into the touch electrodes, whereby the driving timing can be simplified.
这里,利用触控检测信号线19与对应的遮光部121电连接,以实现触控显示的原理具体为:当遮光部121所在的位置被触摸时,手指反射的光强会改变遮光部121的光电流,因此,可以通过触控检测信号线19检测电流变化,来判断触控位置。Here, the principle that the touch detection signal line 19 is electrically connected to the corresponding light shielding portion 121 to realize the touch display is specifically: when the position where the light shielding portion 121 is touched, the light intensity reflected by the finger changes the light shielding portion 121. The photocurrent, therefore, the touch change can be detected by the touch detection signal line 19 to determine the touch position.
在一些实施例中,触控检测信号线19可以与遮光部121一一对应。In some embodiments, the touch detection signal line 19 may be in one-to-one correspondence with the light shielding portion 121.
在一些实施例中,每条触控检测信号线19可以与多个遮光部121对应。In some embodiments, each of the touch detection signal lines 19 may correspond to the plurality of light shielding portions 121.
由于手指触摸显示屏时,手指和触摸屏具有一定的接触面积,该接触面积一般对应多个像素,因而在满足检测精度的情况下,可以设置一定范围内的几个像素共用同一条触控检测信号线19。由此,可以在满足检测精度的前提下,减少触控检测信号线19的数量。例如,可以将5×5mm范围内的每个像素的遮光部121连接到同一条触控检测信号线19上。另外,当要求的检测精度较高时,也可以将触控检测信号线19设置为与遮光部121一一对应。When the finger touches the display screen, the finger and the touch screen have a certain contact area, and the contact area generally corresponds to a plurality of pixels. Therefore, when the detection accuracy is satisfied, a plurality of pixels within a certain range can be set to share the same touch detection signal. Line 19. Thereby, the number of the touch detection signal lines 19 can be reduced while satisfying the detection accuracy. For example, the light shielding portion 121 of each pixel in the range of 5 × 5 mm can be connected to the same touch detection signal line 19. In addition, when the required detection accuracy is high, the touch detection signal line 19 may be disposed in one-to-one correspondence with the light shielding portion 121.
在一些实施例中,参照图2,感测基板还可以包括与薄膜晶体管11的栅极112同层设置的至少一个参考信号线13。该至少一个参考信号线13与遮光部121和指纹识别部122中的至少一者电连接以提供相应的偏置电压。In some embodiments, referring to FIG. 2, the sensing substrate may further include at least one reference signal line 13 disposed in the same layer as the gate 112 of the thin film transistor 11. The at least one reference signal line 13 is electrically connected to at least one of the light shielding portion 121 and the fingerprint recognition portion 122 to provide a corresponding bias voltage.
在一些实施例中,根据薄膜晶体管在感测基板上的排布,可相应设置多个参考信号线13。由于光敏器件层12的光敏器件一般由光敏半导体材料构成,而光敏半导体材料形成的PN结或PIN结作为光敏器件具有单向 导电性,因此,在使用遮光部121进行触控检测和/或使用指纹识别部122进行指纹检测时,可以通过至少一个参考信号线13对遮光部121和/或指纹识别部122提供相应的偏置电压。In some embodiments, a plurality of reference signal lines 13 may be disposed correspondingly according to the arrangement of the thin film transistors on the sensing substrate. Since the photosensitive device of the photosensor layer 12 is generally composed of a photosensitive semiconductor material, and the PN junction or PIN junction formed by the photosensitive semiconductor material has unidirectional conductivity as a photosensitive device, touch detection and/or use is performed using the light shielding portion 121. When the fingerprint recognition unit 122 performs fingerprint detection, the corresponding bias voltage can be supplied to the light shielding portion 121 and/or the fingerprint recognition portion 122 through at least one reference signal line 13.
一方面,在检测指纹的过程中,需要向指纹识别部122施加反向电压,使指纹识别部122中的PN结或PIN结处于反偏状态。在没有光照时,指纹识别部122中具有很小的反向电流。当指纹识别部122受到光线照射时,指纹识别部122中的PN结或PIN结产生电子-空穴对,使少数载流子的密度增加。这些载流子在反向电压下漂移,使反向电流大大增加,形成光电流,光电流的大小由光线的光强决定。On the one hand, in the process of detecting the fingerprint, it is necessary to apply a reverse voltage to the fingerprint recognition unit 122 so that the PN junction or the PIN junction in the fingerprint recognition unit 122 is in a reverse bias state. In the absence of illumination, the fingerprint recognition portion 122 has a small reverse current. When the fingerprint recognition portion 122 is irradiated with light, the PN junction or the PIN junction in the fingerprint recognition portion 122 generates electron-hole pairs, increasing the density of minority carriers. These carriers drift under the reverse voltage, causing the reverse current to increase greatly, forming a photocurrent, and the magnitude of the photocurrent is determined by the intensity of the light.
当指纹识别部122的P极为低电位,N极为高电位时,指纹识别部122处于反偏状态。由于指纹识别部122与薄膜晶体管11的第一极和第二极中的一者电连接,且与对应的参考信号线13电连接,因而,可以通过分别向薄膜晶体管11的第一极和第二极中的一者和参考信号线13施加不同的电压,使指纹识别部122处于反偏状态。以指纹识别部122与薄膜晶体管11的第一极和第二极中的一者相连的一端为N极,与参考信号线13相连的一端为P极为例,可以向参考信号线13施加-1V的电压,向薄膜晶体管11的第一极和第二极中的一者施加+3V的电压。此处只是举例说明,并不对施加电压的大小进行限定。When P of the fingerprint recognition unit 122 is extremely low and N is extremely high, the fingerprint recognition unit 122 is in a reverse bias state. Since the fingerprint recognition portion 122 is electrically connected to one of the first pole and the second pole of the thin film transistor 11 and is electrically connected to the corresponding reference signal line 13, it is possible to pass the first pole and the first to the thin film transistor 11, respectively. One of the two poles and the reference signal line 13 apply different voltages, so that the fingerprint recognition unit 122 is in a reverse bias state. One end of the fingerprint recognition portion 122 connected to one of the first pole and the second pole of the thin film transistor 11 is an N pole, and one end connected to the reference signal line 13 is a P example, and -1 V can be applied to the reference signal line 13. The voltage is applied to a voltage of +3 V to one of the first pole and the second pole of the thin film transistor 11. This is only an example and does not limit the magnitude of the applied voltage.
另一方面,由于利用遮光部121实现触控检测时,只需检测到某个位置的电流发生变化,即可确定触控位置,因而,在检测过程中,遮光部121可以处于正偏状态,也可以处于反偏状态。由于与对应的遮光部121电连接的参考信号线13,可以通过参考信号线13和触控检测信号线19向遮光部121施加一定的电压,使遮光部121处于正偏状态或反偏状态。此外,也可以不向遮光部121施加电压。因为手指触摸时反射的光线会使遮光部121形成光电流,由此可以直接通过触控检测信号线19读取遮光部121的电流,从而检测到触控位置。这种检测方式比较简单。然而,向遮光部121施加电压以使遮光部121处于正偏状态或反偏状态,会使检测到的电流变 化更加明显,更容易检测到触控位置。On the other hand, when the touch detection is performed by the light shielding portion 121, the touch position can be determined only by detecting a change in the current at a certain position. Therefore, during the detection process, the light shielding portion 121 can be in a forward bias state. It can also be in a reverse biased state. Due to the reference signal line 13 electrically connected to the corresponding light shielding portion 121, a certain voltage can be applied to the light shielding portion 121 through the reference signal line 13 and the touch detection signal line 19, so that the light shielding portion 121 is in a forward bias state or a reverse bias state. Further, it is not necessary to apply a voltage to the light shielding portion 121. Since the light reflected by the finger touch causes the light blocking portion 121 to form a photocurrent, the current of the light shielding portion 121 can be directly read by the touch detection signal line 19, thereby detecting the touch position. This type of detection is relatively simple. However, applying a voltage to the light shielding portion 121 to cause the light shielding portion 121 to be in a forward bias state or a reverse bias state makes the detected current change more conspicuous, and it is easier to detect the touch position.
此外,通过将至少一个参考信号线13与薄膜晶体管11的栅极112同层设置,在制作过程中可以通过一次构图工艺形成至少一个参考信号线13和栅极112的图形,从而简化制造工艺。Further, by arranging at least one reference signal line 13 in the same layer as the gate electrode 112 of the thin film transistor 11, at least one pattern of the reference signal line 13 and the gate electrode 112 can be formed by one patterning process during fabrication, thereby simplifying the manufacturing process.
作为示例,如图3所示,可以通过同一个参考信号线13为遮光部121和指纹识别部122提供偏置电压。As an example, as shown in FIG. 3, a bias voltage may be supplied to the light shielding portion 121 and the fingerprint recognition portion 122 through the same reference signal line 13.
例如,在检测过程中,可以向参考信号线13施加一定的电压,以使参考信号线13的位置保持一定的电位。这样,可以通过向薄膜晶体管的第一极和第二极中的一者施加的一定的电压,使指纹识别部122保持反偏状态,向触控检测信号线19施加一定的电压,使遮光部121保持正偏状态或反偏状态。例如,向参考信号线13施加-2V的电压,向薄膜晶体管11的第一极和第二极中的一者施加+1V的电压,从而使指纹识别部122处于反偏状态。另外,可以向触控检测信号线19施加+2V的电压以使遮光部121处于反偏状态,或向触控检测信号线19施加-5V的电压以使遮光部121处于正偏状态。由此,可以实现触控检测和指纹识别检测共用参考信号线,且不影响检测结果。For example, during the detection, a certain voltage may be applied to the reference signal line 13 to maintain the position of the reference signal line 13 at a certain potential. In this way, the fingerprint recognition unit 122 can be kept in the reverse bias state by a certain voltage applied to one of the first pole and the second pole of the thin film transistor, and a certain voltage is applied to the touch detection signal line 19 to make the light shielding portion. 121 maintains a forward biased state or a reverse biased state. For example, a voltage of -2 V is applied to the reference signal line 13, and a voltage of +1 V is applied to one of the first pole and the second pole of the thin film transistor 11, so that the fingerprint recognition portion 122 is in a reverse bias state. In addition, a voltage of +2 V may be applied to the touch detection signal line 19 to cause the light shielding portion 121 to be in a reverse bias state, or a voltage of -5 V may be applied to the touch detection signal line 19 to cause the light shielding portion 121 to be in a forward bias state. Thereby, the touch detection and the fingerprint identification detection common reference signal line can be realized without affecting the detection result.
在一些实施例中,如图2和3所示,感测基板还可以包括:位于有源层111和栅极112之间的栅极绝缘层14;位于有源层111与光敏器件层12之间的第一绝缘层15;以及位于光敏器件层12背离栅极112一侧的第二绝缘层16。In some embodiments, as shown in FIGS. 2 and 3, the sensing substrate may further include: a gate insulating layer 14 between the active layer 111 and the gate 112; and the active layer 111 and the photosensor layer 12 a first insulating layer 15; and a second insulating layer 16 on the side of the photosensor layer 12 facing away from the gate 112.
上述栅极绝缘层14可以起到隔离有源层111和栅极112的作用。上述第一绝缘层15可以起到隔离有源层111和遮光部121的作用。上述第二绝缘层16可以起到平坦化的作用。The above-described gate insulating layer 14 can function to isolate the active layer 111 and the gate electrode 112. The first insulating layer 15 described above can function to isolate the active layer 111 and the light shielding portion 121. The second insulating layer 16 described above can function as a flattening.
在一些实施例中,为了实现指纹识别部122与对应的参考信号线13电连接,以及为了实现遮光部121与对应的触控检测信号线19之间的电连接,参照图2,根据本公开的实施例的感测基板还可以包括:与薄膜晶体管11的第一极和第二极中的一者同层设置的第一导通部131和第二导通部191; 以及位于第二绝缘层16背离衬底基板10一侧的同层设置的第三导通部132和第四导通部192。参考信号线13通过第一导通部131和第三导通部132与指纹识别部122电连接。触控检测信号线19通过第二导通部191和第四导通部192与遮光部121电连接。In some embodiments, in order to realize the electrical connection between the fingerprint recognition unit 122 and the corresponding reference signal line 13 and to achieve electrical connection between the light shielding portion 121 and the corresponding touch detection signal line 19, referring to FIG. 2, according to the present disclosure The sensing substrate of the embodiment may further include: a first conductive portion 131 and a second conductive portion 191 disposed in the same layer as one of the first and second poles of the thin film transistor 11; and the second insulation The layer 16 faces away from the third conductive portion 132 and the fourth conductive portion 192 which are disposed in the same layer on the side of the base substrate 10. The reference signal line 13 is electrically connected to the fingerprint recognition unit 122 through the first conduction portion 131 and the third conduction portion 132. The touch detection signal line 19 is electrically connected to the light shielding portion 121 through the second conduction portion 191 and the fourth conduction portion 192.
在一些实施例中,参照图3,参考信号线13通过第一导通部131和第三导通部132与指纹识别部122和遮光部121电连接。In some embodiments, referring to FIG. 3, the reference signal line 13 is electrically connected to the fingerprint recognition portion 122 and the light shielding portion 121 through the first conductive portion 131 and the third conductive portion 132.
参照图2和3,第一导通部131和第二导通部191与薄膜晶体管11的源/漏电极113同层设置,因而可以通过一次构图工艺形成薄膜晶体管11的源/漏电极113、第一导通部131以及第二导通部191。为了使第一导通部131与参考信号线13电连接,需要在形成第一导通部131的图形之前,在栅极绝缘层14中与参考信号线13对应的位置处制作过孔,具体可以采用刻蚀工艺实现。同样地,为了使第二导通部191与触控检测信号线19电连接,需要在形成第二导通部191的图形之前,在栅极绝缘层14中与触控检测信号线19对应的位置处制作过孔。该过孔可以跟与参考信号线13的对应的位置处的过孔采用同一刻蚀工艺同时形成。Referring to FIGS. 2 and 3, the first conductive portion 131 and the second conductive portion 191 are disposed in the same layer as the source/drain electrodes 113 of the thin film transistor 11, so that the source/drain electrodes 113 of the thin film transistor 11 can be formed by one patterning process, The first conductive portion 131 and the second conductive portion 191. In order to electrically connect the first conductive portion 131 to the reference signal line 13, it is necessary to make a via hole at a position corresponding to the reference signal line 13 in the gate insulating layer 14 before forming the pattern of the first conductive portion 131. It can be achieved by an etching process. Similarly, in order to electrically connect the second conductive portion 191 to the touch detection signal line 19, it is necessary to correspond to the touch detection signal line 19 in the gate insulating layer 14 before forming the pattern of the second conductive portion 191. Make a hole at the location. The via hole may be formed simultaneously with the via hole at the corresponding position of the reference signal line 13 by the same etching process.
由于第三导通部132与第四导通部192同层设置,因而可以通过一次构图工艺形成第三导通部132与第四导通部192。由于指纹识别部122是利用手指的谷和脊反射的光强不同来实现指纹识别的,遮光部121也是通过手指反射的光线而产生光电流来检测触控位置的,因此,为了避免第三导通部132遮挡指纹识别部122,以及避免第四导通部192遮挡遮光部121,第三导通部132和第四导通部192优选为采用透明的导电材料制作,例如,氧化铟锡(Indium tin oxide,ITO)等材料。Since the third conductive portion 132 is disposed in the same layer as the fourth conductive portion 192, the third conductive portion 132 and the fourth conductive portion 192 can be formed by one patterning process. Since the fingerprint recognition unit 122 realizes fingerprint recognition by using different light intensities reflected by the valleys and ridges of the finger, the light shielding portion 121 also generates a photocurrent by the light reflected by the finger to detect the touch position, and therefore, in order to avoid the third guide The through portion 132 blocks the fingerprint recognition portion 122 and prevents the fourth conductive portion 192 from blocking the light shielding portion 121. The third conductive portion 132 and the fourth conductive portion 192 are preferably made of a transparent conductive material, for example, indium tin oxide ( Indium tin oxide, ITO) and other materials.
如图2和3所示,为了实现指纹识别部122与第一导通部131之间的电连接,进而实现指纹识别部122与第一参考信号线13之间的电连接,在形成第三导通部132的图案之前,在第一绝缘层15和第二绝缘层16中与第一导通部131对应的位置处形成过孔。同样地,为了实现遮光部121与第二导通部191之间的电连接,进而实现遮光部121与触控检测信号线19 之间的电连接,在形成第四导通部192的图形之前,在第一绝缘层15和第二绝缘层16中与第二导通部191对应的位置处形成过孔。在制作过程中,第一绝缘层15和第二绝缘层16中与第一导通部131和第二导通部191对应的位置处的过孔可以采用同一刻蚀工艺同时形成。As shown in FIGS. 2 and 3, in order to realize electrical connection between the fingerprint recognition unit 122 and the first conductive portion 131, the electrical connection between the fingerprint recognition portion 122 and the first reference signal line 13 is realized, and a third is formed. Before the pattern of the conductive portion 132, a via hole is formed at a position corresponding to the first conductive portion 131 in the first insulating layer 15 and the second insulating layer 16. Similarly, in order to realize the electrical connection between the light shielding portion 121 and the second conductive portion 191, the electrical connection between the light shielding portion 121 and the touch detection signal line 19 is further realized, before the pattern of the fourth conduction portion 192 is formed. A via hole is formed at a position corresponding to the second conductive portion 191 in the first insulating layer 15 and the second insulating layer 16. During the fabrication process, the vias at the locations of the first insulating layer 15 and the second insulating layer 16 corresponding to the first conductive portion 131 and the second conductive portion 191 may be simultaneously formed by the same etching process.
在一些实施例中,在第三导通部132和第四导通部192背离衬底基板10的一侧,还设有第三绝缘层17。该第三绝缘层17可以对第三导通部132和第四导通部192起到保护作用,并起到平坦化的作用。In some embodiments, a third insulating layer 17 is further disposed on a side of the third conductive portion 132 and the fourth conductive portion 192 away from the base substrate 10. The third insulating layer 17 can protect the third conductive portion 132 and the fourth conductive portion 192 and function as a flattening.
在制造过程中,在制作光敏器件层期间,以及在制作第二绝缘层16中的过孔时,需要采用刻蚀工艺。为了避免刻蚀工艺过程中使用的刻蚀液对光敏器件层12的表面造成损伤,如图1、图2和图3所示,根据本公开的实施例的感测基板还可以包括位于光敏器件层12背离衬底基板10一侧的保护层18。作为示例,保护层18的图形可以与光敏器件层12的图形一致。During the fabrication process, an etch process is required during the fabrication of the photosensor layer and during the fabrication of vias in the second insulating layer 16. In order to avoid damage to the surface of the photosensor layer 12 by the etching solution used in the etching process, as shown in FIG. 1 , FIG. 2 and FIG. 3 , the sensing substrate according to an embodiment of the present disclosure may further include a photosensor. The layer 12 faces away from the protective layer 18 on the side of the base substrate 10. As an example, the pattern of the protective layer 18 can conform to the pattern of the photosensor layer 12.
可选地,为了避免保护层18影响指纹识别部122检测指纹的检测精度和遮光部121检测触控位置的检测精度,上述保护层18可以采用透明的导电材料制作,例如,氧化铟锡(Indium tin oxide,ITO)等材料。Optionally, in order to prevent the protection layer 18 from affecting the detection accuracy of the fingerprint recognition portion 122 and the detection accuracy of the light shielding portion 121 detecting the touch position, the protective layer 18 may be made of a transparent conductive material, for example, indium tin oxide (Indium). Tin oxide, ITO) and other materials.
参照图1,图1以感测基板上的薄膜晶体管11为底栅型为例进行示意。遮光部121被设置为在衬底基板10上的正投影与有源层111在衬底基板10上的正投影重叠,且遮光部121位于薄膜晶体管11的有源层111背离栅极112的一侧,从而可以有效遮挡薄膜晶体管11的沟道区域,避免外界光线对薄膜晶体管11的开关特性造成影响。Referring to FIG. 1, FIG. 1 is exemplified by taking the thin film transistor 11 on the sensing substrate as a bottom gate type. The light shielding portion 121 is disposed such that the orthographic projection on the base substrate 10 overlaps with the orthographic projection of the active layer 111 on the base substrate 10, and the light shielding portion 121 is located at a side of the active layer 111 of the thin film transistor 11 facing away from the gate electrode 112. On the side, the channel region of the thin film transistor 11 can be effectively blocked to prevent external light from affecting the switching characteristics of the thin film transistor 11.
参照图4,本公开实施例提供了一种包括顶栅型薄膜晶体管11的感测基板。顶栅型薄膜晶体管11的栅极112位于有源层111背离衬底基板10的一侧,遮光部121同样设置在有源层111背离栅极112的一侧。对于顶栅型薄膜晶体管11而言,遮光部121可以遮挡背光源的光线,避免背光源的光线照射到有源层111时,对薄膜晶体管11的开关特性造成影响。需要说明的是,该感测基板中的其他结构与上述采用底栅薄膜晶体管的感测基板类似,在此不再赘述。Referring to FIG. 4, an embodiment of the present disclosure provides a sensing substrate including a top gate type thin film transistor 11. The gate 112 of the top gate thin film transistor 11 is located on the side of the active layer 111 facing away from the base substrate 10, and the light blocking portion 121 is also disposed on the side of the active layer 111 facing away from the gate 112. For the top gate thin film transistor 11, the light shielding portion 121 can block the light of the backlight and prevent the light of the backlight from being irradiated onto the active layer 111, thereby affecting the switching characteristics of the thin film transistor 11. It should be noted that other structures in the sensing substrate are similar to the sensing substrate using the bottom gate thin film transistor described above, and details are not described herein again.
在一些实施例中,在薄膜晶体管11为顶栅型薄膜晶体管的情况下,如图4所示,感测基板还可以包括位于指纹识别部122背离衬底基板10的一侧的保护层18。In some embodiments, in the case where the thin film transistor 11 is a top gate type thin film transistor, as shown in FIG. 4, the sensing substrate may further include a protective layer 18 on a side of the fingerprint identifying portion 122 facing away from the base substrate 10.
在一些实施例中,光敏器件层12的材料可以包括PIN型半导体材料。该PIN型半导体材料可以由非晶硅或多晶硅材料制作。In some embodiments, the material of the photosensor layer 12 can comprise a PIN-type semiconductor material. The PIN-type semiconductor material can be made of amorphous silicon or polycrystalline silicon material.
在本公开的实施例中,光敏器件层12的P极和N极可以根据实际需要来设置。例如,可以将光敏器件层12的靠近衬底基板10的一侧设置为N极,将远离衬底基板10的一侧设置为P极。此处只是举例说明,不对光敏器件层的具体实现方式进行限定。In an embodiment of the present disclosure, the P and N poles of the photosensor layer 12 can be set according to actual needs. For example, one side of the photosensor layer 12 close to the base substrate 10 may be set to an N pole, and a side away from the base substrate 10 may be set as a P pole. This is merely an example, and the specific implementation of the photosensor layer is not limited.
图5a和图5b为根据本公开的实施例的感测基板的平面结构示意图。以下结合图5a和图5b对本公开实施例中的指纹识别原理进行说明。5a and 5b are schematic diagrams of a planar structure of a sensing substrate in accordance with an embodiment of the present disclosure. The principle of fingerprint recognition in the embodiments of the present disclosure will be described below with reference to FIGS. 5a and 5b.
参照图5a和图5b,多个薄膜晶体管11的栅极112通过栅线21与栅极驱动电路22相连。多个薄膜晶体管11的输出端114通过数据线23与数据信号接收电路相连。在进行指纹检测时,栅极驱动电路22控制栅极112逐行打开薄膜晶体管11;数据信号处理电路24先向指纹识别部122输入一定的电压,以使指纹识别部122处于反偏状态,并检测各数据线23的电流大小;以及当有手指触摸时,由于手指的谷和脊反射的光强不一致,引起对应位置的数据线23的电流大小不一致,数据信号处理电路24可以根据数据线23上的电流大小来识别手指的谷和脊的位置,进而形成手指的指纹图像。Referring to FIGS. 5a and 5b, the gate electrode 112 of the plurality of thin film transistors 11 is connected to the gate driving circuit 22 through the gate line 21. The output terminal 114 of the plurality of thin film transistors 11 is connected to the data signal receiving circuit through the data line 23. When the fingerprint detection is performed, the gate driving circuit 22 controls the gate electrode 112 to open the thin film transistor 11 row by row; the data signal processing circuit 24 first inputs a certain voltage to the fingerprint recognition portion 122, so that the fingerprint recognition portion 122 is in a reverse bias state, and The magnitude of the current of each data line 23 is detected; and when there is a finger touch, since the light intensity reflected by the valley and the ridge of the finger is inconsistent, the magnitude of the current of the data line 23 at the corresponding position is inconsistent, and the data signal processing circuit 24 can be based on the data line 23 The magnitude of the current is used to identify the location of the valleys and ridges of the fingers, which in turn form a fingerprint image of the finger.
图5a中仅示出了4条栅线21和4条数据线23进行示意。应注意,图5a中省略号表示根据本公开的实施例的感测基板还可以包括更多条栅线21和更多条数据线23。在此不对栅线21和数据线23的条数进行限定。另外,图5b中V d表示参考信号线13输入的电压。 Only four gate lines 21 and four data lines 23 are shown in Fig. 5a for illustration. It should be noted that the ellipsis in FIG. 5a indicates that the sensing substrate according to an embodiment of the present disclosure may further include more gate lines 21 and more data lines 23. The number of gate lines 21 and data lines 23 is not limited here. In addition, V d in Fig. 5b indicates the voltage input to the reference signal line 13.
本公开的实施例还提供了一种使用上述感测基板进行指纹识别的检测方法。由于该检测方法的原理如上所述,在此不再赘述。Embodiments of the present disclosure also provide a detection method for fingerprint recognition using the above sensing substrate. Since the principle of the detection method is as described above, it will not be described here.
图6为使用根据本公开的实施例感测基板进行指纹识别的方法流程 图。如图6所示,该检测方法包括:在S301中,向感测基板上的薄膜晶体管的栅极输入开启信号;以及在S302中,检测薄膜晶体管的输出端的指纹识别信号,以根据指纹识别信号确定指纹图样。6 is a flow diagram of a method of sensing a substrate for fingerprinting using an embodiment in accordance with the present disclosure. As shown in FIG. 6, the detecting method includes: in S301, inputting an on signal to a gate of a thin film transistor on a sensing substrate; and in S302, detecting a fingerprint identification signal at an output end of the thin film transistor to identify a signal according to the fingerprint Determine the fingerprint pattern.
在使用根据本公开的实施例的感测基板进行指纹识别的检测方法中,由于手指谷和脊反射的光强不同,使得在对应位置处的指纹识别部中形成的光电流不同,因此可以通过向薄膜晶体管的栅极输入开启信号,例如,以逐行或逐列的方式输入开启信号,使薄膜晶体管的输入端和输出端逐行或逐列导通,进而可以通过检测各薄膜晶体管的输出端的指纹识别信号,来确定指纹图样。In the detecting method of performing fingerprint recognition using the sensing substrate according to the embodiment of the present disclosure, since the light intensity reflected by the finger valley and the ridge is different, the photocurrent formed in the fingerprint recognizing portion at the corresponding position is different, and thus can pass Inputting an enable signal to the gate of the thin film transistor, for example, inputting an enable signal in a row-by-row or column-by-column manner, so that the input terminal and the output terminal of the thin film transistor are turned on row by row or column by column, thereby detecting the output of each thin film transistor. The fingerprint identification signal of the end determines the fingerprint pattern.
应该说明的是,本公开的实施例提供的检测方法中的感测基板指的是光敏器件层包括遮光部和指纹识别部的感测基板。It should be noted that the sensing substrate in the detecting method provided by the embodiment of the present disclosure refers to a sensing substrate in which the photosensitive device layer includes a light shielding portion and a fingerprint recognition portion.
在一些实施例中,上述感测基板还可以实现触控检测。In some embodiments, the sensing substrate can also implement touch detection.
例如,触控检测方法可以包括检测薄膜晶体的输出端的触控检测信号,以根据触控检测信号确定触摸位置。将指纹识别部复用为触控电极。当手指触摸显示屏时,手指反射的光线会使指纹识别部形成光电流。由此,可以根据与指纹识别部电连接的薄膜晶体管的输出端的电流变化来确定触控位置。具体地,可以通过分时驱动的方式分别实现触控检测和指纹识别。在触控检测时间段,通过检测各薄膜晶体管的输出端的触控检测信号,根据触控检测信号确定触摸位置。For example, the touch detection method may include detecting a touch detection signal at an output end of the thin film crystal to determine a touch position according to the touch detection signal. The fingerprint recognition unit is multiplexed into a touch electrode. When the finger touches the display screen, the light reflected by the finger causes the fingerprint recognition portion to form a photocurrent. Thereby, the touch position can be determined based on the current change at the output end of the thin film transistor electrically connected to the fingerprint recognition portion. Specifically, the touch detection and the fingerprint recognition can be respectively implemented by means of time-sharing driving. During the touch detection period, the touch detection signal is detected at the output end of each thin film transistor, and the touch position is determined according to the touch detection signal.
例如,感测基板可以包括与薄膜晶体管的栅极同层设置的触控检测信号线,该触控检测信号线与对应的遮光部电连接,因此,触控检测方法可以包括检测触控检测信号线的触控检测信号,以根据触控检测信号确定触摸位置。For example, the sensing substrate may include a touch detection signal line disposed in the same layer as the gate of the thin film transistor, and the touch detection signal line is electrically connected to the corresponding light shielding portion. Therefore, the touch detection method may include detecting the touch detection signal. The touch detection signal of the line determines the touch position according to the touch detection signal.
具体地,由于与对应的遮光部电连接的各触控检测信号线,可以通过读取各触控检测信号线的电流来判断触控位置。如果某个位置的触控检测信号线的电流发生变化,则对应的遮光部所在的位置被触控。因此,可以通过指纹识别部实现指纹识别功能,通过遮光部实现触控检测功能。这里, 指纹识别和触控检测可以相互独立,不需要将指纹识别部复用为触控电极,由此,可以简化驱动时序。Specifically, the touch detection position can be determined by reading the current of each touch detection signal line due to each touch detection signal line electrically connected to the corresponding light shielding portion. If the current of the touch detection signal line changes at a certain position, the position of the corresponding light shielding portion is touched. Therefore, the fingerprint recognition function can be implemented by the fingerprint recognition unit, and the touch detection function can be implemented by the light shielding portion. Here, the fingerprint recognition and the touch detection can be independent of each other, and the fingerprint recognition unit does not need to be multiplexed into the touch electrodes, thereby simplifying the driving timing.
容易理解,为了实现指纹信息的验证或触控位置的计算,将上述的检测信号线连接到对应的逻辑运算电路以基于检测到的信号验证指纹信息或计算触控的位置。所称的逻辑运算电路可以被设计为执行上述功能的集成电路(IC),也可以采用通用处理器,例如中央处理器(CPU)、现场可编程逻辑阵列(FPGA)、专用集成电路(ASIC)等,还可以在应用于显示面板等器件时与其共用控制器。It is easy to understand that in order to realize the verification of the fingerprint information or the calculation of the touch position, the above-mentioned detection signal line is connected to the corresponding logic operation circuit to verify the fingerprint information or calculate the position of the touch based on the detected signal. The so-called logic operation circuit can be designed as an integrated circuit (IC) that performs the above functions, or a general-purpose processor such as a central processing unit (CPU), a field programmable logic array (FPGA), an application specific integrated circuit (ASIC). Etc., it is also possible to share the controller with a device such as a display panel.
本公开的实施例还提供了一种感测板,包括上述实施例的感测基板。该感测板例如可以用作指纹锁上的指纹感测部件、数位板上的触控感测部件、考勤机上的指纹或掌纹感测部件等。Embodiments of the present disclosure also provide a sensing board including the sensing substrate of the above embodiment. The sensing board can be used, for example, as a fingerprint sensing component on a fingerprint lock, a touch sensing component on a digital tablet, a fingerprint on a time attendance machine, or a palm print sensing component.
本公开的实施例还提供了一种显示面板。该显示面板包括上述实施例感测基板。该显示面板的类型不受特别限制,例如可以是LCD显示面板、OLED显示面板、QLED显示面板、Micro LED显示面板等。Embodiments of the present disclosure also provide a display panel. The display panel includes the sensing substrate of the above embodiment. The type of the display panel is not particularly limited, and may be, for example, an LCD display panel, an OLED display panel, a QLED display panel, a Micro LED display panel, or the like.
例如,感测基板可以与显示面板的阵列基板共用衬底基板以简化设计,从而将感测基板上的薄膜晶体管和光敏器件层等作为整体的感测器件与显示基板上的像素的子像素(例如R、G、B子像素)共同组成一个像素单元结构。For example, the sensing substrate may share the substrate with the array substrate of the display panel to simplify the design, thereby sensing the thin film transistor and the photosensor layer on the substrate as a whole of the sensing device and the sub-pixels of the pixels on the display substrate ( For example, R, G, B sub-pixels together form a pixel unit structure.
本公开的实施例还提供了一种显示装置。该显示装置包括上述显示面板。该显示装置可以应用于手机、平板电脑、电视机、显示器、笔记本电脑、数码相框、导航仪等任何具有显示功能的产品或部件。Embodiments of the present disclosure also provide a display device. The display device includes the above display panel. The display device can be applied to any product or component having a display function, such as a mobile phone, a tablet computer, a television, a display, a notebook computer, a digital photo frame, a navigator, and the like.
显然,本领域的技术人员可以对本公开进行各种改动和变型而不脱离本公开的精神和范围。这样,倘若本公开的这些修改和变型属于本公开权利要求及其等同技术的范围之内,则本公开也意图包含这些改动和变型在内。It will be apparent to those skilled in the art that various changes and modifications can be made in the present disclosure without departing from the spirit and scope of the disclosure. Thus, it is intended that the present invention cover the modifications and the modifications

Claims (17)

  1. 一种感测基板,包括:A sensing substrate includes:
    衬底基板;以及Substrate substrate;
    位于所述衬底基板上的薄膜晶体管和光敏器件层,a thin film transistor and a photosensor layer on the base substrate,
    其中,所述光敏器件层包括遮光部,所述遮光部在所述衬底基板上的正投影与所述薄膜晶体管的有源层在所述衬底基板上的正投影至少部分重叠,并且所述遮光部位于所述薄膜晶体管的所述有源层背离所述薄膜晶体管的栅极的一侧。Wherein the photosensor layer includes a light shielding portion, an orthographic projection of the light shielding portion on the substrate substrate and an orthographic projection of an active layer of the thin film transistor on the substrate substrate at least partially overlap, and The light shielding portion is located on a side of the thin film transistor from which the active layer faces away from the gate of the thin film transistor.
  2. 根据权利要求1所述的感测基板,其中,所述光敏器件层还包括指纹识别部,所述指纹识别部在所述衬底基板上的正投影与所述有源层在所述衬底基板上的正投影不重叠,The sensing substrate according to claim 1, wherein the photosensitive device layer further comprises a fingerprint recognition portion, an orthographic projection of the fingerprint recognition portion on the base substrate and the active layer on the substrate The orthographic projections on the substrate do not overlap,
    其中,所述指纹识别部与所述薄膜晶体管的第一极和第二极中的一者电连接。The fingerprint recognition unit is electrically connected to one of the first pole and the second pole of the thin film transistor.
  3. 根据权利要求2所述的感测基板,其中,所述栅极位于所述衬底基板与所述有源层之间,以及The sensing substrate of claim 2, wherein the gate is between the substrate substrate and the active layer, and
    所述指纹识别部与所述遮光部同层设置,并且所述指纹识别部与所述遮光部彼此间隔。The fingerprint recognition unit is disposed in the same layer as the light shielding portion, and the fingerprint recognition portion and the light shielding portion are spaced apart from each other.
  4. 根据权利要求3所述的感测基板,其中,所述遮光部作为触控感测部,The sensing substrate according to claim 3, wherein the light shielding portion functions as a touch sensing portion.
    所述感测基板还包括与所述栅极同层设置的触控检测信号线,所述触控检测信号线与对应的所述遮光部电连接。The sensing substrate further includes a touch detection signal line disposed in the same layer as the gate, and the touch detection signal line is electrically connected to the corresponding light shielding portion.
  5. 根据权利要求4所述的感测基板,其中,所述触控检测信号线与所述遮光部一一对应。The sensing substrate according to claim 4, wherein the touch detection signal lines are in one-to-one correspondence with the light shielding portions.
  6. 根据权利要求4所述的感测基板,其中,每条所述触控检测信号线与多个所述遮光部对应。The sensing substrate according to claim 4, wherein each of the touch detection signal lines corresponds to a plurality of the light shielding portions.
  7. 根据权利要求4所述的感测基板,还包括与所述栅极同层设置的至少一个参考信号线,The sensing substrate of claim 4, further comprising at least one reference signal line disposed in the same layer as the gate,
    所述至少一个参考信号线与所述遮光部和所述指纹识别部中的至少一者电连接以提供相应的偏置电压。The at least one reference signal line is electrically coupled to at least one of the light shielding portion and the fingerprint recognition portion to provide a corresponding bias voltage.
  8. 根据权利要求7所述的感测基板,其中,通过同一个所述参考信号线为所述遮光部和所述指纹识别部提供所述偏置电压。The sensing substrate according to claim 7, wherein the bias voltage is supplied to the light shielding portion and the fingerprint recognition portion through the same one of the reference signal lines.
  9. 根据权利要求7所述的感测基板,还包括:The sensing substrate of claim 7, further comprising:
    位于所述有源层和所述栅极之间的栅极绝缘层;a gate insulating layer between the active layer and the gate;
    位于所述有源层与所述光敏器件层之间的第一绝缘层;以及a first insulating layer between the active layer and the photosensor layer;
    位于所述光敏器件层背离所述栅极的一侧的第二绝缘层。a second insulating layer on a side of the photosensor layer that faces away from the gate.
  10. 根据权利要求9所述的感测基板,还包括:与所述薄膜晶体管的所述第一极和第二极中的一者同层设置的第一导通部和第二导通部;以及The sensing substrate of claim 9, further comprising: a first conductive portion and a second conductive portion disposed in the same layer as one of the first and second poles of the thin film transistor;
    位于所述第二绝缘层背离所述衬底基板一侧的同层设置的第三导通部和第四导通部,a third conductive portion and a fourth conductive portion disposed on the same side of the second insulating layer facing away from the substrate substrate,
    其中,所述至少一个参考信号线通过所述第一导通部和所述第三导通部与所述遮光部和所述指纹识别部中的至少一者电连接,The at least one reference signal line is electrically connected to at least one of the light shielding portion and the fingerprint recognition portion through the first conductive portion and the third conductive portion.
    所述触控检测信号线通过所述第二导通部和所述第四导通部与所述遮光部电连接。The touch detection signal line is electrically connected to the light shielding portion through the second conduction portion and the fourth conduction portion.
  11. 根据权利要求3至10中任一项所述的感测基板,还包括位于所述光敏器件层背离所述衬底基板一侧的保护层。The sensing substrate according to any one of claims 3 to 10, further comprising a protective layer on a side of the photosensitive device layer facing away from the substrate substrate.
  12. 根据权利要求2所述的感测基板,其中,所述栅极位于所述有源层远离所述衬底基板的一侧。The sensing substrate of claim 2, wherein the gate is located on a side of the active layer away from the substrate.
  13. 根据权利要求12所述的感测基板,还包括位于所述指纹识别部背离所述衬底基板一侧的保护层。The sensing substrate according to claim 12, further comprising a protective layer on a side of the fingerprint identifying portion facing away from the substrate.
  14. 根据权利要求1所述的感测基板,其中,所述光敏器件层的材料包括PIN型半导体材料。The sensing substrate of claim 1 wherein the material of the photosensor layer comprises a PIN-type semiconductor material.
  15. 一种感测板,包括根据权利要求1至14中任一项所述的感测基板。A sensing plate comprising the sensing substrate according to any one of claims 1 to 14.
  16. 一种显示面板,包括根据权利要求1至14中任一项所述的感测基板。A display panel comprising the sensing substrate according to any one of claims 1 to 14.
  17. 一种显示装置,包括根据权利要求16所述的显示面板。A display device comprising the display panel according to claim 16.
PCT/CN2018/092817 2017-09-04 2018-06-26 A sensing substrate and sensing panel, display panel and display device WO2019041991A1 (en)

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