WO2019038861A1

WO2019038861A1 - Vapor deposition mask, display panel production method, and display panel

Info

Publication number: WO2019038861A1
Application number: PCT/JP2017/030151
Authority: WO
Inventors: 山渕　浩二; 精一三ツ井
Original assignee: シャープ株式会社
Priority date: 2017-08-23
Filing date: 2017-08-23
Publication date: 2019-02-28
Also published as: JPWO2019038861A1; CN111051559B; CN111051559A; JP6963014B2

Abstract

The present invention is provided with: an external shape-specifying mask (55) in which external shape openings (53) that have a shape corresponding to the irregularly shaped portion of a display region are formed; and a mask sheet (15) in which a pattern of vapor deposition holes (H) for differential coating is formed. First vapor deposition holes (H1) of the vapor deposition holes (H) correspond to pixels (pix) and second vapor deposition holes (H2) of the vapor deposition holes (H) overlap the external shape-specifying mask (55). As a result, it is possible to form a patterned vapor deposition layer with good precision using a mask sheet that is not irregularly shaped even when the external shape of the display region is irregularly shaped.

Description

Deposition mask, method of manufacturing display panel, and display panel

The present invention relates to a deposition mask, a display panel, and a method of manufacturing the display panel.

As described in Patent Document 1, in the case of forming a light emitting layer in each pixel in an organic EL display device, a vapor deposition mask is used.

As shown in (a) of FIG. 20, a plurality of cover sheets 112 and a plurality of howling sheets 113, which are respectively sheet-like, are orthogonal to each other in a grid shape on a frame-shaped mask frame 111 having a frame opening 111a. Attach as you do.

When attaching the plurality of cover sheets 112 and the plurality of howling sheets 113 to the mask frame 111, the vicinity of the both ends is welded to the mask frame 111 while stretching (pulling) both ends outward.

Thereby, the plurality of cover sheets 112 are attached to the mask frame 111 so as to be parallel to a short direction (left and right direction on the paper surface) orthogonal to the longitudinal direction (vertical direction on the paper surface) of the mask frame 111. Further, a plurality of howling sheets 113 are attached to the mask frame 111 so as to be parallel to the longitudinal direction of the mask frame 111.

Next, the alignment sheet 114 on which the alignment mark is formed is attached to the mask frame 111 along the short side of the frame opening 111a so that the alignment mark is at a predetermined position.

Then, a plurality of strip-shaped mask sheets 115 are welded to the mask frame 111 in the vicinity of both ends while stretching (pulling) both ends outward with reference to the alignment mark.

On the mask sheet 115, effective portions 115a having a shape corresponding to the display area of the deposition target substrate are formed side by side. In each effective portion 115a, vapor deposition holes, which are through holes for vapor deposition of the light emitting layer on the pixels of each vapor deposition substrate, are formed in the same pattern as the pixels for which the light emitting layer is to be vapor deposited.

As shown in (b) of FIG. 20, the plurality of mask sheets 115 are stretched so that all the openings divided by the plurality of cover sheets 112 and the plurality of howling sheets 113 include the effective portion 115a. While welding. Then, unnecessary portions outside the welded portions of the plurality of mask sheets 115 are cut. Thus, the deposition mask 110 is completed.

When vapor deposition is performed using the vapor deposition mask 110, vapor deposition particles vaporized or sublimated from the vapor deposition source pass through the vapor deposition holes of the effective portion 115a and adhere to the pixels of the vapor deposition substrate. The vapor deposition particles attached to the pixel become a light emitting layer. For this reason, the effective portion 115a has a shape corresponding to the display area of the deposition target substrate, and is a pattern in an area smaller than the opening divided by the plurality of cover sheets 112 and the plurality of howling sheets 113 Is formed. The position at which the light emitting layer is deposited on the deposition target substrate is determined by the position of the opening pattern provided in each deposition hole on the deposition mask, and the outer shape of the display region on the deposition target substrate on which the light emitting layer is deposited is the effective portion 115a. It depends on the appearance of

Therefore, the mask sheet 115 on which the effective portion 115a is formed needs to be attached to the mask frame 111 with high positional accuracy.

According to the mask sheet 115, since the effective portion 115a is rectangular, even when an outward force is applied to the end of the mask sheet 115 when attaching the mask sheet 115 to the mask frame 111, it is applied around the effective portion 115a. The stress can be easily made uniform, and the mask sheet 115 can be attached to the mask frame 111 with a relatively high positional accuracy.

Japanese Patent Publication "JP-A-2012-132096"

Heretofore, the outline of the display area of the organic EL display device has been square or rectangular for ease of fabrication.

In recent years, a flexible (foldable) organic EL display device has been developed by using a film instead of glass as a support. Particularly in such a flexible organic EL display device, since the support is not glass but a film, it is easy to process and can be cut into various shapes.

Then, for example, in order to differentiate the design in a smart phone or other mobile phone terminal etc., for example, a round is provided at each corner, or a camera and a speaker are arranged, for example. For example, it has been required to have a shape that is not square or rectangular, such as providing a notch (dent).

If the light emitting layer is present in such an irregularly shaped cut portion, some light emitting layers are not sealed but exposed in the subsequent sealing step, so that the reliability can not be ensured. Therefore, in the deposition process of depositing the light emitting layer, it is necessary to perform masking so that the light emitting layer is not deposited on the irregular shaped cut portion.

Further, as shown in FIGS. 21 and 22 described later, for example, the external shape of the effective portion 115a in the mask sheet 115 shown in FIG. 20 is made the same shape as the irregular cut portion in accordance with the shape of the irregular cut portion of the display area. As a result, when attaching the mask sheet 115 to the mask frame 111, the positional accuracy of the vapor deposition holes is degraded. Furthermore, in recent years, as the definition of pixels has been increasingly demanded, it has been increasingly demanded that the mask sheet 115 be attached to the mask frame 111 while the positional accuracy of the deposition holes is prevented from being lowered.

The present invention has been made in view of the above-described conventional problems, and an object thereof is to accurately pattern a deposited layer even if the outer shape of the display area is an irregular shape other than a square or a rectangle. It is possible to provide a possible deposition mask.

In order to solve the above problems, the deposition mask according to an aspect of the present invention is a deposition mask on an active area of a deposition target substrate in which pixels contributing to display arranged in a matrix in a display area are arranged in a matrix A vapor deposition mask for forming a pattern on a layer, wherein an outer opening having a shape corresponding to at least a part of the outer shape of the display area is formed in a first sheet shape corresponding to the arrangement pattern of the display area. A plurality of openings formed in the second sheet-like mask, the mask comprising: a mask; and a second sheet-like mask in which an effective portion having a plurality of openings is formed, the plurality of openings being formed in the second sheet-like mask; And the first openings are formed in an array corresponding to the pixels, and the second openings have the same pitch and the same shape as the first openings, and the first sheet includes Mask and heavy And wherein the are.

In order to solve the above-mentioned subject, the display panel concerning one mode of the present invention encloses the perimeter of the display field which has a notch in at least one copy of the outline, and the display area concerned, and is the frame field which has a notch. A flexible display panel including the vapor deposition layer formed in a matrix in the display area, and the vapor deposition formed in the display area around the cutout portion of the frame area. It is characterized by having a first vapor deposition layer which has the same shape as the layer, and a second vapor deposition layer which is a shape in which a part of the periphery is cut out in the shape of the vapor deposition layer formed in the display area.

According to one aspect of the present invention, even when the outer shape of the display area is a square or an irregular shape other than rectangular, it is possible to accurately pattern the deposited layer.

(A) is a perspective view showing the external appearance of the electronic device in which the organic electroluminescence display which concerns on Embodiment 1 of this invention was used, (b) is sectional drawing of (a). It is a figure showing the manufacturing process of the organic electroluminescent display panel which concerns on Embodiment 1 of this invention. It is a top view of the substrate of the organic EL display panel concerning Embodiment 1 of the present invention. It is sectional drawing of the organic electroluminescent display panel formation area of the board | substrate of FIG. It is a schematic diagram which shows the mode of the vapor deposition process at the time of forming the light emitting layer of the organic electroluminescence display which concerns on Embodiment 1 of this invention. It is a figure showing the vapor deposition process of the light emitting layer in the organic electroluminescence display which concerns on Embodiment 1 of this invention. The state which is producing the vapor deposition mask used at the vapor deposition process of the light emitting layer in Embodiment 1 of this invention is represented, (a) is a top view of a mask frame, (b) is attaching a cover sheet to a mask frame It is a figure showing a mode, (c) is a figure showing a mode that a howling sheet is attached to a mask frame, (d) is a figure showing a mode that an alignment sheet is attached to a mask frame, (e) These are figures showing a mode that a mask sheet | seat is attached to a mask frame, and (f) is a top view of the produced vapor deposition mask. It is the figure which looked at the attachment position of the cover sheet 12 in a mask frame in the direction of arrow D1 in (b) of FIG. It is a top view showing the composition of the howling sheet concerning Embodiment 1 of the present invention. It is the figure which looked at the attachment position of the howling sheet | seat 13 in a mask flame | frame in the direction of arrow D 2 in (c) of FIG. It is a figure showing the structure of the mask sheet of the vapor deposition mask in Embodiment 1 of this invention, (a) is a top view of the mask sheet 15, (b) is an enlarged view of the effective part shown to (a), (C) is a cross-sectional view taken along the line BB shown in (b), and (d) is a cross-sectional view taken along the line CC shown in (b). It is an enlarged view of the vapor deposition mask which concerns on Embodiment 1 of this invention. It is sectional drawing of the vapor deposition mask at the time of vapor-depositing in the vapor deposition process which concerns on Embodiment 1 of this invention, and a board | substrate. Fig. 7 illustrates a state in which a deposition mask used in a deposition process of a light emitting layer according to a second embodiment of the present invention is manufactured, Fig. 7A illustrates a manner of attaching a howling sheet to a mask frame, Fig. It is a figure showing a mode that a cover sheet is attached to a mask frame, (c) is a figure showing a mode that a mask sheet is attached to a mask frame, (d) is a top view of the produced vapor deposition mask . It is a top view showing the composition of the cover sheet concerning Embodiment 2 of the present invention. It is an enlarged view of the vapor deposition mask which concerns on Embodiment 2 of this invention. It is sectional drawing of a vapor deposition mask at the time of vapor deposition in a vapor deposition process in Embodiment 2 of this invention, and a board | substrate. (A) is a top view showing a mode that the open mask is attached to a mask frame, (b) is sectional drawing of the mask frame vicinity of (a). (A) is a top view showing a mode that a mask sheet | seat is attached to a mask frame, (b) is sectional drawing of the mask frame vicinity of (a). FIG. 6A shows a state of producing a conventional deposition mask, FIG. 4A is a view showing a mask sheet attached to a mask frame, and FIG. 4B is a plan view showing the produced deposition mask. It is a top view showing the composition of the mask sheet concerning the comparative example which changed the external shape of the effective part. It is a top view showing the composition of the modification of the mask sheet concerning the comparative example which made the external shape of the effective part different form. FIG. 7 is an enlarged view of a part of the active area of the first embodiment. FIG. 1 is a cross-sectional view illustrating a configuration of a vapor deposition apparatus having a magnet according to Embodiment 1. 7 is an enlarged view of a vapor deposition mask according to a modification of Embodiment 1. FIG. FIG. 16 is a diagram illustrating a configuration in the vicinity of a notch of a display panel according to a modification of the first embodiment.

Embodiment 1
A first embodiment of the present invention will be described based on FIGS. 1 to 13.

(Configuration of Electronic Device 30)
(A) of FIG. 1 is a perspective view showing the external appearance of the electronic device 30 in which the organic EL display device according to Embodiment 1 of the present invention is used, and (b) is a cross-sectional view of (a). A smartphone can be given as an example of the electronic device 30. However, the electronic device 30 is not limited to a smart phone, and is incorporated with an organic EL display panel (a display panel of a different shape) such as another portable information terminal such as a portable telephone terminal or a tablet, a television receiver, a personal computer, etc. It may be an electronic device.

The electronic device 30 has a housing 32. And the electronic device 30 has the touch panel 40, the speaker 34, the camera 36, and the microphone which are not shown in figure each provided in the housing | casing 32. As shown in FIG. Further, the electronic device 30 may have various buttons such as a power button for switching on and off of the power.

The touch panel 40 has a touch sensor 41 and an organic EL display panel 42. The organic EL display panel 42 has an irregular display area 43 for displaying various images. The organic EL display panel 42 has a display area 43 and a frame area surrounding the periphery of the display area 43. An organic EL display device is configured by attaching various components to the organic EL display panel 42.

The touch sensor 41 is provided on the organic EL display panel 42. The touch sensor 41 is an input device that receives an input of a coordinate position on the organic EL display panel 42 from the user by detecting an input operation by contact or proximity of a finger, a stylus pen or the like. The touch sensor 41 may be integrally formed with the organic EL display panel 42, or may be formed as a configuration different from the organic EL display panel 42. The touch sensor 41 may be a capacitive type, an infrared type, or any other type that can receive an input operation from the user.

The display area 43 of the organic EL display panel 42 has an outer shape which is not rectangular or square, but a shape other than rectangular or square.

In the deformed shape, at least a part of the edge (side or corner) when the outer shape of the organic EL display panel is rectangular or square is inside (from the edge toward the center of the rectangle or square) or outside (rectangular or square) It is a shape having a deformed portion projecting in a direction away from the central portion). That is, when the outer shape of the organic EL display panel is rectangular or square, the irregularly shaped portion is a portion that does not overlap with the edge of the rectangular or square organic EL display panel.

In FIG. 1, in the display area 43 of the organic EL display panel 42, for example, four corners 43a to 43d have a shape (arc shape) having a so-called round shape which is not a right angle but is curved. Furthermore, the display area 43 of the organic EL display panel 42 has, for example, a shape having a notch 43 d recessed to be convex toward the central portion of the display area 43 from the edge on at least one of four sides. is there. The notch 43d has, for example, an arc shape. The frame area in the organic EL display panel 42 is narrow in width and has an outer shape substantially the same as the outer shape of the display area 43.

Further, as shown in (b) of FIG. 1, in the present embodiment, in the display area 43 of the organic EL display panel 42, the cross section in the vicinity of both long sides is curved.

The camera 36 and the speaker 34 are disposed in an area surrounded by the notch 43 d in the housing 32.

The outer shape of the organic EL display panel 42 is an example, and it may be another different shape. Hereinafter, a method of manufacturing the organic EL display panel 42 whose outer shape is different will be described.

(Outline of manufacturing method of organic EL display panel)
FIG. 2 is a view showing a manufacturing process of the organic EL display panel according to Embodiment 1 of the present invention. FIG. 3 is a plan view of the substrate 1 of the organic EL display panel according to Embodiment 1 of the present invention. FIG. 4 is a cross-sectional view of the organic EL display panel formation region of the substrate of FIG. FIG. 3 shows a configuration in which the organic EL display panel is chamfered from one mother glass. The number of the chamfering of the organic EL display panel from one mother glass is not limited to 18, and may be 17 or less or 19 or more.

Eighteen organic EL display panel forming regions 9 are arranged on the substrate 1. The organic EL display panel forming area 9 is an area to be an organic EL display panel after being separated into pieces by being cut out from a mother glass.

The substrate 1 has a TFT substrate (substrate to be evaporated) 2, an active region 3, a frame-like bank 4 and a sealing layer 5.

The active area 3 is an area in which, for example, respective pixels of RGB are formed in a matrix. In the organic EL display panel formation area 9, the area where the active area 3 is formed is the display area 43, and in the organic EL display panel formation area 9, an area around the active area 3 is the frame area 44. . In FIG. 3, the frame area 44 is an area outside the area (active area 3) indicated by the broken line in the organic EL display panel formation area 9.

FIG. 23 is an enlarged view of a part of the display area 43 according to the first embodiment. In the display area 43, pixels pix contributing to the display of an image are arranged in a matrix. A light emitting layer 80 is formed in the pixel pix.

As an example, in FIG. 23, a red pixel Rpix in which a red light emitting layer 80R that emits red light is formed, a green pixel Gpix having a green light emitting layer 80G that emits green light, and a blue light emitting layer 80B that emits blue light And blue pixels Bpix having a .beta. However, the pixel arrangement is not particularly limited to the pen tile arrangement, and may be another arrangement such as a stripe arrangement.

The shape of the light emitting layer 80 is the shape of the opening of the pixel bank in which the light emitting layer 80 is formed.

As shown in FIGS. 2 to 4, first, the TFT substrate 2 is manufactured in the TFT process S11. The TFT substrate 2 has a mother glass on which TFTs (transistors, drive elements), gate lines and source lines, and various other lines included in the pixel circuits disposed in each pixel are formed by a known method. A protective film, an interlayer insulating film (planarizing film) and the like, and further on the inorganic insulating film, a reflective electrode layer in contact with the anode, a pixel bank layer for defining an ITO layer and a light emitting region It is produced by being formed.

Thus, the light emitting region shown in FIG. 23 is formed in the active region 3.

The passivation film prevents the peeling of the metal film in the TFT and protects the TFT. The passivation film is formed on the mother glass or through another layer and covers the TFT. The passivation film is an inorganic insulating film made of silicon nitride, silicon oxide or the like.

The interlayer insulating film planarizes the unevenness on the passivation film. The interlayer insulating film is formed on the passivation film. The interlayer insulating film is an organic insulating film made of a photosensitive resin such as acrylic or polyimide.

Next, in the organic EL step S12, an organic EL layer is formed on the reflective electrode layer in each pixel of the TFT substrate 2 (that is, in the opening of the pixel bank formed in the TFT step S11). The organic EL layer includes a light emitting layer, a hole transport layer and other functional layers. The light emitting layer emits light of different colors such as red, green or blue for each pixel. At least one of the light emitting layer and the hole transporting layer (hereinafter, may be referred to as a light emitting layer or the like) is a predetermined position of each pixel by vapor deposition using the vapor deposition mask according to the present embodiment in vacuum in the vapor deposition process. Is formed.

A deposition mask used in a deposition process for forming a deposition layer to be deposited for each pixel, such as a light emitting layer and a hole transport layer, is prepared in advance by a production process S20 of a deposition mask before the deposition process. In addition, the detail of preparation process S20 of a vapor deposition mask is mentioned later. The layer formed using this vapor deposition mask is not limited to the light emitting layer and the hole transport layer, and may be a layer formed for each pixel (that is, in the opening of the pixel bank).

Then, a transparent electrode facing the reflective electrode through the organic EL layer is formed to cover the organic EL layer. Further, when the active area 3 is formed, a frame-like bank 4 surrounding the active area 3 in a frame shape is also formed on the TFT substrate 2. The frame-like bank 4 is made of a photosensitive resin such as acrylic or polyimide.

Then, in the sealing step S13, the sealing layer 5 is formed. The sealing layer 5 may have, for example, a three-layer structure in which an inorganic film 6, an organic film 7, and an inorganic film 8 are stacked in this order. Since the frame-like bank 4 is formed, the film thickness of the organic film 7 can be thickened to, for example, 1.0 μm or more.

After forming the sealing layer 5, a flexible step S14 may be provided. In the flexible step S14, the glass of the substrate is peeled off and a film or the like to be a support is attached.

Then, next, in the singulation step S15, each organic EL display panel formation region 9 is cut out. Thereby, each organic EL display panel formation area 9 is singulated. Thereby, a flexible display panel (organic EL display panel) having a different shape is formed.

Next, in the mounting step S16, a member such as a driver is mounted on each of the separated organic EL display panel formation regions 9. Thus, the organic EL display device is completed.

In the present embodiment, since the display area 43 is, for example, a different shape that is a shape other than a rectangle or a square, the outer shape of the display panel is also a different shape in accordance with the shape of the display region 43.

Here, conventionally, in order to prevent the pixels outside the display area from contributing to the display of the image, pixels outside the display area are not provided with mask openings (vapor deposition holes) corresponding to the pixels outside the display area. It was necessary to make the structure of the mask sheet different.

On the other hand, according to the present embodiment, since the second deposition holes H2 in the mask sheet 15 corresponding to the pixels outside the display area 43 overlap with the outline defining mask 55, pixels outside the display area by the outline defining mask 55 The deposition of the deposited layer is shielded. For this reason, the deposition layer deposited for every pixel, such as a light emitting layer and a hole transport layer, is not formed in the pixels outside the display area, and a reliable sealing structure can be formed.

As described above, the deposition mask 10 blocks the deposition of the deposition layer on the pixels outside the display area, so the pixels outside the display area do not contribute to the display. For this reason, in the mask sheet 15, it is possible to provide a highly accurate mask opening which is not influenced by the outer shape of the display area.

Thus, even if the display area 43 is provided with the notches 43e, the area outside the display area 43 and in the area surrounded by the notches 43e can be displayed on the mask sheet 15 within the display area 43. A mask aperture of the same structure as the pixel can be formed. As a result, even if it has the notch 43e, it is possible to manufacture a display panel in which a deposition layer deposited for each pixel such as a light emitting layer and a hole transport layer is formed in each pixel with high definition.

FIG. 5 shows a state of a vapor deposition process when forming a light emitting layer and the like (vapor deposited layer vapor deposited for each pixel such as a light emitting layer and a hole transport layer) of the organic EL display device according to Embodiment 1 of the present invention. It is a schematic diagram.

In the deposition step of depositing the light emitting layer and the like, a deposition mask 10 provided with a mask sheet 15 having a plurality of through holes is adhered to the TFT substrate 2 and deposition particles Z evaporated by a deposition source 70 under vacuum (for example, The organic light emitting material is deposited on the pixels of the TFT substrate 2 through the mask sheet 15. Thereby, a vapor deposition pattern of a pattern corresponding to the through hole of the mask sheet 15 is formed on the TFT substrate 2.

Here, the display area 43 (see FIG. 1, FIG. 3 and FIG. 4) is a variant whose outer shape is a shape other than a rectangle or a square. For example, in the display area 43, the four corners 43a to 43d are not right angles but have roundness, and at least one of the four sides has a notch 43d recessed from the edge toward the central portion of the display area. It is atypical. For this reason, a deposition pattern of a different shape in accordance with the shape of the display area 43 is also formed on the deposition mask used in the deposition step.

(Evaporation mask)
Next, a manufacturing process S20 of a vapor deposition mask used in the vapor deposition process will be described. FIG. 6 is a view showing a deposition process of a light emitting layer in the organic EL display panel according to Embodiment 1 of the present invention. FIG. 7 is a view showing a state in which the vapor deposition mask according to Embodiment 1 of the present invention is manufactured.

First, as shown in step Sa of FIG. 6 and (a) and (b) of FIG. 7, a plurality of cover sheets (first processing) are formed on a frame-shaped mask frame 11 having a frame opening 11 a in a framed area. Attach the sheet mask 12 (cover sheet attaching process).

For the mask frame 11, for example, an invar material or the like having a thickness of 20 mm to 30 mm, which has very little thermal expansion, is used as a base material. It is sufficiently thick compared to the mask sheet, and has high rigidity so that sufficient accuracy can be ensured even when the mask sheet is stretched and welded.

The cover sheet 12 plays a role of filling a gap between the mask sheets to be attached to the mask frame 11 later and closing a dummy pattern formed on the mask sheet. In the present embodiment, the cover sheet 12 is not a sheet for determining the outer shape of the display area, and is disposed outside the effective portion (details will be described later) of the mask sheet.

The cover sheet 12 is made of, for example, an invar material having a thickness of 30 μm to 50 μm as a base material. In the present embodiment, since the gap between the effective areas of the panel (display area 43 (see FIG. 3)) is narrow, the width of the cover sheet is, for example, about 2 mm to 3 mm so that the effective parts of the mask sheet are not shaded. . However, if the spacing between the active areas of the panels is large, the width of the cover sheet may be larger.

The cover sheet 12 has an elongated shape and linearly extends from one end to the other end.

When attaching the cover sheet 12 to the mask frame 11, as shown by arrow F1 in (b) of FIG. 7, tension is applied by applying force to the both ends of the cover sheet 12 in the outward direction (direction away from each other). Both ends of the cover sheet 12 are welded to predetermined positions of the mask frame 11 while (pulling). And the unnecessary part outside the welded part in the cover sheet 12 is cut. Thus, each cover sheet 12 is attached to a predetermined position of the mask frame 11. In the present embodiment, each cover sheet 12 is attached to the mask frame 11 so as to be parallel to the short side direction of the mask frame 11. The cover sheets 12 are attached to the mask frame 11 so as to be parallel to one another along the long sides of the mask frame 11.

8 is a view of the mounting position of the cover sheet 12 in the mask frame 11 (area AR1 shown in FIG. 7B) in the direction of the arrow D1 in FIG. 7B. An arrow D1 in (b) of FIG. 7 represents a direction in which the attachment position of the cover sheet 12 in the mask frame 11 is viewed from the outside to the inside in a direction parallel to the short side of the mask frame 11.

As shown in FIG. 8, grooves 11 b are formed at predetermined positions on the mask frame 11 to which the cover sheet 12 is attached. The cover sheet 12 is attached to a predetermined position of the mask frame 11 by being fitted into grooves 11 b formed in the mask frame 11 at both ends.

Next, as shown in step Sb of FIG. 6 and (c) of FIG. 7, the howling sheet (first sheet mask) 13 (also referred to as a support sheet) is attached to the mask frame 11 to which the cover sheet 12 is attached. (Howling sheet attachment process).

The howling sheet 13 normally plays a role of supporting the mask sheet to be attached later to the mask frame 11 so as not to slacken or blocking a dummy pattern formed on the mask sheet. However, the howling sheet 13 in the present embodiment is used as a mask sheet for determining the outer shape of the display area in the organic EL display panel.

For the howling sheet 13, for example, an invar material with a thickness of 30 μm to 100 μm is used as a base material. The width of the howling sheet 13 is, for example, about 8 mm to 10 mm, and is determined by the layout on the substrate on which the panel is disposed.

Normally, in a portrait-shaped display panel, the width of the howling sheet is wider than that of the cover sheet because the terminals are masked by the howling sheet, but the howling sheet is the display area of the display panel (ie, the mask sheet Is placed at a position not overlapping the However, in the present embodiment, the howling sheet 13 is disposed at a position overlapping the effective portion of the mask sheet 15 so that the outer shape (particularly, an irregular shape) of the display area of the display panel is formed by the howling sheet 13.

FIG. 9 is a plan view showing the configuration of the howling sheet according to Embodiment 1 of the present invention. As shown in FIG. 9, the howling sheet 13 is provided with irregularities and the like including the shape of a deformed portion of the outer diameter shape of the display area from one end to the other end. The howling sheet 13 forms an outline of a display area between the attachment area 13a which is an area near both ends and which overlaps the mask frame 11 when attached to the mask frame 11, and the attachment area 13a. And an outer peripheral area 13b of a display area which is an area.

The outline forming area 13b of the display area has a concavo-convex shape for forming the outline of at least a part of the display area including the deformed area of the display area.

Of the outer periphery forming area 13b of the display area, the notches 13c are formed side by side on one side extending in the extending direction, and the notches 13d are formed side by side on the other side extending in the extending direction It is done.

The

notches

13c and 13d correspond to, for example, notches 43d and four corners 43a to 43d in the display area 43 (FIG. 1 and FIG. 3), for example. Have.

The notched portion 13c has a curved portion 23c having a rounded shape such as an arc shape having the same shape as the corner 43c to form the corner 43c of the display region 43 (FIGS. 1 and 3), and the display region 43 (FIGS. And 3) a curved portion 23d having a round shape such as an arc shape having the same shape as the corner 43d in order to form the corner 43d. The

curved portions

23c and 23d are corner portions of the recess formed in the notch 13c.

The notched portion 13 d has a curved portion 23 a having a rounded shape such as the same arc shape as the corner 43 a to form the corner 43 a of the display region 43 (FIGS. 1 and 3), and the display region 43 (FIGS. 1 and 3) A convex portion 23e having a convex shape having the same shape as that of the notch portion 43e and a curved portion 23b having a round shape such as the same circular arc shape as the corner 43b to form a corner 43b of the display area 43 (FIG. 1 and FIG. 3) And. The convex part 23e is formed between the curved part 23a and the curved part 23b. The

curved portions

23a and 23b are concave portions formed in the notch 13d. The convex part 23e is a convex part formed in the notch 13d.

The position of the howling sheet 13 is designed so that the position slightly outside the display area (for example, the position outside 100 μm to 200 μm) becomes the outer shape of the howling sheet in consideration of the error of the welding position of the howling sheet 13.

By forming the

notches

13c and 13d in the howling sheet 13, the width W13b of the

notches

13c and 13 facing each other is partially narrower than the width W13a of the attachment area 13a.

The howling sheet 13 has a shape having the

notches

13c and 13d in the sheet having a width W13a, but the sheet having a width W13b is provided with a projection such as the curved parts 23a to 23d and the convex part 23e. It may be of such a shape.

When attaching the howling sheet 13 to the mask frame 11 as shown by arrow F2 in (c) of FIG. 7, tension is applied by applying a force to the both ends of the howling sheet 13 in the outward direction (direction away from each other). Both ends of the howling sheet 13 are welded to predetermined positions of the mask frame 11 while (pulling). And the unnecessary part outside the welded part in the howling sheet 13 is cut. Thereby, the attachment area 13 a (see FIG. 9) of each howling sheet 13 is attached to a predetermined position of the mask frame 11. That is, each howling sheet 13 is attached to a predetermined position of the mask frame 11.

In the present embodiment, each howling sheet 13 is attached to the mask frame 11 so as to be parallel to the long side of the mask frame 11. The howling sheets 13 are attached to the mask frame 11 so as to be parallel to one another in the direction of the short side of the mask frame 11.

FIG. 10 is a view of the mounting position of the howling sheet 13 on the mask frame 11 in the direction of the arrow D2 in (c) of FIG. The arrow D2 in (c) of FIG. 7 is parallel to the long side of the mask frame 11 with the attachment position of the cover sheet 12 in the mask frame 11 (the area AR2 shown in (c) of FIG. Direction Indicates the direction to look.

As shown in FIG. 10, a groove 11c is formed at a predetermined position on the mask frame 11 to which the howling sheet 13 is attached. The howling sheet 13 is attached to a predetermined position of the mask frame 11 by fitting both attachment areas 13 a in the grooves 11 c formed in the mask frame 11 and welding them.

In addition, the cover sheet 12 and the howling sheet 13 are attached to the mask frame 11 in the reverse order (the process Sa and the process Sb in FIG. 6 are interchanged), and the howling sheet 13 is attached to the mask frame 11 first. After that, the cover sheet 12 may be attached next.

However, it is preferable to attach a sheet defining the outer shape of the display area of the cover sheet 12 and the howling sheet 13 later (in the case of the first embodiment, the howling sheet 13 later).

As shown in (c) of FIG. 7, by attaching a plurality of cover sheets 12 and a plurality of howling sheets 13 in a grid shape to the mask frame 11, the cover sheets 12 facing each other and the howling sheets facing each other The outer shape opening 53 which is an opening partitioned by 13 is formed side by side.

The outer shape opening 53 has a shape corresponding to at least a deformed portion in the outer shape of the display region which is the formation region of the light emitting layer. In other words, the outer shape opening portion 53 defines the outer shape of at least a part of the display area which is the formation area of the light emitting layer or the like.

In the outer shape opening 53, a notch 13d is formed in one of the howling sheets 13 of the howling sheets 13 opposed to each other, and a notch 13c is formed in the other howling sheet, thereby providing the display area It has the same shape as the deformed portion in the outer shape.

Next, as shown in step Sc of FIG. 6 and (d) of FIG. 7, the alignment sheet 14 on which the alignment mark is formed is attached to the mask frame 11 so that the alignment mark is at a predetermined position (alignment sheet attaching step ).

When attaching the alignment sheet 14 to the mask frame 11, as shown by arrow F3 in (d) of FIG. 7, the both ends of the alignment sheet 14 are directed outward (directions away from each other) and the mask frame 11 is short. While stretching (pulling) by applying a force in the direction parallel to the hand direction, the mask frame 11 is welded to a predetermined position. Then, the unnecessary portion outside the welded portion in the alignment sheet 14 is cut. Thus, each alignment sheet 14 is attached to a predetermined position of the mask frame 11. In the present embodiment, two alignment sheets 14 are attached to the mask frame 11 so as to be parallel to each other along the short side of the frame opening 11 a of the mask frame 11.

Next, as shown in step Sd of FIG. 6 and (e) of FIG. 7, a plurality of mask sheets (second sheet masks) 15 are attached to the mask frame 11 (mask sheet attachment step). The mask sheet 15 is, for example, a sheet to be separately applied to each of RGB in order to form a light emitting layer or the like in a pattern in pixels in the display area 43 (active area 3) shown in FIGS.

FIG. 11 is a diagram showing the configuration of the mask sheet 15. As shown in FIG. 11A, the mask sheet 15 is in the form of a strip, and an invar material having a thickness of about 10 to 50 μm, preferably about 25 μm, is used as a base material. The mask sheet 15 is formed of a thin sheet in order to prevent the thickness of the deposited light emitting layer from becoming nonuniform.

The lower surface of the mask sheet 15 is the surface facing the deposition source 70 in FIG. 5, and the upper surface is the surface facing the TFT substrate 2 in FIG.

Between both end portions of the mask sheet 15, a plurality of effective portions YA aligned in the longitudinal direction are formed side by side. A plurality of vapor deposition holes H are formed in the effective portion YA.

The outer shape of each effective portion YA is not irregular so as to make the stress uniform, but is square or rectangular. In the present embodiment, the outer shape of each effective portion YA is rectangular.

In the vapor deposition step, the effective portion YA of the mask sheet 15 overlaps the active area 3 (see FIGS. 3 and 4) of the TFT substrate 2 and the edge surrounding the effective portion YA is the frame region 44 (FIGS. See 4). The deposition particles emitted from the deposition source are deposited on the pixels of the active area 3 (display area 43) of the TFT substrate 2 through a part of the deposition holes H. At this time, since the edge of the mask sheet 15 overlaps the frame area 44 of the TFT substrate 2, the deposited particles are blocked by the edge and do not reach the frame area 44.

As shown to (b) of FIG. 11, the effective part YA is a part in which the several vapor deposition hole H provided in the mask sheet | seat 15 was provided.

The plurality of vapor deposition holes H have a first vapor deposition hole H1 for forming a pattern of a light emitting layer or the like in a pixel, and a second vapor deposition hole H2 which is an opening outside the display area. Of the effective portion YA, the region where the first deposition holes H1 are formed is the first region YA1, and the region where the second deposition holes H2 are formed is the second region YA2.

When the light emitting layer is deposited on the TFT substrate through the mask sheet 15, the deposition hole H1 corresponds to the formation region of the light emitting layer that emits light of any color among the colors emitted by the light emitting layer in the effective portion YA. It is formed. For example, when the light emitting layer emitting red light, the light emitting layer emitting green light, and the light emitting layer emitting blue light are formed in the display area 43 (active area 3), the deposition holes H1 are red The light emitting layer emits light, the light emitting layer emitting green light, and the light emitting layer emitting blue light. The light emitting layer is formed in the same pattern as the light emitting layer.

The vapor deposition holes H1 are formed in an array corresponding to the pixels in the effective portion YA. The second deposition holes H2 have the same pitch and the same shape as the first deposition holes H1. The second vapor deposition holes H2 are formed at the peripheral end (peripheral edge) in the active region 3.

The first area YA1 has an outer shape corresponding to the active area 3 (i.e., the display area 43). The second area YA2 is a part outside the first area YA. The second deposition holes H2 are shielded by the outer shape defining mask 55. Therefore, the deposition particles do not pass through the second deposition holes H2.

For example, when the pixels outside the display area are provided in the active area 3, the pixels outside the display area form the second vapor deposition holes H2 so as to overlap the second vapor deposition holes H2 with the outline defining mask 55 interposed. It is also good. Therefore, the light emitting layer and the like are not formed in the pixels outside the display area, and the light emitting layer and the like are formed only in the display area.

For example, on the premise that the outer side of the display area is defined by the outline defining mask 55, the pixels may be provided so as to have a shape that is not an odd shape such as a rectangle or a square.

The effective portion YA is a combination of the first area YA1 and the second area YA2 and has a non-deformed shape such as a rectangle or a square.

The first deposition hole H1 is an opening that contributes to image display in the display area 43, and the second deposition hole H2 can be expressed as an opening that does not contribute to image display in the display area 43.

The mask sheet 15 is manufactured in advance in a mask sheet manufacturing process before being attached to the mask frame 11.

The mask sheet 15 is produced, for example, as follows. First, a negative or positive photosensitive resist material is applied to both sides of a long plate made of invar material or the like, and a resist film is formed on both sides (upper and lower surfaces).

Then, a resist pattern is formed on both sides of the sheet by exposing and developing the resist film on the upper surface and the lower surface using an exposure mask. Then, the upper surface of the effective portion YA is etched using the upper surface resist pattern as a mask (the upper surface of the edge is not etched), and the opening K is patterned on the upper surface of the effective portion YA .

Next, the upper surface is covered with a resistant resin having etching resistance, and the lower surface resist pattern is used as a mask to etch the lower surface of the effective portion YA and the edge. Thereby, in the effective portion YA, the deposition holes H (through holes) are formed by erosion from the lower surface side, and a plurality of dents are formed on the lower surface of the edge.

The plurality of vapor deposition holes H of the effective portion YA are formed in a matrix or diagonally in the longitudinal direction and the transverse direction (width direction) of the mask sheet 15, and the opening K (opening on the upper surface) is a pixel bank layer of the substrate In order to correspond to the shape of the opening, the corner has a rounded square shape or a circular or elliptical shape. In the effective portion YA, the etching on the lower surface side is performed wider and deeper than the upper surface side with respect to each vapor deposition hole H, thereby reducing the shaded portion (height of the partition between two adjacent vapor deposition holes), The deposition accuracy and deposition efficiency for the substrate are enhanced.

In the effective portion YA, when a cross section is taken along the line B-B passing through the centers of two laterally adjacent openings K, as shown in (c) of FIG. When a cross section is taken along a line C-C parallel to the line B--B, passing a point equidistant from two vertically adjacent openings K, as shown in (c) and (d) of FIG. It becomes a configuration (the maximum thickness is the thickness Ti of the base material) with the minimum number of cavities.

As shown by arrow F4 in (e) of FIG. 7, when attaching the mask sheet 15 to the mask frame 11, tension is applied by applying a force to the both ends of the mask sheet 15 in the outward direction (direction away from each other). Both ends of the mask sheet 15 are precisely welded to predetermined positions of the mask frame 11 so that the vapor deposition holes come to predetermined positions with reference to the alignment marks formed on the alignment sheet 14 (pulling).

When stretching and welding this mask frame 11, it is stretched and welded while applying a counter force in accordance with the amount of deformation of the mask frame 11 after stretching and welding.

Here, the outer shape of the effective portion YA formed on the mask sheet 15 is not odd but square or rectangular. For this reason, it is possible to prevent the stress applied to the mask sheet from becoming uneven when the mask sheet 15 is stretched, as compared with the mask sheet having the deformed effective portion. As a result, the mask sheet 15 can be attached to the mask frame 11 with high accuracy by preventing the positional deviation of the vapor deposition holes in the vapor deposition mask.

And as the mask sheet 15 is shown to (f) of FIG. 7, the whole sheet part required only so that the external shape opening part 53 divided by the cover sheet 12 and the howling sheet 13 may be covered by the effective part YA. After the mask sheet 15 is attached to the mask frame 11, unnecessary portions outside the welded portions of the mask sheet 15 are cut as shown in step Se of FIG. 6 and (e) of FIG. Thereby, the vapor deposition mask 10 is completed.

Next, as shown in step Sf of FIG. 6, the completed deposition mask 10 is cleaned, and various mask inspections such as a foreign matter inspection and a precision inspection are performed. After this, the deposition mask 10 which has no problem in the mask inspection is stored in the stocker and supplied to the deposition apparatus used in the deposition process as needed.

(Details of the vapor deposition mask 10)
FIG. 12 is an enlarged view of the vapor deposition mask 10 according to the first embodiment of the present invention. FIG. 13 is a cross-sectional view of the deposition mask and the TFT substrate 2 during deposition in the deposition step. In FIG. 12, the mask sheet 15 omits illustration of parts other than the effective part YA for the sake of explanation. Further, in FIG. 12, the effective portion YA is illustrated by a broken line.

As shown in FIG. 12, in the vapor deposition mask 10, an outer shape defining mask (first sheet mask) 55 having a cover sheet 12 and a howling sheet 13 and a vapor deposition hole H (see FIG. 11B) are patterned. And the mask sheet 15 on which the effective portion YA is formed. The contour defining mask 55 is defined by the cover sheet 12 facing each other and the howling sheet 13 facing each other, whereby a contour opening 53 having a shape including a deformed portion is defined (formed).

The short side of the outer opening 53 overlaps the effective portion YA. That is, the second deposition holes H2 (see FIG. 11B) included in the second area YA2 are shielded by overlapping with the howling sheet 13. On the other hand, the first deposition holes H1 included in the first area YA1 are not shielded. Thus, the howling sheet 13 defines the outline of the short side of the first area YA1 in the effective portion YA, and thereby defines the outline of the short side of the display area.

The long side of the outer shape opening 53 does not overlap with the effective portion YA. That is, the long side of the effective portion YA does not overlap the cover sheet 12. Thus, the long side of the display area is defined by the long side of the first area YA1 in the effective portion YA.

For example, it is a deformed portion of the display area 43 (see FIGS. 1 and 3) in the howling sheet 13 overlapping the effective portion YA by the curved portion 23a, the convex portion 23e, the curved portion 23b, the curved portion 23c, and the curved portion 23d. , A corner 43a, a notch 43e, a corner 43b, a corner 43c, and a corner 43d, respectively.

For this reason, in the vapor deposition step, the light emitting layer and the like can be pattern-formed by the effective portion YA and the howling sheet 13 in each sub-pixel included in the display area having a desired outer shape.

FIG. 21 is a plan view showing a configuration of a mask sheet according to a comparative example in which the outer shape of the effective portion is changed.

As shown in FIG. 21, in order to form a light emitting layer or the like by patterning in a display area of a different shape, a method of forming a corresponding different shape of the effective part is also conceivable.

On the mask sheet 115, effective portions 115Aa of non-square or non-rectangular shape are formed side by side with the mask sheet 115A.

In the effective portion 115Aa, vapor deposition holes, which are through holes, are patterned. The effective portion 115Aa has a shape in which four corners 143Aa to 143Ad are not square but curved. Furthermore, in the effective portion 115Aa, a recessed notch 143Ae is formed in part of a straight side connecting the corner 143Aa and the corner 143Ab.

When attaching the mask sheet 115A having such a deformed effective portion 115Aa to the mask frame, as shown by the arrow F104 in FIG. 21, if an outward force is applied to both ends of the mask sheet 115A, the arrow The amount of displacement is caused by the uneven stress applied to the area around the four corners 143Aa to 143Ad shown in AR100 and the area around the irregular shaped part such as the area around the notch 143Ae shown by arrow AR101. Becomes uneven. As a result, the positional accuracy of the vapor deposition holes in the vapor deposition mask to which the mask sheet 115A is attached is deteriorated.

FIG. 22 is a plan view showing the configuration of a modification of the mask sheet in which the outer shape of the effective portion is deformed.

As in the effective portion 115Ba shown in the mask sheet 115B shown in FIG. 22, although the four corners 143Ba to 143Bd are curved, in the region corresponding to the notch portion 143Ae (see FIG. 21), the fully etched portion 143Be1 and The half etching portion 143Be2 may be formed. The deposition holes included in the full-etched part 143Be1 are through holes, and in the deposition hole formation region included in the half-etched part 143Be2, a recess that does not penetrate is formed.

Thus, when the mask sheet 115B is attached to the mask frame, an outward force is applied to both end portions of the mask sheet 115B as shown by arrow F104 in FIG. 22, the periphery of the full-etched portion 143Be1 and the half-etched portion 143Be2 The nonuniformity of stress applied to the area can be reduced more than the nonuniformity of stress applied to the area around the notch 143Ae shown in FIG. However, the stress applied to the area around the full-etched portion 143Be1 and the half-etched portion 143Be2 is still nonuniform, and the stress applied to the periphery of the four corners 143Ba to 143Bd still remains nonuniform.

On the other hand, as described above, in the vapor deposition mask 10 according to the present embodiment, the effective portion YA in the mask sheet 15 is rectangular or square. And the 1st area | region YA1 which has the external shape corresponding to the irregular-shaped part of a display area is formed of the howling sheet | seat 13 which overlaps with the effective part YA.

As a result, it is not necessary to match the outer shape of the effective portion YA, which requires particularly positional accuracy in the deposition mask 10, to the outer shape of the display region where the light emitting layer is to be deposited. For this reason, even if the outer shape of the display area where the light emitting layer or the like is to be deposited has an irregular shape, the outer shape of the effective portion YA can be rectangular or square (rectangular in this embodiment) instead of the irregular shape.

For this reason, even when the mask sheet 15 is stretched when attaching the mask sheet 15 to the mask frame 11, unlike the case where the effective portion has a different shape, application of non-uniform stress to the mask sheet 15 is prevented. be able to. Thereby, the vapor deposition mask 10 in which the positional accuracy of the vapor deposition holes H in the vapor deposition mask 10 is high can be obtained. That is, the light emitting layer can be precisely deposited on each pixel of the TFT substrate 2 by the deposition mask 10.

In addition, the outer shape of the display area in which the light emitting layer is formed in the TFT substrate 2 can be made different from a square or a rectangle, and an organic EL display panel having high designability can be obtained.

In other words, the deposition mask 10 is for forming a pattern by depositing a light emitting layer or the like on each pixel in the display area, and an outer shape defining mask 55 for defining the outer shape of the deformed portion in the outer shape of the display area to deposit the light emitting layer. It can also be expressed as having a mask having at least two different roles with the mask sheet 15 in which the vapor deposition holes H are formed.

As described above, according to the vapor deposition mask 10, even if the outer shape of the display area is an irregular shape other than a rectangle or a square, positional deviation of the vapor deposition holes H formed in the effective portion YA in the vapor deposition mask 10 can be suppressed.

In addition, since the outer shape of the effective portion YA does not have to be changed even if the outer shape of the display area changes, the mask sheet 15 in which the effective portion YA is formed may be shared between substrates having various outer shapes. it can.

As shown in FIG. 13, when the deposition mask 10 and the TFT substrate 2 are disposed to face each other in the deposition step, the mask sheet 15 in which the effective portion YA is formed in the deposition mask 10 has the outer shape opening 53. The mask sheet 15 is closer to the TFT substrate 2 with the formed outline defining mask 55. Thus, the light emitting layer can be formed on the pixel with high accuracy. Furthermore, since the mask sheet 15 and the TFT substrate 2 can be brought into close contact with or close to each other, it is possible to prevent the film thickness of the edge of the light emitting layer from becoming uneven.

Further, as shown in FIG. 12 and FIG. 13, in the present embodiment, of the cover sheet 12 and the howling sheet 13 constituting the outer shape defining mask 55, the howling sheet 13 corresponds to the deformed portion of the display area, for example The notch 13c * 13d by which the shape was formed is formed. The howling sheet 13 in which the deformed portion is formed is disposed closer to the mask sheet 15 than the cover sheet 12.

Thereby, in the vapor deposition process, the howling sheet 13 in which the deformed portion is formed can be brought closer to the TFT substrate 2 than the cover sheet 12. For this reason, in the vapor deposition step, it is possible to vapor-deposit a light emitting layer or the like with high positional accuracy on pixels in the vicinity of the outer shape of the display area defined by the

notches

13c and 13d.

In the deposition mask 10, since the cover sheet 12, the howling sheet 13 and the mask sheet 15 are directly attached to the mask frame 11 having high rigidity, the positional accuracy of the outer opening 53 in the deposition mask 10 and the deposition hole H Position accuracy of is high.

Further, in the deposition mask 10, the outer shape defining mask 55 and the mask sheet 15 contain a material that is attracted to the magnetic force. In the present embodiment, the outer shape defining mask 55 and the mask sheet 15 include a material having an adsorptivity by a magnet such as an invar material. As a result, the deposition mask 10 loaded in the deposition apparatus can cause the external shape defining mask 55 and the mask sheet 15 to be adsorbed to the TFT substrate 2 by the magnet.

FIG. 24 is a cross-sectional view showing a configuration of a vapor deposition apparatus having the magnet according to the first embodiment. In FIG. 24, illustration of the vapor deposition source is omitted. As shown in FIG. 24, the vapor deposition apparatus has a magnet for adsorbing the TFT substrate 2. The vapor deposition apparatus is, for example, a touch plate 71 which is a cooling plate disposed so that the vapor deposition mask 10 is in close contact with one surface (vapor deposition surface) of the TFT substrate 2 and is in contact with the other surface of the TFT substrate 2. The touch plate 71 has a magnet plate 72 having a magnet disposed on the side opposite to the contact surface with the TFT substrate 2.

(Modification of vapor deposition mask 10)
FIG. 25 is an enlarged view of a vapor deposition mask 10 according to a modification of the first embodiment. As shown in FIG. 25, the short side of the effective portion YA may overlap with the howling sheet 13, and the long side may overlap with the cover sheet 12. According to the aspect of FIG. 25, in the effective portion YA, the second area YA2 is formed so as to surround the first area YA1. Even in the embodiment of FIG. 25, the howling sheet 13 defines the deformed portion (that is, the deformed portion of the display region) of the first area YA1 in the effective portion YA.

(Modification of organic EL display panel 42)
FIG. 26 is a diagram illustrating a configuration in the vicinity of a notch of a display panel according to a modification of the first embodiment.

The vapor deposition layer (at least one of the light emitting layer and the hole transport layer) may be formed on a part of the pixels outside the display area that do not contribute to the display of the image.

The organic EL display panel 42 shown in FIG. 26 is a flexible display panel, and has a display area 43 having a notch 43e in at least a part of the outer shape, and the outer periphery of the display area 43 And a frame area 44 having 44e.

The display area 43 includes the light emitting layer 80 formed in a matrix and the pixel pix on which the hole transport layer is formed. For example, in FIG. 26, the red pixel Rpix in which the red light emitting layer 80 is formed, the green pixel Gpix in which the green light emitting layer 80G is formed, and the blue pixel Bpix in which the blue light emitting layer 80B is formed There is. The arrangement of the red pixel Rpix, the green pixel Gpix, and the blue pixel Bpix shown in FIG. 26 is an example.

The frame area 44 is an area around the notch 44e, and a shielding area 44a shielded by the projection 23e (see FIG. 9) of the howling sheet 13 at the time of vapor deposition, and a non-shielded area not shielded by the evaporation mask. And 44b.

Then, in the shield area 44a and the non-shield area 44b, pixels pixout outside the display area, which are pixels outside the display area and do not contribute to the display of the image, are formed.

Although the pixel circuit and the pixel bank are not formed in the non-display area pixels pixout formed in the shielded area 44a and the non-shielded area 44b, they overlap the evaporation holes H ((b) in FIG. 11) of the evaporation mask during evaporation. It is an area.

In the non-display area pixels pixout formed in the shield area 44a, no vapor deposition layer deposited for each pixel, such as the light emitting layer 80 and the hole transport layer, is formed.

The plurality of pixels outside the display area pixout formed in the non-shielded area 44b are the first light emitting layer 81 having the same shape as the light emitting layer 80 formed in the display area 43 (or other deposited layers deposited for each pixel). A part of the periphery is cut away in the shape of (or other deposited layer deposited for each pixel) and the light emitting layer 80 (or other deposited layer deposited for each pixel) formed in the display area 43 And a second light emitting layer 82 (or other deposited layer deposited for each pixel) having a different shape.

The non-display area pixels pixout formed in the shield area 44a overlap the second area YA2 ((b) in FIG. 11) of the effective portion YA with the convex portions 23e of the howling sheet 13 interposed therebetween at the time of vapor deposition.

The pixels outside the display area pixout in which the first light emitting layer 81 (or the vapor deposited layer deposited for each other pixel) is formed in the non-shielded area 44b is the first area YA1 (FIG. 11 of FIG. Although the first light emitting layer 81 (or the vapor deposited layer deposited for each other pixel) is deposited because it overlaps with (b), it does not contribute to the display of an image.

In the non-shielded area 44 b, a part of the display area outside pixel pixout on which the second light emitting layer 82 (or the vapor deposited layer deposited for each other pixel) is formed is partially shielded by the convex portion 23 e of the howling sheet 13 Ru. For this reason, the second light emitting layer 82 (or the hole transport layer) has a shape in which a part of the shape of the light emitting layer 80 (or the vapor deposited layer deposited for each other pixel) formed in the display region 43 is lost. It is.

Also in the organic EL display panel 42 shown in FIG. 26, a display area in which the second light emitting layer 82 (or the deposition layer deposited for each other pixel) is formed among the pixels pixout outside the display area formed in the frame area 44 In the display area outside pixel pixout formed in the shielding area 44a which is outside the outer pixel pixout, a vapor deposition layer deposited for each pixel such as a light emitting layer and a hole transport layer patterned by a vapor deposition mask is formed Not.

As described above, the deposition mask blocks the deposition of the deposition layer on the out-of-display area pixel pixout, so that the out-of-display area pixel formed in the shielding area 44 a is for preventing the out-of-display area pixel from contributing to display. It is not necessary to make the shape of the effective part YA in the mask sheet 15 different between inside and outside the display area, as in the case where the mask opening (the vapor deposition hole H2 (FIG. 11B)) corresponding to pixout is not provided.

For this reason, in the mask sheet 15, it is possible to provide a highly accurate mask opening which is not influenced by the outer shape of the display area 43. As a result, even if the display area 43 has the notches 43e, it is possible to obtain the organic EL display panel 42 in which at least one of the light emitting layer 80 and the hole transport layer is formed in each pixel pix with high definition.

Second Embodiment
It will be as follows if Embodiment 2 of this invention is described. In addition, about the member which has the same function as the member demonstrated in Embodiment 1 for convenience of explanation, the same code | symbol is appended and the description is abbreviate | omitted.

In the deposition mask, the deformed portion of the display area may be formed on the cover sheet instead of the howling sheet.

FIG. 14 is a view showing how a deposition mask according to Embodiment 2 of the present invention is manufactured. As shown in FIG. 14A, the howling sheet (first sheet mask) 13A is attached to a predetermined position of the mask frame 11 (howling sheet attaching step).

The howling sheet 13A has an elongated shape and linearly extends from one end to the other end. That is, in the present embodiment, the howling sheet 13A is not formed with an irregular shape such as unevenness.

When attaching the howling sheet 13A to the mask frame 11, the both ends of the howling sheet 13A are stretched (pulled) by applying a force to the both ends of the howling sheet 13A in the outward direction (directions away from each other) Weld to the 11 predetermined positions. And the unnecessary part outside the welded part in the howling sheet 13A is cut. Thus, the vicinity of both ends of each howling sheet 13A is attached to a predetermined position of the mask frame 11. That is, each howling sheet 13A is attached to a predetermined position of the mask frame 11.

In the present embodiment, each howling sheet 13A is attached to the mask frame 11 so as to be parallel to the long side direction of the mask frame 11. The howling sheets 13A are attached to the mask frame 11 so as to be parallel to one another along the short side direction of the mask frame 11.

Next, as shown in (b) of FIG. 14, the plurality of cover sheets 12A are attached to the mask frame 11 to which the howling sheet 13A is attached (cover sheet attaching process).

FIG. 15 is a plan view showing a configuration of a cover sheet 12A according to Embodiment 2 of the present invention.

The cover sheet 12A extends from one end to the other end. Cover sheet 12A has an area (outline forming area of display area) in which a notch is formed in the same shape as the shape of the odd-shaped portion of the display area in the area between one end and the other end. .

In the outer shape forming area of the display area in the cover sheet 12A, the notches 12Aa are formed side by side in one side extending in the extending direction, and the notches 12Ab are arranged side by side on the other side extending in the extending direction. It is formed.

The notches 12Aa and 12Ab have a shape corresponding to an irregularly shaped portion such as four corners 43a to 43d in the display area 43 (FIGS. 1 and 3).

The display area in the present embodiment has a shape in which four corners 43a to 43d are curved, and the notch 43e (see FIGS. 1 and 3) is not formed.

The notch 12Aa has a curved portion 23c having the same shape as the corner 43a to form the corner 43a of the display area 43 (FIGS. 1 and 3), and a corner of the display area 43 (FIGS. 1 and 3) And a curved portion 23Ac having the same shape as the corner 43c to form 43c.

The notched portion 12Ab has a curved portion 23Ab having a round shape of the same shape as the corner 43b to form the corner 43b of the display region 43 (FIGS. 1 and 3), and a corner of the display region 43 (FIGS. 1 and 3) And a curved portion 23Ad having a roundness the same shape as the corner 43d to form 43d.

As shown in (b) of FIG. 14, when attaching the cover sheet 12A to the mask frame 11, tension is applied by applying a force to the both ends of the cover sheet 12A in the outward direction (direction away from each other) Meanwhile, both ends of the cover sheet 12A are welded to predetermined positions of the mask frame 11. And the unnecessary part outside the welded part in the cover sheet 12A is cut. Thus, each cover sheet 12A is attached to a predetermined position of the mask frame 11. In the present embodiment, each cover sheet 12A is attached to the mask frame 11 so as to be parallel to the short side of the mask frame 11. The cover sheets 12 </ b> A are attached to the mask frame 11 so as to be parallel to one another in the long side direction of the mask frame 11.

In the present embodiment, the mask sheet 15 is disposed and welded not on the howling sheet 13A but on the cover sheet 12A. The cover sheet 12A and the mask sheet 15 are welded on the same side of the mask frame 11. Therefore, in order to secure the welding width of the mask frame 11 and the mask sheet 15, the smaller the width of the welded portion of the cover sheet 12A, the better.

As shown in (b) of FIG. 14, by attaching the plurality of howling sheets 13A and the plurality of cover sheets 12A in a grid shape to the mask frame 11, the cover sheets 12A facing each other and the howling sheets facing each other Outer openings 53A, which are openings partitioned by 13A, are formed side by side.

The outer shape opening 53A has a shape corresponding to at least a deformed portion in the outer shape of the display region which is the formation region of the light emitting layer. In other words, the outer shape opening 53A defines the outer shape of at least a part of the display region which is the formation region of the light emitting layer.

In the outer shape opening 53A, a notch 12Aa is formed in one cover sheet 12A of the cover sheets 12A facing each other, and a notch 12Ab is formed in the other cover sheet 12A, thereby displaying the display area. It has the same shape as the variant in the outer shape of.

Thereafter, as shown in (c) and (d) of FIG. 14, the alignment sheet 14 and the mask sheet 15 are attached to the mask frame 11. Thereby, the vapor deposition mask 10A is completed. The method of attaching the alignment sheet 14 and the mask sheet 15 is the same as that of the first embodiment.

FIG. 16 is an enlarged view of a vapor deposition mask 10A according to Embodiment 2 of the present invention. As shown in FIG. 16, the vapor deposition mask 10A is formed by patterning an outline defining mask (first sheet mask) 55A having a cover sheet 12A and a howling sheet 13A, and vapor deposition holes H (see FIG. 11B). And the mask sheet 15 on which the effective portion YA is formed. The outer shape defining mask 55A is defined by the cover sheet 12A opposed to each other and the howling sheet 13A opposed to each other, so that an outer shape opening 53A having a shape including a deformed portion is defined (formed).

The long side of the outer shape opening 53A overlaps the effective portion YA. That is, the second vapor deposition holes H2 (see FIG. 11B) included in the second area YA2 are shielded by overlapping with the cover sheet 12A. On the other hand, the first deposition holes H1 included in the first area YA1 are not shielded. Thus, the cover sheet 12A defines the outline of the long side of the first area YA1 in the effective portion YA, and thereby defines the outline of the long side of the display area.

The short side of the outer opening 53 does not overlap with the effective portion YA. That is, the short side of the effective portion YA does not overlap the cover sheet 12A. Thus, the short side of the display area is defined by the short side of the first area YA1 in the effective portion YA.

For example, in the cover sheet 12A overlapping the effective portion YA, the corner 43a, which is a deformed portion of the display area 43 (see FIGS. 1 and 3), by the curved portion 23Aa, the curved portion 23Ab, the curved portion 23Ac, and the curved portion 23Ad.

Corners

43b, 43c and 43d are respectively formed.

For this reason, in the vapor deposition process, the light emitting layer and the like can be pattern-formed in each pixel included in the display area having a desired outer shape by the effective portion YA and the cover sheet 12A.

FIG. 17 is a cross-sectional view of the deposition mask and the TFT substrate 2 during deposition in the deposition step in Embodiment 2 of the present invention.

As shown in FIGS. 16 and 17, in the present embodiment, the cover sheet 12A of the cover sheet 12A and the howling sheet 13A constituting the outer shape defining mask 55A has, for example, a concave shape corresponding to the deformed portion of the display area. The formed notches 12Aa and 12Ab are formed. The cover sheet 12A in which the deformed portion is formed is arranged closer to the mask sheet 15 than the howling sheet 13A.

Thereby, in the vapor deposition process, the cover sheet 12A on which the deformed portion is formed can be brought closer to the TFT substrate 2 than the howling sheet 13A. For this reason, in the vapor deposition step, it is possible to vapor-deposit a light emitting layer or the like with high positional accuracy on pixels in the vicinity of the outline of the display area defined by the notches 12Aa and 12Ab.

In addition to the cover sheet 12A, the howling sheet 13A may have, for example, an unevenness corresponding to the deformed portion of the display area. In this case, either the cover sheet 12A or the howling sheet 13A may be disposed on the mask sheet 15 side.

Third Embodiment
It will be as follows if Embodiment 3 of this invention is described. In addition, about the member which has the same function as the member demonstrated in

Embodiment

1, 2 for convenience of explanation, the same code | symbol is appended and the description is abbreviate | omitted.

The contour defining mask in which the contour opening is formed may not be a cover sheet and a howling sheet, but may be composed of a sheet-like mask.

(A) of FIG. 18 is a plan view showing a state in which the open mask is attached to the mask frame, and (b) is a cross-sectional view in the vicinity of the mask frame of (a). FIG. 19A is a plan view showing how a mask sheet is attached to a mask frame, and FIG. 19B is a cross-sectional view of the vicinity of the mask frame in FIG.

As shown in FIG. 18A, the edge of the open mask 55B is attached to the mask frame 11 so as to cover the frame opening 11a of the mask frame 11.

In the open mask 55B, outer openings 53B having a shape corresponding to the outer shape of the display area are formed in a matrix.

The open mask 55B is a sheet-like mask. For example, the base material of the open mask 55B is made of invar material or the like, and the thickness is about 100 μm to 200 μm. However, the thickness may be about 30 μm to 100 μm.

The outer shape opening 53B has a shape including a deformed portion. The outer shape opening 53B includes a curved portion 23Ba, a convex portion 23Be, a curved portion 23Bb, a curved portion 23Bc, and a curved portion 23Bd, and is an deformed portion of the display area 43 (see FIGS. 1 and 3). The corner 43a, the notch 43e, the corner 43b, the corner 43c, and the corner 43d are formed.

When the mask sheet 15 is superimposed on the open mask 55 B, the curved portion 23 Ba, the convex portion 23 Be, the curved portion 23 Bb, the curved portion 23 Bc, and the curved portion 23 B d in the outer shape opening 53 B overlap with the effective portion YA of the mask sheet 15. Of the effective portion YA, the first deposition holes H1 (see (b) in FIG. 11) included in the first area YA1 are not shielded, and the second deposition holes H2 (see (b in FIG. 11) included in the second area YA2. ) Is shielded by the mask sheet 15.

Thus, the outer shape of the deformed portion of the display area 43 (see FIGS. 1 and 3) is defined by the open mask 55B.

When the mask sheet 15 is superimposed on the open mask 55B, the sides other than the deformed portion in the outer shape opening 53B, that is, the sides between the curved portion 23Ba, the convex portion 23Be, the curved portion 23Bb, the curved portion 23Bc, and the curved portion 23Bd are , And may or may not overlap the effective portion YA. That is, the outer shape of the portion other than the deformed portion of the display area 43 (see FIGS. 1 and 3) may be defined by the outer opening 53B of the open mask 55B or by the effective portion YA of the mask sheet 15. It is also good.

As shown in (a) and (b) of FIG. 18, the edge of the frame opening 11 a in the mask frame 11 is a protrusion 11 d that protrudes like a frame, and the top surface of the protrusion 11 d is an open mask 55 B. And the mounting

surfaces

11e and 11f of the mask sheet 15.

The mounting surface 11e surrounds the outer periphery of the mounting surface 11f. The mounting surface 11e protrudes beyond the mounting surface 11f.

The edge of the open mask 55B is brought into contact with the mounting surface 11e while being stretched by applying an outward force from the central portion to the open mask 55B. Then, the mask holding device 60 presses the open mask 55B onto the mounting surface 11f from above. Then, the open mask 55B is welded to the mounting surface 11f by irradiating the laser LA. Then, an unnecessary portion outside the welded position in the open mask 55B is cut.

Next, as shown in (a) and (b) of FIG. 19, the mask sheet 15 is brought into contact with the mounting surface 11 e while being stretched by applying an outward force. Then, the mask sheet 15 is welded to the mounting surface 11 e by irradiating the laser LA. Then, the mask sheet 15 for all the necessary sheets is attached to the mask frame 11 so that the entire outer shape opening 53B is covered with the effective portion YA.

Next, unnecessary portions outside each welded portion of the mask sheets 15 are cut. Thus, the deposition mask according to the present embodiment is completed.

As described above, in the present embodiment, the mask frame 11 has the mounting surface 11f, which is a concave portion recessed from the mounting surface 11e, and the convexes protruding from the mounting surface 11f, of the open mask 55B and the mounting

surfaces

11f and 11e of the mask sheet 15. And a mounting surface 11e.

The open mask 55B is attached to the attachment surface 11f, and the mask sheet 15 is attached to the attachment surface 11e.

Thus, even if the outer opening 53B is formed in a sheet-like mask like the open mask 55B, the open mask 55B is directly attached to the attachment surface 11f of the mask frame 11, and the mask sheet 15 is It can be attached to the direct attachment surface 11e, respectively.

Thereby, as compared with the case where the open mask 55B and the mask sheet 15 are overlapped and attached to the attachment surfaces 11f and 11e of the mask frame 11, the positions of the outer opening and the effective portion in the deposition mask are accurately aligned. be able to.

[Summary]
The vapor deposition mask according to aspect 1 of the present invention is a vapor deposition mask for patterning a vapor deposition layer in an active area in which pixels contributing to a display arranged in a matrix in a display area are arranged in a matrix. An outer shape opening having a shape corresponding to at least a part of the outer shape of the display area is formed with a first sheet-like mask formed corresponding to the arrangement pattern of the display area, and an effective portion having a plurality of openings And the plurality of openings formed in the second sheet-like mask include a first opening and a second opening, and the first opening is The second openings are formed in an array corresponding to the pixels, and the second openings have the same pitch and the same shape as the first openings, and overlap the first sheet mask.

According to the above configuration, the outer opening having a shape corresponding to at least a part of the outer shape of the display area is formed in the first sheet mask in correspondence with the arrangement pattern of the display area. The second sheet mask includes a first opening and a second opening, the first opening is formed in an array corresponding to the pixel, and the second opening is It has the same pitch and the same shape as the first opening, and overlaps the first sheet mask.

Therefore, it is possible to form a vapor deposition layer in a pattern on the pixels in the display area according to the outer shape (edge shape) of the at least part of the display area by the outer shape opening. In this way, it is not necessary to match the outer shape of the effective portion, which requires particularly positional accuracy in the deposition mask, to the outer shape of the at least part of the display area, and the outer shape of the effective portion suppresses positional deviation in the deposition mask. It can be easy rectangular or square.

For this reason, even if the outer shape of the display area is an odd shape other than a rectangle or a square, it is possible to suppress positional deviation of the effective portion in the vapor deposition mask.

In addition, since it is not necessary to change the outer shape of the effective portion even if the outer shape of the display area changes, the second sheet mask in which the effective portion is formed between vapor deposition substrates having various shapes. Can be shared.

In the vapor deposition mask according to aspect 2 of the present invention, in the aspect 1, the second opening may be formed at a peripheral end in the effective portion. According to the above configuration, the second opening overlaps the sheet-like mask.

In the vapor deposition mask according to aspect 2 of the present invention, in the aspect 1, the shape corresponding to at least a part of the outer shape of the display area in the outer shape opening may include an arc shape.

In the vapor deposition mask according to aspect 4 of the present invention, in the aspect 3, the arc shape may be formed on a side corresponding to at least one side of the effective portion in the outer shape opening.

In the vapor deposition mask according to aspect 5 of the present invention, in the aspect 3, the arc shape may be formed at a corner corresponding to at least one of the four corners of the effective portion in the outer shape opening.

The vapor deposition mask according to aspect 6 of the present invention is the vapor deposition mask according to aspect 1 to 5, wherein the second sheet-like mask is more vapor deposited than the first sheet-like mask when vapor depositing the vapor deposited layer on the vapor deposition substrate It may be close to the substrate. According to the above configuration, the vapor deposition layer can be vapor deposited on the pixel with high accuracy.

In the vapor deposition mask according to aspect 7 of the present invention, in the above aspects 1 to 6, the first sheet-like mask and the second sheet-like mask may contain a material that is attracted to magnetic force. According to the above configuration, the first sheet-like mask and the second sheet-like mask can be adsorbed by the magnet.

The vapor deposition mask according to aspect 8 of the present invention may include a frame-shaped mask frame to which the first sheet-like mask and the second sheet-like mask are attached in the above-mentioned aspects 1 to 7.

Since both the first sheet-like mask and the second sheet-like mask are attached to the mask frame having high rigidity, the positions of the outer opening and the effective part in the vapor deposition mask can be accurately aligned.

In the vapor deposition mask according to aspect 9 of the present invention, in the aspect 8, the first sheet-like mask extends in a first direction and has a plurality of cover sheets attached to the mask frame in parallel with each other; A plurality of howling sheets extending in a second direction orthogonal to the first direction and attached to the mask frame in parallel with each other, and the outer opening is partitioned by the cover sheets adjacent to each other and the howling sheets adjacent to each other Area may be used. With the above configuration, the outer shape opening can be configured.

In the vapor deposition mask according to aspect 10 of the present invention, in the aspect 8, the first sheet-like mask is configured such that the outer shape opening is formed in one sheet-like mask, and the mask frame is The mounting surface of the first sheet-like mask and the second sheet-like mask has a recess and a protrusion projecting from the recess, and the first sheet-like mask is attached to the recess of the mounting surface The second sheet-like mask may be attached to the protrusion of the attachment surface.

According to the above configuration, the first sheet-like mask and the second sheet-like mask may be formed even if the outer shape opening is formed in one sheet-like mask as in the first sheet-like mask. Can be attached to the mounting surface of the mask frame, respectively. Thereby, as compared with the case where the first sheet-like mask and the second sheet-like mask are overlapped and attached to the mounting surface of the mask frame, the positions of the outer opening and the effective part in the deposition mask are accurately aligned. be able to.

In the vapor deposition mask according to aspect 11 of the present invention, in the above aspects 1 to 10, the shape corresponding to at least a part of the outline of the display area among the outline openings is an inner side or an outer side from a rectangular or square edge It may be a deformed shape projecting to According to the above configuration, even if the shape of the outer shape opening is different, it is possible to suppress positional deviation of the effective portion in the vapor deposition mask. In addition, the second sheet-like mask in which the effective portion is formed can be made common among deposition target substrates having various shapes.

The vapor deposition mask according to aspect 12 of the present invention is the vapor deposition mask according to aspect 9 when depositing the vapor deposition layer on the vapor deposition target substrate, the second sheet mask is closer to the vapor deposition substrate than the first sheet mask. The shape corresponding to at least a part of the outer shape of the display area in the outer shape opening is a deformed shape that protrudes inward or outward from the edge of the rectangular or square, and the cover sheet and the howling sheet Among the above, the howling sheet may have a shape corresponding to the deformed shape, and the howling sheet may be closer to the second sheet mask than the cover sheet.

According to the above configuration, since the deformed portion can be brought close to the deposition target substrate, it is possible to suppress a decrease in positional accuracy of the vapor deposition layer included in the deformed portion.

In the vapor deposition mask according to aspect 13 of the present invention, in the aspect 12, the second sheet mask is a rectangle whose longitudinal direction is the first direction, and is arranged side by side in the second direction, The howling sheet may extend across the plurality of second sheet masks.

According to the above configuration, the howling sheet can prevent slack of the second sheet-like mask.

The vapor deposition mask according to aspect 14 of the present invention is the vapor deposition mask according to aspect 9 when depositing the vapor deposition layer on the vapor deposition target substrate, the second sheet mask is closer to the vapor deposition substrate than the first sheet mask. The shape corresponding to at least a part of the outline of the display area among the outline openings is a deformed shape having a deformed portion which protrudes inward or outward from the edge of the rectangular or square, and the cover sheet, Among the howling sheets, a shape corresponding to the deformed portion may be formed on the cover sheet, and the cover sheet may be closer to the second sheet mask than the howling sheets.

In the vapor deposition mask according to aspect 15 of the present invention, in the aspect 14, the second sheet-like mask is a rectangle whose longitudinal direction is the first direction, and is arranged side by side in the second direction, The cover sheet may overlap the mutually opposing longitudinally extending edges of the adjacent second sheet masks. According to the above configuration, the gap between the second sheet masks can be closed by the cover sheet.

In the vapor deposition mask according to aspect 16 of the present invention, in the aspect 6, the shape of the outer opening is a deformed shape having a deformed portion that protrudes inward or outward from the edge of a rectangle or a square; At least one of a concave shape or a convex shape corresponding to the deformed portion may be formed on both the howling sheet. According to the above configuration, the vapor deposition layer included in the deformed portion can be formed with high accuracy.

In the vapor deposition mask according to aspect 17 of the present invention, in the above aspects 1 to 16, the vapor deposition layer may be a layer vapor-deposited for each pixel. According to the above configuration, the vapor deposition layer can be vapor deposited for each pixel with high accuracy.

The method for producing a display panel according to aspect 18 of the present invention may have a vapor deposition step using the vapor deposition mask in the above aspects 1 to 17.

A display panel according to aspect 19 of the present invention is a flexible display panel including a display area having a notch in at least a part of the outer shape, and a frame area surrounding the outer periphery of the display area and having a notch. And the first display includes a deposition layer formed in a matrix in the display area, and the first deposition having the same shape as the deposition layer formed in the display area around the cutout portion of the frame area. It is characterized by having a layer and the 2nd vapor deposition layer which is the shape where a part of circumference was notched among the shapes of the vapor deposition layer formed in the above-mentioned display field.

Here, conventionally, in order to prevent the positional accuracy of the light emitting layer or the hole transport layer in the pixel in the display area from being lowered, the light emitting layer or the positive pixel is also displayed on the outside pixel of the display area which is a pixel outside the display area. A hole transport layer was formed. For this reason, in order to prevent the pixels outside the display area from contributing to the display of the image, it is necessary to make the shape of the effective part of the mask sheet different inside and outside the display area, such as not providing the mask opening in the pixels outside the display area. there were.

On the other hand, according to the above configuration, among the pixels outside the display area formed in the frame area, the pixels outside the display area outside of the pixels outside the display area where the second deposition layer is formed are patterned by the evaporation mask. The deposition layer is not formed.

As described above, since the deposition mask of the deposition layer on the pixels outside the display area is blocked by the deposition mask, the second deposition layer of the pixels outside the display area is formed in order to prevent the pixels outside the display area from contributing to the display. It is not necessary to make the shape of the effective part of the mask sheet different inside and outside the display area, as in the case where the mask opening (vapor deposition hole) corresponding to the outside pixels outside the display area is not provided.

For this reason, in the mask sheet, it is possible to provide a highly accurate mask opening which is not influenced by the outer shape of the display area. As a result, it is possible to obtain a display panel in which at least one of the light emitting layer and the hole transport layer is formed in each pixel with high definition even if the display area has the notched portion.

The present invention is not limited to the above-described embodiments, and various modifications can be made within the scope of the claims, and embodiments obtained by appropriately combining the technical means disclosed in the different embodiments. Is also included in the technical scope of the present invention. Furthermore, new technical features can be formed by combining the technical means disclosed in each embodiment.

2 TFT substrate (deposited substrate)
DESCRIPTION OF SYMBOLS 3 active area 4 frame-like bank 5

sealing layer

6, 8 inorganic film 7 organic film 9 organic EL display

panel formation area

10, 10A vapor deposition mask 11 mask frame 11a frame opening

11d protrusion

11e, 11f

attachment surface

12, 12A cover Sheet (first sheet mask)
13, 13A Howling sheet (first sheet mask)
13b Outline Forming Area 14 Alignment Sheet 15 Mask Sheet (Second Sheet Mask)
30 electronic device 40 touch panel 41 touch sensor 42 organic EL display panel (display panel)
43 Display area 44

Frame area

53, 53A, 53B External opening 55, 55A External definition mask (first sheet mask)
55B Open mask (first sheet mask)
80 light emitting layer 81 first light emitting layer (first vapor deposited layer)
82 Second light emitting layer (second vapor deposited layer)
pix pixel poxout pixel outside display area

Claims

A deposition mask for forming a deposition layer pattern on an active area of a deposition target substrate in which pixels contributing to display arranged in a matrix in a display area are arranged in a matrix,
A first sheet-like mask in which an outer shape opening having a shape corresponding to at least a part of the outer shape of the display area is formed corresponding to the arrangement pattern of the display area;
A second sheet-like mask on which an effective portion having a plurality of openings is formed;
The plurality of openings formed in the second sheet mask includes a first opening and a second opening, and
The first opening is formed in an array corresponding to the pixel,
The vapor deposition mask characterized in that the second opening has the same pitch and the same shape as the first opening, and overlaps the first sheet-like mask.
The vapor deposition mask according to claim 1, wherein the second opening is formed at a circumferential end in the effective portion.
The deposition mask according to claim 1, wherein a shape corresponding to at least a part of the outer shape of the display area among the outer shape opening includes an arc shape.
The vapor deposition mask according to claim 3, wherein the arc shape is formed on a side corresponding to at least one side of the effective portion in the outer shape opening.
The vapor deposition mask according to claim 3, wherein the arc shape is formed at a corner corresponding to at least one of four corners of the effective portion in the outer shape opening.
The vapor deposition layer is deposited on the vapor deposition substrate, the second sheet-like mask is closer to the vapor deposition substrate than the first sheet-like mask. The vapor deposition mask as described in.
The vapor deposition mask according to any one of claims 1 to 6, wherein the first sheet-like mask and the second sheet-like mask include a material attracted to a magnetic force.
The deposition mask according to any one of claims 1 to 7, further comprising a frame-shaped mask frame to which the first sheet-shaped mask and the second sheet-shaped mask are attached.
The first sheet-like mask extends in a first direction and extends in parallel to each other with a plurality of cover sheets attached to the mask frame in parallel with each other, and extends in a second direction orthogonal to the first direction to the mask frame in parallel with each other. With multiple howling sheets attached,
9. The deposition mask according to claim 8, wherein the outer shape opening is an area defined by the cover sheet adjacent to each other and the howling sheet adjacent to each other.
The first sheet-like mask has a configuration in which the outer shape opening is formed in one sheet-like mask,
The mask frame has a concave portion on the attachment surface of the first sheet mask and the second sheet mask, and a convex portion protruding from the concave portion.
The first sheet mask is attached to the recess of the attachment surface,
The said 2nd sheet-like mask is attached to the said convex part among the said attachment surfaces, The vapor deposition mask of Claim 8 characterized by the above-mentioned.
The shape corresponding to at least a part of the outline of the display area among the outline openings is a deformed shape which protrudes inward or outward from the edge of a rectangle or a square. The vapor deposition mask as described in 1 or 2.
When depositing the deposition layer on the deposition target substrate, the second sheet mask is closer to the deposition target substrate than the first sheet mask,
Among the outline openings, the shape corresponding to at least a part of the outline of the display area is a deformed shape that protrudes inward or outward from the edge of the rectangle or square,
Of the cover sheet and the howling sheet, the howling sheet has a shape corresponding to the different shape,
10. The deposition mask according to claim 9, wherein the howling sheet is closer to the second sheet mask than the cover sheet.
The second sheet mask is a rectangle whose longitudinal direction is the first direction, and is arranged side by side in the second direction,
The vapor deposition mask according to claim 12, wherein the howling sheet is stretched across the plurality of second sheet masks.
When depositing the deposition layer on the deposition target substrate, the second sheet mask is closer to the deposition target substrate than the first sheet mask,
The shape corresponding to at least a part of the outline of the display area among the outline openings is an irregular shape having a deformed portion which protrudes inward or outward from the edge of the rectangle or square,
Of the cover sheet and the howling sheet, the cover sheet has a shape corresponding to the deformed portion,
10. The vapor deposition mask according to claim 9, wherein the cover sheet is closer to the second sheet mask than the howling sheet.
The second sheet mask is a rectangle whose longitudinal direction is the first direction, and is arranged side by side in the second direction,
15. The vapor deposition mask according to claim 14, wherein the cover sheet is overlapped with the mutually opposing edges extending in the longitudinal direction in the adjacent second sheet masks.
The shape of the outline opening is a deformed shape having a deformed portion which protrudes inward or outward from a rectangular or square edge,
10. The vapor deposition mask according to claim 9, wherein at least one of a concave shape and a convex shape corresponding to the deformed portion is formed on both the cover sheet and the howling sheet.
The deposition mask according to any one of claims 1 to 16, wherein the deposition layer is a layer deposited for each pixel.
A method of manufacturing a display panel, comprising a deposition step using the deposition mask according to any one of claims 1 to 17.
What is claimed is: 1. A flexible display panel comprising: a display area having a notch in at least a part of an outer shape; and a frame area surrounding the outer periphery of the display area and having a notch.
The display area is provided with a deposited layer formed in a matrix,
In the periphery of the notch in the frame area, a first vapor deposition layer having the same shape as the vapor deposition layer formed in the display area, and a part of the periphery of the vapor deposition layer formed in the display area What is claimed is: 1. A display panel comprising: a second deposition layer having a notched shape.