WO2019015388A1 - Spray head for plasma etching system - Google Patents

Spray head for plasma etching system Download PDF

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Publication number
WO2019015388A1
WO2019015388A1 PCT/CN2018/087670 CN2018087670W WO2019015388A1 WO 2019015388 A1 WO2019015388 A1 WO 2019015388A1 CN 2018087670 W CN2018087670 W CN 2018087670W WO 2019015388 A1 WO2019015388 A1 WO 2019015388A1
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WIPO (PCT)
Prior art keywords
plasma etching
etching system
intake
annular flange
showerhead
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PCT/CN2018/087670
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French (fr)
Chinese (zh)
Inventor
车东晨
李娜
胡冬冬
许开东
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江苏鲁汶仪器有限公司
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Publication of WO2019015388A1 publication Critical patent/WO2019015388A1/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3244—Gas supply means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/32—Processing objects by plasma generation
    • H01J2237/33—Processing objects by plasma generation characterised by the type of processing
    • H01J2237/334—Etching

Definitions

  • the present invention relates to the field of microelectronics, and more particularly to plasma etching systems, and more particularly to showerheads for plasma etching systems.
  • Etching is an important part of microfabrication technology, and the rapid development of microelectronics is driving its continuous development.
  • the etching technology can be divided into dry etching and wet etching.
  • the initial etching is mainly wet etching, but as the device is fabricated into the micron and submicron era, the wet etching is performed.
  • the etch is difficult to meet the increasingly high precision requirements.
  • Dry etching generally removes the etched film by a combination of physical and chemical methods. There are many kinds of dry etching commonly used.
  • the working principle is mainly that the etching gas is inductively coupled to glow.
  • Discharge generate active radicals, metastable particles, atoms, etc., while providing a bias voltage in the reaction chamber, providing energy to the plasma, causing the plasma to act perpendicularly on the substrate, reacting with it to form a volatile gaseous substance, and being
  • the pumping equipment is pumped away.
  • the dry etching has the advantages of high etching speed, high selection ratio, good anisotropy, small etching damage, good uniformity of large area, high controllability of the etched section profile, and smooth and smooth etching surface, and the operation is simple. It is convenient for automatic control and can meet the requirements of various micro-structure devices such as VLSI, MEMS and optoelectronic devices.
  • the requirements for plasma etching are getting higher and higher.
  • One of the main parameters describing the etching effect is uniformity, and the most important factor affecting the uniformity is the distribution of plasma in the reaction chamber.
  • the structure and the design of the air intake portion together determine the distribution of the plasma.
  • the inside of the reaction chamber is mostly circular, and the suction port structure is located at the lower part of the periphery of the sample stage, and the reaction gas enters the uniform structure above the chamber from the side of the cavity through the intake pipe, and then enters Into the chamber.
  • the gas enters from one side of the uniform structure Since the gas enters from one side of the uniform structure, the amount of gas in the spray hole near the intake pipe is likely to be large, and the amount of intake air from the spray hole on the side far from the intake pipe is small, resulting in During the process, the surface of the substrate cannot be uniformly contacted with the reaction gas, especially the surface of the substrate away from the side of the inlet is in contact with the reaction gas, and the etching effect of the substrate region is not good, which ultimately affects the etching uniformity.
  • the present invention provides a shower head of a plasma etching system
  • the main body is in the shape of a disk
  • a first annular flange, an air inlet groove and a second annular flange are provided at the near edge of the upper surface of the disk body.
  • an air guiding passage wherein the air inlet groove is disposed between the first annular flange and the second annular flange, and the second annular flange and the air guiding passage are staggered and integrally
  • the annular central portion of the disk body is provided with a first air inlet hole which is concentric annularly and evenly distributed inside and outside, and is further provided between the outer ring air inlet hole and the second annular flange of the central portion.
  • the plurality of turns are concentric annular and evenly distributed second intake holes, and further include a gas block for selectively blocking the second intake holes according to a gas distribution range during the processing.
  • the spacing between the adjacent two second annular inlet holes is 30 to 70 mm.
  • the second annular flange has a ring-shaped diameter larger than a cross-sectional distance of a lower electrode of the plasma etching system.
  • the annular shape of the second annular flange is 10 to 50 mm larger than the cross-sectional distance of the lower electrode of the plasma etching system.
  • the second annular flange has a width of 3 to 7 mm.
  • the diameter of the gas block is the same as the diameter of the inlet end of the second intake port.
  • the first and second intake holes are counterbored holes
  • the inlet end has a diameter of 2 to 4 mm
  • the outlet end has a diameter of 0.5 to 1.5 mm.
  • the height of the first intake hole countersunk of the outer ring located in the central region is greater than or equal to the first intake hole of the inner ring located in the central region The height of the countersunk head.
  • the material of the gas block may be ceramic, quartz or polytetrafluoroethylene.
  • the disk body is made of alumina ceramic, quartz, silicon oxide, silicon nitride or aluminum alloy.
  • the shower head of a plasma etching system of the present invention can effectively solve the problem that the reaction gas which is located on the side of the reaction chamber on the side of the reaction chamber cannot be uniformly distributed to the surface of the substrate.
  • the reaction gas enters the vacuum reaction chamber through the shower head of the plasma etching system of the present invention, and is ensured by the arrangement of the air guiding groove, the air guiding channel and a series of air inlet holes.
  • the substrate located in the middle of the reaction chamber can be brought into more uniform contact with the reaction gas, thereby improving the uniformity of the plasma etching.
  • the adjustability of the intake air flow is further achieved by providing a gas stop.
  • FIG. 1 is a schematic perspective view of a showerhead of a plasma etching system.
  • FIG. 2 is a top plan view of a showerhead of a plasma etch system.
  • FIG 3 is a cross-sectional view of the first intake port of the inner and outer rings in the central region of the shower head of the plasma etching system.
  • connection In the description of the present invention, it should be noted that the terms “installation”, “connected”, and “connected” are to be understood broadly, and may be fixed or detachable, for example, unless otherwise explicitly defined and defined. Connected, or integrally connected; can be mechanical or electrical; can be directly connected, or indirectly connected through an intermediate medium, can be the internal communication of the two components.
  • Connected, or integrally connected can be mechanical or electrical; can be directly connected, or indirectly connected through an intermediate medium, can be the internal communication of the two components.
  • the specific meaning of the above terms in the present invention can be understood in a specific case by those skilled in the art.
  • FIG. 1 is a schematic perspective view of a showerhead of a plasma etching system.
  • 2 is a top plan view of a showerhead of a plasma etch system.
  • the main body of the shower head of the plasma etching system has a disk shape, and the upper surface of the upper surface of the disk body is provided with a first annular flange 1, an air inlet groove 2, and a second annular flange. 3 and a gas guiding passage 4, wherein the air inlet groove 2 is disposed between the first annular flange 1 and the second annular flange 3, and the second annular flange 3 and the air guiding passage 4 are staggered and integrally formed in a ring shape.
  • the reaction gas entering from the upper surface can be directed to the central zone.
  • the annular shape of the second annular flange 3 is larger than the cross-sectional distance of the lower electrode of the plasma etching system. Further preferably, the annular shape of the second annular flange 3 is larger than the cross-sectional distance of the lower electrode of the plasma etching system by 10 mm to 50 mm.
  • the width of the second annular flange is preferably from 3 mm to 7 mm.
  • the central portion of the disk body is provided with a first air inlet hole which is concentric annularly and evenly distributed inside and outside, that is, the first air inlet hole 5 located in the central inner ring shown in FIG. 1 and FIG. 2 and the first air inlet hole 5 in the central outer ring
  • An air inlet hole 6 ensures that the reaction gas can uniformly enter the reaction chamber of the plasma etching machine.
  • the first intake hole 5 located at the central inner ring and the first intake hole 6 at the central outer ring are counterbore holes.
  • a cross-sectional view of the first intake opening of the central inner and outer ring is shown in FIG. As shown in Fig.
  • the intake end aperture a of the first intake hole 6 located in the center outer ring is preferably 2 to 3 mm, and the outlet end aperture b is preferably 0.5 to 1.5 mm.
  • the intake end aperture c of the first intake hole 5 located in the central inner ring is preferably 2 to 4 mm, and the outlet end diameter d is preferably 0.5 to 1.5 mm.
  • the height h1 of the countersunk head of the first intake hole 6 of the central outer ring is greater than or equal to the height h2 of the countersunk head of the first intake hole 5 of the central inner ring.
  • a plurality of second air inlet holes which are concentrically annular and evenly distributed around the axis are further provided. 7.
  • the spacing between the second intake holes of the adjacent two turns is preferably 30 to 70 mm.
  • the number of second intake holes provided per turn increases according to the increase in the diameter of the ring in which it is located, and the second intake holes on each turn are evenly distributed.
  • the intake port diameter of the second intake hole 7 is preferably 2 to 3 mm, and the outlet end hole diameter is preferably 0.5 to 1.5 mm.
  • the shower head has no second annular flange 3 and a gas guiding passage 4 which are evenly distributed in a ring shape.
  • the gas inlet hole of the gas tank 2 enters the inside of the reaction gas, thereby causing the plasma density formed there to be large, and only a small amount of gas is diffused to the gas inlet hole away from the annular gas feed tank 2, and the plasma density of the portion is small, so
  • the surface of the substrate remote from the side of the inlet is in contact with the reactive gas, and the etching effect of the substrate region is not good, which ultimately affects the etching uniformity.
  • the showerhead structure of the plasma etching system of the present invention is introduced into the second annular flange 3 and the air guiding passage 4, and the gas enters from the annular air inlet groove 2, and is hindered by the second annular flange 3. Firstly, it diffuses in the annular air inlet groove 2, and evenly distributes from the air guiding passage 4 into the area having the first air inlet hole and the second air inlet hole, thereby ensuring the first air inlet hole and the second air intake hole.
  • the pores produce a uniform air intake effect, and a uniform plasma density distribution is obtained, ensuring that the substrate located in the middle of the reaction chamber contacts the reaction gas more uniformly during the etching, thereby improving the etching uniformity.
  • the shower head of the plasma etching system of the present invention is further provided with a gas stopper for selectively blocking the second intake hole according to the gas distribution range during the processing.
  • the diameter of the gas stop is the same as the diameter of the intake end of the second intake port.
  • the material of the gas block may be ceramic, quartz, polytetrafluoroethylene or the like.
  • the material of the showerhead of the plasma etching system of the present invention may be alumina ceramic, quartz, silicon oxide, silicon nitride, aluminum alloy or the like.
  • the shower head of a plasma etching system of the present invention can effectively solve the problem that the reaction gas cannot be uniformly distributed to the surface of the substrate due to the upper air intake structure of the reaction chamber being located on the side.
  • the reaction gas enters the vacuum reaction chamber through the shower head of the plasma etching system of the present invention, and is ensured by the arrangement of the air guiding groove, the air guiding channel and a series of air inlet holes.
  • the substrate located in the middle of the reaction chamber can be brought into more uniform contact with the reaction gas, thereby improving the uniformity of the plasma etching.
  • the adjustability of the intake air flow is further achieved by providing a gas stop.

Abstract

Disclosed is a spray head for a plasma etching system, the main body having a disc shape, a first annular flange (1), an intake channel (2), second annular flanges (3), and air guide passages (4) are provided on the upper surface of the disc body close to the edge of the disc body; the intake channel (2) is provided between the first annular flange (1) and the second annular flanges (3); the second annular flanges (3) and the air guide passages (4) are alternately distributed and form a ring as a whole; first intake holes (5, 6), which are uniformly distributed and form an inner ring and an outer ring concentric to the inner ring, are provided at the central region of the disc body; second intake holes (7), which are uniformly distributed and form a plurality of concentric rings, are provided between the intake hole (6) forming the outer ring at the central region and the second annular flanges (3); the spray head for a plasma etching system is further provided with gas blocks for selectively blocking the second intake holes (7) according to a gas distribution range during processing. The present invention can effectively improve the uniformity of plasma etching, while making intake and homogenization adjustable.

Description

一种等离子体刻蚀系统的喷淋头Sprinkler of plasma etching system 技术领域Technical field
本发明涉及微电子技术领域，具体涉及等离子体刻蚀系统，更具体地涉及等离子体刻蚀系统的喷淋头。The present invention relates to the field of microelectronics, and more particularly to plasma etching systems, and more particularly to showerheads for plasma etching systems.
背景技术Background technique
刻蚀是微细加工技术的一个重要组成部分，微电子学的快速发展推动其不断向前发展。从总体上说，刻蚀技术可分为干法刻蚀和湿法刻蚀两种，初期的刻蚀以湿法刻蚀为主，但随着器件制作进入微米、亚微米时代，湿法刻蚀难以满足越来越高的精度要求。干法刻蚀一般是通过物理和化学两个方面相结合的办法来去除被刻蚀的薄膜，常用的干法刻蚀有很多种，其工作原理主要是刻蚀气体通过电感耦合的方式辉光放电，产生活性游离基、亚稳态粒子、原子等，同时在反应室内提供偏置电压，给等离子体提供能量，使等离子体垂直作用在基片上，与其反应生成可挥发的气态物质，并被抽气设备抽走。干法刻蚀具有刻蚀速度快、选择比高、各向异性好、刻蚀损伤小、大面积均匀性好、刻蚀断面轮廓可控性高和刻蚀表面平整光滑等优点，操作简单，便于自动控制，可以满足制作超大规模集成电路、MEMS、光电子器件等各种微结构器件的要求。Etching is an important part of microfabrication technology, and the rapid development of microelectronics is driving its continuous development. Generally speaking, the etching technology can be divided into dry etching and wet etching. The initial etching is mainly wet etching, but as the device is fabricated into the micron and submicron era, the wet etching is performed. The etch is difficult to meet the increasingly high precision requirements. Dry etching generally removes the etched film by a combination of physical and chemical methods. There are many kinds of dry etching commonly used. The working principle is mainly that the etching gas is inductively coupled to glow. Discharge, generate active radicals, metastable particles, atoms, etc., while providing a bias voltage in the reaction chamber, providing energy to the plasma, causing the plasma to act perpendicularly on the substrate, reacting with it to form a volatile gaseous substance, and being The pumping equipment is pumped away. The dry etching has the advantages of high etching speed, high selection ratio, good anisotropy, small etching damage, good uniformity of large area, high controllability of the etched section profile, and smooth and smooth etching surface, and the operation is simple. It is convenient for automatic control and can meet the requirements of various micro-structure devices such as VLSI, MEMS and optoelectronic devices.
随着技术的发展，对等离子体刻蚀的要求也越来越高，其中描述刻蚀效果的一个主要参数就是均匀性，而影响均匀性最主要因素就是反应腔内等离子体的分布，腔室的结构与进气部分的设计共同决定了等离子体的分布。目前存在的刻蚀系统中，反应腔室内部多为圆形，而抽气口结构位于样品台周边下部，反应气体经进气管道由腔体一侧进入腔室上方的匀气结构中，之后进入到腔室中。这种结构由于气体从匀气结构的一侧进入，容易造成气体在靠近进气管道一侧的喷淋孔进气量大，远离进气管道一侧的喷淋孔进气量小，导致在工艺过程中基片表面无法均匀接触到反应气体，尤其是远离进气口一侧区域的基片表面接触反应气体不足，该基片区域刻蚀效果不佳，最终影响刻蚀均匀性。With the development of technology, the requirements for plasma etching are getting higher and higher. One of the main parameters describing the etching effect is uniformity, and the most important factor affecting the uniformity is the distribution of plasma in the reaction chamber. The structure and the design of the air intake portion together determine the distribution of the plasma. In the existing etching system, the inside of the reaction chamber is mostly circular, and the suction port structure is located at the lower part of the periphery of the sample stage, and the reaction gas enters the uniform structure above the chamber from the side of the cavity through the intake pipe, and then enters Into the chamber. Since the gas enters from one side of the uniform structure, the amount of gas in the spray hole near the intake pipe is likely to be large, and the amount of intake air from the spray hole on the side far from the intake pipe is small, resulting in During the process, the surface of the substrate cannot be uniformly contacted with the reaction gas, especially the surface of the substrate away from the side of the inlet is in contact with the reaction gas, and the etching effect of the substrate region is not good, which ultimately affects the etching uniformity.
发明内容Summary of the invention
为了解决上述问题，本发明提供一种等离子体刻蚀系统的喷淋头，主体呈圆盘状，盘体上表面近边缘处设有第一环形凸缘、进气槽、第二环形凸缘和导气通道，其中，所述进气槽设置在所述第一环形凸缘和所述第二环形凸缘之间，所述第二环形凸缘和所述导气通道交错分布且整体呈环状，盘体中央区域设有内外两圈呈同心环形且均匀分布的第一进气孔，在所述中央区域的外圈进气孔与所述第二环形凸缘之间，还设有多圈呈同心环形且均匀分布的第二进气孔，还包括气体挡块，对所述第二进气孔在工艺加工过程中根据气体分布范围进行选择性遮挡。In order to solve the above problems, the present invention provides a shower head of a plasma etching system, the main body is in the shape of a disk, and a first annular flange, an air inlet groove and a second annular flange are provided at the near edge of the upper surface of the disk body. And an air guiding passage, wherein the air inlet groove is disposed between the first annular flange and the second annular flange, and the second annular flange and the air guiding passage are staggered and integrally The annular central portion of the disk body is provided with a first air inlet hole which is concentric annularly and evenly distributed inside and outside, and is further provided between the outer ring air inlet hole and the second annular flange of the central portion. The plurality of turns are concentric annular and evenly distributed second intake holes, and further include a gas block for selectively blocking the second intake holes according to a gas distribution range during the processing.
本发明的等离子体刻蚀系统的喷淋头，优选为，所述相邻两圈第二进气孔之间的间距为30～70mm。In the shower head of the plasma etching system of the present invention, preferably, the spacing between the adjacent two second annular inlet holes is 30 to 70 mm.
本发明的等离子体刻蚀系统的喷淋头，优选为，所述第二环形凸缘所呈环形的直径大于等离子体刻蚀系统的下电极的横截面距离。In the showerhead of the plasma etching system of the present invention, preferably, the second annular flange has a ring-shaped diameter larger than a cross-sectional distance of a lower electrode of the plasma etching system.
本发明的等离子体刻蚀系统的喷淋头，优选为，所述第二环形凸缘所呈环形的直径比等离子体刻蚀系统的下电极的横截面距离大10～50mm。In the shower head of the plasma etching system of the present invention, preferably, the annular shape of the second annular flange is 10 to 50 mm larger than the cross-sectional distance of the lower electrode of the plasma etching system.
本发明的等离子体刻蚀系统的喷淋头，优选为，所述第二环形凸缘的宽度为3～7mm。In the shower head of the plasma etching system of the present invention, preferably, the second annular flange has a width of 3 to 7 mm.
本发明的等离子体刻蚀系统的喷淋头，优选为，所述气体挡块的直径与所述第二进气孔进气端的直径相同。In the shower head of the plasma etching system of the present invention, preferably, the diameter of the gas block is the same as the diameter of the inlet end of the second intake port.
本发明的等离子体刻蚀系统的喷淋头，优选为，所述第一、第二进气孔为沉头孔，进气端的孔径为2～4mm，出气端的孔径为0.5～1.5mm。In the shower head of the plasma etching system of the present invention, preferably, the first and second intake holes are counterbored holes, the inlet end has a diameter of 2 to 4 mm, and the outlet end has a diameter of 0.5 to 1.5 mm.
本发明的等离子体刻蚀系统的喷淋头，优选为，位于所述中央区域的外圈的第一进气孔沉头的高度大于等于位于所述中央区域的内圈的第一进气孔沉头的高度。In the shower head of the plasma etching system of the present invention, preferably, the height of the first intake hole countersunk of the outer ring located in the central region is greater than or equal to the first intake hole of the inner ring located in the central region The height of the countersunk head.
本发明的等离子体刻蚀系统的喷淋头，优选为，所述气体挡块的材质可为陶瓷、石英或聚四氟乙烯。In the shower head of the plasma etching system of the present invention, preferably, the material of the gas block may be ceramic, quartz or polytetrafluoroethylene.
本发明的等离子体刻蚀系统的喷淋头，优选为，所述盘体材质为氧化铝陶瓷、石英、氧化硅、氮化硅或铝合金。In the shower head of the plasma etching system of the present invention, preferably, the disk body is made of alumina ceramic, quartz, silicon oxide, silicon nitride or aluminum alloy.
本发明的一种等离子体刻蚀系统的喷淋头能够有效地解决因反应腔室上进气结构位于侧边而造成的反应气体无法均匀分布到基片表面的问题。在进行等离子体刻蚀的过程中，反应气体经由本发明的等离子体刻蚀系统的喷淋头进入真空反应腔室内，由于导气槽、导气通道及一系列进气孔的设置，保证了位于反应腔室中部的基片能够与反应气体更加均匀地进行接触，从而提高等离子体刻蚀的均匀性。此外，通过设置气体挡块，进一步实现了进气匀流的可调节性。The shower head of a plasma etching system of the present invention can effectively solve the problem that the reaction gas which is located on the side of the reaction chamber on the side of the reaction chamber cannot be uniformly distributed to the surface of the substrate. During the plasma etching process, the reaction gas enters the vacuum reaction chamber through the shower head of the plasma etching system of the present invention, and is ensured by the arrangement of the air guiding groove, the air guiding channel and a series of air inlet holes. The substrate located in the middle of the reaction chamber can be brought into more uniform contact with the reaction gas, thereby improving the uniformity of the plasma etching. In addition, the adjustability of the intake air flow is further achieved by providing a gas stop.
附图说明DRAWINGS
为了更清楚地说明本发明具体实施方式或现有技术中的技术方案，下面将对具体实施方式或现有技术描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图是本发明的一些实施方式，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他的附图。In order to more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings to be used in the specific embodiments or the description of the prior art will be briefly described below, and obviously, the attached in the following description The drawings are some embodiments of the present invention, and other drawings may be obtained from those of ordinary skill in the art without departing from the scope of the invention.
图1是等离子体刻蚀系统的喷淋头的立体结构示意图。1 is a schematic perspective view of a showerhead of a plasma etching system.
图2是等离子体刻蚀系统的喷淋头的俯视图。2 is a top plan view of a showerhead of a plasma etch system.
图3是等离子体刻蚀系统的喷淋头的中央区域内外圈第一进气孔的剖面图。3 is a cross-sectional view of the first intake port of the inner and outer rings in the central region of the shower head of the plasma etching system.
具体实施方式Detailed ways
下面将结合附图对本发明的技术方案进行清楚、完整地描述，显然，所描述的实施例是本发明一部分实施例，而不是全部的实施例。基于本发明中的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例，都属于本发明保护的范围。The technical solutions of the present invention will be clearly and completely described in the following with reference to the accompanying drawings. It is obvious that the described embodiments are a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments obtained by a person of ordinary skill in the art based on the embodiments of the present invention without creative efforts are within the scope of the present invention.
在本发明的描述中，需要说明的是，术语“上”、“下”、“中央”、“边缘”、“内”“外”等指示的方位或位置关系为基于附图所示的方位或位置关系，仅是为了便于描述本发明和简化描述，而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作，因此不能理解为对本发明的限制。此外，术语“第一”、“第二”仅用于描述目的，而不能理解为指示或暗示相对重要性。In the description of the present invention, it is to be noted that the orientations or positional relationships of the terms "upper", "lower", "central", "edge", "inner", "outside", etc. are based on the orientation shown in the drawings. Or, the positional relationship is merely for the convenience of the description of the present invention and the simplification of the description, and is not intended to imply that the device or the component of the present invention has a specific orientation and is constructed and operated in a specific orientation, and thus is not to be construed as limiting the invention. Moreover, the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
在本发明的描述中，需要说明的是，除非另有明确的规定和限定，术语“安装”、“相连”、“连接”应做广义理解，例如，可以是固定连接，也可以是可拆卸连接，或一体地连接；可以是机械连接，也可以是电连接；可以是直接相连，也可以通过中间媒介间接相连，可以是两个元件内部的连通。对于本领域的普通技术人员而言，可以具体情况理解上述术语在本发明中的具体含义。In the description of the present invention, it should be noted that the terms "installation", "connected", and "connected" are to be understood broadly, and may be fixed or detachable, for example, unless otherwise explicitly defined and defined. Connected, or integrally connected; can be mechanical or electrical; can be directly connected, or indirectly connected through an intermediate medium, can be the internal communication of the two components. The specific meaning of the above terms in the present invention can be understood in a specific case by those skilled in the art.
图1是等离子体刻蚀系统的喷淋头的立体结构示意图。图2是等离子体刻蚀系统的喷淋头的俯视图。如图1～2所示，等离子体刻蚀系统的喷淋头的主体呈圆盘状，盘体上表面靠近边缘处设有第一环形凸缘1、进气槽2、第二环形凸缘3和导气通道4，其中，进气槽2设置在第一环形凸缘1和第二环形凸缘3之间，第二环形凸缘3和导气通道4交错分布且整体呈环状，可以将从上表面进入的反应气体引导至中央区。第二环形凸缘3所呈环形的直径大于等离子体刻蚀系统的下电极的横截面距离。进一步优选地，第二环形凸缘3所呈环形的直径比等离子体刻蚀系统的下电极的横截面距离大10mm～50mm。第二环形凸缘的宽度优选为3mm～7mm。1 is a schematic perspective view of a showerhead of a plasma etching system. 2 is a top plan view of a showerhead of a plasma etch system. As shown in FIG. 1 to FIG. 2, the main body of the shower head of the plasma etching system has a disk shape, and the upper surface of the upper surface of the disk body is provided with a first annular flange 1, an air inlet groove 2, and a second annular flange. 3 and a gas guiding passage 4, wherein the air inlet groove 2 is disposed between the first annular flange 1 and the second annular flange 3, and the second annular flange 3 and the air guiding passage 4 are staggered and integrally formed in a ring shape. The reaction gas entering from the upper surface can be directed to the central zone. The annular shape of the second annular flange 3 is larger than the cross-sectional distance of the lower electrode of the plasma etching system. Further preferably, the annular shape of the second annular flange 3 is larger than the cross-sectional distance of the lower electrode of the plasma etching system by 10 mm to 50 mm. The width of the second annular flange is preferably from 3 mm to 7 mm.
盘体中央区设有内外两圈呈同心环形且均匀分布的第一进气孔，即图1、图2中所示的位于中央内圈的第一进气孔5和位于中央外圈的第一进气孔6，保 证反应气体可均匀进入到等离子体刻蚀机的反应腔室内。优选地，位于中央内圈的第一进气孔5和位于中央外圈的第一进气孔6为沉头孔。在图3中示出了中央内外圈第一进气孔的剖面图。如图3所示，位于中央外圈的第一进气孔6的进气端孔径a优选为2～3mm，出气端孔径b优选为0.5～1.5mm。位于中央内圈的第一进气孔5的进气端孔径c优选为2～4mm，出气端孔径d优选为0.5～1.5mm。中央外圈的第一进气孔6沉头的高度h1大于等于中央内圈的第一进气孔5沉头的高度h2。The central portion of the disk body is provided with a first air inlet hole which is concentric annularly and evenly distributed inside and outside, that is, the first air inlet hole 5 located in the central inner ring shown in FIG. 1 and FIG. 2 and the first air inlet hole 5 in the central outer ring An air inlet hole 6 ensures that the reaction gas can uniformly enter the reaction chamber of the plasma etching machine. Preferably, the first intake hole 5 located at the central inner ring and the first intake hole 6 at the central outer ring are counterbore holes. A cross-sectional view of the first intake opening of the central inner and outer ring is shown in FIG. As shown in Fig. 3, the intake end aperture a of the first intake hole 6 located in the center outer ring is preferably 2 to 3 mm, and the outlet end aperture b is preferably 0.5 to 1.5 mm. The intake end aperture c of the first intake hole 5 located in the central inner ring is preferably 2 to 4 mm, and the outlet end diameter d is preferably 0.5 to 1.5 mm. The height h1 of the countersunk head of the first intake hole 6 of the central outer ring is greater than or equal to the height h2 of the countersunk head of the first intake hole 5 of the central inner ring.
此外，在中央外圈的第一进气孔6的外侧、第二环形凸缘3和导气通道4的内侧，还设有多圈围绕轴心呈同心环形且均匀分布的第二进气孔7。相邻两圈第二进气孔之间的间距优选为30～70mm。每圈所设第二进气孔的个数根据其所在环形的直径的增大而增加，每一圈上的第二进气孔都均匀分布。第二进气孔7的进气端孔径优选为2～3mm，出气端孔径优选为0.5～1.5mm。In addition, on the outer side of the first air inlet hole 6 of the central outer ring, the inner side of the second annular flange 3 and the air guiding passage 4, a plurality of second air inlet holes which are concentrically annular and evenly distributed around the axis are further provided. 7. The spacing between the second intake holes of the adjacent two turns is preferably 30 to 70 mm. The number of second intake holes provided per turn increases according to the increase in the diameter of the ring in which it is located, and the second intake holes on each turn are evenly distributed. The intake port diameter of the second intake hole 7 is preferably 2 to 3 mm, and the outlet end hole diameter is preferably 0.5 to 1.5 mm.
以往技术的等离子体刻蚀系统的喷淋头没有环形均匀分布的第二环形凸缘3和导气通道4，气体从圆环状进气槽2进入后，大部分气体由靠近圆环状进气槽2的进气孔进入反应气体内部，从而导致该处形成的等离子体密度大，仅少量气体扩散至远离圆环状进气槽2的进气孔，该部分的等离子体密度小，因此在刻蚀期间，远离进气口一侧区域的基片表面接触反应气体不足，该基片区域刻蚀效果不佳，最终影响刻蚀均匀性。本发明的等离子体刻蚀系统的喷淋头结构通过引入第二环形凸缘3和导气通道4，气体从圆环状进气槽2处进入后，受到第二环形凸缘3的阻碍作用，首先在圆环状进气槽2内扩散，均匀分布后从导气通道4处进入具有第一进气孔和第二进气孔的区域，从而保证第一进气孔与第二进气孔产生均匀的进气效果，获得均匀的等离子体密度分布，确保在刻蚀期间，位于反应腔室中部的基片更加均匀的接触反应气体，提高了刻蚀均匀性。In the prior art plasma etching system, the shower head has no second annular flange 3 and a gas guiding passage 4 which are evenly distributed in a ring shape. After the gas enters from the annular air inlet groove 2, most of the gas enters the ring shape. The gas inlet hole of the gas tank 2 enters the inside of the reaction gas, thereby causing the plasma density formed there to be large, and only a small amount of gas is diffused to the gas inlet hole away from the annular gas feed tank 2, and the plasma density of the portion is small, so During the etching, the surface of the substrate remote from the side of the inlet is in contact with the reactive gas, and the etching effect of the substrate region is not good, which ultimately affects the etching uniformity. The showerhead structure of the plasma etching system of the present invention is introduced into the second annular flange 3 and the air guiding passage 4, and the gas enters from the annular air inlet groove 2, and is hindered by the second annular flange 3. Firstly, it diffuses in the annular air inlet groove 2, and evenly distributes from the air guiding passage 4 into the area having the first air inlet hole and the second air inlet hole, thereby ensuring the first air inlet hole and the second air intake hole. The pores produce a uniform air intake effect, and a uniform plasma density distribution is obtained, ensuring that the substrate located in the middle of the reaction chamber contacts the reaction gas more uniformly during the etching, thereby improving the etching uniformity.
此外，本发明的等离子体刻蚀系统的喷淋头还设置有气体挡块，在工艺加工过程中根据气体分布范围对第二进气孔进行选择性遮挡。优选地，气体挡块的直径与第二进气孔进气端的直径相同。该气体挡块的材质可以是陶瓷、石 英、聚四氟乙烯等。通过对不同的第二进气孔进行遮挡，可以形成不同的气体分布范围，这样的设计不仅能够使反应气体与基片均匀接触，提高刻蚀均匀性，而且实现了进气匀流的可调节。在刻蚀工艺过程中，工艺人员可以根据具体工艺参数选择最优进气方案，遮挡设定的第二进气孔，使气体仅从保留的第二进气孔进入反应腔。In addition, the shower head of the plasma etching system of the present invention is further provided with a gas stopper for selectively blocking the second intake hole according to the gas distribution range during the processing. Preferably, the diameter of the gas stop is the same as the diameter of the intake end of the second intake port. The material of the gas block may be ceramic, quartz, polytetrafluoroethylene or the like. By shielding different second air intake holes, different gas distribution ranges can be formed. Such a design not only enables the reaction gas to be in uniform contact with the substrate, but also improves the uniformity of etching, and realizes the adjustable uniformity of the intake air. . During the etching process, the process personnel can select an optimal intake scheme according to the specific process parameters, and block the set second intake hole so that the gas enters the reaction chamber only from the retained second intake hole.
本发明的等离子体刻蚀系统的喷淋头的盘体材质可以为氧化铝陶瓷、石英、氧化硅、氮化硅、铝合金等。The material of the showerhead of the plasma etching system of the present invention may be alumina ceramic, quartz, silicon oxide, silicon nitride, aluminum alloy or the like.
本发明的一种等离子体刻蚀系统的喷淋头能够有效地解决因反应腔室的上进气结构位于侧边而造成的反应气体无法均匀分布到基片表面的问题。在进行等离子体刻蚀的过程中，反应气体经由本发明的等离子体刻蚀系统的喷淋头进入真空反应腔室内，由于导气槽、导气通道及一系列进气孔的设置，保证了位于反应腔室中部的基片能够与反应气体更加均匀地进行接触，从而提高等离子体刻蚀的均匀性。此外，通过设置气体挡块，进一步实现了进气匀流的可调节性。The shower head of a plasma etching system of the present invention can effectively solve the problem that the reaction gas cannot be uniformly distributed to the surface of the substrate due to the upper air intake structure of the reaction chamber being located on the side. During the plasma etching process, the reaction gas enters the vacuum reaction chamber through the shower head of the plasma etching system of the present invention, and is ensured by the arrangement of the air guiding groove, the air guiding channel and a series of air inlet holes. The substrate located in the middle of the reaction chamber can be brought into more uniform contact with the reaction gas, thereby improving the uniformity of the plasma etching. In addition, the adjustability of the intake air flow is further achieved by providing a gas stop.
最后应说明的是：以上各实施例仅用以说明本发明的技术方案，而非对其限制；尽管参照前述各实施例对本发明进行了详细的说明，本领域的普通技术人员应当理解：其依然可以对前述各实施例所记载的技术方案进行修改，或者对其中部分或者全部技术特征进行等同替换；而这些修改或者替换，并不使相应技术方案的本质脱离本发明各实施例技术方案的范围。Finally, it should be noted that the above embodiments are merely illustrative of the technical solutions of the present invention, and are not intended to be limiting; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art will understand that The technical solutions described in the foregoing embodiments may be modified, or some or all of the technical features may be equivalently replaced; and the modifications or substitutions do not deviate from the technical solutions of the embodiments of the present invention. range.

Claims (10)

  1. 一种等离子体刻蚀系统的喷淋头，主体呈圆盘状，其特征在于，A shower head of a plasma etching system, the main body has a disk shape, and is characterized in that
    盘体上表面近边缘处设有第一环形凸缘、进气槽、第二环形凸缘和导气通道，其中，所述进气槽设置在所述第一环形凸缘和所述第二环形凸缘之间，所述第二环形凸缘和所述导气通道交错分布且整体呈环状，a first annular flange, an air inlet groove, a second annular flange and an air guiding channel are provided at a near edge of the upper surface of the disk body, wherein the air inlet groove is disposed at the first annular flange and the second Between the annular flanges, the second annular flange and the air guiding passage are staggered and integrally formed in a ring shape.
    盘体中央区域设有内外两圈呈同心环形且均匀分布的第一进气孔，The central portion of the disc body is provided with a first air inlet hole which is concentric annular and evenly distributed inside and outside.
    在所述中央区域的外圈进气孔与所述第二环形凸缘之间，还设有多圈呈同心环形且均匀分布的第二进气孔，Between the outer ring air inlet hole of the central region and the second annular flange, a plurality of second air inlet holes which are concentric annular and evenly distributed are further disposed.
    还包括气体挡块，在工艺加工过程中根据气体分布范围对所述第二进气孔进行选择性遮挡。A gas stop is also included that selectively occludes the second intake aperture in accordance with a gas distribution range during processing.
  2. 根据权利要求1所述的等离子体刻蚀系统的喷淋头，其特征在于，A showerhead for a plasma etching system according to claim 1, wherein
    所述相邻两圈第二进气孔之间的间距为30～70mm。The spacing between the two adjacent second intake holes is 30 to 70 mm.
  3. 根据权利要求1所述的等离子体刻蚀系统的喷淋头，其特征在于，A showerhead for a plasma etching system according to claim 1, wherein
    所述第二环形凸缘所呈环形的直径大于等离子体刻蚀系统的下电极的横截面距离。The annular shape of the second annular flange is larger than the cross-sectional distance of the lower electrode of the plasma etching system.
  4. 根据权利要求3所述的等离子体刻蚀系统的喷淋头，其特征在于，A showerhead for a plasma etching system according to claim 3, wherein
    所述第二环形凸缘所呈环形的直径比等离子体刻蚀系统的下电极的横截面距离大10～50mm。The annular shape of the second annular flange is 10 to 50 mm larger than the cross-sectional distance of the lower electrode of the plasma etching system.
  5. 根据权利要求1所述的等离子体刻蚀系统的喷淋头，其特征在于，A showerhead for a plasma etching system according to claim 1, wherein
    所述第二环形凸缘的宽度为3～7mm。The second annular flange has a width of 3 to 7 mm.
  6. 根据权利要求1所述的等离子体刻蚀系统的喷淋头，其特征在于，A showerhead for a plasma etching system according to claim 1, wherein
    所述气体挡块的直径与所述第二进气孔进气端的直径相同。The diameter of the gas block is the same as the diameter of the intake end of the second intake port.
  7. 根据权利要求1所述的等离子体刻蚀系统的喷淋头，其特征在于，A showerhead for a plasma etching system according to claim 1, wherein
    所述第一、第二进气孔为沉头孔，进气端的孔径为2～4mm，出气端的孔径为0.5～1.5mm。The first and second air inlet holes are counterbore holes, the air inlet end has a hole diameter of 2 to 4 mm, and the air outlet end has a hole diameter of 0.5 to 1.5 mm.
  8. 根据权利要求3所述的等离子体刻蚀系统的喷淋头，其特征在于，A showerhead for a plasma etching system according to claim 3, wherein
    位于所述中央区域的外圈的第一进气孔沉头的高度大于等于位于所述中央区域的内圈的第一进气孔沉头的高度。The height of the first intake hole countersunk of the outer ring located in the central region is greater than or equal to the height of the first intake hole countersunk of the inner ring located in the central region.
  9. 根据权利1所述的等离子体刻蚀系统的喷淋头，其特征在于A showerhead for a plasma etching system according to claim 1, wherein
    所述气体挡块的材质可为陶瓷、石英或聚四氟乙烯。The gas block may be made of ceramic, quartz or polytetrafluoroethylene.
  10. 根据权利1所述的等离子体刻蚀系统的喷淋头，其特征在于，A showerhead for a plasma etching system according to claim 1, wherein
    所述盘体材质为氧化铝陶瓷、石英、氧化硅、氮化硅或铝合金。The disc body is made of alumina ceramic, quartz, silicon oxide, silicon nitride or aluminum alloy.
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