WO2019003874A1 - Actuator - Google Patents

Actuator Download PDF

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Publication number
WO2019003874A1
WO2019003874A1 PCT/JP2018/022170 JP2018022170W WO2019003874A1 WO 2019003874 A1 WO2019003874 A1 WO 2019003874A1 JP 2018022170 W JP2018022170 W JP 2018022170W WO 2019003874 A1 WO2019003874 A1 WO 2019003874A1
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WO
WIPO (PCT)
Prior art keywords
yoke
connecting member
movable body
arm
yokes
Prior art date
Application number
PCT/JP2018/022170
Other languages
French (fr)
Japanese (ja)
Inventor
北原 裕士
正 武田
将生 土橋
Original Assignee
日本電産サンキョー株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電産サンキョー株式会社 filed Critical 日本電産サンキョー株式会社
Publication of WO2019003874A1 publication Critical patent/WO2019003874A1/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/04Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with electromagnetism
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K33/00Motors with reciprocating, oscillating or vibrating magnet, armature or coil system
    • H02K33/16Motors with reciprocating, oscillating or vibrating magnet, armature or coil system with polarised armatures moving in alternate directions by reversal or energisation of a single coil system

Definitions

  • the present invention relates to an actuator that generates various vibrations.
  • the yoke provided on the support includes an integral magnetic plate bent in a U-shape such that the first plate portion and the second plate portion face each other, and the first plate portion A permanent magnet is held on each of the surface on the second plate portion side and the surface on the first plate portion side of the second plate portion. Further, a coil held by the movable body is disposed between the magnet held by the first plate portion and the magnet held by the second plate portion side.
  • Patent Document 1 proposes an actuator in which a magnetic drive circuit including a coil and a magnet is arranged in two stages.
  • a three-stage yoke in which a yoke is disposed between two sets of magnetic drive circuits can be used.
  • the surfaces for fixing the magnets can be provided in three tiers.
  • the weight of the movable body 3 can be secured, and the magnetic efficiency can be improved.
  • the three-tiered yoke is manufactured by assembling a plurality of members. For example, the first yoke, the second yoke, and the third yoke are stacked and connected in the height direction.
  • an object of the present invention to provide an actuator capable of suppressing a reduction in dimensional accuracy of a yoke.
  • an actuator to which the present invention is applied includes a support, a movable body movably supported by the support, and a magnetic drive circuit for moving the movable body relative to the support.
  • the magnetic drive circuit is provided on a coil provided on one side member of the support and the movable body, and on the other side member of the support and the movable body.
  • the coil includes a magnet facing in a first direction, and the movable body is driven in a second direction crossing the first direction, and the other side member is a first yoke facing in the first direction.
  • a plurality of yokes including a second yoke, and a connecting member for positioning and connecting the plurality of yokes in the first direction.
  • the plurality of yokes opposed in the first direction are positioned in the first direction by the connecting member.
  • the connecting member it is possible to suppress that the component tolerances of the plurality of yokes build up and the dimensional accuracy in the first direction of the entire yoke decreases. Therefore, it can suppress that the position accuracy of the 1st direction of the movable body with respect to a support body falls.
  • the plurality of yokes may include a third yoke opposed to the second yoke in the first direction opposite to the first yoke, and the coil may include the first yoke and the second yoke.
  • the magnet is disposed between the yokes and between the second yoke and the third yoke, and the magnet is fixed to a surface of the first yoke, the second yoke, and the third yoke facing the coil.
  • the connection member may adopt a configuration in which the first yoke, the second yoke, and the third yoke are positioned and connected in the first direction.
  • the coils can be arranged in two stages, and magnets fixed to the three-stage yoke can be arranged on both sides in the first direction of each coil.
  • the present invention it is possible to adopt a configuration in which the plurality of yokes overlap the connection member when viewed in the direction orthogonal to the first direction.
  • the height in the first direction of the connecting member is the height in the first direction of the entire yoke
  • the component tolerance of the connecting member and the component tolerance of the yoke are stacked, and the dimension of the entire yoke in the first direction It is possible to suppress the decrease in accuracy.
  • the plurality of yokes have end portions connected to the connection member, a convex portion is formed on one of the connection member and the end portion, and a concave portion to be fitted to the convex portion is on the other.
  • the configuration formed can be adopted.
  • the recess and the protrusion can be fitted to position the connecting member and the end of the yoke.
  • the ends of the plurality of yokes may be fixed by welding using the connection member.
  • each of the plurality of yokes includes a plurality of arm portions projecting in a plurality of directions, and the connecting member adopts a configuration for connecting the tips of the overlapping arm portions as viewed from the first direction. be able to.
  • the yokes are connected at a plurality of connection points, and the dimensional accuracy of each connection point in the first direction is determined by the component tolerance of the connection member. Therefore, the decrease in dimensional accuracy in the first direction of the entire yoke can be further reduced.
  • the magnetic drive circuit drives the movable body in a third direction intersecting the second direction and the second direction, and the plurality of arm portions are disposed on one side of the second direction.
  • the first arm which protrudes, the second arm which protrudes to the other side in the second direction, the third arm which protrudes to one side in the third direction, and the other side which protrudes in the third direction A fourth arm unit is provided, and the connection member is configured to connect a first connection member connecting the first arm unit, a second connection member connecting the second arm unit, and a third connection unit connecting the third arm unit.
  • a connecting member and a fourth connecting member for connecting the fourth arm wherein the one side member includes a holder for holding the coil, and the holder includes the first connecting member and the second connecting member While restricting the movable range in the third direction, the third connecting member and the fourth connecting member It is possible to adopt a configuration for regulating the movable range of directions.
  • the movable body moves in the second direction and the third direction
  • the movable member in the second direction and the third direction can be restricted by the connecting member and the holder. Therefore, the impact resistance of the actuator can be enhanced.
  • the one side member may be the support, and the other side member may be the movable body.
  • the movable body can be properly driven.
  • the plurality of yokes opposed in the first direction are positioned in the first direction by the connecting member.
  • the connecting member it is possible to suppress that the component tolerances of the plurality of yokes build up and the dimensional accuracy in the first direction of the entire yoke decreases. Therefore, it can suppress that the position accuracy of the 1st direction of the movable body with respect to a support body falls.
  • FIG. 1 It is a perspective view of an actuator concerning an embodiment of the present invention. It is XZ sectional drawing of the actuator shown in FIG. It is a disassembled perspective view of the actuator shown in FIG. It is a disassembled perspective view of a movable body and a holder. It is a perspective view of a movable body and a coil. It is a top view of a movable body and a holder.
  • first direction Z a first direction Z
  • second direction X a second direction X
  • third direction Y three directions intersecting with each other.
  • the first direction Z, the second direction X, and the third direction Y are directions orthogonal to each other.
  • X1 is attached to one side in the second direction X
  • X2 is attached to the other side in the second direction X
  • Y1 is attached to one side in the third direction Y
  • Y2 is attached to the other side in the third direction Y
  • one side of the first direction Z is attached with Z1 and the other side of the first direction Z is attached with Z2.
  • FIG. 1 is a perspective view of an actuator 1 according to an embodiment of the present invention.
  • FIG. 2 is an XZ sectional view of the actuator 1 of FIG.
  • FIG. 3 is an exploded perspective view of the actuator 1 of FIG.
  • the planar shape of the actuator 1 as viewed in the first direction Z is a square.
  • the actuator 1 has a support 2 and a movable body 3, a magnetic drive circuit 6 for moving the movable body 3 relative to the support 2, and a visco-elastic member 9 for connecting the support 2 and the movable body 3.
  • the actuator 1 includes, as the magnetic drive circuit 6, a first magnetic drive circuit 6X that vibrates the movable body 3 in the second direction X, and a second magnetic drive circuit 6Y that vibrates the movable body 3 in the third direction Y.
  • the first magnetic drive circuit 6X and the second magnetic drive circuit 6Y have a coil 7 and a magnet 8.
  • the movable body 3 is driven in one or both of the second direction X and the third direction Y.
  • the coil 7 is provided on the support 2 side
  • the magnet 8 is provided on the movable body 3 side
  • the magnet 8 is provided on the support 2 side
  • the coil 7 is provided.
  • the aspect provided in the movable body 3 side is employable.
  • the coil 7 is provided on the side of the support 2 and the magnet 8 is mainly provided on the side of the movable body 3.
  • the support 2 includes a cover 11 and a holder 60, and the holder 60 and the movable body 3 are disposed inside the cover 11.
  • the cover 11 has a first cover member 16 positioned on one side Z1 in the first direction Z, and a second cover member 17 overlapping the first cover member 16 from the other side Z2 in the first direction Z.
  • the first cover member 16 has a rectangular first end plate portion 161 when viewed in the first direction Z, and a first side plate portion 162 which rises from the outer peripheral edge of the first end plate portion 161 to the other side Z2 in the first direction Z.
  • the second cover member 17 is a second side plate that rises from the outer peripheral edge of the second end plate portion 171 having a quadrangle and the outer edge of the second end plate portion 171 in the first direction Z when viewed in the first direction Z.
  • a unit 172 is provided in the first cover member 16 and the second cover member 17, the first side plate portion 162 and the second side plate portion 172 are in contact in the first direction Z, and are fixed by four screws 18.
  • bosses 12 are formed inside the first end plate 161 so as to protrude toward the second cover member 17.
  • the boss portion 12 includes a step surface 12a formed at an intermediate position in the first direction Z, and a cylindrical portion 12b protruding from the step surface 12a in the first direction Z2 in the Z direction.
  • the screws 18 are inserted into screw holes 12 c formed at diagonal positions of the second end plate portion 171 and screwed to the cylindrical portion 12 b.
  • the second cover member 17 is formed with a notch 13 in which the side surface on one side X1 in the second direction X of the second side plate portion 172 is cut out on the other side Z2 in the first direction Z. Further, the first side plate portion 162 of the first cover member 16 is formed with a rising portion 14 that faces the notch 13 of the second cover member 17 in the first direction Z. The rising portion 14 constitutes a slit for disposing the wiring board 15 between itself and the notch 13. A feeder line or the like to the coil 7 is connected to the wiring board 15.
  • FIG. 4 is an exploded perspective view of the movable body 3 and the holder 60.
  • the holder 60 is a quadrangle as viewed in the first direction Z, and circular holes 609 are opened at the four corners of the holder 60.
  • the holder 60 is held at a position where the cylindrical portion 12b of the boss 12 is inserted into the circular hole 609 and placed on the step surface 12a.
  • the holder 60 includes a first holder 61 and a second holder 62 that abuts the first holder 61 from the other side Z2 in the first direction Z.
  • the second holder 62 is formed substantially symmetrically in the first direction Z with respect to the first holder 61.
  • a recessed portion 650 recessed toward the inner peripheral side is formed.
  • the coils 71 and 72 of the first magnetic drive circuit 6X are held inside the two recesses 650 opposed in the second direction X.
  • the coils 73 and 74 of the second magnetic drive circuit 6Y are held inside the two concave portions 650 opposed in the third direction Y.
  • the coils 71 and 72 are flat air core coils whose long sides 701 serving as effective sides extend in the third direction Y, and the coils 73 and 74 have long sides 701 serving as effective sides. Is a flat air core coil extending in the second direction X.
  • the coils 71 and 72 and the coils 73 and 74 are held in an oval coil holding hole 66 (see FIG. 4) formed in the first holder 61 and the second holder 62.
  • FIG. 5 is a perspective view of the movable body 3 and the coil 7.
  • the movable body 3 includes a yoke 30 made of a magnetic plate and a magnet 8 fixed to the yoke 30.
  • the yoke 30 includes a first yoke 31, a second yoke 32 disposed on the other side Z2 in the first direction Z of the first yoke 31, and a first yoke of the second yoke 32.
  • the third yoke 33 disposed on the other side Z2 of the direction Z is provided. Also.
  • the yoke 30 includes a connecting member 34 that positions and connects the first yoke 31, the second yoke 32, and the third yoke 33 in the first direction Z.
  • the connecting member 34 is joined to the first yoke 31, the second yoke 32, and the third yoke 33 by welding or the like.
  • a shaft portion 35 extending in the first direction Z is attached to a central portion 301 of the first yoke 31, the second yoke 32, and the third yoke 33.
  • the shaft portion 35 is passed through a circular hole 651 formed at the center of the first holder 61 and the second holder 62 (see FIG. 4).
  • the shaft portion 35 is connected to a first shaft portion 351 disposed between the first yoke 31 and the second yoke 32, and the other side Z2 of the first shaft portion 351 in the first direction Z,
  • a second shaft portion 352 disposed between the third yokes 33 is provided.
  • the end portions of the first shaft portion 351 and the second shaft portion 352 are fitted in circular holes 302 formed in the central portion 301 of the first yoke 31, the second yoke 32, and the third yoke 33.
  • the first yoke 31, the second yoke 32, and the third yoke 33 are plate-like members perpendicular to the first direction Z, and are identical when viewed from the first direction Z. It is a shape.
  • the first yoke 31, the second yoke 32, and the third yoke 33 are cruciform when viewed from the first direction Z.
  • the first yoke 31, the second yoke 32, and the third yoke 33 respectively have a central portion 301 in which the circular hole 302 is formed, and a first portion projecting from the central portion 301 to one side X1 and the other side X2 in the second direction X.
  • the first arm 310 and the second arm 320, and the third arm 330 and the fourth arm 340 which protrude from the central portion 301 to the one side Y1 and the other side Y2 in the third direction Y are provided.
  • the first arm 310 and the second arm 320 extend in the second direction X
  • the third arm 330 and the fourth arm 340 extend in the third direction Y.
  • the yoke 30 is an assembly in which the first yoke 31, the second yoke 32, the third yoke 33, and the connecting member 34 are joined by welding or the like.
  • the four arms of the three yokes overlap when viewed in the first direction Z, and the tips of the overlapping arms when viewed in the first direction Z are connected by the connecting member 34.
  • the connecting member 34 includes a first connecting member 341 that connects the tip (end) of the first arm 310 of the first yoke 31, the second yoke 32, and the third yoke 33, and a tip (an end of the second arm 320).
  • each connecting member 34 extends in the first direction Z.
  • the end of the first yoke 31 is joined substantially perpendicularly to the end of the one side Z1 in the first direction Z of each connecting member 34, and the third yoke 33 is substantially perpendicular to the end of the other side Z2 of the first direction Z Bonded to Further, the end of the second yoke 32 is joined substantially at right angles to the central portion in the first direction Z.
  • each of the first yoke 31, the second yoke 32, and the third yoke 33 the width direction of the tip (end) of the first arm 310, the second arm 320, the third arm 330, and the fourth arm 340
  • a recess 303 is formed in the center of the and a protrusion 304 is formed on both sides in the width direction of the recess 303.
  • a concave portion 305 is cut out at a position corresponding to the convex portion 304 of each yoke. Is formed.
  • each connecting member 34 concave portions 305 are formed at both ends in the width direction at three ends in the first direction Z and at an intermediate position in the first direction Z, respectively.
  • the first yoke 31, the second yoke 32, and the third yoke 33 are connected to a convex portion 304 formed at the tip of the first arm 310, the second arm 320, the third arm 330, and the fourth arm 340.
  • the yokes are fitted and welded in the recesses 305 of the member 34, and the respective yokes are joined to the connecting member 34 substantially at right angles.
  • a configuration may be adopted in which the convex portion formed in the connecting member 34 and the concave portion formed in the first yoke 31, the second yoke 32, and the third yoke 33 are fitted.
  • the tip of the first arm 310 overlaps the first connecting member 341 when viewed from the second direction X
  • the tip of the second arm 320 is As viewed in the second direction X
  • the second connection member 342 overlaps the second connection member 342.
  • the tip of the third arm 330 overlaps the third connecting member 343 when viewed from the third direction Y
  • the tip of the fourth arm 340 with the fourth connecting member 344 when viewed from the third direction Y. overlapping.
  • the surface of the one side Z1 in the first direction Z of the first yoke 31 is the end surface of the one side Z1 in the first direction Z of the connecting member 34 And is positioned in the first direction Z so as to be on the same plane.
  • the surface of the other side Z2 in the first direction Z of the third yoke 33 is the other side Z2 of the connecting member 34 in the first direction Z. It is positioned in the first direction Z so as to be on the same plane as the end face of the lens. That is, the yoke 30 is assembled such that the height of the connecting member 34 in the first direction Z coincides with the height of the yoke 30 in the first direction Z.
  • FIG. 6 is a plan view of the movable body 3 and the holder 60.
  • FIG. The outer shape of the yoke 30 as viewed in the first direction Z is smaller than that of the holder 60.
  • the yoke 30 is disposed movably with respect to the holder 60 in the second direction X and the third direction Y, and the connection member 34 is disposed in the recess 650 of the holder 60.
  • the connecting member 34 is disposed in the gap between the recess 650 of the holder 60 and the second side plate portion 172 of the second cover member 17 (FIGS. 2 and 6) reference).
  • prisms 660 X and 660 Y extending in the first direction Z are formed on the edges of both ends of the recess 650 in the width direction of the holder 60.
  • two prismatic column portions 660Y facing each other in the third direction Y with the first connecting member 341 and the second connecting member 342 interposed therebetween are formed. Therefore, when the movable body 3 moves in the third direction Y, the movable range of the movable body 3 in the third direction Y is restricted by the prism portion 660Y.
  • the concave portions 650 on both sides in the third direction Y of the holder 60 two prismatic portions 660X facing each other in the second direction X with the third connecting member 343 and the fourth connecting member 344 interposed therebetween are formed. Therefore, when the movable body 3 moves in the second direction X, the movable range of the movable body 3 in the second direction X is restricted by the prism portion 660X.
  • the movable range of the movable body 3 restricted by the prismatic portions 660X and 660Y is a range in which the movable body 3 does not collide with the inner surface of the second cover member 17.
  • the first yoke 31 is disposed between the first holder 61 and the first cover member 16.
  • the second yoke 32 is disposed between the first holder 61 and the second holder 62
  • the third yoke 33 is disposed between the second holder 62 and the second cover member 17.
  • the magnet 8 is a magnet facing the coil 71 of the first magnetic drive circuit 6X in the first direction Z, and a magnet facing the coil 72 of the first magnetic drive circuit 6X in the first direction Z
  • a magnet 82 faces the coil 73 of the second magnetic drive circuit 6Y in the first direction Z
  • a magnet 84 faces the coil 74 of the second magnetic drive circuit 6Y in the first direction Z.
  • the magnets 81, 82, 83, 84 are disposed on the one side Z1 and the other side Z2 of the coils 71, 72, 73, 74 in the first direction Z, and on both sides of each coil 7 in the first direction Z.
  • a magnet 8 is arranged. That is, the magnet 8 is provided on the other surface of the first yoke 31 in the first direction Z, both surfaces of the second yoke 32 in the first direction Z, and the surface of the third yoke on the one side Z1 in the first direction Z It is fixed.
  • the magnets 8 face the coil 7 from both sides in the first direction Z, the magnetic flux leakage can be reduced and the driving force can be increased.
  • the magnet 81 is fixed to the first arm portion 310 of the first yoke 31, the second yoke 32, and the third yoke 33
  • the magnet 82 is the second arm of the first yoke 31, the second yoke 32, and the third yoke 33
  • the magnet 83 is fixed to the portion 320, and the magnet 83 is fixed to the third arm 330 of the first yoke 31, the second yoke 32, and the third yoke 33.
  • the magnet 84 is fixed to the first yoke 31, the second yoke 32, the third. It is fixed to the fourth arm 340 of the yoke 33.
  • Each magnet 8 is polarized and magnetized in the thickness direction. Further, the two magnets 8 facing each coil 7 on one side Z1 and the other side Z2 in the first direction Z are magnetized in poles different in the surface facing the coil 7.
  • the visco-elastic member 9 is disposed at a position where the support 2 and the movable body 3 face in the first direction Z.
  • the first visco-elastic member 91 is disposed at a position where the first yoke 31 of the movable body 3 and the first cover member 16 of the support 2 face in the first direction Z
  • a second visco-elastic member 92 is disposed at a position where the third yoke 33 of the body 3 and the second cover member 17 of the support 2 face in the first direction Z.
  • the first arm 310, the second arm 320, the third arm 330, and the fourth arm 340 of the first yoke 31 and the first cover member 16 face each other in the first direction Z.
  • the first arm 310, the second arm 320, the third arm 330, the fourth arm 340, and the second cover member 17 of the third yoke 33 extend in the first direction Z. It is arranged one by one at four places facing the.
  • the first cover member 16 is formed with a recess 163 that is recessed on one side Z ⁇ b> 1 in the first direction Z.
  • the concave portion 163 is opposed to the center of the first end plate portion 161 in the third direction Y at two locations opposed in the second direction X, and the center of the first end plate portion 161 in the second direction X opposed to the third direction Y It is formed in four places of two places.
  • the first visco-elastic member 91 is held one by one in these four recessed portions 163, and connects the first yoke 31 and the first cover member 16 in the first direction Z at four points.
  • concave portions 173 recessed in the other side Z2 in the first direction Z are formed at four places, and the second viscoelastic member 92
  • the three yokes 33 and the second cover member 17 are connected in the first direction Z at four locations.
  • the first viscoelastic member 91 and the second viscoelastic member 92 have a quadrangular shape when viewed in the first direction Z, and are arranged with the first direction Z as a thickness direction.
  • the dimensions of the second viscoelastic member 92 in the second direction X are the same as the dimensions in the third direction Y.
  • the first viscoelastic member 91 is disposed between the first yoke 31 and the first cover member 16 in a compressed state in the first direction Z
  • the second viscoelastic member 92 includes the third yoke 33 and the second It is arranged in a state of being compressed in the first direction Z between the cover member 17 and the cover member 17.
  • the first viscoelastic member 91 and the second viscoelastic member 92 are adhered to the surface in contact with the support 2 and the surface in contact with the movable body 3.
  • the viscoelasticity is a property in which both the viscosity and the elasticity are combined, and is a property which is remarkably observed in high-molecular substances such as gel-like members, plastics and rubbers. Therefore, various gel-like members can be used as the viscoelastic member 9 (the first viscoelastic member 91 and the second viscoelastic member 92).
  • the viscoelastic member 9 natural rubber, diene rubber (for example, styrene butadiene rubber, isoprene rubber, butadiene rubber), chloroprene rubber, acrylonitrile butadiene rubber, etc., non-diene rubber (for example, butyl rubber, ethylene)
  • diene rubber for example, styrene butadiene rubber, isoprene rubber, butadiene rubber
  • chloroprene rubber acrylonitrile butadiene rubber, etc.
  • non-diene rubber for example, butyl rubber, ethylene
  • Various rubber materials such as propylene rubber, ethylene / propylene / diene rubber, urethane rubber, silicone rubber, fluororubber, etc., thermoplastic elastomers and their modified materials may be used.
  • the viscoelastic member 9 (the first viscoelastic member 91 and the second viscoelastic member 92) is a silicone-based gel having a penetration of 10 degrees to 110 degrees.
  • the degree of penetration is defined in IS-K-2207 and JIS-K-2220, and the smaller the value, the harder it is.
  • the viscoelastic member 9 has linear or non-linear expansion and contraction characteristics depending on the expansion and contraction direction. For example, when the visco-elastic member 9 is pressed in the thickness direction (axial direction) to be compressively deformed, the visco-elastic member 9 has an expansion and contraction characteristic in which a non-linear component (spring coefficient) is larger than a linear component (spring coefficient). On the other hand, when it is pulled and extended in the thickness direction (axial direction), it has an expansion and contraction characteristic in which a linear component (spring coefficient) is larger than a non-linear component (spring coefficient).
  • the viscoelastic member 9 intersects the thickness direction (first direction Z) when the movable body 3 moves in the direction (second direction X, third direction Y) orthogonal to the first direction Z. It is attached so as to be deformed in the shear direction (second direction X, third direction Y). Therefore, when the movable body 3 moves in a direction (second direction X, third direction Y) orthogonal to the first direction Z, the linear component of the visco-elastic member 9 uses a large deformation characteristic so that vibration with respect to the input signal is used. The repeatability of acceleration is good, and vibrations can be realized with subtle nuances. Therefore, the vibration to be expressed can be easily made.
  • one of the first viscoelastic member 91 and the second viscoelastic member 92 is compressively deformed, so that the nonlinear component of the viscoelastic member 9 Is used, and the positional change of the movable body 3 can be suppressed.
  • the planar shape of the first viscoelastic member 91 and the second viscoelastic member 92 may be polygonal other than quadrilateral or circular. In the case of a rectangular shape, it is low in cost because the yield at the time of manufacture is the best. However, in consideration of the resonance characteristic of the movable body 3 when driving the actuator 1, it is desirable to make the first viscoelastic member 91 and the second viscoelastic member 92 circular.
  • the acceleration at which the movable body 3 moves to one side X1 in the second direction X is different from the acceleration at which the movable body 3 moves to the other side X2 in the second direction. Then, the user can feel the vibration having the directivity in the second direction X. Similarly, vibration having directivity in the third direction Y can be felt.
  • the side (movable body 3) of the support 2 and the movable body 3 on which the magnet 8 of the magnetic drive circuit 6 is provided includes the yoke 30, A plurality of yokes 30 opposed in the first direction Z are positioned in the first direction Z by the connecting member 34. That is, the coils 7 are arranged in two stages on the support 2, and the yoke 30 for holding the magnet 8 has a three-stage configuration including the first yoke 31, the second yoke 32, and the third yoke 33.
  • the first yoke 31, the second yoke 32, and the third yoke 33 are connected substantially at right angles to the connection member 34, and the first yoke 31, the second yoke 32, and the third yoke 33 are When viewed in the direction orthogonal to the first direction Z, the connecting member 34 is overlapped. Therefore, since the height of the connecting member 34 in the first direction Z becomes the height of the yoke 30 in the first direction Z, the component tolerance of the connecting member 34 and the components of the first yoke 31, the second yoke 32, and the third yoke 33 It is possible to suppress that the tolerance is accumulated and the dimensional accuracy of the entire yoke 30 in the first direction Z is reduced.
  • a convex portion 304 is formed at an end portion connected to the connecting member 34, and the connecting member 34 is a concave portion to be fitted with the convex portion 304. 305 are formed. Therefore, the yokes and the connecting members 34 can be positioned by fitting the convex portions 304 and the concave portions 305.
  • the connecting member 34 includes a plurality of arms (a first arm 310, a second arm 320, a third arm 330, a third arm 330, and a third yoke 33).
  • the connecting member 34 is configured to connect the tips of overlapping arms when viewed from the first direction Z. Accordingly, the first yoke 31, the second yoke 32, and the third yoke 33 are connected at a plurality of connection points, and the dimensional accuracy of each connection point in the first direction Z is determined by the component tolerance of the connecting member 34. The decrease in dimensional accuracy in the first direction Z can be further reduced.
  • the actuator 1 of this embodiment includes a first magnetic drive circuit 6X that vibrates the movable body 3 in the second direction X, and a second magnetic drive mechanism 6Y that vibrates the movable body 3 in the third direction Y.
  • the yoke 30 has a cross shape as viewed in the first direction Z, and a stopper mechanism is provided between the yoke 30 and the holder 60 to restrict the movable range of the movable body 3 in the second direction X and the third direction Y. ing. That is, the yoke 30 connects the first connecting member 341 that connects the first arm 310 that protrudes to one side X1 in the second direction X, and the second arm 320 that protrudes to the other side X2 in the second direction X.
  • a fourth connecting member 344 connecting the portions 340 is provided.
  • the four connection members 34 are disposed in the recess 650 of the holder 60, and the movable ranges of the connection member 34 in the second direction X and the third direction Y by prisms 660X and 660Y provided at the edge of the recess 650. Is regulated. Therefore, when the movable body 3 moves in the second direction X and the third direction Y, the movable member 3 in the second direction and the third direction can be restricted by the connecting member 34 and the holder 60. Therefore, the impact resistance of the actuator 1 can be enhanced.
  • the present embodiment applies the present invention to the yoke 30 having a three-stage structure, the present invention can also be applied to an actuator provided with two or four or more stages of yokes.
  • first End plate portion 172 second side plate portion 173: concave portion 301: central portion 302: circular hole 303: concave portion 304: convex portion 305: concave portion 310: first arm portion 320: second arm Part 330 330 third arm 340 fourth arm 341 first connecting member 342 second connecting member 343 third connecting member 344 fourth connecting member 351 first shaft , 352: second shaft portion, 609: circular hole, 650: recess, 651: circular hole, 660X: prismatic portion, 660Y: prismatic portion, 701: long side, X: second direction, Y: third direction, Z ... first direction

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  • Mechanical Engineering (AREA)
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Abstract

This actuator 1 is provided with a magnetic drive circuit 6 which moves a movable body 3 relative to a support body 2. The movable body 3 is provided with a yoke 30 which retains magnets 8 of the magnetic drive circuit 6, and the yoke 30 comprises multiple yokes facing each other in a first direction Z, and positioned in the first direction Z by means of a linking member 34. Coils 7 are arranged in two stages in the support body 2, and the yoke 30 that retains the magnets 8 has a three-stage configuration, comprising a first yoke 31, a second yoke 32 and a third yoke 33. The first yoke 31, the second yoke 32 and the third yoke 33 are connected at substantially right angles to the linking member 34, and, seen in a direction perpendicular to the first direction Z, the first yoke 31, the second yoke 32 and the third yoke 33 overlap the connecting member 34.

Description

アクチュエータActuator
 本発明は、各種振動を発生させるアクチュエータに関するものである。 The present invention relates to an actuator that generates various vibrations.
 磁気駆動機構によって振動を発生させる機器として、コイルおよび磁石を備えた磁気駆動回路によって可動体を支持体に対して軸線方向に振動させるアクチュエータが提案されている。特許文献1に記載のアクチュエータにおいて、支持体に設けられたヨークは、第1板部と第2板部が対向するようにU字形状の折り曲げられた一体の磁性板からなり、第1板部の第2板部側の面、および第2板部の第1板部側の面の各々に永久磁石が保持されている。また、第1板部に保持された磁石と、第2板部側に保持された磁石との間には、可動体に保持されたコイルが配置されている。 As a device that generates a vibration by a magnetic drive mechanism, an actuator that vibrates a movable body in an axial direction with respect to a support by a magnetic drive circuit including a coil and a magnet has been proposed. In the actuator described in Patent Document 1, the yoke provided on the support includes an integral magnetic plate bent in a U-shape such that the first plate portion and the second plate portion face each other, and the first plate portion A permanent magnet is held on each of the surface on the second plate portion side and the surface on the first plate portion side of the second plate portion. Further, a coil held by the movable body is disposed between the magnet held by the first plate portion and the magnet held by the second plate portion side.
特開2016-127789号公報JP, 2016-127789, A
 特許文献1に記載のアクチュエータのように、U字形状に折り曲げたヨークを用いる場合、第1板部の第2板部と対向する面、あるいは第2板部の第1板部と対向する面に磁石を固定するのに多大な手間がかかる等、磁石が固定されたヨークを効率よく製作することが困難である。そこで、第1板部を備えた第1ヨークと、第2板部を備えた第2ヨークの2部材を連結して、第1板部と第2板部とが2段に配置されたヨークを製作することが提案されている。 When using a yoke bent in a U-shape as in the actuator described in Patent Document 1, the surface of the first plate portion facing the second plate portion or the surface facing the first plate portion of the second plate portion For example, it takes a lot of time to fix the magnet, and it is difficult to efficiently manufacture the yoke to which the magnet is fixed. Therefore, a yoke having a first plate portion and a second plate portion arranged in two stages by connecting two members of a first yoke having a first plate portion and a second yoke having a second plate portion. It has been proposed to make
 また、特許文献1には、コイルと磁石からなる磁気駆動回路を2段に配置したアクチュエータが提案されている。このような構成においては、2組の磁気駆動回路の間にヨークを配置した3段構成のヨークを用いることができる。3段構成のヨークを用いる場合、磁石を固定する面を3段に設けることができる。また、可動体3の重量を確保することができ、磁気効率を向上させることができる。しかしながら、3段構成のヨークは、複数の部材を組み立てて製作される。例えば、第1ヨーク、第2ヨーク、第3ヨークを高さ方向に積み上げて連結して製作される。しかしながら、このように、複数の部材を高さ方向に積み上げて連結すると、ヨークの高さ方向で複数の部材の部品公差が積み上がり、ヨーク全体としての寸法精度が低下する。その結果、支持体に対する可動体の位置精度が低下し、可動体を適正に駆動できないおそれがある。 Further, Patent Document 1 proposes an actuator in which a magnetic drive circuit including a coil and a magnet is arranged in two stages. In such a configuration, a three-stage yoke in which a yoke is disposed between two sets of magnetic drive circuits can be used. When a three-tiered yoke is used, the surfaces for fixing the magnets can be provided in three tiers. Moreover, the weight of the movable body 3 can be secured, and the magnetic efficiency can be improved. However, the three-tiered yoke is manufactured by assembling a plurality of members. For example, the first yoke, the second yoke, and the third yoke are stacked and connected in the height direction. However, when a plurality of members are stacked and connected in the height direction as described above, component tolerances of the plurality of members are accumulated in the height direction of the yoke, and the dimensional accuracy of the yoke as a whole decreases. As a result, the positional accuracy of the movable body with respect to the support decreases, and there is a possibility that the movable body can not be properly driven.
 以上の問題点に鑑みて、本発明の課題は、ヨークの寸法精度の低下を抑制することが可能なアクチュエータを提供することにある。 In view of the above problems, it is an object of the present invention to provide an actuator capable of suppressing a reduction in dimensional accuracy of a yoke.
 上記問題を解決するために、本発明を適用したアクチュエータは、支持体と、前記支持体に移動可能に支持された可動体と、前記可動体を前記支持体に対して相対移動させる磁気駆動回路と、を有し、前記磁気駆動回路は、前記支持体および前記可動体のうちの一方側部材に設けられたコイルと、前記支持体および前記可動体のうちの他方側部材に設けられて前記コイルに第1方向で対向する磁石と、を備え、前記可動体を前記第1方向に対して交差する第2方向に駆動し、前記他方側部材は、前記第1方向で対向する第1ヨークおよび第2ヨークを含む複数のヨークと、前記複数のヨークを前記第1方向に位置決めして連結する連結部材と、を備えることを特徴とする。 In order to solve the above problems, an actuator to which the present invention is applied includes a support, a movable body movably supported by the support, and a magnetic drive circuit for moving the movable body relative to the support. And the magnetic drive circuit is provided on a coil provided on one side member of the support and the movable body, and on the other side member of the support and the movable body. The coil includes a magnet facing in a first direction, and the movable body is driven in a second direction crossing the first direction, and the other side member is a first yoke facing in the first direction. And a plurality of yokes including a second yoke, and a connecting member for positioning and connecting the plurality of yokes in the first direction.
 本発明では、支持体と可動体のうち、磁気駆動回路の磁石が設けられている側において、第1方向で対向する複数のヨークが連結部材によって第1方向に位置決めされている。このように、連結部材に対して全てのヨークが位置決めされていれば、複数のヨークの部品公差が積み上がってヨーク全体の第1方向の寸法精度が低下することを抑制できる。従って、支持体に対する可動体の第1方向の位置精度が低下することを抑制できる。 In the present invention, among the support and the movable body, on the side where the magnet of the magnetic drive circuit is provided, the plurality of yokes opposed in the first direction are positioned in the first direction by the connecting member. As described above, when all the yokes are positioned with respect to the connecting member, it is possible to suppress that the component tolerances of the plurality of yokes build up and the dimensional accuracy in the first direction of the entire yoke decreases. Therefore, it can suppress that the position accuracy of the 1st direction of the movable body with respect to a support body falls.
 本発明において、前記複数のヨークは、前記第2ヨークに対して前記第1ヨークと反対側で前記第1方向に対向する第3ヨークを備え、前記コイルは、前記第1ヨークと前記第2ヨークの間、および、前記第2ヨークと前記第3ヨークの間に配置され、前記磁石は、前記第1ヨーク、前記第2ヨーク、前記第3ヨークの前記コイルと対向する面に固定され、前記連結部材は、前記第1ヨーク、前記第2ヨーク、および前記第3ヨークを前記第1方向に位置決めして連結する構成を採用することができる。このようにすると、3段構造のヨークの第1方向の寸法精度が低下することを抑制できる。また、コイルを2段に配置し、3段構造のヨークに固定した磁石を各コイルの第1方向の両側に配置することができる。 In the present invention, the plurality of yokes may include a third yoke opposed to the second yoke in the first direction opposite to the first yoke, and the coil may include the first yoke and the second yoke. The magnet is disposed between the yokes and between the second yoke and the third yoke, and the magnet is fixed to a surface of the first yoke, the second yoke, and the third yoke facing the coil. The connection member may adopt a configuration in which the first yoke, the second yoke, and the third yoke are positioned and connected in the first direction. In this way, it is possible to suppress the reduction in dimensional accuracy in the first direction of the three-tiered yoke. Also, the coils can be arranged in two stages, and magnets fixed to the three-stage yoke can be arranged on both sides in the first direction of each coil.
 本発明において、前記複数のヨークは、前記第1方向と直交する方向に見て前記連結部材と重なっている構成を採用することができる。このようにすると、連結部材の第1方向の高さがヨーク全体の第1方向の高さとなるので、連結部材の部品公差とヨークの部品公差とが積み上がってヨーク全体の第1方向の寸法精度が低下することを抑制できる。 In the present invention, it is possible to adopt a configuration in which the plurality of yokes overlap the connection member when viewed in the direction orthogonal to the first direction. In this case, since the height in the first direction of the connecting member is the height in the first direction of the entire yoke, the component tolerance of the connecting member and the component tolerance of the yoke are stacked, and the dimension of the entire yoke in the first direction It is possible to suppress the decrease in accuracy.
 本発明において、前記複数のヨークは、前記連結部材と連結される端部を備え、前記連結部材と前記端部の一方に凸部が形成され、他方には前記凸部と嵌合する凹部が形成されている構成を採用することができる。このようにすると、凹部と凸部とを嵌合させて連結部材とヨークの端部とを位置決めすることができる。 In the present invention, the plurality of yokes have end portions connected to the connection member, a convex portion is formed on one of the connection member and the end portion, and a concave portion to be fitted to the convex portion is on the other. The configuration formed can be adopted. Thus, the recess and the protrusion can be fitted to position the connecting member and the end of the yoke.
 本発明において、前記複数のヨークの端部は、溶接により前記連結部材により固定される構成を採用することができる。 In the present invention, the ends of the plurality of yokes may be fixed by welding using the connection member.
 本発明において、前記複数のヨークは、それぞれ、複数の方向に突出する複数の腕部を備え、前記連結部材は、前記第1方向から見て重なる前記腕部の先端を連結する構成を採用することができる。このようにすると、複数の連結箇所でヨークが連結され、各連結箇所の第1方向の寸法精度が連結部材の部品公差で決まる。従って、ヨーク全体の第1方向の寸法精度の低下をより少なくすることができる。 In the present invention, each of the plurality of yokes includes a plurality of arm portions projecting in a plurality of directions, and the connecting member adopts a configuration for connecting the tips of the overlapping arm portions as viewed from the first direction. be able to. In this case, the yokes are connected at a plurality of connection points, and the dimensional accuracy of each connection point in the first direction is determined by the component tolerance of the connection member. Therefore, the decrease in dimensional accuracy in the first direction of the entire yoke can be further reduced.
 この場合に、前記磁気駆動回路は、前記可動体を前記第2方向および前記第2方向に対して交差する第3方向に駆動し、前記複数の腕部は、前記第2方向の一方側に突出する第1腕部と、前記第2方向の他方側に突出する第2腕部と、前記第3方向の一方側に突出する第3腕部と、前記第3方向の他方側に突出する第4腕部を備え、前記連結部材は、前記第1腕部を連結する第1連結部材と、前記第2腕部を連結する第2連結部材と、前記第3腕部を連結する第3連結部材と、前記第4腕部を連結する第4連結部材を備え、前記一方側部材は、前記コイルを保持するホルダを備え、前記ホルダは、前記第1連結部材および前記第2連結部材の前記第3方向の可動範囲を規制するとともに、前記第3連結部材および前記第4連結部材の前記第2方向の可動範囲を規制する構成を採用することができる。このようにすると、可動体が第2方向および第3方向に移動する際、連結部材とホルダとによって可動体の第2方向および第3方向の可動範囲を規制することができる。従って、アクチュエータの耐衝撃性を高めることができる。 In this case, the magnetic drive circuit drives the movable body in a third direction intersecting the second direction and the second direction, and the plurality of arm portions are disposed on one side of the second direction. The first arm which protrudes, the second arm which protrudes to the other side in the second direction, the third arm which protrudes to one side in the third direction, and the other side which protrudes in the third direction A fourth arm unit is provided, and the connection member is configured to connect a first connection member connecting the first arm unit, a second connection member connecting the second arm unit, and a third connection unit connecting the third arm unit. A connecting member and a fourth connecting member for connecting the fourth arm, wherein the one side member includes a holder for holding the coil, and the holder includes the first connecting member and the second connecting member While restricting the movable range in the third direction, the third connecting member and the fourth connecting member It is possible to adopt a configuration for regulating the movable range of directions. Thus, when the movable body moves in the second direction and the third direction, the movable member in the second direction and the third direction can be restricted by the connecting member and the holder. Therefore, the impact resistance of the actuator can be enhanced.
 本発明において、前記一方側部材は前記支持体であり、前記他方側部材は前記可動体である構成を採用することができる。このようにすると、可動体に設けられたヨークの第1方向の寸法精度が低下することを抑制できる。従って、可動体を適正に駆動することができる。 In the present invention, the one side member may be the support, and the other side member may be the movable body. In this way, it is possible to suppress a decrease in dimensional accuracy in the first direction of the yoke provided in the movable body. Therefore, the movable body can be properly driven.
 本発明によれば、支持体と可動体のうち、磁気駆動回路の磁石が設けられている側において、第1方向で対向する複数のヨークが連結部材によって第1方向に位置決めされている。このように、連結部材に対して全てのヨークが位置決めされていれば、複数のヨークの部品公差が積み上がってヨーク全体の第1方向の寸法精度が低下することを抑制できる。従って、支持体に対する可動体の第1方向の位置精度が低下することを抑制できる。 According to the present invention, on the side of the support and the movable body on which the magnet of the magnetic drive circuit is provided, the plurality of yokes opposed in the first direction are positioned in the first direction by the connecting member. As described above, when all the yokes are positioned with respect to the connecting member, it is possible to suppress that the component tolerances of the plurality of yokes build up and the dimensional accuracy in the first direction of the entire yoke decreases. Therefore, it can suppress that the position accuracy of the 1st direction of the movable body with respect to a support body falls.
本発明の実施形態に係るアクチュエータの斜視図である。It is a perspective view of an actuator concerning an embodiment of the present invention. 図1に示すアクチュエータのXZ断面図である。It is XZ sectional drawing of the actuator shown in FIG. 図1に示すアクチュエータの分解斜視図である。It is a disassembled perspective view of the actuator shown in FIG. 可動体およびホルダの分解斜視図である。It is a disassembled perspective view of a movable body and a holder. 可動体およびコイルの斜視図である。It is a perspective view of a movable body and a coil. 可動体およびホルダの平面図である。It is a top view of a movable body and a holder.
 以下、図面を参照して、本発明の実施形態を説明する。なお、以下の説明において、互いに交差する3つの方向を各々、第1方向Z、第2方向Xおよび第3方向Yとして説明する。また、第1方向Z、第2方向Xおよび第3方向Yは、互いに直交する方向である。また、第2方向Xの一方側にX1を付し、第2方向Xの他方側にX2を付し、第3方向Yの一方側にY1を付し、第3方向Yの他方側にY2を付し、第1方向Zの一方側にZ1を付し、第1方向Zの他方側にZ2を付して説明する。 Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following description, three directions intersecting with each other will be described as a first direction Z, a second direction X, and a third direction Y, respectively. The first direction Z, the second direction X, and the third direction Y are directions orthogonal to each other. In addition, X1 is attached to one side in the second direction X, X2 is attached to the other side in the second direction X, Y1 is attached to one side in the third direction Y, Y2 is attached to the other side in the third direction Y In the description, one side of the first direction Z is attached with Z1 and the other side of the first direction Z is attached with Z2.
(全体構成)
 図1は、本発明の実施形態に係るアクチュエータ1の斜視図である。図2は、図1のアクチュエータ1のXZ断面図である。図3は、図1のアクチュエータ1の分解斜視図である。図1に示すように、アクチュエータ1の第1方向Zから見た平面形状は四角形である。アクチュエータ1は、支持体2および可動体3と、可動体3を支持体2に対して相対移動させる磁気駆動回路6と、支持体2と可動体3とを接続する粘弾性部材9を有する。アクチュエータ1は、磁気駆動回路6として、可動体3を第2方向Xに振動させる第1磁気駆動回路6Xと、可動体3を第3方向Yに振動させる第2磁気駆動回路6Yを備える。第1磁気駆動回路6Xおよび第2磁気駆動回路6Yは、コイル7と磁石8とを有している。
(overall structure)
FIG. 1 is a perspective view of an actuator 1 according to an embodiment of the present invention. FIG. 2 is an XZ sectional view of the actuator 1 of FIG. FIG. 3 is an exploded perspective view of the actuator 1 of FIG. As shown in FIG. 1, the planar shape of the actuator 1 as viewed in the first direction Z is a square. The actuator 1 has a support 2 and a movable body 3, a magnetic drive circuit 6 for moving the movable body 3 relative to the support 2, and a visco-elastic member 9 for connecting the support 2 and the movable body 3. The actuator 1 includes, as the magnetic drive circuit 6, a first magnetic drive circuit 6X that vibrates the movable body 3 in the second direction X, and a second magnetic drive circuit 6Y that vibrates the movable body 3 in the third direction Y. The first magnetic drive circuit 6X and the second magnetic drive circuit 6Y have a coil 7 and a magnet 8.
 本発明では、可動体3を第2方向Xと第3方向Yの一方もしくは両方に駆動する態様を採用することができる。また、磁気駆動回路6は、コイル7が支持体2の側に設けられ、磁石8が可動体3の側に設けられた態様、および磁石8が支持体2の側に設けられ、コイル7が可動体3の側に設けられた態様を採用することができる。以下の説明では、コイル7が支持体2の側に設けられ、磁石8が可動体3の側に設けられた態様を中心に説明する。 In the present invention, an aspect in which the movable body 3 is driven in one or both of the second direction X and the third direction Y can be adopted. In the magnetic drive circuit 6, the coil 7 is provided on the support 2 side, the magnet 8 is provided on the movable body 3 side, the magnet 8 is provided on the support 2 side, and the coil 7 is provided. The aspect provided in the movable body 3 side is employable. In the following description, the coil 7 is provided on the side of the support 2 and the magnet 8 is mainly provided on the side of the movable body 3.
(支持体)
 支持体2は、カバー11とホルダ60とを有しており、カバー11の内側にホルダ60および可動体3が配置されている。カバー11は、第1方向Zの一方側Z1に位置する第1カバー部材16と、第1カバー部材16に対して第1方向Zの他方側Z2から重なる第2カバー部材17とを有する。第1カバー部材16は、第1方向Zからみたときに四角形の第1端板部161と、第1端板部161の外周縁から第1方向Zの他方側Z2に立ち上がる第1側板部162を備える。また、第2カバー部材17は、第1方向Zからみたときに四角形の第2端板部171と、第2端板部171の外周縁から第1方向Zの一方側Z1に立ち上がる第2側板部172を備える。第1カバー部材16と第2カバー部材17は、第1側板部162と第2側板部172とが第1方向Zに当接しており、4本のネジ18により固定される。
(Support)
The support 2 includes a cover 11 and a holder 60, and the holder 60 and the movable body 3 are disposed inside the cover 11. The cover 11 has a first cover member 16 positioned on one side Z1 in the first direction Z, and a second cover member 17 overlapping the first cover member 16 from the other side Z2 in the first direction Z. The first cover member 16 has a rectangular first end plate portion 161 when viewed in the first direction Z, and a first side plate portion 162 which rises from the outer peripheral edge of the first end plate portion 161 to the other side Z2 in the first direction Z. Equipped with In addition, the second cover member 17 is a second side plate that rises from the outer peripheral edge of the second end plate portion 171 having a quadrangle and the outer edge of the second end plate portion 171 in the first direction Z when viewed in the first direction Z. A unit 172 is provided. In the first cover member 16 and the second cover member 17, the first side plate portion 162 and the second side plate portion 172 are in contact in the first direction Z, and are fixed by four screws 18.
 第1カバー部材16の一方の対角位置および他方の対角位置には、第1端板部161の内側で第2カバー部材17に向けて突出するボス部12が形成されている。ボス部12は、第1方向Zの途中位置に形成された段面12aと、段面12aより第1方向ZのZ2へ突出する円筒部12bを備える。ネジ18は、第2端板部171の対角位置に形成されたネジ穴12cに挿入され、円筒部12bにネジ止めされる。 At one diagonal position and the other diagonal position of the first cover member 16, bosses 12 are formed inside the first end plate 161 so as to protrude toward the second cover member 17. The boss portion 12 includes a step surface 12a formed at an intermediate position in the first direction Z, and a cylindrical portion 12b protruding from the step surface 12a in the first direction Z2 in the Z direction. The screws 18 are inserted into screw holes 12 c formed at diagonal positions of the second end plate portion 171 and screwed to the cylindrical portion 12 b.
 第2カバー部材17には、第2側板部172の第2方向Xの一方側X1の側面を第1方向Zの他方側Z2へ切り欠いた切り欠き13が形成されている。また、第1カバー部材16の第1側板部162には、第2カバー部材17の切り欠き13と第1方向Zで対向する立ち上がり部14が形成されている。立ち上がり部14は、切り欠き13との間に配線基板15を配置するスリットを構成する。配線基板15には、コイル7への給電線等が接続される。 The second cover member 17 is formed with a notch 13 in which the side surface on one side X1 in the second direction X of the second side plate portion 172 is cut out on the other side Z2 in the first direction Z. Further, the first side plate portion 162 of the first cover member 16 is formed with a rising portion 14 that faces the notch 13 of the second cover member 17 in the first direction Z. The rising portion 14 constitutes a slit for disposing the wiring board 15 between itself and the notch 13. A feeder line or the like to the coil 7 is connected to the wiring board 15.
 図4は可動体3およびホルダ60の分解斜視図である。図3、図4に示すように、ホルダ60は、第1方向Zから見て四角形であり、ホルダ60の四隅には、円形穴609が開口する。ホルダ60は、円形穴609にボス部12の円筒部12bが挿入されて、段面12aに載った位置で保持される。ホルダ60は、第1ホルダ61と、第1ホルダ61に対して第1方向Zの他方側Z2から当接する第2ホルダ62を備える。第2ホルダ62は、第1ホルダ61に対して第1方向Zで略対称に形成されている。 FIG. 4 is an exploded perspective view of the movable body 3 and the holder 60. As shown in FIG. As shown in FIGS. 3 and 4, the holder 60 is a quadrangle as viewed in the first direction Z, and circular holes 609 are opened at the four corners of the holder 60. The holder 60 is held at a position where the cylindrical portion 12b of the boss 12 is inserted into the circular hole 609 and placed on the step surface 12a. The holder 60 includes a first holder 61 and a second holder 62 that abuts the first holder 61 from the other side Z2 in the first direction Z. The second holder 62 is formed substantially symmetrically in the first direction Z with respect to the first holder 61.
 第1ホルダ61および第2ホルダ62の4辺の中央には、内周側へ凹む凹部650が形成されている。図3に示すように、第2方向Xで対向する2つの凹部650の内側に第1磁気駆動回路6Xのコイル71、72が保持される。また、第3方向Yで対向する2つの凹部650の内側に第2磁気駆動回路6Yのコイル73、74が保持される。図4に示すように、コイル71、72は、有効辺となる長辺701が第3方向Yに延在する扁平な空芯コイルであり、コイル73、74は、有効辺となる長辺701が第2方向Xに延在する扁平な空芯コイルである。コイル71、72とコイル73、74は、第1ホルダ61および第2ホルダ62に形成した長円形のコイル保持穴66(図4参照)に保持される。 At the centers of the four sides of the first holder 61 and the second holder 62, a recessed portion 650 recessed toward the inner peripheral side is formed. As shown in FIG. 3, the coils 71 and 72 of the first magnetic drive circuit 6X are held inside the two recesses 650 opposed in the second direction X. In addition, the coils 73 and 74 of the second magnetic drive circuit 6Y are held inside the two concave portions 650 opposed in the third direction Y. As shown in FIG. 4, the coils 71 and 72 are flat air core coils whose long sides 701 serving as effective sides extend in the third direction Y, and the coils 73 and 74 have long sides 701 serving as effective sides. Is a flat air core coil extending in the second direction X. The coils 71 and 72 and the coils 73 and 74 are held in an oval coil holding hole 66 (see FIG. 4) formed in the first holder 61 and the second holder 62.
(可動体)
 図5は可動体3およびコイル7の斜視図である。可動体3は、磁性板からなるヨーク30と、ヨーク30に固定される磁石8を備える。図2、図5に示すように、ヨーク30は、第1ヨーク31と、第1ヨーク31の第1方向Zの他方側Z2に配置される第2ヨーク32と、第2ヨーク32の第1方向Zの他方側Z2に配置される第3ヨーク33を備える。また。ヨーク30は、第1ヨーク31、第2ヨーク32、第3ヨーク33を第1方向Zで位置決めして連結する連結部材34を備える。連結部材34は溶接等により第1ヨーク31、第2ヨーク32、第3ヨーク33と接合される。
(Movable body)
FIG. 5 is a perspective view of the movable body 3 and the coil 7. The movable body 3 includes a yoke 30 made of a magnetic plate and a magnet 8 fixed to the yoke 30. As shown in FIGS. 2 and 5, the yoke 30 includes a first yoke 31, a second yoke 32 disposed on the other side Z2 in the first direction Z of the first yoke 31, and a first yoke of the second yoke 32. The third yoke 33 disposed on the other side Z2 of the direction Z is provided. Also. The yoke 30 includes a connecting member 34 that positions and connects the first yoke 31, the second yoke 32, and the third yoke 33 in the first direction Z. The connecting member 34 is joined to the first yoke 31, the second yoke 32, and the third yoke 33 by welding or the like.
 図2、図5に示すように、第1ヨーク31、第2ヨーク32、第3ヨーク33の中央部301には、第1方向Zに延在する軸部35が取り付けられている。軸部35は、第1ホルダ61および第2ホルダ62の中央に形成された円形穴651に通されている(図4参照)。軸部35は、第1ヨーク31と第2ヨーク32の間に配置される第1軸部351と、第1軸部351の第1方向Zの他方側Z2に接続され、第2ヨーク32と第3ヨーク33の間に配置される第2軸部352を備える。第1軸部351および第2軸部352の端部は、第1ヨーク31、第2ヨーク32、第3ヨーク33の中央部301に形成された円形穴302に嵌合している。 As shown in FIGS. 2 and 5, a shaft portion 35 extending in the first direction Z is attached to a central portion 301 of the first yoke 31, the second yoke 32, and the third yoke 33. The shaft portion 35 is passed through a circular hole 651 formed at the center of the first holder 61 and the second holder 62 (see FIG. 4). The shaft portion 35 is connected to a first shaft portion 351 disposed between the first yoke 31 and the second yoke 32, and the other side Z2 of the first shaft portion 351 in the first direction Z, A second shaft portion 352 disposed between the third yokes 33 is provided. The end portions of the first shaft portion 351 and the second shaft portion 352 are fitted in circular holes 302 formed in the central portion 301 of the first yoke 31, the second yoke 32, and the third yoke 33.
 図2、図5に示すように、第1ヨーク31、第2ヨーク32、第3ヨーク33は第1方向Zに対して垂直な板状部材であり、第1方向Zから見たときに同一形状である。第1ヨーク31、第2ヨーク32、第3ヨーク33は、第1方向Zから見たときに十字形である。第1ヨーク31、第2ヨーク32、第3ヨーク33は、それぞれ、円形穴302が形成された中央部301と、中央部301から第2方向Xの一方側X1および他方側X2に突出する第1腕部310および第2腕部320と、中央部301から第3方向Yの一方側Y1および他方側Y2に突出する第3腕部330および第4腕部340を備える。第1腕部310および第2腕部320は第2方向Xに延在し、第3腕部330および第4腕部340は第3方向Yに延在する。 As shown in FIGS. 2 and 5, the first yoke 31, the second yoke 32, and the third yoke 33 are plate-like members perpendicular to the first direction Z, and are identical when viewed from the first direction Z. It is a shape. The first yoke 31, the second yoke 32, and the third yoke 33 are cruciform when viewed from the first direction Z. The first yoke 31, the second yoke 32, and the third yoke 33 respectively have a central portion 301 in which the circular hole 302 is formed, and a first portion projecting from the central portion 301 to one side X1 and the other side X2 in the second direction X. The first arm 310 and the second arm 320, and the third arm 330 and the fourth arm 340 which protrude from the central portion 301 to the one side Y1 and the other side Y2 in the third direction Y are provided. The first arm 310 and the second arm 320 extend in the second direction X, and the third arm 330 and the fourth arm 340 extend in the third direction Y.
 ヨーク30は、第1ヨーク31、第2ヨーク32、第3ヨーク33および連結部材34を溶接等により接合して組み立てた組立体である。これら3枚のヨークは、4本の腕部が第1方向Zから見て重なっており、第1方向Zから見て重なる腕部の先端が連結部材34によって連結されている。連結部材34は、第1ヨーク31、第2ヨーク32、第3ヨーク33の第1腕部310の先端(端部)を連結する第1連結部材341と、第2腕部320の先端(端部)を連結する第2連結部材342と、第3腕部330の先端(端部)を連結する第3連結部材343と、第4腕部340の先端(端部)を連結する第4連結部材344からなる。各連結部材34は第1方向Zに延在する。各連結部材34の第1方向Zの一方側Z1の端部に第1ヨーク31の端部が略直角に接合され、第1方向Zの他方側Z2の端部に第3ヨーク33が略直角に接合される。また、第1方向Zの中央部には、第2ヨーク32の端部が略直角に接合される。 The yoke 30 is an assembly in which the first yoke 31, the second yoke 32, the third yoke 33, and the connecting member 34 are joined by welding or the like. The four arms of the three yokes overlap when viewed in the first direction Z, and the tips of the overlapping arms when viewed in the first direction Z are connected by the connecting member 34. The connecting member 34 includes a first connecting member 341 that connects the tip (end) of the first arm 310 of the first yoke 31, the second yoke 32, and the third yoke 33, and a tip (an end of the second arm 320). Section), the third connection member 343 for connecting the tip (end) of the third arm 330, and the fourth connection for connecting the tip (end) of the fourth arm 340. It consists of a member 344. Each connecting member 34 extends in the first direction Z. The end of the first yoke 31 is joined substantially perpendicularly to the end of the one side Z1 in the first direction Z of each connecting member 34, and the third yoke 33 is substantially perpendicular to the end of the other side Z2 of the first direction Z Bonded to Further, the end of the second yoke 32 is joined substantially at right angles to the central portion in the first direction Z.
 第1ヨーク31、第2ヨーク32、第3ヨーク33のそれぞれにおいて、第1腕部310、第2腕部320、第3腕部330、第4腕部340の先端(端部)の幅方向の中央には凹部303が形成され、凹部303の幅方向の両側に凸部304が形成されている。また、各連結部材34(第1連結部材341、第2連結部材342、第3連結部材343、第4連結部材344)には、各ヨークの凸部304に対応する位置を切り欠いた凹部305が形成されている。すなわち、各連結部材34には、第1方向Zの両端、および第1方向Zの途中位置の3箇所において、幅方向の両端にそれぞれ凹部305が形成されている。第1ヨーク31、第2ヨーク32、第3ヨーク33は、第1腕部310、第2腕部320、第3腕部330、第4腕部340の先端に形成された凸部304が連結部材34の凹部305に嵌め合わされて溶接されており、連結部材34に対して各ヨークが略直角に接合されている。なお、連結部材34に形成した凸部と、第1ヨーク31、第2ヨーク32、第3ヨーク33に形成した凹部とを嵌合させる形態を採用しても良い。 In each of the first yoke 31, the second yoke 32, and the third yoke 33, the width direction of the tip (end) of the first arm 310, the second arm 320, the third arm 330, and the fourth arm 340 A recess 303 is formed in the center of the and a protrusion 304 is formed on both sides in the width direction of the recess 303. Also, in each connecting member 34 (the first connecting member 341, the second connecting member 342, the third connecting member 343, and the fourth connecting member 344), a concave portion 305 is cut out at a position corresponding to the convex portion 304 of each yoke. Is formed. That is, in each connecting member 34, concave portions 305 are formed at both ends in the width direction at three ends in the first direction Z and at an intermediate position in the first direction Z, respectively. The first yoke 31, the second yoke 32, and the third yoke 33 are connected to a convex portion 304 formed at the tip of the first arm 310, the second arm 320, the third arm 330, and the fourth arm 340. The yokes are fitted and welded in the recesses 305 of the member 34, and the respective yokes are joined to the connecting member 34 substantially at right angles. A configuration may be adopted in which the convex portion formed in the connecting member 34 and the concave portion formed in the first yoke 31, the second yoke 32, and the third yoke 33 are fitted.
 第1ヨーク31、第2ヨーク32、第3ヨーク33において、第1腕部310の先端は、第2方向Xから見て第1連結部材341と重なっており、第2腕部320の先端は、第2方向Xから見て第2連結部材342と重なっている。また、第3腕部330の先端は、第3方向Yから見て第3連結部材343と重なっており、第4腕部340の先端は、第3方向Yから見て第4連結部材344と重なっている。第1ヨーク31の凸部304を連結部材の凹部305と嵌め合わせると、第1ヨーク31は、第1方向Zの一方側Z1の面が連結部材34の第1方向Zの一方側Z1の端面と同一面上に位置するように第1方向Zに位置決めされる。また、第3ヨーク33の凸部304を連結部材の凹部305と嵌め合わせると、第3ヨーク33は、第1方向Zの他方側Z2の面が連結部材34の第1方向Zの他方側Z2の端面と同一面上に位置するように第1方向Zに位置決めされる。つまり、ヨーク30は、連結部材34の第1方向Zの高さがヨーク30の第1方向Zの高さと一致するように組み立てられる。 In the first yoke 31, the second yoke 32, and the third yoke 33, the tip of the first arm 310 overlaps the first connecting member 341 when viewed from the second direction X, and the tip of the second arm 320 is As viewed in the second direction X, the second connection member 342 overlaps the second connection member 342. Further, the tip of the third arm 330 overlaps the third connecting member 343 when viewed from the third direction Y, and the tip of the fourth arm 340 with the fourth connecting member 344 when viewed from the third direction Y. overlapping. When the convex portion 304 of the first yoke 31 is fitted to the concave portion 305 of the connecting member, the surface of the one side Z1 in the first direction Z of the first yoke 31 is the end surface of the one side Z1 in the first direction Z of the connecting member 34 And is positioned in the first direction Z so as to be on the same plane. Further, when the convex portion 304 of the third yoke 33 is fitted to the concave portion 305 of the connecting member, the surface of the other side Z2 in the first direction Z of the third yoke 33 is the other side Z2 of the connecting member 34 in the first direction Z. It is positioned in the first direction Z so as to be on the same plane as the end face of the lens. That is, the yoke 30 is assembled such that the height of the connecting member 34 in the first direction Z coincides with the height of the yoke 30 in the first direction Z.
 図6は可動体3およびホルダ60の平面図である。ヨーク30は、第1方向Zから見たときの外形がホルダ60よりも小さい。ヨーク30は、ホルダ60に対して第2方向Xおよび第3方向Yに対して移動可能に配置され、連結部材34は、ホルダ60の凹部650に配置される。可動体3およびホルダ60をカバー11の内側に配置すると、連結部材34は、ホルダ60の凹部650と第2カバー部材17の第2側板部172との隙間に配置される(図2、図6参照)。 FIG. 6 is a plan view of the movable body 3 and the holder 60. FIG. The outer shape of the yoke 30 as viewed in the first direction Z is smaller than that of the holder 60. The yoke 30 is disposed movably with respect to the holder 60 in the second direction X and the third direction Y, and the connection member 34 is disposed in the recess 650 of the holder 60. When the movable body 3 and the holder 60 are disposed inside the cover 11, the connecting member 34 is disposed in the gap between the recess 650 of the holder 60 and the second side plate portion 172 of the second cover member 17 (FIGS. 2 and 6) reference).
 図3、図4、および図6に示すように、ホルダ60には、凹部650の幅方向の両端の縁に第1方向Zに延在する角柱部660X、660Yが形成されている。ホルダ60の第2方向Xの両側の凹部650には、第1連結部材341および第2連結部材342を挟んで第3方向Yに対向する2本の角柱部660Yが形成されている。従って、可動体3が第3方向Yに移動するとき、可動体3の第3方向Yの可動範囲は、角柱部660Yによって規制される。また、ホルダ60の第3方向Yの両側の凹部650には、第3連結部材343および第4連結部材344を挟んで第2方向Xに対向する2本の角柱部660Xが形成されている。従って、可動体3が第2方向Xに移動するとき、可動体3の第2方向Xの可動範囲は、角柱部660Xによって規制される。角柱部660X、660Yによって規制される可動体3の可動範囲は、可動体3が第2カバー部材17の内面に衝突することのない範囲となっている。 As shown in FIG. 3, FIG. 4 and FIG. 6, prisms 660 X and 660 Y extending in the first direction Z are formed on the edges of both ends of the recess 650 in the width direction of the holder 60. In the concave portions 650 on both sides in the second direction X of the holder 60, two prismatic column portions 660Y facing each other in the third direction Y with the first connecting member 341 and the second connecting member 342 interposed therebetween are formed. Therefore, when the movable body 3 moves in the third direction Y, the movable range of the movable body 3 in the third direction Y is restricted by the prism portion 660Y. Further, in the concave portions 650 on both sides in the third direction Y of the holder 60, two prismatic portions 660X facing each other in the second direction X with the third connecting member 343 and the fourth connecting member 344 interposed therebetween are formed. Therefore, when the movable body 3 moves in the second direction X, the movable range of the movable body 3 in the second direction X is restricted by the prism portion 660X. The movable range of the movable body 3 restricted by the prismatic portions 660X and 660Y is a range in which the movable body 3 does not collide with the inner surface of the second cover member 17.
 図2に示すように、第1ヨーク31は、第1ホルダ61と第1カバー部材16との間に配置されている。また、第2ヨーク32は、第1ホルダ61と第2ホルダ62との間に配置され、第3ヨーク33は、第2ホルダ62と第2カバー部材17との間に配置されている。図4に示すように、磁石8は、第1磁気駆動回路6Xのコイル71と第1方向Zに対向する磁石81と、第1磁気駆動回路6Xのコイル72と第1方向Zに対向する磁石82と、第2磁気駆動回路6Yのコイル73と第1方向Zに対向する磁石83と、第2磁気駆動回路6Yのコイル74と第1方向Zに対向する磁石84からなる。本形態では、磁石81、82、83、84は、コイル71、72、73、74の第1方向Zの一方側Z1および他方側Z2に配置され、各コイル7の第1方向Zの両側に磁石8が配置される。すなわち、第1ヨーク31の第1方向Zの他方側の面、第2ヨーク32の第1方向Zの両面、第3ヨークの第1方向Zの一方側Z1の面の4面に磁石8が固定されている。コイル7に対して第1方向Zの両側から磁石8が対向することにより、磁束漏れを少なくすることができ、駆動力を大きくすることができる。 As shown in FIG. 2, the first yoke 31 is disposed between the first holder 61 and the first cover member 16. The second yoke 32 is disposed between the first holder 61 and the second holder 62, and the third yoke 33 is disposed between the second holder 62 and the second cover member 17. As shown in FIG. 4, the magnet 8 is a magnet facing the coil 71 of the first magnetic drive circuit 6X in the first direction Z, and a magnet facing the coil 72 of the first magnetic drive circuit 6X in the first direction Z A magnet 82 faces the coil 73 of the second magnetic drive circuit 6Y in the first direction Z, and a magnet 84 faces the coil 74 of the second magnetic drive circuit 6Y in the first direction Z. In this embodiment, the magnets 81, 82, 83, 84 are disposed on the one side Z1 and the other side Z2 of the coils 71, 72, 73, 74 in the first direction Z, and on both sides of each coil 7 in the first direction Z. A magnet 8 is arranged. That is, the magnet 8 is provided on the other surface of the first yoke 31 in the first direction Z, both surfaces of the second yoke 32 in the first direction Z, and the surface of the third yoke on the one side Z1 in the first direction Z It is fixed. When the magnets 8 face the coil 7 from both sides in the first direction Z, the magnetic flux leakage can be reduced and the driving force can be increased.
 磁石81は、第1ヨーク31、第2ヨーク32、第3ヨーク33の第1腕部310に固定され、磁石82は、第1ヨーク31、第2ヨーク32、第3ヨーク33の第2腕部320に固定され、磁石83は、第1ヨーク31、第2ヨーク32、第3ヨーク33の第3腕部330に固定され、磁石84は、第1ヨーク31、第2ヨーク32、第3ヨーク33の第4腕部340に固定されている。各磁石8は、厚さ方向で分極着磁されている。また、各コイル7に対して第1方向Zの一方側Z1と他方側Z2で対向する2つの磁石8は、コイル7と対向する面が異なる極に着磁されている。 The magnet 81 is fixed to the first arm portion 310 of the first yoke 31, the second yoke 32, and the third yoke 33, and the magnet 82 is the second arm of the first yoke 31, the second yoke 32, and the third yoke 33. The magnet 83 is fixed to the portion 320, and the magnet 83 is fixed to the third arm 330 of the first yoke 31, the second yoke 32, and the third yoke 33. The magnet 84 is fixed to the first yoke 31, the second yoke 32, the third. It is fixed to the fourth arm 340 of the yoke 33. Each magnet 8 is polarized and magnetized in the thickness direction. Further, the two magnets 8 facing each coil 7 on one side Z1 and the other side Z2 in the first direction Z are magnetized in poles different in the surface facing the coil 7.
(粘弾性部材)
 図2に示すように、アクチュエータ1において、支持体2と可動体3とが第1方向Zで対向する個所には粘弾性部材9が配置されている。本形態では、粘弾性部材9として、可動体3の第1ヨーク31と支持体2の第1カバー部材16とが第1方向Zで対向する個所に第1粘弾性部材91が配置され、可動体3の第3ヨーク33と支持体2の第2カバー部材17とが第1方向Zで対向する個所に第2粘弾性部材92が配置されている。第1粘弾性部材91は、第1ヨーク31の第1腕部310、第2腕部320、第3腕部330、第4腕部340と第1カバー部材16とが第1方向Zに対向する4箇所に1つずつ配置されている。また、第2粘弾性部材92は、第3ヨーク33の第1腕部310、第2腕部320、第3腕部330、第4腕部340と第2カバー部材17とが第1方向Zに対向する4箇所に1つずつ配置されている。
(Viscoelastic member)
As shown in FIG. 2, in the actuator 1, the visco-elastic member 9 is disposed at a position where the support 2 and the movable body 3 face in the first direction Z. In this embodiment, as the visco-elastic member 9, the first visco-elastic member 91 is disposed at a position where the first yoke 31 of the movable body 3 and the first cover member 16 of the support 2 face in the first direction Z A second visco-elastic member 92 is disposed at a position where the third yoke 33 of the body 3 and the second cover member 17 of the support 2 face in the first direction Z. In the first viscoelastic member 91, the first arm 310, the second arm 320, the third arm 330, and the fourth arm 340 of the first yoke 31 and the first cover member 16 face each other in the first direction Z. One in each of the four locations. In the second viscoelastic member 92, the first arm 310, the second arm 320, the third arm 330, the fourth arm 340, and the second cover member 17 of the third yoke 33 extend in the first direction Z. It is arranged one by one at four places facing the.
 図2、図3に示すように、第1カバー部材16には、第1方向Zの一方側Z1に凹む凹部163が形成されている。凹部163は、第1端板部161の第3方向Yの中央で第2方向Xに対向する2箇所、および、第1端板部161の第2方向Xの中央で第3方向Yに対向する2箇所の4箇所に形成されている。第1粘弾性部材91は、これら4箇所の凹部163に1つずつ保持され、第1ヨーク31と第1カバー部材16とを4箇所で第1方向Zに接続する。第2カバー部材17の第2端板部171においても、第1方向Zの他方側Z2に凹む凹部173が4箇所に形成され、第2粘弾性部材92は、これら4箇所の凹部173に1つずつ保持され、第3ヨーク33と第2カバー部材17とを4箇所で第1方向Zに接続する。 As shown in FIGS. 2 and 3, the first cover member 16 is formed with a recess 163 that is recessed on one side Z <b> 1 in the first direction Z. The concave portion 163 is opposed to the center of the first end plate portion 161 in the third direction Y at two locations opposed in the second direction X, and the center of the first end plate portion 161 in the second direction X opposed to the third direction Y It is formed in four places of two places. The first visco-elastic member 91 is held one by one in these four recessed portions 163, and connects the first yoke 31 and the first cover member 16 in the first direction Z at four points. Also in the second end plate portion 171 of the second cover member 17, concave portions 173 recessed in the other side Z2 in the first direction Z are formed at four places, and the second viscoelastic member 92 The three yokes 33 and the second cover member 17 are connected in the first direction Z at four locations.
 第1粘弾性部材91および第2粘弾性部材92は、第1方向Zから見た形状が4角形であり、第1方向Zを厚み方向として配置されている。第2粘弾性部材92は、第2方向Xの寸法と第3方向Yの寸法が同一である。第1粘弾性部材91は、第1ヨーク31と第1カバー部材16との間で第1方向Zに圧縮された状態で配置され、第2粘弾性部材92は、第3ヨーク33と第2カバー部材17との間で第1方向Zに圧縮された状態で配置されている。第1粘弾性部材91および第2粘弾性部材92は、支持体2と接する面、および、可動体3と接する面に接着されている。 The first viscoelastic member 91 and the second viscoelastic member 92 have a quadrangular shape when viewed in the first direction Z, and are arranged with the first direction Z as a thickness direction. The dimensions of the second viscoelastic member 92 in the second direction X are the same as the dimensions in the third direction Y. The first viscoelastic member 91 is disposed between the first yoke 31 and the first cover member 16 in a compressed state in the first direction Z, and the second viscoelastic member 92 includes the third yoke 33 and the second It is arranged in a state of being compressed in the first direction Z between the cover member 17 and the cover member 17. The first viscoelastic member 91 and the second viscoelastic member 92 are adhered to the surface in contact with the support 2 and the surface in contact with the movable body 3.
 ここで、粘弾性とは、粘性と弾性の両方を合わせた性質のことであり、ゲル状部材、プラスチック、ゴム等の高分子物質に顕著に見られる性質である。従って、粘弾性部材9(第1粘弾性部材91および第2粘弾性部材92)として、各種ゲル状部材を用いることができる。また、粘弾性部材9として、天然ゴム、ジエン系ゴム(例えば、スチレン・ブタジエンゴム、イソプレンゴム、ブタジエンゴム)、クロロプレンゴム、アクリロニトリル・ブタジエンゴム等)、非ジエン系ゴム(例えば、ブチルゴム、エチレン・プロピレンゴム、エチレン・プロピレン・ジエンゴム、ウレタンゴム、シリコーンゴム、フッ素ゴム等)、熱可塑性エラストマー等の各種ゴム材料及びそれらの変性材料を用いてもよい。本形態では、粘弾性部材9(第1粘弾性部材91および第2粘弾性部材92)は、針入度が10度から110度であるシリコーン系ゲルである。針入度とは、IS-K-2207やJIS-K-2220で規定されており、この値が小さいほど硬いことを意味する。 Here, the viscoelasticity is a property in which both the viscosity and the elasticity are combined, and is a property which is remarkably observed in high-molecular substances such as gel-like members, plastics and rubbers. Therefore, various gel-like members can be used as the viscoelastic member 9 (the first viscoelastic member 91 and the second viscoelastic member 92). Also, as the viscoelastic member 9, natural rubber, diene rubber (for example, styrene butadiene rubber, isoprene rubber, butadiene rubber), chloroprene rubber, acrylonitrile butadiene rubber, etc., non-diene rubber (for example, butyl rubber, ethylene) Various rubber materials such as propylene rubber, ethylene / propylene / diene rubber, urethane rubber, silicone rubber, fluororubber, etc., thermoplastic elastomers and their modified materials may be used. In the present embodiment, the viscoelastic member 9 (the first viscoelastic member 91 and the second viscoelastic member 92) is a silicone-based gel having a penetration of 10 degrees to 110 degrees. The degree of penetration is defined in IS-K-2207 and JIS-K-2220, and the smaller the value, the harder it is.
 粘弾性部材9は、その伸縮方向によって、線形あるいは非線形の伸縮特性を備える。例えば、粘弾性部材9は、その厚さ方向(軸方向)に押圧されて圧縮変形する際は、線形の成分(バネ係数)よりも非線形の成分(バネ係数)が大きい伸縮特性を備える。一方、厚さ方向(軸方向)に引っ張られて伸びる場合は、非線形の成分(バネ係数)よりも線形の成分(バネ係数)が大きい伸縮特性を備える。また、厚さ方向(軸方向)と交差する方向(せん断方向)に変形する場合も、引っ張られて伸びる方向の変形であるため、非線形の成分(バネ係数)よりも線形の成分(バネ係数)が大きい変形特性を持つ。従って、粘弾性部材9では、運動方向によるバネ力が一定となる。それ故、粘弾性部材9のせん断方向のバネ要素を用いることにより、入力信号に対する振動加速度の再現性を向上することができるので、微妙なニュアンスをもって振動を実現することができる。 The viscoelastic member 9 has linear or non-linear expansion and contraction characteristics depending on the expansion and contraction direction. For example, when the visco-elastic member 9 is pressed in the thickness direction (axial direction) to be compressively deformed, the visco-elastic member 9 has an expansion and contraction characteristic in which a non-linear component (spring coefficient) is larger than a linear component (spring coefficient). On the other hand, when it is pulled and extended in the thickness direction (axial direction), it has an expansion and contraction characteristic in which a linear component (spring coefficient) is larger than a non-linear component (spring coefficient). In addition, also in the case of deformation in the direction (shear direction) intersecting the thickness direction (axial direction), the deformation is in the direction of pulling and extending, so a linear component (spring coefficient) than a nonlinear component (spring coefficient) Has large deformation characteristics. Accordingly, in the visco-elastic member 9, the spring force in the movement direction is constant. Therefore, by using the spring element in the shear direction of the visco-elastic member 9, the reproducibility of the vibration acceleration with respect to the input signal can be improved, so that the vibration can be realized with a subtle nuance.
 本形態では、粘弾性部材9は、可動体3が第1方向Zと直交する方向(第2方向X、第3方向Y)に移動する際、厚さ方向(第1方向Z)と交差するせん断方向(第2方向X、第3方向Y)に変形するように取り付けられている。従って、可動体3が第1方向Zと直交する方向(第2方向X、第3方向Y)に移動する際、粘弾性部材9の線形の成分が大きい変形特性を用いるため、入力信号に対する振動加速度の再現性が良く、微妙なニュアンスをもって振動を実現することができる。従って、表現したい振動を容易に作ることができる。また、可動体3を第1方向Zに移動させる力が加わった際には、第1粘弾性部材91および第2粘弾性部材92の一方が圧縮変形するため、粘弾性部材9の非線形の成分が大きい変形特性を用いることになり、可動体3の位置変化を抑制することができる。 In the present embodiment, the viscoelastic member 9 intersects the thickness direction (first direction Z) when the movable body 3 moves in the direction (second direction X, third direction Y) orthogonal to the first direction Z. It is attached so as to be deformed in the shear direction (second direction X, third direction Y). Therefore, when the movable body 3 moves in a direction (second direction X, third direction Y) orthogonal to the first direction Z, the linear component of the visco-elastic member 9 uses a large deformation characteristic so that vibration with respect to the input signal is used. The repeatability of acceleration is good, and vibrations can be realized with subtle nuances. Therefore, the vibration to be expressed can be easily made. Further, when a force to move the movable body 3 in the first direction Z is applied, one of the first viscoelastic member 91 and the second viscoelastic member 92 is compressively deformed, so that the nonlinear component of the viscoelastic member 9 Is used, and the positional change of the movable body 3 can be suppressed.
 第1粘弾性部材91および第2粘弾性部材92の平面形状は、4角形以外の多角形でもよいし、円形でもよい。矩形の場合、製造時の歩留まりが最も良いので、低コストである。但し、アクチュエータ1を駆動する際の可動体3の共振特性を考慮すると、第1粘弾性部材91および第2粘弾性部材92を円形にすることが望ましい。 The planar shape of the first viscoelastic member 91 and the second viscoelastic member 92 may be polygonal other than quadrilateral or circular. In the case of a rectangular shape, it is low in cost because the yield at the time of manufacture is the best. However, in consideration of the resonance characteristic of the movable body 3 when driving the actuator 1, it is desirable to make the first viscoelastic member 91 and the second viscoelastic member 92 circular.
(基本動作)
 本形態のアクチュエータ1は、第1磁気駆動回路6Xのコイル71、72に交流を印加すると、可動体3は、第2方向Xに振動するため、アクチュエータ1における重心が第2方向Xに変動する。このため、利用者は、第2方向Xの振動を体感することができる。また、第2磁気駆動回路6Yのコイル73、74に交流を印加すると、可動体3は、第3方向Yに振動するため、アクチュエータにおける重心が第3方向Yに変動する。このため、利用者は、第3方向Yの振動を体感することができる。また、コイル7に印加する交流波形を調整して、可動体3が第2方向Xの一方側X1に移動する加速度と、可動体3が第2方向の他方側X2に移動する加速度とを相違させれば、利用者は、第2方向Xにおいて方向性を有する振動を体感することができる。同様に、第3方向Yにおいて方向性を有する振動を体感することができる。
(basic action)
In the actuator 1 of this embodiment, when an alternating current is applied to the coils 71 and 72 of the first magnetic drive circuit 6X, the movable body 3 vibrates in the second direction X, so the center of gravity in the actuator 1 fluctuates in the second direction X . Therefore, the user can sense the vibration in the second direction X. In addition, when an alternating current is applied to the coils 73 and 74 of the second magnetic drive circuit 6Y, the movable body 3 vibrates in the third direction Y, so the center of gravity of the actuator fluctuates in the third direction Y. For this reason, the user can experience vibration in the third direction Y. Further, by adjusting the AC waveform applied to the coil 7, the acceleration at which the movable body 3 moves to one side X1 in the second direction X is different from the acceleration at which the movable body 3 moves to the other side X2 in the second direction. Then, the user can feel the vibration having the directivity in the second direction X. Similarly, vibration having directivity in the third direction Y can be felt.
(本形態の主な効果)
 以上説明したように、本形態のアクチュエータ1は、支持体2と可動体3のうち、磁気駆動回路6の磁石8が設けられている側(可動体3)がヨーク30を備えており、ヨーク30は、第1方向Zで対向する複数のヨークが連結部材34によって第1方向Zに位置決めされている。すなわち、支持体2には、コイル7が2段に配置され、磁石8を保持するヨーク30は、第1ヨーク31、第2ヨーク32、第3ヨーク33を備えた3段構成である。このように、連結部材34に対して全てのヨークが位置決めされていれば、複数のヨークの部品公差が積み上がってヨーク30全体の第1方向の寸法精度が低下することを抑制できる。従って、可動体3の第1方向Zの寸法精度が低下することを抑制でき、支持体2に対する可動体3の第1方向Zの位置精度が低下することを抑制できる。よって、可動体3を適正に駆動することができる。
(Main effects of this form)
As described above, in the actuator 1 of this embodiment, the side (movable body 3) of the support 2 and the movable body 3 on which the magnet 8 of the magnetic drive circuit 6 is provided includes the yoke 30, A plurality of yokes 30 opposed in the first direction Z are positioned in the first direction Z by the connecting member 34. That is, the coils 7 are arranged in two stages on the support 2, and the yoke 30 for holding the magnet 8 has a three-stage configuration including the first yoke 31, the second yoke 32, and the third yoke 33. As described above, when all the yokes are positioned with respect to the connecting member 34, it is possible to suppress that the component tolerances of the plurality of yokes build up and the dimensional accuracy of the entire yoke 30 in the first direction decreases. Therefore, reduction in the dimensional accuracy of the movable body 3 in the first direction Z can be suppressed, and reduction in the positional accuracy of the movable body 3 in the first direction Z relative to the support 2 can be suppressed. Therefore, the movable body 3 can be driven properly.
 本形態では、第1ヨーク31、第2ヨーク32、第3ヨーク33は、連結部材34に対して略直角に接続されており、第1ヨーク31、第2ヨーク32、第3ヨーク33は、第1方向Zと直交する方向に見て連結部材34と重なっている。従って、連結部材34の第1方向Zの高さがヨーク30の第1方向Zの高さとなるので、連結部材34の部品公差と第1ヨーク31、第2ヨーク32、第3ヨーク33の部品公差とが積み上がってヨーク30全体の第1方向Zの寸法精度が低下することを抑制できる。 In the present embodiment, the first yoke 31, the second yoke 32, and the third yoke 33 are connected substantially at right angles to the connection member 34, and the first yoke 31, the second yoke 32, and the third yoke 33 are When viewed in the direction orthogonal to the first direction Z, the connecting member 34 is overlapped. Therefore, since the height of the connecting member 34 in the first direction Z becomes the height of the yoke 30 in the first direction Z, the component tolerance of the connecting member 34 and the components of the first yoke 31, the second yoke 32, and the third yoke 33 It is possible to suppress that the tolerance is accumulated and the dimensional accuracy of the entire yoke 30 in the first direction Z is reduced.
 本形態の第1ヨーク31、第2ヨーク32、第3ヨーク33は、連結部材34と連結される端部に凸部304が形成され、連結部材34には、凸部304と嵌合する凹部305が形成されている。従って、凸部304と凹部305と嵌合させることによって各ヨークと連結部材34とを位置決めすることができる。 In the first yoke 31, the second yoke 32, and the third yoke 33 of the present embodiment, a convex portion 304 is formed at an end portion connected to the connecting member 34, and the connecting member 34 is a concave portion to be fitted with the convex portion 304. 305 are formed. Therefore, the yokes and the connecting members 34 can be positioned by fitting the convex portions 304 and the concave portions 305.
 本形態では、連結部材34は、第1ヨーク31、第2ヨーク32、第3ヨーク33がそれぞれ、複数の腕部(第1腕部310、第2腕部320、第3腕部330、第4腕部340)を備えており、連結部材34は、第1方向Zから見て重なる腕部の先端を連結するように構成されている。従って、複数の連結箇所で第1ヨーク31、第2ヨーク32、第3ヨーク33が連結され、各連結箇所の第1方向Zの寸法精度が連結部材34の部品公差で決まるため、ヨーク30全体の第1方向Zの寸法精度の低下をより少なくすることができる。 In the present embodiment, the connecting member 34 includes a plurality of arms (a first arm 310, a second arm 320, a third arm 330, a third arm 330, and a third yoke 33). The connecting member 34 is configured to connect the tips of overlapping arms when viewed from the first direction Z. Accordingly, the first yoke 31, the second yoke 32, and the third yoke 33 are connected at a plurality of connection points, and the dimensional accuracy of each connection point in the first direction Z is determined by the component tolerance of the connecting member 34. The decrease in dimensional accuracy in the first direction Z can be further reduced.
 本形態のアクチュエータ1は、可動体3を第2方向Xに振動させる第1磁気駆動回路6Xと、可動体3を第3方向Yに振動させる第2磁気駆動機構6Yを備える。そして、ヨーク30は第1方向Zから見て十字型であり、ヨーク30とホルダ60の間に、可動体3の第2方向Xおよび第3方向Yの可動範囲を規制するストッパ機構が構成されている。すなわち、ヨーク30は、第2方向Xの一方側X1に突出する第1腕部310を連結する第1連結部材341と、第2方向Xの他方側X2に突出する第2腕部320を連結する第2連結部材342と、と、第3方向Yの一方側Y1に突出する第3腕部330を連結する第3連結部材343と、第3方向Yの他方側Y2に突出する第4腕部340を連結する第4連結部材344を備えている。そして、これら4箇所の連結部材34は、ホルダ60の凹部650に配置され、凹部650の縁に設けられた角柱部660X、660Yによって連結部材34の第2方向Xおよび第3方向Yの可動範囲が規制される。従って、可動体3が第2方向Xおよび第3方向Yに移動する際、連結部材34とホルダ60とによって可動体3の第2方向および第3方向の可動範囲を規制することができる。従って、アクチュエータ1の耐衝撃性を高めることができる。 The actuator 1 of this embodiment includes a first magnetic drive circuit 6X that vibrates the movable body 3 in the second direction X, and a second magnetic drive mechanism 6Y that vibrates the movable body 3 in the third direction Y. The yoke 30 has a cross shape as viewed in the first direction Z, and a stopper mechanism is provided between the yoke 30 and the holder 60 to restrict the movable range of the movable body 3 in the second direction X and the third direction Y. ing. That is, the yoke 30 connects the first connecting member 341 that connects the first arm 310 that protrudes to one side X1 in the second direction X, and the second arm 320 that protrudes to the other side X2 in the second direction X. , And a third connecting member 343 connecting the third arm 330 projecting to one side Y1 in the third direction Y, and a fourth arm projecting to the other side Y2 in the third direction Y A fourth connecting member 344 connecting the portions 340 is provided. The four connection members 34 are disposed in the recess 650 of the holder 60, and the movable ranges of the connection member 34 in the second direction X and the third direction Y by prisms 660X and 660Y provided at the edge of the recess 650. Is regulated. Therefore, when the movable body 3 moves in the second direction X and the third direction Y, the movable member 3 in the second direction and the third direction can be restricted by the connecting member 34 and the holder 60. Therefore, the impact resistance of the actuator 1 can be enhanced.
 なお、本形態は3段構造のヨーク30に本発明を適用したものであったが、2段あるいは4段以上のヨークを備えたアクチュエータに本発明を適用することもできる。 Although the present embodiment applies the present invention to the yoke 30 having a three-stage structure, the present invention can also be applied to an actuator provided with two or four or more stages of yokes.
1…アクチュエータ、2…支持体、3…可動体、6…磁気駆動回路、6X…第1磁気駆動回路、6Y…第2磁気駆動回路、7…コイル、8…磁石、9…粘弾性部材、11…カバー、12…ボス部、12a…段面、12b…円筒部、12c…ネジ穴、13…切り欠き、14…立ち上がり部、15…配線基板、16…第1カバー部材、17…第2カバー部材、18…ネジ、30…ヨーク、31…第1ヨーク、32…第2ヨーク、33…第3ヨーク、34…連結部材、35…軸部、60…ホルダ、61…第1ホルダ、62…第2ホルダ、66…コイル保持穴、71、72、73、74…コイル、81、82、83、84…磁石、91…第1粘弾性部材、92…第2粘弾性部材、161…第1端板部、162…第1側板部、163…凹部、171…第2端板部、172…第2側板部、173…凹部、301…中央部、302…円形穴、303…凹部、304…凸部、305…凹部、310…第1腕部、320…第2腕部、330…第3腕部、340…第4腕部、341…第1連結部材、342…第2連結部材、343…第3連結部材、344…第4連結部材、351…第1軸部、352…第2軸部、609…円形穴、650…凹部、651…円形穴、660X…角柱部、660Y…角柱部、701…長辺、X…第2方向、Y…第3方向、Z…第1方向 DESCRIPTION OF SYMBOLS 1 ... Actuator, 2 ... Support body, 3 ... Movable body, 6 ... Magnetic drive circuit, 6X ... 1st magnetic drive circuit, 6Y ... 2nd magnetic drive circuit, 7 ... Coil, 8 ... Magnet, 9 ... Viscoelastic member, DESCRIPTION OF SYMBOLS 11 ... Cover, 12 ... Boss part, 12a ... Step surface, 12b ... Cylindrical part, 12c ... Screw hole, 13 ... Notch, 14 ... Rising part, 15 ... Wiring board, 16 ... 1st cover member, 17 ... 2nd Cover member, 18 screw, 30 yoke, 31 first yoke 32 32 second yoke 33 33 third yoke 34 coupling member 35 shaft portion 60 holder 61 first holder 62 ... second holder, 66 ... coil holding hole, 71, 72, 73, 74 ... coil, 81, 82, 83, 84 ... magnet, 91 ... first viscoelastic member, 92 ... second viscoelastic member, 161 ... first 1 end plate portion, 162 ... first side plate portion, 163 ... concave portion, 171 ... first End plate portion 172: second side plate portion 173: concave portion 301: central portion 302: circular hole 303: concave portion 304: convex portion 305: concave portion 310: first arm portion 320: second arm Part 330 330 third arm 340 fourth arm 341 first connecting member 342 second connecting member 343 third connecting member 344 fourth connecting member 351 first shaft , 352: second shaft portion, 609: circular hole, 650: recess, 651: circular hole, 660X: prismatic portion, 660Y: prismatic portion, 701: long side, X: second direction, Y: third direction, Z ... first direction

Claims (8)

  1.  支持体と、
     前記支持体に移動可能に支持された可動体と、
     前記可動体を前記支持体に対して相対移動させる磁気駆動回路と、を有し、
     前記磁気駆動回路は、前記支持体および前記可動体のうちの一方側部材に設けられたコイルと、前記支持体および前記可動体のうちの他方側部材に設けられて前記コイルに第1方向で対向する磁石と、を備え、前記可動体を前記第1方向に対して交差する第2方向に駆動し、
     前記他方側部材は、前記第1方向で対向する第1ヨークおよび第2ヨークを含む複数のヨークと、前記複数のヨークを前記第1方向に位置決めして連結する連結部材と、を備えることを特徴とするアクチュエータ。
    A support,
    A movable body movably supported by the support;
    And a magnetic drive circuit for moving the movable body relative to the support.
    The magnetic drive circuit is provided on a coil provided on one side member of the support and the movable body, and on the other side member of the support and the movable body in the first direction. An opposing magnet, and driving the movable body in a second direction intersecting the first direction,
    The other side member includes: a plurality of yokes including a first yoke and a second yoke opposed in the first direction; and a connecting member for positioning and connecting the plurality of yokes in the first direction. Characterized actuator.
  2.  前記複数のヨークは、前記第2ヨークに対して前記第1ヨークと反対側で前記第1方向に対向する第3ヨークを備え、
     前記コイルは、前記第1ヨークと前記第2ヨークの間、および、前記第2ヨークと前記第3ヨークの間に配置され、
     前記磁石は、前記第1ヨーク、前記第2ヨーク、前記第3ヨークの前記コイルと対向する面に固定され、
     前記連結部材は、前記第1ヨーク、前記第2ヨーク、および前記第3ヨークを前記第1方向に位置決めして連結することを特徴とする請求項1に記載のアクチュエータ。
    The plurality of yokes include a third yoke that faces in the first direction on the side opposite to the first yoke with respect to the second yoke,
    The coil is disposed between the first yoke and the second yoke, and between the second yoke and the third yoke.
    The magnet is fixed to a surface of the first yoke, the second yoke, and the third yoke facing the coil.
    The actuator according to claim 1, wherein the connection member positions and connects the first yoke, the second yoke, and the third yoke in the first direction.
  3.  前記複数のヨークは、前記第1方向と直交する方向に見て前記連結部材と重なっていることを特徴とする請求項1または2に記載のアクチュエータ。 The actuator according to claim 1, wherein the plurality of yokes overlap the connecting member when viewed in a direction orthogonal to the first direction.
  4.  前記複数のヨークは、前記連結部材と連結される端部を備え、
     前記連結部材と前記端部の一方に凸部が形成され、他方には前記凸部と嵌合する凹部が形成されていることを特徴とする請求項3に記載のアクチュエータ。
    The plurality of yokes include an end coupled to the connection member,
    The actuator according to claim 3, wherein a convex portion is formed on one of the connecting member and the end portion, and a concave portion that fits with the convex portion is formed on the other.
  5.  前記複数のヨークの端部は、溶接により前記連結部材により固定されることを特徴とする請求項1から4の何れか一項に記載のアクチュエータ。 The actuator according to any one of claims 1 to 4, wherein ends of the plurality of yokes are fixed by the connection member by welding.
  6.  前記複数のヨークは、それぞれ、複数の方向に突出する複数の腕部を備え、
     前記連結部材は、前記第1方向から見て重なる前記腕部の先端を連結することを特徴とする請求項1から5の何れか一項に記載のアクチュエータ。
    Each of the plurality of yokes includes a plurality of arms projecting in a plurality of directions,
    The actuator according to any one of claims 1 to 5, wherein the connecting member connects the tips of the arm portions overlapping each other when viewed from the first direction.
  7.  前記磁気駆動回路は、前記可動体を前記第2方向および前記第2方向に対して交差する第3方向に駆動し、
     前記複数の腕部は、前記第2方向の一方側に突出する第1腕部と、前記第2方向の他方側に突出する第2腕部と、前記第3方向の一方側に突出する第3腕部と、前記第3方向の他方側に突出する第4腕部を備え、
     前記連結部材は、前記第1腕部を連結する第1連結部材と、前記第2腕部を連結する第2連結部材と、前記第3腕部を連結する第3連結部材と、前記第4腕部を連結する第4連結部材を備え、
     前記一方側部材は、前記コイルを保持するホルダを備え、
     前記ホルダは、前記第1連結部材および前記第2連結部材の前記第3方向の可動範囲を規制するとともに、前記第3連結部材および前記第4連結部材の前記第2方向の可動範囲を規制することを特徴とする請求項6に記載のアクチュエータ。
    The magnetic drive circuit drives the movable body in a second direction and a third direction intersecting the second direction.
    The plurality of arms are a first arm projecting to one side in the second direction, a second arm projecting to the other side in the second direction, and a second projecting to the one side in the third direction. 3 arms and a fourth arm projecting to the other side in the third direction,
    The connecting member includes a first connecting member connecting the first arm, a second connecting member connecting the second arm, a third connecting member connecting the third arm, and the fourth connecting member. A fourth connecting member for connecting the arms;
    The one side member comprises a holder for holding the coil,
    The holder restricts the movable range of the first connecting member and the second connecting member in the third direction, and restricts the movable range of the third connecting member and the fourth connecting member in the second direction. The actuator according to claim 6, characterized in that:
  8.  前記一方側部材は前記支持体であり、
     前記他方側部材は前記可動体であることを特徴とする請求項1から7の何れか一項に記載のアクチュエータ。
    The one side member is the support,
    The actuator according to any one of claims 1 to 7, wherein the other side member is the movable body.
PCT/JP2018/022170 2017-06-30 2018-06-11 Actuator WO2019003874A1 (en)

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WO2020066688A1 (en) * 2018-09-27 2020-04-02 日本電産サンキョー株式会社 Actuator and panel speaker
US11693900B2 (en) 2017-08-22 2023-07-04 Subply Solutions Ltd. Method and system for providing resegmented audio content

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JP7270442B2 (en) * 2019-03-29 2023-05-10 ニデックインスツルメンツ株式会社 actuator
JP7250609B2 (en) * 2019-05-08 2023-04-03 日本電産サンキョー株式会社 Vibration Actuator, Vibration Actuator Unit and Haptic Device

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JPS5475510A (en) * 1977-11-30 1979-06-16 Brother Ind Ltd Rotary actuator
JP2000166211A (en) * 1998-11-20 2000-06-16 Yaskawa Electric Corp Voice coil type linear motor
JP2004096952A (en) * 2002-09-03 2004-03-25 Yaskawa Electric Corp Compound voice coil type linear motor
JP2016127789A (en) * 2014-12-26 2016-07-11 日本電産サンキョー株式会社 Actuator

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JPS5475510A (en) * 1977-11-30 1979-06-16 Brother Ind Ltd Rotary actuator
JP2000166211A (en) * 1998-11-20 2000-06-16 Yaskawa Electric Corp Voice coil type linear motor
JP2004096952A (en) * 2002-09-03 2004-03-25 Yaskawa Electric Corp Compound voice coil type linear motor
JP2016127789A (en) * 2014-12-26 2016-07-11 日本電産サンキョー株式会社 Actuator

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US11693900B2 (en) 2017-08-22 2023-07-04 Subply Solutions Ltd. Method and system for providing resegmented audio content
WO2020066688A1 (en) * 2018-09-27 2020-04-02 日本電産サンキョー株式会社 Actuator and panel speaker

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