JP7235488B2 - Actuator and Actuator Manufacturing Method - Google Patents

Description

The present invention relates to an actuator for vibrating a movable body and a method for manufacturing the actuator.

As a device that notifies information by vibration, an actuator has been proposed that has a support, a movable body, a connector connected to the support and the movable body, and a magnetic drive circuit that moves the movable body relative to the support. The magnetic drive circuit drives the movable body in a second direction intersecting with the first direction, for example, by a coil and a magnet facing each other in the first direction (see Patent Document 1). In the actuator disclosed in Patent Literature 1, in the support, the first case member, the holder, and the second case member are stacked in the first direction.

JP 2017-135948 A

In the actuator disclosed in Patent Document 1, when the corners of the first case member, the holder, and the second case member are overlapped, the first case member and the holder are adhered at the corners, and the holder and the second case member are bonded together. are preferably glued together at the corners. However, when an adhesive is used, it takes a long time to apply the adhesive to a predetermined area, which poses a problem of reduced productivity.

In view of the above problems, it is an object of the present invention to provide an actuator capable of efficiently providing an adhesive between the first case member and the holder, and a method of manufacturing the actuator.

In order to solve the above problems, an actuator according to the present invention provides a support, a movable body, a connection body having at least one of elasticity and viscoelasticity and connected to the movable body and the support, and the support. a magnetic drive circuit for moving the movable body relative to the body, the support including a holder for holding one of a coil and a magnet of the magnetic drive circuit; a first corner portion of the first case member and a second corner portion of the holder are overlapped in the first direction via a first adhesive to form a first support portion; The second corner is provided with a through hole that penetrates the second corner in the first direction and opens in the region where the first adhesive is provided , The first supporting portion includes a first non-contact area in which the first corner and the second corner are spaced apart in the first direction, and the first corner at a position adjacent to the first non-contact area. and a first contact region in which the portion and the second corner contact in the first direction, the first contact region is provided to surround the first non-contact region, and the The first non-contact area is provided with the first adhesive .

In the actuator manufacturing method according to the present invention, in the step of stacking the first case member and the holder with the first adhesive interposed therebetween, the holder is stacked on the first case member and the through hole characterized in that the first adhesive is dripped from the

In the present invention, since the through hole is formed in the second corner of the holder, in the step of stacking the first case member and the holder via the first adhesive, the holder is stacked on the first case member. When the first adhesive is dripped from the through hole in this state, the first adhesive flows through the through hole and flows between the first case member and the holder. Therefore, the first adhesive can be applied between the first case member and the holder more efficiently than when the first case member and the holder are overlapped after the first adhesive is applied to the first case member or the holder. can. Further, according to this aspect, in the first support portion where the first corner portion of the first case member and the second corner portion of the holder overlap in the first direction, the first corner portion and the second corner portion are arranged in the first direction. Since the first non-contact area spaced apart in one direction and the first contact area in which the first corner and the second corner are in contact in the first direction are provided, the first corner and the second corner are contact area is limited. Therefore, by increasing the surface accuracy of the first contact area, the first corner and the second corner can be brought into contact with each other in a stable state. Therefore, even if vibration or the like when the movable body is driven is transmitted to the first supporting portion, chattering noise is less likely to occur from the first supporting portion.

In the present invention, the through hole adopts a mode in which the opening size on one side of the second corner in the first direction is larger than the opening size on the other side of the second corner in the first direction. be able to. According to this aspect, when the first adhesive is dripped into the through hole from the other side in the first direction, the first adhesive smoothly flows out from the through hole between the first case member and the holder.

In the present invention, the through hole includes a first hole that opens on one side of the second corner in the first direction and a second corner that communicates with the first hole on the other side of the first direction. and a second hole that opens on the other side in the first direction of the part, and at least a part of the inner peripheral surface of the first hole in the circumferential direction extends from the other side in the first direction to the first direction. It is possible to adopt an aspect in which the inner diameter is inclined toward one side of the . According to this aspect, it is convenient to increase the opening size of the through hole on one side in the first direction while increasing the opening size of the through hole on the other side in the first direction.

In the present invention, the inner peripheral surface of the through hole is a flat portion that partially extends in the circumferential direction from the opening edge on the other side in the first direction to the opening edge on the one side in the first direction. Aspects can be employed. According to this aspect, the first adhesive dripped into the through-hole from the other side in the first direction can flow along the flat portion between the first corner and the second corner.

In the present invention, it is possible to employ a mode in which the length of the opening edge on one side in the first direction of the flat portion is longer than the length of the opening edge on the other side in the first direction of the flat portion. . According to this aspect, the first adhesive dripped into the through-hole from the other side in the first direction can smoothly flow out between the first corner and the second corner along the flat portion.

In the present invention, the support includes a second case member overlapping the holder on the other side in the first direction, and the second corner and the third corner of the second case member The second support portion includes a second non-contact region in which the second corner and the third corner are spaced apart in the first direction, and the a second contact area in which the second corner and the third corner are in contact with each other in the first direction at a position adjacent to the second non-contact area; An aspect in which an agent is provided can be adopted. According to this aspect, in the second supporting portion where the third corner of the second case member and the second corner of the holder overlap in the first direction, the second corner and the third corner overlap in the first direction. and a second contact area where the second corner and the third corner are in contact with each other in the first direction. area is limited. Therefore, by increasing the surface accuracy of the second contact area, the second corner and the third corner can be brought into contact with each other in a stable state. Therefore, even if vibration or the like when the movable body is driven is transmitted to the second support, chattering noise is less likely to occur from the second support.

In the present invention, the coil and the magnet face each other in the first direction, and the magnetic drive circuit relatively moves the movable body with respect to the support body in a second direction crossing the first direction. It is possible to adopt a mode that allows

In the present invention, since the through hole is formed in the second corner of the holder, in the step of stacking the first case member and the holder via the first adhesive, the holder is stacked on the first case member. When the first adhesive is dripped from the through hole in this state, the first adhesive flows through the through hole and flows between the first case member and the holder. Therefore, the first adhesive can be applied between the first case member and the holder more efficiently than when the first case member and the holder are overlapped after the first adhesive is applied to the first case member or the holder. can.

1 is a perspective view of an actuator according to an embodiment of the invention; FIG. FIG. 2 is an XZ sectional view of the actuator shown in FIG. 1; FIG. 2 is an exploded perspective view of the actuator shown in FIG. 1 when viewed from one side in a first direction; FIG. 2 is an exploded perspective view of the actuator shown in FIG. 1 when it is disassembled and viewed from the other side in the first direction; FIG. 3 is an exploded perspective view of the magnetic drive circuit shown in FIG. 2; Explanatory drawing of a holder, a coil, etc. which are shown in FIG. FIG. 7 is an explanatory diagram of the holder and the like shown in FIG. 6; Explanatory drawing of the movable body shown in FIG. The perspective view which looked at the 1st corner shown in FIG. 3, and the 2nd corner from the other side of the 1st direction. The perspective view which looked at the 2nd corner part and the 3rd corner part which are shown in FIG. 4 from the one side of the 1st direction. FIG. 10 is an XZ cross-sectional view when the support is cut at a position passing through the first corner shown in FIG. 9; FIG. 10 is a YZ cross-sectional view when the support is cut at a position passing through the first corner shown in FIG. 9; FIG. 10 is an XZ cross-sectional view when the support is cut between the first corners shown in FIG. 9; FIG. 10 is a YZ cross-sectional view when the support is cut between the first corners shown in FIG. 9; FIG. 11 is a YZ cross-sectional view when the support is cut at a position passing through the through holes shown in FIGS. 9 and 10; FIG. 11 is an XZ cross-sectional view when the support is cut at a position passing through the through holes shown in FIGS. 9 and 10; FIG. 6 is a cross-sectional view showing a gap between the wiring substrate shown in FIG. 5 and the like and the third wall portion of the holder;

An embodiment of the present invention will be described with reference to the drawings. In the following description, the three directions that intersect each other will be described as a first direction Z, a second direction X and a third direction Y, respectively. Also, the first direction Z, the second direction X and the third direction Y are directions orthogonal to each other. Also, one side in the second direction X is denoted by X1, the other side in the second direction X is denoted by X2, one side in the third direction Y is denoted by Y1, and the other side in the third direction Y is denoted by Y2. , one side in the first direction Z is denoted by Z1, and the other side in the first direction Z is denoted by Z2.

In the magnetic drive circuit 6 of the actuator 1 described below, the coil 7 is provided on the support 2 (one side member) side, and the magnet 8 is provided on the movable body 3 (other side member) side. , and the magnet 8 are provided on the side of the support 2 (the other side member), and the coil 7 is provided on the side of the movable body 3 (the one side member). In the following description, a mode in which the coil 7 is provided on the support body 2 side and the magnet 8 is provided on the movable body 3 side will be mainly described.

(overall structure)
FIG. 1 is a perspective view of an actuator 1 according to an embodiment of the invention. FIG. 2 is an XZ sectional view of the actuator 1 shown in FIG. 3 is an exploded perspective view when the actuator 1 shown in FIG. 1 is exploded and viewed from one side Z1 in the first direction Z. FIG. 4 is an exploded perspective view when the actuator 1 shown in FIG. 1 is exploded and viewed from the other side Z2 in the first direction Z. FIG.

As shown in FIGS. 1 and 2, the actuator 1 of this embodiment has a rectangular parallelepiped shape whose dimension in the second direction X is larger than the dimension in the third direction Y as a whole. 2, the actuator 1 includes a support 2, a movable body 3 movably supported by the support 2, and a magnetic drive circuit 6 for relatively moving the movable body 3 with respect to the support 2. The magnetic drive circuit 6 vibrates the movable body 3 in the second direction X.

As shown in FIGS. 1, 2 and 3, the support 2 includes a holder 60, a first case member 16 overlapping the holder 60 on one side Z1 in the first direction Z, and a holder 60 in the first direction Z. The second case member 17 overlaps on the other side Z2, and the movable body 3 and the magnetic drive circuit 6 are arranged between the first case member 16 and the second case member 17. As shown in FIG. The first case member 16, the holder 60 and the second case member 17 each have a quadrangular planar shape. A first corner 160 near the corner of the first case member 16, a second corner 600 near the corner of the holder 60, and a third corner 170 near the corner of the second case member 17 are arranged in the first direction Z. overlaps with In this embodiment, the first case member 16, the holder 60, and the second case member 17 are each made of resin. In addition, the vicinity of the corner means including the corner and the area adjacent to the corner.

As shown in FIGS. 3 and 4, the first case member 16 includes a first wall portion 161 located on one side X1 in the second direction X and a second wall portion located on the other side X2 in the second direction X. 162, a third wall portion 163 located on one side Y1 in the third direction Y, and a fourth wall portion 164 located on the other side Y2 in the third direction Y. . When viewed from the first direction Z, the width of the first wall portion 161 and the second wall portion 162 (dimension in the second direction X) is the width of the third wall portion 163 and the fourth wall portion 164 (dimension in the third direction Y). dimensions) wider.

Positioning holes 16c that open toward the other side Z2 in the first direction Z are formed near the four corners of the first case member 16, respectively. A bottomed hole 16e for fixing a screw 18 is formed at one diagonal position of the first case member 16, and a through hole 16f is formed at the other diagonal position.

Two concave portions 166 and 167 aligned in the second direction X are formed on the surface of the bottom plate portion 165 on the other side Z2 in the first direction Z. As shown in FIG. Through holes 16a are formed at the corners of the concave portion 166 on one side X1 in the second direction X and the corners of the concave portion 167 on the other side X2 in the second direction X. As shown in FIG. Through holes 16b are formed at both ends of the concave portions 166 and 167 in the third direction Y. As shown in FIG.

On the outer surface of the third wall portion 163, a recessed portion 168 recessed on the other side Y2 in the third direction Y extends along the second direction X. As shown in FIG. In the third wall portion 163, a plurality of projecting plate portions 163a projecting to the other side Z2 in the first direction Z are formed along the second direction X at predetermined intervals. The first wall portion 161 and the second wall portion 162 are formed with cylindrical protrusions 161h and 162h that protrude to the other side Z2 in the first direction Z. As shown in FIG. Further, projecting plate portions 161a and 162a projecting from the outer edge portion to the other side Z2 in the first direction Z are formed in the center in the third direction Y on the first wall portion 161 and the second wall portion 162, respectively.

The second case member 17 includes a first wall portion 171 positioned on one side X1 in the second direction X, a second wall portion 172 positioned on the other side X2 in the second direction X, and one side in the third direction Y. It has a bottom plate portion 175 surrounded by a third wall portion 173 positioned on Y1 and a fourth wall portion 174 positioned on the other side Y2 in the third direction Y. As shown in FIG. When viewed from the first direction Z, the first wall portion 171 and the second wall portion 17
2 (dimension in the second direction X) is wider than the width (dimension in the third direction Y) of the third wall portion 173 and the fourth wall portion 174 .

Positioning recesses 17d that open toward one side Z1 in the first direction Z are formed near the four corners of the second case member 16, respectively. A through hole 17e for fixing the screw 18 is formed at one diagonal position of the second case member 17, and a through hole 17f is formed at the other diagonal position.

Two concave portions 176 and 177 aligned in the second direction X are formed on the surface of the bottom plate portion 175 on one side Z1 in the first direction Z. As shown in FIG. In addition, notches 17b are formed at the edges of the recesses 176 and 177. As shown in FIG.

On the outer surface of the third wall portion 173, a recessed portion 178 recessed on the other side Y2 in the third direction Y extends along the second direction X. As shown in FIG. The first wall portion 171 and the second wall portion 172 are formed with holes 171h and 172h into which the convex portions 161h and 162h of the first case member 16 are fitted. A protruding plate portion 171a that protrudes to one side Z1 in the first direction Z is formed in the center in the third direction Y on the first wall portion 171 .

(Configuration of magnetic drive circuit 6)
FIG. 5 is an exploded perspective view of the magnetic drive circuit 6 shown in FIG. As shown in FIGS. 2 and 5, the magnetic drive circuit 6 has a coil 7 and a magnet 8 facing the coil 7 in the first direction Z. As shown in FIGS. The coil 7 is composed of a first coil 71 and a second coil 72 arranged in parallel in the second direction X, and the coil 7 is held by the holder 60 of the support 2 .

(Configuration of Coil 7 and Holder 60)
FIG. 6 is an explanatory diagram of the holder 60, the coil 7 and the like shown in FIG. FIG. 7 is an explanatory diagram of the holder 60 and the like shown in FIG. As shown in FIGS. 6 and 7, the coil 7 is an oval air-core coil with a long side 701 (effective portion) extending in the third direction Y, and the coil The end 705 of the line has been brought out.

The holder 60 has a first wall portion 61 located on one side X1 in the second direction X, a second wall portion 62 located on the other side X2 in the second direction X, and one side Y1 in the third direction Y. and a fourth wall portion 64 located on the other side Y2 in the third direction Y. When viewed from the first direction Z, the width of the first wall portion 61 and the second wall portion 62 (dimension in the second direction X) is the width of the third wall portion 63 and the fourth wall portion 64 (dimension in the third direction Y). dimensions) wider.

A through hole 60e for passing the screw 18 is formed at one diagonal position of the holder 60, and a through hole 60f is formed at the other diagonal position. At both ends of the third wall portion 63 and the fourth wall portion 64 in the second direction X, a positioning protrusion 60c protruding in one side Z1 in the first direction Z and a protrusion 60c protruding in the other side Z2 in the first direction Z are provided. A positioning protrusion 60d is formed.

Two coil holding holes 651 and 652 are formed in the bottom plate portion 65 so as to be parallel in the second direction X, and the first coil 71 and the second coil 72 are arranged in each of the coil holding holes 651 and 652. ing. The coil holding holes 651 and 652 are through holes, and at both end portions in the third direction Y, there are receiving portions 641 projecting so as to partially overlap the coil holding holes 651 and 652 on the other side Z2 in the first direction Z, 642 are formed. Therefore, when the first coil 71 and the second coil 72 are mounted in the coil holding holes 651 and 652 from one side Z1 in the first direction Z, the short side 702 (ineffective portion) of the coil 7 is held by the receiving portions 641 and 642 in the first direction. It is in a state of being supported on the other side Z1 in the Z direction. In this state, the plate 26 is superimposed on the holder 60 from one side Z1 in the first direction Z, and the plate 26 is attached to the first coil 71 and the second coil 7 by adhesive.
2 and fixed to the holder 60 . The plate 26 is, for example, a non-magnetic metal plate such as aluminum or stainless steel.

The holder 60 has a first opening 601 formed between the coil holding hole 651 and the first wall 61 , and a second opening 602 formed between the coil holding hole 652 and the second wall 62 . ing. The first opening 601 and the second opening 602 pass through the bottom plate portion 65 of the holder 60 in the first direction Z. As shown in FIG. Notches 603 are formed in the inner peripheral surfaces of the first opening 601 and the second opening 602 .

In the first wall portion 61, a recess 611 (see FIGS. 2 and 4) is formed on one side Z1 in the first direction Z between the second corners 600, and a recess on the other side Z2 in the first direction Z. 612 are formed. In the second wall portion 62, a concave portion 621 (see FIGS. 2 and 4) is formed on one side Z1 in the first direction Z between the second corner portions 600, and a concave portion 621 is formed on the other side Z2 in the first direction Z. 622 are formed. Therefore, the four second corners 600 have a structure that protrudes toward both sides in the first direction Z. As shown in FIG.

On the outer surface of the third wall portion 63, a recess 630 recessed on the other side Y2 in the third direction Y extends along the second direction X. A plurality of notch-shaped lead portions 68 opening in Z1 are formed along the second direction X. As shown in FIG. A portion of the recessed portion 630 sandwiched by the drawer portion 68 is a recessed portion 630a that is recessed from the bottom portion of the recessed portion 630 toward the other side in the third direction Y. As shown in FIG.

At the bottom of the recess 630, a plurality of engaging protrusions 69 are formed along the second direction X and protrude toward one side Y1 in the third direction Y at positions shifted in the second direction X with respect to the recess 630a. there is In this embodiment, the engaging protrusions 69 are formed at three locations.

(Treatment of ends of coil 7)
In this embodiment, the wiring board 15 is fixed to the outer surface of the third wall portion 63 of the holder 60 . A notch 158 is formed in the wiring substrate 15 in a portion overlapping with the lead portion 68 . A plurality of engaging holes 159 are formed in the wiring board 15 at portions overlapping the engaging protrusions 69 . In this embodiment, three engaging holes 159 are formed as a plurality of engaging holes 159 corresponding to the number of engaging projections 69. Among the three engaging holes 159, the central engaging hole 159 is formed in a notch shape connected to the notch 158 .

The wiring board 15 is fixed to the outer surface of the third wall portion 63 of the holder 60 with an adhesive in a state where the engaging protrusions 69 and the engaging holes 159 are engaged. On the wiring board 15, a land 151 to which the end portion 705 of the first coil 71 and the end portion 705 of the second coil 72 are electrically connected, and a wiring member (not shown) from the outside are electrically connected. An end portion of the first coil 71 and an end portion 705 of the second coil 72 are drawn to the land 151 through the lead portion 68, and then electrically connected to the land 151 by soldering. connected The land 151 and the land 152 are connected via a wiring pattern (not shown).

In this embodiment, three lands 151 are formed, and the winding end portion 705 of the first coil 71 and the winding start portion 705 of the second coil 72 are electrically connected to the central land 151 . be. Therefore, the first coil 71 and the second coil 72 are electrically connected in series. Note that the first coil 71 and the second coil 72 may be electrically connected in parallel.

(Structure of support 2)
In this embodiment, the through hole 17e of the second case member 17, the through hole 60e of the holder 60, and the first case member 17, the holder 60, and the first case member 17 are stacked in the first direction Z. A screw 18, which is a tapping screw, is screwed into the hole 16e of the member 16, and the first case member 16, the holder 60 and the second case member 17 are fastened together in the first direction Z. As shown in FIG. When the screw 18 is fastened, the head of the screw 18 does not protrude from the second case member 17 to the other side Z2 in the first direction Z.

Further, as will be described later, a first adhesive is provided between the first corner portion 160 of the first case member 16 and the second corner portion 600 of the holder 60, and the second corner portion 600 and the second corner portion 600 of the holder 60 are bonded together. A second adhesive is provided between the case member 17 and the third corner portion 170 .

Thus, the support 2 is formed by the first case member 16, the holder 60, and the second case member 17. As shown in FIG. At this time, the protrusions 161h and 162h of the first case member 16 pass through the holes 61h and 62h of the holder 60 and fit into the holes 171h and 172h of the second case member 17, respectively. The projection 60c of the holder 60 fits into the hole 16c of the first case member 16, and the projection 60d of the holder 60 fits into the recess 17d of the second case member 17. As shown in FIG. Therefore, the first case member 16, the holder 60 and the second case member 17 are connected while being positioned with each other. Also, the convex plate portion 163 a of the first case member 16 overlaps the concave portion 630 a of the holder 60 .

The through hole 17f of the second case member 17, the through hole 60f of the holder 60, and the through hole 17f of the second case member 17 are screws ( not shown) is stopped.

(Configuration of movable body 3)
FIG. 8 is an explanatory diagram of the movable body 3 shown in FIG. As shown in FIGS. 5 and 8, the movable body 3 shown in FIG. 2 and the like includes a first yoke 86 having a flat plate portion 860 facing the coil 7 on one side Z1 in the first direction Z, the coil 7 and a magnet 8 and a second yoke 87 having a flat plate portion 870 facing the other side Z2 in the first direction Z. The magnet 8 is held by at least one of the surface of the flat plate portion 860 of the first yoke 86 that faces the coil 7 and the surface of the flat plate portion 870 of the second yoke 87 that faces the coil 7 and is directed toward the coil 7 in the first direction Z. are facing each other.

In this embodiment, the movable body 3 includes, as the magnets 8, a first magnet 81 fixed to the surface of the flat plate portion 860 of the first yoke 86 facing the coil 7 by a method such as adhesion, and a flat plate portion of the second yoke 87. A first magnet 81 and a second magnet 82 adjacent to each other in a direction intersecting the first direction Z are provided on the surface of 870 facing the coil 7 . In this embodiment, the first magnet 81 and the second magnet 82 are adjacent to each other in the second direction X. As shown in FIG. Therefore, the first magnet 81 faces the long side 701 of the first coil 71 on one side Z1 in the first direction Z, and the second magnet 82 faces the long side 701 of the second coil 72 on one side in the first direction Z. They are opposed on the side Z1.

In addition, the movable body 3 includes, as the magnets 8, a first magnet 83 fixed to the surface of the flat plate portion 870 of the second yoke 87 facing the coil 7 by a method such as adhesion, and the flat plate portion 870 of the second yoke 87. It has a first magnet 83 and a second magnet 84 adjacent to each other in a direction intersecting the first direction Z on the surface facing the coil 7 . In this embodiment, the first magnet 83 and the second magnet 84 are adjacent to each other in the second direction X. As shown in FIG. Therefore, the first magnet 83 faces the long side 701 of the first coil 71 on the other side Z2 in the first direction Z, and the second magnet 84 faces the long side 701 of the second coil 72 on the other side in the first direction Z. They are opposed on the side Z2.

In this embodiment, the first magnets 81, 83 and the second magnets 82, 84 are each polarized in the thickness direction (first direction Z) and the width direction (X direction). The first magnet 81 and the second magnet 82 are magnetized in the same direction in the adjacent direction (second direction X), and the first magnet 83 and the second magnet 84 are magnetized in the adjacent direction (second direction X). are magnetized in the same direction. Therefore, the magnetic pole of the first magnet 81 on the second magnet 82 side and the magnetic pole of the second magnet 82 on the first magnet 81 side are different, and the magnetic pole of the first magnet 83 on the second magnet 84 side and the magnetic pole on the second magnet 84 side are different. is different from the magnetic pole on the first magnet 83 side.

In addition, the first magnet 81 and the first magnet 83 are magnetized in opposite directions in the adjacent direction (second direction X), and the second magnet 82 and the second magnet 84 are magnetized in the adjacent direction (second direction X). X) is magnetized in the opposite direction. Therefore, the first magnet 81 and the first magnet 83 have different magnetic poles on the surface facing the first coil 71 , and the second magnet 82 and the second magnet 84 have different magnetic poles on the surface facing the second coil 72 . The magnetic poles are different.

The first yoke 86 includes a first connecting plate portion 861 extending from the end portion of the flat plate portion 860 on one side X1 in the second direction to the other side Z2 in the first direction Z and connected to the second yoke 87; A second connecting plate portion 862 extends from the end of the flat plate portion 860 on the other side X2 in the second direction to the other side Z2 in the first direction Z and is connected to the second yoke 87 . The first connecting plate portion 861 and the second connecting plate portion 862 are smaller in dimension in the third direction Y than the flat plate portion 860, and cutouts 869 are formed on both sides of the first connecting plate portion 861 and the second connecting plate portion 862. ing. As shown in FIGS. 3 and 4, the first connecting plate portion 861 passes through the first opening 601 of the holder 60 on one side X1 in the second direction X with respect to the coil 7 and extends on the other side in the first direction Z. Extending toward Z2, the second connecting plate portion 862 passes through the second opening 602 of the holder 60 on the other side Z2 in the second direction X with respect to the coil 7 and extends in the other side Z2 in the first direction Z. extending towards.

In this embodiment, the first connecting plate portion 861 and the second connecting plate portion 862 are connected to the ends of the second yoke 87 by welding. More specifically, the end portion 861a of the first connecting plate portion 861 on the other side Z2 in the first direction Z overlaps with the first side surface 871 of the flat plate portion 870 of the second yoke 87 and overlaps with the first connecting plate portion 861. The first side surface 871 of the second yoke 87 is welded. Similarly, the end portion 862a of the second connecting plate portion 862 on the other side Z2 in the first direction Z overlaps the second side surface 872 of the flat plate portion 870 of the second yoke 87 to form the second connecting plate portion 862 and the second yoke. The second side 872 of 87 is welded.

One of the end portion 861a of the first connecting plate portion 861 and the first side surface 871 is formed with a convex portion that is fitted into and welded to a concave portion formed on the other side. One of the 862a and the second side surface 872 is formed with a convex portion that fits and is welded to a concave portion formed on the other side. In this embodiment, the convex portion 873 formed on the flat plate portion 870 is fitted into and welded to the concave portion 863 formed in the end portion 861a of the first connecting plate portion 861, and the convex portion 874 formed on the flat plate portion 870 is the second connecting plate portion 861. It is fitted into a recess 864 formed in the end portion 862a of the connecting plate portion 862 and welded.

In this embodiment, the ends of the flat plate portion 860 of the first yoke 86 and the flat plate portion 870 of the second yoke 87 in the third direction Y are provided at the ends of the first yoke 86 and the second yoke 87 when the magnets 8 are mounted. Notches 860a and 870a are formed for positioning.

In the movable body 3 configured as described above, at least one of the first yoke 86 and the magnet 8 is provided with a mark indicating the magnetization direction of the magnet 8 . For example, of the four corners of the flat plate portion 860, the first yoke 86 has a notched mark 86s on the corner where the S pole is located, and the other corners are angular. At least one of the second yoke 87 and the magnet 8 also has a mark indicating the magnetization direction of the magnet 8 . For example, of the four corners of the flat plate portion 870, the second yoke 87 has a notched mark 87s on the corner where the N pole is located, and the other corners are angular. In addition, when a mark is attached to the magnet 8, printing or the like may be used.

(Structure of positioning protrusions 865 and 875)
A portion of the first yoke 86 protrudes from one surface to which the magnet 8 is fixed to position the first magnet 81 and the second magnet 82 in the in-plane direction of the flat plate portion 860 of the first yoke 86 . It has a positioning projection 865 for performing In this embodiment, the positioning protrusion 865 includes a first protrusion 865a that defines the position of the first magnet 81 on the second magnet 82 side, and a second protrusion 865a that defines the position of the second magnet 82 on the first magnet 81 side. and a portion 865b. In this embodiment, the first convex portion 865 a and the second convex portion 865 b are formed by a common convex portion 865 c provided between the first magnet 81 and the second magnet 82 . The convex portions 865c (the first convex portion 865a and the second convex portion 865b) are provided at two locations spaced apart in the third direction Y. As shown in FIG.

The positioning protrusion 865 further positions the first magnet 81 and the second magnet 82 in a third direction Y intersecting the second direction X in which the first magnet 81 and the second magnet 82 are adjacent to each other. It includes three protrusions 865d and 865e. In this embodiment, the third protrusions 865d are provided at two locations on both sides of the first magnet 81 in the Y direction, and the third protrusions 865e are provided at two locations on both sides of the second magnet 82 in the Y direction.

The positioning convex portion 865 is a convex portion formed by protruding a part of the flat plate portion 860 of the first yoke 86 from the other surface side opposite to the magnet 8 toward the one surface side where the magnet 8 is located. Therefore, as shown in FIG. 4, on the other surface of the flat plate portion 860 of the first yoke 86 opposite to the magnet 8, there remains a recessed mark 865x when the positioning convex portion 865 was formed.

Here, in the first yoke 86 , positioning protrusions 865 are provided on the side of the first magnet 81 opposite to the second magnet 82 and on the side of the second magnet 82 opposite to the first magnet 81 . do not have. In addition, the projection dimension of the positioning protrusion 865 from the flat plate portion 860 is smaller than the thickness of the magnet 8 (the thickness of the first magnet 81 and the thickness of the second magnet 82). Therefore, when the magnets 8 are mounted on the flat plate portion 860 of the first yoke 86 , the lowest magnet 8 among the plurality of magnets 8 stacked inside the cartridge or the like is slid to move the first magnet 81 . When arranging as such, the positioning protrusion 865 does not interfere with the cartridge because the positioning protrusion 865 does not easily interfere with the cartridge.

Although illustration is omitted, the second yoke 87 also has a portion of the second yoke 87 that protrudes from the one surface to which the magnet 8 is fixed, as in the case of the first yoke 86 . It has a positioning projection for positioning the flat plate portion 870 of the 2 yoke 87 in the in-plane direction. Therefore, as shown in FIG. 8, on the other surface of the flat plate portion 870 of the second yoke 87 opposite to the magnet 8, there remains a recessed mark 875x when the positioning convex portion 875 was formed.

The positioning protrusion 865 may be a protrusion obtained by bending a part of the first yoke 86 and the second yoke 87 .

(Structure of stopper)
As shown in FIG. 2 , in this embodiment, the first case member 16 has a first connecting plate portion 861 of the first yoke 86 used for the movable body 3 on one side X1 in the second direction X with respect to the first connecting plate portion 861 . The inner surfaces of the wall portion 161, the first wall portion 61 of the holder 60, and the first wall portion 171 of the second case member 17 face each other while forming a continuous plane. Therefore, the first connecting plate portion 861 serves as a first stopper that restricts the movable range of the movable body 3 to the one side X1 in the second direction X when the movable body 3 moves to the one side X1 in the second direction X. Configure.

Similarly, the second wall portion 162 of the first case member 16, the second wall portion 62 of the holder 60, and the second case member 17 are located on the other side X2 in the second direction X with respect to the second connecting plate portion 862. The inner surfaces of the second wall portion 172 of the are opposed to each other while forming a continuous plane. Therefore, the second connecting plate portion 862 serves as a second stopper that restricts the movable range of the movable body 3 to the other side X2 in the second direction X when the movable body 3 moves to the other side X2 in the second direction X. Configure.

(basic action)
In the actuator 1 of this embodiment, when an alternating current is applied to the coil 7, the movable body 3 vibrates in the second direction X, so the center of gravity of the actuator 1 changes in the second direction X. As shown in FIG. Therefore, the user can feel the vibration in the second direction X. At this time, the AC waveform applied to the coil 7 is adjusted to adjust the acceleration at which the movable body 3 moves to one side X1 in the second direction X and the acceleration at which the movable body 3 moves to the other side X2 in the second direction. If they are made different, the user can feel vibration having directionality in the second direction X. FIG.

(Configuration of connecting body 90 and viscoelastic member 9)
As shown in FIGS. 2, 4 and 5, a connector 90 is provided for connecting to the support 2 and the movable body 3 . The connector 90 has at least one of elasticity and viscoelasticity. In this embodiment, the connection body 90 is a viscoelastic member 9 provided at a location where the support body 2 and the movable body 3 face each other in the first direction Z. It is elastically deformable in the Y direction. Viscoelasticity is a property that combines both viscosity and elasticity, and is a property that is conspicuously observed in polymeric substances such as gel-like members, plastics, and rubbers. Therefore, various gel-like members can be used as the viscoelastic member 9 . As the viscoelastic member 9, natural rubber, diene rubber (e.g., styrene/butadiene rubber, isoprene rubber, butadiene rubber), chloroprene rubber, acrylonitrile/butadiene rubber, etc.), non-diene rubber (e.g., butyl rubber, ethylene/propylene rubber). , ethylene-propylene-diene rubber, urethane rubber, silicone rubber, fluororubber, etc.), various rubber materials such as thermoplastic elastomers, and modified materials thereof may be used.

In this embodiment, only the viscoelastic member 9 is connected to both the support 2 and the movable body 3 as the connection 90 . In this embodiment, as the viscoelastic member 9, a first viscoelastic member 91 is arranged at a location where the first yoke 86 of the movable body 3 and the first case member 16 of the support body 2 face each other in the first direction Z, A second viscoelastic member 92 is arranged at a location where the second yoke 87 of the movable body 3 and the second case member 17 of the support body 2 face each other in the first direction Z. As shown in FIG. More specifically, the first viscoelastic member 91 is provided between the flat plate portion 860 of the first yoke 86 and the bottoms of the recesses 166 and 167 of the first case member 16 , and the second viscoelastic member 92 are provided between the flat plate portion 870 of the second yoke 87 and the bottoms of the recesses 176 and 177 of the second case member 17 respectively.

Here, the first viscoelastic member 91 is arranged in a state of being compressed in the first direction Z between the flat plate portion 860 of the first yoke 86 and the bottoms of the concave portions 166 and 167 of the first case member 16. The second viscoelastic member 92 is arranged in a compressed state in the first direction Z between the flat plate portion 870 of the second yoke 87 and the bottoms of the recesses 176 and 177 of the second case member 17 . The first viscoelastic member 91 is adhered to the surface in contact with the support 2 (bottoms of the recesses 166 and 167 of the first case member 16), and is adhered to the surface in contact with the movable body 3 (first yoke 86). The second viscoelastic member 92 is adhered to the surface in contact with the support 2 (bottoms of the recesses 176 and 177 of the second case member 17) and the surface in contact with the movable body 3 (second yoke 87).

In this embodiment, the viscoelastic members 9 (the first viscoelastic member 91 and the second viscoelastic member 92) are silicone gel with a penetration of 10 degrees to 110 degrees. Penetration is defined in JIS-K-2207 and JIS-K-2220, and the smaller the value, the harder the material. The viscoelastic member 9 has linear or non-linear stretching characteristics depending on its direction of stretching. For example, when the viscoelastic member 9 is compressed and deformed by being pressed in its thickness direction (axial direction), it has an expansion/contraction characteristic in which a nonlinear component (spring coefficient) is greater than a linear component (spring coefficient). On the other hand, when stretched by being pulled in the thickness direction (axial direction), it has a stretch characteristic in which the linear component (spring coefficient) is greater than the nonlinear component (spring coefficient). On the other hand, when the viscoelastic member 9 deforms in the direction (shearing direction) intersecting the thickness direction (axial direction) as in the present embodiment, the deformation is in the direction of being pulled and elongated regardless of which direction the viscoelastic member 9 moves. Therefore, it has a deformation characteristic in which the linear component (spring coefficient) is larger than the nonlinear component (spring coefficient). Therefore, the viscoelastic member 9 has a constant spring force depending on the direction of motion. Therefore, by using the spring element in the shear direction of the viscoelastic member 9 as in this embodiment, the reproducibility of the vibration acceleration with respect to the input signal can be improved, so vibration with subtle nuances can be realized. be able to.

In this embodiment, of the recesses 166 and 167 of the first case member 16, a plurality of recesses may be formed in connection regions 166a and 167a to which the first viscoelastic member 91 is connected. Moreover, in the recesses 176 and 177 of the second case member 17, a plurality of recesses may be formed in connection regions 176a and 177a to which the second viscoelastic member 92 is connected.

According to this aspect, since the connection body 90 is in a state of being compressed in the first direction Z, the connection body 90 is partially positioned inside the plurality of recesses. For this reason, the edges of the plurality of recesses suppress movement of the connector 90 in the direction intersecting the first direction Z. As shown in FIG. Therefore, when the connection body 90 is arranged between the support body 2 and the movable body 3, the edges of the plurality of recesses effectively suppress the movement of the connection body 90 in the direction intersecting the first direction Z. . Further, when the movable body 3 is driven in the second direction X, the edges of the plurality of recesses effectively suppress the connecting body 90 from moving in the second direction X. Therefore, it is possible to suppress positional deviation of the connecting member 90 arranged between the supporting member 2 and the movable member 3 . Also, the connection body 90 is fixed to the connection regions 166a, 167a, 176a, 177a via an adhesive, and part of the adhesive is located inside the plurality of recesses. Therefore, the bonding strength of the connection body 901 is high.

(Support structure for first case member 16, holder 60 and second case member 17)
9 is a perspective view of the first corner 160 and the second corner 600 shown in FIG. 3 as viewed from the other side Z2 in the first direction Z. FIG. 10 is a perspective view of the second corner 600 and the third corner 170 shown in FIG. 4 as viewed from one side Z1 in the first direction Z. FIG. FIG. 11 is an XZ sectional view when the support 2 is cut at a position passing through the first corner portion 160 shown in FIG. FIG. 12 is a YZ sectional view when the support 2 is cut at a position passing through the first corner portion 160 shown in FIG. FIG. 13 is an XZ sectional view when the support 2 is cut between the first corners 160 shown in FIG. FIG. 14 is a YZ cross-sectional view when the support 2 is cut between the first corners 160 shown in FIG.

As shown in FIGS. 9 to 12, when the support 2 is formed, the first corner 160 of the first case member 16 and the second corner 600 of the holder 60 are positioned at each of the four corners of the support 2. overlap in the first direction Z to form the first support portion 21 . At each of the four corners of the support 2, the second corner 600 of the holder 60 and the third corner 170 of the second case member 17 overlap in the first direction Z to form the second support 22. .

In this embodiment, the first support portion 21 has a first non-contact region 211 where the first corner 160 and the second corner 600 are separated in the first direction Z, and a position adjacent to the first non-contact region 211 . A first contact area 212 where the first corner 160 and the second corner 600 contact in the first direction Z is provided. In this embodiment, the surface of the second corner 600 on one side Z1 in the first direction Z is flat, while the surface of the first corner 160 on the other side Z2 in the first direction Z is shown in gray in FIG. It has a first region 16s and a second region 16t recessed from the first region 16s toward one side Z1 in the first direction Z. As shown in FIG. Therefore, when the first corner 160 and the second corner 600 overlap in the first direction Z, the first corner 160 and the second corner 600 are separated in the first direction Z in the second region 16t. The first non-contact area 211 is configured, and the first area 16s configures the first contact area 212 where the first corner 160 and the second corner 600 are in contact with each other in the first direction Z. As shown in FIG. Here, the first contact area 212 is provided so as to surround the first non-contact area 211 . Also, the first non-contact area 211 is provided with a first adhesive H1 (see FIGS. 11 and 12) for bonding the first corner 160 and the second corner 600 together.

In this embodiment, a through hole 67 for filling the first adhesive H1 is formed in the holder 60 at a position corresponding to the first non-contact area 211. The detailed configuration of the through hole 67 is as follows. This will be described later with reference to FIGS. 15 and 16. FIG.

The second support portion 22 has a second non-contact area 221 where the second corner 600 and the third corner 170 are spaced apart in the first direction Z, and a second corner 221 at a position adjacent to the second non-contact area 221 . A second contact area 222 is provided where the portion 600 and the third corner 170 meet in the first direction Z. As shown in FIG. In this embodiment, the surface of the third corner 170 on one side Z1 in the first direction Z is flat, while the surface of the second corner 600 on the other side Z2 in the first direction Z is shown in gray in FIG. It has a third region 60s and a fourth region 60t recessed from the third region 60s toward one side Z1 in the first direction Z. As shown in FIG. Therefore, when the second corner 600 and the third corner 170 overlap in the first direction Z, the second corner 600 and the third corner 170 are separated in the first direction Z in the fourth region 60t. The second non-contact area 221 is configured, and the third area 60s configures the second contact area 222 where the second corner 600 and the third corner 170 are in contact with each other in the first direction Z. As shown in FIG. Here, the second contact area 222 is provided so as to surround the second non-contact area 221 . A second adhesive H2 (see FIGS. 11 and 12) for bonding the second corner portion 600 and the third corner portion 170 is provided in the second non-contact area 221 .

As shown in FIGS. 11 and 12, on the end face of the support 2, the outer edge 16r of the first corner 160 and the outer edge 60r of the second corner 600 face each other with the first gap 24 interposed therebetween. In this embodiment, one of the outer edge portion 16r of the first corner portion 160 and the outer edge portion 60r of the second corner portion 600 has a first bent portion that bends the first gap 24 into an L shape. In this embodiment, the outer edge portion 16r of the first corner portion 160 has a first bent portion 16u that is bent in an L-shape along the outer edge portion 60r of the second corner portion 600 toward the other side Z2 in the first direction Z. The first gap 24 is bent in an L shape by the first bent portion 16u. A first bent portion may be provided at the outer edge portion 60r of the second corner portion 600 to bend the first gap 24 into an L-shape.

Further, on the end face of the support 2, the outer edge portion 60p of the second corner portion 600 and the outer edge portion 17p of the third corner portion 170 face each other with the second gap 25 interposed therebetween. In this embodiment, one of the outer edge portion 60p of the second corner portion 600 and the outer edge portion 17p of the third corner portion 170 has a second bent portion that bends the second gap 25 into an L shape. In this embodiment, the outer edge portion 17p of the third corner portion 170 has a second bent portion 17u that is bent in an L-shape along the outer edge portion 60p of the second corner portion 600 in the first direction Z to one side Z1. The second gap 25 is bent in an L shape by the second bent portion 17u. A second bent portion may be provided at the outer edge portion 60p of the second corner portion 600 to bend the second gap 25 into an L-shape.

In this embodiment, the wall portion extending from the first corner portion 160 of the first case member 16 and the wall portion extending from the second corner portion 600 of the holder 60 are at least partially formed on the end face of the support 2. in a non-contact state. At least a portion of the wall portion extending from the third corner portion 170 of the second case member 17 and the wall portion extending from the second corner portion 600 of the holder 60 are not in contact with each other on the end face of the support 2 . in a state. That is, in the support body 2, even at portions other than the first corner portion 160, the second corner portion 600, and the third corner portion 170, for example, as shown in FIG. Between the first wall portion 161 of the second case member 17 and the first wall portion 61 of the holder 60, a gap 28 bent in an L-shape is formed. An L-shaped bent gap 29 is formed between the first wall portion 61 and the like.

Further, as shown in FIG. 14, on the end face of the support 2, between the third wall portion 163 of the first case member 16 and the third wall portion 63 of the holder 60, there is a gap 28 bent in an L-shape. is formed, and an L-shaped bent gap 29 is formed between the third wall portion 173 of the second case member 17 and the third wall portion 63 of the holder 60 or the like. A gap 28 is formed between the fourth wall portion 164 of the first case member 16 and the fourth wall portion 64 of the holder 60 , and the fourth wall portion 174 of the second case member 17 and the fourth wall portion 64 of the holder 60 are separated from each other. An L-shaped bent gap 29 is formed between the wall portion 64 and the like.

(Configuration of through-holes for filling adhesive)
FIG. 15 is a YZ sectional view when the support 2 is cut at a position passing through the through hole 67 shown in FIGS. 9 and 10. FIG. FIG. 16 is an XZ sectional view when the support 2 is cut at a position passing through the through hole 67 shown in FIGS. 9 and 10. FIG.

As shown in FIGS. 9 and 10, the second corner 600 of the holder 60 is provided with a first adhesive H1 that penetrates the second corner 600 in the first direction Z. A through hole 67 opening at 211 is provided. As shown in FIGS. 15 and 16 , the through hole 67 is such that the opening size S1 of the first opening 671 on one side Z1 of the second corner 600 in the first direction Z is the same as the opening size S1 of the second corner 600 in the first direction Z. is larger than the opening size S2 of the second opening 672 on the other side Z2.

The through hole 67 has a first hole 676 that opens on one side L1 in the first direction Z of the second corner portion 600, and communicates with the first hole 676 on the other side Z2 in the first direction Z so that the second corner portion 600 and a second hole 677 that opens on the other side Z2 in the first direction Z. Here, the inner peripheral surface of the second hole 677 is an inclined surface whose inner diameter gradually decreases toward one side Z1 in the first direction Z. As shown in FIG. At least a part of the inner peripheral surface of the first hole 676 in the circumferential direction forms a conical inclined surface 678 whose inner diameter increases from the other side Z2 in the first direction Z toward the one side Z1 in the first direction Z. ing.

In this embodiment, a portion of the inner peripheral surface of the first hole 676 is a conical inclined surface 678, and the other portion in the circumferential direction is a flat portion 679a. A portion of the inner peripheral surface of the second hole 677 also forms a flat portion 679b that is continuous with the flat portion 679a. Therefore, the inner peripheral surface of the through-hole 67 has a flat portion 679 extending in the circumferential direction from the opening edge on the other side Z2 in the first direction Z to the opening edge on the one side Z1 in the first direction Z. there is In the through hole 67, the length of a linear portion 679c (see FIG. 10) formed by the flat portion 679 at the opening edge of the one side Z1 in the first direction Z is the length of the other side Z2 of the flat portion 679 in the first direction Z. It is longer than the straight portion 679d (see FIG. 9) formed at the edge of the opening. In addition, among the inner peripheral surface of the through hole 67 , the inner peripheral surface of the first hole 676 is the inner peripheral surface of the second hole 677 between the first hole 676 and the second hole 677 in the portion other than the flat portion 679 . Located radially outside the plane.

(Manufacturing method of actuator 1)
FIG. 17 is a cross-sectional view showing a gap between the wiring board 15 and the third wall portion 63 of the holder 60 shown in FIG. 5 and the like.

In this embodiment, the first case member 16, the first yoke 86, the holder 60, and the second case member 16 are supported while supporting the first yoke 86 with support pins (not shown) inserted through the through holes 16b of the first case member 16. When stacking the yokes 87 in the first direction Z, the through hole 16a of the first case member 16, the notch 869 of the first yoke 86, the notch 603 of the holder 60, and the second 2 The notch 879 of the yoke 87 is overlapped. Therefore, the first case member 16, the first yoke 86, the holder 60, and the second yoke 87 can be properly stacked.

At that time, the first connecting plate portion 861 of the first yoke 86 is projected through the first opening 601 of the holder 60 toward the other side Z2 in the first direction Z, and the second connecting plate portion 862 of the holder 60 is projected. It protrudes toward the other side Z2 in the first direction Z through the second opening 602 . Therefore, each of the first connecting plate portion 861 and the second connecting plate portion 862 of the first yoke 86 can be connected to the second yoke 87 .

Also, the first viscoelastic member 91 is connected in advance to one of the first case member 16 and the first yoke 86 with an adhesive, and when the first case member 16 and the first yoke 86 are overlapped, the first case member 16 and the first yoke 86 are joined together. A first viscoelastic member 91 is connected to the other of member 16 and first yoke 86 with an adhesive. Further, the second viscoelastic member 92 is previously connected to one of the second case member 17 and the second yoke 87 by an adhesive, and when the second case member 17 and the second yoke 87 are stacked, the second case member 17 and the second yoke 87 A second viscoelastic member 92 is connected to the other of the member 17 and the second yoke 87 with an adhesive. At this time, the support pin inserted from the through hole 16b is brought into contact with the notch 17b of the second case member 17 to support the second case member 17. As shown in FIG.

In this manner, when the actuator 1 is manufactured, in this embodiment, the first adhesive H1 is dripped from the through hole 67 in a state where the holder 60 is superimposed on the first case member 16, and the first adhesive H1 is dripped through the through hole 67 to form the first adhesive. 1 Fill the first non-contact area 211 between the first case member 16 and the holder 60 with the adhesive H1. After that, when stacking the second case member 17 on the holder 60, the second adhesive H2 is applied to the fourth region 60t forming the second non-contact region 221 of the holder 60. As shown in FIG. In this embodiment, although illustration is omitted, the first non-contact region 211 is formed with a notch or recess for removing air from the first non-contact region 211 when filling the second adhesive H2. there is

Here, as shown in FIG. 17, between the wiring board 15 and the third wall portion 63 of the holder 60 shown in FIG. A widened gap G is provided on the other side (Z2) of the one direction Z). Therefore, since the opening width of the gap G is wide on the other side Z2 in the first direction Z, a third adhesive (not shown) can be filled between the wiring board 15 and the third wall portion 63 .

After the adhesive is placed in place in this way, it is heated to cure all the uncured adhesive at the same time.

(Main effects of this form)
As described above, in the actuator 1 of this embodiment, the first support portion 21 where the first corner portion 160 of the first case member 16 and the second corner portion 600 of the holder 60 overlap in the first direction Z has a A first non-contact area 211 where the first corner 160 and the second corner 600 are separated in the first direction Z, and a first contact area where the first corner 160 and the second corner 600 are in contact in the first direction Z. 212, the area where the first corner 160 and the second corner 600 contact is limited. Therefore, the first corner portion 160 and the second corner portion 600 can be stably brought into contact with each other. Therefore, even if vibration or the like when the movable body 3 is driven is transmitted to the first support portion 21, chattering noise is less likely to occur from the first support portion 21. FIG.

Further, the second support portion 22 where the third corner portion 170 of the second case member 17 and the second corner portion 600 of the holder 60 overlap in the first direction Z has the second corner portion 600 and the third corner portion 170 . are separated in the first direction Z, and the second contact area 222 is provided in which the second corner 600 and the third corner 170 are in contact with each other in the first direction Z. A contact area between the corner 600 and the third corner 170 is limited. Therefore, the second corner 600 and the third corner 170 can be stably brought into contact with each other. Therefore, even if vibration or the like when the movable body 3 is driven is transmitted to the second support portion 22, chattering noise is less likely to occur from the second support portion 22. FIG.

Also, the first contact area 212 is provided so as to surround the first non-contact area 211 , and the second contact area 222 is provided so as to surround the second non-contact area 221 . Further, the first non-contact area 211 is provided with the first adhesive H1, and the second non-contact area 221 is provided with the second adhesive H2. Therefore, the first corner portion 160 and the second corner portion 600 support each other in a stable state, and the second corner portion 600 and the third corner portion 170 support each other in a stable state. Therefore, generation of chatter can be effectively suppressed.

Further, on the end face of the support 2, the outer edge 16r of the first corner 160 and the outer edge 60r of the second corner 600 are opposed to each other with the first gap 24 therebetween. The outer edge portion 17p of the third corner portion 170 faces the second gap 25 therebetween. Therefore, chattering noise is less likely to occur from the end face of the support. In addition, since the first gap 24 and the second gap 25 are curved, it is possible to prevent foreign matter from entering from the outside.

Further, since the holder 60 is provided with the through hole 67, the holder 60 is placed on the first case member 16 in the step of stacking the first case member 16 and the holder 60 via the first adhesive H1. When the first adhesive H1 is dripped from the through hole 67 in the overlapping state, the first adhesive H1 flows through the through hole 67 and flows between the first case member 16 and the holder 60 . Therefore, after the first adhesive H1 is applied to the first case member 16 or the holder 60, the first adhesion between the first case member 16 and the holder 60 is greater than when the first case member 16 and the holder 60 are overlapped. The agent H1 can be provided efficiently.

In addition, since the opening size of the through hole 67 on one side Z1 in the first direction Z is larger than the opening size on the other side Z2, the first adhesive H1 flows from the through hole 67 into the first case member 16 and the holder 60. flows smoothly between

In addition, at least a part of the inner peripheral surface of the first hole 676 forming the through hole 67 in the circumferential direction forms an inclined surface 678 that increases the inner diameter from the other side Z2 toward the one side Z1 in the first direction Z. there is Therefore, it is convenient to increase the opening size of the through hole 67 on the one side Z1 in the first direction Z while ensuring the opening size on the other side Z2 in the first direction Z of the through hole 67 .

Further, since a part of the inner peripheral surface of the through hole 67 in the circumferential direction is a flat portion 679, when the first adhesive H1 is dripped into the through hole 67 from the other side Z2 in the first direction Z, the first By dripping the first adhesive H1 onto the flat portion 679 , the first adhesive H1 can flow smoothly along the flat portion 679 between the first corner portion 160 and the second corner portion 600 . In addition, the length of the linear portion 679c (see FIG. 10) formed by the flat portion 679 at the opening edge on the one side Z1 in the first direction Z is formed on the opening edge on the other side Z2 in the first direction Z of the flat portion 679. Since the length of the linear portion 679 d (see FIG. 9 ) is longer than the length of the linear portion 679 d (see FIG. 9 ), the first adhesive H 1 can be easily dripped onto the flat portion 679 while avoiding the inclined surface 678 . Therefore, the first adhesive H<b>1 can smoothly flow out between the first corner portion 160 and the second corner portion 600 along the flat portion 679 .

[Other embodiments]
In the above-described embodiment, the first non-contact area 211 and the first contact area 212 are configured using the height difference provided at the first corner 160, but the height difference provided at the second corner 600 is used to form the first non-contact area 211 and the first contact area 212. The first non-contact area 211 and the first contact area 212 may be configured. In addition, although the second non-contact area 221 and the second contact area 222 are formed using the height difference provided at the second corner 600, the second non-contact area 221 and the second contact area 222 are formed using the height difference provided at the third corner 170. The contact area 221 and the second contact area 222 may be configured.

Although the above embodiment has two magnets 8 (the first magnet 81 and the second magnet 82), for example, the magnet 8 is arranged only on one side Z1 in the first direction Z with respect to the coil 7, The present invention may be applied to a mode in which only the second yoke 87 exists on the other side Z2 in the first direction Z.

In the above embodiment, a gel-like member such as silicone gel is used as the viscoelastic member 9, but rubber or the like may be used as the viscoelastic member. Further, in the above embodiment, the viscoelastic member 9 is used as the connector 90, but an elastic member such as a spring may be used.

In the above embodiment, the coil and holder are provided on the support 2 and the magnet and yoke are provided on the movable body 3, but the coil and holder are provided on the movable body 3 and the magnet and yoke are provided on the support 2. The present invention may be applied when In the above embodiment, the present invention is applied to the actuator 1 that drives the movable body 3 only in the second direction X, but the present invention is applied to the actuator 1 that drives the movable body 3 in the second direction X and the third direction Y. You may

DESCRIPTION OF SYMBOLS 1... Actuator 2... Support body 3... Movable body 6... Magnetic drive circuit 7... Coil 8... Magnet 9... Viscoelastic member 15... Wiring board 16... First case member 16s... First first case member Area 16t Second area 16u First bent portion 17 Second case member 17u Second bent portion 18 Screw 21 First support portion 22 Second support portion 24 Second 1 gap 25 second gap 60 holder 60p, 60r outer edge 60s third region 60t fourth region 61, 161, 171 first wall 62, 162, 172 third 2 wall portions 63, 163, 173... third wall portion 64, 164, 174... fourth wall portion 65, 165, 175... bottom plate portion 67... through hole 71... first coil 72... second Coils 81, 83 First magnet 82, 84 Second magnet 86 First yoke 87 Second yoke 90 Connector 91 First viscoelastic member 92 Second viscoelastic member , 160... First corner 170... Third corner 211... First non-contact area 212... First contact area 221... Second non-contact area 222... Second contact area 600... Second corner Part 676... First hole 677... Second hole 678... Inclined surface 679, 679a, 679b... Plane part 679c, 679d... Linear part H1... First adhesive H2... Second adhesive X ... second direction, Y ... third direction, Z ... first direction

Claims (8)

a support;
a movable body;
a connection body having at least one of elasticity and viscoelasticity and connected to the movable body and the support;
a magnetic drive circuit for relatively moving the movable body with respect to the support;
with
The support includes a holder that holds one of a coil and a magnet of the magnetic drive circuit, and a first case member that overlaps the holder on one side in a first direction,
a first corner portion of the first case member and a second corner portion of the holder overlap in the first direction via a first adhesive to form a first support portion;
The second corner is provided with a through hole penetrating the second corner in the first direction and opening in a region where the first adhesive is provided ,
The first supporting portion includes a first non-contact area in which the first corner and the second corner are spaced apart in the first direction, and the first corner at a position adjacent to the first non-contact area. a first contact region where the portion and the second corner contact in the first direction;
The first contact area is provided to surround the first non-contact area,
An actuator, wherein the first adhesive is applied to the first non-contact area . The actuator of claim 1, wherein
The actuator, wherein the through hole has an opening size on one side of the second corner in the first direction that is larger than an opening size on the other side of the second corner in the first direction. The actuator according to claim 2, wherein
The through hole includes a first hole that opens on one side of the second corner in the first direction, and a through hole that communicates with the first hole on the other side of the first direction to open the second corner of the second corner. a second hole that opens on the other side in one direction,
At least a part of the inner peripheral surface of the first hole in the circumferential direction is an inclined surface whose inner diameter increases from the other side in the first direction toward the one side in the first direction. actuator. In the actuator according to any one of claims 1 to 3,
A part of the inner peripheral surface of the through hole in the circumferential direction is a flat portion extending from the opening edge on the other side in the first direction to the opening edge on the one side in the first direction. actuator. The actuator according to claim 4, wherein
The actuator, wherein the length of the flat portion at one side of the opening edge in the first direction is longer than the length of the flat portion at the other side of the opening edge in the first direction. In the actuator according to any one of claims 1 to 5 ,
the support includes a second case member that overlaps the holder on the other side in the first direction;
the second corner and the third corner of the second case member overlap in the first direction to form a second support,
The second support portion includes a second non-contact area in which the second corner and the third corner are spaced apart in the first direction, and the second corner at a position adjacent to the second non-contact area. a second contact area where the part and the third corner contact in the first direction,
An actuator, wherein the second adhesive is provided in the second non-contact area. In the actuator according to any one of claims 1 to 6 ,
the coil and the magnet face each other in the first direction,
The actuator, wherein the magnetic drive circuit relatively moves the movable body with respect to the support body in a second direction crossing the first direction. In the method for manufacturing an actuator according to any one of claims 1 to 7 ,
In the step of stacking the first case member and the holder via the first adhesive,
A method of manufacturing an actuator, wherein the first adhesive is dripped from the through hole in a state where the holder is superimposed on the first case member.

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