WO2018228098A1 - Surface covering touch screen, manufacturing method therefor, and display device - Google Patents

Surface covering touch screen, manufacturing method therefor, and display device Download PDF

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Publication number
WO2018228098A1
WO2018228098A1 PCT/CN2018/086383 CN2018086383W WO2018228098A1 WO 2018228098 A1 WO2018228098 A1 WO 2018228098A1 CN 2018086383 W CN2018086383 W CN 2018086383W WO 2018228098 A1 WO2018228098 A1 WO 2018228098A1
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Prior art keywords
pattern
layer
touch electrode
electrode layer
photoresist
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PCT/CN2018/086383
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French (fr)
Chinese (zh)
Inventor
刘典新
马晓峰
祝培涛
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京东方科技集团股份有限公司
重庆京东方光电科技有限公司
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Publication of WO2018228098A1 publication Critical patent/WO2018228098A1/en

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    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/0412Digitisers structurally integrated in a display
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04103Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices

Definitions

  • the present invention relates to the field of touch display technologies, and more particularly to a cover surface touch screen, a method for fabricating the same, and a display device.
  • the On Cell touch screen is organically combined by the touch module and the display panel, and the touch sensitivity, impact resistance and drop resistance are relatively high, and the touch screen has no smear and The advantages of jitter and so on have become the main competitors of today's touch displays.
  • the On Cell Touch mode is mainly used to form a touch film made of indium tin oxide (ITO) on a color film substrate after the array substrate and the color film substrate are formed into a box.
  • ITO indium tin oxide
  • FIG. 1a is a cross-sectional view of a cover-type touch screen
  • FIG. 1b is a top view of a cover-type touch screen.
  • a touch electrode 102 Touch Electrode
  • FIG. 1a a large step is formed after the touch electrodes 102 are formed.
  • the color filter substrate 101 can be directly seen at the gap of each touch electrode 102.
  • the touch electrode Due to the large step difference and the limited adhesion between the touch electrode and the color filter substrate, the touch electrode is easily scratched or peeled off in subsequent processes such as cleaning, cutting, and pressure testing (Grinder). Lead to poor display, affect product yield, and increase costs.
  • the embodiment of the invention provides a cover-type touch screen, a manufacturing method thereof and a display device, which are used to solve the problem that the touch electrode covering the surface touch screen in the prior art is prone to scratching or falling off.
  • Embodiments of the present invention provide a method for fabricating a cover type touch screen, including:
  • a mask layer forming the touch electrode layer is used to form a protective layer on a region other than the pattern of the touch electrode layer on the base substrate.
  • the forming a pattern of the touch electrode layer on the base substrate includes:
  • Photolithography is performed on the first photoresist layer using a mask to obtain a pattern of the first photoresist layer;
  • the pattern of the first photoresist layer is removed to obtain a pattern of the touch electrode layer.
  • the mask formed by the touch electrode layer is used, and the touch is performed on the base substrate.
  • a region other than the pattern of the control electrode layer forms a pattern of the protective layer, including:
  • the pattern of the second photoresist layer is removed, and the obtained pattern of the insulating layer is used as a pattern of the protective layer.
  • the mask formed by the touch electrode layer is used, and the touch is performed on the base substrate.
  • a region other than the pattern of the control electrode layer forms a pattern of the protective layer, including:
  • the second photoresist layer is photolithographically patterned using the mask, and the obtained pattern of the second photoresist layer is used as a pattern of the protective layer.
  • the first photolithography uses a positive photoresist
  • the first photoresist layer is made of a negative photoresist.
  • the embodiment of the invention further provides a cover-surface touch screen, comprising: a base substrate, a touch electrode layer on the base substrate, and a graphic on the touch electrode layer on the base substrate The protective layer of the outer area.
  • the protective layer is composed of a transparent material.
  • the protective layer is composed of a polydimethylsiloxane material.
  • the thickness of the protective layer is less than or equal to the thickness of the touch electrode layer.
  • the embodiment of the invention further provides a display device comprising: the above-mentioned cover surface type touch screen.
  • the cover surface touch screen provided by the embodiment of the invention, the manufacturing method thereof and the display device, the method for manufacturing the cover surface touch screen comprises: forming a pattern of the touch electrode layer on the base substrate; before forming the pattern of the touch electrode layer Or afterwards, a mask of the touch electrode layer is formed, and a pattern of the protective layer is formed on a region other than the pattern of the touch electrode layer on the base substrate.
  • the method for fabricating a cover-type touch screen forms a pattern of a protective layer on a substrate other than a pattern of a touch electrode layer on the base substrate by using a mask formed with a touch electrode layer, without increasing
  • the step difference caused by the touch electrode is reduced, and the protective layer has a certain viscosity between the touch electrode and the substrate, which increases the viscosity between the touch electrode and the substrate. It can prevent the touch electrode from falling off, and also improves the problem that the touch electrode is easily scratched or remains in the process of cleaning, cutting and stress testing.
  • 1a and 1b are respectively a cross-sectional view and a top view of a cover surface type touch screen in the prior art
  • FIG. 2 is a flowchart of a method for fabricating a cover surface touch screen according to an embodiment of the present invention
  • 3a and 3b are respectively a cross-sectional view and a top view of a cover surface type touch screen provided by an embodiment of the present invention
  • FIG. 4a is a flowchart of a method for fabricating a pattern for forming a touch electrode layer according to an embodiment of the present invention
  • 4b and 4c are respectively a flowchart of a method for fabricating a pattern for forming a protective layer in an embodiment of the present invention
  • 5a to 5f are respectively schematic structural views of a preparation method according to some embodiments of the present invention.
  • 5d' and 5e' are schematic structural views of a preparation method according to the second embodiment
  • 6a-6e are schematic structural views of a preparation method according to another embodiment of the present invention.
  • 6a' to 6e' are schematic structural views respectively showing a preparation method according to another embodiment of the present invention.
  • 101 color film substrate; 102, touch electrode; 301, substrate; 302, touch electrode layer; 303, protective layer; 304, first photoresist layer; 305, mask; 306, insulating layer ; 307, a second photoresist layer.
  • the present invention provides a cover-surface touch screen, a manufacturing method thereof, and a display device, in view of the problem that the touch electrodes of the surface touch panel are easily scratched or peeled off.
  • Embodiments of the present invention provide a method for fabricating a cover type touch screen, as shown in FIG. 2, including:
  • the method for fabricating a cover-type touch screen forms a pattern of a protective layer on a substrate other than a pattern of a touch electrode layer on the base substrate by using a mask formed with a touch electrode layer, without increasing
  • the step difference caused by the touch electrode is reduced, and the protective layer has a certain viscosity between the touch electrode and the substrate, which increases the viscosity between the touch electrode and the substrate. It can prevent the touch electrode from falling off, and also improves the problem that the touch electrode is easily scratched or remains in the process of cleaning, cutting and stress testing.
  • the pattern of the touch electrode layer is formed on the base substrate. Since the touch electrode layer covering the surface touch screen is generally formed on the color filter substrate behind the box, the base substrate may be referred to as a color film. The substrate and the touch electrode layer are formed on a side of the color filter substrate facing away from the array substrate.
  • a pattern of the protective layer is formed by using a mask formed by the touch electrode layer, that is, the touch electrode layer and the protective layer can be formed by using the same mask, and different masks are used compared with the two, thereby saving The cost of making a reticle.
  • a pattern other than the pattern of the touch electrode layer 302 on the base substrate 301 forms a pattern of the protective layer 303, and the obtained pattern of the protective layer 303 is substantially complementary to the pattern of the touch electrode layer 302. It can also be understood that the pattern of the protective layer 303 is embedded in the gap of each touch electrode. As is apparent from FIG.
  • the protective layer 303 since the protective layer 303 is formed at the gap of each touch electrode, the touch electrode is greatly reduced. The difference between the layer 302 and the substrate 301. In FIG. 3b, the substrate 301 cannot be directly seen at the gap of each touch electrode. It can be clearly seen that the gap between the touch electrodes is the protective layer 303. Graphics.
  • the protective layer 303 since the protective layer 303 has a certain viscosity with the touch electrode and the base substrate 301, the adhesion between the touch electrode layer 302 and the base substrate 301 is improved, and the touch electrode can be prevented from falling off and improved. In the processes of cleaning, cutting, and pressure testing, the touch electrodes are easily scratched or residual particles.
  • the pattern of the protective layer may be formed, and before the pattern of the touch electrode layer is formed, after the pattern of the touch electrode layer is formed, the order of making the protective layer and the touch electrode layer is not limited herein.
  • a pattern of the protective layer is formed;
  • the foregoing step S201 may include:
  • the first photoresist layer 304 is positive.
  • the photoresist is taken as an example.
  • the first photoresist layer 304 may also be a negative photoresist.
  • the mask 305 is The pattern is substantially complementary to the pattern of the mask 305 shown in FIG. 5b, that is, substantially complementary to the pattern of the touch electrode layer 302 to be formed; the photolithography process in the embodiment of the present invention may include processes such as exposure and development;
  • the pattern of the first photoresist layer 304 is removed to obtain a pattern of the touch electrode layer 302, as shown in FIG. 5c;
  • a photoresist layer 304 is, for example, dry etched.
  • a mask layer forming a touch electrode layer is used, and a protective layer is formed on a region other than the pattern of the touch electrode layer on the base substrate.
  • the graphics can include at least the following two implementations:
  • the base substrate 301 may refer to the base substrate 301 on which the pattern of the touch electrode layer 302 is formed;
  • the pattern of the second photoresist layer 307 is removed, and the pattern of the insulating layer 306 is obtained as a pattern of the protective layer 303.
  • the etching process may be used to remove the first layer.
  • the second photoresist layer 307 is, for example, dry etched.
  • step S202a' forms a second photoresist layer 307 opposite to the photosensitive property of the first photoresist layer 304 on the base substrate 301, as shown in FIG. 5d'; and is the same as the above step S202a, since the protective layer 303 is formed.
  • the pattern and the touch electrode layer 302 are patterned using the same mask 305. Therefore, the second photoresist layer 307 used for the pattern of the protective layer 303 and the first photoresist layer used for the pattern of the touch electrode layer 302 are formed.
  • the pattern of the protective layer 303 is substantially complementary to the pattern of the touch electrode layer 302; since the step S202a' in the second embodiment is performed after the pattern of the touch electrode layer 302 is formed, the implementation is performed.
  • the base substrate 301 may refer to the base substrate 301 on which the pattern of the touch electrode layer 302 is formed;
  • the pattern of the obtained insulating layer is used as the pattern of the protective layer, and the material of the insulating layer can be selected according to actual needs, and a polymer organic film which is non-conductive, corrosion-resistant, good in light transmittance, and stable in performance can be selected as the polymer layer.
  • the insulating layer is preferably a transparent material.
  • a material such as polydimethylsiloxane (PDMS) or polycarbonate (PC) may be used.
  • the second photoresist is obtained.
  • the pattern of the layer can only be made of a photoresist material as a protective layer, preferably a photoresist material having a high light transmittance.
  • the fabrication process is relatively simple.
  • a pattern of the protective layer is formed before the pattern of the touch electrode layer is formed
  • a mask layer forming a touch electrode layer is used, and a protective layer is formed on a region other than the pattern of the touch electrode layer on the base substrate.
  • the graphics can include at least the following two implementations:
  • lithography is performed on the second photoresist layer 307 by using the mask 305 to obtain a pattern of the second photoresist layer 307, as shown in FIG. 6b; and the second photoresist layer 307 is negative in FIG. 6b.
  • the photoresist is exemplified.
  • the second photoresist may also be a positive photoresist.
  • the pattern and pattern of the mask 305 are used.
  • the pattern of mask 305 shown in 6b is substantially complementary, i.e., substantially coincident with the pattern of insulating layer 306 to be formed.
  • S202a' forms a second photoresist layer 307 on the base substrate 301 opposite to the photosensitive property of the first photoresist layer 304, as shown in FIG. 6a';
  • S202b' uses a mask 305 to lithography the second photoresist layer 307, and the pattern of the second photoresist layer 307 is used as a pattern of the protective layer 303, as shown in FIG. 6b'.
  • the pattern of the obtained insulating layer is used as the pattern of the protective layer, and the material of the insulating layer can be selected according to actual needs, and a polymer organic film which is non-conductive, corrosion-resistant, good in light transmittance, and stable in performance can be selected as the polymer layer.
  • the insulating layer is preferably a transparent material, such as a material such as polydimethylsiloxane or polycarbonate.
  • the pattern of the obtained second photoresist layer is used as a pattern of the protective layer, and only light can be used.
  • the engraved material is preferably a photoresist material having a high light transmittance.
  • the manufacturing process is relatively simple.
  • the pattern of the touch electrode layer is formed in the following manner, as shown in FIG. 4a.
  • the above step S201 may include:
  • step S201a in this embodiment Is performed after forming the pattern of the protective layer 303, therefore, the base substrate 301 herein may refer to the base substrate 301 formed with the protective layer 303;
  • the pattern of the first photoresist layer 304 is removed to obtain a pattern of the touch electrode layer 302, as shown in FIG. 5f and FIG. 6e'.
  • FIGS. 6d to 6e are schematic views showing the structure of the pattern of the insulating layer 306 as the protective layer 303
  • FIGS. 6c' to 6e' are structural diagrams of the pattern of the second photoresist layer 307 as the protective layer 303.
  • the first photoresist layer is a positive photoresist
  • the first photoresist layer is made of a negative photoresist.
  • the positive photoresist corresponding to the transparent region of the mask is irradiated with light to form a substance soluble in the developer, and the non-transparent region of the mask corresponds to positive lithography.
  • the glue is not irradiated with light, its solubility does not change, it is insoluble in the developer, and after exposure, the exposed positive photoresist is treated with a developing solution to dissolve the positive photoresist corresponding to the transparent region.
  • the pattern of the obtained positive photoresist layer coincides with the pattern of the non-transmissive region of the mask, that is, substantially conforms to the pattern of the mask.
  • the negative photoresist corresponding to the light-transmitting region of the mask is irradiated with light, and then solidified to form a substance insoluble in the developer, and the negative light corresponding to the non-transparent region of the mask
  • the engraved glue is not irradiated with light, its solubility does not change, and it can be dissolved in the developing solution.
  • the negative photoresist is treated with a developer corresponding to the negative photoresist to make the corresponding non-transparent region negative.
  • the photoresist is dissolved in the developer, and the pattern of the negative photoresist layer obtained is identical to the pattern of the light-transmissive region of the mask, that is, substantially complementary to the pattern of the mask.
  • the first photoresist layer is a positive photoresist; when the pattern of the mask is consistent with the pattern of the touch electrode layer, the first light The positive photoresist is used to obtain the pattern of the touch electrode layer in accordance with the pattern of the mask.
  • the second photoresist layer can be obtained by using a negative photoresist.
  • a patterned complementary protective layer of the control electrode layer when the pattern of the mask is consistent with the pattern of the touch electrode layer, the first light The positive photoresist is used to obtain the pattern of the touch electrode layer in accordance with the pattern of the mask.
  • the second photoresist layer can be obtained by using a negative photoresist.
  • a patterned complementary protective layer of the control electrode layer when the pattern of the mask is consistent with the pattern of the touch electrode layer.
  • the first photoresist layer is made of a negative photoresist.
  • the first photoresist layer is made of a negative photoresist to obtain a pattern of the touch electrode layer complementary to the pattern of the mask, and the pattern of the protective layer is subsequently formed.
  • the second photoresist layer uses a positive photoresist to obtain a protective layer complementary to the pattern of the touch electrode layer.
  • the embodiment of the present invention further provides a cover-surface touch screen. Since the principle of solving the problem by the cover-surface touch screen is similar to the method for fabricating the cover-surface touch screen, the implementation of the cover-surface touch screen can be seen. The implementation of the method for fabricating the above-mentioned cover surface type touch screen will not be repeated here.
  • the embodiment of the present invention further provides a cover type touch screen, as shown in FIG. 3a, comprising: a base substrate 301, a touch electrode layer 302 on the base substrate 301, and a touch on the base substrate 301.
  • a protective layer 303 is disposed on a region other than the pattern of the touch electrode layer 302 on the base substrate 301, the step difference caused by the touch electrode is reduced, and the protective layer 303 is touched.
  • There is a certain viscosity between the control electrode and the base substrate 301 which increases the viscosity between the touch electrode and the base substrate 301, thereby preventing the touch electrode from falling off, and improving the processes of cleaning, cutting, and stress testing. In the process, the touch electrode is easily scratched or remains of particles.
  • the protective layer 303 is preferably made of a transparent material.
  • the protective layer 303 may be composed of a polydimethylsiloxane material or may be composed of other materials, and the material of the protective layer 303 is not limited herein.
  • the thickness of the protective layer 303 is less than or equal to the thickness of the touch electrode layer 302.
  • the thickness of the protective layer 303 is set to be less than or equal to the thickness of the touch electrode layer 302, preferably slightly lower than the thickness of the touch electrode layer 302, so that the thickness of the protective layer 303 is prevented from being too thick to increase the thickness of the display screen. Avoid affecting the display effect of the display screen because the protective layer 303 is too thick.
  • an embodiment of the present invention further provides a display device, including the above-mentioned cover surface type touch screen, which can be applied to any mobile phone, tablet computer, television, display, notebook computer, digital photo frame, navigation device, and the like.
  • a display device including the above-mentioned cover surface type touch screen, which can be applied to any mobile phone, tablet computer, television, display, notebook computer, digital photo frame, navigation device, and the like.
  • a product or part that has a display function Since the principle of solving the problem of the display device is similar to that of the above-mentioned cover surface type touch screen, the implementation of the display device can be referred to the implementation of the above-mentioned cover surface type touch screen, and the repeated description is omitted.
  • the cover surface type touch screen provided by the embodiment of the invention, the manufacturing method thereof and the display device form a pattern of the protective layer by using a mask plate forming the touch electrode layer on a region other than the pattern of the touch electrode layer on the base substrate
  • the step difference caused by the touch electrodes is reduced, and there is a certain viscosity between the protective layer and the touch electrodes and the substrate, which increases the gap between the touch electrodes and the substrate.
  • the stickiness prevents the touch electrodes from falling off, and also improves the problem that the touch electrodes are easily scratched or left in the process of cleaning, cutting, and stress testing.

Abstract

Disclosed are a surface covering touch screen, a manufacturing method therefor, and a display device. The manufacturing method comprises: forming, on a base substrate, a pattern of a touch electrode layer; before or after the pattern of the touch electrode layer is formed, using a mask plate forming the touch electrode layer to form, in a region other than the pattern of the touch electrode layer on the base substrate, a pattern of a protective layer. The manufacturing method provided in the embodiments of the present invention forms, in the region other than the pattern of the touch electrode layer on the base substrate, the pattern of the protective layer by means of the mask plate forming the touch electrode layer, thereby decreasing segment errors caused by a touch electrode without increasing the cost of the mask plate, furthermore, a certain attraction exists between the protective layer and the touch electrode and base substrate, increasing the attraction between the touch electrode and the base substrate, thereby being able to prevent the touch electrode from falling, and also solving the problem that the touch electrode is easily scratched or particles are left during the technological processes such as cleaning, cutting and pressure testing.

Description

一种覆盖表面式触摸屏、其制作方法及显示装置Cover surface touch screen, manufacturing method thereof and display device
本申请要求在2017年06月14日提交中国专利局、申请号为201710447737.1、发明名称为“一种覆盖表面式触摸屏、其制作方法及显示装置”的中国专利申请的优先权,其全部内容以引入的方式并入本申请中。This application claims priority to Chinese Patent Application No. 201010447737.1, entitled "A Cover Surface Touch Screen, Its Manufacturing Method and Display Device", filed on June 14, 2017, the entire contents of which are hereby incorporated by reference. The manner of introduction is incorporated into the present application.
技术领域Technical field
本发明涉及触控显示技术领域,尤指一种覆盖表面式触摸屏、其制作方法及显示装置。The present invention relates to the field of touch display technologies, and more particularly to a cover surface touch screen, a method for fabricating the same, and a display device.
背景技术Background technique
在液晶显示器领域中,覆盖表面式(On Cell)触摸屏因触控模块与显示面板进行了有机的结合,触控灵敏性、抗冲击以及抗摔性都比较高,且该触摸屏具有无拖影及抖动等优点成为当今触控显示器的主要竞争者。In the field of liquid crystal displays, the On Cell touch screen is organically combined by the touch module and the display panel, and the touch sensitivity, impact resistance and drop resistance are relatively high, and the touch screen has no smear and The advantages of jitter and so on have become the main competitors of today's touch displays.
目前,覆盖表面式触控(On Cell Touch)模式主要是在阵列基板与彩膜基板成盒后,将氧化铟锡(Indium tin oxide,ITO)制作的触控薄膜镀在彩膜基板上。图1a为覆盖表面式触摸屏的截面图,图1b为覆盖表面式触摸屏的俯视图,在实际生产中,在彩膜基板101上形成的触控电极102(Touch Electrode)裸露在彩膜基板101的外表面,从图1a中可以看出,制作触控电极102之后形成了较大的段差,从图1b中可以看出,在各个触控电极102的间隙处可以直接看到彩膜基板101。由于段差较大,以及触控电极与彩膜基板的粘附力有限等原因,在后续清洗、切割(cut)、压力测试(Grinder)等工艺中,触控电极容易被划伤或脱落,从而导致显示不良,影响产品良率,成本增加。At present, the On Cell Touch mode is mainly used to form a touch film made of indium tin oxide (ITO) on a color film substrate after the array substrate and the color film substrate are formed into a box. 1a is a cross-sectional view of a cover-type touch screen, and FIG. 1b is a top view of a cover-type touch screen. In actual production, a touch electrode 102 (Touch Electrode) formed on the color filter substrate 101 is exposed outside the color filter substrate 101. As shown in FIG. 1a, a large step is formed after the touch electrodes 102 are formed. As can be seen from FIG. 1b, the color filter substrate 101 can be directly seen at the gap of each touch electrode 102. Due to the large step difference and the limited adhesion between the touch electrode and the color filter substrate, the touch electrode is easily scratched or peeled off in subsequent processes such as cleaning, cutting, and pressure testing (Grinder). Lead to poor display, affect product yield, and increase costs.
因此,如何防止覆盖表面式触摸屏的触控电极容易发生划伤或脱落等现象是急需解决的技术问题。Therefore, how to prevent the touch electrode covering the surface touch panel from being easily scratched or peeled off is a technical problem that needs to be solved urgently.
发明内容Summary of the invention
本发明实施例提供一种覆盖表面式触摸屏、其制作方法及显示装置,用 以解决现有技术中存在的覆盖表面式触摸屏的触控电极容易发生划伤或脱落等现象的问题。The embodiment of the invention provides a cover-type touch screen, a manufacturing method thereof and a display device, which are used to solve the problem that the touch electrode covering the surface touch screen in the prior art is prone to scratching or falling off.
本发明实施例提供了一种覆盖表面式触摸屏的制作方法,包括:Embodiments of the present invention provide a method for fabricating a cover type touch screen, including:
在衬底基板上形成触控电极层的图形;Forming a pattern of the touch electrode layer on the base substrate;
在形成所述触控电极层的图形之前或之后,采用形成所述触控电极层的掩模板,在所述衬底基板上所述触控电极层的图形之外的区域,形成保护层的图形。Before or after forming the pattern of the touch electrode layer, a mask layer forming the touch electrode layer is used to form a protective layer on a region other than the pattern of the touch electrode layer on the base substrate. Graphics.
在一种可能的实现方式中,在本发明实施例提供的上述覆盖表面式触摸屏的制作方法中,所述在衬底基板上形成触控电极层的图形,包括:In a possible implementation manner, in the method for fabricating the touch surface type touch panel provided by the embodiment of the present invention, the forming a pattern of the touch electrode layer on the base substrate includes:
在所述衬底基板上形成触控电极层,以及在所述触控电极层之上形成第一光刻胶层;Forming a touch electrode layer on the base substrate, and forming a first photoresist layer on the touch electrode layer;
使用一掩模板对所述第一光刻胶层进行光刻,以得到所述第一光刻胶层的图形;Photolithography is performed on the first photoresist layer using a mask to obtain a pattern of the first photoresist layer;
采用刻蚀工艺对所述触控电极层进行处理之后,除所述第一光刻胶层的图形,以得到所述触控电极层的图形。After the touch electrode layer is processed by an etching process, the pattern of the first photoresist layer is removed to obtain a pattern of the touch electrode layer.
在一种可能的实现方式中,在本发明实施例提供的上述覆盖表面式触摸屏的制作方法中,所述采用形成所述触控电极层的掩模板,在所述衬底基板上所述触控电极层的图形之外的区域,形成保护层的图形,包括:In a possible implementation manner, in the manufacturing method of the above-mentioned cover surface type touch screen provided by the embodiment of the present invention, the mask formed by the touch electrode layer is used, and the touch is performed on the base substrate. A region other than the pattern of the control electrode layer forms a pattern of the protective layer, including:
在所述衬底基板上形成一层绝缘层,以及在所述绝缘层上形成一层与所述第一光刻胶层的感光性相反的第二光刻胶层;Forming an insulating layer on the base substrate, and forming a second photoresist layer on the insulating layer opposite to the photosensitive property of the first photoresist layer;
采用所述掩模板对所述第二光刻胶层进行光刻,以得到所述第二光刻胶层的图形;Performing photolithography on the second photoresist layer by using the mask to obtain a pattern of the second photoresist layer;
采用刻蚀工艺对所述绝缘层进行处理之后,去除所述第二光刻胶层的图形,得到的所述绝缘层的图形作为所述保护层的图形。After the insulating layer is processed by an etching process, the pattern of the second photoresist layer is removed, and the obtained pattern of the insulating layer is used as a pattern of the protective layer.
在一种可能的实现方式中,在本发明实施例提供的上述覆盖表面式触摸屏的制作方法中,所述采用形成所述触控电极层的掩模板,在所述衬底基板上所述触控电极层的图形之外的区域,形成保护层的图形,包括:In a possible implementation manner, in the manufacturing method of the above-mentioned cover surface type touch screen provided by the embodiment of the present invention, the mask formed by the touch electrode layer is used, and the touch is performed on the base substrate. A region other than the pattern of the control electrode layer forms a pattern of the protective layer, including:
在所述衬底基板上形成一层与所述第一光刻胶层的感光性相反的第二光刻胶层;Forming a second photoresist layer opposite to the photosensitive property of the first photoresist layer on the base substrate;
采用所述掩模板对所述第二光刻胶层进行光刻,得到的所述第二光刻胶层的图形作为所述保护层的图形。The second photoresist layer is photolithographically patterned using the mask, and the obtained pattern of the second photoresist layer is used as a pattern of the protective layer.
在一种可能的实现方式中,在本发明实施例提供的上述覆盖表面式触摸屏的制作方法中,所述掩模板的图形与所述触控电极层的图形一致时,所述第一光刻胶层采用正性光刻胶;In a possible implementation manner, in the method for fabricating the overlay surface touch panel provided by the embodiment of the present invention, when the pattern of the mask is consistent with the pattern of the touch electrode layer, the first photolithography The adhesive layer uses a positive photoresist;
所述掩模板的图形与所述触控电极层的图形互补时,所述第一光刻胶层采用负性光刻胶。When the pattern of the mask is complementary to the pattern of the touch electrode layer, the first photoresist layer is made of a negative photoresist.
本发明实施例还提供了一种覆盖表面式触摸屏,包括:衬底基板,位于所述衬底基板之上的触控电极层,以及位于所述衬底基板上所述触控电极层的图形之外区域的保护层。The embodiment of the invention further provides a cover-surface touch screen, comprising: a base substrate, a touch electrode layer on the base substrate, and a graphic on the touch electrode layer on the base substrate The protective layer of the outer area.
在一种可能的实现方式中,在本发明实施例提供的上述覆盖表面式触摸屏中,所述保护层由透明材料构成。In a possible implementation manner, in the above-mentioned cover surface type touch screen provided by the embodiment of the invention, the protective layer is composed of a transparent material.
在一种可能的实现方式中,在本发明实施例提供的上述覆盖表面式触摸屏中,所述保护层由聚二甲基硅氧烷材料构成。In a possible implementation manner, in the above-mentioned cover surface type touch screen provided by the embodiment of the invention, the protective layer is composed of a polydimethylsiloxane material.
在一种可能的实现方式中,在本发明实施例提供的上述覆盖表面式触摸屏中,所述保护层的厚度小于或等于所述触控电极层的厚度。In a possible implementation manner, in the above-mentioned cover surface type touch screen provided by the embodiment of the present invention, the thickness of the protective layer is less than or equal to the thickness of the touch electrode layer.
本发明实施例还提供了一种显示装置,包括:上述覆盖表面式触摸屏。The embodiment of the invention further provides a display device comprising: the above-mentioned cover surface type touch screen.
本发明有益效果如下:The beneficial effects of the present invention are as follows:
本发明实施例提供的覆盖表面式触摸屏、其制作方法及显示装置,该覆盖表面式触摸屏的制作方法包括:在衬底基板上形成触控电极层的图形;在形成触控电极层的图形之前或之后,采用形成触控电极层的掩模板,在衬底基板上触控电极层的图形之外的区域,形成保护层的图形。本发明实施例提供的覆盖表面式触摸屏的制作方法,通过采用形成触控电极层的掩模板,在衬底基板上触控电极层的图形之外的区域,形成保护层的图形,在不增加掩模板成本的基础上,降低了由触控电极引起的段差,且保护层与触控电极和 衬底基板之间存在一定的粘性,增加了触控电极与衬底基板之间的粘性,因而可以防止触控电极发生脱落,也改善了在清洗、切割以及压力测试等工艺过程中,触控电极容易被划伤或残存颗粒等问题。The cover surface touch screen provided by the embodiment of the invention, the manufacturing method thereof and the display device, the method for manufacturing the cover surface touch screen comprises: forming a pattern of the touch electrode layer on the base substrate; before forming the pattern of the touch electrode layer Or afterwards, a mask of the touch electrode layer is formed, and a pattern of the protective layer is formed on a region other than the pattern of the touch electrode layer on the base substrate. The method for fabricating a cover-type touch screen provided by the embodiment of the present invention forms a pattern of a protective layer on a substrate other than a pattern of a touch electrode layer on the base substrate by using a mask formed with a touch electrode layer, without increasing On the basis of the cost of the reticle, the step difference caused by the touch electrode is reduced, and the protective layer has a certain viscosity between the touch electrode and the substrate, which increases the viscosity between the touch electrode and the substrate. It can prevent the touch electrode from falling off, and also improves the problem that the touch electrode is easily scratched or remains in the process of cleaning, cutting and stress testing.
附图说明DRAWINGS
图1a和图1b分别为现有技术中覆盖表面式触摸屏的截面图和俯视图;1a and 1b are respectively a cross-sectional view and a top view of a cover surface type touch screen in the prior art;
图2为本发明实施例提供的覆盖表面式触摸屏的制作方法的流程图;2 is a flowchart of a method for fabricating a cover surface touch screen according to an embodiment of the present invention;
图3a和图3b分别为本发明实施例提供的覆盖表面式触摸屏的截面图和俯视图;3a and 3b are respectively a cross-sectional view and a top view of a cover surface type touch screen provided by an embodiment of the present invention;
图4a为本发明实施例中形成触控电极层的图形的制作方法的流程图;4a is a flowchart of a method for fabricating a pattern for forming a touch electrode layer according to an embodiment of the present invention;
图4b和图4c分别为本发明实施例中形成保护层的图形的制作方法的流程图;4b and 4c are respectively a flowchart of a method for fabricating a pattern for forming a protective layer in an embodiment of the present invention;
图5a~图5f分别为根据本发明一些实施例中的制备方法的结构示意图;5a to 5f are respectively schematic structural views of a preparation method according to some embodiments of the present invention;
图5d'和图5e'分别为根据实现方式二中的制备方法的结构示意图;5d' and 5e' are schematic structural views of a preparation method according to the second embodiment;
图6a~图6e分别为根据本发明另一些实施例中的制备方法的结构示意图;6a-6e are schematic structural views of a preparation method according to another embodiment of the present invention;
图6a'~图6e'分别为根据本发明另一些实施例中的制备方法的结构示意图。6a' to 6e' are schematic structural views respectively showing a preparation method according to another embodiment of the present invention.
其中,101、彩膜基板;102、触控电极;301、衬底基板;302、触控电极层;303、保护层;304、第一光刻胶层;305、掩模板;306、绝缘层;307、第二光刻胶层。Wherein, 101, color film substrate; 102, touch electrode; 301, substrate; 302, touch electrode layer; 303, protective layer; 304, first photoresist layer; 305, mask; 306, insulating layer ; 307, a second photoresist layer.
具体实施方式detailed description
针对现有技术中存在的覆盖表面式触摸屏的触控电极容易发生划伤或脱落等现象的问题,本发明实施例提供了覆盖表面式触摸屏、其制作方法及显示装置。The present invention provides a cover-surface touch screen, a manufacturing method thereof, and a display device, in view of the problem that the touch electrodes of the surface touch panel are easily scratched or peeled off.
下面结合附图,对本发明实施例提供的覆盖表面式触摸屏、其制作方法及显示装置的具体实施方式进行详细地说明。附图中各膜层的厚度和形状不 反映真实比例,目的只是示意说明本发明内容。The specific embodiments of the cover surface touch screen, the manufacturing method thereof and the display device provided by the embodiments of the present invention are described in detail below with reference to the accompanying drawings. The thickness and shape of each film layer in the drawings do not reflect the true scale, and are merely intended to illustrate the present invention.
本发明实施例提供了一种覆盖表面式触摸屏的制作方法,如图2所示,包括:Embodiments of the present invention provide a method for fabricating a cover type touch screen, as shown in FIG. 2, including:
S201、在衬底基板上形成触控电极层的图形;S201, forming a pattern of the touch electrode layer on the base substrate;
S202、在形成触控电极层的图形之前或之后,采用形成触控电极层的掩模板,在衬底基板上触控电极层的图形之外的区域,形成保护层的图形。S202, before or after forming the pattern of the touch electrode layer, using a mask formed by the touch electrode layer, forming a pattern of the protective layer on a region other than the pattern of the touch electrode layer on the base substrate.
本发明实施例提供的覆盖表面式触摸屏的制作方法,通过采用形成触控电极层的掩模板,在衬底基板上触控电极层的图形之外的区域,形成保护层的图形,在不增加掩模板成本的基础上,降低了由触控电极引起的段差,且保护层与触控电极和衬底基板之间存在一定的粘性,增加了触控电极与衬底基板之间的粘性,因而可以防止触控电极发生脱落,也改善了在清洗、切割以及压力测试等工艺过程中,触控电极容易被划伤或残存颗粒等问题。The method for fabricating a cover-type touch screen provided by the embodiment of the present invention forms a pattern of a protective layer on a substrate other than a pattern of a touch electrode layer on the base substrate by using a mask formed with a touch electrode layer, without increasing On the basis of the cost of the reticle, the step difference caused by the touch electrode is reduced, and the protective layer has a certain viscosity between the touch electrode and the substrate, which increases the viscosity between the touch electrode and the substrate. It can prevent the touch electrode from falling off, and also improves the problem that the touch electrode is easily scratched or remains in the process of cleaning, cutting and stress testing.
在上述步骤S201中,在衬底基板上形成触控电极层的图形,由于覆盖表面式触摸屏的触控电极层一般形成于对盒后的彩膜基板上,所以上述衬底基板可以指彩膜基板,且触控电极层形成于彩膜基板背离阵列基板的一侧。In the above step S201, the pattern of the touch electrode layer is formed on the base substrate. Since the touch electrode layer covering the surface touch screen is generally formed on the color filter substrate behind the box, the base substrate may be referred to as a color film. The substrate and the touch electrode layer are formed on a side of the color filter substrate facing away from the array substrate.
在上述步骤S202中,采用形成触控电极层的掩模板制作保护层的图形,即触控电极层与保护层可以采用相同的掩模板制作,相比于二者采用不同的掩模板,节省了制作掩模板的成本。如图3a和图3b所示,在衬底基板301上触控电极层302的图形之外的区域形成保护层303的图形,得到的保护层303的图形与触控电极层302的图形大致互补,也可以理解为保护层303的图形嵌入到各触控电极的间隙处,从图3a中可以明显看出,由于在各触控电极的间隙处形成了保护层303,大大降低了触控电极层302与衬底基板301之间的段差,图3b中,在各触控电极的间隙处不能直接看到衬底基板301,可以明显看出在各触控电极的间隙处为保护层303的图形。此外,由于保护层303与触控电极以及衬底基板301都有一定的粘性,因而提高了触控电极层302与衬底基板301之间的粘附力,可以防止触控电极脱落,也改善了在清洗、切割以及压力测试等工艺过程中,触控电极容易被划伤或残存颗粒等问题。In the above step S202, a pattern of the protective layer is formed by using a mask formed by the touch electrode layer, that is, the touch electrode layer and the protective layer can be formed by using the same mask, and different masks are used compared with the two, thereby saving The cost of making a reticle. As shown in FIG. 3a and FIG. 3b, a pattern other than the pattern of the touch electrode layer 302 on the base substrate 301 forms a pattern of the protective layer 303, and the obtained pattern of the protective layer 303 is substantially complementary to the pattern of the touch electrode layer 302. It can also be understood that the pattern of the protective layer 303 is embedded in the gap of each touch electrode. As is apparent from FIG. 3a, since the protective layer 303 is formed at the gap of each touch electrode, the touch electrode is greatly reduced. The difference between the layer 302 and the substrate 301. In FIG. 3b, the substrate 301 cannot be directly seen at the gap of each touch electrode. It can be clearly seen that the gap between the touch electrodes is the protective layer 303. Graphics. In addition, since the protective layer 303 has a certain viscosity with the touch electrode and the base substrate 301, the adhesion between the touch electrode layer 302 and the base substrate 301 is improved, and the touch electrode can be prevented from falling off and improved. In the processes of cleaning, cutting, and pressure testing, the touch electrodes are easily scratched or residual particles.
上述步骤S202中,形成保护层的图形,可以在形成触控电极层的图形之前,也可以在形成触控电极层的图形之后,此处不对保护层和触控电极层的制作顺序进行限定,以下结合附图,对本发明实施例提供的覆盖表面式触摸屏的制作方法进行详细说明。In the above step S202, the pattern of the protective layer may be formed, and before the pattern of the touch electrode layer is formed, after the pattern of the touch electrode layer is formed, the order of making the protective layer and the touch electrode layer is not limited herein. The method for fabricating the cover surface type touch screen provided by the embodiment of the present invention will be described in detail below with reference to the accompanying drawings.
第一方面,在形成触控电极层的图形之后,形成保护层的图形;In a first aspect, after the pattern of the touch electrode layer is formed, a pattern of the protective layer is formed;
在具体实施时,本发明实施例提供的上述制作方法中,如图4a所示,上述步骤S201,可以包括:In a specific implementation, in the foregoing manufacturing method provided by the embodiment of the present invention, as shown in FIG. 4a, the foregoing step S201 may include:
S201a、在衬底基板301上形成触控电极层302,以及在触控电极层302之上形成第一光刻胶层304,如图5a所示;S201a, forming a touch electrode layer 302 on the base substrate 301, and forming a first photoresist layer 304 on the touch electrode layer 302, as shown in FIG. 5a;
S201b、使用一掩模板305对第一光刻胶层304进行光刻,以得到第一光刻胶层304的图形,如图5b所示;图5b中以第一光刻胶层304采用正性光刻胶为例进行示意,在具体实施时,第一光刻胶层304也可以采用负性光刻胶,当第一光刻胶层304采用负性光刻胶时,掩模板305的图形与图5b所示的掩模板305的图形大致互补,即与将要形成的触控电极层302的图形大致互补;本发明实施例中的光刻工艺,可以包括曝光和显影等工艺;S201b, using a mask 305 to lithography the first photoresist layer 304 to obtain a pattern of the first photoresist layer 304, as shown in FIG. 5b; in FIG. 5b, the first photoresist layer 304 is positive. The photoresist is taken as an example. In the specific implementation, the first photoresist layer 304 may also be a negative photoresist. When the first photoresist layer 304 is a negative photoresist, the mask 305 is The pattern is substantially complementary to the pattern of the mask 305 shown in FIG. 5b, that is, substantially complementary to the pattern of the touch electrode layer 302 to be formed; the photolithography process in the embodiment of the present invention may include processes such as exposure and development;
S201c、采用刻蚀工艺对触控电极层302进行处理之后,去除第一光刻胶层304的图形,以得到触控电极层302的图形,如图5c所示;可以采用刻蚀工艺去除第一光刻胶层304,例如采用干法刻蚀。S201c, after the touch electrode layer 302 is processed by an etching process, the pattern of the first photoresist layer 304 is removed to obtain a pattern of the touch electrode layer 302, as shown in FIG. 5c; A photoresist layer 304 is, for example, dry etched.
在具体实施时,本发明实施例提供的上述制作方法中,上述步骤S202中,采用形成触控电极层的掩模板,在衬底基板上触控电极层的图形之外的区域,形成保护层的图形,至少可以包括以下两种实现方式:In a specific implementation manner, in the above manufacturing method provided by the embodiment of the present invention, in the step S202, a mask layer forming a touch electrode layer is used, and a protective layer is formed on a region other than the pattern of the touch electrode layer on the base substrate. The graphics can include at least the following two implementations:
实现方式一:如图4b所示,包括:Implementation 1: As shown in Figure 4b, including:
S202a、在衬底基板301上形成一层绝缘层306,以及在绝缘层306上形成一层与第一光刻胶层304的感光性相反的第二光刻胶层307,如图5d所示;由于制作保护层303的图形与触控电极层302的图形采用相同的掩模板305,因此,制作保护层303的图形采用的第二光刻胶层307与制作触控电极层302的图形采用的第一光刻胶层304需要感光性相反,才能实现保护层303的图 形与触控电极层302的图形大致互补;由于实施方式一中的步骤S202a是在形成触控电极层302的图形之后执行的,因此,实施方式一中的步骤S202a中,衬底基板301可以指形成有触控电极层302的图形的衬底基板301;S202a, forming an insulating layer 306 on the base substrate 301, and forming a second photoresist layer 307 on the insulating layer 306 opposite to the photosensitive property of the first photoresist layer 304, as shown in FIG. 5d. Since the pattern of the protective layer 303 and the pattern of the touch electrode layer 302 are the same mask 305, the second photoresist layer 307 used for the pattern of the protective layer 303 and the pattern for the touch electrode layer 302 are used. The first photoresist layer 304 needs to be opposite in sensitivity, so that the pattern of the protective layer 303 is substantially complementary to the pattern of the touch electrode layer 302. Since the step S202a in the first embodiment is after the pattern of the touch electrode layer 302 is formed, Executing, in step S202a of Embodiment 1, the base substrate 301 may refer to the base substrate 301 on which the pattern of the touch electrode layer 302 is formed;
S202b、采用掩模板305对第二光刻胶层307进行光刻,以得到第二光刻胶层307的图形,如图5e所示;由于图5b中以第一光刻胶层304采用正性光刻胶为例进行示意,则图5d中以第二光刻胶层307采用负性光刻胶为例进行示意,因而在图5e中,得到的第二光刻胶层307的图形与掩模板305的图形互补;S202b, using the mask 305 to photolithography the second photoresist layer 307 to obtain a pattern of the second photoresist layer 307, as shown in FIG. 5e; since the first photoresist layer 304 is positive in FIG. 5b The photoresist is taken as an example. In FIG. 5d, the second photoresist layer 307 is exemplified by a negative photoresist. Thus, in FIG. 5e, the obtained second photoresist layer 307 is patterned. The patterns of the mask 305 are complementary;
S202c、采用刻蚀工艺对绝缘层306进行处理之后,去除第二光刻胶层307的图形,得到的绝缘层306的图形作为保护层303的图形,如图5f,可以采用刻蚀工艺去除第二光刻胶层307,例如采用干法刻蚀。S202c, after the insulating layer 306 is processed by an etching process, the pattern of the second photoresist layer 307 is removed, and the pattern of the insulating layer 306 is obtained as a pattern of the protective layer 303. As shown in FIG. 5f, the etching process may be used to remove the first layer. The second photoresist layer 307 is, for example, dry etched.
实现方式二:如图4c所示,包括:Implementation 2: As shown in Figure 4c, including:
S202a'在衬底基板301上形成一层与第一光刻胶层304的感光性相反的第二光刻胶层307,如图5d';与上述步骤S202a原理相同,由于制作保护层303的图形与触控电极层302的图形采用相同的掩模板305,因此,制作保护层303的图形采用的第二光刻胶层307与制作触控电极层302的图形采用的第一光刻胶层304需要感光性相反,才能实现保护层303的图形与触控电极层302的图形大致互补;由于实施方式二中的步骤S202a'是在形成触控电极层302的图形之后执行的,因此,实施方式二中的步骤S202a'中,衬底基板301可以指形成有触控电极层302的图形的衬底基板301;S202a' forms a second photoresist layer 307 opposite to the photosensitive property of the first photoresist layer 304 on the base substrate 301, as shown in FIG. 5d'; and is the same as the above step S202a, since the protective layer 303 is formed. The pattern and the touch electrode layer 302 are patterned using the same mask 305. Therefore, the second photoresist layer 307 used for the pattern of the protective layer 303 and the first photoresist layer used for the pattern of the touch electrode layer 302 are formed. The pattern of the protective layer 303 is substantially complementary to the pattern of the touch electrode layer 302; since the step S202a' in the second embodiment is performed after the pattern of the touch electrode layer 302 is formed, the implementation is performed. In step S202a' of the second method, the base substrate 301 may refer to the base substrate 301 on which the pattern of the touch electrode layer 302 is formed;
S202b'采用掩模板305对第二光刻胶层307进行光刻,得到的第二光刻胶层307的图形作为保护层303的图形,如图5e'所示。S202b' lithography of the second photoresist layer 307 by using the mask 305, and the pattern of the second photoresist layer 307 is obtained as a pattern of the protective layer 303, as shown in FIG. 5e'.
上述实现方式一中,以得到的绝缘层的图形作为保护层的图形,可以根据实际需要选取绝缘层的材料,可以选择不导电、耐腐蚀、透光性好以及性能稳定的聚合物有机膜作为绝缘层,优选为透明材料,例如可以采用聚二甲基硅氧烷(polydimethylsiloxane,PDMS),或聚碳酸酯(Polycarbonate,PC)等材料;上述实施方式二中,以得到的第二光刻胶层的图形作为保护层的图 形,只能采用光刻胶材料作为保护层,优选为光透过率较高的光刻胶材料,实施方式二虽然选用的材料受到限制,但是制作工艺较简单。In the above implementation manner 1, the pattern of the obtained insulating layer is used as the pattern of the protective layer, and the material of the insulating layer can be selected according to actual needs, and a polymer organic film which is non-conductive, corrosion-resistant, good in light transmittance, and stable in performance can be selected as the polymer layer. The insulating layer is preferably a transparent material. For example, a material such as polydimethylsiloxane (PDMS) or polycarbonate (PC) may be used. In the second embodiment, the second photoresist is obtained. As a pattern of the protective layer, the pattern of the layer can only be made of a photoresist material as a protective layer, preferably a photoresist material having a high light transmittance. In the second embodiment, although the material selected is limited, the fabrication process is relatively simple.
第二方面,在形成触控电极层的图形之前,形成保护层的图形;In a second aspect, a pattern of the protective layer is formed before the pattern of the touch electrode layer is formed;
在具体实施时,本发明实施例提供的上述制作方法中,上述步骤S202中,采用形成触控电极层的掩模板,在衬底基板上触控电极层的图形之外的区域,形成保护层的图形,至少可以包括以下两种实现方式:In a specific implementation manner, in the above manufacturing method provided by the embodiment of the present invention, in the step S202, a mask layer forming a touch electrode layer is used, and a protective layer is formed on a region other than the pattern of the touch electrode layer on the base substrate. The graphics can include at least the following two implementations:
实现方式三:如图4b所示,包括:Implementation 3: as shown in Figure 4b, including:
S202a、在衬底基板301上形成一层绝缘层306,以及在绝缘层306上形成一层与第一光刻胶层304的感光性相反的第二光刻胶层307,如图6a所示;S202a, forming an insulating layer 306 on the base substrate 301, and forming a second photoresist layer 307 on the insulating layer 306 opposite to the photosensitive property of the first photoresist layer 304, as shown in FIG. 6a. ;
S202b、采用掩模板305对第二光刻胶层307进行光刻,以得到第二光刻胶层307的图形,如图6b所示;图6b中以第二光刻胶层307采用负性光刻胶为例进行示意,在具体实施时,第二光刻胶也可以采用正性光刻胶,当第二光刻胶层307采用正性光刻胶时,掩模板305的图形与图6b所示的掩模板305的图形大致互补,即与将要形成的绝缘层306的图形大致一致。S202b, lithography is performed on the second photoresist layer 307 by using the mask 305 to obtain a pattern of the second photoresist layer 307, as shown in FIG. 6b; and the second photoresist layer 307 is negative in FIG. 6b. The photoresist is exemplified. In the specific implementation, the second photoresist may also be a positive photoresist. When the second photoresist layer 307 is a positive photoresist, the pattern and pattern of the mask 305 are used. The pattern of mask 305 shown in 6b is substantially complementary, i.e., substantially coincident with the pattern of insulating layer 306 to be formed.
S202c、采用刻蚀工艺对绝缘层306进行处理之后,去除第二光刻胶层307的图形,得到的绝缘层306的图形作为保护层303的图形,如图6c所示。S202c, after the insulating layer 306 is processed by an etching process, the pattern of the second photoresist layer 307 is removed, and the pattern of the insulating layer 306 is obtained as a pattern of the protective layer 303, as shown in FIG. 6c.
实现方式四:如图4c所示,包括:Implementation 4: as shown in Figure 4c, including:
S202a'在衬底基板301上形成一层与第一光刻胶层304的感光性相反的第二光刻胶层307,如图6a';S202a' forms a second photoresist layer 307 on the base substrate 301 opposite to the photosensitive property of the first photoresist layer 304, as shown in FIG. 6a';
S202b'采用掩模板305对第二光刻胶层307进行光刻,得到的第二光刻胶层307的图形作为保护层303的图形,如图6b'。S202b' uses a mask 305 to lithography the second photoresist layer 307, and the pattern of the second photoresist layer 307 is used as a pattern of the protective layer 303, as shown in FIG. 6b'.
上述实现方式三中,以得到的绝缘层的图形作为保护层的图形,可以根据实际需要选取绝缘层的材料,可以选择不导电、耐腐蚀、透光性好以及性能稳定的聚合物有机膜作为绝缘层,优选为透明材料,例如聚二甲基硅氧烷或聚碳酸酯等材料;上述实施方式四中,以得到的第二光刻胶层的图形作为保护层的图形,只能采用光刻胶材料作为保护层,优选为光透过率较高的光刻胶材料,实施方式四虽然选用的材料受到限制,但是制作工艺较简单。In the above implementation manner 3, the pattern of the obtained insulating layer is used as the pattern of the protective layer, and the material of the insulating layer can be selected according to actual needs, and a polymer organic film which is non-conductive, corrosion-resistant, good in light transmittance, and stable in performance can be selected as the polymer layer. The insulating layer is preferably a transparent material, such as a material such as polydimethylsiloxane or polycarbonate. In the fourth embodiment, the pattern of the obtained second photoresist layer is used as a pattern of the protective layer, and only light can be used. As the protective layer, the engraved material is preferably a photoresist material having a high light transmittance. In the fourth embodiment, although the selected material is limited, the manufacturing process is relatively simple.
在具体实施时,本发明实施例提供的上述制作方法中,采用上述实施方式三或实施方式四,形成保护层的图形后,采用以下方式形成触控电极层的图形,如图4a所示,上述步骤S201,可以包括:In a specific implementation, in the above manufacturing method provided by the embodiment of the present invention, after the pattern of the protective layer is formed by using the third embodiment or the fourth embodiment, the pattern of the touch electrode layer is formed in the following manner, as shown in FIG. 4a. The above step S201 may include:
S201a、在衬底基板301上形成触控电极层302,以及在触控电极层302之上形成第一光刻胶层304,如图6d和图6c'所示;本实施例中的步骤S201a是在形成保护层303的图形之后执行的,因此,此处的衬底基板301可以指形成有保护层303的衬底基板301;S201a, forming a touch electrode layer 302 on the base substrate 301, and forming a first photoresist layer 304 on the touch electrode layer 302, as shown in FIG. 6d and FIG. 6c'; step S201a in this embodiment Is performed after forming the pattern of the protective layer 303, therefore, the base substrate 301 herein may refer to the base substrate 301 formed with the protective layer 303;
S201b、使用一掩模板305对第一光刻胶层304进行光刻,以得到第一光刻胶层304的图形,如图6e和图6d'所示;S201b, using a mask 305 to lithography the first photoresist layer 304 to obtain a pattern of the first photoresist layer 304, as shown in FIG. 6e and FIG. 6d';
S201c、采用刻蚀工艺对触控电极层302进行处理之后,去除第一光刻胶层304的图形,以得到触控电极层302的图形,如图5f和图6e'所示。S201c, after the touch electrode layer 302 is processed by an etching process, the pattern of the first photoresist layer 304 is removed to obtain a pattern of the touch electrode layer 302, as shown in FIG. 5f and FIG. 6e'.
图6d~图6e为以绝缘层306的图形作为保护层303的图形的结构示意图,图6c'~图6e'为以第二光刻胶层307的图形作为保护层303的图形的结构示意图。6d to 6e are schematic views showing the structure of the pattern of the insulating layer 306 as the protective layer 303, and FIGS. 6c' to 6e' are structural diagrams of the pattern of the second photoresist layer 307 as the protective layer 303.
在具体实施时,本发明实施例提供的上述制作方法中,掩模板的图形与触控电极层的图形一致时,第一光刻胶层采用正性光刻胶;In a specific implementation manner, in the above manufacturing method provided by the embodiment of the present invention, when the pattern of the mask is consistent with the pattern of the touch electrode layer, the first photoresist layer is a positive photoresist;
掩模板的图形与触控电极层的图形互补时,第一光刻胶层采用负性光刻胶。When the pattern of the mask is complementary to the pattern of the touch electrode layer, the first photoresist layer is made of a negative photoresist.
正性光刻胶和负性光刻胶的构图原理如下:The principle of patterning of positive photoresist and negative photoresist is as follows:
正性光刻胶曝光后,与掩模板的透光区域对应的正性光刻胶被光线照射后,形成可溶于显影液的物质,而掩模板的非透光区域对应的正性光刻胶没有被光线照射,其溶解性没有发生变化,不溶于显影液,曝光后,采用显影液对曝光后的正性光刻胶进行处理,使对应透光区域的正性光刻胶溶于显影液,得到的正性光刻胶层的图形与掩模板的非透光区域的图形一致,即与掩模板的图形大致一致。After the positive photoresist is exposed, the positive photoresist corresponding to the transparent region of the mask is irradiated with light to form a substance soluble in the developer, and the non-transparent region of the mask corresponds to positive lithography. The glue is not irradiated with light, its solubility does not change, it is insoluble in the developer, and after exposure, the exposed positive photoresist is treated with a developing solution to dissolve the positive photoresist corresponding to the transparent region. For the liquid, the pattern of the obtained positive photoresist layer coincides with the pattern of the non-transmissive region of the mask, that is, substantially conforms to the pattern of the mask.
负性光刻胶曝光后,与掩模板的透光区域对应的负性光刻胶被光线照射后,发生固化形成不溶于显影液的物质,而掩模板的非透光区域对应的负性 光刻胶没有被光线照射,其溶解性没有发生变化,可以溶于显影液,曝光后,采用负性光刻胶对应的显影液对负性光刻胶进行处理,使对应非透光区域的负性光刻胶溶于显影液,得到的负性光刻胶层的图形与掩模板的透光区的图形一致,即与掩模板的图形大致互补。After the negative photoresist is exposed, the negative photoresist corresponding to the light-transmitting region of the mask is irradiated with light, and then solidified to form a substance insoluble in the developer, and the negative light corresponding to the non-transparent region of the mask The engraved glue is not irradiated with light, its solubility does not change, and it can be dissolved in the developing solution. After exposure, the negative photoresist is treated with a developer corresponding to the negative photoresist to make the corresponding non-transparent region negative. The photoresist is dissolved in the developer, and the pattern of the negative photoresist layer obtained is identical to the pattern of the light-transmissive region of the mask, that is, substantially complementary to the pattern of the mask.
在具体实施时,掩模板的图形与触控电极层的图形一致时,第一光刻胶层采用正性光刻胶;当掩模板的图形与触控电极层的图形一致时,第一光刻胶层采用正性光刻胶,才能得到与掩模板的图形一致的触控电极层的图形,后续制作保护层的图形时,第二光刻胶层采用负性光刻胶才能得到与触控电极层的图形互补的保护层。In a specific implementation, when the pattern of the mask is consistent with the pattern of the touch electrode layer, the first photoresist layer is a positive photoresist; when the pattern of the mask is consistent with the pattern of the touch electrode layer, the first light The positive photoresist is used to obtain the pattern of the touch electrode layer in accordance with the pattern of the mask. When the pattern of the protective layer is subsequently formed, the second photoresist layer can be obtained by using a negative photoresist. A patterned complementary protective layer of the control electrode layer.
掩模板的图形与触控电极层的图形互补时,第一光刻胶层采用负性光刻胶。当掩模板的图形与触控电极层的图形互补时,第一光刻胶层采用负性光刻胶,才能得到与掩模板的图形互补的触控电极层的图形,后续制作保护层的图形时,第二光刻胶层采用正性光刻胶才能得到与触控电极层的图形互补的保护层。When the pattern of the mask is complementary to the pattern of the touch electrode layer, the first photoresist layer is made of a negative photoresist. When the pattern of the mask is complementary to the pattern of the touch electrode layer, the first photoresist layer is made of a negative photoresist to obtain a pattern of the touch electrode layer complementary to the pattern of the mask, and the pattern of the protective layer is subsequently formed. The second photoresist layer uses a positive photoresist to obtain a protective layer complementary to the pattern of the touch electrode layer.
基于同一发明构思,本发明实施例还提供了一种覆盖表面式触摸屏,由于该覆盖表面式触摸屏解决问题的原理与上述覆盖表面式触摸屏的制作方法相似,因此该覆盖表面式触摸屏的实施可以参见上述覆盖表面式触摸屏的制作方法的实施,重复之处不再赘述。Based on the same inventive concept, the embodiment of the present invention further provides a cover-surface touch screen. Since the principle of solving the problem by the cover-surface touch screen is similar to the method for fabricating the cover-surface touch screen, the implementation of the cover-surface touch screen can be seen. The implementation of the method for fabricating the above-mentioned cover surface type touch screen will not be repeated here.
本发明实施例还提供了一种覆盖表面式触摸屏,如图3a所示,包括:衬底基板301,位于衬底基板301之上的触控电极层302,以及位于衬底基板301上触控电极层302的图形之外区域的保护层303。The embodiment of the present invention further provides a cover type touch screen, as shown in FIG. 3a, comprising: a base substrate 301, a touch electrode layer 302 on the base substrate 301, and a touch on the base substrate 301. A protective layer 303 of a region outside the pattern of the electrode layer 302.
本发明实施例提供的覆盖表面式触摸屏,在衬底基板301上触控电极层302的图形之外的区域,设置保护层303,降低了由触控电极引起的段差,且保护层303与触控电极和衬底基板301之间存在一定的粘性,增加了触控电极与衬底基板301之间的粘性,因而可以防止触控电极发生脱落,也改善了在清洗、切割以及压力测试等工艺过程中,触控电极容易被划伤或残存颗粒等问题。In the cover surface type touch screen provided by the embodiment of the present invention, a protective layer 303 is disposed on a region other than the pattern of the touch electrode layer 302 on the base substrate 301, the step difference caused by the touch electrode is reduced, and the protective layer 303 is touched. There is a certain viscosity between the control electrode and the base substrate 301, which increases the viscosity between the touch electrode and the base substrate 301, thereby preventing the touch electrode from falling off, and improving the processes of cleaning, cutting, and stress testing. In the process, the touch electrode is easily scratched or remains of particles.
在实际应用中,为了避免保护层303影响正常显示,保护层303优选为由透明材料构成。具体地,保护层303可以由聚二甲基硅氧烷材料构成,也可以由其他材料构成,此处不对保护层303的材料进行限定。In practical applications, in order to prevent the protective layer 303 from affecting the normal display, the protective layer 303 is preferably made of a transparent material. Specifically, the protective layer 303 may be composed of a polydimethylsiloxane material or may be composed of other materials, and the material of the protective layer 303 is not limited herein.
进一步地,本发明实施例提供的上述触摸屏中,保护层303的厚度小于或等于触控电极层302的厚度。Further, in the above touch screen provided by the embodiment of the present invention, the thickness of the protective layer 303 is less than or equal to the thickness of the touch electrode layer 302.
将保护层303的厚度设置为小于或等于触控电极层302的厚度,优选为略低于触控电极层302的厚度,可以避免保护层303的太厚而增大显示屏的厚度,也可以避免由于保护层303太厚而影响显示屏的显示效果。The thickness of the protective layer 303 is set to be less than or equal to the thickness of the touch electrode layer 302, preferably slightly lower than the thickness of the touch electrode layer 302, so that the thickness of the protective layer 303 is prevented from being too thick to increase the thickness of the display screen. Avoid affecting the display effect of the display screen because the protective layer 303 is too thick.
基于同一发明构思,本发明实施例还提供了一种显示装置,包括上述覆盖表面式触摸屏,该显示装置可以应用于手机、平板电脑、电视机、显示器、笔记本电脑、数码相框、导航仪等任何具有显示功能的产品或部件。由于该显示装置解决问题的原理与上述覆盖表面式触摸屏相似,因此该显示装置的实施可以参见上述覆盖表面式触摸屏的实施,重复之处不再赘述。Based on the same inventive concept, an embodiment of the present invention further provides a display device, including the above-mentioned cover surface type touch screen, which can be applied to any mobile phone, tablet computer, television, display, notebook computer, digital photo frame, navigation device, and the like. A product or part that has a display function. Since the principle of solving the problem of the display device is similar to that of the above-mentioned cover surface type touch screen, the implementation of the display device can be referred to the implementation of the above-mentioned cover surface type touch screen, and the repeated description is omitted.
本发明实施例提供的覆盖表面式触摸屏、其制作方法及显示装置,通过采用形成触控电极层的掩模板,在衬底基板上触控电极层的图形之外的区域,形成保护层的图形,在不增加掩模板成本的基础上,降低了由触控电极引起的段差,且保护层与触控电极和衬底基板之间存在一定的粘性,增加了触控电极与衬底基板之间的粘性,因而可以防止触控电极发生脱落,也改善了在清洗、切割以及压力测试等工艺过程中,触控电极容易被划伤或残存颗粒等问题。The cover surface type touch screen provided by the embodiment of the invention, the manufacturing method thereof and the display device form a pattern of the protective layer by using a mask plate forming the touch electrode layer on a region other than the pattern of the touch electrode layer on the base substrate On the basis of not increasing the cost of the mask, the step difference caused by the touch electrodes is reduced, and there is a certain viscosity between the protective layer and the touch electrodes and the substrate, which increases the gap between the touch electrodes and the substrate. The stickiness prevents the touch electrodes from falling off, and also improves the problem that the touch electrodes are easily scratched or left in the process of cleaning, cutting, and stress testing.
显然,本领域的技术人员可以对本发明进行各种改动和变型而不脱离本发明的精神和范围。这样,倘若本发明的这些修改和变型属于本发明权利要求及其等同技术的范围之内,则本发明也意图包含这些改动和变型在内。It is apparent that those skilled in the art can make various modifications and variations to the invention without departing from the spirit and scope of the invention. Thus, it is intended that the present invention cover the modifications and modifications of the invention

Claims (10)

  1. 一种覆盖表面式触摸屏的制作方法,其特征在于,包括:A method for manufacturing a cover type touch screen, comprising:
    在衬底基板上形成触控电极层的图形;Forming a pattern of the touch electrode layer on the base substrate;
    在形成所述触控电极层的图形之前或之后,采用形成所述触控电极层的掩模板,在所述衬底基板上所述触控电极层的图形之外的区域,形成保护层的图形。Before or after forming the pattern of the touch electrode layer, a mask layer forming the touch electrode layer is used to form a protective layer on a region other than the pattern of the touch electrode layer on the base substrate. Graphics.
  2. 如权利要求1所述的制作方法,其特征在于,所述在衬底基板上形成触控电极层的图形,包括:The method of claim 1 , wherein the forming a pattern of the touch electrode layer on the substrate comprises:
    在所述衬底基板上形成触控电极层,以及在所述触控电极层之上形成第一光刻胶层;Forming a touch electrode layer on the base substrate, and forming a first photoresist layer on the touch electrode layer;
    使用一掩模板对所述第一光刻胶层进行光刻,以得到所述第一光刻胶层的图形;Photolithography is performed on the first photoresist layer using a mask to obtain a pattern of the first photoresist layer;
    采用刻蚀工艺对所述触控电极层进行处理之后,除所述第一光刻胶层的图形,以得到所述触控电极层的图形。After the touch electrode layer is processed by an etching process, the pattern of the first photoresist layer is removed to obtain a pattern of the touch electrode layer.
  3. 如权利要求2所述的制作方法,其特征在于,所述采用形成所述触控电极层的掩模板,在所述衬底基板上所述触控电极层的图形之外的区域,形成保护层的图形,包括:The manufacturing method according to claim 2, wherein the mask formed by the touch electrode layer is formed on the substrate substrate in a region other than the pattern of the touch electrode layer Layer graphics, including:
    在所述衬底基板上形成一层绝缘层,以及在所述绝缘层上形成一层与所述第一光刻胶层的感光性相反的第二光刻胶层;Forming an insulating layer on the base substrate, and forming a second photoresist layer on the insulating layer opposite to the photosensitive property of the first photoresist layer;
    采用所述掩模板对所述第二光刻胶层进行光刻,以得到所述第二光刻胶层的图形;Performing photolithography on the second photoresist layer by using the mask to obtain a pattern of the second photoresist layer;
    采用刻蚀工艺对所述绝缘层进行处理之后,去除所述第二光刻胶层的图形,得到的所述绝缘层的图形作为所述保护层的图形。After the insulating layer is processed by an etching process, the pattern of the second photoresist layer is removed, and the obtained pattern of the insulating layer is used as a pattern of the protective layer.
  4. 如权利要求2所述的制作方法,其特征在于,所述采用形成所述触控电极层的掩模板,在所述衬底基板上所述触控电极层的图形之外的区域,形成保护层的图形,包括:The manufacturing method according to claim 2, wherein the mask formed by the touch electrode layer is formed on the substrate substrate in a region other than the pattern of the touch electrode layer Layer graphics, including:
    在所述衬底基板上形成一层与所述第一光刻胶层的感光性相反的第二光刻胶层;Forming a second photoresist layer opposite to the photosensitive property of the first photoresist layer on the base substrate;
    采用所述掩模板对所述第二光刻胶层进行光刻,得到的所述第二光刻胶层的图形作为所述保护层的图形。The second photoresist layer is photolithographically patterned using the mask, and the obtained pattern of the second photoresist layer is used as a pattern of the protective layer.
  5. 如权利要求1~4任一项所述的制作方法,其特征在于,所述掩模板的图形与所述触控电极层的图形一致时,所述第一光刻胶层采用正性光刻胶;The manufacturing method according to any one of claims 1 to 4, wherein when the pattern of the mask is consistent with the pattern of the touch electrode layer, the first photoresist layer is positively patterned. gum;
    所述掩模板的图形与所述触控电极层的图形互补时,所述第一光刻胶层采用负性光刻胶。When the pattern of the mask is complementary to the pattern of the touch electrode layer, the first photoresist layer is made of a negative photoresist.
  6. 一种覆盖表面式触摸屏,其特征在于,包括:衬底基板,位于所述衬底基板之上的触控电极层,以及位于所述衬底基板上所述触控电极层的图形之外区域的保护层。A cover-type touch screen, comprising: a base substrate, a touch electrode layer on the base substrate, and a region outside the graphic of the touch electrode layer on the base substrate Protective layer.
  7. 如权利要求6所述的触摸屏,其特征在于,所述保护层由透明材料构成。The touch screen of claim 6 wherein said protective layer is comprised of a transparent material.
  8. 如权利要求7所述的触摸屏,其特征在于,所述保护层由聚二甲基硅氧烷材料构成。The touch screen of claim 7 wherein said protective layer is comprised of a polydimethylsiloxane material.
  9. 如权利要求6~8任一项所述的触摸屏,其特征在于,所述保护层的厚度小于或等于所述触控电极层的厚度。The touch screen according to any one of claims 6 to 8, wherein the thickness of the protective layer is less than or equal to the thickness of the touch electrode layer.
  10. 一种显示装置,其特征在于,包括:如权利要求6~9任一项所述的覆盖表面式触摸屏。A display device comprising: the cover surface type touch screen according to any one of claims 6 to 9.
PCT/CN2018/086383 2017-06-14 2018-05-10 Surface covering touch screen, manufacturing method therefor, and display device WO2018228098A1 (en)

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CN107272950A (en) * 2017-06-14 2017-10-20 京东方科技集团股份有限公司 One kind covering surface-type touch-screen, its preparation method and display device
CN113778259B (en) * 2021-08-25 2024-04-12 京东方科技集团股份有限公司 Touch structure, manufacturing method, display panel and display device

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