WO2018221288A1 - Capteur, panneau tactile et dispositif électronique - Google Patents

Capteur, panneau tactile et dispositif électronique Download PDF

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Publication number
WO2018221288A1
WO2018221288A1 PCT/JP2018/019461 JP2018019461W WO2018221288A1 WO 2018221288 A1 WO2018221288 A1 WO 2018221288A1 JP 2018019461 W JP2018019461 W JP 2018019461W WO 2018221288 A1 WO2018221288 A1 WO 2018221288A1
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WIPO (PCT)
Prior art keywords
electrode
sensor
piezoelectric film
slit
touch panel
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PCT/JP2018/019461
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English (en)
Japanese (ja)
Inventor
一将 高橋
しおり 長森
Original Assignee
株式会社村田製作所
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Publication date
Application filed by 株式会社村田製作所 filed Critical 株式会社村田製作所
Priority to JP2019522124A priority Critical patent/JP6624343B2/ja
Publication of WO2018221288A1 publication Critical patent/WO2018221288A1/fr

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    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means

Definitions

  • An embodiment of the present invention relates to a sensor for detecting a pressing position or pressing information on a panel, a touch panel using the sensor, and an electronic device.
  • Patent Document 1 electrodes are formed on the first main surface and the second main surface of the polylactic acid film, and the electrodes on the first main surface are divided into at least four electrically divided portions.
  • a touch panel that is an electrode is disclosed.
  • transparency is improved by providing a transparent electrode on a polylactic acid film, and not only position information but also pressing information is obtained at the same time.
  • an object of an embodiment of the present invention is to provide a sensor, a touch panel, and an electronic device that are less affected by a position where a pressing operation is applied and have high flexibility and detection sensitivity.
  • a sensor includes a piezoelectric film, a first electrode disposed on a first main surface of the piezoelectric film, and a position facing at least the first electrode on a second main surface of the piezoelectric film.
  • the slit is provided in the piezoelectric film, when the piezoelectric film is deformed by the pressing operation, it is affected by the region divided by the slit. Since the slit is provided around the first electrode, the area where the first electrode is arranged follows the shape of the area divided by the slit provided around the first electrode when a pressing operation is accepted. How to distort. Thereby, the area
  • positioned carries out the same way of distortion even if any position is a case where pressing operation is received. Therefore, it is possible to reduce the influence due to the position where the pressing operation is received and improve the detection sensitivity. Moreover, since the slit is provided in the piezoelectric film, the flexibility of the piezoelectric film is increased and the flexibility can be improved.
  • FIG. 1A is a perspective view of an electronic apparatus 1 including a press detection sensor 3 according to the first embodiment.
  • FIG. 1B is a cross-sectional view of the electronic device 1 according to the first embodiment cut along an XZ plane.
  • FIG. 2 is an exploded perspective view of the sensor 10 according to the first embodiment.
  • FIG. 3A is a schematic cross-sectional view of the sensor 10 according to the first embodiment.
  • FIG. 3B is a plan view of the sensor 10 according to the first embodiment.
  • FIG. 4 is a view for explaining the piezoelectric film 20 according to the first embodiment.
  • FIG. 5A is a diagram for explaining a deformation when the sensor 101 according to the related art receives a pressing operation.
  • FIG. 5A is a diagram for explaining a deformation when the sensor 101 according to the related art receives a pressing operation.
  • FIG. 5B is a diagram for explaining a deformation when the sensor 10 according to the first embodiment receives a pressing operation.
  • FIGS. 6A to 6C are views for explaining a modification of the sensor 10 according to the first embodiment.
  • FIG. 7A is a plan view of the sensor 110 according to the second embodiment.
  • FIG. 7B is an exploded perspective view of the sensor 110 according to the second embodiment.
  • FIG. 8 is a view for explaining the piezoelectric film 120 according to the second embodiment.
  • FIG. 9A is a schematic diagram showing a strain distribution of the sensor 110 when a load is applied to the center of the touch panel, and FIG. It is a schematic diagram which shows the distortion distribution of the sensor 110 in the case of.
  • FIGS. 10A to 10C are diagrams showing regions in which the output is 0 when the sensor 110 according to the second embodiment receives a pressing operation.
  • FIG. 11 is a simulation model of how the touch panel is distorted.
  • FIG. 12 is a graph showing the electrode position from the origin and the amount of shear distortion at the electrode position.
  • FIG. 1A is a perspective view of an electronic device 1 including a press detection sensor 3 according to the first embodiment.
  • FIG. 1B is a cross-sectional view of the electronic device 1 cut along the XZ plane. Note that the electronic device 1 illustrated in FIGS. 1A and 1B is merely an example, and is not limited thereto, and can be changed as appropriate according to specifications.
  • the electronic apparatus 1 includes a substantially rectangular parallelepiped housing 2 having an open top surface.
  • the electronic device 1 includes a flat plate-shaped press detection sensor 3 disposed in an opening on the upper surface of the housing 2.
  • the press detection sensor 3 functions as an operation surface on which a user performs a pressing operation using a finger or a pen.
  • the pressure detection sensor 3 includes a protective sheet 4, a sensor 10, and a detection unit 6.
  • the protective sheet 4 is made of a flexible material. For this reason, when the user performs a pressing operation on the protective sheet 4, the strain applied to the protective sheet 4 is transmitted to the sensor 10.
  • the detection unit 6 is disposed inside the housing 2 and is connected to the sensor 10 via a wiring (not shown).
  • the detection unit 6 detects the voltage output from the sensor 10.
  • the detection unit 6 may be at any position as long as it is inside the housing 2.
  • the width direction (lateral direction) of the housing 2, that is, the press detection sensor 3 is defined as the X direction
  • the length direction (vertical direction) is defined as the Y direction
  • the thickness direction is described as the Z direction.
  • FIG. 2 is an exploded perspective view of the sensor 10 according to the first embodiment.
  • the resin base material and wiring are omitted.
  • the sensor 10 includes a piezoelectric film 20, a first electrode 21, a second electrode 22, a first adhesive portion 23, and a second adhesive portion 24.
  • the plurality of first electrodes 21 are arranged on the same plane.
  • the plurality of second electrodes 22 are also arranged on the same plane.
  • the first electrode 21 is disposed on the first main surface 11 of the piezoelectric film 20.
  • the second electrode 22 is disposed on the second main surface of the piezoelectric film 20 that is the back side of the first main surface 11.
  • the first adhesive portion 23 is disposed between the first electrode 21 and the piezoelectric film 20 and attaches the first electrode 21 to the piezoelectric film 20.
  • the second adhesive portion 24 is disposed between the second electrode 22 and the piezoelectric film 20 and attaches the second electrode 22 to the piezoelectric film 20.
  • a plurality of the first electrodes 21 and the second electrodes 22 are arranged with a space between each other.
  • the second electrode 22 is disposed at a position facing the first electrode 21 through the piezoelectric film 20.
  • the second electrode 22 is a so-called ground electrode.
  • the first electrode 21 and the second electrode 22 detect charges generated from the piezoelectric film 20.
  • positioning with respect to the piezoelectric film 20 of the 1st electrode 21 and the 2nd electrode 22 can be suitably deform
  • the second electrode 22 When the sensor 10 is viewed in plan, the second electrode 22 may be completely overlapped with the piezoelectric film 20 in a top view or may be located on the inner side in the plane direction from the piezoelectric film 20. Thereby, the short circuit in the edge part of an electrode can be suppressed.
  • the second electrode 22 only needs to be disposed at a position facing at least the first electrode 21, and may be a single electrode that covers the entire piezoelectric film 20. Thereby, since the 2nd electrode 22 is one piece, a manufacturing process becomes simple.
  • FIG. 3A is a schematic cross-sectional view of the sensor 10.
  • FIG. 3B is a plan view of the sensor 10. In FIG. 3B, only the first electrode 21 and the piezoelectric film 20 are shown, and other members are omitted.
  • the sensor 10 may include a resin base material 25 and a resin base material 26. Thereby, the 1st electrode 21 and the 2nd electrode 22 are protected, and durability increases. Moreover, the sensor 10 can be affixed to the protective sheet 4 by further providing an adhesive part on the outer side of one of the resin substrate 25 and the resin substrate 26.
  • the piezoelectric film 20 includes a plurality of slits 15.
  • Each slit 15 is provided around the first electrode 21.
  • each slit 15 is formed so as to surround the first electrode 21.
  • the piezoelectric film 20 can be divided by the slits 15 for each first electrode 21.
  • each slit 15 is a plurality of straight lines, it is easy to form.
  • the region formed so as to be surrounded by the plurality of slits 15 is preferably larger than the first electrode 21. That is, it is preferable that the end portion of the region formed so as to be surrounded by the plurality of slits 15 in plan view is outside the end portion of the first electrode 21. If the areas of the regions formed so as to be surrounded by the first electrode 21 and the slit 15 are the same (overlapping in plan view), the first electrode 21 and the slit are slightly caused by distortion of the first electrode 21 and the slit 15. There is a possibility that the 15 positional relationships interfere with each other.
  • the press detection sensor 3 When the press detection sensor 3 is pressed, if the slit 15 is slightly enlarged and the gap is widened, the area of the piezoelectric film 20 immediately below the first electrode 21 is reduced. As a result, there is a possibility that charges that should be detected are not sufficiently detected. On the other hand, when the region formed so as to be surrounded by the plurality of slits 15 is larger than the first electrode 21, a proper charge is detected without the positional relationship between the first electrode 21 and the slit 15 interfering. .
  • the region divided for each first electrode 21 by the slit 15 is formed in a rectangular shape.
  • the region divided by the slit 15 has a short side direction and a long side direction.
  • the short side direction is a direction along the X direction
  • the long side direction is a direction along the Y direction.
  • the region in which the first electrode 21 is arranged has the same distortion regardless of which position receives the pressing operation.
  • the aspect ratio of the piezoelectric film 20 can be substantially adjusted. For this reason, by adjusting how the piezoelectric film 20 is distorted, the detection sensitivity can be improved by reducing the area where the charge opposite to the charge to be detected is generated. Therefore, it is possible to reduce the influence due to the position where the pressing operation is received and improve the detection sensitivity.
  • FIG. 4 is a view for explaining the piezoelectric film 20 according to the first embodiment.
  • FIG. 4 is a plan view of the piezoelectric film 20.
  • the piezoelectric film 20 may be a film formed from a chiral polymer.
  • polylactic acid (PLA) particularly L-type polylactic acid (PLLA) is used as the chiral polymer.
  • PLLA made of a chiral polymer has a main chain with a helical structure.
  • PLLA has piezoelectricity when uniaxially stretched and molecules are oriented. The uniaxially stretched PLLA generates a voltage when the flat plate surface of the piezoelectric film 20 is pressed. At this time, the amount of voltage generated depends on the amount of displacement by which the flat plate surface is displaced in the direction perpendicular to the flat plate surface by the pressing amount.
  • the uniaxial stretching direction of the piezoelectric film 20 is a direction that forms an angle of 45 degrees with respect to the Y direction and the Z direction, as indicated by arrows in FIG.
  • the 45 degrees includes an angle including about 45 degrees ⁇ 10 degrees, for example. Thereby, a voltage is generated when the piezoelectric film 20 is pressed.
  • PLLA generates piezoelectricity by molecular orientation treatment such as stretching, and does not need to be polled like other polymers such as PVDF or piezoelectric ceramics. That is, the piezoelectricity of PLLA that does not belong to ferroelectrics is not expressed by the polarization of ions like ferroelectrics such as PVDF or PZT, but is derived from a helical structure that is a characteristic structure of molecules. is there. For this reason, the pyroelectricity generated in other ferroelectric piezoelectric materials does not occur in PLLA. Since there is no pyroelectricity, the influence of the temperature of the user's finger or frictional heat does not occur, and the press detection sensor 3 can be formed thin.
  • the piezoelectric film 20 may be made of a film formed of a ferroelectric material in which ions are polarized, such as PVDF or PZT subjected to poling treatment, instead of PLLA.
  • the first electrode 21 and the second electrode 22 formed on both main surfaces of the piezoelectric film 20 can be metal electrodes such as aluminum and copper.
  • the first electrode 21 and the second electrode 22 can be made of a highly transparent material such as ITO or PEDOT.
  • FIG. 5A is a diagram for explaining a deformation when the sensor 101 according to the related art receives a pressing operation.
  • FIG. 5B is a diagram for explaining a deformation when the sensor 10 receives a pressing operation. 5A and 5B, only the piezoelectric film 20, the first adhesive portion 23, and the second adhesive portion 24 are shown, and the other members are omitted.
  • the piezoelectric film 20 of the sensor 101 according to the prior art has no slit 15 and is continuous in the X direction.
  • the piezoelectric film 20 is continuous in the X direction, the entire piezoelectric film 20 is distorted. For this reason, it is influenced by a region other than the vicinity of the center that has undergone the pressing operation.
  • the piezoelectric film 20 is affected by tensile stress, and the flexibility as a whole decreases. As described above, in the sensor 101 according to the related art, the detection accuracy when a pressing operation is received may decrease.
  • the piezoelectric film 20 of the sensor 10 is provided with a slit 15.
  • the piezoelectric film 20 is divided into regions of a piezoelectric film 201, a piezoelectric film 202, and a piezoelectric film 203 in the X direction by the slit 15.
  • the piezoelectric film 20 When the sensor 10 is pressed in the direction indicated by the arrow 902 in FIG. 5B, that is, in the ⁇ Z direction, the piezoelectric film 20, the first adhesive portion 23, and the second adhesive portion 24 are each distorted in the ⁇ Z direction. . Since the piezoelectric film 20 is divided by the slits 15, the piezoelectric film 20 is distorted in the ⁇ Z direction for each divided area. The piezoelectric film 201, the piezoelectric film 202, and the piezoelectric film 203 can move freely at the end on the slit 15 side. For this reason, the piezoelectric film 20 as a whole is easily bent and rich in flexibility. Therefore, the degree of freedom when bending the sensor 10 can be increased. For example, even when the sensor 10 is used for an electronic device or the like that performs a flexible operation, the piezoelectric film 20 can be distorted for each electrode. Become.
  • FIGS. 6A to 6C are diagrams for explaining modifications 1 to 3 of the sensor according to the first embodiment.
  • FIGS. 6A to 6C only the first electrode 21 and the piezoelectric film 20 are shown, and the other members are omitted.
  • the description of the first to third modifications only the configuration different from that of the sensor 10 will be described, and the rest will be omitted.
  • the piezoelectric film 20 includes a slit 151.
  • the slits 151 are continuously formed so as to surround the three directions around each first electrode 21.
  • the slits 151 surrounding the first electrodes 21 in the same row can be formed in one step, which facilitates the manufacturing process.
  • the region R1 for each first electrode 21 divided by the respective slits 151 is generally rectangular as shown by the hatched region in FIG.
  • the Y direction is the long direction
  • the X direction is the short direction.
  • the piezoelectric film 20 includes a slit 152.
  • a plurality of slits 152 are formed so as to surround two directions around each first electrode 21. Thereby, since the shape of each slit 152 is a simple structure, it becomes easy to form the slit 152 in a required location.
  • the region R2 for each first electrode 21 divided by the respective slits 152 is generally rectangular like the region indicated by the oblique lines shown in FIG. For this reason, the sensor 71 can obtain the same effect as the sensor 10.
  • the piezoelectric film 20 includes a slit 153.
  • the slits 153 are continuously formed so as to surround three directions around each first electrode 21.
  • the slit 153 is not formed to the end of the piezoelectric film 20 as compared with the slit 151. For this reason, since the piezoelectric film 20 is not divided
  • the region R3 for each first electrode 21 divided by the respective slits 153 is generally rectangular like the region R1 as shown by the hatched area in FIG. 6C.
  • the X direction is the longitudinal direction and the Y direction is the short direction.
  • the sensor 72 can obtain the same effect as the sensor 10.
  • FIG. 7A is a plan view of a pressure detection sensor according to the second embodiment.
  • FIG. 7B is an exploded perspective view of the press detection sensor according to the first embodiment.
  • the electrodes are indicated by broken lines.
  • the touch panel according to the second embodiment includes a sensor 110.
  • the sensor 110 includes a first electrode 121, a second electrode 122, and a piezoelectric film 120.
  • the piezoelectric film 120 may not have a slit.
  • a plurality of first electrodes 121 and second electrodes 122 are formed in pairs. That is, in the present embodiment, the sensor 110 includes a first electrode pair 61 and 63 and a second electrode pair 62 and 64 each including a first electrode 121 and a second electrode 122.
  • the sensor 110 includes a plurality of electrode pairs, so that the pressing loads at a plurality of locations can be calculated.
  • the first electrode 121 is disposed on the first main surface 11 of the piezoelectric film 120.
  • the second electrode 122 is disposed on the second main surface of the piezoelectric film 120 that is the back side of the first main surface 11.
  • FIG. 8 is a diagram for explaining the piezoelectric film 120 according to the second embodiment, and is a diagram in which the piezoelectric film 120 is viewed from above.
  • the uniaxial stretching direction of the piezoelectric film 120 is a direction that forms an angle of 90 degrees with respect to the Y direction, as indicated by an arrow 902 in FIG.
  • a similar effect can be obtained even in a direction that forms an angle of 0 degrees with respect to the Y direction.
  • the 90 degrees or 0 degrees includes an angle including about ⁇ 10 degrees.
  • the first electrode pair 61, 63 and the second electrode pair 62, 64 are preferably arranged at symmetrical positions from the center of the sensor 110. Furthermore, the first electrode pair 61, 63 and the second electrode pair 62, 64 are more preferably arranged at the corners of the sensor 110. Thereby, it becomes easy to detect the output from the pair of the first electrode pair 61, 63 and the second electrode pair 62, 64. On the other hand, when the first electrode pair 61, 63 or the second electrode pair 62, 64 is arranged at the center of the sensor 110, the output becomes close to zero. This makes it difficult to read the output accurately. Hereinafter, detection of the sensor 110 will be described.
  • FIG. 9A is a schematic diagram showing a strain distribution of the sensor 110 according to the second embodiment when a load is applied to the center of the touch panel
  • FIG. It is a schematic diagram which shows the distortion distribution of the sensor 110 at the time of applying a load to the center.
  • FIGS. 10A and 10B are diagrams showing a region where the output is 0 when one point of the sensor 110 receives a pressing operation.
  • FIG. 10C is a diagram illustrating a region where the output is 0 when two points of the sensor 110 are subjected to a pressing operation.
  • the direction of distortion of the sensor 110 extends toward the point where the load is applied.
  • the deformation of the corners of the sensor 110 when a load is applied to the center, and when a load is applied to the end, the deformation is also substantially in the direction of 45 degrees obliquely.
  • the sensor 110 In the vicinity of the two sides sandwiching the corners of the corners of the sensor 110, the sensor 110 is close to the fixed side, and thus is difficult to be displaced in the Z direction (the direction perpendicular to the paper surface).
  • the vicinity of the center of the two sides of the opposing sensor 110 is not strongly restrained in the Z direction because the distance from the corner of the sensor 110 of interest to the fixed side is long.
  • the pressing point P2 shown in FIG. 9B since the pressing point P2 is far from the upper and lower sides along the X direction, the pressing point P2 is easily deformed in the Z direction. That is, when the corner portion of the sensor 110 is viewed locally, the sensor 110 can be approximated to a structure in which only two sides sandwiching the corner are fixed. Such a structure is most easily displaced on a diagonal line extending from the corner. Further, on the diagonal line of the sensor 110, distortion occurs in a direction of approximately 45 degrees with respect to the fixed side.
  • the method of distortion of the sensor 110 on the diagonal line is the same regardless of where the sensor 110 is pressed on the diagonal line. Therefore, when a load is applied to the center or when a load is applied to the end, the end of the sensor 110 is generally distorted in a 45-degree oblique direction.
  • PLLA piezoelectric film
  • the corner of the sensor 110 is distorted in an oblique direction.
  • the direction of distortion at the corners is reversed left and right or up and down. That is, there is always a portion where the distortion direction is 0 degree or 90 degrees between the left and right corners or the upper and lower corners.
  • the part where the distortion is 0 degree or 90 degrees depends on the pressed part.
  • the distortion when a load is applied to the center of the touch panel (when the pressing point P1 is pressed), as shown in FIG. 9A, the distortion is symmetrical vertically and horizontally around the pressing point P1. Therefore, the portion where the distortion direction is 0 degree or 90 degrees is a cross area A1 extending perpendicularly to the X axis and the Y axis from the depression point indicated by the depression point P1 in FIG.
  • the direction of distortion is approximately 45 degrees at the corner, and as the distance from the corner increases The distribution is such that the direction of distortion gradually goes to the pressing point P2. Therefore, a portion where the distortion is 0 degree or 90 degrees is as shown in a region A2 in FIG.
  • the strain on a 100 mm ⁇ 100 mm flat plate simulating a touch panel was simulated by stress analysis using a finite element method.
  • FIG. 11 is a simulation model of how the touch panel is distorted.
  • the touch panel was a 100 mm ⁇ 100 mm flat plate, and the four sides of the flat plate had zero displacement in the Z-axis direction.
  • the simulation was performed under the condition that a force of 1 N was applied to the main surface of the flat plate in the ⁇ Z-axis direction.
  • FIG. 12 is a graph showing the electrode position from the origin and the amount of shear distortion at the electrode position when the size of the electrode pair is 5 mm ⁇ 5 mm.
  • the position of the electrode is moved on a diagonal line, and the position on the X-axis and the Y-axis is the same, so the electrode position is indicated by a position on the X-axis.
  • the electrode is preferably arranged on the inner side of 30 mm with respect to the side having a width of 100 mm, that is, on the inner side of 30% of the length of the side.
  • FIG. 10C shows the load at two points and the positions of the two first electrode pairs 61 and 63 and the second electrode pairs 62 and 64.
  • the first electrode pair 61, 63 and the second electrode pair 62, 64 are arranged at the corners at positions that are point-symmetric with respect to the center of the touch panel.
  • the shear distortion applied to the piezoelectric film at the corner is applied to the second pressing point P4. Distortion according to the load.
  • the shear distortion applied to the piezoelectric film at the corner is the first pressing point. It becomes distortion according to the load concerning P3.
  • the shear strain generated at the corner is the sum of the applied load applied to the pressed point P3 or the applied strain applied to the pressed point P4. That is, the sensor output at the corner is a linear function of the load applied to the pressing point P3 or the pressing point P4 and the pressing position, and the pressing point P3 and the pressing point P4 can be calculated individually. Therefore, when detecting the load of 2 points
  • the signal detection circuit of the sensor 110 includes an I / V conversion circuit that converts the current in the previous stage into a voltage, and one or more voltage amplification circuits in the subsequent stage.
  • the signal detection circuit of the sensor 110 includes an I / V conversion circuit that converts the current in the previous stage into a voltage, and one or more voltage amplification circuits in the subsequent stage.
  • the mounting area of the sensor 110 can be kept small.
  • a switch is provided between each I / V conversion circuit and the voltage amplification circuit.
  • the connection with the subsequent voltage amplification circuit can be switched by switching.
  • the electrodes of the sensor 110 may be connected to a current detection type capacitance detection IC.
  • a capacitor may be connected between the signal electrode and the signal detection circuit of the sensor 110 and between the reference electrode (GND electrode) and the signal detection circuit of the sensor 110. Thereby, the capacitor can increase the sensitivity of the sensor 110 by charging the electric charge generated in the piezoelectric film 120 of the sensor 110 and flowing the charged electric charge to the detection circuit.
  • the slit 15 penetrates the piezoelectric film 20.
  • any slit may be used as long as it increases the flexibility of the piezoelectric film 20.
  • the slit 15 may be a groove formed in the piezoelectric film 20.
  • a touch sensor is provided between the protective sheet 4 and the sensor 10 in FIG.
  • a touch panel that detects the pressing force can be formed by arranging the display devices.
  • positioning of the said touch panel is an example, For example, arrangement

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  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)

Abstract

L'invention concerne un capteur, un panneau tactile et un dispositif électronique qui atténuent les effets dus à des positions auxquelles une opération de pression est appliquée et présentent une flexibilité et une sensibilité de détection élevées. La présente invention comprend un film piézoélectrique (20), une première électrode (21) qui est disposée sur une première surface principale du film piézoélectrique (20) et une deuxième électrode (22) qui est disposée, au niveau d'une deuxième surface principale du film piézoélectrique (20), à une position qui fait au moins face à la première électrode (21). Le film piézoélectrique (20) comprend une fente (15) et la fente (15) est disposée sur le périmètre de la première électrode (21).
PCT/JP2018/019461 2017-06-01 2018-05-21 Capteur, panneau tactile et dispositif électronique WO2018221288A1 (fr)

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Application Number Priority Date Filing Date Title
JP2019522124A JP6624343B2 (ja) 2017-06-01 2018-05-21 センサ、タッチパネル、及び電子機器

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JP2017-108960 2017-06-01
JP2017108960 2017-06-01
JP2018000438 2018-01-05
JP2018-000438 2018-01-05

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023153426A1 (fr) * 2022-02-10 2023-08-17 株式会社村田製作所 Appareil électronique
WO2023153428A1 (fr) * 2022-02-10 2023-08-17 株式会社村田製作所 Appareil électronique
WO2023153430A1 (fr) * 2022-02-10 2023-08-17 株式会社村田製作所 Capteur

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015075893A (ja) * 2013-10-08 2015-04-20 ダイキン工業株式会社 圧電体、タッチパネルおよび電子機器

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015075893A (ja) * 2013-10-08 2015-04-20 ダイキン工業株式会社 圧電体、タッチパネルおよび電子機器

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023153426A1 (fr) * 2022-02-10 2023-08-17 株式会社村田製作所 Appareil électronique
WO2023153428A1 (fr) * 2022-02-10 2023-08-17 株式会社村田製作所 Appareil électronique
WO2023153430A1 (fr) * 2022-02-10 2023-08-17 株式会社村田製作所 Capteur

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JPWO2018221288A1 (ja) 2019-11-21

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