WO2018209936A1 - 一种图像获取装置的坐标校正方法及图像获取装置 - Google Patents

一种图像获取装置的坐标校正方法及图像获取装置 Download PDF

Info

Publication number
WO2018209936A1
WO2018209936A1 PCT/CN2017/115872 CN2017115872W WO2018209936A1 WO 2018209936 A1 WO2018209936 A1 WO 2018209936A1 CN 2017115872 W CN2017115872 W CN 2017115872W WO 2018209936 A1 WO2018209936 A1 WO 2018209936A1
Authority
WO
WIPO (PCT)
Prior art keywords
defect
coordinate
photographing device
picture
currently captured
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/CN2017/115872
Other languages
English (en)
French (fr)
Inventor
冯虎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HKC Co Ltd
Chongqing HKC Optoelectronics Technology Co Ltd
Original Assignee
HKC Co Ltd
Chongqing HKC Optoelectronics Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by HKC Co Ltd, Chongqing HKC Optoelectronics Technology Co Ltd filed Critical HKC Co Ltd
Priority to US15/745,067 priority Critical patent/US10388010B2/en
Publication of WO2018209936A1 publication Critical patent/WO2018209936A1/zh
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G06T7/0008—Industrial image inspection checking presence/absence
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/70—Determining position or orientation of objects or cameras
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/006—Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/60—Control of cameras or camera modules
    • H04N23/61—Control of cameras or camera modules based on recognised objects
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/60—Control of cameras or camera modules
    • H04N23/695—Control of camera direction for changing a field of view, e.g. pan, tilt or based on tracking of objects
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/80—Camera processing pipelines; Components thereof
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30108—Industrial image inspection
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30108—Industrial image inspection
    • G06T2207/30121—CRT, LCD or plasma display
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30244—Camera pose

Definitions

  • the present application belongs to the field of coordinate correction technologies, and in particular, to a coordinate correction method and an image acquisition device of an image acquisition device.
  • the liquid crystal panel may be affected to some extent, and automatic optical inspection is usually adopted (Automatic Optic Inspection, AOI)
  • AOI Automatic Optic Inspection
  • the machine is based on the optical principle to treat the sample to perform defect detection.
  • the AOI machine When the AOI machine detects the defect, it records the coordinates of the defect and uploads the coordinates of the defect to the manufacturing process execution management system of the manufacturing company (Manufacturing) Execution System, MES), after the sample to be photographed is loaded on the color film camera, the color film camera downloads the coordinates of the defect uploaded by the AOI machine from the MES system, and then moves directly to the coordinate to take a photo of the defect, and shoots The defect photo can be used for process defect analysis and yield analysis. After the automatic repair process of the post-process is read the defect coordinates uploaded by the AOI machine, move to the defect coordinate position and search for the defect with the low-power lens, then switch to the high-power lens. Fix the defect.
  • the manufacturing process execution management system of the manufacturing company Manufacturing
  • MES Manufacturing Execution System
  • the existing photographing and repairing process has the following problems.
  • the color film camera moves to the defect position according to the defect coordinates uploaded by the AOI machine, and the defect is not in the field of view. Center, serious situation or even no defects in the field of view or defects appearing are not defects recorded in this coordinate, which will affect the judgment of the defect category and the yield analysis.
  • the defect when the defect is repaired by the defect coordinates of the AOI uploaded by the automatic repair process, since the defect may not be in the center of the field of view, it is necessary to search for the defect with a low-power lens first, and then repair the defect at a high magnification, each There may be multiple defects in the sample to be repaired, and switching the high and low magnification lens back and forth results in low efficiency of the repair process and increases equipment loss.
  • the present application provides a coordinate correction method and an image acquisition device for an image acquisition device, which avoids coordinate offset caused by mechanical errors between different machines, improves efficiency of subsequent defect repair processes, and reduces equipment loss.
  • the present application provides a coordinate correction method for an image acquisition device, the method comprising:
  • the defect currently in the picture captured by the photographing device is not located at a center position of the screen, adjust a position of the photographing device according to a position of the defect in a picture currently captured by the photographing device until the photographing The defect in the currently captured picture of the device is located at a center position of the currently captured picture;
  • the present application also provides a coordinate correction method for an image acquisition device, the method comprising:
  • the defect currently in the picture captured by the photographing device is not located at a center position of the screen, adjust a position of the photographing device according to a position of the defect in a picture currently captured by the photographing device until the photographing The defect in the currently captured picture of the device is located at a center position of the currently captured picture;
  • the application also provides an image acquisition device, the image acquisition device comprising: a memory, a processor, and the following modules stored on the memory and operable on the processor:
  • a first coordinate acquiring module configured to acquire a defect in the sample to be photographed detected by the pre-process and a first coordinate of the defect
  • a photographing device initializing module configured to initialize a position of the photographing device according to the first coordinate of the defect, and acquire a picture currently captured by the photographing device;
  • a photographing device adjusting module configured to adjust the photographing device according to a position of the defect in a picture currently captured by the photographing device, if the defect in the picture currently captured by the photographing device is not located at a center position of the screen a position until the defect in the picture currently captured by the camera device is located at a center position of the currently captured picture;
  • a second coordinate acquiring module configured to photograph the defect and record a current coordinate of the defect as a second when detecting that the defect in the currently captured screen of the photographing device is located at a center position of the currently captured screen coordinate;
  • a uploading module configured to provide the second coordinate of the defect to the data management system, so that the subsequent process locates the defect according to the second coordinate of the defect, and performs corresponding operations on the defect.
  • the application also provides a computer storage medium, which may be non-volatile, having a computer program stored thereon, the computer program being read and executed by one or more processors
  • a computer storage medium which may be non-volatile, having a computer program stored thereon, the computer program being read and executed by one or more processors
  • the method provided by the above first aspect can be implemented.
  • the first step is to initialize the position of the photographing device according to the coordinates of the defect detected by the pre-process, and then adjust the position of the photographing device according to the position of the defect in the screen captured by the photographing device, so that the photographing device In the captured picture, the defect is at the center of the screen, the coordinates of the defect at the center of the screen are recorded, and the coordinates of the defect at the center of the screen are provided to the data management system.
  • the method can avoid coordinate offset caused by mechanical errors between different machines, and can also provide corrected coordinates for subsequent processes, improve the efficiency of subsequent repair processes, and reduce the loss of subsequent process equipment.
  • the application is convenient to operate, simple to implement, wide in adaptability, and has strong ease of use and practicability.
  • FIG. 1 is a schematic flowchart of a coordinate correction method of an image acquisition device according to an embodiment of the present application
  • FIG. 2 is a schematic block diagram of an image acquiring apparatus according to another embodiment of the present application.
  • FIG. 3 is a schematic block diagram of an image acquiring apparatus according to still another embodiment of the present application.
  • FIG. 4 is a schematic block diagram of an image acquiring apparatus according to still another embodiment of the present application.
  • the term “if” can be interpreted as “when” or “on” or “in response to determining” or “in response to detecting” depending on the context. .
  • the phrase “if determined” or “if detected [condition or event described]” may be interpreted in context to mean “once determined” or “in response to determining” or “once detected [condition or event described] ] or “in response to detecting [conditions or events described]”.
  • the embodiment of the present application can be used for a color film camera, and the color film camera is generally used in a liquid crystal panel manufacturing process to take photos of defects.
  • the color film camera is generally used in a liquid crystal panel manufacturing process to take photos of defects.
  • Those skilled in the art should have a broad understanding of the color film camera in the embodiment of the present application. It is not limited to the existing camera equipment named by the color film camera. Any device that adopts the method described in the embodiments of the present application is within the scope of the protection of the present application.
  • FIG. 1 is a schematic flowchart of a coordinate correction method of an image acquisition apparatus according to an embodiment of the present disclosure. As shown in the figure, the method may include the following steps:
  • Step S101 Acquire a defect in the sample to be photographed detected by the pre-process and a first coordinate of the defect.
  • the pre-processing process refers to a process step performed before taking a photo of a sample to be photographed, and generally refers to a process step of performing defect detection on the AOI machine to be photographed, and the AOI machine is performing defect detection on the photographed sample. , various defects on the sample to be photographed are detected, and when the defect is detected, the first coordinate of the defect on the sample to be detected is acquired.
  • the defect refers to a position in the sample to be photographed that does not reach a predetermined qualified condition
  • the preset qualified condition refers to a condition for determining normal and abnormal conditions set in advance, for example, a sample can be set, if it is to be detected If a certain position in the sample matches the given sample greater than the threshold, it is determined to be normal. If the position of a certain position in the sample to be tested matches the given sample is less than or equal to the threshold, it is determined that the position is defective.
  • the coordinates corresponding to this position are the coordinates of the defect.
  • the defect mainly refers to some flaws introduced in the manufacturing process of the liquid crystal panel, for example, the particles which are not cleaned on the substrate by the substrate cleaning, the photoresist residue caused by the uncleaning in the process, the pattern abnormality introduced in the process, etc., LED Process surface epitaxial wafers introduce surface defects and the like during crystal growth.
  • Step S102 Initialize a position of the photographing device according to the first coordinate of the defect, and acquire a picture currently captured by the photographing device.
  • the (0, 0) point of the sample to be photographed is searched first, and then the photograph is driven according to the first coordinate of the defect and the current (0, 0) position.
  • the first coordinate position of the device to the defect usually, the stage is also movable.
  • the position of the photographing device can be fixed, and by moving the position of the stage, the photographing device is located at the first coordinate position of the defect.
  • the photographing device may be a charge coupled component (Charge-coupled Device, CCD), can also be a camera, no restrictions here.
  • CCD charge coupled component
  • the defect currently located in the picture captured by the camera device is located at a center position of the screen, the defect is photographed.
  • Step S103 if the defect in the picture currently captured by the photographing device is not located at the center position of the screen, adjust the position of the photographing device according to the position of the defect in the picture currently captured by the photographing device, until The defect in the picture currently captured by the photographing device is located at the center of the currently captured picture.
  • the (0, 0) point of the sample to be photographed is usually determined first, and then determined according to the distance of the defect position distance (0, 0).
  • the first coordinate (x, y) of the defect after loading the sample to be photographed by the color film camera, first search for the (0,0) point of the sample to be photographed, and wait for the (0,0) point to be searched, according to the defect.
  • the first coordinate (x, y) drives the photographing device to the position of the defect, and directly takes a picture, but due to an error between the machines, for example, an AOI machine that detects a defect of the sample to be photographed and a color film camera that photographs the current sample to be photographed Mechanical error between. It is possible that after the photographing device moves to the corresponding position according to the first coordinate (x, y) of the defect, the defect corresponding to the first coordinate does not appear in the center of the field of view of the photographing device, and even more severely, A defect corresponding to one coordinate does not appear in the field of view of the photographing device. At this time, it is necessary to adjust the position of the photographing device, and the position of the photographing device can be adjusted according to the position of the defect in the picture currently captured by the photographing device until the defect appears in the center of the field of view of the photographing device.
  • the position of the camera is adjusted according to a position of the defect in a picture currently captured by the camera device, until the defect in the currently captured picture of the camera device is currently captured.
  • the center of the screen includes:
  • the defect is photographed and the current coordinate of the defect is recorded as the second coordinate (x ' , y ' ).
  • the defect in the picture captured by the photographing device after the initial position may not be located at the center position of the screen, and it is necessary to calculate the distance of the defect from the center of the screen in the picture (for example, x, y
  • the distance of the direction is determined according to the distance in the screen, and after the photographing device performs the displacement information, the screen currently captured by the photographing device is continuously acquired, and the position of the photographing device is adjusted according to the above manner until the photographing device captures
  • the defect in the picture is located at the center of the screen, and records the coordinates of the defect when the defect is located at the center of the screen.
  • the seat mark of the defect is located at the center of the screen as the second coordinate, and the coordinates of the defect are compared with the camera device. The location was obtained.
  • the preset distance is moved upward, downward, left, and right according to the current coordinates of the camera device, if any After the camera device moves the preset distance, the defect occurs in the field of view of the camera device, and the position of the camera device is adjusted according to the position of the defect in the currently captured screen of the camera device.
  • the defect since the defect may not appear in the field of view of the photographing device, the defect may not be continuously photographed. If the search is not aimed, the defect may not be searched. a defect corresponding to the first coordinate position, in which case some rules need to be set to continue searching for the defect around the first coordinate, and the position of the first coordinate may correspond to upward, downward, leftward, Move the preset distance to the right to search for the defect.
  • the upper, lower, left, and right orientations are only used to indicate that the photographing device can search for the four weeks around the first coordinate according to a preset search rule, and can also evolve to the upper left, upper right, lower left, and lower right. The azimuth moves the preset distance to search.
  • the order of movements for different orientations can also be adjusted accordingly. If the number of defects searched in the four directions is more than one, it may indicate that the defect corresponding to the first coordinate may not be accurately searched according to the coordinates of the defect, and the first coordinate of the next defect may be acquired to take a photo. The offset of the coordinates is obtained according to the first coordinate of the next defect and the position of the next defect of the actual defect.
  • Step S104 When it is detected that the defect currently located in the picture currently captured by the photographing device is located at the center position of the currently captured screen, photograph the defect and record the current coordinate of the defect as the second coordinate.
  • the defect is located at the center of the field of view of the photographing device after adjusting the position of the photographing device, the defect is photographed.
  • the position of the photographing device after moving ensures that the defect is in the center of the field of view of the photographing device, but the position where the photographing device is located is not the position of the first coordinate corresponding to the defect, it is necessary to reconfirm the position.
  • the coordinates of the defect are the second coordinates (x ' , y ' ).
  • Step S105 providing a second coordinate of the defect to the data management system, so that the subsequent process locates the defect according to the second coordinate of the defect, and performs corresponding operations on the defect.
  • the second coordinate (x ' , y ' ) after the defect update may be provided to the data management system, and the data management system may be an MES system, or a system capable of storing and processing coordinate data. . If other process sites treat the defects in the photographed sample correspondingly, the coordinates of the defect in the sample to be photographed can be obtained directly from the MES system. For example, in the process of repairing defects in the post-processing process, since the field of view seen by the low-magnification lens is wider, the field of view seen by the high-power lens is narrower, and in the repair process, the defect is usually searched for by the low-power lens, according to the defect.
  • the position of the defect can be seen under the high power lens, and then the high power lens is switched to perform the repair process. If the subsequent process acquires the updated second coordinate of the defect, it can be updated according to the update.
  • the second coordinate is directly repaired under the high power lens without the need to first search with a low power lens, which improves the efficiency of the subsequent process and reduces the mechanical wear of the switch lens.
  • providing the second coordinate (x ' , y ' ) of the defect to the data management system comprises:
  • the first coordinate (x, y) of the defect in the sample to be photographed detected by the pre-process can be updated to the second coordinate (x ' , y ' ) after adjusting the mechanical error, and provided to
  • the data management system may also provide the second coordinate (x ' , y ' ) after adjusting the mechanical error to the data management system, and the first coordinate of the defect in the sample to be photographed detected by the data management system by the data management system (x) , y) is updated to adjust the second coordinate (x ' , y ' ) after the mechanical error, or the second coordinate (x ' , y ' ) after adjusting the mechanical error is directly obtained when the subsequent process acquires the defect coordinate.
  • the method when it is detected that the defect currently located in the picture currently captured by the camera device is located at a center position of the currently captured picture, the defect is photographed and the current coordinate of the defect is recorded as a second After the coordinates (x ' , y ' ), the method further includes:
  • the position of the photographing device is initialized according to the first coordinate of the defect of the other position and the coordinate offset.
  • the coordinate difference of the two defects may be used as the coordinate offset, and the coordinate offset may be used as the coordinate offset.
  • Mechanical error of the two machines Usually, there may be multiple defects on a sample to be photographed. When taking photos of other defects in the sample to be photographed, other defects may be obtained according to the first coordinate (x, y) of the other position plus mechanical error.
  • the second coordinate (x ' , y ' ) initializes the position of the photographing device according to the second coordinate (x ' , y ' ) when the photographing device is initialized, so that the photographing device can be prevented from moving back and forth so that the defect is located at the center of the field of view of the photographing device. It can improve the efficiency of photographing while reducing mechanical wear.
  • a correspondence relationship between an image acquisition device for example, a color film camera
  • a coordinate offset of a pre-processing machine that detects defects in the sample to be photographed and the first coordinates of the defect is generated.
  • the coordinate offset obtained by the calculation may be set as an image acquiring device (for example, a color film camera) and detecting defects in the sample to be photographed and the first coordinate (x, y) of the defect.
  • an image acquiring device for example, a color film camera
  • detecting defects in the sample to be photographed and the first coordinate (x, y) of the defect may be set as an image acquiring device (for example, a color film camera) and detecting defects in the sample to be photographed and the first coordinate (x, y) of the defect.
  • the correspondence between the coordinate offsets of the pre-processing machine Since a factory usually has multiple identical machines in a certain process, for example, multiple AOI machines and multiple color film cameras, for each AOI machine and each color film camera number, when one is waiting After the photo sample is loaded on the color film camera, the defect in the sample to be photographed and the first coordinate (x, y) of the defect are obtained, and the defect in the sample to be photographed and the defect are acquired.
  • the number of the first coordinate (x, y) pre-processing machine, according to the generated color film camera and detecting the defect in the sample to be photographed and the first coordinate (x, y) of the defect The coordinate offset of the machine can directly obtain the coordinate offset, and the second coordinate (x ' , y ' ) of all the defects in the sample to be photographed can be obtained according to the coordinate offset, and the defect can be directly based on the defect.
  • the second coordinate (x ' , y ' ) initializes the position of the camera. Improve camera efficiency while reducing mechanical wear.
  • the size of the serial number of each step does not mean the order of execution order, and the order of execution of each step should be determined by its function and internal logic, and should not constitute any implementation process of the embodiment of the present application. limited.
  • FIG. 2 is a schematic block diagram of an image acquiring apparatus according to another embodiment of the present application. For convenience of description, only parts related to the embodiment of the present application are shown.
  • the image acquisition device 20 may be a software unit, a hardware unit, or a combination of software and hardware built in a terminal device (a conventional image acquisition device, a color film camera, a color film camera, etc.), or may be used as a unit.
  • a separate pendant is integrated into the terminal device.
  • the image acquisition device 20 includes:
  • the first coordinate acquiring module 21 is configured to acquire a defect in the sample to be photographed detected by the pre-process and a first coordinate of the defect;
  • the photographing device initializing module 22 is configured to initialize a position of the photographing device according to the first coordinate of the defect, and acquire a picture currently captured by the photographing device;
  • the photographing device adjusting module 23 is configured to adjust the photographing according to the position of the defect in the currently captured screen of the photographing device if the defect in the currently captured screen of the photographing device is not located at a center position of the screen The position of the device until the defect in the picture currently captured by the camera device is located at a center position of the currently captured picture;
  • the second coordinate acquiring module 24 is configured to: when detecting that the defect is located in a center position of the currently captured screen in the currently captured screen of the photographing device, photographing the defect and recording the current coordinate of the defect is Two coordinates
  • the uploading module 25 is configured to provide the second coordinate of the defect to the data management system, so that the subsequent process locates the defect according to the second coordinate of the defect, and performs corresponding operations on the defect.
  • FIG. 3 is a schematic block diagram of an image acquiring apparatus according to another embodiment of the present application, and further added to the image acquiring apparatus 20:
  • the camera device adjustment module 23 includes:
  • the displacement information acquiring unit 331 is configured to calculate displacement information of the photographing device according to the position of the defect in the picture currently captured by the photographing device;
  • the adjusting unit 332 is configured to adjust a position of the photographing device according to the displacement information, and acquire a current captured image of the photographing device after the adjusted position;
  • the identifying unit 333 is configured to identify a location of the defect in a picture currently captured by the photographing device after adjusting the position;
  • the processing unit 334 is configured to continue to adjust the position of the photographing device until the defect in the currently captured screen of the photographing device if the defect in the currently captured screen of the photographing device after the position adjustment is not located at the center of the screen Located at the center of the currently captured picture;
  • the processing unit 334 is further configured to: if the defect currently located in the picture captured by the camera device after the position adjustment is located at a center position of the screen, take a picture of the defect and record the current coordinate of the defect as a second coordinate. .
  • the uploading module 25 is specifically configured to:
  • the image obtaining apparatus 20 further includes:
  • the offset calculation module 36 is configured to calculate a coordinate offset according to the second coordinate (x ' , y ' ) of the defect and the first coordinate of the defect detected by the pre-process, so as to facilitate the photographing
  • the position of the photographing device is initialized according to the first coordinate of the defect of the other position and the coordinate offset.
  • each functional unit and module described above is illustrated. In practical applications, the above function assignment can be completed by different functional units and modules as needed, that is, the image.
  • the internal structure of the acquisition device is divided into different functional units or modules to perform all or part of the functions described above.
  • Each functional unit or module in the embodiment may be integrated into one processing unit, or each unit may exist physically separately, or two or more units may be integrated into one unit, and the integrated unit or module may be used.
  • the form of hardware implementation can also be implemented in the form of software functional units.
  • the specific names of the respective functional units and modules are only for the purpose of facilitating mutual differentiation, and are not intended to limit the scope of protection of the present application.
  • For the specific working process of the unit and the module in the foregoing image obtaining apparatus reference may be made to the corresponding process of the foregoing method embodiment, and details are not described herein again.
  • FIG. 4 is a schematic block diagram of an image acquiring apparatus according to still another embodiment of the present application.
  • the image acquisition device as shown may include one or more processors 401 (only one shown in FIG. 4); one or more input devices 402 (only one shown in FIG. 4), one or more Output device 403 (only one shown in Figure 4) and memory 404.
  • the above processor 401, input device 402, output device 403, and memory 404 are connected by a bus 405.
  • the memory 404 is used to store instructions, and the processor 401 is used to execute instructions stored in the memory 404. among them:
  • the processor 401 is configured to acquire, by the input device 402, a defect in the sample to be photographed and a first coordinate of the defect, and the processor 401 is further configured to initialize according to the first coordinate of the defect a position of the photographing device, and acquiring, by the input device 402, a picture currently captured by the photographing device; the processor 401 is further configured to: if the defect currently in the screen currently captured by the photographing device is not located at a center position of the screen, And adjusting a position of the photographing device according to a position of the defect in a picture currently captured by the photographing device, until the defect in a picture currently captured by the photographing device is located at a center position of a currently captured screen; the processor The 401 is further configured to: when detecting that the defect in the currently captured picture of the photographing device is located at a center position of the currently captured picture, photographing the defect and recording a current coordinate of the defect as a second coordinate; The processor 401 is further configured to provide the second coordinate of the defect to the data management
  • the processor 401 is further configured to calculate displacement information of the photographing device according to a position of the defect in a picture currently captured by the photographing device; the processor 401 is further configured to adjust according to the displacement information. Positioning the photographing device, and acquiring, by the input device 402, a currently captured image of the photographing device after the adjusted position; the processor 401 is further configured to identify a position of the defect in the currently captured image of the photographing device after the adjusted position; The processor 401 is further configured to: if the defect currently located in the picture currently captured by the camera device after the position adjustment is not located at a center position of the screen, continue to adjust the position of the camera device until the current captured image of the camera device The defect is located at a central location of the currently captured picture; the processor 401 is further configured to photograph the defect and record the defect if the defect is located at a center position of the screen in the currently captured picture of the camera device after the position adjustment The current coordinate of the defect is the second coordinate.
  • the processor 401 is further configured to: update a first coordinate of the defect in the sample to be photographed detected by the pre-process detection to a second coordinate, and provide the updated second coordinate of the defect by using the output device 403.
  • the processor 401 is further configured to provide the second coordinate of the defect to the data management system through the output device 403, so that the data management system detects the first coordinate of the defect detected by the pre-process Update to the second coordinate.
  • the processor 401 is further configured to calculate a coordinate offset according to the second coordinate of the defect and the first coordinate of the defect detected by the pre-process, so as to facilitate the other in the sample to be photographed.
  • the position of the photographing device is initialized according to the first coordinate of the defect of the other position and the coordinate offset.
  • the processor 401 is further configured to take a photo of the defect if the defect in the picture currently captured by the camera device is located at a center position of the screen.
  • the memory 404 is configured to store software programs, modules, units, and data information required in an image acquisition device, and the processor 401 performs various functions by running software programs, modules, and units stored in the memory 404. Application and data processing to avoid coordinate offset caused by mechanical errors between different machines, improve the efficiency of subsequent defect repair processes, and reduce equipment loss.
  • the so-called processor 401 may be a central processing unit (Central) Processing Unit (CPU), which can also be other general-purpose processors, digital signal processors (DSPs), and application specific integrated circuits (Application). Specific Integrated Circuit (ASIC), Field-Programmable Gate Array (FPGA) or other programmable logic device, discrete gate or transistor logic device, discrete hardware components, etc.
  • the general purpose processor may be a microprocessor or the processor or any conventional processor or the like.
  • the input device 402 can include a touchpad, a fingerprint acquisition sensor (for collecting fingerprint information of the user and direction information of the fingerprint), a microphone, a CCD, a data collection device, a data receiving device, etc., and the output device 403 can include a display (LCD, etc.) , speakers, data transmission devices, etc.
  • the memory 404 can include read only memory and random access memory and provides instructions and data to the processor 401.
  • a portion of memory 404 may also include non-volatile random access memory.
  • the memory 404 can also store information of the device type.
  • the processor 401, the input device 402, the output device 403, and the memory 404 described in the embodiments of the present application may implement the implementation manner described in the embodiment of the coordinate correction method of the image obtaining apparatus provided by the embodiment of the present application.
  • the implementation described in the embodiment of the image acquisition device may also be performed, and details are not described herein again.
  • the disclosed image acquisition apparatus and method may be implemented in other manners.
  • the embodiments described above are merely illustrative.
  • the division of the modules or units is only a logical function division.
  • there may be another division manner for example, multiple units or components may be combined. Or it can be integrated into another system, or some features can be ignored or not executed.
  • the mutual coupling or direct coupling or communication connection shown or discussed may be an indirect coupling or communication connection through some interface, device or unit, and may be in electrical, mechanical or other form.
  • the units described as separate components may or may not be physically separated, and the components displayed as units may or may not be physical units, that is, may be located in one place, or may be distributed to multiple network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of the embodiment.
  • each functional module in each embodiment of the present application may be integrated into one processing unit, or each unit may exist physically separately, or two or more units may be integrated into one unit.
  • the above integrated unit can be implemented in the form of hardware or in the form of a software functional unit.
  • the integrated unit if implemented in the form of a software functional unit and sold or used as a standalone product, may be stored in a computer readable storage medium.
  • the medium includes a plurality of instructions for causing a computer device (which may be a personal computer, a server, or a network device, etc.) or a processor to perform all or part of the steps of the methods described in the various embodiments of the embodiments of the present application.
  • the foregoing storage medium includes: a U disk, a mobile hard disk, a read-only memory (ROM), and a random access memory (RAM, Random Access).
  • ROM read-only memory
  • RAM random access memory

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Quality & Reliability (AREA)
  • Computer Hardware Design (AREA)
  • Studio Devices (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Image Processing (AREA)

Abstract

一种图像获取装置的坐标校正方法及图像获取装置，所述方法包括：制程检测到缺陷坐标后，首先根据前序制程检测的缺陷的坐标初始化拍照装置的位置，然后可以根据拍照装置捕获的画面中缺陷的位置调整拍照装置的位置，使得拍照装置捕获的画面中缺陷在画面中心位置，记录缺陷在画面中心位置的坐标，并将缺陷在画面中心位置的坐标提供至数据管理系统。

Description

一种图像获取装置的坐标校正方法及图像获取装置 技术领域
本申请属于坐标校正技术领域，尤其涉及一种图像获取装置的坐标校正方法及图像获取装置。
 背景技术
在液晶面板制作流程中，由于基板本身存在的缺陷或者制程中引入的缺陷都可能对液晶面板造成一定的影响，通常会采用自动光学检测（Automatic Optic Inspection，AOI）机台基于光学原理对待拍照样品进行缺陷检测，当AOI机台检测到缺陷后，会记录缺陷的坐标并将缺陷的坐标上传制造企业生产过程执行管理系统（Manufacturing Execution System，MES），将待拍照的样品装载于彩膜拍照机后，彩膜拍照机从MES系统中下载AOI机台上传的缺陷的坐标后，直接移动到该坐标对缺陷进行拍照，通过拍摄的缺陷照片可以用于制程缺陷分析和良率分析，后序制程的自动修复过程读取AOI机台上传的缺陷坐标后，移动到该缺陷坐标位置用低倍镜头搜寻缺陷后，再切换到高倍镜头对缺陷进行修复。
但是现有的拍照以及修复过程存在以下问题，一方面，由于机台之间的机械误差会出现彩膜拍照机根据AOI机台上传的缺陷坐标移动到该缺陷位置进行拍照时，缺陷未在视野中心，严重的情况甚至视野中都未出现缺陷或者出现的缺陷并不是该坐标下记录的缺陷，会影响缺陷类别的判断和良率分析。另一方面，自动修复制程读取的AOI上传的缺陷坐标对缺陷进行修复时，由于缺陷有可能不在视野中心，需要先用低倍镜头搜寻缺陷后，再在高倍下对缺陷进行修复，每个待修复样品可能存在多个缺陷，来回切换高低倍镜头造成修复制程的效率低，并且增加设备损耗。
 技术问题
鉴于此，本申请提供一种图像获取装置的坐标校正方法及图像获取装置，避免不同机台之间的机械误差造成的坐标偏移，提高后续缺陷修复制程的效率，减小设备损耗。
 技术解决方案
本申请提供一种图像获取装置的坐标校正方法，所述方法包括：
获取前序制程检测的待拍照样品中的缺陷以及所述缺陷的第一坐标；
根据所述缺陷的第一坐标初始化拍照装置的位置，并获取所述拍照装置当前捕获的画面；
若所述拍照装置当前捕获的画面中所述缺陷未位于所述画面的中心位置，则根据所述拍照装置当前捕获的画面中所述缺陷的位置调整所述拍照装置的位置，直到所述拍照装置当前捕获的画面中所述缺陷位于当前捕获的画面的中心位置；
当检测到所述拍照装置当前捕获的画面中所述缺陷位于当前捕获的画面的中心位置时，对所述缺陷进行拍照并记录所述缺陷当前的坐标为第二坐标；
提供所述缺陷的第二坐标至数据管理系统，以便于后序制程根据所述缺陷的第二坐标定位所述缺陷，并对所述缺陷进行相应的操作。
本申请还提供一种图像获取装置的坐标校正方法，所述方法包括：
获取前序制程检测的待拍照样品中的缺陷以及所述缺陷的第一坐标；
根据所述缺陷的第一坐标初始化拍照装置的位置，并获取所述拍照装置当前捕获的画面；
若所述拍照装置当前捕获的画面中所述缺陷未位于所述画面的中心位置，则根据所述拍照装置当前捕获的画面中所述缺陷的位置调整所述拍照装置的位置，直到所述拍照装置当前捕获的画面中所述缺陷位于当前捕获的画面的中心位置；
当检测到所述拍照装置当前捕获的画面中所述缺陷位于当前捕获的画面的中心位置时，对所述缺陷进行拍照并记录所述缺陷当前的坐标为第二坐标；
提供所述缺陷的第二坐标至数据管理系统，以便于后序制程根据所述缺陷的第二坐标定位所述缺陷，并对所述缺陷进行相应的操作；
根据所述缺陷的第二坐标以及前序制程检测的所述缺陷的第一坐标计算坐标偏移量，以便于对所述待拍照样品中的其它位置的缺陷进行拍照时，根据所述其他位置的缺陷的第一坐标以及所述坐标偏移量初始化所述拍照装置的位置；
将计算获得的坐标偏移量设置为图像获取装置和检测待拍照样品中的缺陷以及所述缺陷的第一坐标的前序制程机台的坐标偏移量，以便于根据所述坐标偏移量获取具有相同前序制程机台的待拍照样品中所有缺陷的第二坐标。
本申请还提供一种图像获取装置，所述图像获取装置包括：存储器、处理器及存储在存储器上并可在处理器上运行的以下模块：
第一坐标获取模块，用于获取前序制程检测的待拍照样品中的缺陷以及所述缺陷的第一坐标；
拍照装置初始化模块，用于根据所述缺陷的第一坐标初始化拍照装置的位置，并获取所述拍照装置当前捕获的画面；
拍照装置调整模块，用于若所述拍照装置当前捕获的画面中所述缺陷未位于所述画面的中心位置，则根据所述拍照装置当前捕获的画面中所述缺陷的位置调整所述拍照装置的位置，直到所述拍照装置当前捕获的画面中所述缺陷位于当前捕获的画面的中心位置；
第二坐标获取模块，用于当检测到所述拍照装置当前捕获的画面中所述缺陷位于当前捕获的画面的中心位置时，对所述缺陷进行拍照并记录所述缺陷当前的坐标为第二坐标；
上传模块，用于提供所述缺陷的第二坐标至数据管理系统，以便于后序制程根据所述缺陷的第二坐标定位所述缺陷，并对所述缺陷进行相应的操作。
本申请还提供一种计算机存储介质，所述计算机存储介质可以是非易失性的，所述计算机存储介质上存储有计算机程序，所述计算机程序在被一个或多个处理器读取并执行时可实现上述第一方面提供的所述方法。
 有益效果
本申请在获取前序制程检测的缺陷坐标后，首先根据前序制程检测的缺陷的坐标初始化拍照装置的位置，然后可以根据拍照装置捕获的画面中缺陷的位置调整拍照装置的位置，使得拍照装置捕获的画面中缺陷在画面中心位置，记录缺陷在画面中心位置的坐标，并将缺陷在画面中心位置的坐标提供至数据管理系统。通过该方法可以避免不同机台之间的机械误差造成的坐标偏移，还可以为后续制程提供校正后的坐标，提高后续修复制程的效率，减小后续制程设备的损耗。而且，本申请操作方便、实现简单，适应面广，具有较强的易用性和实用性。
 附图说明
为了更清楚地说明本申请实施例中的技术方案，下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本申请的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动性的前提下，还可以根据这些附图获得其他的附图。
图1是本申请一实施例提供的图像获取装置的坐标校正方法的示意流程图；
图2是本申请又一实施例提供的图像获取装置的示意框图；
图3是本申请又一实施例提供的图像获取装置的示意框图；
图4是本申请再一实施例提供的图像获取装置的示意框图。
 本发明的实施方式
下面将结合本申请实施例中的附图，对本申请实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例是本申请一部分实施例，而不是全部的实施例。基于本申请中的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例，都属于本申请保护的范围。
应当理解，当在本说明书和所附权利要求书中使用时，术语“包括”指示所描述特征、整体、步骤、操作、元素和/或组件的存在，但并不排除一个或多个其它特征、整体、步骤、操作、元素、组件和/或其集合的存在或添加。
还应当理解，在此本申请说明书中所使用的术语仅仅是出于描述特定实施例的目的而并不意在限制本申请。如在本申请说明书和所附权利要求书中所使用的那样，除非上下文清楚地指明其它情况，否则单数形式的“一”、“一个”及“该”意在包括复数形式。
还应当进一步理解，在本申请说明书和所附权利要求书中使用的术语“和/或”是指相关联列出的项中的一个或多个的任何组合以及所有可能组合，并且包括这些组合。
如在本说明书和所附权利要求书中所使用的那样，术语“如果”可以依据上下文被解释为“当...时”或“一旦”或“响应于确定”或“响应于检测到”。类似地，短语“如果确定”或“如果检测到[所描述条件或事件]”可以依据上下文被解释为意指“一旦确定”或“响应于确定”或“一旦检测到[所描述条件或事件]”或“响应于检测到[所描述条件或事件]”。
为了说明本申请所述的技术方案，下面通过具体实施例来进行说明。
本申请实施例可以用于彩膜拍照机，彩膜拍照机通常用于液晶面板制作工艺中用来对缺陷拍照。本领域技术人员应该对本申请实施例中的彩膜拍照机做广义的理解。并不限制于现有的采用彩膜拍照机命名的拍照设备。只要采用本申请实施例中所述方法的设备都在本申请保护的范围内。
参见图1，图1是本申请一实施例提供的图像获取装置的坐标校正方法的示意流程图，如图所示该方法可以包括以下步骤：
步骤S101，获取前序制程检测的待拍照样品中的缺陷以及所述缺陷的第一坐标。
在本申请实施例中，前序制程是指在对待拍照样品进行拍照之前进行的工艺步骤，通常是指AOI机台对待拍照样品进行缺陷检测的工艺步骤，AOI机台对待拍照样品进行缺陷检测时，会检测到待拍照样品上的各种缺陷，同时在检测到缺陷时，会获取该缺陷在待检测样品上的第一坐标。所述缺陷是指所述待拍照样品中未达到预定的合格条件的位置，预设的合格条件是指提前设置的用于判定正常和异常的条件，例如可以设定一个样例，若是待检测样品中某个位置与给定的样例匹配度大于阈值，则判定为正常，若是待检测样品中某个位置与给定的样例匹配度小于或者等于阈值，则判定这个位置有缺陷。这个位置对应的坐标就是缺陷的坐标。缺陷主要是指液晶面板在制作过程中引入的一些瑕疵，例如，基板清洗不干净留在基板上的微粒，制程中去胶不干净造成的光刻胶残留，制程中引入的图形异常等，LED制程外延片在晶体生长过程中引入的表面缺陷等。
步骤S102，根据所述缺陷的第一坐标初始化拍照装置的位置，并获取所述拍照装置当前捕获的画面。
在本申请实施例中，待拍照样品放入载物台后，会先搜寻待拍照样品的（0,0）点，然后根据缺陷的第一坐标以及当前（0,0）点的位置驱动拍照装置至缺陷的第一坐标位置。通常载物台也是可以移动的，作为本申请的另一个实施例，可以固定拍照装置的位置，通过移动载物台的位置，使得拍照装置位于缺陷的第一坐标位置。所述拍照装置可以是电荷耦合元件（Charge-coupled Device，CCD），也可以是摄像头，在此不做限制。
可选的，若所述拍照装置当前捕获的画面中所述缺陷位于所述画面的中心位置，对所述缺陷进行拍照。
在本申请实施例中，还需要考虑机台之间不存在机械误差的情况，有可能所述拍照装置当前捕获的画面中所述缺陷就位于所述画面的中心位置，这样就无需再调整拍照装置的位置，直接对所述缺陷进行拍照即可。
步骤S103，若所述拍照装置当前捕获的画面中所述缺陷未位于所述画面的中心位置，则根据所述拍照装置当前捕获的画面中所述缺陷的位置调整所述拍照装置的位置，直到所述拍照装置当前捕获的画面中所述缺陷位于当前捕获的画面的中心位置。
在本申请实施例中，由于在AOI机台检测待拍照样品中的缺陷时，通常会先确定待拍照样品的（0,0）点，然后根据缺陷位置距离（0,0）点的距离确定缺陷的第一坐标（x，y），彩膜拍照机装载待拍照样品后，首先也会先搜寻待拍照样品的（0,0）点，待搜寻到（0,0）点，根据缺陷的第一坐标（x，y）驱动拍照装置至缺陷的位置，直接进行拍照，但是由于机械之间的误差，例如，检测待拍照样品缺陷的AOI机台和当前对待拍照样品拍照的彩膜拍照机之间的机械误差。有可能拍照装置根据缺陷的第一坐标（x，y）移动到相应的位置后，与该第一坐标对应的缺陷并未出现在拍照装置的视野中心，甚至更严重的情况是，与该第一坐标对应的缺陷并未出现在拍照装置的视野中。这时就需要调整拍照装置的位置，可以根据所述拍照装置当前捕获的画面中所述缺陷的位置调整拍照装置的位置，直到所述缺陷出现在拍照装置的视野中心。
作为一个可选的实施例，所述根据所述拍照装置当前捕获的画面中所述缺陷的位置调整所述拍照装置的位置，直到所述拍照装置当前捕获的画面中所述缺陷位于当前捕获的画面的中心位置包括：
根据所述拍照装置当前捕获的画面中所述缺陷的位置计算所述拍照装置的位移信息；
根据所述位移信息调整所述拍照装置的位置，并获取调整位置后的拍照装置当前捕获的画面；
识别调整位置后的拍照装置当前捕获的画面中所述缺陷的位置；
若调整位置后的拍照装置当前捕获的画面中所述缺陷未位于画面的中心位置，则继续调整所述拍照装置的位置直到所述拍照装置当前捕获的画面中所述缺陷位于当前捕获的画面的中心位置；
若调整位置后的拍照装置当前捕获的画面中所述缺陷位于画面的中心位置，则对所述缺陷进行拍照并记录所述缺陷当前的坐标为第二坐标（x ’，y ’）。
在本申请实施例中，初始化位置后的拍照装置捕获的画面中所述缺陷可能未位于画面的中心位置，这时就需要计算画面中所述缺陷距离画面中心的距离（例如x，y两个方向的距离），根据画面中的距离确定拍照装置的位移信息，在拍照装置进行所述位移信息后，继续获取拍照装置当前捕获的画面，一直按照以上方式调整拍照装置的位置直到拍照装置捕获的画面中所述缺陷位于画面的中心位置，并记录所述缺陷位于画面中心位置时的坐标，所述缺陷位于画面中心位置时的坐标记为第二坐标，缺陷的坐标是通过与拍照装置的相对位置获得的。
作为一个可选的实施例，若所述拍照装置当前捕获的画面中所述缺陷未位于所述画面中，根据拍照装置当前的坐标分别向上、下、左、右移动预设距离，若在任一个方向所述拍照装置移动所述预设距离后，所述拍照装置的视野中出现所述缺陷，则根据所述拍照装置当前捕获的画面中所述缺陷的位置调整所述拍照装置的位置。
在本申请实施例中，由于所述拍照装置的视野中有可能未出现所述缺陷，这时就无法继续对所述缺陷进行定位拍照，若是漫无目的的搜寻有可能搜索到的缺陷并不是与所述第一坐标位置对应的缺陷，这时就需要设定一些规则在该第一坐标的四周继续搜寻所述缺陷，可以在该第一坐标的位置对应的向上、向下、向左、向右依次移动预设距离搜寻所述缺陷。需要说明的是，上、下、左、右方位仅仅是用于说明拍照装置可以向该第一坐标的四周按照预设的搜寻规则进行搜寻，还可以演变出向左上、右上、左下、右下的方位移动预设距离进行搜索。关于不同方位的移动顺序也可以相应的调整。若是在四周的方位上搜寻到的缺陷个数多于1个，表明可能根据所述缺陷的坐标无法精确的搜寻到与该第一坐标对应的缺陷，可以获取下一个缺陷的第一坐标进行拍照，根据下一个缺陷的第一坐标与实际缺陷下一个缺陷的位置获得坐标的偏移量。
步骤S104，当检测到所述拍照装置当前捕获的画面中所述缺陷位于当前捕获的画面中心位置时，对所述缺陷进行拍照并记录所述缺陷当前的坐标为第二坐标。
在本申请实施例中，若是调整拍照装置的位置后，所述缺陷位于拍照装置的视野中心，则对所述缺陷进行拍照。所述拍照装置经过移动后所在位置虽然保证了所述缺陷在所述拍照装置的视野中心，但是拍照装置所在的位置已经不是与该缺陷所对应的第一坐标的位置了，就需要重新确认所述缺陷的坐标为第二坐标（x ’，y ’）。
步骤S105，提供所述缺陷的第二坐标至数据管理系统，以便于后序制程根据所述缺陷的第二坐标定位所述缺陷，并对所述缺陷进行相应的操作。
在本申请实施例中，可以将所述缺陷更新后的第二坐标（x ’，y ’）提供至数据管理系统，数据管理系统可以是MES系统，也可以指能够存储并处理坐标数据的系统。其它工艺站点若对待拍照样品中的缺陷进行相应的处理，可以直接从MES系统获取待拍照样品中缺陷更新后的坐标。例如，后序制程中对缺陷进行修复的步骤，由于低倍镜头看到的视野更广，高倍镜头看到的视野较窄小，修复制程中，通常会先用低倍镜头搜寻缺陷，根据缺陷在低倍镜头中的位置，调整到高倍镜头下能看到所述缺陷的位置，再切换高倍镜头进行修复制程，如果后序工艺获取更新后的所述缺陷的第二坐标，就可以根据更新后的第二坐标直接在高倍镜头下进行修复制程，而无需先用低倍镜头搜寻的过程，提高了后序制程的效率，还降低来回切换镜头的机械磨损。
可选的，提供所述缺陷的第二坐标（x ’，y ’）至数据管理系统包括：
更新前序制程检测的待拍照样品中所述缺陷的第一坐标（x，y）为第二坐标（x ’，y ’），并提供更新后的所述缺陷的第二坐标至数据管理系统；
或者提供所述缺陷的第二坐标（x ’，y ’）至数据管理系统，以便于所述数据管理系统将前序制程检测的所述缺陷的第一坐标（x，y）更新为第二坐标（x ’，y ’）。
在本申请实施例中，可以先将前序制程检测的的待拍照样品中缺陷的第一坐标（x，y）更新为调整机械误差后的第二坐标（x ’，y ’），提供至数据管理系统，也可以将调整机械误差后的第二坐标（x ’，y ’）提供至数据管理系统，由数据管理系统将前序制程检测的的待拍照样品中缺陷的第一坐标（x，y）更新为调整机械误差后的第二坐标（x ’，y ’），或者后续制程获取缺陷坐标时直接获取调整机械误差后的第二坐标（x ’，y ’）。
作为可选的一个实施例，当检测到所述拍照装置当前捕获的画面中所述缺陷位于当前捕获的画面的中心位置时，对所述缺陷进行拍照并记录所述缺陷当前的坐标为第二坐标（x ’，y ’）之后，所述方法还包括：
根据所述缺陷的第二坐标（x ’，y ’）以及前序制程检测的所述缺陷的第一坐标（x，y）计算坐标偏移量，以便于对所述待拍照样品中的其它位置的缺陷进行拍照时，根据所述其他位置的缺陷第一坐标以及所述坐标偏移量初始化所述拍照装置的位置。
在本申请实施例中，由于两个机台之间的机械误差基本是一定的，所以可以根据所述缺陷的两次的坐标差值作为坐标偏移量，同时所述坐标偏移量可以作为两台机台的机械误差。通常一个待拍照样品上可能会存在多个缺陷，那么在对待拍照样品中的其他缺陷进行拍照时，就可以先根据所述其他位置的第一坐标（x，y）加上机械误差获得其他缺陷的第二坐标（x ’，y ’），初始化拍照装置的时候直接根据第二坐标（x ’，y ’）初始化拍照装置的位置，可以避免拍照装置来回移动使得缺陷位于拍照装置的视野中心。可以提高拍照效率，同时降低机械磨损。
作为可选的一个实施例，生成图像获取装置（例如彩膜拍照机）和检测待拍照样品中的缺陷以及所述缺陷的第一坐标的前序制程机台的坐标偏移量的对应关系。
在本申请实施例中，可以将计算获得的坐标偏移量设置为图像获取装置（例如彩膜拍照机）和检测待拍照样品中的缺陷以及所述缺陷的第一坐标（x，y）的前序制程机台的坐标偏移量的对应关系。由于一个工厂在某个制程通常会配备多台相同的机台，例如，多台AOI机台和多台彩膜拍照机，为每个AOI机台和每个彩膜拍照机编号，当一个待拍照样品装载于彩膜拍照机后，获取前序制程检测的待拍照样品中的缺陷以及所述缺陷的第一坐标（x，y）的同时，获取检测待拍照样品中的缺陷以及所述缺陷的第一坐标（x，y）的前序制程机台的编号，根据生成的彩膜拍照机和检测待拍照样品中的缺陷以及所述缺陷的第一坐标（x，y）的前序制程机台的坐标偏移量的对应关系直接获取坐标偏移量，就可以根据所述坐标偏移量获得待拍照样品中所有缺陷的第二坐标（x ’，y ’），就可以直接根据缺陷的第二坐标（x ’，y ’）初始化拍照装置的位置。提高拍照效率，同时降低机械磨损。
应理解，在上述实施例中，各步骤的序号的大小并不意味着执行顺序的先后，各步骤的执行顺序应以其功能和内在逻辑确定，而不应对本申请实施例的实施过程构成任何限定。
参见图2，图2是本申请又一实施例提供的图像获取装置的示意框图，为了便于说明，仅示出与本申请实施例相关的部分。
该图像获取装置20可以是内置与终端设备（现有的图像获取装置、彩膜拍照机、彩膜拍照机连接的计算机等）内的软件单元、硬件单元或者软硬件结合的单元，也可以作为独立的挂件集成到所述终端设备中。
所述图像获取装置20包括：
第一坐标获取模块21，用于获取前序制程检测的待拍照样品中的缺陷以及所述缺陷的第一坐标；
拍照装置初始化模块22，用于根据所述缺陷的第一坐标初始化拍照装置的位置，并获取所述拍照装置当前捕获的画面；
拍照装置调整模块23，用于若所述拍照装置当前捕获的画面中所述缺陷未位于所述画面的中心位置，则根据所述拍照装置当前捕获的画面中所述缺陷的位置调整所述拍照装置的位置，直到所述拍照装置当前捕获的画面中所述缺陷位于当前捕获的画面的中心位置；
第二坐标获取模块24，用于当检测到所述拍照装置当前捕获的画面中所述缺陷位于当前捕获的画面的中心位置时，对所述缺陷进行拍照并记录所述缺陷当前的坐标为第二坐标；
上传模块25，用于提供所述缺陷的第二坐标至数据管理系统，以便于后序制程根据所述缺陷的第二坐标定位所述缺陷，并对所述缺陷进行相应的操作。
参见图3，图3是本申请又一实施例提供的图像获取装置的示意框图，在上述图像获取装置20的基础上还增加了：
可选的，所述拍照装置调整模块23包括：
位移信息获取单元331，用于根据所述拍照装置当前捕获的画面中所述缺陷的位置计算所述拍照装置的位移信息；
调整单元332，用于根据所述位移信息调整所述拍照装置的位置，并获取调整位置后的拍照装置当前捕获的画面；
识别单元333，用于识别调整位置后的拍照装置当前捕获的画面中所述缺陷的位置；
处理单元334，用于若调整位置后的拍照装置当前捕获的画面中所述缺陷未位于画面的中心位置，则继续调整所述拍照装置的位置直到所述拍照装置当前捕获的画面中所述缺陷位于当前捕获的画面的中心位置；
其中，所述处理单元334还用于若调整位置后的拍照装置当前捕获的画面中所述缺陷位于画面的中心位置，则对所述缺陷进行拍照并记录所述缺陷当前的坐标为第二坐标。
可选的，所述上传模块25具体用于：
更新前序制程检测的待拍照样品中所述缺陷的第一坐标为第二坐标，并提供更新后的所述缺陷的第二坐标至数据管理系统；
或者提供所述缺陷的第二坐标至数据管理系统，以便于所述数据管理系统将前序制程检测的所述缺陷的第一坐标更新为第二坐标。
可选的，所述图像获取装置20还包括：
偏移量计算模块36，用于根据所述缺陷的第二坐标（x ’，y ’）以及前序制程检测的所述缺陷的第一坐标计算坐标偏移量，以便于对所述待拍照样品中的其它位置的缺陷进行拍照时，根据所述其他位置的缺陷的第一坐标以及所述坐标偏移量初始化所述拍照装置的位置。
可以了解到，为描述的方便和简洁，仅以上述各功能单元、模块的划分进行举例说明，实际应用中，可以根据需要而将上述功能分配由不同的功能单元、模块完成，即所述图像获取装置的内部结构划分成不同的功能单元或模块，以完成以上描述的全部或者部分功能。实施例中的各功能单元或模块可以集成在一个处理单元中，也可以是各个单元单独物理存在，也可以两个或两个以上单元集成在一个单元中，上述集成的单元或模块既可以采用硬件的形式实现，也可以采用软件功能单元的形式实现。另外，各功能单元、模块的具体名称也只是为了便于相互区分，并不用于限制本申请的保护范围。上述图像获取装置中单元、模块的具体工作过程，可以参考前述方法实施例的对应过程，在此不再赘述。
参见图4，图4是本申请再一实施例提供的图像获取装置的示意框图。如图所示的该图像获取装置可以包括：一个或多个处理器401（图4中仅示出一个）；一个或多个输入设备402（图4中仅示出一个），一个或多个输出设备403（图4中仅示出一个）和存储器404。上述处理器401、输入设备402、输出设备403和存储器404通过总线405连接。存储器404用于存储指令，处理器401 用于执行存储器404存储的指令。其中：
所述处理器401，用于通过输入设备402获取前序制程检测的待拍照样品中的缺陷以及所述缺陷的第一坐标；所述处理器401还用于根据所述缺陷的第一坐标初始化拍照装置的位置，并通过输入设备402获取所述拍照装置当前捕获的画面；所述处理器401还用于若所述拍照装置当前捕获的画面中所述缺陷未位于所述画面的中心位置，则根据所述拍照装置当前捕获的画面中所述缺陷的位置调整所述拍照装置的位置，直到所述拍照装置当前捕获的画面中所述缺陷位于当前捕获的画面的中心位置；所述处理器401还用于当检测到所述拍照装置当前捕获的画面中所述缺陷位于当前捕获的画面的中心位置时，对所述缺陷进行拍照并记录所述缺陷当前的坐标为第二坐标；所述处理器401还用于通过输出设备403提供所述缺陷的第二坐标至数据管理系统，以便于后序制程根据所述缺陷的第二坐标定位所述缺陷，并对所述缺陷进行相应的操作。
可选的，所述处理器401还用于根据所述拍照装置当前捕获的画面中所述缺陷的位置计算所述拍照装置的位移信息；所述处理器401还用于根据所述位移信息调整所述拍照装置的位置，并通过输入设备402获取调整位置后的拍照装置当前捕获的画面；所述处理器401还用于识别调整位置后的拍照装置当前捕获的画面中所述缺陷的位置；所述处理器401还用于若调整位置后的拍照装置当前捕获的画面中所述缺陷未位于画面的中心位置，则继续调整所述拍照装置的位置直到所述拍照装置当前捕获的画面中所述缺陷位于当前捕获的画面的中心位置；所述处理器401还用于若调整位置后的拍照装置当前捕获的画面中所述缺陷位于画面的中心位置，则对所述缺陷进行拍照并记录所述缺陷当前的坐标为第二坐标。
可选的，所述处理器401还用于更新前序制程检测的待拍照样品中所述缺陷的第一坐标为第二坐标，并通过输出设备403提供更新后的所述缺陷的第二坐标至数据管理系统；所述处理器401还用于通过输出设备403提供所述缺陷的第二坐标至数据管理系统，以便于所述数据管理系统将前序制程检测的所述缺陷的第一坐标更新为第二坐标。
可选的，所述处理器401还用于根据所述缺陷的第二坐标以及前序制程检测的所述缺陷的第一坐标计算坐标偏移量，以便于对所述待拍照样品中的其它位置的缺陷进行拍照时，根据所述其他位置的缺陷的第一坐标以及所述坐标偏移量初始化所述拍照装置的位置。
可选的，所述处理器401还用于若所述拍照装置当前捕获的画面中所述缺陷位于所述画面的中心位置，对所述缺陷进行拍照。
所述存储器404，用于存储软件程序、模块、单元以及图像获取装置中需要的数据信息，所述处理器401通过运行存储在所述存储器404的软件程序、模块以及单元，从而执行各种功能应用以及数据处理，避免不同机台之间的机械误差造成的坐标偏移，提高后续缺陷修复制程的效率，减小设备损耗。
应当理解，在本申请实施例中，所称处理器401可以是中央处理单元(Central Processing Unit，CPU)，该处理器还可以是其他通用处理器、数字信号处理器 (Digital Signal Processor，DSP)、专用集成电路 (Application Specific Integrated Circuit，ASIC)、现成可编程门阵列 (Field-Programmable Gate Array，FPGA) 或者其他可编程逻辑器件、分立门或者晶体管逻辑器件、分立硬件组件等。通用处理器可以是微处理器或者该处理器也可以是任何常规的处理器等。
输入设备402可以包括触控板、指纹采集传感器（用于采集用户的指纹信息和指纹的方向信息）、麦克风、CCD、数据采集装置、数据接收装置等，输出设备403可以包括显示器（LCD等）、扬声器、数据发送装置等。
该存储器404可以包括只读存储器和随机存取存储器，并向处理器 401 提供指令和数据。存储器 404的一部分还可以包括非易失性随机存取存储器。例如，存储器404还可以存储设备类型的信息。
具体实现中，本申请实施例中所描述的处理器401、输入设备402、输出设备403和存储器404可执行本申请实施例提供的图像获取装置的坐标校正方法的实施例中所描述的实现方式，也可执行图像获取装置的实施例中所描述的实现方式，在此不再赘述。
本领域普通技术人员可以意识到，结合本文中所公开的实施例描述的各示例的模块及算法步骤，能够以电子硬件、计算机软件或者二者的结合来实现，为了清楚地说明硬件和软件的可互换性，在上述说明中已经按照功能一般性地描述了各示例的组成及步骤。这些功能究竟以硬件还是软件方式来执行，取决于技术方案的特定应用和设计约束条件。专业技术人员可以对每个特定的应用来使用不同方法来实现所描述的功能，但是这种实现不应认为超出本申请的范围。
在本申请所提供的实施例中，应该理解到，所揭露的图像获取装置和方法，可以通过其它的方式实现。例如，以上所描述的实施例仅仅是示意性的，例如，所述模块或单元的划分，仅仅为一种逻辑功能划分，实际实现时可以有另外的划分方式，例如多个单元或组件可以结合或者可以集成到另一个系统，或一些特征可以忽略，或不执行。另一点，所显示或讨论的相互之间的耦合或直接耦合或通讯连接可以是通过一些接口，装置或单元的间接耦合或通讯连接，可以是电性，机械或其它的形式。
所述作为分离部件说明的单元可以是或者也可以不是物理上分开的，作为单元显示的部件可以是或者也可以不是物理单元，即可以位于一个地方，或者也可以分布到多个网络单元上。可以根据实际的需要选择其中的部分或者全部单元来实现本实施例方案的目的。
另外，在本申请各个实施例中的各功能模块可以集成在一个处理单元中，也可以是各个单元单独物理存在，也可以两个或两个以上单元集成在一个单元中。上述集成的单元既可以采用硬件的形式实现，也可以采用软件功能单元的形式实现。
所述集成的单元如果以软件功能单元的形式实现并作为独立的产品销售或使用时，可以存储在一个计算机可读取存储介质中。基于这样的理解，本申请实施例的技术方案本质上或者说对现有技术做出贡献的部分或者该技术方案的全部或部分可以以软件产品的形式体现出来，该计算机软件产品存储在一个存储介质中，包括若干指令用以使得一台计算机设备（可以是个人计算机，服务器，或者网络设备等）或处理器（processor）执行本申请实施例各个实施例所述方法的全部或部分步骤。而前述的存储介质包括：U盘、移动硬盘、只读存储器（ROM，Read-Only Memory）、随机存取存储器（RAM，Random Access Memory）、磁碟或者光盘等各种可以存储程序代码的介质。
以上所述实施例仅用以说明本申请的技术方案，而非对其限制；尽管参照前述实施例对本申请进行了详细的说明，本领域的普通技术人员应当理解：其依然可以对前述各实施例所记载的技术方案进行修改，或者对其中部分技术特征进行等同替换；而这些修改或者替换，并不使相应技术方案的本质脱离本申请实施例各实施例技术方案的精神和范围。

Claims (19)

  1. 一种图像获取装置的坐标校正方法，包括：
    获取前序制程检测的待拍照样品中的缺陷以及所述缺陷的第一坐标；
    根据所述缺陷的第一坐标初始化拍照装置的位置，并获取所述拍照装置当前捕获的画面；
    若所述拍照装置当前捕获的画面中所述缺陷未位于所述画面的中心位置，则根据所述拍照装置当前捕获的画面中所述缺陷的位置调整所述拍照装置的位置，直到所述拍照装置当前捕获的画面中所述缺陷位于当前捕获的画面的中心位置；
    当检测到所述拍照装置当前捕获的画面中所述缺陷位于当前捕获的画面的中心位置时，对所述缺陷进行拍照并记录所述缺陷当前的坐标为第二坐标；
    提供所述缺陷的第二坐标至数据管理系统，以便于后序制程根据所述缺陷的第二坐标定位所述缺陷，并对所述缺陷进行相应的操作。
  2. 根据权利要求1所述的方法，其中，所述根据所述拍照装置当前捕获的画面中所述缺陷的位置调整所述拍照装置的位置，直到所述拍照装置当前捕获的画面中所述缺陷位于当前捕获的画面的中心位置包括：
    根据所述拍照装置当前捕获的画面中所述缺陷的位置计算所述拍照装置的位移信息；
    根据所述位移信息调整所述拍照装置的位置，并获取调整位置后的拍照装置当前捕获的画面；
    识别调整位置后的拍照装置当前捕获的画面中所述缺陷的位置；
    若调整位置后的拍照装置当前捕获的画面中所述缺陷未位于画面的中心位置，则继续调整所述拍照装置的位置直到所述拍照装置当前捕获的画面中所述缺陷位于当前捕获的画面的中心位置；
    若调整位置后的拍照装置当前捕获的画面中所述缺陷位于画面的中心位置，则对所述缺陷进行拍照并记录所述缺陷当前的坐标为第二坐标。
  3. 根据权利要求1所述的方法，其中，所述提供所述缺陷的第二坐标至数据管理系统包括：
    更新前序制程检测的待拍照样品中所述缺陷的第一坐标为第二坐标，并提供更新后的所述缺陷的第二坐标至数据管理系统。
  4. 根据权利要求1所述的方法，其中，所述提供所述缺陷的第二坐标至数据管理系统包括：
    提供所述缺陷的第二坐标至数据管理系统，以便于所述数据管理系统将前序制程检测的所述缺陷的第一坐标更新为第二坐标。
  5. 根据权利要求1所述的方法，其中，当检测到所述拍照装置当前捕获的画面中所述缺陷位于当前捕获的画面的中心位置时，对所述缺陷进行拍照并记录所述缺陷当前的坐标为第二坐标之后，所述方法还包括：
    根据所述缺陷的第二坐标以及前序制程检测的所述缺陷的第一坐标计算坐标偏移量，以便于对所述待拍照样品中的其它位置的缺陷进行拍照时，根据所述其他位置的缺陷的第一坐标以及所述坐标偏移量初始化所述拍照装置的位置。
  6. 根据权利要求5所述的方法，其中，在根据所述缺陷的第二坐标以及前序制程检测的所述缺陷的第一坐标计算坐标偏移量之后，所述方法还包括：
    将计算获得的坐标偏移量设置为图像获取装置和检测待拍照样品中的缺陷以及所述缺陷的第一坐标的前序制程机台的坐标偏移量，以便于根据所述坐标偏移量获取具有相同前序制程机台的待拍照样品中所有缺陷的第二坐标。
  7. 根据权利要求1所述的方法，其中，在根据所述缺陷的坐标初始化拍照装置的位置，并获取所述拍照装置当前捕获的画面之后，所述方法还包括：
    若所述拍照装置当前捕获的画面中所述缺陷位于所述画面的中心位置，对所述缺陷进行拍照。
  8. 根据权利要求1所述的方法，其中，所述根据所述缺陷的第一坐标初始化拍照装置的位置，并获取所述拍照装置当前捕获的画面之后，所述方法还包括：
    若所述拍照装置当前捕获的画面中所述缺陷未位于所述画面中，根据拍照装置当前的坐标移动预设距离；
    若在任一个方向所述拍照装置移动所述预设距离后，所述拍照装置的视野中出现所述缺陷，则根据所述拍照装置当前捕获的画面中所述缺陷的位置调整所述拍照装置的位置。
  9. 根据权利要求8所述的方法，其中，所述根据拍照装置当前的坐标移动预设距离包括：
    根据拍照装置当前的坐标向上、下、左、右依次移动预设距离。
  10. 一种图像获取装置的坐标校正方法，包括：
    获取前序制程检测的待拍照样品中的缺陷以及所述缺陷的第一坐标；
    根据所述缺陷的第一坐标初始化拍照装置的位置，并获取所述拍照装置当前捕获的画面；
    若所述拍照装置当前捕获的画面中所述缺陷未位于所述画面的中心位置，则根据所述拍照装置当前捕获的画面中所述缺陷的位置调整所述拍照装置的位置，直到所述拍照装置当前捕获的画面中所述缺陷位于当前捕获的画面的中心位置；
    当检测到所述拍照装置当前捕获的画面中所述缺陷位于当前捕获的画面的中心位置时，对所述缺陷进行拍照并记录所述缺陷当前的坐标为第二坐标；
    提供所述缺陷的第二坐标至数据管理系统，以便于后序制程根据所述缺陷的第二坐标定位所述缺陷，并对所述缺陷进行相应的操作；
    根据所述缺陷的第二坐标以及前序制程检测的所述缺陷的第一坐标计算坐标偏移量，以便于对所述待拍照样品中的其它位置的缺陷进行拍照时，根据所述其他位置的缺陷的第一坐标以及所述坐标偏移量初始化所述拍照装置的位置；
    将计算获得的坐标偏移量设置为图像获取装置和检测待拍照样品中的缺陷以及所述缺陷的第一坐标的前序制程机台的坐标偏移量，以便于根据所述坐标偏移量获取具有相同前序制程机台的待拍照样品中所有缺陷的第二坐标。
  11. 一种图像获取装置，包括：存储器、处理器及存储在存储器上并可在处理器上运行的以下程序模块：
    第一坐标获取模块，用于获取前序制程检测的待拍照样品中的缺陷以及所述缺陷的第一坐标；
    拍照装置初始化模块，用于根据所述缺陷的第一坐标初始化拍照装置的位置，并获取所述拍照装置当前捕获的画面；
    拍照装置调整模块，用于若所述拍照装置当前捕获的画面中所述缺陷未位于所述画面的中心位置，则根据所述拍照装置当前捕获的画面中所述缺陷的位置调整所述拍照装置的位置，直到所述拍照装置当前捕获的画面中所述缺陷位于当前捕获的画面的中心位置；
    第二坐标获取模块，用于当检测到所述拍照装置当前捕获的画面中所述缺陷位于当前捕获的画面的中心位置时，对所述缺陷进行拍照并记录所述缺陷当前的坐标为第二坐标；
    上传模块，用于提供所述缺陷的第二坐标至数据管理系统，以便于后序制程根据所述缺陷的第二坐标定位所述缺陷，并对所述缺陷进行相应的操作。
  12. 根据权利要求11所述的图像获取装置，其中，所述拍照装置调整模块包括：
    位移信息获取单元，用于根据所述拍照装置当前捕获的画面中所述缺陷的位置计算所述拍照装置的位移信息；
    调整单元，用于根据所述位移信息调整所述拍照装置的位置，并获取调整位置后的拍照装置当前捕获的画面；
    识别单元，用于识别调整位置后的拍照装置当前捕获的画面中所述缺陷的位置；
    处理单元，用于若调整位置后的拍照装置当前捕获的画面中所述缺陷未位于画面的中心位置，则继续调整所述拍照装置的位置直到所述拍照装置当前捕获的画面中所述缺陷位于当前捕获的画面的中心位置；
    其中，所述处理单元还用于若调整位置后的拍照装置当前捕获的画面中所述缺陷位于画面的中心位置，则对所述缺陷进行拍照并记录所述缺陷当前的坐标为第二坐标。
  13. 根据权利要求11所述的图像获取装置，其中，所述上传模块具体用于：
    更新前序制程检测的待拍照样品中所述缺陷的第一坐标为第二坐标，并提供更新后的所述缺陷的坐标至数据管理系统。
  14. 根据权利要求11所述的图像获取装置，其中，所述上传模块具体用于：
    提供所述缺陷的第一坐标至数据管理系统，以便于所述数据管理系统将前序制程检测的所述缺陷的第一坐标更新为第二坐标。
  15. 根据权利要求11所述的图像获取装置，还包括：
    偏移量计算模块，用于根据所述缺陷的第二坐标以及前序制程检测的所述缺陷的第一坐标计算坐标偏移量，以便于对所述待拍照样品中的其它位置的缺陷进行拍照时，根据所述其他位置的缺陷的第一坐标以及所述坐标偏移量初始化所述拍照装置的位置。
  16. 根据权利要求15所述的图像获取装置，还包括：
    机台坐标偏移量设置模块，用于将计算获得的坐标偏移量设置为图像获取装置和检测待拍照样品中的缺陷以及所述缺陷的第一坐标的前序制程机台的坐标偏移量，以便于根据所述坐标偏移量获取所述待拍照样品中所有缺陷的第二坐标。
  17. 根据权利要求11所述的图像获取装置，还包括：
    拍照模块，用于在根据所述缺陷的坐标初始化拍照装置的位置，并获取所述拍照装置当前捕获的画面之后，若所述拍照装置当前捕获的画面中所述缺陷位于所述画面的中心位置，对所述缺陷进行拍照。
  18. 根据权利要求11所述的图像获取装置，还包括：
    移动模块，用于根据所述缺陷的第一坐标初始化拍照装置的位置，并获取所述拍照装置当前捕获的画面之后，若所述拍照装置当前捕获的画面中所述缺陷未位于所述画面中，根据拍照装置当前的坐标向上、下、左、右依次移动预设距离；
    拍照装置调整模块，还用于若在任一个方向所述拍照装置移动所述预设距离后，所述拍照装置的视野中出现所述缺陷，则根据所述拍照装置当前捕获的画面中所述缺陷的位置调整所述拍照装置的位置。
  19. 根据权利要求18所述的图像获取装置，其中，所述移动模块具体用于：根据拍照装置当前的坐标向上、下、左、右依次移动预设距离。
PCT/CN2017/115872 2017-05-15 2017-12-13 一种图像获取装置的坐标校正方法及图像获取装置 Ceased WO2018209936A1 (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US15/745,067 US10388010B2 (en) 2017-05-15 2017-12-13 Image acquiring device and method of correcting coordinates thereof

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201710338243.XA CN107040725B (zh) 2017-05-15 2017-05-15 一种图像获取装置的坐标校正方法及图像获取装置
CN201710338243.X 2017-05-15

Publications (1)

Publication Number Publication Date
WO2018209936A1 true WO2018209936A1 (zh) 2018-11-22

Family

ID=59537481

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2017/115872 Ceased WO2018209936A1 (zh) 2017-05-15 2017-12-13 一种图像获取装置的坐标校正方法及图像获取装置

Country Status (3)

Country Link
US (1) US10388010B2 (zh)
CN (1) CN107040725B (zh)
WO (1) WO2018209936A1 (zh)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107040725B (zh) 2017-05-15 2021-04-30 惠科股份有限公司 一种图像获取装置的坐标校正方法及图像获取装置
CN108226179B (zh) * 2018-01-10 2021-01-22 京东方科技集团股份有限公司 自动光学检测设备的校准方法及自动修复系统
CN110091591B (zh) * 2018-04-18 2020-07-10 广东聚华印刷显示技术有限公司 玻璃夹具的偏移校正方法、装置和系统
JP6740288B2 (ja) * 2018-07-13 2020-08-12 ファナック株式会社 物体検査装置、物体検査システム、及び検査位置を調整する方法
CN110194298A (zh) * 2019-05-24 2019-09-03 珠海格力智能装备有限公司 物品质量的确定方法及装置
CN111080582B (zh) * 2019-12-02 2023-06-02 易思维（杭州）科技有限公司 工件内外表面缺陷检测方法
CN111199294A (zh) * 2019-12-17 2020-05-26 贵州电网有限责任公司 基于可视化的设备缺陷管理系统及方法
CN111912856A (zh) * 2020-07-30 2020-11-10 北京首钢股份有限公司 一种板带材表面缺陷分析系统
CN113329147B (zh) * 2021-04-29 2022-10-18 苏州科韵激光科技有限公司 一种图像获取装置以及显示面板的修复设备
CN115803610A (zh) * 2021-05-25 2023-03-14 京东方科技集团股份有限公司 图像获取方法及装置、存储介质
CN114827466B (zh) * 2022-04-20 2023-07-04 武汉三江中电科技有限责任公司 一种仿人眼的设备图像采集装置及图像采集方法
CN115471446A (zh) * 2022-06-23 2022-12-13 上海江波龙数字技术有限公司 槽位坐标获取方法、装置及存储介质
CN116452791B (zh) * 2023-03-27 2024-03-22 广州市斯睿特智能科技有限公司 多相机点位的缺陷区域定位方法、系统、装置及存储介质
CN116408279B (zh) * 2023-04-07 2024-12-06 深圳三友智能自动化设备有限公司 一种自动筛选测试机
CN117078586B (zh) * 2023-05-05 2025-07-25 北京工业大学 一种面向dlp 3d打印过程中树脂填充不足的缺陷检测与修复方法
CN118397105A (zh) * 2024-04-07 2024-07-26 深圳市燕麦科技股份有限公司 一种基于机器视觉遍历的定位校准示教方法及系统
CN118999354B (zh) * 2024-08-22 2026-02-06 武汉精立电子技术有限公司 Ned设备的检测对位方法及装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000340606A (ja) * 1999-05-31 2000-12-08 Hitachi Ltd 半導体装置の製造方法およびそれを用いた半導体製造装置
CN101587080A (zh) * 2008-05-21 2009-11-25 奥林巴斯株式会社 基板观察装置、基板观察方法以及控制装置
CN102023161A (zh) * 2009-09-09 2011-04-20 中芯国际集成电路制造(上海)有限公司 获取缺陷图像的方法
CN102435629A (zh) * 2011-11-28 2012-05-02 上海华力微电子有限公司 扫描电子显微镜的检测方法
CN107040725A (zh) * 2017-05-15 2017-08-11 惠科股份有限公司 一种图像获取装置的坐标校正方法及图像获取装置

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3936873B2 (ja) * 2002-02-01 2007-06-27 株式会社日立ハイテクノロジーズ 欠陥撮像装置及び撮像方法
US7317481B2 (en) * 2002-02-20 2008-01-08 Canon Kabushiki Kaisha Image data correction processing based on sensitivity
JP3993817B2 (ja) * 2002-12-11 2007-10-17 株式会社日立製作所 欠陥組成分析方法及び装置
JP4079841B2 (ja) * 2003-06-30 2008-04-23 オリンパス株式会社 欠陥表示装置
JP4374303B2 (ja) * 2004-09-29 2009-12-02 株式会社日立ハイテクノロジーズ 検査方法及びその装置
JP2008529067A (ja) * 2005-01-21 2008-07-31 フォトン・ダイナミクス・インコーポレーテッド 自動欠陥修復システム
JP4629118B2 (ja) * 2008-03-03 2011-02-09 株式会社日立ハイテクノロジーズ 欠陥検査装置およびこの欠陥検査装置に用いるパラメータ調整方法。
CN101566581B (zh) * 2009-05-27 2011-04-13 深圳市美威数控技术有限公司 一种自动光学检测方法及系统
JP5645636B2 (ja) * 2010-12-16 2014-12-24 三菱電機株式会社 フレーム補間装置及び方法
JP2015166722A (ja) * 2014-03-04 2015-09-24 大日本印刷株式会社 欠陥画像撮像装置及び欠陥画像撮像方法
JP6499898B2 (ja) * 2014-05-14 2019-04-10 株式会社ニューフレアテクノロジー 検査方法、テンプレート基板およびフォーカスオフセット方法
JP6423011B2 (ja) * 2015-01-23 2018-11-14 株式会社日立ハイテクノロジーズ パターン測定装置及び欠陥検査装置
JP6145133B2 (ja) * 2015-06-04 2017-06-07 株式会社日立ハイテクノロジーズ 荷電粒子線装置
CN105115979A (zh) * 2015-09-09 2015-12-02 苏州威盛视信息科技有限公司 基于图像拼接技术的pcb工作片aoi检测方法
CN106054421B (zh) * 2016-07-28 2019-06-18 京东方科技集团股份有限公司 一种液晶面板缺陷的检测方法及装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000340606A (ja) * 1999-05-31 2000-12-08 Hitachi Ltd 半導体装置の製造方法およびそれを用いた半導体製造装置
CN101587080A (zh) * 2008-05-21 2009-11-25 奥林巴斯株式会社 基板观察装置、基板观察方法以及控制装置
CN102023161A (zh) * 2009-09-09 2011-04-20 中芯国际集成电路制造(上海)有限公司 获取缺陷图像的方法
CN102435629A (zh) * 2011-11-28 2012-05-02 上海华力微电子有限公司 扫描电子显微镜的检测方法
CN107040725A (zh) * 2017-05-15 2017-08-11 惠科股份有限公司 一种图像获取装置的坐标校正方法及图像获取装置

Also Published As

Publication number Publication date
CN107040725A (zh) 2017-08-11
CN107040725B (zh) 2021-04-30
US10388010B2 (en) 2019-08-20
US20190096054A1 (en) 2019-03-28

Similar Documents

Publication Publication Date Title
WO2018209936A1 (zh) 一种图像获取装置的坐标校正方法及图像获取装置
US8212869B2 (en) Substrate inspection method, substrate inspection system and storage medium
CN111553897B (zh) 晶圆缺陷检测设备
CN102023168B (zh) 半导体晶圆表面的芯片检测方法及系统
CN107945152A (zh) 工业相机的缺陷检测控制系统及方法
CN111554591B (zh) 半导体芯片处理装置
JP2010141697A (ja) 撮像装置
CN114693626A (zh) 芯片表面缺陷的检测方法、装置及计算机可读存储介质
CN114612447A (zh) 一种基于数据标定的图像处理方法及装置、图像处理设备
CN115713491B (zh) 液晶显示面板缺陷检测方法、装置及电子设备
JP2010141700A (ja) 撮像装置
CN103247548B (zh) 一种晶圆缺陷检测装置及方法
WO2022246643A1 (zh) 图像获取方法及装置、存储介质
WO2024055662A1 (zh) 一种近眼显示模组检测方法及检测系统
CN113079318B (zh) 晶边缺陷自动对焦系统及方法和计算机存储介质
CN108346592A (zh) 一种模拟晶圆背面缺陷的方法及装置
CN117686512A (zh) 硅片倒角崩边视觉检测方法及装置
CN110264436B (zh) 对电子零元件执行批次且多面向影像检测的装置及方法
WO2019200622A1 (zh) 一种通话设备中听筒的质量检测系统、方法及装置
US20030156749A1 (en) Pattern inspecting apparatus and pattern inspecting method
CN118858298A (zh) 一种耳机充电座检测方法、系统及设备
CN118823363A (zh) 图像异常检测方法、装置、设备及计算机可读存储介质
TWI852856B (zh) 一種對一待檢測物進行檢測的方法與檢測裝置
CN117745627A (zh) 一种硅片镜像崩边视觉检测方法及装置
CN120376435A (zh) 一种晶圆测试方法、系统、设备和介质

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 17910175

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

32PN Ep: public notification in the ep bulletin as address of the adressee cannot be established

Free format text: NOTING OF LOSS OF RIGHTS PURSUANT TO RULE 112(1) EPC (EPO FORM 1205A DATED 19/05/2020)

122 Ep: pct application non-entry in european phase

Ref document number: 17910175

Country of ref document: EP

Kind code of ref document: A1