WO2018205960A1 - 测试设备及其给电治具 - Google Patents

测试设备及其给电治具 Download PDF

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Publication number
WO2018205960A1
WO2018205960A1 PCT/CN2018/086234 CN2018086234W WO2018205960A1 WO 2018205960 A1 WO2018205960 A1 WO 2018205960A1 CN 2018086234 W CN2018086234 W CN 2018086234W WO 2018205960 A1 WO2018205960 A1 WO 2018205960A1
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WO
WIPO (PCT)
Prior art keywords
probe
probe holder
elastic probes
fixture
groove
Prior art date
Application number
PCT/CN2018/086234
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English (en)
French (fr)
Inventor
胡海
李国泉
王泰山
李成鹏
刘文斌
Original Assignee
深圳瑞波光电子有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 深圳瑞波光电子有限公司 filed Critical 深圳瑞波光电子有限公司
Publication of WO2018205960A1 publication Critical patent/WO2018205960A1/zh

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2863—Contacting devices, e.g. sockets, burn-in boards or mounting fixtures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2865—Holding devices, e.g. chucks; Handlers or transport devices

Definitions

  • the present invention relates to the field of semiconductor laser chip testing technology, and in particular to a test device and an electrical device therefor.
  • LD semiconductor laser
  • DPL LD pumped solid-state laser
  • DPL Diode-Pumped Solid-State Laser
  • the semiconductor laser chip is the core part of the semiconductor laser and is called the semiconductor laser "CPU”.
  • Full Bar is a kind of high-power semiconductor laser chip that is not electrically isolated. Testing and characterizing the performance parameters (such as LIV characteristics, spectral characteristics, etc.) of the bare BAR of the unpowered high-power semiconductor laser is a deep understanding of the characteristics of the laser chip and optimization of the chip. The key to structural design and perfect chip production process is also an important basis for judging the quality of laser chips. Therefore, non-destructive testing of unpowered high-power semiconductor laser chips is of paramount importance for research institutes, manufacturers, and customers.
  • Non-destructive testing of bare BAR of unpowered high-power semiconductor lasers is required to ensure reliable contact of the fixture with bare BAR under test power supply, and to provide a stable and uniform injection of large current to the fixture. Therefore, high requirements are placed on the electrical fixtures required for bare BAR testing.
  • FIG. 1 is a schematic diagram of the principle of the utility model in the prior art.
  • the existing unpowered high-power semiconductor laser bare BAR10 test often uses the shrapnel foil 20 as the electric control fixture.
  • the main drawback is that although it can reliably contact the bare BAR10 with a certain elasticity, it can be given to the electric fixture. It is difficult to make a close contact with the bare BAR10, and it is difficult to ensure uniform injection of current on the bare BAR10.
  • the invention provides a test device and an electric control tool thereof, which can solve the technical problem that the electric control tool and the bare BAR are difficult to be in contact with each other in the prior art.
  • a technical solution adopted by the present invention is to provide an electric control tool for injecting a large current into a semiconductor laser without electrically isolating a bare BAR test
  • the electric fixture includes a probe fixture and a plurality of The elastic probe and the probe holder clamp and fix a plurality of elastic probes, and the ends of the plurality of elastic probes are in the same plane.
  • the probe holder includes a probe holder and a probe fixing member.
  • the probe holder is provided with an accommodating space, and a plurality of elastic probes are disposed in the accommodating space, and the probe fixing member is configured to fix the plurality of elastic probes.
  • the probe base includes a probe holder body and a lug extending from a side of the probe holder body.
  • the accommodation space is formed in a middle portion of the probe holder body, and the lug is used for pre-fixing the power supply output wire.
  • a first groove is formed in a middle portion of the probe holder body, the first groove is disposed through a width direction of the probe holder body, and a receiving block is disposed in the first groove, and the receiving space is formed in the receiving block.
  • the space is set to the second groove.
  • the top surface of the accommodating block is lower than the top surface of the probe holder body, and the width of the accommodating block is smaller than the width of the probe holder body, and the space adjacent to the accommodating block in the first groove is used for placing the solder.
  • the probe fixing member includes a fixing plate and a boss extending from a bottom surface of the fixing plate.
  • the boss is coupled with the first groove to fix the plurality of elastic probes, and the probe base and the fixing plate are fixedly connected by screws.
  • a plurality of elastic probes are arranged in a plurality of rows overlapping.
  • the plurality of elastic probes are arranged in two rows, each row has 25 elastic probes, each of the elastic probes has an outer diameter of 0.35 mm, and the probe holder and the probe fixing member are processed by copper and plated. Nickel surface treatment.
  • the plurality of elastic probes are disposed on the same plane by the end of the plurality of elastic probes by the plane making fixture, and the plane making fixture comprises the fixture body, and the third groove having the cross section of w shape is formed in the fixture body, and the third groove is formed
  • the probe holder bottom surface placement surface, the probe holder side placement surface, the probe engagement surface and the probe abutting surface are sequentially connected, and the probe holder is positioned through the probe holder bottom placement surface and the probe holder side placement surface, and the plurality of probe holders are disposed.
  • the elastic probe is disposed on the probe base, and one end of the tip extends above the probe engaging surface until it abuts against the probe abutting surface.
  • a technical solution adopted by the present invention is to provide a test device including the above-mentioned power supply fixture.
  • the embodiment of the present invention provides a plurality of elastic probes in which the needle tips are in the same plane, thereby ensuring good contact between the electrical fixture and the non-electrically isolated bare BAR, which is beneficial to the unelectrically isolated bare BAR test.
  • FIG. 1 is a schematic diagram of the principle of an electric fixture in the prior art
  • FIG. 2 is a schematic perspective view of the electric fixture of the present invention
  • Figure 3 is a schematic exploded view of the electric control fixture shown in Figure 2;
  • FIG. 4 is a schematic view showing the assembly structure of the electric control tool and the flat manufacturing jig shown in FIG. 2.
  • FIG. 2 is a schematic perspective view of the electric fixture of the present invention
  • FIG. 3 is a schematic diagram of the exploded structure of the electric control fixture shown in FIG.
  • the electric fixture is used to inject a large current when the semiconductor laser is not electrically isolated bare BAR test, wherein the bare BAR refers to an un-insulated BAR strip that is not electrically isolated, and the fixture includes a probe fixture.
  • the plurality of elastic probes 101 are clamped and fixed to the plurality of elastic probes 101, and the ends of the plurality of elastic probes 101 are in the same plane.
  • the probe holder includes a probe holder 201 and a probe holder 301.
  • the probe base 201 is provided with an accommodating space, and a plurality of elastic probes 101 are disposed in the accommodating space.
  • the probe base 201 includes a probe holder body 202 and a lug 203 extending from a side of the probe holder body 202.
  • the accommodating space is formed in a middle portion of the probe holder body 202, and the lug 203 is used for pre-fixing.
  • the electric power output wire, preferably, the probe holder body 202 and the lug 203 are integrally formed.
  • the first recess 204 is formed in the middle of the probe holder body 202.
  • the first recess 204 is disposed in the width direction of the probe holder body 202.
  • the first recess 204 is provided with a receiving block 205 for accommodating the space.
  • the accommodating space is the second groove 206.
  • the top surface of the accommodating block 205 is lower than the top surface of the probe base body 202.
  • the width of the accommodating block 205 is smaller than the width of the probe base body 202.
  • the space in the first recess 204 adjacent to the accommodating block 205 is used for placing. solder.
  • the accommodating space may be formed at a portion such as a side portion of the probe holder body 202.
  • the top surface of the receiving block 205 can also be flush with the top surface of the probe holder body 202, and the height of the receiving block 205 is determined by the height of the elastic probe 101.
  • a mounting hole 207 is further provided at both ends of the probe base body 202 for mounting the electrical fixture to the test equipment as a whole.
  • the probe fixing member 301 includes a fixing plate 302 and a boss 303 extending from a bottom surface of the fixing plate 302.
  • the boss 303 is coupled with the first groove 204, and the probe base 201 and the fixing plate 302 are fixedly connected by a screw 40, and the probe base is fixed.
  • Two screw holes are respectively disposed on two sides of the main body 202 adjacent to the first recess 204, and two screw holes are respectively disposed in the corresponding positions of the fixing plate 302.
  • the probe base 201 and the fixing plate 302 are fixedly connected by four screws 40.
  • the boss 303 and the first recess 204 are preferably a transition fit or a clearance fit, as long as the tip of the elastic probe 101 can be fixedly held in the same plane, the pair of bosses 303 and the first recess 204 The way of cooperation is not limited. In other embodiments, the boss 303 may also be absent. Among them, the fixing plate 302 and the boss 303 are preferably integrally formed.
  • the plurality of elastic probes 101 are arranged in a plurality of rows overlapping.
  • the plurality of elastic probes 101 are arranged in two rows, and each row may have 1-30 elastic probes 101, for example, 25 elastic probes 101, and the outer diameter of each elastic probe 101 may be
  • the elastic probes 101 of each row are closely connected to each other at 0.1 to 3 mm, for example, 0.35 mm.
  • the elastic probe 101 such as 3 rows or 4 rows may be provided, or the elastic probe 101 of other outer diameters may be disposed.
  • the number and the outer diameter of the elastic probe 101 are not limited in the present invention.
  • the probe holder 201 and the probe holder 301 are preferably processed by copper and subjected to a nickel plating surface treatment, whereby the probe holder 201 and the probe holder 301 can be easily welded.
  • a split probe holder is used, that is, the probe holder includes a probe holder 201 and a probe holder 301, and in other embodiments, an integral probe holder can also be used. This is not limited.
  • FIG. 4 is a schematic view showing the assembly structure of the electric control fixture and the plane manufacturing fixture 50 shown in FIG. It is mentioned above that the tips of the plurality of elastic probes 101 are in the same plane, in this embodiment, The end of the tip end of the plurality of elastic probes 101 is in the same plane by the plane making jig 50.
  • the plane making jig 50 includes a jig body 506, and a third groove 501 having a w-shaped cross section is formed in the jig body 506, and the third groove 501 is formed.
  • the probe holder 201 includes a bottom surface placement surface 502, a probe holder 201 side placement surface 503, a probe engagement surface 504, and a probe abutment surface 505.
  • the probe holder 201 is placed on the bottom surface of the probe holder 201 and probed.
  • the needle holder 201 is positioned on the side placement surface 503.
  • the plurality of elastic probes 101 are disposed on the probe holder 201, and one end of the needle tip extends above the probe engagement surface 504 until it abuts against the probe abutment surface 505.
  • a right-angled jig can be directly used to make the end points of the plurality of elastic probes 101 in the same plane.
  • the probe base 201 is fixed to the horizontal plane of the clamp, and the end of the tip of the elastic probe 101 abuts.
  • the vertical faces are such that the tips of the plurality of elastic probes 101 are in the same plane.
  • the electric fixture is fixed on the plane making fixture 50, and 50 outer diameter 0.35 mm elastic probes 101 are arranged one by one in the accommodating space of the probe holder body 202, and the array of elastic probes 101 is 2x25;
  • the probe fixing member 301 is fixed on the probe holder body 202 by four M2 screws;
  • the invention also provides a testing device, which comprises the electrical device of the above embodiment, which can integrate and test the optical power, electrical and wavelength characteristics of the bare BAR, and develop and produce a high-performance high-power semiconductor laser. Provides a strong guarantee.
  • the embodiment of the present invention provides a plurality of elastic probes in which the needle tips are in the same plane, thereby ensuring good contact between the electrical fixture and the non-electrically isolated bare BAR, which is beneficial to the unelectrically isolated bare BAR test. Further, it is possible to perform a non-destructive test with a carrying pulse current of up to 200A.

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  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measuring Leads Or Probes (AREA)

Abstract

一种给电治具，用于对半导体激光器未电隔离裸BAR测试时注入大电流，包括：探针夹具和多个弹性探针（101），探针夹具夹持固定多个弹性探针（101），多个弹性探针（101）的针尖一端处于同一平面。一种测试设备，给电治具的弹性探针针尖（101）处于同一平面，与未电隔离裸BAR接触良好，有利于未电隔离裸BAR测试。

Description

测试设备及其给电治具
【技术领域】
本发明涉及半导体激光器芯片测试技术领域，特别是涉及一种测试设备及其给电治具。
【背景技术】
随着半导体激光器（LD,Laser Diode）应用领域如LD泵浦固体激光器（DPL，Diode-Pumped Solid-State Laser）、各类光纤激光器的泵源、激光切割、焊接、医疗以及激光军事应用等的日益拓宽，对半导体激光器输出功率、可靠性的要求也越来越大。半导体激光器芯片是半导体激光器核心部分，具有半导体激光器“CPU”之称。
Full bar是一种未电隔离的大功率半导体激光器芯片，对未电隔离的大功率半导体激光器裸BAR的性能参数（如LIV特性、光谱特性等）进行测试和表征是深刻理解激光器芯片特性、优化芯片结构设计及完善芯片生产工艺的关键，同时也是判断激光器芯片好坏的重要依据。因此对未电隔离的大功率半导体激光器芯片进行无损测试不论对于科研单位、生产厂商、使用客户都具有极为重要的意义。
对未电隔离的大功率半导体激光器裸BAR进行无损测试，需保证在测试给电时给电治具与裸BAR以一定压力的可靠接触，且给电治具需稳定、均匀注入较大的电流，因此对裸BAR测试时所需的给电治具提出了较高的要求。
请参阅图1，图1是现有技术中给电治具的原理示意图。现有的未电隔离的大功率半导体激光器裸BAR10测试常采用弹片金属薄片20作为给电治具，主要存在的缺陷是：它虽能以一定的弹性与裸BAR10可靠接触，但给电治具与裸BAR10难以整体贴合接触，较难保证电流在裸BAR10上均匀注入。
【发明内容】
本发明提供一种测试设备及其给电治具，能够解决现有技术中给电治具与裸BAR难以贴合接触的技术问题。
为解决上述技术问题，本发明采用的一个技术方案是：提供一种给电治具，用于对半导体激光器未电隔离裸BAR测试时注入大电流，给电治具包括探针夹具和多个弹性探针，探针夹具夹持固定多个弹性探针，多个弹性探针的针尖一端处于同一平面。
其中，探针夹具包括探针座和探针固定件，探针座设有容置空间，多个弹性探针设于容置空间内，探针固定件用于固定多个弹性探针。
其中，探针座包括探针座本体和从探针座本体一侧延伸的凸耳，容置空间形成于探针座本体的中部，凸耳用于预固定给电电源输出电线。
其中，探针座本体的中部形成有第一凹槽，第一凹槽贯穿探针座本体的宽度方向设置，第一凹槽内设有容置块，容置空间形成于容置块，容置空间为第二凹槽。
其中，容置块顶面低于探针座本体的顶面，容置块的宽度小于探针座本体的宽度，第一凹槽内临近容置块的空间用于放置焊料。
其中，探针固定件包括固定板和从固定板底面延伸的凸台，凸台与第一凹槽配合连接以固定多个弹性探针，探针座与固定板通过螺钉固定连接。
其中，多个弹性探针呈多行重叠设置。
其中，多个弹性探针呈两行设置，每行具有25个弹性探针，每个弹性探针的外径为0.35mm，探针座和探针固定件均采用紫铜加工而成并进行镀镍表面处理。
其中，多个弹性探针通过平面制作夹具使得多个弹性探针的针尖一端处于同一平面，平面制作夹具包括夹具主体，夹具主体内形成有截面呈w型的第三凹槽，第三凹槽包括依次连接的探针座底面放置面、探针座侧面放置面、探针衔接面以及探针抵接面，探针座通过探针座底面放置面和探针座侧面放置面定位，多个弹性探针设置于探针座上，并且针尖一端延伸至探针衔接面上方，直至抵接于探针抵接面。
为解决上述技术问题，本发明采用的一个技术方案是：提供一种测试设备，该测试设备包括上述的给电治具。
本发明实施例提供的给电治具通过设置针尖处于同一平面的多个弹性探针，保证给电治具与未电隔离裸BAR接触良好，有利于未电隔离裸BAR测试。
【附图说明】
为了更清楚地说明本发明实施例中的技术方案，下面将对实施例描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本发明的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他的附图，其中：
图1是现有技术中给电治具的原理示意图；
图2是本发明给电治具的立体结构示意图；
图3是图2所示的给电治具的爆炸结构示意图；
图4是图2所示的给电治具与平面制作夹具的装配结构示意图。
【具体实施方式】
下面将结合本发明实施例中的附图，对本发明实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例仅仅是本发明一部分实施例，而不是全部的实施例。基于本发明中的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例，均属于本发明保护的范围。
请参阅图2和图3，图2是本发明给电治具的立体结构示意图，图3是图2所示的给电治具的爆炸结构示意图。在本实施例中，给电治具用于对半导体激光器未电隔离裸BAR测试时注入大电流，其中，裸BAR是指未电隔离的未封装的BAR条，给电治具包括探针夹具和多个弹性探针101，探针夹具夹持固定多个弹性探针101，多个弹性探针101的针尖一端处于同一平面。由于将现有技术的弹片金属薄片置换成多个弹性探针101，且多个弹性探针101针尖一端处于同一平面使得能够很好地贴合裸BAR，从而保证电流均匀注入。在本实施例中，探针夹具包括探针座201和探针固定件301。
探针座201设有容置空间，多个弹性探针101设于容置空间内。具体而言，探针座201包括探针座本体202和从探针座本体202一侧延伸的凸耳203，容置空间形成于探针座本体202的中部，凸耳203用于预固定给电电源输出电线，优选地，探针座本体202和凸耳203一体成型。进一步地，探针座本体202的中部形成有第一凹槽204，第一凹槽204贯穿探针座本体202的宽度方向设置，第一凹槽204内设有容置块205，容置空间形成于容置块205，容置空间为第二凹槽206。其中，容置块205顶面低于探针座本体202的顶面，容置块205的宽度小于探针座本体202的宽度，第一凹槽204内临近容置块205的空间用于放置焊料。其中，容置空间也可形成于探针座本体202的侧部等部位。容置块205顶面也可与探针座本体202的顶面平齐，容置块205的高度由弹性探针101的高度决定。值得一提的是，在探针座本体202的两端还分别设有安装孔207，用于将给电治具整体安装到测试设备。
探针固定件301包括固定板302和从固定板302底面延伸的凸台303，凸台303与第一凹槽204配合连接，探针座201与固定板302通过螺钉40固定连接，探针座本体202临近第一凹槽204的两侧分别设有两个螺孔，固定板302对应处也分别设有两个螺孔，探针座201和固定板302通过4颗螺钉40固定连接。在本实施例中，凸台303与第一凹槽204优选为过渡配合或间隙配合，只要能够将弹性探针101的针尖固定保持在同一平面即可，对凸台303和第一凹槽204的配合方式不作限定。在其他实施例中，也可无凸台303。其中，固定板302和凸台303优选为一体成型。
多个弹性探针101呈多行重叠设置。优选地，本实施例中，多个弹性探针101呈两行设置，每行可具有1-30个弹性探针101，例如25个弹性探针101，每个弹性探针101的外径可为0.1-3mm，例如为0.35mm，每行的弹性探针101紧密相连。当然，在其他实施例中，也可设置3行或4行等弹性探针101，或者设置其他外径的弹性探针101，本发明对弹性探针101的行数和外径不作限定。
其中，探针座201和探针固定件301均优选采用紫铜加工而成并进行镀镍表面处理，通过该方式能够使得探针座201和探针固定件301易于焊接。
其中，在本实施例中采用的是分体式的探针夹具，即探针夹具包括探针座201和探针固定件301，在其他实施例中也可采用一体式探针夹具，本发明对此不作限定。
请参阅图4，图4是图2所示的给电治具与平面制作夹具50的装配结构示意图。以上提到了多个弹性探针101的针尖一端处于同一平面，在本实施例中， 通过平面制作夹具50使得多个弹性探针101的针尖一端处于同一平面，平面制作夹具50包括夹具主体506，夹具主体506内形成有截面呈w型的第三凹槽501，第三凹槽501包括依次连接的探针座201底面放置面502、探针座201侧面放置面503、探针衔接面504以及探针抵接面505，探针座201通过探针座201底面放置面502和探针座201侧面放置面503定位，多个弹性探针101设置于探针座201上，并且针尖一端延伸至探针衔接面504上方，直至抵接于探针抵接面505。其中，在其他实施例中也可直接利用一个直角形的夹具使得多个弹性探针101的针尖一端处于同一平面，例如探针座201固定于夹具的水平面，弹性探针101的针尖一端抵接垂直面以使得多个弹性探针101的针尖一端处于同一平面。
以上介绍了给电治具的结构，下面举例介绍给电治具的组装过程：
1.给电治具固定于平面制作夹具50上，50根外径0.35mm弹性探针101逐一阵列摆放在探针座本体202的容置空间内上，弹性探针101阵列形式为2x25；
2.探针固定件301通过4颗M2螺钉固定在探针座本体202上；
3.加入焊料至第一凹槽204内临近容置块205的空间，将弹性探针101阵列、探针座201和探针固定件301连接成整体；
4.最后锁紧探针固定件301并从平面制作夹具50上取下给电治具。
本发明还提供一种测试设备，该测试设备包括以上实施例的给电治具，测试设备能够集成测试裸BAR的光功率、电气和波长等特性，为研制和生产高性能的大功率半导体激光器提供了强有力的保障。
本发明实施例提供的给电治具通过设置针尖处于同一平面的多个弹性探针，保证给电治具与未电隔离裸BAR接触良好，有利于未电隔离裸BAR测试。进一步地，能够进行无损、具有承载脉冲电流高达200A的测试。
以上所述仅为本发明的实施例，并非因此限制本发明的专利范围，凡是利用本发明说明书及附图内容所作的等效结构或等效流程变换，或直接或间接运用在其他相关的技术领域，均同理包括在本发明的专利保护范围内。

Claims (18)

  1. 一种给电治具，用于对半导体激光器未电隔离裸BAR测试时注入大电流，其特征在于，所述给电治具包括探针夹具和多个弹性探针，所述探针夹具夹持固定所述多个弹性探针，所述多个弹性探针的针尖一端处于同一平面。
  2. 根据权利要求1所述的给电治具，其特征在于，所述探针夹具包括探针座和探针固定件，所述探针座设有容置空间，所述多个弹性探针设于所述容置空间内，所述探针固定件用于固定所述多个弹性探针。
  3. 根据权利要求2所述的给电治具，其特征在于，所述探针座包括探针座本体和从所述探针座本体一侧延伸的凸耳，所述容置空间形成于所述探针座本体的中部，所述凸耳用于预固定给电电源输出电线。
  4. 根据权利要求3所述的给电治具，其特征在于，所述探针座本体的中部形成有第一凹槽，所述第一凹槽贯穿所述探针座本体的宽度方向设置，所述第一凹槽内设有容置空间，所述容置空间形成于所述容置块，所述容置空间为第二凹槽。
  5. 根据权利要求4所述的给电治具，其特征在于，所述容置块顶面低于所述探针座本体的顶面，所述容置块的宽度小于所述探针座本体的宽度，所述第一凹槽内临近所述容置块的空间用于放置焊料。
  6. 根据权利要求5所述的给电治具，其特征在于，所述探针固定件包括固定板和从所述固定板底面延伸的凸台，所述凸台与所述第一凹槽配合连接以固定所述多个弹性探针，所述探针座与所述固定板通过螺钉固定连接。
  7. 根据权利要求2所述的给电治具，其特征在于，所述多个弹性探针呈多行重叠设置。
  8. 根据权利要求7所述的给电治具，其特征在于，所述多个弹性探针呈两行设置，每行具有25个弹性探针，每个所述弹性探针的外径为0.35mm，所述探针座和所述探针固定件均采用紫铜加工而成并进行镀镍表面处理。
  9. 根据权利要求2所述的给电治具，其特征在于，所述多个弹性探针通过平面制作夹具使得所述多个弹性探针的针尖一端处于同一平面，所述平面制作夹具包括夹具主体，所述夹具主体内形成有截面呈w型的第三凹槽，所述第三凹槽包括依次连接的探针座底面放置面、探针座侧面放置面、探针衔接面以及探针抵接面，所述探针座通过所述探针座底面放置面和所述探针座侧面放置面定位，所述多个弹性探针设置于所述探针座上，并且针尖一端延伸至探针衔接面上方，直至抵接于所述探针抵接面。
  10. 一种测试设备，其特征在于，所述测试设备包括给电治具，所述给电治具用于对半导体激光器未电隔离裸BAR测试时注入大电流，所述给电治具包括探针夹具和多个弹性探针，所述探针夹具夹持固定所述多个弹性探针，所述多个弹性探针的针尖一端处于同一平面。
  11. 根据权利要求10所述的测试设备，其特征在于，所述探针夹具包括探针座和探针固定件，所述探针座设有容置空间，所述多个弹性探针设于所述容置空间内，所述探针固定件用于固定所述多个弹性探针。
  12. 根据权利要求11所述的测试设备，其特征在于，所述探针座包括探针座本体和从所述探针座本体一侧延伸的凸耳，所述容置空间形成于所述探针座本体的中部，所述凸耳用于预固定给电电源输出电线。
  13. 根据权利要求12所述的测试设备，其特征在于，所述探针座本体的中部形成有第一凹槽，所述第一凹槽贯穿所述探针座本体的宽度方向设置，所述第一凹槽内设有容置空间，所述容置空间形成于所述容置块，所述容置空间为第二凹槽。
  14. 根据权利要求13所述的测试设备，其特征在于，所述容置块顶面低于所述探针座本体的顶面，所述容置块的宽度小于所述探针座本体的宽度，所述第一凹槽内临近所述容置块的空间用于放置焊料。
  15. 根据权利要求14所述的测试设备，其特征在于，所述探针固定件包括固定板和从所述固定板底面延伸的凸台，所述凸台与所述第一凹槽配合连接以固定所述多个弹性探针，所述探针座与所述固定板通过螺钉固定连接。
  16. 根据权利要求11所述的测试设备，其特征在于，所述多个弹性探针呈多行重叠设置。
  17. 根据权利要求16所述的测试设备，其特征在于，所述多个弹性探针呈两行设置，每行具有1-30个弹性探针，每个所述弹性探针的外径为0.1-3mm，所述探针座和所述探针固定件均采用紫铜加工而成并进行镀镍表面处理。
  18. 根据权利要求11所述的测试设备，其特征在于，所述多个弹性探针通过平面制作夹具使得所述多个弹性探针的针尖一端处于同一平面，所述平面制作夹具包括夹具主体，所述夹具主体内形成有截面呈w型的第三凹槽，所述第三凹槽包括依次连接的探针座底面放置面、探针座侧面放置面、探针衔接面以及探针抵接面，所述探针座通过所述探针座底面放置面和所述探针座侧面放置面定位，所述多个弹性探针设置于所述探针座上，并且针尖一端延伸至探针衔接面上方，直至抵接于所述探针抵接面。
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