WO2018205481A1 - Method for carrying out corrosion resistant marking by using ultrafast laser - Google Patents

Method for carrying out corrosion resistant marking by using ultrafast laser Download PDF

Info

Publication number
WO2018205481A1
WO2018205481A1 PCT/CN2017/103372 CN2017103372W WO2018205481A1 WO 2018205481 A1 WO2018205481 A1 WO 2018205481A1 CN 2017103372 W CN2017103372 W CN 2017103372W WO 2018205481 A1 WO2018205481 A1 WO 2018205481A1
Authority
WO
WIPO (PCT)
Prior art keywords
laser
laser processing
marking
processed
corrosion
Prior art date
Application number
PCT/CN2017/103372
Other languages
French (fr)
Chinese (zh)
Inventor
陶沙
赵晓杰
秦国双
Original Assignee
英诺激光科技股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 英诺激光科技股份有限公司 filed Critical 英诺激光科技股份有限公司
Publication of WO2018205481A1 publication Critical patent/WO2018205481A1/en

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/361Removing material for deburring or mechanical trimming

Definitions

  • the invention belongs to the field of laser processing, and particularly relates to a method for resisting corrosion marking by using an ultrafast laser.
  • the technical problem to be solved by the present invention is that, in view of the deficiencies of the prior art, a method of fast processing, good consistency, and extensive anti-corrosion marking using an ultra-fast laser is provided.
  • the present invention discloses a method for performing corrosion resistance marking using an ultrafast laser, and the method steps are as follows:
  • the workpiece to be processed is one of a metal, an alloy, and a polymer material.
  • the laser processing has a wavelength of 266 or 355 or 532/515 or 1064/1030 nm.
  • the pulse width of the laser processing is ps/fs level.
  • the frequency of the laser processing is 1 MHz or less.
  • the power of the laser processing is 10 W or less.
  • Laser processing is used to form a micro-nano structure on the surface of the material to obtain the desired marking.
  • the method is generally black in color, has anti-corrosion characteristics, and the light does not fade; and the laser marking is performed by the method, the processing speed is fast, the consistency is good, and the materials are widely used; Strong corrosion resistance and black markings do not fade due to external factors.
  • the reference numerals in the figure are expressed as: 1 - the workpiece to be processed; 2 - the micro-nano structure diagram after laser processing; - the specific micro-nano structure diagram formed; 4 - the finished product;
  • Example 1 The present invention discloses a method for performing anti-corrosion marking by using a laser.
  • the method steps are as follows (the specific flow chart is shown in FIG. 1 , wherein: 1 to be processed; 2 - the micro-nano structure after laser processing) ;):
  • the wavelength of laser processing is 266 nm
  • the pulse width is ps/fs level
  • the frequency is below 1MHz
  • the power is below 10W.
  • the laser marking machine After selecting the processing parameters as needed, the laser marking machine is turned on to process the processed parts.
  • the material is formed by laser processing to form a micro-nano structure and form the pattern of the desired mark.
  • the processed material is placed in an etching solution for corrosion to test its corrosion resistance
  • the corrosion test may be selected from a salt spray test, an acid or alkaline corrosion test, and is related to the material properties of the workpiece.
  • the general metal uses a salt spray test.
  • the corroded material is cleaned, and it is preferably washed with water after cleaning with alcohol.
  • the resulting logo still shows black after laser marking and is not corroded.
  • Embodiment 2 This embodiment discloses a method for performing corrosion resistance marking using a laser, and the method steps are as follows:
  • Place the workpiece to be processed and the processing platform, and the workpiece to be processed is an alloy material.
  • the wavelength of laser processing is 355 nm
  • the pulse width is ps/fs level
  • the frequency is below 1MHz
  • the power is below 10W.
  • the laser marking machine After selecting the processing parameters as needed, the laser marking machine is turned on to process the processed parts.
  • the material is formed by laser processing to form a micro-nano structure and form the pattern of the desired mark.
  • the processed material is placed in an etching solution for corrosion to test its corrosion resistance
  • the corrosion test may be selected from a salt spray test, an acid or alkaline corrosion test, and is related to the material properties of the workpiece.
  • the corroded material is cleaned, and it is preferably washed with water after cleaning with alcohol.
  • the resulting logo still shows black after laser marking and is not corroded.
  • Embodiment 3 This embodiment discloses a method for performing corrosion resistance marking using a laser, and the method steps are as follows:
  • the wavelength of laser processing is 532 nm
  • the pulse width is ps/fs level
  • the frequency is below 1MHz
  • the power is below 10W.
  • the laser marking machine After selecting the processing parameters as needed, the laser marking machine is turned on to process the processed parts.
  • the material is formed by laser processing to form a micro-nano structure and form the pattern of the desired mark.
  • the processed material is placed in an etching solution for corrosion to test its corrosion resistance
  • the corrosion test may be selected from a salt spray test, an acid or alkaline corrosion test, and is related to the material properties of the workpiece.
  • the corroded material is cleaned, and it is preferably washed with water after cleaning with alcohol.
  • the resulting logo still shows black after laser marking and is not corroded.
  • Embodiment 4 This embodiment discloses a method for performing corrosion resistance marking using a laser, and the method steps are as follows:
  • the wavelength of laser processing is 1064 nm
  • the pulse width is ps/fs level
  • the frequency is below 1MHz
  • the power is below 10W.
  • the laser marking machine After selecting the processing parameters as needed, the laser marking machine is turned on to process the processed parts.
  • the material is formed by laser processing to form a micro-nano structure and form the pattern of the desired mark.
  • the processed material is placed in an etching solution for corrosion to test its corrosion resistance
  • the corrosion test may be selected from a salt spray test, an acid or alkaline corrosion test, and is related to the material properties of the workpiece.
  • the corroded material is cleaned, and it is preferably washed with water after cleaning with alcohol.
  • the resulting logo still shows black after laser marking and is not corroded.

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
  • Thermal Transfer Or Thermal Recording In General (AREA)

Abstract

A method for carrying out corrosion resistant marking by using an ultrafast laser, comprising the following steps: taking a workpiece to be processed (1) and drawing or importing a pattern which needs to be marked according to a mark pattern; setting the position of a laser focus and parameters of a laser processing; and forming a micro-nano structure on the surface of the material through the laser processing. According to the laser marking method, a micro-nano structure is formed on the surface of the material to obtain a desired mark. Compared with a traditional marking method, the method has the advantage that the obtained mark is generally black, has corrosion resistance and does not fade under light.

Description

一种利用超快激光进行抗腐蚀打标的方法  Method for resisting corrosion marking by using ultra-fast laser
技术领域Technical field
本发明属于激光加工领域,具体涉及一种利用超快激光进行抗腐蚀打标的方法。The invention belongs to the field of laser processing, and particularly relates to a method for resisting corrosion marking by using an ultrafast laser.
背景技术Background technique
随着激光加工领域的快速发展,打标技术的应用越来越广泛,包括消费电子、生活品、工艺品等等。然而,传统的激光打标是通过在材料表面进行烧蚀或改性而产生标识,当工件或样品暴露在特殊环境中时,打标区域会受到环境的腐蚀:如医用器件、化学用器件等会受到化学试剂或药品的腐蚀,暴露在外界的器件,会受到光照、阴雨天气的影响;环境腐蚀会对上述传统激光打标器件的使用造成影响,因此,寻找一种一种利用激光进行抗腐蚀打标的方法,是本领域目前刻不容缓的事情。With the rapid development of laser processing, the application of marking technology is more and more extensive, including consumer electronics, lifestyle products, handicrafts and so on. However, traditional laser marking is produced by ablation or modification on the surface of the material. When the workpiece or sample is exposed to a special environment, the marking area is subject to environmental corrosion: such as medical devices, chemical devices, etc. Will be corroded by chemical reagents or drugs, exposed to external devices, will be affected by light, rainy weather; environmental corrosion will affect the use of the above-mentioned traditional laser marking device, therefore, looking for a kind of laser resistance The method of corroding marking is an urgent task in the field.
发明内容Summary of the invention
为此,本发明要解决的技术问题在于,针对现有技术的不足,提供一种加工速度快、一致性好,使用材料广泛的利用超快激光进行抗腐蚀打标的方法。Therefore, the technical problem to be solved by the present invention is that, in view of the deficiencies of the prior art, a method of fast processing, good consistency, and extensive anti-corrosion marking using an ultra-fast laser is provided.
为解决上述技术问题,本发明公开了一种利用超快激光进行抗腐蚀打标的方法,所述方法步骤如下: In order to solve the above technical problem, the present invention discloses a method for performing corrosion resistance marking using an ultrafast laser, and the method steps are as follows:
a)取待加工件,根据标识图案绘制或导入所需标识的图形;a) taking the workpiece, drawing or importing the graphic of the desired mark according to the logo pattern;
b)设置激光焦点位置和激光加工的参数;b) setting the laser focus position and laser processing parameters;
c)通过激光加工处理在材料表面形成微纳结构;c) forming a micro/nano structure on the surface of the material by laser processing;
优选的,待加工件为金属、合金、高分子材料中的一种。Preferably, the workpiece to be processed is one of a metal, an alloy, and a polymer material.
优选的,所述激光加工的波长为266或355或532/515或1064/1030nm。 Preferably, the laser processing has a wavelength of 266 or 355 or 532/515 or 1064/1030 nm.
优选的,所述激光加工的脉宽为ps/fs级别。 Preferably, the pulse width of the laser processing is ps/fs level.
优选的,所述激光加工的频率为1MHz以下。 Preferably, the frequency of the laser processing is 1 MHz or less.
更为优选的,所述激光加工的功率为10W以下。More preferably, the power of the laser processing is 10 W or less.
本发明的上述技术方案相比现有技术具有以下优点:The above technical solution of the present invention has the following advantages over the prior art:
采用激光加工的方式在材料表面形成微纳结构,从而得到所需要的标识。相比于传统的激光打标,该方法得到的标识一般呈黑色,具有抗腐蚀特性,且光照不褪色;并且用该方法进行激光打标,加工速度快、一致性好,使用材料广泛;具有较强的抗腐蚀性能,且黑色标记不会因为外部因素而褪色。Laser processing is used to form a micro-nano structure on the surface of the material to obtain the desired marking. Compared with the traditional laser marking, the method is generally black in color, has anti-corrosion characteristics, and the light does not fade; and the laser marking is performed by the method, the processing speed is fast, the consistency is good, and the materials are widely used; Strong corrosion resistance and black markings do not fade due to external factors.
附图说明DRAWINGS
为了使本发明的内容更容易被清楚的理解,下面根据本发明的具体实施例并结合附图,对本发明作进一步详细的说明,其中In order to make the content of the present invention easier to understand, the present invention will be further described in detail below with reference to the accompanying drawings
图1是实施例所述方法的流程结果展示示意图;1 is a schematic diagram showing the flow of results of the method described in the embodiment;
图中附图标记表示为:1-待加工件;2-激光加工后的引出微纳结构图;3-形成的具体微纳结构图;4-成品;The reference numerals in the figure are expressed as: 1 - the workpiece to be processed; 2 - the micro-nano structure diagram after laser processing; - the specific micro-nano structure diagram formed; 4 - the finished product;
具体实施方式detailed description
实施例Example
实施例1 本实施公开了一种利用激光进行抗腐蚀打标的方法,所述方法步骤如下(具体流程图如图1所示,其中,1-待加工件;2-激光加工后的引出微纳结构图;):Example 1 The present invention discloses a method for performing anti-corrosion marking by using a laser. The method steps are as follows (the specific flow chart is shown in FIG. 1 , wherein: 1 to be processed; 2 - the micro-nano structure after laser processing) ;):
1、将待加工件放置与加工平台,待加工件为金属材料。1. Place the parts to be processed and the processing platform, and the parts to be processed are metal materials.
2、根据标识图案绘制或导入所需标识的图形。2. Draw or import the graphic of the desired logo according to the logo pattern.
3、通过工控机设置激光焦点位置和激光加工参数,之后开启激光器,设置激光加工参数如下:3. Set the laser focus position and laser processing parameters through the industrial computer, then turn on the laser and set the laser processing parameters as follows:
激光加工的波长为266nm;The wavelength of laser processing is 266 nm;
脉宽为ps/fs级别;The pulse width is ps/fs level;
频率为1MHz以下;The frequency is below 1MHz;
功率为10W以下。The power is below 10W.
根据需要选定加工参数后开启激光打标机,对待加工件进行加工。After selecting the processing parameters as needed, the laser marking machine is turned on to process the processed parts.
4、通过激光加工在材料表明形成微纳结构,并组成所需标识的图案。4. The material is formed by laser processing to form a micro-nano structure and form the pattern of the desired mark.
5、将加工后的材料置于腐蚀液中进行腐蚀,检验其抗腐蚀特性;5. The processed material is placed in an etching solution for corrosion to test its corrosion resistance;
其中腐蚀测试可选择盐雾试验、酸性或碱性腐蚀试验,与加工件的材料特性有关。如一般金属采用盐雾试验。The corrosion test may be selected from a salt spray test, an acid or alkaline corrosion test, and is related to the material properties of the workpiece. For example, the general metal uses a salt spray test.
6、对腐蚀后的材料进行清洗,其中,优选采用清水清洗后酒精擦拭。6. The corroded material is cleaned, and it is preferably washed with water after cleaning with alcohol.
7、对标识进行光照测试。即将样品暴露在光照环境一定时间(1-24小时)7. Perform a light test on the logo. Exposing the sample to the light for a certain period of time (1-24 hours)
8、所得标识仍呈现激光打标后的黑色,未被腐蚀。8. The resulting logo still shows black after laser marking and is not corroded.
实施例2 本实施公开了一种利用激光进行抗腐蚀打标的方法,所述方法步骤如下:Embodiment 2 This embodiment discloses a method for performing corrosion resistance marking using a laser, and the method steps are as follows:
1、将待加工件放置与加工平台,待加工件为合金材料。1. Place the workpiece to be processed and the processing platform, and the workpiece to be processed is an alloy material.
2、根据标识图案绘制或导入所需标识的图形。2. Draw or import the graphic of the desired logo according to the logo pattern.
3、通过工控机设置激光焦点位置和激光加工参数,之后开启激光器,设置激光加工参数如下:3. Set the laser focus position and laser processing parameters through the industrial computer, then turn on the laser and set the laser processing parameters as follows:
激光加工的波长为355nm;The wavelength of laser processing is 355 nm;
脉宽为ps/fs级别;The pulse width is ps/fs level;
频率为1MHz以下;The frequency is below 1MHz;
功率为10W以下。The power is below 10W.
根据需要选定加工参数后开启激光打标机,对待加工件进行加工。After selecting the processing parameters as needed, the laser marking machine is turned on to process the processed parts.
4、通过激光加工在材料表明形成微纳结构,并组成所需标识的图案。4. The material is formed by laser processing to form a micro-nano structure and form the pattern of the desired mark.
5、将加工后的材料置于腐蚀液中进行腐蚀,检验其抗腐蚀特性;5. The processed material is placed in an etching solution for corrosion to test its corrosion resistance;
其中腐蚀测试可选择盐雾试验、酸性或碱性腐蚀试验,与加工件的材料特性有关。The corrosion test may be selected from a salt spray test, an acid or alkaline corrosion test, and is related to the material properties of the workpiece.
6、对腐蚀后的材料进行清洗,其中,优选采用清水清洗后酒精擦拭。 6. The corroded material is cleaned, and it is preferably washed with water after cleaning with alcohol.
7、对标识进行光照测试。即将样品暴露在光照环境一定时间(1-24小时) 7. Perform a light test on the logo. Exposing the sample to the light for a certain period of time (1-24 hours)
8、所得标识仍呈现激光打标后的黑色,未被腐蚀。8. The resulting logo still shows black after laser marking and is not corroded.
实施例3 本实施公开了一种利用激光进行抗腐蚀打标的方法,所述方法步骤如下:Embodiment 3 This embodiment discloses a method for performing corrosion resistance marking using a laser, and the method steps are as follows:
1、将待加工件放置与加工平台,待加工件为如金属、合金、高分子材料。1. Place the parts to be processed and the processing platform, such as metal, alloy and polymer materials.
2、根据标识图案绘制或导入所需标识的图形。2. Draw or import the graphic of the desired logo according to the logo pattern.
3、通过工控机设置激光焦点位置和激光加工参数,之后开启激光器,设置激光加工参数如下:3. Set the laser focus position and laser processing parameters through the industrial computer, then turn on the laser and set the laser processing parameters as follows:
激光加工的波长为532nm;The wavelength of laser processing is 532 nm;
脉宽为ps/fs级别;The pulse width is ps/fs level;
频率为1MHz以下;The frequency is below 1MHz;
功率为10W以下。The power is below 10W.
根据需要选定加工参数后开启激光打标机,对待加工件进行加工。After selecting the processing parameters as needed, the laser marking machine is turned on to process the processed parts.
4、通过激光加工在材料表明形成微纳结构,并组成所需标识的图案。4. The material is formed by laser processing to form a micro-nano structure and form the pattern of the desired mark.
5、将加工后的材料置于腐蚀液中进行腐蚀,检验其抗腐蚀特性;5. The processed material is placed in an etching solution for corrosion to test its corrosion resistance;
其中腐蚀测试可选择盐雾试验、酸性或碱性腐蚀试验,与加工件的材料特性有关。The corrosion test may be selected from a salt spray test, an acid or alkaline corrosion test, and is related to the material properties of the workpiece.
6、对腐蚀后的材料进行清洗,其中,优选采用清水清洗后酒精擦拭。6. The corroded material is cleaned, and it is preferably washed with water after cleaning with alcohol.
7、对标识进行光照测试。即将样品暴露在光照环境一定时间(1-24小时)。 7. Perform a light test on the logo. The sample is exposed to the light for a certain period of time (1-24 hours).
8、所得标识仍呈现激光打标后的黑色,未被腐蚀。8. The resulting logo still shows black after laser marking and is not corroded.
实施例4 本实施公开了一种利用激光进行抗腐蚀打标的方法,所述方法步骤如下:Embodiment 4 This embodiment discloses a method for performing corrosion resistance marking using a laser, and the method steps are as follows:
1、将待加工件放置与加工平台,待加工件为高分子材料。1. Place the parts to be processed and the processing platform, and the parts to be processed are polymer materials.
2、根据标识图案绘制或导入所需标识的图形。2. Draw or import the graphic of the desired logo according to the logo pattern.
3、通过工控机设置激光焦点位置和激光加工参数,之后开启激光器,设置激光加工参数如下:3. Set the laser focus position and laser processing parameters through the industrial computer, then turn on the laser and set the laser processing parameters as follows:
激光加工的波长为1064nm;The wavelength of laser processing is 1064 nm;
脉宽为ps/fs级别;The pulse width is ps/fs level;
频率为1MHz以下;The frequency is below 1MHz;
功率为10W以下。The power is below 10W.
根据需要选定加工参数后开启激光打标机,对待加工件进行加工。After selecting the processing parameters as needed, the laser marking machine is turned on to process the processed parts.
4、通过激光加工在材料表明形成微纳结构,并组成所需标识的图案。4. The material is formed by laser processing to form a micro-nano structure and form the pattern of the desired mark.
5、将加工后的材料置于腐蚀液中进行腐蚀,检验其抗腐蚀特性;5. The processed material is placed in an etching solution for corrosion to test its corrosion resistance;
其中腐蚀测试可选择盐雾试验、酸性或碱性腐蚀试验,与加工件的材料特性有关。The corrosion test may be selected from a salt spray test, an acid or alkaline corrosion test, and is related to the material properties of the workpiece.
6、对腐蚀后的材料进行清洗,其中,优选采用清水清洗后酒精擦拭。6. The corroded material is cleaned, and it is preferably washed with water after cleaning with alcohol.
7、对标识进行光照测试。即将样品暴露在光照环境一定时间(1-24小时)。 7. Perform a light test on the logo. The sample is exposed to the light for a certain period of time (1-24 hours).
8、所得标识仍呈现激光打标后的黑色,未被腐蚀。 8. The resulting logo still shows black after laser marking and is not corroded.
显然,上述实施例仅仅是为清楚地说明所作的举例,而并非对实施方式的限定。对于所属领域的普通技术人员来说,在上述说明的基础上还可以做出其它不同形式的变化或变动。这里无需也无法对所有的实施方式予以穷举。而由此所引伸出的显而易见的变化或变动仍处于本发明创造的保护范围之中。It is apparent that the above-described embodiments are merely illustrative of the examples, and are not intended to limit the embodiments. Other variations or modifications of the various forms may be made by those skilled in the art in light of the above description. There is no need and no way to exhaust all of the implementations. Obvious changes or variations resulting therefrom are still within the scope of the invention.

Claims (6)

  1. 一种利用超快激光进行抗腐蚀打标的方法,其特征在于,所述方法步骤如下:A method for resisting corrosion marking by using an ultrafast laser, characterized in that the method steps are as follows:
    a)取待加工件,根据标识图案绘制或导入所需标识的图形;a) taking the workpiece, drawing or importing the graphic of the desired mark according to the logo pattern;
    b)设置激光焦点位置和激光加工的参数;b) setting the laser focus position and laser processing parameters;
    c)通过激光加工处理在材料表面形成微纳结构。c) Forming a micro/nano structure on the surface of the material by laser processing.
  2. 如权利要求1所述的方法,其特征在于,待加工件为金属、合金、高分子材料中的一种。The method according to claim 1, wherein the member to be processed is one of a metal, an alloy, and a polymer material.
  3. 如权利要求2所述的方法,其特征在于,所述激光加工的波长为266或355或532/515或1064/1030nm。The method of claim 2 wherein said laser processing has a wavelength of 266 or 355 or 532/515 or 1064/1030 nm.
  4. 如权利要求3所述的方法,其特征在于,所述激光加工的脉宽为ps/fs级别。The method of claim 3 wherein said laser processing has a pulse width of the ps/fs level.
  5. 如权利要求4所述的方法,其特征在于,所述激光加工的频率为1MHz以下。The method of claim 4 wherein said laser processing has a frequency of less than 1 MHz.
  6. 如权利要求5所述的方法,其特征在于,所述激光加工的功率为10W以下。 The method of claim 5 wherein said laser processing has a power of less than 10W.
PCT/CN2017/103372 2017-05-08 2017-09-26 Method for carrying out corrosion resistant marking by using ultrafast laser WO2018205481A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201710327514.1 2017-05-08
CN201710327514.1A CN107096998A (en) 2017-05-08 2017-05-08 It is a kind of to carry out anticorrosive beating calibration method using ultrafast laser

Publications (1)

Publication Number Publication Date
WO2018205481A1 true WO2018205481A1 (en) 2018-11-15

Family

ID=59669562

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2017/103372 WO2018205481A1 (en) 2017-05-08 2017-09-26 Method for carrying out corrosion resistant marking by using ultrafast laser

Country Status (2)

Country Link
CN (1) CN107096998A (en)
WO (1) WO2018205481A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107096998A (en) * 2017-05-08 2017-08-29 英诺激光科技股份有限公司 It is a kind of to carry out anticorrosive beating calibration method using ultrafast laser
CN109702354B (en) * 2019-02-26 2020-01-21 西安交通大学 Method for preparing mark based on femtosecond laser ablation composite induction
CN110267189A (en) * 2019-07-16 2019-09-20 大族激光科技产业集团股份有限公司 A kind of processing method being bonded functional die surface
CN114473227A (en) * 2022-03-28 2022-05-13 武汉华工激光工程有限责任公司 Laser processing method for corrosion-resistant black sculpture of stainless steel

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102000912A (en) * 2010-09-21 2011-04-06 中国科学院理化技术研究所 Laser micro/nano processing system and method
CN102500923A (en) * 2011-09-21 2012-06-20 长春理工大学 Preparation device for preparing functional micro-nano materials on silicon surfaces based on femtosecond laser and method
US8790534B2 (en) * 2010-04-30 2014-07-29 Corporation For National Research Initiatives System and method for precision fabrication of micro- and nano-devices and structures
CN104174999A (en) * 2014-08-13 2014-12-03 清华大学 Method for preparing surface micro-nano figure through two steps
CN105624763A (en) * 2016-03-11 2016-06-01 河北工业大学 Method for preparing micro-nano composite structure on surface of titanium substrate
US20160284511A1 (en) * 2012-04-21 2016-09-29 Norsam Technologies Inc. Lathe Head for Nano/Micro Machining of Materials
CN107096998A (en) * 2017-05-08 2017-08-29 英诺激光科技股份有限公司 It is a kind of to carry out anticorrosive beating calibration method using ultrafast laser

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101219506B (en) * 2008-01-07 2010-06-02 江苏大学 Laser production method for metal base ultra-hydrophobicity micro-structure surface
CN101531335A (en) * 2009-04-08 2009-09-16 西安交通大学 Method for preparing metal surface superhydrophobic microstructure by femto-second laser
CN102849962B (en) * 2011-06-29 2015-07-22 比亚迪股份有限公司 Preparation method of SiO2 super-hydrophobic film and super-hydrophobic material
CN104907701A (en) * 2015-05-28 2015-09-16 湖北工业大学 Method for manufacturing stainless steel super-hydrophobic self-cleaning surface through ultra-fast lasers
CN104911598B (en) * 2015-05-28 2017-11-14 湖北工业大学 A kind of method that kirsite super-hydrophobic automatic cleaning surface is prepared using ultrafast laser
CN105314889A (en) * 2015-05-28 2016-02-10 广东工业大学 Laser preparing method of glass black markers
CN104911599B (en) * 2015-05-28 2017-11-14 湖北工业大学 A kind of method that aluminium alloy super-hydrophobic automatic cleaning surface is prepared using ultrafast laser
CN104911328B (en) * 2015-05-28 2017-10-13 湖北工业大学 A kind of method that utilization ultra-short pulse laser prepares the super-hydrophobic corrosion-resistant surface of cast iron
CN104907697B (en) * 2015-05-28 2017-09-01 湖北工业大学 A kind of method that utilization ultrafast laser prepares titanium alloy super-hydrophobic frost resistance surface
CN104988507A (en) * 2015-05-28 2015-10-21 湖北工业大学 Method for preparing cast iron super-hydrophobic anti-corrosion surface by means of ultrafast laser
CN105504324B (en) * 2015-12-23 2018-07-03 中国航空工业集团公司北京航空制造工程研究所 A kind of polymer matrix composites with super-hydrophobic bionic surface and preparation method thereof
CN105945422B (en) * 2016-06-12 2018-01-05 西安中科微精光子制造科技有限公司 A kind of ultrafast laser microfabrication system
CN106367739A (en) * 2016-12-02 2017-02-01 江苏理工学院 Method for preparing brass-based super-hydrophobic microstructural surface

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8790534B2 (en) * 2010-04-30 2014-07-29 Corporation For National Research Initiatives System and method for precision fabrication of micro- and nano-devices and structures
CN102000912A (en) * 2010-09-21 2011-04-06 中国科学院理化技术研究所 Laser micro/nano processing system and method
CN102500923A (en) * 2011-09-21 2012-06-20 长春理工大学 Preparation device for preparing functional micro-nano materials on silicon surfaces based on femtosecond laser and method
US20160284511A1 (en) * 2012-04-21 2016-09-29 Norsam Technologies Inc. Lathe Head for Nano/Micro Machining of Materials
CN104174999A (en) * 2014-08-13 2014-12-03 清华大学 Method for preparing surface micro-nano figure through two steps
CN105624763A (en) * 2016-03-11 2016-06-01 河北工业大学 Method for preparing micro-nano composite structure on surface of titanium substrate
CN107096998A (en) * 2017-05-08 2017-08-29 英诺激光科技股份有限公司 It is a kind of to carry out anticorrosive beating calibration method using ultrafast laser

Also Published As

Publication number Publication date
CN107096998A (en) 2017-08-29

Similar Documents

Publication Publication Date Title
WO2018205481A1 (en) Method for carrying out corrosion resistant marking by using ultrafast laser
Chen et al. Laser direct write patterning technique of indium tin oxide film
WO2018090592A1 (en) Conductive film removing method and device
US4636403A (en) Method of repairing a defective photomask
WO2014005331A1 (en) Array substrate broken line repairing device and repairing method
ATE522926T1 (en) METHOD FOR REMOVAL OF ORGANIC CONTAMINATION FROM A SEMICONDUCTOR SURFACE
WO2018133233A1 (en) Preparation method for coating with controllable crosslinking degree
WO2013078632A1 (en) Cutting apparatus and cutting method for liquid crystal panel
WO2014032312A1 (en) Pattern repairing device and method for array substrate
WO2014086057A1 (en) Broken line repair method, broken line repair device, and broken line repair structure
WO2014086050A1 (en) Broken line repair method, broken line repair structure, and broken line repair system
WO2013004030A1 (en) Liquid crystal display, and driving method and device thereof
WO2015029277A1 (en) Resist remover liquid
WO2016000582A1 (en) Method and computing device for performing operation on icon cell
WO2016151645A1 (en) Resist stripping liquid
WO2017193598A1 (en) Low-temperature sintered thick film paste applied to pi film and method for preparing same
WO2019015143A1 (en) Method for performing corrosion resistance processing on surface of metal by using laser, and application thereof
US20070066071A1 (en) Novel organic remover for advanced reticle contamination cleaning
WO2022234892A1 (en) Detection unit, semiconductor film layer inspection apparatus having same, and inspection method using same
US3924455A (en) Method of removing brittle lacquer stress coatings and stripping compositions therefor
WO2013020322A1 (en) Method for manufacturing thin film transistor matrix substrate and display panel
WO2016206125A1 (en) Encapsulation method for organic light emitting diode and display device
CN108166065A (en) A kind of method for preparing lithium niobate single crystal thin film domain structure
WO2018126604A1 (en) Pixel structure, liquid crystal panel, and liquid crystal display
WO2017049652A1 (en) Organic light-emitting device

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 17908904

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

32PN Ep: public notification in the ep bulletin as address of the adressee cannot be established

Free format text: NOTING OF LOSS OF RIGHTS PURSUANT TO RULE 112(1) EPC (EPO FORM 1205A DATED 24.04.2020)

122 Ep: pct application non-entry in european phase

Ref document number: 17908904

Country of ref document: EP

Kind code of ref document: A1