WO2018199329A1 - Adhesive composition and method for producing connected object - Google Patents

Adhesive composition and method for producing connected object Download PDF

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Publication number
WO2018199329A1
WO2018199329A1 PCT/JP2018/017317 JP2018017317W WO2018199329A1 WO 2018199329 A1 WO2018199329 A1 WO 2018199329A1 JP 2018017317 W JP2018017317 W JP 2018017317W WO 2018199329 A1 WO2018199329 A1 WO 2018199329A1
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WO
WIPO (PCT)
Prior art keywords
substrate
conductive particles
circuit member
circuit
metal layer
Prior art date
Application number
PCT/JP2018/017317
Other languages
French (fr)
Japanese (ja)
Inventor
研吾 篠原
泰典 川端
松田 和也
光晴 松沢
由祐 飯島
Original Assignee
日立化成株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日立化成株式会社 filed Critical 日立化成株式会社
Priority to KR1020197034355A priority Critical patent/KR102573777B1/en
Priority to CN201880027673.2A priority patent/CN110546222A/en
Priority to CN202210094165.4A priority patent/CN114479712A/en
Priority to JP2019514686A priority patent/JP7287275B2/en
Publication of WO2018199329A1 publication Critical patent/WO2018199329A1/en

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    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J201/00Adhesives based on unspecified macromolecular compounds
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J4/00Adhesives based on organic non-macromolecular compounds having at least one polymerisable carbon-to-carbon unsaturated bond ; adhesives, based on monomers of macromolecular compounds of groups C09J183/00 - C09J183/16
    • C09J4/06Organic non-macromolecular compounds having at least one polymerisable carbon-to-carbon unsaturated bond in combination with a macromolecular compound other than an unsaturated polymer of groups C09J159/00 - C09J187/00
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J9/00Adhesives characterised by their physical nature or the effects produced, e.g. glue sticks
    • C09J9/02Electrically-conducting adhesives
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • H01B1/20Conductive material dispersed in non-conductive organic material
    • H01B1/22Conductive material dispersed in non-conductive organic material the conductive material comprising metals or alloys
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B5/00Non-insulated conductors or conductive bodies characterised by their form
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B5/00Non-insulated conductors or conductive bodies characterised by their form
    • H01B5/16Non-insulated conductors or conductive bodies characterised by their form comprising conductive material in insulating or poorly conductive material, e.g. conductive rubber
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01RELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R11/00Individual connecting elements providing two or more spaced connecting locations for conductive members which are, or may be, thereby interconnected, e.g. end pieces for wires or cables supported by the wire or cable and having means for facilitating electrical connection to some other wire, terminal, or conductive member, blocks of binding posts
    • H01R11/01Individual connecting elements providing two or more spaced connecting locations for conductive members which are, or may be, thereby interconnected, e.g. end pieces for wires or cables supported by the wire or cable and having means for facilitating electrical connection to some other wire, terminal, or conductive member, blocks of binding posts characterised by the form or arrangement of the conductive interconnection between the connecting locations
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01RELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R12/00Structural associations of a plurality of mutually-insulated electrical connecting elements, specially adapted for printed circuits, e.g. printed circuit boards [PCB], flat or ribbon cables, or like generally planar structures, e.g. terminal strips, terminal blocks; Coupling devices specially adapted for printed circuits, flat or ribbon cables, or like generally planar structures; Terminals specially adapted for contact with, or insertion into, printed circuits, flat or ribbon cables, or like generally planar structures
    • H01R12/50Fixed connections
    • H01R12/51Fixed connections for rigid printed circuits or like structures
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/46Manufacturing multilayer circuits
    • H05K3/4611Manufacturing multilayer circuits by laminating two or more circuit boards
    • H05K3/4614Manufacturing multilayer circuits by laminating two or more circuit boards the electrical connections between the circuit boards being made during lamination
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/831Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector the layer connector being supplied to the parts to be connected in the bonding apparatus
    • H01L2224/83101Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector the layer connector being supplied to the parts to be connected in the bonding apparatus as prepeg comprising a layer connector, e.g. provided in an insulating plate member

Definitions

  • the present invention relates to an adhesive composition and a method for producing a connection body.
  • the electrode of the flexible substrate or the glass substrate for example, a transparent electrode formed of a metal oxide or the like is used.
  • a circuit member such as an FPC
  • a circuit member having an electrode such as a metal oxide
  • it tends to be difficult to ensure a sufficient electrical connection.
  • the main object of the present invention is to obtain a more reliable electrical connection when connecting a circuit member having a flexible substrate or a glass substrate with an adhesive containing conductive particles.
  • One aspect of the present invention includes an adhesive component and conductive particles, the conductive particles include plastic particles and a metal layer that covers the plastic particles, and a plurality of protrusions on the surface of the conductive particles.
  • the height of the plurality of protrusions is 85 to 1200 nm on average.
  • Another aspect of the present invention is a first circuit member having a first substrate and a first connection terminal provided on the first substrate, and is disposed to face the first circuit member.
  • a circuit connection material is arranged between the second substrate and the second circuit member having the second connection terminal provided on the second substrate to produce a laminate, and the laminate is heated and heated.
  • the step of electrically connecting the first circuit member and the second circuit member to each other, the circuit connecting material contains an adhesive component and conductive particles, and the conductive particles are made of plastic.
  • a metal layer covering the plastic particles, and a plurality of protrusions are formed on the surface of the conductive particles, and the average height of the plurality of protrusions is 85 to 1200 nm. It is a manufacturing method.
  • the ratio of the area of the protrusions to the surface area of the conductive particles may be 8 to 60%.
  • the conductive particles may have a layer formed of Pd on the outermost surface of the conductive particles as a metal layer.
  • the thickness of the layer formed of Pd may be 2 to 200 nm.
  • the above-mentioned adhesive composition is provided on the first substrate and the first circuit member having the first connection terminal provided on the first substrate, the second substrate and the second substrate.
  • the second circuit member having the formed second connection terminal may be used to electrically connect to each other.
  • the first substrate is an IC chip or a flexible substrate
  • the second substrate is a flexible substrate containing at least one thermoplastic resin selected from the group consisting of polyimide, polyethylene terephthalate, polycarbonate, and polyethylene naphthalate. It may be.
  • the first substrate may be an IC chip or a flexible substrate
  • the second substrate may be a glass substrate or a composite substrate having a glass substrate and an insulating film provided on the glass substrate.
  • the first substrate is an IC chip or a flexible substrate
  • the second substrate is at least one thermoplastic selected from the group consisting of polyimide, polyethylene terephthalate, polycarbonate, and polyethylene naphthalate. It may be a flexible substrate containing a resin.
  • the first substrate may be an IC chip or a flexible substrate
  • the second substrate may be a glass substrate or a composite substrate having a glass substrate and an insulating film provided on the glass substrate.
  • the adhesive composition according to one embodiment is an adhesive film formed in a film shape.
  • the adhesive composition may be in a state other than a film (for example, a paste).
  • FIG. 1 is a cross-sectional view schematically showing a film-like adhesive composition (adhesive film) according to an embodiment.
  • the adhesive film 1 includes an adhesive component (insulating adhesive) 2 and conductive particles 3 dispersed in the adhesive component 2 in one embodiment.
  • the thickness of the adhesive film 1 may be, for example, 10 to 50 ⁇ m.
  • the adhesive component has an insulating property and contains a curable component that is cured by heat or light.
  • the adhesive component is defined as a solid content other than the conductive particles in the adhesive composition.
  • the curable component may contain a radical polymerizable substance and a free radical generator, may contain a thermosetting resin, and may contain a radical polymerizable substance, a free radical generator and a thermosetting resin.
  • the radical polymerizable substance is a substance having a functional group that is polymerized by radicals, and examples thereof include acrylate, methacrylate, and maleimide compounds.
  • the content of the radical polymerizable substance may be, for example, 50 to 80% by mass based on the total amount of the adhesive component.
  • acrylate and methacrylate examples include urethane acrylate, urethane methacrylate, methyl acrylate, ethyl acrylate, isopropyl acrylate, isobutyl acrylate, ethylene glycol diacrylate, diethylene glycol diacrylate, triethylene glycol diacrylate, dimethylol tricyclodecane diacrylate, Trimethylolpropane triacrylate, tetramethylolmethane tetraacrylate, 2-hydroxy-1,3-diaacryloxypropane, 2,2-bis [4- (acryloxymethoxy) phenyl] propane, 2,2-bis [4- (Acryloxypolyethoxy) phenyl] propane, dicyclopentenyl acrylate, tricyclodecanyl acrylate, bis Acryloxyethyl) isocyanurate, .epsilon.-caprolactone-modified tris (acryloyloxyethyl) isocyanur
  • a urethane acrylate or urethane methacrylate and a radically polymerizable substance having a Tg of 100 ° C. or more alone, cross-linked with an organic peroxide may be used in combination.
  • a radically polymerizable substance may have a dicyclopentenyl group, a tricyclodecanyl group and / or a triazine ring, and preferably has a tricyclodecanyl group or a triazine ring.
  • the radical polymerizable substance may be at least one radical polymerizable substance having a viscosity at 25 ° C. of 100,000 to 1,000,000 mPa ⁇ s, and preferably at least one radical polymerizable substance having a viscosity of 100,000 to 500,000 mPa ⁇ s. It may be.
  • the viscosity of the radical polymerizable substance can be measured using a commercially available E-type viscometer.
  • the free radical generator is a compound that decomposes by heating or light to generate free radicals, such as a peroxide compound or an azo compound.
  • the free radical generator is appropriately selected depending on the intended connection temperature, connection time, pot life, and the like.
  • the free radical generator may be at least one selected from, for example, benzoyl peroxide, diacyl peroxide, peroxydicarbonate, peroxyester, peroxyketal, dialkyl peroxide, and hydroperoxide. From the viewpoint of high reactivity and pot life, the free radical generator is preferably an organic peroxide having a half-life of 10 hours at a temperature of 40 ° C or higher and a half-life of 1 minute at a temperature of 180 ° C or lower. is there.
  • the free radical generator may be used in combination with a decomposition accelerator, an inhibitor and the like.
  • the content of the free radical generator may be, for example, 0.05 to 15% by mass based on the total amount of adhesive components.
  • the adhesive component may further contain a polymerization inhibitor.
  • the polymerization inhibitor may be hydroquinone, methyl ether hydroquinone, or the like.
  • the content of the polymerization inhibitor may be 0.05 to 5% by mass based on the total amount of the adhesive component.
  • Thermosetting resins are, for example, epoxy resins, cyanate ester resins, maleimide resins, allyl nadiimide resins, phenol resins, urea resins, melamine resins, alkyd resins, acrylic resins, unsaturated polyester resins, diallyl phthalate resins, silicone resins, Resorcinol formaldehyde resin, xylene resin, furan resin, polyurethane resin, ketone resin, triallyl cyanurate resin, polyisocyanate resin, resin containing tris (2-hydroxyethyl) isocyanurate, resin containing triallyl trimellitate And thermosetting resins synthesized from cyclopentadiene, thermosetting resins by trimerization of aromatic dicyanamide, and the like. These thermosetting resins are used alone or in combination of two or more. The content of the thermosetting resin may be, for example, 20 to 50% by mass based on the total amount of the adhesive component.
  • the adhesive component may further contain a curing agent.
  • the curing agent may be melamine and derivatives thereof, hydrazide-based curing agent, boron trifluoride-amine complex, sulfonium salt, amine imide, diaminomaleonitrile, polyamine salt, dicyandiamide, etc., or modified products thereof. Or in combination of two or more.
  • the curing agent may be a polyaddition type curing agent such as polyamines, polymercaptans, polyphenols, and acid anhydrides, or a polyaddition type curing agent and a catalyst type curing agent may be used in combination. .
  • the content of the curing agent may be 0.5 to 15% by mass based on the total amount of the adhesive component.
  • these hardeners are coated with a polymer material such as polyurethane or polyester, or a metal thin film such as Ni or Cu, and an inorganic material such as calcium silicate, the pot life can be extended. preferable.
  • the adhesive component may further contain a filler such as silicone particles, a softener, an accelerator, an anti-aging agent, a colorant, a flame retardant, a thixotropic agent, a coupling agent and the like.
  • a filler such as silicone particles, a softener, an accelerator, an anti-aging agent, a colorant, a flame retardant, a thixotropic agent, a coupling agent and the like.
  • the adhesive component may contain a resin having a functional group such as a hydroxyl group in order to improve the film formability.
  • resins are polystyrene, polyethylene, polyvinyl butyral, polyvinyl formal, polyimide, polyamide, polyester, polyvinyl chloride, polyphenylene oxide, urea resin, melamine resin, phenol resin, xylene resin, epoxy resin, polyisocyanate resin, phenoxy resin. , Polyimide resin, polyester urethane resin, polyurethane resin, etc.
  • the adhesive component may contain those resins modified with radically polymerizable functional groups, or contain a mixture of these resins and a styrene resin or acrylic resin for melt viscosity adjustment, etc. May be.
  • the adhesive component may contain rubber to enhance film formability.
  • FIG. 2 is a cross-sectional view schematically showing an embodiment of the conductive particles 3 included in the adhesive film 1.
  • the conductive particle 3 ⁇ / b> A includes a plastic particle 31 and a metal layer 32 ⁇ / b> A that covers the plastic particle 31 in one embodiment.
  • the plastic particle 31 may be used as long as the function as a circuit connecting material (function of electrically connecting circuit members) is maintained. A part of the surface of the particle 31 may be exposed without being covered with the metal layer 32A.
  • the plastic particle 31 may be, for example, a particle including a polymer including, as a monomer unit, at least one monomer selected from styrene and divinylbenzene.
  • the polymer may further contain (meth) acrylate as a monomer unit.
  • the diameter of the plastic particles 31 is preferably 1 ⁇ m or more on average and may be 40 ⁇ m or less. From the viewpoint of high-density mounting, the diameter of the plastic particles 31 is more preferably 1 ⁇ m or more and 30 ⁇ m or less on average. From the viewpoint of maintaining the connection state more stably when there are variations in the surface irregularities of the electrodes, the diameter of the plastic particles 31 is more preferably 2 ⁇ m or more and 20 ⁇ m or less on average.
  • the metal layer 32A is composed of, for example, a single metal layer.
  • the metal layer 32A is made of, for example, Ni, Cu, NiB, Ag, or Ru.
  • the thickness of the metal layer 32A may be, for example, 50 nm or more and 300 nm or less.
  • the thickness of the metal layer 32 ⁇ / b> A means the thickness in the portion of the metal layer where the protrusions described later are not formed.
  • the thickness of the metal layer 32A can be measured with an electron microscope.
  • the metal layer 32B is a metal layer which consists of two layers, the 1st metal layer 32a and the 2nd metal layer 32b, Good. That is, the conductive particle 3B according to another embodiment includes a plastic particle 31, a first metal layer 32a that covers the plastic particle 31, and a second metal layer 32b that covers the first metal layer 32a. It has.
  • the first metal layer 32a is made of, for example, Ni.
  • the second metal layer 32b may be formed of, for example, Au or Pd, and is preferably formed of Pd from the viewpoint of further improving the reliability. That is, the conductive particle 3B may have a layer formed of Au or Pd on the outermost surface of the conductive particle 3B as a metal layer. From the viewpoint of further improving the reliability, the conductive particle 3B is preferably made of Pd. It has a layer that is formed.
  • the thickness of the first metal layer 32a may be, for example, 50 nm or more and 300 nm or less.
  • the thickness of the second metal layer 32b may be, for example, 2 nm or more, 5 nm or more, or 10 nm or more, 200 nm or less, 100 nm or less, or 50 nm or less, 2 to 200 nm, 2 to 100 nm, 2 nm, or 2 nm. It may be ⁇ 50 nm, 5 ⁇ 200 nm, 5 ⁇ 100 nm, 5 ⁇ 50 nm, 10 ⁇ 200 nm, 10 ⁇ 100 nm, or 10 ⁇ 50 nm.
  • the thickness of the 1st metal layer 32a and the 2nd metal layer 32b means the thickness in the part of the metal layer in which the projection part mentioned later is not formed, respectively.
  • the thickness of the first metal layer 32a and the second metal layer 32b can be measured with an electron microscope.
  • a plurality of protrusions 33 are formed on the surface of the conductive particles 3.
  • the protrusion 33A is composed of a single metal layer 32A.
  • the protrusion 33B is composed of a metal layer 32B composed of two layers, a first metal layer 32a and a second metal layer 32b.
  • the height of the protrusion 33 is 85 nm or more, 90 nm or more, or 100 nm or more from the viewpoint of improving the reliability of electrical connection, 1200 nm or less, 1000 nm or less, 600 nm or less, 500 nm or less, 400 nm or less, 300 nm or less, Or it is 200 nm or less.
  • the height of the protrusion 33 is 85 to 1200 nm, 85 to 1000 nm, 85 to 600 nm, 85 to 500 nm, 85 to 400 nm, 85 to 300 nm, 85 to 200 nm, 90 to 1200 nm, 90 to 1000 nm, 90 -600 nm, 90-500 nm, 90-400 nm, 90-300 nm, 90-200 nm, 100-1200 nm, 100-1000 nm, 100-600 nm, 100-500 nm, 100-400 nm, 100-300 nm, or 100-200 nm Good.
  • the height of the protrusion 33 is determined by analyzing a two-dimensional image including a projected image of conductive particles.
  • the analysis of the two-dimensional image can be performed according to the method described in JP-A-2016-61722.
  • the particle edge substantially corresponds to the outer periphery including the irregularities derived from the protrusions of the two-dimensional projection image of the conductive particles.
  • a luminance frequency distribution obtained from a two-dimensional image generally shows a local minimum value reflecting a particle edge portion.
  • the two-dimensional image is binarized using the luminance corresponding to the minimum value as the first threshold value to generate a binarized image. Edges formed in the obtained binarized image are detected as particle edges. Based on the particle edges, the center coordinates of the conductive particles on the two-dimensional image are calculated.
  • a circle to be fitted to the particle edge is obtained by the method of least squares, and the center of the circle is set as the center coordinate of the conductive particle.
  • the area ratio of the protrusions 33 (area ratio of the protrusions 33) to the entire projected image of the surface of the conductive particles 3 is preferably 8% or more and 9%. Or more, 20% or more, preferably 60% or less or 50% or less, preferably 8 to 60%, 8 to 50%, 9 to 60%, 9 to 50%, 20 to 60%, Or 20 to 50%.
  • the area ratio of the protrusions can also be determined by analyzing a two-dimensional image of conductive particles according to the method described in JP-A-2016-61722.
  • the area ratio of the protrusions is obtained by, for example, calculating a second threshold corresponding to the boundary between the protrusion and the other part from the luminance frequency distribution in the region inside the particle edge, and the obtained second threshold And binarizing the area inside the particle edge to generate a binarized image, and in the obtained binarized image, the ratio of the area of the area corresponding to the protrusion to the area inside the particle edge And a step of calculating the area ratio of the protrusions.
  • the conductive particles 3 having protrusions as described above can be obtained, for example, by forming the metal layers 32A and 32B on the surface of the plastic particles 31 by metal plating.
  • the protruding portion 33 can be formed by changing the plating conditions and changing the thickness of the metal layers 32A and 32B.
  • the protrusion 33 can be formed by gradually increasing the concentration of the plating solution in the process of metal plating.
  • a metal layer having a knurled protrusion can be formed (Mochizuki et al., Surface Technology, Vol. 48, No. 4, pages 429 to 432, 1997).
  • glycine is used as a complexing agent that contributes to the stability of the plating bath, a metal layer having a flat surface is formed, whereas when tartaric acid or DL-malic acid is used as the complexing agent, a hump is formed.
  • Sugawara et al. Amorphous Plating, Vol. 36, pp.
  • the metal layers 32A and 32B having the protrusions 33 having a desired height and area ratio can be formed.
  • the conductive particles 3B shown in FIG. 2B for example, after forming the first metal layer 32a having the protrusions by the above method, the Au or Pd layer is formed by displacement plating. Thus, the second metal layer 32b can be obtained.
  • the content of the conductive particles 3 contained in the adhesive film 1 is determined according to the definition of the electrode to be connected.
  • the content of the conductive particles 3 may be, for example, 1 part by volume or more and 50 parts by volume or less with respect to 100 parts by volume of the adhesive component, which is preferable from the viewpoint of insulation and manufacturing cost. Is 30 parts by volume or less.
  • the adhesive composition may be a multilayer film (multilayer adhesive film).
  • the multilayer adhesive film may have a two-layer structure including, for example, a layer containing conductive particles and a layer not containing conductive particles, and is provided on both sides of the layer containing conductive particles. A three-layer configuration including a layer not including conductive particles may be used.
  • the multilayer adhesive film may include a plurality of layers including conductive particles.
  • the multilayer adhesive film may include an adhesive layer exhibiting high adhesiveness to the circuit member to be connected in consideration of adhesiveness with the circuit member. When these multilayer adhesive films are used, the conductive particles can be efficiently captured on the connection electrodes, which is advantageous for connecting narrow pitch circuit members.
  • the adhesive composition (adhesive film) described above is preferably used as a material (circuit connection material) for connecting circuit members to each other, and an anisotropic conductive adhesive composition for connecting circuit members to each other. It is particularly preferably used as (anisotropic conductive adhesive film).
  • Drawing 3 is a sectional view showing typically the manufacturing method of the connecting object concerning one embodiment.
  • the 1st circuit member 4, the 2nd circuit member 5, and the adhesive film 1 are prepared.
  • the first circuit member 4 includes a first substrate 6 and a first connection terminal 7 provided on one surface 6 a of the first substrate 6.
  • the second circuit member 5 includes a second substrate 8 and a second connection terminal 9 provided on one surface 8 a of the second substrate 8.
  • first circuit member 4 and the second circuit member 5 are arranged so that the first connection terminal 7 and the second connection terminal 9 face each other, and the first circuit member 4 and the second circuit member 5 are arranged.
  • the adhesive film 1 is disposed between the circuit member 5 and a laminate.
  • the adhesive film 1 is cured while pressurizing the entire laminate in the direction indicated by the arrow in FIG.
  • the pressure at the time of pressurization may be, for example, 1 to 10 MPa per total connection area.
  • the method of curing the adhesive film 1 may be a method by heating, or a method of using light irradiation in combination with heating. Heating may be performed at 100 to 170 ° C., for example. Pressurization and heating (light irradiation as necessary) may be performed, for example, for 1 to 160 seconds. Thereby, the 1st circuit member 4 and the 2nd circuit member 5 are crimped
  • the adhesive film 1 is disposed between the first circuit member 4 and the second circuit member 5, but as another embodiment, instead of the adhesive film, a paste adhesive composition
  • the object may be applied on the first circuit member 4 or the second circuit member 5, or both.
  • the connection body 10 includes the first substrate 6 and the first connection terminal 7 provided on the first substrate 6.
  • the second circuit member 5 having the first circuit member 4, the second substrate 8 and the second connection terminal 9 provided on the second substrate 8, the first circuit member 4 and the second circuit member 5.
  • the connection part which is provided between the circuit member 5 and electrically connects the first circuit member 4 (first connection terminal 7) and the second circuit member 5 (second connection terminal 9) to each other.
  • the connection part 11 is comprised by the hardened
  • the first substrate 6 may be, for example, an IC chip or a flexible substrate.
  • the second substrate 8 may be, for example, a flexible substrate, a glass substrate, or a composite substrate having a glass substrate and an insulating film provided on the glass substrate.
  • the first substrate 6 may be an IC chip or a flexible substrate
  • the second substrate 8 may be a flexible substrate.
  • the first substrate 6 may be an IC chip or a flexible substrate
  • the second substrate 8 may be a glass substrate or a composite substrate.
  • the first substrate 6 may be an IC chip or a flexible substrate.
  • the above-described adhesive film 1 is used for COP (Chip-on-Plastic-substrate) connection.
  • the above-mentioned adhesive film 1 is used for FOP (Film on Plastic substrate) connection.
  • the flexible substrate includes, for example, at least one thermoplastic resin selected from the group consisting of polyimide (PI), polyethylene terephthalate (PET), polycarbonate (PC), and polyethylene naphthalate (PEN).
  • PI polyimide
  • PET polyethylene terephthalate
  • PC polycarbonate
  • PEN polyethylene naphthalate
  • the flexible substrate may further have a modified film such as a hard coat and / or a protective film formed on the surface of the organic base material for improving optical and mechanical properties.
  • a reinforcing material selected from a glass substrate and SUS or the like may be bonded to the organic substrate.
  • the thickness of the flexible substrate is preferably 10 ⁇ m or more, 200 ⁇ m or less, or 125 ⁇ m or less from the viewpoint of securing the strength as a film and the ease of bending of the substrate alone.
  • the electrodes on the flexible substrate may be easily broken or cracked by heating and pressurization for crimping the circuit members.
  • the connection of electrodes for which it is difficult to form a sufficient electrical connection it is necessary to crimp the circuit member under a condition of lower temperature or lower stress in order to suppress damage to the electrodes.
  • the circuit connection material (adhesive film) of the present embodiment can have an advantageous effect as compared with conventional materials in these respects.
  • the glass substrate may be formed of soda glass, quartz glass, or the like, and may be a substrate subjected to chemical strengthening treatment from the viewpoint of preventing damage due to external stress.
  • the composite substrate may include a glass substrate and an insulating film formed on the surface of the glass substrate and made of polyimide or a colored organic or inorganic material for decoration. It may be formed on an insulating film.
  • the first substrate 6 is an electronic component such as an active element such as a semiconductor chip, a transistor, a diode, or a thyristor, a passive element such as a capacitor, a resistor, or a coil, or a printed circuit. It may be a substrate or the like.
  • the tip of a bump or gold wire formed by plating is melted with a torch or the like to form a gold ball, and the wire is pressed onto the electrode pad, and then the wire is cut.
  • Protruding electrodes first connection terminals 7) such as wire bumps obtained in this way can be provided and used as the first circuit member 4.
  • Examples of electrode materials for forming the first connection terminal 7 and the second connection terminal 9 include Ag paste, metals such as Ni, Al, Au, Cu, Ti, and Mo, metal oxides such as ITO and IZO, and silver nanowires. And conductors such as carbon nanotubes.
  • the first connection terminal 7 and the second connection terminal 9 may be formed of the same material or different materials, but are preferably the same material.
  • a surface layer formed of an oxide, a nitride, an alloy, an organic substance, or the like may be further provided from the viewpoint of preventing disconnection.
  • Each of the first circuit member 4 and the second circuit member 5 may be provided with one first connection terminal 7 or one second connection terminal 9, but preferably a predetermined interval is formed. Many are provided.
  • the first circuit member 4 is an FPC circuit board, and the second connection terminal 9 in the second circuit member 5 ensures sufficient electrical connection. Even when it is formed of a metal oxide that tends to be difficult, a more reliable electrical connection can be obtained.
  • FIG. 4 is a cross-sectional view schematically showing a main part of the connection body 10 according to an embodiment.
  • the height of the protrusion 33 of the conductive particle 3 is within a predetermined range. Since the conductive particles 3 interposed therebetween can apply sufficient pressure to the first connection terminal 7 and the second connection terminal 9 (and the second substrate 8) by the protrusions 33, higher reliability can be achieved. For example, it is considered that the increase in connection resistance under high temperature and high humidity is unlikely to occur.
  • FIG. 5 a cross-sectional view schematically showing a main part of a conventional connection body
  • the conductive particles 23 have a relatively low protrusion 23a. Sufficient pressure cannot be applied to the first connection terminal 7 and the second connection terminal 9 (and the second substrate 8). Therefore, the conventional connection body 20 is inferior in the reliability of electrical connection.
  • Plastic particles Using tetramethylolmethane tetraacrylate, divinylbenzene, and styrene as monomers and polymerizing them by suspension polymerization using a polymerization initiator (benzoyl peroxide), plastic particles were obtained.
  • Conductive particles 1-7 A Ni layer having a flat surface was formed on the obtained plastic particles, and an Au layer having a flat surface was further formed on the Ni layer to produce conductive particles.
  • Each conductive particle was dispersed in the prepared binder resin solution at a ratio of 10 parts by volume with respect to 100 parts by volume of the binder resin.
  • silicone fine particles product name: KMP-605, manufactured by Shin-Etsu Chemical Co., Ltd.
  • KMP-605 manufactured by Shin-Etsu Chemical Co., Ltd.
  • a coating solution containing particles and silicone fine particles was obtained.
  • This coating liquid was applied to a polyethylene terephthalate (PET) film (thickness 50 ⁇ m) having a surface treated on one side using a coating apparatus.
  • the coating film was dried by hot air drying at 70 ° C. to prepare an anisotropic conductive adhesive film (thickness: 18 ⁇ m) as a circuit connecting material.
  • -Glass member The glass member which has a glass substrate, Cu film
  • -Flexible member A flexible member having a polyethylene terephthalate (PET) film (elastic modulus at 25 ° C .: 4600 MPa) and an ITO connection terminal (thickness 20 nm) formed on the PET film was prepared.
  • PET polyethylene terephthalate
  • This FPC wiring is composed of a Cu layer having a pitch of 0.3 mm (space 0.15 mm, electrode width 0.15 mm, height 18 ⁇ m), a Ni plating layer 3 ⁇ m thick formed in order on the Cu layer, and a thickness of 0 It has a connection terminal composed of a 0.03 ⁇ m Au plating layer.
  • An anisotropic conductive adhesive film was sandwiched between the flexible member and the FPC.
  • the flexible member and the FPC were connected by pressurizing the whole for 10 seconds at a pressure of 2 MPa per total connection area while heating the anisotropic conductive adhesive film to reach 160 ° C.
  • a flexible / FPC connector was obtained.
  • the glass member and FPC were connected by sandwiching an anisotropic conductive adhesive film between them to obtain a glass / FPC connector.
  • Each obtained connecting body was subjected to a reliability test of 85 ° C., 85% RH, 72 hours. About the connection body before and behind a test, the connection resistance between the circuit members which oppose was measured.
  • Tables 1 and 2 show characteristics such as the outermost surface layer, protrusion height, protrusion area ratio, and evaluation results of the obtained conductive particles.
  • SYMBOLS 1 Adhesive film, 2 ... Adhesive component, 3 ... Conductive particle, 4 ... 1st circuit member, 5 ... 2nd circuit member, 6 ... 1st board

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Abstract

An aspect of the present invention relates to an adhesive composition which comprises an adhesive component and electroconductive particles, wherein the electroconductive particles each comprise a plastic particle and a metal layer covering the plastic particle and have a plurality of projections formed on the surface thereof, the plurality of projections having an average height of 85-1,200 nm.

Description

接着剤組成物、及び接続体の製造方法Adhesive composition and method for producing connector
 本発明は、接着剤組成物、及び接続体の製造方法に関する。 The present invention relates to an adhesive composition and a method for producing a connection body.
 近年、電子部品の小型化、薄型化及び高性能化が進んでおり、それと共に高密度実装技術の開発が活発に行われている。このような高密度実装において、電子部品と微細回路電極との接続を従来のハンダ及びゴムコネクターによって対応することは困難である。そこで、分解能に優れた異方導電性の接着剤及びそのフィルムを用いる接続方法が多用されている。この接続方法では、例えば、液晶ディスプレイ(Liquid Cristal Display)のガラス基板と、フレキシブル回路基板(FPC;Flexible Print Circuit)のような回路部材とを接続する際に、導電性粒子を含有する異方導電性接着フィルムを対向する電極間に挟み、加熱及び加圧することによって、同一の基板上の隣接する電極同士の絶縁性を維持しながら、両基板の電極同士を電気的に接続して、微細電極を有する電子部品と回路部材とが接着固定される。 In recent years, electronic components have become smaller, thinner, and higher in performance, and high-density packaging technology has been actively developed along with that. In such high-density mounting, it is difficult to handle the connection between the electronic component and the fine circuit electrode by using conventional solder and rubber connectors. Therefore, an anisotropic conductive adhesive excellent in resolution and a connection method using the film are frequently used. In this connection method, for example, when connecting a glass substrate of a liquid crystal display (Liquid Crystal Display) and a circuit member such as a flexible circuit board (FPC: Flexible Print Circuit), an anisotropic conductive material containing conductive particles is used. The electrode on both substrates is electrically connected to each other while maintaining the insulation between adjacent electrodes on the same substrate by sandwiching the adhesive adhesive film between the opposing electrodes, and heating and pressurizing. The electronic component having circuit board and the circuit member are bonded and fixed.
 また、モジュールの軽量化及び薄型化の要求から、上記のガラス基板に代えて、プラスチック基板等のフレキシブル基板を使用することが望まれている。このような基板を用いた部材同士を異方導電性接着フィルムで接続する場合、接続抵抗を低減するために、異方導電性接着フィルムに含まれる導電性粒子の表面に突起を形成することが検討されており、そのような導電性粒子の形状の評価も行われている(特許文献1参照)。 In addition, it is desired to use a flexible substrate such as a plastic substrate instead of the glass substrate because of the demand for lighter and thinner modules. When connecting members using such a substrate with an anisotropic conductive adhesive film, in order to reduce connection resistance, it is possible to form protrusions on the surface of the conductive particles contained in the anisotropic conductive adhesive film. The shape of such conductive particles has been evaluated (see Patent Document 1).
特開2016-61722号公報Japanese Unexamined Patent Publication No. 2016-61722
 フレキシブル基板又はガラス基板の電極としては、例えば、金属酸化物等で形成された透明電極が用いられる。これらの金属酸化物等の電極を有する回路部材にFPCのような回路部材を接続する場合、十分な電気的接続を確保しにくい傾向がある。特に、導電性粒子を含む接着剤を用いて接続する場合、電極間の電気的接続の信頼性に関して改良の余地がある。 As the electrode of the flexible substrate or the glass substrate, for example, a transparent electrode formed of a metal oxide or the like is used. When a circuit member such as an FPC is connected to a circuit member having an electrode such as a metal oxide, it tends to be difficult to ensure a sufficient electrical connection. In particular, when connecting using an adhesive containing conductive particles, there is room for improvement regarding the reliability of the electrical connection between the electrodes.
 そこで、本発明の主な目的は、フレキシブル基板又はガラス基板を有する回路部材を、導電性粒子を含有する接着剤によって接続する場合において、より信頼性の高い電気的接続を得ることにある。 Therefore, the main object of the present invention is to obtain a more reliable electrical connection when connecting a circuit member having a flexible substrate or a glass substrate with an adhesive containing conductive particles.
 本発明の一側面は、接着剤成分と、導電性粒子とを含有し、導電性粒子が、プラスチック粒子及び該プラスチック粒子を被覆する金属層を有し、導電性粒子の表面には複数の突起部が形成されており、複数の突起部の高さが平均で85~1200nmである、接着剤組成物である。 One aspect of the present invention includes an adhesive component and conductive particles, the conductive particles include plastic particles and a metal layer that covers the plastic particles, and a plurality of protrusions on the surface of the conductive particles. In the adhesive composition, the height of the plurality of protrusions is 85 to 1200 nm on average.
 本発明の他の一側面は、第一の基板及び該第一の基板上に設けられた第一の接続端子を有する第一の回路部材と、第一の回路部材と対向して配置され、第二の基板及び該第二の基板上に設けられた第二の接続端子を有する第二の回路部材との間に回路接続材料を配置して積層体を作製し、積層体を加熱及び加圧して、第一の回路部材と第二の回路部材とを互いに電気的に接続する工程を備え、回路接続材料が、接着剤成分と、導電性粒子とを含有し、導電性粒子が、プラスチック粒子及び該プラスチック粒子を被覆する金属層を有し、導電性粒子の表面には複数の突起部が形成されており、複数の突起部の高さが平均で85~1200nmである、接続体の製造方法である。 Another aspect of the present invention is a first circuit member having a first substrate and a first connection terminal provided on the first substrate, and is disposed to face the first circuit member. A circuit connection material is arranged between the second substrate and the second circuit member having the second connection terminal provided on the second substrate to produce a laminate, and the laminate is heated and heated. And the step of electrically connecting the first circuit member and the second circuit member to each other, the circuit connecting material contains an adhesive component and conductive particles, and the conductive particles are made of plastic. And a metal layer covering the plastic particles, and a plurality of protrusions are formed on the surface of the conductive particles, and the average height of the plurality of protrusions is 85 to 1200 nm. It is a manufacturing method.
 上記の各側面では、導電性粒子の投影像において、導電性粒子表面の面積に対する突起部の面積の割合は、8~60%であってよい。導電性粒子は、金属層として、導電性粒子の最表面にPdで形成されている層を有してよい。Pdで形成されている層の厚さは、2~200nmであってよい。 In each of the above aspects, in the projected image of the conductive particles, the ratio of the area of the protrusions to the surface area of the conductive particles may be 8 to 60%. The conductive particles may have a layer formed of Pd on the outermost surface of the conductive particles as a metal layer. The thickness of the layer formed of Pd may be 2 to 200 nm.
 上記の接着剤組成物は、第一の基板及び該第一の基板上に設けられた第一の接続端子を有する第一の回路部材と、第二の基板及び該第二の基板上に設けられた第二の接続端子を有する第二の回路部材とを、互いに電気的に接続するために用いられてよい。この場合、第一の基板がICチップ又はフレキシブル基板であり、第二の基板が、ポリイミド、ポリエチレンテレフタレート、ポリカーボネート及びポリエチレンナフタレートからなる群より選ばれる少なくとも1種の熱可塑性樹脂を含むフレキシブル基板であってよい。第一の基板がICチップ又はフレキシブル基板であり、第二の基板が、ガラス基板、又は、ガラス基板及び該ガラス基板上に設けられた絶縁膜を有する複合基板であってもよい。 The above-mentioned adhesive composition is provided on the first substrate and the first circuit member having the first connection terminal provided on the first substrate, the second substrate and the second substrate. The second circuit member having the formed second connection terminal may be used to electrically connect to each other. In this case, the first substrate is an IC chip or a flexible substrate, and the second substrate is a flexible substrate containing at least one thermoplastic resin selected from the group consisting of polyimide, polyethylene terephthalate, polycarbonate, and polyethylene naphthalate. It may be. The first substrate may be an IC chip or a flexible substrate, and the second substrate may be a glass substrate or a composite substrate having a glass substrate and an insulating film provided on the glass substrate.
 上記の接続体の製造方法では、第一の基板がICチップ又はフレキシブル基板であり、第二の基板が、ポリイミド、ポリエチレンテレフタレート、ポリカーボネート及びポリエチレンナフタレートからなる群より選ばれる少なくとも1種の熱可塑性樹脂を含むフレキシブル基板であってよい。第一の基板がICチップ又はフレキシブル基板であり、第二の基板が、ガラス基板、又は、ガラス基板及び該ガラス基板上に設けられた絶縁膜を有する複合基板であってもよい。 In the connection body manufacturing method, the first substrate is an IC chip or a flexible substrate, and the second substrate is at least one thermoplastic selected from the group consisting of polyimide, polyethylene terephthalate, polycarbonate, and polyethylene naphthalate. It may be a flexible substrate containing a resin. The first substrate may be an IC chip or a flexible substrate, and the second substrate may be a glass substrate or a composite substrate having a glass substrate and an insulating film provided on the glass substrate.
 本発明によれば、フレキシブル基板又はガラス基板を有する回路部材を、導電性粒子を含有する接着剤によって接続する場合において、より信頼性の高い電気的接続を得ることができる。 According to the present invention, when a circuit member having a flexible substrate or a glass substrate is connected by an adhesive containing conductive particles, a more reliable electrical connection can be obtained.
接着剤組成物の一実施形態を模式的に示す断面図である。It is sectional drawing which shows typically one Embodiment of an adhesive composition. 導電性粒子の一実施形態を模式的に示す断面図である。It is sectional drawing which shows typically one Embodiment of electroconductive particle. 接続体の製造方法の一実施形態を模式的に示す断面図である。It is sectional drawing which shows typically one Embodiment of the manufacturing method of a connection body. 一実施形態の接続体の要部を模式的に示す断面図である。It is sectional drawing which shows typically the principal part of the connection body of one Embodiment. 従来の接続体の要部を模式的に示す断面図である。It is sectional drawing which shows the principal part of the conventional connection body typically.
 以下、本発明の実施形態について詳細に説明する。ただし、本発明は以下の実施形態に限定されるものではない。 Hereinafter, embodiments of the present invention will be described in detail. However, the present invention is not limited to the following embodiments.
 一実施形態に係る接着剤組成物は、フィルム状に形成された接着剤フィルムである。他の一実施形態では、接着剤組成物は、フィルム状以外の状態(例えばペースト状)であってもよい。 The adhesive composition according to one embodiment is an adhesive film formed in a film shape. In another embodiment, the adhesive composition may be in a state other than a film (for example, a paste).
 図1は、一実施形態に係るフィルム状の接着剤組成物(接着剤フィルム)を模式的に示す断面図である。図1に示すように、接着剤フィルム1は、一実施形態において、接着剤成分(絶縁性接着剤)2と、接着剤成分2中に分散された導電性粒子3とを備えている。接着剤フィルム1の厚さは、例えば10~50μmであってよい。 FIG. 1 is a cross-sectional view schematically showing a film-like adhesive composition (adhesive film) according to an embodiment. As shown in FIG. 1, the adhesive film 1 includes an adhesive component (insulating adhesive) 2 and conductive particles 3 dispersed in the adhesive component 2 in one embodiment. The thickness of the adhesive film 1 may be, for example, 10 to 50 μm.
 接着剤成分は、一実施形態において、絶縁性を有し、熱又は光によって硬化する硬化性成分を含有する。接着剤成分は、接着剤組成物中の導電性粒子以外の固形分として定義される。 In one embodiment, the adhesive component has an insulating property and contains a curable component that is cured by heat or light. The adhesive component is defined as a solid content other than the conductive particles in the adhesive composition.
 硬化性成分は、ラジカル重合性物質及び遊離ラジカル発生剤を含んでいてよく、熱硬化性樹脂を含んでいてよく、ラジカル重合性物質、遊離ラジカル発生剤及び熱硬化性樹脂を含んでいてよい。 The curable component may contain a radical polymerizable substance and a free radical generator, may contain a thermosetting resin, and may contain a radical polymerizable substance, a free radical generator and a thermosetting resin.
 ラジカル重合性物質は、ラジカルにより重合する官能基を有する物質であり、例えば、アクリレート、メタクリレート、及びマレイミド化合物が挙げられる。ラジカル重合性物質の含有量は、接着剤成分全量を基準として、例えば50~80質量%であってよい。 The radical polymerizable substance is a substance having a functional group that is polymerized by radicals, and examples thereof include acrylate, methacrylate, and maleimide compounds. The content of the radical polymerizable substance may be, for example, 50 to 80% by mass based on the total amount of the adhesive component.
 アクリレート及びメタクリレートとしては、例えば、ウレタンアクリレート、ウレタンメタアクリレート、メチルアクリレート、エチルアクリレート、イソプロピルアクリレート、イソブチルアクリレート、エチレングリコールジアクリレート、ジエチレングリコールジアクリレート、トリエチレングリコールジアクリレート、ジメチロールトリシクロデカンジアクリレート、トリメチロールプロパントリアクリレート、テトラメチロールメタンテトラアクリレート、2-ヒドロキシ-1,3-ジアクリロキシプロパン、2,2-ビス〔4-(アクリロキシメトキシ)フェニル〕プロパン、2,2-ビス〔4-(アクリロキシポリエトキシ)フェニル〕プロパン、ジシクロペンテニルアクリレート、トリシクロデカニルアクリレート、ビス(アクリロキシエチル)イソシアヌレート、ε-カプロラクトン変性トリス(アクリロキシエチル)イソシアヌレート、及びトリス(アクリロキシエチル)イソシアヌレートが挙げられる。ラジカル重合性物質は、これらを単独で又は2種以上を組み合わせて用いられる。ラジカル重合性物質は、接着性の観点からは、好ましくはウレタンアクリレート又はウレタンメタアクリレートである。 Examples of the acrylate and methacrylate include urethane acrylate, urethane methacrylate, methyl acrylate, ethyl acrylate, isopropyl acrylate, isobutyl acrylate, ethylene glycol diacrylate, diethylene glycol diacrylate, triethylene glycol diacrylate, dimethylol tricyclodecane diacrylate, Trimethylolpropane triacrylate, tetramethylolmethane tetraacrylate, 2-hydroxy-1,3-diaacryloxypropane, 2,2-bis [4- (acryloxymethoxy) phenyl] propane, 2,2-bis [4- (Acryloxypolyethoxy) phenyl] propane, dicyclopentenyl acrylate, tricyclodecanyl acrylate, bis Acryloxyethyl) isocyanurate, .epsilon.-caprolactone-modified tris (acryloyloxyethyl) isocyanurate, and tris (acryloyloxyethyl) isocyanurate. These radically polymerizable substances are used alone or in combination of two or more. The radically polymerizable substance is preferably urethane acrylate or urethane methacrylate from the viewpoint of adhesiveness.
 ラジカル重合性物質としては、耐熱性を向上させる観点から、ウレタンアクリレート又はウレタンメタアクリレートと、有機過酸化物で架橋された、単独で100℃以上のTgを示すラジカル重合性物質とを併用することが特に好ましい。このようなラジカル重合性物質は、ジシクロペンテニル基、トリシクロデカニル基及び/又はトリアジン環を有していてよく、好ましくは、トリシクロデカニル基又はトリアジン環を有する。 As a radically polymerizable substance, from the viewpoint of improving heat resistance, a urethane acrylate or urethane methacrylate and a radically polymerizable substance having a Tg of 100 ° C. or more alone, cross-linked with an organic peroxide may be used in combination. Is particularly preferred. Such a radically polymerizable substance may have a dicyclopentenyl group, a tricyclodecanyl group and / or a triazine ring, and preferably has a tricyclodecanyl group or a triazine ring.
 ラジカル重合性物質は、25℃における粘度が100000~1000000mPa・sであるラジカル重合性物質の少なくとも1種であってもよく、好ましくは、100000~500000mPa・sであるラジカル重合性物質の少なくとも1種であってよい。ラジカル重合性物質の粘度は、市販のE型粘度計を用いて測定できる。 The radical polymerizable substance may be at least one radical polymerizable substance having a viscosity at 25 ° C. of 100,000 to 1,000,000 mPa · s, and preferably at least one radical polymerizable substance having a viscosity of 100,000 to 500,000 mPa · s. It may be. The viscosity of the radical polymerizable substance can be measured using a commercially available E-type viscometer.
 遊離ラジカル発生剤は、加熱又は光により分解して遊離ラジカルを発生する化合物であり、例えば過酸化化合物又はアゾ系化合物である。遊離ラジカル発生剤は、目的とする接続温度、接続時間、ポットライフ等により適宜選定される。遊離ラジカル発生剤は、例えば、ベンゾイルパーオキサイド、ジアシルパーオキサイド、パーオキシジカーボネート、パーオキシエステル、パーオキシケタール、ジアルキルパーオキサイド及びハイドロパーオキサイドから選ばれる1種以上であってよい。高反応性とポットライフの観点からは、遊離ラジカル発生剤は、好ましくは、半減期10時間の温度が40℃以上で、且つ、半減期1分の温度が180℃以下の有機過酸化物である。遊離ラジカル発生剤は、分解促進剤、抑制剤等を組み合わせて用いられてもよい。遊離ラジカル発生剤の含有量は、接着剤成分全量を基準として、例えば0.05~15質量%であってよい。 The free radical generator is a compound that decomposes by heating or light to generate free radicals, such as a peroxide compound or an azo compound. The free radical generator is appropriately selected depending on the intended connection temperature, connection time, pot life, and the like. The free radical generator may be at least one selected from, for example, benzoyl peroxide, diacyl peroxide, peroxydicarbonate, peroxyester, peroxyketal, dialkyl peroxide, and hydroperoxide. From the viewpoint of high reactivity and pot life, the free radical generator is preferably an organic peroxide having a half-life of 10 hours at a temperature of 40 ° C or higher and a half-life of 1 minute at a temperature of 180 ° C or lower. is there. The free radical generator may be used in combination with a decomposition accelerator, an inhibitor and the like. The content of the free radical generator may be, for example, 0.05 to 15% by mass based on the total amount of adhesive components.
 接着剤成分がラジカル硬化型材料を含有する場合、重合禁止剤を更に含んでいてもよい。重合禁止剤は、ハイドロキノン、メチルエーテルハイドロキノン類等であってよい。重合禁止剤の含有量は、接着剤成分全量を基準として、0.05~5質量%であってよい。 When the adhesive component contains a radical curable material, it may further contain a polymerization inhibitor. The polymerization inhibitor may be hydroquinone, methyl ether hydroquinone, or the like. The content of the polymerization inhibitor may be 0.05 to 5% by mass based on the total amount of the adhesive component.
 熱硬化性樹脂は、例えば、エポキシ樹脂、シアネートエステル樹脂、マレイミド樹脂、アリルナジイミド樹脂、フェノール樹脂、ユリア樹脂、メラミン樹脂、アルキド樹脂、アクリル樹脂、不飽和ポリエステル樹脂、ジアリルフタレート樹脂、シリコーン樹脂、レゾルシノールホルムアルデヒド樹脂、キシレン樹脂、フラン樹脂、ポリウレタン樹脂、ケトン樹脂、トリアリルシアヌレート樹脂、ポリイソシアネート樹脂、トリス(2-ヒドロキシエチル)イソシアヌラートを含有する樹脂、トリアリルトリメリタートを含有する樹脂、シクロペンタジエンから合成された熱硬化性樹脂、芳香族ジシアナミドの三量化による熱硬化性樹脂等が挙げられる。熱硬化性樹脂は、これらを単独で又は2種以上を組み合わせて用いられる。熱硬化性樹脂の含有量は、接着剤成分全量を基準として、例えば20~50質量%であってよい。 Thermosetting resins are, for example, epoxy resins, cyanate ester resins, maleimide resins, allyl nadiimide resins, phenol resins, urea resins, melamine resins, alkyd resins, acrylic resins, unsaturated polyester resins, diallyl phthalate resins, silicone resins, Resorcinol formaldehyde resin, xylene resin, furan resin, polyurethane resin, ketone resin, triallyl cyanurate resin, polyisocyanate resin, resin containing tris (2-hydroxyethyl) isocyanurate, resin containing triallyl trimellitate And thermosetting resins synthesized from cyclopentadiene, thermosetting resins by trimerization of aromatic dicyanamide, and the like. These thermosetting resins are used alone or in combination of two or more. The content of the thermosetting resin may be, for example, 20 to 50% by mass based on the total amount of the adhesive component.
 接着剤成分が熱硬化性樹脂を含有する場合、接着剤成分は、硬化剤を更に含有してもよい。硬化剤は、メラミン及びその誘導体、ヒドラジド系硬化剤、三フッ化ホウ素-アミン錯体、スルホニウム塩、アミンイミド、ジアミノマレオニトリル、ポリアミン塩、ジシアンジアミド等、又はこれらの変性物であってよく、これらを単独で又は2種以上を組み合わせて使用されてよい。硬化剤は、その他、ポリアミン類、ポリメルカプタン、ポリフェノール、酸無水物等の重付加型の硬化剤であってもよいし、重付加型の硬化剤と触媒型硬化剤とを併用することもできる。硬化剤の含有量は、接着剤成分全量を基準として、0.5~15質量%であってよい。 When the adhesive component contains a thermosetting resin, the adhesive component may further contain a curing agent. The curing agent may be melamine and derivatives thereof, hydrazide-based curing agent, boron trifluoride-amine complex, sulfonium salt, amine imide, diaminomaleonitrile, polyamine salt, dicyandiamide, etc., or modified products thereof. Or in combination of two or more. The curing agent may be a polyaddition type curing agent such as polyamines, polymercaptans, polyphenols, and acid anhydrides, or a polyaddition type curing agent and a catalyst type curing agent may be used in combination. . The content of the curing agent may be 0.5 to 15% by mass based on the total amount of the adhesive component.
 これらの硬化剤をポリウレタン系、ポリエステル系等の高分子物質、又は、Ni、Cu等の金属薄膜及びケイ酸カルシウム等の無機物で被覆してマイクロカプセル化したものは、可使時間が延長できるため好ましい。 Because these hardeners are coated with a polymer material such as polyurethane or polyester, or a metal thin film such as Ni or Cu, and an inorganic material such as calcium silicate, the pot life can be extended. preferable.
 接着剤成分は、シリコーン粒子等の充填材、軟化剤、促進剤、老化防止剤、着色剤、難燃化剤、チキソトロピック剤、カップリング剤などを更に含有してもよい。 The adhesive component may further contain a filler such as silicone particles, a softener, an accelerator, an anti-aging agent, a colorant, a flame retardant, a thixotropic agent, a coupling agent and the like.
 接着剤組成物をフィルム状に形成させる場合、フィルム形成性を高めるために、接着剤成分は、水酸基等の官能基を有する樹脂を含んでいてよい。このような樹脂は、ポリスチレン、ポリエチレン、ポリビニルブチラール、ポリビニルホルマール、ポリイミド、ポリアミド、ポリエステル、ポリ塩化ビニル、ポリフェニレンオキサイド、尿素樹脂、メラミン樹脂、フェノール樹脂、キシレン樹脂、エポキシ樹脂、ポリイソシアネート樹脂、フェノキシ樹脂、ポリイミド樹脂、ポリエステルウレタン樹脂、ポリウレタン樹脂等であってよく、接続信頼性を更に高める観点からは、高速液体クロマトグラフィー(HPLC)から求められる重量平均分子量が10000以上の高分子量エポキシ樹脂又はフェノキシ樹脂であってよい。接着剤成分は、これらの樹脂がラジカル重合性の官能基で変性したものを含有してもよいし、溶融粘度調整等のために、これらの樹脂と、スチレン系樹脂又はアクリル樹脂の混合物を含有してもよい。他の実施形態として、接着剤成分は、フィルム形成性を高めるためにゴムを含有してもよい。 In the case where the adhesive composition is formed into a film shape, the adhesive component may contain a resin having a functional group such as a hydroxyl group in order to improve the film formability. Such resins are polystyrene, polyethylene, polyvinyl butyral, polyvinyl formal, polyimide, polyamide, polyester, polyvinyl chloride, polyphenylene oxide, urea resin, melamine resin, phenol resin, xylene resin, epoxy resin, polyisocyanate resin, phenoxy resin. , Polyimide resin, polyester urethane resin, polyurethane resin, etc. From the viewpoint of further improving the connection reliability, a high molecular weight epoxy resin or phenoxy resin having a weight average molecular weight of 10,000 or more determined by high performance liquid chromatography (HPLC) It may be. The adhesive component may contain those resins modified with radically polymerizable functional groups, or contain a mixture of these resins and a styrene resin or acrylic resin for melt viscosity adjustment, etc. May be. In another embodiment, the adhesive component may contain rubber to enhance film formability.
 図2は、接着剤フィルム1に含まれる導電性粒子3の一実施形態を模式的に示す断面図である。図2(a)に示すように、導電性粒子3Aは、一実施形態において、プラスチック粒子31、及び、プラスチック粒子31を被覆する金属層32Aを有する。 FIG. 2 is a cross-sectional view schematically showing an embodiment of the conductive particles 3 included in the adhesive film 1. As shown in FIG. 2A, the conductive particle 3 </ b> A includes a plastic particle 31 and a metal layer 32 </ b> A that covers the plastic particle 31 in one embodiment.
 プラスチック粒子31の表面の実質的に全体が金属層32Aで被覆されていることが好ましいが、回路接続材料としての機能(回路部材同士を電気的に接続する機能)が維持される範囲で、プラスチック粒子31の表面の一部が金属層32Aで被覆されずに露出していてもよい。 It is preferable that substantially the entire surface of the plastic particle 31 is covered with the metal layer 32A. However, the plastic particle 31 may be used as long as the function as a circuit connecting material (function of electrically connecting circuit members) is maintained. A part of the surface of the particle 31 may be exposed without being covered with the metal layer 32A.
 プラスチック粒子31は、例えば、スチレン及びジビニルベンゼンから選ばれる少なくとも1種のモノマーをモノマー単位として含む重合体を含む粒子であってよい。当該重合体は、モノマー単位として、(メタ)アクリレートを更に含んでいてもよい。 The plastic particle 31 may be, for example, a particle including a polymer including, as a monomer unit, at least one monomer selected from styrene and divinylbenzene. The polymer may further contain (meth) acrylate as a monomer unit.
 プラスチック粒子31の直径は、好ましくは、平均で、1μm以上であってよく、40μm以下であってよい。高密度実装の観点から、プラスチック粒子31の直径は、より好ましくは、平均で、1μm以上であり、30μm以下である。電極の表面凹凸のばらつきのある場合により安定して接続状態を維持する観点からは、プラスチック粒子31の直径は、より好ましくは、平均で、2μm以上であり、20μm以下である。 The diameter of the plastic particles 31 is preferably 1 μm or more on average and may be 40 μm or less. From the viewpoint of high-density mounting, the diameter of the plastic particles 31 is more preferably 1 μm or more and 30 μm or less on average. From the viewpoint of maintaining the connection state more stably when there are variations in the surface irregularities of the electrodes, the diameter of the plastic particles 31 is more preferably 2 μm or more and 20 μm or less on average.
 金属層32Aは、例えば一層の金属層からなっている。金属層32Aは、例えば、Ni、Cu、NiB、Ag又はRuで形成されている。金属層32Aの厚さは、例えば、50nm以上であってよく、300nm以下であってよい。金属層32Aの厚さは、後述する突起部が形成されていない金属層の部分における厚さを意味する。金属層32Aの厚さは、電子顕微鏡により測定することができる。 The metal layer 32A is composed of, for example, a single metal layer. The metal layer 32A is made of, for example, Ni, Cu, NiB, Ag, or Ru. The thickness of the metal layer 32A may be, for example, 50 nm or more and 300 nm or less. The thickness of the metal layer 32 </ b> A means the thickness in the portion of the metal layer where the protrusions described later are not formed. The thickness of the metal layer 32A can be measured with an electron microscope.
 図2(b)に示すように、他の一実施形態の導電性粒子3Bでは、金属層32Bは、第一の金属層32a及び第二の金属層32bの二層からなる金属層であってよい。すなわち、他の一実施形態に係る導電性粒子3Bは、プラスチック粒子31と、プラスチック粒子31を被覆する第一の金属層32aと、第一の金属層32aを被覆する第二の金属層32bとを備えている。 As shown in FIG.2 (b), in the electroconductive particle 3B of other one Embodiment, the metal layer 32B is a metal layer which consists of two layers, the 1st metal layer 32a and the 2nd metal layer 32b, Good. That is, the conductive particle 3B according to another embodiment includes a plastic particle 31, a first metal layer 32a that covers the plastic particle 31, and a second metal layer 32b that covers the first metal layer 32a. It has.
 第一の金属層32aは、例えばNiで形成されている。第二の金属層32bは、例えば、Au又はPdで形成されていてよく、信頼性を更に向上させる観点から、好ましくはPdで形成されている。つまり、導電性粒子3Bは、金属層として、導電性粒子3Bの最表面に、Au又はPdで形成されている層を有していてよく、信頼性を更に向上させる観点から、好ましくはPdで形成されている層を有する。 The first metal layer 32a is made of, for example, Ni. The second metal layer 32b may be formed of, for example, Au or Pd, and is preferably formed of Pd from the viewpoint of further improving the reliability. That is, the conductive particle 3B may have a layer formed of Au or Pd on the outermost surface of the conductive particle 3B as a metal layer. From the viewpoint of further improving the reliability, the conductive particle 3B is preferably made of Pd. It has a layer that is formed.
 第一の金属層32aの厚さは、例えば、50nm以上であってよく、300nm以下であってよい。第二の金属層32bの厚さは、例えば、2nm以上、5nm以上、又は10nm以上であってよく、200nm以下、100nm以下、又は50nm以下であってよく、2~200nm、2~100nm、2~50nm、5~200nm、5~100nm、5~50nm、10~200nm、10~100nm、又は10~50nmであってよい。第一の金属層32a及び第二の金属層32bの厚さは、それぞれ、後述する突起部が形成されていない金属層の部分における厚さを意味する。第一の金属層32a及び第二の金属層32bの厚さは、電子顕微鏡により測定することができる。 The thickness of the first metal layer 32a may be, for example, 50 nm or more and 300 nm or less. The thickness of the second metal layer 32b may be, for example, 2 nm or more, 5 nm or more, or 10 nm or more, 200 nm or less, 100 nm or less, or 50 nm or less, 2 to 200 nm, 2 to 100 nm, 2 nm, or 2 nm. It may be ˜50 nm, 5˜200 nm, 5˜100 nm, 5˜50 nm, 10˜200 nm, 10˜100 nm, or 10˜50 nm. The thickness of the 1st metal layer 32a and the 2nd metal layer 32b means the thickness in the part of the metal layer in which the projection part mentioned later is not formed, respectively. The thickness of the first metal layer 32a and the second metal layer 32b can be measured with an electron microscope.
 導電性粒子3の表面には、複数の突起部33が形成されている。図2(a)に示した導電性粒子3Aでは、突起部33Aは、一層からなる金属層32Aで構成されている。図2(b)に示した導電性粒子3Bでは、突起部33Bは、第一の金属層32a及び第二の金属層32bの二層からなる金属層32Bで構成されている。 A plurality of protrusions 33 are formed on the surface of the conductive particles 3. In the conductive particle 3A shown in FIG. 2A, the protrusion 33A is composed of a single metal layer 32A. In the conductive particle 3B shown in FIG. 2B, the protrusion 33B is composed of a metal layer 32B composed of two layers, a first metal layer 32a and a second metal layer 32b.
 突起部33の高さは、電気的接続の信頼性を向上させる観点から、85nm以上、90nm以上、又は100nm以上であり、1200nm以下、1000nm以下、600nm以下、500nm以下、400nm以下、300nm以下、又は200nm以下である。同様の観点から、突起部33の高さは、85~1200nm、85~1000nm、85~600nm、85~500nm、85~400nm、85~300nm、85~200nm、90~1200nm、90~1000nm、90~600nm、90~500nm、90~400nm、90~300nm、90~200nm、100~1200nm、100~1000nm、100~600nm、100~500nm、100~400nm、100~300nm、又は100~200nmであってよい。 The height of the protrusion 33 is 85 nm or more, 90 nm or more, or 100 nm or more from the viewpoint of improving the reliability of electrical connection, 1200 nm or less, 1000 nm or less, 600 nm or less, 500 nm or less, 400 nm or less, 300 nm or less, Or it is 200 nm or less. From the same viewpoint, the height of the protrusion 33 is 85 to 1200 nm, 85 to 1000 nm, 85 to 600 nm, 85 to 500 nm, 85 to 400 nm, 85 to 300 nm, 85 to 200 nm, 90 to 1200 nm, 90 to 1000 nm, 90 -600 nm, 90-500 nm, 90-400 nm, 90-300 nm, 90-200 nm, 100-1200 nm, 100-1000 nm, 100-600 nm, 100-500 nm, 100-400 nm, 100-300 nm, or 100-200 nm Good.
 ここで、突起部33の高さは、導電性粒子の投影像を含む二次元画像を分析することによって決定される。二次元画像の分析は、特開2016-61722号公報に記載された方法に従って行うことができる。 Here, the height of the protrusion 33 is determined by analyzing a two-dimensional image including a projected image of conductive particles. The analysis of the two-dimensional image can be performed according to the method described in JP-A-2016-61722.
 具体的には、例えば、複数の導電性粒子が撮像された二次元画像における各導電性粒子の投影像とその他の領域との境界である粒子エッジを検出する工程と、粒子エッジを基に二次元画像上の導電性粒子の中心座標を算出する工程と、中心座標の周りの所定の角度毎に、粒子エッジを複数の粒子エッジ部分(例えば12個)に分割し、複数の粒子エッジ部分ごとに、中心座標と粒子エッジとの距離の最大値と最小値の差分を算出し、それらの差分の平均値を突起の高さとして算出する工程と、複数の導電性粒子(例えば5~100個の任意の個数)について算出された突起の高さの平均値を算出する工程と、を備える方法によって、決定することができる。 Specifically, for example, a step of detecting a particle edge that is a boundary between a projection image of each conductive particle and another region in a two-dimensional image obtained by imaging a plurality of conductive particles, and two steps based on the particle edge. A step of calculating the center coordinates of the conductive particles on the three-dimensional image, and dividing the particle edge into a plurality of particle edge portions (for example, twelve) for each predetermined angle around the center coordinate, and for each of the plurality of particle edge portions And calculating the difference between the maximum value and the minimum value of the distance between the center coordinate and the particle edge, calculating the average value of the differences as the height of the protrusion, and a plurality of conductive particles (for example, 5 to 100 particles). A step of calculating an average value of the heights of the protrusions calculated for the arbitrary number of projections).
 上記の二次元画像の分析において、粒子エッジは、導電性粒子の二次元投影像の、突起部に由来する凹凸を含む外周に実質的に相当する。二次元画像から得られる輝度の度数分布は、一般に、粒子エッジの部分を反映した極小値を示す。この極小値に対応する輝度を第一閾値として二次元画像を二値化して、二値化画像を生成する。得られた二値化画像において形成されたエッジが、粒子エッジとして検出される。粒子エッジを基に、二次元画像上の導電性粒子の中心座標が算出される。粒子エッジにフィッティングする円を最小二乗法で求め、その円の中心が導電性粒子の中心座標とされる。 In the above-described analysis of the two-dimensional image, the particle edge substantially corresponds to the outer periphery including the irregularities derived from the protrusions of the two-dimensional projection image of the conductive particles. A luminance frequency distribution obtained from a two-dimensional image generally shows a local minimum value reflecting a particle edge portion. The two-dimensional image is binarized using the luminance corresponding to the minimum value as the first threshold value to generate a binarized image. Edges formed in the obtained binarized image are detected as particle edges. Based on the particle edges, the center coordinates of the conductive particles on the two-dimensional image are calculated. A circle to be fitted to the particle edge is obtained by the method of least squares, and the center of the circle is set as the center coordinate of the conductive particle.
 導電性粒子3の表面の投影像の全体に対する突起部33の面積割合(突起部33の面積率)は、電気的接続の信頼性を更に向上させる観点から、好ましくは、8%以上、9%以上、又は20%以上であり、好ましくは、60%以下又は50%以下であり、好ましくは、8~60%、8~50%、9~60%、9~50%、20~60%、又は20~50%である。 From the viewpoint of further improving the reliability of electrical connection, the area ratio of the protrusions 33 (area ratio of the protrusions 33) to the entire projected image of the surface of the conductive particles 3 is preferably 8% or more and 9%. Or more, 20% or more, preferably 60% or less or 50% or less, preferably 8 to 60%, 8 to 50%, 9 to 60%, 9 to 50%, 20 to 60%, Or 20 to 50%.
 突起部の面積率も、特開2016-61722号公報に記載された方法に従って、導電性粒子の二次元画像を分析することによって決定することができる。突起部の面積率は、例えば、粒子エッジの内側の領域における輝度の度数分布から、突起部とそれ以外の部分との境界に対応する第二閾値を算出する工程と、得られた第二閾値によって粒子エッジの内側の領域を二値化して二値化画像を生成する工程と、得られた二値化画像において、粒子エッジの内側の面積に対する、突起部に対応する領域の面積の割合を、突起部の面積率として算出する工程とを備える方法によって、決定することができる。 The area ratio of the protrusions can also be determined by analyzing a two-dimensional image of conductive particles according to the method described in JP-A-2016-61722. The area ratio of the protrusions is obtained by, for example, calculating a second threshold corresponding to the boundary between the protrusion and the other part from the luminance frequency distribution in the region inside the particle edge, and the obtained second threshold And binarizing the area inside the particle edge to generate a binarized image, and in the obtained binarized image, the ratio of the area of the area corresponding to the protrusion to the area inside the particle edge And a step of calculating the area ratio of the protrusions.
 上述のような突起部を有する導電性粒子3は、例えば、プラスチック粒子31の表面上に金属メッキによって金属層32A,32Bを形成することによって、得ることができる。金属メッキの際、メッキ条件を変更して、金属層32A,32Bの厚さを変化させることで、突起部33を形成することができる。例えば、金属メッキの過程で、メッキ液の濃度を段階的に高めていくことで、突起部33を形成することができる。 The conductive particles 3 having protrusions as described above can be obtained, for example, by forming the metal layers 32A and 32B on the surface of the plastic particles 31 by metal plating. At the time of metal plating, the protruding portion 33 can be formed by changing the plating conditions and changing the thickness of the metal layers 32A and 32B. For example, the protrusion 33 can be formed by gradually increasing the concentration of the plating solution in the process of metal plating.
 あるいは、メッキ液のpHを調節すること、例えば、ニッケルメッキ液のpHを6とすることによっても、こぶ状の突起部を有する金属層を形成することができる(望月ら、表面技術、Vol.48,No.4、429~432頁、1997参照)。メッキ浴の安定性に寄与する錯化剤としてグリシンを用いた場合、平坦な表面を有する金属層が形成されるのに対して、錯化剤として酒石酸又はDL-リンゴ酸を用いた場合、こぶ状の突起部が形成される(例えば、荻原ら、非晶質メッキ、Vol.36、第35~37頁、1994;荻原ら、回路実装学会誌、Vol.10,No.3、148~152頁、1995参照)。これらの方法を採用することによって、所望の高さ及び面積率の突起部33を有する金属層32A,32Bを形成することができる。 Alternatively, by adjusting the pH of the plating solution, for example, by setting the pH of the nickel plating solution to 6, a metal layer having a knurled protrusion can be formed (Mochizuki et al., Surface Technology, Vol. 48, No. 4, pages 429 to 432, 1997). When glycine is used as a complexing agent that contributes to the stability of the plating bath, a metal layer having a flat surface is formed, whereas when tartaric acid or DL-malic acid is used as the complexing agent, a hump is formed. (For example, Sugawara et al., Amorphous Plating, Vol. 36, pp. 35-37, 1994; Sugawara et al., Journal of Circuit Packaging Society, Vol. 10, No. 3, 148-152. Page 1995). By adopting these methods, the metal layers 32A and 32B having the protrusions 33 having a desired height and area ratio can be formed.
 図2(b)に示した導電性粒子3Bを作製する場合は、例えば、上記の方法により突起部を有する第一の金属層32aを形成した後、置換メッキによって、Au又はPdの層を形成することで、第二の金属層32bを得ることができる。 When producing the conductive particles 3B shown in FIG. 2B, for example, after forming the first metal layer 32a having the protrusions by the above method, the Au or Pd layer is formed by displacement plating. Thus, the second metal layer 32b can be obtained.
 接着剤フィルム1に含まれる導電性粒子3の含有量は、接続する電極の精細度等に応じて決められる。導電性粒子3の含有量は、例えば、接着剤成分100体積部に対して、1体積部以上であってよく、50体積部以下であってもよく、絶縁性及び製造コストの観点から、好ましくは、30体積部以下である。 The content of the conductive particles 3 contained in the adhesive film 1 is determined according to the definition of the electrode to be connected. The content of the conductive particles 3 may be, for example, 1 part by volume or more and 50 parts by volume or less with respect to 100 parts by volume of the adhesive component, which is preferable from the viewpoint of insulation and manufacturing cost. Is 30 parts by volume or less.
 接着剤組成物は、多層のフィルム状(多層接着剤フィルム)であってもよい。多層接着剤フィルムは、例えば、導電性粒子を含む層と、導電性粒子を含まない層とから構成される二層構成であってよく、導電性粒子を含む層と、その両側に設けられた導電性粒子を含まない層とから構成される三層構成であってもよい。多層接着剤フィルムは、導電性粒子を含む層を複数備えていてもよい。多層接着剤フィルムは、回路部材との接着性を考慮して、接続される回路部材に対して高い接着性を示す接着層を備えていてもよい。これらの多層接着剤フィルムを用いた場合、接続電極上に効率良く導電性粒子を捕獲できるため、狭ピッチの回路部材の接続に有利である。 The adhesive composition may be a multilayer film (multilayer adhesive film). The multilayer adhesive film may have a two-layer structure including, for example, a layer containing conductive particles and a layer not containing conductive particles, and is provided on both sides of the layer containing conductive particles. A three-layer configuration including a layer not including conductive particles may be used. The multilayer adhesive film may include a plurality of layers including conductive particles. The multilayer adhesive film may include an adhesive layer exhibiting high adhesiveness to the circuit member to be connected in consideration of adhesiveness with the circuit member. When these multilayer adhesive films are used, the conductive particles can be efficiently captured on the connection electrodes, which is advantageous for connecting narrow pitch circuit members.
 以上説明した接着剤組成物(接着剤フィルム)は、回路部材同士を接続するための材料(回路接続材料)として好適に用いられ、回路部材同士を接続するための異方導電性接着剤組成物(異方導電性接着剤フィルム)として特に好適に用いられる。 The adhesive composition (adhesive film) described above is preferably used as a material (circuit connection material) for connecting circuit members to each other, and an anisotropic conductive adhesive composition for connecting circuit members to each other. It is particularly preferably used as (anisotropic conductive adhesive film).
 次に、接着剤フィルム1を用いた、接続体の製造方法を説明する。図3は、一実施形態に係る接続体の製造方法を模式的に示す断面図である。まず、図3(a)に示すように、第一の回路部材4、第二の回路部材5及び接着剤フィルム1(回路接続材料)を用意する。第一の回路部材4は、第一の基板6、及び第一の基板6の一面6a上に設けられた第一の接続端子7を有する。第二の回路部材5は、第二の基板8、及び第二の基板8の一面8a上に設けられた第二の接続端子9を有する。 Next, a method for manufacturing a connected body using the adhesive film 1 will be described. Drawing 3 is a sectional view showing typically the manufacturing method of the connecting object concerning one embodiment. First, as shown to Fig.3 (a), the 1st circuit member 4, the 2nd circuit member 5, and the adhesive film 1 (circuit connection material) are prepared. The first circuit member 4 includes a first substrate 6 and a first connection terminal 7 provided on one surface 6 a of the first substrate 6. The second circuit member 5 includes a second substrate 8 and a second connection terminal 9 provided on one surface 8 a of the second substrate 8.
 次に、第一の回路部材4と第二の回路部材5とを、第一の接続端子7と第二の接続端子9とが対向するように配置し、第一の回路部材4と第二の回路部材5との間に接着剤フィルム1を配置して積層体を作製する。 Next, the first circuit member 4 and the second circuit member 5 are arranged so that the first connection terminal 7 and the second connection terminal 9 face each other, and the first circuit member 4 and the second circuit member 5 are arranged. The adhesive film 1 is disposed between the circuit member 5 and a laminate.
 そして、図3(a)において矢印で示した方向に積層体全体を加圧しながら、接着剤フィルム1を硬化させる。加圧時の圧力は、例えば総接続面積あたり1~10MPaであってよい。接着剤フィルム1を硬化させる方法は、加熱による方法であってよく、加熱に加えて光照射を併用する方法であってもよい。加熱は、例えば100~170℃で行われてよい。加圧及び加熱(必要に応じて光照射)は、例えば1~160秒間行われてよい。これにより、第一の回路部材4と第二の回路部材5とが、接着剤フィルム1を構成する接着剤組成物の硬化物を介して圧着される。 Then, the adhesive film 1 is cured while pressurizing the entire laminate in the direction indicated by the arrow in FIG. The pressure at the time of pressurization may be, for example, 1 to 10 MPa per total connection area. The method of curing the adhesive film 1 may be a method by heating, or a method of using light irradiation in combination with heating. Heating may be performed at 100 to 170 ° C., for example. Pressurization and heating (light irradiation as necessary) may be performed, for example, for 1 to 160 seconds. Thereby, the 1st circuit member 4 and the 2nd circuit member 5 are crimped | bonded via the hardened | cured material of the adhesive composition which comprises the adhesive film 1. FIG.
 本実施形態では、第一の回路部材4と第二の回路部材5との間に接着剤フィルム1を配置したが、他の実施形態として、接着剤フィルムに代えて、ペースト状の接着剤組成物を、第一の回路部材4又は第二の回路部材5上に、又はその両方に塗布してもよい。 In the present embodiment, the adhesive film 1 is disposed between the first circuit member 4 and the second circuit member 5, but as another embodiment, instead of the adhesive film, a paste adhesive composition The object may be applied on the first circuit member 4 or the second circuit member 5, or both.
 このようにして得られる、一実施形態に係る接続体10は、図3(b)に示すように、第一の基板6及び第一の基板6上に設けられた第一の接続端子7を有する第一の回路部材4と、第二の基板8及び第二の基板8上に設けられた第二の接続端子9を有する第二の回路部材5と、第一の回路部材4と第二の回路部材5との間に設けられ、第一の回路部材4(第一の接続端子7)と第二の回路部材5(第二の接続端子9)とを互いに電気的に接続する接続部11と、を備える。接続部11は、接着剤組成物の硬化物により構成されており、接着剤成分2の硬化物12と、該硬化物12中に分散された導電性粒子3とからなっている。接続体10では、導電性粒子3が第一の接続端子7と第二の接続端子9との間に介在することにより、第一の接続端子7と第二の接続端子9とが互いに電気的に接続されている。 As shown in FIG. 3B, the connection body 10 according to the embodiment obtained in this way includes the first substrate 6 and the first connection terminal 7 provided on the first substrate 6. The second circuit member 5 having the first circuit member 4, the second substrate 8 and the second connection terminal 9 provided on the second substrate 8, the first circuit member 4 and the second circuit member 5. The connection part which is provided between the circuit member 5 and electrically connects the first circuit member 4 (first connection terminal 7) and the second circuit member 5 (second connection terminal 9) to each other. 11. The connection part 11 is comprised by the hardened | cured material of the adhesive composition, and consists of the hardened | cured material 12 of the adhesive component 2, and the electroconductive particle 3 disperse | distributed in this hardened | cured material 12. FIG. In the connection body 10, since the conductive particles 3 are interposed between the first connection terminal 7 and the second connection terminal 9, the first connection terminal 7 and the second connection terminal 9 are electrically connected to each other. It is connected to the.
 第一の基板6は、例えば、ICチップ又はフレキシブル基板であってよい。第二の基板8は、例えば、フレキシブル基板、ガラス基板、又は、ガラス基板及び該ガラス基板上に設けられた絶縁膜を有する複合基板であってよい。 The first substrate 6 may be, for example, an IC chip or a flexible substrate. The second substrate 8 may be, for example, a flexible substrate, a glass substrate, or a composite substrate having a glass substrate and an insulating film provided on the glass substrate.
 第一の基板6及び第二の基板8の組み合わせとして、より具体的には、第一の基板6がICチップ又はフレキシブル基板で、第二の基板8がフレキシブル基板であってもよい。あるいは、第一の基板6がICチップ又はフレキシブル基板で、第二の基板8がガラス基板又は複合基板であってもよい。言い換えると、第二の基板8がフレキシブル基板であるとき、第一の基板6はICチップであってもよいし、フレキシブル基板であってもよい。第一の基板6がICチップで、第二の基板8がフレキシブル基板であるとき、COP(Chip on Plastic substrate)接続のために上述の接着剤フィルム1が用いられる。第一の基板6及び第二の基板8がフレキシブル基板であるとき、FOP(Film on Plastic substrate)接続のために上述の接着剤フィルム1が用いられる。 More specifically, as a combination of the first substrate 6 and the second substrate 8, the first substrate 6 may be an IC chip or a flexible substrate, and the second substrate 8 may be a flexible substrate. Alternatively, the first substrate 6 may be an IC chip or a flexible substrate, and the second substrate 8 may be a glass substrate or a composite substrate. In other words, when the second substrate 8 is a flexible substrate, the first substrate 6 may be an IC chip or a flexible substrate. When the first substrate 6 is an IC chip and the second substrate 8 is a flexible substrate, the above-described adhesive film 1 is used for COP (Chip-on-Plastic-substrate) connection. When the first substrate 6 and the second substrate 8 are flexible substrates, the above-mentioned adhesive film 1 is used for FOP (Film on Plastic substrate) connection.
 フレキシブル基板は、例えば、ポリイミド(PI)、ポリエチレンテレフタレート(PET)、ポリカーボネート(PC)及びポリエチレンナフタレート(PEN)からなる群より選ばれる少なくとも1種の熱可塑性樹脂を含む。 The flexible substrate includes, for example, at least one thermoplastic resin selected from the group consisting of polyimide (PI), polyethylene terephthalate (PET), polycarbonate (PC), and polyethylene naphthalate (PEN).
 フレキシブル基板は、有機基材の表面上に形成された、光学及び機械的特性を向上するためのハードコート等の改質処理膜及び/又は保護膜等を更に有していてもよい。フレキシブル基板の取り扱い、及び搬送を容易にするため、ガラス基材及びSUS等から選ばれる補強材が有機基材に貼り合わせられていてもよい。 The flexible substrate may further have a modified film such as a hard coat and / or a protective film formed on the surface of the organic base material for improving optical and mechanical properties. In order to facilitate handling and conveyance of the flexible substrate, a reinforcing material selected from a glass substrate and SUS or the like may be bonded to the organic substrate.
 フレキシブル基板の厚さは、基板単体でフィルムとしての強度、及び曲げやすさを確保する点から、好ましくは10μm以上であり、200μm以下又は125μm以下である。 The thickness of the flexible substrate is preferably 10 μm or more, 200 μm or less, or 125 μm or less from the viewpoint of securing the strength as a film and the ease of bending of the substrate alone.
 従来の回路接続材料を用いると、回路部材同士の圧着のための加熱及び加圧により、フレキシブル基板上の電極が破断したり、クラックを生じたりし易いことがあった。また、十分な電気的接続を形成しにくい電極の接続に関しては、電極の破損を抑制するために、より低温又はより低応力の条件で回路部材を圧着する必要がある。本実施形態の回路接続材料(接着剤フィルム)は、これらの点においても従来の材料と比較して有利な効果を有し得る。 When conventional circuit connection materials are used, the electrodes on the flexible substrate may be easily broken or cracked by heating and pressurization for crimping the circuit members. In addition, regarding the connection of electrodes for which it is difficult to form a sufficient electrical connection, it is necessary to crimp the circuit member under a condition of lower temperature or lower stress in order to suppress damage to the electrodes. The circuit connection material (adhesive film) of the present embodiment can have an advantageous effect as compared with conventional materials in these respects.
 ガラス基板は、ソーダガラス、石英硝子等で形成されていてよく、外部からの応力による破損防止の観点からは、これらに化学強化処理が施された基板であってもよい。複合基板は、ガラス基板と、ガラス基板の表面に設けられた、ポリイミド又は装飾のための加色の有機材料若しくは無機材料から構成される絶縁膜を有してよく、複合基板において、電極はその絶縁膜の上に形成されてよい。 The glass substrate may be formed of soda glass, quartz glass, or the like, and may be a substrate subjected to chemical strengthening treatment from the viewpoint of preventing damage due to external stress. The composite substrate may include a glass substrate and an insulating film formed on the surface of the glass substrate and made of polyimide or a colored organic or inorganic material for decoration. It may be formed on an insulating film.
 第二の基板8がフレキシブル基板である場合、第一の基板6は、半導体チップ、トランジスタ、ダイオ-ド、サイリスタ等の能動素子、コンデンサ、抵抗体、コイル等の受動素子等の電子部品、プリント基板等であってもよい。第一の基板6がICチップである場合、めっきで形成されるバンプ又は金ワイヤの先端をトーチ等により溶融させ、金ボールを形成し、このボールを電極パッド上に圧着した後、ワイヤを切断して得られるワイヤバンプなどの突起電極(第一の接続端子7)を設け、これを第一の回路部材4として用いることができる。 When the second substrate 8 is a flexible substrate, the first substrate 6 is an electronic component such as an active element such as a semiconductor chip, a transistor, a diode, or a thyristor, a passive element such as a capacitor, a resistor, or a coil, or a printed circuit. It may be a substrate or the like. When the first substrate 6 is an IC chip, the tip of a bump or gold wire formed by plating is melted with a torch or the like to form a gold ball, and the wire is pressed onto the electrode pad, and then the wire is cut. Protruding electrodes (first connection terminals 7) such as wire bumps obtained in this way can be provided and used as the first circuit member 4.
 第一の接続端子7及び第二の接続端子9を形成する電極材料としては、Agペースト、Ni、Al、Au、Cu、Ti、Mo等の金属、ITO、IZO等の金属酸化物、銀ナノワイヤ、カーボンナノチューブ等の導電体などが挙げられる。第一の接続端子7及び第二の接続端子9は、互いに同一の素材で形成されていても異なる素材で形成されていてもよいが、好ましくは同一の素材である。第一の接続端子7上及び第二の接続端子9上には、断線防止の観点から、酸化物、窒化物、合金、有機物等で形成された表面層を更に設けてもよい。第一の回路部材4及び第二の回路部材5には、第一の接続端子7又は第二の接続端子9がそれぞれ1つずつ設けられていてもよいが、好ましくは所定の間隔を形成して多数設けられている。 Examples of electrode materials for forming the first connection terminal 7 and the second connection terminal 9 include Ag paste, metals such as Ni, Al, Au, Cu, Ti, and Mo, metal oxides such as ITO and IZO, and silver nanowires. And conductors such as carbon nanotubes. The first connection terminal 7 and the second connection terminal 9 may be formed of the same material or different materials, but are preferably the same material. On the first connection terminal 7 and the second connection terminal 9, a surface layer formed of an oxide, a nitride, an alloy, an organic substance, or the like may be further provided from the viewpoint of preventing disconnection. Each of the first circuit member 4 and the second circuit member 5 may be provided with one first connection terminal 7 or one second connection terminal 9, but preferably a predetermined interval is formed. Many are provided.
 上記の回路接続材料(接着剤フィルム)を用いると、第一の回路部材4がFPC回路基板であり、第二の回路部材5における第二の接続端子9が、十分な電気的接続を確保しにくい傾向がある金属酸化物で形成されている場合であっても、より高い信頼性の電気的接続を得ることができる。 When the circuit connection material (adhesive film) is used, the first circuit member 4 is an FPC circuit board, and the second connection terminal 9 in the second circuit member 5 ensures sufficient electrical connection. Even when it is formed of a metal oxide that tends to be difficult, a more reliable electrical connection can be obtained.
 図4は、一実施形態の接続体10の要部を模式的に示す断面図である。図4に示すとおり、導電性粒子3の突起部33の高さが所定の範囲にあることにより、回路部材同士を接続する際に、第一の接続端子7と第二の接続端子9との間に介在する導電性粒子3が、突起部33によって第一の接続端子7と第二の接続端子9(及び第二の基板8)とに充分な圧力を加えることができるため、より高い信頼性の電気的接続を得ることができ、例えば、高温高湿下での接続抵抗の上昇が起こりにくいと考えられる。 FIG. 4 is a cross-sectional view schematically showing a main part of the connection body 10 according to an embodiment. As shown in FIG. 4, when the circuit members are connected to each other by connecting the circuit members to each other, the height of the protrusion 33 of the conductive particle 3 is within a predetermined range. Since the conductive particles 3 interposed therebetween can apply sufficient pressure to the first connection terminal 7 and the second connection terminal 9 (and the second substrate 8) by the protrusions 33, higher reliability can be achieved. For example, it is considered that the increase in connection resistance under high temperature and high humidity is unlikely to occur.
 一方、図5(従来の接続体の要部を模式的に示す断面図)に示すように、従来の接続体20では、導電性粒子23が比較的低い突起部23aを有しているため、第一の接続端子7と第二の接続端子9(及び第二の基板8)とに充分な圧力を加えることができない。したがって、従来の接続体20は、電気的接続の信頼性の点で劣る。 On the other hand, as shown in FIG. 5 (a cross-sectional view schematically showing a main part of a conventional connection body), in the conventional connection body 20, the conductive particles 23 have a relatively low protrusion 23a. Sufficient pressure cannot be applied to the first connection terminal 7 and the second connection terminal 9 (and the second substrate 8). Therefore, the conventional connection body 20 is inferior in the reliability of electrical connection.
 以下、実施例を挙げて本発明について更に具体的に説明する。ただし、本発明はこれら実施例に限定されるものではない。 Hereinafter, the present invention will be described more specifically with reference to examples. However, the present invention is not limited to these examples.
(導電性粒子の作製)
(1)プラスチック粒子
 テトラメチロールメタンテトラアクリレート、ジビニルベンゼン及びスチレンをモノマーとして用い、これらを、重合開始剤(ベンゾイルパーオキサイド)を用いた懸濁重合によって重合することで、プラスチック粒子を得た。
(Preparation of conductive particles)
(1) Plastic particles Using tetramethylolmethane tetraacrylate, divinylbenzene, and styrene as monomers and polymerizing them by suspension polymerization using a polymerization initiator (benzoyl peroxide), plastic particles were obtained.
(2-1)導電性粒子1-1~1-3
 得られたプラスチック粒子を無電解Niメッキ処理することで、突起部を有し、Niで形成された金属層(Ni層、厚さ0.2μm)を備える導電性粒子1~3を得た。Niメッキ処理の際、メッキ液の仕込み量、処理温度及び処理時間を適宜調整してNi層の厚さを変更することにより、高さ及び面積率の異なる突起部を形成した。
(2-1) Conductive particles 1-1 to 1-3
The obtained plastic particles were subjected to electroless Ni plating to obtain conductive particles 1 to 3 each having a protrusion and a metal layer (Ni layer, thickness 0.2 μm) formed of Ni. During the Ni plating process, the protrusions having different heights and area ratios were formed by changing the thickness of the Ni layer by appropriately adjusting the amount of plating solution charged, the processing temperature, and the processing time.
(2-2)導電性粒子1-4~1-6
 導電性粒子1~3それぞれのNi層上に、置換メッキによって突起部を有するAuで形成された層(Au層)を形成させて、導電性粒子4~6をそれぞれ得た。
(2-2) Conductive particles 1-4 to 1-6
On the Ni layer of each of the conductive particles 1 to 3, conductive layers 4 to 6 were obtained by forming Au layers (Au layers) having protrusions by displacement plating.
(2-3)導電性粒子1-7
 得られたプラスチック粒子上に平坦な表面を有するNi層を形成し、Ni層上に平坦な表面を有するAu層を更に形成して、導電性粒子を作製した。
(2-3) Conductive particles 1-7
A Ni layer having a flat surface was formed on the obtained plastic particles, and an Au layer having a flat surface was further formed on the Ni layer to produce conductive particles.
(2-4)導電性粒子2-1~2-4
 得られたプラスチック粒子を無電解Niメッキ処理することで、突起部を有するNi層(厚さ0.2μm)を有する導電性粒子を得た。Niメッキ処理の際、メッキ液の仕込み量、処理温度及び処理時間を適宜調整してメッキ厚を変更することにより、高さ及び面積率の異なる突起部を形成した。これらの導電性粒子のNi層上に、置換メッキによって突起部を有するPdで形成された層(Pd層)を形成して、導電性粒子2-1~2-4をそれぞれ得た。
(2-4) Conductive particles 2-1 to 2-4
The obtained plastic particles were subjected to electroless Ni plating to obtain conductive particles having a Ni layer (thickness: 0.2 μm) having protrusions. During the Ni plating process, protrusions having different heights and area ratios were formed by changing the plating thickness by appropriately adjusting the charging amount of the plating solution, the processing temperature, and the processing time. On the Ni layer of these conductive particles, a layer made of Pd having a protrusion (Pd layer) was formed by displacement plating to obtain conductive particles 2-1 to 2-4, respectively.
(3)突起部の高さ及び面積率
 各導電性粒子を含む二次元画像を、走査型電子顕微鏡によって取得した。得られた二次元座画像を特開2016-61722号公報に記載の方法で分析することによって、100個の導電性粒子の突起部の高さ及び面積率を算出し、それらの平均値を求めた。
(3) Height and area ratio of protrusion part The two-dimensional image containing each electroconductive particle was acquired with the scanning electron microscope. By analyzing the obtained two-dimensional locus image by the method described in JP-A-2016-61722, the height and area ratio of the protrusions of 100 conductive particles are calculated, and the average value thereof is obtained. It was.
(接着剤フィルム(回路接続材料)の作製)
 ラジカル重合性物質であるウレタンアクリレート(製品名:UA-5500T、新中村化学工業株式会社製)20質量部、ビス(アクリロキシエチル)イソシアヌレート(製品名:M-215、東亞合成株式会社製)15質量部、ジメチロールトリシクロデカンジアクリレート(製品名:DCP-A、共栄社化学共栄社化社製)5質量部及び2-メタクリロイロキシエチルアッシドフォスヘート(製品名:P-2M、共栄社化学共栄社化社製)1質量部と、ベンゾイルパーオキサイド(製品名:ナイパーBMT-K、日油株式会社製)8質量部と、ポリエステルウレタン樹脂(製品名:UR4800、東洋紡績株式会社製)を含む濃度40質量%の溶液60質量部と、を混合し、攪拌して、バインダ樹脂の溶液を得た。ポリエステルウレタン樹脂の溶液は、ポリエステルウレタン樹脂をトルエン/メチルエチルケトン=50/50の混合溶剤に溶解して調製した。
(Production of adhesive film (circuit connection material))
20 parts by mass of urethane acrylate (product name: UA-5500T, manufactured by Shin-Nakamura Chemical Co., Ltd.), a bis (acryloxyethyl) isocyanurate (product name: M-215, manufactured by Toagosei Co., Ltd.) 15 parts by mass, 5 parts by mass of dimethylol tricyclodecane diacrylate (product name: DCP-A, manufactured by Kyoeisha Chemical Co., Ltd.) and 2-methacryloyloxyethyl acid phosphate (product name: P-2M, Kyoeisha Chemical Co., Ltd.) 1 part by mass of Kyoeisha Chemical Co., Ltd.), 8 parts by mass of benzoyl peroxide (product name: Nyper BMT-K, manufactured by NOF Corporation) and polyester urethane resin (product name: UR4800, manufactured by Toyobo Co., Ltd.) 60 parts by mass of a 40% by weight solution was mixed and stirred to obtain a binder resin solution. The polyester urethane resin solution was prepared by dissolving the polyester urethane resin in a mixed solvent of toluene / methyl ethyl ketone = 50/50.
 調製したバインダ樹脂の溶液に、各導電性粒子を、バインダ樹脂100体積部に対して10体積部の割合で分散させた。そこに、平均粒径2μmのシリコーン微粒子(製品名:KMP-605、信越化学工業株式会社製)を、バインダ樹脂100質量部に対して20質量部の割合で分散させて、バインダ樹脂、導電性粒子及びシリコーン微粒子を含む塗工液を得た。この塗工液を、片面を表面処理したポリエチレンテレフタラート(PET)フィルム(厚さ50μm)に、塗工装置を用いて塗布した。塗膜を70℃の熱風乾燥により乾燥して、回路接続材料としての異方導電性接着剤フィルム(厚さ18μm)を作製した。 Each conductive particle was dispersed in the prepared binder resin solution at a ratio of 10 parts by volume with respect to 100 parts by volume of the binder resin. Therein, silicone fine particles (product name: KMP-605, manufactured by Shin-Etsu Chemical Co., Ltd.) having an average particle diameter of 2 μm are dispersed at a ratio of 20 parts by mass with respect to 100 parts by mass of the binder resin, and the binder resin, conductive property is dispersed. A coating solution containing particles and silicone fine particles was obtained. This coating liquid was applied to a polyethylene terephthalate (PET) film (thickness 50 μm) having a surface treated on one side using a coating apparatus. The coating film was dried by hot air drying at 70 ° C. to prepare an anisotropic conductive adhesive film (thickness: 18 μm) as a circuit connecting material.
(回路部材の準備)
・ガラス部材
 ガラス基板と、該ガラス基板上に順に積層されたCu膜(厚さ30nm)及びアモルファスITOの接続端子(厚さ40nm)とを有するガラス部材を準備した。
・フレキシブル部材
 ポリエチレンテレフタレート(PET)フィルム(25℃での弾性率:4600MPa)と、PETフィルム上に形成されたITOの接続端子(厚さ20nm)とを有するフレキシブル部材を準備した。
・フレキシブル回路基板(FPC)
 ポリエチレンテフタレート(PET)を基材とした樹脂フィルム基材と、該樹脂フィルム基材上に設けられた配線とを有するFPCを準備した。このFPCの配線は、ピッチ0.3mm(スペース0.15mm、電極幅0.15mm、高さ18μm)のCu層と、Cu層上に順に形成された厚さ3μmのNiメッキ層及び厚さ0.03μmのAuメッキ層とからなる接続端子を有する。
(Preparation of circuit members)
-Glass member The glass member which has a glass substrate, Cu film | membrane (thickness 30nm) laminated | stacked in order on this glass substrate, and the connection terminal (thickness 40nm) of amorphous ITO was prepared.
-Flexible member A flexible member having a polyethylene terephthalate (PET) film (elastic modulus at 25 ° C .: 4600 MPa) and an ITO connection terminal (thickness 20 nm) formed on the PET film was prepared.
・ Flexible circuit board (FPC)
An FPC having a resin film substrate made of polyethylene terephthalate (PET) as a substrate and wiring provided on the resin film substrate was prepared. This FPC wiring is composed of a Cu layer having a pitch of 0.3 mm (space 0.15 mm, electrode width 0.15 mm, height 18 μm), a Ni plating layer 3 μm thick formed in order on the Cu layer, and a thickness of 0 It has a connection terminal composed of a 0.03 μm Au plating layer.
 フレキシブル部材とFPCとの間に、異方導電性接着剤フィルムを挟んだ。この状態で、異方導電性接着剤フィルムの到達温度が160℃となるように加熱しながら、総接続面積当たり2MPaの圧力で10秒間全体を加圧して、フレキシブル部材とFPCとが接続されたフレキシブル/FPC接続体を得た。
 同様に、ガラス部材とFPCとを、これらの間に異方導電性接着フィルムを挟むことで接続して、ガラス/FPCの接続体を得た。
An anisotropic conductive adhesive film was sandwiched between the flexible member and the FPC. In this state, the flexible member and the FPC were connected by pressurizing the whole for 10 seconds at a pressure of 2 MPa per total connection area while heating the anisotropic conductive adhesive film to reach 160 ° C. A flexible / FPC connector was obtained.
Similarly, the glass member and FPC were connected by sandwiching an anisotropic conductive adhesive film between them to obtain a glass / FPC connector.
 得られた各接続体を、85℃、85%RH、72時間の信頼性試験に供した。試験前後の接続体について、対向する回路部材間の接続抵抗を測定した。 Each obtained connecting body was subjected to a reliability test of 85 ° C., 85% RH, 72 hours. About the connection body before and behind a test, the connection resistance between the circuit members which oppose was measured.
 得られた各導電性粒子の最表面層、突起高さ、突起面積率等の特性、及び評価結果を表1,2に示す。 Tables 1 and 2 show characteristics such as the outermost surface layer, protrusion height, protrusion area ratio, and evaluation results of the obtained conductive particles.
Figure JPOXMLDOC01-appb-T000001
Figure JPOXMLDOC01-appb-T000001
Figure JPOXMLDOC01-appb-T000002
Figure JPOXMLDOC01-appb-T000002
 1…接着剤フィルム、2…接着剤成分、3…導電性粒子、4…第一の回路部材、5…第二の回路部材、6…第一の基板、7…第一の接続端子、8…第二の基板、9…第二の接続端子、10…接続体、11…接続部、31…プラスチック粒子、32A,32B…金属層、33,33A,33B…突起部。 DESCRIPTION OF SYMBOLS 1 ... Adhesive film, 2 ... Adhesive component, 3 ... Conductive particle, 4 ... 1st circuit member, 5 ... 2nd circuit member, 6 ... 1st board | substrate, 7 ... 1st connection terminal, 8 2nd substrate, 9 ... 2nd connection terminal, 10 ... connection body, 11 ... connection part, 31 ... plastic particle, 32A, 32B ... metal layer, 33, 33A, 33B ... projection part.

Claims (12)

  1.  接着剤成分と、導電性粒子とを含有し、
     前記導電性粒子が、プラスチック粒子及び該プラスチック粒子を被覆する金属層を有し、
     前記導電性粒子の表面には複数の突起部が形成されており、前記複数の突起部の高さが平均で85~1200nmである、接着剤組成物。
    Containing an adhesive component and conductive particles;
    The conductive particles have plastic particles and a metal layer covering the plastic particles;
    An adhesive composition, wherein a plurality of protrusions are formed on a surface of the conductive particles, and the average height of the plurality of protrusions is 85 to 1200 nm.
  2.  前記導電性粒子の投影像において、前記導電性粒子表面の面積に対する前記突起部の面積の割合が、8~60%である、請求項1に記載の接着剤組成物。 2. The adhesive composition according to claim 1, wherein, in the projected image of the conductive particles, the ratio of the area of the protrusions to the area of the surface of the conductive particles is 8 to 60%.
  3.  前記導電性粒子が、前記金属層として、前記導電性粒子の最表面にPdで形成されている層を有する、請求項1又は2に記載の接着剤組成物。 The adhesive composition according to claim 1 or 2, wherein the conductive particles have a layer formed of Pd on the outermost surface of the conductive particles as the metal layer.
  4.  前記Pdで形成されている層の厚さが2~200nmである、請求項3に記載の接着剤組成物。 The adhesive composition according to claim 3, wherein the layer formed of Pd has a thickness of 2 to 200 nm.
  5.  第一の基板及び該第一の基板上に設けられた第一の接続端子を有する第一の回路部材と、第二の基板及び該第二の基板上に設けられた第二の接続端子を有する第二の回路部材とを、互いに電気的に接続するために用いられ、
     前記第一の基板がICチップ又はフレキシブル基板であり、
     前記第二の基板が、ポリイミド、ポリエチレンテレフタレート、ポリカーボネート及びポリエチレンナフタレートからなる群より選ばれる少なくとも1種の熱可塑性樹脂を含むフレキシブル基板である、請求項1~4のいずれか一項に記載の接着剤組成物。
    A first circuit member having a first board and a first connection terminal provided on the first board; a second board and a second connection terminal provided on the second board; Used to electrically connect the second circuit members to each other;
    The first substrate is an IC chip or a flexible substrate;
    The second substrate is a flexible substrate containing at least one thermoplastic resin selected from the group consisting of polyimide, polyethylene terephthalate, polycarbonate, and polyethylene naphthalate. Adhesive composition.
  6.  第一の基板及び該第一の基板上に設けられた第一の接続端子を有する第一の回路部材と、第二の基板及び該第二の基板上に設けられた第二の接続端子を有する第二の回路部材とを、互いに電気的に接続するために用いられ、
     前記第一の基板がICチップ又はフレキシブル基板であり、
     前記第二の基板が、ガラス基板、又は、ガラス基板及び該ガラス基板上に設けられた絶縁膜を有する複合基板である、請求項1~4のいずれか一項に記載の接着剤組成物。
    A first circuit member having a first board and a first connection terminal provided on the first board; a second board and a second connection terminal provided on the second board; Used to electrically connect the second circuit members to each other;
    The first substrate is an IC chip or a flexible substrate;
    The adhesive composition according to any one of claims 1 to 4, wherein the second substrate is a glass substrate or a composite substrate having a glass substrate and an insulating film provided on the glass substrate.
  7.  第一の基板及び該第一の基板上に設けられた第一の接続端子を有する第一の回路部材と、前記第一の回路部材と対向して配置され、第二の基板及び該第二の基板上に設けられた第二の接続端子を有する第二の回路部材との間に回路接続材料を配置して積層体を作製し、前記積層体を加熱及び加圧して、前記第一の回路部材と前記第二の回路部材とを互いに電気的に接続する工程を備え、
     前記回路接続材料が、接着剤成分と、導電性粒子とを含有し、
     前記導電性粒子が、プラスチック粒子及び該プラスチック粒子を被覆する金属層を有し、
     前記導電性粒子の表面には複数の突起部が形成されており、前記複数の突起部の高さが平均で85~1200nmである、接続体の製造方法。
    A first circuit member having a first substrate and a first connection terminal provided on the first substrate; and being disposed to face the first circuit member; A circuit connecting material is disposed between the second circuit member and the second circuit member provided on the substrate to produce a laminate, and the laminate is heated and pressurized to obtain the first Electrically connecting the circuit member and the second circuit member to each other;
    The circuit connection material contains an adhesive component and conductive particles,
    The conductive particles have plastic particles and a metal layer covering the plastic particles;
    A method for manufacturing a connection body, wherein a plurality of protrusions are formed on a surface of the conductive particles, and the average height of the plurality of protrusions is 85 to 1200 nm.
  8.  前記導電性粒子の投影像において、前記導電性粒子表面の面積に対する前記突起部の面積の割合が、8~60%である、請求項7に記載の接続体の製造方法。 The method for manufacturing a connection body according to claim 7, wherein, in the projected image of the conductive particles, a ratio of an area of the protruding portion to an area of the surface of the conductive particles is 8 to 60%.
  9.  前記導電性粒子が、前記金属層として、前記導電性粒子の最表面にPdで形成されている層を有する、請求項7又は8に記載の接続体の製造方法。 The method for producing a connection body according to claim 7 or 8, wherein the conductive particles have a layer formed of Pd on the outermost surface of the conductive particles as the metal layer.
  10.  前記Pdで形成されている層の厚さが2~200nmである、請求項9に記載の接続体の製造方法。 The method for manufacturing a connection body according to claim 9, wherein the layer formed of Pd has a thickness of 2 to 200 nm.
  11.  前記第一の基板がICチップ又はフレキシブル基板であり、
     前記第二の基板が、ポリイミド、ポリエチレンテレフタレート、ポリカーボネート及びポリエチレンナフタレートからなる群より選ばれる少なくとも1種の熱可塑性樹脂を含むフレキシブル基板である、請求項7~10のいずれか一項に記載の接続体の製造方法。
    The first substrate is an IC chip or a flexible substrate;
    The second substrate is a flexible substrate containing at least one thermoplastic resin selected from the group consisting of polyimide, polyethylene terephthalate, polycarbonate, and polyethylene naphthalate. A method for manufacturing a connector.
  12.  前記第一の基板がICチップ又はフレキシブル基板であり、
     前記第二の基板が、ガラス基板、又は、ガラス基板及び該ガラス基板上に設けられた絶縁膜を有する複合基板である、請求項7~10のいずれか一項に記載の接続体の製造方法。
    The first substrate is an IC chip or a flexible substrate;
    The method for producing a connection body according to any one of claims 7 to 10, wherein the second substrate is a glass substrate or a composite substrate having a glass substrate and an insulating film provided on the glass substrate. .
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