WO2018190162A1 - Dispositif de mesure de particule et procédé de mesure de particule - Google Patents

Dispositif de mesure de particule et procédé de mesure de particule Download PDF

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WO2018190162A1
WO2018190162A1 PCT/JP2018/013933 JP2018013933W WO2018190162A1 WO 2018190162 A1 WO2018190162 A1 WO 2018190162A1 JP 2018013933 W JP2018013933 W JP 2018013933W WO 2018190162 A1 WO2018190162 A1 WO 2018190162A1
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Prior art keywords
particle
particles
particle size
flow path
specified
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PCT/JP2018/013933
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English (en)
Japanese (ja)
Inventor
郁 近藤
拓哉 田渕
和奈 坂東
加藤　晴久
有祐 松浦
Original Assignee
リオン株式会社
国立研究開発法人産業技術総合研究所
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Priority claimed from JP2018043634A external-priority patent/JP6549747B2/ja
Application filed by リオン株式会社, 国立研究開発法人産業技術総合研究所 filed Critical リオン株式会社
Priority to EP18783731.5A priority Critical patent/EP3611492B1/fr
Priority to CN201880025094.4A priority patent/CN110573855B/zh
Priority to US16/604,597 priority patent/US10837890B2/en
Priority to KR1020197029940A priority patent/KR102482542B1/ko
Publication of WO2018190162A1 publication Critical patent/WO2018190162A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/02—Investigating particle size or size distribution
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03—Cuvette constructions
    • G01N21/05—Flow-through cuvettes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
    • G01P3/36—Devices characterised by the use of optical means, e.g. using infrared, visible, or ultraviolet light

Definitions

  • the present disclosure relates to a particle measuring apparatus and a particle measuring method.
  • a particle counter using a light scattering phenomenon is widely known.
  • the light scattering phenomenon depends on the relative refractive index between the solvent and the solute (particle). Therefore, for example, using a particle counter calibrated with polystyrene latex particles (PSL particles, refractive index: 1.59) in water (refractive index: 1.33), gold colloidal particles (refracted) having a particle size of 30 nm in water.
  • PSL particles polystyrene latex particles
  • refractive index: 1.533 water
  • gold colloidal particles refracted having a particle size of 30 nm in water.
  • the rate is 0.467-i2.41 (when the light source wavelength is 532 nm)
  • the particle size is estimated to be about 75 nm.
  • a particle measurement method has been proposed in which the particle diameter is obtained from the measured movement amount by paying attention to the movement amount (displacement amount) of the particle by Brownian motion obtained from the Stokes-Einstein equation.
  • the sample fluid is imaged at predetermined time intervals by the imaging unit from a direction perpendicular to the flow direction of the sample fluid using a linear flow cell. And the captured image is analyzed and the particle size is calculated
  • the sample fluid is photographed from a direction substantially perpendicular to the flow direction of the sample fluid.
  • the captured image includes the amount of movement due to the flow rate of the sample fluid in addition to the amount of movement due to the Brownian motion. Therefore, in order to specify the amount of movement of particles due to Brownian motion, the amount of movement due to the flow rate of the sample fluid must be subtracted from the amount of movement of particles in the flow direction of the sample fluid.
  • an object of the present disclosure is to obtain a particle measuring apparatus and a particle measuring method that accurately measure the particle diameter and the number concentration for each particle diameter.
  • a particle measuring apparatus includes a flow cell that forms a flow path of a sample fluid containing particles, a light source that outputs light, an irradiation optical system that irradiates the sample fluid in the flow path with light from the light source, and light.
  • a first imaging unit that captures scattered light from particles in a detection region in the flow path through which the image passes, and a plurality of still images of particles captured at a predetermined frame rate by the first imaging unit
  • a particle size specifying unit that specifies the amount of movement of the particle in the two-dimensional direction by Brownian motion and specifies the particle size of the particle from the amount of movement in the two-dimensional direction.
  • a sample fluid in a flow path formed by a flow cell is irradiated with light from a light source, and scattered light from particles in a detection region in the flow path through which light passes is The amount of movement of the particle in the two-dimensional direction due to Brownian motion based on a plurality of still images of the particle imaged at a predetermined frame rate, and the particle from the amount of movement in the two-dimensional direction Identifying the particle size of the.
  • FIG. 1 is a perspective view showing an optical configuration of the particle measuring apparatus according to the first embodiment of the present disclosure.
  • FIG. 2 is a side view of the particle measuring apparatus shown in FIG.
  • FIG. 3 is a block diagram showing an electrical configuration of the particle measuring apparatus according to the first embodiment of the present disclosure.
  • FIG. 4 is a diagram for explaining the Brownian motion of particles in the XZ plane observed by the imaging unit 4 in the first embodiment.
  • FIG. 5 is a perspective view showing an optical configuration of the particle measuring apparatus according to the second embodiment of the present disclosure.
  • FIG. 6 is a block diagram showing an electrical configuration of the particle measuring apparatus according to the second embodiment of the present disclosure.
  • FIG. 7 is a diagram for explaining the Brownian motion of particles in the XY plane observed by the imaging unit 61 in the second embodiment.
  • FIG. 8 is a perspective view for explaining the configuration of the flow path of the particle measuring apparatus according to the third embodiment.
  • FIG. 9 is a diagram for explaining the flow velocity distribution in the two-dimensional direction
  • Embodiment 1 FIG.
  • FIG. 1 is a perspective view showing an optical configuration of the particle measuring apparatus according to Embodiment 1 of the present disclosure.
  • FIG. 2 is a side view of the particle measuring apparatus shown in FIG.
  • the flow cell 1 is bent in an L shape.
  • the flow cell 1 includes a first channel 1a (Y direction in FIG. 1) and a second channel 1b (Z direction in FIG. 1) through which a sample fluid flows in a straight line.
  • the shape of the cross section of the first flow path 1a (the cross section parallel to the XZ plane) is, for example, a rectangle of about 1 mm ⁇ 1 mm.
  • the cross section of the second flow path 1b (cross section parallel to the XY plane) is also, for example, rectangular.
  • the flow cell 1 is made of synthetic quartz or sapphire.
  • the flow cell 1 may have a crank shape or a U-shape as long as it has an L-shaped bent portion.
  • the light source 2 is a light source that emits irradiation light such as laser light.
  • the irradiation optical system 3 emits the sample fluid from the light source 2 from a direction (X direction in FIG. 1) perpendicular to the traveling direction of the sample fluid (Y direction in FIG. 1) in the first flow path 1a, and Irradiation is performed with laser light shaped into a predetermined shape.
  • the imaging unit 4 includes an image sensor such as a CCD (Charge Coupled Device) or a CMOS (Complementary Metal Oxide Semiconductor) sensor. Using the image sensor, based on the scattered light from the particles in the detection region in the first flow path 1a through which the laser light passes, the particles are aligned in the direction of fluid flow in the extending direction of the first flow path 1a. The image is picked up by the image pickup unit 4 from the corresponding position.
  • the flow cell 1 has an L shape so that the direction of the flow of the sample fluid is changed from the first flow path 1a (Y direction) to the second flow path 1b (Z direction). It is bent.
  • the flow direction of the sample fluid is not limited to this.
  • the flow of the sample fluid may be changed from the second channel (Z direction) to the first (Y direction).
  • the imaging unit 4 captures an image from a position opposite to the flow direction in the detection region of the first flow path 1a.
  • the condensing optical system 5 condenses the scattered light from the particles in the detection region in the first flow path 1 a through which the laser light passes, on the image sensor of the imaging unit 4.
  • the condensing optical system 5 is composed of, for example, a spherical lens or an aspheric lens.
  • the condensing optical system 5 has an optical axis in the extension direction (Y direction in FIG. 1) of the fluid flow in the detection region of the first flow path 1a.
  • the optical axis passes through the center of the detection region and the center of the image sensor of the imaging unit. That is, the “detection region” is a region where the laser beam and the range where the light is condensed on the image sensor by the condensing optical system 5 intersect.
  • the depth of field of the imaging unit 4 and the condensing optical system 5 is preferably larger than the width of the laser beam in the optical axis direction described above.
  • a spherical concave portion 1c (concave lens shape) is formed on the inner wall of the flow cell 1 located between the above-described detection region and the condensing optical system 5.
  • the distance from the detection region to the spherical surface can be made substantially the radius of curvature of the spherical surface.
  • the measurement accuracy of the movement amount in the XZ plane can be easily improved.
  • FIG. 3 is a block diagram showing an electrical configuration of the particle measuring apparatus according to the first embodiment of the present disclosure.
  • the signal processing unit 11 acquires a captured image from the imaging unit 4. Based on the captured image, the signal processing unit 11 calculates the particle size of the particles, the number concentration for each particle size, the refractive index of the particles, and the like.
  • the signal processing unit 11 includes an image acquisition unit 21, a particle movement amount specifying unit 22, and a particle size specifying unit 23.
  • the image acquisition unit 21 has been captured by the imaging unit 4 at a predetermined frame rate (the number of still images constituting a moving image per unit time, for example, unit fps: frames per second), for example, 30 (fps).
  • a plurality of frames (still images) are acquired from the imaging unit 4.
  • the particle movement amount specifying unit 22 specifies particles in each frame. Furthermore, the particle movement amount specifying unit 22 associates the same particles in each frame and specifies the movement amount. Further, when the particle movement amount specifying unit 22 specifies a particle, it sends image information to the scattered light intensity specifying unit 31.
  • the particle movement amount specifying unit 22 searches for particles within a predetermined range from the base point in the current frame, for example, using the position of the particle in the frame (still image) one frame before as the base point. Particles found within the predetermined range are identified as the same particles as the previous particle. Thereby, the trajectory of the particle is specified in a plurality of frames. As a result, the movement amounts x and z in the two-dimensional direction due to Brownian motion are specified.
  • the sample fluid flows in a laminar flow state along the Y direction in the vicinity of the detection region in the first flow path 1a. Therefore, there is almost no amount of movement due to the flow rate of the sample fluid in the XZ plane. Therefore, the particle movement amount specifying unit 22 can observe the Brownian motion without correcting the particle movement amount depending on the flow velocity of the sample fluid.
  • the particle size specifying unit 23 specifies the particle size d of each particle from the frame rate and the above-described movement amounts x and z in the two-dimensional direction.
  • the particle size identification unit 23 identifies the diffusion coefficient D according to the following formula.
  • t is a time interval defined by the frame rate.
  • ⁇ a> represents the average of a.
  • the particle size specifying unit 23 moves the particles in the X direction and the Z direction between two consecutive frames based on the position of the particles in N frames (still images) in time order constituting the imaging.
  • the actual movement amount corresponding to is specified.
  • the average of the sum of the square of the movement amount x in the X direction and the square of the movement amount z in the Z direction is calculated as ⁇ x 2 + z 2 >. Is done.
  • the particle size identification unit 23 identifies the particle size d according to the following equation (Stokes-Einstein equation).
  • T is the absolute temperature
  • ⁇ is the viscosity coefficient of the sample fluid.
  • FIG. 4 is a diagram for explaining the Brownian motion of particles in the XZ plane observed by the imaging unit 4 in the first embodiment. Here, a case where three particles are imaged in the detection region is illustrated.
  • FIG. 4 is a diagram showing the trajectory of the amount of movement due to Brownian motion obtained by connecting the positions of the particles specified in each frame with straight lines. The length of each straight line represents the amount of movement for each frame. As described above, when the Brownian motion of particles in the XZ plane is observed, it is not necessary to correct the amount of particle movement depending on the flow velocity of the sample fluid.
  • the signal processing unit 11 includes a scattered light intensity specifying unit 31 that specifies a representative luminance value of the track of each tracked particle by the scattered light.
  • the scattered light intensity specifying unit 31 acquires image information sent when the particle movement amount specifying unit 22 specifies a particle. By using an appropriate method such as binarizing area correction of the average luminance value obtained at each measurement point or the maximum luminance value of the same particle in the trajectory described above, the value corresponding to the scattered light intensity of the particle can be obtained. It is specified by the scattered light intensity specifying unit 31.
  • the analysis unit 35 calculates the number concentration for each particle size based on the particle size specified by the particle size specifying unit 23. Further, the analysis unit 35, for each particle, based on the particle size based on the diffusion coefficient specified by the particle size specifying unit 23 and the scattered light intensity equivalent value specified by the scattered light intensity specifying unit 31 Analyze the characteristics of the particles. For example, particles that have a known particle size and can be regarded as a substantially single particle size can be used as sample particles. Such particles include, for example, polystyrene latex particles. Using such particles as sample particles, the relationship between the known particle size and the relative scattered light intensity with respect to the known refractive index may be obtained in advance. By doing in this way, the refractive index of particle
  • the light source 2 When the particle measuring device starts operation, the light source 2 is turned on.
  • the irradiation optical system 3 irradiates the sample fluid in the first flow path 1 a formed by the flow cell 1 with the laser light from the light source 2.
  • the imaging unit 4 images particles based on scattered light from the particles in the detection region in the first flow path 1a through which the laser light passes. At this time, the scattering that has passed through the bent portion forming the spherical concave portion 1c (concave lens) of the flow cell 1 from the position facing the extending direction (Y direction in FIG. 1) of the fluid flow in the first flow path 1a.
  • Light is imaged by the imaging unit 4 via the condensing optical system 5.
  • the signal processing unit 11 acquires a captured image from the imaging unit 4. Based on a plurality of frames (still images) of particles imaged at a predetermined frame rate (fps), as described above, the movement amounts x and z of the particles in the two-dimensional direction due to the Brownian motion are expressed as signal processing units. 11 is specified. Further, the signal processing unit 11 specifies the particle size of the particle and a representative scattered light intensity equivalent value from the frame rate (fps) and the movement amounts x and z in the two-dimensional direction. In this way, for example, the number concentration for each particle diameter or the refractive index of the particles can be measured.
  • the flow cell 1 includes the flow path 1a for the sample fluid.
  • the irradiation optical system 3 irradiates the sample fluid in the flow path 1 a with light from the light source 2.
  • the imaging part 4 images the scattered light from the particle
  • the particle size identification unit 23 identifies the amount of movement of the particles in the two-dimensional direction due to Brownian motion based on a plurality of still images of the particles imaged at a predetermined frame rate by the imaging unit 4.
  • the particle size specifying unit 23 specifies the particle size of the particles from the specified movement amount in the two-dimensional direction.
  • the sample fluid flows in a laminar flow state along the Y direction in the vicinity of the detection region of the first flow path 1a.
  • particles are imaged from the extending direction of the first flow path 1a. Therefore, almost no amount of movement due to the flow velocity of the sample fluid is observed on the XZ plane. Therefore, it is not necessary to correct the amount of particle movement depending on the flow rate of the sample fluid. As a result, the amount of movement of particles is measured with high accuracy, and consequently the particle size is measured with high accuracy.
  • the particle motion is imaged from the direction perpendicular to the flow direction of the sample fluid.
  • the effective depth in the optical axis direction of the imaging system depends on the depth of field of the light receiving system. As a result, it is difficult to determine the particle detection region.
  • the depth of field of the imaging system does not affect the determination of the particle detection area. This facilitates the determination of the particle detection area. As a result, the particle diameter and the number concentration can be measured with high accuracy.
  • FIG. 5 is a perspective view showing an optical configuration of the particle measuring apparatus according to the second embodiment of the present disclosure.
  • FIG. 6 is a block diagram showing an electrical configuration of the particle measuring apparatus according to the second embodiment of the present disclosure.
  • the particle measuring apparatus includes an imaging unit 61 (second imaging unit), a condensing optical system 62, an image acquisition unit 71, and a particle movement amount specifying unit 72.
  • an imaging unit 61 second imaging unit
  • a condensing optical system 62 condensing optical system
  • an image acquisition unit 71 image acquisition unit
  • a particle movement amount specifying unit 72 particle movement amount specifying unit
  • the imaging unit 61 includes an image sensor such as a CCD or a CMOS. And the imaging part 61 uses the image sensor, based on the scattered light from the particle
  • the imaging unit 4 and the imaging unit 61 desirably have the same frame rate (for example, 30 frames / second), and can switch frames in synchronization with each other.
  • the aspects of the imaging unit 4 and the imaging unit 61 are not limited to this.
  • any imaging unit 4 and imaging unit 61 can be used as long as the imaging time can be matched for each frame (still image).
  • the image acquisition unit 71 acquires a plurality of frames imaged by the imaging unit 61 from the imaging unit 61.
  • the particle movement amount specifying unit 72 detects particles in the detection region in each frame acquired by the image acquisition unit 71. Then, the particle movement amount specifying unit 72 specifies the position of the particle in the two-dimensional direction (XY plane) in each frame. In this way, the particle movement amount specifying unit 72 specifies each movement amount x, y.
  • the particle size specifying unit 23 is specified by the movement amounts x and z in the two-dimensional direction (XZ plane) specified by the particle movement amount specifying unit 22 and the particle movement amount specifying unit 72. Based on the respective movement amounts x, y in the two-dimensional direction (XY plane) and the movement amounts x, y, z in the three-dimensional direction of the particles due to Brownian motion, the particle diameter d of the particles is determined. Identify.
  • the particle size identification unit 23 identifies the diffusion coefficient D according to the following formula.
  • t is a time interval defined by the frame rate.
  • the particle size identification unit 23 moves the particles in the x direction, the y direction, and the z direction between two consecutive captured images based on the positions of the particles in the N captured images in the order of photographing time ( The actual distance), and (N ⁇ 1) pieces of the X-direction movement amount x squared, the Y-direction movement amount y squared, and the Z-direction movement amount z squared.
  • the average of the sum is calculated as ⁇ x 2 + y 2 + z 2 >.
  • the particle size identification unit 23 identifies the particle size d according to the above-described Stokes-Einstein equation.
  • the particle size identification unit 23 has a common direction (here, the plane (XZ plane) imaged by the imaging unit 4 and the plane imaged by the imaging unit 61 (XY plane)).
  • An image of particles having the same amount of movement in the (X direction) is specified as an image of particles obtained by imaging one particle.
  • the particle size identification unit 23 treats the movement amount in the X direction obtained from the frame (still image) of the imaging unit 4 as it is as the movement amount in the X direction by Brownian motion, and performs imaging.
  • the amount of movement in the Z direction obtained from the frame of the unit 4 is handled as it is as the amount of movement in the Z direction due to Brownian motion.
  • the particle size identification unit 23 subtracts the movement amount due to the flow velocity of the sample fluid from the movement amount in the Y direction obtained from the captured image of the imaging unit 61 to identify the movement amount in the Y direction due to Brownian motion.
  • FIG. 7 is a diagram for explaining the Brownian motion of particles in the XY plane observed by the imaging unit 61 in the second embodiment.
  • FIG. 7A shows a trajectory of the amount of particle movement in a predetermined number of frames.
  • FIG. 7B shows the flow velocity distribution in the Y direction of the sample fluid.
  • FIG. 7C shows a trajectory of the amount of movement due to the Brownian motion of particles in a predetermined number of frames.
  • the flow velocity distribution of the sample fluid can be specified, for example, by fitting a flow velocity model (simulation) or by measuring in advance through experiments.
  • the flow velocity distribution in the Y direction of the sample fluid in the detection region of the first flow path 1a is expressed as shown in FIG. 7B, for example.
  • the amount of movement of the sample fluid is greatest at the center of the detection region and decreases as the distance from the center increases. Based on this flow velocity distribution and the position of the particles in the X direction, the amount of movement due to the flow velocity of the sample fluid in the Y direction is specified.
  • each amount of movement x, y in the two-dimensional direction due to the Brownian motion of the particles in the XY plane is identified.
  • the light source 2 When the particle measuring device starts operation, the light source 2 is turned on.
  • the irradiation optical system 3 irradiates the sample fluid in the first flow path 1 a included in the flow cell 1 with the laser light from the light source 2.
  • the imaging unit 4 Based on the scattered light from the particles in the detection region in the first flow path 1a through which the laser light passes, the imaging unit 4 corrects the particles in the fluid flow direction (Y direction in FIG. 1) of the first flow path 1a. An image is taken from the opposite position.
  • the imaging unit 61 images the particles from a direction (Z direction in FIG. 1) perpendicular to the fluid flow direction of the flow path 1a based on the scattered light from the particles in the detection region.
  • the imaging unit 4 and the imaging unit 61 capture images at a constant frame rate (fps) by synchronizing the frames with each other.
  • the signal processing unit 11 acquires a captured image from the imaging units 4 and 61. Then, based on a plurality of frames (still images) of particles imaged at a predetermined frame rate (fps), as described above, each movement amount x, y, z of the particles in the three-dimensional direction due to Brownian motion is a signal. It is specified by the processing unit 11. In this way, the particle size of the particles can be specified from the movement amounts x, y, z in the three-dimensional direction.
  • the imaging unit 61 causes the particles of the first flow path 1a to be dispersed based on the scattered light from the particles in the detection region in the first flow path 1a through which light passes.
  • An image is taken from a direction perpendicular to the fluid flow direction.
  • the particle size specifying unit 23 performs Brownian motion based on a plurality of frames of particles captured at a predetermined frame rate by the imaging unit 4 and a plurality of frames of particles captured by the imaging unit 61 at a predetermined frame rate. The amount of movement of the particles in the three-dimensional direction is specified.
  • the particle size of the particles is determined by the particle size specifying unit 23. Identified.
  • the three-dimensional movement amount corresponds to the movement amount of the true particle. Therefore, the particle diameter of the particles in the sample fluid can be measured with higher accuracy.
  • FIG. 8 is a perspective view illustrating the configuration of the flow path of the particle measuring apparatus according to the third embodiment.
  • FIG. 9 is a diagram illustrating the flow velocity distribution in the two-dimensional direction used in the third embodiment.
  • Embodiment 3 the flow velocity distribution was evaluated by fluid simulation that directly calculates the Naviestokes equation. The purpose is to verify whether the influence of the flow rate of the sample fluid should be taken into account in detecting the amount of movement of the particles flowing in the flow cell bent in the L shape due to Brownian motion. This fluid simulation was performed using an existing method.
  • the flow velocity distribution in the flow path having an L-shaped shape as shown in FIG. 8 was calculated.
  • Simulation of the flow velocity distribution on the inflow path side in the vicinity of the coupling portion between the first flow path 81 as the inflow path (Y direction) serving as the bent portion of the flow path and the second flow path 82 as the outflow path (Z direction). was conducted under the following conditions. That is, the cross section of the first flow path 81 is a square of 1 mm ⁇ 1 mm. And the cross section of the 2nd flow path 82 is a rectangle of 2.6 mm x 0.8 mm.
  • the sample fluid is an incompressible fluid (water) having a density of 1 g / mL and a viscosity of 1 mPa ⁇ s. Furthermore, the flow rate of this sample fluid is 0.3 mL / min. In this case, the average flow velocity in the first flow path 81 is 5.0 mm / s.
  • a two-dimensional flow velocity vector in the cross section) is shown.
  • 9A shows the case of 0.25 mm
  • FIG. 9B shows the case of 0.5 mm
  • FIG. 9C shows the case of 0.75 mm.
  • the two-dimensional flow velocity vector in the cross section represents the maximum value of the flow velocity in the plane, that is, the magnitude normalized by the in-plane average flow velocity of 5.0 mm / s.
  • a flow velocity component in the bending direction (Z direction) perpendicular to the first flow path 81 appeared near the center of the first flow path 81. Further, it was found that the flow velocity component perpendicular to the first flow path 81 attenuates as the distance from the bent portion of the first flow path 81 decreases, that is, a flow along the first flow path 81 is formed.
  • the flow velocity component in the bending direction in the flow velocity is an average at a position that is 1 mm or more which is the width of the first flow path 81 (the width in the X direction or the width in the Z direction in FIG. It was found to reduce to less than 1% of the flow rate.
  • the detection region when the detection region is within a predetermined range from the bending position of the flow path (a range where the distance from the bending position is less than 1 mm as described above), The position of the detection region in the first channel 81 (that is, along the first channel 81 in FIG. 8) by the above-described fluid simulation based on the channel shape of the particle measuring device and the fluid characteristics of the sample fluid.
  • the flow velocity component of the sample fluid in the two-dimensional direction (X direction and Z direction) in the cross section (XZ plane in FIG. 8) at the position in the Y direction is specified.
  • the imaging part 83 similar to the above-mentioned imaging part 4 images the scattered light from the particle
  • the particle size identification unit 23 then includes a plurality of still images of particles imaged at a predetermined frame rate by the imaging unit 83, and the flow velocity component of the sample fluid in the two-dimensional direction in the detection region previously identified by the fluid simulation. Based on the above, the amount of movement of the particle in the two-dimensional direction by Brownian motion is specified. In this way, the particle size of the particles can be specified from the corrected two-dimensional movement amount.
  • the particle size identification unit 23 determines the X direction and the Z direction of the particles between two consecutive frames based on the position of the particles in N frames (still images) in time order constituting the imaging. The actual amount of movement corresponding to the amount of movement is specified. Then, by subtracting the movement amount due to the flow velocity component of the sample fluid in the two-dimensional direction specified in advance by the fluid simulation from the actual movement amount, the movement amount in the two-dimensional direction of the particles due to the Brownian motion becomes the particle size. It is specified by the specifying unit 23. In the same manner as in the first embodiment, the particle diameter is specified from the movement amount of the particles in the two-dimensional direction due to Brownian motion.
  • the movement amount of the particle in the two-dimensional direction due to the Brownian motion is accurately specified, and as a result The particle size is specified.
  • the analysis unit 35 may calculate the number concentration by counting the number of particles having the particle size for each particle size specified by the particle size specifying unit 23. Good.
  • the particle size identification unit 23 can further calculate the particle size distribution of the number concentration for each arbitrary particle size interval.
  • the particle measuring apparatus and the particle measuring method of the present disclosure can be applied to, for example, the measurement of the particle diameter of the particles contained in the sample fluid or the number concentration for each particle diameter.

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Abstract

La présente invention a pour objet de fournir un dispositif de mesure de particule et un procédé de mesure de particule qui mesurent avec précision une taille de particule. Une cellule d'écoulement (1) comprend un passage d'écoulement (1a) pour un fluide échantillon. Un système optique d'éclairage (3) éclaire le fluide échantillon dans le passage d'écoulement (1a) avec de la lumière provenant d'une source de lumière (2). Une unité de capture d'image (4) capture une image d'une lumière diffusée à partir d'une particule dans une région de détection dans le passage d'écoulement (1a) à travers lequel passe la lumière, ladite image étant capturée dans la direction dans laquelle s'étend le passage d'écoulement (1a). Sur la base d'une pluralité d'images fixes de la particule capturée par l'unité de capture d'image (4) à l'aide d'une fréquence de trames prescrite, une unité d'identification de taille de particule identifie une quantité de mouvement de la particule dans une direction bidimensionnelle à la suite d'un mouvement brownien et détermine la taille de particule de la particule à partir de la quantité de mouvement dans la direction bidimensionnelle.
PCT/JP2018/013933 2017-04-14 2018-03-30 Dispositif de mesure de particule et procédé de mesure de particule WO2018190162A1 (fr)

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EP18783731.5A EP3611492B1 (fr) 2017-04-14 2018-03-30 Dispositif de mesure de particule et procédé de mesure de particule
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WO2020104814A2 (fr) 2018-11-22 2020-05-28 Cambridge Enterprise Limited Caractérisation de particules par microscopie optique
JP2020118550A (ja) * 2019-01-24 2020-08-06 リオン株式会社 流体中浮遊物質測定用フローセル及び粒子計数装置
WO2022153633A1 (fr) * 2021-01-18 2022-07-21 国立研究開発法人産業技術総合研究所 Procédé et dispositif de mesure de densité de particules

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WO2020071306A1 (fr) * 2018-10-04 2020-04-09 国立研究開発法人産業技術総合研究所 Dispositif de mesure de particules, procédé d'étalonnage et dispositif de mesure
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JP7260308B2 (ja) 2019-01-24 2023-04-18 リオン株式会社 流体中浮遊物質測定用フローセル及び粒子計数装置
WO2022153633A1 (fr) * 2021-01-18 2022-07-21 国立研究開発法人産業技術総合研究所 Procédé et dispositif de mesure de densité de particules

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