WO2018165819A1 - Circuit line connection method - Google Patents

Circuit line connection method Download PDF

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Publication number
WO2018165819A1
WO2018165819A1 PCT/CN2017/076435 CN2017076435W WO2018165819A1 WO 2018165819 A1 WO2018165819 A1 WO 2018165819A1 CN 2017076435 W CN2017076435 W CN 2017076435W WO 2018165819 A1 WO2018165819 A1 WO 2018165819A1
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WO
WIPO (PCT)
Prior art keywords
layer
circuit
substrate
connection
manufacturing
Prior art date
Application number
PCT/CN2017/076435
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French (fr)
Chinese (zh)
Inventor
胡川
刘俊军
Original Assignee
深圳修远电子科技有限公司
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Application filed by 深圳修远电子科技有限公司 filed Critical 深圳修远电子科技有限公司
Priority to PCT/CN2017/076435 priority Critical patent/WO2018165819A1/en
Publication of WO2018165819A1 publication Critical patent/WO2018165819A1/en

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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate

Definitions

  • the invention belongs to the field of electronics, and in particular relates to a circuit connection method.
  • the conventional circuit wiring method uses a soldering method, which is liable to cause a thin-walled burn-in damage, thereby limiting the refinement of the circuit pattern and failing to obtain a high-density circuit pattern.
  • the present invention overcomes the deficiencies of the prior art and provides a circuit wiring method that can obtain a high-density connection and can protect the connection when the circuit pattern is externally connected.
  • a circuit manufacturing method is characterized in that a first circuit layer is disposed on a substrate, the first circuit layer includes a connection and a connection portion, and a protection layer is disposed on the first circuit layer, and the protection layer covers the In the connection, the protective layer is provided with an operation window through which an thickened layer is formed in the operation window, and the thickened layer is electrically connected to the connection or the connection portion.
  • the thickening layer is electrically connected to the connecting portion
  • the electronic component is placed on the substrate
  • the electronic component is provided with a component pin
  • the component pin is electrically connected to the thickening layer .
  • the component leads of the electronic component are soldered to the thickened layer.
  • the connecting portions are at least two, and at least one of the connecting portions is provided with the thickening layer.
  • the substrate is further provided with a second circuit layer, and a connection hole is formed in the substrate, one side of the connection portion is electrically connected to the thickening layer, and the other side of the connection portion Interfacing with the connection hole, the connection hole also abutting the second circuit layer, and providing a conductor layer in the connection hole, The conductor layer electrically connects the connection portion and the second circuit layer.
  • an encapsulation layer is disposed on the substrate, the electronic component being located between the substrate and the encapsulation layer, the encapsulation layer securing the electronic component package.
  • the substrate is disposed on the carrier, the thickening layer is disposed under the support of the carrier, and the encapsulation layer is formed, and the encapsulation layer is used to encapsulate the electronic component.
  • the carrier is detached from the substrate.
  • the second circuit layer is formed on the bottom surface of the substrate.
  • the first circuit layer, the electronic component, and the encapsulation layer are disposed on a same side of the substrate, and the encapsulation layer fixes the first circuit layer and the electronic component package .
  • the thickening layer is electrically connected to the connecting portion, and a particle beam or a photon beam is emitted to the substrate, and the particle beam or photon beam is formed on the substrate through the substrate.
  • the connection hole, the particle beam or the photon beam cannot pass through the entirety of the thickened layer.
  • the particle beam is a plasma beam or the photon beam is a laser beam.
  • a metal layer is disposed on a surface of the substrate, the metal layer is provided with a guiding hole, and the guiding hole corresponds to the connecting portion, and a particle beam or a photon beam is emitted toward a bottom surface of the substrate, The particle beam or photon beam cannot pass through the metal layer, and the particle beam or photon beam passes through the guiding hole to form the connecting hole in the substrate.
  • the metal layer is formed into the second circuit layer.
  • the electronic component is a chip or an electronic component.
  • the line width of the line is less than 5 microns, or the line has a thickness of less than 5 microns.
  • the wires are at least two, and a gap is provided between the two wires, and the protective layer covers a gap between the wires.
  • the gap of the wires is less than 10 microns.
  • the thickness of the thickened layer and the connecting portion is greater than that of the whole The thickness of the connection.
  • the thickness of the thickened layer and the joint is greater than 10 microns.
  • the thickened layer is formed by a method of immersion gold/nickel.
  • the operation window is at least two.
  • the substrate is disposed on a carrier, the carrier provides support for the substrate, the protective layer is disposed, or the thickened layer is formed, or an electronic component is placed and the electronic component is placed The component leads are electrically connected to the thickened layer.
  • Circuit connection methods include:
  • a first circuit layer is disposed on the substrate, the first circuit layer includes a connection line and a connection portion, a protection layer is disposed on the first circuit layer, the protection layer covers the connection line, the protection layer is provided with an operation window, and the connection portion corresponds to the operation window.
  • a thickened layer is formed in the operating window through the opening of the operating window through an operating window, the thickened layer being electrically connected to the wire or the connecting portion.
  • the wiring and the connecting portion are generally synchronously manufactured to improve the production efficiency, and the thickness of the connecting portion and the connecting portion are substantially the same, and a line having a narrow line width is formed, so that as many as possible in the same space.
  • the layout is wired to obtain a high-density connection, thereby obtaining more connection paths and improving the data processing capability of the circuit. Since the aspect ratio of the connection is too large, the connection is tilted and the adhesion is short-circuited, so that the thickness of the connection is reduced while the thickness of the connection is reduced, and the thickness of the connection portion and the connection are obtained.
  • connection portion having a very thin thickness cannot be subjected to the connection, for example, by laser burnout, high temperature burnt by soldering, or passivation or diffusion by a metal material, in the method of the present invention:
  • a thickening layer is separately formed at the joint portion, the thickness of the joint portion is increased by the thickening layer, and the thickening layer and the joint portion are electrically connected, so that the thickened layer or the joint portion can be electrically connected to the electronic component or the second circuit layer. Expanding the circuit function; at this time, the thickness of the thickened layer and the connecting portion is greater than the thickness of the connecting portion itself, and the increase in thickness makes it possible to withstand the influence of the joining process, for example, it can resist the burning or welding of the laser. High temperature, sufficient for metal passivation or diffusion;
  • connection is covered by the protective layer, and the protective layer provides protection for the connection.
  • the thickening layer is not affected by the connection.
  • the connection still retains the original narrow line width and thin thickness (less than 10 microns). ), thereby obtaining a high connection density and improving the data processing capability of the circuit; and in the connection process, the protective layer can also provide a certain protection for the connection.
  • the line width of the connection refers to the width of the cross section of the connection, as shown by D1 in FIG. 4; the thickness of the connection refers to the height of the cross section of the connection, as shown by H in FIG.
  • the method of the invention since the method of the invention has high connection density, thin thickness and narrow line width, the fault tolerance is weak, and the misalignment caused by the displacement or deformation of the connection should be avoided in various processes, and the protective layer is covered to cover the connection. It is also possible to limit the misalignment of the connection and further increase the yield.
  • the electronic components are placed on the substrate, the electronic components are provided with component leads, and the component leads are electrically connected with the thickened layer; the parts of the electronic components are soldered to the thickened layer.
  • the thickness of the thickened layer is increased to withstand the effects of soldering, such as the high temperature of soldering; or when soldering is used, such as solder, the thickness of the thickened layer is sufficient for metal diffusion and passivation by the flux. .
  • the thickened layer is formed by electroless plating. It is possible to simultaneously form a thickened layer on all the connecting portions on the substrate, which is highly efficient. At the same time, the thickening layer can be made of the same material as the connecting portion, the thickening layer and the connecting portion are better integrated, and the electrical connection performance is better.
  • the substrate is further provided with a second circuit layer, and a connection hole is formed in the substrate.
  • One end of the connection hole is butted to the connection portion, and the other end is butted to the second circuit layer.
  • a conductor layer is disposed in the connection hole, and the conductor layer is connected to the second portion.
  • the circuit layers are electrically connected.
  • the substrate is a flexible circuit board or the substrate thickness is thin
  • the support of the carrier plate can ensure that the substrate and the connection are not deformed, which is advantageous for implementation of various processes.
  • the flexible circuit board is suitable for use in a wearable device in combination with the thin-walled high-density wiring of the present invention; the thin substrate of the thickness can be used to form the substrate, the first circuit layer, and the electronic component.
  • the overall thickness is very thin and made into an ultra-thin circuit board.
  • An encapsulation layer is disposed on the substrate, the electronic component is located between the substrate and the encapsulation layer, and the encapsulation layer encapsulates the electronic component.
  • the encapsulation layer fixes and fixes the electronic components, and fixes the relative positions of the electric components and the wires, the connecting portions, and the thickened layers to limit the misalignment.
  • the carrier board is detached from the substrate, the electronic component is fixed by the encapsulation layer, and the position is no longer changed. At this time, the carrier board completes its supporting function, and the carrier board can be detached from the substrate. By reducing the overall thickness of the substrate, the first circuit layer, and the electronic component, an ultra-thin circuit board can be obtained.
  • a second circuit layer is formed on the bottom surface of the substrate.
  • Making a second circuit layer on the bottom surface of the substrate and connecting the first circuit layer and the second circuit layer can achieve more circuit connections and improve the overall performance of the circuit.
  • the top surface of the substrate is packaged and fixed by the encapsulation layer, and the encapsulation layer can provide support for forming the second circuit layer, thereby avoiding deformation and dislocation of the second circuit layer, so that the line width of the second circuit layer can be made narrow, and the second circuit is improved.
  • the wiring density of the layer is provided.
  • the material of the encapsulating layer can be selected as needed, for example, a resin material is selected as the encapsulating layer, and the curing of the resin material can be sufficiently strong to fix the electronic component, and is sufficient to provide support for the second circuit layer. And, after the second insulating layer is disposed on the second circuit layer, the third circuit layer is formed on the second insulating layer, the third insulating layer is disposed on the third circuit layer, and the fourth circuit layer is formed on the third insulating layer. , and so on, to make multi-layer 3D circuits.
  • the first circuit layer, the electronic component and the encapsulation layer are disposed on the top surface of the substrate, and the encapsulation layer simultaneously fixes the first circuit layer and the electronic component package, defines a position between the electronic component and the first circuit layer, and ensures the electronic component and The connection between the first circuit layers is reliable.
  • the carrier board and the substrate are separated from the first circuit layer and the electronic component.
  • the electronic component and the first circuit layer are fixed by the encapsulation layer, and the relative positions thereof are no longer changed.
  • the carrier board and the substrate complete the supporting action, and the carrier board and the substrate can be detached, and the first circuit layer, the electronic component and the package are separated from the substrate.
  • the layers constitute a circuit board, and the overall thickness of the first circuit layer, the electronic component, and the package layer is reduced, and an ultra-thin circuit board can be obtained.
  • circuit structures may be formed on the bottom surface of the first circuit layer, for example, after the first insulating layer is provided, the first insulating layer is fabricated.
  • the second circuit layer is provided with a second insulating layer on the second circuit layer and a third circuit layer on the second insulating layer, and so on.
  • a particle beam or a photon beam is emitted to the substrate, and the particle beam or the photon beam passes through the substrate to form a connection hole on the substrate, and the particle beam or the photon beam cannot pass through the entirety of the connection portion and the thickening layer. It is possible to simultaneously emit a particle beam or a photon beam to the entire substrate, and simultaneously make all the connection holes to improve production efficiency.
  • a metal layer is disposed on the bottom surface of the substrate, and the metal layer is provided with a guiding hole corresponding to the connecting portion, and a particle beam or a photon beam is emitted toward the bottom surface of the substrate, and the particle beam or the photon beam cannot pass through the metal layer, the particle beam or the photon.
  • a connection hole is formed in the substrate.
  • the guiding hole provides positioning for making the connecting hole, and the connecting hole can be made only at the position where the guiding hole is provided. It is possible to simultaneously emit a particle beam or a photon beam to the entire substrate, and simultaneously make all the connection holes to improve production efficiency.
  • the metal layer is made into the second circuit layer.
  • the metal layer can provide positioning for making the connection holes, and is also a raw material for making the second circuit layer, saving steps and improving efficiency.
  • the metal layer may be formed into the second circuit layer by photolithography.
  • Electronic components are chips or electronic components.
  • the high-density connection obtained by the present invention can provide more connection and increase the data transmission speed of the chip due to the fast calculation speed of the chip and the fast data transmission speed.
  • the line width of the connection is less than 5 microns. The smaller the line width of the connection, the more the connection can be arranged in the same space.
  • the thickness of the connection is less than 5 microns.
  • the thickness of the connection corresponds to the line width to prevent the connection from sticking.
  • the thickness of the wiring does not affect the connection of the connecting portion, and the thickness of the wiring can be made as small as possible.
  • the connection is at least two, and there is a gap between the two lines, and the protective layer covers the gap between the lines.
  • the protective layer covers the surface and side of the wire. In addition to protecting the wire surface, it also protects the cable from short-circuiting.
  • the thick gold layer can be used to form a thickened layer simultaneously on all the joints on the substrate, and the efficiency is high.
  • the protective layer is used. Covering the gap between the wires and the wires, the metal is not grown in the height direction of the wires, and the metal is not grown in the thickness direction of the wires. The wires maintain the original high density state without being affected. ring. A sufficient gap is reserved between the connecting portions to avoid the influence of metal growth in the thickness direction of the connecting portion.
  • the gap between the wires is less than 10 microns. The smaller the gap between the wires, the more wires can be placed in the same space. The gap width of the two wires is shown as D2 in FIG.
  • the thickness of the entire thickened layer and the connecting portion is greater than the thickness of the connecting line.
  • the connecting portion is at least two, and at least one connecting portion is provided with a thickening layer.
  • the connecting portion may be a contact, and a connecting portion may be formed in a connecting portion that requires an increased thickness as the case may be.
  • the at least two connecting portions have a thickened layer, wherein one of the connecting portions is electrically connected to the component pins through the thickening layer, and the other connecting portion is electrically connected to the second circuit layer. Parts that are connected to the connection can be selected as needed.
  • FIG. 1 is a schematic diagram of a chip connection method according to an embodiment of the present invention.
  • Figure 2 is an enlarged view of A in Figure 1;
  • Figure 3 is a plan view of Figure 3
  • FIG. 4 is a schematic view showing line width, thickness, and spacing of a connection according to an embodiment of the present invention.
  • FIG. 5 is a schematic diagram of a protective layer according to an embodiment of the present invention.
  • FIG. 6 is a schematic view of a thickening layer according to an embodiment of the present invention.
  • FIG. 7 is a schematic diagram of a chip mounted according to an embodiment of the present invention.
  • FIG. 8 is a schematic diagram of an encapsulation layer package according to an embodiment of the present invention.
  • FIG. 9 is a schematic view of a carrier after being detached according to an embodiment of the present invention.
  • FIG. 10 is a schematic diagram of making a connection hole according to an embodiment of the present invention.
  • FIG. 11 is a schematic view showing a conductor layer provided in an embodiment of the present invention.
  • FIG. 12 is a schematic diagram of a method for connecting a chip according to an embodiment of the present invention.
  • carrier board, 110 bonding medium, 200, substrate, 300, first circuit layer, 310, wiring, 320, connection, 400, protective layer, 500, thickening layer, 510, flux, 600, Chip, 610, chip pin, 620, adhesive layer, 700, encapsulation layer, 800, metal layer, 810, second circuit layer, 900, laser.
  • FIG. 1 it is a structural cross-sectional view of the chip connection method of the present embodiment.
  • the substrate 200 is disposed on the carrier 100 , and the first circuit layer 300 is formed on the substrate 200 by using the carrier 100 as a support.
  • the first circuit layer 300 is disposed. (Unless limited to the embodiment, the first circuit layer 300 may be disposed on the substrate 200, and then the substrate 200 and the first circuit layer 300 may be transferred to the carrier 100).
  • the first circuit layer 300 includes a wire 310 and a connection 320.
  • the line width of the connection line 310 is less than 5 micrometers, and the line width of the connection line 310 refers to the width of the cross section of the connection line 310. As shown by D1 in FIG. 4, the smaller the line width of the connection line 310, the more space can be in the same space. More connections 310 are placed inside.
  • the thickness of the wire 310 is less than 5 microns, and the thickness of the wire 310 refers to the height of the cross section of the wire 310, as shown by H in FIG. In one aspect, the thickness of the wire 310 corresponds to the line width to prevent the wire 310 from tipping over.
  • the thickness of the wiring 310 does not affect the connection of the connecting portion 320, and the thickness of the wiring 310 can be made as small as possible.
  • the connection line 310 is at least two, and a gap is provided between the two lines 310, and the gap of the connection line 310 is less than 10 micrometers. The smaller the gap of the wiring 310, the more the wiring 310 can be arranged in the same space, and the gap width of the two wirings 310 is as shown by D2 in FIG.
  • the connecting portions 320 are at least two, and one operating window may correspond to one or more connecting portions 320.
  • connection 310 and the connection portion 320 are generally synchronously formed to improve the production efficiency.
  • the thickness of the connection 310 and the connection portion 320 are substantially the same.
  • a layer is disposed on the top surface of the substrate 200.
  • Metal material, the metal material is made into a wire 310 and a connecting portion 320, and the materials are the same.
  • the thickness of the connecting wire 310 and the connecting portion 320 are the same, and constitute a whole, but not Limited to FIGS. 2 and 3, the wire 310 and the connecting portion 320 may have other shapes.
  • a protective layer 400 is disposed on the first circuit layer 300.
  • the protective layer 400 covers the connection 310.
  • the protective layer 400 is provided with an operation window.
  • the connection portion 320 corresponds to the operation window, and the operation window can expose the connection portion 320.
  • the connection portion 320 can be connected to another electronic device through the operation window, or the connection portion 320 can be used as a connection contact.
  • the protective layer 400 provides shielding and protection for the connection 310, which can prevent the subsequent process from damaging the connection 310. Since the line width of the connection 310 is narrow, the thickness is small, and the pitch is small, the protective layer 400 can be disposed between the connections 310. Misconnection.
  • a thickening layer 500 is formed on the connecting portion 320 by an immersion gold/nickel method or an electroplating method through an operation window, and the thickening layer 500 is electrically connected to the connecting portion 320.
  • a thickening layer 500 is disposed on at least one of the connecting portions 320.
  • the connecting portion 320 may be a contact, and the connecting portion 320 may be formed in the connecting portion 320 where the thickness is increased, as the case may be.
  • the thickness of the obtained thickened layer 500 and the connecting portion 320 as a whole is greater than the thickness of the connecting line 310.
  • the thickening layer 500 is made of the same material as the connecting portion 320, and the thickening layer 500 and the connecting portion 320 are better integrated and the electrical connection performance is better.
  • the thickness is increased in the connecting portion 320 alone without breaking the original line width and thickness of the connecting line 310, and the thickness of the connecting portion 320 is increased by the thickening layer 500, so that the thickening layer 500 can be subjected to the joining process.
  • the effect for example, can resist the high temperature of the cauterization or soldering of the laser 900, sufficient metal passivation or diffusion;
  • the wiring 310 is covered by the protective layer 400, and the protective layer 400 provides protection for the wiring 310 to form the thickening layer 500.
  • the connection 310 still retains the original narrow line width, very thin thickness (less than 10 microns), thereby obtaining a high density of the connection 310, improving the data processing capability of the circuit;
  • the protective layer 400 can also provide a certain protection for the wiring 310.
  • the thickened layer 500 is formed by a method of vapor deposition, sputtering, or electroplating. The thickening layer 500 can be formed simultaneously on all the connecting portions 320 on the substrate 200, and the efficiency is high.
  • the protective layer 400 covers the gap between the wires 310.
  • the protective layer 400 covers the surface and the side of the wiring 310, and in addition to protecting the surface of the wiring 310, it can protect the connection 310 from short-circuiting.
  • the immersion gold/nickel method for forming the thickening layer 500 can simultaneously form the thickening layer 500 on all the connecting portions 320 on the substrate 200, and the efficiency is high.
  • the protective layer 400 covers the gap between the connection line 310 and the connection line 310, neither the metal is grown in the height direction of the connection line 310 nor the metal is grown in the thickness direction of the connection line 310, and the connection line 310 remains original. The high density state is not affected. Further, a sufficient gap is reserved between the connecting portions 320 to avoid the influence of the growth of metal in the thickness direction of the connecting portion 320.
  • the electronic component can be placed on the substrate 200, the electronic component is provided with a component pin, and the component pin is electrically connected to the thickening layer 500 to realize electrical connection between the electronic component and the first circuit layer 300.
  • the electronic component is a chip 600 or an electronic component, and the electronic component includes but is not limited to an electronic component or device such as a resistor, a capacitor, a diode, a triode, an antenna, etc.
  • the electronic component is a chip 600, as shown in FIG. The chip 600 is adhered to the substrate 200 through the adhesive layer 620.
  • the chip 600 is provided with a chip lead 610, and the chip lead 610 is soldered to the thickening layer 500 through the flux 510 to realize electrical connection between the chip 600 and the first circuit layer 300. .
  • the thickness of the thickening layer 500 is increased to withstand the influence of soldering, such as high temperature of soldering; or when the solder 510 such as solder is used for soldering, the thickness of the thickening layer 500 is sufficient for the metal brought by the flux 510. Diffusion and passivation.
  • an encapsulation layer 700 is disposed on the substrate 200.
  • the chip 600 and the first circuit layer 300 are located between the substrate 200 and the encapsulation layer 700.
  • the encapsulation layer 700 simultaneously fixes the first circuit layer 300 and the electronic component package, and is defined. The position between the electronic component and the first circuit layer 300 ensures a reliable connection between the electronic component and the first circuit layer 300.
  • the carrier 100 is detached from the substrate 200, and the chip 600 and the first circuit layer 300 are fixed by the package layer 700, and the position is no longer changed.
  • the board 100 completes its supporting function, and the carrier board 100 can be detached from the substrate 200, so that the overall thickness of the substrate 200, the first circuit layer 300, and the chip 600 is reduced, and an ultra-thin circuit board can be obtained.
  • a metal layer 800 is provided on the bottom surface of the substrate 200.
  • the metal layer 800 is provided with a guiding hole, and the guiding hole corresponds to the connecting portion 320, and emits particles toward the bottom surface of the substrate 200.
  • a beam or photon beam including but not limited to a plasma beam, including but not limited to a laser 900 beam.
  • a laser beam 900 is used, and the laser beam 900 cannot pass through the metal layer 800.
  • a connection hole is formed in the substrate 200.
  • the guiding hole provides positioning for making the connecting hole, and the connecting hole can be made only at the position where the guiding hole is provided.
  • connection portion can be made thinner and thinner, and the density of the connection portion can be increased. Thereby, a higher density electrical connection line can be set to increase the data transmission speed.
  • the metal layer 800 is formed into a second circuit layer 810, and a conductor layer is disposed in the connection hole, and the conductor layer electrically connects the thickening layer 500 and the metal layer 800 or the second circuit layer 810. .
  • the metal layer 800 can provide positioning for making the connection holes, and is also a raw material for fabricating the second circuit layer 810, saving steps and improving efficiency.
  • the metal layer 800 can be formed into a second circuit layer 810 by photolithography.
  • the top surface of the substrate 200 is encapsulated and fixed by the encapsulation layer 700, and the encapsulation layer 700 can provide support for forming the second circuit layer 810, thereby preventing the second circuit layer 810 from being deformed and dislocated, so that the line width of the second circuit layer 810 can be made. It is narrow and the wiring density of the second circuit layer 810 is increased.
  • the parts connected to the connecting portion 320 can be selected as needed.
  • at least two connecting portions 320 have a thickening layer 500, wherein one connecting portion 320 is electrically connected to the chip lead 610 through the thickening layer 500, and another connecting portion 320 is electrically connected to the second circuit layer 810; or The same connection portion 320 is electrically connected to the chip lead 610 through the thickening layer 500 and to the second circuit layer 810.
  • the material of the encapsulation layer 700 may be selected as desired, for example, a resin material is selected as the encapsulation layer 700, and the resin material curing may be sufficiently strong to fix the electronic component, and is sufficient to provide support for the second circuit layer 810.
  • a third circuit layer can be formed on the second insulating layer after the second insulating layer is disposed on the second circuit layer 810, a third insulating layer is disposed on the third circuit layer, and a fourth circuit is formed on the third insulating layer. Layers, and so on, make multi-layer 3D circuits.
  • This embodiment is particularly applicable to the case where the substrate 200 is a flexible circuit board or the substrate 200 is very thin.
  • the support of the carrier 100 can ensure that the substrate 200 and the connection 310 are not deformed. It is conducive to the implementation of various processes.
  • the flexible circuit board is compatible with the thin-density high-density wiring 310 of the present invention, and can be suitably applied to a wearable device; the thin substrate 200 having a thickness can make the substrate 200, the first circuit layer 300, and the chip 600 The overall thickness is very thin and is made into an ultra-thin circuit board.
  • the carrier 100 may be made of glass or metal, and the glass and metal as the carrier 100 have a good flatness and small thermal deformation, which is advantageous for maintaining a reliable connection between the first circuit layer 300 and the chip 600.
  • the metal material is preferably made of stainless steel to provide a high degree of flatness on the stainless steel surface.
  • Choose to The light-transmissive glass is used to form the carrier 100, and the photosensitive adhesive medium 110 is disposed between the carrier 100 and the substrate 200.
  • the light-transmitting property of the glass material can adjust the illumination of the photosensitive adhesive medium 110 from one side of the carrier 100.
  • the carrier 100 is detached from the substrate 200.
  • the carrier 100 is made of a metal material, and a heat-sensitive adhesive medium 110 is disposed between the carrier 100 and the substrate 200.
  • the temperature of the heat-sensitive adhesive medium 110 is adjusted from one side of the carrier 100 to disengage the carrier 100 from the substrate 200.
  • the metal has good thermal conductivity and facilitates the use of the heat-sensitive adhesive medium 110.
  • the metal has high strength and is not easily worn.
  • the carrier plate 100 can be made of stainless steel to prevent rust.
  • the encapsulation layer 700 encapsulates and fixes the first circuit layer 300, then the carrier 100 is detached from the substrate 200, and then a second circuit layer 810 is formed on the bottom surface of the substrate 200, and a connection hole is formed in the substrate 200.
  • a conductor layer is disposed inside, and the conductor layer electrically connects the thickening layer 500 and the second circuit layer 810 as shown in FIG.
  • the carrier 100 and the substrate 200 are detached from the first circuit layer 300 and the chip 600.
  • the chip 600 and the first circuit layer 300 are fixed by the encapsulation layer 700, and the relative positions of the chip are not changed.
  • the carrier 100 and the substrate 200 complete their supporting functions, and the carrier 100 and the substrate 200 are detached, and the first circuit is separated.
  • the layer 300, the chip 600, and the encapsulation layer 700 constitute a circuit board, and the overall thickness of the first circuit layer 300, the chip 600, and the encapsulation layer 700 is reduced, and an ultra-thin circuit board can be obtained.
  • other circuit structures may be formed on the bottom surface of the first circuit layer 300.
  • the second circuit layer 810 is formed on the first insulating layer, and the second circuit layer 810 is provided with the second insulating layer.
  • the layer is formed on the second insulating layer to form a third circuit layer, and so on to make a multilayered 3D circuit.

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Structures For Mounting Electric Components On Printed Circuit Boards (AREA)

Abstract

Disclosed is a circuit line connection method, comprising: arranging a first circuit layer (300) on a substrate (200), the first circuit layer (300) comprising a line (310) and connection portions (320), arranging a protective layer (400) on the first circuit layer (300), wherein the protective layer (400) covers the line (310); the protective layer (400) is provided with operating windows; the connection portions (320) correspond to the operating windows, and manufacturing thickening layers (500) on the connection portions (320) by means of the operating windows, the thickening layers (500) being electrically connected to the connection portions (320); placing an electronic part on the substrate (200), wherein the electronic part is provided with part pins, and the part pins are electrically connected to the thickening layers (500); or the substrate (200) also being provided with a second circuit layer (810), manufacturing connecting holes on the substrate (200), wherein one end of each of the connecting holes is butt-jointed with the connection portions (320), and the other end is butt-jointed with the second circuit layer (810), and arranging conductor layers in the connecting holes, the conductor layers electrically connecting the connection portions (320) to the second circuit layer (810). A high-density line can be obtained, and the line can be protected when a circuit pattern is connected to the outside.

Description

电路连线方法Circuit connection method 技术领域Technical field
本发明属于电子领域,具体涉及一种电路连线方法。The invention belongs to the field of electronics, and in particular relates to a circuit connection method.
背景技术Background technique
电子技术中,通常需要制作电路图案,电路图案包括若干电路连线,通常需要将一些电路连线与另外的线路或者电子元件进行电连接。传统的电路连线方法采用焊接的方式,这种方法容易导致厚度薄的连线烧灼损伤,因此限制了电路图案的精细化,不能获得高密度的电路图案。In electronic technology, it is usually necessary to make a circuit pattern, which includes several circuit connections, and it is usually necessary to electrically connect some circuit wires with another circuit or electronic component. The conventional circuit wiring method uses a soldering method, which is liable to cause a thin-walled burn-in damage, thereby limiting the refinement of the circuit pattern and failing to obtain a high-density circuit pattern.
发明内容Summary of the invention
基于此,本发明在于克服现有技术的缺陷,提供一种电路连线方法,可以获得高密度的连线,在电路图案对外连接时可以保护连线。Based on this, the present invention overcomes the deficiencies of the prior art and provides a circuit wiring method that can obtain a high-density connection and can protect the connection when the circuit pattern is externally connected.
其技术方案如下:Its technical solutions are as follows:
一种电路制造方法,其特征在于,基板上设有第一电路层,所述第一电路层包括连线和连接部,在所述第一电路层上设置保护层,所述保护层覆盖所述连线,所述保护层设有操作窗口,通过所述操作窗口的开口在所述操作窗口内制作增厚层,所述增厚层与所述连线或所述连接部电连接。A circuit manufacturing method is characterized in that a first circuit layer is disposed on a substrate, the first circuit layer includes a connection and a connection portion, and a protection layer is disposed on the first circuit layer, and the protection layer covers the In the connection, the protective layer is provided with an operation window through which an thickened layer is formed in the operation window, and the thickened layer is electrically connected to the connection or the connection portion.
在其中一个实施例中,所述增厚层与所述连接部电连接,将电子零件安放于基板,所述电子零件设有零件引脚,所述零件引脚与所述增厚层电连接。In one embodiment, the thickening layer is electrically connected to the connecting portion, the electronic component is placed on the substrate, the electronic component is provided with a component pin, and the component pin is electrically connected to the thickening layer .
在其中一个实施例中,所述电子零件的零件引脚与所述增厚层焊接。In one of the embodiments, the component leads of the electronic component are soldered to the thickened layer.
在其中一个实施例中,所述连接部为至少两个,至少一个所述连接部上设有所述增厚层。In one embodiment, the connecting portions are at least two, and at least one of the connecting portions is provided with the thickening layer.
在其中一个实施例中,所述基板还设有第二电路层,在所述基板制作连接孔,所述连接部的一侧与所述增厚层电连接,所述连接部的另一侧与所述连接孔对接,所述连接孔还与所述第二电路层对接,在所述连接孔内设置导体层, 所述导体层将所述连接部和所述第二电路层电连接。In one embodiment, the substrate is further provided with a second circuit layer, and a connection hole is formed in the substrate, one side of the connection portion is electrically connected to the thickening layer, and the other side of the connection portion Interfacing with the connection hole, the connection hole also abutting the second circuit layer, and providing a conductor layer in the connection hole, The conductor layer electrically connects the connection portion and the second circuit layer.
在其中一个实施例中,在所述基板上设置封装层,所述电子零件位于所述基板和所述封装层之间,所述封装层将所述电子零件封装固定。In one of the embodiments, an encapsulation layer is disposed on the substrate, the electronic component being located between the substrate and the encapsulation layer, the encapsulation layer securing the electronic component package.
在其中一个实施例中,将基板设置于载板上,在所述载板的支撑下设置所述增厚层、以及制作所述封装层,所述封装层将所述电子零件封装固定后,将所述载板从所述基板上脱离。In one embodiment, the substrate is disposed on the carrier, the thickening layer is disposed under the support of the carrier, and the encapsulation layer is formed, and the encapsulation layer is used to encapsulate the electronic component. The carrier is detached from the substrate.
在其中一个实施例中,将所述载板从所述基板上脱离后,在所述基板的底面制作所述第二电路层。In one embodiment, after the carrier is detached from the substrate, the second circuit layer is formed on the bottom surface of the substrate.
在其中一个实施例中,所述第一电路层、所述电子零件和所述封装层设于所述基板的同一面,所述封装层将所述第一电路层和所述电子零件封装固定。In one embodiment, the first circuit layer, the electronic component, and the encapsulation layer are disposed on a same side of the substrate, and the encapsulation layer fixes the first circuit layer and the electronic component package .
在其中一个实施例中,所述增厚层与所述连接部电连接,向所述基板发射粒子束或光子束,所述粒子束或光子束穿过所述基板在所述基板上制成所述连接孔,所述粒子束或光子束不能穿过所述增厚层构成的整体。In one embodiment, the thickening layer is electrically connected to the connecting portion, and a particle beam or a photon beam is emitted to the substrate, and the particle beam or photon beam is formed on the substrate through the substrate. The connection hole, the particle beam or the photon beam cannot pass through the entirety of the thickened layer.
在其中一个实施例中,所述粒子束为等离子束,或者所述光子束为激光束。In one embodiment, the particle beam is a plasma beam or the photon beam is a laser beam.
在其中一个实施例中,在所述基板的表面设置金属层,所述金属层设有引导孔,所述引导孔与所述连接部对应,向所述基板的底面发射粒子束或光子束,所述粒子束或光子束不能穿过所述金属层,所述粒子束或光子束穿过所述引导孔后在所述基板制成所述连接孔。In one embodiment, a metal layer is disposed on a surface of the substrate, the metal layer is provided with a guiding hole, and the guiding hole corresponds to the connecting portion, and a particle beam or a photon beam is emitted toward a bottom surface of the substrate, The particle beam or photon beam cannot pass through the metal layer, and the particle beam or photon beam passes through the guiding hole to form the connecting hole in the substrate.
在其中一个实施例中,制作所述连接孔后,将所述金属层制成所述第二电路层。In one embodiment, after the connection holes are formed, the metal layer is formed into the second circuit layer.
在其中一个实施例中,所述电子零件为芯片或电子元器件。In one embodiment, the electronic component is a chip or an electronic component.
在其中一个实施例中,所述连线的线宽小于5微米,或所述连线的厚度小于5微米。In one embodiment, the line width of the line is less than 5 microns, or the line has a thickness of less than 5 microns.
在其中一个实施例中,所述连线为至少两条,两条连线之间设有间隙,所述保护层覆盖所述连线之间的间隙。In one embodiment, the wires are at least two, and a gap is provided between the two wires, and the protective layer covers a gap between the wires.
在其中一个实施例中,所述连线的间隙小于10微米。In one of the embodiments, the gap of the wires is less than 10 microns.
在其中一个实施例中,所述增厚层与所述连接部构成的整体的厚度大于所 述连线的厚度。In one embodiment, the thickness of the thickened layer and the connecting portion is greater than that of the whole The thickness of the connection.
在其中一个实施例中,所述增厚层与所述连接部构成的整体的厚度大于10微米。In one embodiment, the thickness of the thickened layer and the joint is greater than 10 microns.
在其中一个实施例中,采用沉金/镍的方法制作所述增厚层。In one of the embodiments, the thickened layer is formed by a method of immersion gold/nickel.
在其中一个实施例中,,所述操作窗口为至少两个。In one of the embodiments, the operation window is at least two.
在其中一个实施例中,将基板设置于载板上,所述载板为所述基板提供支撑,设置所述保护层、或制作所述增厚层、或安放电子零件并将所述电子零件的零件引脚与所述增厚层电连接。In one embodiment, the substrate is disposed on a carrier, the carrier provides support for the substrate, the protective layer is disposed, or the thickened layer is formed, or an electronic component is placed and the electronic component is placed The component leads are electrically connected to the thickened layer.
本发明的有益效果在于:The beneficial effects of the invention are:
1、电路连线方法包括:1. Circuit connection methods include:
基板上设有第一电路层,第一电路层包括连线和连接部,在第一电路层上设置保护层,保护层覆盖连线,保护层设有操作窗口,连接部与操作窗口对应,通过操作窗口,通过所述操作窗口的开口在所述操作窗口内制作增厚层,所述增厚层与所述连线或所述连接部电连接。a first circuit layer is disposed on the substrate, the first circuit layer includes a connection line and a connection portion, a protection layer is disposed on the first circuit layer, the protection layer covers the connection line, the protection layer is provided with an operation window, and the connection portion corresponds to the operation window. A thickened layer is formed in the operating window through the opening of the operating window through an operating window, the thickened layer being electrically connected to the wire or the connecting portion.
在制作第一电路层时,一般同步制作连线和连接部以提高生产效率,连线和连接部的厚度基本相同,制作线宽很窄的连线,使得能够在相同的空间内尽可能多的布置连线,获得高密度的连线,从而获得更多的连接路径、提高电路的数据处理能力。由于连线的高宽比过大容易使连线倾倒粘连造成短路,所以在减小连线线宽的同时,降低连线的厚度,所获得的连接部和连线的厚度都很薄。为了避免厚度很薄的连接部在进行连接时不能承受连接的工艺带来的问题,例如被激光烧坏、被焊接的高温烧坏,或被金属材料钝化或扩散,本发明的方法中:When the first circuit layer is fabricated, the wiring and the connecting portion are generally synchronously manufactured to improve the production efficiency, and the thickness of the connecting portion and the connecting portion are substantially the same, and a line having a narrow line width is formed, so that as many as possible in the same space. The layout is wired to obtain a high-density connection, thereby obtaining more connection paths and improving the data processing capability of the circuit. Since the aspect ratio of the connection is too large, the connection is tilted and the adhesion is short-circuited, so that the thickness of the connection is reduced while the thickness of the connection is reduced, and the thickness of the connection portion and the connection are obtained. In order to avoid problems caused by the connection process when the connection portion having a very thin thickness cannot be subjected to the connection, for example, by laser burnout, high temperature burnt by soldering, or passivation or diffusion by a metal material, in the method of the present invention:
一方面,单独在连接部制作增厚层,用增厚层增加连接部的厚度,增厚层和连接部电连接,使得可以将增厚层或连接部与电子零件或第二电路层电连接扩展电路功能;此时,增厚层和连接部构成的整体的厚度大于连接部自身的厚度,厚度的增加使其可以承受连接的工艺带来的影响,例如,可以抵抗激光的烧灼或者焊接的高温,足够金属钝化或扩散; On one hand, a thickening layer is separately formed at the joint portion, the thickness of the joint portion is increased by the thickening layer, and the thickening layer and the joint portion are electrically connected, so that the thickened layer or the joint portion can be electrically connected to the electronic component or the second circuit layer. Expanding the circuit function; at this time, the thickness of the thickened layer and the connecting portion is greater than the thickness of the connecting portion itself, and the increase in thickness makes it possible to withstand the influence of the joining process, for example, it can resist the burning or welding of the laser. High temperature, sufficient for metal passivation or diffusion;
另一方面,连线被保护层覆盖,保护层为连线提供保护,制作增厚层对连线不造成影响,连线仍然保留原来的很窄的线宽、很薄的厚度(小于10微米),从而获得很高的连线密度,提高电路的数据处理能力;并且在连接工艺中,保护层也能够为连线提供一定的保护作用。On the other hand, the connection is covered by the protective layer, and the protective layer provides protection for the connection. The thickening layer is not affected by the connection. The connection still retains the original narrow line width and thin thickness (less than 10 microns). ), thereby obtaining a high connection density and improving the data processing capability of the circuit; and in the connection process, the protective layer can also provide a certain protection for the connection.
其中,连线的线宽是指连线的横截面的宽度,参照图4中D1所示;连线的厚度是指连线横截面的高度,参照图4中H所示。Wherein, the line width of the connection refers to the width of the cross section of the connection, as shown by D1 in FIG. 4; the thickness of the connection refers to the height of the cross section of the connection, as shown by H in FIG.
此外,由于本发明的方法制成的连线密度高、厚度薄、线宽窄,因此容错能力弱,应在各种工艺中尽量避免连线位移或变形带来的错位,设置保护层覆盖连线还可以限制连线的错位,进一步提高良率。In addition, since the method of the invention has high connection density, thin thickness and narrow line width, the fault tolerance is weak, and the misalignment caused by the displacement or deformation of the connection should be avoided in various processes, and the protective layer is covered to cover the connection. It is also possible to limit the misalignment of the connection and further increase the yield.
2、将电子零件安放于基板,电子零件设有零件引脚,零件引脚与增厚层电连接;电子零件的零件引脚与增厚层焊接。增厚层带来的厚度的增加,使其可以承受焊接带来的影响,例如焊接的高温;或者焊接使用焊锡等助焊剂时,增厚层的厚度足够助焊剂带来的金属扩散和钝化。2. The electronic components are placed on the substrate, the electronic components are provided with component leads, and the component leads are electrically connected with the thickened layer; the parts of the electronic components are soldered to the thickened layer. The thickness of the thickened layer is increased to withstand the effects of soldering, such as the high temperature of soldering; or when soldering is used, such as solder, the thickness of the thickened layer is sufficient for metal diffusion and passivation by the flux. .
3、采用沉金/镍的方法(electroless plating)制作所述增厚层。可以对基板上所有连接部同步制作增厚层,效率高。同时,增厚层可以采用与连接部相同的材料,增厚层和连接部融合更好、电连接性能更好。3. The thickened layer is formed by electroless plating. It is possible to simultaneously form a thickened layer on all the connecting portions on the substrate, which is highly efficient. At the same time, the thickening layer can be made of the same material as the connecting portion, the thickening layer and the connecting portion are better integrated, and the electrical connection performance is better.
4、基板还设有第二电路层,在基板制作连接孔,连接孔一端与连接部对接、另一端与第二电路层对接,在连接孔内设置导体层,导体层将连接部和第二电路层电连接。将基板设置于载板上,所述载板为所述基板提供支撑,设置所述保护层、或制作所述增厚层、或安放所述电子零件、或将所述零件引脚与所述增厚层电连接。由于本发明的方法制成的连线密度高、厚度薄、线宽窄,因此容错能力弱,采用载板作为基板的支撑,可以保持连线位置固定,限制连线的错位。4. The substrate is further provided with a second circuit layer, and a connection hole is formed in the substrate. One end of the connection hole is butted to the connection portion, and the other end is butted to the second circuit layer. A conductor layer is disposed in the connection hole, and the conductor layer is connected to the second portion. The circuit layers are electrically connected. Providing a substrate on a carrier, the carrier providing support for the substrate, providing the protective layer, or fabricating the thickened layer, or placing the electronic component, or placing the component pin with the Thickened layers are electrically connected. Since the method of the invention has high connection density, thin thickness and narrow line width, the fault tolerance is weak, and the support plate is used as the support of the substrate, so that the connection position can be kept fixed and the misalignment of the connection can be restricted.
特别是,当基板为柔性电路板或者基板厚度薄时,当薄的或软的基板不足以提供支撑时,载板的支撑可以保证基板、连线不变形,利于各种工艺的实施。其中柔性电路板配合本发明中厚度很薄的高密度连线可以很好地适用于可穿戴设备中;采用厚度的薄的基板可以使得基板、第一电路层、和电子零件构成的 整体厚度很薄,制成超薄电路板。In particular, when the substrate is a flexible circuit board or the substrate thickness is thin, when the thin or soft substrate is insufficient to provide support, the support of the carrier plate can ensure that the substrate and the connection are not deformed, which is advantageous for implementation of various processes. The flexible circuit board is suitable for use in a wearable device in combination with the thin-walled high-density wiring of the present invention; the thin substrate of the thickness can be used to form the substrate, the first circuit layer, and the electronic component. The overall thickness is very thin and made into an ultra-thin circuit board.
5、在基板上设置封装层,电子零件位于基板和封装层之间,封装层将电子零件封装固定。封装层对电子零件起定位、固定的作用,将电力零件和连线、连接部、增厚层的相对位置固定,限制错位。5. An encapsulation layer is disposed on the substrate, the electronic component is located between the substrate and the encapsulation layer, and the encapsulation layer encapsulates the electronic component. The encapsulation layer fixes and fixes the electronic components, and fixes the relative positions of the electric components and the wires, the connecting portions, and the thickened layers to limit the misalignment.
6、封装层将电子零件封装固定后,将载板从基板上脱离,电子零件被封装层固定,位置不再发生改变,此时载板完成其支撑作用,可以将载板从基板上脱离,使基板、第一电路层和电子零件构成的整体厚度降低,可以获得超薄电路板。6. After the package layer is fixed by the electronic component, the carrier board is detached from the substrate, the electronic component is fixed by the encapsulation layer, and the position is no longer changed. At this time, the carrier board completes its supporting function, and the carrier board can be detached from the substrate. By reducing the overall thickness of the substrate, the first circuit layer, and the electronic component, an ultra-thin circuit board can be obtained.
7、将载板从基板上脱离后,在基板的底面制作第二电路层。在基板的底面制作第二电路层并将第一电路层和第二电路层连接可以获得更多电路连接,提高电路的整体性能。并且基板的顶面被封装层封装固定,封装层可以为制作第二电路层提供支撑,避免第二电路层变形错位,使得可以将第二电路层的线宽制作得很窄,提高第二电路层的布线密度。7. After the carrier is detached from the substrate, a second circuit layer is formed on the bottom surface of the substrate. Making a second circuit layer on the bottom surface of the substrate and connecting the first circuit layer and the second circuit layer can achieve more circuit connections and improve the overall performance of the circuit. And the top surface of the substrate is packaged and fixed by the encapsulation layer, and the encapsulation layer can provide support for forming the second circuit layer, thereby avoiding deformation and dislocation of the second circuit layer, so that the line width of the second circuit layer can be made narrow, and the second circuit is improved. The wiring density of the layer.
根据需要可以选择封装层的材料,例如选择树脂材料作为封装层,树脂材料固化可以足够坚固来固定电子零件,也足够为制作第二电路层提供支撑。并且,可以在第二电路层上设置第二绝缘层后在第二绝缘层上制作第三电路层,在第三电路层上设置第三绝缘层后在第三绝缘层上制作第四电路层,以此类推制作多层的3D电路。The material of the encapsulating layer can be selected as needed, for example, a resin material is selected as the encapsulating layer, and the curing of the resin material can be sufficiently strong to fix the electronic component, and is sufficient to provide support for the second circuit layer. And, after the second insulating layer is disposed on the second circuit layer, the third circuit layer is formed on the second insulating layer, the third insulating layer is disposed on the third circuit layer, and the fourth circuit layer is formed on the third insulating layer. , and so on, to make multi-layer 3D circuits.
8、第一电路层、电子零件和封装层设于基板的顶面,封装层同时将第一电路层和电子零件封装固定,限定电子零件和第一电路层之间的位置,保证电子零件和第一电路层之间的连接可靠。8. The first circuit layer, the electronic component and the encapsulation layer are disposed on the top surface of the substrate, and the encapsulation layer simultaneously fixes the first circuit layer and the electronic component package, defines a position between the electronic component and the first circuit layer, and ensures the electronic component and The connection between the first circuit layers is reliable.
9、封装层将第一电路层和电子零件封装固定后,将载板和基板从第一电路层和电子零件上脱离。电子零件和第一电路层被封装层固定,其相对位置不再发生改变,此时载板和基板完成其支撑作用,可以将载板和基板脱离,脱离后第一电路层、电子零件和封装层构成电路板,使第一电路层、电子零件和封装层构成的整体厚度降低,可以获得超薄电路板。脱离后,也可以在第一电路层的底面制作其他的电路结构,例如设置第一绝缘层后在第一绝缘层上制作第 二电路层,在第二电路层上设置第二绝缘层并在第二绝缘层上制作第三电路层,以此类推制作多层的3D电路。9. After the encapsulation layer fixes the first circuit layer and the electronic component package, the carrier board and the substrate are separated from the first circuit layer and the electronic component. The electronic component and the first circuit layer are fixed by the encapsulation layer, and the relative positions thereof are no longer changed. At this time, the carrier board and the substrate complete the supporting action, and the carrier board and the substrate can be detached, and the first circuit layer, the electronic component and the package are separated from the substrate. The layers constitute a circuit board, and the overall thickness of the first circuit layer, the electronic component, and the package layer is reduced, and an ultra-thin circuit board can be obtained. After the detachment, other circuit structures may be formed on the bottom surface of the first circuit layer, for example, after the first insulating layer is provided, the first insulating layer is fabricated. The second circuit layer is provided with a second insulating layer on the second circuit layer and a third circuit layer on the second insulating layer, and so on.
10、向基板发射粒子束或光子束,粒子束或光子束穿过基板在基板上制成连接孔,粒子束或光子束不能穿过连接部和增厚层构成的整体。可以向整个基板同步发射粒子束或光子束,同步制作所有的连接孔,提高生产效率。10. A particle beam or a photon beam is emitted to the substrate, and the particle beam or the photon beam passes through the substrate to form a connection hole on the substrate, and the particle beam or the photon beam cannot pass through the entirety of the connection portion and the thickening layer. It is possible to simultaneously emit a particle beam or a photon beam to the entire substrate, and simultaneously make all the connection holes to improve production efficiency.
11、在基板的底面设置金属层,金属层设有引导孔,引导孔与连接部对应,向基板的底面发射粒子束或光子束,粒子束或光子束不能穿过金属层,粒子束或光子束穿过引导孔后在基板制成连接孔。引导孔为制作连接孔提供定位,只有在设置了引导孔的位置才能制成连接孔。可以向整个基板同步发射粒子束或光子束,同步制作所有的连接孔,提高生产效率。11. A metal layer is disposed on the bottom surface of the substrate, and the metal layer is provided with a guiding hole corresponding to the connecting portion, and a particle beam or a photon beam is emitted toward the bottom surface of the substrate, and the particle beam or the photon beam cannot pass through the metal layer, the particle beam or the photon. After the bundle passes through the guide hole, a connection hole is formed in the substrate. The guiding hole provides positioning for making the connecting hole, and the connecting hole can be made only at the position where the guiding hole is provided. It is possible to simultaneously emit a particle beam or a photon beam to the entire substrate, and simultaneously make all the connection holes to improve production efficiency.
12、制作连接孔后,将金属层制成第二电路层。金属层既可以为制作连接孔提供定位,同时也是制作第二电路层的原料,节约步骤,提高效率。可以采用光蚀刻的方式将所述金属层制成所述第二电路层。12. After the connection hole is formed, the metal layer is made into the second circuit layer. The metal layer can provide positioning for making the connection holes, and is also a raw material for making the second circuit layer, saving steps and improving efficiency. The metal layer may be formed into the second circuit layer by photolithography.
13、电子零件为芯片或电子元器件。当电子零件为芯片时,由于芯片运算速度快,要求跟快的数据传输速度,本发明获得的高密度连线可以为芯片提供更多的连线、提高数据传输速度。13. Electronic components are chips or electronic components. When the electronic component is a chip, the high-density connection obtained by the present invention can provide more connection and increase the data transmission speed of the chip due to the fast calculation speed of the chip and the fast data transmission speed.
14、连线的线宽小于5微米,连线的线宽越小,越可以在相同的空间内布置更多的连线。14. The line width of the connection is less than 5 microns. The smaller the line width of the connection, the more the connection can be arranged in the same space.
或者,连线的厚度小于5微米,一方面,连线的厚度与线宽对应,避免连线倾倒粘连。另一方面,采用本发明的方法,连线的厚度不影响连接部的连接,可以将连线厚度做得尽量小。Alternatively, the thickness of the connection is less than 5 microns. On the one hand, the thickness of the connection corresponds to the line width to prevent the connection from sticking. On the other hand, with the method of the present invention, the thickness of the wiring does not affect the connection of the connecting portion, and the thickness of the wiring can be made as small as possible.
15、连线为至少两条,两条连线之间设有间隙,保护层覆盖连线之间的间隙。保护层覆盖连线的表面以及侧面,除了可以保护连线表面外,也能保护连线之间不会发生短路。特别是,沉金/镍的方法等方法制作增厚层可以对基板上所有连接部同步制作增厚层,效率高,当采用蒸镀、溅镀、电镀等方法制作增厚层时,保护层覆盖连线以及连线之间的间隙,既不会在连线的高度方向生长金属、也不会再连线的厚度方向生长金属,连线保持原有的高密度状态不受影 响。而连接部之间的预留足够间隙避免在连接部厚度方向生长金属造成的影响。15. The connection is at least two, and there is a gap between the two lines, and the protective layer covers the gap between the lines. The protective layer covers the surface and side of the wire. In addition to protecting the wire surface, it also protects the cable from short-circuiting. In particular, the thick gold layer can be used to form a thickened layer simultaneously on all the joints on the substrate, and the efficiency is high. When a thickened layer is formed by evaporation, sputtering, electroplating, etc., the protective layer is used. Covering the gap between the wires and the wires, the metal is not grown in the height direction of the wires, and the metal is not grown in the thickness direction of the wires. The wires maintain the original high density state without being affected. ring. A sufficient gap is reserved between the connecting portions to avoid the influence of metal growth in the thickness direction of the connecting portion.
16、连线的间隙小于10微米。连线的间隙越小,越可以在相同的空间内布置更多的连线。其中,两个连线的间隙宽度参照图4中D2所示。16. The gap between the wires is less than 10 microns. The smaller the gap between the wires, the more wires can be placed in the same space. The gap width of the two wires is shown as D2 in FIG.
17、增厚层与连接部构成的整体的厚度大于连线的厚度。采用本发明的方法,单独在连接部设置增厚度而不破坏连线的原有线宽和厚度,增加的厚度有助于将连接部或增厚层与电子元件或第二电路层电连接。17. The thickness of the entire thickened layer and the connecting portion is greater than the thickness of the connecting line. With the method of the present invention, the thickening is provided separately at the joint without breaking the original line width and thickness of the wire, and the increased thickness helps to electrically connect the joint or thickened layer to the electronic component or the second circuit layer.
18、连接部为至少两个,至少一个连接部上设有增厚层。连接部也可以是触点,根据情况在需要增加厚度的连接部制作连接部。18. The connecting portion is at least two, and at least one connecting portion is provided with a thickening layer. The connecting portion may be a contact, and a connecting portion may be formed in a connecting portion that requires an increased thickness as the case may be.
19、至少两个连接部上有增厚层,其中一个连接部通过增厚层与零件引脚电连接,另有一个连接部与第二电路层电连接。根据需要,可以选择与连接部连接的零件。19. The at least two connecting portions have a thickened layer, wherein one of the connecting portions is electrically connected to the component pins through the thickening layer, and the other connecting portion is electrically connected to the second circuit layer. Parts that are connected to the connection can be selected as needed.
附图说明DRAWINGS
图1为本发明实施例一芯片连线方法示意图;1 is a schematic diagram of a chip connection method according to an embodiment of the present invention;
图2为图1中A的放大图;Figure 2 is an enlarged view of A in Figure 1;
图3为图3的俯视图;Figure 3 is a plan view of Figure 3;
图4为本发明实施例一连线的线宽、厚度、间距的示意图;4 is a schematic view showing line width, thickness, and spacing of a connection according to an embodiment of the present invention;
图5为本发明实施例一设置保护层的示意图;FIG. 5 is a schematic diagram of a protective layer according to an embodiment of the present invention; FIG.
图6为本发明实施例一设置增厚层的示意图6 is a schematic view of a thickening layer according to an embodiment of the present invention;
图7为本发明实施例一安装芯片的示意图;FIG. 7 is a schematic diagram of a chip mounted according to an embodiment of the present invention; FIG.
图8为本发明实施例一封装层封装的示意图;FIG. 8 is a schematic diagram of an encapsulation layer package according to an embodiment of the present invention; FIG.
图9为本发明实施例一载板脱离后的示意图;9 is a schematic view of a carrier after being detached according to an embodiment of the present invention;
图10为本发明实施例一制作连接孔的示意图;FIG. 10 is a schematic diagram of making a connection hole according to an embodiment of the present invention; FIG.
图11为本发明实施例一设置导体层的示意图;11 is a schematic view showing a conductor layer provided in an embodiment of the present invention;
图12为本发明实施例二芯片连线方法示意图。FIG. 12 is a schematic diagram of a method for connecting a chip according to an embodiment of the present invention.
附图标记说明: Description of the reference signs:
100、载板,110、粘接介质,200、基板,300、第一电路层,310、连线,320、连接部,400、保护层,500、增厚层,510、助焊剂,600、芯片,610、芯片引脚,620、粘装层,700、封装层,800、金属层,810、第二电路层,900、激光。100, carrier board, 110, bonding medium, 200, substrate, 300, first circuit layer, 310, wiring, 320, connection, 400, protective layer, 500, thickening layer, 510, flux, 600, Chip, 610, chip pin, 620, adhesive layer, 700, encapsulation layer, 800, metal layer, 810, second circuit layer, 900, laser.
具体实施方式detailed description
下面对本发明作进一步详细说明,但本发明的实施方式不限于此。The present invention will be further described in detail below, but embodiments of the invention are not limited thereto.
实施例一 Embodiment 1
如图1所示,是本实施例芯片连线方法的结构剖视图,将基板200设于载板100上,以载板100作为支撑,在基板200上制作第一电路层300)在基板200上设置第一电路层300,(不限于本实施例,也可以在基板200上设置好第一电路层300后,再讲基板200和第一电路层300转移安放在载板100上)。As shown in FIG. 1 , it is a structural cross-sectional view of the chip connection method of the present embodiment. The substrate 200 is disposed on the carrier 100 , and the first circuit layer 300 is formed on the substrate 200 by using the carrier 100 as a support. The first circuit layer 300 is disposed. (Unless limited to the embodiment, the first circuit layer 300 may be disposed on the substrate 200, and then the substrate 200 and the first circuit layer 300 may be transferred to the carrier 100).
第一电路层300包括连线310和连接部320。连线310的线宽小于5微米,连线310的线宽是指连线310的横截面的宽度,参照图4中D1所示,连线310的线宽越小,越可以在相同的空间内布置更多的连线310。连线310的厚度小于5微米,连线310的厚度是指连线310横截面的高度,参照图4中H所示。一方面,连线310的厚度与线宽对应,避免连线310倾倒粘连。另一方面,采用本发明的方法,连线310的厚度不影响连接部320的连接,可以将连线310厚度做得尽量小。连线310为至少两条,两条连线310之间设有间隙,连线310的间隙小于10微米。连线310的间隙越小,越可以在相同的空间内布置更多的连线310,两个连线310的间隙宽度参照图4中D2所示。连接部320为至少两个,一个操作窗口可以对应一个或多个连接部320。The first circuit layer 300 includes a wire 310 and a connection 320. The line width of the connection line 310 is less than 5 micrometers, and the line width of the connection line 310 refers to the width of the cross section of the connection line 310. As shown by D1 in FIG. 4, the smaller the line width of the connection line 310, the more space can be in the same space. More connections 310 are placed inside. The thickness of the wire 310 is less than 5 microns, and the thickness of the wire 310 refers to the height of the cross section of the wire 310, as shown by H in FIG. In one aspect, the thickness of the wire 310 corresponds to the line width to prevent the wire 310 from tipping over. On the other hand, with the method of the present invention, the thickness of the wiring 310 does not affect the connection of the connecting portion 320, and the thickness of the wiring 310 can be made as small as possible. The connection line 310 is at least two, and a gap is provided between the two lines 310, and the gap of the connection line 310 is less than 10 micrometers. The smaller the gap of the wiring 310, the more the wiring 310 can be arranged in the same space, and the gap width of the two wirings 310 is as shown by D2 in FIG. The connecting portions 320 are at least two, and one operating window may correspond to one or more connecting portions 320.
在制作第一电路层300时,一般同步制作连线310和连接部320以提高生产效率,连线310和连接部320的厚度基本相同,本实施例中,在基板200的顶面设置一层金属材料,将这层金属材料制成连线310和连接部320,二者材料相同,如图2、3所示,连线310和连接部320的厚度一致、并且本身构成一个整体,但不限于图2、3所示,连线310和连接部320也可以是其它形状。 When the first circuit layer 300 is formed, the connection 310 and the connection portion 320 are generally synchronously formed to improve the production efficiency. The thickness of the connection 310 and the connection portion 320 are substantially the same. In this embodiment, a layer is disposed on the top surface of the substrate 200. Metal material, the metal material is made into a wire 310 and a connecting portion 320, and the materials are the same. As shown in FIG. 2 and FIG. 3, the thickness of the connecting wire 310 and the connecting portion 320 are the same, and constitute a whole, but not Limited to FIGS. 2 and 3, the wire 310 and the connecting portion 320 may have other shapes.
如图5所示,在第一电路层300上设置保护层400,保护层400覆盖连线310,保护层400设有操作窗口,连接部320与操作窗口对应,操作窗口可以将连接部320暴露出来,通过操作窗口可以将连接部320与另外的电子设备连接,也可以将连接部320作为连接的触点。保护层400为连线310提供遮蔽和保护,可避免后续工艺损坏连线310,并且由于本发明中连线310的线宽窄、厚度薄、间距小,设置保护层400可以避免连线310之间的误连接。As shown in FIG. 5, a protective layer 400 is disposed on the first circuit layer 300. The protective layer 400 covers the connection 310. The protective layer 400 is provided with an operation window. The connection portion 320 corresponds to the operation window, and the operation window can expose the connection portion 320. The connection portion 320 can be connected to another electronic device through the operation window, or the connection portion 320 can be used as a connection contact. The protective layer 400 provides shielding and protection for the connection 310, which can prevent the subsequent process from damaging the connection 310. Since the line width of the connection 310 is narrow, the thickness is small, and the pitch is small, the protective layer 400 can be disposed between the connections 310. Misconnection.
如图6所示,通过操作窗口,采用沉金/镍的方法或电镀方法在连接部320上制作增厚层500,增厚层500与连接部320电连接。至少一个连接部320上设有增厚层500。连接部320也可以是触点,根据情况在需要增加厚度的连接部320制作连接部320。所获得的增厚层500与连接部320构成的整体的厚度大于连线310的厚度。本实施例中增厚层500采用与连接部320相同的材料,增厚层500和连接部320融合更好、电连接性能更好。一方面,单独在连接部320设置增厚度而不破坏连线310的原有线宽和厚度,用增厚层500增加连接部320的厚度,使得可以将增厚层500承受连接的工艺带来的影响,例如,可以抵抗激光900的烧灼或者焊接的高温,足够金属钝化或扩散;另一方面,连线310被保护层400覆盖,保护层400为连线310提供保护,制作增厚层500对连线310不造成影响,连线310仍然保留原来的很窄的线宽、很薄的厚度(小于10微米),从而获得很高的连线310密度,提高电路的数据处理能力;并且在连接工艺中,保护层400也能够为连线310提供一定的保护作用。此外,采用蒸镀、溅镀、或电镀的方法制作增厚层500。可以对基板200上所有连接部320同步制作增厚层500,效率高。As shown in FIG. 6, a thickening layer 500 is formed on the connecting portion 320 by an immersion gold/nickel method or an electroplating method through an operation window, and the thickening layer 500 is electrically connected to the connecting portion 320. A thickening layer 500 is disposed on at least one of the connecting portions 320. The connecting portion 320 may be a contact, and the connecting portion 320 may be formed in the connecting portion 320 where the thickness is increased, as the case may be. The thickness of the obtained thickened layer 500 and the connecting portion 320 as a whole is greater than the thickness of the connecting line 310. In the present embodiment, the thickening layer 500 is made of the same material as the connecting portion 320, and the thickening layer 500 and the connecting portion 320 are better integrated and the electrical connection performance is better. On the one hand, the thickness is increased in the connecting portion 320 alone without breaking the original line width and thickness of the connecting line 310, and the thickness of the connecting portion 320 is increased by the thickening layer 500, so that the thickening layer 500 can be subjected to the joining process. The effect, for example, can resist the high temperature of the cauterization or soldering of the laser 900, sufficient metal passivation or diffusion; on the other hand, the wiring 310 is covered by the protective layer 400, and the protective layer 400 provides protection for the wiring 310 to form the thickening layer 500. No impact on the connection 310, the connection 310 still retains the original narrow line width, very thin thickness (less than 10 microns), thereby obtaining a high density of the connection 310, improving the data processing capability of the circuit; In the bonding process, the protective layer 400 can also provide a certain protection for the wiring 310. Further, the thickened layer 500 is formed by a method of vapor deposition, sputtering, or electroplating. The thickening layer 500 can be formed simultaneously on all the connecting portions 320 on the substrate 200, and the efficiency is high.
其中,保护层400覆盖连线310之间的间隙。保护层400覆盖连线310的表面以及侧面,除了可以保护连线310表面外,也能保护连线310之间不会发生短路。特别是,沉金/镍的方法制作增厚层500可以对基板200上所有连接部320同步制作增厚层500,效率高,当采用沉金/镍的方法制作增厚层500时,保护层400覆盖连线310以及连线310之间的间隙,既不会在连线310的高度方向生长金属、也不会再连线310的厚度方向生长金属,连线310保持原有的 高密度状态不受影响。而连接部320之间的预留足够间隙避免在连接部320厚度方向生长金属造成的影响。Wherein, the protective layer 400 covers the gap between the wires 310. The protective layer 400 covers the surface and the side of the wiring 310, and in addition to protecting the surface of the wiring 310, it can protect the connection 310 from short-circuiting. In particular, the immersion gold/nickel method for forming the thickening layer 500 can simultaneously form the thickening layer 500 on all the connecting portions 320 on the substrate 200, and the efficiency is high. When the thickening layer 500 is formed by the method of immersion gold/nickel, the protective layer 400 covers the gap between the connection line 310 and the connection line 310, neither the metal is grown in the height direction of the connection line 310 nor the metal is grown in the thickness direction of the connection line 310, and the connection line 310 remains original. The high density state is not affected. Further, a sufficient gap is reserved between the connecting portions 320 to avoid the influence of the growth of metal in the thickness direction of the connecting portion 320.
制作所述增厚层500之后,就可以将电子零件安放于基板200,电子零件设有零件引脚,零件引脚与增厚层500电连接,实现电子零件和第一电路层300的电连接。电子零件为芯片600或电子元器件,电子元器件包括但不限于电阻、电容、二极管、三极管、天线等电子元件或器件,本实施例中,电子零件为芯片600,如图7所示,将芯片600通过粘装层620粘贴于基板200,芯片600设有芯片引脚610,将芯片引脚610通过助焊剂510焊接于增厚层500上,实现芯片600与第一电路层300的电连接。增厚层500带来的厚度的增加,使其可以承受焊接带来的影响,例如焊接的高温;或者焊接使用焊锡等助焊剂510时,增厚层500的厚度足够助焊剂510带来的金属扩散和钝化。After the thickening layer 500 is formed, the electronic component can be placed on the substrate 200, the electronic component is provided with a component pin, and the component pin is electrically connected to the thickening layer 500 to realize electrical connection between the electronic component and the first circuit layer 300. . The electronic component is a chip 600 or an electronic component, and the electronic component includes but is not limited to an electronic component or device such as a resistor, a capacitor, a diode, a triode, an antenna, etc. In this embodiment, the electronic component is a chip 600, as shown in FIG. The chip 600 is adhered to the substrate 200 through the adhesive layer 620. The chip 600 is provided with a chip lead 610, and the chip lead 610 is soldered to the thickening layer 500 through the flux 510 to realize electrical connection between the chip 600 and the first circuit layer 300. . The thickness of the thickening layer 500 is increased to withstand the influence of soldering, such as high temperature of soldering; or when the solder 510 such as solder is used for soldering, the thickness of the thickening layer 500 is sufficient for the metal brought by the flux 510. Diffusion and passivation.
如图8所示,在基板200上设置封装层700,芯片600、第一电路层300位于基板200和封装层700之间,封装层700同时将第一电路层300和电子零件封装固定,限定电子零件和第一电路层300之间的位置,保证电子零件和第一电路层300之间的连接可靠。As shown in FIG. 8, an encapsulation layer 700 is disposed on the substrate 200. The chip 600 and the first circuit layer 300 are located between the substrate 200 and the encapsulation layer 700. The encapsulation layer 700 simultaneously fixes the first circuit layer 300 and the electronic component package, and is defined. The position between the electronic component and the first circuit layer 300 ensures a reliable connection between the electronic component and the first circuit layer 300.
如图9所示,封装层700将电子零件封装固定后,将载板100从基板200上脱离,芯片600和第一电路层300位被封装层700固定,位置不再发生改变,此时载板100完成其支撑作用,可以将载板100从基板200上脱离,使基板200、第一电路层300和芯片600构成的整体厚度降低,可以获得超薄电路板。As shown in FIG. 9, after the package layer 700 is fixed by the electronic component package, the carrier 100 is detached from the substrate 200, and the chip 600 and the first circuit layer 300 are fixed by the package layer 700, and the position is no longer changed. The board 100 completes its supporting function, and the carrier board 100 can be detached from the substrate 200, so that the overall thickness of the substrate 200, the first circuit layer 300, and the chip 600 is reduced, and an ultra-thin circuit board can be obtained.
将载板100从基板200上脱离后,在基板200的底面设置金属层800,如图10所示,金属层800设有引导孔,引导孔与连接部320对应,向基板200的底面发射粒子束或光子束,粒子束包括但不限于等离子束,光子束包括但不限于激光900束。本实施例中,采用激光900束,激光900束不能穿过金属层800,激光900束通过引导孔后在基板200制成连接孔。引导孔为制作连接孔提供定位,只有在设置了引导孔的位置才能制成连接孔。粒子束或光子束不能穿过连接部和所述增厚层构成的整体,避免细小的连接部被粒子束或激光束伤害,保证连接部的完整。因此,可以将连接部做的更细小更薄、提高连接部的密度, 从而可以设置更高密度的电连接线路,提高数据传输速度。此外,可以向整个基板200同步发射激光900束,同步制作所有的连接孔,提高生产效率。After the carrier 100 is detached from the substrate 200, a metal layer 800 is provided on the bottom surface of the substrate 200. As shown in FIG. 10, the metal layer 800 is provided with a guiding hole, and the guiding hole corresponds to the connecting portion 320, and emits particles toward the bottom surface of the substrate 200. A beam or photon beam, including but not limited to a plasma beam, including but not limited to a laser 900 beam. In this embodiment, a laser beam 900 is used, and the laser beam 900 cannot pass through the metal layer 800. After the laser beam 900 passes through the guiding hole, a connection hole is formed in the substrate 200. The guiding hole provides positioning for making the connecting hole, and the connecting hole can be made only at the position where the guiding hole is provided. The particle beam or the photon beam cannot pass through the entirety of the connecting portion and the thickened layer, and the fine connecting portion is prevented from being damaged by the particle beam or the laser beam, thereby ensuring the integrity of the connecting portion. Therefore, the connection portion can be made thinner and thinner, and the density of the connection portion can be increased. Thereby, a higher density electrical connection line can be set to increase the data transmission speed. In addition, it is possible to simultaneously emit a laser beam 900 to the entire substrate 200, and simultaneously make all the connection holes, thereby improving production efficiency.
如图11所示,制作连接孔后,将金属层800制成第二电路层810,在连接孔内设置导体层,导体层将增厚层500和金属层800或第二电路层810电连接。金属层800既可以为制作连接孔提供定位,同时也是制作第二电路层810的原料,节约步骤,提高效率。可以采用光蚀刻的方式将金属层800制成第二电路层810。此时,基板200的顶面被封装层700封装固定,封装层700可以为制作第二电路层810提供支撑,避免第二电路层810变形错位,使得可以将第二电路层810的线宽制作得很窄,提高第二电路层810的布线密度。As shown in FIG. 11, after the connection hole is formed, the metal layer 800 is formed into a second circuit layer 810, and a conductor layer is disposed in the connection hole, and the conductor layer electrically connects the thickening layer 500 and the metal layer 800 or the second circuit layer 810. . The metal layer 800 can provide positioning for making the connection holes, and is also a raw material for fabricating the second circuit layer 810, saving steps and improving efficiency. The metal layer 800 can be formed into a second circuit layer 810 by photolithography. At this time, the top surface of the substrate 200 is encapsulated and fixed by the encapsulation layer 700, and the encapsulation layer 700 can provide support for forming the second circuit layer 810, thereby preventing the second circuit layer 810 from being deformed and dislocated, so that the line width of the second circuit layer 810 can be made. It is narrow and the wiring density of the second circuit layer 810 is increased.
根据需要,可以选择与连接部320连接的零件。例如,至少两个连接部320上有增厚层500,其中一个连接部320通过增厚层500与芯片引脚610电连接,另有一个连接部320与第二电路层810电连接;或者,同一个连接部320,既通过增厚层500与芯片引脚610电连接、又与第二电路层810电连接。The parts connected to the connecting portion 320 can be selected as needed. For example, at least two connecting portions 320 have a thickening layer 500, wherein one connecting portion 320 is electrically connected to the chip lead 610 through the thickening layer 500, and another connecting portion 320 is electrically connected to the second circuit layer 810; or The same connection portion 320 is electrically connected to the chip lead 610 through the thickening layer 500 and to the second circuit layer 810.
根据需要,可以选择封装层700的材料,例如选择树脂材料作为封装层700,树脂材料固化可以足够坚固来固定电子零件,也足够为制作第二电路层810提供支撑。并且,可以在第二电路层810上设置第二绝缘层后在第二绝缘层上制作第三电路层,在第三电路层上设置第三绝缘层后在第三绝缘层上制作第四电路层,以此类推制作多层的3D电路。The material of the encapsulation layer 700 may be selected as desired, for example, a resin material is selected as the encapsulation layer 700, and the resin material curing may be sufficiently strong to fix the electronic component, and is sufficient to provide support for the second circuit layer 810. Moreover, a third circuit layer can be formed on the second insulating layer after the second insulating layer is disposed on the second circuit layer 810, a third insulating layer is disposed on the third circuit layer, and a fourth circuit is formed on the third insulating layer. Layers, and so on, make multi-layer 3D circuits.
本实施例特别适用于基板200为柔性电路板或者基板200厚度很薄的情况,当薄的或软的基板200不足以提供支撑时,载板100的支撑可以保证基板200、连线310不变形,利于各种工艺的实施。其中柔性电路板配合本发明中厚度很薄的高密度连线310可以很好地适用于可穿戴设备中;采用厚度的薄的基板200可以使得基板200、第一电路层300、和芯片600构成的整体厚度很薄,制成超薄电路板。This embodiment is particularly applicable to the case where the substrate 200 is a flexible circuit board or the substrate 200 is very thin. When the thin or soft substrate 200 is insufficient to provide support, the support of the carrier 100 can ensure that the substrate 200 and the connection 310 are not deformed. It is conducive to the implementation of various processes. The flexible circuit board is compatible with the thin-density high-density wiring 310 of the present invention, and can be suitably applied to a wearable device; the thin substrate 200 having a thickness can make the substrate 200, the first circuit layer 300, and the chip 600 The overall thickness is very thin and is made into an ultra-thin circuit board.
如图1所示,载板100可以采用玻璃或金属,玻璃和金属作为载板100具有很好地平整度,并且热变形小,有利于保持第一电路层300和芯片600之间的连接可靠。金属材质优选采用不锈钢,使不锈钢表面具有高平整度。选择可 透光的玻璃制作载板100,载板100和基板200之间设置光敏粘接介质110,利用玻璃材质的透光性能,可以从载板100的一侧调节对光敏粘贴介质110的光照,使载板100与基板200脱离。载板100为金属材质,载板100和基板200之间设置热敏粘接介质110,从载板100的一侧对调节热敏粘接介质110的温度,使载板100与基板200脱离。金属的导热性良好,利于采用热敏粘接介质110。并且金属强度高、不易磨损,例如可以采用不锈钢制作载板100,可以防止生锈。As shown in FIG. 1, the carrier 100 may be made of glass or metal, and the glass and metal as the carrier 100 have a good flatness and small thermal deformation, which is advantageous for maintaining a reliable connection between the first circuit layer 300 and the chip 600. . The metal material is preferably made of stainless steel to provide a high degree of flatness on the stainless steel surface. Choose to The light-transmissive glass is used to form the carrier 100, and the photosensitive adhesive medium 110 is disposed between the carrier 100 and the substrate 200. The light-transmitting property of the glass material can adjust the illumination of the photosensitive adhesive medium 110 from one side of the carrier 100. The carrier 100 is detached from the substrate 200. The carrier 100 is made of a metal material, and a heat-sensitive adhesive medium 110 is disposed between the carrier 100 and the substrate 200. The temperature of the heat-sensitive adhesive medium 110 is adjusted from one side of the carrier 100 to disengage the carrier 100 from the substrate 200. The metal has good thermal conductivity and facilitates the use of the heat-sensitive adhesive medium 110. Moreover, the metal has high strength and is not easily worn. For example, the carrier plate 100 can be made of stainless steel to prevent rust.
实施例二Embodiment 2
实施例二与实施例一的区别在于:The difference between the second embodiment and the first embodiment is:
不设置电子零件,封装层700将第一电路层300封装固定后,将载板100脱离基板200,然后在在基板200的底面制作第二电路层810、在基板200制作连接孔、在连接孔内设置导体层,导体层将增厚层500和第二电路层810电连接,如图12所示。After the electronic component is not provided, the encapsulation layer 700 encapsulates and fixes the first circuit layer 300, then the carrier 100 is detached from the substrate 200, and then a second circuit layer 810 is formed on the bottom surface of the substrate 200, and a connection hole is formed in the substrate 200. A conductor layer is disposed inside, and the conductor layer electrically connects the thickening layer 500 and the second circuit layer 810 as shown in FIG.
实施例三Embodiment 3
实施例三与实施例一的区别在于:The difference between the third embodiment and the first embodiment is:
直接将基板200脱离Directly detach the substrate 200
封装层700将第一电路层300和芯片600封装固定后,将载板100和基板200从第一电路层300和芯片600上脱离。芯片600和第一电路层300被封装层700固定,二者相对位置不再发生改变,此时载板100和基板200完成其支撑作用,将载板100和基板200脱离,脱离后第一电路层300、芯片600和封装层700构成电路板,使第一电路层300、芯片600和封装层700构成的整体厚度降低,可以获得超薄电路板。脱离后,也可以在第一电路层300的底面制作其他的电路结构,例如设置第一绝缘层后在第一绝缘层上制作第二电路层810,在第二电路层810上设置第二绝缘层并在第二绝缘层上制作第三电路层,以此类推制作多层的3D电路。 After the encapsulation layer 700 encapsulates the first circuit layer 300 and the chip 600, the carrier 100 and the substrate 200 are detached from the first circuit layer 300 and the chip 600. The chip 600 and the first circuit layer 300 are fixed by the encapsulation layer 700, and the relative positions of the chip are not changed. At this time, the carrier 100 and the substrate 200 complete their supporting functions, and the carrier 100 and the substrate 200 are detached, and the first circuit is separated. The layer 300, the chip 600, and the encapsulation layer 700 constitute a circuit board, and the overall thickness of the first circuit layer 300, the chip 600, and the encapsulation layer 700 is reduced, and an ultra-thin circuit board can be obtained. After the detachment, other circuit structures may be formed on the bottom surface of the first circuit layer 300. For example, after the first insulating layer is disposed, the second circuit layer 810 is formed on the first insulating layer, and the second circuit layer 810 is provided with the second insulating layer. The layer is formed on the second insulating layer to form a third circuit layer, and so on to make a multilayered 3D circuit.
以上实施例的各技术特征可以进行任意的组合,为使描述简洁,未对上述实施例中的各个技术特征所有可能的组合都进行描述,然而,只要这些技术特征的组合不存在矛盾,都应当认为是本说明书记载的范围。The technical features of the above embodiments may be arbitrarily combined. For the sake of brevity of description, all possible combinations of the technical features in the above embodiments are not described. However, as long as there is no contradiction in the combination of these technical features, It is considered to be the range described in this specification.
以上实施例仅表达了本发明的几种实施方式,其描述较为具体和详细,但并不能因此而理解为对发明专利范围的限制。应当指出的是,对于本领域的普通技术人员来说,在不脱离本发明构思的前提下,还可以做出若干变形和改进,这些都属于本发明的保护范围。因此,本发明专利的保护范围应以所附权利要求为准。 The above embodiments are merely illustrative of several embodiments of the present invention, and the description thereof is more specific and detailed, but is not to be construed as limiting the scope of the invention. It should be noted that a number of variations and modifications may be made by those skilled in the art without departing from the spirit and scope of the invention. Therefore, the scope of the invention should be determined by the appended claims.

Claims (22)

  1. 一种电路制造方法,其特征在于,基板上设有第一电路层,所述第一电路层包括连线和连接部,在所述第一电路层上设置保护层,所述保护层覆盖所述连线,所述保护层设有操作窗口,通过所述操作窗口的开口在所述操作窗口内制作增厚层,所述增厚层与所述连线或所述连接部电连接。A circuit manufacturing method is characterized in that a first circuit layer is disposed on a substrate, the first circuit layer includes a connection and a connection portion, and a protection layer is disposed on the first circuit layer, and the protection layer covers the In the connection, the protective layer is provided with an operation window through which an thickened layer is formed in the operation window, and the thickened layer is electrically connected to the connection or the connection portion.
  2. 根据权利要求1所述的电路制造方法,其特征在于,所述增厚层与所述连接部电连接,将电子零件安放于基板,所述电子零件设有零件引脚,所述零件引脚与所述增厚层电连接。The method of manufacturing a circuit according to claim 1, wherein said thickened layer is electrically connected to said connecting portion, said electronic component is placed on said substrate, said electronic component is provided with a component pin, said component pin Electrically connected to the thickened layer.
  3. 根据权利要求2所述的电路制造方法,其特征在于,所述电子零件的零件引脚与所述增厚层焊接。The circuit manufacturing method according to claim 2, wherein the component leads of the electronic component are soldered to the thickened layer.
  4. 根据权利要求4所述的电路制造方法,其特征在于,所述连接部为至少两个,至少一个所述连接部上设有所述增厚层。The method of manufacturing a circuit according to claim 4, wherein said connecting portion is at least two, and said thickened layer is provided on at least one of said connecting portions.
  5. 根据权利要求1所述的电路制造方法,其特征在于,所述基板还设有第二电路层,在所述基板制作连接孔,所述连接部的一侧与所述增厚层电连接,所述连接部的另一侧与所述连接孔对接,所述连接孔还与所述第二电路层对接,在所述连接孔内设置导体层,所述导体层将所述连接部和所述第二电路层电连接。The circuit manufacturing method according to claim 1, wherein the substrate is further provided with a second circuit layer, and a connection hole is formed in the substrate, and one side of the connection portion is electrically connected to the thickened layer, The other side of the connecting portion abuts the connecting hole, the connecting hole also interfaces with the second circuit layer, and a conductor layer is disposed in the connecting hole, and the conductor layer connects the connecting portion and the The second circuit layer is electrically connected.
  6. 根据权利要求5所述的电路制造方法,其特征在于,在所述基板上设置封装层,所述电子零件位于所述基板和所述封装层之间,所述封装层将所述电子零件封装固定。The circuit manufacturing method according to claim 5, wherein an encapsulation layer is disposed on the substrate, the electronic component is located between the substrate and the encapsulation layer, and the encapsulation layer encapsulates the electronic component fixed.
  7. 根据权利要求6所述的电路制造方法,其特征在于,将基板设置于载板上,在所述载板的支撑下设置所述增厚层、以及制作所述封装层,所述封装层将所述电子零件封装固定后,将所述载板从所述基板上脱离。The circuit manufacturing method according to claim 6, wherein the substrate is disposed on the carrier, the thickening layer is disposed under the support of the carrier, and the encapsulation layer is formed, and the encapsulation layer is After the electronic component package is fixed, the carrier is detached from the substrate.
  8. 根据权利要求6所述的电路制造方法,其特征在于,将所述载板从所述基板上脱离后,在所述基板的底面制作所述第二电路层。The circuit manufacturing method according to claim 6, wherein the second circuit layer is formed on a bottom surface of the substrate after the carrier is detached from the substrate.
  9. 根据权利要求6所述的电路制造方法,其特征在于,所述第一电路层、所述电子零件和所述封装层设于所述基板的同一面,所述封装层将所述第一电路层和所述电子零件封装固定。 The circuit manufacturing method according to claim 6, wherein the first circuit layer, the electronic component, and the encapsulation layer are disposed on a same side of the substrate, and the encapsulation layer is the first circuit The layer and the electronic component are packaged and fixed.
  10. 根据权利要求1所述的电路制造方法,其特征在于,所述增厚层与所述连接部电连接,向所述基板发射粒子束或光子束,所述粒子束或光子束穿过所述基板在所述基板上制成所述连接孔,所述粒子束或光子束不能穿过所述增厚层构成的整体。The method of manufacturing a circuit according to claim 1, wherein said thickening layer is electrically connected to said connecting portion, and a particle beam or a photon beam is emitted toward said substrate, said particle beam or photon beam passing through said The substrate is formed on the substrate as the connection hole, and the particle beam or photon beam cannot pass through the entirety of the thickened layer.
  11. 根据权利要求10所述的电路制造方法,其特征在于,所述粒子束为等离子束,或者所述光子束为激光束。The circuit manufacturing method according to claim 10, wherein the particle beam is a plasma beam, or the photon beam is a laser beam.
  12. 根据权利要求10所述的电路制造方法,其特征在于,在所述基板的表面设置金属层,所述金属层设有引导孔,所述引导孔与所述连接部对应,向所述基板的底面发射粒子束或光子束,所述粒子束或光子束不能穿过所述金属层,所述粒子束或光子束穿过所述引导孔后在所述基板制成所述连接孔。The circuit manufacturing method according to claim 10, wherein a metal layer is disposed on a surface of the substrate, the metal layer is provided with a guiding hole, and the guiding hole corresponds to the connecting portion to the substrate The bottom surface emits a beam of particles or a beam of photons that cannot pass through the layer of metal, and the beam of particles or photon beam passes through the guiding aperture to form the connecting hole in the substrate.
  13. 根据权利要求12所述的电路制造方法,其特征在于,制作所述连接孔后,将所述金属层制成所述第二电路层。The method of manufacturing a circuit according to claim 12, wherein said metal layer is formed into said second circuit layer after said connection hole is formed.
  14. 根据权利要求1至13任一项所述的电路制造方法,其特征在于,所述电子零件为芯片或电子元器件。The method of manufacturing a circuit according to any one of claims 1 to 13, wherein the electronic component is a chip or an electronic component.
  15. 根据权利要求1至13任一项所述的电路制造方法,其特征在于,所述连线的线宽小于5微米,或所述连线的厚度小于5微米。The method of manufacturing a circuit according to any one of claims 1 to 13, wherein the line width of the line is less than 5 μm, or the thickness of the line is less than 5 μm.
  16. 根据权利要求1至13任一项所述的电路制造方法,其特征在于,所述连线为至少两条,两条连线之间设有间隙,所述保护层覆盖所述连线之间的间隙。The circuit manufacturing method according to any one of claims 1 to 13, wherein the connection is at least two, and a gap is provided between the two wires, and the protective layer covers the connection between the wires Clearance.
  17. 根据权利要求16任一项所述的电路制造方法,其特征在于,所述连线的间隙小于10微米。The circuit manufacturing method according to any one of claims 16 to 4, wherein the gap of the wiring is less than 10 μm.
  18. 根据权利要求1至13任一项所述的电路制造方法,其特征在于,所述增厚层与所述连接部构成的整体的厚度大于所述连线的厚度。The method of manufacturing a circuit according to any one of claims 1 to 13, characterized in that the thickness of the thickened layer and the connecting portion as a whole is larger than the thickness of the connecting line.
  19. 根据权利要求18所述的电路制造方法,其特征在于,所述增厚层与所述连接部构成的整体的厚度大于10微米。The method of manufacturing a circuit according to claim 18, wherein the thickness of the thickened layer and the connecting portion as a whole is greater than 10 μm.
  20. 根据权利要求1至13任一项所述的电路制造方法,其特征在于,采用沉金/镍的方法制作所述增厚层。 The method of manufacturing a circuit according to any one of claims 1 to 13, wherein the thickened layer is formed by a method of immersion gold/nickel.
  21. 根据权利要求1至13任一项所述的电路制造方法,其特征在于,所述操作窗口为至少两个。The circuit manufacturing method according to any one of claims 1 to 13, characterized in that the operation window is at least two.
  22. 根据权利要求1至13任一项所述的电路制造方法,其特征在于,将基板设置于载板上,所述载板为所述基板提供支撑,设置所述保护层、或制作所述增厚层、或安放电子零件并将所述电子零件的零件引脚与所述增厚层电连接。 The circuit manufacturing method according to any one of claims 1 to 13, characterized in that the substrate is placed on a carrier, the carrier provides support for the substrate, the protective layer is provided, or the addition is made. Thick layers, or mounting electronic components and electrically connecting the component leads of the electronic component to the thickened layer.
PCT/CN2017/076435 2017-03-13 2017-03-13 Circuit line connection method WO2018165819A1 (en)

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CN103745936A (en) * 2014-02-08 2014-04-23 华进半导体封装先导技术研发中心有限公司 Manufacture method of fan-out square chip level package
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US20030201521A1 (en) * 2002-04-25 2003-10-30 Macronix International Co., Ltd. Semiconductor packaging device and manufacture thereof
CN101604638A (en) * 2009-06-26 2009-12-16 江阴长电先进封装有限公司 Wafer level fan-out chip packaging method
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