WO2018147187A1 - Pompe cryogénique - Google Patents

Pompe cryogénique Download PDF

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Publication number
WO2018147187A1
WO2018147187A1 PCT/JP2018/003606 JP2018003606W WO2018147187A1 WO 2018147187 A1 WO2018147187 A1 WO 2018147187A1 JP 2018003606 W JP2018003606 W JP 2018003606W WO 2018147187 A1 WO2018147187 A1 WO 2018147187A1
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WO
WIPO (PCT)
Prior art keywords
cryopanel
cryopump
cooling stage
low
string
Prior art date
Application number
PCT/JP2018/003606
Other languages
English (en)
Japanese (ja)
Inventor
貴裕 谷津
Original Assignee
住友重機械工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 住友重機械工業株式会社 filed Critical 住友重機械工業株式会社
Priority to CN201880005243.0A priority Critical patent/CN110234876A/zh
Priority to KR1020217039684A priority patent/KR102436493B1/ko
Priority to KR1020197017505A priority patent/KR20190110087A/ko
Publication of WO2018147187A1 publication Critical patent/WO2018147187A1/fr

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F04B37/16—Means for nullifying unswept space
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2210/00—Working fluid
    • F05B2210/10—Kind or type
    • F05B2210/12—Kind or type gaseous, i.e. compressible

Definitions

  • the present invention relates to a cryopump.
  • the cryopump is a vacuum pump that traps and exhausts gas molecules by condensation or adsorption on a cryopanel cooled to a cryogenic temperature.
  • the cryopump is generally used to realize a clean vacuum environment required for a semiconductor circuit manufacturing process or the like.
  • One exemplary purpose of one aspect of the present invention is to reduce the manufacturing cost of a cryopump.
  • a cryopump includes a refrigerator having a high-temperature cooling stage and a low-temperature cooling stage, and a direction of a cryopump central axis that is thermally coupled to the high-temperature cooling stage and passes through the center of the cryopump inlet. And a radiation shield that surrounds the low-temperature cooling stage, and a low-temperature cryopanel that is thermally coupled to the low-temperature cooling stage and is surrounded by the radiation shield together with the low-temperature cooling stage.
  • the low-temperature cryopanel section is disposed on both sides of the cryogenic cooling stage with the cryopump central axis in between at the height position between the upper end and the lower end of the cryogenic cooling stage in the direction of the cryopump central axis.
  • One cryopanel member is provided.
  • Each cryopanel member includes an arcuate flat portion having an arc portion and a string, and a first bent portion integrally formed with the arcuate flat portion and connected to the arcuate flat portion at a part of the chord.
  • the bow-shaped flat part is thermally coupled to the low-temperature cooling stage via the first bent part.
  • the arc portion of the arcuate flat portion defines the outer edge of the cryopanel member when viewed in the direction of the cryopump central axis.
  • the shape of the remaining portion of the string of the bow-shaped flat portion of each cryopanel member is determined so that the two cryopanel members can be exchanged with each other without interfering with the refrigerator.
  • a cryopump includes a refrigerator having a high-temperature cooling stage and a low-temperature cooling stage, and a direction of a cryopump central axis that is thermally coupled to the high-temperature cooling stage and passes through the center of the cryopump inlet.
  • a radiation shield extending to and surrounding the low-temperature cooling stage; and a low-temperature cryopanel portion thermally coupled to the low-temperature cooling stage and surrounded by the radiation shield together with the low-temperature cooling stage, the cryopump central axis
  • a low-temperature cryopanel portion including two cryopanel members disposed on both sides of the low-temperature cooling stage, and two attachment surfaces respectively corresponding to the two cryopanel members.
  • Each cryopanel member includes an arcuate flat portion having an arc portion and a string, and a first bent portion integrally formed with the arcuate flat portion and connected to the arcuate flat portion at a part of the chord. Prepare. The first bent portion is attached to a corresponding attachment surface. The bow-shaped flat part is thermally coupled to the low-temperature cooling stage via the first bent part. The shape of the remaining portion of the string of the bow-shaped flat portion of each cryopanel member is determined so that the two cryopanel members can be exchanged with each other without interfering with the refrigerator.
  • Each cryopanel member includes a second bent portion integrally formed with the bow-shaped flat portion and connected to the bow-shaped flat portion at least at a part of the remaining portion of the string. The second bent portion is arranged away from the attachment surface in the direction of the string.
  • the manufacturing cost of the cryopump can be reduced.
  • FIG. 1 is a side sectional view schematically showing a cryopump according to an embodiment. It is a top view which shows roughly the cryopump shown in FIG. It is a perspective view which shows roughly a part of low-temperature cryopanel part of the cryopump which concerns on embodiment. It is a perspective view which shows roughly a part of low-temperature cryopanel part of the cryopump which concerns on embodiment. It is a perspective view which shows roughly a part of low-temperature cryopanel part of the cryopump which concerns on embodiment. It is a perspective view which shows roughly a part of low-temperature cryopanel part of the cryopump which concerns on embodiment.
  • FIG. 1 is a side sectional view schematically showing a cryopump 10 according to an embodiment.
  • FIG. 2 is a top view schematically showing the cryopump 10 shown in FIG.
  • FIG. 1 shows a cross section including a cryopump central axis C indicated by a one-dot chain line.
  • the low-temperature cryopanel portion of the cryopump 10 shown in FIG. FIG. 2 is an arrow view taken along line BB.
  • 3 and 4 are perspective views schematically showing a part of the low-temperature cryopanel portion of the cryopump 10 according to the embodiment.
  • the cryopump 10 is attached to a vacuum chamber of, for example, an ion implantation apparatus, a sputtering apparatus, a vapor deposition apparatus, or other vacuum process apparatus to increase the degree of vacuum inside the vacuum chamber to a level required for a desired vacuum process. used.
  • the cryopump 10 has an inlet 12 for receiving gas to be evacuated from the vacuum chamber. Gas enters the internal space 14 of the cryopump 10 through the air inlet 12.
  • the cryopump 10 may be intended to be installed and used in a vacuum chamber with the orientation shown in the drawing, that is, the posture with the intake port 12 facing upward.
  • the posture of the cryopump 10 is not limited thereto, and the cryopump 10 may be installed in the vacuum chamber in another direction.
  • the terms “axial direction” and “radial direction” are sometimes used to express the positional relationship of the components of the cryopump 10 in an easy-to-understand manner.
  • the axial direction represents the direction passing through the air inlet 12 (in FIG. 1, the direction along the cryopump central axis C passing through the center of the air inlet 12), and the radial direction is the direction along the air inlet 12 (the direction perpendicular to the central axis C). ).
  • up the fact that it is relatively close to the inlet 12 in the axial direction
  • down the fact that it is relatively distant to the inlet 12 in the axial direction
  • the distance from the bottom of the cryopump 10 may be referred to as “up” and the distance from the bottom of the cryopump 10 as “lower”.
  • the vicinity of the center of the inlet 12 (center axis C in FIG. 1) may be referred to as “inside” and the vicinity of the periphery of the inlet 12 may be referred to as “outer”.
  • Such an expression is not related to the arrangement when the cryopump 10 is attached to the vacuum chamber.
  • the cryopump 10 may be attached to the vacuum chamber with the inlet 12 facing downward in the vertical direction.
  • the direction surrounding the axial direction may be called “circumferential direction”.
  • the circumferential direction is a second direction along the air inlet 12 and is a tangential direction orthogonal to the radial direction.
  • the cryopump 10 includes a refrigerator 16, a first stage cryopanel 18, a second stage cryopanel assembly 20, and a cryopump housing 70.
  • the first stage cryopanel 18 can also be referred to as a high temperature cryopanel section or a 100K section.
  • the second stage cryopanel assembly 20 can also be referred to as a low temperature cryopanel section or a 10K section.
  • the refrigerator 16 is a cryogenic refrigerator such as a Gifford-McMahon refrigerator (so-called GM refrigerator).
  • the refrigerator 16 is a two-stage refrigerator. Therefore, the refrigerator 16 includes a first cooling stage 22 and a second cooling stage 24.
  • the refrigerator 16 is configured to cool the first cooling stage 22 to the first cooling temperature and to cool the second cooling stage 24 to the second cooling temperature.
  • the second cooling temperature is lower than the first cooling temperature.
  • the first cooling stage 22 is cooled to about 65K to 120K, preferably 80K to 100K
  • the second cooling stage 24 is cooled to about 10K to 20K.
  • the refrigerator 16 also includes a refrigerator structure portion 21 that structurally supports the second cooling stage 24 on the first cooling stage 22 and structurally supports the first cooling stage 22 on the room temperature portion 26 of the refrigerator 16.
  • the refrigerator structure unit 21 includes a first cylinder 23 and a second cylinder 25 that extend coaxially along the radial direction.
  • the first cylinder 23 connects the room temperature part 26 of the refrigerator 16 to the first cooling stage 22.
  • the second cylinder 25 connects the first cooling stage 22 to the second cooling stage 24.
  • the room temperature section 26, the first cylinder 23, the first cooling stage 22, the second cylinder 25, and the second cooling stage 24 are arranged in a straight line in this order.
  • first displacer and a second displacer are disposed so as to be able to reciprocate.
  • a first regenerator and a second regenerator are incorporated in the first displacer and the second displacer, respectively.
  • the room temperature section 26 has a drive mechanism (not shown) for reciprocating the first displacer and the second displacer.
  • the drive mechanism includes a flow path switching mechanism that switches the flow path of the working gas so as to periodically repeat the supply and discharge of the working gas (for example, helium) to the inside of the refrigerator 16.
  • the first cooling stage 22 is installed at the first stage low temperature end of the refrigerator 16.
  • the first cooling stage 22 is a member that encloses the end of the first cylinder 23 on the side opposite to the room temperature portion 26 and surrounds the first expansion space of the working gas.
  • the first expansion space is a variable volume that is formed between the first cylinder 23 and the first displacer inside the first cylinder 23 and whose volume changes with the reciprocation of the first displacer.
  • the first cooling stage 22 is made of a metal material having a higher thermal conductivity than the first cylinder 23.
  • the first cooling stage 22 is made of copper
  • the first cylinder 23 is made of stainless steel.
  • the second cooling stage 24 is installed at the second stage low temperature end of the refrigerator 16.
  • the second cooling stage 24 is a member that encloses the end portion of the second cylinder 25 on the side opposite to the room temperature portion 26 and surrounds the second expansion space of the working gas.
  • the second expansion space is a variable volume that is formed between the second cylinder 25 and the second displacer inside the second cylinder 25 and has a volume that changes as the second displacer reciprocates.
  • the second cooling stage 24 is made of a metal material having a higher thermal conductivity than the second cylinder 25.
  • the second cooling stage 24 is made of copper, and the second cylinder 25 is made of stainless steel. In FIG. 1, a boundary 24b between the second cooling stage 24 and the second cylinder 25 is shown.
  • the refrigerator 16 is connected to a working gas compressor (not shown).
  • the refrigerator 16 expands the working gas pressurized by the compressor to cool the first cooling stage 22 and the second cooling stage 24.
  • the expanded working gas is collected in the compressor and pressurized again.
  • the refrigerator 16 generates cold by repeating a heat cycle including supply and discharge of the working gas and reciprocation of the first displacer and the second displacer in synchronization therewith.
  • the illustrated cryopump 10 is a so-called horizontal cryopump.
  • the horizontal type cryopump is generally a cryopump in which the refrigerator 16 is disposed so as to intersect (usually orthogonal) the central axis C of the cryopump 10.
  • the first cooling stage 22 and the second cooling stage 24 of the refrigerator 16 are arranged in a direction perpendicular to the cryopump center axis C (the horizontal direction in FIG. 1 and the direction of the center axis D of the refrigerator 16). .
  • the first stage cryopanel 18 includes a radiation shield 30 and an entrance cryopanel 32 and surrounds the second stage cryopanel assembly 20.
  • the first stage cryopanel 18 is a cryopanel provided to protect the second stage cryopanel assembly 20 from radiant heat from the outside of the cryopump 10 or from the cryopump housing 70.
  • the first stage cryopanel 18 is thermally coupled to the first cooling stage 22. Therefore, the first stage cryopanel 18 is cooled to the first cooling temperature.
  • the first stage cryopanel 18 has a gap with the second stage cryopanel assembly 20, and the first stage cryopanel 18 is not in contact with the second stage cryopanel assembly 20.
  • the radiation shield 30 is provided to protect the second stage cryopanel assembly 20 from the radiant heat of the cryopump housing 70.
  • the radiation shield 30 is located between the cryopump housing 70 and the second stage cryopanel assembly 20 and surrounds the second stage cryopanel assembly 20.
  • the radiation shield 30 has a shield main opening 34 for receiving gas from the outside of the cryopump 10 into the internal space 14.
  • the shield main opening 34 is located at the air inlet 12.
  • the radiation shield 30 includes a shield front end 36 that defines the shield main opening 34, a shield bottom 38 that is located on the opposite side of the shield main opening 34, and a shield side 40 that connects the shield front end 36 to the shield bottom 38.
  • the shield front end 36 forms a part of the shield side portion 40.
  • the shield side portion 40 extends in the axial direction from the shield front end 36 to the side opposite to the shield main opening 34, and extends in the circumferential direction so as to surround the second cooling stage 24.
  • the radiation shield 30 has a cylindrical shape (for example, a cylinder) in which the shield bottom 38 is closed, and is formed in a cup shape.
  • An annular gap 42 is formed between the shield side portion 40 and the second stage cryopanel assembly 20.
  • the shield bottom portion 38 may be a separate member from the shield side portion 40.
  • the shield bottom portion 38 may be a flat disk having substantially the same diameter as the shield side portion 40, and may be attached to the shield side portion 40 on the side opposite to the shield main opening 34. Further, at least a part of the shield bottom 38 may be opened.
  • the radiation shield 30 may not be blocked by the shield bottom 38. That is, both ends of the shield side part 40 may be open.
  • the shield side part 40 has a shield side part opening 44 into which the refrigerator structure part 21 is inserted.
  • the second cooling stage 24 and the second cylinder 25 are inserted into the radiation shield 30 from outside the radiation shield 30 through the shield side opening 44.
  • the shield side part opening 44 is an attachment hole formed in the shield side part 40, and is circular, for example.
  • the first cooling stage 22 is disposed outside the radiation shield 30.
  • the shield side portion 40 includes a mounting seat 46 for the refrigerator 16.
  • the mounting seat 46 is a flat portion for mounting the first cooling stage 22 to the radiation shield 30 and is slightly recessed when viewed from the outside of the radiation shield 30.
  • the mounting seat 46 forms the outer periphery of the shield side opening 44.
  • the mounting seat 46 is closer to the shield bottom 38 than the shield front end 36 in the axial direction.
  • the radiation shield 30 is thermally coupled to the first cooling stage 22 by attaching the first cooling stage 22 to the mounting seat 46.
  • the radiation shield 30 is thermally coupled to the first cooling stage 22 via an additional heat transfer member.
  • the heat transfer member may be a hollow short cylinder having flanges at both ends, for example.
  • the heat transfer member may be fixed to the mounting seat 46 by a flange at one end and fixed to the first cooling stage 22 by a flange at the other end.
  • the heat transfer member may extend from the first cooling stage 22 to the radiation shield 30 so as to surround the refrigerator structure 21.
  • the shield side part 40 may include such a heat transfer member.
  • the radiation shield 30 is configured as an integral cylinder.
  • the radiation shield 30 may be configured to have a tubular shape as a whole by a plurality of parts. The plurality of parts may be arranged with a gap therebetween.
  • the radiation shield 30 may be divided into two parts in the axial direction.
  • the upper part of the radiation shield 30 is a cylinder whose both ends are open, and includes a shield front end 36 and a first portion of the shield side part 40.
  • the lower portion of the radiation shield 30 has an upper end opened and a lower end closed, and includes a second portion of the shield side portion 40 and a shield bottom portion 38.
  • the lower part of the radiation shield 30 does not have the shield bottom 38 and may be a cylinder having both ends opened.
  • a slit extending in the circumferential direction is formed between the first portion and the second portion of the shield side portion 40. This slit may be at least a part of the shield side portion 40.
  • the upper half of the shield side opening 44 may be formed in the first part of the shield side part 40, and the lower half may be formed in the second part of the shield side part 40.
  • the inlet cryopanel 32 is provided in the shield main opening 34 in order to protect the second-stage cryopanel assembly 20 from radiant heat from a heat source outside the cryopump 10.
  • the heat source outside the cryopump 10 is, for example, a heat source in a vacuum chamber to which the cryopump 10 is attached.
  • the inlet cryopanel 32 can limit not only radiant heat but also the ingress of gas molecules.
  • the inlet cryopanel 32 occupies a part of the opening area of the shield main opening 34 so as to limit the gas flow into the internal space 14 through the shield main opening 34 to a desired amount.
  • An annular open region 48 is formed between the inlet cryopanel 32 and the shield front end 36.
  • the inlet cryopanel 32 includes a louver part 50 and a louver attachment member 52 for attaching the louver part 50 to the shield front end 36.
  • the louver mounting member 52 is a rod-like member that is stretched over the shield front end 36 along the diameter of the shield main opening 34.
  • the inlet cryopanel 32 is thermally coupled to the first cooling stage 22 via the louver mounting member 52 and the radiation shield 30.
  • the louver part 50 has a plurality of slats each extending linearly in the first direction in the shield main opening 34.
  • the plurality of blades are arranged in the second direction perpendicular to the first direction in the shield main opening 34.
  • the plurality of slats are arranged in parallel to each other, and each slat is disposed to be inclined with respect to the opening surface. As shown in the figure, the wing plate on one side and the wing plate on the other side are inclined in opposite directions with respect to the central axis C.
  • the plurality of slats are densely arranged in the second direction so as to cover the second-stage cryopanel assembly 20 located immediately below the plurality of slats (that is, the second-stage cryopanel assembly 20 cannot be seen from the outside of the cryopump 10). Is arranged.
  • the plurality of slats have different first direction lengths so as to form a circular shape as a whole depending on the arrangement.
  • the louver mounting member 52 extends in the second direction.
  • the gas to be exhausted by the cryopump 10 enters the internal space 14 from the outside of the cryopump 10 through a gap between the louvers of the louver 50 or an open region 48.
  • the entrance cryopanel 32 may have other shapes.
  • the louver part 50 may have a plurality of annular slats arranged concentrically.
  • the inlet cryopanel 32 may be a single plate-like member.
  • the second stage cryopanel assembly 20 is attached to the second cooling stage 24 so as to surround the second cooling stage 24. Therefore, the second stage cryopanel assembly 20 is thermally coupled to the second cooling stage 24, and the second stage cryopanel assembly 20 is cooled to the second cooling temperature.
  • the second stage cryopanel assembly 20 is surrounded by the shield side portion 40 together with the second cooling stage 24.
  • the second-stage cryopanel assembly 20 includes a top cryopanel 60 facing the shield main opening 34, a plurality (two in this example) of cryopanel members 62, and a cryopanel mounting member 64.
  • the cryopump 10 includes a cryopanel positioning member 67.
  • the heat transfer section that thermally couples the second stage cryopanel assembly 20 to the second cooling stage 24 includes a cryopanel mounting member 64 and a cryopanel positioning member 67.
  • both the top cryopanel 60 and the cryopanel member 62 are not in contact with the radiation shield 30.
  • the cryopanel member 62 is covered with a top cryopanel 60.
  • the top cryopanel 60 is the portion of the second stage cryopanel assembly 20 that is closest to the inlet cryopanel 32.
  • the top cryopanel 60 is disposed between the shield main opening 34 or the inlet cryopanel 32 and the refrigerator 16 in the axial direction.
  • the top cryopanel 60 is located at the center of the internal space 14 of the cryopump 10 in the axial direction. Therefore, a main storage space 65 for the condensed layer is widely formed between the front surface of the top cryopanel 60 and the inlet cryopanel 32.
  • the main storage space 65 of the condensed layer occupies the upper half of the internal space 14.
  • the top cryopanel 60 is a substantially flat cryopanel arranged perpendicular to the axial direction. That is, the top cryopanel 60 extends in the radial direction and the circumferential direction. As shown in FIG. 2, the top cryopanel 60 is a disk-shaped panel having a size (for example, a projection area) larger than the louver portion 50. However, the relationship between the dimensions of the top cryopanel 60 and the louver unit 50 is not limited to this, and the top cryopanel 60 may be smaller, or both may have substantially the same dimensions.
  • the top cryopanel 60 is disposed so as to form a gap region 66 between the top cryopanel 60 and the refrigerator structure portion 21.
  • the gap region 66 is a space formed in the axial direction between the back surface of the top cryopanel 60 and the second cylinder 25.
  • the cryopanel member 62 is provided with an adsorbent 74 such as activated carbon.
  • the adsorbent 74 is bonded to the back surface of the cryopanel member 62.
  • the front surface of the cryopanel member 62 is intended to function as a condensing surface and the back surface as an adsorption surface.
  • An adsorbent 74 may be provided on the front surface of the cryopanel member 62.
  • the top cryopanel 60 may have an adsorbent 74 on the front surface and / or back surface thereof. Alternatively, the top cryopanel 60 may not include the adsorbent 74.
  • the two cryopanel members 62 are disposed on both sides of the second cooling stage 24 with the cryopump central axis C interposed therebetween.
  • the cryopanel member 62 is disposed along a plane perpendicular to the center axis C of the cryopump.
  • the cryopanel member 62 and the cryopanel mounting member 64 are shown by broken lines in FIG.
  • the two cryopanel members 62 are arranged at a height position between the upper end and the lower end of the second cooling stage 24 in the direction of the cryopump central axis C.
  • the second cooling stage 24 includes a flange portion 24a at the end in a direction perpendicular to the cryopump central axis C (the direction of the central axis D of the refrigerator 16).
  • An upper end and a lower end of the second cooling stage 24 in the direction of the cryopump central axis C are defined by a flange portion 24a. That is, the two cryopanel members 62 are arranged at a height position between the upper end and the lower end of the flange portion 24a of the second cooling stage 24 in the direction of the cryopump central axis C.
  • the two cryopanel members 62 are arranged at the same height.
  • the boundary 24b between the second cooling stage 24 and the second cylinder 25 shown in FIG. 1 is the other end of the second cooling stage 24 in the direction of the central axis D of the refrigerator 16 (that is, opposite to the flange 24a). End).
  • FIG. 3 shows two cryopanel members 62 and a cryopanel mounting member 64
  • FIG. 4 shows one cryopanel member 62.
  • the two cryopanel members 62 are designed as the same part.
  • the two cryopanel members 62 have the same shape and are formed of the same material.
  • the cryopanel member 62 has a bow shape, a semimoon shape, or a semicircular shape.
  • the cryopanel member 62 is formed of a metal material having a high thermal conductivity such as copper, and may be covered with a plating layer such as nickel.
  • the cryopanel mounting member 64 includes two mounting surfaces 68 corresponding to the two cryopanel members 62, respectively.
  • the cryopanel mounting member 64 is a bracket having a square inverted U-shape, and is also a heat transfer plate for heat transfer from the second cooling stage 24 to the top cryopanel 60 and the cryopanel member 62.
  • the two attachment surfaces 68 correspond to the two side surfaces of the cryopanel attachment member 64.
  • the cryopanel member 62 is attached to the corresponding attachment surface 68 using a fastening member 87 (for example, a rivet).
  • the top cryopanel 60 is attached to the upper surface 69 of the cryopanel attachment member 64 that connects these attachment surfaces 68.
  • the attachment surface 68 extends perpendicularly to the upper surface 69 from both sides of the upper surface 69 downward.
  • the second cooling stage 24 and the cryopanel positioning member 67 are inserted in the direction of the central axis D of the refrigerator 16 inside the cryopanel mounting member 64, and the second cooling stage 24 is attached to the cryopanel via the cryopanel positioning member 67. Attached to member 64.
  • the cryopanel positioning member 67 is attached to the upper surface 69 of the cryopanel mounting member 64 (however, on the side opposite to the top cryopanel 60).
  • the top cryopanel 60, the cryopanel mounting member 64, and the cryopanel positioning member 67 are integrally fixed to the second cooling stage 24 using a fastening member (for example, a bolt).
  • Each cryopanel member 62 includes an arcuate flat portion 75, a first bent portion 76, and a second bent portion 77.
  • Each cryopanel member 62 is formed from a single metal plate. For example, by pressing a single flat metal plate, the first bent portion 76 and the second bent portion 77 are integrally formed with the bow-shaped flat portion 75, and one cryopanel member 62 is formed.
  • the adsorbent 74 is provided on the arcuate flat portion 75.
  • the first bent portion 76 and the second bent portion 77 are not provided with the adsorbent 74.
  • the bow-shaped flat part 75 has an arc part 78 and a string 79.
  • the string 79 is a single straight line connecting both ends of the arc portion 78.
  • the arc portion 78 and the string 79 are in a plane perpendicular to the cryopump center axis C, and define the contour of the cryopanel member 62 when viewed in the direction of the cryopump center axis C.
  • the arc portion 78 defines the outer edge of the cryopanel member 62, and the string 79 defines the inner edge of the cryopanel member 62.
  • the cryopanel member 62 is disposed such that the arc portion 78 is close to the shield side portion 40 of the radiation shield 30 and the string 79 is close to the second cooling stage 24 and the second cylinder 25 of the refrigerator 16.
  • the strings 79 are parallel to the axial direction D of the refrigerator 16, half of the strings 79 extend along the second cooling stage 24 and the second cylinder 25 of the refrigerator 16, and the other half passes through the second cooling stage 24. It extends toward the shield side 40 beyond.
  • the whole area of the bow-shaped flat part 75 is flat, and in particular, the outer edge part including the arc part 78 is flat.
  • the cryopanel member 62 is different in shape from a typical cryopanel having a frustoconical inclined surface on the outer peripheral portion.
  • the first bent portion 76 is connected to the bow-shaped flat portion 75 at a part of the string 79, specifically, at the center of the string 79.
  • the first bent portion 76 is provided as a fastening portion for fastening the cryopanel member 62 to the cryopanel mounting member 64.
  • the first bent portion 76 is attached to the corresponding attachment surface 68 of the cryopanel attachment member 64.
  • the arcuate flat portion 75 is thermally coupled to the second cooling stage 24 via the first bent portion 76.
  • the first bent portion 76 is a rectangular portion that forms an angle (for example, a right angle) with respect to the arcuate flat portion 75.
  • the first bent portion 76 stands upright with respect to the arcuate flat portion 75.
  • the first bent portion 76 is elongated in the direction of the string 79, and the width of the first bent portion 76 in the direction of the string 79 is substantially equal to the width of the mounting surface 68 of the cryopanel mounting member 64.
  • the first bent portion 76 is bent upward with respect to the arcuate flat portion 75 and has a fastening hole 88 through which the fastening member 87 is passed.
  • the fastening hole 88 is disposed close to the upper side between the string 79 and the upper side 76 a of the first bent portion 76.
  • the fastening hole 88 is formed above an intermediate line 89 between the string 79 and the upper side 76 a of the first bent portion 76.
  • the distance between the fastening hole 88 and the bow-shaped flat portion 75 is increased, so that the operator can easily handle a tool (for example, a rivet gun) used for fastening, and workability in the manufacturing process is improved.
  • a tool for example, a rivet gun
  • the gravity acting on the arcuate flat portion 75 of the cryopanel member 62 causes the first bent portion 76 to be attached to the attachment surface 68. Acts as a pressing moment.
  • the second bent portion 77 is connected to the arcuate flat portion 75 at least at a part of the remaining portion of the string 79 (that is, a portion where the first bent portion 76 is not provided), specifically, at both ends of the string 79.
  • the second bent portion 77 is arranged away from the attachment surface 68 of the cryopanel attachment member 64 in the direction of the string 79.
  • the second bent portion 77 is on the outer side with respect to the mounting surface 68.
  • the second bent portion 77 is an edge portion that forms an angle (for example, a right angle) with respect to the arcuate flat portion 75 and extends in the direction of the string 79.
  • the second bent portion 77 stands upright with respect to the arcuate flat portion 75.
  • the second bent portion 77 is provided as a rigidity reinforcing portion of the cryopanel member 62.
  • the second bent portion 77 can suppress deformation of the bow-shaped flat portion 75.
  • the length of the end portion of the string 79 that is outside the mounting surface 68 is larger than the width of the mounting surface 68 (that is, the length of the central portion of the string 79).
  • both ends of the arcuate flat portion 75 are easily deformed such as bent or inclined by the action of gravity. Since the second bent portion 77 is provided, deformation can be suppressed even if the cryopanel member 62 is relatively large.
  • the second bent portion 77 is connected to the bow-shaped flat portion 75 over the entire length of the remaining portion of the string 79. Therefore, the second bent portion 77 is continuous with the first bent portion 76 in the direction of the string 79. Since the second bent portion 77 extends over the entire length of the remaining portion of the string 79, the deformation of the cryopanel member 62 can be more effectively suppressed.
  • the second bent portion 77 is bent upward with respect to the bow-shaped flat portion 75 in the same manner as the first bent portion 76.
  • the height of the second bent portion 77 from the bow-shaped flat portion 75 is lower than the height of the first bent portion 76 from the bow-shaped flat portion 75.
  • the second bent portion 77 is unlikely to interfere with surrounding components (for example, another cryopanel disposed adjacent to the direction of the cryopump central axis C).
  • the plurality of cryopanel members 62 can be easily arranged in the axial direction.
  • the height of the second bent portion 77 may be lower than the intermediate line 89 between the string 79 and the upper side 76 a of the first bent portion 76.
  • the second bent portion 77 may be bent in a direction or an angle different from that of the first bent portion 76.
  • the first bent portion 76 may be bent upward and the second bent portion 77 may be bent downward.
  • the first bent portion 76 may be bent perpendicularly to the arcuate flat portion 75, and the second bent portion 77 may be bent at an oblique angle with respect to the arcuate flat portion 75.
  • the second bent portion 77 may be provided only in a part of the remaining portion of the string 79 (that is, the portion where the first bent portion 76 is not provided).
  • the two cryopanel members 62 when viewed in the direction of the cryopump central axis C, the two cryopanel members 62 are arranged symmetrically with respect to an intermediate line between them (the central axis D of the refrigerator 16). ing.
  • the arc portions 78 of the two cryopanel members 62 are on the same circumference around the cryopump central axis C.
  • Each cryopanel member 62 has a line-symmetric shape with a line E passing through the midpoint of the string 79 (or the cryopump central axis C) and perpendicular to the string 79 as an axis of symmetry.
  • the shape of the remaining portion of the string 79 of the bow-shaped flat portion 75 of each cryopanel member 62 is the shape of the refrigerator 16 (for example, the second cooling stage 24 and the second cylinder 25).
  • the two cryopanel members 62 can be exchanged without interfering with each other.
  • the interval 90 between the two cryopanel members 62 is sized so that the second cooling stage 24 can be inserted between the two cryopanel members 62 at any position in the direction of the string 79. It has been established.
  • the distance 90 between the two cryopanel members 62 is constant over the entire length of the string in the direction of the string.
  • cryopanel members 62 are compatible.
  • a certain cryopanel member 62 can be attached to either of the two attachment surfaces 68 of the cryopanel attachment member 64.
  • the arc portion 78 of the cryopanel member 62 is on the same circumference when the certain cryopanel member 62 is attached to one attachment surface 68 and when attached to the other attachment surface 68.
  • the string 79 of the cryopanel member 62 is equidistant from the central axis D of the refrigerator 16 when the certain cryopanel member 62 is attached to one attachment surface 68 and when attached to the other attachment surface 68.
  • the cryopanel member 62 can be attached to either of the two attachment surfaces 68 without interfering with the second cooling stage 24 and the second cylinder 25 of the refrigerator 16.
  • the cryopanel positioning member 67 is fixed to the flange portion 24 a of the second cooling stage 24 and supported by the second cooling stage 24.
  • the cryopanel positioning member 67 is formed in an inverted L shape that is inverted upside down.
  • the vertical side portion of the cryopanel positioning member 67 is attached to the flange portion 24a with an appropriate fastening member such as a bolt.
  • An upper side portion 67 a of the cryopanel positioning member 67 extends from the flange portion 24 a of the second cooling stage 24 in the direction of the central axis D of the refrigerator 16.
  • the upper side portion 67 a extends toward the first cooling stage 22 along the second cooling stage 24 or the second cylinder 25 in the cryopanel mounting member 64.
  • the second cooling stage 24 is off the cryopump center axis C in the direction of the center axis D of the refrigerator 16.
  • the distance from the mounting seat 46 of the radiation shield 30 in the direction of the central axis D of the refrigerator 16 to the flange portion 24a of the second cooling stage 24 is from the mounting seat 46 of the radiation shield 30 in the direction of the central axis D of the refrigerator 16. It is shorter than the distance to the cryopump central axis C (inversely, it may be longer). Therefore, if the second-stage cryopanel assembly 20 is disposed immediately above the second cooling stage 24, the second-stage cryopanel assembly 20 deviates from the cryopump center axis C in the direction of the center axis D of the refrigerator 16. End up.
  • cryopanel positioning member 67 supports the two cryopanel members 62 so as to position the center of the arc portion 78 of each cryopanel member 62 on the cryopump central axis C.
  • a cryopanel positioning member 67 is formed so that the cryopanel mounting member 64 can be disposed at an appropriate position for aligning the cryopanel member 62 with respect to the cryopump central axis C.
  • the second-stage cryopanel assembly 20 is positioned on the cryopump central axis C.
  • cryopanel positioning member 67 By using the cryopanel positioning member 67, restrictions on the length of the refrigerator 16 in the direction of the central axis D are relaxed. As a result, an existing refrigerator can be employed in place of the refrigerator designed exclusively for the cryopump 10. This can be useful for reducing the manufacturing cost of the cryopump 10.
  • the upper side portion 67a of the cryopanel positioning member 67 is opposite to that shown in FIG. You may extend so that it may leave
  • the cryopanel positioning member 67 having such a shape may be suitable for the cryopump 10 having the large-diameter inlet 12.
  • the cryopump housing 70 is a housing of the cryopump 10 that houses the first-stage cryopanel 18, the second-stage cryopanel assembly 20, and the refrigerator 16, and is configured to maintain the vacuum airtightness of the internal space 14. Vacuum container.
  • the cryopump housing 70 includes the first stage cryopanel 18 and the refrigerator structure 21 in a non-contact manner.
  • the cryopump housing 70 is attached to the room temperature portion 26 of the refrigerator 16.
  • the inlet 12 is defined by the front end of the cryopump housing 70.
  • the cryopump housing 70 includes an inlet flange 72 that extends radially outward from its front end.
  • the inlet flange 72 is provided over the entire circumference of the cryopump housing 70.
  • the cryopump 10 is attached to a vacuum chamber to be evacuated using an intake port flange 72.
  • the cryopump 10 includes a gas flow adjusting member 80 configured to deflect the gas flow flowing in from the shield main opening 34 from the refrigerator structure unit 21.
  • the gas flow adjusting member 80 is configured to deflect the gas flow flowing into the main housing space 65 from the second cylinder 25 through the louver portion 50 or the open region 48.
  • the gas flow adjusting member 80 may be a gas flow deflecting member or a gas flow reflecting member disposed adjacent to and above the refrigerator structure 21 or the second cylinder 25.
  • the gas flow adjusting member 80 is, for example, a single flat plate, but may be curved.
  • the gas flow adjusting member 80 is disposed adjacent to the refrigerator structure portion 21 so as not to be in contact with both the second cooling stage 24 and the second stage cryopanel assembly 20.
  • the gas flow adjusting member 80 is disposed along the second cylinder 25 so as not to be in contact with any of the second cooling stage 24, the second stage cryopanel assembly 20, and the second cylinder 25.
  • a clearance 86 is formed between the gas flow adjusting member 80 and the second cylinder 25.
  • the gas flow adjusting member 80 extends from the shield side portion 40 toward the gap region 66 and is thermally coupled to the first cooling stage 22.
  • the gas flow adjusting member 80 is supported by the shield side portion 40. Therefore, the gas flow adjusting member 80 is cooled to the first cooling temperature.
  • the gas flow adjusting member 80 extends in the circumferential direction along the shield side portion 40 so as to at least partially block the annular gap 42.
  • the gas flow adjusting member 80 is locally provided at the same position as the shield side opening 44 in the circumferential direction.
  • the gas flow adjusting member 80 has a rectangular shape when viewed from above. Note that the gas flow adjusting member 80 is longer in the circumferential direction, and may be provided along the shield side portion 40 over the entire circumference, for example.
  • the base end portion 82 of the gas flow adjusting member 80 (that is, the portion attached to the shield side portion 40) is located radially outside the louver portion 50, it is exposed to the air inlet 12 as shown in FIG. Has been.
  • the base end portion 82 of the gas flow adjusting member 80 is visible from the outside of the cryopump 10 through the open region 48 and the annular gap 42.
  • the base end portion 82 does not overlap the top cryopanel 60 when viewed in the axial direction.
  • the distal end portion 84 of the gas flow adjusting member 80 enters the gap region 66 and is covered with the top cryopanel 60.
  • the distal end portion 84 is disposed between the outer peripheral end of the top cryopanel 60 and the central axis C in the cryopump radial direction. Since the tip end portion 84 does not reach the second cooling stage 24, the gas flow adjusting member 80 is not in contact with the second cooling stage 24 as described above.
  • the gas flow adjusting member 80 is inserted into the gap region 66 between the top cryopanel 60 and the second cylinder 25, whereby the inlet of the gap region 66 is narrowed. Therefore, gas inflow from the main housing space 65 to the gap region 66 can be reduced.
  • the vacuum chamber is first roughed to about 1 Pa with another appropriate roughing pump before the operation. Thereafter, the cryopump 10 is operated.
  • the first cooling stage 22 and the second cooling stage 24 are cooled to the first cooling temperature and the second cooling temperature, respectively, by driving the refrigerator 16. Therefore, the first-stage cryopanel 18 and the second-stage cryopanel assembly 20 that are thermally coupled to these are also cooled to the first cooling temperature and the second cooling temperature, respectively. Since the gas flow adjusting member 80 is thermally coupled to the first cooling stage 22, it is cooled to the first cooling temperature.
  • the inlet cryopanel 32 cools the gas flying from the vacuum chamber toward the cryopump 10.
  • a gas having a sufficiently low vapor pressure (for example, 10 ⁇ 8 Pa or less) condenses on the surface of the inlet cryopanel 32 at the first cooling temperature.
  • This gas may be referred to as a first type gas.
  • the first type gas is, for example, water vapor.
  • the inlet cryopanel 32 can exhaust the first type gas.
  • a part of the gas whose vapor pressure is not sufficiently low at the first cooling temperature passes through the louver part 50 or the open region 48 and enters the main accommodating space 65. Alternatively, the other part of the gas is reflected by the inlet cryopanel 32 and does not enter the main accommodating space 65.
  • the gas that has entered the main housing space 65 is cooled by the second-stage cryopanel assembly 20.
  • a gas having a sufficiently low vapor pressure (for example, 10 ⁇ 8 Pa or less) is condensed on the surface of the second stage cryopanel assembly 20 at the second cooling temperature.
  • This gas may be referred to as a second type gas.
  • the second type gas is, for example, argon.
  • the second stage cryopanel assembly 20 can exhaust the second type gas. Since it faces the main housing space 65 directly, a condensed layer of the second type gas can grow greatly on the front surface of the top cryopanel 60.
  • the second type gas is a gas that does not condense at the first cooling temperature.
  • the gas whose vapor pressure is not sufficiently low at the second cooling temperature is adsorbed by the adsorbent of the second stage cryopanel assembly 20.
  • This gas may be referred to as a third type gas.
  • the third type gas is, for example, hydrogen.
  • the second stage cryopanel assembly 20 can exhaust the third type gas. Therefore, the cryopump 10 can exhaust various gases by condensation or adsorption, and can reach the desired vacuum level of the vacuum chamber.
  • the two cryopanel members 62 are interchangeable.
  • the two cryopanel members 62 are at least partially identical in shape. Thereby, at least a part of the manufacturing process of the second-stage cryopanel assembly 20 can be shared, leading to a reduction in manufacturing cost of the cryopump 10.
  • the two cryopanel members 62 are designed as the same part.
  • the two cryopanel members are manufactured in the same manufacturing process. The number of cryopump parts is reduced. Manufacturing costs are further reduced.
  • This idea can be developed for cryopanel members 62 having different diameters, and part of the manufacturing process can be shared.
  • the first bent portion 76 (fastening portion) into a common shape among the cryopanel members having different diameters, and making the arc portion 78 of the arcuate flat portion 75 flat, it is possible to make the die for press working common. it can.
  • the cryopanel member 62 having a large diameter for example, bending or punching
  • the cryopanel member 62 having a smaller diameter can be pressed.
  • the mold is generally relatively expensive, the common use of the mold is effective in reducing the manufacturing cost. This is advantageous for a manufacturer that provides a plurality of types of cryopumps 10 having different inlet 12 diameters.
  • the cryopump 10 is provided with the gas flow adjusting member 80. Since the gas flow adjusting member 80 covers the second cylinder 25, the second cylinder 25 is not exposed to the shield main opening 34.
  • the gas flow adjusting member 80 can deflect the flow of the second type gas from the main housing space 65 toward the second cylinder 25 in the other direction. Therefore, the second cylinder 25 has a temperature distribution from the first cooling temperature to the second cooling temperature on the surface thereof, but there is almost no second type gas condensed on the surface portion of the second cooling temperature or a temperature close thereto. Or not at all. Further, since the gas flow adjusting member 80 has the first cooling temperature, the second type gas is not condensed on the surface of the gas flow adjusting member 80.
  • a part of the gas that has entered the main housing space 65 can be reflected by the gas flow adjusting member 80. At least a portion of the reflected gas is directed to the second stage cryopanel assembly 20. Alternatively, a portion of the reflected gas can be directed to the radiation shield 30 or the inlet cryopanel 32 where it is again reflected and directed to the second stage cryopanel assembly 20.
  • the second stage cryopanel assembly 20 can exhaust the second type gas by condensation and exhaust the third type gas by adsorption.
  • the cryopump generally has two types of cryopanels with different temperatures. Gas condenses on the cryopanel at low temperature. As the cryopump is used, a condensed layer grows on the low-temperature cryopanel. Similarly, a condensed layer can grow on the structure supporting the low-temperature cryopanel. Any of the grown condensed layers can come into contact with a high-temperature cryopanel. If it does so, gas will be vaporized again in the contact part of a high-temperature cryopanel and a condensed layer, and will be discharge
  • the gas flow adjusting member 80 reduces or prevents the growth of the condensed layer in a place where the first cooling temperature portion and the second cooling temperature portion approach each other. Can do.
  • the cryopump 10 can alleviate or prevent the contact between the condensed layer and the portion of the first cooling temperature, and thus the re-vaporization of the condensed layer.
  • a large amount of the second type gas can be condensed on the front surface of the top cryopanel 60 in the main housing space 65. Therefore, the gas occlusion amount of the cryopump 10 can be improved.
  • a plurality of cryopanel members 62 may be attached to each attachment surface 68 of the cryopanel attachment member 64.
  • a plurality (two in this example) of cryopanel members 62 are arranged in the direction of the center axis of the cryopump. In this way, a plurality of cryopanel members 62 can be arranged on both sides of the second cooling stage 24 of the refrigerator 16.
  • the horizontal cryopump 10 has been described as an example. However, the present invention can also be applied to a so-called vertical cryopump.
  • the vertical cryopump generally refers to a cryopump in which the refrigerator 16 is disposed along the center axis C of the cryopump.
  • the shape of the cryopanel member 62 is not limited to that described above, and may have other shapes.
  • the arcuate flat portion 75, the first bent portion 76, and / or the second bent portion 77 may not be completely flat as a whole.
  • the arcuate flat portion 75 may have an inclined surface, a concave portion, or a convex portion at any portion (for example, a portion excluding the arc portion 78).
  • it is not essential that the arc portion 78 of the cryopanel member 62 is a strict arc.
  • the string 79 of the cryopanel member 62 is an exact straight line.
  • the arcuate flat portion 75, the first bent portion 76, and / or the second bent portion 77 may have an opening such as a hole or a slit.
  • the mounting seat 46 of the radiation shield 30 is formed in the lower half of the radiation shield 30. Therefore, the second cooling stage 24 is relatively close to the shield bottom 38 in the direction of the cryopump central axis C.
  • the mounting seat 46 of the radiation shield 30 may be formed in the upper half of the radiation shield 30, and the second cooling stage 24 may be disposed close to the shield front end 36 in the direction of the cryopump central axis C.
  • a mounting seat 46 of the radiation shield 30 is formed at the center of the shield side portion 40 in the direction of the cryopump central axis C, and the second cooling stage 24 is located at the center of the radiation shield 30 in the direction of the cryopump central axis C. It may be arranged.
  • the embodiment of the present invention can also be expressed as follows.
  • a refrigerator having a high temperature cooling stage and a low temperature cooling stage;
  • a radiation shield that is thermally coupled to the high temperature cooling stage and extends in the direction of the cryopump central axis passing through the center of the cryopump inlet and surrounds the low temperature cooling stage;
  • a low-temperature cryopanel portion that is thermally coupled to the low-temperature cooling stage and is surrounded by the radiation shield together with the low-temperature cooling stage, between the upper end and the lower end of the low-temperature cooling stage in the direction of the cryopump central axis
  • a low-temperature cryopanel portion comprising two cryopanel members disposed on both sides of the low-temperature cooling stage across the cryopump central axis at a height position of
  • Each cryopanel member includes an arcuate flat portion having an arc portion and a string, and a first bent portion integrally formed with the arcuate flat portion and connected to the arcuate flat portion at a part of the chord.
  • the arcuate flat portion is thermally coupled to the low-temperature cooling stage via the first bent portion, and the arc portion of the arcuate flat portion is viewed in the direction of the cryopump central axis.
  • the shape of the rest of the string of the bow-shaped flat portion of each cryopanel member is determined so that the two cryopanel members can be exchanged with each other without interfering with the refrigerator. Cryopump.
  • each cryopanel member includes a second bent portion integrally formed with the bow-shaped flat portion and connected to the bow-shaped flat portion at least at a part of the remaining portion of the string, and the second bent portion includes the second bent portion,
  • the second bent portion is connected to the bow-shaped flat portion over the entire length of the remaining portion of the string, and is continuous with the first bent portion in the direction of the string.
  • the interval between the two cryopanel members is determined to be such that the low-temperature cooling stage can be inserted between the two cryopanel members at any position in the direction of the string.
  • the cryopump according to any one of Forms 1 to 4.
  • the first bent portion is bent upward with respect to the bow-shaped flat portion, and has a hole through which a fastening member passes.
  • the cryopump further includes a cryopanel positioning member supported by the low-temperature cooling stage and extending from the low-temperature cooling stage in a direction perpendicular to the central axis of the cryopump.
  • Embodiment 1 is characterized in that the cryopanel positioning member supports the two cryopanel members so as to position the center of the arc portion of the arcuate flat portion of each cryopanel member on the center axis of the cryopump.
  • the cryopump according to any one of 7 to 7.
  • a refrigerator having a high temperature cooling stage and a low temperature cooling stage;
  • a radiation shield that is thermally coupled to the high temperature cooling stage and extends in the direction of the cryopump central axis passing through the center of the cryopump inlet and surrounds the low temperature cooling stage;
  • a low-temperature cryopanel portion that is thermally coupled to the low-temperature cooling stage and surrounded by the radiation shield together with the low-temperature cooling stage, and is disposed on both sides of the low-temperature cooling stage with the cryopump central axis interposed therebetween
  • a low-temperature cryopanel section comprising two cryopanel members; Two mounting surfaces respectively corresponding to the two cryopanel members,
  • Each cryopanel member includes an arcuate flat portion having an arc portion and a string, and a first bent portion integrally formed with the arcuate flat portion and connected to the arcuate flat portion at a part of the chord.
  • the first bent portion is attached to a corresponding mounting surface, and the arcuate flat portion is thermally coupled to the low-temperature cooling stage via the first bent portion,
  • the shape of the rest of the string of the bow-shaped flat part of each cryopanel member is determined so that the two cryopanel members can be exchanged with each other without interfering with the refrigerator,
  • Each cryopanel member includes a second bent portion integrally formed with the bow-shaped flat portion and connected to the bow-shaped flat portion at least at a part of the remaining portion of the string.
  • a cryopump wherein the cryopump is arranged away from the mounting surface in a string direction.
  • cryopump is disposed on both sides of the cryogenic cooling stage with the cryopump central axis in between at a height position between an upper end and a lower end of the cryogenic cooling stage in the direction of the cryopump central axis.
  • Embodiments 9 to 11 characterized in that the second bent portion is connected to the bow-shaped flat portion over the entire length of the remaining portion of the string and is continuous with the first bent portion in the direction of the string.
  • the cryopump according to any one of the above.
  • the interval between the two cryopanel members is determined to be such that the low-temperature cooling stage can be inserted between the two cryopanel members at any position in the direction of the string.
  • the cryopump according to any one of forms 9 to 13.
  • the first bent portion is bent upward with respect to the bow-shaped flat portion, and has a hole through which a fastening member passes.
  • the cryopump further includes a cryopanel positioning member supported by the low-temperature cooling stage and extending from the low-temperature cooling stage in a direction perpendicular to the central axis of the cryopump.
  • the ninth embodiment is characterized in that the cryopanel positioning member supports the two cryopanel members so as to position the center of the arc portion of the arcuate flat portion of each cryopanel member on the center axis of the cryopump.
  • the cryopump according to any one of 1 to 16.
  • cryopump 10 cryopump, 12 inlet, 16 refrigerator, 24 second cooling stage, 30 radiation shield, 62 cryopanel member, 67 cryopanel positioning member, 68 mounting surface, 75 arcuate flat part, 76 first bent part, 77 2nd bent part, 78 arc part, C cryopump central axis, 79 strings, 87 fastening members, 88 fastening holes.
  • the present invention can be used in the field of cryopumps.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

Selon la présente invention, une partie panneau cryogénique basse température de cette pompe cryogénique est pourvue de deux éléments (62) de panneau cryogénique disposés des deux côtés d'un étage de refroidissement à basse température ayant un axe central de pompe cryogénique entre eux. Chacun des éléments (62) de panneau cryogénique comporte : une partie plate en forme d'arc (75), ayant une partie arquée circulaire (78) et une corde (79) ; et une première partie courbée (76) formée d'un seul tenant avec la partie plate en forme d'arc (75) et reliée à la partie plate en forme d'arc (75) au niveau d'une partie de la corde (79). La partie plate en forme d'arc (75) est thermiquement couplée à l'étage de refroidissement à basse température à travers la première partie courbée (76). La forme de la partie restante de la corde de la partie plate en forme d'arc (75) de chacun des éléments (62) de panneau cryogénique est déterminée de façon à permettre aux deux éléments (62) de panneau cryogénique d'être interchangeables sans interférer avec un réfrigérateur.
PCT/JP2018/003606 2017-02-08 2018-02-02 Pompe cryogénique WO2018147187A1 (fr)

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KR1020217039684A KR102436493B1 (ko) 2017-02-08 2018-02-02 크라이오펌프
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023105349A1 (fr) * 2021-12-08 2023-06-15 Edwards Vacuum Llc Pompe cryogénique

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020049916A1 (fr) * 2018-09-06 2020-03-12 住友重機械工業株式会社 Cryopompe et panneau cryogénique
CN112523993A (zh) * 2020-12-03 2021-03-19 安徽万瑞冷电科技有限公司 吸附阵及具有该吸附阵的低温泵

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012047120A (ja) * 2010-08-27 2012-03-08 Aisin Seiki Co Ltd クライオポンプ
JP2014227989A (ja) * 2013-05-27 2014-12-08 住友重機械工業株式会社 クライオポンプ、及び真空排気方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4555907A (en) * 1984-05-18 1985-12-03 Helix Technology Corporation Cryopump with improved second stage array
ATE91531T1 (de) * 1989-02-28 1993-07-15 Leybold Ag Mit einem zweistufigen refrigerator betriebene kryopumpe.
JP3309229B2 (ja) * 1992-07-16 2002-07-29 アルバック・クライオ株式会社 ターボ分子ポンプ付クライオポンプ装置
JPH0735041A (ja) * 1993-07-14 1995-02-03 Fujitsu Ltd クライオポンプ
JP3609474B2 (ja) * 1995-02-14 2005-01-12 アルバック・クライオ株式会社 クライオポンプ
JP4980179B2 (ja) * 2007-09-06 2012-07-18 住友重機械工業株式会社 クライオパネル
JP4980180B2 (ja) * 2007-09-06 2012-07-18 住友重機械工業株式会社 クライオパネル
JP5031548B2 (ja) * 2007-12-28 2012-09-19 住友重機械工業株式会社 クライオポンプ
JP5660979B2 (ja) * 2011-06-08 2015-01-28 住友重機械工業株式会社 クライオポンプ及び極低温冷凍機
JP6013886B2 (ja) * 2012-11-13 2016-10-25 住友重機械工業株式会社 クライオポンプ
JP6415230B2 (ja) * 2014-10-07 2018-10-31 住友重機械工業株式会社 クライオポンプ
CN106014916B (zh) * 2015-03-31 2018-07-03 住友重机械工业株式会社 低温泵

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012047120A (ja) * 2010-08-27 2012-03-08 Aisin Seiki Co Ltd クライオポンプ
JP2014227989A (ja) * 2013-05-27 2014-12-08 住友重機械工業株式会社 クライオポンプ、及び真空排気方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023105349A1 (fr) * 2021-12-08 2023-06-15 Edwards Vacuum Llc Pompe cryogénique

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