WO2018139345A1 - Dispositif de détection du nombre de particules fines - Google Patents

Dispositif de détection du nombre de particules fines Download PDF

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Publication number
WO2018139345A1
WO2018139345A1 PCT/JP2018/001499 JP2018001499W WO2018139345A1 WO 2018139345 A1 WO2018139345 A1 WO 2018139345A1 JP 2018001499 W JP2018001499 W JP 2018001499W WO 2018139345 A1 WO2018139345 A1 WO 2018139345A1
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WO
WIPO (PCT)
Prior art keywords
electrode
fine particles
generation element
charge generation
charge
Prior art date
Application number
PCT/JP2018/001499
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English (en)
Japanese (ja)
Inventor
和幸 水野
英正 奥村
京一 菅野
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日本碍子株式会社
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Publication date
Application filed by 日本碍子株式会社 filed Critical 日本碍子株式会社
Priority to JP2018564526A priority Critical patent/JPWO2018139345A1/ja
Publication of WO2018139345A1 publication Critical patent/WO2018139345A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/06—Investigating concentration of particle suspensions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/60—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrostatic variables, e.g. electrographic flaw testing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01T—SPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS; SPARKING PLUGS; CORONA DEVICES; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
    • H01T23/00—Apparatus for generating ions to be introduced into non-enclosed gases, e.g. into the atmosphere

Definitions

  • the present invention relates to a particle number detector.
  • the particle number detector uses a charge generation element to generate ions by corona discharge, and the ions in the gas to be measured are charged by the ions, and the charged particles are collected.
  • a method for measuring the number of fine particles based on this is known.
  • Patent Document 1 proposes to provide one heater
  • Patent Document 2 proposes to provide a plurality of heaters that raise the temperature of each part. Therefore, referring to Patent Document 2, it is conceivable to provide a dedicated heater for raising the temperature of the charge generation element.
  • the configuration of the detector becomes complicated.
  • the heater is separate from the charge generation element, there is a problem that it takes time for the heat of the heater to be transmitted to the charge generation element and the temperature responsiveness is not good.
  • the present invention has been made to solve such a problem, and has as its main object to make the particle number detector compact and to quickly change the temperature of the charge generating element.
  • the particle number detector of the present invention is A charge generating element having a pair of electrodes for generating electric charge by air discharge, and adding the electric charge to the fine particles in the gas introduced into the vent tube to form charged fine particles; A heating power source for passing a current to a ground electrode of the pair of electrodes of the charge generation element; A detecting means for collecting the charged fine particles, and detecting the number of fine particles in the gas based on the amount of charges of the charged fine particles collected by the collecting electrode; It is equipped with.
  • the charge generation element In this particle number detector, the charge generation element generates charges by air discharge, and the generated charges are added to the particles in the gas introduced into the vent tube to form charged particles. Then, the number of fine particles in the gas is detected based on the amount of charge of the charged fine particles collected by the collecting electrode.
  • the ground electrode of the charge generation element is used as a heater by passing a current. For example, when condensation occurs in the charge generation element, the condensation can be removed by using the ground electrode as a heater. Further, when fine particles are deposited on the charge generation element, the deposited fine particles can be incinerated by using the ground electrode as a heater.
  • the detector can be made compact and the temperature of the charge generation element can be reduced as compared with the case where a separate heater for the charge generation element is provided. It can also be changed quickly.
  • charge includes positive charges and negative charges as well as ions.
  • Detecting the number of fine particles determines whether or not the number of fine particles falls within a predetermined numerical range (for example, whether or not a predetermined threshold value is exceeded) in addition to measuring the number of fine particles. Including cases.
  • At least a heater electrode that heats the collection electrode may be provided, and the heating power source may flow current to both the ground electrode and the heater electrode. If it carries out like this, the heater electrode heats a collection electrode, and the fine particle deposited on the collection electrode can be incinerated. In addition, since the heating power supply passes a current to both the ground electrode and the heater electrode, it is not necessary to prepare a plurality of heating power supplies.
  • the charge generation element includes a dielectric, a discharge electrode provided on one surface of the dielectric, and an induction electrode provided on the other surface of the dielectric.
  • the induction electrode may be used as the ground electrode.
  • the charge generation element is a charge generation element comprising a needle-like electrode and a counter electrode provided at a position spaced from the needle-like electrode and facing the needle-like electrode. It may be used as a ground electrode.
  • FIG. 3 is a cross-sectional view illustrating a schematic configuration of the particle number detector 10.
  • FIG. 6 is a cross-sectional view illustrating a schematic configuration of a modified example of the fine particle number detector 10.
  • FIG. 3 is a cross-sectional view showing a schematic configuration of a particle number detector 110.
  • FIG. 3 is a perspective view showing a schematic configuration of a charge generation element 120. Sectional drawing which shows schematic structure of the modification of the fine particle number detector 110.
  • FIG. FIG. 3 is a cross-sectional view illustrating a schematic configuration of a charge generation element 220.
  • FIG. 1 is a cross-sectional view illustrating a schematic configuration of the particle number detector 10.
  • the fine particle number detector 10 measures the number of fine particles contained in a gas (for example, exhaust gas from an automobile).
  • the particle number detector 10 includes a charge generating element 20, a collecting device 40, a surplus charge removing device 50, a number measuring device 60, and a heater device 70 in a ceramic ventilation tube 12.
  • the vent pipe 12 includes a gas inlet 12a for introducing gas into the vent pipe 12, a gas outlet 12b for discharging the gas that has passed through the vent pipe 12, and a gap between the gas inlet 12a and the gas outlet 12b. It has the hollow part 12c which is space.
  • the charge generating element 20 is provided on the side of the vent pipe 12 close to the gas inlet 12a.
  • the charge generation element 20 includes a needle electrode 22 and a counter electrode 24 disposed so as to face the needle electrode 22. Further, the needle electrode 22 and the counter electrode 24 are connected to a discharge power source 26 that applies a voltage Vp (eg, a pulse voltage).
  • Vp eg, a pulse voltage
  • the counter electrode 24 is a ground electrode.
  • the heating power supply 28 applies a voltage between the terminals provided at both ends of the counter electrode 24 and causes a current to flow through the counter electrode 24, thereby causing the counter electrode 24 to generate heat.
  • the temperature of the charge generation element 20 can be controlled by adjusting the voltage applied between the terminals of the counter electrode 24.
  • the collection device 40 is a device that collects the charged fine particles P, and is provided in the hollow portion 12 c in the vent pipe 12.
  • the collection device 40 includes an electric field generation unit 42 and a collection electrode 48.
  • the electric field generating part 42 has a negative electrode 44 embedded in the wall of the hollow part 12 c and a positive electrode 46 embedded in the wall facing the negative electrode 44.
  • the collection electrode 48 is exposed on the wall of the hollow portion 12c in which the positive electrode 46 is embedded.
  • a negative potential ⁇ V1 is applied to the negative electrode 44 of the electric field generator 42, and a ground potential Vss is applied to the positive electrode 46.
  • the level of the negative potential ⁇ V1 is from the ⁇ mV order to ⁇ several tens of volts.
  • the surplus charge removing device 50 is a device that removes the electric charge 18 that has not been added to the fine particles 16, and is provided in front of the collecting device 40 (upstream in the gas traveling direction) in the hollow portion 12c.
  • the surplus charge removing device 50 includes an electric field generating unit 52 and a removing electrode 58.
  • the electric field generator 52 has a negative electrode 54 embedded in the wall of the hollow portion 12 c and a positive electrode 56 embedded in the wall facing the negative electrode 54.
  • the removal electrode 58 is exposed on the wall of the hollow portion 12c in which the positive electrode 56 is embedded.
  • a negative potential ⁇ V2 is applied to the negative electrode 54 of the electric field generator 52, and a ground potential Vss is applied to the positive electrode 56.
  • the level of the negative potential ⁇ V2 is from the ⁇ mV order to ⁇ several tens of volts.
  • the absolute value of the negative potential ⁇ V2 is one digit or more smaller than the absolute value of the negative potential ⁇ V1 applied to the negative electrode 44 of the collection device 40.
  • the number measuring device 60 is a device that measures the number of fine particles 16 based on the amount of charges 18 of the charged fine particles P collected by the collecting electrode 48, and includes a current measuring unit 62 and a number calculating unit 64. Yes. Between the current measuring unit 62 and the collecting electrode 48, a capacitor 66, a resistor 67, and a switch 68 are connected in series from the collecting electrode 48 side.
  • the switch 68 is preferably a semiconductor switch. When the switch 68 is turned on and the collecting electrode 48 and the current measuring unit 62 are electrically connected, the current based on the charge 18 added to the charged fine particles P adhering to the collecting electrode 48 is supplied to the capacitor 66 and the resistance.
  • the current measurement unit 62 It is transmitted to the current measurement unit 62 as a transient response through a series circuit composed of the device 67.
  • the current measuring unit 62 can use a normal ammeter.
  • the number calculation unit 64 calculates the number of fine particles 16 based on the current value from the current measurement unit 62.
  • the collection device 40 and the number measuring device 60 correspond to the detection means of the present invention.
  • the heater device 70 includes a heater electrode 72 and a heater power source 74.
  • the heater electrode 72 is embedded in the wall on which the collecting electrode 48 is provided.
  • the heater power source 74 causes the heater electrode 72 to generate heat by applying a voltage between the terminals provided at both ends of the heater electrode 72 and causing a current to flow through the heater electrode 72.
  • the heater 70 is also used when the number of fine particles is measured in a state in which the influence of polymer hydrocarbons called SOF (Soluble Organic Fraction) is eliminated.
  • SOF Soluble Organic Fraction
  • the particulate number detector 10 When measuring particulates contained in the exhaust gas of an automobile, the particulate number detector 10 is attached in the exhaust pipe of the engine. At this time, the particulate matter detector 10 is attached so that the exhaust gas is introduced into the vent pipe 12 from the gas inlet 12a of the particulate detector 10 and discharged from the gas outlet 12b.
  • the fine particles 16 contained in the exhaust gas introduced into the vent pipe 12 from the gas inlet 12a are added with charges 18 (electrons) when passing through the charge generating element 20 to become charged fine particles P, and then enter the hollow portion 12c. enter.
  • the charged fine particles P pass through the surplus charge removing device 50 as it is, whose electric field is weak and the length of the removal electrode 58 is 1/20 to 1/10 of the length of the hollow portion 12c, and reaches the collecting device 40.
  • the electric charges 18 that have not been added to the fine particles 16 also enter the hollow portion 12c.
  • Such charges 18 are attracted to the positive electrode 56 of the surplus charge removing device 50 even if the electric field is weak, and are discarded to the GND via the removing electrode 58 installed in the middle thereof. Thereby, the unnecessary charges 18 that have not been added to the fine particles 16 hardly reach the collection device 40.
  • the charged fine particles P When the charged fine particles P reach the collecting device 40, they are attracted to the positive electrode 46 and collected by the collecting electrode 48 installed in the middle thereof. A current based on the electric charge 18 of the charged fine particles P attached to the collecting electrode 48 is transmitted as a transient response to the current measuring unit 62 of the number measuring device 60 through a series circuit including a capacitor 66 and a resistor 67.
  • the number calculation unit 64 integrates (accumulates) the current value from the current measurement unit 62 over a period during which the switch 68 is on (switch-on period) to obtain an integral value (accumulated charge amount) of the current value. . After the switch-on period, the accumulated charge amount is divided by the elementary charge to obtain the total number of charges (collected charge number), and the collected charge number is divided by the average value of the number of charges added to one fine particle 16. Thus, the number of fine particles 16 attached to the collecting electrode 48 over a certain time (for example, 5 to 15 seconds) can be obtained.
  • the number calculating unit 64 repeatedly performs the calculation for calculating the number of the fine particles 16 in a predetermined time over a predetermined period (for example, 1 to 5 minutes) and accumulates the fine particles attached to the collection electrode 48 over the predetermined period.
  • the number of 16 can be calculated. Further, by using the transient response by the capacitor 66 and the resistor 67, it is possible to measure even with a small current, and the number of the fine particles 16 can be detected with high accuracy.
  • a minute current at a pA (picoampere) level or an nA (nanoampere) level for example, a minute current can be measured by increasing the time constant using the resistor 67 having a large resistance value.
  • fine particles or the like may be deposited on the needle electrode 22 or the counter electrode 24 of the charge generation element 20.
  • the heating power supply 28 is controlled so that a predetermined refresh voltage is applied between the pair of terminals of the counter electrode 24 of the charge generation element 20.
  • the counter electrode 24 to which a predetermined refresh voltage is applied reaches a temperature at which the acicular electrode 22 and fine particles deposited on the counter electrode 24 can be incinerated. Thereby, the charge generation element 20 can be refreshed.
  • fine particles or the like may be deposited on the collecting electrode 48.
  • the heater power supply 74 is controlled so that a predetermined refresh voltage is applied between the pair of terminals of the heater electrode 72.
  • the heater electrode 72 to which a predetermined refresh voltage is applied reaches a temperature at which the charged fine particles P collected by the collection electrode 48 can be incinerated. Thereby, the collection electrode 48 can be refreshed.
  • a predetermined condensation prevention voltage is set between the pair of terminals of the counter electrode 24 of the charge generation element 20.
  • the heating power supply 28 is controlled so that is applied.
  • the counter electrode 24 to which a predetermined dew condensation prevention voltage is applied has a temperature at which water droplets condensed on the needle electrode 22 and the counter electrode 24 can be evaporated. Thereby, the condensation accumulated in the charge generation element 20 can be evaporated and dried.
  • the counter electrode 24 of the charge generation element 20 is also used as a heater. Therefore, the particle number detector 10 can be made compact and the temperature of the charge generation element 20 can be changed quickly as compared with the case where a dedicated heater for the charge generation element 20 is separately provided.
  • the counter electrode 24 may be heated by simultaneously flowing the air in the air by the charge generation element 20. This is because the applied voltage when the counter electrode 24 generates heat is much smaller than the applied voltage when the charge generating element 20 performs air discharge.
  • FIG. 2 is a cross-sectional view showing a schematic configuration of a modification in which the heater power source 74 of the particle number detector 10 of the first embodiment is omitted.
  • the same components as those in the first embodiment described above are denoted by the same reference numerals. By doing so, the heater power supply 74 is not necessary, and the configuration is further simplified.
  • the surplus charge removing device 50 is provided, but the surplus charge removing device 50 may be omitted.
  • the needle-like electrode 22 is provided so that the tip thereof protrudes into the hollow portion 12c, but is not particularly limited thereto.
  • a flat needle electrode may be provided by printing on the inner wall surface of the vent pipe 12 at a position facing the counter electrode 24.
  • FIG. 3 is a cross-sectional view showing a schematic configuration of the particle number detector 110 of the second embodiment
  • FIG. 4 is a perspective view showing a schematic configuration of the charge generation element 120.
  • the particle number detector 110 of the second embodiment has the same configuration as that of the first embodiment, except that the charge generation element 120 is used instead of the charge generation element 20 of the first embodiment. Therefore, in the second embodiment, the same components as those in the first embodiment are denoted by the same reference numerals, and the description thereof is omitted.
  • the charge generating element 120 is provided on the side of the vent pipe 12 close to the gas inlet 12a.
  • the charge generation element 120 includes a dielectric layer 121, a discharge electrode 122, and an induction electrode 124.
  • the dielectric layer 121 is a rectangular plate-like member made of mica, ceramic, glass epoxy, or the like.
  • the discharge electrode 122 is provided on one surface of the dielectric layer 121, has a shape in plan view smaller than that of the dielectric layer 121, and has a plurality of fine protrusions 122a around it.
  • the induction electrode 124 is a rectangular electrode provided on the other surface of the dielectric layer 121 and having the same size as the dielectric layer 121.
  • the discharge electrode 122 and the induction electrode 124 are connected to the discharge power supply 26.
  • the induction electrode 124 is a ground electrode.
  • the power supply 128 for heating causes the induction electrode 124 to generate heat by applying a voltage between terminals provided at both ends of the induction electrode 124 and causing a current to flow through the induction electrode 124.
  • the temperature of the charge generation element 120 can be controlled by adjusting the voltage applied between the terminals of the induction electrode 124.
  • the particle number detector 110 of the second embodiment can determine the number of particles 16 in the same manner as the particle number detector 10 of the first embodiment. Therefore, the description is omitted here.
  • fine particles or the like may be deposited on the discharge electrode 122 of the charge generation element 120.
  • the heating power supply 128 is controlled so that a predetermined refresh voltage is applied between the pair of terminals of the induction electrode 124 of the charge generation element 120.
  • the induction electrode 124 to which a predetermined refresh voltage is applied has a temperature at which fine particles deposited on the discharge electrode 122 can be incinerated. Thereby, the charge generation element 120 can be refreshed. Since the refreshing of the collecting electrode 48 is the same as that of the first embodiment, the description thereof is omitted here.
  • a predetermined condensation prevention voltage is applied between the pair of terminals of the induction electrode 124 of the charge generation element 120.
  • the heating power supply 128 is controlled so that The induction electrode 124 to which a predetermined condensation prevention voltage is applied has a temperature at which water droplets condensed on the discharge electrode 122 can be evaporated. Thereby, the condensation accumulated in the charge generation element 120 can be evaporated and dried.
  • the induction electrode 124 of the charge generation element 120 is also used as a heater. Therefore, the particle number detector 110 can be made compact and the temperature of the charge generation element 120 can be changed quickly as compared with the case where a dedicated heater for the charge generation element 120 is separately provided.
  • the discharge electrode 122 since the discharge electrode 122 includes the fine protrusions 122a around it, the electric field tends to concentrate between the fine protrusions 122a and the induction electrode 124. Therefore, a discharge can be easily generated between the electrodes 122 and 124 even at a low voltage, and a stable discharge can be performed even if the discharge start voltage is kept low.
  • the present invention is not limited to the second embodiment described above, and it goes without saying that the present invention can be implemented in various modes as long as it belongs to the technical scope of the present invention.
  • current may be supplied to the induction electrode 124 and heated at the same time as the charge generation element 120 performs air discharge. This is because the applied voltage when the induction electrode 124 generates heat is much smaller than the applied voltage when the charge generating element 120 discharges in the air.
  • FIG. 5 is a cross-sectional view showing a schematic configuration of a modification in which the heater power supply 74 of the particle number detector 110 of the second embodiment is omitted.
  • the same components as those in the second embodiment described above are denoted by the same reference numerals. By doing so, the heater power supply 74 is not necessary, and the configuration is further simplified.
  • the dielectric electrode 224 is embedded in the ventilation pipe 12
  • the discharge electrode 222 is installed at a position facing the dielectric electrode 224 on the inner wall surface of the ventilation pipe 12, and the discharge electrode 222 and the dielectric are formed in the ventilation pipe 12.
  • a portion sandwiched between the electrodes 224 is used as a dielectric layer.
  • the discharge electrode 222 and the induction electrode 224 are connected to the discharge power supply 26.
  • the induction electrode 224 is connected to the heating power supply 128. Even if it does in this way, the effect similar to 2nd Embodiment mentioned above will be acquired.
  • the surplus charge removing device 50 is provided, but the surplus charge removing device 50 may be omitted. Further, although the plurality of fine protrusions 122a are provided around the discharge electrode 122, the fine protrusions 122a may be omitted.
  • the case where the number of negatively charged charged fine particles P is measured has been described. Can be measured.
  • a positive voltage may be applied to the negative electrode 44 and the charged fine particles P may be collected on the collecting electrode 48 using Coulomb repulsion.
  • the present invention can be used to detect the number of fine particles in exhaust gas from a power machine such as an automobile.
  • 10 110 particle number detector, 12 vent tube, 20, 120, 220 charge generation element, 12a gas inlet, 12b gas outlet, 12c hollow part, 16 particles, 18 charges, 20 radiation unit, 22 needle electrode, 24 counter electrode, 26 discharge power supply, 28 heating power supply, 40 collection device, 42 electric field generation unit, 44 negative electrode, 46 positive electrode, 48 collection electrode, 50 surplus charge removal device, 52 electric field generation unit, 54 negative electrode, 56 Positive electrode, 58 removal electrode, 60 count measurement device, 62 current measurement unit, 64 count calculation unit, 66 capacitor, 67 resistor, 68 switch, 70 heater device, 72 heater electrode, 74 heater power supply, 121 dielectric layer, 122, 222 discharge electrode, 122a fine protrusion, 124, 224 induction electrode, 128 heating Power, P charged fine particles.

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Abstract

L'invention concerne un dispositif (10) de détection du nombre de particules fines possédant, agencé dans un tuyau d'évent (12), un élément de génération de charge électrique (20), un dispositif de collecte (40), un dispositif d'élimination de charge électrique excédentaire (50) et un dispositif de mesure de nombre (60). L'élément de génération de charge électrique (20) comprend une électrode de type aiguille (22) et une contre-électrode (24) et ajoute des charges électriques (18) à des particules fines (16) dans un gaz introduit dans le tuyau d'évent (12), afin d'obtenir des particules fines chargées P. En outre, la contre-électrode (24) de l'élément de génération de charge électrique (20) est utilisée en tant que dispositif de chauffage en faisant passer un courant à travers ce dernier.
PCT/JP2018/001499 2017-01-26 2018-01-19 Dispositif de détection du nombre de particules fines WO2018139345A1 (fr)

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Application Number Priority Date Filing Date Title
JP2018564526A JPWO2018139345A1 (ja) 2017-01-26 2018-01-19 微粒子数検出器

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JP2017012024 2017-01-26
JP2017-012024 2017-01-26

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WO2018139345A1 true WO2018139345A1 (fr) 2018-08-02

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019049568A1 (fr) * 2017-09-06 2019-03-14 日本碍子株式会社 Élément de détection de microparticules et détecteur de microparticules
WO2019049567A1 (fr) * 2017-09-06 2019-03-14 日本碍子株式会社 Élément de détection de microparticules et détecteur de microparticules
WO2019049566A1 (fr) * 2017-09-06 2019-03-14 日本碍子株式会社 Élément de détection de microparticules et détecteur de microparticules
WO2020090438A1 (fr) * 2018-10-31 2020-05-07 日本碍子株式会社 Détecteur de microparticules

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Publication number Priority date Publication date Assignee Title
JP2003098136A (ja) * 2001-09-27 2003-04-03 Horiba Ltd 粒子状物質センサ−およびこれを用いた粒子状物質の測定方法
JP2006164592A (ja) * 2004-12-03 2006-06-22 Sharp Corp イオン発生素子
JP2008032686A (ja) * 2006-07-03 2008-02-14 Ngk Spark Plug Co Ltd 煤センサ
WO2008111403A1 (fr) * 2007-03-15 2008-09-18 Ngk Insulators, Ltd. Appareil de détection de matière particulaire
JP2013170914A (ja) * 2012-02-21 2013-09-02 Ngk Spark Plug Co Ltd 微粒子センサ
WO2015146456A1 (fr) * 2014-03-26 2015-10-01 日本碍子株式会社 Dispositif de mesure de nombre de particules fines et procédé de mesure de nombre de particules fines
JP2016205952A (ja) * 2015-04-21 2016-12-08 日本特殊陶業株式会社 微粒子検知システム

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003098136A (ja) * 2001-09-27 2003-04-03 Horiba Ltd 粒子状物質センサ−およびこれを用いた粒子状物質の測定方法
JP2006164592A (ja) * 2004-12-03 2006-06-22 Sharp Corp イオン発生素子
JP2008032686A (ja) * 2006-07-03 2008-02-14 Ngk Spark Plug Co Ltd 煤センサ
WO2008111403A1 (fr) * 2007-03-15 2008-09-18 Ngk Insulators, Ltd. Appareil de détection de matière particulaire
JP2013170914A (ja) * 2012-02-21 2013-09-02 Ngk Spark Plug Co Ltd 微粒子センサ
WO2015146456A1 (fr) * 2014-03-26 2015-10-01 日本碍子株式会社 Dispositif de mesure de nombre de particules fines et procédé de mesure de nombre de particules fines
JP2016205952A (ja) * 2015-04-21 2016-12-08 日本特殊陶業株式会社 微粒子検知システム

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019049568A1 (fr) * 2017-09-06 2019-03-14 日本碍子株式会社 Élément de détection de microparticules et détecteur de microparticules
WO2019049567A1 (fr) * 2017-09-06 2019-03-14 日本碍子株式会社 Élément de détection de microparticules et détecteur de microparticules
WO2019049566A1 (fr) * 2017-09-06 2019-03-14 日本碍子株式会社 Élément de détection de microparticules et détecteur de microparticules
WO2020090438A1 (fr) * 2018-10-31 2020-05-07 日本碍子株式会社 Détecteur de microparticules

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