WO2018105455A1 - Component sensor - Google Patents

Component sensor Download PDF

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Publication number
WO2018105455A1
WO2018105455A1 PCT/JP2017/042717 JP2017042717W WO2018105455A1 WO 2018105455 A1 WO2018105455 A1 WO 2018105455A1 JP 2017042717 W JP2017042717 W JP 2017042717W WO 2018105455 A1 WO2018105455 A1 WO 2018105455A1
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WO
WIPO (PCT)
Prior art keywords
component sensor
flow path
light receiving
substrate
fluid
Prior art date
Application number
PCT/JP2017/042717
Other languages
French (fr)
Japanese (ja)
Inventor
慎一 岸本
正彦 大林
境　浩司
良介 飯井
植村　猛
吉内　茂裕
Original Assignee
パナソニックＩｐマネジメント株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by パナソニックＩｐマネジメント株式会社 filed Critical パナソニックＩｐマネジメント株式会社
Publication of WO2018105455A1 publication Critical patent/WO2018105455A1/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03—Cuvette constructions
    • G01N21/05—Flow-through cuvettes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55—Specular reflectivity
    • G01N21/552—Attenuated total reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/59—Transmissivity

Definitions

  • the present disclosure relates to a component sensor such as a fluid component detection device that detects the concentration of a fluid component using light absorption characteristics such as infrared rays.
  • Patent Document 1 a component sensor for fluid flowing through a pipe is known.
  • Patent Document 1 The conventional component sensor disclosed in Patent Document 1 is connected to a pipe through which a liquid passes, and detects the component of the liquid while flowing in and passing the liquid. Moreover, the component sensor using ATR method is known as a component sensor which measures the component of a fluid (patent documents 2, 3, and 4).
  • the component sensor is configured to detect a component of the fluid.
  • the component sensor includes a substrate, first and second convex portions provided on the main surface of the substrate, and infrared rays as the first convex portion. And a light receiving portion for detecting infrared rays emitted from the second convex portion.
  • the surface on the opposite side of the main surface of the substrate is configured so that the fluid contacts.
  • This component sensor is small and can detect fluid components with high accuracy.
  • FIG. 1 is a perspective view of a component sensor in the first embodiment.
  • 2 is a cross-sectional view of the component sensor shown in FIG. 1 taken along line II-II.
  • FIG. 3 is a perspective view of the component sensor in the second embodiment.
  • 4 is a cross-sectional view of the component sensor shown in FIG. 3 taken along line IV-IV.
  • FIG. 5 is a diagram illustrating an infrared ray locus of the component sensor according to the second embodiment.
  • FIG. 6A is a cross-sectional view of a component sensor according to Embodiment 3.
  • FIG. 6B is a cross-sectional view of another component sensor according to Embodiment 3.
  • FIG. 7 is a cross-sectional view of still another component sensor in the third embodiment.
  • FIG. 8 is a cross-sectional view of still another component sensor in the third embodiment.
  • FIG. 9 is an enlarged cross-sectional view of the component sensor in the fourth embodiment.
  • FIG. 10 is a perspective view of a component sensor in the fifth embodiment.
  • FIG. 11 is a schematic diagram of a component sensor in the fifth embodiment.
  • FIG. 12 is a side view of the component sensor in the fifth embodiment.
  • 13 is a cross-sectional view of the component sensor shown in FIG. 12, taken along line XIII-XIII.
  • FIG. 14 is a schematic diagram of a component sensor according to the fifth embodiment.
  • FIG. 15 is a schematic diagram of another component sensor according to the fifth embodiment.
  • FIG. 16 is a schematic diagram of still another component sensor according to the fifth embodiment.
  • FIG. 17 is a schematic diagram of still another component sensor according to the fifth embodiment.
  • FIG. 18 is a schematic diagram of still another component sensor in the fifth embodiment.
  • FIG. 19 is a schematic diagram of a component sensor according to the sixth embodiment.
  • FIG. 20 is a schematic diagram of a component sensor of a comparative example.
  • FIG. 21A is a schematic diagram of a component sensor according to Embodiment 6.
  • FIG. 21B is a schematic diagram of a component sensor according to Embodiment 6.
  • FIG. 22 is a schematic diagram of a component sensor according to the seventh embodiment.
  • FIG. 23 is a schematic diagram of another component sensor according to the seventh embodiment.
  • FIG. 24 is a schematic diagram of still another component sensor according to the seventh embodiment.
  • FIG. 25 is a schematic diagram of still another component sensor according to the seventh embodiment.
  • FIG. 26 is a schematic diagram of a component sensor according to the eighth embodiment.
  • FIG. 1 is a perspective view of a component sensor 1 according to the first embodiment.
  • FIG. 2 is a cross-sectional view of the component sensor 1 shown in FIG. In FIG. 1 and FIG. 2, an X axis, a Y axis, and a Z axis that are orthogonal to each other are defined.
  • the component sensor 1 emits infrared rays 8 toward the convex portion 6, the tube portion 3 extending in the extending direction D 101 parallel to the X axis, the substrate 5, the convex portions 6 and 7 provided on the substrate 5. And a light receiving portion 10 for receiving the infrared ray 8 emitted from the convex portion 7.
  • the tube portion 3 has a side wall 2 that extends in the X-axis direction and surrounds the internal space 3S.
  • Side wall 2 has inner wall surface 2A facing inner space 3S and outer wall surface 3B opposite to inner wall surface 2A.
  • the outer wall surface 3B does not face the inner space 3S.
  • An opening 4 is provided in the side wall 2 of the tube portion 3.
  • the substrate 5 covers the opening 4.
  • FIG. 2 shows a cross section taken along line II-II of the tube part 3 shown in FIG.
  • Both ends of the pipe part 3 are open, and the fluid 91 can flow in or out.
  • the fluid 91 is a liquid of fuel such as gasoline.
  • a flat flat portion 11 is provided on the outer wall surface 2 ⁇ / b> B of the side wall 2 of the tube portion 3.
  • the opening 4 is provided in the flat portion 11.
  • the flat portion 11 can easily form the opening 4 due to its flat shape, and can easily attach the substrate 5 to the tube portion 3.
  • the tube part 3 may not have the flat part 11.
  • the cross section perpendicular to the X axis of the portion of the tube portion 3 where the flat portion 11 is provided has a rectangular parallelepiped shape as shown in FIG. This cross section of the tube part 3 may have a polygonal shape, and a part other than the flat part 11 may have an arc shape.
  • the substrate 5 is made of silicon.
  • the substrate 5 is not limited to silicon, but can be easily processed by being formed of silicon.
  • the substrate 5 has principal surfaces 12 and 13 opposite to each other.
  • the main surface 12 covers the opening 4.
  • Convex portions 6 and 7 are provided on the main surface 13.
  • the convex portions 6 and 7 are formed by etching a silicon substrate that is a material of the substrate 5, that is, the convex portions 6 and 7 are formed integrally with the substrate 5. By forming the substrate 5 and the convex portions 6 and 7 integrally, the convex portions 6 and 7 can be easily formed.
  • the convex portion 6 is provided with an inclined surface 14, and the convex portion 7 is provided with an inclined surface 15.
  • the inclined surfaces 14 and 15 are inclined with respect to the main surface 13.
  • the refractive index of the substrate 5 is larger than the refractive index of the fluid 91. For this reason, the infrared rays 8 are incident on the inside of the substrate 5 from the inclined surface 14 and are emitted from the inclined surface 15 after being totally reflected inside the substrate 5.
  • the inclined surface 14 and the inclined surface 15 are formed by anisotropic etching.
  • the inclined surfaces 14 and 15 can be easily formed by forming by anisotropic etching. When a (100) wafer is used as the substrate 5, the plane orientation of the inclined surfaces 14 and 15 is the (111) plane, and the angle ⁇ of the inclined surfaces 14 and 15 with respect to the main surface 13 is 54.7 °.
  • the infrared rays 8 can be totally reflected by the main surface 12 at the boundary surface between the substrate 5 and the internal space 3S of the tube portion 3, that is, inside the substrate 5.
  • the convex portions 6 and 7 may be formed separately from the substrate 5 and bonded to the substrate 5.
  • the infrared rays 8 incident on the substrate 5 from the inclined surface 14 are totally reflected a plurality of times by the main surfaces 12 and 13 inside the substrate 5 and emitted from the inclined surface 15.
  • an evanescent wave enters the fluid 91 and is absorbed and attenuated by the fluid 91.
  • the convex portions 6 and 7 are provided apart from each other. Therefore, the infrared rays 8 incident from the inclined surface 14 are totally reflected a plurality of times until they are emitted from the inclined surface 15.
  • the attenuation amount by which the infrared rays 8 are attenuated before entering the light receiving unit 10 is increased, and the detection accuracy of the component of the fluid 91 is improved.
  • the region through which the infrared rays 8 between the convex portions 6 and 7 of the substrate 5 are transmitted can be thinned.
  • the number of times the infrared rays 8 are totally reflected when passing through the substrate 5 is increased, and the detection accuracy of the component of the fluid 91 is improved.
  • count that the infrared rays 8 are totally reflected can be increased because the board
  • the conventional component sensor disclosed in Patent Document 1 is difficult to detect components with high accuracy. That is, this component sensor is configured as a side flow in which the flow path for the liquid containing the component to be detected flows is extremely thin. Therefore, it is difficult to stably flow in the liquid, and it is difficult to detect the components with high accuracy.
  • the component sensor is increased in size when the number of reflections of infrared rays in the substrate is increased in order to improve detection accuracy.
  • the component sensor 1 in the first embodiment can detect the component of the fluid 91 with high accuracy and can be downsized.
  • the light emitting unit 9 uses a platinum thin film resistance element capable of emitting infrared rays 8.
  • the light emitting unit 9 may use a light emitting diode capable of emitting infrared rays 8.
  • a semiconductor bare chip is used for the light emitting diode.
  • the light emitting unit 9 is provided on the side of the tube unit 3 on which the substrate 5 is provided, and is arranged so that the infrared rays 8 are incident on the projection 6.
  • the infrared ray 8 has a wavelength that is easily absorbed by the fluid 91 to be detected. In the first embodiment, the wavelength of the infrared ray 8 is 2 ⁇ m to 15 ⁇ m. By using a wavelength in this range, the component of the fluid 91 can be detected with high accuracy.
  • the wavelength range of the infrared ray 8 may be further narrowed according to the use application of the component sensor 1.
  • the wavelength range of the infrared ray 8 can be narrowed.
  • the light receiving unit 10 uses a semiconductor bare chip.
  • the light receiving unit 10 is disposed at a position where the infrared ray 8 emitted from the convex portion 7 can be detected on the side of the tube unit 3 on which the substrate 5 is provided.
  • the light receiving unit 10 includes light receiving elements 16, 17, and 18.
  • the light receiving element 16 is provided with an optical filter 19
  • the light receiving element 17 is provided with an optical filter 20, and an optical filter 21 is provided in front of the light receiving element 18.
  • the light receiving unit 10 includes a housing 22 that supports the light receiving elements 16, 17, and 18 and the optical filters 19, 20, and 21.
  • the optical filters 19, 20, and 21 transmit infrared rays having different wavelengths.
  • the optical filter 19 transmits infrared rays 8 having a small absorption amount absorbed by the fluid 91.
  • the optical filters 20 and 21 transmit the infrared ray 8 having a wavelength with a larger amount of absorption of the fluid 91 than the wavelength transmitted through the optical filter 19.
  • the amount of absorption of the infrared ray 8 in the fluid 91 can be known, so that the component of the fluid 91 can be detected with high accuracy. Even without the light receiving element 18, the components of the fluid 91 can be accurately detected by the light receiving elements 16 and 17.
  • two types of components of the fluid 91 can be detected with high accuracy. When it is desired to increase the types of components of the fluid 91 to be detected, the number of light receiving elements may be further increased.
  • the light emitting part 9 is arranged at a position spaced from the convex part 6 in the negative direction of the Z axis.
  • the light receiving unit 10 is disposed at a position away from the convex part 7 in the negative direction of the Z axis.
  • the component sensor 1 can be reduced in size.
  • the incident angle of the infrared rays 8 incident on the inclined surface 14 is reduced, and the infrared rays 8 can penetrate deeply into the fluid 91, thereby improving the detection accuracy of the component sensor 1.
  • the light emitting unit 9 and the light receiving unit 10 are provided on the surface 23 ⁇ / b> A of the same support substrate 23.
  • the light emitting unit 9 has a light emitting surface 9P that emits infrared rays 8.
  • the light receiving unit 10 has a light receiving surface 10 ⁇ / b> P that receives the infrared rays 8.
  • the light emitting unit 9 and the light receiving unit 10 are arranged so that the light emitting surface 9P of the light emitting unit 9 and the light receiving surface 10P of the light receiving unit 10 are located on the same plane P23, that is, at the same distance from the surface 23A of the support substrate 23. Yes. By arranging in this way, the light emitting unit 9 and the light receiving unit 10 can be easily mounted.
  • the light emitting unit 9 and the light receiving unit 10 do not have to be provided on the same support substrate 23, and the light emitting unit 9 and the light receiving unit 10 are in the range of the angle at which the infrared rays 8 are totally reflected in the substrate 5. You may arrange
  • FIG. 3 is a perspective view of the component sensor 31 in the second embodiment.
  • FIG. 4 is a sectional view of the component sensor 31.
  • FIG. 5 shows the locus of the infrared rays 8 of the component sensor 31.
  • FIG. 4 shows a cross section taken along line IV-IV of the tube part 3 shown in FIG.
  • FIG. 5 shows a portion hidden by the substrate 5 by a broken line, and shows a locus of the infrared rays 8 totally reflected in the substrate 5 by a broken line.
  • the same reference numerals are assigned to the same parts as those of the component sensor 1 in the first embodiment shown in FIGS. 1 and 2.
  • the component sensor 31 has a light receiving portion 32 that receives the infrared ray 8 emitted from the convex portion 7 instead of the light receiving portion 10 of the component sensor 1 shown in FIGS. 1 and 2.
  • the light receiving unit 32 has a light receiving surface 32 ⁇ / b> P that receives the infrared rays 8.
  • the light receiving unit 32 and the light emitting unit 9 are arranged so that the light receiving surface 32P of the light receiving unit 32 and the light emitting surface 9P of the light emitting unit 9 are located on the same plane P23, that is, at the same distance from the surface 23A of the support substrate 23. ing.
  • the light receiving unit 32 includes light receiving elements 16, 17, 18 and optical filters 19, 20, 21, similarly to the light receiving unit 10 of the component sensor 1 shown in FIGS. 1 and 2.
  • the light receiving elements 16, 17, and 18 have light receiving surfaces 16 ⁇ / b> P, 17 ⁇ / b> P, and 18 ⁇ / b> P that receive the infrared rays 816, 817, and 818 that are part of the infrared ray 8.
  • the light receiving elements 16, 17 and 18 are arranged such that the light receiving surfaces 16P, 17P and 18P are positioned on the plane P23, that is, at the same height from the surface 23A of the support substrate 23. This facilitates mounting of the light receiving elements 16, 17, and 18.
  • the light receiving elements 16, 17, and 18 are arranged side by side in the direction of the Y axis, that is, in the direction parallel to the main surface 13 of the substrate 5 and perpendicular to the X axis.
  • the infrared rays 8 transmitted through the substrate 5 are emitted from the convex portion 7 as infrared rays 816, 817, and 818 that are arranged in the Y-axis direction and spread away from each other.
  • the light receiving elements 16, 17, and 18 arranged side by side in the Y-axis direction can efficiently detect the infrared rays 816, 817, and 818, respectively.
  • FIG. 6A is a cross-sectional view of component sensor 41 in the third embodiment.
  • the component sensor 41 has a convex portion 47 provided on the main surface 12 of the substrate 5 instead of the convex portion 7 of the component sensor 1 shown in FIGS. 1 and 2.
  • FIG. 6A shows the positional relationship among the substrate 5, the light emitting unit 9, and the light receiving unit 10.
  • the locus of the infrared ray 8 is indicated by a straight line outside the substrate 5 and indicated by a broken line inside the substrate 5.
  • the substrate 5 of the component sensor 41 has the convex portions 6 and 47 arranged in the Z-axis direction with the substrate 5 sandwiched at the same position in the X-axis direction. Note that a deviation due to a manufacturing error is allowed from the same position here.
  • the light emitting part 9 is provided so that the infrared ray 8 is incident on the convex part 6, and the light receiving part 10 is provided so as to receive the infrared ray 8 emitted from the convex part 47.
  • a reflective film 43M made of gold, aluminum, or the like is provided on the side end face 43 of the substrate 5 in the X-axis direction.
  • the infrared ray 8 incident from the inclined surface 14 of the convex portion 6 travels inside the substrate 5 while repeating total reflection on the main surfaces 12 and 13 in the X-axis direction, and is reflected by the side end surface 43 by the reflective film 43M. It advances inside the substrate 5 while repeating total reflection at the main surfaces 12 and 13 toward 47, and exits from the inclined surface 45 of the convex portion 47 to the outside of the substrate 5.
  • the side end face 43 to reflect the infrared rays 8
  • the optical path length of the optical path in the substrate 5 on which the infrared rays 8 travel is increased, and the number of times the infrared rays 8 are reflected can be increased.
  • the sensitivity of the component sensor 41 can be improved. Further, since the optical path length of the infrared ray 8 is increased even if the length of the substrate 5 in the X-axis direction is the same, the component sensor 41 can be downsized while maintaining the sensitivity.
  • the protrusions 6 and 47 may be formed on i such as the substrate 5, or may be formed separately from the substrate 5 and bonded to the substrate 5.
  • FIG. 6B is a cross-sectional view of another component sensor 41A in the third embodiment. 6B, the same reference numerals are given to the same portions as those of the component sensor 41 shown in FIG. 6A.
  • the substrate 5 has a side end surface 143 opposite to the side end surface 43 in the X-axis direction.
  • the component sensor 41 ⁇ / b> A further includes a reflective film 143 ⁇ / b> M provided on the side end surface 143 of the substrate 5.
  • the infrared rays 8 are reflected in the substrate 5 also on the side end surface 143 by the reflective film 143M.
  • the infrared ray 8 is reflected by the side end surfaces 43 and 143 a plurality of times, the optical path length of the optical path through which the infrared ray 8 passes through the inside of the substrate 5 can be increased, and the sensitivity of the component sensor 41A is further improved. Can do. Further, the component sensor 41A can be further downsized while maintaining the sensitivity of the component sensor 41A.
  • the convex portions 6 and 47 are arranged at the same position in the X-axis direction of the substrate 5 with the substrate 5 sandwiched in the Z-axis direction. If the infrared rays 8 are reflected by the side end face 43 of the substrate 5, the arrangement positions of the convex portions 6 and 47 are not limited to this.
  • FIG. 7 is a cross-sectional view of still another component sensor 41B in the third embodiment.
  • the same reference numerals are given to the same portions as the component sensors 41 and 41A shown in FIGS. 6A and 6B.
  • FIG. 7 shows the positional relationship among the substrate 5, the light emitting unit 9, and the light receiving unit 10 of the component sensor 41B.
  • the component sensor 41B the light emitting unit 9 and the light receiving unit 10 are disposed on the same side of the substrate 5 in the Z-axis direction.
  • the component sensor 41 ⁇ / b> B has one convex portion 44 provided on the main surface 13 of the substrate 5 instead of the convex portions 6 and 7 of the component sensors 41 and 41 ⁇ / b> A.
  • the convex portion 44 includes inclined surfaces 45A and 45B that are inclined with respect to the main surface 12 of the substrate 5, and a surface 44A that connects the inclined surfaces 45A and 45B.
  • the surface 44A is parallel to the main surface 13.
  • the infrared rays 8 emitted from the light emitting unit 9 are incident from the inclined surface 45A of the convex portion 44, are repeatedly totally reflected on the surface of the substrate 5, travel inside the substrate 5, are emitted from the inclined surface 45B, and are received by the light receiving unit 10. Received light.
  • Reflective films 43M and 143M are provided on side end surfaces 43 and 143 on the opposite sides of the substrate 5 in the X-axis direction, respectively.
  • the infrared ray 8 is totally reflected at the side end faces 43 and 143 a plurality of times by the reflection films 43M and 143M inside the substrate 5, and is repeatedly totally reflected at the main surfaces 12, 13, and 44A, and from the inclined surface 45B of the convex portion 44 of the substrate 5.
  • substrate 5 of the infrared rays 8 can be lengthened, the sensitivity of the component sensor 41B can be improved, or the component sensor 41B can be reduced in size.
  • FIG. 8 is a plan view of still another component sensor 41C in the third embodiment.
  • the same reference numerals are assigned to the same portions as those of the component sensors 1, 41, and 41A shown in FIGS. 1, 2, 6A, and 6B.
  • FIG. 8 shows the positional relationship between the substrate 5 and the convex portions 6 and 7 of the component sensor 41C.
  • FIG. 8 is a view of the main surface 13 of the substrate 5 of the component sensor 41C as viewed from the Z-axis direction.
  • the component sensor 41 ⁇ / b> C is provided with convex portions 6 and 7 on the main surface 13 in the same direction of the Z axis of the substrate 5.
  • the convex portions 6 and 7 are provided at different positions in the X-axis direction and different positions in the Y-axis direction. In FIG. 8, the convex portions 6 and 7 are provided at positions opposite to each other on the diagonal of the main surface 13 of the substrate 5.
  • Reflective films 43M and 143M are provided on side end surfaces 43 and 143 in the opposite directions of the X axis of the substrate 5, respectively.
  • the infrared ray 8 incident from the convex portion 6 is totally reflected a plurality of times at the side end surfaces 43 and 143 by the reflective films 43M and 143M and is emitted from the convex portion 7.
  • the optical path length of the optical path through which the infrared rays 8 travel in the substrate 5 can be increased, so that the sensitivity of the component sensor 41C can be improved and the component sensor 41C can be downsized. .
  • FIG. 9 is an enlarged cross-sectional view of the component sensor 51 in the fourth embodiment. 9, the same parts as those of the component sensors 1, 41, 41A to 41C shown in FIGS. 1 to 8 are denoted by the same reference numerals.
  • the substrate 5 seals the opening 4 using the sealing material 53 on the tube 3.
  • the thickness L2 in the Z-axis direction of the outer edge portion 5C including the side end surfaces 43 and 143 of the substrate 5 is larger than the thickness L1 of the central portion of the substrate 5 in the Z-axis direction. That is, the outer edge portion 5C of the substrate 5 is locally thick. If the thickness of the substrate 5 in the Z-axis direction is reduced, the number of reflections of the infrared rays 8 increases, and the sensitivity of the component sensor 51 can be improved. However, since the strength of the substrate 5 decreases when the substrate 5 is thinned, the substrate 5 may be cracked when the substrate 5 is sealed with the opening portion 4 using the sealing material 53. Since the component sensor 51 locally increases the thickness L2 of the outer edge portion 5C for mounting the substrate 5 on the tube portion 3, the sealing strength can be improved.
  • FIG. 10 is a perspective view that three-dimensionally represents the component sensor 110 according to the fifth embodiment.
  • FIG. 11 is a schematic diagram of the component sensor 110.
  • FIG. 12 is a side view of the component sensor 110.
  • 13 is a cross-sectional view of the component sensor 110 shown in FIG. 12 taken along line XIII-XIII.
  • FIG. 14 is a schematic diagram of the component sensor 110. 10 to 14, the X axis, the Y axis, and the Z axis that are orthogonal to each other are defined.
  • the component sensor 110 detects a fluid component.
  • the component sensor 110 is connected to a fuel pipe of an automobile and allows liquid fuel, which is a fluid, to flow in and pass through to detect the fuel component.
  • the component sensor 110 includes a flow channel 101 into which the fluid 191 flows, a detection flow channel 107 connected to the flow channel 101, and a flow that is connected to the detection flow channel 107 and discharges the fluid 191 to the outside of the component sensor 110.
  • a path 103 and a detour 102 connected to the flow paths 101 and 103 are provided.
  • the fluid 191 is a fuel that is a liquid.
  • the channel 101 extends in the extending direction that is the direction of the X axis.
  • the channel 101, the detection channel 107, and the channel 103 are arranged on a straight line parallel to the X axis.
  • a light emitting unit 104 and a light receiving unit 105 are provided outside the detection channel 107 so as to sandwich the detection channel 107 therebetween.
  • the Z axis extends in a direction from the center point 107C of the detection flow path 107 toward the light emitting unit 104.
  • the X axis extends from the center point 107C of the detection flow path 107 in a direction toward the connection port 116 at a right angle to the Z axis.
  • the Y axis is orthogonal to the X axis and the Z axis at the center point 107C of the detection flow path 107.
  • the detection flow path 107 is located in the extending direction of the flow path 101 from the flow path 101. That is, a straight line 101S parallel to the X axis passes through an internal space in which the fluid 191 in the flow channel 101 flows and an internal space in which a part 191A of the fluid 191 in the detection flow channel 107 flows.
  • the detour 102 has a U-shape to bypass the detection flow path 107.
  • the detour 102 is connected to the flow path 101 through the connection port 119 and is connected to the flow path 103 through the connection port 219.
  • the detection flow path 107 is connected to the flow path 101 through the connection port 116, and is connected to the flow path 103 through the connection port 121.
  • the connection port 119 is perpendicular to the connection port 116.
  • FIG. 11 specifically shows the ranges of the flow path 101, the bypass 102, the flow path 103, the detection flow path 107, the connection port 116, and the connection port 119 with a frame indicated by a broken line.
  • the distance L101 of the farthest part between the internal space of the flow path 101 and the internal space of the detour 102 in the Y-axis direction is equal to the internal space of the detection flow path 107 and the detour 102. Is equal to the distance L102 of the furthest part from the internal space.
  • connection port 116 has a shape extending in the Y-axis direction, that is, toward the connection port 119. That is, the width of the connection port 116 in the Y-axis direction is larger than the width of the Z-axis direction perpendicular to that direction.
  • the connection port 116 has a rectangular shape extending in the Y-axis direction.
  • the shape may be an arbitrary shape that is elongated in the Y-axis direction.
  • the materials of the flow paths 101 and 103 and the detour 102 are appropriately selected according to the fluid 191.
  • the fluid 191 is fuel, and it is preferable to use a single metal or an alloy as the material of the flow paths 101 and 103 and the bypass 102.
  • a resin may be used as the material of the flow paths 101 and 103 and the bypass 102, or glass, wood, bamboo, etc. As long as the purpose of the form can be satisfied, it is appropriately selected.
  • the material of the detection channel 107 is made of a material that transmits the light 108 emitted from the light emitting unit 104. In the fifth embodiment, silicon, germanium, glass, or the like is used, but the material is not particularly limited thereto.
  • the flow paths 101 and 103, the detour path 102, and the detection flow path 107 are appropriately selected in consideration of the purpose of use, manufacturing cost, and the like. For example, screw connection, soldering, welding, joining by unevenness, screwing, adhesion, etc. Connected in the way. If the effects of the fifth embodiment can be realized without hindrance, the flow paths 101 and 103, the bypass path 102, and the detection flow path 107 are made of the same material and can be manufactured seamlessly using a mold or the like. Alternatively, it may be composed of two or more parts.
  • the width of the detection channel 107 in the Z-axis direction is preferably 10 ⁇ m or more and 100 ⁇ m or less, but is not limited to this as long as the object of the present embodiment can be satisfied.
  • the fluid 191 to be detected is a liquid that easily absorbs the light 108 such as water, soft drinks, and fruit juice
  • the light 108 does not easily reach the light receiving unit 105.
  • the detection flow path 107 is not easily manufactured as compared with the case where the fuel component is detected, but the width of the detection flow path 107 may be 10 ⁇ m or less.
  • the component sensor 110 performs processing based on information obtained from the light receiving unit 105 and the housing 106 that accommodates each of the above-described components, and the processing provided in the housing 106 that detects components and analyzes the concentration. And a portion 109.
  • the light 108 emitted from the light emitting unit 104 is an infrared ray having a wavelength in the range of 2.5 ⁇ m to 15 ⁇ m. Infrared light whose wavelength stays within this range is easily absorbed by the fluid 191 and can detect various components of the fluid 191 with high sensitivity.
  • the light 108 emitted from the light emitting unit 104 passes through the detection channel 107, passes through the fluid 191 flowing through the detection channel 107, and is received by the light receiving unit 105.
  • the amount of the light 108 that can be received by the liquid flowing through the detection flow path 107 and received by the light receiving unit 105 is determined in the detection flow path 107. It decreases compared to the case where there is no.
  • the processing unit 109 can process output information corresponding to the amount of light received by the light receiving unit 105 to detect a component of the fluid 191 or measure the concentration of the fluid 191.
  • the detection flow path 107 is connected to the flow path 101 in the extending direction D101 of the flow path 101. Due to this positional relationship, the fluid 191 that flows in from the outside travels straight toward the detection flow path 107. With this configuration, it is possible to solve the following problems that occur when the components of the fluid 191 are detected using the light 108.
  • the amount of absorption by which the fluid 191 absorbs the light 108 is calculated based on the amount of light 108 emitted from the light emitting unit 104 at the light receiving unit 105. Then, the component of the fluid 191 is detected and the concentration is measured.
  • the light 108 emitted from the light emitting unit 104 needs to reach the light receiving unit 105. In order to ensure that the emitted light 108 reaches the light receiving unit 105, the light 108 is increased or the distance between the light emitting unit 104 and the light receiving unit 105 is shortened.
  • the distance between the light emitting unit 104 and the light receiving unit 105 can be increased, whereby the fluid 191 can easily flow into the detection channel 107.
  • the power consumed by the light emitting unit 104 is increased and the component sensor 110 is enlarged.
  • the detection channel 107 becomes narrow, there arises a problem that it is difficult to allow the fluid 191 to flow in.
  • infrared rays used to detect components with high accuracy are easily absorbed by the fluid 191, they may be excessively absorbed by the fluid 191 before reaching the light receiving unit 105 and may not be detected by the light receiving unit 105. .
  • the detection flow path 107 is located in the extending direction D101 of the flow path 101 and is connected to the flow path 101. Therefore, the fluid 191 that is the liquid flowing in from the flow path 101 is used. Goes straight toward the connection port 116 with the detection channel 107. As a result, pressure is generated toward the detection flow path 107, and the fluid 191 (191A) easily flows into the detection flow path 107 due to this pressure.
  • the fluid 191 (191B) that has not flowed into the detection flow path 107 flows to the detour path 102, bypasses the detection flow path 107, reaches the flow path 103, and is discharged to the outside.
  • the flow path 101, the detection flow path 107, and the flow path 103 constitute a linear piping structure whose intermediate portion is narrowed rapidly.
  • the detour 102 prevents the flow of the entire fluid 191 from being obstructed by causing the part 191B of the fluid 191 to bypass the piping structure.
  • the component sensor 110 in the fifth embodiment has a symmetrical shape with respect to a straight line 107L (see FIG. 14) that passes through the center point 107C of the detection flow path 107 and extends in the Y-axis direction. In this case, even if the fluid 191 flows in from the flow path 101 or the fluid 191 flows in from the flow path 103, there is no functional problem, so the fluid 191 may flow in any direction.
  • the component sensor 110 suppresses the power consumption of the light-emitting unit 104 and allows the fluid 191 (191A) to stably flow into the narrow detection channel 107 while reducing the size. Make it possible.
  • FIG. 15 is a schematic diagram of another component sensor 110A according to the fifth embodiment.
  • the same reference numerals are given to the same portions as those of the component sensor 110 shown in FIGS. 10 to 14.
  • each of the flow paths 101 and 103 and the detour 102 form a sharp ridge of 90 degrees at the connection ports 119 and 219.
  • the U-shaped corner of the detour 102 forms a sharp ridge of 90 degrees.
  • the corners 1102 and 2102 of the connection ports 119 and 219 are smoothly rounded, and the corners 3102 to 6102 of the detour 102 are also smoothly rounded. This configuration is preferable because the flow of the fluid 191 is not hindered in the flow paths 101 and 103 and the bypass 102.
  • FIG. 16 is a schematic diagram of still another component sensor 110B in the fifth embodiment.
  • the same reference numerals are assigned to the same parts as those of the component sensor 110 shown in FIGS.
  • the component sensor 110 ⁇ / b> B bypasses the detection flow path 107 in the same manner as the bypass 102 and is connected to the flow paths 101 and 103. Is provided.
  • the detours 102A and 102B have the same effect as the detour 102.
  • a portion 191B1 of the portion 191B of the fluid 191 flows through the detour 102A, and the remaining portion 191B2 of the portion 191B of the fluid 191 flows through the detour 120B.
  • the sum of the cross-sectional areas of the cross sections perpendicular to the flow direction of the portions 191B1 and 191B2 of the part 191B of the fluid 191 of the detours 102A and 102B is equal to the cross-sectional area S4 of the detour 102 of the component sensor 110 shown in FIGS.
  • the cross-sectional area S1 of the flow channel 101, the cross-sectional area S2 of the flow channel 103, and the cross-sectional area S3 of the detection flow channel 107 satisfy the above relationship.
  • the plurality of detours 102A and 102B provide design diversity according to the size of the member, design problems, and the shape of the target to which the component sensor 110 is attached.
  • FIG. 17 is a schematic diagram of still another component sensor 110C according to the fifth embodiment.
  • the same reference numerals are given to the same portions as those of the component sensor 110 shown in FIGS. 10 to 14.
  • the flow paths 101 and 103 are bent halfway.
  • the portion connected to the connection port 116 of the flow channel 101 extends in the extending direction D101
  • the portion connected to the connection port 121 of the flow channel 103 extends in the extending direction D101.
  • FIG. 18 is a schematic diagram of still another component sensor 110D according to the fifth embodiment.
  • the same reference numerals are assigned to the same portions as those of the component sensor 110A shown in FIG.
  • the detour 102 does not have the corners 3102 to 6102 of the component sensor 110A shown in FIG. 15, but has a C shape. With this configuration, the fluid 191 flows through the detour 102 smoothly.
  • FIG. 19 is a schematic diagram of a component sensor 110E according to the sixth embodiment.
  • the same reference numerals are assigned to the same portions as those of the component sensor 110 in the fifth embodiment shown in FIGS.
  • the detection flow path 107 is displaced in parallel to the positive direction of the Y axis, and the inner space of the flow path 101 and the internal space of the detour 102 are farthest apart in the Y axis direction.
  • the distance L101 of the left portion is larger than the distance L102 of the farthest portion between the internal space of the detection flow path 107 and the internal space of the detour 102.
  • the detection flow path 107 is displaced in parallel from the flow paths 101 and 103 toward the detour 102 in the Y-axis direction.
  • a taper 120 is provided on the inner wall surface that is connected to the connection port 116 and faces the internal space through which the fluid 191 of the flow path 101 flows.
  • the taper 120 is inclined with respect to the extending direction D101 parallel to the X axis toward the detection flow path 107 and the bypass path 102.
  • the taper 120 moves the fluid 191 directly from the flow channel 101 to the detection flow channel 107 and the detour 102, thereby facilitating the inflow of the fluid 191 (191 ⁇ / b> A) into the detection flow channel 107.
  • FIG. 20 is a schematic diagram of a component sensor 110P of a comparative example. 20, the same reference numerals are assigned to the same portions as those of the component sensor 110E shown in FIG.
  • the inner wall surface of the flow path 101 is not provided with a taper.
  • the flow of the fluid 191 is hindered around the connection port 116, and the fluid 191 does not smoothly flow into the detection flow path 107 and the bypass 102.
  • 21A and 21B are schematic diagrams showing the flow of the fluid 191 of the component sensor 110E and the component sensor 110, respectively.
  • the fluid 191 flowing in from the end of the flow path 101 flows as a flow 111 toward the detection flow path 107.
  • the flow 112 reaches the connection port 116 as a flow 112 following the taper 120 leading to the detection flow path 107. Since the detection flow path 107 has a much smaller volume than the flow path 101, a part 191 ⁇ / b> B of the fluid 191 that does not flow into the detection flow path 107 flows into the detour 102 as the flow 113.
  • the fluid 191 goes straight to the detection flow path 107 as the flow 111, and a part 191B of the fluid 191 flows into the detection flow path 107 as the flow 112. A part 191B of the fluid 191 that does not flow into the detection flow path 107 flows into the detour 102 as a flow 115.
  • a stagnation 114 may occur between the flow channel 101 and the detection flow channel 107.
  • the detection flow path 107 is shifted in parallel toward the bypass path 102, thereby reducing the retention 114 of the fluid 191 and improving the movement efficiency of the fluid 191. As a result, the inflow efficiency in which a part 191A of the fluid 191 flows into the detection channel 107 is improved.
  • FIG. 22 is a schematic diagram of a component sensor 110F according to the seventh embodiment.
  • the same reference numerals are assigned to the same portions as those of the component sensor 110 in the fifth embodiment shown in FIGS.
  • the portion closest to the detour 102 on the inner wall surface facing the internal space through which a part 191A of the fluid 191 of the detection flow path 107 of the component sensor 110 in the fifth embodiment flows is the detour 102. It's shifted away.
  • a connection port 116 with the channel 101 extends to the inside of the detour 102.
  • the volume of the detection channel 107 increases, the area of the connection port 116 increases, and the inflow efficiency of the part 191A of the fluid 191 into the detection channel 107 increases.
  • FIG. 23 is a schematic diagram of another component sensor 110G according to the seventh embodiment.
  • the detection flow path 107 of the component sensor 110 ⁇ / b> F shown in FIG. 22 is shifted from the flow path 101 in parallel toward the detour 102.
  • the size of the members and the shape of the detection flow path 107 may be changed according to design requirements.
  • FIGS. 24 and 25 are schematic diagrams of still other component sensors 110H and 110I in the seventh embodiment, respectively. 24 and 25, the same reference numerals are assigned to the same parts as those of the component sensors 110F and 110G shown in FIGS. In the component sensors 110H and 110I shown in FIGS. 24 and 25, the detection flow path 107 is narrowed from the connection port 116 toward the connection port 121.
  • FIG. 26 is a schematic diagram of a component sensor 110J according to the eighth embodiment.
  • the same reference numerals are given to the same portions as those of the component sensor 110 shown in FIGS.
  • the flow path 103 extends in a direction orthogonal to the plane where the bypass 102 is connected to the flow path 103, that is, in the Y-axis direction. It flows in the direction of the axis.
  • the discharge flow 117 mainly from the detour 102 having a large flow rate goes straight toward the end of the flow path 103, so that the passage speed of the fluid 191 passing through the flow path 103 increases.
  • the discharge flow 118 discharged from the detection flow path 107 is also drawn into the discharge flow 117 due to the surface tension of the fluid 191 body, and the flow speed increases. To do. If the speed of the discharged water stream 118 increases, the inflow speed of the part 191A of the fluid 191 that flows into the detection channel 107 from the action of the surface tension of the fluid 191 also increases. As described above, the flow path 103 extends in the Y-axis direction, so that the discharge efficiency of the entire fluid 191 increases, and as a result, the inflow speed at which a part 191A of the fluid 191 flows into the detection flow path 107 increases. Therefore, the inflow of a part 191A of the fluid 191 into the detection channel 107 can be promoted.
  • the component sensors 110.110A to 110J in Embodiments 5 to 8 are inexpensive, space-saving and highly sensitive, and the detection accuracy is stable.
  • the concentration of the fuel component can be detected.
  • the fuel consumption of the internal combustion engine can be improved and the exhaust emission can be reduced.
  • the fluid 191 is water or a soft drink, it can be used for detection of mixing of other components, etc., to help maintain quality.

Abstract

This component sensor is configured to detect a component of a fluid. This component sensor is provided with: a substrate; first and second projections which are provided on a main surface of the substrate; a light emitting part which makes infrared light incident on the first projection; and a light receiving part which detects infrared light discharged from the second projection. A surface of the substrate, which is on the reverse side of the main surface, is configured so as to be in contact with a fluid. This component sensor is small in size, and is capable of detecting a component of a fluid with high accuracy.

Description

成分センサComponent sensor
　本開示は、赤外線などの光の吸収特性を利用して流体の成分の濃度を検出する流体成分検出装置などの成分センサに関する。 The present disclosure relates to a component sensor such as a fluid component detection device that detects the concentration of a fluid component using light absorption characteristics such as infrared rays.
　従来から、パイプを流れる流体の成分センサが知られている（特許文献１）。 Conventionally, a component sensor for fluid flowing through a pipe is known (Patent Document 1).
　特許文献１に開示されている従来の成分センサは、液体が通過するための管に接続され、液体を流入、通過させながら、該液体の成分を検出する。また、流体の成分を測定する成分センサとしてＡＴＲ法を利用した成分センサが知られている（特許文献２、３、４）。 The conventional component sensor disclosed in Patent Document 1 is connected to a pipe through which a liquid passes, and detects the component of the liquid while flowing in and passing the liquid. Moreover, the component sensor using ATR method is known as a component sensor which measures the component of a fluid ( patent documents 2, 3, and 4).
国際公開第２０１６／１２１３３８号International Publication No. 2016/121338 特許第４９４８１１７号公報Japanese Patent No. 4948117 国際公開第２００３／０２１２３９号International Publication No. 2003/021239 特開平７－２００４６号公報Japanese Patent Laid-Open No. 7-20046
　成分センサは、流体の成分を検出するように構成されている、この成分センサは、基板と、基板の主面に設けられた第１と第２の凸部と、赤外線を第１の凸部に入射させる発光部と、第２の凸部を出射した赤外線を検出する受光部とを備える。基板の上記主面の反対側の面は、流体が接するように構成されている。 The component sensor is configured to detect a component of the fluid. The component sensor includes a substrate, first and second convex portions provided on the main surface of the substrate, and infrared rays as the first convex portion. And a light receiving portion for detecting infrared rays emitted from the second convex portion. The surface on the opposite side of the main surface of the substrate is configured so that the fluid contacts.
　この成分センサは、小型であり、流体の成分を高精度に検出できる。 This component sensor is small and can detect fluid components with high accuracy.
図１は実施の形態１における成分センサの斜視図である。FIG. 1 is a perspective view of a component sensor in the first embodiment. 図２は図１に示す成分センサの線ＩＩ－ＩＩにおける断面図である。2 is a cross-sectional view of the component sensor shown in FIG. 1 taken along line II-II. 図３は実施の形態２における成分センサの斜視図である。FIG. 3 is a perspective view of the component sensor in the second embodiment. 図４は図３に示す成分センサの線ＩＶ－ＩＶにおける断面図である。4 is a cross-sectional view of the component sensor shown in FIG. 3 taken along line IV-IV. 図５は実施の形態２における成分センサの赤外線の軌跡を示す図である。FIG. 5 is a diagram illustrating an infrared ray locus of the component sensor according to the second embodiment. 図６Ａは実施の形態３における成分センサの断面図である。FIG. 6A is a cross-sectional view of a component sensor according to Embodiment 3. 図６Ｂは実施の形態３における他の成分センサの断面図である。FIG. 6B is a cross-sectional view of another component sensor according to Embodiment 3. 図７は実施の形態３におけるさらに他の成分センサの断面図である。FIG. 7 is a cross-sectional view of still another component sensor in the third embodiment. 図８は実施の形態３におけるさらに他の成分センサの断面図である。FIG. 8 is a cross-sectional view of still another component sensor in the third embodiment. 図９は実施の形態４における成分センサの拡大断面図である。FIG. 9 is an enlarged cross-sectional view of the component sensor in the fourth embodiment. 図１０は実施の形態５における成分センサの斜視図である。FIG. 10 is a perspective view of a component sensor in the fifth embodiment. 図１１は実施の形態５における成分センサの模式図である。FIG. 11 is a schematic diagram of a component sensor in the fifth embodiment. 図１２は実施の形態５における成分センサの側面図である。FIG. 12 is a side view of the component sensor in the fifth embodiment. 図１３は図１２に示す成分センサの線ＸＩＩＩ－ＸＩＩＩにおける断面図である。13 is a cross-sectional view of the component sensor shown in FIG. 12, taken along line XIII-XIII. 図１４は実施の形態５における成分センサの模式図である。FIG. 14 is a schematic diagram of a component sensor according to the fifth embodiment. 図１５は実施の形態５における他の成分センサの模式図である。FIG. 15 is a schematic diagram of another component sensor according to the fifth embodiment. 図１６は実施の形態５におけるさらに他の成分センサの模式図である。FIG. 16 is a schematic diagram of still another component sensor according to the fifth embodiment. 図１７は実施の形態５におけるさらに他の成分センサの模式図である。FIG. 17 is a schematic diagram of still another component sensor according to the fifth embodiment. 図１８は実施の形態５におけるさらに他の成分センサの模式図である。FIG. 18 is a schematic diagram of still another component sensor in the fifth embodiment. 図１９は実施の形態６における成分センサの模式図である。FIG. 19 is a schematic diagram of a component sensor according to the sixth embodiment. 図２０は比較例の成分センサの模式図である。FIG. 20 is a schematic diagram of a component sensor of a comparative example. 図２１Ａは実施の形態６における成分センサの模式図である。FIG. 21A is a schematic diagram of a component sensor according to Embodiment 6. 図２１Ｂは実施の形態６における成分センサの模式図である。FIG. 21B is a schematic diagram of a component sensor according to Embodiment 6. 図２２は実施の形態７における成分センサの模式図である。FIG. 22 is a schematic diagram of a component sensor according to the seventh embodiment. 図２３は実施の形態７における他の成分センサの模式図である。FIG. 23 is a schematic diagram of another component sensor according to the seventh embodiment. 図２４は実施の形態７におけるさらに他の成分センサの模式図である。FIG. 24 is a schematic diagram of still another component sensor according to the seventh embodiment. 図２５は実施の形態７におけるさらに他の成分センサの模式図である。FIG. 25 is a schematic diagram of still another component sensor according to the seventh embodiment. 図２６は実施の形態８における成分センサの模式図である。FIG. 26 is a schematic diagram of a component sensor according to the eighth embodiment.
　以下に、実施の形態に係る成分センサについて図面を用いて説明をする。なお、各図面において、同様の構成については、同一の符号を付し、説明を省略する。また、各実施の形態における各構成要素は矛盾のない範囲で任意に組み合わせても良い。また、各実施の形態における構成は発明を逸脱しない範囲で変更することが可能である。 Hereinafter, the component sensor according to the embodiment will be described with reference to the drawings. In addition, in each drawing, about the same structure, the same code | symbol is attached | subjected and description is abbreviate | omitted. In addition, each component in each embodiment may be arbitrarily combined within a consistent range. The configuration in each embodiment can be changed without departing from the scope of the invention.
　（実施の形態１）
　図１は実施の形態１における成分センサ１の斜視図である。図２は図１に示す成分センサ１の断面図である。図１と図２において互いに直交するＸ軸とＹ軸とＺ軸とを定義する。 (Embodiment 1)
FIG. 1 is a perspective view of a component sensor 1 according to the first embodiment. FIG. 2 is a cross-sectional view of the component sensor 1 shown in FIG. In FIG. 1 and FIG. 2, an X axis, a Y axis, and a Z axis that are orthogonal to each other are defined.
　成分センサ１は、Ｘ軸に平行な延在方向Ｄ１０１に延在した管部３と、基板５と、基板５に設けられた凸部６、７と、凸部６に向かって赤外線８を発光する発光部９と、凸部７から出射した赤外線８を受光する受光部１０を有している。管部３は、Ｘ軸の方向に延びて内部空間３Ｓを囲む側壁２を有する。側壁２は、内部空間３Ｓに面する内壁面２Ａと、内壁面２Ａの反対側の外壁面３Ｂとを有する。外壁面３Ｂは内部空間３Ｓに面していない。管部３の側壁２には開口部４が設けられている。基板５は開口部４を覆う。図２は、図１に示す管部３の線ＩＩ－ＩＩにおける断面を示す。 The component sensor 1 emits infrared rays 8 toward the convex portion 6, the tube portion 3 extending in the extending direction D 101 parallel to the X axis, the substrate 5, the convex portions 6 and 7 provided on the substrate 5. And a light receiving portion 10 for receiving the infrared ray 8 emitted from the convex portion 7. The tube portion 3 has a side wall 2 that extends in the X-axis direction and surrounds the internal space 3S. Side wall 2 has inner wall surface 2A facing inner space 3S and outer wall surface 3B opposite to inner wall surface 2A. The outer wall surface 3B does not face the inner space 3S. An opening 4 is provided in the side wall 2 of the tube portion 3. The substrate 5 covers the opening 4. FIG. 2 shows a cross section taken along line II-II of the tube part 3 shown in FIG.
　管部３の両端部は開口しており、流体９１が流入または流出することができる。実施の形態１では、流体９１はガソリン等の燃料の液体である。管部３の側壁２の外壁面２Ｂには平坦な平坦部１１が設けられている。開口部４は平坦部１１に設けられている。平坦部１１はその平坦な形状により開口部４を形成しやすく、また、基板５を管部３に取り付けやすくなる。管部３は平坦部１１を有していなくてもよい。管部３の平坦部１１が設けられている部分のＸ軸に直角の断面は図１に示すように直方体形状を有する。管部３のこの断面は多角形形状を有していてもよく、さらに平坦部１１以外の部分が円弧形状を有していてもよい。 Both ends of the pipe part 3 are open, and the fluid 91 can flow in or out. In the first embodiment, the fluid 91 is a liquid of fuel such as gasoline. A flat flat portion 11 is provided on the outer wall surface 2 </ b> B of the side wall 2 of the tube portion 3. The opening 4 is provided in the flat portion 11. The flat portion 11 can easily form the opening 4 due to its flat shape, and can easily attach the substrate 5 to the tube portion 3. The tube part 3 may not have the flat part 11. The cross section perpendicular to the X axis of the portion of the tube portion 3 where the flat portion 11 is provided has a rectangular parallelepiped shape as shown in FIG. This cross section of the tube part 3 may have a polygonal shape, and a part other than the flat part 11 may have an arc shape.
　基板５はシリコンで形成されている。基板５はシリコンに限られないが、シリコンで形成することで容易に加工をすることができる。基板５は互いに反対側の主面１２、１３を有する。主面１２は開口部４を覆っている。主面１３には凸部６、７が設けられている。凸部６、７は基板５の材料であるシリコン基板エッチングすることで形成されており、すなわち、凸部６、７は基板５と一体に形成されている。基板５と凸部６、７を一体に形成することで、容易に凸部６、７を形成することができる。凸部６には傾斜面１４が設けられ、凸部７には傾斜面１５が設けられている。傾斜面１４、１５は主面１３に対して傾斜している。基板５の屈折率は流体９１の屈折率よりも大きい。このため、赤外線８は傾斜面１４から基板５の内部に入射し、基板５の内部において全反射をした後に傾斜面１５から出射する。傾斜面１４と傾斜面１５は異方性エッチングで形成されている。異方性エッチングで形成することで傾斜面１４、１５を容易に形成できる。基板５に（１００）ウエハを用いた場合、傾斜面１４、１５の面方位は（１１１）面となり、傾斜面１４、１５の主面１３に対する角度θは５４．７°となる。角度θを５４．７°とすることで、赤外線８が基板５と管部３の内部空間３Ｓとの境界面すなわち基板５の内部において主面１２で全反射することができる。凸部６、７は基板５とは別に形成されて、基板５に接合されていてもよい。 The substrate 5 is made of silicon. The substrate 5 is not limited to silicon, but can be easily processed by being formed of silicon. The substrate 5 has principal surfaces 12 and 13 opposite to each other. The main surface 12 covers the opening 4. Convex portions 6 and 7 are provided on the main surface 13. The convex portions 6 and 7 are formed by etching a silicon substrate that is a material of the substrate 5, that is, the convex portions 6 and 7 are formed integrally with the substrate 5. By forming the substrate 5 and the convex portions 6 and 7 integrally, the convex portions 6 and 7 can be easily formed. The convex portion 6 is provided with an inclined surface 14, and the convex portion 7 is provided with an inclined surface 15. The inclined surfaces 14 and 15 are inclined with respect to the main surface 13. The refractive index of the substrate 5 is larger than the refractive index of the fluid 91. For this reason, the infrared rays 8 are incident on the inside of the substrate 5 from the inclined surface 14 and are emitted from the inclined surface 15 after being totally reflected inside the substrate 5. The inclined surface 14 and the inclined surface 15 are formed by anisotropic etching. The inclined surfaces 14 and 15 can be easily formed by forming by anisotropic etching. When a (100) wafer is used as the substrate 5, the plane orientation of the inclined surfaces 14 and 15 is the (111) plane, and the angle θ of the inclined surfaces 14 and 15 with respect to the main surface 13 is 54.7 °. By setting the angle θ to 54.7 °, the infrared rays 8 can be totally reflected by the main surface 12 at the boundary surface between the substrate 5 and the internal space 3S of the tube portion 3, that is, inside the substrate 5. The convex portions 6 and 7 may be formed separately from the substrate 5 and bonded to the substrate 5.
　傾斜面１４から基板５に入射した赤外線８は基板５の内部において主面１２、１３で複数回全反射し、傾斜面１５から出射する。赤外線８は境界面すなわち主面１２で全反射する際にエバネッセント波が流体９１中に潜り込み、流体９１で吸収されて減衰する。この減衰量を検出することで流体９１の成分を検出することができる。凸部６、７は互いに離間して設けられている。したがって、傾斜面１４から入射した赤外線８が傾斜面１５から出射するまでの間に複数回全反射する。これにより、受光部１０に入射するまでに赤外線８が減衰する減衰量が大きくなり、流体９１の成分の検出精度が向上する。 The infrared rays 8 incident on the substrate 5 from the inclined surface 14 are totally reflected a plurality of times by the main surfaces 12 and 13 inside the substrate 5 and emitted from the inclined surface 15. When the infrared ray 8 is totally reflected at the boundary surface, that is, the main surface 12, an evanescent wave enters the fluid 91 and is absorbed and attenuated by the fluid 91. By detecting the amount of attenuation, the component of the fluid 91 can be detected. The convex portions 6 and 7 are provided apart from each other. Therefore, the infrared rays 8 incident from the inclined surface 14 are totally reflected a plurality of times until they are emitted from the inclined surface 15. Thereby, the attenuation amount by which the infrared rays 8 are attenuated before entering the light receiving unit 10 is increased, and the detection accuracy of the component of the fluid 91 is improved.
　また、凸部６、７を設けることで、基板５の凸部６、７の間の赤外線８が透過する領域を薄くすることができる。これにより、赤外線８が基板５を透過する際に全反射する回数が多くなり、流体９１の成分の検出精度が向上する。また、基板５が薄いことで赤外線８が全反射する回数を増やすことができるため、凸部６、７の間の距離を短くすることができ、成分センサ１を小型化することができる。 Further, by providing the convex portions 6 and 7, the region through which the infrared rays 8 between the convex portions 6 and 7 of the substrate 5 are transmitted can be thinned. As a result, the number of times the infrared rays 8 are totally reflected when passing through the substrate 5 is increased, and the detection accuracy of the component of the fluid 91 is improved. Moreover, since the frequency | count that the infrared rays 8 are totally reflected can be increased because the board | substrate 5 is thin, the distance between the convex parts 6 and 7 can be shortened, and the component sensor 1 can be reduced in size.
　特許文献１に開示されている従来の成分センサは成分を高精度に検出することが困難である。すなわち、この成分センサは、検出する成分を含む液体を流入させる流路が極めて細い傍流として構成されている。したがって、液体を安定的に流入させることが困難であり、成分を高精度に検出することは困難である。また、特許文献２～４に開示されている成分センサでは、検出精度を向上するために基板内での赤外線の反射回数を増やすと成分センサが大型化する。 The conventional component sensor disclosed in Patent Document 1 is difficult to detect components with high accuracy. That is, this component sensor is configured as a side flow in which the flow path for the liquid containing the component to be detected flows is extremely thin. Therefore, it is difficult to stably flow in the liquid, and it is difficult to detect the components with high accuracy. In the component sensors disclosed in Patent Documents 2 to 4, the component sensor is increased in size when the number of reflections of infrared rays in the substrate is increased in order to improve detection accuracy.
　上述のように、実施の形態１における成分センサ１は流体９１の成分を高精度で検出でき、小型化することができる。 As described above, the component sensor 1 in the first embodiment can detect the component of the fluid 91 with high accuracy and can be downsized.
　発光部９は、赤外線８を発光可能な白金薄膜抵抗素子を用いている。発光部９は、赤外線８を発光可能な発光ダイオードを用いても良い。発光ダイオードには、半導体のベアチップを用いている。発光部９は、管部３の基板５が設けられた側に設けられ、凸部６に赤外線８が入射するように配置されている。赤外線８は、検出対象の流体９１に吸収されやすい波長を有する。実施の形態１においては、赤外線８の波長は２μｍ～１５μｍである。この範囲の波長を用いることで流体９１の成分を精度良く検出することが出来る。なお、成分センサ１の使用用途に応じて、赤外線８の波長の範囲をもっと狭くしても良い。測定しようとする流体９１の成分が吸収する固有の吸収波長に一致する通過帯域を有する光学バンドパスフィルタを発光部９に設けることで、赤外線８の波長の範囲を狭くする事ができる。 The light emitting unit 9 uses a platinum thin film resistance element capable of emitting infrared rays 8. The light emitting unit 9 may use a light emitting diode capable of emitting infrared rays 8. A semiconductor bare chip is used for the light emitting diode. The light emitting unit 9 is provided on the side of the tube unit 3 on which the substrate 5 is provided, and is arranged so that the infrared rays 8 are incident on the projection 6. The infrared ray 8 has a wavelength that is easily absorbed by the fluid 91 to be detected. In the first embodiment, the wavelength of the infrared ray 8 is 2 μm to 15 μm. By using a wavelength in this range, the component of the fluid 91 can be detected with high accuracy. Note that the wavelength range of the infrared ray 8 may be further narrowed according to the use application of the component sensor 1. By providing the light-emitting unit 9 with an optical bandpass filter having a passband that matches the specific absorption wavelength absorbed by the component of the fluid 91 to be measured, the wavelength range of the infrared ray 8 can be narrowed.
　受光部１０は、半導体のベアチップを用いている。受光部１０は管部３の基板５が設けられた側で凸部７から出射した赤外線８を検出できる位置に配置されている。受光部１０は受光素子１６、１７、１８を有している。受光素子１６には光学フィルタ１９が設けられ、受光素子１７には光学フィルタ２０が設けられ、受光素子１８の前方には光学フィルタ２１が設けられている。受光部１０は、受光素子１６、１７、１８と光学フィルタ１９、２０、２１を支持する筐体２２を有する。光学フィルタ１９、２０、２１は互いに異なる波長の赤外線を透過させる。光学フィルタ１９が流体９１に吸収される吸収量の小さい波長の赤外線８を透過する。光学フィルタ２０、２１は光学フィルタ１９を透過する波長よりも流体９１の吸収量の大きい波長の赤外線８を透過させる。受光素子１６の出力を受光素子１７と受光素子１８の出力と比較することで、流体９１での赤外線８の吸収量がわかるため、精度良く流体９１の成分を検出することができる。受光素子１８が無くても受光素子１６、１７で流体９１の成分を精度良く検出することができる。受光素子１８をさらに有していることで、流体９１の２種類の成分を高精度に検出することができる。検出したい流体９１の成分の種類を増やしたい場合、受光素子の数をさらに増やしても良い。 The light receiving unit 10 uses a semiconductor bare chip. The light receiving unit 10 is disposed at a position where the infrared ray 8 emitted from the convex portion 7 can be detected on the side of the tube unit 3 on which the substrate 5 is provided. The light receiving unit 10 includes light receiving elements 16, 17, and 18. The light receiving element 16 is provided with an optical filter 19, the light receiving element 17 is provided with an optical filter 20, and an optical filter 21 is provided in front of the light receiving element 18. The light receiving unit 10 includes a housing 22 that supports the light receiving elements 16, 17, and 18 and the optical filters 19, 20, and 21. The optical filters 19, 20, and 21 transmit infrared rays having different wavelengths. The optical filter 19 transmits infrared rays 8 having a small absorption amount absorbed by the fluid 91. The optical filters 20 and 21 transmit the infrared ray 8 having a wavelength with a larger amount of absorption of the fluid 91 than the wavelength transmitted through the optical filter 19. By comparing the output of the light receiving element 16 with the outputs of the light receiving element 17 and the light receiving element 18, the amount of absorption of the infrared ray 8 in the fluid 91 can be known, so that the component of the fluid 91 can be detected with high accuracy. Even without the light receiving element 18, the components of the fluid 91 can be accurately detected by the light receiving elements 16 and 17. By further including the light receiving element 18, two types of components of the fluid 91 can be detected with high accuracy. When it is desired to increase the types of components of the fluid 91 to be detected, the number of light receiving elements may be further increased.
　発光部９は凸部６からＺ軸の負方向に離間した位置に配置されている。受光部１０は凸部７からＺ軸の負方向に離間した位置に配置されている。この配置により。成分センサ１を小型化することができる。さらに、赤外線８の傾斜面１４へ入射する入射角が小さくなり、流体９１へ深く浸透することができ成分センサ１の検出精度を向上させる。また、発光部９と受光部１０は同一の支持基板２３の表面２３Ａ上に設けられている。発光部９は赤外線８を発光する発光面９Ｐを有する。受光部１０は赤外線８を受光する受光面１０Ｐを有する。発光部９の発光面９Ｐと受光部１０の受光面１０Ｐが同一平面Ｐ２３上に位置する、すなわち支持基板２３の表面２３Ａから同じ距離に位置するように発光部９と受光部１０が配置されている。このように配置することで、発光部９と受光部１０を実装しやすくなる。なお、発光部９と受光部１０は同一の支持基板２３に設けなくても良く、基板５内で赤外線８が全反射する角度の範囲内で、発光部９と受光部１０が凸部６と凸部７とからＺ軸に対してそれぞれ傾斜した方向に配置されていてもよい。 The light emitting part 9 is arranged at a position spaced from the convex part 6 in the negative direction of the Z axis. The light receiving unit 10 is disposed at a position away from the convex part 7 in the negative direction of the Z axis. By this arrangement. The component sensor 1 can be reduced in size. Furthermore, the incident angle of the infrared rays 8 incident on the inclined surface 14 is reduced, and the infrared rays 8 can penetrate deeply into the fluid 91, thereby improving the detection accuracy of the component sensor 1. Further, the light emitting unit 9 and the light receiving unit 10 are provided on the surface 23 </ b> A of the same support substrate 23. The light emitting unit 9 has a light emitting surface 9P that emits infrared rays 8. The light receiving unit 10 has a light receiving surface 10 </ b> P that receives the infrared rays 8. The light emitting unit 9 and the light receiving unit 10 are arranged so that the light emitting surface 9P of the light emitting unit 9 and the light receiving surface 10P of the light receiving unit 10 are located on the same plane P23, that is, at the same distance from the surface 23A of the support substrate 23. Yes. By arranging in this way, the light emitting unit 9 and the light receiving unit 10 can be easily mounted. Note that the light emitting unit 9 and the light receiving unit 10 do not have to be provided on the same support substrate 23, and the light emitting unit 9 and the light receiving unit 10 are in the range of the angle at which the infrared rays 8 are totally reflected in the substrate 5. You may arrange | position in the direction inclined with respect to the Z-axis from the convex part 7, respectively.
　（実施の形態２）
　図３は実施の形態２における成分センサ３１の斜視図である。図４は成分センサ３１の断面図である。図５は成分センサ３１の赤外線８の軌跡を示す。図４は、図３に示す管部３の線ＩＶ－ＩＶにおける断面を示す。図５は説明の便宜上、基板５に隠れている部分を破線で示し、基板５内を全反射している赤外線８の軌跡を破線の直線で示している。図３から図５において、図１と図２に示す実施の形態１における成分センサ１と同じ部分には同じ参照番号を付す。 (Embodiment 2)
FIG. 3 is a perspective view of the component sensor 31 in the second embodiment. FIG. 4 is a sectional view of the component sensor 31. FIG. 5 shows the locus of the infrared rays 8 of the component sensor 31. FIG. 4 shows a cross section taken along line IV-IV of the tube part 3 shown in FIG. For convenience of explanation, FIG. 5 shows a portion hidden by the substrate 5 by a broken line, and shows a locus of the infrared rays 8 totally reflected in the substrate 5 by a broken line. 3 to 5, the same reference numerals are assigned to the same parts as those of the component sensor 1 in the first embodiment shown in FIGS. 1 and 2.
　成分センサ３１は、図１と図２に示す成分センサ１の受光部１０の代わりに凸部７から出射した赤外線８を受光する受光部３２を有している。受光部３２は赤外線８を受光する受光面３２Ｐを有する。受光部３２の受光面３２Ｐと発光部９の発光面９Ｐが同一平面Ｐ２３上に位置する、すなわちすなわち支持基板２３の表面２３Ａから同じ距離に位置するように受光部３２と発光部９は配置されている。 The component sensor 31 has a light receiving portion 32 that receives the infrared ray 8 emitted from the convex portion 7 instead of the light receiving portion 10 of the component sensor 1 shown in FIGS. 1 and 2. The light receiving unit 32 has a light receiving surface 32 </ b> P that receives the infrared rays 8. The light receiving unit 32 and the light emitting unit 9 are arranged so that the light receiving surface 32P of the light receiving unit 32 and the light emitting surface 9P of the light emitting unit 9 are located on the same plane P23, that is, at the same distance from the surface 23A of the support substrate 23. ing.
　受光部３２は、図１と図２に示す成分センサ１の受光部１０と同様に、受光素子１６、１７、１８と光学フィルタ１９、２０、２１とを有する。受光素子１６、１７、１８は、赤外線８の一部である赤外線８１６、８１７、８１８を受光する受光面１６Ｐ、１７Ｐ、１８Ｐをそれぞれ有する。受光素子１６、１７、１８は受光面１６Ｐ、１７Ｐ、１８Ｐが平面Ｐ２３上に位置する、すなわち支持基板２３の表面２３Ａから同じ高さに位置するように配置されている。これにより、受光素子１６、１７、１８の実装が容易になる。 The light receiving unit 32 includes light receiving elements 16, 17, 18 and optical filters 19, 20, 21, similarly to the light receiving unit 10 of the component sensor 1 shown in FIGS. 1 and 2. The light receiving elements 16, 17, and 18 have light receiving surfaces 16 </ b> P, 17 </ b> P, and 18 </ b> P that receive the infrared rays 816, 817, and 818 that are part of the infrared ray 8. The light receiving elements 16, 17 and 18 are arranged such that the light receiving surfaces 16P, 17P and 18P are positioned on the plane P23, that is, at the same height from the surface 23A of the support substrate 23. This facilitates mounting of the light receiving elements 16, 17, and 18.
　受光部３２では、受光素子１６、１７、１８はＹ軸の方向、すなわち基板５の主面１３に平行でかつＸ軸に直角の方向に並んで配置されている。図５に示すように、基板５を透過した赤外線８は、Ｙ軸の方向に配列されてかつ互いに離れて広がる赤外線８１６、８１７、８１８として凸部７から出射する。このため、Ｙ軸方向に並べて配置された受光素子１６、１７、１８は効率良く赤外線８１６、８１７、８１８をそれぞれ検出することができる。 In the light receiving unit 32, the light receiving elements 16, 17, and 18 are arranged side by side in the direction of the Y axis, that is, in the direction parallel to the main surface 13 of the substrate 5 and perpendicular to the X axis. As shown in FIG. 5, the infrared rays 8 transmitted through the substrate 5 are emitted from the convex portion 7 as infrared rays 816, 817, and 818 that are arranged in the Y-axis direction and spread away from each other. For this reason, the light receiving elements 16, 17, and 18 arranged side by side in the Y-axis direction can efficiently detect the infrared rays 816, 817, and 818, respectively.
　（実施の形態３）
　図６Ａは実施の形態３における成分センサ４１の断面図である。図６Ａにおいて図１と図２に示す実施の形態１における成分センサ１と同じ部分には同じ参照番号を付す。成分センサ４１は、図１と図２に示す成分センサ１の凸部７の代わりに、基板５の主面１２に設けられた凸部４７を有する。図６Ａは基板５と発光部９と受光部１０の位置関係を示す。図６Ａでは説明の便宜上、赤外線８の軌跡を基板５外では直線で示し、基板５内では破線で示している。 (Embodiment 3)
FIG. 6A is a cross-sectional view of component sensor 41 in the third embodiment. In FIG. 6A, the same reference numerals are given to the same portions as those of the component sensor 1 in the first embodiment shown in FIGS. The component sensor 41 has a convex portion 47 provided on the main surface 12 of the substrate 5 instead of the convex portion 7 of the component sensor 1 shown in FIGS. 1 and 2. FIG. 6A shows the positional relationship among the substrate 5, the light emitting unit 9, and the light receiving unit 10. In FIG. 6A, for convenience of explanation, the locus of the infrared ray 8 is indicated by a straight line outside the substrate 5 and indicated by a broken line inside the substrate 5.
　成分センサ４１の基板５は、凸部６、４７はＸ軸の方向で同じ位置に基板５を挟んでＺ軸の方向に配列されている。なお、ここでいう同じ位置とは製造誤差によるずれは許容される。凸部６に赤外線８が入射するように発光部９が設けられ、凸部４７から出射した赤外線８を受光するように受光部１０が設けられている。基板５のＸ軸の方向の側端面４３には金やアルミニウム等で形成された反射膜４３Ｍが設けられている。凸部６の傾斜面１４から入射した赤外線８はＸ軸の方向に主面１２、１３で全反射を繰り返しながら基板５の内部を進行し、反射膜４３Ｍにより側端面４３で反射し、凸部４７に向かって主面１２、１３で全反射を繰り返しながら基板５の内部を進行し、凸部４７の傾斜面４５から基板５の外に出射する。この様に、側端面４３で赤外線８が反射するように構成することで、基板５内の赤外線８が進行する光路の光路長が長くなり、赤外線８が反射する回数を増やすことができる。したがって、成分センサ４１の感度を向上させることができる。また、基板５のＸ軸の方向の長さが同じでも赤外線８の光路長が長くなるため、感度を維持したまま成分センサ４１を小型化させることもできる。凸部６、４７は基板５といったｉに形成されていてもよく、基板５とは別に形成されて基板５に接合されていてもよい。 The substrate 5 of the component sensor 41 has the convex portions 6 and 47 arranged in the Z-axis direction with the substrate 5 sandwiched at the same position in the X-axis direction. Note that a deviation due to a manufacturing error is allowed from the same position here. The light emitting part 9 is provided so that the infrared ray 8 is incident on the convex part 6, and the light receiving part 10 is provided so as to receive the infrared ray 8 emitted from the convex part 47. A reflective film 43M made of gold, aluminum, or the like is provided on the side end face 43 of the substrate 5 in the X-axis direction. The infrared ray 8 incident from the inclined surface 14 of the convex portion 6 travels inside the substrate 5 while repeating total reflection on the main surfaces 12 and 13 in the X-axis direction, and is reflected by the side end surface 43 by the reflective film 43M. It advances inside the substrate 5 while repeating total reflection at the main surfaces 12 and 13 toward 47, and exits from the inclined surface 45 of the convex portion 47 to the outside of the substrate 5. In this way, by configuring the side end face 43 to reflect the infrared rays 8, the optical path length of the optical path in the substrate 5 on which the infrared rays 8 travel is increased, and the number of times the infrared rays 8 are reflected can be increased. Therefore, the sensitivity of the component sensor 41 can be improved. Further, since the optical path length of the infrared ray 8 is increased even if the length of the substrate 5 in the X-axis direction is the same, the component sensor 41 can be downsized while maintaining the sensitivity. The protrusions 6 and 47 may be formed on i such as the substrate 5, or may be formed separately from the substrate 5 and bonded to the substrate 5.
　図６Ｂは実施の形態３における他の成分センサ４１Ａの断面図である。図６Ｂにおいて図６Ａに示す成分センサ４１と同じ部分には同じ参照番号を付す。基板５はＸ軸の方向において側端面４３の反対側の側端面１４３を有する。成分センサ４１Ａは、基板５の側端面１４３に設けられた反射膜１４３Ｍをさらに備える。反射膜１４３Ｍにより側端面１４３でも赤外線８が基板５内で反射する。これにより、赤外線８が側端面４３、１４３で複数回反射するようになり、赤外線８が基板５の内部を通る光路の光路長を長くすることができ、成分センサ４１Ａの感度をさらに向上させることができる。また、成分センサ４１Ａの感度を維持したまま、さらに成分センサ４１Ａを小型化させることもできる。 FIG. 6B is a cross-sectional view of another component sensor 41A in the third embodiment. 6B, the same reference numerals are given to the same portions as those of the component sensor 41 shown in FIG. 6A. The substrate 5 has a side end surface 143 opposite to the side end surface 43 in the X-axis direction. The component sensor 41 </ b> A further includes a reflective film 143 </ b> M provided on the side end surface 143 of the substrate 5. The infrared rays 8 are reflected in the substrate 5 also on the side end surface 143 by the reflective film 143M. Thereby, the infrared ray 8 is reflected by the side end surfaces 43 and 143 a plurality of times, the optical path length of the optical path through which the infrared ray 8 passes through the inside of the substrate 5 can be increased, and the sensitivity of the component sensor 41A is further improved. Can do. Further, the component sensor 41A can be further downsized while maintaining the sensitivity of the component sensor 41A.
　なお、成分センサ４１、４１Ａでは基板５のＸ軸の方向の同じ位置にＺ軸の方向に基板５を挟んで凸部６、４７が配列される。基板５の側端面４３で赤外線８が反射する構成であれば凸部６、４７の配置位置はこれに限られない。 In the component sensors 41 and 41A, the convex portions 6 and 47 are arranged at the same position in the X-axis direction of the substrate 5 with the substrate 5 sandwiched in the Z-axis direction. If the infrared rays 8 are reflected by the side end face 43 of the substrate 5, the arrangement positions of the convex portions 6 and 47 are not limited to this.
　図７は実施の形態３におけるさらに他の成分センサ４１Ｂの断面図である。図７において図６Ａと図６Ｂに示す成分センサ４１、４１Ａと同じ部分には同じ参照番号を付す。図７は成分センサ４１Ｂの基板５と発光部９と受光部１０の位置関係を示す。 FIG. 7 is a cross-sectional view of still another component sensor 41B in the third embodiment. In FIG. 7, the same reference numerals are given to the same portions as the component sensors 41 and 41A shown in FIGS. 6A and 6B. FIG. 7 shows the positional relationship among the substrate 5, the light emitting unit 9, and the light receiving unit 10 of the component sensor 41B.
　成分センサ４１Ｂでは、基板５についてＺ軸の方向の同一側に発光部９と受光部１０が配置されている。成分センサ４１Ｂは、成分センサ４１、４１Ａの凸部６、７の代わりに、基板５の主面１３に設けられた１つの凸部４４を有する。凸部４４は基板５の主面１２に対して傾斜する傾斜面４５Ａ、４５Ｂと、傾斜面４５Ａ、４５Ｂの間をつなぐ面４４Ａとを有する。面４４Ａは主面１３と平行である。発光部９から発せられた赤外線８は凸部４４の傾斜面４５Ａから入射し、基板５の表面で繰り返し全反射して基板５の内部を進行し、傾斜面４５Ｂから出射して受光部１０で受光される。基板５のＸ軸の方向の互いに反対側の側端面４３、１４３には反射膜４３Ｍ、１４３Ｍがそれぞれ設けられている。赤外線８は基板５の内部において反射膜４３Ｍ、１４３Ｍにより側端面４３、１４３で複数回全反射し、主面１２、１３、４４Ａで繰り返し全反射して基板５の凸部４４の傾斜面４５Ｂから出射する。これにより、赤外線８の基板５内での光路長を長くすることができ、成分センサ４１Ｂの感度を向上させたり、成分センサ４１Ｂを小型化したりできる。 In the component sensor 41B, the light emitting unit 9 and the light receiving unit 10 are disposed on the same side of the substrate 5 in the Z-axis direction. The component sensor 41 </ b> B has one convex portion 44 provided on the main surface 13 of the substrate 5 instead of the convex portions 6 and 7 of the component sensors 41 and 41 </ b> A. The convex portion 44 includes inclined surfaces 45A and 45B that are inclined with respect to the main surface 12 of the substrate 5, and a surface 44A that connects the inclined surfaces 45A and 45B. The surface 44A is parallel to the main surface 13. The infrared rays 8 emitted from the light emitting unit 9 are incident from the inclined surface 45A of the convex portion 44, are repeatedly totally reflected on the surface of the substrate 5, travel inside the substrate 5, are emitted from the inclined surface 45B, and are received by the light receiving unit 10. Received light. Reflective films 43M and 143M are provided on side end surfaces 43 and 143 on the opposite sides of the substrate 5 in the X-axis direction, respectively. The infrared ray 8 is totally reflected at the side end faces 43 and 143 a plurality of times by the reflection films 43M and 143M inside the substrate 5, and is repeatedly totally reflected at the main surfaces 12, 13, and 44A, and from the inclined surface 45B of the convex portion 44 of the substrate 5. Exit. Thereby, the optical path length in the board | substrate 5 of the infrared rays 8 can be lengthened, the sensitivity of the component sensor 41B can be improved, or the component sensor 41B can be reduced in size.
　図８は実施の形態３におけるさらに他の成分センサ４１Ｃの平面図である。図８において図１、図２と図６Ａと図６Ｂに示す成分センサ１、４１、４１Ａと同じ部分には同じ参照番号を付す。図８は成分センサ４１Ｃの基板５と凸部６、７の位置関係を示す。図８は成分センサ４１Ｃの基板５の主面１３をＺ軸の方向から見た図である。 FIG. 8 is a plan view of still another component sensor 41C in the third embodiment. In FIG. 8, the same reference numerals are assigned to the same portions as those of the component sensors 1, 41, and 41A shown in FIGS. 1, 2, 6A, and 6B. FIG. 8 shows the positional relationship between the substrate 5 and the convex portions 6 and 7 of the component sensor 41C. FIG. 8 is a view of the main surface 13 of the substrate 5 of the component sensor 41C as viewed from the Z-axis direction.
　成分センサ４１Ｃは基板５のＺ軸の同じ方向の主面１３に凸部６、７が設けられている。凸部６、７はＸ軸の方向の異なる位置で、かつ、Ｙ軸の方向の異なる位置に設けられている。図８では、凸部６、７は基板５の主面１３の対角の互いに反対側の位置に設けられている。基板５のＸ軸の互いに反対の方向の側端面４３、１４３には反射膜４３Ｍ、１４３Ｍがそれぞれ設けられている。凸部６から入射した赤外線８は反射膜４３Ｍ、１４３Ｍにより側端面４３、１４３で複数回全反射して凸部７から出射する。この様に基板５を構成することで、赤外線８が基板５内を進行する光路の光路長を長くすることができるため、成分センサ４１Ｃの感度を向上させたり、成分センサ４１Ｃを小型化したりできる。 The component sensor 41 </ b> C is provided with convex portions 6 and 7 on the main surface 13 in the same direction of the Z axis of the substrate 5. The convex portions 6 and 7 are provided at different positions in the X-axis direction and different positions in the Y-axis direction. In FIG. 8, the convex portions 6 and 7 are provided at positions opposite to each other on the diagonal of the main surface 13 of the substrate 5. Reflective films 43M and 143M are provided on side end surfaces 43 and 143 in the opposite directions of the X axis of the substrate 5, respectively. The infrared ray 8 incident from the convex portion 6 is totally reflected a plurality of times at the side end surfaces 43 and 143 by the reflective films 43M and 143M and is emitted from the convex portion 7. By configuring the substrate 5 in this manner, the optical path length of the optical path through which the infrared rays 8 travel in the substrate 5 can be increased, so that the sensitivity of the component sensor 41C can be improved and the component sensor 41C can be downsized. .
　（実施の形態４）
　図９は実施の形態４における成分センサ５１の拡大断面図である。図９において図１から図８に示す成分センサ１、４１、４１Ａ～４１Ｃと同じ部分には同じ参照番号を付す。 (Embodiment 4)
FIG. 9 is an enlarged cross-sectional view of the component sensor 51 in the fourth embodiment. 9, the same parts as those of the component sensors 1, 41, 41A to 41C shown in FIGS. 1 to 8 are denoted by the same reference numerals.
　実施の形態４の成分センサ５１は、基板５は管部３に封止材５３を用いて開口部４を封止している。基板５の側端面４３、１４３を含む外縁部分５ＣのＺ軸の方向の厚さＬ２は、基板５の中央部分のＺ軸の方向の厚さＬ１よりも大きい。すなわち基板５の外縁部分５Ｃは局所的に厚い。基板５はＺ軸の方向の厚さを小さくした方が赤外線８の反射の回数が増え、成分センサ５１の感度を向上させることができる。しかしながら、基板５を薄くすると基板５の強度が低下するため、基板５で封止材５３を用いて開口部４で封止する際に基板５に亀裂が発生する場合がある。成分センサ５１は、基板５を管部３に実装する外縁部分５Ｃの厚さＬ２を局所的に厚くしているため、封止強度を向上させることができる。 In the component sensor 51 according to the fourth embodiment, the substrate 5 seals the opening 4 using the sealing material 53 on the tube 3. The thickness L2 in the Z-axis direction of the outer edge portion 5C including the side end surfaces 43 and 143 of the substrate 5 is larger than the thickness L1 of the central portion of the substrate 5 in the Z-axis direction. That is, the outer edge portion 5C of the substrate 5 is locally thick. If the thickness of the substrate 5 in the Z-axis direction is reduced, the number of reflections of the infrared rays 8 increases, and the sensitivity of the component sensor 51 can be improved. However, since the strength of the substrate 5 decreases when the substrate 5 is thinned, the substrate 5 may be cracked when the substrate 5 is sealed with the opening portion 4 using the sealing material 53. Since the component sensor 51 locally increases the thickness L2 of the outer edge portion 5C for mounting the substrate 5 on the tube portion 3, the sealing strength can be improved.
　（実施の形態５）
　図１０は実施の形態５における成分センサ１１０を立体的に表す斜視図である。図１１は成分センサ１１０の模式図である。図１２は成分センサ１１０の側面図である。図１３は図１２に示す成分センサ１１０の線ＸＩＩＩ－ＸＩＩＩにおける断面図である。図１４は成分センサ１１０の模式図である。図１０から図１４において互いに直交するＸ軸とＹ軸とＺ軸とを定義する。成分センサ１１０は流体の成分を検出し、実施の形態５では自動車の燃料パイプに接続され、流体である液体の燃料を流入、通過させ、燃料の成分を検出する。 (Embodiment 5)
FIG. 10 is a perspective view that three-dimensionally represents the component sensor 110 according to the fifth embodiment. FIG. 11 is a schematic diagram of the component sensor 110. FIG. 12 is a side view of the component sensor 110. 13 is a cross-sectional view of the component sensor 110 shown in FIG. 12 taken along line XIII-XIII. FIG. 14 is a schematic diagram of the component sensor 110. 10 to 14, the X axis, the Y axis, and the Z axis that are orthogonal to each other are defined. The component sensor 110 detects a fluid component. In the fifth embodiment, the component sensor 110 is connected to a fuel pipe of an automobile and allows liquid fuel, which is a fluid, to flow in and pass through to detect the fuel component.
　成分センサ１１０は、流体１９１が流入する流路１０１と、流路１０１に接続された検出用流路１０７と、検出用流路１０７に接続されて成分センサ１１０の外へ流体１９１を排出する流路１０３と、流路１０１、１０３に接続された迂路１０２とを備える。実施の形態５において、上述のように、流体１９１は液体である燃料である。流路１０１はＸ軸の方向である延在方向に延びる。流路１０１と検出用流路１０７と流路１０３とはＸ軸に平行な直線上に配列されている。流路１０１に流入した流体１９１の一部１９１Ａは検出用流路１０７に流れ、流路１０１に流入した流体１９１の他の一部１９１Ｂは迂路１０２に流れる。検出用流路１０７と迂路１０２とにそれぞれ流れた流体１９１の一部１９１Ａ、１９１Ｂは合わさって流路１０３に流れて成分センサ１１０の外部に排出される。検出用流路１０７の外側には、発光部１０４と受光部１０５が検出用流路１０７を挟むように設けられている。 The component sensor 110 includes a flow channel 101 into which the fluid 191 flows, a detection flow channel 107 connected to the flow channel 101, and a flow that is connected to the detection flow channel 107 and discharges the fluid 191 to the outside of the component sensor 110. A path 103 and a detour 102 connected to the flow paths 101 and 103 are provided. In the fifth embodiment, as described above, the fluid 191 is a fuel that is a liquid. The channel 101 extends in the extending direction that is the direction of the X axis. The channel 101, the detection channel 107, and the channel 103 are arranged on a straight line parallel to the X axis. A part 191 A of the fluid 191 that has flowed into the flow path 101 flows into the detection flow path 107, and another part 191 B of the fluid 191 that has flowed into the flow path 101 flows into the bypass 102. Portions 191A and 191B of the fluid 191 that flow in the detection flow path 107 and the detour path 102 together flow into the flow path 103 and are discharged to the outside of the component sensor 110. A light emitting unit 104 and a light receiving unit 105 are provided outside the detection channel 107 so as to sandwich the detection channel 107 therebetween.
　Ｚ軸は検出用流路１０７の中心点１０７Ｃから発光部１０４に向かう方向に延びる。Ｘ軸は検出用流路１０７の中心点１０７ＣからＺ軸に直角に接続口１１６に向かう方向に延びる。Ｙ軸は検出用流路１０７の中心点１０７ＣにおいてＸ軸とＺ軸とに直交する。 The Z axis extends in a direction from the center point 107C of the detection flow path 107 toward the light emitting unit 104. The X axis extends from the center point 107C of the detection flow path 107 in a direction toward the connection port 116 at a right angle to the Z axis. The Y axis is orthogonal to the X axis and the Z axis at the center point 107C of the detection flow path 107.
　検出用流路１０７は流路１０１から流路１０１の延在方向に位置する。すなわち、流路１０１の流体１９１が流れる内部空間と、検出用流路１０７の流体１９１の一部１９１Ａが流れる内部空間とには、Ｘ軸に平行な直線１０１Ｓが通過する。 The detection flow path 107 is located in the extending direction of the flow path 101 from the flow path 101. That is, a straight line 101S parallel to the X axis passes through an internal space in which the fluid 191 in the flow channel 101 flows and an internal space in which a part 191A of the fluid 191 in the detection flow channel 107 flows.
　迂路１０２は、検出用流路１０７を迂回するためにコの字形状を有する。迂路１０２は流路１０１に接続口１１９で接続されており、流路１０３に接続口２１９で接続されている。検出用流路１０７は、流路１０１と接続口１１６で接続されており、流路１０３と接続口１２１で接続されている。接続口１１９は接続口１１６に直角である。 The detour 102 has a U-shape to bypass the detection flow path 107. The detour 102 is connected to the flow path 101 through the connection port 119 and is connected to the flow path 103 through the connection port 219. The detection flow path 107 is connected to the flow path 101 through the connection port 116, and is connected to the flow path 103 through the connection port 121. The connection port 119 is perpendicular to the connection port 116.
　図１１は、破線によって記された枠で流路１０１と迂路１０２と流路１０３と検出用流路１０７と接続口１１６と接続口１１９の範囲を具体的に示している。 FIG. 11 specifically shows the ranges of the flow path 101, the bypass 102, the flow path 103, the detection flow path 107, the connection port 116, and the connection port 119 with a frame indicated by a broken line.
　実施の形態５における成分センサ１１０では、Ｙ軸の方向において、流路１０１の内部空間と迂路１０２の内部空間との最も離れた部分の距離Ｌ１０１は、検出用流路１０７の内部空間と迂路１０２の内部空間との最も離れた部分の距離Ｌ１０２と等しい。 In the component sensor 110 according to the fifth embodiment, the distance L101 of the farthest part between the internal space of the flow path 101 and the internal space of the detour 102 in the Y-axis direction is equal to the internal space of the detection flow path 107 and the detour 102. Is equal to the distance L102 of the furthest part from the internal space.
　図１３に示すように、接続口１１６はＹ軸の方向に、すなわち接続口１１９に向かって細長く延びる形状を有する。すなわち、接続口１１６のＹ軸の方向の幅はその方向に直角のＺ軸の方向の幅より大きい、実施の形態５において接続口１１６はＹ軸の方向に細長く延びる矩形状を有するが、多角形状、涙滴形状、楕円形状、長円形状など、本実施の形態の目的を満足させられる限りにおいてＹ軸の方向に細長く延びる任意の形状であってよい。 As shown in FIG. 13, the connection port 116 has a shape extending in the Y-axis direction, that is, toward the connection port 119. That is, the width of the connection port 116 in the Y-axis direction is larger than the width of the Z-axis direction perpendicular to that direction. In the fifth embodiment, the connection port 116 has a rectangular shape extending in the Y-axis direction. As long as the object of the present embodiment is satisfied, such as a shape, a teardrop shape, an elliptical shape, and an oval shape, the shape may be an arbitrary shape that is elongated in the Y-axis direction.
　流路１０１、１０３と迂路１０２の材料は流体１９１に応じて適宜選択される。実施の形態５においては、流体１９１は燃料であり、流路１０１、１０３と迂路１０２の材料として単体金属または合金を用いることが好ましい。流体１９１が水や清涼飲料水であり、果汁の成分を検出する場合には、流路１０１、１０３と迂路１０２の材料として樹脂を用いても良いし、ガラス、木材、竹など、本実施の形態の目的を満足させられる限りにおいて、適宜選択する。検出用流路１０７の材料は、発光部１０４より放射される光１０８を透過する材料よりなり、実施の形態５ではシリコン、ゲルマニウム、ガラスなどであるが、特にこれらに限定されない。 The materials of the flow paths 101 and 103 and the detour 102 are appropriately selected according to the fluid 191. In the fifth embodiment, the fluid 191 is fuel, and it is preferable to use a single metal or an alloy as the material of the flow paths 101 and 103 and the bypass 102. In the case where the fluid 191 is water or soft drink and a fruit juice component is detected, a resin may be used as the material of the flow paths 101 and 103 and the bypass 102, or glass, wood, bamboo, etc. As long as the purpose of the form can be satisfied, it is appropriately selected. The material of the detection channel 107 is made of a material that transmits the light 108 emitted from the light emitting unit 104. In the fifth embodiment, silicon, germanium, glass, or the like is used, but the material is not particularly limited thereto.
　流路１０１、１０３と迂路１０２と検出用流路１０７は、使用目的や、製造コストなどに鑑みて適宜選択された、例えば、ねじ込み接続、ハンダ付け、溶接、凹凸による接合、ビス止め、接着などの方法で接続されている。また、実施の形態５の効果を障り無く実現できるのであれば、流路１０１、１０３と迂路１０２と検出用流路１０７は同一の材料から成り、金型等を用いて継目無く製造してもよく、２つ以上の部品で構成してもよい。 The flow paths 101 and 103, the detour path 102, and the detection flow path 107 are appropriately selected in consideration of the purpose of use, manufacturing cost, and the like. For example, screw connection, soldering, welding, joining by unevenness, screwing, adhesion, etc. Connected in the way. If the effects of the fifth embodiment can be realized without hindrance, the flow paths 101 and 103, the bypass path 102, and the detection flow path 107 are made of the same material and can be manufactured seamlessly using a mold or the like. Alternatively, it may be composed of two or more parts.
　流路１０１を流体１９１が流れる方向に直角の方向での流路１０１の断面積Ｓ１と、流路１０３を流体１９１が流れる方向に直角の方向での流路１０３の断面積Ｓ２と、検出用流路１０７を流体１９１（１９１Ａ）が流れる方向に直角の方向での検出用流路１０７の断面積Ｓ３と、迂路１０２を流体１９１（１９１Ｂ）が流れる方向に直角の方向での迂路１０２の断面積Ｓ４はＳ１＝Ｓ２＞Ｓ４＞Ｓ３の関係を満たす。検出用流路１０７のＺ軸の方向の幅１０μｍ以上１００μｍ以下であることが好ましいが、本実施の形態の目的を満足させられる限りにおいて、これに限定されない。例えば、検出の対象となる流体１９１が水、清涼飲料水、果汁のような、光１０８を吸収しやすい液体である場合には、受光部１０５へ光１０８が到達しにくい。このため、実施可能な範囲において、燃料の成分を検出する場合に比べて検出用流路１０７の製造は容易ではなくなるが、検出用流路１０７の幅を１０μｍ以下とする場合もある。 The cross-sectional area S1 of the flow path 101 in the direction perpendicular to the direction in which the fluid 191 flows through the flow path 101, the cross-sectional area S2 of the flow path 103 in the direction perpendicular to the direction in which the fluid 191 flows in the flow path 103, and for detection The cross-sectional area S3 of the detection flow path 107 in a direction perpendicular to the direction in which the fluid 191 (191A) flows through the flow path 107, and the bypass 102 in the direction perpendicular to the direction in which the fluid 191 (191B) flows. The area S4 satisfies the relationship S1 = S2> S4> S3. The width of the detection channel 107 in the Z-axis direction is preferably 10 μm or more and 100 μm or less, but is not limited to this as long as the object of the present embodiment can be satisfied. For example, when the fluid 191 to be detected is a liquid that easily absorbs the light 108 such as water, soft drinks, and fruit juice, the light 108 does not easily reach the light receiving unit 105. For this reason, in the feasible range, the detection flow path 107 is not easily manufactured as compared with the case where the fuel component is detected, but the width of the detection flow path 107 may be 10 μm or less.
　成分センサ１１０は、上記の各構成要素を収容する筐体１０６と、受光部１０５から得られる情報に基づき演算を行い、成分を検出したり濃度を分析したりする筐体１０６に設けられた処理部１０９とをさらに備えている。 The component sensor 110 performs processing based on information obtained from the light receiving unit 105 and the housing 106 that accommodates each of the above-described components, and the processing provided in the housing 106 that detects components and analyzes the concentration. And a portion 109.
　実施の形態５では、発光部１０４から発する光１０８は波長が２．５μｍ以上１５μｍ以下の範囲にある赤外線である。波長が該範囲内に留まる赤外線光は流体１９１に吸収されやすく、高感度で、流体１９１の様々な成分を検出できる。発光部１０４より放射された光１０８は検出用流路１０７内を通過し、検出用流路１０７を流れる流体１９１を通過して受光部１０５に受光される。光１０８が検出用流路１０７内を通過するとき、検出用流路１０７内を流れる液体に光１０８が吸収され、受光部１０５が受光できる光１０８の量は、検出用流路１０７内に何もない場合と比較し減少する。受光部１０５が受けた光の量に対応する出力情報を処理部１０９は処理し、流体１９１の成分を検出し、もしくは流体１９１の濃度を測定することができる。 In the fifth embodiment, the light 108 emitted from the light emitting unit 104 is an infrared ray having a wavelength in the range of 2.5 μm to 15 μm. Infrared light whose wavelength stays within this range is easily absorbed by the fluid 191 and can detect various components of the fluid 191 with high sensitivity. The light 108 emitted from the light emitting unit 104 passes through the detection channel 107, passes through the fluid 191 flowing through the detection channel 107, and is received by the light receiving unit 105. When the light 108 passes through the detection flow path 107, the amount of the light 108 that can be received by the liquid flowing through the detection flow path 107 and received by the light receiving unit 105 is determined in the detection flow path 107. It decreases compared to the case where there is no. The processing unit 109 can process output information corresponding to the amount of light received by the light receiving unit 105 to detect a component of the fluid 191 or measure the concentration of the fluid 191.
　実施の形態５では、流路１０１の延在方向Ｄ１０１に検出用流路１０７が流路１０１に接続される。この位置関係により、外部より流入される流体１９１が検出用流路１０７に向かって直進する。この構成によって、光１０８を用いて流体１９１の成分を検出する場合に生ずる下記の問題を解決することができる。 In the fifth embodiment, the detection flow path 107 is connected to the flow path 101 in the extending direction D101 of the flow path 101. Due to this positional relationship, the fluid 191 that flows in from the outside travels straight toward the detection flow path 107. With this configuration, it is possible to solve the following problems that occur when the components of the fluid 191 are detected using the light 108.
　光１０８を用いて特に液体である流体１９１の成分を検出する場合、発光部１０４より放射された光１０８の受光部１０５での受光量に基づき、流体１９１が光１０８を吸収する吸収量を計算し、流体１９１の成分を検出したり濃度を測定する。このような方法で、光１０８を用いた流体１９１の成分を検出する場合に、発光部１０４から放射された光１０８が受光部１０５まで到達する必要がなる。放射された光１０８を受光部１０５に確実に到達させるためには、光１０８を強くするか、発光部１０４と受光部１０５との間の距離を短くする。 When detecting the component of the fluid 191 that is a liquid in particular using the light 108, the amount of absorption by which the fluid 191 absorbs the light 108 is calculated based on the amount of light 108 emitted from the light emitting unit 104 at the light receiving unit 105. Then, the component of the fluid 191 is detected and the concentration is measured. When the component of the fluid 191 using the light 108 is detected by such a method, the light 108 emitted from the light emitting unit 104 needs to reach the light receiving unit 105. In order to ensure that the emitted light 108 reaches the light receiving unit 105, the light 108 is increased or the distance between the light emitting unit 104 and the light receiving unit 105 is shortened.
　光１０８を強くすれば、発光部１０４と受光部１０５との間の距離を長くすることができ、これにより検出用流路１０７に流体１９１を容易に流入させることができる。しかし、発光部１０４の消費する電力が増大するという問題や、成分センサ１１０が大型化する問題が発生する。 If the light 108 is strengthened, the distance between the light emitting unit 104 and the light receiving unit 105 can be increased, whereby the fluid 191 can easily flow into the detection channel 107. However, there arises a problem that the power consumed by the light emitting unit 104 is increased and the component sensor 110 is enlarged.
　一方で、発光部１０４と受光部１０５との間の距離を短くすれば、消費電力を抑えられ、成分センサ１１０の小型化も可能となる。しかし、検出用流路１０７が狭くなるため流体１９１を流入させることが困難となるという問題が生ずる。特に、高精度に成分を検出するために用いられる赤外線は、流体１９１に吸収されやすいので、受光部１０５に到達するまでに流体１９１に過度に吸収され、受光部１０５により検出されなくなる場合がある。これを防止するために検出用流路１０７の幅を狭小とする要望が高まるが、これはますます検出用流路１０７への流体１９１の流入を困難にさせる。 On the other hand, if the distance between the light emitting unit 104 and the light receiving unit 105 is shortened, power consumption can be suppressed and the component sensor 110 can be downsized. However, since the detection channel 107 becomes narrow, there arises a problem that it is difficult to allow the fluid 191 to flow in. In particular, since infrared rays used to detect components with high accuracy are easily absorbed by the fluid 191, they may be excessively absorbed by the fluid 191 before reaching the light receiving unit 105 and may not be detected by the light receiving unit 105. . In order to prevent this, there is an increasing demand for narrowing the width of the detection flow path 107, but this makes it more difficult for the fluid 191 to flow into the detection flow path 107.
　実施の形態５における成分センサ１１０では、流路１０１の延在方向Ｄ１０１に検出用流路１０７が位置して流路１０１に接続されているので、流路１０１より流入してきた液体である流体１９１は検出用流路１０７との接続口１１６に向かって直進する。これにより、検出用流路１０７に向かって圧力が生じ、この圧力によって検出用流路１０７へ流体１９１（１９１Ａ）を流入しやくなる。検出用流路１０７に流入しきらなかった流体１９１（１９１Ｂ）は迂路１０２へと流れ、検出用流路１０７を迂回し、流路１０３へと到達し外部へと排出される。流路１０１と検出用流路１０７と流路１０３とが、中間部分が急激に狭小化している直線状の配管構造体を構成する。迂路１０２が、流体１９１の一部１９１Ｂにこの配管構造体を迂回させることで、流体１９１全体の流れを阻害することを防止する。実施の形態５における成分センサ１１０は、検出用流路１０７の中心点１０７Ｃを通りＹ軸の方向の延びる直線１０７Ｌ（図１４参照）について対称な形状を有する。この場合には、流路１０１から流体１９１が流入しても、流路１０３から流体１９１が流入しても機能上なんら問題は生じないため、いずれの方向に流体１９１を流してもよい。 In the component sensor 110 according to the fifth embodiment, the detection flow path 107 is located in the extending direction D101 of the flow path 101 and is connected to the flow path 101. Therefore, the fluid 191 that is the liquid flowing in from the flow path 101 is used. Goes straight toward the connection port 116 with the detection channel 107. As a result, pressure is generated toward the detection flow path 107, and the fluid 191 (191A) easily flows into the detection flow path 107 due to this pressure. The fluid 191 (191B) that has not flowed into the detection flow path 107 flows to the detour path 102, bypasses the detection flow path 107, reaches the flow path 103, and is discharged to the outside. The flow path 101, the detection flow path 107, and the flow path 103 constitute a linear piping structure whose intermediate portion is narrowed rapidly. The detour 102 prevents the flow of the entire fluid 191 from being obstructed by causing the part 191B of the fluid 191 to bypass the piping structure. The component sensor 110 in the fifth embodiment has a symmetrical shape with respect to a straight line 107L (see FIG. 14) that passes through the center point 107C of the detection flow path 107 and extends in the Y-axis direction. In this case, even if the fluid 191 flows in from the flow path 101 or the fluid 191 flows in from the flow path 103, there is no functional problem, so the fluid 191 may flow in any direction.
　以上のように、実施の形態５における成分センサ１１０は、発光部１０４の消費電力を抑え、小型化しながら、狭小な検出用流路１０７にも流体１９１（１９１Ａ）を安定的に流入させることを可能とする。 As described above, the component sensor 110 according to the fifth embodiment suppresses the power consumption of the light-emitting unit 104 and allows the fluid 191 (191A) to stably flow into the narrow detection channel 107 while reducing the size. Make it possible.
　図１５は実施の形態５における他の成分センサ１１０Ａの模式図である。図１５において図１０から図１４に示す成分センサ１１０と同じ部分には同じ参照番号を付す。図１０から図１４に示す成分センサ１１０では、流路１０１、１０３のそれぞれと迂路１０２は接続口１１９、２１９において９０度の鋭い稜を成す。また、迂路１０２のコの字形状の角は９０度の鋭い稜をなす。図１５に示す成分センサ１１０Ａでは、接続口１１９、２１９の角１１０２、２１０２は滑らかに丸められており、迂路１０２の角３１０２～６１０２も滑らかに丸められている。この構成により、流路１０１、１０３と迂路１０２内で流体１９１の流れが阻害されず好ましい。 FIG. 15 is a schematic diagram of another component sensor 110A according to the fifth embodiment. In FIG. 15, the same reference numerals are given to the same portions as those of the component sensor 110 shown in FIGS. 10 to 14. In the component sensor 110 shown in FIGS. 10 to 14, each of the flow paths 101 and 103 and the detour 102 form a sharp ridge of 90 degrees at the connection ports 119 and 219. Further, the U-shaped corner of the detour 102 forms a sharp ridge of 90 degrees. In the component sensor 110A shown in FIG. 15, the corners 1102 and 2102 of the connection ports 119 and 219 are smoothly rounded, and the corners 3102 to 6102 of the detour 102 are also smoothly rounded. This configuration is preferable because the flow of the fluid 191 is not hindered in the flow paths 101 and 103 and the bypass 102.
　図１６は実施の形態５におけるさらに他の成分センサ１１０Ｂの模式図である。図１６において図１０から図１４に示す成分センサ１１０と同じ部分には同じ参照番号を付す。成分センサ１１０Ｂは図１０から図１４に示す成分センサ１１０の迂路１０２の代わりに、迂路１０２と同様に検出用流路１０７を迂回して流路１０１、１０３に接続された複数の迂路１０２Ａ、１０２Ｂを備える。迂路１０２Ａ、１０２Ｂは迂路１０２と同様の効果を有する。迂路１０２Ａには流体１９１の一部１９１Ｂのうちの部分１９１Ｂ１が流れ、迂路１２０Ｂには流体１９１の一部１９１Ｂの残りの部分１９１Ｂ２が流れる。迂路１０２Ａ、１０２Ｂの流体１９１の一部１９１Ｂの部分１９１Ｂ１、１９１Ｂ２が流れる方向に直角の断面の断面積の合計は、図１０から図１４に示す成分センサ１１０の迂路１０２の断面積Ｓ４に等しく、流路１０１の断面積Ｓ１と流路１０３の断面積Ｓ２と検出用流路１０７の断面積Ｓ３と上述の関係を満たす。複数の迂路１０２Ａ、１０２Ｂにより、部材の大きさや、設計上の問題、成分センサ１１０が取り付けられる対象の形状に応じて設計上の多様性が得られる。 FIG. 16 is a schematic diagram of still another component sensor 110B in the fifth embodiment. In FIG. 16, the same reference numerals are assigned to the same parts as those of the component sensor 110 shown in FIGS. Instead of the bypass 102 of the component sensor 110 shown in FIGS. 10 to 14, the component sensor 110 </ b> B bypasses the detection flow path 107 in the same manner as the bypass 102 and is connected to the flow paths 101 and 103. Is provided. The detours 102A and 102B have the same effect as the detour 102. A portion 191B1 of the portion 191B of the fluid 191 flows through the detour 102A, and the remaining portion 191B2 of the portion 191B of the fluid 191 flows through the detour 120B. The sum of the cross-sectional areas of the cross sections perpendicular to the flow direction of the portions 191B1 and 191B2 of the part 191B of the fluid 191 of the detours 102A and 102B is equal to the cross-sectional area S4 of the detour 102 of the component sensor 110 shown in FIGS. The cross-sectional area S1 of the flow channel 101, the cross-sectional area S2 of the flow channel 103, and the cross-sectional area S3 of the detection flow channel 107 satisfy the above relationship. The plurality of detours 102A and 102B provide design diversity according to the size of the member, design problems, and the shape of the target to which the component sensor 110 is attached.
　図１７は実施の形態５におけるさらに他の成分センサ１１０Ｃの模式図である。図１７において図１０から図１４に示す成分センサ１１０と同じ部分には同じ参照番号を付す。成分センサ１１０Ｃでは、流路１０１、１０３が途中で曲がっている。ただし、成分センサ１１０Ｃでは、流路１０１の接続口１１６に繋がる部分は延在方向Ｄ１０１に延び、流路１０３の接続口１２１に繋がる部分は延在方向Ｄ１０１に延びている。 FIG. 17 is a schematic diagram of still another component sensor 110C according to the fifth embodiment. In FIG. 17, the same reference numerals are given to the same portions as those of the component sensor 110 shown in FIGS. 10 to 14. In the component sensor 110C, the flow paths 101 and 103 are bent halfway. However, in the component sensor 110C, the portion connected to the connection port 116 of the flow channel 101 extends in the extending direction D101, and the portion connected to the connection port 121 of the flow channel 103 extends in the extending direction D101.
　図１８は実施の形態５におけるさらに他の成分センサ１１０Ｄの模式図である。図１８において図１５に示す成分センサ１１０Ａと同じ部分には同じ参照番号を付す。図１８に示す成分センサ１１０Ｄでは、迂路１０２は図１５に示す成分センサ１１０Ａの角３１０２～６１０２を有しておらず、Ｃ字形状を有する。この構成により、流体１９１はスムースに迂路１０２を流れる。 FIG. 18 is a schematic diagram of still another component sensor 110D according to the fifth embodiment. In FIG. 18, the same reference numerals are assigned to the same portions as those of the component sensor 110A shown in FIG. In the component sensor 110D shown in FIG. 18, the detour 102 does not have the corners 3102 to 6102 of the component sensor 110A shown in FIG. 15, but has a C shape. With this configuration, the fluid 191 flows through the detour 102 smoothly.
　（実施の形態６）
　図１９は実施の形態６における成分センサ１１０Ｅの模式図である。図１９において図１０から図１４に示す実施の形態５における成分センサ１１０と同じ部分には同じ参照番号を付す。図１９に示す成分センサ１１０Ｅでは、検出用流路１０７がＹ軸の正の方向に平行にずれており、Ｙ軸の方向において、流路１０１の内部空間と迂路１０２の内部空間との最も離れた部分の距離Ｌ１０１は、検出用流路１０７の内部空間と迂路１０２の内部空間との最もは離れた部分の距離Ｌ１０２より大きい。すなわち、Ｙ軸の方向で検出用流路１０７が流路１０１、１０３から迂路１０２に向って平行にずれている。接続口１１６に繋がりかつ流路１０１の流体１９１が流れる内部空間に面する内壁面にはテーパ１２０が設けられている。テーパ１２０は、検出用流路１０７と迂路１０２とに向かってＸ軸と平行な延在方向Ｄ１０１に対して傾斜している。テーパ１２０により、流体１９１が流路１０１から検出用流路１０７と迂路１０２へ直接移動するので、検出用流路１０７への流体１９１（１９１Ａ）の流入が促進される。 (Embodiment 6)
FIG. 19 is a schematic diagram of a component sensor 110E according to the sixth embodiment. In FIG. 19, the same reference numerals are assigned to the same portions as those of the component sensor 110 in the fifth embodiment shown in FIGS. In the component sensor 110E shown in FIG. 19, the detection flow path 107 is displaced in parallel to the positive direction of the Y axis, and the inner space of the flow path 101 and the internal space of the detour 102 are farthest apart in the Y axis direction. The distance L101 of the left portion is larger than the distance L102 of the farthest portion between the internal space of the detection flow path 107 and the internal space of the detour 102. That is, the detection flow path 107 is displaced in parallel from the flow paths 101 and 103 toward the detour 102 in the Y-axis direction. A taper 120 is provided on the inner wall surface that is connected to the connection port 116 and faces the internal space through which the fluid 191 of the flow path 101 flows. The taper 120 is inclined with respect to the extending direction D101 parallel to the X axis toward the detection flow path 107 and the bypass path 102. The taper 120 moves the fluid 191 directly from the flow channel 101 to the detection flow channel 107 and the detour 102, thereby facilitating the inflow of the fluid 191 (191 </ b> A) into the detection flow channel 107.
　図２０は比較例の成分センサ１１０Ｐの模式図である。図２０において図１９に示す成分センサ１１０Ｅと同じ部分には同じ参照番号を付す。図２０に示す成分センサ１１０Ｐでは、流路１０１の内壁面にテーパが設けられていない。成分センサ１１０Ｐでは、接続口１１６の周囲で流体１９１の流れが妨げられ、流体１９１が検出用流路１０７と迂路１０２にスムースには流入しない。 FIG. 20 is a schematic diagram of a component sensor 110P of a comparative example. 20, the same reference numerals are assigned to the same portions as those of the component sensor 110E shown in FIG. In the component sensor 110P shown in FIG. 20, the inner wall surface of the flow path 101 is not provided with a taper. In the component sensor 110 </ b> P, the flow of the fluid 191 is hindered around the connection port 116, and the fluid 191 does not smoothly flow into the detection flow path 107 and the bypass 102.
　図２１Ａと図２１Ｂは、それぞれ成分センサ１１０Ｅと成分センサ１１０の流体１９１の流れを示す模式図である。図２１Ａに示す検出用流路１０７が迂路１０２に向って平行にずれている成分センサ１１０Ｅでは、流路１０１の端部から流入してきた流体１９１は、検出用流路１０７に向かって流れ１１１として直進した後、検出用流路１０７へと続くテーパ１２０に従い流れ１１２として接続口１１６へと至る。検出用流路１０７は流路１０１に比して容積が遥かに小さいため、検出用流路１０７に流入しきらない流体１９１の一部１９１Ｂは流れ１１３として迂路１０２に流入する。 21A and 21B are schematic diagrams showing the flow of the fluid 191 of the component sensor 110E and the component sensor 110, respectively. In the component sensor 110E in which the detection flow path 107 shown in FIG. 21A is shifted in parallel toward the detour 102, the fluid 191 flowing in from the end of the flow path 101 flows as a flow 111 toward the detection flow path 107. After going straight, the flow 112 reaches the connection port 116 as a flow 112 following the taper 120 leading to the detection flow path 107. Since the detection flow path 107 has a much smaller volume than the flow path 101, a part 191 </ b> B of the fluid 191 that does not flow into the detection flow path 107 flows into the detour 102 as the flow 113.
　これに対して、図２１Ｂに示す成分センサ１１０では、流体１９１が流れ１１１として検出用流路１０７へと直進し、流体１９１の一部１９１Ｂが流れ１１２として検出用流路１０７に流入する。検出用流路１０７に流入しきらない流体１９１の一部１９１Ｂが流れ１１５として迂路１０２へと流入する。ただし、成分センサ１１０においては図２１Ｂに示すように、流路１０１と検出用流路１０７との間で滞留１１４が発生する場合がある。 21B, in the component sensor 110 shown in FIG. 21B, the fluid 191 goes straight to the detection flow path 107 as the flow 111, and a part 191B of the fluid 191 flows into the detection flow path 107 as the flow 112. A part 191B of the fluid 191 that does not flow into the detection flow path 107 flows into the detour 102 as a flow 115. However, in the component sensor 110, as shown in FIG. 21B, a stagnation 114 may occur between the flow channel 101 and the detection flow channel 107.
　このように、実施の形態６における成分センサ１１０Ｅでは、検出用流路１０７が迂路１０２に向って平行にずれていることで、流体１９１の滞留１１４を減少させ、流体１９１の移動効率を向上させることで、検出用流路１０７へ流体１９１の一部１９１Ａが流入する流入効率を良くしている。 As described above, in the component sensor 110E according to the sixth embodiment, the detection flow path 107 is shifted in parallel toward the bypass path 102, thereby reducing the retention 114 of the fluid 191 and improving the movement efficiency of the fluid 191. As a result, the inflow efficiency in which a part 191A of the fluid 191 flows into the detection channel 107 is improved.
　（実施の形態７）
　図２２は実施の形態７における成分センサ１１０Ｆの模式図である。図２２において図１０から図１４に示す実施の形態５における成分センサ１１０と同じ部分には同じ参照番号を付す。図２２に示す成分センサ１１０Ｆでは、実施の形態５における成分センサ１１０の検出用流路１０７の流体１９１の一部１９１Ａが流れる内部空間に面する内壁面の迂路１０２に最も近い部分が迂路１０２に向ってずれている。流路１０１との接続口１１６が迂路１０２の内部まで延びている。これによって検出用流路１０７の容積が大きくなるとともに、接続口１１６の面積が広がり、流体１９１の一部１９１Ａの検出用流路１０７への流入効率が上昇する。 (Embodiment 7)
FIG. 22 is a schematic diagram of a component sensor 110F according to the seventh embodiment. In FIG. 22, the same reference numerals are assigned to the same portions as those of the component sensor 110 in the fifth embodiment shown in FIGS. In the component sensor 110F shown in FIG. 22, the portion closest to the detour 102 on the inner wall surface facing the internal space through which a part 191A of the fluid 191 of the detection flow path 107 of the component sensor 110 in the fifth embodiment flows is the detour 102. It's shifted away. A connection port 116 with the channel 101 extends to the inside of the detour 102. As a result, the volume of the detection channel 107 increases, the area of the connection port 116 increases, and the inflow efficiency of the part 191A of the fluid 191 into the detection channel 107 increases.
　図２３は実施の形態７における他の成分センサ１１０Ｇの模式図である。図２３において、図２２に示す成分センサ１１０Ｆと同じ部分には同じ参照番号を付す。図２３に示す成分センサ１１０Ｇでは、図２２に示す成分センサ１１０Ｆの検出用流路１０７が迂路１０２に向かって平行に流路１０１からずれている。部材同士の大きさや、設計上の必要に応じ検出用流路１０７の形状を変えてもよい。 FIG. 23 is a schematic diagram of another component sensor 110G according to the seventh embodiment. In FIG. 23, the same parts as those of the component sensor 110F shown in FIG. In the component sensor 110 </ b> G shown in FIG. 23, the detection flow path 107 of the component sensor 110 </ b> F shown in FIG. 22 is shifted from the flow path 101 in parallel toward the detour 102. The size of the members and the shape of the detection flow path 107 may be changed according to design requirements.
　図２４と図２５はそれぞれ実施の形態７におけるさらに他の成分センサ１１０Ｈ、１１０Ｉの模式図である。図２４と図２５において、図２２と図２３に示す成分センサ１１０Ｆ、１１０Ｇと同じ部分には同じ参照番号を付す。図２４と図２５に示す成分センサ１１０Ｈ、１１０Ｉでは、検出用流路１０７は接続口１１６から接続口１２１に向かって窄まっている。 FIGS. 24 and 25 are schematic diagrams of still other component sensors 110H and 110I in the seventh embodiment, respectively. 24 and 25, the same reference numerals are assigned to the same parts as those of the component sensors 110F and 110G shown in FIGS. In the component sensors 110H and 110I shown in FIGS. 24 and 25, the detection flow path 107 is narrowed from the connection port 116 toward the connection port 121.
　（実施の形態８）
　図２６は実施の形態８における成分センサ１１０Ｊの模式図である。図２６において、図１０から図１４に示す成分センサ１１０と同じ部分には同じ参照番号を付す。成分センサ１１０Ｊでは、迂路１０２が流路１０３に接続される接続口１２２が存在する平面と直交する方向に、すなわちＹ軸の方向に流路１０３が延びており、流体１９１は流路１０３にＹ軸の方向に流れる。これによって、流量の多い主に迂路１０２からの排出流れ１１７が流路１０３の端部に向かって直進するので、流路１０３内を通過する流体１９１の通過速度が上昇する。流路１０３内の流体１９１の通過速度が上昇すれば、検出用流路１０７より排出される排出流れ１１８も、流体１９１体の表面張力の作用から排出流れ１１７に引き込まれ、流れの速度が上昇する。排出水流１１８の速度が上昇すれば、流体１９１の表面張力の作用から検出用流路１０７へと流入する流体１９１の一部１９１Ａの流入速度も上昇する。このように、流路１０３がＹ軸の方向に延びていることで、流体１９１全体の排出効率が上昇し、結果として検出用流路１０７に流体１９１の一部１９１Ａが流入する流入速度が上昇するため、検出用流路１０７への流体１９１の一部１９１Ａの流入を促進させることができる。 (Embodiment 8)
FIG. 26 is a schematic diagram of a component sensor 110J according to the eighth embodiment. In FIG. 26, the same reference numerals are given to the same portions as those of the component sensor 110 shown in FIGS. In the component sensor 110 </ b> J, the flow path 103 extends in a direction orthogonal to the plane where the bypass 102 is connected to the flow path 103, that is, in the Y-axis direction. It flows in the direction of the axis. As a result, the discharge flow 117 mainly from the detour 102 having a large flow rate goes straight toward the end of the flow path 103, so that the passage speed of the fluid 191 passing through the flow path 103 increases. If the passage speed of the fluid 191 in the flow path 103 increases, the discharge flow 118 discharged from the detection flow path 107 is also drawn into the discharge flow 117 due to the surface tension of the fluid 191 body, and the flow speed increases. To do. If the speed of the discharged water stream 118 increases, the inflow speed of the part 191A of the fluid 191 that flows into the detection channel 107 from the action of the surface tension of the fluid 191 also increases. As described above, the flow path 103 extends in the Y-axis direction, so that the discharge efficiency of the entire fluid 191 increases, and as a result, the inflow speed at which a part 191A of the fluid 191 flows into the detection flow path 107 increases. Therefore, the inflow of a part 191A of the fluid 191 into the detection channel 107 can be promoted.
　実施の形態５～８における成分センサ１１０．１１０Ａ～１１０Ｊは、安価で、省スペースかつ、高感度であり検出精度が安定する。流体１９１が液体で自動車の燃料である場合には、燃料の成分の濃度を検出することができ、例えば、内燃機関の燃費向上、排気エミッション低減などが可能となる。流体１９１が水や清涼飲料水であれば、他の成分の混入の検知などに用いて、品質保持に役立てることができる。 The component sensors 110.110A to 110J in Embodiments 5 to 8 are inexpensive, space-saving and highly sensitive, and the detection accuracy is stable. When the fluid 191 is liquid and is a fuel for an automobile, the concentration of the fuel component can be detected. For example, the fuel consumption of the internal combustion engine can be improved and the exhaust emission can be reduced. If the fluid 191 is water or a soft drink, it can be used for detection of mixing of other components, etc., to help maintain quality.
１，３１，４１，５１　　成分センサ
２　　側面
３　　管部（流路）
４　　開口部
５　　基板
６　　凸部（第１の凸部）
７　　凸部（第２の凸部）
９　　発光部
１０，３２　　受光部
１１　　平坦部
１２　　主面（第１の主面）
１３　　主面（第２の主面）
１４　　傾斜面
１５　　傾斜面
１６　　受光素子（第１の受光素子）
１７　　受光素子（第２の受光素子）
１８　　受光素子（第３の受光素子）
１９　　光学フィルタ（第１の光学フィルタ）
２０　　光学フィルタ（第２の光学フィルタ）
２１　　光学フィルタ（第３の光学フィルタ）
２２　　筐体
２３　　支持基板
４３　　側端面
４４　　凸部
４５　　傾斜面
５３　　封止材
１０１　　流路（第１の流路）
１０２　　迂路
１０３　　流路（第２の流路）
１０４　　発光部
１０５　　受光部
１０６　　筐体
１０７　　検出用流路
１０９　　処理部
１１０，１１０Ａ～１１０Ｊ　　成分センサ
１１６　　接続口
１１９　　接続口
１２０　　テーパ
１２１　　接続口
１２２　　接続口 1, 31, 41, 51 Component sensor 2 Side surface 3 Tube (flow path)
4 Opening 5 Substrate 6 Convex (First Convex)
7 convex part (second convex part)
9 Light emitting part 10, 32 Light receiving part 11 Flat part 12 Main surface (first main surface)
13 Main surface (second main surface)
14 Inclined surface 15 Inclined surface 16 Light receiving element (first light receiving element)
17 Light receiving element (second light receiving element)
18 Light receiving element (third light receiving element)
19 Optical filter (first optical filter)
20 Optical filter (second optical filter)
21 Optical filter (third optical filter)
22 Housing 23 Support substrate 43 Side end surface 44 Protruding portion 45 Inclined surface 53 Sealing material 101 Channel (first channel)
102 detour 103 flow path (second flow path)
104 Light-Emitting Unit 105 Light-Receiving Unit 106 Housing 107 Detection Channel 109 Processing Units 110, 110A to 110J Component Sensor 116 Connection Port 119 Connection Port 120 Taper 121 Connection Port 122 Connection Port

Claims (20)

  1. 流体の成分を検出するように構成された成分センサであって、
    前記流体が流れるように構成された内部空間に面する側壁を有しており、前記側壁に開口部が設けられている流路と、
    前記流体に接するように構成されて前記内部空間に面する第１の主面と、前記第１の主面の反対側の第２の主面とを有し、前記開口部を覆う基板と、
    前記基板の前記第２の主面に設けられた第１の凸部と、
    前記第１の凸部と離間して前記基板の前記第２の主面に設けられた第２の凸部と、
    赤外線を前記第１の凸部に入射させ、前記入射した赤外線を前記基板内で全反射させて前記第２の凸部を出射させるように前記赤外線を発する発光部と、
    前記第２の凸部を出射した前記赤外線を検出する受光部と、
    を備えた成分センサ。     A component sensor configured to detect a component of a fluid comprising:
    A flow path having a side wall facing the internal space configured to allow the fluid to flow; and an opening provided in the side wall;
    A first main surface configured to contact the fluid and facing the internal space; and a second main surface opposite to the first main surface, the substrate covering the opening;
    A first protrusion provided on the second main surface of the substrate;
    A second protrusion provided on the second main surface of the substrate apart from the first protrusion;
    A light emitting unit that emits the infrared rays so that the infrared rays are incident on the first convex portion, the incident infrared rays are totally reflected in the substrate, and the second convex portion is emitted;
    A light receiving portion for detecting the infrared light emitted from the second convex portion;
    Component sensor equipped with.
  2. 前記基板はシリコンで形成され、
    前記第１の凸部と前記第２の凸部とは前記基板と一体に形成されている、請求項１に記載の成分センサ。     The substrate is formed of silicon;
    The component sensor according to claim 1, wherein the first convex portion and the second convex portion are formed integrally with the substrate.
  3. 前記第１の凸部は前記赤外線が入射する第１の傾斜面を有し、
    前記第１の傾斜面の面方位は（１１１）面である、請求項２に記載の成分センサ。     The first convex portion has a first inclined surface on which the infrared ray is incident,
    The component sensor according to claim 2, wherein a plane orientation of the first inclined surface is a (111) plane.
  4. 前記第２の凸部は前記赤外線が出射する第２の傾斜面を有し、
    前記第２の傾斜面の面方位は（１１１）面である、請求項２または３に記載の成分センサ。     The second convex portion has a second inclined surface from which the infrared rays are emitted,
    The component sensor according to claim 2 or 3, wherein a plane orientation of the second inclined surface is a (111) plane.
  5. 前記発光部は、前記第１の凸部に対して前記基板の前記第２の主面の法線方向の位置に配置されている、請求項１から４のいずれか一項に記載の成分センサ。 5. The component sensor according to claim 1, wherein the light emitting portion is disposed at a position in a normal direction of the second main surface of the substrate with respect to the first convex portion. .
  6. 前記受光部は、前記第２の凸部に対して前記基板の前記第２の主面の法線方向の位置に配置されている請求項１から５のいずれか一項に記載の成分センサ。 The component sensor according to claim 1, wherein the light receiving unit is disposed at a position in a normal direction of the second main surface of the substrate with respect to the second convex portion.
  7. 前記受光部は前記赤外線を検出する第１の受光素子と第２の受光素子を有する、請求項１から６のいずれか一項に記載の成分センサ。 The component sensor according to any one of claims 1 to 6, wherein the light receiving unit includes a first light receiving element and a second light receiving element that detect the infrared rays.
  8. 前記受光部は、
    　　　前記第１の受光素子に設けられた第１の光学フィルタと、
    　　　前記第２の受光素子に設けられた第２の光学フィルタと、
    をさらに有する、請求項７に記載の成分センサ。     The light receiving unit is
    A first optical filter provided in the first light receiving element;
    A second optical filter provided in the second light receiving element;
    The component sensor according to claim 7, further comprising:
  9. 前記第１の受光素子と前記第２の受光素子とは前記赤外線を受ける第１の受光面と第２の受光面とをそれぞれ有し、
    前記第１の受光面と前記第２の受光面とは一平面上配置されている、請求項７または８に記載の成分センサ。     The first light receiving element and the second light receiving element each have a first light receiving surface and a second light receiving surface that receive the infrared rays,
    The component sensor according to claim 7 or 8, wherein the first light receiving surface and the second light receiving surface are arranged on a single plane.
  10. 前記第１の受光素子と前記第２の受光素子は、前記第２の主面と平行でかつ前記流路が延びる方向と直角の方向に配列されている、請求項９に記載の成分センサ。 The component sensor according to claim 9, wherein the first light receiving element and the second light receiving element are arranged in a direction parallel to the second main surface and perpendicular to a direction in which the flow path extends.
  11. 前記受光部は前記赤外線を検出する第３の受光素子をさらに有する、請求項７から９のいずれか一項に記載の成分センサ。 The component sensor according to any one of claims 7 to 9, wherein the light receiving unit further includes a third light receiving element that detects the infrared light.
  12. 前記基板の屈折率は前記流体の屈折率よりも大きい、請求項１から１１のいずれか一項に記載の成分センサ。 The component sensor according to claim 1, wherein a refractive index of the substrate is larger than a refractive index of the fluid.
  13. 前記流路の前記側壁は平坦部を有する、請求項１から１２のいずれか一項に記載の成分センサ。 The component sensor according to claim 1, wherein the side wall of the flow path has a flat portion.
  14. 前記基板は、前記第１の主面と前記第２の主面との間を繋ぐ側端面をさらに有し、
    前記基板の前記側端面に設けられた反射膜をさらに備え、
    前記第１の凸部から入射した赤外線が前記側端面で反射した後に前記第２の凸部を出射する、請求項１から１３のいずれか一項に記載の成分センサ。     The substrate further includes a side end surface connecting the first main surface and the second main surface;
    A reflective film provided on the side end surface of the substrate;
    The component sensor according to any one of claims 1 to 13, wherein infrared light incident from the first convex portion is emitted from the second convex portion after being reflected by the side end face.
  15. 前記流路の前記開口部に前記基板を封止する封止材をさらに備え、
    前記基板の前記封止材が設けられている部分は前記基板の中央部分より厚い、請求項１から１４のいずれか一項に記載の成分センサ。     A sealant for sealing the substrate at the opening of the flow path;
    The component sensor according to any one of claims 1 to 14, wherein a portion of the substrate on which the sealing material is provided is thicker than a central portion of the substrate.
  16. 流体の成分を検出する成分センサであって、
    流体が流れるように構成されて前記延在方向に延びる第１の流路と、
    前記第１の流路から前記延在方向に位置して前記第１の流路に接続されて、前記流体が流れるように構成された検出用流路と、
    前記検出用流路に接続されて、前記流体が流れるように構成された第２の流路と、
    前記検出用流路を迂回するように前記第１の流路と前記第２の流路とに接続されて、前記流体が流れるように構成された迂路と、
    前記検出用流路を通過する光を放射するように構成された発光部と、
    前記検出用流路を通過した光を受光するように構成された受光部と、
    を備え、
    前記検出用流路を前記流体が流れる方向に直角の方向での前記検出用流路の断面積は、前記第１の流路を前記流体が流れる方向に直角の方向での前記第１の流路の断面積より小さく、
    前記迂路を前記流体が流れる方向に直角の方向での前記迂路の断面積は、前記検出用流路の前記断面積より大きく、
    前記第２の流路を前記流体が流れる方向に直角の方向での前記第２の流路の断面積は、前記検出用流路の前記断面積より大きい、成分センサ。     A component sensor for detecting a component of a fluid,
    A first flow path configured to flow fluid and extending in the extending direction;
    A flow path for detection that is connected to the first flow path and is located in the extending direction from the first flow path, and configured to flow the fluid;
    A second channel connected to the detection channel and configured to flow the fluid;
    A detour connected to the first flow path and the second flow path so as to bypass the detection flow path, and configured to allow the fluid to flow;
    A light emitting unit configured to emit light passing through the detection flow path;
    A light receiving portion configured to receive light that has passed through the detection flow path;
    With
    The cross-sectional area of the detection flow path in a direction perpendicular to the direction in which the fluid flows through the detection flow path is such that the first flow in the direction perpendicular to the direction in which the fluid flows in the first flow path. Smaller than the cross-sectional area of the road,
    The cross-sectional area of the detour in a direction perpendicular to the direction in which the fluid flows through the detour is larger than the cross-sectional area of the detection flow path,
    A component sensor in which a cross-sectional area of the second flow path in a direction perpendicular to a direction in which the fluid flows through the second flow path is larger than the cross-sectional area of the detection flow path.
  17. 前記検出用流路が前記第１の流路と接続されている接続口は、前記第１の流路に前記迂路が接続される方向に細長く延びる形状を有する、請求項１６に記載の成分センサ。 17. The component sensor according to claim 16, wherein a connection port where the detection flow path is connected to the first flow path has a shape extending elongated in a direction in which the detour is connected to the first flow path. .
  18. 前記検出用流路が前記第１の流路と接続されている前記接続口の面積は、前記検出用流路が前記第２の流路と接続されている接続口の面積と異なる、請求項１７に記載の成分センサ。 The area of the connection port where the detection channel is connected to the first channel is different from the area of the connection port where the detection channel is connected to the second channel. The component sensor according to 17.
  19. 前記迂路が前記第１の流路と接続されている接続口は、前記検出用流路が前記第１の流路と接続されている前記接続口に直角である、請求項１７または１８に記載の成分センサ。 The connection port where the detour is connected to the first flow channel is at right angles to the connection port where the detection flow channel is connected to the first flow channel. Component sensor.
  20. 前記検出用流路が前記第１の流路に接続されている前記接続口は前記迂路の内部まで延びている、請求項１９に記載の成分センサ。 The component sensor according to claim 19, wherein the connection port where the detection channel is connected to the first channel extends to the inside of the detour.
PCT/JP2017/042717 2016-12-07 2017-11-29 Component sensor WO2018105455A1 (en)

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