CN102735655B - Surface plasma resonance optical waveguide sensor based on dual reflectors - Google Patents
Surface plasma resonance optical waveguide sensor based on dual reflectors Download PDFInfo
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- CN102735655B CN102735655B CN201210242530.8A CN201210242530A CN102735655B CN 102735655 B CN102735655 B CN 102735655B CN 201210242530 A CN201210242530 A CN 201210242530A CN 102735655 B CN102735655 B CN 102735655B
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Abstract
The invention discloses a surface plasma resonance optical waveguide sensor based on dual reflectors, which comprises an input waveguide array, a free propagation area, two metal sensing layers, an output waveguide array and a detector array, wherein the two metal sensing layers are plated on a reflection end plane and a reflection end curve of the free propagation area; the two metal sensing layers are etched with deep etched grooves; incident light is guided from a waveguide in the input waveguide array, enters one end of the free propagation area, and reflected by the reflection end plane and the reflection end curve of the free propagation area, and finally arrives at the detector array through the output waveguide array. By virtue of two reflectors, the detecting precision of the sensor is greatly improved; the sensor can be used to detect two substances at the same time, so that much detecting time can be saved; the curve is taken as the reflector, so that the detecting range and the detecting precision are improved; the space distance required for propagation is reduced; and the size of the sensor is greatly reduced.
Description
Technical field
The present invention relates to Applications of surface plasmon resonance field, particularly relate to a kind of surface plasma body resonant vibration optical waveguide sensor based on double-reflecting face.
Background technology
In recent decades, Applications of surface plasmon resonance receives increasing concern, has apply widely in food, pharmacy, chemical industry, clinical examination.The Real-Time Monitoring of surface plasma body technique and the advantage without the need to demarcating make it in biological monitoring, have fairly obvious advantage.
As shown in Figure 1, its technical disadvantages is that device volume is huge to the surface plasma resonance sensor of traditional body lens type, and cost is high, and can only detect a kind of material simultaneously.
Summary of the invention
The object of the invention is to for the deficiencies in the prior art, a kind of surface plasma body resonant vibration optical waveguide sensor based on double-reflecting face is provided.
The technical scheme that the present invention solves the employing of its technical matters is: a kind of surface plasma body resonant vibration optical waveguide sensor based on double-reflecting face, and it comprises: input waveguide array, Free propagation district, the first metal sensing layer, the second metal sensing layer, output waveguide array and detector array etc.; Wherein, described Free propagation district have Free propagation district reflection end plane and Free propagation district reflection end curved surface; First metal sensing layer is plated in Free propagation district reflection end plane, and the second metal sensing layer is plated on Free propagation district reflection end curved surface, the first metal sensing layer etched the first deep etching groove, the second metal sensing layer etched the second deep etching groove; The two ends of output waveguide array are respectively Free propagation district and detector array; Input waveguide array, output waveguide array, detector array and Free propagation district are integrally formed; The material of described first metal sensing layer and the second metal sensing layer is silver.
The beneficial effect that the present invention has is: the present invention adopts double-reflecting face, adds a deep etching groove simultaneously, can improve the detection accuracy of sensor or detect two kinds of materials simultaneously; Second reflecting surface adopts curved surface as reflecting surface, increases the dispersion angle of reflection ray, thus improves the sensitivity of sensor; Use silicon oxy-nitride material, higher sensitivity and larger signal to noise ratio (S/N ratio) can be obtained; Adopt Planar integration optical waveguide manufacture craft and micro-fluidic technologies, for this optical sensor miniaturization, integratedly provide possibility.
Accompanying drawing explanation
Fig. 1 is the plasma resonance optical sensor structure schematic diagram based on plane reflection of body lens type;
Fig. 2 is by the divergence of beam angle schematic diagram of camber reflection;
Fig. 3 is embodiment of the present invention structural representation;
Fig. 4 is the partial cutaway schematic of the present invention first Free propagation district reflection end plane;
Fig. 5 is the partial cutaway schematic of the present invention second Free propagation district reflection end plane;
Fig. 6 is the present invention's incident waveguide end structure figure;
Fig. 7 is that reflectivity under the different measured matter refractive index of the present invention is with incident angle variation diagram;
Fig. 8 is that the reflectivity of the present invention's measured matter of the same race is with incident angle variation diagram;
Fig. 9 is that the present invention uses term definition lexical or textual analysis figure;
In figure: input waveguide array 1, Free propagation district 2, first metal sensing layer 3, Free propagation district reflection end plane 4, first deep etching groove 5, second metal sensing layer 6, Free propagation district reflection end curved surface 7, second deep etching groove 8, output waveguide array 9, detector array 10.
Embodiment
This optical sensor based on principle be Applications of surface plasmon resonance.When light incides dielectric-metal-measured matter interface, can evanescent wave be produced when incident angle meets total reflection condition, and under the condition of certain specific incident angle (if fixed wave length), evanescent wave meets resonant condition, thus excitating surface plasma ripple.The refractive index of measured matter is relevant with resonance angle, and when changing the refractive index of measured matter, the resonance angle of excitating surface plasma ripple has corresponding change, thus we can infer the change of the refractive index of measured matter by the skew of resonance angle.
Below in conjunction with drawings and Examples, the present invention is further illustrated.
As shown in Figure 2-5, the surface plasma body resonant vibration optical waveguide sensor that the present invention is based on double-reflecting face comprises: input waveguide array 1, Free propagation district 2, first metal sensing layer 3, second metal sensing layer 6, output waveguide array 9, detector array 10; Free propagation district 2 have Free propagation district reflection end plane 4 and Free propagation district reflection end curved surface 7; First metal sensing layer 3 is plated in Free propagation district reflection end plane 4, second metal sensing layer 6 is plated on Free propagation district reflection end curved surface 7, first metal sensing layer 3 etched on the first deep etching groove 5, second metal sensing layer 6 and etched the second deep etching groove 8.The two ends of output waveguide array 9 are respectively Free propagation district 2 and detector array 10; Input waveguide array 1, output waveguide array 9, detector array 10 and Free propagation district 2 are integrally formed.
First metal sensing layer 3 can be formed by the side splash-proofing sputtering metal in Free propagation district reflection end plane 4, and the second metal sensing layer 6 can be formed by the side splash-proofing sputtering metal at Free propagation district reflection end curved surface 7.
The course of work of the present invention is as follows: the every root input waveguide end in input waveguide array 1 is the trapezium structure of gradual change broadening, controls the angular range of incident light.Measured matter can load the first deep etching groove 5 and the second deep etching groove 8, and thus the surface plasma body resonant vibration optical waveguide sensor based on double-reflecting face of the present invention can detect two kinds of materials simultaneously.Incident light is introduced from the waveguide of input waveguide array 1, one end of freedom of entry propagation zone 2, disperse again and arrive Free propagation district reflection end plane 4, rear arrival Free propagation district reflection end curved surface 7 is reflected by Free propagation district reflection end plane 4, reflected by Free propagation district reflection end curved surface 7, reflected light arrives detector array 10 by output waveguide array 9 again.Under fixed polarisation state and incident wavelength, when the incident beam of angle a certain in angular range produces surface plasma body resonant vibration through Free propagation district reflection end plane 4, luminous energy will be coupled to plasma wave, thus the energy of reflection light of respective angles sharply declines, folded light beam propagates into Free propagation district reflection end curved surface through Free propagation district again, the reflected light of another special angle will produce surface plasma body resonant vibration, the energy of the light of this angle sharply declines, detector array 10 is arrived again through output waveguide array 9, detector array 10 will detect the distribution of energy of reflection light, the light of different incidence angles degree, waveguide in corresponding different output waveguide arrays 9, there are two resonance peaks (i.e. reflection strength minimum) in the waveguide corresponding at two resonance angle.By the gap of these two resonance peaks, the refractive index of two measured matters can be obtained simultaneously.Optical waveguide material used is silicon oxynitride, and core material is silicon oxynitride, and upper under-clad layer is silicon dioxide.
Can ensure that single mode inputs by the structure reasonably arranging input waveguide, and the incident light of the dispersion angle of different range can be obtained behind light freedom of entry propagation zone 2.Fig. 6 gives incident waveguide end structure schematic diagram.
Incident light arrives dielectric-metal-measured matter interface through planar waveguide Free propagation district 2, and produce evanescent wave by total reflection, the propagation constant of evanescent wave is:
； （1）
Plasma surface wave propagation constant is:
； （2）
When
time, that is:
； （3）
In formula:
for the propagation constant of evanescent wave,
for incident angle,
for the propagation constant of surface plasma wave,
for sensor chip waveguiding structure effective dielectric constant,
for the specific inductive capacity of metal sensor layer material,
for the specific inductive capacity of measured matter.
for sensor chip waveguiding structure effective refractive index.
When there is the incident angle meeting upper (3) formula and existing, will excitating surface plasma ripple.The energy of reflection light of respective angles sharply declines, folded light beam propagates into the second Free propagation district reflection end plane again through Free propagation district, the reflected light of another special angle will produce surface plasma body resonant vibration, the energy of the light of this angle sharply declines, detector array 10 is arrived again through output waveguide array 9, detector array 10 will detect the distribution of energy of reflection light, the light of different incidence angles degree, waveguide in corresponding different output waveguide array 9, there are two resonance peaks (i.e. reflection strength minimum) in the waveguide corresponding at two resonance angle.
Fig. 7 is that the reflectivity of two kinds of different measured matters is with incident angle variation diagram.Fig. 8 is with incident angle variation diagram at the reflectivity of measured matter of the same race.
Select the slab waveguide structure based on silicon oxynitride, sandwich layer height 1000nm, duct width 1400nm, core refractive rate 1.52, substrate and top covering refractive index are 1.444, are operated in TE
00mould, corresponding incident waveguide end broadening is 4
m, thus can to obtain incident angle range be 11.88 °.
Metal level selects ag material, compared to gold copper-base alloy, use ag material can obtain higher detection accuracy, and sensitivity is constant.When 850nm wavelength, specific inductive capacity is-32.222-1.7274i.For obtaining best effect, needing to consider there is sharp-pointed absorption peak at the angle place of excitating surface plasma ripple, and having less reflectivity.As shown in Figure 9, definition sensitivity (sensitivity) and detection accuracy (detection-accuracy), be respectively:
； （4）
； （5）
the side-play amount of resonance angle,
the refringence of measured matter,
it is half-wave angular breadth.
Select 850nm wavelength, can obtain sensitivity is 103.8 °/RIU(refractive index unit), detection accuracy is 60.6/rad, if design output waveguide array angle intervals is 0.02 °, subsequent corrosion is 1100
during m, then detectable minimum refractive index unit is 1.28 × 10
-4rIU.
Compared with the surface plasma body resonant vibration optical waveguide sensor of traditional plane reflection, sensitivity improves 50%.
Above-described embodiment is used for explaining and the present invention is described, instead of limits the invention.In the protection domain of spirit of the present invention and claim, any amendment make the present invention and change, all fall into protection scope of the present invention.
Claims (2)
1. the surface plasma body resonant vibration optical waveguide sensor based on double-reflecting face, it is characterized in that, it comprises: input waveguide array (1), Free propagation district (2), the first metal sensing layer (3), the second metal sensing layer (6), output waveguide array (9) and detector array (10); Wherein, described Free propagation district (2) have Free propagation district reflection end plane (4) and Free propagation district reflection end curved surface (7); First metal sensing layer (3) is plated in Free propagation district reflection end plane (4), second metal sensing layer (6) is plated in Free propagation district reflection end curved surface (7), first metal sensing layer (3) etched the first deep etching groove (5), the second metal sensing layer (6) etched the second deep etching groove (8); The two ends of output waveguide array (9) are respectively Free propagation district (2) and detector array (10); Input waveguide array (1), output waveguide array (9), detector array (10) and Free propagation district (2) are integrally formed.
2. according to claim 1 based on the surface plasma body resonant vibration optical waveguide sensor of double-reflecting face, it is characterized in that, the material of described first metal sensing layer (3) and the second metal sensing layer (6) is silver.
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101131356A (en) * | 2007-09-20 | 2008-02-27 | 中国地质大学（武汉） | Double-channel self-adapting surface plasma resonance refractive index optical element |
| CN101477044A (en) * | 2009-01-19 | 2009-07-08 | 浙江大学 | Surface plasma resonance sensor |
| CN102519911A (en) * | 2011-11-11 | 2012-06-27 | 浙江大学 | Optical waveguide sensor based on surface plasma resonance |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101131356A (en) * | 2007-09-20 | 2008-02-27 | 中国地质大学（武汉） | Double-channel self-adapting surface plasma resonance refractive index optical element |
| CN101477044A (en) * | 2009-01-19 | 2009-07-08 | 浙江大学 | Surface plasma resonance sensor |
| CN102519911A (en) * | 2011-11-11 | 2012-06-27 | 浙江大学 | Optical waveguide sensor based on surface plasma resonance |
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